Copying device

Abstract

To provide a copying apparatus capable of reducing particles generated during operation.SOLUTION: A copying apparatus 100 comprises: a crimping tool 10; a swing body 20 to which the crimping tool 10 is attached; a device base board 30; and a rotational stopping mechanism. The rotational stopping mechanism comprises: a rotational stopping member 51; a groove definition part 54; a communication path; and an absorption port. The groove definition part 54 comprises a seal surface that defines a groove part 54a that is opened toward a base end surface 30a as well as being provided to the rotational stopping member 51, and is contacted and separated to / from the base end surface 30a on the open side of the groove part 54a. The communication path can be communicated with the groove part 54a as well as being formed into an internal part of the device base board 30. The adsorption port is communicated with the communication path.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a mimicking device.

Background Art

[0002] Conventionally, a mimicking device is used in a chip mounter or the like that conveys a semiconductor chip onto a lead frame of a die bonding device. The mimicking device includes a base having a concave hemispherical surface and a movable member as a rocking body having a convex hemispherical surface. The mimicking device makes the surface of the movable member contact a reference surface of an object that the rocking body mimics. The mimicking device rotates the movable member along the object and makes the movable member and the object parallel by the contact of the surface of the movable member with respect to the reference surface. That is, the mimicking device performs an operation of mimicking the surface of the movable member and the object. In this operation, the movable member rotates around X-axis and Y-axis that are orthogonal to each other in the same plane.

[0003] Further, the mimicking device restricts the rotation of the movable member around the Z-axis orthogonal to the plane including the X-axis and the Y-axis by a rotation restricting device (see, for example, Patent Document 1). The rotation restricting device disclosed in Patent Document 1 includes a rotation restricting pin provided on the movable member and a side plate, and a pin insertion groove provided on a rotation restricting ring. The rotation restricting pin is engaged with the pin insertion groove. Further, in the rotation restricting device disclosed in Patent Document 1, the rotation restricting ring is supported by a pressing member and is interposed between the movable member mounted on the base and the pressing member.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When transporting an object, the tracking device may generate particles due to the movement of the anti-rotation ring between the movable member and the holding member, causing the base and the anti-rotation ring to slide against each other. [Means for solving the problem]

[0006] A tracing device for solving the above problems comprises: a device base having a base end face including a base engagement surface which is either a concave spherical surface or a convex spherical surface; an oscillating body pivotably mounted to the device base and having an oscillating body engagement surface that engages with the base engagement surface, and an oscillating body crimping surface which is a different surface from the oscillating body engagement surface as its end face; a crimping tool having a crimping tool oscillating surface attached to the oscillating body crimping surface, and having an end face which is a different surface from the crimping tool oscillating surface as a crimping tool contact surface; and a rotation-preventing mechanism that restricts the rotation of the oscillating body around a first axis perpendicular to the oscillating body crimping surface, wherein the rotation-preventing mechanism surrounds the oscillating body around the first axis and is pivotably mounted to the device base so as to be reciprocable in the first axial direction from which the first axis extends. The tracing device comprises a rotation-preventing member, two protrusions provided on the outer circumferential surface of the oscillating body and arranged in the direction of the second axis to which the second axis perpendicular to the first axis extends, and two concave portions provided on the rotation-preventing member and engaging with each of the two protrusions, wherein the rotation-preventing mechanism restricts the rotation of the oscillating body while causing the oscillating body to oscillate, thereby adjusting the crimping tool contact surface to be parallel to a reference surface, wherein the rotation-preventing mechanism comprises a groove-defining portion provided on the rotation-preventing member and defining a groove that opens toward the base end face, and having a sealing surface that contacts and separates from the base end face on the opening side of the groove, a communication passage formed inside the base of the device and capable of communicating with the groove, and a suction port communicating with the communication passage.

[0007] In the above-described tracing device, the anti-rotation member has a flange portion facing the base end face and extending in a direction perpendicular to the first axis, and a plurality of mounting holes formed in the flange portion, extending in the direction of the third axis perpendicular to the first and second axes and penetrating in the direction of the first axis, and the anti-rotation member may be supported by a plurality of mounting pins inserted through each of the mounting holes and fixed to the base end face.

[0008] In the above-described tracing device, the space between the sealing surface and the base end face may be sealed by a metal-to-metal contact seal between the sealing surface and the base end face. In the above-described tracing device, the groove portion has a groove widening portion that widens in a direction perpendicular to the first axis in the portion adjacent to each of the plurality of mounting holes, and the groove widening portion may be aligned in the first axial direction with the opening formed on the base end face side of the communication passage.

[0009] In the above-described tracing device, there are two mounting holes, there are two mounting pins, the base end face is square in shape when viewed from the direction in which the first axis extends, and each of the two mounting pins may be fixed to two of the four corners of the base end face that are located diagonally opposite each other. [Effects of the Invention]

[0010] According to the present invention, the amount of particles generated during the operation of a modeling device can be reduced. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is an exploded perspective view showing a tracing device. [Figure 2] Figure 2 is a cross-sectional view showing a copying device. [Figure 3] Figure 3 is a perspective view showing the anti-rotation member. [Figure 4] Figure 4 shows the tracing device as viewed in the axial direction of the device base. [Figure 5] Figure 5 is a schematic diagram illustrating the operation of the copying device. [Figure 6] Figure 6 is a schematic diagram illustrating the operation of the copying device. [Figure 7] Figure 7 shows the tracing device as viewed in the axial direction of the device base. [Figure 8] Figure 8 shows the tracing device as viewed in the axial direction of the device base. [Modes for carrying out the invention]

[0012] Below, one embodiment of the imitation device will be described with reference to Figures 1 to 8. <Overall view of the copying device> As shown in Figures 1 and 2, the copying device 100 comprises a crimping tool 10, a oscillating body 20, a device base 30, a locking mechanism 40, and an anti-rotation mechanism 50.

[0013] <Crimping tool> As shown in Figure 2, the crimping tool 10 is columnar in shape, with the crimping tool contact surface 10a and the crimping tool oscillating surface 10b each serving as end faces. The central axis of the crimping tool 10 coincides with the first axis L1 extending in the first axis direction A1, which is the direction in which the crimping tool contact surface 10a and the crimping tool oscillating surface 10b are aligned. Therefore, the crimping tool 10 has a crimping tool oscillating surface 10b and an end face different from the crimping tool oscillating surface 10b, which serves as the crimping tool contact surface 10a.

