Transport vehicle

Abstract

Provide transportation vehicles. [Solution] A transport vehicle includes a mobile transport device including a filling gas receiving facility and a gas connection port connected to the filling gas receiving facility, a gas filling module, and a transport box. The mobile transport device can cooperate with automatic and manual transport and can also be used as a transport vehicle for transport between factories or between different areas outside a factory. The mobile transport device is used to place the transport box, and the gas filling module continuously supplies gas to the transport box, effectively reducing the humidity inside the transport box and significantly improving the generation of particles and VOCs.

Description

Technical Field

[0001] The present invention relates to a transport vehicle for transporting semiconductor containers.

Background Art

[0002] A wafer or reticle must be protected by a wafer cassette or reticle cassette (hereinafter collectively referred to as a transport cassette). After placing the transport cassette in the buffer area on a cart, it is necessary to send it to the side of the transport vehicle. It is necessary to place the transport cassettes on the cart one by one into the transport vehicle. However, multiple loading and unloading operations cause the generation of particles and operator fatigue.

[0003] Generally, a plastic bag is put over the transport cassette to prevent dust and external humidity from entering inside, and it is transported to each factory via a transport vehicle. However, currently, inside a conventional transport vehicle, there is only a cooling function, but there is no design for maintaining a low humidity inside the transport cassette, and the defective rate of the transport cassette increases depending on the distance, temperature, and storage method between Factory A and Factory B. Also, the aforementioned plastic bag is vertically compressed by a ceiling-running unmanned transport vehicle (OHT) chuck by a machine. However, in this method, the transport cassette may be deformed and particles may be generated.

[0004] Furthermore, a conventional transport vehicle generally has two upper and lower levels for placing transport cassettes. A conventional transport vehicle has a cooling function, but the upper level is close to the outside of the upper vehicle body, so the temperature rises due to sunlight irradiation. Even if the cooling air maintains the internal temperature, the transport cassette on the upper level is susceptible to heat and causes an increase in volatile organic compounds (VOCs).

[0005] Therefore, how to propose a transport vehicle that can solve the above problems is currently one of the problems that the industry is trying to solve by investing research and development resources.

Summary of the Invention

Problems to be Solved by the Invention

[0006] In view of this, the object of the present invention is to propose a transport vehicle that can solve the above-mentioned problems. [Means for solving the problem]

[0007] To achieve the above objective, according to one embodiment of the present invention, a transport vehicle suitable for transporting semiconductor containers comprises a mobile transport device including a filling gas receiving facility and a gas connection port connected to the filling gas receiving facility; a gas filling module disposed on the mobile transport device, docked with the filling gas receiving facility, and for supplying gas and transporting it to the gas connection port; and a transport box mounted on the mobile transport device and having a gas valve port, wherein the gas valve port is located corresponding to the gas connection port and receives gas and transports it into the transport box.

[0008] In one or more embodiments of the present invention, the gas-filling module is a gas storage bottle.

[0009] In one or more embodiments of the present invention, a transport box is used to house a semiconductor container, the semiconductor container having a gas receiving section that matches a gas connection port and a gas valve port, and the gas receiving section is used to receive gas and transport it into the semiconductor container via the transport box.

[0010] In one or more embodiments of the present invention, the mobile transport device further includes a transport frame on which a filled gas receiving facility is arranged and on which transport boxes are placed, and a plurality of wheels provided on the transport frame and for moving the transport frame.

[0011] In one or more embodiments of the present invention, the mobile transport device further includes an extendable frame provided on the transport frame for securing transport boxes so as to surround the transport frame.

[0012] In one or more embodiments of the present invention, the telescopic frame includes a first lever body connected to a transport frame and positioned to abut against the side wall of a transport box; a second lever body fitted inside the first lever body and positioned to slide linearly relative to the first lever body; and a retaining plate connected to the second lever body and detached from one end of the first lever body for abutting and securing the transport box.

[0013] In one or more embodiments of the present invention, the space between the first lever body and the transport frame further includes a rotating shaft member, the first lever body being positioned so as to rotate by the rotating shaft member so as to unfold parallel to the outside of the transport frame or so as to stand perpendicular to the transport frame.

