Cleanroom facilities
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- HITACHI GLOBAL LIFE SOLUTIONS INC
- Filing Date
- 2023-02-10
- Publication Date
- 2026-05-26
Smart Images
Figure 0007866082000001 
Figure 0007866082000002 
Figure 0007866082000003
Abstract
Description
Technical Field
[0001] The present invention relates to a clean room facility.
Background Art
[0002] In the fields of regenerative medicine, pharmaceutical production, etc., clean rooms with high air cleanliness are used. Regarding such clean rooms, for example, Patent Document 1 describes that "among the first fan and the second fan, one controlled based on the detection value of the pressure sensor and the other controlled at a constant speed are switchable."
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
Problems to be Solved by the Invention
[0004] In the technology described in Patent Document 1, it is possible to switch a predetermined clean room from one of a positive pressure chamber and a negative pressure chamber to the other, but there is room for improvement in terms of air conditioning of the clean room.
[0005] Therefore, an object of the present invention is to provide a clean room facility that appropriately performs air conditioning of a clean room.
Means for Solving the Problems
[0006] To solve the aforementioned problems, the cleanroom facility according to the present invention comprises: a plurality of cleanrooms provided inside a predetermined room; a first air handling unit for adjusting the temperature of the air supplied to the predetermined room; a chamber provided as a single common space above the ceiling of the plurality of cleanrooms, through which air is guided from the predetermined room; an air supply fan provided in each of the plurality of cleanrooms for supplying air from the chamber to the cleanroom; and a duct shaft provided on the outside of the side wall of at least one of the cleanrooms. Among the duct shafts, those facing the predetermined room have their upper ends closed so as not to communicate with the chamber, and are further provided with maintenance covers. Air is guided from the cleanroom to the duct shafts that do not communicate with the chamber, and exhausted through the duct shafts, with the destination of the exhaust from the cleanrooms through the duct shafts being the predetermined room. [Effects of the Invention]
[0007] According to the present invention, it is possible to provide a cleanroom facility that properly controls the air conditioning of the cleanroom. [Brief explanation of the drawing]
[0008] [Figure 1] This is an explanatory diagram showing the layout of each room in the cleanroom facility according to the first embodiment. [Figure 2] This is a schematic cross-sectional view of a cleanroom facility according to the first embodiment. [Figure 3] This is an explanatory diagram showing an example of sterilization procedures for a workroom and an anteroom in a cleanroom facility according to the first embodiment. [Figure 4] This is an explanatory diagram showing another example of the sterilization process for the workroom and anteroom in a cleanroom facility according to the first embodiment. [Figure 5] This is a schematic cross-sectional view of a cleanroom facility according to a first modification of the first embodiment. [Figure 6]This is a schematic cross-sectional view of a cleanroom facility according to a second modified example of the first embodiment. [Figure 7] This is a schematic cross-sectional view of a cleanroom facility according to the second embodiment. [Figure 8] This is a schematic cross-sectional view of a cleanroom facility relating to a comparative example. [Modes for carrying out the invention]
[0009] ≪First Embodiment≫ <Configuration of the cleanroom facility> Figure 1 is an explanatory diagram showing the layout of each room in the cleanroom facility 100 according to the first embodiment. In Figure 1, the direction of airflow is indicated by arrows. The cleanroom facility 100 is a facility that adjusts the temperature, pressure, cleanliness, etc., of multiple cleanrooms, such as anterooms R2 and R4 and workrooms R3 and R5. Such a cleanroom facility 100 is used, for example, for cell culture processing and the manufacture of sterile preparations (vaccines, injectable drugs, eye drops, etc.). In the example in Figure 1, the cleanroom facility 100 has a large room R1 (a designated room), as well as anterooms R2 and R4 (cleanrooms) and workrooms R3 and R5 (cleanrooms).
[0010] Large room R1 is a relatively large room where predetermined pretreatment and analysis are performed. Although not shown in the diagram, the control panels, monitoring devices, and utility devices used in workrooms R3 and R5 may also be installed in large room R1. The following description assumes that large room R1 is a cleanroom, but large room R1 may also be a regular room. A regular room is, for example, a room whose cleanliness level is not controlled in the same way as a cleanroom.
[0011] As shown in Figure 1, doors 21-23 are provided at designated locations in the large room R1 (three locations in the example in Figure 1) for opening and closing when people enter and exit or when equipment is brought in or removed. In addition, air outlets H1 and H2 (first air outlets) are provided on the ceiling of the large room R1 from which air whose temperature has been adjusted by an air handling unit 30 (first air handling unit: see Figure 2) is blown out.
[0012] Ducts D1 and D2 are provided at designated locations in the large room R1 (two corners in Figure 1). Duct D1 is provided with an intake port H3 (second intake port) into which air is drawn from the large room R1 toward the air handling unit 30 (first air handling unit: see Figure 2). Similarly, the other duct D2 is also provided with an intake port H4. As shown in Figure 1, a fan F1 is installed at the intake port H3 of duct D1. Fan F1 is a blower that sends air from the large room R1 through duct D1 to the air handling unit 30 (see Figure 2). Similarly, a fan F2 is also installed in the other duct D2. Note that fans F1 and F2 are not mandatory, and if these fans F1 and F2 cannot be provided, for example, duct D3 may be connected to the wall near fan F1 and used in place of duct D1, or the configuration may simply be such that fan F1 is not provided.
[0013] Inside the large room R1 (a designated room), there are multiple cleanrooms: anterooms R2 and R4, and workrooms R3 and R5. Anteroom R2 is used, for example, as an airlock to suppress sample contamination. Anteroom R2 may also be used for undressing, dressing, or predetermined pre-treatment. In the example in Figure 1, a door 24 allows people to enter and exit between anteroom R2 and large room R1. The cleanliness of anteroom R2 may be higher than that of large room R1, or it may be the same as that of large room R1. In other words, the cleanliness of anteroom R2 is equal to or higher than that of large room R1.
[0014] The working room R3 is a clean room where sample preparation and the like are carried out. Such "samples" include, for example, cells and sterile preparations, but are not limited thereto. Since sample adjustment and the like are carried out in the working room R3 in this way, the cleanliness of the working room R3 is higher than that of the anteroom R2 and the large room R1. When the large room R1 is a clean room, the cleanliness of the working room R3 is higher than or equal to that of the anteroom R2 and the large room R1. Also, a door 25 is provided between the anteroom R2 and the working room R3 so that people can enter and exit.