[0014] The crimping tool 10 is attached to the oscillating body 20. The crimping tool oscillating surface 10b faces the oscillating body crimping surface 20a, which will be described later. The crimping tool contact surface 10a faces the reference surface S shown in Figure 5, which will be described later. In other words, the crimping tool 10 has a crimping tool oscillating surface 10b that is attached to the oscillating body crimping surface 20a, and also has an end face different from the crimping tool oscillating surface 10b as the crimping tool contact surface 10a.

[0015] <Oscillating body> The rocking body 20 will be described with reference to FIGS. 1 and 2. The rocking body 20 is a columnar body having a rocking body crimping surface 20a on one end surface and a rocking body engaging surface 20b that is a convex spherical surface on the other end surface. The rocking body crimping surface 20a and the rocking body engaging surface 20b are arranged side by side in the first axis direction A1. The central axis of the rocking body 20 coincides with the first axis L1. Also, the first axis L1 is orthogonal to the rocking body crimping surface 20a. A crimping tool 10 is attached to the rocking body crimping surface 20a. As will be described later, the rocking body engaging surface 20b engages with the base engaging surface 301a. That is, the rocking body 20 has a rocking body engaging surface 20b that engages with the base engaging surface 301a and a rocking body crimping surface 20a that is a surface different from the rocking body engaging surface 20b as end surfaces.

[0016] The rocking body 20 includes a rocking body inner peripheral surface 20c that defines a rocking body insertion hole 21. The rocking body insertion hole 21 opens at the rocking body crimping surface 20a and the rocking body engaging surface 20b. The rocking body inner peripheral surface 20c connects the rocking body crimping surface 20a and the rocking body engaging surface 20b. The rocking body 20 is cylindrical and extends from the rocking body crimping surface 20a to the rocking body engaging surface 20b.

[0017] The rocking body 20 has a rocking body end surface 20d for holding that is continuous with the rocking body inner peripheral surface 20c. The rocking body end surface 20d for holding is a concave spherical shape formed between the rocking body crimping surface 20a and the rocking body engaging surface 20b. The aperture diameter of the rocking body insertion hole 21 defined by the portion of the rocking body inner peripheral surface 20c on the rocking body crimping surface 20a side with respect to the rocking body end surface 20d for holding is larger than the aperture diameter of the rocking body insertion hole 21 defined by the portion of the rocking body inner peripheral surface 20c on the rocking body engaging surface 20b side with respect to the rocking body end surface 20d for holding. That is, the rocking body insertion hole 21 expands in diameter in the first axis direction A1 in the direction from the rocking body engaging surface 20b toward the rocking body crimping surface 20a.

[0018] The rocking body 20 includes a rocking body outer peripheral surface 20e. The rocking body outer peripheral surface 20e is continuous with the rocking body crimping surface 20a and the rocking body engaging surface 20b. Here, the direction in which the second axis L2, which is perpendicular to the first axis L1, extends is defined as the second axis direction A2. The oscillating body 20 is provided with a first projection 23a and a second projection 23b located on the outer circumferential surface 20e of the oscillating body and extending in the second axis direction A2. The first projection 23a and the second projection 23b are located on opposite sides of the first axis L1. In other words, the first projection 23a and the second projection 23b are provided on the outer circumferential surface 20e of the oscillating body 20 and are positioned in the second axis direction A2, to which the second axis L2, which is perpendicular to the first axis L1, extends. Therefore, the first projection 23a and the second projection 23b are two projections.

[0019] As shown in Figures 5 and 6, each of the first projection 23a and the second projection 23b has a circular cross-section when viewed in the direction in which the second axis L2 extends. <Equipment base> As shown in Figures 1 and 2, the device base 30 is rectangular prism-shaped. The direction in which the base axis LB of the device base 30 extends is defined as the axial direction of the device base 30. The device base 30 has a base end surface 30a on one end in the axial direction, which includes a base engagement surface 301a that is a concave spherical surface, and a top plate mounting surface 30b on the other end in the axial direction. The top plate mounting surface 30b is a different surface from the base end surface 30a and is on the opposite side of the base end surface 30a. Of the base end surfaces 30a, all surfaces other than the base engagement surface 301a are parallel to the top plate mounting surface 30b. In other words, the device base 30 has a base end surface 30a that includes a base engagement surface 301a that is either a convex spherical surface or a concave spherical surface.

[0020] In the axial direction of the device base 30, the oscillating body 20 is provided on the base end face 30a side, and the oscillating body engagement surface 20b and the base engagement surface 301a face each other. In other words, the crimping tool 10, the oscillating body 20, and the device base 30 are aligned in the axial direction of the device base 30. Furthermore, the radius of curvature of the base engagement surface 301a is the same as the radius of curvature of the oscillating body engagement surface 20b. That is, the oscillating body 20 is positioned on the base end face 30a side of the device base 30 so that it can swing along the base engagement surface 301a. In other words, the oscillating body 20 is pivotably mounted to the device base 30.

[0021] The device base 30 has an inner circumferential surface 30c that defines a base insertion hole 31 that opens at the base engagement surface 301a and the top plate mounting surface 30b. The base axis LB coincides with a central axis (not shown) in the base insertion hole 31. The device base 30 has an outer base surface 30e composed of four surfaces. The outer edge of the base end surface 30a and the outer edge of the top plate mounting surface 30b are connected by the outer base surface 30e. In other words, the base engagement surface 301a is located inside the base end surface 30a when viewed in the axial direction of the device base 30.

[0022] The inner surface 30c of the base is formed by a first defining surface 301c and a second defining surface 302c. The first defining surface 301c and the second defining surface 302c are continuous via a base step surface 30d. The base step surface 30d is perpendicular to the first defining surface 301c and the second defining surface 302c, and parallel to the top plate mounting surface 30b. The base step surface 30d faces the same direction as the top plate mounting surface 30b.

[0023] The first defining surface 301c is located on the base engagement surface 301a side of the base inner circumferential surface 30c and is connected to the base engagement surface 301a. The second defining surface 302c is located on the top plate mounting surface 30b side of the base inner circumferential surface 30c and is connected to the top plate mounting surface 30b. Of the diameter of the base insertion hole 31, the diameter of the part defined by the first defining surface 301c is smaller than the diameter of the part defined by the second defining surface 302c. In other words, the diameter of the base insertion hole 31 expands in the axial direction of the device base 30 from the base end surface 30a toward the top plate mounting surface 30b.

