A method for providing a chromatic confocal measuring device and measuring light for the device.
The illumination assembly efficiently converts pump light into polychromatic measurement light using a simplified design with an aperture and photoluminescent component, improving intensity and spatial distribution while reducing complexity.
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- LMI TECH INC
- Filing Date
- 2022-04-11
- Publication Date
- 2026-06-30
AI Technical Summary
Existing illumination systems for optical measurement devices, such as chromatic confocal measurement devices, lack efficiency in converting pump light into polychromatic measurement light and require complex components.
An illumination assembly comprising an aperture component with orifices, a photoluminescent component, and a substrate, where pump light is directed through the aperture to convert into polychromatic measurement light, which then passes through the same orifice, utilizing a beam splitter or dichroism filter for efficient light conversion and focusing.
The assembly achieves high-intensity, homogeneous illumination with less complex components, allowing for effective cooling and efficient light conversion, enhancing the measurement light intensity and spatial distribution.
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Abstract
Description
Technical Field
[0006] , , ,
[0001] Generally, the present invention relates to optical measurement. More specifically, without limitation, the present invention relates to a light-emitting based illumination assembly for providing measurement light. Further, the present invention relates to a method for providing measurement light and an optical measurement device.
Background Art
[0002] There are various designs of illumination arrangements for providing measurement light for optical measurement devices. For example, Patent Document 1 discloses a light-emitting based light source used in a chromatic confocal measurement device, and this light source includes a light-emitting group whose elongated emission surface emits multi-color measurement light when the light-emitting group is illuminated by pump light. However, there is still a need to improve the operating efficiency when providing light-emitting based measurement light.
Prior Art Documents
Patent Documents
[0003]
Patent Document 1
Summary of the Invention
[0004] According to the present invention, an illumination assembly for providing measurement light, a related method, and a measurement device using the measurement light are provided in the independent claims. Some advantageous embodiments of the present invention are disclosed particularly in the dependent claims. An aspect of the present application is to advance the technology of illumination and optical measurement systems.
[0005] Another aspect of the present application is to provide at least the advantages described herein, in whole or in part.
[0006] An illumination assembly is provided for providing measurement light for an optical measuring device, comprising an aperture component having a first side and a second side opposite it and at least one orifice, at least one pump light source for providing pump light, and a photoluminescent component. The photoluminescent component is located on the second side of the aperture component and is configured to convert pump light receivable on the photoluminescent component from at least one pump light source into polychromatic measurement light. At least a portion of the polychromatic measurement light is arranged to pass from the second side of the aperture component through at least one orifice to provide measurement light to the first side of the aperture component. In this illumination assembly, the pump light source is located on the first side of the aperture component.
[0007] An illumination assembly is provided in which a pump light and a measurement light may be arranged to pass through the same at least one orifice of an aperture component. The pump light may be arranged to pass through the orifice from a first side, and the measurement light may be configured to pass through the orifice from a second side of the aperture component.
[0008] An illumination assembly is provided in which the material of the aperture component can be transparent to pump light and opaque to measurement light.
[0009] An illumination assembly is provided in which a second side of the aperture component may be at least partially reflective to pump light and / or measurement light.
[0010] A lighting assembly is provided, which may further comprise a substrate component attached to the side of the photoluminescent component opposite to the other side of the photoluminescent component toward the second side of the aperture component.
[0011] A lighting assembly is provided in which an aperture component, a photoluminescent component, and a substrate component are mounted to each other such that the photoluminescent component is at least partially sandwiched between a substrate component and an aperture component, thereby forming a multilayer structure.
[0012] A lighting assembly is provided, which may further include an optical connection component disposed on the first side of an aperture component, such that pump light can be input to and directed into at least one orifice via a connection component.
[0013] An illumination assembly is provided in which the connecting component may be a beam splitter or a dichroism filter, and measurement light can pass through the connecting component.
[0014] A lighting assembly is provided in which the connecting components may be mirrors or optical fibers.
[0015] A lighting assembly is provided in which at least one orifice may be a point orifice.
