Compact traverse robot

Abstract

An example of a preferred embodiment of the apparatus includes a spindle platform, a traverse platform configured to move in a first direction, an elevation system coupled to the spindle platform and the traverse platform, and a movable arm connected to the spindle platform. The movable arm has a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link. The apparatus further includes a first actuator connected to the spindle platform and configured to rotate the first link, and a second actuator disposed on the movable arm and configured to rotate the second link. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

Description

Technical Field

[0001] The exemplary and non-limiting embodiments described herein generally relate to a traverse robot that can be used for applications such as material handling vacuum environment systems, and is a traverse robot that is compact in the vertical direction. Brief Description of the Prior Art

[0002] The material handling robot includes a robot arm coupled to a drive device and is capable of moving along a track or rail system. The robot arm may include an upper link, a lower link on the upper link, and an end effector on the lower link. The end effector may be configured to handle a payload in a material handling operation. The drive device includes a spindle assembly coupled to the robot arm, a Z-axis mechanism for moving the spindle assembly up and down in the Z direction (vertical direction), and one or more motors stacked coaxially. The robot arm can be positioned and operated in a vacuum environment, and the drive device can be positioned in an atmospheric environment. Bellows may be used to enclose the vacuum environment in the space where the robot arm operates. The spindle assembly, the Z-axis mechanism for vertical movement of the spindle assembly, and / or the coaxially stacked motors generally require a considerable depth and volume in the vacuum chamber in which the robot operates. Summary

[0003] In one aspect, the apparatus includes a spindle platform; a traverse platform configured to move in a first direction; a lifting system coupled to the spindle platform and the traverse platform, the lifting system being configured to move the spindle platform in a second direction perpendicular to the first direction between a folded state and an extended state; At least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; The system comprises at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator positioned on the at least one movable arm and configured to cause rotation of the second link; It is equipped with. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0004] From another perspective, the method is To provide a traverse platform configured to move in a first direction; To provide a spindle platform; To provide a lifting system connected to the spindle platform and the traverse platform, configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction; To provide at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To provide at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and to provide at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; Includes. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0005] From another perspective, the device comprises at least one processor and at least one non-volatile memory for storing computer program instructions, and when the computer program instructions are executed by the at least one processor, the device... Moving the traverse platform in the first direction; A lifting system connected to the traverse platform and the spindle platform is operated to move the spindle platform in a second direction perpendicular to the first direction, between a folded state and an extended state; Acting at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To actuate at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means disposed on the at least one movable arm and configured to cause rotation of the second link; It is configured to perform the following. The first actuator means extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0006] According to another perspective, the device is A traverse platform configured to move in a first direction; A spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, wherein the at least one first actuator is configured to cause rotation of the first link and the at least one second actuator is configured to cause rotation of the second link; A lifting system connected to the spindle platform and the traverse platform, wherein the lifting system is configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction, and the traverse platform includes a third actuator and a third control unit connected to the third actuator; It is equipped with. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link. [Brief explanation of the drawing]

[0007] The aforementioned embodiments and other features will be described below with reference to the attached drawings.

[0008] [Figure 0] Figures 0A-0C are schematic diagrams showing some appearances of existing vacuum environment material handling traverse robots.

[0009] [Figure 1A] This is a schematic diagram of a traverse-type robot equipped with a controller.

[0010] [Figure 1B] Figures 1B(1)-1B(3) are schematic diagrams of various external views of the robot shown in Figure 1A.

[0011] [Figure 1C] Figures 1C(1) and 1C(2) are schematic diagrams showing the internal components of the robot in Figure 1A.

[0012] [Figure 2A] It is a schematic diagram showing the position of the controller with respect to the motor of the traverse-type robot. [Figure 2B] It is a schematic diagram showing the position of the controller with respect to the motor of the traverse-type robot. [Figure 2C] It is a schematic diagram showing the position of the controller with respect to the motor of the traverse-type robot. [Figure 2D] It is a schematic diagram showing the position of the controller with respect to the motor of the traverse-type robot.

[0013] [Figure 3] Figures 3A and 3B are schematic diagrams showing the connection of the internal spaces of the components within the robot.

[0014] [Figure 4A] Figures 4A(1)-4A(3) are schematic diagrams of various states of the robot with respect to the spindle platform and arm of the robot. [Figure 4B] Figures 4B(1)-4B(3) are schematic diagrams of various states of the robot with respect to the spindle platform and arm of the robot.

[0015] [Figure 5] Figures 5A and 5B are schematic diagrams of the robot showing the overlap of components when the spindle platform is lowered.

[0016] [Figure 6] It is a schematic diagram of an alternative and exemplary embodiment of a robot having a counterbalance function.

