Static eliminators and static elimination systems

The static eliminator system addresses the increased management burden by integrating ion generation, control, and data management, ensuring precise control over manufacturing conditions to enhance product yield and reduce electrostatic issues.

JP7879012B2Active Publication Date: 2026-06-23KEYENCE CORP

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
KEYENCE CORP
Filing Date
2022-11-04
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing static eliminators increase management burden when strict control over manufacturing conditions is required, such as in semiconductor and liquid crystal display device production, leading to potential electrostatic breakdown and foreign matter adherence.

Method used

A static eliminator and system that includes an ion generating unit, ion control unit, measurement value acquisition, data generation, and non-volatile storage, along with a control device for network connectivity, enabling precise management of manufacturing conditions without increasing operational burden.

Benefits of technology

Enables strict control over manufacturing conditions, reducing the risk of electrostatic breakdown and foreign matter adherence, thereby improving product yield and efficiency.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a static eliminator and a static elimination system capable of strictly managing manufacturing state of a product without increasing a burden of management.SOLUTION: A static eliminator 200 includes an ion generating part, an ion control part, a measured value acquisition part 233, a data generation part 234, and a nonvolatile storage unit. The ion generating part generates ions. The ion control part controls the ion generating part. The measured value acquisition part 233 acquires a measured value related to the control by the ion control part and acquires measurement time at which the measured value is acquired. The data generation part 234 generates history data on the basis of the measured value and the measurement time. The nonvolatile storage unit stores the history data.SELECTED DRAWING: Figure 5
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Description

Technical Field

[0001] The present invention relates to a static eliminator and a static elimination system for eliminating static electricity from an object to be static-eliminated.

Background Art

[0002] In a manufacturing line for semiconductor devices, liquid crystal display devices, etc., if each component used in manufacturing is charged, electrostatic breakdown may occur, or foreign matter may adhere to the component, which may reduce the product yield. To suppress the reduction in yield caused by each component being charged, a static eliminator is used.

[0003] In the static eliminator (static eliminator) described in Patent Document 1, positive ions and negative ions generated from electrode needles are blown onto the target object by a fan. Further, in the static eliminator, the output voltage of the positive and negative high voltage generation circuits connected to the electrode needles is controlled so that the ion balance is maintained by the signal of the detection resistor connected to the ground wire. Thereby, the charge accumulated in the object to be static-eliminated is removed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In recent years, in a manufacturing line, it has been required to strictly manage manufacturing conditions such as the static elimination status of products. However, when strictly managing the manufacturing conditions of products, the burden associated with management increases.

[0006] An object of the present invention is to provide a static eliminator and a static elimination system capable of strictly managing the manufacturing conditions of products without increasing the burden of management.

Means for Solving the Problems

[0007] A static eliminator according to one aspect of the present invention comprises an ion generating unit for generating ions, an ion control unit for controlling the ion generating unit, a measurement value acquisition unit for acquiring measurement values ​​related to the control by the ion control unit and for acquiring the measurement time at which the measurement values ​​were acquired, a data generation unit for generating historical data based on the measurement values ​​and the measurement time, and a non-volatile storage unit for storing the historical data.

[0008] A static elimination system according to another aspect of the present invention comprises a static eliminator and a control device connectable to the static eliminator, wherein the static eliminator further comprises a first communication unit connected to a network, and the control device comprises a second communication unit connected to the network and a data acquisition unit that acquires the history data stored in the non-volatile storage unit via the network. [Effects of the Invention]

[0009] According to the present invention, the manufacturing status of products can be strictly controlled without increasing the burden of management. [Brief explanation of the drawing]

[0010] [Figure 1] This is a diagram illustrating the general configuration of a static elimination system according to one embodiment of the present invention. [Figure 2] This is a block diagram showing a simplified configuration of a static charge detection system. [Figure 3] Figure 1 is a block diagram illustrating the configuration of the ion balance sensor. [Figure 4] This is a circuit diagram showing an example of a specific configuration for an ion detection circuit. [Figure 5] Figure 1 is a block diagram illustrating the configuration of the static eliminator. [Figure 6] Figure 1 is a block diagram illustrating the configuration of the static eliminator. [Figure 7] This diagram shows an example of the arrangement of the display unit, operation unit, and indicator lights. [Figure 8] It is a block diagram of a static eliminator for explaining the configuration of the static eliminator control unit. [Figure 9] It is a diagram for explaining the history data stored in the static eliminator memory unit of FIG. 8. [Figure 10] It is a diagram showing an example of the first-layer screen. [Figure 11] It is a diagram showing an example of the air volume adjustment screen. [Figure 12] It is a diagram showing an example of a change in the setting of the air volume on the air volume adjustment screen. [Figure 13] It is a diagram showing an example of the first monitor screen. [Figure 14] It is a diagram for explaining the details of the event display area. [Figure 15] It is a diagram showing an example of the second monitor screen. [Figure 16] It is a diagram showing an example of the first event history screen. [Figure 17] It is a diagram showing an example of the second event history screen. [Figure 18] It is a diagram showing an example of the third event history screen. [Figure 19] It is a diagram for explaining the procedure for displaying the event details screen. [Figure 20] It is a diagram showing an example of the second-layer screen. [Figure 21] It is a diagram showing the first example of the setting screen. [Figure 22] It is a diagram showing the second example of the setting screen. [Figure 23] It is a diagram showing the third example of the setting screen. [Figure 24] It is a diagram showing the fourth example of the setting screen. [Figure 25] It is a diagram showing the fifth example of the setting screen. [Figure 26] It is a block diagram for explaining the configuration of the control device of FIG. 1. [Figure 27] It is a diagram showing an example of the history image. [Figure 28] It is a flowchart showing an example of the time setting process performed in the static eliminator. [Figure 29] This flowchart shows an example of the temporary storage control process performed in a static eliminator. [Figure 30] This flowchart shows an example of the control process for the static eliminator memory unit performed in a static eliminator. [Figure 31] This flowchart shows an example of control device management processing performed in a control device. [Modes for carrying out the invention]

[0011] 1. Outline of the configuration and usage examples of the static elimination system Hereinafter, a static eliminator and static elimination system according to one embodiment of the present invention will be described with reference to the drawings. Figure 1 is a diagram illustrating the schematic configuration of a static elimination system according to one embodiment of the present invention. As shown in Figure 1, the static elimination system 1 according to this embodiment mainly comprises a plurality of static eliminators 200 and a control device 300. The plurality of static eliminators 200 and the control device 300 are connected to a network 309 by wire or wireless and are able to communicate with each other. The static elimination system 1 may further include a charge detection system 400. In this case, the charge detection system 400 is connected to the network 309 by wire or wireless. The network 309 is a communication network such as a LAN (Local Area Network), WAN (Wide Area Network), or the Internet. In this embodiment, the number of plurality of static eliminators 200 connected to the network 309 is 50, 100, or 1000, etc.

[0012] The static eliminator 200 includes a static eliminator housing 11, and the housing 11 contains various high-voltage circuits for generating positive and negative ions. An air outlet 12 is formed in the static eliminator housing 11. A cover 13 may be attached to the static eliminator housing 11 so as to cover the front of the fan 201, which will be described later. In this case, the air outlet 12 is formed in the cover 13. The static eliminator housing 11 may also be provided with a cover detection sensor at the mounting portion of the cover 13 to detect whether the cover 13 is attached. The static eliminator 200 sends the positive and negative ions generated inside the static eliminator housing 11 to the outside of the static eliminator 200 through the air outlet 12.

[0013] In the following explanation, the gas (in this example, air containing positive and negative ions) flowing out of the static eliminator 200 from the air outlet 12 of the static eliminator housing 11 is referred to as the static eliminator body. The cover 13 may function as a louver to adjust the diffusion angle of the static eliminator body. The space to which the static eliminator body discharged from the static eliminator 200 should be supplied, that is, the space to which static elimination of objects should be performed, is referred to as the target space. Multiple belt conveyors may be prepared, and multiple objects may be transported sequentially at a constant speed by each belt conveyor, with static elimination of each object performed in a predetermined space on each belt conveyor. In this case, the space on each belt conveyor becomes the target space.

[0014] If there is an imbalance in the ion balance of the target space, the target object cannot be properly statically removed. Therefore, in order to detect the ion balance of the target space, an ion balance sensor 100 is connected to each of the multiple static eliminators 200. An ion balance sensor 100 connected to the static eliminator 200 is provided in the target space corresponding to each static eliminator 200. In this embodiment, the ion balance of the target space refers to the degree of bias in electrical polarity within the target space.

[0015] The ion balance of the target space approaches 0 when, for example, the amount of positive ions and the amount of negative ions contained in the static eliminator flowing from the static eliminator 200 into the target space are equal or nearly equal. On the other hand, the ion balance of the target space deviates from 0 (becomes unbalanced) when, for example, the amount of positive ions and the amount of negative ions contained in the static eliminator flowing from the static eliminator 200 into the target space are different. The ion balance sensor 100 has a conductive detection plate 110A. The ion balance of the target space is detected based on the potential of the detection plate 110A. Details of the ion balance sensor 100 will be described later.

[0016] The ion balance sensor 100 according to this embodiment, when installed in a target space, can detect information about the environment of the target space in addition to the ion balance of the target space. Specifically, the ion balance sensor 100 can detect the amount of ions flowing through the target space per unit time (hereinafter referred to as the ion current of the target space) as information about the environment of the target space. Furthermore, the ion balance sensor 100 can detect the temperature and humidity of the target space as information about the environment of the target space.

[0017] The ion balance sensor 100 is connected to the static eliminator 200 via a cable. The various information detected by the ion balance sensor 100 is transmitted to the static eliminator 200 via the cable. In this case, the static eliminator 200 can adjust the generation state of positive ions and negative ions based on the detection result of the ion balance of the target space. As a result, a static eliminator appropriate for eliminating static electricity from the target object is supplied to the target space.

[0018] Here, if the air outlet 12 of the static eliminator 200 is directed away from the target space, the static eliminator will not flow from the static eliminator 200 into the target space. In this case, the ion current will be detected as 0 or close to 0. On the other hand, if the air outlet 12 of the static eliminator 200 is directed towards the target space, the static eliminator will flow appropriately from the static eliminator 200 into the target space. In this case, the ion current will be detected as a value corresponding to the amount of ions contained in the static eliminator.

[0019] Therefore, the static eliminator 200 can determine whether its position and orientation (installation state) are appropriate based on the detection result of the ion current. Specifically, if the value of the ion current is below a predetermined ion current threshold, it can be determined that the installation state of the static eliminator 200 is abnormal. Conversely, if the value of the ion current is greater than the ion current threshold, it can be determined that the installation state of the static eliminator 200 is normal. By presenting such determination results to the user, the user can easily understand whether or not adjustments to the installation state of the static eliminator 200 are necessary.

[0020] Furthermore, the static eliminator 200 can manage changes in the environmental conditions of the target space by storing the temperature and humidity detection results in memory.

[0021] The control device 300 is, for example, a personal computer and includes, for example, a CPU (Central Processing Unit), ROM (Read-Only Memory), and RAM (Random Access Memory). The control device 300 is connected to a main display unit 330 and a main operation unit 340. The main display unit 330 is composed of an LCD (Liquid Crystal Display) panel or an organic EL (Electroluminescent) panel. The main operation unit 340 includes a keyboard and a pointing device and is configured to be operable by the user.

[0022] The control device 300 is used for setting various operating conditions for multiple static eliminators 200, and for monitoring the operating status of the multiple static eliminators 200. The various operating conditions for the static eliminators 200 include the flow rate (airflow) of gas sent to the target space by the fan of the static eliminator 200 (described later), various threshold values ​​for determining whether the static eliminator 200 is in a normal or abnormal state, and whether or not to disable the operation of the operation unit 260 of the static eliminator 200 (described later). The control device 300 may also be used to monitor the amount of charge detected by the charge detection system 400.

