Component mounting device, component mounting system, method for inspecting a pneumatic circuit in a component mounting device, and method for diagnosing a pneumatic circuit in a component mounting device.

Abstract

This component mounting device comprises: a component holding head that has a suction nozzle; a driving unit that raises and lowers the component holding head; a pneumatic circuit that includes a first air flow path leading to the suction nozzle, a flow path switching unit, and a flow rate measuring instrument for measuring the flow rate of air in the first air flow path; an air flow rate limiting means that limits the first air flow path such that the flow rate of air becomes a minimum flow rate; and a pneumatic circuit inspection unit that operates the flow path switching unit in a state where the outflow or inflow of air from a suction nozzle holder is limited by the air flow rate limiting means, connects the first air flow path to a positive pressure source or a negative pressure source, and acquires the flow rate of the air measured by the flow rate measuring instrument.

Description

Technical Field

[0001] The present invention relates to a component mounting apparatus, a component mounting system, a method for inspecting a pneumatic circuit in a component mounting apparatus, and a method for diagnosing a pneumatic circuit in a component mounting apparatus, which are provided with a pneumatic circuit for supplying positive pressure or negative pressure to a suction nozzle for sucking and holding components.

Background Art

[0002] There is known a component mounting apparatus that sucks and holds components using a suction nozzle and mounts them on a substrate, which automatically detects clogging or air leakage of the suction nozzle. The suction transfer apparatus (component mounting apparatus) described in Patent Document 1 includes a flow rate sensor (flow rate measuring device) for measuring the flow rate of air in a detachable flow path (pneumatic circuit) that supplies positive pressure or negative pressure to the suction nozzle, and it is disclosed that when the flow rate of air measured by the flow rate sensor is less than a determination flow rate, it is determined that the suction nozzle is clogged.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] However, in the prior art including Patent Document 1, since an abnormality is determined from the flow rate of air flowing in or out through the opening of the component holding surface of the suction nozzle, there is a problem that minute abnormalities caused by a gap smaller than the opening of the suction nozzle cannot be detected, and there is room for further improvement.

[0005] Therefore, an object of the present invention is to provide a component mounting apparatus, a component mounting system, a method for inspecting a pneumatic circuit in a component mounting apparatus, and a method for diagnosing a pneumatic circuit in a component mounting apparatus that can detect minute abnormalities in a pneumatic circuit that supplies positive pressure or negative pressure to a suction nozzle.

[0006] The component mounting device of the present invention is a component mounting device for mounting components on a substrate, comprising: a component holding head having a suction nozzle at its tip for sucking and holding components; a mounting head body having a drive unit for raising and lowering the component holding head; an air passage leading to the suction nozzle; a passage switching unit for switching the air passage to connect to at least a positive pressure source or a negative pressure source; a pneumatic circuit including a flow rate meter for measuring the flow rate of air in the air passage between the suction nozzle and the passage switching unit; an air flow rate limiting means for limiting the air passage so that the flow rate of air becomes a minute flow rate when the air passage is connected to the positive pressure source or the negative pressure source; and a pneumatic circuit inspection unit that operates the passage switching unit while restricting the outflow or inflow of air from the tip of the component holding head with the air flow rate limiting means to connect the air passage to the positive pressure source or the negative pressure source and acquires the flow rate of air measured by the flow rate meter.

[0007] The component mounting system of the present invention is a component mounting system that includes a component mounting device for mounting components on a substrate and an information processing device capable of communicating with the component mounting device. The component mounting device includes a component holding head having a suction nozzle at its tip for sucking and holding components, a mounting head body having a drive unit for raising and lowering the component holding head, an air passage leading to the suction nozzle, a passage switching unit for switching the air passage to connect to at least a positive pressure source or a negative pressure source, a pneumatic circuit including a flow rate meter for measuring the flow rate of air in the air passage between the suction nozzle and the passage switching unit, an air flow rate limiting means for limiting the air passage so that the flow rate of air becomes a minute flow rate when the air passage is connected to the positive pressure source or the negative pressure source, and a pneumatic circuit inspection unit that operates the passage switching unit while restricting the outflow or inflow of air from the tip of the component holding head with the air flow rate limiting means to connect the air passage to the positive pressure source or the negative pressure source and acquires the flow rate of air measured by the flow rate meter. The information processing device includes a pneumatic circuit state diagnosis unit that diagnoses the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit.

[0008] The present invention provides a method for inspecting a pneumatic circuit in a component mounting device, comprising: a component holding head having a suction nozzle at its tip for sucking and holding a component; a mounting head body having a drive unit for raising and lowering the component holding head; and a pneumatic circuit including an air passage leading to the suction nozzle, a flow path switching unit for switching the air passage to connect to at least a positive pressure source or a negative pressure source, and a flow rate measuring instrument for measuring the flow rate of air in the air passage between the suction nozzle and the flow path switching unit, the method comprising: a first step of restricting the air passage so that the flow rate of air when the air passage is connected to the positive pressure source or the negative pressure source becomes a minute flow rate; a second step of operating the flow path switching unit to connect the air passage to the positive pressure source or the negative pressure source; and a third step of obtaining the flow rate of air measured by the flow rate measuring instrument.

[0009] The present invention provides a method for diagnosing a pneumatic circuit in a component mounting device, which diagnoses the state of the pneumatic circuit based on the flow rate obtained by the above-described inspection method.