[0017] [Figure 7A]This is a schematic diagram of an alternative exemplary embodiment of a robotic lifting mechanism. [Figure 7B] This is a schematic diagram of an alternative exemplary embodiment of a robotic lifting mechanism. [Figure 7C] This is a schematic diagram of an alternative exemplary embodiment of a robotic lifting mechanism.

[0018] [Figure 7D] Figures 7D(1) and 7D(2) are schematic diagrams of an exemplary robot in which the spindle platform is supported by linear bearings and actuated by a ball screw drive.

[0019] [Figure 7E] This is a schematic diagram of an exemplary robot in which the operating motor is located on the robot's arm.

[0020] [Figure 7F] Figures 7F(1) and 7F(2) are schematic diagrams showing an example of a robot without a lifting mechanism.

[0021] [Figure 7G(1)(2)] This is a schematic diagram of an exemplary robot, illustrating a comparison of its structure. [Figure 7G(3)(4)] This is a schematic diagram of an exemplary robot, illustrating a comparison of its structure.

[0022] [Figure 8] This is a schematic diagram of a robotic arm having an upper arm and two forearms. Detailed description of the embodiment

[0023] While various features will be described with reference to the exemplary embodiments shown in the drawings, it should be understood that these features can be embodied in many alternative forms of the embodiments. It should also be understood that any appropriate size, shape, or type of elements or materials can be adopted.

[0024] Referring to Figures 0A-0C, an example of an existing vacuum environment material handling traverse robot is generally shown as 10, which will be referred to hereafter as "Robot 10". Robot 10 comprises a robotic arm 12 coupled to a drive unit 14. The robotic arm 12 is operated in a vacuum environment, while the drive unit 14 is located in an atmospheric environment. As shown, the robotic arm 12 has an upper link 16, two lower links 18, and two end effectors 20, one on each of the lower links 18. The drive unit 14 consists of a spindle assembly 24 coupled to the robotic arm 12, a Z-axis mechanism 26 (such as a ball screw) for moving the spindle assembly 24 up and down, thereby providing vertical movement of the robotic arm 12 in the Z direction, and one or more coaxially stacked motors 28. A bellows 30 may be used to contain the vacuum environment in the space in which the robotic arm 12 operates. The robot 10 may move along the track 34 or rail in the X direction (indicated by arrow X in Figure 0A). The robot 10 may move along two tracks 34 or rails, as shown in Figure 0B. In the folded state, the upper end effector 20 may completely cover the lower end effector 20, as shown in Figure 0C.

[0025] One objective of the present invention is to reduce the vertical space occupied by the robot, and as a result, reduce the depth and volume of the vacuum chamber in which the robot operates.

[0026] An exemplary embodiment of the traverse robot according to the present invention is illustrated in Figures 1A-1C(2). Hereinafter, this exemplary embodiment will be referred to as "Robot 100". Figure 1A is a side view of Robot 100 having a control system 106. Additional figures of Robot 100 are provided in Figures 1B(1)-1B(3), and examples of the arrangement of internal components of Robot 100 are illustrated in Figures 1C(1) and 1C(2).

[0027] As shown in Figure 1A, the robot 100 may be supported by a stationary base 108 and may include a linear guidance and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, a robotic arm 120, and a control system 106.

[0028] The stationary base 108 may be a structure configured to support the robot 100. For example, the stationary base 108 may be a plate or frame having a length along the direction of travel of the robot 100 (e.g., the X-direction along the X-axis), the floor or wall of a vacuum chamber, or any other suitable structure capable of supporting the robot 100.

[0029] The linear guide actuation system 110 may include a linear guide structure and a linear actuator system configured to allow the traverse platform 112 to travel (for example, in the direction along the X-axis in Figure 1A) relative to the stationary base 108.

[0030] As schematically shown in the example in Figure 1A, the linear guide structure may be formed by a linear bearing structure. For example, the linear bearing structure may comprise one or more linear bearing rails 124 attached to the stationary base 108 and one or more linear bearing blocks 126 attached to the traverse platform 112. The linear guide portion of the linear guide and actuation system 110 may include a shielding system configured to prevent contact with the linear bearing rails 124, to prevent debris from contaminating the linear bearing block 126 (or one or more other linear bearings), and to prevent particulate matter from migrating from the linear bearing block 126 (or one or more other linear bearings).

[0031] Alternatively, the linear guide structure may be a wheel and rail system, a cable or belt suspension system, a magnetic support system, or any other suitable structure configured to restrain the movement of the traverse platform 112 relative to the stationary base 108.

[0032] As schematically shown in the examples of Figures 1C(1) and 1C(2), the linear actuator system may have one or more linear actuators and one or more position sensors 111. Although the position sensors 111 are shown as being on the traverse platform 112, it should be understood that the position sensors 111 may be on or anywhere within the linear guide actuation system 110. The linear actuators of the linear actuator system may have a fixed part which may be attached to the stationary base 108 and a movable part which may be attached to the traverse platform 112. The linear actuator may be a linear motor 130, such as a permanent magnet motor. The movable part may consist of a forcer having a coil 132 (e.g., a moving coil structure) on the bottom surface of the traverse platform 112, and the fixed part may be formed by a magnet track 134 on the stationary base 108. In a movable magnet structure, the movable part consists of a magnet plate on the traverse platform 112, and the fixed part may be formed by a track on the stationary base 108 on which the coil 132 is formed.