[0014] In one or more embodiments of the present invention, a vibration absorption module is provided between a transport frame and a plurality of wheels, and the transport frame includes a vibration detection module for detecting vibration information generated by feedback from the vibration absorption module, and a microcontroller for transmitting the vibration information to a cloud server for processing.

[0015] In one or more embodiments of the present invention, the transport frame is further provided with a plurality of positioning elements for positioning the transport box within the transport frame.

[0016] In one or more embodiments of the present invention, the bottom of the transport box has a positioning groove, and the positioning element is a positioning pin, which is positioned to be inserted into the positioning groove.

[0017] In one or more embodiments of the present invention, a transport vehicle is provided which docks with a gas receiving facility and has a gas filling module for supplying gas and transporting it into a transport box via a gas connection port and a gas valve port, and which includes a chamber for mounting a mobile transport device.

[0018] In one or more embodiments of the present invention, the filled gas receiving equipment includes an internal flow path that communicates with a gas connection port.

[0019] In one or more embodiments of the present invention, the gas filling module includes a humidity sensing module positioned to measure humidity information inside a transport box, and a microcontroller coupled to the humidity sensing module for storing the humidity information and transmitting it to a cloud server for processing.

[0020] As described above, the transport vehicle of the present invention can solve the problem that known transport devices lack a gas filling function, which affects the cleanliness of semiconductor containers. The present invention utilizes a transport vehicle with a gas filling function, which can be docked to a gas filling module by a mobile transport device, regardless of whether it is short-distance inter-factory transport or long-distance inter-regional transport. The gas filling module may be provided on a transport frame or transport vehicle, and gas can be transported into the transport box or into the semiconductor container via a gas path, thereby maintaining moisture inside the transport box and / or semiconductor container and reducing the generation of VOCs. The present invention further has multifunctional applications; for example, the transport vehicle has vibration detection and humidity detection functions, allowing operators to obtain relevant information in real time and, based on this, execute corresponding processing measures, thereby solving the problems of product defect rates due to transport distance, temperature changes, and storage methods.

[0021] The above is used solely to explain the problems that the present invention aims to solve, the technical means for solving those problems, and their effects. The specific details of the present invention will be described in detail in the following embodiments and related drawings. [Brief explanation of the drawing]

[0022] To make the above and other objectives, features, advantages, and embodiments of the present invention clearer and easier to understand, the accompanying drawings are described below. [Figure 1A] This is a perspective view of the transport vehicle according to the present invention, before the transport box is placed on it. [Figure 1B] This is a perspective view of the transport vehicle according to the present invention after the transport box has been placed on it. [Figure 2]It is a schematic partial cross-sectional view of a transport vehicle according to the present invention. [Figure 3] It is another schematic partial cross-sectional view of a transport vehicle according to the present invention. [Figure 4] It is a perspective view of the developed state of the partial structure of a transport frame according to the present invention. [Figure 5A] It is a schematic partial cross-sectional view of the positioning between a transport frame and a transport box according to the present invention. [Figure 5B] It is another schematic partial cross-sectional view of the positioning between a transport frame and a transport box according to the present invention. [Figure 6] It is a functional block diagram of the vibration detection function of a transport vehicle according to the present invention. [Figure 7] It is a functional block diagram of the humidity detection function of a transport vehicle according to the present invention. [Figure 8] It is a side view of a transport vehicle according to the present invention. [Figure 9] It is a partial perspective view of a mobile transport device in FIG. 8.

Embodiments for Carrying out the Invention

[0023] Hereinafter, a plurality of embodiments of the present invention will be disclosed in the drawings and, for the purpose of clear explanation, many practical details will be described in conjunction with the following description. However, it should be understood that these practical details are not applied to limit the present invention. That is, in some embodiments of the present invention, these practical details are not necessary. Furthermore, in order to simplify the drawings, some conventional structures and elements are simply illustrated in the drawings.