[0023] 2. Configuration of the charge detection system Figure 2 is a block diagram showing a simplified configuration of the charge detection system 400. As shown in Figure 2, the charge detection system 400 includes a charge detection device 410, a plurality of charge detection devices 420, and a communication device 430. Each of the charge detection device 410, the plurality of charge detection devices 420, and the communication device 430 includes a CPU and has communication capabilities.

[0024] A detection head 411 is connected to the charge detection device 410. The detection head 411 is positioned in a space downstream of the target space on one of the belt conveyors. The detection head 411 detects the amount of charge in the space where it is positioned, according to the control of the charge detection device 410. The detection head 411 also provides the detected amount of charge to the charge detection device 410. As a result, the charge detection device 410 acquires the amount of charge detected by the detection head 411.

[0025] Multiple charge detection devices 420 are each connected to multiple detection heads 421. Each of the multiple detection heads 421 is positioned in a space downstream of the target space on the other multiple belt conveyors. Each detection head 421 detects the amount of charge in the space where it is positioned, according to the control of the corresponding charge detection device 420. Each detection head 421 also provides the detected amount of charge to the corresponding charge detection device 420. As a result, each charge detection device 420 obtains the amount of charge detected by the corresponding detection head 421.

[0026] The charge detection device 410 acquires the amount of charge acquired by each charge detection device 420 from each charge detection device 420. The communication device 430 transmits the amount of charge acquired by the charge detection device 410 to the control device 300 by performing a communication protocol conversion between the charge detection device 410 and the control device 300.

[0027] In this configuration, static electricity is removed in the target space on each belt conveyor, and the amount of charge on the object transported downstream is detected by either the detection head 411 or one of the multiple detection heads 421. This allows the control device 300 to monitor whether or not the static electricity removal of the object has been performed properly.

[0028] 3. Basic configuration of an ion balance sensor Figure 3 is a block diagram illustrating the configuration of the ion balance sensor 100 shown in Figure 1. As shown in Figure 3, the ion balance sensor 100 includes a detection plate 110A, an ion detection circuit 110B, a temperature detection element 120, a humidity detection element 130, a sensor indicator light 140, a sensor communication unit 150, a sensor power supply unit 160, and a sensor control unit 190.

[0029] The detection plate 110A is made of a conductive material (e.g., a metallic material) and is positioned to be exposed to the space surrounding the ion balance sensor 100. The ion detection circuit 110B is connected to the detection plate 110A and outputs signals corresponding to the ion balance and ion current of the target space based on the change in potential of the detection plate 110A over time. The specific configuration of the ion detection circuit 110B will be described later.

[0030] The temperature detection element 120 is an element that outputs a signal corresponding to the temperature of the space in which the temperature detection element 120 is located, and is, for example, a thermocouple or a resistance thermometer. The ion balance sensor 100 is configured so that the space in which the temperature detection element 120 is located and the space surrounding the ion balance sensor 100 are in communication, so the temperature detection element 120 outputs a signal corresponding to the temperature of the space surrounding the ion balance sensor 100 (the target space). The humidity detection element 130 is, for example, a polymer humidity detection element, and outputs a signal corresponding to the humidity of the space surrounding the ion balance sensor 100 (the target space).

[0031] The sensor indicator light 140 includes, for example, multiple light-emitting diodes that emit light in different colors. The sensor communication unit 150 transmits various signals output from the sensor control unit 190 to the static eliminator 200 via a cable. The sensor communication unit 150 also receives various information transmitted from the static eliminator 200 via a cable and provides it to the sensor control unit 190.

[0032] The sensor power supply unit 160 receives power supplied from the static eliminator 200 via a cable, converts the received power as appropriate, and supplies it to each component of the ion balance sensor 100.

[0033] The sensor control unit 190 includes a microcomputer and performs the generation of various information and the control of each component. The sensor control unit 190 may also include a CPU and memory instead of a microcomputer. The microcomputer or memory of the sensor control unit 190 stores programs primarily for detecting the ion balance, ion current, temperature, and humidity of the target space, as well as for exchanging various information with the static eliminator 200.

[0034] In the sensor control unit 190, a microcomputer or CPU executes a program stored in the sensor control unit 190. As a result, the sensor control unit 190 detects the ion balance of the target space based on the signal output from the ion detection circuit 110B, and generates an ion balance signal indicating the detection result. The generated ion balance signal is output from the sensor control unit 190.

[0035] Furthermore, the sensor control unit 190 detects the ion current in the target space based on the signal output from the ion detection circuit 110B and generates an ion current signal indicating the detection result. The generated ion current signal is output from the sensor control unit 190.

[0036] Furthermore, the sensor control unit 190 detects the temperature of the target space based on the signal output from the temperature detection element 120 and generates a temperature signal indicating the detection result. The generated temperature signal is output from the sensor control unit 190.

[0037] Furthermore, the sensor control unit 190 detects the humidity of the target space based on the signal output from the humidity detection element 130 and generates a humidity signal indicating the detection result. The generated humidity signal is output from the sensor control unit 190.

[0038] Furthermore, the sensor control unit 190 controls the sensor indicator light 140 to emit light in a specific color (e.g., green) when, for example, the ion balance and ion current detected by the ion balance sensor 100 meet predetermined tolerance conditions. On the other hand, the sensor control unit 190 controls the sensor indicator light 140 to emit light in a specific other color (e.g., red) when, for example, the ion balance and ion current detected by the ion balance sensor 100 do not meet the above tolerance conditions.

[0039] Figure 4 is a circuit diagram showing an example of the specific configuration of the ion detection circuit 110B. As shown in Figure 4, the ion detection circuit 110B includes an operational amplifier 111, a fixed resistor 112, and a modulation voltage source 113. The operational amplifier 111 is used as a buffer circuit, and its non-inverting input terminal is electrically connected to the detection plate 110A. The output terminal of the operational amplifier 111 is connected to its inverting input terminal and also to the sensor control unit 190.

[0040] The modulation voltage source 113 generates an AC voltage as a periodic modulation voltage. The modulation voltage source 113 is electrically connected to node N between the detection plate 110A and the non-inverting input terminal of the operational amplifier 111 via a fixed resistor 112.

[0041] As described above, the detection plate 110A is positioned to be exposed in the space surrounding the ion balance sensor 100 (the target space in this example). In addition, a static eliminator containing positive and negative ions flows from the static eliminator 200 into the target space in this example.

[0042] In the ion balance sensor 100 described above, when the modulated voltage source 113 generates an AC voltage, the amplitude of the voltage waveform of the signal (voltage signal) output from the operational amplifier 111, or a corresponding value thereof, is detected as the ion current in the target space. In addition, the value of the center of fluctuation of the voltage waveform of the signal (voltage signal) output from the operational amplifier 111, or a corresponding value thereof, is detected as the ion balance in the target space.

[0043] 4. Basic configuration of a static eliminator Figures 5 and 6 are block diagrams illustrating the configuration of the static eliminator 200 shown in Figure 1. As shown in Figures 5 and 6, the static eliminator 200 includes a fan 201, a fan drive unit 202, a sensing electrode 203, a positive ion generation unit 211, a positive electrode side high-voltage circuit 212, a negative ion generation unit 221, a negative electrode side high-voltage circuit 222, a static eliminator control unit 230, and an ion information generation unit 240. These components are housed within the static eliminator housing 11 shown in Figure 1. The static eliminator 200 is also equipped with a surface potential meter for detecting the charge level of an object. Based on the charge level detected by the surface potential meter, it is possible to detect charged objects.

[0044] In Figure 5, schematic front views of the positive ion generating unit 211 and the negative ion generating unit 221 are shown within the nozzles. The positive ion generating unit 211 includes an annular member 211a and a plurality (four in this example) of electrode needles en1. The plurality of electrode needles en1 are provided at equal intervals on the inner circumference of the annular member 211a so as to extend toward the center of the annular member 211a. The negative ion generating unit 221 includes an annular member 221a and a plurality of electrode needles en2, similar to the positive ion generating unit 211. The plurality of electrode needles en2 are provided at equal intervals on the inner circumference of the annular member 221a so as to extend toward the center of the annular member 221a.

[0045] A positive electrode high-voltage circuit 212 is connected to the positive ion generation unit 211. The positive electrode high-voltage circuit 212 includes a resistor and a boost circuit and applies a high voltage to multiple electrode needles en1 of the positive ion generation unit 211 based on the control of the static eliminator control unit 230. This causes corona discharge and generates positive ions. A negative electrode high-voltage circuit 222 is connected to the negative ion generation unit 221. The negative electrode high-voltage circuit 222 includes a resistor and a boost circuit and applies a high voltage to multiple electrode needles en2 of the negative ion generation unit 221 based on the control of the static eliminator control unit 230. This causes corona discharge and generates negative ions.

[0046] The fan 201 is installed inside the static eliminator housing 11 in Figure 1, facing the air outlet 12 and rotatable around a predetermined rotation axis 201a. The fan drive unit 202 includes, for example, a motor and rotates the fan 201 around the rotation axis 201a based on the control of the static eliminator control unit 230.

[0047] The fan 201, the negative ion generating unit 221, and the positive ion generating unit 211 are arranged in this order from the air outlet 12 in Figure 1 in the direction of the rotation axis 201a of the fan 201. The centers of the annular members 211a and 221a of the positive ion generating unit 211 and the negative ion generating unit 221 are located on the rotation axis 201a of the fan 201.

[0048] In the positive ion generation unit 211 and the negative ion generation unit 221, positive ions and negative ions are generated, respectively, by the operation of the positive electrode side high-voltage circuit 212 and the negative electrode side high-voltage circuit 222. In this state, the fan 201 rotates. As a result, the static eliminator containing positive and negative ions flows out of the static eliminator 200 through the air outlet 12 of the static eliminator housing 11. In Figure 5, the flow of the static eliminator from the air outlet 12 of the static eliminator housing 11 to the outside of the static eliminator 200 is shown by multiple thick dashed arrows. The sensing electrode 203 is positioned on the flow path of the static eliminator delivered by the fan 201. An ion current caused by the static eliminator flows through the sensing electrode 203.

[0049] The ion information generation unit 240 detects the overall ion balance of positive and negative ions generated in the static eliminator 200 as ion information. This ion information is used by the static eliminator control unit 230 when controlling the positive electrode high-voltage circuit 212 or the negative electrode high-voltage circuit 222. Unlike the ion balance of the target space detected by the ion balance sensor 100, the ion information may include the ion balance of the static eliminator flowing through the air outlet 12 of the static eliminator 200. Furthermore, the ion information may include the ion balance of the target space and the space surrounding the static eliminator 200. Therefore, the ion information is generated based on the detection results, for example, by detecting the ion balance of the static eliminator flowing near the fan 201, and by detecting the ion balance of the target space and the space surrounding the static eliminator 200.

[0050] In this example, as shown in Figure 6, the ion information generation unit 240 includes an internal ion current detection circuit 241 and an external ion current detection circuit 242. The internal ion current detection circuit 241 is connected to the detection electrode 203 and also to the static eliminator housing 11. The internal ion current detection circuit 241 detects the ion current flowing through the detection electrode 203 and the ion current flowing on the surface of the static eliminator housing 11 as the internal ion current. The external ion current detection circuit 242 is connected to an earth electrode maintained at earth potential. The external ion current detection circuit 242 detects the ion current returning from the target space to the static eliminator 200 via earth as the external ion current. By detecting these internal and external ion currents, the amount of ions generated by the positive ion generation unit 211 and the negative ion generation unit 221 is measured.

[0051] The static eliminator control unit 230 includes a CPU and memory or a microcomputer. When the static eliminator 200 is removing static electricity from an object, the static eliminator control unit 230 controls the fan drive unit 202 so that the static eliminator flows at a preset airflow rate. The static eliminator control unit 230 also controls the positive electrode side high-voltage circuit 212 and the negative electrode side high-voltage circuit 222 so that the ion balance of the static eliminator approaches zero, based on the ion information generated by the ion information generation unit 240.