[0033] Alternatively, the linear actuator can be based on any other suitable structure capable of generating force between the stationary base 108 and the traverse platform 112 in substantially the desired travel direction of the robot 100, such as a belt drive, band drive, cable drive, ball screw, or lead screw.

[0034] The linear actuator position sensor 111 may be configured to measure the position of the traverse platform 112 along a desired travel direction (along the X-axis). For example, the position sensor 111 may be a position encoder such as an optical, magnetic, inductive, or capacitive position encoder, or a laser interferometer. Alternatively, it may be any other suitable device that can measure the position of the traverse platform 112 along the desired travel direction directly or indirectly (in the case of belt-driven, band-driven, cable-driven, ball-screw, lead-screw, etc.).

[0035] Measurements from the position sensor 111 may be used by the control system 106 to control a linear actuator (e.g., a linear motor 130) to achieve a desired movement of the traverse platform 112 relative to the stationary base 108 along a desired travel direction (along the X-axis) of the robot 100, or a desired stopping position.

[0036] The lifting mechanism 114 may have one or more lifting couplings 136 configured to move the spindle platform 116 relative to the traverse platform 112 in a vertical direction (or more precisely, in a manner that includes a vertical motion component) and to stabilize the angular orientation of the spindle platform 116 relative to the traverse platform 112 (for example, to keep the spindle platform 116 substantially horizontal). For example, according to Figures 1A, 1B(1), and 1C(1), the lifting coupling 136 may have a parallelogram configuration actuated by a lifting mechanism motor 140, which may be a rotary drive. The rotary drive (or other lifting mechanism motor 140) may comprise a rotary motor and a rotary sensor. Control of the movement of the spindle platform 116 (for example, to keep the spindle platform 116 substantially horizontal) may be performed using a control system 106.

[0037] Generally, each of the one or more lifting couplings 136 of the lifting mechanism 114 may have one or more links, joints (rotary or another suitable type), and / or pulley structures utilizing belts, bands, or cables. The one or more lifting couplings 136 may be actuated by one or more rotary motors, linear motors, struts, or any other suitable actuation means.

[0038] As illustrated in the examples in Figures 1A, 1B(1), 1B(2), and 1C(1), one or more lifting connectors 136 of the lifting mechanism 114 may be located on one or both sides of the traverse platform 112. Figure 1B(2) shows an example where the lifting connectors 136 are located on both sides of the traverse platform 112. As another example, one or more lifting connectors 136 may be located on one or both sides of the traverse platform 112. Alternatively, one or more lifting connectors 136 may be located at any suitable position on the traverse platform 112.

[0039] The spindle platform 116 may support a robot arm 120 and one or more motors configured to drive or actuate the robot arm 120 or a portion of the robot arm 120. For example, as schematically shown in Figure 1C(1), the first link 142 (upper arm) of the robot arm 120 may be coupled to the spindle platform 116 via a rotary joint, the stator 144 of a motor (motor T) may be mounted on the spindle platform 116, and the rotor 146 of the motor (motor T) may be mounted on the first link 142 of the robot arm 120. The motor (motor T) may conveniently protrude to and / or extend into the first link 142 of the robot arm 120, utilizing the combined thickness (height) of the spindle platform 116 and the first link 142 of the robot arm 120. Alternatively, the stator 144 of the motor (motor T) may be attached to the first link 142 of the robot arm 120, and the rotor 146 of the motor (motor T) may be attached to the spindle platform 116. Although motor T is shown in an internal rotor configuration in Figure 1C(1), motor T may also have an external rotor configuration or any other suitable type.

[0040] Referring to the example in Figure 1B(1), the robot arm 120 may have a first link 142 (upper arm), two forearms (forearm A 150 and forearm B 152), and two wrist links (wrist link A 154 and wrist link B 156), each mounted on one or more end effectors 160, each configured to receive a payload. Each of the forearms 150 and 152 may be connected to the first link 142 via a rotary joint (elbow joint A 164 and elbow joint B 166). Two motors (motors A and B shown in Figure 1C(1)) may be attached to the first link 142, each connected to one of the two forearms 150 and 152. Each of the wrist links 154 and 156 may be connected to one of the forearms 150 and 152 via a rotary joint (wrist joint A 170 and wrist joint B 172). The robotic arm 120 may further comprise two belt drives (belt drive units), band drives (band drive units), or cable drives (cable drive units) configured to constrain one angle of the wrist links 154, 156. (Band drives A and B are shown on the forearms 150, 152, respectively, in Figure 1C(1).) The belt drives, band drives, or cable drives may employ circular pulleys and / or non-circular pulleys, as described in U.S. Patents 9,149,936, 9,840,004, 9,889,557, and 10,224,232, which are incorporated herein by reference in their entirety.