[0024] Please refer to Figures 1A and 1B. Figure 1A is a perspective view of the transport vehicle 10 according to the present invention before the transport box 130 is placed on it. Figure 1B is a perspective view of the transport vehicle 10 according to the present invention after the transport box 130 has been placed on it, where the transport box 130 is placed on the transport frame 101 and is indicated by a dashed line. The transport vehicle 10 includes a mobile transport device 100, a gas filling module 120, and a transport box 130. The mobile transport device 100 includes a filled gas receiving device 110 and a plurality of gas connection ports 111 connected to the filled gas receiving device 110. The mobile transport device 100 may have a plurality of transport boxes 130 arranged simultaneously. The gas connection ports 111 include a gas filling port, a gas discharge port, or a combination thereof, or one of these. The gas connection port 111 and the gas valve port 131 of the transport box 130 are matched, and the gas valve port 131 receives the gas and transports it into the transport box 130. Further details will be described later.

[0025] The gas filling module 120 is placed on the mobile transport device 100. The gas filling module 120 is docked with the filled gas receiving equipment 110 and used to supply gas and transport it into the gas connection port 111. The transport box 130 is placed on the mobile transport device 100. The mobile transport device 100 further includes a transport frame 101 and a plurality of wheels 102. The filled gas receiving equipment 110 is placed on the transport frame 101. The transport frame 101 is used to place the transport box 130 on it. The wheels 102 are provided on the transport frame 101 and are used to move the transport frame 101.

[0026] In this embodiment, the gas filling module 120 placed on the transport frame 101 is a gas storage bottle, but the present invention is not limited thereto. In some embodiments, the gas storage bottle stores, for example, extremely clean dry air (XCDA).

[0027] As shown in Figure 1B, in this embodiment, transport box 130 is used to house semiconductor containers 300a, such as front-opening unified pods (FOUPs), and another transport box 130 is used to house semiconductor containers 300b, such as reticle boxes or extreme ultraviolet pods (EUV PODs). The transport boxes 130 are not limited to the types of semiconductor containers 300a and 300b that are housed.

[0028] Please refer to Figure 2, which is a schematic partial cross-sectional view of the transport vehicle 10 according to the present invention. As shown in Figure 2, the filled gas receiving equipment 110 includes an internal flow path 112. The internal flow path 112 is provided in the transport frame 101. The internal flow path 112 communicates with the gas connection port 111. The gas valve port 131 is located corresponding to the gas connection port 111. The gas valve port 131 receives gas from the gas connection port 111 of the filled gas receiving equipment 110 and transports it into the transport box 130. By injecting gas into the transport box 130 and further purging the semiconductor containers 300a and 300b housed in the transport box 130, the objective of maintaining the humidity inside the transport box 130 at 15% or less can be achieved. Furthermore, by controlling the temperature change of the semiconductor containers 300a and 300b, the generation of volatile organic compounds (VOCs) in the semiconductor containers 300a and 300b can be effectively suppressed.

[0029] Please refer to Figure 3, which is a schematic cross-sectional view of another portion of the transport vehicle 10 according to the present invention. The bottom of the semiconductor container 300a has a gas receiving section 310 that matches a gas connection port 111 and a gas valve port 131, and these are in communication with each other. A gas filling module 120 is used to supply gas, and the gas transport path includes an internal flow path 112, a gas connection port 111, a gas valve port 131, and a gas receiving section 310. The gas receiving section 310 is used to receive gas and transport it into the semiconductor containers 300a and 300b via the gas valve port 131 of the transport box 130 in order to achieve the objective of introducing gas into the semiconductor containers 300a and 300b.

[0030] As shown in Figures 1A and 1B, the mobile transport device 100 further includes an extendable frame 103 provided on the transport frame 101. The extendable frame 103 is used to secure the transport box 130 so as to surround the transport frame 101. Specifically, the extendable frame 103 includes a first lever body 103a, a second lever body 103b, and a retaining plate 103c. The first lever body 103a is connected to the transport frame 101 and positioned to abut against the side wall of the transport box 130. The second lever body 103b is fitted into the first lever body 103a and positioned to slide linearly relative to the first lever body 103a. In this invention, the method of connecting the second lever body 103b and the first lever body 103a is not limited, and all such connections are within the scope of the patent protection of this invention as long as their length can be extended and adjusted. The retaining plate 103c is connected to the second lever body 103b and separates from one end of the first lever body 103a. The retaining plate 103c is used to contact and secure the transport box 130. This allows the telescopic frame 103 of this embodiment to be adjusted according to the size of the transport box 130 in order to achieve the function of securing and compressing the transport box 130.