[0010] According to the present invention, minor abnormalities in the pneumatic circuit that supplies positive or negative pressure to the suction nozzle can be detected. [Brief explanation of the drawing]

[0011] [Figure 1] Plan view showing the schematic structure of a component mounting device according to one embodiment of the present invention. [Figure 2] A perspective view showing the schematic configuration of the mounting head included in a component mounting device according to one embodiment of the present invention. [Figure 3] A schematic diagram illustrating the general configuration of the mounting head included in a component mounting device according to one embodiment of the present invention. [Figure 4] Explanatory diagram of the pneumatic circuit included in a component mounting device according to one embodiment of the present invention. [Figure 5] Block diagram showing the configuration of a component mounting device according to one embodiment of the present invention. [Figure 6] Flowchart of a pneumatic circuit inspection method according to one embodiment of the present invention [Figure 7]Flowchart of inspection preparation in a pneumatic circuit inspection method according to one embodiment of the present invention [Figure 8] Flowchart of positive pressure testing in a pneumatic circuit inspection method according to one embodiment of the present invention [Figure 9] Flowchart of negative pressure testing in a pneumatic circuit inspection method according to one embodiment of the present invention [Figure 10] Flowchart of inspection preparation in another embodiment of the pneumatic circuit inspection method according to one embodiment of the present invention. [Figure 11] Flowchart of positive pressure testing in another embodiment of the pneumatic circuit inspection method according to one embodiment of the present invention. [Figure 12] Flowchart of negative pressure testing in another embodiment of the pneumatic circuit inspection method according to one embodiment of the present invention. [Figure 13] Diagram illustrating the determination of the state of a pneumatic circuit in a component mounting device according to one embodiment of the present invention. [Figure 14] Block diagram showing the configuration of a component mounting system in one embodiment of the present invention. [Modes for carrying out the invention]

[0012] An embodiment of the present invention will be described in detail below with reference to the drawings. The configurations, shapes, etc. described below are illustrative examples for illustrative purposes and can be modified as appropriate according to the specifications of the component mounting device, mounting head, and component mounting system. In the following, all corresponding elements are denoted by the same reference numerals in all drawings, and redundant explanations are omitted. In Figure 1 and in some parts described later, the X-axis in the substrate transport direction (left-right direction in Figure 1) and the Y-axis in the substrate transport direction (up-down direction in Figure 1) are shown as two mutually orthogonal axes in the horizontal plane. In Figure 1 and in some parts described later, the Z-axis (perpendicular direction to the paper in Figure 1) is shown as the height direction perpendicular to the horizontal plane.

[0013] First, referring to FIG. 1, the configuration of the component mounting apparatus 1 will be described. In FIG. 1, on the upper surface of the base 2, two substrate transfer mechanisms 3 are arranged side by side in the front and rear directions in the Y-axis direction. Each substrate transfer mechanism 3 transfers, positions, and holds the substrate 4 along the X-axis. Component supply units 5 are installed in front of the front substrate transfer mechanism 3 and behind the rear substrate transfer mechanism 3, respectively.

[0014] A cart 7 on which a plurality of tape feeders 6 are mounted in parallel along the X-axis is mounted on each component supply unit 5. The tape feeder 6 supplies components to the component removal position where the mounting head picks up the components by pitch-feeding a carrier tape having pockets for storing components from the outside of the component supply unit 5 in the direction (tape feed direction) toward the substrate transfer mechanism 3.

[0015] In FIG. 1, Y-axis tables 8 having linear drive mechanisms are arranged along the Y-axis direction at both ends in the X-axis direction on the upper surface of the base 2. Two beams 9 having linear drive mechanisms are movably coupled to the Y-axis table 8 in the front and rear directions along the Y-axis direction. Mounting heads 20 that move left and right along the X-axis direction are coupled to each of the beams 9, respectively. The mounting head 20 includes a plurality of component holding heads 22 having suction nozzles 21 for sucking and holding components at the tip (suction nozzle holder) (see FIG. 2). Further, the mounting head 20 has a drive unit 24 for raising and lowering the component holding head 22 in the mounting head main body 23 (see FIG. 3).

[0016] The Y-axis table 8, the beam 9, and the mounting head 20 perform a component mounting operation of taking out components from the tape feeder 6 of the component supply unit 5 and mounting them at the mounting positions of the substrate 4. In the component mounting operation, the mounting head 20 moves above the component supply unit 5 and picks up predetermined components with the respective suction nozzles 21. Next, the mounting head 20 moves above the substrate 4, rotates the components held by the respective suction nozzles 21 in a predetermined direction, and repeats a series of mounting turns of mounting them at the respective mounting positions.

[0017] In FIG. 1, each beam 9 is equipped with a head camera 10 located on the lower surface side of the beam 9 and moving integrally with the mounting head 20. When the mounting head 20 moves, the head camera 10 moves above the substrate 4 held by the substrate transfer mechanism 3 and images a substrate mark (not shown) provided on the substrate 4. From the imaging result, the position of the substrate 4 is recognized.

[0018] On the base 2 between the front substrate transfer mechanism 3 and the front component supply unit 5 and between the rear substrate transfer mechanism 3 and the rear component supply unit 5, a component camera 11, a nozzle changer 12, a reference post 13, and a height reference member 14 are respectively arranged. When the mounting head 20 that has taken out a component from the tape feeder 6 of the component supply unit 5 is located above, the component camera 11 images the component held by the suction nozzle 21 from below. From the imaging result, the holding posture of the component is recognized. In the component mounting operation, correction of the mounting position is performed in consideration of the imaging result of the substrate 4 by the head camera 10 and the imaging result of the component by the component camera 11.

[0019] In FIG. 1, the nozzle changer 12 has a plurality of nozzle holding holes in the upper part, and stores the replacement suction nozzle 21 and an inspection jig 15 described later in the nozzle holding holes. The component holding head 22 of the mounting head 20 equipped with the suction nozzle 21 or the inspection jig 15 accesses the nozzle holding hole where it is empty and performs a predetermined removal operation, so that the suction nozzle 21 or the inspection jig 15 mounted on the component holding head 22 is transferred to the nozzle changer 12.

[0020] Also, an empty component holding head 22 accesses the suction nozzle 21 or the inspection jig 15 held by the nozzle changer 12 and performs a predetermined attachment operation, so that the suction nozzle 21 or the inspection jig 15 is mounted on the component holding head 22. Thus, the component holding head 22 can replace the mounted suction nozzle 21 with another suction nozzle 21 or the inspection jig 15.