[0024] On the base end face 30a, a first base mounting hole H1 and a second base mounting hole H2 are formed at each of the four corners of the base end face 30a, in each of the opposing pairs of corners. In the device base 30, almost the entire base engagement surface 301a is formed of an annular porous material 32. Multiple holes are formed in the annular porous material 32. The device base 30 is provided with an air bearing port 33 on its outer surface 30e. An air supply and exhaust chamber 34 for the air bearing is formed inside the device base 30. The air supply and exhaust chamber 34 for the air bearing communicates with the air bearing port 33 and also communicates with the outside of the device base 30 via the annular porous material 32.

[0025] The device base 30 is provided with a locking port 35 and an adsorption port 36 on its outer surface 30e. The device base 30 also defines a communication passage 37 inside the device base 30. When the base end face 30a and the anti-rotation member 51 (described later) are in contact, the communication passage 37 connects the adsorption port 36 and the groove 54a (described later). The communication passage 37 opens at the base end face 30a and also forms an opening 38 at the base end face 30a. In other words, the tracing device 100 is provided with a communication passage 37 formed inside the device base 30 and capable of communicating with the groove 54a, and an adsorption port 36 that communicates with the communication passage 37.

[0026] The top plate mounting surface 30b has the top plate 60 attached to it. The top plate 60 is attached so as to cover the opening in the top plate mounting surface 30b made up of the base insertion hole 31. <Locking mechanism> As shown in Figures 1 and 2, the locking mechanism 40 includes a locking piston 41 and a locking shaft 42. The locking mechanism 40 also includes a magnet holding member 43, a magnet 44, a first seal 45, and a second seal 46.

[0027] The locking piston 41 has a disc-shaped piston body 411 and a male threaded portion 412 extending from the center of the piston body 411. The axial direction of the locking piston 41 coincides with the axial direction of the device base 30. The locking piston 41 is housed in the base insertion hole 31 so as to be able to reciprocate along the inner circumferential surface 30c of the base in the axial direction of the device base 30.

[0028] The outer circumferential surface 41c of the lock piston of the piston body 411 faces the second defining surface 302c. A second seal 46 is provided on the outer circumferential surface 41c of the lock piston. The second seal 46 seals the space between the second defining surface 302c and the outer circumferential surface 41c of the lock piston. The piston body 411 has a lock piston stepped surface 41d that faces the base stepped surface 30d in the axial direction of the device base 30. The lock piston stepped surface 41d faces the same direction as the base end surface 30a.

[0029] The axial direction of the lock shaft 42 coincides with the axial direction of the device base 30. The lock shaft 42 is housed in the base insertion hole 31 so as to be able to reciprocate together with the lock piston 41 in the axial direction of the device base 30.

[0030] The lock shaft 42 has a lock shaft insertion hole 42a that extends in the axial direction of the lock shaft 42. The lock shaft 42 has a female threaded portion 421 in the lock shaft insertion hole 42a. The male threaded portion 412 of the piston body 411 and the female threaded portion 421 of the lock shaft 42 are screwed together.

[0031] The lock shaft 42 has lock shaft extensions 42b at both ends in the axial direction, opposite to the end on the female thread portion 421 side. The lock shaft extensions 42b extend from the rest of the lock shaft 42 in a direction perpendicular to the base axis LB. The lock shaft 42 has a convex spherical lock shaft engagement surface 42c on the surface of the lock shaft extension 42b that is continuous with the outer circumferential surface of the lock shaft 42. The radius of curvature of the lock shaft engagement surface 42c is the same as the radius of curvature of the concave spherical end face 20d of the retaining oscillating body. In other words, the lock shaft 42 has a convex spherical lock shaft engagement surface 42c that engages with the retaining oscillating body end face 20d.

[0032] The lock shaft 42 is inserted into the oscillating body insertion hole 21 such that the outer circumferential surface of the lock shaft 42 and the inner circumferential surface 20c of the oscillating body are spaced apart. The lock shaft extension 42b is housed in the oscillating body insertion hole 21 such that the lock shaft engagement surface 42c and the retaining oscillating body end surface 20d face each other. In other words, the oscillating body 20 is positioned so that the oscillating body engagement surface 20b and the base engagement surface 301a face each other, so that it can swing relative to the lock shaft 42.

[0033] The magnet holding member 43 is fixed to the first fixing surface 301c. The axial direction of the magnet holding member 43 coincides with the axial direction of the device base 30. The magnet holding member 43 is cylindrical. In the axial direction of the device base 30, the magnet holding member 43 is located on the base end face 30a side of the piston body 411 and has a magnet holding member end face 43b that faces the lock piston step surface 41d. In addition, in the axial direction of the device base 30, the magnet holding member 43 holds the magnet 44 in a groove formed on an end face different from the magnet holding member end face 43b.

[0034] A lock shaft 42 is inserted through the magnet holding member 43. The inner circumferential surface of the magnet holding member 43 faces the outer circumferential surface of the lock shaft 42. A groove is formed on the inner circumferential surface of the magnet holding member 43, and a first seal 45 is provided in this groove. The first seal 45 seals the space between the magnet holding member 43 and the lock shaft 42.

[0035] The locking air chamber 48 is defined by the second defining surface 302c, the locking piston step surface 41d, the base step surface 30d, and the magnet holding member end surface 43b. In addition, the locking port 35 on the outer surface 30e of the base is in communication with the locking air chamber 48.

[0036] <Anti-rotation mechanism> As shown in Figure 1, the anti-rotation mechanism 50 includes an anti-rotation member 51 and a plurality of mounting pins, namely a first mounting pin P1 and a second mounting pin P2.

[0037] As shown in Figure 3, the anti-rotation member 51 has a cylindrical anti-rotation body 52 and a flange portion 53 extending from the anti-rotation body 52. ​​As shown in Figure 2, the axial direction of the anti-rotation member 51 coincides with the axial direction of the device base 30. The anti-rotation body 52 has an anti-rotation inner circumferential surface 52b that defines the anti-rotation insertion hole 52a, and an anti-rotation outer circumferential surface 52c that is the outer circumferential surface. The inner diameter of the anti-rotation body 52 is larger than the outer diameter of the oscillating body 20 at the oscillating body outer circumferential surface 20e. The oscillating body 20 is inserted through the anti-rotation insertion hole 52a so that it can oscillate along the base engagement surface 301a. In other words, the anti-rotation member 51 surrounds the oscillating body 20 around the first axis L1.