[0016] A lighting assembly is provided in which at least one orifice may be a slit-shaped orifice.
[0017] A lighting assembly is provided in which the aperture component may comprise a masking layer, preferably a metal film layer, on a photoluminescent component, which is preferably produced by vapor deposition technology.
[0018] A lighting assembly is provided which further comprises a light-transmitting substrate positioned on the first side of an aperture component, wherein the aperture component has a masking layer, preferably a metal film layer, on the side of the transparent substrate facing the light-emitting component. The masking is preferably generated by vapor deposition technology.
[0019] An optical measuring device for determining an object to be measured is provided, and the optical measuring device comprises a lighting assembly according to the present invention.
[0020] An optical measuring device is provided, wherein the optical measuring device may include an imaging optical system, and the pump light supplied from a pump light source is input and directional through the imaging optical system via a connecting component, and is therefore focused to at least one orifice through the imaging optical system, and the measuring light that has passed through the at least one orifice is collectible by the imaging optical system, such that at least one pump light source, a connecting component of the illumination assembly, and the imaging optical system of the measuring device are arranged with respect to at least one orifice of the illumination assembly.
[0021] An optical measuring device is provided, which may be a chromatic confocal measuring device for determining one or more properties of the surface of an object. The properties to be determined may be, for example, distance, height or position, refractive index, thickness, reflectance, or roughness.
[0022] An optical measuring device is provided, which may be a spectroscopic measuring device for determining the transmission spectrum or reflection spectrum of an object, or the color of the surface of an object.
[0023] Furthermore, a method for providing measurement light is provided, which includes at least directing pump light from at least one pump light source through at least one orifice of the aperture component onto a photoluminescent component located on a second side of the aperture component; converting a portion of the pump light into multicolor measurement light in the light-emitting component; and providing the measurement light to a first side of the aperture component by enabling a portion of the measurement light to pass through at least one orifice of the aperture component.
[0024] In this specification, a photoluminescence component means a piece of material, such as a plate, layer, slab, or coating, that contains or consists of at least one single crystal or pressed powder, sputter powder, or spray powder of a fluorescent substance, luminescent substance, and luminescent group substance. The photoluminescence component is designed to receive electromagnetic radiation such as pump light of a specific wavelength, and in the phosphorescence process and / or fluorescence process, it can convert the pump light absorbed by the photoluminescence component into light in a wider wavelength band (i.e., polychromatic light).
[0025] The present invention can cover the orifice of the aperture component and thus accurately focus the pump light to cover the area of the light-emitting component behind the orifice, and can provide measurement light with as high an intensity as possible while directing the pump light to the aperture component, providing advantages over known prior art.
[0026] Another advantage of the present invention is that it can make it possible to change the spatial intensity distribution of the measurement light provided through the orifice of the aperture component.
[0027] Yet another advantage of the present invention is that the pump light can be directed to the light-emitting component, and a homogeneous illumination area that is densely focused can be created on the surface of the light-emitting component that essentially corresponds to the form and area of the orifice through which the measurement light can pass, making it possible to provide pump light with high efficiency and high radiance.
[0028] Yet another advantage of the present invention is that it can make it possible to provide the measurement light essentially defined in the form or shape of the orifice.
[0029] Yet another advantage of the present invention is that it can make it possible to configure an illumination assembly with a smaller number and / or less complex components than required for a conventional illumination assembly or luminescent group / luminescent light source to provide the measurement light.
[0030] Another advantage of the present invention is that cooling of the light-emitting components can be carried out more effectively, and the cooling required for the light-emitting components may be less than that of conventional lighting assemblies or light phospho / light sources that utilize transmitted light to provide measurement light.
[0031] Another advantage of the present invention is that the imaging optical system of the measuring device used can be used to collect pump light and focus it onto the light-emitting component, and to collect measurement light that has passed at least through the orifice.
[0032] In this specification, the expression "several" may refer to any positive integers starting from 1.
[0033] The expression "multiple" can refer to any positive integer starting from 2.