[0021] In Figure 1, the reference post 13 and height reference member 14 are positioned to the left and right in the X-axis direction, sandwiching the component camera 11 and nozzle changer 12. The reference post 13 and height reference member 14 are made of a hard material such as metal, and calibration marks 16 are placed on the upper surface of each. The head camera 10 captures an image of the calibration marks 16 and recognizes the position of the calibration marks 16 in the horizontal plane, thereby correcting (calibrating) the position of the mounting head 20 in the horizontal plane. In addition, by lowering the component holding head 22 and bringing the suction nozzle 21 into contact with the area of ​​the upper surface of the height reference member 14 other than the calibration marks 16, the height position of the mounting head 20 is corrected (see Figure 3).

[0022] Next, with reference to Figures 2 to 4, the details of the configuration of the mounting head 20 will be explained. Here, we will explain using as an example a mounting head 20 that is a 16-nozzle head with eight component holding heads 22 arranged in the X-axis direction and two rows in the Y-axis direction.

[0023] In Figure 3, the component holding head 22 is configured with a suction nozzle holder 26, which is the tip to which the suction nozzle 21 is attached from below, a rotary joint 27, and a lifting shaft 28. A guide frame 25 hangs down from the lower part of the mounting head body 23 of the mounting head 20. The component holding head 22 moves up and down along the guide frame 25 (arrow a).

[0024] The drive unit 24 of the mounting head body 23 raises and lowers the lifting shaft 28, and the rotary joint 27 and the part holding head 22 move up and down along the guide frame 25 together with the lifting shaft 28. The rotary joint 27 is rotatably mounted on the lifting shaft 28, which rotates around the Z axis. The drive unit 24 rotates the lifting shaft 28 around the Z axis, and the suction nozzle holder 26 rotates around the Z axis in conjunction with the rotation of the lifting shaft 28. As a result, the suction nozzle 21 mounted on the suction nozzle holder 26 (tip) moves up and down and rotates around the Z axis. The drive unit 24 is controlled by the control unit 40 of the part mounting device 1 (Figure 5).

[0025] In Figures 2 to 4, the mounting head body 23 is equipped with a first valve 29, a second valve 30, a flow meter 31, and a filter 32 for each component holding head 22. The first valve 29 and the second valve 30 are 2-input, 1-output air valves and are controlled by the control unit 40. The first valve 29 has an output port T1, a first input port T2, and a second input port T3. The second valve 30 has an output port T4, a first input port T5, and a second input port T6.

[0026] In Figures 3 and 4, the first input port T2 of the first valve 29 is connected to the negative pressure source 33, and the second input port T3 is connected to the output port T4 of the second valve 30. The first input port T5 of the second valve 30 is connected to the positive pressure source 34, and the second input port T6 is connected to the atmospheric opening 35.

[0027] The output port T1 of the first valve 29 is connected to the head body side tube connection portion 36 provided on the mounting head body 23 via a flow meter 31 and a filter 32. The rotary joint 27 of the component holding head 22 is provided with a rotary joint side tube connection portion 37. The rotary joint side tube connection portion 37 is connected to the opening of the component holding surface 21a of the suction nozzle 21 via the rotary joint 27 and the suction nozzle holder 26. The head body side tube connection portion 36 and the rotary joint side tube connection portion 37 are connected by a flexible tube 38. The mounting head body 23 is provided with a damper 39 to protect the tube 38 from impact.

[0028] Thus, the air passage leading from the output port T1 of the first valve 29 to the flow meter 31, filter 32, head body side tube connection 36, tube 38, rotary joint side tube connection 37, rotary joint 27, and suction nozzle holder 26 constitutes the first air passage P1 from the output port T1 of the first valve 29 to the suction nozzle 21. In addition, the air passage leading from the flow meter 31 to the positive pressure source 34 or negative pressure source 33 via the first valve 29 and the second valve 30 (flow path switching section S) constitutes the second air passage P2. Furthermore, the section of the first air passage P1 from the head body side tube connection 36 of the mounting head body 23 to the rotary joint side tube connection 37 of the component holding head 22 is composed of a flexible tube 38.

[0029] In Figures 3 and 4, when the control unit 40 turns the first valve 29 to the OFF state, the output port T1 is connected to the first input port T2, and the output port T1 communicates with the negative pressure source 33, causing the opening of the suction nozzle 21 to be vacuum-suctioned through the first air passage P1. When the control unit 40 turns the first valve 29 to the ON state, the output port T1 is connected to the second input port T3 and communicates with the output port T4 of the second valve 30.

[0030] When the first valve 29 is ON and the control unit 40 turns the second valve 30 ON, the output port T4 is connected to the first input port T5, and the output port T1 of the first valve 29 is in communication with the positive pressure source 34, causing air to be ejected (air blown) from the opening of the suction nozzle 21 through the first air passage P1. Also, when the first valve 29 is ON and the control unit 40 turns the second valve 30 OFF, the output port T4 is connected to the second input port T6, and the output port T1 of the first valve 29 is in communication with the atmospheric opening 35, causing the opening of the suction nozzle 21 to be opened to the atmosphere through the first air passage P1.

[0031] Thus, the first valve 29 and the second valve 30 constitute a flow path switching unit S that switches the first air flow path P1 to be connected to at least a positive pressure source 34 or a negative pressure source 33. The flow rate meter 31 measures the flow rate of air in the first air flow path P1 between the adsorption nozzle 21 and the flow path switching unit S. The first air flow path P1, the second air flow path P2, and the flow path switching unit S then constitute a pneumatic circuit R.

[0032] Next, with reference to Figure 5, the configuration of the control system of the component mounting device 1 will be described. Here, the focus will be on the function of acquiring the air flow rate of the pneumatic circuit R and diagnosing the state of the pneumatic circuit R. The control unit 40 of the component mounting device 1 includes an air leak measurement setting unit 41, a pneumatic circuit inspection unit 42, a measurement data storage unit 43, and a pneumatic circuit state diagnosis unit 44. A display / input unit 45 is connected to the control unit 40. The display / input unit 45 is a display / input means such as a touch panel, and displays the operation screen and various information necessary for the operation of the component mounting device 1. It also displays the inspection mode input screen used when setting the inspection mode of the pneumatic circuit.