[0015] Regarding the room pressure of each clean room, in order to suppress sample contamination, for example, the room pressure of the anteroom R2 may be made lower than that of the large room R1 or the working room R3. Thereby, it is possible to suppress dust from entering the working room R3 from the large room R1 through the anteroom R2 in the process of opening and closing the doors 24 and 25 and people coming and going. Also, it is possible to suppress the outflow of the sample (aerosol) from the working room R3 to the large room R1 through the anteroom R2. The room pressures of the large room R1 and the working room R3 may be made equal to each other, or one may be made higher than the other. In addition, even when the room pressure of the anteroom R2 is higher than that of the large room R1 or the working room R3, the anteroom R2 functions as an airlock. The same applies to the room pressures of another anteroom R4 and a working room R5.
[0016] In the example of FIG. 1, the anteroom R2 is adjacent to another anteroom R4 through the wall W1. Similarly, the working room R3 is adjacent to another working room R5 through the wall W1. That is, the anteroom R2 and R4 are partitioned by the wall W1, and the working room R3 and R5 are also partitioned by the wall W1.
[0017] In addition to each of the above-described components, the clean room facility 100 includes duct shafts DS1, DS2, DS3, and DS4 shown in FIG. 1. The duct shaft DS1 is a flow path for guiding air from the workroom R3 to the large room R1, and extends cylindrically in the vertical direction (see also FIG. 2). This duct shaft DS1 is provided in the gap between the workroom R3 (a predetermined clean room) and the large room R1 (a predetermined room). In the example of FIG. 1, the duct shaft DS1 is provided at one of the corners of the workroom R3. Also, from another perspective, the duct shaft DS1 is provided outside the side wall of the workroom R3.
[0018] Note that a part of the side wall of the workroom R3 may form a part of the duct shaft DS1. Also, a cylindrical duct (not shown) may be fitted into the gap between the workroom R3 and the large room R1 to form the duct shaft DS1. The same applies to the other duct shafts DS2, DS3, and DS4. As shown in FIG. 1, a fan filter unit 11 for exhausting air from the workroom R3 to the large room R1 is installed in the duct shaft DS1.
[0019] Another duct shaft DS2 is a flow path for guiding air from the ante-chamber R2 and the workroom R3 to the large room R1, and extends cylindrically in the vertical direction (see also FIG. 2). As shown in FIG. 1, the duct shaft DS2 is provided in the gap between the ante-chamber R2 and the workroom R3 (that is, between clean rooms). Also, from another perspective, it can be said that the duct shaft DS2 is provided in the gap between the workroom R3 (a predetermined clean room) and the large room R1 (a predetermined room). Also, the duct shaft DS2 is provided outside the side wall of the ante-chamber R2 and outside the side wall of the workroom R3. In the duct shaft DS2, in addition to the fan filter units 12 and 13 for exhausting air from the workroom R3 to the large room R1, a fan filter unit 14 for exhausting air from the ante-chamber R2 to the large room R1 is installed.
[0020] The anteroom R4, workroom R5, and duct shafts DS3 and DS4 shown in Figure 1 are arranged in a roughly symmetrical manner in plan view with respect to the anteroom R2, workroom R3, and duct shafts DS1 and DS2, with respect to wall W1, so their explanation will be omitted. Note that the layout and number of cleanrooms in Figure 1 are just an example and are not limited to this, for example, by rotating the layout by 90°.
[0021] Figure 2 is a schematic cross-sectional view of the cleanroom facility 100. Figure 2 is roughly a cross-sectional view of line II-II in Figure 1, but in order to clearly show the airflow, the ducts D1 and D2 in the large room R1 (see also Figure 1), as well as the air handling unit 30, are also shown in Figure 2.
[0022] As mentioned above, ducts D1 and D2 are air conduits through which air exhausted from the large room R1 flows, and they extend vertically. The air flowing from the large room R1 through ducts D1 and D3 in sequence and the air flowing from the large room R1 through ducts D2 and D4 in sequence merge, and the merged air is guided to the intake side of the air handling unit 30 via duct D5.
[0023] As shown in Figure 2, the cleanroom facility 100 includes an air handling unit 30 (first air handling unit), chambers C1 and C2, a temperature sensor 51, and pressure sensors 61 to 64. In addition to the above configuration, the cleanroom facility 100 also includes dampers 71 and 72 (first dampers), other dampers 81 to 84 (second dampers), fan filter units 1 to 8 on the supply side, and fan filter units 11 to 18 on the exhaust side.
[0024] The air handling unit 30 is a device that adjusts the temperature, humidity, etc., of the air supplied to the large room R1 (a designated room). As shown in Figure 2, the air handling unit 30 includes a filter 31, a cooling coil 32, a fan 33, and an inverter 34. The filter 31 collects dust from the air flowing from the large room R1 to the cooling coil 32 via a duct D5, etc. The cooling coil 32 is a heat exchanger in which heat exchange takes place between the air that has passed through the filter 31 and a refrigerant flowing through a heat transfer tube (not shown). It is also possible to add a humidification function to the heat exchanger to adjust the humidity of the air supplied to the large room R1. The fan 33 is a blower that sends the air that has undergone heat exchange in the cooling coil 32 to the large room R1 via a duct D6. The inverter 34 drives the motor (not shown) of the fan 33 to a predetermined setting.
[0025] As shown in Figure 2, the outlet side of fan 33 is connected to the air outlets H1 and H2 in the ceiling of the large room R1 via duct D6. Air outlet H1 is equipped with a filter 41 for collecting dust from the air (the same applies to the other air outlet H2). Note that if the large room R1 is used as a normal room and not a cleanroom, there is no particular need to install filters 41 and 42.
[0026] The air cooled by the air handling unit 30 then flows through duct D6 and is blown out into the large room R1 via outlets H1 and H2. As shown in Figure 1, a damper 10 is installed in duct D6. The damper 10 is set to a predetermined opening, for example, during the trial run of the air handling unit 30, and is maintained at that predetermined opening during subsequent air conditioning operation.
[0027] The temperature sensor 51 is a sensor that detects the temperature of the large room R1 and is installed at a predetermined location in the large room R1. The value detected by the temperature sensor 51 is used to control the air handling unit 30. In addition, although not shown in the figures, a humidity sensor may be provided in addition to the temperature sensor 51 so that the temperature and humidity of the large room R1 can be adjusted by the air handling unit 30.
[0028] The pressure sensor 61 is a sensor that detects the room pressure in the work chamber R3 and is installed in the work chamber R3. The value detected by the pressure sensor 61 is used to control the fan filter units 11-13 on the exhaust side of the work chamber R3. Note that the fan filter unit 13 at the rear of the duct shaft DS2 (see Figure 1) and the fan filter unit 16 at the rear of another duct shaft DS3 (see Figure 1) are not shown in Figure 2.
[0029] The pressure sensor 62 is a sensor that detects the chamber pressure in the front chamber R2 and is installed in the front chamber R2. The value detected by the pressure sensor 62 is used to control the exhaust fan filter unit 14 and other components of the front chamber R2. The same applies to the pressure sensor 63 in the remaining front chamber R4 and the pressure sensor 64 in the work chamber R5.