[0041] The traverse platform 112, spindle platform 116, and robot arm 120 may have features configured to remove heat generated by motors and other active components attached to them. For example, the robot arm 120 and spindle platform 116 may have one or more surfaces (planar, cylindrical, or any suitable shape) facing each other, allowing heat to be transferred from the robot arm 120 to the spindle platform 116 through radiation mechanisms and, if residual gas is present, through conduction and convection mechanisms. Similarly, the traverse platform 112 and spindle platform 116 may have surfaces configured to remove heat from the robot arm 120 using radiation and, if residual gas is present, heat conduction and convection.

[0042] The control system 106 of the robot 100 can, for example, receive external input from a user or host system, read the position of individual motion axes (motors) from position encoders (not shown for simplicity), process this information, apply voltage to the motors to perform desired motions and / or achieve desired positions.

[0043] In one embodiment, for example as illustrated in Figure 2A, the actuators (motors) within the robot 100 may be controlled by control modules (or more) positioned adjacent to each actuator. One or more actuators (e.g., motor T) located on the spindle platform 116 may be controlled by a controller or control system or one or more control modules 200 mounted on or located on the spindle platform 116. One or more actuators (e.g., lifting mechanism motors 140) of the lifting mechanism 114 may be controlled by a controller or one or more control modules 210 located on (or within) the traverse platform 112. One or more actuators within the robot arm 120 may be controlled by a controller or one or more control modules 218 located within the robot arm 120. The control modules 200, 210, and 218 are controlled, for example, by a master controller 220 via a communication network 212. To cooperate The master controller 220 may be located on the traverse platform 112 and can communicate with the host communication system 228. The master controller 220 and the control module 210 of the lifting mechanism 114 may be separate devices or combined into a single integrated device. Alternatively, as schematically depicted in Figure 2B, the master controller 220 may be located outside the traverse platform 112 and may be stationary relative to the stationary base 108. In any configuration, the master controller 220 may have one or more processors 222 and one or more memories 224 having program instructions configured to perform operations as described herein.

[0044] In another exemplary embodiment, encoder signals 238 and motor lines may be supplied to a central controller 240, as schematically shown in Figures 2C and 2D. The central controller 240 may be located within or outside the traverse platform 112 (and may be immovable relative to the stationary base 108). Alternatively, any combination of the configurations in Figures 2A-2D may be used. The central controller 240 may have one or more processors 242 and one or more memories 244 having program instructions configured to perform operations as described herein.

[0045] In the examples in Figures 2C and 2D, motor S refers to the actuator of the linear actuator system, and motor Z refers to the lifting mechanism 114 actuator. The control modules are indicated as 200, 210, and 218.

[0046] The lifting mechanism 114 and the robot arm 120 may include configurations for supplying power, transmitting electrical signals, and circulating fluids (gases and / or liquids) within the robot 100. These configurations may be required for control systems (power supply and electrical signal transmission) and to enhance heat removal (fluid circulation). An exemplary configuration that can support power supply, signal transmission, and / or fluid circulation between components connected by a rotary joint is schematically depicted in Figure 3A as 300 and referred to as “Configuration 300”.

[0047] As shown in Figure 3A, the bellows 304 are used to connect the internal spaces of the components joined by the rotary joint 306 and can provide passages 308 for one or more cables and / or one or more hoses. Shape guides 310 may be used to restrain one or more cables and / or one or more hoses and prevent one or more cables and / or one or more hoses from rubbing against the bellows 304 and other components.

[0048] In the exemplary configuration 300 shown in Figure 3A, the internal space of the bellows 304 may be at substantially the same pressure as the internal space of the robot component to which it connects, and may be higher than the pressure of the external vacuum environment. Alternatively, to enhance the stability of the bellows 304, a configuration may be adopted in which a low-pressure environment is located inside the bellows 304, as schematically shown in Figure 3B. In Figure 3B, the bellows 304 is shown in a compressed state.

[0049] Other configurations that may support power supply, signal transmission, and / or fluid circulation via rotary joints are described in U.S. Patent No. 10,569,430, which is incorporated herein by reference in its entirety.

[0050] Additional configurations may be used to transmit power and communication signals between the stationary base of the robot 100 and the traverse platform 112. For example, a service loop, inductive coupling, capacitive coupling, optical communication link, or radio frequency communication system may be employed for this purpose.