[0033] The air leak measurement setting unit 41 displays an inspection mode input screen on the display / input unit 45 to set the inspection mode for the inspection of the pneumatic circuit R (acquisition of air flow rate). Inspection modes include a positive pressure inspection mode performed by supplying positive pressure from a positive pressure source 34, a negative pressure inspection mode performed by supplying negative pressure from a negative pressure source 33, and a positive / negative inspection mode that performs both positive pressure and negative pressure inspection modes. The air leak measurement setting unit 41 also stores the inspection mode set using the display / input unit 45.

[0034] In Figure 5, the pneumatic circuit inspection unit 42 operates the flow path switching unit S (first valve 29, second valve 30) to connect the first air flow path P1 to either a positive pressure source 34 or a negative pressure source 33, while restricting the outflow or inflow of air from the tip of the component holding head 22 (suction nozzle holder 26), according to the set inspection mode, and obtains the air flow rate Q measured by the flow rate meter 31. That is, in positive pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34. Also, in negative pressure inspection mode, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the negative pressure source 33. The pneumatic circuit inspection unit 42 then obtains the flow rate Q1 when the first air flow path P1 is connected to the positive pressure source 34 and the flow rate Q2 when it is connected to the negative pressure source 33.

[0035] The pneumatic circuit inspection unit 42 activates the flow path switching unit S to connect the first air flow path P1 to the positive pressure source 34 or the negative pressure source 33, and after a predetermined waiting time has elapsed, it acquires the air flow rate Q from the flow rate meter 31. This allows for accurate measurement of even minute air flow rates Q. The pneumatic circuit inspection unit 42 associates the air flow rate Q measured by the flow rate meter 31 with information that identifies the component holding head 22 to be inspected, and stores it in the measurement data storage unit 43.

[0036] In Figure 5, the pneumatic circuit inspection unit 42 includes a first flow rate limit setting unit 42a and a second flow rate limit setting unit 42b, which are sub-processing units that restrict the outflow or inflow of air from the tip of the component holding head 22. The first flow rate limit setting unit 42a restricts the outflow or inflow of air when the specified suction nozzle 21 (hereinafter referred to as the "specified nozzle") is attached to the suction nozzle holder 26 (tip) of the component holding head 22 to be inspected.

[0037] First, the first flow rate limit setting unit 42a controls the linear drive mechanism of the Y-axis table 8 and beam 9, and the drive unit 24 of the part holding head 22 to be inspected, to attach the designated nozzle from the nozzle changer 12 to the suction nozzle holder 26 of the part holding head 22 to be inspected. Next, the first flow rate limit setting unit 42a moves the part holding head 22 with the designated nozzle attached above the height reference member 14, and lowers the part holding head 22 to a reference height H0 (Figure 3) where the part holding surface 21a of the designated nozzle contacts the upper surface of the height reference member 14.

[0038] As a result, the opening of the component holding surface 21a of the designated nozzle (suction nozzle 21) comes into contact with the upper surface of the height reference member 14 and is blocked, restricting the outflow or inflow of air. However, because the height reference member 14, which is made of a hard material, comes into contact with the designated nozzle (suction nozzle 21), the opening of the designated nozzle is not completely blocked. As a result, a small gap is formed between the opening of the designated nozzle and the upper surface of the height reference member 14, through which air can flow in or out.

[0039] Thus, the height reference member 14 is a contact member that abuts against the component holding surface 21a of the designated nozzle (suction nozzle 21). The contact member (height reference member 14) is an air flow rate limiting means that limits the first air flow path P1 so that the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 or the negative pressure source 33 becomes a minute flow rate Q0.

[0040] In Figure 5, the second flow rate limiting setting unit 42b restricts the outflow or inflow of air by attaching the inspection jig 15 to the suction nozzle holder 26 (tip portion) of the part holding head 22 to be inspected. Specifically, the second flow rate limiting setting unit 42b controls the linear drive mechanism of the Y-axis table 8 and beam 9, and the drive unit 24 of the part holding head 22 to be inspected, to attach the inspection jig 15, which is held by the nozzle changer 12, to the suction nozzle holder 26 of the part holding head 22 to be inspected.

[0041] The inspection jig 15 has openings or ventilation paths smaller than the opening of the suction nozzle 21 so that the air flow rate Q when the first air passage P1 is connected to the positive pressure source 34 or the negative pressure source 33 becomes a predetermined minute flow rate Q0. In other words, the inspection jig 15 is mounted on the part holding head 22 in place of the suction nozzle 21 and is an air flow rate limiting means that limits the air flow rate Q of air flowing out of or into the first air passage P1 to a minute flow rate Q0. Note that the inspection jig 15 may be configured to limit the air flow rate Q to a minute flow rate Q0 using a breathable material such as a porous material or nonwoven fabric, in addition to having openings formed to limit the air flow rate Q to a minute flow rate Q0.

[0042] In Figure 5, the pneumatic circuit condition diagnosis unit 44 diagnoses the state of the pneumatic circuit R based on the flow rate Q acquired by the pneumatic circuit inspection unit 42 and stored in the measurement data storage unit 43. For example, if the acquired air flow rate Q is greater than a predetermined threshold, the pneumatic circuit condition diagnosis unit 44 diagnoses that an air leak has occurred in the first air passage P1 from the flow meter 31 to the adsorption nozzle 21. Note that the set minute flow rate Q0 may differ between the positive pressure inspection mode and the negative pressure inspection mode, and different thresholds may be used in the condition diagnosis.

[0043] Next, the inspection method for the pneumatic circuit R in the component mounting device 1 will be explained following the flow chart in Figures 6 to 8. In Figure 6, first, the air leak measurement setting unit 41 displays the inspection mode input screen on the display / input unit 45 to allow the user to select the inspection mode for the pneumatic circuit R (ST1). If no inspection mode is selected (No in ST1), that is, if it is selected not to inspect the pneumatic circuit R, the inspection of the pneumatic circuit R is terminated. If any inspection mode is selected (Yes in ST1), the pneumatic circuit inspection unit 42 executes the inspection preparation process (ST2) described later.