[0031] As shown in Figures 1A and 1B, the structural design of the mobile conveying device 100 will be described in further detail. The mobile conveying device 100 is an adjustable conveying frame and further includes a first tripod section 101a, a vibration absorption module 101b, and a second tripod section 101c. The first tripod section 101a is connected between the conveying frame 101 and the wheeled body 102, and the filled gas receiving equipment 110 is provided below the conveying frame 101. The vibration absorption module 101b is provided between the first tripod section 101a and the wheeled body 102. The second tripod section 101c is connected between the first tripod section 101a and the conveying frame 101 and is used to fold the first tripod section 101a parallel to the conveying frame 101 or to unfold the first tripod section 101a so that it stands vertically below the conveying frame 101. As the mobile transport device 100 moves on an uneven road surface by its wheels 102, the vibration absorption module 101b connected between the first tripod 101a and the transport frame 101 can absorb vibrations that the road surface feeds back to the wheels 102.

[0032] In some embodiments, the vibration absorption module 101b may utilize a pneumatic vibration absorber, a hydraulic vibration absorber, or an elastic member (e.g., soft rubber, a spring), but the present invention is not limited thereto.

[0033] Please refer to Figures 1A and 4 together. Figure 4 is a perspective view of the unfolded state of a partial structure of the transport frame 101. The telescopic frame 103 further includes a rotating shaft member 101g provided between the first lever body 103a and the transport frame 101. The rotating shaft member 101g rotates the first lever body 103a so that it is unfolded parallel to the outside of the transport frame 101, or so that it stands perpendicular to the transport frame 101. This allows the operator to rotate the telescopic frame 103 so that it is unfolded parallel to the outside of the transport frame 101, place the transport box 130 on the transport frame 101, and then rotate the telescopic frame 103 so that it stands perpendicular to the transport frame 101, thereby easily fixing and compressing the transport box 130 to the transport frame 101.

[0034] Please refer to Figures 5A and 5B. Figure 5A is a schematic partial cross-sectional view of the positioning between the transport frame 101 and the transport box 130 according to the present invention. Figure 5B is another schematic partial cross-sectional view of the positioning between the transport frame 101 and the transport box 130 according to the present invention. As shown in Figures 1A, 5A, and 5B, the transport frame 101 is further provided with a plurality of positioning elements 101f. Accordingly, the bottom of the transport box 130 has a positioning groove 132. The positioning elements 101f are positioning pins and are arranged to be inserted into the positioning groove 132. The mutual fitting of the positioning elements 101f and the positioning groove 132 makes it possible to achieve the objective of positioning the transport box 130 on the transport frame 101.

[0035] In the embodiment shown in Figure 5A, the cross-sectional shape of the positioning groove 132 of the transport box 130 is triangular. In the embodiment shown in Figure 5B, the cross-sectional shape of the positioning groove 132 of the transport box 130 is rectangular. However, the cross-sectional shape of the positioning groove 132 is not limited to these. In actual applications, the positioning groove 132 of the transport box 130 can be flexibly changed to other specific shapes as long as the objective of relative positioning with the positioning element 101f is achieved.

[0036] Please refer to Figure 6. This is a functional block diagram of the vibration detection function of the transport vehicle 10 according to the present invention. As shown in Figure 6, the transport frame 101 further includes a vibration detection module 101d and a microcontroller 101e. The microcontroller 101e is, for example, a programmable logic controller (PLC), but the present invention is not limited thereto. The vibration detection module 101d is used to detect vibration information generated by feedback from the vibration absorption module 101b, and the microcontroller 101e transmits the vibration information to a cloud server 400 for processing, for example, wirelessly. This allows the operator to process abnormal conditions in real time based on the vibration information recorded in the cloud server 400.