[0034] The terms “first” and “second” are used in this specification to distinguish one element from another, unless otherwise explicitly stated, and are not used to prioritize or order such elements.
[0035] The considerations presented above with respect to various forms of lighting assemblies can be flexibly applied to forms of this method with necessary modifications, as will be recognized by those skilled in the art, and vice versa.
[0036] The embodiments in the following detailed description are given merely as examples, and those skilled in the art will be able to implement the basic concepts of the present invention in several other ways besides those described herein. Most embodiments can be realized in various combinations with other embodiments. This description may refer to one or more specific embodiments in several places, but this does not mean that such references are limited to one described embodiment or that the described characteristics are applicable only to one described embodiment. Individual characteristics of multiple embodiments can be combined, and thus new embodiments of the present invention may be provided. [Brief explanation of the drawing]
[0037] The aforementioned and other objects, features, and further advantages of the present invention will become apparent from the following more specific description of embodiments of the invention, as illustrated by the accompanying drawings (the elements of the drawings are not necessarily to scale with respect to one another).
[0038] [Figure 1a] This illustrates one embodiment of a lighting assembly according to the present invention and illustrates the general concept of an assembly. [Figure 1b] This illustrates one embodiment of a lighting assembly according to the present invention, illustrating the concept of directing pump light to a light-emitting component through at least one orifice of an aperture component. [Figure 1c] This illustrates one embodiment of a lighting assembly according to the present invention, illustrating the concept of providing measurement light through at least one orifice of an aperture component. [Figure 2] Examples of modified forms of the lighting assembly according to the present invention are shown. [Figure 3a-3b] Examples of aperture component embodiments are provided. [Figure 3c-3d] Examples of aperture component embodiments are provided. [Figure 4a] Further variations of the lighting assembly of the present invention are illustrated below. [Figure 4b]Further variations of the lighting assembly of the present invention are illustrated below. [Figure 4c] Further variations of the lighting assembly of the present invention are illustrated below. [Figure 5] This is a flowchart disclosing one embodiment of the method according to the present invention. [Modes for carrying out the invention]
[0039] In each drawing, the same or corresponding parts are represented by the same reference number, and in most cases, the accompanying textual description is also omitted.
[0040] Figures 1a to 1c illustrate, by schematic side views, many general concepts of various embodiments of the present invention through one merely exemplary realization of an illumination assembly 200 for providing measuring light according to the present invention.
[0041] Figures 1a and 1c, and Figures 4a to 4c also show an illumination or imaging optical system 302, which is not part of the depicted illumination assembly embodiment but can be incorporated into a measuring device using the measuring light provided by the illumination assembly according to the embodiment. The imaging optical system 302 may include several lenses and / or other optical components.
[0042] Figure 1a shows that the assembly 200 includes an aperture component 202 having at least one orifice 204 and a first side and a second side opposite it, a photoluminescent component 208, and at least one pump light source 206 positioned on the first side of the aperture component 202. One side of the photoluminescent component 208 faces the second side of the aperture component 202. The pump light source 206 can direct pump light 220 from the pump light source 206 to the light-emitting component 208, thereby emitting pump light 220 so that it passes through the orifice 204 of the aperture component 204, and is positioned relative to the first side of the aperture component 202. In other words, pump light 220 can enter the light-emitting component 208 through at least the orifice 204 of the aperture component 202.
[0043] When pump light 220 containing a first wavelength enters the light-emitting component 208, the light-emitting component 208 converts the pump light (or at least a portion thereof) into polychromatic measurement light 230. The polychromatic measurement light 230 may typically include a spectrum with wavelengths longer than the wavelength of the pump light 220. A portion of the polychromatic measurement light 230 passes through at least one orifice 204 to reach the first side of the aperture component 204. As shown in the figure, the imaging optical system 302 of a measuring device utilizing the pump light source 206 and the measurement light 230 provided to the first side of the aperture component 202 may be positioned relative to at least one orifice 204 such that the measurement light 230 that has passed through at least one orifice 204 can be collected by the imaging optical system 302. The collected measurement light 230 may be further focused onto an illuminated object (not shown) by the imaging optical system 302 or other optical systems of the measuring device.