[0051] As illustrated in Figures 4A(1)-4A(3) and 4B(1)-4B(3), the robot 100 can travel along the stationary base 108, raise the spindle platform 116, rotate the robot arm 120, and extend each end effector of the robot arm 120. As an example, Figures 4A(1)-4A(3) depict one of the states that the robot 100 can take relative to the stationary base 108. In this state, the spindle platform 116 is lowered and both end effectors 160 are retracted. As another example, Figures 4B(1)-4B(3) depict yet another state that the robot 100 can take relative to the stationary base 108. In this state, the spindle platform 116 is raised and one of the end effectors 160 is extended.

[0052] A characteristic feature of the exemplary embodiment shown in Figure 1A is that the motors and other components of the robot 100 may be vertically nested or overlapping, that is, they share substantially the same vertical space. This is particularly true when the spindle platform 116 is lowered and tilted, as illustrated in Figures 5A and 5B. Even when the spindle platform 116 is tilted relative to the traverse platform 112, or when the robot arm 120 is in its stowed position, as shown in Figure 5A, a portion of the motor T may protrude into the first link 142 of the robot arm 120. This reduces the vertical space occupied by the robot 100, and consequently, the depth and volume of the vacuum chamber in which the robot 100 can operate. In addition, at least motors A and B may be nested with motor T in a folded state to further reduce the vertical space occupied by the robot 100.

[0053] An alternative exemplary embodiment of the traverse robot 100 according to the present invention is schematically depicted in Figure 6-8.

[0054] The lifting mechanism 114 may be equipped with a counterbalancing function, such as a counterweight or spring (e.g., a coil spring or torsion spring), to reduce torque or force on the lifting mechanism 114 actuator (motor). An exemplary embodiment having a counterbalancing function utilizing a tensioned coil spring 600 is graphically depicted in Figure 6. Alternatively, any other suitable counterbalancing function may be used.

[0055] An exemplary alternative lifting mechanism is schematically shown in Figure 7A, and will be hereafter referred to as “Lifting Mechanism 714”. Lifting mechanism 714 may have a link 716, which may be coupled to the traverse platform 112 and the spindle platform 116 by rotary joints 720 and 722, respectively. Lifting mechanism 714 may further have an actuator or motor 730 configured to drive a band 732 (or belt or cable). In this example, the actuator or motor 730 is driven to maintain the same angular orientation of the spindle platform 116 relative to the traverse platform 112. For example, it is driven to keep the spindle platform 116 substantially horizontal. In this configuration, as shown, a first pulley 734 may be attached to the traverse platform 112 and a second pulley 736 may be attached to the spindle platform 116.

[0056] As shown in Figure 7A, link 716 may be actuated by a rotary motor RM mounted on the traverse platform 112. When the rotary motor RM actsuates link 716 and rotates it relative to the traverse platform 112, the spindle platform 116 changes its altitude relative to the traverse platform 112. Alternatively, the rotary motor RM may be mounted on the spindle platform 116. As another alternative, a linear motor, strut, or any other suitable actuating means may be used to actuate link 716 of the lifting mechanism 714.

[0057] Another exemplary alternative lifting mechanism is schematically shown in Figure 7B as 750. The lifting mechanism 750 may include a coupling which may consist of a first link 754 and a second link 756. The first link 754 may be coupled to the traverse platform 112 by a first revoluting joint 760, the second link 756 may be coupled to the first link 754 by a second revoluting joint 762, and the spindle platform 116 may be coupled to the second link 756 by a third revoluting joint 764. The coupling of the lifting mechanism 750 may further include two belt drives, band drives, or cable drives configured to maintain a constant angular orientation of the spindle platform 116 relative to the traverse platform 112. These may, for example, be configured to keep the spindle platform 116 substantially horizontal.

[0058] As shown in Figure 7B, the first belt drive, band drive, or cable drive may be located inside the first link 754 and connect a first pulley 770 mounted on the traverse platform 112 to a second pulley 772 mounted on the second link 756. The diameter of the first pulley 770 mounted on the traverse platform 112 may be twice the diameter of the second pulley 772 mounted on the second link 756. The second belt drive, band drive, or cable drive may be located inside the second link 756 and connect the second pulley 772 to a third pulley 774 on the spindle platform 116. The diameter of the third pulley 774 may be about twice the diameter of the second pulley 772, and may be the same as or about the same as the diameter of the first pulley 770.

[0059] Referring further to Figure 7B, the first link 754 of the lifting mechanism 750 may be actuated by a rotary motor RM located in or above the traverse platform 112. In this configuration, when the rotary motor RM acts the first link 754 so that it rotates relative to the traverse platform 112, the spindle platform 116 moves perpendicular to the traverse platform 112. Alternatively, a linear motor, strut, or any other suitable actuating means may be used to actuate the lifting mechanism 750.

[0060] The exemplary lifting mechanism 750 in Figure 7B is shown with two links of the same joint length and a circular pulley, although the two links may have unequal joint lengths, and some or all of the pulleys may be non-circular. Alternatively, any suitable number of links and pulley types may be used. The connection defined by the first link 754 and the second link 756 may be located on one or both sides of the traverse platform 112 and coupled to one or both sides of the spindle platform 116.