[0044] Next, if the positive pressure inspection mode or positive / negative inspection mode is selected (Yes in ST3), the pneumatic circuit inspection unit 42 executes the positive pressure inspection process (ST4) described later. Next, if the negative pressure inspection mode or positive / negative inspection mode is selected (Yes in ST5), the pneumatic circuit inspection unit 42 executes the negative pressure inspection process (ST6) described later. Next, the pneumatic circuit inspection unit 42 stores (outputs) all acquired flow rate Q (flow rate data) in the measurement data storage unit 43 (ST7). The pneumatic circuit inspection unit 42 may also store (output) the flow rate data in the measurement data storage unit 43 each time flow rate data is acquired.

[0045] In Figure 6, if only the positive pressure inspection mode is selected (Yes in ST3, No in ST5), only the positive pressure inspection process (ST4) is executed. If only the negative pressure inspection mode is selected (No in ST3, Yes in ST5), only the negative pressure inspection process (ST6) is executed. If both the positive and negative inspection modes (positive pressure and negative pressure inspection modes) are selected (Yes in ST3, Yes in ST5), both the positive pressure inspection process (ST4) and the negative pressure inspection process (ST6) are executed.

[0046] Next, the details of the inspection preparation process (ST2) will be explained according to the flow chart in Figure 7. In the inspection preparation process (ST2), first, the pneumatic circuit inspection unit 42 resets the counter that identifies the component holding head 22 (N=1) (ST11). Next, the 1 flow rate limit setting unit 42a attaches the designated nozzle held by the nozzle changer 12 to all component holding heads 22 (ST12). Next, the 1 flow rate limit setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14 (ST13).

[0047] Next, the flow rate limit setting unit 42a lowers the part holding head 22(N) to be inspected to a cleaning height H1 (Figure 3) which is higher than the reference height H0 and where the part holding surface 21a of the designated nozzle does not come into contact with the upper surface of the height reference member 14 (contact member) (ST14). Then, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34, and air is blown out from the opening of the designated nozzle (ST15: cleaning blow process). As a result, the air ejected from the opening of the designated nozzle bounces off the surface of the height reference member 14 and hits the part holding surface 21a of the designated nozzle, blowing away dust and other debris that had adhered to the surface of the height reference member 14 and the part holding surface 21a of the designated nozzle.

[0048] In Figure 7, the pneumatic circuit inspection unit 42 then operates the flow path switching unit S so that the first air flow path P1 is connected to the atmospheric opening 35, thereby opening the opening of the designated nozzle to the atmosphere (ST16: atmospheric opening process). Next, the 1 flow rate limit setting unit 42a raises the part holding head 22(N) to be inspected to the standby height H2 (Figure 3) (ST17). Next, if processing has not been completed for all part holding heads 22 (No in ST18), the pneumatic circuit inspection unit 42 counts up the counter (N=N+1) (ST19) and repeats steps (ST13) to (ST17) for the next part holding head 22(N+1). Also, if processing has been completed for all part holding heads 22 (Yes in ST18), the pneumatic circuit inspection unit 42 terminates the inspection preparation process (ST2).

[0049] Next, the details of the positive pressure inspection process (ST4) will be explained according to the flow chart in Figure 8. In the positive pressure inspection process (ST4), first, the pneumatic circuit inspection unit 42 resets the counter that identifies the component holding head 22 (N=1) (ST21). Then, the flow rate limit setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14, lowers it to the reference height H0, and brings the component holding surface 21a of the designated nozzle (suction nozzle 21) into contact with the height reference member 14 (contact member) (ST22: air flow path limiting process). As a result, the air flow rate Q when the first air flow path P1 is connected to the positive pressure source 34 is limited to a minute flow rate Q0.

[0050] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the positive pressure source 34, and air is blown from the opening of the designated nozzle (ST23: blow ON process). Next, after a predetermined waiting time (ST24: timer waiting process), the pneumatic circuit inspection unit 42 acquires the air flow rate Q1(N) measured by the flow rate measuring instrument 31 (ST25: blow flow rate acquisition process). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the atmospheric opening 35, and the opening of the designated nozzle is opened to the atmosphere (ST26: blow OFF process).

[0051] In Figure 8, the pneumatic circuit inspection unit 42 then, if processing is not completed for all component holding heads 22 (No in ST27), increments the counter (N=N+1) (ST28) and repeatedly executes the airflow path restriction process (ST22) and the blow-off process (ST26) for the next component holding head 22 (N+1). If processing is completed for all component holding heads 22 (Yes in ST27), the pneumatic circuit inspection unit 42 terminates the positive pressure inspection process (ST4).

[0052] Next, the details of the negative pressure inspection process (ST6) will be explained according to the flow chart in Figure 9. In the negative pressure inspection process (ST6), first, the pneumatic circuit inspection unit 42 resets the counter that identifies the component holding head 22 (N=1) (ST31). Then, the flow rate limit setting unit 42a moves the component holding head 22 (N) to be inspected above the height reference member 14, lowers it to the reference height H0, and brings the component holding surface 21a of the designated nozzle (suction nozzle 21) into contact with the height reference member 14 (contact member) (ST32: air flow path limiting process). As a result, the air flow rate Q when the first air flow path P1 is connected to the negative pressure source 33 is limited to a minute flow rate Q0.

[0053] Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the negative pressure source 33, thereby causing vacuum suction from the opening of the designated nozzle (ST33: Suction ON process). Next, after a predetermined waiting time (ST34: Timer waiting process), the pneumatic circuit inspection unit 42 acquires the air flow rate Q2(N) measured by the flow rate measuring instrument 31 (ST35: Suction flow rate acquisition process). Next, the pneumatic circuit inspection unit 42 operates the flow path switching unit S so that the first air flow path P1 is connected to the atmospheric opening 35, thereby opening the opening of the designated nozzle to the atmosphere (ST36: Suction OFF process).

[0054] In Figure 9, the pneumatic circuit inspection unit 42 then, if processing is not completed for all component holding heads 22 (No in ST37), increments the counter (N=N+1) (ST38) and repeatedly executes the airflow path restriction process (ST32) and the suction OFF process (ST36) for the next component holding head 22 (N+1). If processing is completed for all component holding heads 22 (Yes in ST37), the pneumatic circuit inspection unit 42 terminates the negative pressure inspection process (ST6).