[0030] Chamber C1, shown in Figure 2, is the space above the ceilings of workroom R3 and anteroom R2. In other words, Chamber C1 is provided as a single common space above the ceilings of multiple cleanrooms, such as workroom R3 and anteroom R2. Another chamber C2, also shown in Figure 2, is the space above the ceilings of anteroom R4 and workroom R5. These two chambers C1 and C2 are adjacent to each other, separated by a wall W1. This wall W1 separates chambers C1 and C2, as well as anterooms R2 and R4, and also separates workrooms R3 and R5, as mentioned above (see Figure 1).
[0031] The grille G1 shown in Figure 2 is a component that guides air from the large chamber R1 to the damper 71 while preventing the damper 71 from being exposed to the large chamber R1. The grille G1 may have a configuration in which multiple blades (louvers) are arranged in parallel at predetermined intervals, or it may have a mesh configuration. The gaps between the blades of the grille G1 (multiple holes in the case of a mesh configuration) function as a "first intake port" into which air is drawn from the large chamber R1 (a predetermined room) toward the chamber C1. This "first intake port" is located near the chamber C1. The same applies to the other grille G2 on the right side of Figure 2.
[0032] Incidentally, in Figure 2, grille G1 is shown on the left side of the page, and another grille G2 is shown on the right side of the page. However, grilles G1 and G2 may also be provided on the front side where doors 24 and 26 (see Figure 1) are located.
[0033] Damper 71 (first damper) switches between communication and isolation between the large room R1 (a designated room) and chamber C1. This damper 71 is located on the air inlet side of chamber C1, facing the grill G1. Similarly, damper 72 is also provided on the air inlet side of another chamber C2. It is preferable to use non-leak dampers (airtight dampers) that have high airtightness when closed as these dampers 71 and 72. This prevents sterilization gas from flowing into the large room R1 by closing dampers 71 and 72 when sterilization is performed in the work rooms R3 and R5 or the anterooms R2 and R4.
[0034] Furthermore, dampers 71 and 72 are kept open during normal use of the cleanroom facility 100. In other words, during normal use of the cleanroom facility 100, each chamber C1 and C2 is connected to the large room R1. The air from the large room R1 is then guided to chamber C1 sequentially through grille G1 and damper 71 (which is kept open). Similarly, the air from the large room R1 is then guided to the other chamber C2 sequentially through grille G2 and damper 72 (which is kept open).
[0035] Chamber C1 is composed of the ceilings of the workroom R3 and anteroom R2, an upper plate C1a, and side plates C1b. The upper plate C1a is positioned higher than the ceilings of the workroom R3 and anteroom R2 and is approximately parallel to these ceilings. The side plates C1b are plates that connect the edges of the ceilings of the workroom R3 and anteroom R2 to the edges of the upper plate C1a, and extend in the vertical direction. The same applies to the other chamber C2.
[0036] In the following, a structure containing multiple cleanrooms sharing a common chamber will be referred to as a "clean unit." In the example in Figure 2, the structure including the workroom R3 and anteroom R2, which share the same chamber C1 in the ceiling space, is designated as the first clean unit U1. The structure including the anteroom R4 and workroom R5, which share the same chamber C2 in the ceiling space, is designated as the second clean unit U2. Although the first clean unit U1 and the second clean unit U2 are adjacent to each other via a wall W1, they may be configured to be separated from each other.
[0037] The fan filter units 1-3 shown in Figure 2 are devices that supply air from chamber C1 to workroom R3 and are embedded in the ceiling of workroom R3. Fan filter unit 1 comprises an air supply fan 1a and a filter 1b. The air supply fan 1a is a blower that supplies air from chamber C1 to workroom R3 (cleanroom).
[0038] Filter 1b collects dust from the air flowing from the supply fan 1a towards the workroom R3 and is installed on the outlet side of the supply fan 1a. Examples of such filters 1b include HEPA (High Efficiency Particulate Air Filter) and ULPA (Ultra Low Penetration Air Filter). The remaining fan filter units 2 and 3, which are used for supplying air to the workroom R3, have a similar configuration.
[0039] The fan filter unit 4 is a device that supplies air from chamber C1 to the anteroom R2. The fan filter unit 4 consists of an air supply fan 4a and a filter 4b, and is embedded in the ceiling of the anteroom R2. In this way, each of the multiple "cleanrooms" is equipped with an "air supply fan". The other fan filter units 5 to 8 on the air supply side have a similar configuration.
[0040] The fan filter unit 11 shown in Figure 2 is a device that exhausts air from the workroom R3 and comprises an exhaust fan 11a and a filter 11b. The exhaust fan 11a is a blower that exhausts air from the workroom R3 and is installed on the duct shaft DS1. In other words, an opening is provided at a predetermined location on the duct shaft DS1 facing the workroom R3, and the fan filter unit 11 is fitted into this opening. The filter 11b collects dust from the air flowing from the workroom R3 toward the exhaust fan 11a and is installed on the intake side of the exhaust fan 11a. The other fan filter units 12 to 18 on the exhaust side have a similar configuration.
[0041] As shown in Figure 2, the duct shaft DS1 has its upper end closed and is not connected to the chamber C1. The duct shaft DS1 is also connected to the workroom R3 via the exhaust fan 11a. Air is drawn from the workroom R3 (cleanroom) to the duct shaft DS1, which is not connected to the chamber C1, and exhausted through the duct shaft DS1. In other words, air is exhausted from the workroom R3 (cleanroom) connected to the duct shaft DS1, via the duct shaft DS1, which is not connected to the chamber C1. In the example in Figure 2, the exhaust destination when air is exhausted from the workroom R3 via the duct shaft DS1 is the large room R1 (a designated room). The same applies to exhaust through the other duct shafts DS2, DS3, and DS4.
[0042] The damper 81 (second damper) shown in Figure 2 switches between communication and isolation between the duct shaft DS1 and the large room R1 (a designated room), and is installed on the side of the duct shaft DS1 facing the large room R1. The damper 82 (second damper) shown in Figure 2 switches between communication and isolation between the duct shaft DS2 and the large room R1. The same applies to the other dampers 82, 83, and 84. It is preferable to use non-leak dampers (airtight dampers) with high airtightness in the closed state as these dampers 81 to 84. This allows, for example, when sterilization is performed in the work rooms R3, R5 or the anterooms R2, R4, closing the dampers 81 to 84 prevents sterilization gas from flowing into the large room R1. The dampers 81 to 84 are kept open during normal use of the cleanroom facility 100.
[0043] The fan filter unit 12 shown in Figure 2 and the fan filter unit 13 shown in Figure 1 are devices that exhaust air from the workroom R3 and are installed on the duct shaft DS2. Another fan filter unit 14 is a device that exhausts air from the anteroom R2 and is also installed on the duct shaft DS2.