[0044] The pump light source 206 may comprise a laser or LED configured to provide pump light characterized by wavelengths that cause a desired conversion of the pump light 220 to the measurement light 230 in the photoluminescent component 208 (for example, by a phosphorescent or fluorescence process, depending on the embodiment). The pump light is typically nearly monochromatic.
[0045] The pump light 220 and the measurement light 230 can be arranged such that the pump light from the first side and the measurement light from the second side of the aperture component pass through the same at least one orifice 204 of the aperture component 202, respectively.
[0046] The lighting assembly may include multiple pump light sources 206. For example, if the aperture component 202 has multiple orifices 204, multiple pump light sources 206 can be present to direct the pump light 220 through the multiple orifices 204 to the light-emitting component 208, and thus provide measurement light 230 from the multiple orifices 204.
[0047] In one embodiment, a plurality of pump light sources 206 are arranged to illuminate the same pump light 220 through at least one slit-shaped orifice 204 or a group of point-shaped orifices 204, thereby increasing the luminous energy and / or radiant energy per unit on the light-emitting components 208 on the back of the orifice 204, and thus increasing the intensity and / or radiance of the pump light 230 passing through the corresponding orifice 204.
[0048] In one embodiment, each of the first number of pump light sources 208 is configured to direct the pump light 220 to a first number of orifices 204, and each of the second or further number of pump light sources 208 is configured to direct the pump light 220 to a second or further number of orifices 204. In this embodiment, the position from which the converted measurement light 230 is provided from the aperture component 202 can be adjusted by adjusting the orifice from which the converted measurement light 230 is provided, and thus the pump light sources configured to direct the pump light to different orifices 208.
[0049] The orifice 204 can be a point or slit orifice. In this context, a slit orifice means an elongated slit or opening that can be formed in a straight or curved shape in the aperture component 202.
[0050] In practice, the orifice 204 is configured to define and provide the measuring light 230 passing through the orifice 204 in essentially the form or shape of the orifice 204.
[0051] The slit-shaped orifice 204 can, for example, have a width of 10 μm and an opening length of 10 mm in the aperture component. Those skilled in the art will recognize that such dimensions of the orifice 204 may actually vary from embodiment to embodiment.
[0052] In some embodiments, the aperture component 202 may comprise a plurality of point orifices and / or slit orifices. The point orifices may be arranged linearly or in other shapes.
[0053] Figure 1b illustrates the direction of pump light 220 from the pump light source 206 to the illumination assembly 200 (for clarity, the measurement light 220 is not shown). Figure 1b shows that the illumination area or spot of pump light 220 from each pump light source 206 covers at least the shape of the orifice 204. Thus, the pump light source 206 can be equipped with an optical system and / or arranged so that it can create a densely focused, homogeneous illumination spot of pump light 220 that covers the entire area of the orifice 204. However, to increase illumination efficiency, it is advantageous to create this illumination spot in such a way that a very small portion of the pump light 220 hits the aperture component 202, and the majority of the pump light 220 enters the light-emitting component 208 directly through the orifice.
[0054] When pump light 220 from at least one pump light source 206 is directed to an aperture component 202 and at least one orifice 204 therein, some of the pump light 220 may be reflected from the edge of at least one orifice 204 or from the first side surface of the aperture component 208. However, those skilled in the art will recognize that such reflected pump light 220 can be removed, for example by filtering means, to prevent the reflected pump light 220 from entering the object being illuminated by the measuring light 230.
[0055] Figure 1c illustrates the passage of measurement light 230 through the orifice 204 (for clarity, the pump light source 204 is not shown). In this figure, a gap exists between the aperture component 202 and the light-emitting component 208 to simply show that the imaging optical system 302 of the measuring device utilizing the measurement light 230 collects the measurement light 230 passing through the orifice 204 from a region of fluorescent material 208 on the back of the orifice 204 that is wider than the region of the orifice 204. Therefore, in order to improve the efficiency of the illumination assembly, it is advantageous to arrange the light-emitting component 208 in direct contact with the aperture component 202 to form the narrowest possible aperture component 204.