[0037] Please refer to Figure 7, which is a functional block diagram of the humidity detection function of the transport vehicle 10 according to the present invention. As shown in Figure 7, the gas filling module 120 includes a humidity detection module 121 and a microcontroller 122. The microcontroller 122 is, for example, a PLC, but the present invention is not limited thereto. The humidity detection module 121 is positioned to measure humidity information inside the transport box 130. The microcontroller 122 is coupled to the humidity detection module 121. The microcontroller 122 is used to store humidity information and transmit it to a cloud server 400 for processing, for example, wirelessly. This allows the operator to adjust the gas filling mode in real time and control the degree of humidity maintenance inside the transport box based on the humidity information recorded in the cloud server 400, for example, the internal humidity information of the transport box 130 from the origin to the destination.

[0038] The present invention proposes another embodiment that enables the transport of semiconductor containers 300a and 300b between factories (short distance), as well as transport between areas over long distances. Please refer to Figures 8 and 9. Figure 8 is a side view of a transport vehicle 20 of one embodiment according to the present invention. Figure 9 is a partial perspective view of the mobile transport device 200 in Figure 8. As shown in Figures 8 and 9, the transport vehicle 20 further includes a transport vehicle 202. A gas filling module 220 is arranged in the transport vehicle 202. The transport vehicle 202 includes a chamber 202a (shown by a dashed line in Figure 8). The chamber 202a is used to mount the mobile transport device 200. The gas filling module 220 is arranged in the transport vehicle 202, and the gas filling module 220 may be located inside the chamber 202a or erected outside the chamber 202a, but must be able to communicate with the inside of the chamber 202a. Since the chamber 202a is a large space that can accommodate multiple mobile transport devices 200, the first tripod section 101a can be folded parallel to the bottom of the transport frame 201 to facilitate transport. The gas transport route provided by the gas filling module 220 is from the filled gas receiving equipment 210, gas connection port 211, and gas valve port 131 (see Figure 2 or Figure 3) into the transport box 130.

[0039] Specifically, the transport vehicle 202 may be equipped with multiple sets of gas filling modules 220, the transport frame 201 is arranged in two tiers so as to be stacked vertically within the chamber 202a, and the retaining plate 103c (see also Figure 1A) can be used to abut and fix the transport box 130, as well as be used as a platform for stacking the transport frame 201. The gas filling module 220 is docked with the gas receiving equipment 210 and transports gas into the box 130 along the gas transport route, or transports gas simultaneously into the transport box 130 and the semiconductor container 300a / semiconductor container 300b, maintaining a constant humidity inside until the destination. With this design, the gas continuously overflows from the inside to the outside of the transport box 130, achieving gas circulation within the transport box 130 and achieving predetermined cleanliness and humidity control. Alternatively, the gas can continuously enter the semiconductor container 300a / 300b directly and overflow from the inside to the outside, achieving a positive pressure state in both the transport box 130 and the semiconductor container 300a / 300b, thereby eliminating the entry of particles into the semiconductor containers 300a and 300b, and also maintaining the same internal temperature in the upper and lower semiconductor containers 300a and 300b, thereby reducing the generation of VOCs.

[0040] As described above, the transport vehicle of the present invention can solve the problem that known transport devices lack a gas filling function, which affects the cleanliness of semiconductor containers. The present invention utilizes a transport vehicle with a gas filling function, which can be docked to a gas filling module by a mobile transport device, regardless of whether it is short-distance inter-factory transport or long-distance inter-regional transport. The gas filling module may be provided on a transport frame or transport vehicle, and gas can be transported into the transport box or into the semiconductor container via a gas path, thereby maintaining moisture inside the transport box and / or semiconductor container and reducing the generation of VOCs. The present invention further has multifunctional applications. For example, the transport vehicle may have vibration detection and humidity detection functions, allowing operators to obtain relevant information in real time and, based on this, execute corresponding processing measures, thereby solving the problems of product defect rates due to transport distance, temperature changes, and storage methods.