[0055] As described above, the inspection method for the pneumatic circuit R in the component mounting device 1 of this embodiment includes a first step (air flow path limiting step (ST22), (ST32)) of bringing the component holding surface 21a of the suction nozzle 21 into contact with a contact member (height reference member 14); a second step (blow ON step (ST23), suction ON step (ST33)) of operating the flow path switching unit S to connect the first air flow path P1 to a positive pressure source 34 or a negative pressure source 33; and a third step (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)) of acquiring the air flow rates Q1(N), Q2(N) measured by the flow rate measuring instrument 31.

[0056] Furthermore, the third step is executed after a predetermined waiting time from the second step (timer waiting process (ST24), (ST34)). Also, after the first step, the pneumatic circuit inspection unit 42 performs the second and third steps in at least one of the following cases (Yes in ST1): when the first air passage P1 is connected to the positive pressure source 34 (positive pressure inspection process (ST2)) or when it is connected to the negative pressure source 33 (negative pressure inspection process (ST4)).

[0057] Furthermore, the third step is performed with the component holding head 22(N) under inspection lowered to the reference height H0. That is, the air flow rates Q1(N) and Q2(N) are obtained with the tube 38 connecting the section from the mounting head body 23 to the component holding head 22 of the first air passage P1 extended. By extending the tube 38, it becomes easier to detect cracks in the tube 38 and air leaks from connection points such as the tube connection part 36 on the head body side and the tube connection part 37 on the rotary joint side.

[0058] In this way, in the first step, the pneumatic circuit inspection unit 42 lowers the component holding head 22 to deform the tube 38 into a shape suitable for detecting air leaks from the tube 38 or the connection part of the tube 38 (tube connection part 36 on the head body side, tube connection part 37 on the rotary joint side), and obtains the air flow rates Q1(N) and Q2(N). This makes it possible to detect minute cracks and the like.

[0059] Once the inspection of the pneumatic circuit R is complete, the condition of the pneumatic circuit R is then diagnosed. In the method for diagnosing the pneumatic circuit R in the component mounting device 1, the pneumatic circuit condition diagnosis unit 44 diagnoses the condition of the pneumatic circuit R based on the air flow rates Q1(N) and Q2(N) acquired by the pneumatic circuit inspection unit 42 and stored in the measurement data storage unit 43.

[0060] Next, another embodiment of the inspection method for the pneumatic circuit R in the component mounting device 1 will be described following the flow chart in Figures 10 to 12. Hereafter, the same reference numerals will be used for the same steps as in the inspection method for the pneumatic circuit R shown in Figures 6 to 9, and detailed explanations will be omitted. This other embodiment of the inspection method for the pneumatic circuit R differs from the inspection method for the pneumatic circuit R shown in Figures 6 to 9 in that an inspection jig 15 is used as an air flow rate limiting means. Specifically, parts of the inspection preparation step (ST2), positive pressure inspection step (ST4), and negative pressure inspection step (ST6) are different, and these differences will be explained below.

[0061] In Figure 10, during the inspection preparation process (ST2), after the counter that identifies the part holding head 22 is reset (N=1) (ST11), the second flow rate limit setting unit 42a attaches the inspection fixture 15 held by the nozzle changer 12 to all part holding heads 22 (ST41: inspection fixture attachment process). Next, a cleaning blow process (ST15) and an atmospheric release process (ST16) are performed sequentially on all part holding heads 22. This blows away any dust or debris adhering to the minute openings formed in the inspection fixture 15.

[0062] In Figure 11, during the positive pressure inspection process (ST4), after the counter identifying the component holding head 22 is reset (N=1) (ST21), the blow-on process (ST23), timer waiting process (ST24), blow-flow rate acquisition process (ST25), and blow-off process (ST26) are executed sequentially for all component holding heads 22. As a result, the air flow rate Q1(N) is acquired for all component holding heads 22.

[0063] In Figure 12, during the negative pressure inspection process (ST6), after the counter identifying the component holding head 22 is reset (N=1) (ST31), the following steps are performed sequentially for all component holding heads 22: suction ON process (ST33), timer waiting process (ST34), suction flow rate acquisition process (ST35), and suction OFF process (ST36). As a result, the air flow rate Q2(N) is acquired for all component holding heads 22.

[0064] As described above, another embodiment of the inspection method for the pneumatic circuit R in the component mounting device 1 of this embodiment includes a first step (inspection jig mounting step (ST41)) of restricting the first air passage P1 so that the air flow rate Q when the first air passage P1 is connected to a positive pressure source 34 or a negative pressure source 33 becomes a minute flow rate Q0; a second step (blow ON step (ST23), suction ON step (ST33)) of operating the flow path switching unit S to connect the first air passage P1 to a positive pressure source 34 or a negative pressure source 33; and a third step (blow flow rate acquisition step (ST25), suction flow rate acquisition step (ST35)) of acquiring the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring instrument 31.

[0065] In the first step, instead of the suction nozzle 21, an inspection jig 15 is attached to the part holding head 22 that limits the flow rate Q of air flowing out of or into the first air passage P1 to a minute flow rate Q0. By using the inspection jig 15, the minute flow rate Q0 can be accurately set. In the third step, the part holding head 22 may be lowered to the cleaning height H1 and the tube 38 extended to obtain the air flow rates Q1(N) and Q2(N). This makes it possible to detect air leaks from minute cracks, etc., that cannot be detected when the part holding head 22 is at the standby height H2.

[0066] If there is a limit to the number of inspection fixtures 15 that can be held by the nozzle changer 12, the first, second, and third steps may be performed for each part holding head 22.

[0067] Once the inspection of the pneumatic circuit R is complete and the air flow rates Q1(N) and Q2(N) are obtained, the pneumatic circuit condition diagnosis unit 44 performs a diagnosis of the state of the pneumatic circuit R. Here, with reference to Figure 13, an example of the method for diagnosing the pneumatic circuit R in the component mounting device 1 by the pneumatic circuit condition diagnosis unit 44 will be described.