[0044] As described above, the duct shaft DS2 is installed in the gap between the work chamber R3 and the anteroom R2. This duct shaft DS2 also does not communicate with the chamber C1 because its upper end is closed. The duct shaft DS2 communicates with the work chamber R3 via an exhaust fan 12a, and also with the anteroom R2 via another exhaust fan 14a. When these exhaust fans 12a to 14a are driven, the air from the work chamber R3 and the anteroom R2 is exhausted into the large chamber R1 sequentially through the duct shaft DS2 and the damper 82 (open) (see also Figure 1). The downward arrow near the damper 82 in Figure 2 indicates the airflow toward the large chamber R1.
[0045] The intake fan filter units 1-8 and exhaust fan filter units 11-18 are controlled by a control device (not shown). Note that each of the fan filter units 1-8 and 11-18 may have a built-in control device, or multiple fan filter units may be connected to a single control device via wiring.
[0046] The rotational speeds of the exhaust fans 11a, 12a, and 13a (see also Figure 1) are controlled, for example, to maintain the room pressure in the workroom R3 at a predetermined set pressure (target pressure). The rotational speeds of the supply fans 1a, 2a, and 3a may be constant, or they may be adjusted as appropriate based on the room pressure in the workroom R3. The same applies to the room pressure control of the remaining anterooms R2 and R4 and the workroom R5. Furthermore, since the cleanroom facility 100 has a generally symmetrical configuration with respect to the wall W1, the configurations related to the air conditioning of the anteroom R4 and the workroom R5 will not be explained.
[0047] <Comparative Example> Figure 8 is a schematic cross-sectional view of the cleanroom facility 200 related to the comparative example. The comparative example in Figure 8 differs from the first embodiment (see Figure 2) in that a damper is not provided, and duct shafts DS1 and DS2 communicate with chamber C1, while duct shafts DS3 and DS4 communicate with another chamber C2. Furthermore, the comparative example in Figure 8 differs from the first embodiment in that duct shafts DS1 and DS4 do not communicate with the large room R1. Also, the comparative example in Figure 8 differs from the first embodiment (see Figure 2) in that duct shaft DS2 communicates with the large room R1 via opening A1, and the remaining duct shaft DS3 communicates with the large room R1 via another opening A2.
[0048] In the comparative example configuration shown in Figure 8, for example, when the exhaust-side fan filter unit 11 is driven, the air that flows from the work chamber R3 into the duct shaft DS1 is returned to the chamber C1. Also, when the exhaust-side fan filter units 12-14 are driven, some of the air that flows out from the work chamber R3 and anteroom R2 into the duct shaft DS2 is exhausted to the large room R1 through opening A1, but the remaining air is returned to the chamber C1 via duct shaft DS2.
[0049] As a result, as shown by the white arrows in Figure 8, for example, the air that has absorbed heat in the workroom R3 is returned to the chamber C1 via the duct shaft DS1, and most of this air is then supplied to the workroom R3 by the supply-side fan filter units 1-3. When such air circulation (closed loop) occurs, the flow of conditioned air (air cooled by the air handling unit 30) that has been guided from the large room R1 to the chamber C1 is obstructed when it is supplied to the workroom R3. As a result, the air conditioning efficiency in maintaining the workroom R3 at a predetermined target temperature decreases, making it difficult to maintain the workroom R3 at the target temperature. The same can be said for the air conditioning of the other anterooms R2 and R4 and the workroom R5.
[0050] In contrast, in the first embodiment, the duct shafts DS1 and DS2 of the clean unit U1 include some that are not connected to the chamber C1. In the example in Figure 2, neither duct shaft DS1 nor DS2 is connected to the chamber C1. The same can be said for the duct shafts DS3 and DS4 of the other clean unit U2. This suppresses the occurrence of the closed-loop flow described above. Therefore, the air conditioning efficiency of the work chambers R3 and R5 and the anterooms R2 and R4 can be improved. Next, we will explain the normal operation procedures and sterilization procedures for the cleanroom facility 100 in order. The normal operation procedures will be explained primarily using Figure 2.
[0051] <Processing during normal use> During normal use of the cleanroom facility 100, in addition to the air handling unit 30, the supply-side fan filter units 1-8 and exhaust-side fan filter units 11-18 are driven to predetermined positions. Also, the damper 71 on the air inlet side of chamber C1 is open, and the large room R1 and chamber C1 are in communication via damper 71 (the same applies to the other damper 72). Furthermore, the damper 81 provided on the duct shaft DS1 is open, and the duct shaft DS1 and large room R1 are in communication via damper 81 (the same applies to the other dampers 82-84). In this way, when air conditioning is being performed in the cleanrooms such as the workrooms R3 and R5 and the anterooms R2 and R4, dampers 71 and 72 (first dampers) and dampers 81-84 (second dampers) are maintained in the open position.
[0052] For example, some of the air guided from the large room R1 to the chamber C1 via the damper 71 is then guided to the workroom R3, and further, some of the air from the workroom R3 is exhausted to the large room R1 sequentially via the duct shaft DS1 and damper 81. As mentioned above, since the duct shaft DS1 is not connected to the chamber C1, a closed-loop flow of air is almost never generated. Therefore, the air conditioning of the workroom R3 can be performed with high efficiency. The same applies to the air conditioning of the other anterooms R2 and R4 and the workroom R5.
[0053] <Sterilization Procedures> For example, a sample may be spilled while a person is working in workroom R3. Furthermore, it is desirable to sterilize each cleanroom regularly to maintain a clean working environment. Therefore, during sterilization, the procedures shown in Figures 3 and 4 are performed as appropriate.
[0054] Figure 3 is an explanatory diagram showing examples of sterilization procedures in the workroom R3 and anteroom R2. The sterilization gas generator 91 shown in Figure 3 is a device that generates a predetermined sterilization gas (such as hydrogen peroxide gas). For example, if the sterilization gas generator 91 is placed in the workroom R3 and the sterilization gas generator 91 is activated with all doors closed, sterilization gas will be generated from the sterilization gas generator 91.
[0055] Furthermore, since chambers C1 and C2 are separated by wall W1, for example, sterilization gas generated by the sterilization gas generator 91 will not enter the adjacent chamber C2 from the work chamber R3 through chamber C1. Therefore, even if the supply-side fan filter units 15-18 and exhaust-side fan filter units 15-18 of other antechambers R4 and work chambers R5 continue to operate while the work chamber R3 and antechamber R2 are being sterilized, there will be no particular problem, and there will also be no particular problem even if the dampers 72, 83, and 84 remain open.
[0056] Meanwhile, during sterilization of the workroom R3 and anteroom R2, the fan filter units 1-4 on the supply side of chamber C1 are kept in a stopped state, and the fan filter units 11-14 that exhaust air from the workroom R3 and anteroom R2 are also kept in a stopped state. Furthermore, when sterilization of the workroom R3 and anteroom R2 (multiple cleanrooms) is being performed using sterilization gas, damper 71 (first damper) and dampers 81, 82 (second dampers) are kept in a closed state.
