Ceramic sintered body and plasma generation electrode

Abstract

To provide a technique for improving oxidation resistance of a ceramic sintered body.SOLUTION: The ceramic sintered body including first specified elements consisting of five or six types of elements selected from titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf) tantalum (Ta), and tungsten (W), a second specified element consisting of one type of element selected from yttrium (Y) and aluminum (Al), and a carbon element (C), is characterized in that the sum of the first specified elements, the second specified element and the carbon element included in the ceramic sintered body is 98 atom% or greater, the amount of the second specified element included in the ceramic sintered body is 3000 atom.ppm or less, the amount of carbon included in the ceramic sintered body is 45 atom% or greater and 55 atom% or lower, and a single-phase structure with the first specified elements solid-solved therein is present in the ceramic sintered body.SELECTED DRAWING: Figure 4

Claims

1. A ceramic sintered body, A first specified element consisting of five or six elements selected from titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W), wherein the difference in atomic concentrations measured by energy-dispersive X-ray spectroscopy is less than 5 at%. A second specified element consisting of one element selected from yttrium (Y) and aluminum (Al), It contains the element carbon (C), The total amount of the first specific element, the second specific element, and the carbon element contained in the ceramic sintered body is 98 at% or more. The second specific element contained in the ceramic sintered body is 101 at ppm or more and 3000 at ppm or less. The carbon content in the aforementioned ceramic sintered body is 45 at% or more and 55 at% or less. The relative density is greater than 97.4%. Having a single-phase structure in which a first specified element consisting of the five or six elements described above is solid-solved, A ceramic sintered body characterized by the following.

2. A ceramic sintered body according to claim 1, The first specified element includes zirconium, A ceramic sintered body characterized by the following.

3. A ceramic sintered body according to claim 1 or claim 2, The iron element (Fe) contained in the aforementioned ceramic sintered body is 800 at ppm or less. A ceramic sintered body characterized by the following.

4. An electrode for plasma generation, The invention comprises a ceramic sintered body according to claim 1 or claim 2. Plasma generation electrode.

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