[0038] As shown in Figure 2, the first axial end of the anti-rotation member 51 faces the base end face 30a, while the second axial end does not face any other member. The inner circumferential surface 52b of the anti-rotation member 51 faces the outer circumferential surface 20e of the oscillating body. The inner circumferential surface 52b is spaced apart from the outer circumferential surface 20e of the oscillating body.

[0039] As shown in Figures 2 and 3, the flange portion 53 extends from the axial end of the anti-rotation body 52 that faces the base end face 30a. The flange portion 53 is perpendicular to the first axis L1 and extends from the inner circumferential surface 52b of the anti-rotation body toward the outer circumferential surface 52c of the anti-rotation body. In other words, the anti-rotation member 51 has a flange portion 53 that faces the base end face 30a and extends perpendicular to the first axis L1. The flange portion 53 is provided so as to surround the entire circumference of the anti-rotation body 52.

[0040] The anti-rotation member 51 has a sealing surface 51b, which is one of the end faces of the device base 30 in the axial direction and faces the base end face 30a. As will be described later, the sealing surface 51b moves toward and away from the base end face 30a. In addition, the anti-rotation member 51 has an anti-rotation lower surface 51a, which is an end face different from the sealing surface 51b in the axial direction of the device base 30.

[0041] As shown in Figure 1, the anti-rotation member 51 has two recessed portions, a first recessed portion 51c and a second recessed portion 51d, which are recessed portions extending from the anti-rotation lower surface 51a. The first recessed portion 51c engages with the first projection 23a on the outer peripheral surface 20e of the oscillating body, and the second recessed portion 51d engages with the second projection 23b extending from the outer peripheral surface 20e of the oscillating body. In other words, each of the two recessed portions that engage with each of the two projections is provided on the anti-rotation member 51. As described above, each of the first projection 23a and the second projection 23b has a circular cross-section when viewed from the direction in which the second axis L2 extends. The oscillating body 20 can oscillate along the base engagement surface 301a while sliding the first projection 23a and the second projection 23b against the first recessed portion 51c and the second recessed portion 51d, respectively.

[0042] The first concave portion 51c and the second concave portion 51d are open at the inner circumferential surface 52b and the outer circumferential surface 52c of the anti-rotation device. In other words, the first concave portion 51c and the second concave portion 51d each define a hole that penetrates the anti-rotation device body 52 in the second axial direction A2. As a result, the first projection 23a and the second projection 23b are reciprocable in the second axial direction A2 at the first concave portion 51c and the second concave portion 51d, respectively.

[0043] The direction in which the third axis L3, which is perpendicular to the first axis L1 and the second axis L2, extends is defined as the third axis direction A3. As shown in Figure 3, the flange portion 53 has a first mounting hole defining portion 53a and a second mounting hole defining portion 53b, whose longitudinal length extends in the third axis direction A3. The first mounting hole defining portion 53a and the second mounting hole defining portion 53b are located on opposite sides of the anti-rotation body 52 in the third axis direction A3.

[0044] As shown in Figures 1 and 3, the first mounting hole definition 53a defines the first anti-rotation mounting hole H3, and the second mounting hole definition 53b defines the second anti-rotation mounting hole H4. The first anti-rotation mounting hole H3 penetrates the first mounting hole definition 53a in the first axial direction A1. The second anti-rotation mounting hole H4 penetrates the second mounting hole definition 53b in the first axial direction A1. In other words, each of the multiple first mounting holes, the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4, is formed in the flange portion 53. Furthermore, each of the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4 has a longitudinal length extending in the third axial direction A3 and penetrates in the first axial direction A1. As shown in Figure 1, the first base mounting hole H1 and the first anti-rotation mounting hole H3 are aligned in the first axial direction A1. Furthermore, the second base mounting hole H2 and the second anti-rotation mounting hole H4 are aligned in the first axial direction A1.

[0045] As shown in Figure 1, the first mounting pin P1 is formed by a first pin flange portion P11 and a first pin insertion portion P12. The first pin insertion portion P12 is cylindrical with a partially cut-out outer surface. The first pin flange portion P11 is disc-shaped. The diameter of the first pin flange portion P11 is greater than the opening width in the short direction of the first anti-rotation mounting hole H3. Also, the diameter of the first pin flange portion P11 is smaller than the opening width in the longitudinal direction of the first anti-rotation mounting hole H3. However, the diameter of the first pin flange portion P11 may be greater than the opening width in the longitudinal direction of the first anti-rotation mounting hole H3.

[0046] The second mounting pin P2 is formed by a second pin flange portion P21 and a second pin insertion portion P22. The second pin insertion portion P22 is cylindrical with a partially cut-out outer surface. The second pin flange portion P21 is disc-shaped. The diameter of the second pin flange portion P21 is greater than the opening width in the short direction of the second anti-rotation mounting hole H4. Also, the diameter of the second pin flange portion P21 is smaller than the opening width in the longitudinal direction of the second anti-rotation mounting hole H4. However, the diameter of the second pin flange portion P21 may be greater than the opening width in the longitudinal direction of the second anti-rotation mounting hole H4.

[0047] The first mounting pin P1 is inserted from the first pin insertion portion P12 into the first anti-rotation mounting hole H3 and the first base mounting hole H1, and is fixed to the device base 30. The second mounting pin P2 is inserted from the second pin insertion portion P22 into the second anti-rotation mounting hole H4 and the second base mounting hole H2, and is fixed to the device base 30. In other words, each of the first mounting pin P1 and the second mounting pin P2 is fixed to two of the four corners of the base end face 30a, which are located diagonally opposite each other.

[0048] When the first mounting hole definition portion 53a is placed on the first pin flange portion P11 and the second mounting hole definition portion 53b is placed on the second pin flange portion P21, the anti-rotation member 51 is supported by the first mounting pin P1 and the second mounting pin P2. Therefore, the anti-rotation member 51 is supported by the device base 30 by the first mounting pin P1 and the second mounting pin P2.