[0052] The static eliminator 200 may be configured to operate in eco mode. In eco mode, the static elimination is performed with the lowest possible power consumption. For example, in eco mode, static elimination may be performed with the lowest possible airflow from the fan 201 (airflow level "1" described later).

[0053] In addition to the above-mentioned components (201, 202, 211, 212, 221, 222, 230, 240), the static eliminator 200 further includes a display unit 250, an operation unit 260, a static eliminator memory unit 270, a temporary memory unit 271, a static eliminator communication unit 280, a static eliminator power supply unit 290, a cleaning device 291, an indicator light 292, and an alarm device 293. The display unit 250, the operation unit 260, and the indicator light 292 are mounted on a part of the static eliminator housing 11. The static eliminator memory unit 270, the temporary memory unit 271, the static eliminator communication unit 280, the static eliminator power supply unit 290, the cleaning device 291, and the alarm device 293 are housed within the static eliminator housing 11.

[0054] Figure 7 shows an example of the arrangement of the display unit 250, the operation unit 260, and the indicator light 292. As shown in Figure 7, the display unit 250 is located in the central area at the bottom of the front of the static eliminator housing 11. The display unit 250 is composed of an LCD panel or an organic EL panel. The display unit 250 displays various setting information of the static eliminator 200 based on the control of the static eliminator control unit 230.

[0055] The control unit 260 includes multiple control buttons and is located on the static eliminator housing 11 adjacent to the display unit 250. Specifically, the control unit 260 includes an up button 261, a down button 262, a left button 263, a right button 264, a select button 265, a cancel button 266, and a power button 267. The up button 261, down button 262, left button 263, right button 264, select button 265, and cancel button 266 are located on one side of the display unit 250 (right in this example). The power button 267 is located on the other side of the display unit 250 (left in this example). The static eliminator housing 11 is also provided with a main power switch (not shown) for turning the static eliminator 200 on and off.

[0056] As described later, the static eliminator 200 can clean the electrode needles en1 and en2 using the cleaning device 291. The confirmation button 265 accepts instructions corresponding to the content displayed on the display unit 250, as well as instructions to start cleaning. The user can give instructions to the static eliminator 200 by short-pressing the confirmation button 265 to correspond to the content displayed on the display unit 250, or by long-pressing the confirmation button 265 for 2 seconds or more to start cleaning. Static elimination is not performed in the static eliminator 200 while cleaning is in progress. Therefore, by assigning a long press of the confirmation button 265 to the instruction to start cleaning, it is possible to prevent a period during which static elimination is not performed due to user error on the operation unit 260.

[0057] The power button 267 accepts commands to start and stop static elimination. In other words, the user can instruct the static eliminator 200 to start or stop static elimination by pressing the power button 267. If the power button 267 is pressed while the static eliminator 200 has stopped static elimination, the static eliminator 200 will start static elimination. If the power button 267 is pressed while the static eliminator 200 is performing static elimination, the static eliminator 200 will stop static elimination.

[0058] Furthermore, by operating the control unit 260, the user can set the operating conditions of the static eliminator 200, and display the ion balance detection results from the ion balance sensor 100 on the display unit 250. Examples of operation of other buttons such as the up button 261, down button 262, left button 263, right button 264, select button 265, and cancel button 266 will be described later, along with examples of the display on the display unit 250.

[0059] Furthermore, the static eliminator 200 may be configured to operate in a locked mode. In locked mode, the ability to change various operating conditions is limited to specific users. Therefore, when changing the various operating conditions set on the static eliminator 200, a password is required. The user can enter the password into the static eliminator 200 by operating the control unit 260. Upon entering the password, the lock is temporarily released, and it becomes possible to change the settings of the various operating conditions. In this way, by requiring the input of a password, it is possible to ensure that only specific users who know the password can change the various operating conditions.

[0060] The static eliminator communication unit 280 in Figure 5 receives signals of various information transmitted from the sensor communication unit 150 (Figure 3) of the ion balance sensor 100 via a cable and provides them to the static eliminator control unit 230. Furthermore, when the static eliminator communication unit 280 is connected to the network 309 in Figure 1, it receives signals of various information transmitted from the control device 300 via the network 309 and provides them to the static eliminator control unit 230. In addition, the static eliminator communication unit 280 transmits signals of various information output from the static eliminator control unit 230 to the control device 300.

[0061] The temporary storage unit 271 is a volatile storage unit, which can be implemented, for example, by RAM. Various types of information are stored sequentially in the temporary storage unit 271 at regular time intervals. When all of the predetermined storage area allocated to the temporary storage unit 271 is filled with information, the most recently stored information is deleted, and the latest information is stored in the resulting storage area. In this way, the most recently stored information is overwritten by the latest information. Therefore, the temporary storage unit 271 functions as a ring buffer, and information stored in the ring buffer is retained for a certain period of time until it is overwritten by the latest information.

[0062] For example, the static eliminator control unit 230 stores the ion balance of the target space along with time information in the temporary storage unit 271 when the static eliminator communication unit 280 receives an ion balance signal from the ion balance sensor 100. At this time, in addition to the above storage operation, the static eliminator control unit 230 may display an arbitrary message on the display unit 250 if the received ion balance value is greater than a predetermined ion balance threshold. The message displayed on the display unit 250 may be a message indicating that the received ion balance value has exceeded a predetermined ion balance threshold, or it may be a message indicating that the installation state of the static eliminator 200 is inappropriate when the value and the threshold are used to determine the installation state of the static eliminator 200. Furthermore, the static eliminator control unit 230 may control the positive electrode side high-voltage circuit 212 and the negative electrode side high-voltage circuit 222 based on the received ion balance signal so that the ion balance in the target space approaches 0.

[0063] Furthermore, the static eliminator control unit 230 stores the ion current in the target space along with time information in the temporary storage unit 271 when the static eliminator communication unit 280 receives an ion current signal from the ion balance sensor 100. At this time, in addition to the above storage operation, the static eliminator control unit 230 may also display a message on the display unit 250 indicating that the installation state of the static eliminator 200 is not appropriate if the value of the received ion current is below the above ion current threshold.

[0064] Furthermore, the static eliminator control unit 230 stores the temperature and humidity of the target space along with time information in the temporary storage unit 271 when the static eliminator communication unit 280 receives temperature and humidity signals from the ion balance sensor 100. The static eliminator control unit 230 may also compare the temperature or humidity with a threshold value and display a message based on the comparison result on the display unit 250.

[0065] The static eliminator storage unit 270 is a non-volatile storage unit and consists of memory or a hard disk. The static eliminator storage unit 270 stores a static eliminator management program that manages the history data described later. The static eliminator management program includes a time setting program, a temporary storage unit control program, and a static eliminator storage unit control program.

[0066] Furthermore, the static eliminator control unit 230 samples the information stored in the temporary storage unit 271 and stores it in the static eliminator storage unit 270. This suppresses an increase in the amount of data stored in the static eliminator storage unit 270, while making it possible to manage the static elimination state of the target object based on various information about the environment of the target space stored in the static eliminator storage unit 270. Details of the information stored in the static eliminator storage unit 270 will be described later.

[0067] As described above, the temporary storage unit 271 functions as a ring buffer. Therefore, basically, only a portion of the information stored in the temporary storage unit 271 is sampled and stored in the static eliminator storage unit 270, and the majority of the information is overwritten and deleted without being stored in the static eliminator storage unit 270. However, during the period when the information is stored in the temporary storage unit 271, it is possible to display that information in real time on the first-level screen of the display unit 250. An example of the display of the display unit 250 will be described later.

[0068] The static eliminator power supply unit 290 receives power supplied from the commercial power supply through a power cable (not shown), and supplies a portion of the received power to other components of the static eliminator 200. The static eliminator power supply unit 290 also supplies the remaining power received to the sensor power supply unit 160 (Figure 3) of the ion balance sensor 100 through the cable. In this example, when the power to the static eliminator 200 is turned on, the static eliminator 200 starts up, and power is supplied to each component of the static eliminator 200.

[0069] The cleaning device 291 is configured to clean multiple electrode needles en1, en2 of the positive ion generating unit 211 and the negative ion generating unit 221, for example, with a brush, and operates based on the control of the static eliminator control unit 230. The indicator light 292 includes one or more light-emitting diodes and lights up, turns off, or flashes based on the control of the static eliminator control unit 230. The alarm device 293 outputs an alarm based on the control of the static eliminator control unit 230. The indicator light 292 is located above the power button 267 of the operation unit 260 in the static eliminator housing 11 (see Figure 7).

[0070] 5. Configuration of the static eliminator control unit Figure 8 is a block diagram of the static eliminator 200 to illustrate the configuration of the static eliminator control unit 230. As shown in Figure 8, the static eliminator control unit 230 includes, as functional units, a time setting unit 231, a device control unit 232, a measurement value acquisition unit 233, a data generation unit 234, a storage control unit 235, a determination unit 236, and a notification acquisition unit 237. The functional units of the static eliminator control unit 230 are realized when the static eliminator control unit 230 executes the static eliminator management program stored in the static eliminator storage unit 270.

[0071] The static eliminator management program may be stored on a computer-readable storage medium 272, such as a CD (Compact Disc)-ROM, instead of in the static eliminator storage unit 270. Alternatively, the static eliminator management program may be provided in a form stored on the storage medium 272 and installed in the static eliminator storage unit 270. Furthermore, some or all of the functional parts of the static eliminator control unit 230 may be implemented by hardware such as electronic circuits.

[0072] The time setting unit 231 sets the time for the static eliminators 200. However, due to individual differences, there may be discrepancies in the times set for multiple static eliminators 200. The longer the elapsed time since the time was set for any of the static eliminators 200, the larger the time discrepancy becomes. Therefore, when the static eliminator communication unit 280 is connected to the network 309 in Figure 1, the time setting unit 231 requests the control device 300 in Figure 1 to transmit time information indicating the time set for the control device 300. The time setting unit 231 also receives the time information transmitted by the control device 300 and updates the set time to the time indicated by the time information. This prevents discrepancies from occurring in the times set for multiple static eliminators 200.

[0073] The device control unit 232 controls the fan drive unit 202, the positive electrode high-voltage circuit 212, and the negative electrode high-voltage circuit 222 to generate and supply an appropriate amount of ions to the target object based on the ion information generated by the ion information generation unit 240. The device control unit 232 also controls the operation of the display unit 250, the cleaning device 291, the indicator light 292, and the alarm device 293.

[0074] The measurement value acquisition unit 233 acquires measurement values ​​related to the control by the device control unit 232. The measurement values ​​include ion quantity, charge quantity, fan 201 rotation speed, ion balance, ion current, temperature, or humidity. Ion balance, ion current, temperature, or humidity are measured by the ion balance sensor 100 shown in Figure 3. Therefore, some of the measurement values ​​are acquired from the ion balance sensor 100 via the static eliminator communication unit 280. The measurement value acquisition unit 233 also acquires the measurement time when the measurement values ​​were acquired. The measurement time is determined based on the time set by the time setting unit 231.

[0075] The charge amount is obtained based on the external current detected by the external ion current detection circuit 242, but the embodiment is not limited thereto. The charge amount may also be obtained from a surface potential meter (not shown), or from the ion balance sensor 100 if the ion balance sensor 100 is connected to the static eliminator 200. Alternatively, the charge amount may be obtained from the charge detection system 400 shown in Figure 2.