[0057] For example, the sterilization gas filling the workroom R3 flows into the chamber C1 via the stopped supply-side fan filter units 1-3, and further flows into the anteroom R2 via the remaining supply-side fan filter unit 4. In addition, the sterilization gas filling the workroom R3 flows into the duct shaft DS1 via the stopped exhaust-side fan filter unit 11, and also into the duct shaft DS2 via fan filter unit 12, etc. Furthermore, the sterilization gas flows from the duct shaft DS2 into the anteroom R2 via the exhaust-side fan filter unit 14. In this way, by driving the sterilization gas generator 91 in a single cleanroom (workroom R3 in the example of Figure 3), sterilization of the workroom R3, anteroom R2, and duct shafts DS1 and DS2, which all share a common chamber C1, can be performed all at once.
[0058] As described above, since the damper 71 on the air inlet side of chamber C1 is closed, the space between the large room R1 and chamber C1 is blocked by the damper 71. Therefore, leakage of sterilization gas from chamber C1 to large room R1 can be prevented. Also, since the damper 81 provided on duct shaft DS1 is closed, the space between large room R1 and duct shaft DS1 is blocked by the damper 81. Therefore, leakage of sterilization gas into large room R1 via duct shaft DS1 can be prevented. Similarly, leakage of sterilization gas into large room R1 via the other duct shaft DS2 can also be prevented.
[0059] When sterilizing the first clean unit U1, instead of the example in Figure 3, the sterilization gas generator 91 may be placed in the anteroom R2. Alternatively, the sterilization gas generator 91 may be placed in both the workroom R3 and the anteroom R2. In short, when sterilizing multiple cleanrooms, it is preferable to place the sterilization gas generator 91 in at least one of the cleanrooms.
[0060] Furthermore, even during sterilization of the workroom R3 and anteroom R2, the air handling unit 30 and fans F1 and F2 can be kept running. This allows the main room R1 to be maintained at a predetermined temperature even during sterilization. Also, for example, when the sterilization gas generator 91 is located in the workroom R3, the air conditioning for the anteroom R4 and workroom R5, which have a different chamber C2 than the chamber C1 in the ceiling space above the workroom R3, can be kept running using the fan filter units 5-8 and 15-18 even during sterilization of the workroom R3, etc. Therefore, sample preparation and other work can be continued in the anteroom R4 and workroom R5.
[0061] Figure 4 is an explanatory diagram showing another example of the sterilization process in the workroom R3 and anteroom R2. As shown in Figure 4, a sterilization gas generator 92 may be placed outside the workroom R3 (either inside or outside the large room R1), and sterilization gas may be supplied from this sterilization gas generator 92 to the workroom R3 via a hose 93. In other words, when sterilizing multiple cleanrooms such as the workroom R3 and the anteroom R2, sterilization gas may be supplied from the sterilization gas generator 92 to at least one of the multiple cleanrooms from the outside via a hose 93. This configuration also achieves the same effect as in the case of Figure 3. In addition to the hose 93 shown in Figure 4, an exhaust hose (not shown) for exhausting air from the workroom R3 may also be connected to the sterilization gas generator 92. In this case, for example, air detoxified with catalyst gas (air with a sterilization gas concentration below a predetermined value) may be exhausted through the exhaust hose (not shown). Alternatively, instead of a hose, the sterilization gas may be circulated through predetermined piping or ducts.
[0062] In addition, a separate decomposition device (not shown) equipped with a predetermined catalytic filter (not shown) for neutralizing the sterilization gas may be provided. Alternatively, a catalytic filter may be provided downstream of the exhaust dampers 81 and 82 to reduce the concentration of the sterilization gas using the catalyst.
[0063] <Effects> According to the first embodiment, for example, since the duct shaft DS1 (see Figure 2) is not connected to the chamber C1, it is possible to prevent air from circulating through the duct shaft DS1 and the chamber C1 (creating a closed loop). Therefore, the air conditioning of the workroom R3 can be properly controlled, and the air conditioning efficiency when cooling the workroom R3 can be improved. The same applies to the air conditioning of the other anterooms R2 and R4 and the workroom R5.
[0064] Furthermore, by providing a duct shaft DS1 between the workroom R3 and the large room R1, for example, it becomes possible to install a damper 81 on the duct shaft DS1. Therefore, by closing the damper 81 during sterilization of the workroom R3, etc., it is possible to prevent sterilization gas from leaking into the large room R1. In addition, by installing the exhaust-side fan filter unit 11 inside the duct shaft DS1, the fan filter unit 11 can be made invisible from the large room R1. This enhances the aesthetic design of the cleanroom facility 100.
[0065] Furthermore, since the anterooms R2 and R4 and the workrooms R3 and R5 are located inside the large room R1, it becomes easier to, for example, add new cleanrooms or change the layout inside the large room R1.
[0066] ≪First Modification of the First Embodiment≫ Figure 5 is a schematic cross-sectional view of a cleanroom facility 100A according to a first modified example of the first embodiment. Note that the cleanroom facility 100A shown in Figure 5 differs from the first embodiment (see Figure 2) in that duct shaft DS2 communicates with chamber C1, and duct shaft DS3 communicates with another chamber C2. Also, the cleanroom facility 100A shown in Figure 5 differs from the first embodiment in that dampers are not provided on duct shafts DS2 and DS3, and neither duct shafts DS2 nor DS3 communicates with the large room R1. Note that other aspects are the same as in the first embodiment, so the explanation of overlapping parts will be omitted.
[0067] As shown in Figure 5, for example, in the first clean unit U1, the duct shaft DS2 is in communication with the chamber C1, but the other duct shaft DS1 is not in communication with the chamber C1. Therefore, at least in the flow path via the duct shaft DS1, the occurrence of closed-loop airflow can be suppressed. Similarly, in the flow path via the duct shaft DS4 of the second clean unit U2, almost no closed-loop airflow occurs. Therefore, although the air conditioning efficiency is slightly lower than in the first embodiment, the air conditioning of the workroom R3 and other areas can be properly performed.
[0068] Furthermore, the air that flows from the work chamber R3 into the duct shaft DS2 is returned to the chamber C1 via the duct shaft DS2 (recirculated air). Therefore, the highly clean air supplied to the chamber C1 can be reused.
[0069] Note that the combinations of communication and non-communication between the predetermined duct shafts and chambers C1 and C2 are not limited to the example in Figure 5. For example, duct shaft DS1 may communicate with chamber C1, another duct shaft DS4 may communicate with chamber C2, and the remaining duct shafts DS2 and DS3 may not communicate with chambers C1 and C2. Even with such a configuration, air conditioning of the workroom R3, etc., can be properly performed. In short, any configuration that includes at least one duct shaft among the multiple duct shafts DS1, DS2, DS3, and DS4 that does not communicate with chambers C1 and C2 is acceptable.