[0068] In Figure 13, the pneumatic circuit condition diagnosis unit 44 determines the state of the pneumatic circuit R by comparing the air flow rates Q1(N) and Q2(N) with a first threshold Qt1 smaller than the minute flow rate Q0 and a second threshold Qt2 larger than the minute flow rate Q0. Specifically, the pneumatic circuit condition diagnosis unit 44 diagnoses the state of the pneumatic circuit R as good or normal if the air flow rates Q1(N) and Q2(N) are between the first threshold Qt1 and the second threshold Qt2. Furthermore, if the air flow rates Q1(N) and Q2(N) are greater than the second threshold Qt2, the pneumatic circuit condition diagnosis unit 44 diagnoses that there is an abnormality, such as an air leak, in the first air passage P1 from the flow meter 31 to the component holding head 22.

[0069] Furthermore, the pneumatic circuit condition diagnosis unit 44 diagnoses that there is a problem in the second air passage P2 from the flow meter 31 to the positive pressure source 34 or negative pressure source 33 if the air flow rates Q1(N) and Q2(N) are zero. For example, it diagnoses that there is a problem such as a malfunction of the flow meter 31, positive pressure source 34, or negative pressure source 33, or a disconnection of the piping up to the passage switching unit S. In addition, if the air flow rates Q1(N) and Q2(N) are greater than zero and less than the first threshold Qt1, the pneumatic circuit condition diagnosis unit 44 diagnoses that there may be an abnormality in the first air passage P1 or the second air passage P2, and therefore an investigation is necessary.

[0070] Next, the component mounting system 50 will be described with reference to Figure 14. The component mounting system 50 comprises a component mounting device 1A and an information processing device 51. The component mounting device 1A is equipped with a communication unit 46 and can communicate with the information processing device 51 via a communication network 52. Hereafter, the same reference numerals are used for the same parts as in the component mounting device 1 shown in Figure 5, and detailed explanations are omitted.

[0071] The control unit 40A of the component mounting device 1A includes an air leak measurement setting unit 41 and a pneumatic circuit inspection unit 42. The information processing device 51 includes a measurement data storage unit 43 and a pneumatic circuit status diagnosis unit 44. The communication unit 46 of the component mounting device 1A transmits the air flow rates Q1(N) and Q2(N) acquired by the pneumatic circuit inspection unit 42 to the information processing device 51 via the communication network 52. The information processing device 51 stores the received air flow rates Q1(N) and Q2(N) in the measurement data storage unit 43. The pneumatic circuit status diagnosis unit 44 of the information processing device 51 then diagnoses the state of the pneumatic circuit R of the component mounting device 1A based on the air flow rates Q1(N) and Q2(N). This makes it possible to detect minor abnormalities in the pneumatic circuit R that supplies positive or negative pressure to the suction nozzle 21.

[0072] As described above, the component mounting device 1 of this embodiment comprises a component holding head 22 having a suction nozzle 21 at its tip (nozzle holder 26), a mounting head body 23 having a drive unit 24 for raising and lowering the component holding head 22, a first air passage P1 leading to the suction nozzle 21, a flow path switching unit S (first valve 29, second valve 30) for switching the first air passage P1 to be connected to at least a positive pressure source 34 or a negative pressure source 33, and a pneumatic circuit R including a flow rate measuring instrument 31 for measuring the air flow rates Q1(N) and Q2(N) in the first air passage P1 between the suction nozzle 21 and the flow path switching unit S.

[0073] Furthermore, the system includes an air flow rate limiting means (height reference member 14, inspection jig 15) that limits the first air flow path P1 so that the air flow rate Q when the first air flow path P1 is connected to a positive pressure source 34 or a negative pressure source 33 becomes a minute flow rate Q0, and a pneumatic circuit inspection unit 42 that operates the flow path switching unit S while the air flow rate limiting means restricts the outflow or inflow of air from the tip to connect the first air flow path P1 to a positive pressure source 34 or a negative pressure source 33 and obtains the air flow rates Q1(N) and Q2(N) measured by the flow rate measuring instrument 31. This makes it possible to detect minor abnormalities in the pneumatic circuit R that supplies positive or negative pressure to the suction nozzle 21. [Industrial applicability]

[0074] The component mounting device, component mounting system, method for inspecting a pneumatic circuit in a component mounting device, and method for diagnosing a pneumatic circuit in a component mounting device according to the present invention have the effect of being able to detect minor abnormalities in a pneumatic circuit that supplies positive or negative pressure to a suction nozzle, and are useful in the field of mounting components onto a substrate. [Explanation of Symbols]

[0075] 1. 1A Component Mounting Device 4 circuit boards 14. Height reference member (contact member, air flow limiting means) 15. Inspection fixture (air flow rate limiting means) 21 Suction nozzle 22 Parts holding head 23 Mounting Head Body 26. Suction nozzle holder (tip) 31 Flow Measuring Instruments 33. Negative pressure source 34 Positive pressure source 44. Pneumatic Circuit Condition Diagnosis Unit 46 Communications Department 50-component mounting system P1 First air passage P2 Second air channel Q, Q1(N), Q2(N) flow rate Q0 Micro flow rate Qt1 First Threshold Qt2 Second Threshold R Pneumatic Circuit S Flow path switching section

Claims

1. A component mounting device for mounting components onto a circuit board, A component holding head having a suction nozzle at its tip for sucking and holding components, A mounting head body having a drive unit for raising and lowering the component holding head, An air passage leading to the adsorption nozzle; a passage switching unit that switches the air passage to connect to at least a positive pressure source or a negative pressure source; and a pneumatic circuit including a flow rate meter that measures the air flow rate in the air passage between the adsorption nozzle and the passage switching unit. An airflow limiting means that restricts the airflow path so that the airflow rate becomes a minute flow rate when the airflow path is connected to the positive pressure source or the negative pressure source, A component mounting device comprising: an airflow limiting means that restricts the outflow or inflow of air from the tip of the component holding head, and a pneumatic circuit inspection unit that operates the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source and acquires the flow rate of the air measured by the flow rate measuring instrument.