[0076] The data generation unit 234 generates historical data based on the measured values ​​and measurement times acquired by the measured value acquisition unit 233. Details of the historical data will be described later. In particular, by generating historical data based on the ion quantity and the rotation speed of the fan 201, the user can confirm whether the static eliminator 200 was operating at an output capable of achieving a predetermined static elimination speed. Furthermore, by generating historical data based on the ion quantity, the rotation speed of the fan 201, and the ion balance, the user can confirm whether the static eliminator 200 was operating with a predetermined static elimination performance. In addition, by generating historical data based on the ion quantity, the rotation speed of the fan 201, the ion balance, and the ion current, the user can confirm whether a defect in an object due to insufficient static elimination is due to the operation of the static eliminator 200 or to the external environment surrounding the static eliminator 200.

[0077] The memory control unit 235 stores the history data generated by the data generation unit 234 in the temporary storage unit 271 at regular intervals (0.1 seconds in this example). The memory control unit 235 also samples a portion of the history data stored in the temporary storage unit 271 at regular intervals (1 hour in this example) and stores it in the static eliminator storage unit 270. Furthermore, if the determination unit 236 (described later) determines that an event has occurred, the memory control unit 235 stores the history data stored in the temporary storage unit 271 for a certain period including the time the event occurred in the static eliminator storage unit 270, and also stores data indicating the date and time the event occurred as history data in the static eliminator storage unit 270.

[0078] Each time history data is stored in the temporary storage unit 271, the determination unit 236 determines whether a predetermined event related to the measured value of the history data has occurred. Specific event types include, for example, an error occurring in the rotation speed of the fan 201, an installation abnormality occurring in the static eliminator 200, and the fulfillment of various alarm output conditions. Other event types include the power of the static eliminator 200 being turned on or off, static elimination starting or ending, the detection of charged objects starting or ending, and the cleaning device 291 operating.

[0079] More specifically, events may include error events, alarm events, and notification events. Thresholds for various measurements are set in the static eliminator 200. Some thresholds are pre-set as fixed values ​​and cannot be changed. On the other hand, other thresholds can be set to any value by the user. If a measurement is greater than the threshold for that measurement, or if the measurement is less than or equal to the threshold for that measurement, the above events are detected. In addition, some events may only be detected when the ion balance sensor 100 is connected to the static eliminator 200.

[0080] In addition to the error events, alarm events, and notification events described above, events may also include predetermined events (hereinafter referred to as "specific events") that are not related to thresholds. For alarm events, notification events, and specific events, the user can choose whether or not to detect them by operating the control unit 260 to configure the settings.

[0081] An error event indicates that a situation has occurred where static discharge cannot be properly continued. Therefore, if an error event is detected, static discharge is automatically stopped. In addition, the storage of history data in the temporary storage unit 271 is stopped.

[0082] As an example of an error event, if the rotation speed of fan 201 does not rise above a predetermined speed (the rotation speed of airflow level "1" described later), a rotation abnormality error event is detected. If a current exceeding a predetermined value flows through the positive-side high-voltage circuit 212 or the negative-side high-voltage circuit 222, an abnormal discharge error event is detected. If the cover 13 is not properly attached to the static eliminator housing 11, a cover abnormality error event is detected. If reading or writing to the temporary storage unit 271 fails, a system memory error event is detected.

[0083] An alarm event is an event that prompts the user to take action when the static eliminator 200 exhibits behavior different from that expected, and is detected based on a threshold value pre-set as a fixed value in the static eliminator 200. The behavior of the static eliminator 200 when an alarm event is detected is acceptable to some users. Therefore, when an alarm event is detected, the alarm device 293 outputs an alarm, but static elimination continues without stopping. In addition, the storage of history data in the temporary storage unit 271 also continues without stopping.

[0084] As an example of an alarm event, if the rotational speed of fan 201 is greater than or less than the rotational speed threshold, an event related to the rotational speed of fan 201 (fan rotational speed alarm event) is detected. The threshold for the rotational speed of fan 201 is set in accordance with the airflow level, which will be described later. Here, it is not always necessary to set both an upper and lower limit for the threshold for the rotational speed of fan 201. The same applies to other thresholds. For example, if the expected abnormality of fan 201 is a decrease in the rotational speed of fan 201, only the lower limit threshold may be set, and only a determination may be made as to whether the rotational speed of fan 201 is less than or equal to the rotational speed threshold.

[0085] If the ion current value falls below the ion current threshold, an event related to the ion current value (ion level alarm event) is detected. The ion current decreases when the electrode needles en1 and en2 that generate ions wear down, or when dirt adheres to the electrode needles en1 and en2. Therefore, for example, when it is determined that the ion current is below the threshold, an ion level alarm event is detected, which can inform the user that a predetermined amount of ions cannot be generated.

[0086] When the ion balance sensor 100 is connected to the static eliminator 200, the ion balance is measured. If the measured ion balance value is greater than the ion balance threshold, an event related to the ion balance value (installation abnormality alarm event) is detected. If the static eliminator 200 is not properly installed, the ion balance will increase in either the positive or negative direction because the appropriate amount of ions will not reach the ion balance sensor 100. Therefore, the detection of the installation abnormality alarm event can inform the user that the static eliminator 200 is not properly installed.

[0087] Furthermore, if the ion balance sensor 100 is connected to the static eliminator 200, temperature and humidity are measured. If the measured temperature or humidity value exceeds a preset threshold, an event related to the temperature or humidity value (condition alarm event) is detected. The detection of a condition alarm event allows the static eliminator 200 to notify the user of an abnormality in the surrounding environment.

[0088] A notification event is an event that notifies the user when the static eliminator 200 behaves differently from the behavior expected by the user, and is detected based on a threshold set by the user for the static eliminator 200. Even if a notification event is detected, static elimination continues without stopping. Also, the storage of history data in the temporary storage unit 271 continues without stopping.

[0089] As an example of a notification event, an ion balance notification event is detected when the ion balance measured by the ion balance sensor 100 is greater than a threshold specified by the user. A temperature notification event or a humidity notification event is detected when the temperature or humidity measured by the ion balance sensor 100 exceeds the respective threshold specified by the user.

[0090] In this example, the approximate charge of the object is evaluated based on the external current detected by the external ion current detection circuit 242. The approximate charge of the object evaluated based on the external current is called the charge level. A charge level notification event is detected when the evaluated charge level exceeds a threshold specified by the user. A similar event may also be detected based on the charge amount evaluated based on the ion balance measured by the ion balance sensor 100, and based on the evaluated charge amount and the threshold. Alternatively, a similar event may be detected based on the charge amount measured by a surface potential meter (not shown) or the charge detection system 400 in Figure 1, and the threshold.

[0091] Specific events include, for example, starting static elimination, stopping static elimination, setting various thresholds, changing various thresholds, starting cleaning, stopping cleaning, or inputting a signal to the input terminal of the static eliminator 200, which will be described later. When static elimination is stopped, the storage of history data in the temporary storage unit 271 is stopped. Also, as described above, static elimination is stopped when cleaning is performed. Therefore, the storage of history data in the temporary storage unit 271 is also stopped when cleaning is performed.

[0092] If the static eliminator communication unit 280 is connected to the network 309, the control device 300 retrieves the history data stored in the static eliminator storage unit 270. The control device 300 also notifies the static eliminator 200 that the history data has been retrieved. The notification acquisition unit 237 receives the notification from the control device 300. In this case, the storage control unit 235 may delete the history data stored in the static eliminator storage unit 270.

[0093] The historical data includes three sets of data: the first set, the second set, and the third set. The first set of data is data that associates measurements taken at a first time interval (1 hour in this example) with the measurement time. The second set of data is data that associates measurements taken when various events occurred with the measurement time. The third set of data indicates the date and time when various events occurred.

[0094] Figure 9 is a diagram illustrating the history data stored in the static eliminator memory unit 270 shown in Figure 8. As shown in Figure 9, in this example, the power to the static eliminator 200 is turned on at 9:00. This starts the static eliminator 200 and begins supplying power to each component of the static eliminator 200. Once the static eliminator 200 is started, the elapsed time is calculated starting from the time the static eliminator 200 was started.

[0095] Furthermore, if the static eliminator 200 is connected to the network 309, communication is established between the static eliminator 200 and the control device 300 when the static eliminator 200 is activated. In this case, the time setting unit 231 requests the control device 300 to transmit time information and updates the time set in the static eliminator 200 by receiving time information from the control device 300.

[0096] After the static eliminator 200 is activated, static elimination of the target object begins. As a result, historical data, which associates various measurement values ​​obtained by the ion balance sensor 100 and the static eliminator 200 with the measurement time, is sequentially stored in the temporary storage unit 271 in Figure 8 at a second time interval (0.1 seconds in this example).

[0097] Here, as the first time period elapses, the history data stored in the temporary storage unit 271 at the time the first time period has elapsed is stored in the static eliminator storage unit 270 as the first data. In this example, the first time period is 1 hour, but the embodiment is not limited to this. The user can set the first time period to any time longer than the second time period by operating the operation unit 260.

[0098] In this example, the first time is set using relative time, starting from the time the static eliminator 200 is activated. Specifically, since the first time is 1 hour, if the static eliminator 200 is activated at 9:00, then each time the time reaches 10:00, 11:00, 12:00, 13:00, etc., the history data stored in the temporary storage unit 271 at each of these times is stored in the static eliminator storage unit 270 as the first data. However, the embodiment is not limited to this. The user can set the first time using absolute time by operating the operation unit 260. In this case, regardless of the time the static eliminator 200 is activated, the history data stored in the temporary storage unit 271 at a predetermined time is stored in the static eliminator storage unit 270 as the first data.

[0099] Furthermore, as the first time period elapses, characteristic values ​​of some of the measured values ​​in the history data stored in the temporary storage unit 271 during that first time period are stored in the static eliminator storage unit 270. In this example, as the first time period elapses, characteristic values ​​of temperature, humidity, and ion balance during that first time period are stored in the static eliminator storage unit 270.

[0100] Furthermore, regarding the ion balance, along with the characteristic values ​​described above, or in lieu thereof, characteristic values ​​between the time point in the first time interval and the time point one minute prior to that point are stored in the static eliminator storage unit 270. The characteristic values ​​may be, for example, at least one of the maximum and minimum values, or they may be the average value. Alternatively, the characteristic values ​​may be all of the maximum, minimum, and average values.

[0101] Here, the measured values ​​obtained are unstable during the period immediately after the static eliminator 200 is started or immediately after static elimination is restarted. Therefore, in storing the characteristic values ​​for one minute in the ion balance described above, the 30 seconds after the static eliminator 200 is started and the 10 seconds after static elimination is restarted are treated as invalid periods. In this case, the characteristic values ​​for a continuous one-minute period immediately preceding the elapsed time of the first time are stored. For example, if static elimination is temporarily suspended and an invalid period is included between the elapsed time of the first time and the time one minute prior to that time, the characteristic values ​​between the time when static elimination was temporarily suspended and the time one minute prior to that time are stored in the static eliminator storage unit 270.

[0102] In the example shown in Figure 9, the event occurs at 12:30. In this case, historical data including 601 measurement points stored in the temporary storage unit 271 during a certain period (1 minute in this example) including 12:30 is stored as second data. Specifically, historical data stored in the temporary storage unit 271 during the period from 30 seconds before the event occurred to 30 seconds after the event occurred is stored as second data.

[0103] Furthermore, data indicating the date and time when the above event occurred is stored in the static eliminator storage unit 270 as a third piece of data. In this example, the date and time when the event occurred is "March 24, 2022, 12:30". Alternatively, a single measurement value at the time the event occurred may be stored in the static eliminator storage unit 270 as a third piece of data.

[0104] Furthermore, if one or more events of the same type occur between the time an event occurs and the end period of the second data (30 seconds in this example) has elapsed, the second data will only store information about the first event that occurred. On the other hand, the third data will store information not only about the first event that occurred, but also about each of the one or more subsequent events of the same type that occurred.

[0105] In contrast, if one or more events of a different type occur between the time an event occurs and the end of the second data period, the second data will store not only the first event but also each of the one or more subsequent events of a different type. The same applies to the third data.