[0049] As shown in Figures 2, 5, and 6, the first mounting pin P1 is fixed to the device base 30 such that the first pin flange portion P11 and the first mounting hole definition portion 53a can move toward and away from each other. The first mounting pin P1 is also fixed to the device base 30 such that the anti-rotation member 51 can reciprocate along the first pin insertion portion P12. The second mounting pin P2 is fixed to the device base 30 such that the second pin flange portion P21 and the second mounting hole definition portion 53b can move toward and away from each other. The second mounting pin P2 is also fixed to the device base 30 such that the anti-rotation member 51 can reciprocate along the second pin insertion portion P22. In other words, the anti-rotation member 51 is attached to the device base 30 by the first mounting pin P1 and the second mounting pin P2 such that the sealing surface 51b and the base end surface 30a can move toward and away from each other. Furthermore, the anti-rotation member 51 is reciprocable along the first axis L1 with respect to the base end face 30a. In other words, the anti-rotation member 51 is attached to the device base 30 so as to be reciprocable in the first axis direction A1 on which the first axis L1 extends.

[0050] Furthermore, as mentioned above, the longitudinal length of each of the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4 extends in the third axial direction A3. Therefore, the anti-rotation member 51 can reciprocate along the third axis L3 while sliding in contact with the first mounting pin P1 and the second mounting pin P2.

[0051] As shown in Figures 2 and 3, the flange portion 53 has a grooved portion 54. The groove definition portion 54 comprises a first step portion 541 located on the outer peripheral edge of the flange portion 53, and a second step portion 542 located on the inner peripheral side of the first step portion 541. The first step portion 541 is provided along the entire outer peripheral edge of the flange portion 53. The second step portion 542 is cylindrical and continuous with the anti-rotation inner peripheral surface 52b. The first step portion 541 is spaced apart from the second step portion 542 in a direction perpendicular to the first axial direction A1. Furthermore, the end of the inner peripheral edge of the first step portion 541 in the third axial direction A3 is connected to the first mounting hole definition portion 53a and the second mounting hole definition portion 53b.

[0052] The anti-rotation member 51 has a groove 54a that opens toward the base end face 30a. The groove 54a is formed in the flange portion 53 by a space enclosed by a first step 541, a second step 542, a first mounting hole defining portion 53a, and a second mounting hole defining portion 53b. Therefore, the first step 541, the second step 542, the first mounting hole defining portion 53a, and the second mounting hole defining portion 53b are groove defining portions 54 that define the groove 54a. In other words, the groove defining portion 54 is provided on the anti-rotation member 51 and defines a groove 54a that opens toward the base end face 30a.

[0053] Furthermore, in the first stepped portion 541 and the second stepped portion 542, the surface facing the base end face 30a is the stepped portion upper surface 54d. In addition, in the first mounting hole defining portion 53a and the second mounting hole defining portion 53b, the surface facing the base end face 30a is the defining portion upper surface 53c. The stepped portion upper surface 54d of the first stepped portion 541 and the second stepped portion 542 and the defining portion upper surface 53c are located on the same plane and constitute a sealing surface 51b that moves toward and toward the base end face 30a on the opening side of the groove portion 54a. In other words, the groove defining portion 54 has a sealing surface 51b that moves toward and toward the base end face 30a on the opening side of the groove portion 54a.

[0054] The groove 54a is formed in the flange portion 53 so as to encircle the first axis L1. At the position of the first step portion 541 where it connects to the first mounting hole defining portion 53a, the groove 54a widens in the third axial direction A3 from the second step portion 542 toward the first step portion 541. Also, at the position of the first step portion 541 where it connects to the second mounting hole defining portion 53b, the groove 54a widens in the third axial direction A3 from the second step portion 542 toward the first step portion 541. In other words, the groove 54a has a groove widening portion 54c that widens in a direction perpendicular to the first axis L1 in the portions adjacent to the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4, respectively.

[0055] As shown in Figures 1 to 4, when the sealing surface 51b of the anti-rotation member 51 contacts the base end face 30a, the suction port 36 communicates with the groove 54a via the communication passage 37. The communication passage 37 is formed inside the device base 30 and opens through an opening 38 formed on the base end face 30a. As described above, the anti-rotation member 51 is reciprocable along the third axis L3. The opening 38 is provided on the base end face 30a so that the suction port 36 and the groove 54a can communicate even when the anti-rotation member 51 moves in the third axis direction A3 as a result of this reciprocating motion. In other words, the opening 38 is aligned with the groove enlargement portion 54c in the first axis direction A1. To put it another way, the widened groove enlargement portion 54c of the groove 54a and the opening 38 formed on the base end face 30a side of the communication passage 37 are aligned in the first axis direction A1.

[0056] The sealing surface 51b will be explained with reference to Figures 1 and 3. When air is drawn in from the suction port 36 through the opening 38 by a pressure supply source (not shown), the sealing surface 51b is a surface that can block the exchange of air between the groove 54a and the outside of the anti-rotation member 51. In other words, the space between the sealing surface 51b and the base end face 30a is sealed by a metal-to-metal contact seal between the sealing surface 51b and the base end face 30a. This metal-to-metal contact seal can be achieved, for example, by adjusting the surface roughness of the sealing surface 51b and the base end face 30a. That is, as long as the surface roughness can be adjusted, a metal-to-metal contact seal can be achieved regardless of the material of the sealing surface 51b.

[0057] <Operation of the tracking device related to parallel adjustment> The tracing operation of the tracing device 100 will be explained using Figures 1 to 6. First, the tracing operation when the reference plane S is inclined in the third axis direction A3, as shown in Figures 5 and 6, will be explained.

[0058] As shown in Figure 5, the tracing device 100 takes its initial position. The tracing device 100 is attached to, for example, a conveying device (not shown). The tracing device 100 is positioned so that the crimping tool contact surface 10a faces the reference surface S, and the crimping tool 10 is spaced apart from the reference surface S. In the initial position, the first axis L1, which is the axis of the crimping tool 10 and the oscillating body 20, and the base axis LB of the device base 30 coincide. Also, the reference surface axis LS, which extends in a direction perpendicular to the reference surface S, is not parallel to the first axis L1 and the base axis LB.

