Soldering apparatus and soldering system, and processing apparatus

JP7871698B2Active Publication Date: 2026-06-09NIKON CORP

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
NIKON CORP
Filing Date
2021-10-29
Publication Date
2026-06-09

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    Figure 0007871698000001
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    Figure 0007871698000002
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    Figure 0007871698000003
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Abstract

This soldering device, which radiates processing light that melts solder disposed on a circuit substrate, comprises: a light radiation device which has a Galvano mirror and radiates processing light via the Galvano mirror; a detection device which detects light from the circuit substrate and generates at least one of image data and shape data; a robot arm which is provided with the light radiation device and the detection device, and which has a drive unit that moves the light radiation device and the detection device; and a control device which, on the basis of said at least one of image data and shape data that changes in conjunction with displacement of the detection device, controls the orientation of the Galvano mirror such that the same position is irradiated with the processing light from the light radiation device, which is displaced together with the detection device.
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Claims

1. A control device for performing data processing for controlling the drive unit of a robot arm that moves an end effector, an imaging device, and a shape measuring device that perform processing on an object, the end effector, the imaging device, and the shape measuring device, The position and orientation of the object are calculated based on the image data acquired by the imaging device during the relative movement between the robot arm and the object as the imaging device and the shape measuring device approach the object, and the shape data representing the three-dimensional shape of the object generated by measuring the object with the shape measuring device. Based on two image data obtained by the imaging device imaging the object at different times during the relative movement, the displacement of the object between those different times is calculated. The calculated position and orientation of the object are added to the calculated displacement of the object to output information on the position and orientation of the object. A control device characterized by comprising a processing unit.

2. The control device generates a control signal for controlling the drive unit of the robot arm based on the information output from the processing unit, and outputs the generated control signal to the robot control unit that controls the drive unit of the robot arm. The control device according to feature 1.

3. The control device according to claim 1 or 2, characterized in that the end effector is at least one of a light irradiation device capable of irradiating processing light, a solder ejection device capable of ejecting solder, and a holding device capable of holding the object.

4. The control device according to any one of claims 1 to 3, characterized in that the shape measuring device comprises two imaging devices different from the imaging device.

5. The end effector is a holding device for holding the first object, As part of the data processing, the control device generates a control signal to control the drive unit of the robot arm so that the first object approaches the second object, based on the position and orientation of the object calculated by adding the calculated displacement of the object to the calculated position and orientation of the object. The control device according to claim 1.

6. The control device, as at least part of the data processing, generates a control signal for controlling the drive unit of the robot arm so that the first object is installed on the object as the second object, based on the position and orientation of the object calculated by adding the calculated displacement of the object to the calculated position and orientation of the object. The control device according to claim 5.

7. The image data obtained by the imaging device taking an image of the object during the relative movement between the robot arm and the object, as the imaging device and the shape measuring device approach the object, and the shape data indicating the three-dimensional shape of the object generated by measuring the object with the shape measuring device, the position and orientation of the object calculated based on these are defined as the first position and first orientation, The first position and first orientation are calculated by a matching process performed using a portion of the shape data that corresponds to the range determined based on the second position and second orientation. The second position and the second position are calculated by performing a matching process using the image data. The control device according to claim 1.

8. The position and orientation of the object are calculated based on the image data obtained by the imaging device taking an image of the object during the relative movement between the robot arm and the object, as the imaging device and the shape measuring device approach the object, and the shape data indicating the three-dimensional shape of the object generated by measuring the object with the shape measuring device, and the position and orientation of the object are defined as the first position and first orientation. The time required for the process of calculating the displacement of the object is shorter than the time required for the process of calculating the first position and the first orientation. The control device according to claim 1.

9. A control method for performing data processing for controlling the drive unit of a robot arm that moves an end effector, an imaging device, and a shape measuring device which perform processing on an object, the end effector, the imaging device, and the shape measuring device, The position and orientation of the object are calculated based on the image data acquired by the imaging device during the relative movement between the robot arm and the object as the imaging device and the shape measuring device approach the object, and the shape data representing the three-dimensional shape of the object generated by measuring the object with the shape measuring device. Based on two image data obtained by the imaging device imaging the object at different times during the relative movement, the displacement of the object between those different times is calculated. The calculated position and orientation of the object are added to the calculated displacement of the object to output information on the position and orientation of the object. A control method characterized by the following:

10. A computer program that causes a computer to execute the control method described in Claim 9.