[0106] The static eliminator storage unit 270 is capable of storing a first data set with a data volume equivalent to one year, a second data set with a data volume equivalent to 100 events, and a third data set with a data volume equivalent to 3,000 events. When the static eliminator 200 and the control device 300 are connected, the history data stored in the static eliminator storage unit 270 is stored in the main memory of the control device 300, which will be described later. In this case, the history data stored in the static eliminator storage unit 270 may be deleted.

[0107] On the other hand, if the static eliminator 200 and the control device 300 are not connected for a long period of time, the amount of history data stored in the static eliminator storage unit 270 may reach the above-mentioned upper limit of data volume. In this case, the most recently stored history data is deleted from the static eliminator storage unit 270, and the latest history data is stored in the resulting storage area.

[0108] Furthermore, the static eliminator 200 may be provided with input terminals and output terminals. In this example, the static eliminator 200 is provided with first to third input terminals and first to third output terminals. Control devices such as programmable controllers can be connected to each terminal.

[0109] The first input terminal is a static elimination stop terminal, and static elimination is stopped when a signal is input to the first input terminal. The second input terminal is a cleaning terminal, and in response to a signal being input to the first input terminal, the cleaning device 291 starts cleaning the electrode needles en1 and en2. The third input terminal is an event extraction terminal, and in response to a signal being input to the third input terminal, information based on the history data stored in the temporary storage unit 271 is stored in the static eliminator storage unit 270, similar to when an event occurs. This allows the user to store the first data, second data, and third data related to the user's desired timing in the static eliminator storage unit 270.

[0110] When a signal is input to either the first or second input terminal, the operation of the static eliminator 200 based on that signal is detected as an event, and data based on the history data stored in the temporary storage unit 271 is stored in the static eliminator storage unit 270. In this example, each input terminal is assigned as described above, but either input terminal may be treated as an input terminal that accepts data extraction requests from, for example, an external device. In this case, the information stored in the static eliminator storage unit 270 in response to a signal being input to the input terminal is stored in any storage medium. This allows the information stored in the static eliminator storage unit 270 to be extracted at the timing desired by the user.

[0111] The assignments for the first to third output terminals can be changed through the settings. In the initial settings, the first output terminal outputs a signal indicating the operating status of the static eliminator 200 (whether or not static elimination is being performed). The second output terminal outputs a signal to output an alarm if at least one event from among multiple events belonging to error events or alarm events is detected. The third output terminal outputs a signal to notify the user if at least one event from among multiple events belonging to notification events is detected.

[0112] 6. Examples of displays on the display unit The static eliminator 200 is started when the main power switch (not shown) of the static eliminator housing 11 is turned on. After the static eliminator 200 is started, a predetermined startup screen is displayed on the display unit 250, followed by the first-level screen. Figure 10 shows an example of the first-level screen. As shown in Figure 10, the first-level screen 500 includes a screen for monitoring the status of the static eliminator 200, or a screen for setting frequently changed settings, and includes multiple types of screens (six types in this example). The six types of first-level screens 500 are called the airflow adjustment screen 510, the first monitor screen 520, the second monitor screen 530, the first event history screen 540, the second event history screen 550, and the third event history screen 560, respectively.

[0113] The display unit 250 displays one of the six types of first-level screens 500 described above. Each time the left button 263 of the operation unit 260 in Figure 7 is operated, the first-level screens 500 displayed on the display unit 250 switch in a predetermined order. Also, each time the right button 264 of the operation unit 260 is operated, the first-level screens 500 displayed on the display unit 250 switch in the reverse order to when the left button 263 is operated.

[0114] The second monitor screen 530 can be displayed on the display unit 250 when the ion balance sensor 100 is connected to the static eliminator 200. Therefore, when the static eliminator 200 is connected to the ion balance sensor 100, the first monitor screen 520 is displayed on the display unit 250, and the left button 263 is operated, causing the first monitor screen 520 to switch to the second monitor screen 530. Alternatively, the first event history screen 540 is displayed on the display unit 250, and the right button 264 is operated, causing the first event history screen 540 to switch to the second monitor screen 530.

[0115] On the other hand, if the static eliminator 200 is not connected to the ion balance sensor 100, and the left button 263 is operated while the first monitor screen 520 is displayed on the display unit 250, the second monitor screen 530 is skipped and the first monitor screen 520 switches to the first event history screen 540. Similarly, if the right button 264 is operated while the first event history screen 540 is displayed on the display unit 250, the second monitor screen 530 is skipped and the first event history screen 540 switches to the first monitor screen 520.

[0116] Thus, the number of screens displayed as the first-level screen 500 when the ion balance sensor 100 is not connected to the static eliminator 200 is less than the number of screens displayed as the first-level screen 500 when the ion balance sensor 100 is connected to the static eliminator 200. Therefore, the number of steps required for the user to display a desired screen on the first-level screen 500 can be reduced. In this example, the second monitor screen 540 is not displayed when the ion balance sensor 100 is not connected to the static eliminator 200, and only other screens of the first-level screen 500 are displayed. However, the configuration may also include displaying an alternative screen to the second monitor screen 540 as the first-level screen when the ion balance sensor 100 is not connected to the static eliminator 200.

[0117] The first-level screen 500 is designed to be easily accessible to the user and therefore includes a screen to display the status of static elimination by the static eliminator 200. In practice, the frequency with which the user changes the various operating conditions of the static eliminator 200 is lower than the frequency with which they check the status of static elimination by the static eliminator 200. Therefore, the setting of various operating conditions is performed on the second-level screen and beyond, which are deeper than the first-level screen 500. However, in practice, among the various operating conditions for the static eliminator 200, the airflow rate is changed more frequently than other operating conditions. Therefore, in this example, the first-level screen 500 includes an airflow adjustment screen 510 that displays the airflow rate set at that time as the status of static elimination by the static eliminator 200 and accepts changes to the airflow rate. In other words, among the various operating conditions for the static eliminator 200, the airflow rate can be set by the user on the first-level screen 500.

[0118] Figure 11 shows an example of the airflow adjustment screen 510. As shown in Figure 11, the airflow adjustment screen 510 displays the operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. In addition, the airflow adjustment screen 510 also displays the airflow value display area 511, the airflow gauge display area 512, and the explanation display area 513. The operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504 are also displayed in other first-level screens 500.

[0119] The operating status display area 501 displays the operating status of the static eliminator 200. The string "RUN" is displayed when static elimination is in progress, and the string "STOP" is displayed when static elimination is stopped. These displays switch each time the power button 267 on the control panel 260 in Figure 7 is briefly pressed. The event display area 502 displays an icon and string indicating the type of event when an event belonging to an error event, alarm event, or notification event is detected. Details of the event display area 502 will be explained in the first monitor screen 520.

[0120] The Eco Mode display area 503 shows whether the static eliminator 200 is operating in Eco Mode. If the static eliminator 200 is operating in Eco Mode, the string "ECO" is displayed; if the static eliminator 200 is not operating in Eco Mode, nothing is displayed. The Lock Mode display area 504 shows whether the static eliminator 200 is operating in Lock Mode. If the static eliminator 200 is operating in Lock Mode, a key icon is displayed; if the static eliminator 200 is not operating in Lock Mode, nothing is displayed. In addition, in Lock Mode, if a password is entered, i.e., the lock is temporarily released, the key icon is displayed faintly (grayed out).

[0121] The text "Air Vol. Level" is displayed in the airflow value display area 511. In this example, the airflow from fan 201 is divided into seven levels, from "1" to "7," based on the fan's rotation speed. The current airflow level is displayed numerically in the airflow value display area 511. In the example in Figure 11, the static eliminator 200 is operating in eco mode. Therefore, the airflow level is the lowest level, "1." If the airflow level is changed in this state, a confirmation message to disable eco mode may be displayed on the airflow adjustment screen 510.

[0122] The airflow gauge display area 512 displays the current airflow level using a gauge. In this example, the gauge includes seven bars extending horizontally. The seven bars have lengths corresponding to airflow levels "1" through "7". The bars corresponding to the current airflow level and lower levels are displayed in color, while the other bars are grayed out. The colors may differ for each range of airflow levels. For example, the bars for airflow levels "1" and "2" may be displayed in green, the bars for airflow levels "3" through "5" may be displayed in yellow, and the bars for airflow levels "6" and "7" may be displayed in red.

[0123] The explanatory display area 513 displays a brief explanation of some of the buttons on the control unit 260. In the example in Figure 11, it is shown that operating the left button 263 or the right button 264 switches the airflow adjustment screen 510 to another first-level screen 500. It is also shown that operating the OK button 265 transitions the first-level screen 500 to a menu screen (second-level screen) for making various settings. Furthermore, it is shown that pressing and holding the power button 267 starts cleaning the electrode needles en1 and en2 by the cleaning device 291.

[0124] On the airflow adjustment screen 510, when the upper button 261 is operated, the airflow level increases by the number of times the upper button 261 is operated until the airflow level reaches "7". Conversely, when the lower button 262 is operated, the airflow level decreases by the number of times the lower button 262 is operated until the airflow level reaches "1". Figure 12 shows an example of changing the airflow setting on the airflow adjustment screen 510. As shown in the upper part of Figure 12, before the change, the airflow level is set to "6". Therefore, the number displayed in the airflow value display area 511 is "6". Also, the number of bars displayed in color in the airflow gauge display area 512 is 6.

[0125] In the state shown in the upper part of Figure 12, the upper button 261 is pressed once. In this case, the airflow level increases by one, and the airflow level setting is changed to "7". As a result, the value in the airflow value display area 511 becomes "7", as shown in the middle part of Figure 12. Also, the number of bars displayed in color in the airflow gauge display area 512 becomes seven. On the other hand, in the state shown in the upper part of Figure 12, the lower button 262 is pressed once. In this case, the airflow level decreases by one, and the airflow level setting is changed to "5". As a result, the value in the airflow value display area 511 becomes "5", as shown in the lower part of Figure 12. Also, the number of bars displayed in color in the airflow gauge display area 512 becomes five.

[0126] Figure 13 shows an example of the first monitor screen 520. As shown in Figure 13, the first monitor screen 520 displays the operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. In addition, the first monitor screen 520 displays the charge level display area 521, the input / output display area 522, the static elimination performance display area 523, and the explanation display area 524.

[0127] The string "ChargeLevel" is displayed in the charge level display area 521. The charge level of the object is also displayed in the charge level display area 521 using a gauge. Furthermore, a line indicating a threshold for the charge level is displayed in the charge level display area 521. In this example, the charge level is displayed by a bar extending vertically and moving horizontally.

[0128] Specifically, when the charge level is close to 0, the bar is in the center. When the charge level is large in the negative, the bar moves to the left. When the charge level is large in the positive, the bar moves to the right. The color of the displayed bar may differ depending on whether the charge level is within the threshold range or not. In the example in Figure 13, the charge level is within the threshold range. Therefore, the bar is displayed in green, for example. On the other hand, when the charge level is outside the threshold range, the bar is displayed in red.

[0129] The input / output display area 522 displays the usage status of the input and output terminals. In this example, the terminals that are in use among the first to third input terminals and the first to third output terminals are displayed identifiable by icons. If an input terminal is not in use, the input terminal icon is not displayed. Similarly, if an output terminal is not in use, the output terminal icon is not displayed. In the example in Figure 13, the second input terminal and the second output terminal are in use.

[0130] The static elimination performance display area 523 displays measured values ​​related to static elimination performance and predetermined text corresponding to those measured values. In this example, the static elimination performance display area 523 displays the airflow level of the fan 201 and the amount of ions generated by the positive ion generation unit 211 and the positive electrode side high-voltage circuit 212 as measured values ​​related to static elimination time. The static elimination performance display area 523 also displays the strings "FAN" and "ION". Note that static elimination time refers to the time required to neutralize the charge of a metal plate holding a charge amount specified in the standard.