[0061] As another example, as schematically shown in Figure 7C, one or more connecting parts defined by the first link 754 and the second link 756 of the lifting mechanism 750 may be located on the front and / or rear of the traverse platform 112 and coupled to the front and / or rear (not the side) of the spindle platform 116. Alternatively, the first link 754 and the second link 756 of the lifting mechanism 750 may be located at any suitable position between the traverse platform 112 and the spindle platform 116.

[0062] Referring here to Figures 7D(1) and 7D(2), simplified cross-sectional views of an exemplary embodiment of robot 700 having a robot arm 702 are shown. The exemplary robot 700 may utilize one or more linear bearings and linear actuation systems. In the exemplary robot 700, the spindle platform 766 may be supported by one or more linear bearings 768 and linear actuators. The linear actuator may be a forcer / coil structure on a rail or track system such as a rail 769, as in previous examples. The spindle platform 766 can be moved up and down, for example, by a suitable Z-axis mechanism 26 (e.g., ball screw drive, lead screw, band drive, belt drive, cable drive, linear motor, or any other suitable actuation means). As shown, the bellows 776 may also be used to accommodate a vacuum environment while allowing the spindle platform 766 to move up and down. The height of the robot 700 can be reduced compared to other embodiments disclosed herein by relocating the motor M that operates the upper arm 778 to the robot arm 702, as illustrated in Figure 7E.

[0063] An exemplary embodiment of a traverse robot according to the present invention that does not have a lifting mechanism is schematically depicted in Figures 7F(1) and 7F(2), and is hereinafter referred to as "Robot 780". Robot 780 comprises a robot arm 782 directly attached to a base 784. The robot arm 782 utilizes one or more linear bearings 768 configured to slide along a rail 769 (or track). Robot 780 also includes a linear actuation system, similar to the previous exemplary embodiments.

[0064] A comparison of selected exemplary embodiments with robots representing existing technology is provided in Figures 7G(1), 7G(2), 7G(3), and 7G(4). Figure 7G(1) shows a simplified cross-sectional view of robot 10 representing existing technology, and Figure 7G(2) shows an exemplary embodiment of traverse robot 800 in which two motors M are repositioned on robot arm 802. Figure 7G(3) depicts an exemplary embodiment having a lifting mechanism based on the aforementioned coupling, for example, robot 100. Figure 7G(4) depicts an exemplary embodiment without a lifting mechanism, for example, robot 780.

[0065] As part of the exemplary embodiments described above, a single spindle platform supported by a single lifting mechanism is shown, but the number of spindle platforms and lifting mechanisms may be multiple. Embodiments without lifting mechanisms may also exist.

[0066] An exemplary alternative robot is schematically depicted in Figure 8 as 1000, and will hereafter be referred to as "Robot 1000". Robot 1000 is supported by a stationary base 108 and may include a linear guide and actuation system 110, a traverse platform 112, a lifting mechanism 114, a spindle platform 116, and a control system 106, as in previous embodiments. An arm 1012 is attached to the spindle platform 116, and the arm 1012 has an upper arm 1014 and two forearms 1016, each bearing an end effector, and the forearms 1016 are coupled to the upper arm 1014 via a coaxial rotary joint (referred to as the elbow joint 1020). The upper arm 1014 may house two motors (motor A and motor B), each configured to actuate one of the two forearms 1016. Figure 8 shows motors A and B in a configuration with external rotors, but motors A and B may also be in an internal rotor configuration. Alternatively, any suitable motor configuration, type, and design may be used.

[0067] Please note that the bearings, bearing configurations, and bearing locations shown in the diagrams in this book are for illustrative purposes only, and their purpose is to convey how individual parts can generally be constrained by each other. Any suitable bearings, bearing configurations, and bearing locations may be used.

[0068] While communication networks have been described as a means of communication between various components of a control system, any other suitable means of communication between the master controller and control modules, such as wireless networks or point-to-point buses, can be used.

[0069] The features described herein can be used in conjunction with the features described in U.S. Patent Applications 16 / 788,993, 16 / 788,973, and 15 / 294,099, which are incorporated herein in their entirety by reference.