[0070] Furthermore, while Figure 5 shows an example where dampers are not installed on the duct shafts DS2 and DS3 that communicate with chamber C1, this is not the only option. That is, dampers (not shown) may be installed on duct shafts DS2 and DS3, respectively. In this case, for example, some of the air flowing from the workroom R3 into duct shaft DS2 is returned to chamber C1 via duct shaft DS2, and the remaining air is guided to the large room R1 via an open damper (not shown). Even with such a configuration, clean air can be reused while properly controlling the air conditioning of each cleanroom, such as the workroom R3.
[0071] ≪Second Modification of the First Embodiment≫ Figure 6 is a schematic cross-sectional view of a cleanroom facility 100B according to a second modified example of the first embodiment. Note that the cleanroom facility 100B shown in Figure 6 differs from the first embodiment in that the exhaust-side fan filter unit is not provided on the duct shaft DS1, and instead, an opening A3 is provided (the same applies to the other duct shafts DS4). Since the other aspects are the same as in the first embodiment, the explanation of the overlapping parts will be omitted.
[0072] As shown in Figure 6, an opening A3 is provided on the work chamber R3 side of the duct shaft DS1. The exhaust is then passed sequentially from the work chamber R3 through opening A3, the duct shaft DS1, and the damper 81 (open) to the large room R1. The same applies to exhaust via duct shaft DS4. This configuration also achieves the same effects as the first embodiment. Note that the positions of openings A3 and A4 are not limited to the example in Figure 6, and some or all of the exhaust fans 11a to 18a (see Figure 2) described in the first embodiment may be omitted, and openings may be provided in the omitted locations. Filters may also be appropriately installed in each of these openings.
[0073] ≪Second Embodiment≫ The second embodiment differs from the first embodiment in that a first clean unit U3 (see Figure 7) having a predetermined chamber C3 and a second clean unit U4 (see Figure 7) having another chamber C4 are provided at a distance from each other. Furthermore, the second embodiment differs from the first embodiment in that an air handling unit 9 (see Figure 7) is provided to individually air-condition the second clean unit U4. Other aspects are the same as the first embodiment. Therefore, the differences from the first embodiment will be described, and the overlapping parts will be omitted.
[0074] Figure 7 is a schematic cross-sectional view of the cleanroom facility 100C according to the second embodiment. As shown in Figure 7, the cleanroom facility 100C comprises a first clean unit U3, a second clean unit U4, and an air handling unit 9 (second air handling unit). The first clean unit U3 includes a workroom R3 and an anteroom R2 as multiple cleanrooms sharing a common chamber C3. Similarly, the second clean unit U4 includes a workroom R5 and an anteroom R4 as multiple cleanrooms sharing a common chamber C4. These first clean unit U3 and second clean unit U4 are located inside a large room R1 (a predetermined room). In the example shown in Figure 7, the first clean unit U3 and the second clean unit U4 are separated. However, even in configurations where the clean units are separated by a wall W1, such as in Figures 2, 5, and 6, the air handling unit 9 (air conditioner) can still be installed.
[0075] The configuration of the first clean unit U3 is the same as that of the first clean unit U1 (see Figure 2) described in the first embodiment, so its explanation will be omitted. The second clean unit U4 has a configuration that is generally the same as that of the first clean unit U3. However, the second clean unit U4 differs from the first clean unit U3 in that a grille is not provided on the upstream side of the damper 72, and instead a wall W3 is provided. The downstream end of the duct D7 through which the air cooled by the air handling unit 9 flows is inserted into this wall W3. Incidentally, it is also possible to connect the downstream end of the duct D7 directly to the damper 72.
[0076] Furthermore, the air conditioning load of the second clean unit U4 is assumed to be greater than that of the first clean unit U3. For example, if the heat generated by equipment (not shown) installed in the workroom R5, etc. is large, or if the set temperature (target temperature) of the workroom R5, etc. is lower than that of the workroom R3, etc. of the first clean unit U3, the air conditioning load of the second clean unit U4 is often relatively larger. Therefore, in the second embodiment, the air in the large room R1 is further cooled by the air handling unit 9 before being supplied to the second clean unit U4.
[0077] The air handling unit 9 is an air conditioner that draws in air from the large room R1 (a designated room), adjusts its temperature, and supplies the temperature-adjusted air to the chamber C4 of the second clean unit U4. The air handling unit 9 is equipped with a filter 9a, a cooling coil 9b, a fan 9c, and an inverter 9d. Note that the configuration of the air handling unit 9 shown in Figure 7 is the same as that of another air handling unit 30 for cooling the air in the large room R1, so its explanation is omitted. The air drawn in from the large room R1 to the air handling unit 9 is cooled to a predetermined temperature, and the cooled air is then guided to the chamber C4 via the duct D7 and damper 72 (which is in the open position).
[0078] As shown in Figure 7, a damper 10a is installed in duct D7. The damper 10a is set to a predetermined opening, for example, during the trial run of the air handling unit 9, and is maintained at the predetermined opening during subsequent air conditioning operation. Alternatively, the opening of the damper 10a may be adjusted as appropriate based on the air conditioning load of the anteroom R4 and the workroom R5.
[0079] For the first clean unit U3, the air from the large room R1 (i.e., the air cooled by the air handling unit 30) is supplied directly, so that the work room R3 and the anteroom R2 are maintained at a predetermined set temperature. Therefore, there is no particular need to provide an air handling unit for individual air conditioning for the first clean unit U3. In the configuration shown in Figure 7, the air handling unit 9 is configured to draw in air from the large room R1, but this is not the only configuration. For example, the air handling unit 9 may be configured to selectively draw in air from either the large room R1 or the workroom R5 based on the temperature information of the large room R1 and the temperature information of the workroom R5. Specifically, when the air handling unit 9 is operating in cooling mode, if the temperature of the workroom R5 is lower than the temperature of the large room R1, the air handling unit 9 will draw in air from the workroom R5. Also, if the temperature of the large room R1 is lower than the temperature of the workroom R5, the air handling unit 9 will draw in air from the large room R1. This reduces the air conditioning load on the air handling unit 9, thus saving energy. In the above configuration, when the temperatures of the large room R1 and the workroom R5 are approximately equal, the air handled unit 9 may draw in air from either the large room R1 or the workroom R5. Furthermore, in the above-described configuration, if a damper is not provided in the duct connecting the air handling unit 9 and the workroom R5, sterilization gas will flow into the air handling unit 9 through the workroom R5 when the workroom R5 is sterilized. To avoid this situation, it is advisable to provide a damper in the duct connecting the air handling unit 9 and the workroom R5. For example, by providing a non-leak damper, the inflow of sterilization gas into the air handling unit 9 can be effectively prevented.