[0131] In this example, the ion quantity is displayed not as an absolute value, but as a relative value compared to the amount of ions generated in the standard state of the static eliminator 200 (e.g., the factory default state). Therefore, the unit of the ion quantity is %. The user can evaluate the static elimination time based on the airflow level and ion quantity displayed in the static elimination performance display area 523. Specifically, the higher the airflow level and the higher the ion quantity, the more ions can be supplied, resulting in a shorter static elimination time.

[0132] The explanation display area 524 displays a brief explanation of some of the buttons on the control unit 260, similar to the explanation display area 513 of the airflow adjustment screen 510. In the example shown in Figure 13, the explanation of pressing and holding the power button 267 is not displayed in the explanation display area 524, but the embodiment is not limited to this. If the explanation display area 524 has a sufficiently large display space, the explanation of pressing and holding the power button 267 may be displayed in the explanation display area 524, similar to the explanation display area 513.

[0133] As described above, when an event belonging to an error event, alarm event, or notification event is detected in the event display area 502, an icon and text indicating the type of event are displayed. Figure 14 is a diagram illustrating the details of the event display area 502. In the upper example of Figure 14, the charge level has fallen below the threshold. Therefore, the bar indicating the charge level in the charge level display area 521 is displayed in red, for example.

[0134] Furthermore, a notification event (a charge level notification event in this example) is detected when the charge level falls below a threshold. In this case, a diamond-shaped icon indicating the notification event and the string "NOTICE" are displayed in the event display area 502, decorated with a predetermined color (for example, orange).

[0135] Here, among the strings displayed in other display areas, strings related to the detected event may be displayed with the same color as the decorative color of the event display area 502. In the upper example of Figure 14, the string "Charge Level" in the charge level display area 521 and the string "ION" in the static elimination performance display area 523 are displayed with the same orange color as the decorative color of the event display area 502.

[0136] Similarly, if an error event indicating abnormal rotation of fan 201 or a fan rotation speed alarm event is detected, the text "Air Vol. Level" in the airflow value display area 511 in Figure 11 will be displayed in a predetermined color. This allows the user to easily recognize the measured value related to the detected event.

[0137] The middle section of Figure 14 shows an example of how the event display area 502 is displayed when an alarm event is detected. In the example in the middle section of Figure 14, when an alarm event is detected, a triangular icon indicating the alarm event and the string "ALARM" are displayed in the event display area 502, decorated with another color (for example, yellow).

[0138] The lower part of Figure 14 shows an example of how the event display area 502 is displayed when an error event is detected. In the example in the lower part of Figure 14, when an error event is detected, a circular icon indicating the error event and the string "ERROR" are displayed in the event display area 502, further decorated with another color (for example, red).

[0139] Figure 15 shows an example of the second monitor screen 530. As shown in Figure 15, the second monitor screen 530 displays the operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. In addition, the second monitor screen 530 displays the ion balance display area 531, the input / output display area 532, the temperature and humidity display area 533, and the explanation display area 534.

[0140] The ion balance display area 531 displays the string "Ion Balance". The ion balance display area 531 also displays the ion balance value measured by the ion balance sensor 100. The unit of ion balance is V (volts). Furthermore, the upper and lower limits of the ion balance threshold are displayed in the ion balance display area 531. The input / output display area 532 displays the usage status of the input and output terminals, similar to the input / output display area 522 on the first monitor screen 520.

[0141] The temperature and humidity display area 533 displays the temperature measured by the ion balance sensor 100 and the string "TMP". The temperature and humidity display area 533 also displays the humidity measured by the ion balance sensor 100 and the string "HUM". The explanation display area 534 displays a brief explanation of some of the buttons on the operation unit 260, similar to the explanation display area 524 on the first monitor screen 520.

[0142] On the second monitor screen 530, if an event related to ion balance, temperature, or humidity is detected, an icon and text indicating the type of event will be displayed in the event display area 502. In addition, text such as "Ion Balance," "TMP," or "HUM" will be displayed in a color similar to the decorative color of the event display area 502.

[0143] Figure 16 shows an example of the first event history screen 540. As shown in Figure 16, the first event history screen 540 displays the operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. In addition, the first event history screen 540 displays the total event display area 541 and the explanation display area 542.

[0144] The "All Events" text is displayed in the All Events display area 541. Additionally, the occurrence dates and times of all detected events are displayed vertically within the All Events display area 541. If a detected event is an error event, alarm event, or notification event, an icon indicating the event type is displayed next to the occurrence date and time. This icon is the same as the icon displayed in the Events display area 502 when an event is detected.

[0145] In this example, no icon is displayed next to the date and time of a specific event, but a unique icon indicating the specific event may be displayed next to the date and time of the specific event. Users can easily recognize the type of each event that has occurred by visually checking the presence or absence and type of icon in the all-event display area 541. In the example in Figure 16, the date and time of four events are displayed in the all-event display area 541. The types of these four events, from top to bottom, are an error event, an alarm event, another error event, and a specific event.

[0146] The explanation display area 542 displays a brief explanation of some of the buttons on the control unit 260. In the example in Figure 16, it is shown that operating the left button 263 or the right button 264 switches the airflow adjustment screen 510 to another first-level screen 500. It is also shown that operating the select button 265 transitions to the event details screen, which displays details of each event.

[0147] Figure 17 shows an example of the second event history screen 550. As shown in Figure 17, the second event history screen 550 displays the operating status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. The second event history screen 550 also displays the error / alarm event display area 551 and the explanation display area 552. The explanation display area 552 is the same as the explanation display area 542 of the first event history screen 540.

[0148] The error / alarm event display area 551 displays the string "Error / Alarm". The error / alarm event display area 551 also displays the occurrence dates and times of all detected error and alarm events, arranged vertically. Next to the event occurrence date and time, a circular or triangular icon indicating the event type is displayed. In the example in Figure 17, the occurrence dates and times of four events are displayed in the error / alarm event display area 551. From top to bottom, these four event types are, from highest to lowest, an error event, an alarm event, another error event, and an alarm event.

[0149] Figure 18 shows an example of the third event history screen 560. As shown in Figure 18, the third event history screen 560 displays the driving status display area 501, the event display area 502, the eco mode display area 503, and the lock mode display area 504. The third event history screen 560 also displays the notification event display area 561 and the explanation display area 562. The explanation display area 562 is the same as the explanation display area 542 of the first event history screen 540.

[0150] The notification event display area 561 displays the string "Notice". The notification event display area 561 also displays the occurrence dates and times of all detected notification events, arranged vertically. Next to the event occurrence date and time, a diamond-shaped icon indicating the type of notification event is displayed. In the example in Figure 18, the occurrence dates and times of four notification events are displayed in the notification event display area 561.

[0151] In this example, the first event history screen 540, the second event history screen 550, and the third event history screen 560 are displayed as the first-level screen 500, and they can be switched between. However, the embodiment is not limited to this. Of the first event history screen 540, the second event history screen 550, and the third event history screen 560, only the event history screen selected by the settings may be displayed as the first-level screen 500.

[0152] When an event is selected on the first event history screen 540, the second event history screen 550, or the third event history screen 560, an event details screen showing the details of that event is displayed on the display unit 250. Figure 19 is a diagram illustrating the procedure for displaying the event details screen. Figure 19 shows the procedure using the second event history screen 550, but the procedure using the first event history screen 540 or the third event history screen 560 is the same as the procedure using the second event history screen 550.

[0153] As shown in the upper and middle sections of Figure 19, with the second event history screen 550 displayed on the display unit 250, either event can be selected by operating the upper button 261 or the lower button 262 on the operation unit 260. In the error / alarm event display area 551, the date and time of occurrence of the selected event are clearly displayed.

[0154] As shown in the middle and lower sections of Figure 19, when either event is selected, the OK button 265 on the operation unit 260 is operated, and the display on the display unit 250 switches from the second event history screen 550 to the event details screen 570. On the other hand, when the OK button 265 is operated again, the display on the display unit 250 returns from the event details screen 570 to the second event history screen 550.

[0155] In the event details screen 570 of Figure 19, it is indicated that the selected event is an alarm event. It is also indicated that the selected event occurred on May 12, 2022 at 9:09:10. Furthermore, it is indicated that the selected event is an event related to the ion current value (ion level alarm event).

[0156] When the airflow adjustment screen 510, the first monitor screen 520, or the second monitor screen 530 is displayed on the display unit 250, the OK button 265 on the operation unit 260 is operated, and the second-level screen is displayed on the display unit 250. Figure 20 shows an example of the second-level screen. The second-level screen 600 in Figure 20 is a menu screen for making various settings. When the second-level screen 600 is displayed on the display unit 250, the cancel button 266 on the operation unit 260 is operated, and the display on the display unit 250 returns to the previous first-level screen 500.

[0157] As shown in Figure 20, the second-level screen 600 displays multiple configurable items arranged vertically. These configurable items include basic settings for the static eliminator 200, advanced settings for the static eliminator 200, and settings for the ion balance sensor 100. By operating the up button 261 or down button 262 on the operation unit 260, one of the configurable items can be selected. Furthermore, by operating the OK button 265, the display unit 250 displays the third-level and subsequent setting screens for configuring the details of the selected configurable item.

[0158] The settings screen primarily includes a list selection type settings screen and a numerical selection type settings screen. Figure 21 shows a first example of the settings screen. As shown in Figure 21, the settings screen 610 is a list selection type settings screen for selecting whether to turn eco mode on or off. On the settings screen 610, the on or off of eco mode is selected by operating the up button 261 or down button 262 of the operation unit 260. The selected on or off setting is then confirmed by operating the OK button 265.

[0159] Figure 22 shows a second example of the settings screen. As shown in Figure 22, the settings screen 620 is a list-selection type settings screen for selecting the airflow level of the fan 201. The airflow level of the fan 201 is selected by operating the upper button 261 or the lower button 262 of the control unit 260. The selected airflow level is set by operating the confirm button 265.

[0160] Figure 23 shows a third example of the settings screen. As shown in Figure 23, the settings screen 630 is a numerical selection screen for selecting the date and time. By operating the left button 263 or right button 264 of the operation unit 260, the fields corresponding to the year, month, day, hour, or minute are selected. Furthermore, by operating the up button 261 or down button 262, the numerical value in the selected field is increased or decreased. Finally, by operating the confirm button 265, the numerical value indicating the selected date and time is set.

[0161] Figure 24 shows a fourth example of the settings screen. As shown in Figure 24, the settings screen 640 is a numerical selection screen for selecting a temperature threshold. By operating the left button 263 or right button 264 of the operation unit 260, the fields corresponding to the upper and lower limits of the threshold are selected. Furthermore, by operating the up button 261 or down button 262, the numerical value in the selected field is increased or decreased. In addition, by operating the confirm button 265, the numerical values ​​indicating the upper and lower limits of the selected threshold are set.

[0162] Figure 25 shows a fifth example of the settings screen. As shown in Figure 25, the settings screen 650 is a numerical selection screen for selecting the IP address of the static eliminator 200. By operating the left button 263 or right button 264 of the operation unit 260, the field corresponding to the digit of the IP address is selected. Furthermore, by operating the up button 261 or down button 262, the numerical value of the selected digit is increased or decreased. Finally, by operating the OK button 265, the numerical value representing the selected IP address is set.

[0163] 7. Basic configuration of the control device Figure 26 is a block diagram illustrating the configuration of the control device 300 shown in Figure 1. As shown in Figure 26, the control device 300 includes a main control unit 310, a main memory unit 320, a main communication unit 380, and a main power supply unit 390. The control device 300 is set to a time supplied, for example, by a time server.