[0070] In one exemplary embodiment, the apparatus is Spindle platform and; A traverse platform configured to move in a first direction; A lifting system connected to the spindle platform and the traverse platform, the lifting system configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction; At least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; The system comprises at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator positioned on the at least one movable arm and configured to cause rotation of the second link; It is equipped with. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0071] The at least one first actuator and the at least one second actuator may be configured to overlap vertically. The first actuator may be configured to nest with the second actuator. The apparatus may further include a linear guide system on the traverse platform. In this case, the linear guide system is configured to restrain the movement of the traverse platform in a linear direction. The linear guide system may include at least one linear bearing on the traverse platform, the at least one linear bearing may be configured to engage with a rail and slide along the rail. The apparatus may further include a linear actuation system provided on the traverse platform. In this case, the linear actuation system is configured to move the traverse platform in a linear direction. The linear actuation system may have a linear actuator and at least one position sensor. The linear actuator may have a permanent magnet motor having at least one coil, in which case the at least one coil is configured to magnetically engage with a track. The at least one position sensor may be located on the traverse platform and may be configured to be controlled along a linear direction using control means. The lifting system may have at least one coupling portion, in which case the at least one coupling portion extends between the traverse platform and the spindle platform and is rotatable with respect to the spindle platform. The at least one coupling portion may be rotatable on the traverse platform using a rotary actuator. The rotary actuator may be controllable using control means to maintain the spindle platform in a substantially horizontal position with respect to the traverse platform. The lifting system may further include a counterbalance spring.

[0072] In another exemplary embodiment, the method provides a traverse platform configured to move in a first direction; To provide a spindle platform; To provide a lifting system connected to the spindle platform and the traverse platform, configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction; To provide at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To provide at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and to provide at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; Includes. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0073] The at least one first actuator and the at least one second actuator may be configured to overlap vertically. The method may include providing a linear guide system on the traverse platform, in which case the linear guide system is configured to restrain the movement of the traverse platform in a linear direction. The method may also include providing a linear actuation system provided on the traverse platform, in which case the linear actuation system is configured to move the traverse platform in a linear direction. The method may include controlling the movement of the traverse platform in a first direction using position sensors and control means. The method may further include controlling the movement of the spindle platform in a second direction using control means.

[0074] In another exemplary embodiment, the apparatus comprises at least one processor and at least one non-volatile memory for storing computer program instructions, wherein when the computer program instructions are executed by the at least one processor, the apparatus... Moving the traverse platform in the first direction; A lifting system connected to the traverse platform and the spindle platform is operated to move the spindle platform in a second direction perpendicular to the first direction, between a folded state and an extended state; To operate at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To actuate at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means disposed on the at least one movable arm and configured to cause rotation of the second link; It is configured to perform the following. The first actuator means extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0075] The apparatus may further be configured such that the first actuator means and the second actuator means are nested inside each other. Moving the traverse platform in the first direction may include using a linear drive system to move the traverse platform along a rail. Using a linear drive system to move the traverse platform along a rail may include operating a permanent magnet motor having coils arranged along a magnet track. The apparatus may further include using at least one processor and at least one non-temporary memory together with a position sensor on the traverse platform to sense the position of the traverse platform. The apparatus may further include using the at least one processor and the at least one non-temporary memory together with a lifting system to make the spindle platform horizontal to the traverse platform.

[0076] In another exemplary embodiment, the apparatus includes a traverse platform configured to move in a first direction; A spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, wherein the at least one first actuator is configured to cause rotation of the first link and the at least one second actuator is configured to cause rotation of the second link; A lifting system connected to the spindle platform and the traverse platform, wherein the lifting system is configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction, and the traverse platform includes a third actuator and a third control unit connected to the third actuator; It is equipped with. The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link.

[0077] The first actuator may be nested with at least one second actuator. The first control unit, the second control unit, and the third control unit are communicated via a communication network by the master control unit. To cooperate The master control unit may be located on the traverse platform. The master control unit may be located outside the traverse platform. The traverse platform may be configured to move in a first direction along a system of linear bearings and rails. The device may further include a system of magnets and coils configured to move the traverse platform in the first direction.

[0078] It should be understood that the above description is merely an example. Those skilled in the art will be able to consider various variations and modifications. For example, it is possible to selectively combine features from the various embodiments described above to create new embodiments. Therefore, this application encompasses all changes, modifications, and variations included in the attached claims.

Claims

1. Spindle platform and; A traverse platform configured to move in a first direction; A lifting system connected to the spindle platform and the traverse platform, the lifting system configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction; At least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; The system comprises at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator positioned on the at least one movable arm and configured to cause rotation of the second link; Equipped with, The lifting system further includes a counterbalance spring, The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link. Device.

2. The apparatus according to claim 1, wherein the at least one first actuator and the at least one second actuator are configured to share the same position in the vertical direction, at least in part.

3. The apparatus according to claim 1, wherein the first actuator is configured to be nested horizontally with respect to the second actuator.

4. The apparatus according to claim 1, further comprising a linear guide system on the traverse platform, wherein the linear guide system is configured to restrain the movement of the traverse platform in a linear direction.

5. The apparatus according to claim 4, wherein the linear guide system comprises at least one linear bearing on the traverse platform, the at least one linear bearing configured to engage with a rail and slide along the rail.

6. The apparatus according to claim 1, further comprising a linear actuation system provided on the traverse platform, wherein the linear actuation system is configured to move the traverse platform in a linear direction.