[0080] <Effects> According to the second embodiment, air further cooled by the air handling unit 9 is supplied to the chamber C4 of the second clean unit U4. Therefore, even if the air conditioning load of the second clean unit U4 is greater than that of the first clean unit U3, air conditioning suitable for the operating environment of the second clean unit U4 can be individually performed. In addition, the large room R1 and the first clean unit U3 can also be properly air-conditioned by another air handling unit 30.
[0081] ≪Variations≫ Although the cleanroom facility 100 and the like according to the present invention have been described in each embodiment above, the present invention is not limited to these descriptions and can be modified in various ways. For example, in each embodiment, a configuration was described in which no plate member (not shown) is provided in the gap between the ceiling of the large room R1 (see Figure 2) and the upper plate C1a of the chamber C1, but the configuration is not limited to this. That is, in order to prevent dust from accumulating on the upper plate C1a of the chamber C1, and also considering the appearance of the upper side of the chamber C1, a plate member (not shown) connecting the ceiling of the large room R1 and the upper plate C1a of the chamber C1 in the vertical direction may be provided along the edge of the chamber C1. Such a configuration is also included in the requirement that the first clean unit U1 is located inside the large room R1.
[0082] Furthermore, while each embodiment describes a case where a predetermined gap is provided between the ceiling of the large room R1 and the upper plate C1a of the chamber C1, or between the ceiling of the large room R1 and the upper plate C2a of the chamber C2, the embodiment is not limited to this. For example, the upper plates C1a and C2a may be integrated with the ceiling of the large room R1. Alternatively, the side wall of the first clean unit U1, etc., may be integrated with a part of the side wall of the large room R1. These configurations are also included in the requirement that the first clean unit U1, etc., is located inside the large room R1.
[0083] Furthermore, while each embodiment describes the case where the exhaust from a cleanroom such as workroom R3 is directed to the large room R1, it is not limited to this. For example, the exhaust from a cleanroom such as workroom R3 may be directed to the space outside the cleanroom facility 100. Furthermore, although each embodiment has described a case where there are two cleanroom units (first cleanroom unit U1 and second cleanroom unit U2), the configuration is not limited to this. That is, there may be a configuration in which at least one cleanroom unit is provided inside the large room R1 (a predetermined room).
[0084] Furthermore, while each embodiment has described a case in which dampers 81 to 84 (second dampers) are provided to correspond to duct shafts DS1, DS2, DS3, and DS4, the invention is not limited to this. For example, at least a portion of dampers 81 to 84 may be omitted, and a predetermined duct shaft and the large room R1 may be connected via an exhaust port (second exhaust port: not shown). In such a configuration, during sterilization of the cleanroom, workers may seal the exhaust port to prevent sterilization gas from flowing into the large room R1 through the aforementioned exhaust port. Furthermore, while the first embodiment described a case in which sterilization gas generators 91 and 92 (see Figures 3 and 4) that generate sterilization gas are provided, the invention is not limited to this. For example, in addition to dehumidification and the function of generating a predetermined gas, equipment that also has an aeration function using a catalyst or the like may be provided. Alternatively, the sterilization gas generators 91 and 92 may also incorporate these functions.
[0085] Furthermore, while each embodiment has described a case where air from the large room R1 (see Figure 2) is guided to the air handling unit 30, and the air cooled by the air handling unit 30 is returned to the large room R1, the invention is not limited to this configuration. For example, an air handling unit (not shown) located outside the cleanroom facility may take in outside air, and the air cooled by this air handling unit may be guided to the large room R1. In this case, the exhaust destination from the predetermined cleanroom may be outdoors.
[0086] Furthermore, although the layout of the cleanroom facility 100 etc. described in each embodiment is just an example, other layouts may also be configured as follows. That is, the cleanroom facility should be equipped with duct shafts provided in the gaps between cleanrooms and / or in the gaps between a predetermined cleanroom and large room R1 (a predetermined room). In addition, one or more duct shafts should be provided on the outside of the side wall of at least one cleanroom. In such a configuration, one or more duct shafts should be included that are not connected to a chamber. This allows exhaust from the predetermined cleanroom to large room R1 etc. via duct shafts that are not connected to a chamber, thereby suppressing closed-loop circulation of air.
[0087] Furthermore, as shown in Figure 1, the duct shafts DS1, DS2, DS3, and DS4 may be arranged in a straight line along a predetermined side wall facing the large room R1. This makes it easier for workers to perform maintenance by opening the maintenance covers (not shown) of each duct shaft DS1, DS2, DS3, and DS4 and exposing the fan filter units 11-18, as they can work sequentially along the side wall.
[0088] Furthermore, in the configuration shown in Figure 5 (the first modified example of the first embodiment), for example, a perforated plate or grating may be provided at the upper end of the duct shaft DS2 (the downstream end of the airflow). Such a configuration is also included in the requirement that the duct shaft DS2 is in communication with the chamber C1.
[0089] Furthermore, while the second embodiment (see Figure 7) describes a case where the air handling unit 9 individually controls the air conditioning of the second clean unit U4, the invention is not limited to this. That is, two air handling units 9 (second air handling units) may be installed inside the large room R1 so that they correspond one-to-one with the first clean unit U3 and the second clean unit U4. The air in the large room R1 may then be cooled by each air handling unit 9, and the cooled air may be guided to the chambers C3 and C4. With such a configuration, even if the set temperatures of the first clean unit U3 and the second clean unit U4 are different from those of the large room R1, each air handling unit 9 can assist in the air conditioning.
[0090] Furthermore, for example, a duct shaft may be provided in the gap between the side wall of the large room R1 and a designated cleanroom. This configuration is also included in the provision of a duct shaft in the gap between the cleanroom and the large room R1. This duct shaft may not communicate with the chamber C1, and furthermore, exhaust may be provided from the cleanroom to the outside of the large room R1 via the duct shaft. Even with this configuration, the circulation of air in a closed loop via the duct shaft is suppressed, thereby improving air conditioning efficiency.
[0091] Furthermore, in each embodiment, a configuration was described in which damper 71 (see Figure 2) is hidden by grille G1 when viewed from inside the large room R1, and another damper 72 (see Figure 2) is hidden by grille G2, but this is not limited to this configuration. That is, grilles G1 and G2 may be omitted as appropriate, and dampers 71 and 72 may be exposed to the large room R1. Furthermore, although each embodiment has described a configuration in which the damper 81 is provided on the large chamber R1 side relative to the duct shaft DS1 (the main body of the damper 81 is exposed to the large chamber R1), the configuration is not limited to this. For example, the damper 81 may be installed inside the duct shaft DS1. This would hide the damper 81 when viewed from the inside of the large chamber R1, thereby improving the aesthetic appearance. The same applies to the other dampers 82 to 84.