2. The component mounting device according to claim 1, wherein the air flow rate limiting means is a contact member that contacts the component holding surface of the suction nozzle.

3. The component holding head has a replaceable suction nozzle. The component mounting apparatus according to claim 1, wherein the air flow rate limiting means is an inspection jig that is attached to the component holding head in place of the suction nozzle and limits the air flowing out of or into the air passage to the minute flow rate.

4. The component mounting device according to claim 1, further comprising a pneumatic circuit condition diagnosis unit that diagnoses the state of the pneumatic circuit based on the flow rate obtained by the pneumatic circuit inspection unit.

5. The component mounting device according to claim 4, wherein the pneumatic circuit state diagnosis unit determines the state of the pneumatic circuit by comparing the flow rate with a first threshold smaller than the minute flow rate and a second threshold larger than the minute flow rate.

6. The component mounting device according to claim 5, wherein the pneumatic circuit state diagnosis unit diagnoses the state of the pneumatic circuit as good or normal if the flow rate is between the first threshold and the second threshold.

7. The component mounting device according to claim 5, wherein the pneumatic circuit condition diagnosis unit diagnoses that there is a problem in the air passage from the flow meter to the positive pressure source, or in the air passage from the flow meter to the negative pressure source, if the flow rate is zero.

8. The system further comprises a communication unit that communicates with an information processing device equipped with a pneumatic circuit state diagnosis unit that diagnoses the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit, The component mounting device according to any one of claims 1 to 3, wherein the communication unit transmits the flow rate to the information processing device.

9. A component mounting system including a component mounting device for mounting components onto a circuit board and an information processing device capable of communicating with the component mounting device, The aforementioned component mounting device, A component holding head having a suction nozzle at its tip for sucking and holding components, A mounting head body having a drive unit for raising and lowering the component holding head, An air passage leading to the adsorption nozzle; a passage switching unit that switches the air passage to connect to at least a positive pressure source or a negative pressure source; and a pneumatic circuit including a flow rate meter that measures the air flow rate in the air passage between the adsorption nozzle and the passage switching unit. An airflow limiting means that restricts the airflow path so that the airflow rate becomes a minute flow rate when the airflow path is connected to the positive pressure source or the negative pressure source, The airflow limiting means restricts the outflow or inflow of air from the tip of the component holding head, and the flow path switching unit is operated to connect the air flow path to the positive pressure source or the negative pressure source, thereby acquiring the air flow rate measured by the flow rate measuring instrument. The aforementioned information processing device is A component mounting system having a pneumatic circuit condition diagnosis unit that diagnoses the state of the pneumatic circuit based on the flow rate acquired by the pneumatic circuit inspection unit.

10. The component mounting system according to claim 9, wherein the air flow rate limiting means is a contact member that contacts the component holding surface of the suction nozzle.

11. The component holding head has a replaceable suction nozzle. The component mounting system according to claim 9, wherein the air flow rate limiting means is an inspection jig that is attached to the component holding head in place of the suction nozzle and limits the air flowing out of or into the air passage to the minute flow rate.

12. The component mounting system according to claim 9, wherein the pneumatic circuit state diagnosis unit diagnoses the state of the pneumatic circuit by comparing the flow rate with a first threshold smaller than the minute flow rate and a second threshold larger than the minute flow rate.

13. The component mounting system according to claim 12, wherein the pneumatic circuit state diagnosis unit diagnoses the state of the pneumatic circuit as good or normal if the flow rate is between the first threshold and the second threshold.

14. The component mounting system according to claim 12, wherein the pneumatic circuit condition diagnosis unit diagnoses that there is a problem in the air passage from the flow meter to the positive pressure source, or in the air passage from the flow meter to the negative pressure source, if the flow rate is zero.

15. A method for inspecting a pneumatic circuit in a component mounting device, comprising: a component holding head having a suction nozzle at its tip for sucking and holding a component; a mounting head body having a drive unit for raising and lowering the component holding head; and a pneumatic circuit including an air passage leading to the suction nozzle, a passage switching unit for switching the air passage to connect to at least a positive pressure source or a negative pressure source, and a flow rate measuring instrument for measuring the air flow rate in the air passage between the suction nozzle and the passage switching unit, A first step is to restrict the air passage so that the airflow rate when the air passage is connected to the positive pressure source or the negative pressure source is a minute flow rate. A second step involves operating the flow path switching unit to connect the air flow path to the positive pressure source or the negative pressure source, A method for inspecting a pneumatic circuit in a component mounting device, comprising a third step of acquiring the flow rate of the air measured by the flow rate measuring instrument.

16. The first step is to restrict the airflow path by bringing a contact member into contact with the component holding surface of the suction nozzle, a method for inspecting a pneumatic circuit in a component mounting device according to claim 15.

17. The component holding head has a replaceable suction nozzle. The first step is to attach an inspection jig to the component holding head that restricts the air flowing out of or into the air passage to the minute flow rate, in place of the suction nozzle, to the component holding head, a method for inspecting a pneumatic circuit in a component mounting device according to claim 15.

18. A method for diagnosing a pneumatic circuit in a component mounting device, comprising diagnosing the state of the pneumatic circuit based on the flow rate obtained by the inspection method described in any one of claims 15 to 17.

19. A method for diagnosing a pneumatic circuit in a component mounting device according to claim 18, wherein the state of the pneumatic circuit is diagnosed by comparing the flow rate obtained in the third step with a first threshold smaller than the minute flow rate and a second threshold larger than the minute flow rate.

20. The method for diagnosing a pneumatic circuit in a component mounting device according to claim 19, wherein the diagnosis diagnoses the state of the pneumatic circuit as good or normal if the flow rate obtained in the third step is between a first threshold and a second threshold.

21. The method for diagnosing a pneumatic circuit in a component mounting device according to claim 19, wherein the diagnosis diagnoses that if the flow rate is zero, there is a problem in the air passage from the flow meter to the positive pressure source, or in the air passage from the flow meter to the negative pressure source.

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