[0059] As shown in Figures 1, 2, and 5, in the initial position, a pressure supply source (not shown) draws air from the locking air chamber 48 via the locking port 35, thereby creating a negative pressure supply to the locking air chamber 48. As a result of creating a negative pressure supply, the locking piston 41 is positioned such that a portion of the locking piston step surface 41d contacts the base step surface 30d in the axial direction of the device base 30. Furthermore, the locking shaft extension 42b is positioned such that the holding oscillating body end surface 20d and the locking shaft engagement surface 42c are spaced apart in the axial direction of the device base 30.

[0060] In the initial position, a pressure source (not shown) supplies air to the air bearing port 33. The supplied air is delivered between the base engagement surface 301a and the oscillating body engagement surface 20b through the air bearing air supply and discharge chamber 34 and multiple holes formed in the annular porous material 32. Thus, the annular porous material 32 receives air from the air bearing port 33. This supply of air pressurizes the gap between the oscillating body engagement surface 20b and the base engagement surface 301a. As a result, the oscillating body engagement surface 20b separates from the base engagement surface 301a. At the same time, the oscillating body 20 is attracted toward the base engagement surface 301a by the magnetic attraction of the magnet 44 held by the magnet holding member 43. As a result, the oscillating body engagement surface 20b and the base engagement surface 301a form and maintain a small gap. Therefore, the device base 30 supports the oscillating body 20 so that it can swing away from the base engagement surface 301a.

[0061] In the initial position, the adsorption port 36 is open to the atmosphere. That is, the anti-rotation member 51 is spaced apart from the base end face 30a and is supported by the first pin flange portion P11 and the second pin flange portion P21.

[0062] As shown in Figure 6, the tracing device 100 approaches the reference surface S along the base axis LB while the oscillating body 20 is in a state where it can oscillate with respect to the base engagement surface 301a, and presses the crimping tool contact surface 10a against the reference surface S. This pressing causes the oscillating body 20 to oscillate around the second axis L2. As a result of this oscillating, the crimping tool contact surface 10a conforms to the reference surface S and is adjusted to be parallel. As a result of this parallel adjustment, a parallel position of the crimping tool 10 and the oscillating body 20 with respect to the reference surface S is achieved.

[0063] Figure 7 shows a view of the tracing device 100 in the axial direction of the device base 30, from the base end face 30a toward the top plate mounting surface 30b. In Figure 7, axis LL2 indicates the position of the second axis L2 when the tracing device 100 is in its initial position. The oscillation of the crimping tool 10 and the oscillating body 20 in the third axial direction A3 leads to the movement of the first projection 23a and the second projection 23b toward the third axial direction A3 in the plane perpendicular to the first axis L1. Furthermore, this oscillation of the oscillating body 20 leads to the movement of the anti-rotation member 51 toward the third axial direction A3 in the plane perpendicular to the first axis L1, via the first projection 23a and the second projection 23b. During this movement, the rotation of the anti-rotation member 51 around the first axis L1 is restricted by the first mounting pin P1 and the second mounting pin P2, respectively. Furthermore, the first concave portion 51c and the second concave portion 51d of the anti-rotation member 51 engage with the first projection 23a and the second projection 23b of the oscillating body 20, respectively. As a result, the rotation of the oscillating body 20 is restricted. In other words, the anti-rotation mechanism 50 restricts the rotation of the oscillating body 20 around the first axis L1 which is perpendicular to the oscillating body crimping surface 20a. Therefore, the tracing device 100 adjusts the crimping tool contact surface 10a to be parallel to the reference surface S by oscillating the oscillating body 20 while restricting the rotation of the oscillating body 20 with the anti-rotation mechanism 50.

[0064] As the oscillating body 20 moves, the anti-rotation member 51 moves in the third axis direction A3, and the relative positional relationship between the opening 38 and the groove 54a changes from its initial position. However, due to the groove enlargement portion 54c of the groove 54a, communication between the suction port 36 and the groove 54a is still maintained through the opening 38 and the communication passage 37.

[0065] Next, using Figure 8, we will explain the tracing operation when the reference surface S is tilted in the direction of the second axis L2. As the tracing device 100 in the initial position is as described above, we will now explain the anti-rotation member 51 when the tracing device 100 presses the crimping tool contact surface 10a against the reference surface S.

[0066] Figure 8 shows a view of the tracing device 100 in the direction from the base end face 30a toward the top plate mounting surface 30b within the axial direction of the device base 30, when the reference plane S is tilted in the second axial direction A2. In Figure 8, axis LL3 indicates the position of the third axis L3 when the tracing device 100 is in its initial position. As shown in Figure 8, the oscillation of the crimping tool 10 and the oscillating body 20 in the second axial direction A2 leads to the movement of the first projection 23a and the second projection 23b in the second axial direction A2 in a plane perpendicular to the first axis L1. Each of the first projection 23a and the second projection 23b is capable of reciprocating in the second axial direction A2 in the first concave portion 51c and the second concave portion 51d, respectively. In other words, the movement of each of the first projection 23a and the second projection 23b in the second axial direction A2 does not move the anti-rotation member 51 toward the third axial direction A3.

[0067] Next, we will explain the case where the inclination of the reference plane S is perpendicular to the first axis L1 and different from both the second axis A2 and the third axis A3. In this case, the oscillating body 20 performs an action that is a superposition of the oscillation around the second axis L2 and the oscillation around the third axis L3. In other words, even in this case, the rotation-preventing member 51 restricts the rotation of the oscillating body 20 around the first axis L1.

[0068] Therefore, the anti-rotation mechanism 50 restricts the rotation of the oscillating body 20 around the first axis L1 even when the inclination of the reference plane S is in a direction perpendicular to the first axis L1 and not in the second axis direction A2 or the third axis direction A3.

[0069] <Operation of the tracking device for maintaining a parallel posture> Using Figures 1 to 3 and Figure 6, the following will be explained: the operations performed by the tracing device 100 to maintain the parallel position of the crimping tool 10 and the oscillating body 20 after achieving this parallel position.