[0092] Furthermore, when the air conditioning load for multiple cleanrooms such as anterooms R2 and R4 and workrooms R3 and R5 is relatively large, the following configuration is preferable. Specifically, it is preferable that the air outlets H1 and H2 (first outlets: see Figure 1) of the air handling unit 30 (first air handling unit), which have their temperature adjusted, are located upstream in the direction of airflow from the intake ports (first intake ports: gaps in grilles G1 and G2) near the chambers C1 and C2. This allows the conditioned air blown out from outlets H1 and H2 to be directly guided to chamber C1 via the intake ports, thereby enabling the delivery of cooled air to anterooms R2 and R4 and workrooms R3 and R5.
[0093] Furthermore, for example, a damper 81 (second damper) or a second exhaust port (not shown) may be provided on the duct shaft DS1 (see Figure 2) to guide the air exhausted from the duct shaft DS1 to the large room R1 (a predetermined room). In addition, an intake port H3 (second intake port: see Figure 1) may be provided on the duct D1 (see Figure 1) to draw in the air going from the large room R1 to the air handling unit 30 (first air handling unit). In such a configuration, it is preferable that the intake port H3 (second intake port) is provided downstream of the damper 81 (second damper) or the second exhaust port in the direction of airflow. This allows the air that has absorbed heat in each cleanroom to be guided directly to the duct D1 via the damper 81, etc. and the intake port H3 in sequence, thereby suppressing the temperature rise of the air in the large room R1.
[0094] Furthermore, although each embodiment describes a configuration in which chambers C1 and C2 (see Figure 2) are separated by a wall W1, the configuration is not limited to this. In other words, the wall W1 may be omitted, and chambers C1 and C2 may be made into a single common space.
[0095] Furthermore, while each embodiment described cases where cleanrooms such as workrooms R3 and R5 and anterooms R2 and R4 are used as positive pressure rooms, cleanrooms may also be used as negative pressure rooms depending on their intended use.
[0096] Furthermore, while each embodiment describes a case where the cleanroom facility 100, etc., is used for cell culture and processing or pharmaceutical manufacturing, it is not limited to these cases. For example, each embodiment can be applied to various fields such as semiconductor, precision machinery, and liquid crystal panel manufacturing, the food industry, the cosmetics industry, and experiments using radioactive materials.
[0097] Furthermore, each embodiment is described in detail to clearly illustrate the present invention and is not necessarily limited to having all the configurations described. In addition, it is possible to add, delete, or replace some of the configurations in the embodiments with other configurations. Furthermore, the mechanisms and configurations described above are those deemed necessary for explanatory purposes and do not necessarily represent all of the mechanisms and configurations shown in the actual product. [Explanation of symbols]
[0098] 1,2,3,4,5,6,7,8 Fan filter unit 1a, 2a, 3a, 4a Intake fan 9. Air Handling Unit (Second Air Handling Unit) 11,12,13,14,15,16,17,18 Fan filter unit 11a, 12a, 13a, 14a Exhaust fan 30. Air Handling Unit (First Air Handling Unit) 71, 72 Damper (1st Damper) 81, 82, 83, 84 Damper (2nd Damper) 91,92 Sterilization gas generator 93 Hose 100, 100A, 100B, 100C Cleanroom Facilities C1, C2 Chambers D1, D2 duct DS1, DS2, DS3, DS4 duct shaft G1, G2 Grill (First Intake Port) H1,H2 outlet (1st outlet) H3, H4 Inlet (Second Inlet) R1 Large room (designated room) R2, R4 anteroom (cleanroom) R3, R5 Workroom (Cleanroom) U1, U3 First Clean Unit (Clean Unit) U2, U4 Second Clean Unit (Clean Unit)
Claims
1. Multiple cleanrooms are provided inside a designated room, A first air handling unit that adjusts the temperature of the air supplied to the predetermined room, A chamber is provided as a single common space above the ceilings of multiple clean rooms, through which air is drawn from the predetermined room, Each of the multiple cleanrooms is provided with an air supply fan that supplies air from the chamber to the cleanroom, The system comprises a duct shaft located outside at least one of the side walls of the cleanroom, Among the duct shafts, those facing the predetermined room include a plurality of duct shafts whose upper ends are closed so as not to communicate with the chamber, and which are further provided with maintenance covers. Air is drawn from the cleanroom to the duct shaft which is not connected to the chamber, and exhausted through the duct shaft. A cleanroom facility in which exhaust from the cleanroom via the duct shaft is directed to the predetermined room.
3. A first air outlet is provided in the ceiling of the aforementioned designated room from which air whose temperature has been adjusted by the first air handling unit is blown out. A first intake port is provided near the chamber, into which air is drawn from the predetermined room toward the chamber. The first outlet is provided on the upstream side in the direction of airflow relative to the first intake port. A cleanroom facility according to claim 1, characterized by the following:
4. The duct shaft is provided with a second damper or a second exhaust port that guides the air to be exhausted from the duct shaft into the predetermined room. A second intake port is provided in the duct into which air is drawn in from the predetermined room toward the first air handling unit. The second intake port is provided on the downstream side in the direction of airflow relative to the second damper or the second exhaust port. A cleanroom facility according to claim 1, characterized by the following:
5. The duct shaft includes one that communicates with the chamber. A cleanroom facility according to claim 1, characterized by the following:
6. It is equipped with a first damper that switches between communication or isolation between the predetermined room and the chamber, The system includes a second damper that switches between communication or blockage between the duct shaft and the predetermined room, When multiple cleanrooms are being air-conditioned, the first damper and the second damper are kept open. A cleanroom facility according to claim 1, characterized by the following:
7. It is equipped with a first damper that switches between communication or isolation between the predetermined room and the chamber, The system includes a second damper that switches between communication or blockage between the duct shaft and the predetermined room, When multiple cleanrooms are being sterilized using sterilization gas, the first damper and the second damper are kept closed. A cleanroom facility according to claim 1, characterized by the following:
8. When sterilizing multiple cleanrooms, a sterilization gas generator is provided, which is located in at least one of the multiple cleanrooms. A cleanroom facility according to claim 7, characterized by the following:
9. When sterilizing multiple cleanrooms, a sterilization gas generator is provided to supply sterilization gas to at least one of the multiple cleanrooms from the outside via a hose. A cleanroom facility according to claim 7, characterized by the following:
10. A clean unit comprising a plurality of clean rooms, each having a common chamber, is provided inside the predetermined room, The system includes a second air handling unit that draws in air from the predetermined room, adjusts its temperature, and supplies the temperature-adjusted air to the chamber. A cleanroom facility according to claim 1, characterized by the following:
11. The aforementioned designated room is a normal room in which the level of cleanliness is not controlled. A cleanroom facility according to claim 1, characterized by the following: