Imaging device

Abstract

The present disclosure relates to a solid-state imaging element, an imaging device, a method for operating an imaging device, a mobile object device, a method for operating a mobile object device, and a program which make it possible to achieve high-accuracy image stabilization by improving the detection accuracy of a multi-IMU. A detection result is synthesized by a plurality of inertial measurement units (IMUs) and outputted, an oscillation signal of a drive frequency serving as a reference for driving an IMU is outputted as a reference signal to each of the plurality of IMUs, and thereby the plurality of IMUs are driven by the oscillation signals of the same drive frequency. A multi-IMU composed of the plurality of IMUs that are driven by the oscillation signals of the same drive frequency is provided integrally with an image sensor, and image stabilization corresponding to the movement of the image sensor is performed. The present disclosure is applicable to an imaging device.

Description

【Technical Field】 , , , 【0004】 , , , , , 【0006】 , , , , , , , , , 【0005】 , , , 【0007】 , , , , , 【0003】 , , 【0001】 The present disclosure relates to an imaging device, and particularly to an imaging device that improves the detection accuracy of a multi-IMU and can correct imaging shake with high precision. 【Background Art】 【0002】 A multi-IMU has been proposed that improves detection accuracy by integrating the detection results of multiple IMUs (Inertial Measurement Units). 【0003】 As a technique for improving the detection accuracy of a multi-IMU, a technique has been proposed that enables appropriate synthesis of the observation values of multiple IMUs according to the noise characteristics of the multiple IMUs and the conditions for the observation values (see Patent Document 1). 【0004】 In addition, a technique has been proposed in which an IMU is mounted on an imaging device and the movement of an image sensor is controlled by an actuator or the like based on observation values to correct imaging shake (Patent Documents 2 and 3). 【0005】 Therefore, it is conceivable to mount this multi-IMU on an imaging device and apply the techniques of Patent Documents 2 and 3 to enable high-precision correction of imaging shake. 【Prior Art Documents】 [ 【Patent Documents】 【0006】 【Patent Document 1】 International Publication No. 2020 / 045099 【Patent Document 2】 Japanese Unexamined Patent Application Publication No. 2014-138380 【Patent Document 3】 Japanese Unexamined Patent Application Publication No.​​​​​​​ Incidentally, in multi-IMU systems using multiple IMUs, such as the example in Patent Document 1, the vibration-type IMU using MEMS (Micro Electro Mechanical Systems) detects angular velocity based on the Coriolis force generated by rotating an object while applying vibration. 【0008】 However, since multiple IMUs generate vibrations, interference can occur between each IMU due to vibrations generated by other IMUs, potentially resulting in hum noise. 【0009】 In particular, due to the recent improvement in manufacturing precision of IMUs, manufacturing variations have decreased, and as more IMUs are manufactured with similar vibration frequencies, interference is more likely to occur, making them more susceptible to hum noise caused by interference. 【0010】 Therefore, simply mounting a multi-IMU on an imaging device may not adequately suppress image fluctuations. 【0011】 Furthermore, even if the effects of noise caused by interference between individual IMUs in a multi-IMU system can be suppressed, there is a risk that image shake cannot be completely suppressed even if only the movement of the main body of the imaging device is detected and the movement of the image sensor is controlled by an actuator or the like in accordance with the detected movement of the main body, as in the techniques shown in Patent Documents 2 and 3. 【0012】 In other words, a multi-IMU that detects the movement of the device itself can detect the movement of the device itself, but it cannot detect vibrations of the image sensor itself, which is supported by an actuator. 【0013】 In particular, when an imaging device is mounted on a device driven by a motor or engine, the image sensor itself will experience vibrations caused by minute high-frequency vibrations from the motor or engine. 【0014】 Therefore, simply detecting the movement of the device itself and correcting the image shake by reflecting it in the movement of the image sensor is not sufficient to correct the image shake that follows the high-frequency vibrations actually occurring in the image sensor. 【0015】 This disclosure has been made in view of the above circumstances, and in particular aims to reduce the effects of beat noise caused by interference between individual IMUs constituting a multi-IMU, thereby realizing a high-precision multi-IMU. 【0016】 Furthermore, this disclosure applies the aforementioned high-precision multi-IMU to an imaging device to detect the movement of the image sensor itself and to correct image shake by tracking the movement resulting from high-frequency vibrations occurring in the image sensor. [Means for solving the problem] 【0017】 The first aspect of the present disclosure of a solid-state image sensor includes an image sensor for capturing an image and an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, wherein the IMU is a solid-state image sensor that outputs the acceleration and angular velocity of the image sensor to a drive control unit that controls the driving of the image sensor. 【0018】 In the first aspect of this disclosure, an image sensor captures an image, an IMU (Inertial Measurement Unit) integrated with the image sensor detects the acceleration and angular velocity of the image sensor, and outputs the acceleration and angular velocity of the image sensor to a drive control unit that controls the driving of the image sensor. 【0019】 The imaging device and the mobile device according to the second aspect of the present disclosure include an image sensor that captures an image, and a solid-state imaging device including an IMU (Inertial Measurement Unit) that is provided integrally with the image sensor and detects the acceleration and angular velocity of the image sensor, a drive unit that controls the position and orientation of the image sensor, and a drive control unit that controls the drive of the drive unit based on inertial navigation using the acceleration and angular velocity of the image sensor or an intermediate output signal to control the position and orientation of the image sensor. 【0020】 The operation method of the imaging device and the operation method of the mobile device according to the second aspect of the present disclosure are operation methods of an imaging device including an image sensor that captures an image, and a solid-state imaging device including an IMU (Inertial Measurement Unit) that is provided integrally with the image sensor and detects the acceleration and angular velocity of the image sensor, and a drive unit that controls the position and orientation of the image sensor, the method including the step of controlling the drive of the drive unit based on inertial navigation using the acceleration and angular velocity of the image sensor or an intermediate output signal to control the position and orientation of the image sensor. 【0021】 In the second aspect of the present disclosure, an image is captured by an image sensor, the acceleration and angular velocity of the image sensor are detected by an IMU (Inertial Measurement Unit) provided integrally with the image sensor, the position and orientation of the image sensor are controlled, and the position and orientation of the image sensor are controlled based on inertial navigation using the acceleration and angular velocity of the image sensor or an intermediate output signal. 【Brief Description of the Drawings】 【0022】 [Figure 1] It is a diagram for explaining a multi-IMU. [Figure 2] It is a diagram for explaining the structure of an IMU. [Figure 3] It is a diagram for explaining the circuit configuration of the IMU readout circuit in FIG. 2. [Figure 4] It is a diagram for explaining the operation of the IMU in FIG. 2. [Figure 5] It is a diagram for explaining the operation of the multi-IMU. [Figure 6] It is a diagram for explaining the interference generated by the multi-IMU. [Figure 7] It is a diagram for explaining the interference generated by the multi-IMU. [Figure 8] It is a diagram for explaining the interference generated by the multi-IMU. [Figure 9] It is a diagram for explaining the first embodiment of the multi-IMU of the present disclosure. [Figure 10] It is a diagram for explaining the configuration example of the multi-IMU in FIG. 9. [Figure 11] It is a flowchart for explaining the angular velocity detection process by the multi-IMU in FIG. 10. [Figure 12] It is a diagram for explaining the first modification example of the first embodiment of the multi-IMU of the present disclosure. [Figure 13] It is a diagram for explaining the configuration example of the multi-IMU in FIG. 12. [Figure 14] It is a flowchart for explaining the angular velocity detection process by the multi-IMU in FIG. 13. [Figure 15] It is a diagram for explaining the second modification example of the first embodiment of the multi-IMU of the present disclosure. [Figure 16] It is a diagram for explaining the configuration example of the multi-IMU in FIG. 15. [Figure 17] It is a flowchart for explaining the angular velocity detection process by the multi-IMU in FIG. 16. [Figure 18] It is a diagram for explaining the third modification example of the first embodiment of the multi-IMU of the present disclosure. [Figure 19] It is a diagram for explaining the configuration example of the multi-IMU in FIG. 18. [Figure 20] It is a diagram for explaining the fourth modification example of the first embodiment of the multi-IMU of the present disclosure. [Figure 21]This figure illustrates a fifth modification of the first embodiment of the multi-IMU of the present disclosure. [Figure 22] This figure illustrates a sixth modified example of the first embodiment of the multi-IMU of the present disclosure. [Figure 23] This figure illustrates a configuration example of a seventh modified example of the first embodiment of the multi-IMU of the present disclosure. [Figure 24] This figure illustrates a second embodiment of the multi-IMU of the present disclosure. [Figure 25] Figure 24 illustrates an example of the configuration of a clustering measurement device that clusters the IMUs of a multi-IMU system. [Figure 26] Figure 25 illustrates an example of the IMU wiring for each cluster in a multi-IMU system, and an example of the configuration of the synthesis unit that combines the angular velocities for each cluster. [Figure 27] Figure 25 illustrates other wiring examples for each cluster of the multi-IMU configuration. [Figure 28] This is a flowchart explaining the clustering process performed by a clustering measurement device. [Figure 29] Figure 26 is a flowchart illustrating the angular velocity detection process using multiple IMUs. [Figure 30] This is a flowchart illustrating a first modification of the clustering process, which is a first modification of the second embodiment of the multi-IMU of the present disclosure. [Figure 31] This is a flowchart illustrating a second variation of the clustering process, which is a second variation of the second embodiment of the multi-IMU of the present disclosure. [Figure 32] This is a flowchart illustrating a third variation of the clustering process, which is a third variation of the second embodiment of the multi-IMU of the present disclosure. [Figure 33] This figure illustrates a fourth modified example of the second embodiment of the multi-IMU of the present disclosure. [Figure 34] Figure 33 is a flowchart illustrating the angular velocity detection process using multiple IMUs. [Figure 35]This diagram illustrates the time-domain changes of white noise, flicker noise, and random walk noise. [Figure 36] This diagram illustrates the changes in the frequency domains of white noise, flicker noise, and random walk noise. [Figure 37] This diagram illustrates the changes in Aran variance for white noise, flicker noise, and random walk noise. [Figure 38] This figure illustrates an example configuration of a third embodiment of the multi-IMU of the present disclosure. [Figure 39] Figure 38 is a flowchart illustrating the angular velocity detection process using multiple IMUs. [Figure 40] Figure 38 illustrates the effect of Allan dispersion on flicker noise using a multi-IMU system. [Figure 41] This figure illustrates a first modified example of a third embodiment of the multi-IMU of the present disclosure. [Figure 42] This diagram illustrates the configuration of the oscillator, which is a mechanical component of the IMU. [Figure 43] This is a diagram explaining the principle of detecting the Coriolis force. [Figure 44] This figure illustrates an example configuration of an IMU unit in a fourth embodiment of the multi-IMU of the present disclosure, which is capable of canceling impacts in the X-axis direction. [Figure 45] This figure illustrates an example configuration of an IMU unit in a fourth embodiment of the multi-IMU of the present disclosure, which is designed to cancel Y-axis shocks. [Figure 46] Figures 44 and 45 illustrate an example of a multi-IMU configuration equipped with an IMU unit having the drive mechanism shown in Figures 44 and 45. [Figure 47] Figure 46 is a flowchart illustrating signal processing using a multi-IMU. [Figure 48] This figure illustrates an example configuration of an IMU block that cancels X-axis impact, which is a first modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 49]This figure illustrates an example configuration of an IMU block that cancels Y-axis impact, which is a first modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 50] This figure illustrates a configuration example in which the Coriolis force output from multiple IMU blocks is time-division output, which is a second modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 51] Figure 50 is a flowchart illustrating signal processing using a multi-IMU. [Figure 52] This figure illustrates an example configuration of an IMU block that cancels Z-axis impact, which is a third modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 53] Figure 52 illustrates the variations in connecting beams within the IMU block. [Figure 54] Figure 52 illustrates the variations in connecting beams within the IMU block. [Figure 55] This figure illustrates an example configuration of an IMU block that cancels Z-axis impact, which is a fourth modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 56] Figure 55 is a flowchart illustrating signal processing using a multi-IMU. [Figure 57] This figure illustrates an example configuration of an IMU block consisting of 4 x 4 IMU units with drive mechanisms in the X-axis direction, which is a fifth modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 58] This figure illustrates an example configuration of an IMU block consisting of 4 x 4 Y-axis oriented drive mechanism IMU units, which is a fifth modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 59] This figure illustrates an example configuration of an IMU block consisting of 4 × 4 IMU units with Z-axis direction drive mechanisms, which is a fifth modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 60] This figure illustrates an example configuration of a multi-IMU comprising an IMU block consisting of 4x4 IMU units, which is a fifth modification of the fourth embodiment of the multi-IMU of the present disclosure. [Figure 61] This figure illustrates a configuration example in which a multi-IMU, comprising an IMU block consisting of n IMU units, which is a fifth embodiment of the multi-IMU of the present disclosure, is applied to image sensor stabilization. [Figure 62] This diagram illustrates an example configuration of an imaging device that achieves image stabilization by driving an optical block. [Figure 63] This diagram illustrates an example configuration of an imaging device that achieves image stabilization by driving an image sensor. [Figure 64] This diagram illustrates a detailed configuration example of an imaging device that achieves image stabilization by driving an image sensor. [Figure 65] This is a diagram illustrating the overview of the imaging device in this disclosure. [Figure 66] This figure illustrates an example of the configuration of an imaging device according to the first modified example of the fifth embodiment. [Figure 67] This is a timing chart explaining the image stabilization process. [Figure 68] Figure 66 is a flowchart illustrating the imaging process performed by the imaging device. [Figure 69] This diagram illustrates the number of IMU units and the accuracy of their correction. [Figure 70] This figure illustrates an example of the configuration of an imaging device according to a second modified example of the fifth embodiment. [Figure 71] This figure illustrates an example of the configuration of an imaging device according to a third modified example of the fifth embodiment. [Figure 72] This diagram illustrates an example configuration of a general-purpose personal computer. [Modes for carrying out the invention] 【0023】 Preferred embodiments of this disclosure will be described in detail below with reference to the attached drawings. In this specification and the drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant descriptions will be omitted. 【0024】 The following describes the configurations for implementing this technology. The explanation will proceed in the following order. 1. Summary of this disclosure 2. First Embodiment 3. First Modified Example of the First Embodiment 4. A second modified example of the first embodiment 5. Third Modification of the First Embodiment 6. A fourth modified example of the first embodiment 7. Fifth Modification of the First Embodiment 8. Sixth Modification of the First Embodiment 9. Seventh Modification of the First Embodiment 10. Second Embodiment 11. First Modification of the Second Embodiment 12. A second modified example of the second embodiment 13. Third Modification of the Second Embodiment 14. Fourth Modification of the Second Embodiment 15. Third Embodiment 16. First Modification of the Third Embodiment 17. Fourth Embodiment 18. First Modification of the Fourth Embodiment 19. Second Modification of the Fourth Embodiment 20. Third Modification of the Fourth Embodiment 21. Fourth Modification of the Fourth Embodiment 22. Fifth Modification of the Fourth Embodiment 23. Fifth Embodiment 24. First Modification of the Fifth Embodiment 25. Second Modification of the Fifth Embodiment 26. Third Modification of the Fifth Embodiment 27. Examples of execution by software 【0025】 <<1. Summary of this Disclosure>> <About Multi-IMU> This disclosure, in particular, reduces the effects of beat noise caused by interference between individual IMUs constituting a multi-IMU (Inertial Measurement Unit), thereby realizing a high-precision multi-IMU. 【0026】 First, in order to explain the overview of this disclosure, we will explain multi-IMU. 【0027】 As shown in the left part of Figure 1, a standalone IMU1 is configured to include, for example, an accelerometer that detects acceleration, which is translational motion, and a gyroscope that detects angular velocity, which is rotational motion, for each of the three axes consisting of the X, Y, and Z axes, thereby detecting acceleration and angular velocity for each of the three axes. 【0028】 While high-precision standalone IMUs exist, generally, the higher the precision, the larger and more expensive they tend to be. Increasing precision leads to larger size and higher costs. 【0029】 Therefore, as shown in the right side of Figure 1, a low-precision but inexpensive IMU1 is provided in multiple units (for example, n units) such as IMU1-1 to 1-n, and the combiner 2 combines the acceleration and angular velocity, which are the detection results of each IMU1-1 to 1-n, thereby reducing the noise density and bias fluctuation to 1 / √n, improving detection accuracy, and thus achieving high precision. This is the multi-IMU10. 【0030】 The device size and cost of the individual low-precision, inexpensive IMUs 1-1 to 1-n that constitute the multi-IMU 10 shown in the right side of Figure 1 can be significantly smaller and less expensive than the device size and cost of a single high-precision IMU 1 as shown in the left side of Figure 1. 【0031】 Hereinafter, when there is no particular need to distinguish between IMU1-1 to 1-n, they will simply be referred to as IMU1, and the same applies to other components. Also, in this specification, hereinafter, IMU1 is assumed to be a small, inexpensive IMU with relatively low accuracy, but it may also be a large, expensive, high-precision IMU. 【0032】 <Structure of IMU> Next, referring to FIG. 2, the structure of IMU1 will be described. 【0033】 Each IMU1 constituting the multi-IMU10 is composed of a vibrator 11 made of silicon, a base 12 for fixing the vibrator 11, and a readout circuit 13 for reading the vibration of the vibrator 11 and outputting the angular velocity, as shown in the right part of FIG. 2. They are bonded in the order shown in the right part of FIG. 2 and integrated by resin molding as shown in the left part of FIG. 2. 【0034】 <Circuit configuration of the readout circuit> Next, referring to FIG. 3, the circuit configuration of the readout circuit 13 in IMU1 will be described. 【0035】 Note that in FIG. 3, the configuration for detecting the angular velocity among the readout circuits constituting IMU1 will be described. Since the configuration for detecting acceleration in IMU1 is a configuration obtained by removing the detection circuit from the configuration for detecting the angular velocity, the description will be specialized for the more complex configuration for detecting the angular velocity. 【0036】 The readout circuit 13 is composed of a drive circuit block 31, a sense circuit block 32, and a digital output circuit block 33. 【0037】 The drive circuit block 31 supplies an oscillation signal consisting of a predetermined drive frequency to the oscillator 11, which is made of MEMS (Micro Electro Mechanical Systems), and the sense circuit block 32, causing the oscillator 11 to vibrate based on the oscillation signal. 【0038】 The sense circuit block 32 detects the vibrations generated in response to the Coriolis force acting on the oscillator 11, which vibrates based on the oscillation signal, as an analog signal and outputs it to the digital output circuit block 33. 【0039】 The digital output circuit block 33 converts the vibrations generated in response to the Coriolis force acting on the oscillator 11, supplied by the sense circuit block 32, from an analog signal to a digital signal and outputs it as angular velocity. 【0040】 More specifically, the drive circuit block 31 includes an oscillator circuit 51 and an automatic gain adjustment circuit 52. 【0041】 The oscillation circuit 51 is composed of RC components and generates an oscillation signal using the vibration supplied from the oscillator 11 as a reference signal, outputting it to the automatic gain adjustment circuit 52 and the phase shift circuit 72 of the sense circuit block 32. 【0042】 The automatic gain adjustment circuit 52 adjusts the gain of the oscillation signal consisting of the drive frequency supplied from the oscillation circuit 51 and supplies it to the oscillator 11, causing the oscillator 11 to vibrate. 【0043】 The sense circuit block 32 includes a charge amplifier circuit 71, a phase shift circuit 72, a synchronous detection circuit 73, and an LPF 74. 【0044】 The charge amplifier circuit 71 detects the vibration of the oscillator 11 as a vibration signal, amplifies it, and supplies it to the phase shift circuit 72. 【0045】 The phase shift circuit 72 adjusts the phase of the vibration signal of the vibrator 11 detected by the charge amplifier circuit 71 based on the oscillation signal supplied from the oscillation circuit 51 and outputs it to the synchronous detection circuit 73. 【0046】 The synchronous detection circuit 73 detects a waveform indicating the Coriolis force acting on the vibrator 11 represented by an envelope from the vibration signal of the vibrator 11 whose phase has been adjusted and outputs it to the LPF 74. 【0047】 The LPF 74 smoothes the waveform indicating the Coriolis force acting on the vibrator 11 and outputs it to the digital output circuit block 33 as information on the angular velocity composed of an analog signal. 【0048】 The digital output circuit block 33 includes an AD conversion circuit 91, a decimation filter 92, and a digital output circuit 93. 【0049】 The AD conversion circuit 91 converts information on the angular velocity composed of the Coriolis force acting on the vibrator 11 from an analog signal into a digital signal and outputs it to the decimation filter 92. 【0050】 The decimation filter 92 averages the information on the angular velocity composed of a digital signal and outputs it to the digital output circuit 93. 【0051】 The digital output circuit 93 outputs the digitized and averaged information on the angular velocity as a digital signal. 【0052】 <Regarding the operation of the IMU> Next, referring to FIG. 4, the operation of the IMU 1 will be described. 【0053】 As shown in the upper left part of FIG. 4, the vibrator 11 oscillates based on a reference signal composed of an oscillation signal of a drive frequency fb whose gain is adjusted by the automatic gain adjustment circuit 52 and oscillated by the oscillation circuit 51. 【0054】 When a Coriolis force acts on the oscillator 11, amplitude modulation due to the Coriolis force is applied. For example, the waveform output from the charge amplifier circuit 71 undergoes amplitude modulation corresponding to the Coriolis force, as shown by waveform fbc with respect to the drive frequency fb. 【0055】 The synchronous detection circuit 73 detects the amplitude modulation due to the Coriolis force from the envelope of waveform fbc as an analog signal waveform representing the Coriolis force, i.e., angular velocity, and outputs it to the LPF 74. 【0056】 The waveform of the analog signal extracted as the Coriolis force in this way is converted into a digital signal by the digital output circuit block 33 and output as a digitized angular velocity value. 【0057】 The multi-IMU combines n IMU1 units, as shown in Figure 5, and outputs the angular velocities detected by each of the IMU1-1 to 1-n units by combining them with a synthesizer 2 to improve accuracy. 【0058】 <Interference caused by multiple IMUs> The multi-IMU 10 is specifically configured as shown in Figure 6, for example. 【0059】 In other words, the multi-IMU 10 in Figure 6 is configured such that IMUs 1-1 to 1-4 are provided on the printed circuit board 110. 【0060】 With this configuration, in the multi-IMU10 shown in Figure 6, the angular velocities detected by each of IMU1-1 to IMU1-4 are combined, resulting in improved detection accuracy and output. 【0061】 Incidentally, it is known that due to manufacturing variations, the drive frequency of IMU1 can vary by, for example, about 3%. 【0062】 Therefore, if IMU1 is designed to have a drive frequency of 20.000kHz, the configuration may be as shown in Figure 6, IMU1-1 to IMU1-4, where IMU1-1 is driven at 20.000kHz, IMU1-2 is driven at 20.010kHz, IMU1-3 is driven at 19.900kHz, and IMU1-1 is driven at 20.020kHz. 【0063】 In such a case, the small frequency difference between the driving frequencies of IMU1-1 to IMU1-4 causes interference between them in the vibration of the oscillator 11. 【0064】 More specifically, as shown in Figure 7, for example, a reference signal consisting of an oscillation signal with a drive frequency fb output via an automatic gain adjustment circuit 52 in a predetermined IMU1 is affected by interference from a reference signal consisting of a drive frequency fb' (≠fb) of another nearby IMU1, which is a disturbance (acoustic vibration). As a result, amplitude modulation occurs in the reference signal actually supplied to the oscillator 11, and it is supplied to the oscillator 11 as an amplitude-modulated signal fe that includes beats corresponding to the frequency difference. 【0065】 Consequently, if a reference signal consisting of a drive frequency fb is supplied to the oscillator 11, the waveform fc shown in Figure 7 is detected as the angular velocity. However, if the reference signal supplied to the oscillator 11 changes to an amplitude-modulated signal fe due to a disturbance, the angular velocity will be detected as an amplitude-modulated signal, shown by the thick line in the figure, instead of the waveform fc that would normally be detected as the angular velocity. This results in an error in the angular velocity. 【0066】 Similarly, beats occur as oscillations of frequencies corresponding to the frequency differences between each of the IMU1-1 through IMU1-4. 【0067】 In other words, as shown in Figure 8, the beat frequency between IMU1-1 and IMU1-2 is 10 Hz, which is the difference between their drive frequencies; the beat frequency between IMU1-1 and IMU1-3 is 100 Hz, which is the difference between their drive frequencies; and the beat frequency between IMU1-1 and IMU1-3 is 20 Hz, which is the difference between their drive frequencies. 【0068】 Furthermore, the beat frequency between IMU1-2 and IMU1-3 is 110Hz, which is the difference between their drive frequencies; the beat frequency between IMU1-2 and IMU1-4 is 10Hz, which is the difference between their drive frequencies; and the beat frequency between IMU1-3 and IMU1-4 is 120Hz, which is the difference between their drive frequencies. 【0069】 As a result, IMU1-1 through IMU1-4 each have error oscillations in their undulation frequencies superimposed due to interference from each other's reference signals. Consequently, IMU1-1 through IMU1-4 detect angular velocities that include errors, and there was a risk that combining these would not yield an accurate angular velocity. 【0070】 <<2. First Embodiment>> <Operating principle of the multi-IMU in this disclosure> Therefore, in the multi-IMU of this disclosure, the oscillation signal of the drive frequency of one of the multiple IMUs constituting the multi-IMU is set as the reference signal, and the other IMUs are driven by the reference signal. By driving all IMUs synchronously at the same drive frequency, the generation of beats caused by interference due to mutual vibrations is suppressed. 【0071】 In other words, in the multi-IMU 200 of this disclosure shown in Figure 9, IMUs 201-1 to 201-4 are arranged on a printed circuit board 210. 【0072】 Here, in the multi-IMU200 shown in Figure 9, the printed circuit board 210 and IMUs 201-1 to 201-4 correspond to the printed circuit board 110 and IMUs 1-1 to 1-4 in the IMU10 shown in Figure 6, respectively. Furthermore, the number of IMUs 201 placed on the printed circuit board 210 is not limited to the four IMUs 201-1 to 201-4 shown in Figure 9, but may be any other number. 【0073】 In the multi-IMU200 shown in Figure 9, of the IMUs 201-1 to 201-4, IMU 201-1 supplies its own driving oscillation signal as a reference signal fm to the remaining IMUs 201-2 to 201-4, and IMUs 201-2 to 201-4 are driven based on the reference signal fm supplied by IMU 201-1. 【0074】 In the following, among IMU201-1 to 201-4, the IMU201 that supplies its own oscillation signal as a reference signal fm to the remaining IMU201 will be referred to as the synchronous master device, and the IMU201 that is driven by the reference signal fm supplied by the IMU201 set as the synchronous master device will be referred to as the synchronous slave device. 【0075】 In other words, in the case of Figure 9, IMU201-1 is the synchronous master device, and the other IMUs, IMUs 201-2 through 201-4, are the synchronous slave devices. 【0076】 In this case, the drive frequency of the oscillation signal supplied by the synchronous master device IMU201-1 becomes the reference drive frequency, and a reference signal fm consisting of the oscillation signal at the reference operating frequency is supplied from the synchronous master device IMU201-1 to the synchronous slave devices IMU201-2 to 201-4. Then, IMU201-2 to 201-4, which function as synchronous slave devices, are driven by the reference signal fm, which is the oscillation signal at the reference drive frequency. 【0077】 As a result, in the case of Figure 9, the oscillation signal of the synchronous master device IMU201-1 at its drive frequency (=20.000kHz) is used as the reference drive frequency oscillation signal, and the reference signal fm, consisting of the reference drive frequency oscillation signal, is supplied to the synchronous slave devices IMU201-2 to 201-4, so that all of IMU201-1 to 201-4 are driven by the same reference signal fm. 【0078】 In the multi-IMU200 shown in Figure 9, the reference signal fm output from IMU201-1 is supplied to IMU201-2 and IMU201-3, and further, the reference signal fm supplied from IMU201-1 is supplied to IMU201-4 via IMU201-2 and IMU201-3. 【0079】 Furthermore, the IMU201 acting as the synchronization master device may be any of IMU201-1 through 201-4. In addition, the reference signal fm may be supplied directly from the IMU201 acting as the synchronization master device to the IMU201 acting as the synchronization slave device, or it may be supplied via another IMU201 acting as the synchronization slave device. 【0080】 As a result, IMUs 201-1 to 201-4 can be driven synchronously at the same drive frequency, thereby suppressing the generation of undulations caused by interference between them. This makes it possible to suppress errors in the angular velocity detected by each of IMUs 201-1 to 201-4, and enables each to detect angular velocity with high accuracy. 【0081】 Furthermore, since it becomes possible to determine angular velocity with high precision in each of IMU201-1 to 201-4, when these are combined, a multi-IMU200 becomes available, enabling even more precise measurement of angular velocity. 【0082】 <Example of a multi-IMU configuration in this disclosure> Next, with reference to Figure 10, an example of the multi-IMU configuration of this disclosure will be described. 【0083】 Furthermore, the example configuration of the multi-IMU200 in Figure 10 shows the external configuration of IMU201-1, which functions as a synchronous master device, and IMU201-2, which functions as a synchronous slave device, as well as the circuit configuration of the read circuit, among the IMU201-1 to 201-4 that make up the multi-IMU200 in Figure 9. 【0084】 Furthermore, the basic configuration of IMU201-3 and IMU201-4, which function as synchronous slave devices, is the same as that of IMU201-2, so their explanation will be omitted as appropriate. 【0085】 IMUs 201-1 and 201-2 are both mounted on the same printed circuit board 210 and each detects angular velocity and outputs it to the combining unit 202. The combining unit 202 combines the angular velocities detected by IMUs 201-1 to 201-4 and outputs the combined angular velocity information as the detection result. 【0086】 The IMU201-1 consists of, from top to bottom in the figure, an oscillator 211-1 made of MEMS, a base 212-1 that fixes the oscillator 211-1, and a readout circuit 213-1 that reads the vibration of the oscillator 211-1 and outputs the angular velocity. 【0087】 Note that oscillator 211-1 has the same basic function as oscillator 11 in Figure 3, so its explanation will be omitted. 【0088】 Furthermore, the IMU201-2 consists of, from top to bottom in the figure, an oscillator 211-2 made of MEMS, a base 212-2 that fixes the oscillator 211-2, and a readout circuit 213-2 that reads the vibration of the oscillator 211-2 and outputs the angular velocity. 【0089】 The readout circuit 213-1 consists of a drive circuit block 231-1, a sense circuit block 232-1, and a digital output circuit block 233-1. 【0090】 Furthermore, the drive circuit block 231-1, sense circuit block 232-1, and digital output circuit block 233-1 correspond to the drive circuit block 31, sense circuit block 32, and digital output circuit block 33 in Figure 3, respectively. 【0091】 The drive circuit block 231-1 includes an oscillator circuit 251-1 and an automatic gain adjustment circuit 252-1. 【0092】 Note that the oscillator circuit 251-1 and the automatic gain adjustment circuit 252-1 have the same basic functions as the oscillator circuit 51 and the automatic gain adjustment circuit 52 in Figure 3, respectively, so their explanations will be omitted. 【0093】 However, since IMU201-1 functions as a synchronous master device, it outputs the oscillation signal from the oscillation circuit 251-1 as a reference signal fm via the automatic gain adjustment circuit 252-1 to the oscillation circuits 251-2 to 251-4 of IMU201-2 to 201-4, which function as synchronous slave devices. 【0094】 The sense circuit block 232-1 includes a charge amplifier circuit 271-1, a phase shift circuit 272-1, a synchronous detection circuit 273-1, and an LPF 274-1. 【0095】 Note that the charge amplifier circuit 271-1, phase shift circuit 272-1, synchronous detection circuit 273-1, and LPF 274-1 have the same basic functions as the charge amplifier circuit 71, phase shift circuit 72, synchronous detection circuit 73, and LPF 74 in Figure 3, respectively, so their explanations will be omitted. 【0096】 The digital output circuit block 233-1 comprises an AD conversion circuit 291-1, a decimation filter 292-1, and a digital output circuit 293-1. 【0097】 Furthermore, the AD conversion circuit 291-1, the decimation filter 292-1, and the digital output circuit 293-1 are essentially identical in function to the AD conversion circuit 91, the decimation filter 92, and the digital output circuit 93 in Figure 3, respectively, so their explanations will be omitted as appropriate. 【0098】 The readout circuit 213-2 consists of a drive circuit block 231-2, a sense circuit block 232-2, and a digital output circuit block 233-2. 【0099】 Furthermore, the drive circuit block 231-2, the sense circuit block 232-2, and the digital output circuit block 233-2 correspond to the drive circuit block 31, the sense circuit block 32, and the digital output circuit block 33 in Figure 3, respectively. 【0100】 The drive circuit block 231-2 includes an oscillator circuit 251-2 and an automatic gain adjustment circuit 252-2. 【0101】 Note that the oscillation circuit 251-2 and the automatic gain adjustment circuit 252-2 have the same basic functions as the oscillation circuit 51 and the automatic gain adjustment circuit 52 in Figure 3, respectively, so their explanation will be omitted. 【0102】 However, since IMU201-2 functions as a synchronous slave device, the oscillator circuit 251-2 receives the input of the reference signal fm supplied from IMU201-1, which acts as the synchronous master device, and performs a pull operation to drive it in synchronization with the reference drive frequency, which is the drive frequency of the reference signal fm (PLL (Phase Locked Loop) locked). As a result, IMU201-2, which functions as a synchronous slave device, is driven by an oscillator signal of the same reference drive frequency in synchronization with IMU201-1, which functions as the synchronous master device. 【0103】 The sense circuit block 232-2 includes a charge amplifier circuit 271-2, a phase shift circuit 272-2, a synchronous detection circuit 273-2, and an LPF 274-2. 【0104】 Note that the charge amplifier circuit 271-2, phase shift circuit 272-2, synchronous detection circuit 273-2, and LPF 274-2 have the same basic functions as the charge amplifier circuit 71, phase shift circuit 72, synchronous detection circuit 73, and LPF 74 in Figure 3, respectively, so their explanations will be omitted. 【0105】 The digital output circuit block 233-2 comprises an AD conversion circuit 291-2, a decimation filter 292-2, and a digital output circuit 293-2. 【0106】 Furthermore, the AD conversion circuit 291-2, the decimation filter 292-2, and the digital output circuit 293-2 are essentially identical in function to the AD conversion circuit 91, the decimation filter 92, and the digital output circuit 93 in Figure 3, respectively, so their explanations will be omitted as appropriate. 【0107】 With the above configuration, the oscillation circuit 251-1 of IMU201-1, which acts as the synchronous master device, supplies a reference signal fm consisting of an oscillation signal of the reference drive frequency to IMU201-2 to 201-4, which act as synchronous slave devices. 【0108】 The oscillation circuits 251-2 to 251-4 of the IMUs 201-2 to 201-4, which act as synchronous slave devices, are PLL-locked to a reference signal fm consisting of an oscillation signal of the reference drive frequency. This allows all IMUs 201-1 to 201-4 constituting the multi-IMU 200 to be driven synchronously by oscillation signals of the same drive frequency. As a result, the occurrence of beats caused by different drive frequencies of multiple IMUs 201 is suppressed, and angular velocity can be detected with high accuracy. 【0109】 <Angular velocity detection process using multiple IMUs in Figure 10> Next, referring to the flowchart in Figure 11, we will explain the angular velocity detection process using the multi-IMU200 in Figure 10. 【0110】 In step S11, the oscillation circuit 251-1 of IMU 201-1, which is the synchronous master device, transmits an oscillation signal with its own drive frequency as the reference drive frequency as the reference signal fm to IMU 201-2 to 201-4, which are the synchronous slave devices. 【0111】 In step S12, each of the oscillator circuits 251-2 to 251-4 of all IMUs 201-2 to 201-4 is PLL-locked to the oscillation signal of oscillator circuit 251-1 at the drive frequency, based on the reference signal fm. 【0112】 As a result of the processing described above, all IMUs 201-1 through 201-4 will be driven in synchronization with the reference signal fm, thereby suppressing beats and reducing errors caused by beats. This allows each of the IMUs 201-1 through 201-4 to measure angular velocity with high precision. 【0113】 In step S13, all IMUs 201-1 to 201-4 detect angular velocity and output it to the combining unit 202. 【0114】 In step S14, the combining unit 202 combines the angular velocities supplied from IMUs 201-1 to 201-4 and outputs the resulting combined angular velocity as the detection result of the multi-IMU 200. 【0115】 Through the above process, all IMUs 201-1 to 201-4 constituting the multi-IMU200 can be driven synchronously based on a reference signal fm consisting of oscillation signals with the same drive frequency. This suppresses errors caused by beats and enables high-precision detection of angular velocity. 【0116】 <<3. First Modification of the First Embodiment>> In the above, we have described an example in which one of the multiple IMUs 201-1 to 201-4 constituting the multi-IMU200 is set as the synchronous master device, and the other IMUs 201 is set as the synchronous slave device, the drive frequency of the synchronous master device is set as the reference drive frequency, and a reference signal fm consisting of an oscillation signal of the reference drive frequency is supplied from the IMU 201 which is the synchronous master device, thereby driving all IMUs 201-1 to 201-4 at the same drive frequency, thereby suppressing the occurrence of errors and enabling high-precision detection of angular velocity. 【0117】 However, if any of the components of the multi-IMU200 are randomly set as the synchronous master device, and the reference drive frequency differs significantly from the drive frequency of the synchronous slave device, the oscillation circuit 251 may not be able to draw the frequency, and PLL lock may not be applied. 【0118】 Thus, if the IMU201, which acts as a synchronous slave device, is unable to acquire the drive frequency of the reference signal fm and therefore cannot apply a PLL lock, the IMU201, as a synchronous slave device, will not be able to operate in sync with the drive frequency of the IMU201, which acts as a synchronous master device. 【0119】 Therefore, the drive frequencies of the multiple IMUs 201-1 to 201-4 that make up the multi-IMU 200 can be measured, and the IMU 201 with a drive frequency close to the median value can be set as the synchronous master device, while the other IMUs 201 can be set as synchronous slave devices. This method can be used to improve the accuracy of pulling the reference signal fm to the reference drive frequency, which is the drive frequency of the reference signal fm. 【0120】 Figure 12 shows an example of a multi-IMU200 configuration in which the drive frequencies of multiple IMU201-1 to 201-4 constituting the IMU200 are measured, and the IMU201 with a drive frequency close to the median is set as the synchronous master device, while the other IMU201s are set as synchronous slave devices. 【0121】 Furthermore, among the components of the multi-IMU200 shown in Figure 12, those components that have the same functions as those in the multi-IMU200 shown in Figure 9 are denoted by the same reference numerals, and their explanations are omitted. 【0122】 The multi-IMU 200 in Figure 12 differs from the multi-IMU 200 in Figure 9 in that a new switching circuit 301 has been added. 【0123】 As shown in Figure 13, the switching circuit 301 detects the drive frequencies of each of the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 that constitute the multi-IMU 200 in Figure 12, sets the IMU 201 with the median drive frequency as the synchronous master device, and sets the other IMUs 201 as synchronous slave devices. 【0124】 The switching circuit 301 then supplies the oscillation signal at the drive frequency supplied from the oscillation circuit 251 of the IMU 201 configured as the synchronous master device to the oscillation circuit 251 of the IMU 201 configured as the synchronous slave device, as a reference signal fm, which is an oscillation signal at the reference drive frequency. 【0125】 As a result, IMU201, configured as a synchronous slave device, is PLL-locked based on a reference signal fm consisting of an oscillation signal with the same drive frequency as IMU201, configured as a synchronous master device. This allows all IMU201-1 to 201-4 constituting the multi-IMU200 to synchronize and detect angular velocity using oscillation signals with the same drive frequency. 【0126】 As a result, it becomes possible to suppress errors in angular velocity detection caused by beats resulting from interference between IMU201s, enabling high-precision angular velocity detection using multiple IMU201s. 【0127】 In Figure 12, an example is shown where, among the IMUs 201-1 to 201-4 that make up the multi-IMU 200, IMU 201-1 is set as the synchronous master device because its drive frequency is close to the median of the drive frequencies of IMUs 201-1 to 201-4, and IMUs 201-2 to 201-4 are set as synchronous slave devices. Therefore, in Figure 12, the switching circuit 301 acquires the oscillation signal of IMU 201-1, which is the synchronous master device, as a reference signal fm, and supplies it to IMUs 201-2 to 201-4, which are set as synchronous slave devices, as schematically represented by arrows. 【0128】 Furthermore, Figure 13 shows the circuit configuration consisting of the readout circuits 213-1 to 213-4 for each of the IMUs 201-1 to 201-4 that constitute the multi-IMU 200 in Figure 12, and the switching circuit 301. 【0129】 Furthermore, the configurations of IMUs 201-1 to 201-4 in Figure 13 are basically the same as those in Figure 10, and IMUs 201-1 to 201-4 are identified by the symbols following "-". 【0130】 In other words, as shown in Figure 13, the switching circuit 301 is connected to the outputs of the oscillation circuits 251-1 to 251-4 and to the inputs of the reference signals to each of them. 【0131】 The switching circuit 301 monitors the oscillation signals output from each of the oscillation circuits 251-1 to 251-4 to determine the drive frequency, sets the IMU 201 equipped with the oscillation circuit 251 that gives the median value as the synchronous master device, and sets the other IMU 201s as synchronous slave devices. 【0132】 The switching circuit 301 then supplies the oscillation signal output from the oscillation circuit 251 of the IMU 201, which is set as the synchronous master device, as a reference signal fm to the IMU 201, which is set as the synchronous slave device. 【0133】 The oscillator circuit 251 of the IMU 201 configured as a synchronous slave device is PLL-locked to the drive frequency of the supplied reference signal fm, thereby driving at the same drive frequency as the oscillator circuit 251 of the IMU 201 configured as a synchronous master device. As a result, the IMU configured as a synchronous master device and the IMU 201 configured as a synchronous slave device are driven at the same drive frequency. 【0134】 <Angular velocity detection process using multiple IMUs in Figure 13> Next, referring to the flowchart in Figure 14, the angular velocity detection process using the multi-IMU200 in Figure 13 will be explained. 【0135】 In step S31, the switching circuit 301 drives all the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 to detect the drive frequency of the oscillation signal. 【0136】 In step S32, the switching circuit 301 identifies the IMU 201 whose oscillation frequency is closest to the median value among the drive frequencies of all the oscillation circuits 251-1 to 251-4 of the detected IMUs 201-1 to 201-4. 【0137】 In step S33, the switching circuit 301 sets the IMU 201 closest to the median value as the synchronous master device and sets the other IMU 201s as synchronous slave devices. 【0138】 In step S34, the switching circuit 301 switches the connection to extract the oscillation signal from the oscillation circuit 251 of the IMU 201 configured as the synchronous master device as a reference signal fm, and supplies it to the oscillation circuit 251 of the IMU 201 configured as the synchronous slave device. 【0139】 In step S35, each of the oscillator circuits 251-1 to 251-4 of IMUs 201-1 to 201-4 is PLL-locked to the oscillation signal of the oscillator circuit 251 of IMU 201, which is the synchronization master device, based on the reference signal fm. 【0140】 Through these processes, all IMUs 201-1 through 201-4 are driven in synchronization with the reference signal fm, which suppresses beat noise and reduces errors, allowing each to measure angular velocity with high precision. 【0141】 In step S36, all IMUs 201-1 to 201-4 detect angular velocity and output it to the combining unit 202. 【0142】 In step S37, the combining unit 202 combines the angular velocities supplied from IMUs 201-1 to 201-4 and outputs the resulting combined angular velocity as the detection result of the multi-IMU 200. 【0143】 Through the above process, all IMUs 201-1 to 201-4 constituting the multi-IMU200 can be driven synchronously based on a reference signal fm consisting of oscillation signals with the same drive frequency. This suppresses errors caused by beats and enables highly accurate detection of angular velocity. 【0144】 Furthermore, since the drive frequency of the IMU201 set in the synchronous master device will be set to the median value of all IMU201s, the difference between this and the drive frequency of the reference signal fm supplied to the IMU201 set in the synchronous slave device will be minimized. This makes it easier to pull the IMU201 to the reference drive frequency, preventing PLL lock and thus suppressing the inability to synchronize. 【0145】 <<4. Second Modification of the First Embodiment>> In the above, we have described an example of improving the accuracy of pulling the reference signal fm to the reference drive frequency, which is the drive frequency of the reference signal fm, by measuring the drive frequencies of multiple IMUs 201-1 to 201-4 that make up the multi-IMU200, setting the IMU201 with a drive frequency close to the median value as the synchronous master device, and setting the other IMUs 201 as synchronous slave devices. 【0146】 However, since the multiple IMUs 201-1 to 201-4 that make up the multi-IMU200 only need to have the same drive frequency, a configuration may be provided in which a reference signal fm is generated separately from IMUs 201-1 to 201-4 and supplied to IMUs 201-1 to 201-4. 【0147】 Figure 15 shows an example of a multi-IMU200 configuration in which a reference signal generation unit is provided in the IMU200 to generate a reference signal fm, and the reference signal fm is supplied to IMU201-1 to 201-4. 【0148】 Furthermore, among the components of the multi-IMU200 shown in Figure 15, those components that have the same functions as those in the multi-IMU200 shown in Figure 9 are denoted by the same reference numerals, and their explanations are omitted. 【0149】 The multi-IMU 200 in Figure 15 differs from the multi-IMU 200 in Figure 9 in that a new reference generation unit 321 has been added. 【0150】 The reference generation unit 321 generates an oscillation signal fm, which has the design value drive frequency as the reference drive frequency, during the manufacturing of the IMU 201, and supplies it to IMUs 201-1 to 201-4. 【0151】 More specifically, as shown in Figure 16, the reference generation unit 321 is connected to the respective oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 that constitute the multi-IMU 200 in Figure 15, and supplies the generated reference signal fm to the respective oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4. 【0152】 As a result, IMUs 201-1 to 201-4 are PLL-locked based on the reference signal fm supplied from the reference generator 321, enabling all IMUs 201-1 to 201-4 constituting the multi-IMU 200 to detect angular velocity in synchronization with the reference signal fm. 【0153】 As a result, it becomes possible to suppress errors in angular velocity detection caused by beats resulting from interference between IMU201s, enabling high-precision angular velocity detection using multiple IMU201s. 【0154】 In Figure 15, the reference generation unit 321 effectively functions as a synchronization master device, and the IMUs 201-1 to 201-4 function as synchronization slave devices. The arrows schematically represent the fact that the reference generation unit 321 supplies the reference signal fm to all of the IMUs 201-1 to 201-4. 【0155】 Furthermore, Figure 16 shows the circuit configuration consisting of the readout circuits 213-1 to 213-4 for each of the IMUs 201-1 to 201-4 that constitute the multi-IMU 200 in Figure 15, and the reference generation unit 321. 【0156】 Furthermore, the configurations of IMUs 201-1 through 201-4 are basically the same as those shown in Figure 10, and IMUs 201-1 through 201-4 are identified by the symbols following "-". 【0157】 <Angular velocity detection process using multiple IMUs in Figure 16> Next, referring to the flowchart in Figure 17, we will explain the angular velocity detection process using the multi-IMU200 shown in Figure 16. 【0158】 In step S51, the reference generation unit 321 sets itself as a synchronization master device and sets all IMUs 201-1 to 201-4 as synchronization slave devices. 【0159】 In step S52, the reference generation unit 321 supplies the reference signal fm to the respective oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4, which are set as synchronous slave devices. 【0160】 In step S53, each of the oscillator circuits 251-1 to 251-4 of all IMUs 201-1 to 201-4 is PLL-locked to the drive frequency of the reference signal fm, based on the reference signal fm. 【0161】 In step S54, all IMUs 201-1 to 201-4 detect angular velocity and output it to the combining unit 202. 【0162】 In step S55, the combining unit 202 combines the angular velocities supplied from IMUs 201-1 to 201-4 and outputs the resulting combined angular velocity as the detection result of the multi-IMU 200. 【0163】 Through the above process, all IMUs 201-1 to 201-4 constituting the multi-IMU200 can be driven synchronously based on a reference signal fm consisting of oscillation signals with the same drive frequency. This suppresses errors caused by beats and enables highly accurate detection of angular velocity. 【0164】 <<5. Third Modification of the First Embodiment>> In the above, we have described an example in which each of the IMUs 201-1 to 201-4 constituting the multi-IMU 200 is configured on a printed circuit board 210. However, the oscillators 211-1 to 211-4 of the IMUs 201-1 to 201-4 may be formed on a common silicon base 212, and one of the IMUs 201 may be set as the synchronous master device and the other IMUs 204 may be set as the synchronous slave device. 【0165】 Figure 18 shows an example in which the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a common silicon base 212, with IMU 201-1 set as the synchronous master device and IMUs 201-2 to 201-4 set as the synchronous slave devices. 【0166】 More specifically, as shown in Figure 19, the oscillation signal at the drive frequency generated by the oscillation circuit 251-1 of IMU201-1, which is configured as a synchronous master device, is supplied as a reference signal fm to the oscillation circuit 251-2 of IMU201-2, which is configured as a synchronous slave device. 【0167】 As a result, the oscillator circuit 251-2 of IMU201-2, which is set as a synchronous slave device, is drawn to the drive frequency of the reference signal fm, and thus drives in synchronization with the drive frequency of the oscillator circuit 251-1 of IMU201-1, which is set as a synchronous master device. 【0168】 The reference signal fm is also supplied to IMUs 201-3 and 201-4, which are configured as synchronous slave devices. As a result, the oscillation circuits 251-3 and 251-4 of IMUs 201-3 and 201-4 are driven in synchronization with the drive frequency of the oscillation circuit 251-1 of IMU 201-1, which is configured as a synchronous master device. 【0169】 As a result, all IMUs 201-1 to 201-4 are driven synchronously by the reference signal fm, which suppresses errors caused by beats and enables the detection of highly accurate angular velocity. Furthermore, since the oscillators 211-1 to 211-4 are formed on the same base 212, it becomes possible to miniaturize the device configuration and reduce costs. 【0170】 Furthermore, the angular velocity detection process using the multi-IMU200 shown in Figure 18 is the same as the process described with reference to the flowchart in Figure 11, so its explanation will be omitted. 【0171】 <<6. Fourth Modification of the First Embodiment>> In the above, we have described a multi-IMU 200 in which the oscillators 211-1 to 211-4 of IMU 201-1 to 201-4 are formed on a common silicon base 212, with one of them set as a synchronous master device and the others as synchronous slave devices. Furthermore, the above-mentioned switching circuit 301 may also be provided on the base. 【0172】 In other words, while we have described an example in the multi-IMU 200 of Figure 12 in which the switching circuit 301 is provided on the printed circuit board 210 on which IMUs 201-1 to 201-4 are formed, the switching circuit with the same function may also be formed on the base 212 on which the oscillators 211-1 to 211-4 are formed. 【0173】 Figure 20 shows an example configuration of a multi-IMU 200 in which a switching circuit 301' having the same function as the switching circuit 301 is formed on a base 212 on which oscillators 211-1 to 211-4 are formed. 【0174】 Even with this configuration, it is possible to detect angular velocity with high accuracy, similar to the multi-IMU 200 in Figure 12. Furthermore, by forming the oscillators 211-1 to 211-4 and the switching circuit 301' on the same base 212, it is possible to miniaturize the device and reduce costs. 【0175】 <<7. Fifth Modification of the First Embodiment>> In the above, we have described an example in which the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 are formed on a common silicon base 212, and a switching circuit 301' is further provided on the base 212. 【0176】 However, as shown in the multi-IMU 200 in Figure 15, a reference generation unit with the same function as the reference generation unit 321 may be formed instead of the switching circuit 301. 【0177】 In other words, while we have described an example in the multi-IMU 200 of Figure 20 in which a switching circuit 301' is provided on a printed circuit board 210 on which IMUs 201-1 to 201-4 are formed, instead of the switching circuit 301', a reference generation unit having the same function as the reference generation unit 321 of Figure 15 may be formed on a base 212 on which oscillators 211-1 to 211-4 are formed. 【0178】 Figure 21 shows an example configuration of a multi-IMU 200 in which a reference generation unit 321' having the same function as the reference generation unit 321 is formed on a base 212 on which oscillators 211-1 to 211-4 are formed. 【0179】 Even with this configuration, it is possible to detect angular velocity with high accuracy, similar to the multi-IMU 200 in Figure 15. Furthermore, since the oscillators 211-1 to 211-4 and the reference generation unit 321 are formed on the same base 212, it is possible to miniaturize the device configuration and reduce costs. 【0180】 <<8. Sixth Modification of the First Embodiment>> The above describes an example of how synchronizing the drive frequencies of the oscillation circuits 251-1 to 251-4 of the IMUs 201-1 to 201-4 that constitute the multi-IMU200 can suppress the occurrence of beats and improve the accuracy of the detected angular velocity. 【0181】 However, even if the drive frequency can be synchronized, there is still noise that cannot be eliminated due to external disturbances causing the synchronization to break. 【0182】 Therefore, for noise that cannot be removed due to synchronization errors, etc., even if the drive frequencies of the oscillation circuits 251-1 to 251-4 of IMU 201-1 to 201-4 are synchronized, the oscillators 211-1 to 211-4 of IMU 201-1 to 201-4 may be formed on physically independent bases, and acoustic insulators may be placed between the common contact points where each is positioned to remove the noise. 【0183】 Figure 22 shows an example of a multi-IMU 200 configuration in which the oscillators 211-1 to 211-4 of IMU 201-1 to 201-4 are each formed on independent bases, and acoustic insulators are placed at the contact points with the common area where each base is located, thereby mechanically reducing the level of acoustic interference. 【0184】 In addition, in the multi-IMU200 shown in Figure 22, components with the same functions as those in the multi-IMU200 shown in Figure 18 are denoted by the same reference numerals, and their explanations are omitted as appropriate. 【0185】 In other words, the difference between the multi-IMU 200 in Figure 22 and the multi-IMU 200 in Figure 18 is that the oscillators 211-1 to 211-4 are provided with bases 212'-1 and 212'-2-1 to 212'-2-4, as well as acoustic insulators 351-1 to 351-4, instead of base 212. 【0186】 In the multi-IMU200 shown in Figure 22, the oscillators 211-1 to 211-4 are each formed on a physically independent silicon base 212'-2-1 to 212'-2-4. 【0187】 Furthermore, the physically independent bases 212'-2-1 to 212'-2-4 are each formed on a common base 212-1, with acoustic insulators 351-1 to 351-4 in between. 【0188】 The acoustic insulators 351-1 to 351-4 are configured to absorb vibrations and are formed on a common base 212-2 for the oscillators 211-1 to 211-4, each supporting a base 212'-2-1 to 212'-2-4. 【0189】 With this configuration, the acoustic insulators 351-1 to 351-4 absorb vibrations generated in the transducers 211-1 to 211-4 and the base 212, respectively, thereby isolating the vibrations of the transducers 211-1 to 211-4 and suppressing the transmission of vibrations between them. 【0190】 This makes it possible to reduce noise caused by disturbances even when IMUs 201-1 to 201-4 synchronize their drive frequencies, and as a result, it becomes possible to detect angular velocity with higher accuracy. 【0191】 <<9. Seventh Modification of the First Embodiment>> In the above, we have described an example of eliminating noise that cannot be eliminated even by synchronizing the drive frequencies of IMUs 201-1 to 201-4, by forming the oscillators 211-1 to 211-4 of IMUs 201-1 to 201-4 on separate bases, and further inserting acoustic insulators at the contact points with the common area where each base is located. 【0192】 However, for noise that cannot be eliminated by synchronizing the drive frequencies of IMUs 201-1 to 201-4, the beat may be directly detected and eliminated by generating an inverse phase signal of the detected beat. 【0193】 Figure 23 shows an example configuration of the IMU 201, which detects beats from the oscillation signal output from the oscillation circuit 251, generates an inverse phase signal of the detected beat, and eliminates the beat. 【0194】 In other words, the IMU201 in Figure 23 differs from the IMU201 in Figure 10 in that it is equipped with a beat detection circuit 371 and a synthesis unit 372. 【0195】 The beat detection circuit 371 detects the beat signal fg from the oscillation signal output by the oscillation circuit 251, and generates an inverse phase signal fg-1 of the beat signal, which it supplies to the combining unit 372. 【0196】 The combining unit 372 removes the beat component from the signal output from the phase shift circuit 272 by combining the beat signal fg-1 (the inverse phase signal of the beat signal) with the signal output from the phase shift circuit 272, and outputs it to the synchronous detection circuit 273. 【0197】 This makes it possible to reduce the noise generated even when IMU201-1 to 201-4 synchronize their drive frequencies, and as a result, it becomes possible to detect angular velocity with higher accuracy. 【0198】 <<10. Second Embodiment>> The above describes an example in which the IMUs 201-1 to 201-4 synchronize their drive frequencies to suppress the generation of beats and enable highly accurate detection of angular velocity. 【0199】 However, if the drive frequency of the IMU201 differs significantly from that of the synchronous slave device, the oscillator circuit 251 may not be able to pull in the signal, and PLL lock may not be applied. 【0200】 Therefore, the accuracy of angular velocity detection can be improved by measuring the drive frequencies of multiple IMU201s, forming a cluster of IMU201s that can synchronize their drive frequencies as described above, detecting the angular velocity by synchronizing the drive frequencies on a cluster-by-cluster basis, acquiring the angular velocities obtained on a cluster-by-cluster basis in a time-division manner, and combining them. 【0201】 In other words, consider the case shown in Figure 24 where the drive frequency of the oscillation signal driving IMU201-1 and 201-3 is 20.000 kHz, and the drive frequency of the oscillation signal driving IMU201-2 and 201-4 is 20.100 kHz. 【0202】 In such a case, based on the drive frequencies of the oscillation signals that drive IMUs 201-1 to 201-4, the drive frequencies of IMUs 201-1 and 201-3 are the same, so they are formed as cluster 411-1 as shown in Figure 24. Furthermore, since the drive frequencies of IMUs 201-2 and 201-4 are the same, they are clustered to form another cluster 411-2. 【0203】 Furthermore, in the multi-IMU200 shown in Figure 24, a synchronous master device and a synchronous slave device are set for each cluster 411-1 and 411-2, so that the drive frequency of the IMU201 is synchronized on a cluster basis, and angular velocity is detected. 【0204】 Furthermore, by acquiring the angular velocity detected on a cluster-by-cluster basis in a time-division manner and performing a composite calculation, it becomes possible to detect the angular velocity with higher accuracy. 【0205】 <IMUのクラスタリング> Next, referring to Figure 25, we will explain the clustering of the multiple IMUs 201 provided in the multi-IMU 200. 【0206】 The clustering of multiple IMU201 units in the multi-IMU200 is performed as part of the manufacturing process of the multi-IMU200. 【0207】 More specifically, clustering is performed by the clustering measurement device 451 and the connection unit 452 shown in Figure 25. 【0208】 The clustering measurement device 451 is used in the manufacturing process of the multi-IMU 200 and is a separate component from the multi-IMU 200. The clustering measurement device 451 measures the drive frequencies output from each oscillation circuit 251 of the multiple IMUs 201 provided in the multi-IMU 200, groups IMUs 201 with similar measured drive frequencies that can be driven at the same drive frequency into the same cluster, and outputs information to the connection unit 452 indicating which cluster each IMU 201 belongs to. 【0209】 More specifically, the clustering measurement device 451 comprises a reference frequency generation unit 461, a frequency measurement unit 462, and a clustering calculation unit 463. 【0210】 The reference frequency generation unit 461 generates a reference frequency for measuring the drive frequencies of multiple IMUs 201 and outputs it to the frequency measurement unit 462. 【0211】 The frequency measurement unit 462 measures the drive frequency of the oscillation signal output from the oscillation circuit 251 of each IMU 201 based on the reference frequency supplied by the reference frequency generation unit 461 (monitoring the oscillation monitor output) and outputs it to the clustering calculation unit 463. 【0212】 The clustering calculation unit 463 clusters IMUs 201 with similar drive frequencies into the same cluster based on the drive frequencies of the oscillation signals output from the oscillation circuit 251 of each IMU 201, and outputs information to the connection unit 452 indicating which cluster each IMU 201 belongs to. 【0213】 Based on information supplied by the clustering measurement device 451 indicating which cluster each IMU 201 belongs to, the connection unit 452 sets one of the IMU 201s belonging to the same cluster as the synchronous master device and sets the other IMU 201s as synchronous slave devices, and forms a connection to connect the output of the automatic gain adjustment circuit 252 of the IMU 201 set as the synchronous master device to the oscillation circuit 251 of the IMU 201 set as the synchronous slave device. 【0214】 <Combination of angular velocities detected for each cluster> Next, referring to Figure 26, we will explain the synthesis of angular velocities detected for each cluster of the clustered IMU201. 【0215】 The synthesis of angular velocities detected for each cluster of the clustered IMU201 is achieved by combining the time-division detected angular velocities on a cluster-by-cluster basis using the synthesis calculation unit 471. 【0216】 The synthesis unit 471 is configured separately from the multi-IMU 200, but it may also be configured as an integrated unit with the multi-IMU 200. 【0217】 The synthesis unit 471 includes a resampler 481, an interference removal unit 482, and a synthesis unit 483. 【0218】 The resampler 481 adjusts the sampling frequency of data that differs for each cluster clustered by the clustering measurement device 451, using an arbitrary resampling method such as zero-order hold or first-order interpolation, and outputs it to the interference removal unit 482. 【0219】 In other words, since the clusters of the IMU201 are set based on the drive frequency, the angular velocity detected for each cluster will have a different sampling frequency. Therefore, the resampler 481 equalizes the sampling frequency of the angular velocity supplied for each cluster. 【0220】 The interference removal unit 482 removes interference components between clusters, for example, by filtering, and outputs the result to the synthesis unit 483. Note that the processing in the interference removal unit 482 may be omitted if the drive frequencies between clusters are far apart, as interference will not occur in such cases. 【0221】 The combining unit 483 combines the angular velocities detected by each IMU 201 and outputs them as a single detected value. The combining unit 483 combines the angular velocities detected by the IMU 201 into a single detected value as a simple average, a weighted average, or a dynamically weighted average depending on the noise conditions. 【0222】 Furthermore, a cluster-based synthesis unit may be provided before the resampler 481, and the processing of the resampler 481 and the interference removal unit 482 may be performed on the angular velocity, which is treated as a single detected value for each cluster. 【0223】 <Example of wiring> Next, we will explain an example of IMU201 cluster-based wiring made by the wiring unit 452. For example, consider the case where IMU201-1 and 201-3 are set to cluster 411-1, and IMU201-2 and 201-4 are set to cluster 411-2, as shown in Figure 24. 【0224】 In such cases, the connection unit 452 sets one of the IMU201s in each cluster as the synchronization master device and the other IMU201s as synchronization slave devices. The IMU201 to be set as the synchronization master device may be selected based on which IMU201 has the median synchronization frequency within the cluster. 【0225】 In the example shown in Figure 25, for cluster 411-1, IMU201-1 is configured as the synchronous master device, and IMU201-3 is configured as the synchronous slave device. 【0226】 As a result, the connection section 452 is wired to connect the output of the automatic gain adjustment circuit 252-1 of IMU201-1 to the oscillation circuit 251-3 of IMU201-3, as shown by the dashed line in Figure 26. 【0227】 Furthermore, in Figure 26, for cluster 411-2, IMU201-2 is configured as the synchronous master device, and IMU201-4 is configured as the synchronous slave device. 【0228】 As a result, the connection part 452 is connected so as to connect the output of the automatic gain adjustment circuit 252-2 of the IMU201-2 and the oscillation circuit 251-4 of the IMU201-4 as shown by the one-dot chain line in FIG. 26. 【0229】 In addition, as shown in FIG. 24, it may be clustered into clusters other than the clusters 411-1 composed of the IMU201-1 and 201-3 and the clusters 411-2 composed of the IMU201-2 and 201-4. 【0230】 For example, it may be clustered into a cluster 411-11 composed of the IMU201-2 and a cluster 411-12 composed of the IMU201-1, 201-3, and 201-4. 【0231】 When clustered in this way, the IMU201-1 to 201-4 are connected as shown in FIG. 27 by the connection part 452. 【0232】 That is, in FIG. 27, for the cluster 411-11, since only the IMU201-2 is configured alone, there is no new connection. 【0233】 Also, for the cluster 411-12, when the IMU201-1 is set as the synchronization master device and the IMU201-3 and 201-4 are set as the synchronization slave devices, the output of the automatic gain adjustment circuit 252-1 of the IMU201-1 and the oscillation circuits 251-3 and 251-4 of the IMU201-3 and 201-4 are connected as shown by the one-dot chain line in FIG. 27. 【0234】 Furthermore, in the above, an example in the case where there are two clusters has been described, but the number of clusters may be a number of 2 or more. Also, the number of IMU201s belonging to each cluster may be any number. 【0235】 <Clustering process> Next, the clustering process performed by the clustering measurement device 451 will be explained with reference to the flowchart in Figure 28. 【0236】 In step S101, the frequency measurement unit 462 measures the drive frequency of all IMUs 201 based on the reference frequency supplied by the reference frequency generation unit 461, and outputs the measurement result to the clustering calculation unit 463. 【0237】 In step S102, the clustering calculation unit 463 selects the IMU 201 with the lowest drive frequency. 【0238】 In step S103, the clustering calculation unit 463 sets IMUs within a threshold frequency that is a predetermined width B higher than the drive frequency of the selected IMU 201 into the same cluster. 【0239】 In step S104, it is determined whether or not there are any unprocessed, unclustered IMU201s. 【0240】 If there are any unprocessed, unclustered IMU201s in step S104, the process proceeds to step S105. 【0241】 In step S105, the clustering calculation unit 463 selects an unprocessed IMU 201 with a frequency higher than the threshold frequency, and the process returns to step S102. 【0242】 In other words, until all IMU201s are clustered, the process of clustering IMU201s that are not yet clustered, ranging from the lowest drive frequency to a threshold frequency a predetermined width B higher, into the same cluster is repeated. That is, IMU201s with drive frequencies within a bandwidth set by the predetermined width B, ranging from the lowest drive frequency, are clustered into the same class. 【0243】 Then, if it is determined in step S105 that there are no unprocessed IMU201s, the process proceeds to step S106. 【0244】 In step S106, the clustering calculation unit 463 outputs information to the connection unit 452 indicating which IMU 201 belongs to which cluster. Accordingly, the connection unit 452 connects the IMU 201 on a cluster basis. 【0245】 Through the above process, multiple IMU201s are clustered based on their operating frequency, and each cluster is connected to a specific IMU201. 【0246】 In the above, we have described an example in which the process of setting up IMU201s up to a threshold frequency that is a predetermined width B higher than the lowest drive frequency among the unprocessed IMU201s in the same cluster is repeated. However, the process of setting up IMU201s up to a threshold frequency that is a predetermined width B lower than the highest drive frequency among the unprocessed IMU201s in the same cluster may also be repeated. 【0247】 Furthermore, while the above has described an example in which the IMU 201 is connected to each cluster by the connection section 452, for example, the switching circuit 301 in Figure 12 may be used to switch the wiring for each clustered cluster in the same way as the connected state. 【0248】 <Angular velocity detection processing by multi-IMU and composite calculation unit as shown in Figure 26 or Figure 27> Next, with reference to the flowchart in Figure 29, the angular velocity detection process using the multi-IMU 200 and the composite calculation unit 471 as shown in Figure 26 or Figure 27 will be explained. 【0249】 In step S191, all IMUs 201 measure the angular velocity in each cluster using the oscillation signal of the drive frequency in each cluster and supply it to the synthesis calculation unit 471. 【0250】 In step S192, the resampler 481 acquires the angular velocity supplied from each IMU201 in time division for each cluster, aligns the sampling frequencies for each cluster, and outputs them to the interference removal unit 482. 【0251】 In step S193, the interference removal unit 482 removes the influence of interference on the angular velocity information supplied from the resampler 481 and outputs it to the synthesis unit 483. 【0252】 In step S194, the synthesis unit 483 synthesizes the angular velocity information for each cluster supplied from the interference removal unit 482 and outputs it as one detection value. 【0253】 By the above processing, the sampling frequencies of the angular velocities supplied for each cluster composed of IMUs 201 whose drive frequencies are synchronizable are aligned, interference is removed and synthesized. Therefore, even when a plurality of IMUs 201 with different drive frequencies are used as a whole, it is possible to detect the angular velocity with high precision. 【0254】 <<11. First modification example of the second embodiment>> <First modification example of the clustering process> In the above, in the clustering process, an example has been described in which the process of clustering the IMUs 201 from the lowest drive frequency to the threshold frequency higher by a predetermined width B among the unprocessed IMUs 201 into the same cluster is repeated. However, if the number of clusters becomes too large, the effect of clustering will be reduced. 【0255】 Therefore, when the number of clusters is more than the specified value N, the predetermined width B may be increased, the clustering may be redone, and the clustering may be performed until the number of clusters reaches the specified value N. 【0256】 Therefore, referring to the flowchart in Figure 30, we will explain the clustering process by increasing the predetermined value N and redoing the clustering to reduce the number of clusters when the number of clusters is greater than the predetermined value N. 【0257】 Furthermore, the processing of steps S121 to S125 and S128 in the flowchart of Figure 30 is the same as the processing of steps S101 to S106 in Figure 28, so the explanation is omitted. 【0258】 In other words, after all IMUs 201 have been clustered in steps S121 to S125, in step S126, the clustering calculation unit 463 determines whether the current number of clusters is greater than a specified value N. 【0259】 If the number of clusters in step S126 is greater than the specified value N, the process proceeds to step S127. 【0260】 In step S127, the clustering calculation unit 463 resets the clustering, increases the predetermined width B by a predetermined value, and the process returns to step S122. 【0261】 In other words, in step S127, the process from steps S122 to S127 is repeated until the number of clusters becomes smaller than the specified value N, and the clustering is redone repeatedly. 【0262】 Then, in step S127, if it is determined that the number of clusters is smaller than the specified value N, the process proceeds to step S128. 【0263】 Through the above process, multiple IMU201s are clustered into classes smaller than the specified value N based on their drive frequency, and an IMU201 is connected to each cluster. 【0264】 As a result, it becomes possible to cluster within a specified value N. 【0265】 <<12. Second Modification of the Second Embodiment>> <Second variation of clustering process> In the above, we have described an example in which, when the number of clusters is greater than a specified value N, the predetermined width B, which is the frequency width of each cluster, is increased, and the clustering is repeated until the number of clusters becomes smaller than the specified value N. 【0266】 However, if the predetermined width B is changed, it is possible that IMU201, whose drive frequency deviates significantly from the design drive frequency, may be included. 【0267】 Therefore, in cases where the predetermined width B is changed, if the measured drive frequency of the IMU 201 deviates significantly from the design drive frequency, the drive frequency may be adjusted by trimming the transducer 211 using laser trimming or the like. 【0268】 Therefore, referring to the flowchart in Figure 31, we will now describe a clustering process in which, when the predetermined width B is increased and clustering is redone to reduce the number of clusters, the oscillator 211 of the IMU 201 whose drive frequency deviates significantly from the design drive frequency is trimmed. 【0269】 Furthermore, the processing in steps S141 to S147 and S150 in the flowchart of Figure 31 is the same as the processing in steps S101 to S106 in Figure 28, so its explanation will be omitted. 【0270】 In other words, after all IMUs 201 have been clustered in steps S141 to S147, in step S148, the clustering calculation unit 463 determines whether or not the predetermined width B has been increased. 【0271】 If the predetermined width B is increased in step S148, the process proceeds to step S149. 【0272】 In step S149, for IMU201 whose measured drive frequency deviates significantly from the design drive frequency, the oscillator 211 is trimmed by laser trimming or the like so that it becomes an appropriate drive frequency for the design drive frequency, and the process proceeds to step S150. 【0273】 Through the above process, multiple IMUs 201 are clustered into a number of classes smaller than a specified value N based on their drive frequency, an IMU 201 is connected to each cluster, and the oscillators 211 of IMUs 201 whose measured drive frequency deviates significantly from the design drive frequency are trimmed, making it possible to adjust the drive frequency. 【0274】 <<13. Third Modification of the Second Embodiment>> <Third variation of clustering processing> In the above case, clustering of IMU201 may be performed using a clustering method such as the k-means method. 【0275】 Therefore, we will now explain the clustering process using the k-means method, referring to the flowchart in Figure 32. 【0276】 In step S171, the frequency measurement unit 462 measures the drive frequency of all IMUs 201 based on the reference frequency supplied by the reference frequency generation unit 461, and outputs the measurement result to the clustering calculation unit 463. 【0277】 In step S172, the clustering calculation unit 463 classifies all IMUs 201 into N clusters based on their driving frequencies, using the k-means method. 【0278】 In step S173, the clustering calculation unit 463 outputs information to the connection unit 452 indicating which IMU 201 belongs to which cluster. Accordingly, the connection unit 452 connects the IMU 201 on a cluster basis. 【0279】 Through the above process, multiple IMU201s are clustered based on their operating frequency, and each cluster is connected to a specific IMU201. 【0280】 <<14. Fourth Modification of the Second Embodiment>> In the above, we have described examples in which a drive circuit block 231, a sense circuit block 232, and a digital output circuit block 233 are provided in the read circuit 213 of each IMU 201. 【0281】 However, the sense circuit block 232 and the digital output circuit block 233 may be shared by the IMU 201, which is classified in the same cluster. 【0282】 Figure 33 shows an example of a multi-IMU 200 configuration in which the sense circuit block 232 and the digital output circuit block 233 are shared by IMU 201, which is classified in the same cluster. 【0283】 In other words, the multi-IMU 200 in Figure 33 comprises IMUs 201'-1 to 201'-4, read circuits 213'-1 and 213'-2, and a synthesis unit 471'. The synthesis unit 471' may be provided outside the multi-IMU 200. 【0284】 In the multi-IMU200 shown in Figure 33, IMU201'-1 and 201'-2 are classified into the first cluster, and IMU201'-3 and 201'-4 are classified into the second cluster. 【0285】 Furthermore, in the first cluster, IMU201'-1 is set as the synchronous master device, and IMU201'-2 is set as the synchronous slave device. Therefore, the output of the automatic gain adjustment circuit 242-1 of IMU201'-1 is supplied as a reference signal fm to the oscillation circuit 251-2 via the phase shift circuit 501-2 of IMU201'-2. 【0286】 Furthermore, in the second cluster, IMU201'-3 is set as the synchronous master device, and IMU201'-4 is set as the synchronous slave device. Therefore, the output of the automatic gain adjustment circuit 242-3 of IMU201'-3 is supplied as a reference signal fm to the oscillation circuit 251-4 via the phase shift circuit 501-4 of IMU201'-4. 【0287】 In this configuration, IMUs 201'-1 and 201'-2 share readout circuit 213'-1 in a time-division multiplexing manner, and IMUs 201'-3 and 201'-4 share readout circuit 213'-4 in a time-division multiplexing manner. 【0288】 In other words, the readout circuit 213'-1 reads the angular velocity supplied from IMU 201'-1 at the timing of the first phase, and reads the angular velocity supplied from IMU 201'-2 at the timing of the second phase, and supplies them to the synthesis calculation unit 471'. 【0289】 Furthermore, the readout circuit 213'-2 reads the angular velocity supplied from IMU 201'-3 at the timing of the first phase, and reads the angular velocity supplied from IMU 201'-4 at the timing of the second phase, and supplies it to the synthesis calculation unit 471'. 【0290】 The synthesis unit 471' temporarily stores and delays the angular velocities of IMUs 201'-1 and 201'-3 supplied at the timing of the first phase, and acquires them together with the angular velocities of IMUs 201'-2 and 201'-4 supplied at the timing of the second phase. First, it synthesizes the angular velocities within the cluster, then it resamples the angular velocities for each cluster, removes interference, and synthesizes them. 【0291】 More specifically, IMUs 201'-1 to 201'-4 differ from the configuration of IMU 201 in the multi-IMU 200 shown in Figure 10. Each of them is equipped only with oscillators 211-1 to 211-4 and drive circuit blocks 231'-1 to 231'-4 corresponding to the drive circuit block 231 that was provided in the readout circuit 213. 【0292】 Drive circuit blocks 231'-1 to 231'-4 have basically the same configuration as drive circuit blocks 231-1 to 231-4, but they are newly equipped with phase shift circuits 501-1 to 501-4. 【0293】 Furthermore, the oscillation circuit 251-1 of the IMU201'-1 outputs the oscillation signal to the automatic gain adjustment circuit 252-1, and outputs it as an oscillation monitor output to terminal 511a-1 of switch 511-1 in the readout circuit 213'-1. 【0294】 Furthermore, the oscillator 211-1 of the IMU 201'-1 outputs the vibration signal as a reference signal to the oscillation circuit 251-1 via the phase shift circuit 501-1, and also outputs it to terminal 512a-1 of switch 512-1 in the readout circuit 213'-1. 【0295】 Furthermore, the oscillation circuit 251-2 of the IMU201'-2 outputs the oscillation signal to the automatic gain adjustment circuit 252-2, and outputs it as an oscillation monitor output to terminal 511b-1 of switch 511-1 in the readout circuit 213'-1. 【0296】 Furthermore, the oscillator 211-2 of the IMU201'-2 outputs the vibration signal to terminal 512b-1 of switch 512-1 in the readout circuit 213'-1. 【0297】 Furthermore, the oscillation circuit 251-3 of the IMU201'-3 outputs the oscillation signal to the automatic gain adjustment circuit 252-3 and outputs it as an oscillation monitor output to terminal 511a-2 of switch 511-2 in the readout circuit 213'-2. 【0298】 Furthermore, the oscillator 211-3 of the IMU 201'-3 outputs the vibration signal as a reference signal to the oscillation circuit 251-3 via the phase shift circuit 501-3, and also outputs it to terminal 512a-2 of switch 512-2 in the readout circuit 213'-2. 【0299】 Furthermore, the oscillation circuit 251-4 of the IMU201'-4 outputs the oscillation signal to the automatic gain adjustment circuit 252-4 and outputs it as an oscillation monitor output to terminal 511b-2 of switch 511-2 in the readout circuit 213'-2. 【0300】 Furthermore, the oscillator 211-4 of the IMU 201'-4 outputs the vibration signal to terminal 512b-2 of switch 512-2 in the readout circuit 213'-2. 【0301】 Furthermore, the readout circuit 213'-1 has the same configuration as the readout circuit 213 in Figure 10, but it consists only of the sense circuit block 232-1 and the digital output circuit block 233-1, excluding the drive circuit block 231, and a new switch 511-1 is provided. 【0302】 Similarly, the readout circuit 213'-2 has the same configuration as the readout circuit 213 in Figure 10, but consists only of the sense circuit block 232-2 and the digital output circuit block 233-2, excluding the drive circuit block 231, and a new switch 511-2 is provided. 【0303】 With this configuration, the readout circuit 213'-1 is shared by IMUs 201'-1 and 201'-2 through time-division processing. Therefore, the operation of the phase shift circuits 501-1 and 501-2, and switches 511-1 and 512-1, repeats the operation of reading the oscillation signal from IMU 201'-1 in the first phase and reading the oscillation signal from IMU 201'-2 in the second phase. 【0304】 Specifically, the phase shift circuits 501-1 and 501-2 cause the oscillation signal from IMU 201'-1 to be output to the readout circuit 213'-1 in the first phase, and the oscillation signal from IMU 201'-2 to be output to the readout circuit 213'-1 in the second phase. 【0305】 As a result, in the first phase, switch 511-1 is connected to terminal 511a-1, and switch 512-1 is connected to terminal 512a-1. Through this operation, in the first phase, the oscillation signal from IMU 201'-1 is read out by the readout circuit 213'-1 and output to the synthesis calculation unit 471' as an angular velocity consisting of digital signals. 【0306】 In the second phase, switch 511-1 is connected to terminal 511b-1, and switch 512-1 is connected to terminal 512b-1. Through this operation, in the second phase, the oscillation signal from IMU 201'-2 is read out by the readout circuit 213'-1 and output to the synthesis calculation unit 471' as an angular velocity consisting of digital signals. 【0307】 Similarly, since the readout circuit 213'-2 is shared by IMUs 201'-3 and 201'-4 through time-division processing, the operation of phase shift circuits 501-3 and 501-4, and switches 511-2 and 512-2 repeats the operation of reading the oscillation signal from IMU 201'-3 in the first phase and reading the oscillation signal from IMU 201'-4 in the second phase. 【0308】 Specifically, the phase shift circuits 501-3 and 501-4 cause the oscillation signal from IMU 201'-3 to be output to the readout circuit 213'-2 in the first phase, and the oscillation signal from IMU 201'-4 to be output to the readout circuit 213'-2 in the second phase. 【0309】 As a result, in the first phase, switch 511-2 is connected to terminal 511a-2, and switch 512-2 is connected to terminal 512a-2. Through this operation, in the first phase, the oscillation signal from IMU 201'-3 is read out by the readout circuit 213'-2 and output to the synthesis calculation unit 471' as an angular velocity consisting of digital signals. 【0310】 In the second phase, switch 511-2 is connected to terminal 511b-2, and switch 512-2 is connected to terminal 512b-2. Through this operation, in the second phase, the oscillation signal from IMU 201'-4 is read out by the readout circuit 213'-2 and output to the synthesis calculation unit 471' as an angular velocity consisting of digital signals. 【0311】 The synthesis calculation unit 471' is provided with delay adjustment units 531-1, 531-2 and cluster synthesis units 532-1, 532-2, in addition to the resampler 481, interference removal unit 482, and synthesis unit 483 in the synthesis calculation unit 471. 【0312】 When the angular velocity of the first phase is supplied by the read circuits 213'-1 and 213'-2, respectively, the delay adjustment units 531-1 and 531-2 temporarily store and delay the angular velocity of the second phase until it is supplied, and then output it to the cluster synthesis units 532-1 and 532-2 at the timing when the angular velocity of the second phase is supplied. 【0313】 The cluster synthesis unit 532-1 synthesizes the angular velocities supplied based on the oscillation signals detected by the IMUs 201'-1 and 201'-2 that constitute the first cluster, and outputs the result to the resampler 481. 【0314】 The cluster synthesis unit 532-2 synthesizes the angular velocities supplied based on the oscillation signals detected by the IMUs 201'-3 and 201'-4 that constitute the second cluster, and outputs the result to the resampler 481. 【0315】 This configuration allows the sense circuit block 232 and the digital output circuit block 233 that constitute the readout circuit 213' to be shared on a cluster basis, thus enabling the simplification of the circuit configuration and reducing costs. 【0316】 <Angular velocity measurement process by multi-IMU and composite calculation unit in Figure 33> Next, referring to the flowchart in Figure 34, the angular velocity measurement process using the multi-IMU 200 and the composite calculation unit 471' in Figure 33 will be explained. 【0317】 In step S211, the angular velocity of the first phase within the same cluster is measured by IMU201'. 【0318】 In other words, considering the first cluster in Figure 33, switches 511-1 and 511-2 are connected to terminals 511a-1 and 512a-1 respectively, and the phase shift circuits 501-1 and 501-2 are adjusted so that the oscillation signal from IMU 201'-1 is supplied to the phase shift circuit 272-1 of the readout circuit 213'. 【0319】 At this time, the oscillation signal from the oscillator 211-1 of the IMU201'-1 is supplied to the charge amplifier circuit 271-1. 【0320】 Through this process, the readout circuit 213' measures the angular velocity detected by the IMU 201'-1 and outputs it to the synthesis calculation unit 471'. 【0321】 In step S212, the delay adjustment unit 531 of the synthesis calculation unit 471' temporarily stores the supplied angular velocity of the first phase and delays it until the angular velocity of the second phase is supplied. 【0322】 In step S213, the angular velocity of the second phase within the same cluster is measured by IMU201'. 【0323】 In other words, considering the first cluster in Figure 33, switches 511-1 and 511-2 are connected to terminals 511b-1 and 512b-1 respectively, and the phase shift circuits 501-1 and 501-2 are adjusted so that the oscillation signal from IMU 201'-2 is supplied to the phase shift circuit 272-1 of the readout circuit 213'. 【0324】 At this time, the oscillation signal from the oscillator 211-2 of IMU201'-2 is supplied to the charge amplifier circuit 271-1. 【0325】 Through this process, the readout circuit 213'-1 measures the angular velocity detected by the IMU 201'-2 and outputs it to the synthesis calculation unit 471'. 【0326】 In step S214, the cluster synthesis unit 532 acquires the angular velocity of the first layer supplied by the delay adjustment unit 531 and the angular velocity of the second phase, synthesizes the angular velocities within the cluster, and outputs them to the resampler 481. 【0327】 In step S215, the resampler 481 acquires the angular velocity for each cluster, aligns the sampling frequencies for each cluster, and outputs it to the interference rejection unit 482. 【0328】 In step S216, the interference removal unit 482 removes the effects of interference from the angular velocity information supplied from the resampler 481 and outputs it to the synthesis unit 483. 【0329】 In step S217, the synthesis unit 483 synthesizes the cluster-level angular velocity information supplied from the interference removal unit 482 and outputs it as a single detected value. 【0330】 Through the above process, the sampling frequencies of the angular velocities supplied to each cluster of IMU201s with synchronized drive frequencies are aligned, interference is removed, and the data is combined. As a result, even when multiple IMU201s with different drive frequencies are used, it becomes possible to detect angular velocity with high accuracy. 【0331】 Furthermore, since the readout circuit 213' is shared and used for each cluster, consolidating the readout circuits 213' in the multi-IMU200 device configuration makes it possible to miniaturize the device configuration and reduce manufacturing costs. 【0332】 <<15. Third Embodiment>> In the above, we have described examples of removing noise such as beats by synchronizing the drive frequencies of multiple IMUs 201 and 201' to the same level and measuring angular velocity, or by clustering them according to their drive frequencies and combining the angular velocity measured for each cluster. 【0333】 However, there are other types of noise that need to be considered. For example, white noise, flicker noise, and random walk noise. 【0334】 Figure 35 shows examples of time-series waveforms for white noise, flicker noise, and random walk noise. 【0335】 In Figure 35, the waveforms Wwt, Wft, and Wrt, from top to bottom, show the effects of white noise, flicker noise, and random walk noise on the angular velocity measured over time, respectively. 【0336】 Furthermore, as shown in Figure 36, while white noise is constant across the entire frequency band, both flicker noise and random walk noise are shown to have a large amount of low-frequency components. 【0337】 In Figure 36, the vertical axis represents intensity, the horizontal axis represents frequency, waveform Wwf represents white noise, waveform Wff represents flicker noise, and waveform Wrf represents random walk noise. 【0338】 Furthermore, as shown in Figure 37, according to Allan variance, the bias stability point is governed by flicker noise, and it has been shown that even when noise filters are used, the bias stability point will not fall below the lower limit of the flicker noise variance. 【0339】 In Figure 37, the Allan variance is shown, with the horizontal axis representing the time window width and the vertical axis representing the variance. In Figure 37, waveform Wa is the Allan variance of IMU201, waveform Wwa is the Allan variance of white noise, waveform Wfa is the Allan variance of flicker noise, and waveform Wra is the Allan variance of random walk noise. Furthermore, in the waveforms of Figure 37, the improvement in noise is indicated by moving towards the lower left region shown by the thick arrow. 【0340】 In other words, by suppressing flicker noise, it becomes possible to further lower the threshold of the noise level in Allan variance. 【0341】 Therefore, the configuration may be designed to cancel out the flicker noise included in the angular velocity detected by IMU201'. 【0342】 <Example of a multi-IMU configuration that enables flicker noise cancellation> Figure 38 shows an example configuration of the multi-IMU200 that enables flicker noise cancellation. 【0343】 Figure 38 shows the configuration of the readout circuit 213'' and the synthesis unit 471'', which are shared by IMU201'-1 and IMU201'-2, which are classified into the same cluster and constitute the multi-IMU200. 【0344】 Furthermore, among the multi-IMU 200 in Figure 38, those configurations that have the same functions as the multi-IMU 200 in Figure 33 are denoted by the same reference numerals, and their explanations are omitted. 【0345】 In other words, the difference between the configuration in Figure 38 and the configuration in Figure 33 is that the read circuit 213'' and the composite calculation unit 471'' are provided instead of the read circuit 213' and the composite calculation unit 471'. 【0346】 The difference between the readout circuit 213'' and the readout circuit 213' is that a differential inverter 551 is provided before terminal 512b. 【0347】 The differential inverter 551 inverts the second-phase oscillation signal supplied from the IMU 201'-2 and outputs it to terminal 512b. 【0348】 Furthermore, the difference between the synthesis calculation unit 471'' and the synthesis calculation unit 471' is that the cluster synthesis unit 532'' is replaced with a cluster synthesis unit 532', and an inversion unit 571 is provided before it. 【0349】 The inversion unit 571 inverts the sign of the angular velocity of the second phase and outputs it to the cluster synthesis unit 532. 【0350】 With the above configuration, the oscillation signal of the second layer output from IMU201'-2 is converted to the opposite phase of the oscillation signal of the first layer output from IMU201'-1, and the angular velocity is calculated from this converted signal. 【0351】 As a result, for example, if the angular velocity x is determined in the first phase, the angular velocity determined in the second phase will be -x. 【0352】 When flicker noise is added as n in the readout circuit 213, the angular velocity of the first phase is calculated as x+n, and the angular velocity of the second phase is calculated as -x+n. 【0353】 The angular velocity x+n of the first phase is delayed by the delay adjustment unit 531 and supplied to the cluster synthesis unit 532', and the angular velocity -x+n of the second phase is reversed in sign by the inversion unit 571 and supplied to the cluster synthesis unit 532' as angular velocity xn. 【0354】 Therefore, the cluster synthesis unit 532' can cancel out the flicker noise component n by adding the angular velocity x+n of the first phase and the angular velocity xn of the second phase (which is the inverted angular velocity) and combining them as an average value. 【0355】 <Angular velocity detection processing by multi-IMU and composite calculation unit in Figure 38> Next, referring to the flowchart in Figure 39, the angular velocity detection process using the multi-IMU 200 and the synthesis calculation unit 471'' in Figure 38 will be explained. 【0356】 In step S231, the angular velocity of the first phase within the same cluster is measured by IMU201'. 【0357】 In step S232, the delay adjustment unit 531 of the synthesis calculation unit 471'' temporarily stores the supplied angular velocity of the first phase and delays it until the angular velocity of the second phase is supplied. 【0358】 In step S233, the differential inverter 551 differentially inverts and outputs the oscillation signal from the second phase IMU 201' within the same cluster. 【0359】 In step S234, the angular velocity of the second phase within the same cluster is measured by IMU201'. 【0360】 In step S235, the inversion unit 571 of the synthesis calculation unit 471'' inverts the sign of the angular velocity of the second phase IMU 201' and outputs it to the cluster synthesis unit 532. 【0361】 In step S236, the cluster synthesis unit 532' acquires the angular velocity of the first phase supplied by the delay adjustment unit 531 and the angular velocity of the second phase, which has its positive and negative values ​​reversed, supplied by the inversion unit 571. It then synthesizes the cluster by calculating the average of the angular velocities within the cluster, thereby canceling the flicker noise by adding the two together, and outputs the result to the resampler 481. 【0362】 In step S237, the resampler 481 acquires the angular velocity for each cluster, aligns the sampling frequencies for each cluster, and outputs it to the interference rejection unit 482. 【0363】 In step S238, the interference removal unit 482 removes the effects of interference from the angular velocity information supplied from the resampler 481 and outputs it to the synthesis unit 483. 【0364】 In step S239, the synthesis unit 483 synthesizes the cluster-level angular velocity information supplied from the interference removal unit 482 and outputs it as a single detected value. 【0365】 Through the above process, it becomes possible to detect angular velocity with high accuracy while canceling flicker noise. 【0366】 As shown in Figure 40, while the normal Allan dispersion of a single IMU is represented by waveform Wa, it is known that the Allan dispersion can be improved to waveform Wsa by, for example, temperature compensation, and further improved to waveform Wma by configuring a multi-IMU using multiple IMUs. 【0367】 However, by using a multi-IMU200 as shown in Figure 38, which reduces the flicker noise described above, it becomes possible to further lower the noise level threshold in the Allan variance to, for example, the level shown by the waveform Wfe in Figure 40, thereby achieving variance characteristics that are closer to those of white noise. 【0368】 <<16. First Modification of the Third Embodiment>> The above example has described the case where there are two time divisions within the same cluster, but more time divisions are also possible. 【0369】 For example, if the number of time divisions is 4, the multi-IMU200 will have the configuration shown in Figure 41. 【0370】 In the multi-IMU200 shown in Figure 41, IMUs 201'-1 to 201'-4 belong to the same cluster, with IMU 201'-1 set as the synchronous master device and IMUs 201'-2 to 201'-4 set as synchronous slave devices. In this case, the angular velocity of the first to fourth phases can be determined. 【0371】 The difference between the multi-IMU 200 in Figure 38, where the number of time divisions is 2, and the multi-IMU 200 in Figure 38 is that the read circuit 213'' and the synthesis calculation unit 471'' are replaced with a read circuit 213'' and a synthesis calculation unit 471''''. 【0372】 Furthermore, the difference between the read circuit 213'' and the read circuit 213' is that switches 511' and 512' are provided instead of switches 511 and 512, and differential inverting units 551-1 and 551-2 are provided instead of differential inverting unit 551. 【0373】 Switches 511' and 512' are basically the same as switches 511 and 512 in terms of function, but they differ in that the number of terminals is determined by the number of time divisions. 【0374】 In other words, the switch 511' is provided with terminals 511'a to 511'd, and is switched and connected in accordance with the angular velocity of the first to fourth phases when the angular velocity of the first to fourth phases is required. 【0375】 Similarly, the switch 512' is provided with terminals 512'a to 512'd, which are switched and connected in accordance with the requirements for the angular velocity of the first to fourth phases. 【0376】 The differential inverters 551-1 and 551-2 basically have the same function as the differential inverter 551 in Figure 38. That is, the differential inverter 551-1 differentially inverts the oscillation signal supplied from the second phase IMU 201'-2 and outputs it to terminal 512'b of the switch 512'. The differential inverter 551-2 differentially inverts the oscillation signal supplied from the fourth phase IMU 201'-4 and outputs it to terminal 512'd of the switch 512'. 【0377】 In the composite operation unit 471''', the differences from the composite operation unit 471'' are that instead of the delay adjustment unit 531, delay adjustment units 531-1 and 531-2 are provided, instead of the inversion unit 571, inversion units 571-1 and 571-2 are provided, and instead of the in-cluster composite unit 532', an in-cluster composite unit 532'' is provided. 【0378】 Both of the delay adjustment units 531-1 and 531-2 have the same functions as the delay adjustment unit 531. The delay adjustment unit 531-1 temporarily stores the angular velocity of the first phase until the angular velocity of the second phase is supplied and outputs it to the in-cluster composite unit 532'. The delay adjustment unit 531-2 temporarily stores the angular velocity of the third phase until the angular velocity of the fourth phase is supplied and outputs it to the in-cluster composite unit 532'. 【0379】 The inversion unit 571-1 inverts the positive and negative of the angular velocity of the second phase and outputs it to the in-cluster composite unit 532'. The inversion unit 571-2 inverts the positive and negative of the angular velocity of the fourth phase and outputs it to the in-cluster composite unit 532'. 【0380】 With the above configuration, the oscillation signals of the second and fourth phases output from the IMUs 201'-2 and 201'-4 are calculated for the angular velocity in a state where the oscillation signals of the first and third phases output from the IMUs 201'-1 and 201'-3 are phase-inverted. 【0381】 Then, by inverting the positive and negative by the inversion units 571-1 and 571-2, the angular velocities of the second and fourth phases are supplied to the in-cluster composite unit 532. 【0382】 The in-cluster composite unit 532'' can cancel the flicker noise component n by adding and synthesizing the angular velocities of the first and third phases and the inverted angular velocities of the second and fourth phases as an average value. 【0383】 <<17. The Fourth Embodiment>> <The Mechanical Structure of the IMU> In the above, we have described a technique for detecting angular velocity with high accuracy by synchronizing the drive frequencies of multiple IMUs 201 and 201' through electrical control, thereby suppressing errors caused by beats. 【0384】 However, in addition to the electrical control of multiple IMU201s, mechanical structures may also be used to further suppress errors caused by beats and to detect angular velocity with greater accuracy. 【0385】 First, with reference to Figure 42, we will describe the oscillator 211, which is the mechanical component of the IMU 201. 【0386】 The oscillator 211 in Figure 42 consists of a proof mass 601, a movable drive unit 602, a fixed drive unit 603, a connecting unit 604, and a detection electrode 605. 【0387】 Proof Mass 601 is a rectangular weight that rotates in the direction of arrow R with axis Ax as its axis of rotation, and also vibrates in the direction of the Y axis. 【0388】 In the figure, movable drive units 602 for vibrating in the Y-axis direction are provided on both sides of the rectangular proof mass 601 in the Y-axis direction. A fixed drive unit 603 is provided opposite the movable drive units 602. 【0389】 The movable drive unit 602 consists of electrodes formed in a comb-like shape facing away from the proof mass 601, and is configured to be movable relative to the fixed drive unit 603, which is fixed to the proof mass 601. 【0390】 The fixed drive unit 603 consists of electrodes formed in a comb-like shape facing the direction opposite to the proof mass 601, that is, in the direction opposite to the comb-shaped electrodes of the movable drive unit 602, and is formed in a fixed state relative to the connection unit 604. The movable drive unit 602 and the fixed drive unit 603 are provided facing each other with their respective comb-shaped electrode portions interlocking, thereby forming capacitance in the space between the electrodes of both units. 【0391】 With this configuration, an oscillation signal consisting of a predetermined drive frequency supplied from the drive circuit block 231 is supplied to the electrodes of the fixed drive unit 603. As a result, the capacitance between the electrodes of the movable drive unit 602 and the fixed drive unit 603 changes according to the drive frequency, and the movable drive unit 602 reciprocates periodically in the Y-axis direction relative to the fixed drive unit 603, causing the proof mass 601 to vibrate in the Y-axis direction at the predetermined drive frequency. 【0392】 The proof mass 601 is connected by a connecting portion 601a to a connecting portion 604 which consists of a rectangular frame surrounding the proof mass 601. 【0393】 Plate-shaped electrodes 604a, formed in a tree shape, are provided on both sides in the X-axis direction of the rectangular frame of the connecting portion 604. 【0394】 A plate-shaped detection electrode 605 is formed to surround and interlock with a tree-shaped plate-shaped electrode 604a, even though they are not in contact with the electrode 604a, and capacitance is formed between the electrode 604a and the detection electrode 605. 【0395】 The proof mass 601 rotates in the direction of arrow R about axis Ax and vibrates in the Y-axis direction at a predetermined drive frequency. 【0396】 In other words, as shown in Figure 43, when only the movement of the proof mass 601 is shown, it rotates in the direction of arrow R and vibrates with respect to the Y axis at a predetermined drive frequency, and when an external force is applied, for example, as shown by the dotted arrow in Figure 43, a Coriolis force is generated with respect to the X axis as shown by arrow fc. 【0397】 In other words, when a Coriolis force is applied to the proof mass 601 shown in Figure 42, a deformation occurs in the X-axis direction, and the Coriolis force related to the proof mass 601 is transmitted to the connection part 604, which is made up of a rectangular frame, via the connection part 601a. 【0398】 As a result, a change occurs in the distance between the electrode 604a of the connection part 604 and the detection electrode 605, which in turn causes a change in the capacitance formed between the electrodes. 【0399】 In other words, the Coriolis force can be measured by measuring the change in capacitance between the electrode 604a of the connection part 604 and the detection electrode 65. 【0400】 Therefore, the vibration signal supplied from the oscillator 211 to the sense circuit block 232 is a signal indicating a change in capacitance between the electrode 604a of the connection part 604 and the detection electrode 65. 【0401】 As explained with reference to Figures 42 and 43, the proof mass 601 rotates in the direction of arrow R and vibrates back and forth at a predetermined drive frequency in the Y-axis direction, and the angular velocity and acceleration are detected based on the Coriolis force detected when an external force is applied. 【0402】 Therefore, for the IMU201 to detect angular velocity and acceleration with high accuracy, it is essential that the proof mass 601 rotates stably and is also vibrating. 【0403】 However, since the Multi-IMU200 is intended to be mounted on a mobile device, its operating environment may not necessarily be one in which the proof mass 601 can be rotated stably and vibrated. 【0404】 For example, it is anticipated that there will be many instances where the vehicle collides with or climbs over obstacles while moving, and environments in which strong impacts may be unintentionally applied are also anticipated. 【0405】 When a strong impact exceeding a specified intensity is applied to the IMU201, in an environment where the above-described proof mass 601 cannot be rotated and vibrated stably, the vibration frequency changes, inducing beats, and as a result, it is expected that the detection accuracy will be reduced. 【0406】 <Multi-IMU with impact countermeasures in the X-axis direction> Therefore, it is conceivable to cancel the impact by devising the vibration directions of a plurality of IMUs 201. 【0407】 FIG. 44 is a layout view from above an IMU unit 610 composed of four IMUs 201 that can cancel an impact in the X-axis direction by devising the vibration directions of the four IMUs 201 in the X-axis direction. 【0408】 The IMU unit 610 in FIG. 44 is composed of four IMUs 201-101 to IMU201-104. 【0409】 In the IMU unit 610, an IMU 201-102 is provided on the right side in the drawing of the IMU 201-101, an IMU 201-103 is provided on the lower side in the drawing, and an IMU 201-104 is provided on the lower right side in the drawing. 【0410】 The IMU 201-101 and the IMU 201-102 are connected by a connecting beam 611-1, and the connecting beam 611-1 displaces the displacements of the IMU 201-101 and the IMU 201-102 in opposite phases with respect to the X-axis direction. 【0411】 More specifically, the connecting beam 611-1 is a drive mechanism composed of four diamond-shaped frames in the drawing, and all four corner portions 611a-1, 611a-2, 611b-1, and 611b-2 are configured to be rotatable. Among these, the corner portion 611a-1 in contact with the IMU 201-101 and the corner portion 611a-2 in contact with the IMU 201-102 are respectively connected to the IMU 201-101 and the IMU 201-102. 【0412】 Hereafter, the corners connected to IMU201-101 and IMU201-102 will be referred to as connecting corners 611a-1 and 611a-2, and the other two corners will be referred to as unconnected corners 611b-1 and 611b-2. 【0413】 In other words, IMU201-101 and IMU201-102 are driven to move closer to each other by opening the frames connected to connection corners 611a-1 and 611a-2 so that the angles between them widen, and closing the frames connected to non-connection corners 611b-1 and 611b-2 so that the angles between them narrow. 【0414】 Conversely, by closing the angle between the frames connected to connection corners 611a-1 and 611a-2, and opening the angle between the frames connected to non-connection corners 611b-1 and 611b-2, IMU201-101 and IMU201-102 are driven to increase the distance between them. 【0415】 Through the drive mechanisms of these connecting corners 611a-1, 611a-2 and non-connecting corners 611b-1, 611b-2, the connecting beam 611-1 moves IMU201-102 by a predetermined distance in the positive direction (right direction in the figure) with respect to the X-axis when IMU201-101 moves by a predetermined distance in the negative direction (left direction in the figure) with respect to the X-axis, so that the distance between IMU201-101 and 201-102 increases. Conversely, when IMU201-101 moves by a predetermined distance in the positive direction (right direction in the figure) with respect to the X-axis, the connecting beam 611-1 moves IMU201-102 by a predetermined distance in the negative direction (left direction in the figure) with respect to the X-axis, so that the distance between IMU201-101 and 201-102 decreases. 【0416】 Furthermore, the connecting beam 611-1 displaces IMU201-101 and IMU201-102 in opposite phases with respect to the X-axis direction, and there is no master-servant relationship between IMU201-101 and IMU201-102. 【0417】 IMU201-103 and IMU201-104 are connected by a connecting beam 611-2, which displaces IMU201-103 and IMU201-104 in opposite phases with respect to the X-axis direction. The drive mechanism of connecting beam 611-2 is the same as that of connecting beam 611-1, so detailed illustrations and explanations are omitted. 【0418】 In other words, when IMU201-103 moves a predetermined distance in the positive direction (to the right in the diagram) relative to the X-axis, the connecting beam 611-2 moves IMU201-104 a predetermined distance in the negative direction (to the left in the diagram) relative to the X-axis so that the distance between IMU201-103 and 201-104 decreases. Conversely, when IMU201-103 moves a predetermined distance in the negative direction (to the left in the diagram) relative to the X-axis, the connecting beam 611-2 moves IMU201-104 a predetermined distance in the positive direction (to the right in the diagram) relative to the X-axis so that the distance between IMU201-103 and 201-104 increases. 【0419】 Furthermore, the connecting beam 611-2 displaces IMU201-103 and IMU201-104 in opposite phases with respect to the X-axis direction, and there is no master-servant relationship between IMU201-103 and IMU201-104. 【0420】 IMU201-101 and IMU201-103 are connected by a connecting beam 612-1, which displaces IMU201-101 and IMU201-103 in opposite phases with respect to the X-axis. 【0421】 More specifically, the connecting beam 612-1 has a pivot shaft 612a at its center, and IMU201-101 and IMU201-103 are rotatably connected to its ends 612b-1 and 612b-2, respectively. 【0422】 Therefore, the connecting beam 612-1 is driven like a seesaw around the rotation axis 612a in response to the movement of IMU201-101 and IMU201-103 in the X-axis direction. 【0423】 As a result, when IMU201-101 moves a predetermined distance in the positive direction (to the right in the diagram) relative to the X-axis, the connecting beam 612-1 moves IMU201-103 a predetermined distance in the negative direction (to the left in the diagram) relative to the X-axis. Conversely, when IMU201-101 moves a predetermined distance in the negative direction (to the right in the diagram) relative to the X-axis, the connecting beam 612-1 moves IMU201-103 a predetermined distance in the positive direction (to the left in the diagram) relative to the X-axis. 【0424】 Furthermore, the connecting beam 612-1 displaces IMU201-101 and IMU201-103 in opposite phases with respect to the X-axis direction, and there is no master-servant relationship between IMU201-101 and IMU201-103. 【0425】 IMU201-102 and IMU201-104 are connected by a connecting beam 612-2, which displaces IMU201-102 and IMU201-104 in opposite phases with respect to the X-axis direction. The drive mechanism of connecting beam 612-2 is the same as that of connecting beam 612-1. 【0426】 In other words, when IMU201-102 moves a predetermined distance in the positive direction (to the right in the diagram) relative to the X-axis, the connecting beam 612-2 moves IMU201-104 a predetermined distance in the negative direction (to the left in the diagram) relative to the X-axis. Conversely, when IMU201-102 moves a predetermined distance in the negative direction (to the left in the diagram) relative to the X-axis, the connecting beam 612-2 moves IMU201-104 a predetermined distance in the positive direction (to the right in the diagram) relative to the X-axis. 【0427】 Furthermore, the connecting beam 612-2 displaces IMU201-102 and IMU201-104 in opposite phases with respect to the X-axis direction, and there is no master-servant relationship between IMU201-102 and IMU201-104. 【0428】 That is, in the IMU unit 610 of FIG. 44, IMU201-101 and 201-104 are driven in the same phase with respect to the X-axis direction, IMU201-102 and 201-103 are driven in the same phase with respect to the X-axis direction, and IMU201-101 and 201-104, and IMU201-102 and 201-103 are driven in opposite phases with respect to the X-axis direction. 【0429】 Also, although the driving directions of IMU201-101 to 201-104 include those different with respect to the X-axis direction, as described in the first to third embodiments, the driving frequencies are controlled to be the same. 【0430】 Then, among IMU201-101 to 201-104, the detection results of IMU201 driven in the same phase are added together, and further, by taking the difference between the detection results of IMU201 driven in the opposite phase and obtaining an average value or the like, the angular velocity and acceleration are obtained. 【0431】 As a result, even if a situation occurs in which an impact component in the X-axis direction due to an external disturbance impact indicated by the arrow in the lower right of the figure is added, by taking the difference from the detection result of IMU201 driven in the opposite phase in the X-axis direction, the impact component in the X-axis direction due to the external disturbance impact will be canceled, so it is possible to suppress the influence of the impact. 【0432】 <Multi-IMU with impact countermeasures for the Y-axis direction> It is conceivable to take impact countermeasures for the Y-axis direction by the same method as the impact countermeasures for the X-axis direction. 【0433】 FIG. 45 is a layout view from above of an IMU unit 610 composed of four IMU201s in which an impact in the X-axis direction can be canceled by devising the vibration directions of the four IMU201s in the Y-axis direction. 【0434】 The IMU unit 610 in Figure 45, like the IMU unit 610 in Figure 44, is composed of four IMUs 201-101 to 201-104. 【0435】 IMU201-101 and IMU201-102 are connected by a connecting beam 631-1, which displaces IMU201-101 and IMU201-102 in opposite phases with respect to the Y-axis direction. The drive mechanism of the connecting beam 631-1 is the same as that of the connecting beam 612-1 in Figure 44, but the drive direction is changed from the X-axis direction to the Y-axis direction. 【0436】 In other words, when the IMU 201-101 connected to end 631b-1 moves a predetermined distance in the positive direction (upward in the figure) relative to the Y-axis, the connecting beam 631-1 is driven like a seesaw around the rotation axis 631a, causing the IMU 201-102 connected to end 631b-2 to move a predetermined distance in the negative direction (downward in the figure) relative to the Y-axis. 【0437】 Conversely, when the IMU 201-101 connected to end 631b-1 moves a predetermined distance in the negative direction (downward in the figure) relative to the Y-axis, the connecting beam 631-1 is driven like a seesaw around the rotation axis 631a, causing the IMU 201-102 connected to end 631b-2 to move a predetermined distance in the positive direction (upward in the figure) relative to the Y-axis. 【0438】 Furthermore, the connecting beam 631-1 displaces IMU201-101 and IMU201-102 in opposite phases with respect to the Y-axis direction, and there is no master-servant relationship between IMU201-101 and IMU201-102. 【0439】 IMU201-103 and IMU201-104 are connected by a connecting beam 631-2, which displaces IMU201-103 and IMU201-104 in opposite phases with respect to the Y-axis. The drive mechanism of the connecting beam 631-2 is the same as that of the connecting beam 632-1. 【0440】 In other words, when IMU201-103 moves a predetermined distance in the positive direction (upward in the diagram) relative to the Y-axis, the connecting beam 631-2 moves IMU201-104 a predetermined distance in the negative direction (downward in the diagram) relative to the Y-axis. Conversely, when IMU201-103 moves a predetermined distance in the negative direction (downward in the diagram) relative to the Y-axis, the connecting beam 631-2 moves IMU201-104 a predetermined distance in the positive direction (upward in the diagram) relative to the Y-axis. 【0441】 Furthermore, the connecting beam 631-2 displaces IMU201-103 and IMU201-104 in opposite phases with respect to the Y-axis direction, and there is no master-slave relationship between IMU201-103 and IMU201-104. 【0442】 IMU201-101 and IMU201-103 are connected by a connecting beam 632-1, which displaces IMU201-101 and IMU201-103 in opposite phases with respect to the Y-axis direction. The drive mechanism of the connecting beam 632-1 is the same as that of the connecting beam 611-1 in Figure 44, but the drive direction is changed from the X-axis direction to the Y-axis direction. 【0443】 In other words, when IMU201-101 moves a predetermined distance in the positive direction (upward in the figure) with respect to the Y-axis, the connecting beam 632-1 closes so that the angle between the frames connected to the connecting corners 632a-1 and 632a-2 narrows, and opens so that the angle between the frames connected to the non-connecting corners 632b-1 and 632b-2 widens. This drives IMU201-101 and IMU201-103 to move further apart from each other, causing IMU201-103 to move a predetermined distance in the negative direction (downward in the figure) with respect to the Y-axis. 【0444】 Conversely, when IMU201-101 moves a predetermined distance in the negative direction (downward in the figure) with respect to the Y-axis, the connecting beam 632-1 opens so that the angle between the frames connected to the connecting corners 632a-1 and 632a-2 widens, and closes so that the angle between the frames connected to the non-connecting corners 632b-1 and 632b-2 narrows. This drives IMU201-101 and IMU201-103 to move closer to each other, causing IMU201-103 to move a predetermined distance in the positive direction (upward in the figure) with respect to the Y-axis. 【0445】 Furthermore, the connecting beam 632-1 displaces IMU201-101 and IMU201-103 in opposite phases with respect to the Y-axis, and there is no master-servant relationship between IMU201-101 and IMU201-103. 【0446】 IMU201-102 and IMU201-104 are connected by a connecting beam 632-2, which displaces IMU201-102 and IMU201-104 in opposite phases with respect to the Y-axis. The drive mechanism of the connecting beam 632-2 is the same as the drive mechanism of the connecting beam 632-1 shown in Figure 44. 【0447】 In other words, when IMU201-102 moves a predetermined distance in the positive direction (upward in the diagram) relative to the Y-axis, the connecting beam 632-2 moves IMU201-104 a predetermined distance in the negative direction (downward in the diagram) relative to the Y-axis. Conversely, when IMU201-102 moves a predetermined distance in the negative direction (downward in the diagram) relative to the Y-axis, the connecting beam 632-2 moves IMU201-104 a predetermined distance in the positive direction (upward in the diagram) relative to the Y-axis. 【0448】 Furthermore, the connecting beam 632-2 displaces IMU201-102 and IMU201-104 in opposite phases with respect to the Y-axis direction, and there is no master-servant relationship between IMU201-102 and IMU201-104. 【0449】 In other words, in the IMU unit 610 shown in Figure 45, IMUs 201-101 and 201-104 are driven in the same phase with respect to the Y-axis direction, IMUs 201-102 and 201-103 are driven in the same phase with respect to the Y-axis direction, and IMUs 201-101 and 201-104 and IMUs 201-102 and 201-103 are driven in opposite phases with respect to the Y-axis direction. 【0450】 Furthermore, although IMUs 201-101 to 201-104 have different drive directions with respect to the Y-axis, their drive frequencies are controlled identically, as described in the first to third embodiments. 【0451】 Then, the detection results of IMU201, which is driven in the same phase among IMU201-101 to 201-104, are added together, and the difference between the detection results of IMU201, which is driven in the opposite phase, is taken to calculate the average value, thereby determining the angular velocity and acceleration. 【0452】 As a result, even if a situation occurs in which an impact component is added in the Y-axis direction due to a disturbance shock in the Y-axis direction, as indicated by the arrow in the lower right of the figure, the impact component in the Y-axis direction caused by the disturbance shock is canceled out by taking the difference with the detection of IMU201, which is driven in the opposite phase in the Y-axis direction. Therefore, it is possible to suppress the effects of the shock. 【0453】 Although Figures 44 and 45 separately describe the drive mechanism in the X-axis direction and the drive mechanism in the Y-axis direction for the same IMU unit 610, both are drive mechanisms provided in the IMU unit 610. 【0454】 In other words, as explained with reference to Figures 44 and 45, even if the IMU unit 610 is subjected to an impact from either the X-axis or Y-axis direction, the impact component is canceled out in both the X-axis and Y-axis directions because it uses the difference in the detection results. This makes it possible to achieve highly accurate measurement of acceleration and angular velocity. 【0455】 <Example configuration of a multi-IMU equipped with the IMU units shown in Figures 44 and 45> Next, with reference to Figure 46, an example configuration of the multi-IMU 200 equipped with the IMU unit 610 shown in Figures 44 and 45 will be described. 【0456】 The multi-IMU200 in Figure 46 includes an IMU unit 610 and a signal processing unit 651 that receives the positive and negative outputs with respect to the X axis and the positive and negative outputs with respect to the Y axis from the outputs of IMUs 201-101 to 201-104 of the IMU unit 610 and performs signal processing. 【0457】 The signal processing unit 651 includes calculation units 661 and 662, and receives positive and negative outputs for the X-axis and positive and negative outputs for the Y-axis from IMUs 201-101 to 201-104 to perform signal processing. 【0458】 More specifically, the calculation unit 661 receives the output from the IMU unit 610, specifically the positive output in the X-axis direction (X-axis output +) and the negative output in the X-axis direction (X-axis output -), and performs a calculation by taking the difference between them. In other words, since the Coriolis force acts in opposite phase and the shock component acts in phase, taking the difference cancels out the shock component and outputs the Coriolis force in the X-axis direction. 【0459】 In other words, the calculation unit 661 calculates the average value of the detection results of the four IMU201s by dividing the difference between the sum of the detection outputs of IMU201-101 and 201-104 and the sum of the detection outputs of IMU201-102 and 201-103 by 2, thereby enabling appropriate cancellation even if there is an impact component in the X-axis direction. 【0460】 The calculation unit 662 receives the positive Y-axis output (Y-axis output +) and the negative Y-axis output (Y-axis output -) from the IMU unit 610's output and calculates the difference between them. In other words, since the Coriolis force acts in opposite phase and the shock component acts in phase, the shock component is canceled out by taking the difference and the Coriolis force in the Y-axis is output. 【0461】 In other words, the calculation unit 662 calculates the average value of the detection results of the four IMU201s by dividing the difference between the sum of the detection outputs of IMU201-101 and 201-104 and the sum of the detection outputs of IMU201-102 and 201-103 by 2, thereby enabling appropriate cancellation even if there is an impact component in the Y-axis direction. 【0462】 In Figure 46, the IMU unit 610 showing the drive mechanism in the X-axis direction is specifically referred to as IMU unit 610X, and the IMU unit 610 showing the drive mechanism in the Y-axis direction is specifically referred to as IMU unit 610Y, and the same notation will be used hereafter. Also, as mentioned above, the IMU unit 610 is composed of four IMUs 201-101 to 201-104. 【0463】 <Signal processing of IMU200 in Figure 46> Next, referring to the flowchart in Figure 47, we will explain the signal processing of the IMU200 in Figure 46. 【0464】 In step S301, the calculation unit 661 receives the output of the IMU unit 610, specifically the positive output in the X-axis direction (X-axis output +) and the negative output in the X-axis direction (X-axis output -), calculates the average value from the difference between them, and outputs it as the Coriolis force in the X-axis direction. 【0465】 More specifically, the calculation unit 661 calculates the average of the detection results of the four IMU201s as a Coriolis output with the X-axis impact component canceled out, by dividing the difference between the sum of the detection outputs of IMU201-101 and 201-104 and the sum of the detection outputs of IMU201-102 and 201-103 by 2. 【0466】 In step S302, the calculation unit 662 receives the output of the IMU unit 610, specifically the positive output in the Y-axis direction (Y-axis output +) and the negative output in the Y-axis direction (Y-axis output -), calculates the difference between them, finds the average value, and outputs it as the Coriolis force in the Y-axis direction. 【0467】 More specifically, the calculation unit 662 calculates the average of the detection results of the four IMU201s by dividing the difference between the sum of the detection outputs of IMU201-101 and 201-104 and the sum of the detection outputs of IMU201-102 and 201-103 by 2, and uses this average as the Y-axis Coriolis output with the Y-axis impact component canceled out. 【0468】 Through the above process, it becomes possible to appropriately cancel out any impact components in either the X-axis or Y-axis direction by calculating the difference between the detection outputs of IMU201-101 and 201-104 and the detection outputs of IMU201-102 and 201-103 in both the X-axis and Y-axis directions. 【0469】 <<18. First Modification of the Fourth Embodiment>> <Shock countermeasures in the X-axis direction using multiple IMU units> In the above, we have described an example in which an IMU unit 610 is configured with four IMU201s to realize a multi-IMU200. However, a multi-IMU200 can also be realized by increasing the number of IMU201s in the IMU unit 610. 【0470】 Figure 48 shows an example configuration of a multi-IMU 200 that enables cancellation of X-axis shocks when four IMU units 610 are arranged in a 2x2 configuration to form an IMU block 610B. 【0471】 The IMU block 610B in Figure 48 is composed of IMU units 610-1 to 610-4. In Figure 48, the drive mechanisms in the X-axis direction of each of the IMU units 610-1 to 610-4 are shown. Therefore, in the figure, the IMU block 610B and the IMU units 610-1 to 610-4 are denoted as IMU block 610BX and IMU units 610X-1 to 610X-4, respectively. 【0472】 In other words, in the IMU block 610BX shown in Figure 48, there are four IMU units 610, each equipped with four IMUs 201, so it is composed of a total of 16 IMUs 201, four in the horizontal direction and four in the vertical direction. 【0473】 The drive mechanism in the X-axis direction of the IMU201 that constitutes each of the IMU units 610X-1 to 610X-4 is the same as the configuration described with reference to Figure 44. 【0474】 However, a connecting beam 612E-1 is newly provided to connect IMU201-103-1, located in the lower left of IMU unit 610X-1, with IMU201-101-3, located in the upper left of 610X-3, and a connecting beam 612E-2 is newly provided to connect IMU201-104-2, located in the lower right of IMU unit 610X-2, with IMU201-102-4, located in the upper right of 610X-4. 【0475】 Furthermore, at the connection point between IMU unit 610X-1 and IMU unit 610X-2, instead of the connecting beam 612 on both sides, two connecting beams 611E-1 and 611E-2 are provided vertically to connect horizontally adjacent IMU 201 units. Similarly, at the connection point between IMU unit 610X-3 and IMU unit 610X-4, connecting beams 611E-3 and 611E-4 are provided. In other words, in the multi-IMU 200 shown in Figure 48, four connecting beams 611E-1 to 611E-4 enclosed by dashed lines are newly provided. 【0476】 The connecting beam 612E-1 is equipped with the same drive mechanism as the connecting beam 612-1 in Figure 44, and the connecting beam 612E-2 is equipped with the same drive mechanism as the connecting beam 612-2 in Figure 44. 【0477】 Therefore, the 16 IMU201 units (4 each in the horizontal and vertical directions) that make up the multi-IMU200 in Figure 48 are all driven at synchronized drive frequencies. Furthermore, each IMU201 is driven in opposite phase with respect to the X-axis direction to adjacent IMU201 units in the horizontal and vertical directions, and in the same phase with respect to the X-axis direction to adjacent IMU201 units in the diagonal upper left, diagonal lower left, diagonal upper right, and diagonal lower right directions. 【0478】 Then, for each of the IMU units 610X-1 to 610X-4 of the multi-IMU200, the angular velocity and acceleration are determined by adding the detection results of the IMU201s that are driven in the same phase, and then taking the difference between the detection results of the IMU201s that are driven in opposite phases to obtain the average value. 【0479】 As a result, even if a situation occurs where an impact is applied in the X-axis direction, the impact component in the X-axis direction is canceled out by taking the difference between the detection results of the IMU201, which are driven in opposite phases in the X-axis direction, thus making it possible to suppress the effects of the impact. 【0480】 Furthermore, in the multi-IMU200 shown in Figure 48, the number of IMU201s used is increased compared to the multi-IMU200 shown in Figure 44, making it possible to detect angular velocity and acceleration with higher precision. 【0481】 <Shock countermeasures in the Y-axis direction using multiple IMU units> Figure 49 shows an example configuration of an IMU block 610B that allows for the cancellation of Y-axis shocks when four IMU units 610 are arranged in a 2x2 configuration. 【0482】 The IMU block 610B in Figure 49 is composed of IMU units 610-1 to 610-4. In Figure 49, the drive mechanisms in the Y-axis direction of each of the IMU units 610-1 to 610-4 are shown; therefore, in the figure, the IMU block 610B and the IMU units 610-1 to 610-4 are referred to as IMU block 610BY and IMU units 610Y-1 to 610Y-4, respectively. 【0483】 In other words, in the IMU block 610BY shown in Figure 49, there are four IMU units 610, each equipped with four IMUs 201, so it is composed of a total of 16 IMUs 201, four in the horizontal direction and four in the vertical direction. 【0484】 The Y-axis drive mechanism of the IMU201 that constitutes each of the IMU units 610Y-1 to 610Y-4 is the same as the configuration described with reference to Figure 45. 【0485】 However, a connecting beam 631E-1 is newly provided to connect IMU201-102-1 in the upper right of IMU unit 610Y-1 and IMU201-101-2 in the upper left of 610Y-2, and a connecting beam 631E-2 is newly provided to connect IMU201-103-3 in the lower right of IMU unit 610Y-3 and IMU201 in the lower left of 610Y-4. 【0486】 Furthermore, at the connection point between IMU unit 610Y-1 and IMU unit 610Y-3, connecting beams 632E-1 and 632E-2 are provided to connect vertically adjacent IMU 201 units, replacing the connecting beams 631 on both sides. Similarly, connecting beams 632E-3 and 632E-4 are provided at the connection point between IMU unit 610Y-2 and IMU unit 610Y-4. In other words, four connecting beams 632E-1 to 632E-4, enclosed by dashed lines, are newly provided. 【0487】 The connecting beam 631E-1 is equipped with the same drive mechanism as the connecting beam 631-1 in Figure 45, and the connecting beam 631E-2 is equipped with the same drive mechanism as the connecting beam 631-2 in Figure 45. 【0488】 Therefore, the 16 IMU201 units in total, four in the horizontal direction and four in the vertical direction, that make up the IMU block 610BY in Figure 49 are all driven at a synchronized drive frequency, and each is driven in opposite phase with respect to the Y-axis direction to adjacent IMU201 units in the horizontal and vertical directions, and in the same phase with respect to the Y-axis direction to adjacent IMU201 units in the diagonal upper left, diagonal lower left, diagonal upper right, and diagonal lower right directions. 【0489】 Then, for each of the IMU units 610Y-1 to 610Y-4 of the multi-IMU200, the angular velocity and acceleration are determined by adding the detection results of the IMU201s that are driven in the same phase, and then taking the difference between the detection results of the IMU201s that are driven in opposite phases to obtain the average value. 【0490】 As a result, even if a situation occurs where an impact is applied in the Y-axis direction, the impact component in the Y-axis direction is canceled out by taking the difference between the detection results of IMU201, which are driven in opposite phases in the Y-axis direction, thus making it possible to suppress the effects of the impact. 【0491】 Furthermore, in the multi-IMU200 shown in Figure 49, the number of IMU201s used is increased compared to the multi-IMU200 shown in Figure 45, making it possible to detect angular velocity and acceleration with higher precision. 【0492】 Furthermore, the signal processing in the multi-IMU 200 shown in Figures 48 and 49 can be implemented by providing a signal processing unit 651 as shown in Figure 46 for each IMU unit 610, and by referring to the flowchart in Figure 47. 【0493】 Therefore, the explanation of signal processing by the multi-IMU200 shown in Figures 48 and 49 will be omitted. 【0494】 <<19. Second Modification of the Fourth Embodiment>> In the above, we have described an example in which a multi-IMU200 is realized by providing four IMU units 610 and using the signal processing results of each IMU unit 610. However, time-division processing may also be performed by switching the detection results of each of the four IMU units 610 on a channel and outputting them. 【0495】 Figure 50 shows an example configuration of a multi-IMU 200 in which the detection results of each of the four IMU units 610 are processed in a time-division multiplexing manner as four output signals. 【0496】 The multi-IMU 200 in Figure 50 consists of an IMU block 610B, a signal processing unit 671, and a switching unit 672. 【0497】 The drive mechanism of IMU block 610B consists of an X-axis drive mechanism, indicated by IMU block 610BX, and a Y-axis drive mechanism, indicated by IMU block 610BY. 【0498】 As shown in Figure 48, the IMU block 610BX consists of IMU units 610X-101 to 610X-4. 【0499】 Furthermore, each of the IMU units 610X-1 through 610X-4 outputs the detection output as a signal with 1 to 4 channels. 【0500】 In other words, the IMU unit 610X-1 outputs a positive output in the X-axis direction (X-axis output ch1+) and a negative output in the X-axis direction (X-axis output ch1-) as channel 1 (ch1). 【0501】 The IMU unit 610X-2 outputs a positive output in the X-axis direction (X-axis output ch2+) and a negative output in the X-axis direction (X-axis output ch2-) as channel 2 (ch2). 【0502】 The IMU unit 610X-3 outputs a positive output in the X-axis direction (X-axis output ch3+) and a negative output in the X-axis direction (X-axis output ch3-) as channel 3 (ch3). 【0503】 The IMU unit 610X-4 outputs a positive output in the X-axis direction (X-axis output ch4+) and a negative output in the X-axis direction (X-axis output ch4-) as channel 4 (ch4). 【0504】 As shown in Figure 49, IMU block 610BY consists of IMU units 610Y-1 to 610Y-4. 【0505】 Each of the IMU units 610Y-1 to 610Y-4 outputs its detection output as a signal with 1 to 4 channels. 【0506】 In other words, although not shown in the diagram, the IMU unit 610Y-1 outputs a positive output in the Y-axis direction (Y-axis output ch1+) and a negative output in the Y-axis direction (Y-axis output ch1-) as channel 1 (ch1) to the signal processing unit 671. 【0507】 The IMU unit 610Y-2 outputs a positive output in the Y-axis direction (Y-axis output ch2+) and a negative output in the Y-axis direction (Y-axis output ch2-) as channel 2 (ch2) to the signal processing unit 671. 【0508】 The IMU unit 610Y-3 outputs a positive Y-axis output (Y-axis output ch3+) and a negative Y-axis output (Y-axis output ch3-) to the signal processing unit 671 as channel 3 (ch3). 【0509】 The IMU unit 610Y-4 outputs a positive output in the Y-axis direction (Y-axis output ch4+) and a negative output in the Y-axis direction (Y-axis output ch4-) as channel 4 (ch4) to the signal processing unit 671. 【0510】 The signal processing unit 671 comprises calculation units 681-1 to 681-4, each receiving the outputs of channels 1 to 4 in the positive and negative directions relative to the X axis from the IMU block BX and performing signal processing. 【0511】 More specifically, the calculation unit 681-1 receives the positive X-axis output (X-axis output ch1+) and the negative X-axis output (X-axis output ch1-) of channel 1 (ch1) from the IMU unit 610, calculates the difference between them, calculates the average value, and outputs it to the switching unit 672 as the X-axis Coriolis force (ch1). 【0512】 The calculation unit 681-2 receives the positive X-axis output (X-axis output ch2+) and the negative X-axis output (X-axis output ch2-) of channel 2 (ch2) from the IMU unit 610, calculates the difference between them, calculates the average value, and outputs it to the switching unit 672 as the X-axis Coriolis force (ch2). 【0513】 The calculation unit 681-3 receives the positive X-axis output (X-axis output ch3+) and the negative X-axis output (X-axis output ch3-) of channel 3 (ch3) from the IMU unit 610, calculates the difference between them, calculates the average value, and outputs it to the switching unit 672 as the X-axis Coriolis force (ch3). 【0514】 The calculation unit 681-4 receives the positive X-axis output (X-axis output ch4+) and the negative X-axis output (X-axis output ch4-) of channel 4 (ch4) from the output of the IMU unit 610, calculates the difference between them, calculates the average value, and outputs it to the switching unit 672 as the X-axis Coriolis force (ch4). 【0515】 The switching unit 672 outputs the four channels of X-axis Coriolis force supplied by the signal processing unit 671 to the subsequent stage in a time-division manner. 【0516】 More specifically, the switching unit 672 comprises terminals 672a-1 to 672a-4, a switch 672b, and a control unit 672c. 【0517】 Terminals 672a-1 to 672a-4 each receive the X-axis Coriolis force output for channels 1 to 4 from the signal processing unit 671. 【0518】 Switch 672b is controlled by control unit 672c, and its connection to terminals 672a-1 to 672a-4 is switched at predetermined time intervals, thereby outputting the Coriolis force of the X axis for four channels in a time-division manner to the subsequent stage. 【0519】 Because the IMU block 610BX can output the Coriolis force in the X-axis direction for all four channels in a four-cycle sequence, the configuration required to detect the Coriolis force in the X-axis direction in the subsequent stage can be reduced to one-quarter. 【0520】 Although not shown in the diagram, the system also includes a signal processing unit that receives and processes the four positive Y-axis channel outputs and the four negative Y-axis channel outputs from the IMU block 610BY in the Y-axis direction, as well as a switching unit that outputs the Y-axis Coriolis force outputs for the four channels of the signal processing unit to a subsequent stage in a time-division multiplexed manner. 【0521】 <Signal processing by multi-IMU in Figure 50> Next, referring to the flowchart in Figure 51, we will explain the signal processing using the multi-IMU in Figure 50. 【0522】 In step S321, the control unit 672c of the switching unit 672 initializes the channel counting counter n to 1. 【0523】 In step S322, the control unit 672c controls the switch 672b based on the counter n and connects it to terminals 672b-n. 【0524】 In step S323, the calculation units 681-1 to 681-4 of the signal processing unit 651 each calculate the Coriolis force in the X-axis direction for channels 1 to 4 and output it to the switching unit 672. 【0525】 In step S324, the switching unit 672 outputs the Coriolis force in the X-axis direction of channel n, supplied by the signal processing unit 671, to the subsequent stage via terminals 672b-n to which the switch 672b is connected. 【0526】 In step S325, the control unit 672c determines whether the counter n is 4 or not. If it is not 4, the process proceeds to step S326. 【0527】 In step S326, the control unit 672c increments the counter n by 1, and the process returns to step S322. 【0528】 In other words, until counter n reaches 4, channels n are sequentially switched one by one, and the Coriolis force in the X-axis direction of the corresponding channel is switched and output to the next stage. 【0529】 Then, if the counter n is deemed to be 4 in step S325, the process proceeds to step S327. 【0530】 In step S327, the control unit 672c determines whether or not an instruction to terminate the process has been given. If termination has not been given, the process returns to step S321, and the subsequent processes are repeated. 【0531】 In other words, until the end of processing is instructed, the channels are switched between 1 and 4, and the Coriolis force in the X-axis direction of the corresponding channel continues to be output. 【0532】 Then, in step S327, when the end of the process is instructed, the process ends. 【0533】 Through the above process, the respective Coriolis forces in the X-axis direction corresponding to the IMU units 610 divided into four channels are sequentially switched and output to the subsequent stage. Therefore, the configuration required for the subsequent detection corresponding to each channel can be simplified to 1 / 4. 【0534】 Note that the same process is performed for the Coriolis force in the Y-axis direction, but only the axis direction is different and the process is basically the same, so the description thereof is omitted. 【0535】 <<20. Third modification of the fourth embodiment>> <Multi-IMU with further impact countermeasures for the Z-axis direction> In the above, the configuration example of the multi-IMU 200 with impact countermeasures for the X-axis direction and the Y-axis direction has been described. However, a configuration with further impact countermeasures for the Z-axis direction may also be adopted. 【0536】 FIG. 52 shows the configuration of the IMU block 610B of the multi-IMU 200 that can cancel the impact in the Z-axis direction. 【0537】 The IMU block 610B in FIG. 52 is composed of IMU units 610-1 to 610-4. Note that in the IMU block 610B in FIG. 52, since the drive mechanisms in the Z-axis direction of the IMU units 610-1 to 610-4 are shown, in the figure, the IMU block 610B and the IMU units 610-1 to 610-4 are respectively denoted as IMU block 610BZ and IMU units 610Z-1 to 610Z-4. 【0538】 In other words, the IMU block 610BZ in Figure 52 is provided with four units, each consisting of IMU units 610Z-1 to 610Z-4, which are each equipped with four IMUs 201-101 to 104. Therefore, it is composed of a total of 16 IMUs 201, four in the horizontal direction and four in the vertical direction. 【0539】 More specifically, in Figure 52, IMU unit 610Z-1 is equipped with IMU201-101-1 to IMU201-104-1, IMU unit 610Z-2 is equipped with IMU201-101-2 to IMU201-104-2, IMU unit 610Z-3 is equipped with IMU201-101-3 to IMU201-104-3, and IMU unit 610Z-4 is equipped with IMU201-101-4 to IMU201-104-4. 【0540】 Each IMU201, included in the IMU block 610BZ that constitutes the multi-IMU200 in Figure 52, vibrates back and forth in the Z-axis direction at a predetermined drive frequency within a range between a position moved a predetermined distance in front of the plane of the paper and a position moved a predetermined distance behind the plane of the paper, with the plane of the paper in the figure as the base position. 【0541】 In addition, in the upper left of Figure 52, the IMU201 marked with an "x" indicates that it has moved to the back side relative to the base position on the paper, while the IMU201 marked with a black circle indicates that it has moved to the front side relative to the base position on the paper. 【0542】 Furthermore, the upper right portion of Figure 52 shows, on the left, a side cross-section of the H2 and H4 columns of IMU block 610BZ, viewed from the X-axis direction on the right side of the figure, and on the right, a side cross-section of the H1 and H3 columns of IMU block 610BZ, viewed from the X-axis direction on the right side of the figure. 【0543】 Furthermore, the lower left of Figure 52 shows, in the upper panel, a side cross-section of rows B and D of IMU block 610BZ viewed from the lower Y-axis direction in the figure, and in the lower panel, a side cross-section of rows A and C of IMU block 610BZ viewed from the lower Y-axis direction in the figure. 【0544】 Here, in Figure 52, the 16 IMU201s that make up the IMU block 610BZ in the upper left are represented by four vertical rows, A through D, and four horizontal columns, H1 through H4. 【0545】 In other words, as shown in the lower left section of Figure 52, row A consists of IMU201-101-1, IMU201-102-1, IMU201-101-2, and IMU201-102-2 from left to right in the figure, and they are connected by connecting beams 701-1 to 701-3. 【0546】 The connecting beam 701-1 is composed of a frame and the like, with its central axis 701a-1 fixed to the base position Lb, and adjacent IMUs 201-101-1 and 201-102-1 connected to each of its ends 701b-1-1 and 701b-1-2, respectively. 【0547】 Then, when the connecting beam 701-1 moves, for example, the IMU 201-101-1 connected to one end 701b-1-1 in the negative direction by a predetermined distance with respect to the Z-axis direction (for example, to the back side with respect to the plane of the paper where the base position Lb is (downwards in the lower left of Figure 52)), it rotates around the central axis 701a-1, causing the IMU 201-102-1 connected to the other end 701b-1-2 to move in the positive direction by a predetermined distance with respect to the Z-axis direction (for example, to the front side with respect to the plane of the paper where the base position Lb is (upwards in the lower left of Figure 52)). 【0548】 Conversely, when the connecting beam 701-1 moves, for example, the IMU 201-101-1 connected to one end 701b-1-1 in the positive direction (for example, to the front side with respect to the plane of the paper where the base position Lb is (upwards in the lower left of Figure 52)) by a predetermined distance in the Z-axis direction, it rotates around the central axis 701a-1, causing the IMU 201-102-1 connected to the other end 701b-1-2 to move in the negative direction (for example, to the back side with respect to the plane of the paper where the base position Lb is (downwards in the lower left of Figure 52)) by a predetermined distance in the Z-axis direction. 【0549】 The connecting beams 701-2 and 701-3 also have a similar drive mechanism. Therefore, the IMUs 201-101-1, 201-102-1, 201-101-2, and 201-102-2 that make up row A are driven by the drive mechanism of connecting beams 701-1 to 701-3, with IMUs 201-101-1 and 201-102-1 being driven in synchronous and in phase with respect to the positive or negative Z-axis direction, and IMUs 201-101-2 and 201-102-2 being driven in synchronous and in phase with respect to the positive or negative Z-axis direction. 【0550】 Furthermore, IMU201-101-1 and IMU201-102-1, and IMU201-101-2 and IMU201-102-2 are driven synchronously and in opposite phase with respect to the Z-axis direction. 【0551】 Furthermore, as shown in the upper right of Figure 52, the IMU201-101-1, IMU201-103-1, IMU201-101-3, and IMU201-103-3 that make up column H1 are connected by connecting beams 702-1 to 702-3. 【0552】 The connecting beam 702-1 is composed of a frame and the like, with its central axis 702a-1 fixed to the base position Lb, and adjacent IMUs 201-101-1 and 201-103-1 connected to each of its ends 702b-1-1 and 702b-1-2, respectively. 【0553】 Then, when the connecting beam 702-1 moves, for example, the IMU 201-101-1 connected to one end 702b-1-1 in the negative direction by a predetermined distance with respect to the Z-axis direction (for example, to the back side with respect to the plane of the paper where the base position Lb is, i.e., to the right of the base position Lb in the upper right part of Figure 52), it rotates around the central axis 702a-1 and moves the IMU 201-103-1 connected to the other end 702b-1-2 in the positive direction by a predetermined distance with respect to the Z-axis direction (for example, to the front side with respect to the plane of the paper where the base position Lb is, i.e., to the left of the base position Lb in the upper right part of Figure 52). 【0554】 Conversely, when the connecting beam 702-1 moves, for example, the IMU 201-101-1 connected to one end 702b-1-1 in the positive direction by a predetermined distance with respect to the Z-axis direction (for example, to the front side with respect to the plane of the paper where the base position Lb is, i.e., to the right of the base position Lb in the upper right part of Figure 52), it rotates around the central axis 702a-1, causing the IMU 201-103-1 connected to the other end 702b-1-2 to move in the negative direction by a predetermined distance with respect to the Z-axis direction (for example, to the back side with respect to the plane of the paper where the base position Lb is, i.e., to the left of the base position Lb in the upper right part of Figure 52). 【0555】 The same drive mechanism is used for connecting beams 702-2 and 702-3. Therefore, the IMUs 201-101-1, 201-103-1, 201-101-3, and 201-103-3 in column H1 are driven by the drive mechanism of connecting beams 702-1 to 702-3, with IMUs 201-101-1 and 201-101-3 being driven synchronously in the positive or negative Z-axis direction, and IMUs 201-103-1 and 201-103-3 being driven synchronously in the positive or negative Z-axis direction and in phase. 【0556】 Furthermore, IMU201-101-1 and IMU201-101-3, and IMU201-103-1 and IMU201-103-3 are driven in synchronous and opposite phase with respect to the Z-axis direction. 【0557】 Each of the IMU201 units in rows A through D is configured with the same drive mechanism as the IMU201 in row A. Therefore, the IMU201 units in rows B and D are driven in opposite phase with respect to the Z-axis direction to the IMU201 in row A, as shown in the upper left section of Figure 52, while the IMU201 unit in row C is driven in the same phase with respect to the Z-axis direction to the IMU201 in row A, as shown in the lower left section of Figure 52. 【0558】 Furthermore, the IMUs constituting each of the H1 to H4 columns are each configured with the same drive mechanism as the IMU201 in the H1 column. Therefore, the IMU201s in the H2 and H4 columns are driven in the opposite phase to the IMU201 in the H1 column with respect to the Z-axis direction, as shown on the left side of the upper right of Figure 52, while the IMU201 in the H3 column is driven in the same phase to the IMU201 in the H1 column with respect to the Z-axis direction, as shown on the right side of the upper right of Figure 52. 【0559】 With this drive configuration, adjacent IMUs 201 located in the X-axis direction in rows A through D of the IMU block 610BZ are driven alternately in opposite phases around the base position Lb in the Z-axis direction. Similarly, adjacent IMUs 201 located in the Y-axis direction in columns H1 through H4 are driven alternately in opposite phases around the base position Lb in the Z-axis direction. 【0560】 As a result, each IMU201 constituting the IMU block 610BZ is driven in opposite phase and synchronously with respect to the Z-axis with respect to its vertically and horizontally adjacent IMU201, and in the same phase and synchronously with respect to the Z-axis with respect to its adjacent IMU201 diagonally to the upper left, lower left, upper right, and lower right. 【0561】 FIG. 52 shows the driving directions of each IMU 201 when the IMU 201-101-1 moves a predetermined distance in the negative direction with respect to the Z-axis direction (for example, the back side with respect to the paper surface at the base position Lb, that is, on the right side with respect to the base position Lb in the upper right part of FIG. 52). Therefore, when the IMU 201-101-1 moves a predetermined distance in the positive direction with respect to the Z-axis direction (for example, the front side with respect to the paper surface at the base position Lb, that is, on the left side with respect to the base position Lb in the upper right part of FIG. 52), the driving directions of each IMU 201 in the Z-axis direction in FIG. 52 change in the reverse direction. 【0562】 <Variations of the connecting beam> <Example of connecting to the side surface of the IMU> Regarding the connecting beams 701 and 702 in the IMU block 610BZ that constitutes the IMU 201 for canceling the impact in the Z-axis direction, variations can be considered depending on the position where they are connected to the IMU 201. 【0563】 For example, as shown in FIG. 53, the central part of the side surface of each IMU 201 and the respective ends of the connecting beams 701-201 to 701-203 may be connected such that the IMU 201-103-1, 201-104-1, 201-103-2, 201-104-2 are connected by the connecting beams 701-201 to 701-203. 【0564】 <Example of connecting at the central position of the IMU> Also, for example, as shown in FIG. 54, the central position of each IMU 201 and the respective ends of the connecting beams 701-301 to 701-303 may be connected such that the IMU 201-103-1, 201-104-1, 201-103-2, 201-104-2 are connected by the connecting beams 701-301 to 701-303. 【0565】 In this case, it is necessary to consider interference with the IMU 201 body related to the driving of the connecting beam 701. For example, as shown in Figure 54, the IMU 201 may be made H-shaped when viewed from above to avoid interference related to the driving of the connecting beam 701. 【0566】 Furthermore, the signal processing for determining the Coriolis force in the Z-axis direction is the same as the signal processing for determining the Coriolis force in the X-axis direction, as explained with reference to the flowchart in Figure 51, so its explanation will be omitted. 【0567】 <<21. Fourth Modification of the Fourth Embodiment>> In the signal processing described above, the process in which the signal processing unit 671 performs signal processing and then the switching unit 672 switches the channel, is also possible to perform signal processing after switching the output channel for each IMU unit 610. 【0568】 Figure 55 shows an example configuration of a multi-IMU200 in which signal processing is performed after switching the output channel for each IMU unit 610. 【0569】 In addition, in the multi-IMU200 shown in Figure 55, components with the same functions as those in the multi-IMU200 shown in Figure 50 are denoted by the same reference numerals, and their explanations are omitted. 【0570】 The difference between the multi-IMU 200 in Figure 55 and the multi-IMU 200 in Figure 50 is that the signal processing unit 671 and the switching unit 672 are replaced with switching units 731, 732 and a signal processing unit 733. 【0571】 The switching unit 731 consists of terminals 731a-1 to 731a-4, a switch 731b, and a control unit 731c. 【0572】 Terminals 731a-1 to 731a-4 each receive the positive Coriolis force outputs in the X-axis direction for channels 1 to 4, which are outputs of IMU units 610X-1 to 610X-4 of the IMU block 610BX. 【0573】 Switch 731b is controlled by the control unit 731c in synchronization with the switching unit 732, and is sequentially switched and connected to terminals 731a-1 to 731a-4, outputting the positive Coriolis force in the X-axis direction of channels 1 to 4, which are outputs of IMU units 610X-1 to 610X-4, to the signal processing unit 733. 【0574】 The switching unit 732 consists of terminals 732a-1 to 732a-4, a switch 732b, and a control unit 732c. 【0575】 Terminals 732a-1 to 732a-4 each receive the negative Coriolis force outputs in the X-axis direction for channels 1 to 4, which are outputs of IMU units 610X-1 to 610X-4 of IMU block 610BX. 【0576】 Switch 732b is controlled by the control unit 732c in synchronization with the switching unit 731, and is sequentially switched and connected to terminals 732a-1 to 732a-4, outputting the negative Coriolis force in the X-axis direction of channels 1 to 4, which are the outputs of IMU units 610X-1 to 610X-4, to the signal processing unit 733. 【0577】 The signal processing unit 733 includes a calculation unit 741, which controls the calculation unit 741 to calculate and output the Coriolis force for each channel based on the difference between the positive Coriolis force and the negative Coriolis force in the X-axis direction for channels 1 to 4, which are supplied by the switching units 731 and 732 through synchronous channel switching. 【0578】 In other words, in the switching units 731 and 732, the channels are switched in synchronous manner with each other, so the calculation unit 741 calculates the Coriolis force for each channel based on the difference between the positive Coriolis force in the X-axis direction and the negative Coriolis force supplied by the switching units 731 and 732 as the channels are switched sequentially. 【0579】 In the multi-IMU200 shown in Figure 55, signal processing is performed after channel switching, and then the positive and negative Coriolis forces are calculated after the channel switching. This simplifies the configuration required for the subsequent processing after the IMU block 610BX to just two components, and also reduces flicker noise. 【0580】 Although not shown in the diagram, there are also configurations corresponding to the switching units 731 and 732 and the signal processing unit 733 for determining the Coriolis force in the Y-axis direction in Figure 55, but their explanation will be omitted. 【0581】 Furthermore, a similar configuration may be provided for the Z-axis direction. 【0582】 <Signal processing by multi-IMU in Figure 55> Next, referring to the flowchart in Figure 56, we will explain the signal processing using the multi-IMU shown in Figure 55. 【0583】 In step S381, the control units 731c and 732c of the switching units 731 and 732 synchronize with each other and initialize the channel counting counter n to 1. 【0584】 In step S382, the control unit 731c controls the switch 731b based on the counter n and connects it to terminals 731a-n. 【0585】 In step S383, the control unit 732c controls the switch 732b based on the counter n and connects it to terminals 732a-n. 【0586】 In step S384, the switch 731b of the switching unit 731 supplies the positive Coriolis force in the X-axis direction of channel n supplied to terminals 731a-n to the signal processing unit 733, while the switch 732b of the switching unit 732 supplies the negative Coriolis force in the X-axis direction of channel n supplied to terminals 732a-n to the signal processing unit 733. 【0587】 In step S385, the calculation unit 741 of the signal processing unit 733 calculates and outputs a Coriolis force in the X-axis direction based on the positive Coriolis force in the X-axis direction of channel n supplied by the switching unit 731 and the negative Coriolis force in the X-axis direction of channel n supplied by the switching unit 732, so that the impact is canceled. 【0588】 In step S386, the control units 731c and 732c of the switching units 731 and 732 determine whether the counter n is 4 or not. If it is not 4, the process proceeds to step S387. 【0589】 In step S387, the control units 731c and 732c of the switching units 731 and 732 increment the counter n by 1, and the process returns to step S382. 【0590】 In other words, until the counter n reaches 4, the channels n are switched one by one in sequence, and the Coriolis force of the corresponding channel n is switched and output to the signal processing unit 733. 【0591】 Then, if the counter n is deemed to be 4 in step S387, the process proceeds to step S388. 【0592】 In step S388, the control units 731c and 732c of the switching units 731 and 732 determine whether or not an instruction to terminate the process has been given. If termination has not been given, the process returns to step S381, and the subsequent processes are repeated. 【0593】 In other words, until the end of processing is instructed, the channels are cyclically switched between 1 and 4, and the Coriolis force in the X-axis direction of the corresponding channel continues to be output. 【0594】 Then, in step S388, when the termination of the process is instructed, the process terminates. 【0595】 Through the above process, the positive and negative Coriolis forces in the X-axis direction corresponding to each of the four channels of the IMU unit 610 are sequentially switched and output to the signal processing unit 733, making it possible to simplify the configuration required for subsequent detection corresponding to each channel by half. 【0596】 Furthermore, by switching channels and outputting positive and negative Coriolis forces in the X-axis direction to the signal processing unit 733, it becomes possible to reduce flicker noise. 【0597】 The Coriolis force in the Y-axis direction and the Coriolis force in the Z-axis direction are also calculated using a similar process, but since the only difference is the axis direction, the process is basically the same, and therefore the explanation will be omitted. 【0598】 <<22. Fifth Modification of the Fourth Embodiment>> In the above, we have described an example in which the IMU block 610B has 2x2 IMU units 610 arranged horizontally and vertically, but it may also contain a larger number of IMU units 610. 【0599】 In other words, as shown in Figures 57 to 59, the IMU unit 610 may be composed of a total of 16 units in a 4x4 configuration. 【0600】 Figure 57 shows an example configuration of an IMU block 610BXn in which four IMU units 610X, each consisting of a drive mechanism for canceling shocks in the X-axis direction, are arranged in a 4x4 configuration. 【0601】 Figure 58 also shows an example configuration of an IMU block 610BYn in which four IMU units 610Y, each consisting of a drive mechanism for canceling shocks in the Y-axis direction, are arranged in a 4x4 configuration. 【0602】 Furthermore, Figure 59 shows an example configuration of an IMU block 610BZn in which four IMU units 610Z, each consisting of a drive mechanism for canceling shocks in the Z-axis direction, are arranged in a 4x4 configuration. 【0603】 Furthermore, for any of the IMU blocks 610BXn, 610BYn, and 610BZn in the XYZ axis directions, the number of IMU units 610 is not limited to 16; it may be any other number, for example, n units. Also, the number of units in the horizontal direction and the number of units in the vertical direction do not need to be the same. 【0604】 The configuration of the multi-IMU 200, which includes an IMU block 610Bn consisting of IMU blocks 610BXn, 610BYn, and 610BZn related to n IMU units, is basically the same as the configuration of the multi-IMU 200 in Figure 50, as shown in Figure 60. 【0605】 In other words, the multi-IMU200 in Figure 60 comprises an IMU block 610Bn, a signal processing unit 751, and a switching unit 752. Although Figure 60 only shows the configuration for realizing signal processing corresponding to the drive mechanism that cancels shocks in the X-axis direction, it also includes signal processing units and switching units in the Y-axis and Z-axis directions, which are not shown. 【0606】 The IMU block 610Bn outputs a positive Coriolis force in the X-axis direction and a negative Coriolis force for each channel, which is based on an IMU unit 610. In other words, here there are n channels, which correspond to the number of IMU units 610. 【0607】 The signal processing unit 751 includes calculation units 761-1 to 761-n, which calculate the Coriolis force for each channel and output it to the switching unit 752. 【0608】 The switching unit 752 outputs the n-channel X-axis Coriolis force supplied by the signal processing unit 751 to the subsequent stage in a time-division manner. 【0609】 More specifically, the switching unit 752 comprises terminals 752a-1 to 752a-n, a switch 752b, and a control unit 752c. 【0610】 Terminals 752a-1 to 752a-n each receive the output of the X-axis Coriolis force of channel n from the signal processing unit 751. 【0611】 Switch 752b is controlled by control unit 752c, and its connection to terminals 752a-1 to 752a-n is switched at predetermined time intervals, thereby outputting the Coriolis force of the n-channel X-axis to the subsequent stage in a time-division manner. 【0612】 Regarding the signal processing of the multi-IMU200 in Figure 60, since it is the same process as described in Figure 51 but with n channels, the explanation will be omitted. 【0613】 Furthermore, even when there are n IMU units 610, the configuration may be similar to that of the multi-IMU 200 described with reference to Figure 55, in which signal processing is performed after the channel is switched. 【0614】 In the above, we have described an example in which the IMU 201 forms an IMU unit 610 with a minimum of 2x2 units in the horizontal and vertical directions. However, the IMU unit 610 may be composed of other numbers of IMUs. For example, an IMU unit 610 may be formed using 4x4 IMU 201 units. 【0615】 In this case, the 16 IMU201s may be arranged to form a single channel for signal processing. 【0616】 Regarding the number of IMU201s that make up each channel's IMU unit 610, it is desirable that the number of IMU201s that detect the positive Coriolis force and the number of IMU201s that detect the negative Coriolis force be equal. 【0617】 However, the number of IMU201 units that detect positive Coriolis forces and those that detect negative Coriolis forces does not necessarily have to be equal. In this case, it is necessary to devise a calculation method for each channel, that is, for each IMU unit. 【0618】 For example, a representative value of the positive Coriolis force may be obtained from the detection results of multiple IMU201 that detect the positive Coriolis force, and a representative value of the negative Coriolis force may be obtained from the detection results of multiple IMU201 that detect the negative Coriolis force. Based on the difference between the representative value of the positive Coriolis force and the representative value of the negative Coriolis force, the Coriolis force of one channel of the IMU unit 610 may be determined in such a way that the impact is canceled out. 【0619】 <<23. Fifth Embodiment>> The above has described the configuration of the multi-IMU200, but the multi-IMU200 described above may also be applied to image stabilization in an image sensor. 【0620】 Figure 61 shows an example configuration when a multi-IMU200 equipped with a drive mechanism that can cancel shocks in the XYZ axis direction is applied to an image sensor. 【0621】 As shown in the lower part of Figure 61, the image sensor 801 has a configuration in which a multi-IMU 200 equipped with a drive mechanism that can cancel the aforementioned XYZ axis direction shocks is attached to the back side of the imaging surface. 【0622】 As described above, the multi-IMU200 consists of n IMU units 610, each equipped with an IMU block 610BXn, 610Y, 610BXn that has a drive mechanism that allows for the cancellation of shocks in each of the XYZ axis directions. 【0623】 Therefore, it is possible to detect acceleration and angular velocity for each unit region 801a corresponding to the area on the image sensor 801 where the IMU unit 610 is located. 【0624】 With this configuration, it becomes possible to correct camera shake with high precision for each unit region 801a by signal processing based on pinpoint acceleration and angular velocity detected for each unit region within the image captured by the image sensor 801. 【0625】 <<24. First Modification of the Fifth Embodiment>> In the above, we have described an example in which image stabilization is applied by signal processing to each unit region 801a on the image sensor 801 in which the IMU unit 610 is located. However, instead of signal processing, it is also possible to physically correct the image stabilization using a drive mechanism. 【0626】 Furthermore, while "hand shake" refers to the shaking of the image when a user holds and operates the imaging device by hand, here it refers to all shaking that occurs during imaging. For example, for imaging devices mounted on mobile devices such as drones or vehicles driven by motors or engines, shaking of the image caused by high-frequency vibrations generated by the operation of the motor or engine is also included in the definition of hand shake. 【0627】 <Example configuration of an imaging device that achieves image stabilization by driving an optical block> First, we will explain the overview of the technology that physically corrects camera shake using a drive mechanism. Figure 62 shows an example of the configuration of an imaging device that achieves camera shake correction by driving an optical block. 【0628】 The imaging device 1001 shown in Figure 62 consists of an optical block 1011, a reflector 1012, a shutter 1013, an image sensor 1014, and a drive unit 1015. 【0629】 The optical block 1011 consists of a lens for focusing and other components, and transmits incident light, shown by a solid line, through the reflector 1012 and shutter 1013 to focus on the image sensor 1014. The incident light that lands on the image sensor 1014 is represented by a dotted line. The wavy portion in the transmission path of the solid line incident light represents camera shake. 【0630】 The reflector 1012, along with a mirror (not shown), reflects a portion of the incident light to the viewfinder F through which the user looks, and transmits the remaining incident light to the image sensor 1014 via the shutter 1013. 【0631】 The shutter 1013 is a configuration that controls opening and closing, consisting of a mechanical or electrical configuration, and adjusts the exposure time of the light transmitted to the image sensor 1014 from the incident light that passes through the optical block 1011. 【0632】 The image sensor 1014 is composed of CMOS, CCD, etc., and captures an image consisting of pixel signals corresponding to the amount of incident light. 【0633】 The drive unit 1015 consists of an actuator and the like, and drives the optical block 1011 in a direction perpendicular to the direction of incidence of the incident light. 【0634】 More specifically, when the drive unit 1015 detects movement in the optical block 1011 caused by hand tremors or the like using an IMU (not shown), it drives the optical block 1011 to counteract the detected movement. 【0635】 In other words, in the imaging device 1001 shown in Figure 62, the optical block 1011 is driven by the drive unit 1015 to cancel out movement caused by camera shake, etc., thereby correcting camera shake in the image captured by the image sensor 1014. In Figure 62, the solid line showing the path of incident light after the drive unit 1015 is a straight line to represent that the camera shake of the incident light is corrected by the operation of this drive unit 1015. 【0636】 However, the drive unit 1015 in the imaging device 1001 shown in Figure 62 needs to drive the optical block 1011, which consists of lenses and the like, and therefore requires a relatively large configuration. Furthermore, because the drive unit 1015 is relatively large, high-speed driving becomes difficult, and it is difficult to achieve a drive that follows high-frequency vibrations generated when a motor or engine is operating and cancels out those vibrations, for example. 【0637】 <Example configuration of an imaging device that achieves image stabilization by driving the image sensor> Therefore, in this disclosure, instead of the drive unit 1015 that drives the optical block 1011, a drive unit that drives the image sensor 1014 is provided, thereby miniaturizing the configuration of the drive unit and enabling it to follow high-frequency vibrations. 【0638】 Figure 63 shows an example of an imaging device configuration that achieves image stabilization by providing a drive unit to drive the image sensor 1014. In Figure 63, components of the imaging device 1021 that have the same functions as those of the imaging device 1001 in Figure 62 are denoted by the same reference numerals, and their explanations are omitted as appropriate. 【0639】 In other words, the difference between the imaging device 1021 in Figure 63 and the imaging device 1001 in Figure 62 is that the drive unit 1031 for driving the image sensor 1014 is provided instead of the drive unit 1015 for driving the optical block 1011. 【0640】 The drive unit 1031 consists of an actuator and the like, and drives the image sensor 1014 in a direction perpendicular to the incident direction of the incident light. 【0641】 When the drive unit 1031 detects movement of the image sensor 1014 caused by hand shake or the like using an IMU (not shown), it drives the image sensor 1014 to counteract the detected movement. 【0642】 In the imaging device 1021 shown in Figure 63, the image sensor 1014 is driven by the drive unit 1031 to cancel out movements caused by camera shake, etc., thereby correcting camera shake in the image captured by the image sensor 1014. 【0643】 In the imaging device 1021 shown in Figure 63, the drive unit 1031 drives the image sensor 1014, which is relatively small and light compared to the optical block 1011 consisting of lenses, etc., so the overall configuration can be made relatively small. 【0644】 Furthermore, since the drive unit 1031 has a relatively small and lightweight configuration, high-speed driving can be achieved. For example, it can track high-frequency vibrations generated by the operation of a motor or engine and implement a drive that cancels out those vibrations. 【0645】 <Detailed configuration example of an imaging device that achieves image stabilization by driving the image sensor> Next, with reference to Figure 64, a detailed example of the configuration of the imaging device 1021, which achieves image stabilization by driving the image sensor 1014, will be described. 【0646】 Furthermore, among the components of the imaging device 1021 in Figure 64, components that have the same function as those in the imaging device 1021 in Figure 63 are denoted by the same reference numerals, and their explanations are omitted as appropriate. 【0647】 In other words, the imaging device 1021 in Figure 64 is a more detailed configuration of the imaging device 1021 in Figure 63. 【0648】 The imaging device 1021 in Figure 64 includes, in addition to the configuration of the imaging device 1021 in Figure 63, an IMU 1041, a position and attitude detection unit 1042, and a drive control unit 1043. 【0649】 Furthermore, the drive unit 1031 is described separately as drive units 1031a-1 and 1031a-2 that drive the image sensor 1014 in the horizontal direction in the figure, and drive units 1031b-1 and 1031b-2 that drive the image sensor 1014 in the vertical direction in the figure. 【0650】 The IMU 1041 detects the acceleration and angular velocity of the main body of the imaging device 1021 and outputs them to the position and attitude detection unit 1042. 【0651】 The position and orientation detection unit 1042 detects the position and orientation of the imaging device 1021 itself by integrating the acceleration and angular velocity detected by the IMU 1041, and outputs this to the drive control unit 1043. 【0652】 Based on the position and attitude information of the main body of the imaging device 1021 detected by the position and attitude detection unit 1042, the drive control unit 1043 outputs control signals to the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 respectively, which drive the image sensor 1014 in a direction that cancels out the generated vibrations. In other words, the drive control unit 1043 controls the position and attitude of the image sensor 1014 by driving the drive unit 1031 using inertial navigation with the IMU 1041 and the position and attitude detection unit 1042, or by using intermediate output signals (intermediate variables such as acceleration, velocity, angular velocity, and angle). 【0653】 More specifically, the movement of the image sensor 1014 is transmitted from the drive unit 1031 attached to the main body of the imaging device 1021, and therefore its movement follows the movement of the main body of the imaging device 1021 itself. In other words, the movement of the image sensor 1014 follows the movement of the main body of the imaging device 1021, and is delayed by a predetermined time relative to the movement of the imaging device 1021. 【0654】 Therefore, the drive control unit 1043 predicts the movement of the image sensor 1014 from the movement of the imaging device 1021 detected by the position and attitude detection unit 1042, and supplies control signals to drive the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2, respectively, in order to cancel out the predicted movement of the image sensor 1014. 【0655】 Therefore, the drive control unit 1043 controls the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 to cancel out the movement of the image sensor 1014 through feedforward control based on the detection results of the position and attitude detection unit 1042. 【0656】 The drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 respectively drive the image sensor 1014 with a direction and amount of movement based on control signals supplied from the drive control unit 1043. 【0657】 As a result, the image sensor 1014 is driven in a direction that cancels out camera shake in response to changes in the position and orientation of the imaging device 1021, thereby achieving image stabilization. 【0658】 However, in the configuration of the imaging device 1021 shown in Figure 64, the IMU 1041 is located outside the range driven by the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 that drive the image sensor 1014. Therefore, although the position and orientation of the main body of the imaging device 1021 can be properly detected, the position and orientation of the image sensor 1014 cannot be properly detected. 【0659】 Therefore, even when the image sensor 1014 was driven by the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2, there was a risk that camera shake could not be properly corrected. In particular, if high-frequency vibrations occurred in the image sensor 1014, the IMU 1041 could not detect changes in the position and orientation of the image sensor 1014 as high-frequency vibrations, and therefore could not properly track the movement, which could result in inadequate correction. 【0660】 <Overview of the imaging device in this disclosure> Therefore, in this disclosure, an IMU is provided to detect the position and orientation of the image sensor 1014 itself, and the drive unit 1031 is driven based on the position and orientation changes of the image sensor 1014, in addition to the position and orientation changes of the main body of the imaging device. 【0661】 This allows the drive unit 1015 to be controlled to track the movement of the image sensor 1014 with high precision, making it possible to correct camera shake, including high-frequency vibrations generated by the operation of motors or engines. 【0662】 Figure 65 shows an example of an imaging device configuration in which an IMU is provided to detect the position and orientation of the image sensor 1014 itself, and the drive unit 1031 is driven based on the position and orientation of the image sensor 1014 in addition to the position and orientation of the main body of the imaging device. 【0663】 In the imaging device 1061 shown in Figure 65, components having the same function as those in the imaging device 1021 shown in Figure 64 are denoted by the same reference numerals, and their explanations are omitted as appropriate. 【0664】 In other words, the difference between the imaging device 1061 in Figure 65 and the imaging device 1021 in Figure 64 is that an IMU 1081 and a position / attitude detection unit 1082 are newly provided, and a drive control unit 1083 is provided in place of the drive control unit 1043. 【0665】 The IMU 1081 is integrated with the image sensor 1014 and detects the acceleration and angular velocity of the image sensor 1014 and outputs them to the position and attitude detection unit 1082. 【0666】 The position and orientation detection unit 1082 detects the position and orientation of the image sensor 1014 based on the acceleration and integral calculation of the acceleration supplied by the IMU 1081, and outputs this to the drive control unit 1083. 【0667】 Based on the position and orientation information of the main body of the imaging device 1061 supplied by the position and orientation detection unit 1042 and the position and orientation information of the image sensor 1014 supplied by the position and orientation detection unit 1082, the drive control unit 1083 calculates target values ​​for the control variables of the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2, in order to maintain the position and orientation of the image sensor 1014 in a predetermined state. 【0668】 Then, the drive control unit 1083 generates a control signal based on the calculated target value of the control variable and drives the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2. 【0669】 In other words, the drive control unit 1083 controls the position and attitude of the image sensor 1014 to be maintained in a predetermined state by inertial navigation based on the position and attitude information of the main body of the imaging device 1061 supplied by the position and attitude detection unit 1042 and the position and attitude information of the image sensor 1014 supplied by the position and attitude detection unit 1082, as well as by an intermediate output signal. 【0670】 Furthermore, since a predetermined time delay occurs between the position and orientation of the imaging device 1061 body supplied by the position and orientation detection unit 1042 and the actual position and orientation of the image sensor 1014, as described above, the drive unit 1031 only performs feedforward control based on the position and orientation of the imaging device 1061 body alone. 【0671】 However, the position and orientation information of the image sensor 1014 supplied by the position and orientation detection unit 1082 can be considered to be the current position and orientation of the image sensor 1014 as a result of the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 being driven. 【0672】 Therefore, it can be said that the drive control unit 1083 simultaneously implements feedforward control based on the position and orientation of the imaging device 1061 main body supplied by the position and orientation detection unit 1042, and feedback control based on the position and orientation of the image sensor 1014 supplied by the position and orientation detection unit 1082. 【0673】 This configuration allows for precise control of the drive units 1031a-1, 1031a-2, and 1031a-1, 1031a-2 to track the movement (changes in position and orientation) of the image sensor 1014. Therefore, when the imaging device is mounted on a mobile device such as a drone or vehicle, it becomes possible to correct camera shake, including high-frequency vibrations generated by the operation of the motor or engine that serves as the power source. 【0674】 <Example of the configuration of the imaging device according to the first modified example of the fifth embodiment> Next, with reference to Figure 66, an example of the configuration of an imaging device according to the first modification of the fifth embodiment of this disclosure will be described. In Figure 66, an example of the configuration in which the imaging device 1101 is mounted on a mobile device 1100 such as a vehicle or a drone is shown, but it may also be configured in a way that it is not mounted on a mobile device 1100. 【0675】 The imaging device 1101 in Figure 66 consists of a main unit 1111 that controls the operation to correct camera shake (including shake due to vibrations associated with the movement of the mobile device 1100), an imaging unit 1112 equipped with an image sensor that captures images, and an output unit 1113 that outputs the image resulting from the imaging. 【0676】 The main unit 1111 includes an IMU 1131, a main unit position and attitude detection unit 1132, an image sensor position and attitude detection unit 1133, a drive control unit 1134, a drive unit 1135, and a camera shake correction processing unit 1136. 【0677】 IMU1131 corresponds to IMU1041 in Figure 65 and detects the acceleration and angular velocity of the main unit 1111 and outputs them to the main unit position and attitude detection unit 1132. 【0678】 The main unit position and attitude detection unit 1132 has a configuration corresponding to the position and attitude detection unit 1042 in Figure 65, and includes a translational motion calculation unit 1151 and a rotational motion calculation unit 1152, which detect the position and attitude of the main unit 1111 and output them to the drive control unit 1134. 【0679】 The translational motion calculation unit 1151 detects the position of the main body 1111 by integral calculation based on the acceleration information supplied from the IMU 1131 and outputs it to the drive control unit 1134. 【0680】 The rotational motion calculation unit 1152 detects the attitude of the main body 1111 by integral calculation based on the angular velocity information supplied from the IMU 1132, and outputs it to the drive control unit 1134. 【0681】 The image sensor position and attitude detection unit 1133 has basically the same configuration as the main unit position and attitude detection unit 1132 and corresponds to the configuration of the position and attitude detection unit 1082 in Figure 65. The image sensor position and attitude detection unit 1133 includes a translational motion calculation unit 1171 and a rotational motion calculation unit 1172, and detects the position and attitude of the imaging unit 1112 (image sensor 1181) and outputs it to the drive control unit 1134. 【0682】 The translational motion calculation unit 1171 detects the position of the image sensor 1181 by integral calculation based on acceleration information supplied from the IMU 1182 of the imaging unit 1112, and outputs it to the drive control unit 1134. 【0683】 The rotational motion calculation unit 1172 detects the attitude of the image sensor 1181 by integral calculation based on the angular velocity information supplied from the IMU 1182 of the imaging unit 1112, and outputs it to the drive control unit 1134. 【0684】 The drive control unit 1134 corresponds to the drive control unit 1083 in Figure 65, and controls the drive unit 1135 based on the position and orientation information of the main unit 1111 supplied by the main unit position and orientation detection unit 1132, and the position and orientation information of the image sensor 1181 of the imaging unit 1112 supplied by the image sensor position and orientation detection unit 1133. 【0685】 More specifically, the drive control unit 1134 includes a control variable target value calculation unit 1134a, which calculates a control variable target value for maintaining the position and orientation of the image sensor 1181 in a predetermined state, based on the position and orientation information of the main unit 1111 and the position and orientation information of the image sensor 1181. 【0686】 Then, the drive control unit 1134 generates a control signal to drive the drive unit 1135 based on the control variable target value calculated by the control variable target value calculation unit 1134a, and supplies it to the drive unit 1135 to drive it. 【0687】 The drive unit 1135 consists of actuators and the like, corresponding to the drive unit 1031 (1031a-1, 1031a-2, 1031b-1, 1031b-2) in Figure 65, and drives the position and orientation of the image sensor 1181 based on control signals from the drive control unit 1134. 【0688】 The drive control unit 1134 supplies the image stabilization processing unit 1136 with information on the position and orientation changes of the main unit 1111 and the position and orientation changes of the image sensor 1181. 【0689】 The system includes an image stabilization processing unit 1136 and an image frame buffer 1136a, which buffer images supplied by the image sensor 1181. Based on the position and orientation information of the main unit 1111 and the image sensor 1181, the image stabilization processing unit 1136 corrects the image captured by the buffered image sensor 1181 through signal processing and outputs it to the output unit 1113. 【0690】 Furthermore, the image stabilization processing performed by the image stabilization processing unit 1136 will be described in detail later, with reference to Figure 67. 【0691】 The imaging unit 1112 consists of an image sensor 1181 and an IMU 1182. The image sensor 1181 has the same configuration as the image sensor 1014 in Figure 65, and captures an image consisting of pixel signals corresponding to the amount of incident light, and supplies it to the image stabilization processing unit 1136. 【0692】 The IMU1182 has a configuration corresponding to the IMU1081 in Figure 65, and is integrated with the image sensor 1181. Therefore, it detects the acceleration and angular velocity of the image sensor 1181 and outputs them to the image sensor position and attitude detection unit 1133. 【0693】 The imaging unit 1112 is configured such that, for example, a multi-IMU 200 equipped with a drive mechanism that can cancel the aforementioned XYZ axis direction shocks is attached to the back side of the imaging surface of the image sensor 801 in Figure 61. 【0694】 In other words, the image sensor 1181 has a configuration corresponding to the image sensor 801 in Figure 61, and the IMU 1182 has a configuration corresponding to the multi-IMU 200. 【0695】 Therefore, like the multi-IMU200, the IMU1182 is also composed of N IMU units 610, each equipped with an IMU block 610BXn, 610Y, 610BXn that has a drive mechanism to cancel out shocks in the XYZ axis directions. 【0696】 Therefore, in the image sensor 1181 and IMU 1182, it is possible to detect acceleration and angular velocity using the IMU unit 610, which is arranged for each unit region of the image sensor 801 (unit region 801a in Figure 61), as the unit. 【0697】 The output unit 1113 outputs an image corrected by the image stabilization processing unit 1136. More specifically, the output unit 1113 includes an image recording unit 1191 and a transmission unit 1192. 【0698】 The image recording unit 1191 records the image corrected by the image stabilization processing unit 1136 as data. 【0699】 The transmission unit 1192 is configured, for example, with Ethernet, and transmits the image corrected by the image stabilization processing unit 1136 to an external information processing device or communication terminal via a network (not shown). 【0700】 The output unit 1113 may have a different configuration; for example, it may be composed of a display with a display function, and may display an image corrected by the image stabilization processing unit 1136. 【0701】 Accordingly, in the imaging device 1101 shown in Figure 66, the drive control unit 1134 controls the image sensor 1181 to maintain its position and attitude in a predetermined state using inertial navigation based on the position and attitude information of the imaging device 1101 body supplied by the body position and attitude detection unit 1132 and the position and attitude information of the image sensor 1181 supplied by the image sensor position and attitude detection unit 1133, as well as an intermediate output signal. 【0702】 Furthermore, since a predetermined time delay occurs between the position and orientation of the main body 1111 of the imaging device 1101 supplied by the main body position and orientation detection unit 1132 and the actual position and orientation of the image sensor 1181, the drive unit 1135 could only perform feedforward control based on the position and orientation of the imaging device 1101 itself. 【0703】 However, the position and orientation information of the image sensor 1181 supplied by the image sensor position and orientation detection unit 1133 can be considered to be the current position and orientation of the image sensor 1181 as a result of the drive unit 1135's operation. 【0704】 Therefore, it can be said that the drive control unit 1134 simultaneously implements feedforward control of the drive unit 1135 based on the position and orientation of the main body 1111 of the imaging device 1101 supplied by the main body position and orientation detection unit 1132, and feedback control of the drive unit 1135 based on the position and orientation of the image sensor 1181 supplied by the image sensor position and orientation detection unit 1133. 【0705】 <About image stabilization processing> Regarding the driving of the drive unit 1135 controlled by the drive control unit 1134, there is a time lag between the supply of the control signal and the actual driving, so it may not be possible to correct hand shake caused by vibrations faster than a predetermined speed. 【0706】 The image stabilization processing unit 1136 corrects camera shake that cannot be corrected by the drive unit 1135 through signal processing, based on the position and orientation of the main body 1111 of the imaging device 1101 supplied by the main body position and orientation detection unit 1132 and the position and orientation of the image sensor 1181 supplied by the image sensor position and orientation detection unit 1133, which are supplied via the drive control unit 1134. 【0707】 As described above, the imaging unit 1112 has a configuration in which, for example, a multi-IMU 200 equipped with a drive mechanism that can cancel the XYZ axis direction shocks described above is attached to the back side of the imaging surface of the image sensor 801 in Figure 61. 【0708】 Therefore, the IMU 1182 can output the acceleration and angular velocity for each unit region in the image sensor 1181 corresponding to the IMU unit 610. 【0709】 Therefore, the image sensor position and attitude detection unit 1133 obtains position and attitude information using the IMU unit 610 as a unit and outputs it to the drive control unit 1134. 【0710】 The drive control unit 1134 acquires and stores position and orientation information of the image sensor 1181, using the IMU unit 610 supplied from the image sensor position and orientation detection unit 1133 as a unit, and also supplies it to the image stabilization processing unit 1136. 【0711】 In addition, the image sensor 1181 outputs an image consisting of pixel signals in unit areas where the IMU units 610 constituting the bonded IMU 1182 are arranged to the image stabilization processing unit 1136. Hereafter, the group of pixels in a unit area corresponding to the IMU unit 610 on the image sensor 1181 will also be referred to as a pixel unit. 【0712】 The image sensor 1181 of the imaging unit 1112 outputs a pixel signal to the image stabilization processing unit 1136 on a pixel unit basis. 【0713】 The image stabilization processing unit 1136 obtains a pixel-level motion vector from the position and orientation information of the image sensor 1181 in units of IMU units 610, applies correction processing according to the motion vector to the pixel signal supplied by the corresponding pixel unit from the image sensor 1181, and buffers it in the image frame buffer 1136a. 【0714】 In other words, the image stabilization processing unit 1136 obtains a motion vector from the position and orientation information supplied in units of IMU units, which are unit regions, and based on the obtained motion vector, it applies image stabilization processing to the corresponding pixel unit image and repeatedly buffers the image. Once one frame has been buffered, it outputs it to the output unit 1113. 【0715】 For example, if there are N unit regions in the image sensor 1181, each consisting of an IMU unit and a pixel unit (i.e., there are pixel units #1 to #N and IMU units #1 to #N), the image stabilization processing unit 1136 performs the processing in the procedure shown in the timing chart of Figure 67. 【0716】 In Figure 67, the timings shown from top to bottom are: the readout timing for each pixel unit in the image sensor 1181; the timing for reading the acceleration and angular velocity (position and orientation) for each IMU unit in the IMU 1182; the timing for correction processing by the image stabilization processing unit 1136; the writing timing to the image frame buffer 1136a; the storage timing to the image frame buffer 1136a; and the output timing of the image frame. 【0717】 In other words, when the synchronization signal indicating the readout of the image frame synchronization signal n is started at the timing indicated by the frame synchronization signal SyncFn, the unit synchronization signal indicating the readout of the first pixel unit, pixel unit #1, is assumed to be the unit synchronization signal SyncU#1. The frame synchronization signal is, for example, 30Hz, 60Hz, or 120Hz, and the unit synchronization signal is, for example, around 1kHz to 10kHz. 【0718】 When the reading of image frame n begins in this frame synchronization signal SyncFn = unit synchronization signal SyncU#1, the pixel signal of pixel unit #1 is read first in the image sensor 1181 and supplied to the image stabilization processing unit 1136. 【0719】 At the same time, the acceleration and angular velocity of the corresponding IMU unit #1 are read out in the IMU 1182. The image sensor position and attitude detection unit 1133 then detects the position and attitude information of the unit region corresponding to IMU unit #1 in the image sensor 1181 and supplies it to the drive control unit 1134. Furthermore, the drive control unit 1134 supplies the position and attitude information of the unit region corresponding to IMU unit #1 in the image sensor 1181 to the image stabilization processing unit 1136. 【0720】 At the next timing, timing t1, the image stabilization processing unit 1136 calculates a motion vector based on the position and orientation information of the unit region corresponding to the IMU unit #1, and uses the calculated motion vector to perform image stabilization processing on the pixel signal of the corresponding pixel unit #1 and stores it in the image frame buffer 1136a. 【0721】 Subsequently, in the unit synchronization signal SyncU#2, the pixel signal of pixel unit #2 is read out by the image sensor 1181 and supplied to the image stabilization processing unit 1136. 【0722】 At the same time, the acceleration and angular velocity of the corresponding IMU unit #2 are read out in IMU 1182. The image sensor position and attitude detection unit 1133 then detects the position and attitude information of the unit region corresponding to IMU unit #2 in the image sensor 1181 and supplies it to the drive control unit 1134. Furthermore, the drive control unit 1134 supplies the position and attitude information of the unit region corresponding to IMU unit #2 in the image sensor 1181 to the image stabilization processing unit 1136. 【0723】 Then, at the next timing t2, the image stabilization processing unit 1136 obtains a motion vector based on the position and orientation information of the unit region corresponding to the IMU unit #2, and uses the obtained motion vector to perform image stabilization processing on the pixel signal of the corresponding pixel unit #2 and stores it in the image frame buffer 1136a. 【0724】 Subsequently, the same process is repeated up to pixel unit #N and IMU unit #N. When the image data with image stabilization processing for one frame is buffered in the image frame buffer 1136a, at the frame synchronization signal SyncF(n+1) = unit synchronization signal SyncU#1, which is the timing for reading the next frame (n+1), the image stabilization processing unit 1136 outputs the image signal of frame n, which is buffered in the image frame buffer 1136a, to the output unit 1113. 【0725】 Furthermore, when calculating the target values ​​of the control variables for driving the drive unit 1135 that controls the position and attitude of the image sensor 1181, the position and attitude obtained for each unit region, that is, for each IMU unit, may be used to enable high-frequency control by the drive unit 1135. 【0726】 Furthermore, when calculating the target value of the controlled variable, it may be determined using statistically obtained information such as the average value from the position and attitude obtained for each IMU unit per frame, or it may be determined using position and attitude information for a specific unit area. 【0727】 <Imaging Processing> Next, the imaging process performed by the imaging device 1101 in Figure 66 will be explained with reference to the flowchart in Figure 68. 【0728】 In step S401, the IMU 1131 detects the acceleration and angular velocity of the main body 1111 and outputs them to the main body position and attitude detection unit 1132. 【0729】 In step S402, the translational motion calculation unit 1151 of the main body position and attitude detection unit 1132 detects the position of the main body 1111 by integral calculation based on acceleration information supplied from the IMU 1131 and outputs it to the drive control unit 1134. The rotational motion calculation unit 1152 of the main body position and attitude detection unit 1132 detects the attitude of the main body 1111 by integral calculation based on angular velocity information supplied from the IMU 1132 and outputs it to the drive control unit 1134. 【0730】 In step S403, the image sensor 1181 captures an image. 【0731】 In step S404, the image sensor 1181 and the IMU 1182 set the unprocessed unit region among the unit regions corresponding to the pixel unit and the IMU unit, respectively, as the unit region of interest. 【0732】 In step S405, the image sensor 1181 reads out the pixel signal of the pixel unit corresponding to the unit area of ​​interest and outputs it to the image stabilization processing unit 1136. 【0733】 In step S406, the IMU 1182 detects the acceleration and angular velocity of the image sensor 1181 of the IMU unit corresponding to the unit region of interest and outputs them to the image sensor position and attitude detection unit 1133. 【0734】 In step S407, the translational motion calculation unit 1171 of the image sensor position and attitude detection unit 1133 detects the position of the unit region of interest of the image sensor 1181 by integral calculation based on the acceleration information of the IMU unit corresponding to the unit region of interest supplied from the IMU 1182, and outputs it to the drive control unit 1134. The rotational motion calculation unit 1172 of the image sensor position and attitude detection unit 1133 detects the attitude of the unit region of interest of the image sensor 1181 by integral calculation based on the angular velocity information of the IMU unit corresponding to the unit region of interest supplied from the IMU 1182 of the imaging unit 1112, and outputs it to the drive control unit 1134. 【0735】 The drive control unit 1134 supplies the position and orientation information of the main unit 1111 and the position and orientation information of the unit area of ​​interest of the image sensor 1181 to the image stabilization processing unit 1136. 【0736】 In step S408, the image stabilization processing unit 1136 obtains a motion vector for each pixel of the unit area of ​​interest based on the position and orientation information of the main unit 1111 and the position and orientation information of the unit area of ​​interest of the image sensor 1181, and applies image stabilization processing to each pixel of the unit area of ​​interest using the obtained motion vector. 【0737】 In step S409, the image stabilization processing unit 1136 buffers the pixel signals of the unit area of ​​interest that have undergone image stabilization processing into the image frame buffer 1136a. 【0738】 In step S410, the image sensor 1181 and the IMU 1182 determine whether or not there are any unprocessed unit regions among the unit regions corresponding to the pixel unit and the IMU unit, respectively. 【0739】 If there are any unprocessed unit regions in step S410, the process returns to step S404. 【0740】 In other words, the process in steps S404 to S410 is repeated until image stabilization processing is performed for all unit areas, and the process of performing image stabilization processing for each unit area and buffering it in the image frame buffer 1136a is repeated. 【0741】 Then, if image stabilization processing is performed for all unit areas and it is determined in step S410 that there are no unprocessed unit areas, the process proceeds to step S411. 【0742】 In step S411, the image stabilization processing unit 1136 reads one frame of image stabilization processed image buffered in the image frame buffer 1136a and outputs it to the output unit 1113. 【0743】 In step S412, the drive control unit 1134 generates a control signal to control the drive unit 1135 based on the position and orientation information of the main unit 1111 supplied by the main unit position and orientation detection unit 1132 and the position and orientation information of the image sensor 1181 of the imaging unit 1112 supplied by the image sensor position and orientation detection unit 1133, and outputs it to the drive unit 1135. 【0744】 More specifically, the drive control unit 1134 controls the control variable target value calculation unit 1134a to calculate a control variable target value for the drive unit 1135 to position the image sensor 1181 to a predetermined state, based on the position and orientation information of the main unit 1111 and the position and orientation information of the image sensor 1181. 【0745】 In step S413, the drive control unit 1134 generates a control signal to drive the drive unit 1135 based on the control variable target value calculated by the control variable target value calculation unit 1134a, and supplies it to the drive unit 1135 to control the drive. 【0746】 In step S414, it is determined whether or not the imaging process has been instructed to end. If it has not been instructed to end, the process returns to step S401. 【0747】 In other words, steps S401 to S414 are repeated until the end of the imaging process is instructed. 【0748】 Then, if the imaging process is instructed to end in step S414, the process ends. 【0749】 Through the above processing, the position and orientation of the image sensor 1181 are controlled by the drive unit 1135 based on the position and orientation information of the image sensor 1181 in addition to the position and orientation information of the main unit 1111. This makes it possible to achieve high-precision and high-speed correction of camera shake by the image sensor 1181. 【0750】 Particularly, since the IMU 1182 is provided in an integrated state with the image sensor 1181, the position and orientation of the image sensor 1181 detected by the IMU 1182 are appropriately detected, so that the imaging device 1101 mounted on the moving body device 1100 such as a drone or a vehicle can correct camera shake (vibration caused by high-frequency vibration of a motor, an engine, etc.) caused by high-frequency vibration of a drive motor, an engine, etc. of the moving body device 1100. 【0751】 In addition, since it is possible to correct an image captured by the image sensor 1181 by signal processing based on the position and orientation information detected for each unit area unit of the image unit corresponding to the IMU unit, it is possible to correct camera shake with higher accuracy. 【0752】 Incidentally, in the above, an example has been described in which a motion vector is obtained based on the position and orientation information of the main body unit 1111 and the position and orientation information of the image sensor 1181 to realize camera shake correction processing. However, since it is considered that the influence of high-frequency vibration on the position and orientation of the main body unit 1111 is small, a motion vector may be obtained only from the position and orientation information of the image sensor 1181, and camera shake correction processing by signal processing may be realized. 【0753】 <Number of IMU Units and Accuracy of Camera Shake Correction> Incidentally, in the above, an example has been described in which the IMU unit is composed of N units for one image sensor 1181, but N may be one or more. 【0754】 Therefore, for example, as shown in the left part of FIG. 69, it may be the IMU unit 610B1 when N is 1, or as shown in the central part of FIG. 69, it may be the IMU unit 610B4 when N is 4, or as shown in the right part of FIG. 69, it may be the IMU unit 610B16 when N is 16, or it may be a larger number. 【0755】 Furthermore, while a larger number of IMU units 610 (N) allows for higher precision image stabilization, increasing the number of units also increases processing load, power consumption, and cost. Therefore, there is a trade-off between the accuracy of image stabilization processing and processing load, power consumption, and cost. For this reason, it is desirable to determine the number of IMU units 610 based on the required accuracy and cost for the specific purpose. 【0756】 <<25. Second Modification of the Fifth Embodiment>> In the above, we have described an example of an imaging unit 1112 in which the image sensor 1181 and IMU 1182 are integrated in a configuration similar to the image sensor 801 and multi-IMU 200 shown in Figure 61. However, other configurations are also acceptable as long as the position and orientation of the image sensor 1181 can be determined by the IMU 1182 by having the image sensor 1181 and IMU 1182 in contact with each other. 【0757】 For example, as shown in Figure 70, the configuration may be such that a single IMU 1182 is in contact with the side surface of the image sensor 1181. 【0758】 Furthermore, Figure 70 shows an example configuration in which the drive unit 1135 is also integrated around the image sensor 1181. That is, as shown in Figure 70, the imaging unit 1112 may be configured in which the image sensor 1181, IMU 1182, and drive unit 1135 are integrated, or for example, an image sensor package structure in which these are integrated may be formed. 【0759】 Furthermore, the imaging unit 1112 may be configured by adding a drive unit 1135 to the configuration in which the image sensor 801 and the multi-IMU 200 described with reference to Figure 60 are integrated, for example, so that an image sensor package structure is formed by integrating these components. 【0760】 <<26. Third Modification of the Fifth Embodiment>> In the above, we have described an example in which the position and orientation of the image sensor 1181 are detected by obtaining the acceleration and angular velocity of the image sensor 1181 using the IMU 1182. However, other configurations are also possible as long as the position and orientation of the image sensor 1181 can be determined. 【0761】 For example, as shown in Figure 71, a position detection unit that uses a Hall element may be used. 【0762】 In other words, the position detection unit 1201 in Figure 71 is composed of magnets 1211-1, 1211-2 and Hall elements 1212-1, 1212-2. 【0763】 Magnets 1211-1 and 1211-2 are positioned so that their magnetization direction aligns with the vertical and horizontal movement directions of the image sensor 1181, respectively. 【0764】 The Hall elements 1212-1 and 1212-2 are fixed and positioned so that, when the image sensor 1181 is at the origin position, they coincide with the boundary between the S pole and N pole of the magnets 1211-1 and 1211-2, respectively. 【0765】 With this arrangement, when the image sensor 1181 moves, the magnetic field applied to the Hall elements 1212-1 and 1212-2 changes proportionally to the amount of movement of the magnets, centered around the boundary between the S and N poles of the magnets 1211-1 and 1211-2. 【0766】 By measuring this magnetic field, it becomes possible to detect the horizontal and vertical positions of magnets 1211-1 and 1211-2 within the range of the region. 【0767】 The position of the image sensor 1181 may be detected using a position detection unit 1201 as shown in Figure 71. 【0768】 However, the position detection unit 1201 shown in Figure 71 can detect changes in the planar position corresponding to the imaging surface of the image sensor 1181, but it cannot detect changes in the incident direction. This can be addressed by separately providing a magnet 1211 and a Hall element 1212 in the direction of incidence of the incident light. 【0769】 Alternatively, the IMU 1182 and the position detection unit 1201 may be used in combination. 【0770】 <<27. Example of execution by software>> Incidentally, the series of processes described above can be executed by hardware, but they can also be executed by software. When the series of processes are executed by software, the programs that make up the software are installed from a storage medium onto a computer that has dedicated hardware built in, or onto a general-purpose computer that can perform various functions by installing various programs. 【0771】 Figure 72 shows an example of a general-purpose computer configuration. This personal computer has a built-in CPU (Central Processing Unit) 11001. An input / output interface 11005 is connected to the CPU 11001 via a bus 11004. A ROM (Read Only Memory) 11002 and a RAM (Random Access Memory) 11003 are connected to the bus 11004. 【0772】 The input / output interface 11005 is connected to an input unit 11006 consisting of input devices such as a keyboard and mouse for the user to input operation commands, an output unit 11007 that outputs images of the processing operation screen and processing results to a display device, a storage unit 11008 consisting of a hard disk drive for storing programs and various data, and a communication unit 11009 consisting of a LAN (Local Area Network) adapter for performing communication processing via a network such as the Internet. In addition, a drive 11010 is connected to removable storage media 11011 such as magnetic disks (including flexible disks), optical disks (including CD-ROMs (Compact Disc-Read Only Memory) and DVDs (Digital Versatile Discs)), magneto-optical disks (including MDs (Mini Discs)), or semiconductor memory. 【0773】 The CPU 11001 reads programs stored in the ROM 11002, or from removable storage media 11011 such as magnetic disks, optical disks, magneto-optical disks, or semiconductor memory, and installs them into the storage unit 11008. The CPU 11001 then executes various processes according to the programs loaded from the storage unit 11008 into the RAM 11003. The RAM 11003 also stores data necessary for the CPU 11001 to execute various processes. 【0774】 In a computer configured as described above, the CPU 11001 loads, for example, a program stored in the memory unit 11008 into the RAM 11003 via the input / output interface 11005 and the bus 11004, and executes it, thereby performing the series of processes described above. 【0775】 The program executed by the computer (CPU 11001) can be provided by recording it on a removable storage medium 11011, such as a packaged media. The program can also be provided via wired or wireless transmission media, such as a local area network, the internet, or digital satellite broadcasting. 【0776】 In a computer, a program can be installed in the storage unit 11008 via the input / output interface 11005 by inserting the removable storage medium 11011 into the drive 11010. Alternatively, the program can be received by the communication unit 11009 via a wired or wireless transmission medium and installed in the storage unit 11008. Furthermore, the program can be pre-installed in the ROM 11002 or the storage unit 11008. 【0777】 The programs executed by the computer may be programs that are processed chronologically in the order described herein, or they may be programs that are processed in parallel or at necessary times, such as when a call is made. 【0778】 Furthermore, the CPU 11001 in Figure 72 implements the functions of the drive control unit 1134 and the image stabilization processing unit 1136 in Figure 66. 【0779】 Furthermore, in this specification, a system means a collection of multiple components (devices, modules (parts), etc.), regardless of whether all components are located in the same enclosure or not. Therefore, multiple devices housed in separate enclosures and connected via a network, and a single device in which multiple modules are housed in one enclosure, are both considered systems. 【0780】 The embodiments described herein are not limited to those described above, and various modifications are possible without departing from the gist of this disclosure. 【0781】 For example, this disclosure can take the form of cloud computing, in which a single function is shared and processed collaboratively by multiple devices over a network. 【0782】 Furthermore, each step described in the flowchart above can be performed by a single device, or it can be divided and performed by multiple devices. 【0783】 Furthermore, if a single step includes multiple processes, those processes can be executed by a single device or shared among multiple devices. 【0784】 Furthermore, this disclosure can also be structured as follows: <1> An image sensor that captures images, It includes an IMU (Inertial Measurement Unit) integrated with the image sensor, which detects the acceleration and angular velocity of the image sensor, The IMU outputs the acceleration and angular velocity of the image sensor to the drive control unit that controls the driving of the image sensor. Solid-state image sensor. <2> The aforementioned IMU is a multi-IMU consisting of multiple IMUs. <1> Solid-state image sensor as described above. <3> Each of the multiple IMUs constituting the multi-IMU detects the acceleration and angular velocity for each unit region, which is the unit when the image sensor is divided into multiple regions, and sequentially outputs the acceleration and angular velocity for each unit region to the drive control unit. <2> Solid-state image sensor as described above. <4> When each of the plurality of IMUs sequentially outputs the acceleration and angular velocity for each unit region to the drive control unit, the image sensor outputs an image for each corresponding unit region. <3> Solid-state image sensor as described above. <5> The IMU is a standalone unit that detects the acceleration and angular velocity of the image sensor and sequentially outputs the acceleration and angular velocity of the image sensor to the drive control unit. <1> Solid-state image sensor as described above. <6> The system further includes a drive unit that controls the position and orientation of the image sensor, The drive control unit controls the drive of the drive unit based on inertial navigation using the acceleration and angular velocity of the image sensor, and an intermediate output signal, thereby controlling the position and attitude of the image sensor. <1> Solid-state image sensor as described above. <7> The drive unit is an actuator that drives the image sensor. <6> Solid-state image sensor as described above. <8> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A drive unit that controls the position and orientation of the image sensor, A drive control unit controls the drive of the drive unit and the position and attitude of the image sensor based on inertial navigation using the acceleration and angular velocity of the image sensor and an intermediate output signal. An imaging device equipped with the following features. <9> The system further includes an image sensor position and orientation detection unit that detects the position and orientation of the image sensor by performing an integral calculation based on the acceleration and angular velocity of the image sensor. The drive control unit controls the drive of the drive unit by feedback control based on the position and orientation of the image sensor. <8> The imaging device described above. <10> The device further comprises another IMU, different from the IMU, which is integrated with the main body of the device and detects the acceleration and angular velocity of the main body of the device, The drive control unit controls the drive of the drive unit based on the inertial direction derived from the acceleration and angular velocity of the image sensor detected by the IMU, and the acceleration and angular velocity of the device body detected by the other IMU. <8> The imaging device described above. <11> An image sensor position and orientation detection unit detects the position and orientation of the image sensor by performing an integral calculation based on the acceleration and angular velocity of the image sensor, The device further comprises a main body position and attitude detection unit that detects the position and attitude of the main body of the device by performing an integral calculation based on the acceleration and angular velocity of the main body of the device, The drive control unit controls the drive of the drive unit by feedback control based on the position and orientation of the image sensor and feedforward control based on the position and orientation of the device body. <10> The imaging device described above. <12> The system further includes a control quantity target value calculation unit that calculates a control quantity target value related to the driving of the drive unit based on the position and orientation of the image sensor and the position and orientation of the device body, The drive control unit controls the drive of the drive unit based on the target value of the controlled quantity. <11> The imaging device described above. <13> The system further includes a correction unit that corrects the image captured by the image sensor based on the acceleration and angular velocity of the image sensor. <8> ~ <12> An imaging device as described in any of the following. <14> The aforementioned IMU is a multi-IMU consisting of multiple IMUs. <13> The imaging device described above. <15> Each of the multiple IMUs constituting the multi-IMU detects the acceleration and angular velocity for each unit region, which is the unit of the divided region when the image sensor is divided into multiple regions. When each of the plurality of IMUs detects the acceleration and angular velocity for each unit region, the image sensor outputs an image for each corresponding unit region. The correction unit corrects the image for each unit region based on the acceleration and angular velocity for each unit region. <14> The imaging device described above. <16> The image sensor position and orientation detection unit further comprises an image sensor position and orientation detection unit that detects the position and orientation of the image sensor for each unit region by performing an integral calculation based on the acceleration and angular velocity of the image sensor for each unit region, The correction unit corrects the image for each unit region based on the position and orientation of the image sensor for each unit region. <15> The imaging device described above. <17> The IMU is a standalone unit and detects the acceleration and angular velocity of the image sensor. <8> The imaging device described above. <18> The drive unit is an actuator that drives the image sensor. <8> ~ <17> An imaging device as described in any of the following. <19> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A method for operating an imaging device comprising a drive unit that controls the position and orientation of the image sensor, The steps involve controlling the drive of the drive unit based on the acceleration and angular velocity of the image sensor, and the intermediate output signal, in order to control the position and attitude of the image sensor. A method for operating an imaging device, including the device itself. <20> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A computer that controls an imaging device comprising a drive unit that controls the position and orientation of the image sensor, A drive control unit controls the drive of the drive unit and the position and attitude of the image sensor based on inertial navigation using the acceleration and angular velocity of the image sensor and an intermediate output signal. A program that makes something work. <21> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A drive unit that controls the position and orientation of the image sensor, A drive control unit controls the drive of the drive unit and the position and attitude of the image sensor based on inertial navigation using the acceleration and angular velocity of the image sensor and an intermediate output signal. Sharp imaging device A mobile device equipped with a mobile body. <22> The system further includes an image sensor position and orientation detection unit that detects the position and orientation of the image sensor by performing an integral calculation based on the acceleration and angular velocity of the image sensor. The drive control unit controls the drive of the drive unit by feedback control based on the position and orientation of the image sensor. <21> The mobile device described above. <23> The imaging device is further provided with another IMU, which is integrated with the main body of the imaging device and detects the acceleration and angular velocity of the main body of the imaging device, and is different from the IMU. The drive control unit controls the drive of the drive unit based on the inertial direction derived from the acceleration and angular velocity of the image sensor detected by the IMU, and the acceleration and angular velocity of the main body of the imaging device detected by the other IMU. <21> The mobile device described above. <24> An image sensor position and orientation detection unit detects the position and orientation of the image sensor by performing an integral calculation based on the acceleration and angular velocity of the image sensor, The system further comprises a main body position and attitude detection unit that detects the position and attitude of the main body of the imaging device by performing an integral calculation based on the acceleration and angular velocity of the main body of the imaging device, The drive control unit controls the drive of the drive unit by feedback control based on the position and orientation of the image sensor and feedforward control based on the position and orientation of the main body of the imaging device. <23> The mobile device described above. <25> The system further includes a control quantity target value calculation unit that calculates a control quantity target value related to the drive unit based on the position and orientation of the image sensor and the position and orientation of the main body of the imaging device, The drive control unit controls the drive of the drive unit based on the target value of the controlled quantity. <23> The mobile device described above. <26> The system further includes a correction unit that corrects the image captured by the image sensor based on the acceleration and angular velocity of the image sensor. <21> ~ <25> The mobile device described above. <27> The aforementioned IMU is a multi-IMU consisting of multiple IMUs. <26> The mobile device described above. <28> Each of the multiple IMUs constituting the multi-IMU detects the acceleration and angular velocity for each unit region, which is the unit of the divided region when the image sensor is divided into multiple regions. When each of the plurality of IMUs detects the acceleration and angular velocity for each unit region, the image sensor outputs an image for each corresponding unit region. The correction unit corrects the image for each unit region based on the acceleration and angular velocity for each unit region. <27> The mobile device described above. <29> The image sensor position and orientation detection unit further comprises an image sensor position and orientation detection unit that detects the position and orientation of the image sensor for each unit region by performing an integral calculation based on the acceleration and angular velocity of the image sensor for each unit region, The correction unit corrects the image for each unit region based on the position and orientation of the image sensor for each unit region. <28> The mobile device described above. <30> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A method for operating a mobile device equipped with an imaging device having a drive unit that controls the position and orientation of the image sensor, The steps involve controlling the drive of the drive unit based on the acceleration and angular velocity of the image sensor, and the intermediate output signal, in order to control the position and attitude of the image sensor. A method for operating a mobile device, including the device itself. <31> An image sensor that captures images, A solid-state image sensor including an IMU (Inertial Measurement Unit) integrated with the image sensor for detecting the acceleration and angular velocity of the image sensor, A computer that controls a mobile device equipped with an imaging device having a drive unit that controls the position and orientation of the image sensor, A drive control unit controls the drive of the drive unit and the position and attitude of the image sensor based on inertial navigation using the acceleration and angular velocity of the image sensor and an intermediate output signal. A program that makes something work. [Explanation of symbols] 【0785】 200 Multi-IMU (Inertial Measurement Unit), 201, 201-1 to 201-4 IMU, 210 Printed circuit board, 211, 211-1 to 211-4 Oscillator, 212, 212-1 to 212-4, 212', 212'-1, 212'-2-1 to 212'-2-4 Base, 213, 213-1 to 213-4, 213', 213'', 213''' Readout circuit, 231, 231-1 to 231-4 Drive circuit block, 232, 232-1 to 232-4 Sense circuit block, 233, 233-1 to 233-4 Digital output circuit block, 251, 251-1 to 241-4 Oscillator circuit, 252, 252-1 to 252-4 Automatic gain adjustment circuit, 271, 271-1 to 271-4 Charge amplifier circuit, 272, 272-1 to 272-4 Phase shift circuit, 273, 273-1 to 273-4 Synchronous detection circuit, 274, 274-1 to 274-4 LPF, 291, 291-1 to 291-4 AD conversion circuit, 292, 292-1 to 292-4 Decimation filter, 293, 293-1 to 293-4 Digital output circuit, 301, 301' Switching circuit, 321, 321' Reference signal generation unit, 351, 351-1 to 351-4 Acoustic insulator, 371 Beat detection circuit, 372 Synthesis unit, 411, 411-1, 411-2 Cluster, 451 Clustering Measurement Device, 452 Connection Section, 461 Reference Frequency Generation Section, 462 Frequency Measurement Section, 463 Clustering Calculation Section, 471, 471', 471'', 471''' Synthesis Calculation Section, 481 Resampler, 483 Interference Removal Section, 484 Synthesis Section, 511, 511-1, 511-2, 511', 512, 512-1, 512-2, 512', 521, 521-1, 521-2, 522, 522-1, 522-2 Switch, 531, 531-1, 531-2 Delay Adjustment Section, 532, 532', 532'' Intra-Cluster Synthesis Section, 551, 551-1, 551-2 Differential reversal section, 561, 561' Switch, 571, 571-2, 571-2 Reversal section, 601 Proof mass, 602 Movable drive section, 603 Fixed drive section, 604 Connection section, 604a Electrode, 605 Detection electrode, 610, 610X,610X-1 to 610X-4, 610Y, 610Y-1 to 610Y-4, 610Z, 610Z-1 to 610Z-4 IMU units, 610BX, 610BY, 610BZ IMU blocks, 611, 611-1, 611-2 connecting beams, 612-1, 612-2 connecting beams, 632, 632-1, 632-2 connecting beams, 631, 631-1, 631-2 connecting beams, 651 signal processing unit, 661, 662 calculation unit, 671 signal processing unit, 672 switching unit, 681, 681-1 to 681-4 calculation unit, 701, 701-1 to 701-3, 702, 702-1 to 702-3 connecting beams, 731,732 Switching unit, 733 Signal processing unit, 741 Calculation unit, 751 Signal processing unit, 752 Switching unit, 801 Image sensor, 1100 Mobile device, 1101 Imaging device, 1111 Main unit, 1112 Imaging unit, 1113 Output unit, 1131 IMU, 1132 Main unit position and attitude detection unit, 1133 Image sensor position and attitude detection unit, 1134 Drive control unit, 1135 Drive unit, 1136 Image stabilization processing unit, 1151 Translational motion calculation unit, 1152 Rotational motion calculation unit, 1171 Translational motion calculation unit, 1172 Rotational motion calculation unit, 1181 Image sensor, 1182 IMU, 1191 Image recording unit, 1192 Transmitter, 1201 Position detection unit, 1211-1, 1211-2 Magnet, 1212-1, 1212-2 Hall element,

Claims

[Claim 1] An image sensor that captures images, A solid-state image sensor including a plurality of IMUs (Inertial Measurement Units) integrated with the image sensor and provided on the back side of the image sensor relative to the imaging surface of the image sensor, which detect the acceleration and angular velocity of each unit region into which the image sensor is divided into a plurality of regions and output them to a drive control unit that sequentially controls the driving of the image sensor, A drive unit that controls the position and orientation of the image sensor, A separate IMU, different from the IMU, is provided as an integral part of the imaging device and detects the acceleration and angular velocity of the imaging device. An image sensor position and orientation detection unit detects the position and orientation of the image sensor by performing an integral calculation based on the acceleration and angular velocity of the image sensor, The system includes an imaging device position and attitude detection unit that detects the position and attitude of the imaging device by performing an integral calculation based on the acceleration and angular velocity of the imaging device, The drive control unit controls the drive of the drive unit by inertial navigation based on the acceleration and angular velocity of the image sensors detected by the plurality of IMUs, thereby controlling the position and attitude of the image sensors, and controls the drive of the drive unit by feedback control based on the position and attitude of the image sensors and feedforward control based on the position and attitude of the imaging device. Imaging device. [Claim 2] The system further includes a correction unit that corrects the image captured by the image sensor based on the acceleration and angular velocity of the image sensor. The imaging apparatus according to claim 1. [Claim 3] When each of the plurality of IMUs detects the acceleration and angular velocity for each unit region into which the image sensor is divided into multiple regions, the image sensor outputs an image for each corresponding unit region. The correction unit corrects the image for each unit region based on the acceleration and angular velocity for each unit region. The imaging apparatus according to claim 2. [Claim 4] The image sensor position and orientation detection unit further comprises an image sensor position and orientation detection unit that detects the position and orientation of the image sensor for each unit region by performing an integral calculation based on the acceleration and angular velocity of the image sensor for each unit region, The correction unit corrects the image for each unit region based on the position and orientation of the image sensor for each unit region. The imaging device according to claim 3. [Claim 5] The drive unit is an actuator that drives the image sensor. The imaging apparatus according to claim 1. [Claim 6] The imaging device is mounted on a mobile body. The imaging apparatus according to claim 1.

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