[0070] After the crimping tool contact surface 10a becomes parallel to the reference plane S, the pressure supply source (not shown) stops supplying air to the air bearing port 33 and simultaneously draws air out of the air bearing port 33. As a result, the annular porous material 32 receives air discharge from the air bearing port 33. In other words, the pressure supply source creates negative pressure in the air bearing air supply and discharge chamber 34 by vacuum suction through the air bearing port 33. Due to this pressure reduction, the oscillating body engagement surface 20b of the oscillating body 20 contacts and is attracted to the base engagement surface 301a of the device base 30 while maintaining the parallel position of the crimping tool contact surface 10a with respect to the reference plane S. As a result of this pressure reduction, the tracing device 100 performs a temporary lock to maintain the parallel position of the crimping tool contact surface 10a with respect to the reference plane S. In other words, the tracing device 100 fixes the inclined position of the oscillating body 20 by vacuum suction through the air bearing port 33.

[0071] In the tracing device 100, after temporary locking is achieved, the pressure supply source draws air through the suction port 36. The sealing surface 51b seals the space between the anti-rotation member 51 and the device base 30. As a result, the anti-rotation member 51 is vacuum-adsorbed to the base end face 30a. This restricts the movement of the anti-rotation member 51 relative to the device base 30.

[0072] After temporary locking and vacuum suction of the anti-rotation member 51 via the suction port 36, the pressure supply source switches the pressure of the air supplied to the locking port 35 from negative to positive. This supply leads to pressurization of the locking air chamber 48, which is connected to the locking port 35. As the locking air chamber 48 is pressurized, the locking piston 41 and locking shaft 42 move in the direction from the base end face 30a toward the top plate mounting surface 30b, as shown by the dashed line in Figure 2. This movement causes the locking shaft 42 to press its locking shaft engagement surface 42c against the holding oscillating body end face 20d. This pressing causes the locking shaft 42 and the oscillating body 20 to engage strongly. As a result, the oscillating body 20 is pressed in the direction from the base end face 30a toward the top plate mounting surface 30b. Due to the temporary locking, the oscillating body 20 is in contact with the base engagement surface 301a at the oscillating body engagement surface 20b. In other words, the pressurization generates a normal force at the contact surface between the oscillating body engagement surface 20b and the base engagement surface 301a. This normal force generates a static friction force at the contact surface that prevents the oscillating body 20 from oscillating relative to the device base 30. As a result, the oscillating of the oscillating body 20 and the crimping tool 10 relative to the device base 30 is limited. As a result of the pressurization, the tracing device 100 performs a full lock in addition to the temporary lock to maintain the parallel position of the crimping tool contact surface 10a with respect to the reference surface S. Therefore, the tracing device 100 maintains the parallel position of the crimping tool 10 and the oscillating body 20 with respect to the reference surface S through the temporary lock and the full lock.

[0073] After the tracing device 100 maintains the parallel position of the crimping tool 10 and the oscillating body 20 by temporary locking and permanent locking, and vacuum-suctions the anti-rotation member 51 to the base end face 30a, it is moved from the location where the tracing operation was performed by a transport device (not shown).

[0074] [Operation of this embodiment] The operation of this embodiment will now be explained. The tracing device 100 presses the crimping tool contact surface 10a against the reference surface S and adjusts the parallelism between the crimping tool contact surface 10a and the reference surface S by swinging the crimping tool 10 and the oscillating body 20 relative to the base engagement surface 301a. The anti-rotation member 51 included in the anti-rotation mechanism 50 is attached to the device base 30 by the first mounting pin P1 and the second mounting pin P2 and restricts the rotation of the oscillating body 20 around the first axis L1 by engaging with the first projection 23a and the second projection 23b.

[0075] Furthermore, after the tracing operation and temporary locking, the tracing device 100 vacuum-adheres the anti-rotation member 51 to the base end face 30a by drawing air from the groove 54a through the communication passage 37 via the suction port 36. This vacuum adsorption suppresses sliding contact between the anti-rotation member 51 and the device base 30 and the oscillating body 20 when the tracing device 100 is moved by a transport device (not shown) after the tracing operation. As a result, the generation of particles during the operation of the tracing device 100 is reduced.

[0076] [Effects of this embodiment] The effects of this embodiment will now be explained. (1) After the tracing device 100 adjusts the parallelism between the crimping tool contact surface 10a and the reference surface S by tracing, it vacuum-adheres the anti-rotation member 51 to the base end surface 30a by sucking air from the groove 54a with the suction port 36. This vacuum suction prevents the anti-rotation member 51 from sliding against the device base 30 and the oscillating body 20 when the tracing device 100 operates after the tracing operation. As a result, the amount of particles generated during the operation of the tracing device 100 can be reduced.

[0077] (2) The anti-rotation member 51 is attached to the base end face 30a in the first axial direction A1 by the first mounting pin P1 and the second mounting pin P2, respectively. The anti-rotation member 51, the first mounting pin P1 and the second mounting pin P2 are housed within the cross-section of the device base 30 as viewed from the direction in which the base axis LB extends. In other words, the anti-rotation member 51 can be attached to the base end face 30a without adding any mounting members to the outer surface 30e of the base. As a result, the size increase of the tracing device 100 in the direction perpendicular to the base axis LB is suppressed. Therefore, the tracing device 100 can be made smaller.

[0078] (3) The groove 54a of the anti-rotation member 51 restricts the exchange of air with the outside of the anti-rotation member 51 by a metal-to-metal seal between the sealing surface 51b and the base end surface 30a. Since the sealing surface 51b and the base end surface 30a can be sealed by a metal-to-metal seal, a seal can be achieved between the sealing surface 51b and the base end surface 30a without providing a sealing member between them. As a result, the anti-rotation member 51 can be vacuum-adsorbed to the device base 30 without using a sealing member that could become a source of particles when the tracing device 100 is in operation.

[0079] (4) A groove enlargement portion 54c is formed in the groove portion 54a, which widens in a direction perpendicular to the first axis L1. Even during the tracing operation of the tracing device 100, the groove enlargement portion 54c maintains communication between the opening 38 and the groove portion 54a. As a result, even if the anti-rotation member 51 swings during the tracing operation, the tracing device 100 can vacuum-suction the anti-rotation member 51 to the base end face 30a.

[0080] (5) The base end face 30a has a rectangular shape when viewed from the direction in which the base axis LB extends, and a first base mounting hole H1 and a second base mounting hole H2 are formed in each of the pair of diagonally opposite corners of the four corners of the base end face 30a. In other words, the base end face 30a has a rectangular shape, and the anti-rotation member 51 is attached to the two diagonally opposite corners of the base end face 30a by the first mounting pin P1 and the second mounting pin P2, respectively. As a result, the anti-rotation member 51 is housed within the cross-section of the device base 30 when viewed from the direction in which the base axis LB extends. In other words, the increase in size of the tracing device 100 in the direction perpendicular to the base axis LB due to the anti-rotation member 51 can be suppressed. As a result, the tracing device 100 can be made smaller.