[0041] Although the present invention has been disclosed in embodiments as described above, these embodiments are not intended to limit the present invention, and any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention, and the scope of protection of the present invention should be based on the scope of the patent application to be appended later. [Explanation of Symbols]

[0042] 10, 20: Transport vehicles 100, 200: Mobile conveying device 101, 201: Transport frame 101a: 1st tripod part 101b: Vibration absorption module 101c:Second tripod section 101d: Vibration detection module 101e, 122: Microcontroller 101f: Positioning element 101g: Rotating shaft component 102: Ring body 103: Telescopic frame 103a: First lever body 103b: Second lever body 103c: Retaining plate 110, 210: Filling gas receiving equipment 111, 211: Gas connection port 112: Internal flow path 120, 220: Gas filling module 121: Humidity detection module 130: Transport Box 131: Gas valve opening 132: Positioning groove 202: Transport vehicle 202a: Chamber 300a, 300b: Semiconductor containers 310: Gas receiving section 400: Cloud Server

Claims

1. A transport vehicle suitable for transporting semiconductor containers, A mobile conveying device including a gas receiving facility and a gas connection port connected to the gas receiving facility, A gas filling module is provided for placement on the mobile transport device, docked with the gas receiving equipment, and supplying gas for transport to the gas connection port. A transport box having a gas valve port is placed on the aforementioned mobile transport device, Equipped with, The gas valve port is located corresponding to the gas connection port, receives the gas, and transports it into the transport box. The mobile transport device further includes a transport frame and an extendable frame, the filled gas receiving equipment is arranged on the transport frame, the transport frame is arranged to place the transport box on it, the extendable frame is provided on the transport frame, and the extendable frame is fixed on the transport frame so as to surround the transport box.

2. The transport vehicle according to claim 1, wherein the gas filling module is a gas storage bottle.

3. The transport vehicle according to claim 1, wherein the transport box is used to house the semiconductor container, the semiconductor container has a gas receiving section that matches the gas connection port and the gas valve port, and the gas receiving section is used to receive the gas and transport it into the semiconductor container via the transport box.

4. The aforementioned mobile transport device, Multiple wheels provided on the transport frame and for moving the transport frame The transport vehicle according to claim 1, further comprising:

5. The aforementioned retractable frame is A first lever body is connected to the transport frame and positioned to abut against the side wall of the transport box, A second lever body is fitted inside the first lever body and is arranged to slide linearly with respect to the first lever body, A retaining plate connected to the second lever body and separated from one end of the first lever body, for contacting and securing the transport box, A transport vehicle according to claim 4, including the following:

6. The transport vehicle according to claim 5, wherein a rotating shaft member is further included between the first lever body and the transport frame, and the first lever body is arranged to rotate by the rotating shaft member so as to unfold parallel to the outside of the transport frame or to rotate so as to stand perpendicular to the transport frame.

7. A vibration absorption module is provided between the transport frame and the plurality of wheels. The aforementioned transport frame is A vibration detection module for detecting vibration information generated by the feedback of the vibration absorption module, A microcontroller that transmits the aforementioned vibration information to a cloud server for processing, A transport vehicle according to claim 4, including the following:

8. The transport vehicle according to claim 4, wherein the transport frame is further provided with a plurality of positioning elements for positioning the transport box on the transport frame.

9. The bottom of the transport box has a positioning groove, The transport vehicle according to claim 8, wherein the plurality of positioning elements are positioning pins and are arranged to be inserted into the positioning grooves.

10. The transport vehicle according to claim 1, further comprising a transport vehicle docked to the gas receiving equipment and having a gas filling module positioned for supplying the gas and transporting it into the transport box via the gas connection port and the gas valve port, and a chamber for mounting the mobile transport device.

11. The transport vehicle according to claim 1, wherein the gas receiving equipment includes an internal flow path that communicates with the gas connection port.

12. The aforementioned gas filling module is A humidity sensing module is positioned to measure humidity information inside the transport box, A microcontroller coupled to the humidity detection module for storing the humidity information and sending it to a cloud server for processing, A transport vehicle according to claim 1, including the following:

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