[0164] The main communication unit 380 is connected to the network 309 shown in Figure 1. The main communication unit 380 receives signals of various information transmitted from the static eliminator communication units 280 (Figure 8) of the multiple static eliminators 200 via the network 309 and provides them to the main control unit 310. The main communication unit 380 also transmits signals of various information output from the main control unit 310 to the multiple static eliminators 200. The main power supply unit 390 receives power supplied from the commercial power supply through a power cable (not shown) and supplies the received power to other components provided in the control device 300.

[0165] The main control unit 310 includes, for example, a CPU. The main memory unit 320 includes, for example, a hard disk, ROM, and RAM. The main control unit 310 and the main memory unit 320 may be implemented by a microcomputer. The main memory unit 320 stores a control device management program for multiple static eliminators 200 and history data.

[0166] The main control unit 310 includes, as functional units, a time information transmission unit 311, a data acquisition unit 312, a main memory control unit 313, a notification unit 314, and an image generation unit 315. The main control unit 310's functional units are realized when the main control unit 310 executes a control device management program.

[0167] The control device management program may be stored on a computer-readable storage medium such as a CD-ROM 321 instead of the main memory unit 320. Alternatively, the control device management program may be provided in a form stored on the storage medium 321 and installed in the main memory unit 320. Furthermore, some or all of the functional parts of the main control unit 310 may be implemented by hardware such as electronic circuits.

[0168] The time information transmission unit 311 receives a request to transmit time information from the time setting unit 231 (Figure 8) of the static eliminator control unit 230 via the network 309. When the time information transmission unit 311 receives a request to transmit time information, it transmits time information indicating the time set in the control device 300 to the time setting unit 231 via the network 309.

[0169] The data acquisition unit 312 acquires the history data stored in the static eliminator memory unit 270 (Figure 8) of the static eliminator 200 via the network 309. Here, the user can set the period for acquiring history data when communication is established between the static eliminator 200 and the control device 300 by operating the main unit operation unit 340. The history data stored in the static eliminator memory unit 270 is acquired at the set period. The user can also specify the timing for acquiring history data by operating the main unit operation unit 340. In this case, the history data stored in the static eliminator memory unit 270 is acquired at the timing specified by the user.

[0170] In this example, all history data stored in the static eliminator storage unit 270 is acquired, but the embodiment is not limited to this. The user can select the measurement values ​​(items) included in the history data to be acquired by operating the main unit operation unit 340. In this case, only the history data containing the selected items is acquired from the static eliminator storage unit 270.

[0171] The main memory control unit 313 stores the history data acquired by the data acquisition unit 312 in the main memory unit 320. In this case, there is no need to keep the history data in the static eliminator storage unit 270. Therefore, the notification unit 314 notifies the static eliminator 200 when history data is acquired by the data acquisition unit 312. This makes it possible to delete the history data stored in the static eliminator storage unit 270 even if the amount of history data stored in the static eliminator storage unit 270 has not reached its upper limit.

[0172] The image generation unit 315 generates history image data that shows a history image related to the history data. The generated history image data may be stored in the main memory unit 320 by the main memory control unit 313. Alternatively, the history image may be displayed on the main display unit 330 based on the generated history image data.

[0173] Figure 27 shows an example of a history image. The history image data shown in Figure 27 is mainly generated based on the second and third data in the history data. As shown in Figure 27, the history image displays the event date and time, the event name, and the measured values ​​and thresholds at the time of the event in a corresponding manner. By viewing the history image, users can easily confirm the detailed circumstances at the time of the event.

[0174] 8. Static eliminator management process In the static eliminator 200, static eliminator management processing is performed by the static eliminator control unit 230 executing a static eliminator management program. The static eliminator management processing includes time setting processing, temporary storage unit control processing, and static eliminator storage unit control processing. The static eliminator management processing is started in response to the static eliminator 200 starting to operate. When the static eliminator 200 starts to operate, the operation of the fan drive unit 202, positive electrode side high voltage circuit 212, negative electrode side high voltage circuit 222, display unit 250, cleaning device 291, indicator light 292, and alarm device 293 is appropriately controlled by the device control unit 232.

[0175] Figure 28 is a flowchart showing an example of the time setting process performed in the static eliminator 200. The time setting process is performed by the static eliminator control unit 230 executing the time setting program of the static eliminator management program. The time setting process will be explained below using the static eliminator control unit 230 in Figure 8 and the flowchart in Figure 28.

[0176] First, the time setting unit 231 determines whether or not communication has been established with the control device 300 (step S1). If the static eliminator communication unit 280 of the static eliminator 200 is connected to the network 309 in Figure 1, the time setting unit 231 determines that communication has been established with the control device 300. If communication has not been established with the control device 300, the time setting unit 231 waits until communication is established with the control device 300.

[0177] If communication with the control device 300 is established, the time setting unit 231 requests the control device 300 to transmit time information (step S2). Next, the time setting unit 231 receives the time information transmitted by the control device 300 (step S3). Step S3 is performed in response to step S32 in Figure 31, which will be described later. Subsequently, the time setting unit 231 updates the set time to the time indicated by the time information received in step S3 (step S4).

[0178] Subsequently, the time setting unit 231 determines whether a certain amount of time has elapsed (step S5). The certain amount of time in step S5 may be 12 hours, 24 hours, 48 ​​hours, etc. If the certain amount of time has not elapsed, the time setting unit 231 waits until the certain amount of time has elapsed. Once the certain amount of time has elapsed, the time setting unit 231 returns to step S1. This repeats the process from step S1 onward.

[0179] Figure 29 is a flowchart showing an example of the temporary storage control process performed in the static eliminator 200. The temporary storage control process is performed by the static eliminator control unit 230 executing the temporary storage control program of the static eliminator management program. The temporary storage control process will be explained below using the static eliminator control unit 230 in Figure 8 and the flowchart in Figure 29.

[0180] First, the measurement value acquisition unit 233 acquires measurement values ​​related to the control by the device control unit 232 (step S11). The measurement value acquisition unit 233 also acquires the measurement time of the measurement value acquired in step S11 based on the time set by the time setting unit 231 (step S12). The data generation unit 234 generates historical data based on the measurement value acquired in step S11 and the measurement time acquired in step S12 (step S13).

[0181] The memory control unit 235 stores the history data generated in step S13 in the temporary storage unit 271 (step S14). Here, the determination unit 236 determines whether or not an event has occurred with respect to the measured value of the history data stored in the temporary storage unit 271 in step S14 (step S15). Whether or not an event has occurred is determined based on the measured value and the threshold value related to that measured value. If an event has occurred, the determination unit 236 assigns a flag to the history data stored in the temporary storage unit 271 in step S14 (step S16).

[0182] If no event occurs in step S15, or if step S16 is executed, the process returns to step S11. This causes the process from step S11 onward to be repeated. The time interval between repetitions of step S11 is the second time interval (0.1 seconds in this example), as described above.

[0183] Figure 30 is a flowchart showing an example of the static eliminator memory control process performed in the static eliminator 200. The static eliminator memory control process is performed by the static eliminator control unit 230 executing the static eliminator memory control program of the static eliminator management program. The static eliminator memory control process will be explained below using the static eliminator control unit 230 in Figure 8 and the flowchart in Figure 30.

[0184] First, the memory control unit 235 determines whether or not a first time (1 hour in this example) has elapsed (step S21). If the first time has not elapsed, the process proceeds to step S24. If the first time has elapsed, the memory control unit 235 causes the static eliminator memory unit 270 to store the history data stored in the temporary memory unit 271 as the first data at the time the first time has elapsed (step S22).

[0185] Furthermore, the memory control unit 235 causes the static eliminator memory unit 270 to store characteristic values ​​of the measured values ​​in the history data stored in the temporary memory unit 271 within the first time period (step S23). In this example, in step S23, the maximum and minimum values ​​of temperature and humidity within the first time period are stored in the static eliminator memory unit 270 as characteristic values ​​of the measured values. Also in step S23, the maximum and minimum values ​​of the ion balance between the time point in the first time period and the time point one minute prior to that point are stored in the static eliminator memory unit 270 as characteristic values ​​of the measured values.

[0186] Subsequently, in step S16 of Figure 29, the memory control unit 235 determines whether or not a flag has been assigned to the history data stored in the temporary storage unit 271 (step S24). If the history data is not flagged, the process returns to step S21. If the history data is flagged, the memory control unit 235 identifies the date and time when the data was acquired, i.e., the date and time when the event occurred (step S25). The memory control unit 235 also stores the data indicating the date and time identified in step S25 as third data in the static eliminator storage unit 270 (step S26).

[0187] Furthermore, the memory control unit 235 causes the static eliminator memory unit 270 to store the history data stored in the temporary memory unit 271 during a certain period including the time of occurrence of the event identified in step S25 as second data (step S27). In this example, in step S27, the history data stored in the temporary memory unit 271 during the period from 30 seconds before the time of occurrence of the event to 30 seconds after the time of occurrence of the event is stored as second data.

[0188] Next, the notification acquisition unit 237 determines whether or not a notification has been received indicating that the control device 300 has acquired the history data stored in the static eliminator storage unit 270 (step S28). If step S36 in Figure 31, which will be described later, is executed, it is determined that a notification has been acquired. If a notification has been acquired, the storage control unit 235 deletes the history data stored in the static eliminator storage unit 270 (step S29). If no notification is acquired in step S28, or if step S29 is executed, the process returns to step S21. As a result, the process from step S21 onward is repeated.

[0189] 9. Control device management process In the control device 300, the main control unit 310 executes a control device management program to perform control device management processing. Figure 31 is a flowchart showing an example of the control device management processing performed in the control device 300. The control device management processing will be explained below using the main control unit 310 in Figure 26 and the flowchart in Figure 31.

[0190] First, the time information transmission unit 311 determines whether or not the static eliminator 200 has requested the transmission of time information (step S31). If step S2 in Figure 28 is executed, it is determined that the transmission of time information has been requested. If the transmission of time information is not requested, the process proceeds to step S3. If the transmission of time information is requested, the time information transmission unit 311 transmits the time information to the static eliminator 200 (step S32).

[0191] Next, the data acquisition unit 312 determines whether or not history data is stored in the static eliminator storage unit 270 of the static eliminator 200 (step S33). If step S22 or steps S26, S27 in Figure 30 are executed, the history data is stored in the static eliminator storage unit 270 until step S29 is executed.

[0192] If no history data is stored in the static eliminator storage unit 270, the process returns to step S31. If history data is stored in the static eliminator storage unit 270, the data acquisition unit 312 acquires the history data from the static eliminator storage unit 270 (step S34). The main memory control unit 313 also stores the history data acquired in step S34 in the main memory unit 320 (step S35). The notification unit 314 notifies the static eliminator 200 that the history data has been acquired (step S36).

[0193] Subsequently, in step S35, the image generation unit 315 determines whether the second data and the third data have been stored in the main memory unit 320 as history data (step S37). If the second data and the third data have been stored in the main memory unit 320, the image generation unit 315 generates history image data showing the history image in Figure 27 based on the second data and the third data (step S38). If the second data and the third data have not been stored in the main memory unit 320 in step S37, or if step S38 has been executed, the process returns to step S31. As a result, the process from step S31 onward is repeated.

[0194] The history image data generated in step S38 may be stored in the main memory unit 320. If previously generated history image data is stored in the main memory unit 320, that history image data may be updated with the newly generated history image data. In addition, a history image based on the history image data generated in step S38 may be displayed on the main display unit 330.

[0195] 10. Effects The static elimination system 1 according to this embodiment includes a static eliminator 200 and a control device 300. The static eliminator 200 and the control device 300 can be connected by connecting the static eliminator communication unit 280 of the static eliminator 200 and the main communication unit 380 of the control device 300 to a network 309.

[0196] In this static eliminator 200, ions are generated by the positive ion generation unit 211 and the negative ion generation unit 221 based on control by the device control unit 232. In addition, the measurement value related to the control by the device control unit 232 and the measurement time when the measurement value was acquired are acquired by the measurement value acquisition unit 233. Based on the measurement value and measurement time, historical data is generated by the data generation unit 234, and the generated historical data is stored in the static eliminator storage unit 270.