[0081] [Example of changes] The above embodiment can be implemented with the following modifications. The above embodiment and the following modifications can be combined with each other to the extent that they do not contradict each other technically.

[0082] ○ The anti-rotation member 51 may have three or more first mounting holes and three or more mounting pins. For example, the anti-rotation member 51 may have a portion of the flange portion 53 that extends in a direction different from the third axis direction A3 in a direction perpendicular to the first axis L1, and this portion may define the third anti-rotation mounting hole.

[0083] ○ The base end face 30a of the device base 30 may be circular or hexagonal. Furthermore, the mounting pins do not need to be fixed to two diagonally opposite corners of the base end face. ○ In the groove portion 54a, the groove enlargement portion 54c does not have to be aligned with the opening 38 in the first axial direction A1. Also, the groove portion 54a does not have to be widened in the portions adjacent to the first anti-rotation mounting hole H3 and the second anti-rotation mounting hole H4, respectively.

[0084] ○ The space between the sealing surface 51b and the base end surface 30a does not necessarily have to be sealed by a metal-touch seal. In this case, a sealing member may be provided on the anti-rotation member 51 or the device base 30 to seal the space between the sealing surface 51b and the base end surface 30a.

[0085] ○ The anti-rotation member 51 does not necessarily have to include a flange portion 53, a first anti-rotation mounting hole H3 and a second anti-rotation mounting hole H4, and a first mounting pin P1 and a second mounting pin P2. For example, in this case, the anti-rotation member 51 is attached to the device base 30 by a member attached to the outer surface 30e of the base.

[0086] ○ The base engagement surface 301a may be a convex spherical surface. In this case, the oscillating body engagement surface 20b is a concave spherical surface and has the same radius of curvature as the base engagement surface 301a. ○ In the groove portion 54a, the groove enlargement portion 54c may be formed over the entire flange portion 53.

[0087] ○ The groove 54a does not have to be formed in the flange portion 53 so as to encircle the first axis L1. For example, the groove 54a may have a portion in the flange portion 53 where the first step portion 541 and the second step portion 542 are integrated. [Explanation of Symbols]

[0088] 10...Crimping tool, 10a...Crimping tool contact surface, 10b...Crimping tool oscillating surface, 20...Oscillating body, 20a...Oscillating body crimping surface, 20b...Oscillating body engagement surface, 20e...Oscillating body outer circumferential surface as outer circumferential surface, 23a...First protrusion as two protrusions, 23b...Second protrusion as two protrusions, 30...Device base, 30a...Base end surface, 301a...Base engagement surface, 36...Suction port, 38...Opening, 50...Anti-rotation mechanism, 51...Anti-rotation member, 51b...Sealing surface, 51c...First concave portion as two concave parts , 51d...Second concave portion as two concave parts, 53...Flange portion, 54...Groove defining portion, 54a...Groove portion, 54c...Groove enlargement portion, 57...Connecting passage, 100...Copying device, A1...First axial direction, A2...Second axial direction, A3...Third axial direction, H3...First anti-rotation mounting hole as multiple mounting holes, H4...Second anti-rotation mounting hole as multiple mounting holes, L1...First axis, L2...Second axis, L3...Third axis, P1...First mounting pin as multiple mounting pins, P2...Second mounting pin as multiple mounting pins, S...Reference surface.

Claims

1. A device base having a base end face including a base engagement surface which is either a concave spherical surface or a convex spherical surface, The oscillating body is pivotably mounted to the base of the device and has an oscillating body engagement surface that engages with the base engagement surface, and an oscillating body compression surface which is a different surface from the oscillating body engagement surface as its end face. A crimping tool having a crimping tool pivot surface attached to the crimping surface of the pivoting body, and having an end surface different from the crimping tool pivot surface as a crimping tool contact surface, The oscillating body has a rotation-preventing mechanism that restricts the rotation of the oscillating body around a first axis perpendicular to the oscillating body's clamping surface, The aforementioned anti-rotation mechanism is A rotation-preventing member surrounds the oscillating body around the first axis and is attached to the device base so as to be reciprocable in the first axial direction from which the first axis extends, Two protrusions are provided on the outer circumferential surface of the oscillating body and are arranged in the direction of the second axis, which is perpendicular to the first axis, The anti-rotation member is provided with two recessed portions that engage with each of the two protrusions, A tracing device that adjusts the contact surface of the crimping tool to be parallel to a reference surface by oscillating the oscillating body while restricting its rotation with the aforementioned anti-rotation mechanism, The aforementioned anti-rotation mechanism is The groove defining portion is provided on the anti-rotation member and defines a groove that opens toward the base end face, and has a sealing surface on the opening side of the groove that contacts and separates from the base end face, A communication passage formed inside the base of the device and capable of communicating with the groove, A tracing device characterized by comprising an adsorption port communicating with the aforementioned communication passage.

2. The aforementioned anti-rotation member is A flange portion facing the end face of the base and extending in a direction perpendicular to the first axis, The flange portion has a plurality of mounting holes that extend in the direction of the third axis, which is perpendicular to the first and second axes, and that penetrate in the direction of the first axis, The tracing device according to claim 1, characterized in that the anti-rotation member is supported by a plurality of mounting pins that are inserted through each of the mounting holes and fixed to the end face of the base.

3. The copying device according to claim 1 or 2, characterized in that the space between the sealing surface and the base end surface is sealed by a metal-to-metal contact seal between the sealing surface and the base end surface.

4. The tracing device according to claim 2, wherein the groove portion has a groove enlargement portion that widens in a direction perpendicular to the first axis in a portion adjacent to each of the plurality of mounting holes, and the groove enlargement portion is aligned in the first axial direction with the opening formed on the base end face side of the communication passage.

5. The aforementioned mounting holes consist of two holes. The aforementioned mounting pins consist of two, The base end face is square in shape when viewed from the direction in which the first axis extends. The tracing device according to claim 2, characterized in that each of the two mounting pins is fixed to two of the four corners of the base end face that are located diagonally opposite each other on the base end face.

Images