7. The apparatus according to claim 6, wherein the linear actuation system comprises a linear actuator and at least one position sensor.

8. The apparatus according to claim 7, wherein the linear actuator has a permanent magnet motor having at least one coil, the at least one coil being configured to magnetically engage with a track.

9. The apparatus according to claim 7, wherein the at least one position sensor is arranged on the traverse platform and is configured to be controlled along a linear direction using control means.

10. The apparatus according to claim 1, wherein the lifting system has at least one connecting portion, the at least one connecting portion extending between the traverse platform and the spindle platform and rotatable relative to the traverse platform and the spindle platform.

11. The apparatus according to claim 10, wherein the at least one connecting portion is rotatable on the traverse platform using a rotary actuator.

12. The apparatus according to claim 11, wherein the rotary actuator is controllable using control means to maintain the spindle platform in a horizontal position relative to the traverse platform.

13. To provide a traverse platform configured to move in a first direction; To provide a spindle platform; To provide a lifting system connected to the spindle platform and the traverse platform, configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction; To provide at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To provide at least one first actuator connected to the spindle platform and configured to cause rotation of the first link, and to provide at least one second actuator disposed on the at least one movable arm and configured to cause rotation of the second link; Includes, The lifting system further includes a counterbalance spring, The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link. method.

14. The method according to claim 13, wherein the at least one first actuator and the at least one second actuator are configured to share the same position in the vertical direction, at least in part.

15. The method according to claim 13, comprising providing a linear guide system on the traverse platform, wherein the linear guide system is configured to restrain the movement of the traverse platform in a linear direction.

16. The method according to claim 13, comprising providing a linear actuation system provided on the traverse platform, wherein the linear actuation system is configured to move the traverse platform in a linear direction.

17. The method according to claim 13, comprising controlling the movement of the traverse platform in a first direction using position sensors and control means.

18. The method according to claim 13, further comprising using control means to control the movement of the spindle platform in a second direction.

19. An apparatus comprising at least one processor and at least one non-volatile memory for storing computer program instructions, wherein when the computer program instructions are executed by the at least one processor, the apparatus... Moving the traverse platform in the first direction; Activating a lifting system connected to the traverse platform and the spindle platform to move the spindle platform in a second direction perpendicular to the first direction, between a folded state and an extended state; Operating at least one movable arm connected to the spindle platform, the movable arm having a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link; To actuate at least one first actuator means connected to the spindle platform and configured to cause rotation of the first link, and at least one second actuator means disposed on the at least one movable arm and configured to cause rotation of the second link; It is configured to perform the following: The lifting system further includes a counterbalance spring, The first actuator means extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link. Device.

20. The apparatus according to claim 19, wherein the first actuator means and the second actuator means are nested in the horizontal direction.

21. The apparatus according to claim 19, wherein moving the traverse platform in the first direction includes using a linear drive system to move the traverse platform along a rail.

22. The apparatus according to claim 19, wherein using a linear drive system to move the traverse platform along rails includes operating a permanent magnet motor having coils arranged along a magnet track.

23. The apparatus according to claim 19, further comprising using the at least one processor and the at least one non-volatile memory together with a position sensor on the traverse platform to sense the position of the traverse platform.

24. The apparatus according to claim 19, further comprising using the at least one processor and the at least one non-volatile memory together with a lifting system to make the spindle platform horizontal with respect to the traverse platform.

25. A traverse platform configured to move in a first direction; A spindle platform having a first actuator and a first control unit connected to the first actuator; At least one movable arm connected to the spindle platform, having a first link connected to the first actuator and at least one second link connected to the first link, the second link having at least one second actuator and being controlled by a second control unit of the at least one movable arm, wherein the at least one first actuator is configured to cause rotation of the first link and the at least one second actuator is configured to cause rotation of the second link; A lifting system connected to the spindle platform and the traverse platform, wherein the lifting system is configured to move the spindle platform between a folded state and an extended state in a second direction perpendicular to the first direction, and the traverse platform includes a third actuator and a third control unit connected to the third actuator; Equipped with, The lifting system further includes a counterbalance spring, The first actuator extends from the spindle platform to the first link and occupies the combined thickness of the spindle platform and the first link. Device.

26. The apparatus according to claim 25, wherein the first actuator is nested horizontally with respect to the second actuator.

27. The apparatus according to claim 25, wherein the first control unit, the second control unit, and the third control unit are coordinated by a master control unit via a communication network.

28. The apparatus according to claim 27, wherein the master control unit is located on the traverse platform.

29. The apparatus according to claim 27, wherein the master control unit is located outside the traverse platform.

30. The apparatus according to claim 25, wherein the traverse platform is configured to move in a first direction along a system of linear bearings and rails.

31. The apparatus according to claim 30, further comprising a system of magnets and coils configured to move the traverse platform in the first direction.

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