[0197] With this configuration, even if the control device 300 is not connected to the static eliminator 200, the history data is stored in the static eliminator storage unit 270 provided in the static eliminator 200. Therefore, it becomes easy to save the history data without loss. Consequently, the user does not need to frequently connect the control device 300 to the static eliminator 200 to manage the history data. This allows for strict control of the product's manufacturing status without increasing the burden of management.

[0198] Furthermore, when the static eliminator 200 and the control device 300 are connected, the history data stored in the static eliminator memory unit 270 of the static eliminator 200 is acquired by the data acquisition unit 312 of the control device 300 via the network 309. This allows the control device 300 to manage the history data without any loss of history data, even when the static eliminator 200 and the control device 300 are not constantly connected.

[0199] The historical data includes first data, second data, and third data. First data is data that associates measured values ​​acquired at a first time interval with the measurement time. First data allows for the management of the normal behavior of the static eliminator 200. Second data is data that associates measured values ​​acquired when various events occur with the measurement time. Second data allows for the management of the behavior of the static eliminator 200 when events occur. Third data is data indicating the date and time when various events occurred. Third data allows for the management of the date and time when events occurred.

[0200] The temporary storage unit 271 of the static eliminator 200 stores historical data at a second time interval shorter than the first time interval. Each time the first time interval elapses, the historical data stored in the temporary storage unit 271 at that point in time is stored as the first data. In this case, the first data can be easily stored in the static eliminator storage unit 270. Furthermore, historical data stored in the temporary storage unit 271 during a certain period including the time of event occurrence is stored in the static eliminator storage unit 270 as the second data. In this case, the second data can be easily stored in the static eliminator storage unit 270.

[0201] Furthermore, each time the first period of time elapses, characteristic values ​​of the measured values ​​in the historical data stored in the temporary storage unit 271 during that first period of time are stored in the static eliminator storage unit 270. In this case, the normal behavior of the static eliminator 200 can be managed in more detail. In particular, the characteristic values ​​include at least one of the maximum and minimum values. In this case, the user can intuitively grasp the normal behavior of the static eliminator 200.

[0202] In the temporary storage unit 271, when all of the allocated predetermined storage area is filled with history data, the previously stored history data is overwritten, and the latest history data is stored. With this configuration, even if the capacity of the temporary storage unit 271 is relatively small, history data for a sufficiently long period can be stored at sufficiently short time intervals.

[0203] In the control device 300, in response to a request from the static eliminator 200, time information indicating the time set in the control device 300 is transmitted by the time information transmission unit 311. In the static eliminator 200, the time information is received by the time setting unit 231, and the time indicated by the received time information is set in the static eliminator 200. In this case, the time of the control device 300 and the static eliminator 200 can be easily synchronized. Furthermore, even if multiple static eliminators 200 are connected to the control device 300, the time of the multiple static eliminators 200 can be easily synchronized.

[0204] 11. Other Embodiments (1) In the above embodiment, the static elimination system 1 includes a plurality of static eliminators 200, but the embodiment is not limited thereto. The static elimination system 1 may include only one static eliminator 200.

[0205] (2) In the above embodiment, the control device 300 and the static eliminator 200 are connected via a network 309, but the embodiment is not limited thereto. The control device 300 and the static eliminator 200 may be connected by a crossover cable or the like without going through the network 309. Alternatively, history data may be transferred from the static eliminator storage unit 270 of the static eliminator 200 to the main storage unit 320 of the control device 300 via an external storage medium such as a USB (Universal Serial Bus) memory or an SD card. In other words, the static eliminator 200 and the control device 300 may be connected via an external storage medium.

[0206] (3) In the above embodiment, each time the first period of time elapses, the history data stored in the temporary storage unit 271 at the time the first period of time has elapsed is stored in the static eliminator storage unit 270 as the first data, but the embodiment is not limited thereto. Each time the first period of time elapses, the history data stored in the temporary storage unit 271 at a predetermined time within the first period of time may be stored in the static eliminator storage unit 270 as the first data.

[0207] (4) In the above embodiment, the historical data includes the first data, the second data, and the third data, but the embodiment is not limited thereto. The historical data may include one or two of the first data, the second data, and the third data.

[0208] (5) In the above embodiment, the static eliminator 200 includes a temporary storage unit 271, but the embodiment is not limited thereto. The static eliminator 200 does not need to include a temporary storage unit 271 as long as the history data can be stored in the static eliminator storage unit 270.

[0209] (6) In the above embodiment, the characteristic value of the measured value is at least one of the maximum value and the minimum value, but the embodiment is not limited thereto. The characteristic value of the measured value may be other characteristic values ​​such as the average value. Also, in the above embodiment, the characteristic value of the measured value is stored in the static eliminator storage unit 270, but the characteristic value of the measured value is not required to be stored in the static eliminator storage unit 270.

[0210] 12. Correspondence between each component of the claim and each part of the embodiment The following describes examples of the correspondence between each component of the claims and each part of the embodiments, but the present invention is not limited to the following examples. Various other elements having the configuration or function described in the claims can be used as each component of the claims.

[0211] In the above embodiment, the positive ion generating unit 211 and the negative ion generating unit 221 are examples of ion generating units, the device control unit 232 is an example of an ion control unit, and the measurement value acquisition unit 233 is an example of a measurement value acquisition unit. The data generation unit 234 is an example of a data generation unit, the static eliminator storage unit 270 is an example of a non-volatile storage unit, the static eliminator 200 is an example of a static eliminator, and the temporary storage unit 271 is an example of a volatile storage unit.

[0212] The control device 300 is an example of a control device, the network 309 is an example of a network, the static eliminator communication unit 280 is an example of a first communication unit, and the main communication unit 380 is an example of a second communication unit. The data acquisition unit 312 is an example of a data acquisition unit, the static elimination system 1 is an example of a static elimination system, the time setting unit 231 is an example of a time setting unit, and the time information transmission unit 311 is an example of a time information transmission unit.

[0213] It should be noted that the present invention is not limited to the embodiments described above, and can be implemented in various forms without departing from its essence, and can also be implemented by combining some of the configurations of the embodiments described above. [Explanation of symbols]

[0214] 1…Static elimination system, 11…Static eliminator housing, 12…Air outlet, 13…Cover, 100…Ion balance sensor, 110A…Detection plate, 110B…Ion detection circuit, 111…Operational amplifier, 112…Fixed resistor, 113…Modulation voltage source, 120…Temperature detection element, 130…Humidity detection element, 140…Sensor indicator light, 150…Sensor communication unit, 160…Sensor power supply unit, 190…Sensor control unit, 200…Static eliminator, 201…Fan, 201a…Rotating shaft, 202…Fan drive unit, 203…Detection electrode, 211…Positive ion generation unit, 211a, 221a…Annular member, 212…Positive electrode side high voltage Circuit, 221…Negative ion generation unit, 222…Negative electrode side high voltage circuit, 230…Static eliminator control unit, 231…Time setting unit, 232…Device control unit, 233…Measurement value acquisition unit, 234…Data generation unit, 235…Memory control unit, 236…Determination unit, 237…Notification acquisition unit, 240…Ion information generation unit, 241…Internal ion current detection circuit, 242…External ion current detection circuit, 250…Display unit, 260…Operation unit, 261…Up button, 262…Down button, 263…Left button, 264…Right button, 265…Select button, 266…Cancel button, 267…Power button, 270…Static eliminator memory unit, 27 1...Temporary storage unit, 272, 321...Storage medium, 280...Static eliminator communication unit, 290...Static eliminator power supply unit, 291...Cleaning device, 292...Indicator light, 293...Alarm device, 300...Control device, 309...Network, 310...Main control unit, 311...Time information transmission unit, 312...Data acquisition unit, 313...Main memory control unit, 314...Notification unit, 315...Image generation unit, 320...Main memory unit, 330...Main unit display unit, 340...Main unit operation unit, 380...Main communication unit, 390...Main power supply unit, 400...Charge detection system, 410, 420...Charge detection device, 411, 421...Detection head, 430...Communication device ,500…First level screen,501…Operating status display area,502…Event display area,503…Eco mode display area,504…Lock mode display area,510…Air volume adjustment screen,511…Air volume value display area,512…Air volume gauge display area,513,524,542,552,562…Explanation display area,520…First monitor screen,521…Charge level display area,522…Input / output display area,523…Static elimination performance display area,530…Second monitor screen,531…Ion balance display area,532…Input / output display area,533…Temperature and humidity display area,540…First event history screen,541...All Events Display Area, 550...Second Event History Screen, 551...Error / Alarm Events Display Area, 560...Third Event History Screen, 561...Notification Events Display Area, 570...Event Details Screen, 600...Second Tier Screen, 610, 620, 630, 640, 650...Settings Screen, en1, en2...Electrode Needle, N...Node,

Claims

1. A static eliminator that discharges ions onto an object to remove static electricity from that object, An ion generating unit that generates ions, An ion control unit that controls the ion generating unit, A measurement value acquisition unit acquires measurement values ​​related to the control by the ion control unit and acquires the measurement time when the measurement values ​​were acquired. A data generation unit that generates historical data based on the measured value and the measurement time, A static eliminator comprising a non-volatile memory unit for storing the aforementioned historical data.

2. The static eliminator according to claim 1, wherein the historical data includes first data in which the measured values ​​and the measurement times acquired at a first time interval are associated.

3. The system further includes a volatile storage unit that stores the historical data at a second time interval shorter than the first time, The static eliminator according to claim 2, wherein the non-volatile memory unit stores the history data stored in the volatile memory unit at a predetermined time within the first time period as the first data each time the first time period elapses.

4. The static eliminator according to claim 3, wherein the non-volatile memory unit further stores characteristic values ​​of the measured values ​​in the historical data stored in the volatile memory unit during the first time period, each time the first time period has elapsed.

5. The static eliminator according to claim 4, wherein the aforementioned characteristic value includes at least one of the maximum value and the minimum value.

6. The static eliminator according to claim 1, wherein the historical data includes a second data set which associates the measured value and the measurement time obtained when a predetermined event occurs.

7. The system further includes a volatile storage unit that stores the historical data at predetermined time intervals, The non-volatile memory unit records the time of the event in the volatile memory unit for a certain period of time including the time of the event. The static eliminator according to claim 6, wherein the stored historical data is stored as the second data.

8. The static eliminator according to any one of claims 3 to 5 and 7, wherein when the history data is stored in the entire predetermined storage area allocated to the volatile storage unit, the volatile storage unit overwrites the previously stored history data to store the latest history data.

9. The static eliminator according to any one of claims 1 to 7, wherein the historical data includes a third data indicating the date and time when a predetermined event related to the measured value occurred.

10. The system further includes a fan that sends ions generated by the ion generating unit in a predetermined direction. The static eliminator according to any one of claims 1 to 7, wherein the measured value includes the amount of ions and the rotation speed of the fan.

11. The static eliminator according to claim 10, further comprising the ion balance measured by the aforementioned measurement.

12. The static eliminator according to claim 11, wherein the measured value further includes an ion current.

13. A static eliminator according to any one of claims 1 to 7, The device comprises a control device that can be connected to the static eliminator, The static eliminator further comprises a first communication unit connected to a network, The control device is A second communication unit connected to the aforementioned network, A static elimination system comprising: a data acquisition unit that acquires the history data stored in the non-volatile memory unit via the network.

14. The aforementioned static eliminator is The system further includes a time setting unit that receives time information indicating the time set in the control device from the control device and sets the time indicated by the received time information to the static eliminator. The measurement value acquisition unit identifies the measurement time at which the measurement value was acquired, based on the time set by the time setting unit. The static elimination system according to claim 13, wherein the control device further comprises a time information transmission unit that transmits the time information to the static eliminator.