[0056] Since the orifice 204 can be positioned very close to the photoluminescent component 208 and at least one of the orifices 204 within it, the orifice 204 essentially defines the shape of the radiation region of the measurement light 230 that corresponds to the shape of the orifice 204. This allows for the efficiency of the assembly and the maximization of the intensity of the measurement light 230 delivered through the orifice 204.
[0057] Figure 2 shows a modified form 300 of the lighting assembly, which differs from the embodiments 200 in Figures 1a to 1c in that it includes a substrate component 210 attached to the opposite side of the photoluminescent component 208, facing the second side of the orifice 204 and aperture component 202.
[0058] The substrate component 210 can support the photoluminescent component 208. 210 can be a metallic substrate, such as copper, and allows for the positioning of the photoluminescent component 208 and efficient cooling when illuminated (i.e., irradiated) by the pump light 220.
[0059] As shown in Figure 2, the aperture component 202, the photoluminescence component 208, and the substrate component 210 can be connected to each other such that the photoluminescence component 208 is at least partially sandwiched between the substrate components.
[0060] Figures 3a to 3d illustrate embodiments of the aperture component 202.
[0061] Figure 3a shows an aperture component 202, which may be a component of an opaque material such as metal, preferably a thin layer or film, and comprises at least one orifice 204. As motivated above, the aperture component 202 is advantageously mounted directly to the surface of the light-emitting component 208. The aperture component 202 can be mounted to the light-emitting component 208 such that an adhesive layer or the like exists between the aperture component 202 and the light-emitting component 208.
[0062] Figure 3b illustrates a further embodiment of the aperture component 202. The shown design incorporates a light-transmitting substrate 214. In this design, the light-transmitting substrate 214 is a layer that is equally transparent to the pump light 220 and the measurement light 230, and as shown in Figure 3b, the aperture component is a masking layer, preferably a thin metal layer or other material layer, on the side of the light-emitting component 208 of the light-transmitting substrate 214. For example, a masking layer having at least one orifice 204 can be formed directly on the surface of the light-transmitting substrate 214 by a deposition process. This design allows for the formation of the aperture component 202 (i.e., the masking layer) and the formation of at least one orifice 204 on it to be very thin.
[0063] Alternatively, the aperture component 202 can be formed on the other side of the substrate 214 opposite to the side facing the light-emitting component 208. However, this is undesirable because the substrate 214 is present between the aperture component 202 and the light-emitting component 208, which reduces the efficiency of the illumination of the pump light 220 per unit area on the light-emitting component 208 and the intensity of the measurement light 230 provided through the orifice 204.
[0064] Figure 3c illustrates a further embodiment of the aperture component 202. In this design, the aperture component 202 comprises a masking layer, preferably a metal layer or other material layer, formed, for example, by a direct deposition process onto the surface of the photoluminescent component 208. This design has the advantage that the aperture component 202 (i.e., the masking) and at least one orifice 204 within it can be formed very thinly and essentially at the surface level of the photoluminescent component 208.
[0065] Figure 3d illustrates a further embodiment of the aperture component 202. In this design, the light-emitting component 208 extends to the orifice 204 of the aperture component 204, thereby blocking the orifice. Thus, the first surfaces of the light-emitting component 208 and the aperture component are essentially at the same level, i.e., the thickness of the aperture component is actually zero. This design can be manufactured, for example, by packing the powder material of the light-emitting component 208 into the orifice 204, or by machining either or both of the light-emitting component 208 or the aperture component 202.
[0066] In a further embodiment, the material of the aperture component 202 is configured to be transparent to the pump light 220 and opaque to the measurement light 230. This design allows essentially all of the pump light 220 to be used to illuminate the light-emitting component 208, and thus allows for increased light conversion efficiency and intensity to the measurement light 230.
[0067] In a further embodiment, the second side of the aperture component 202 is configured to be at least partially reflective to the pump light 220 and / or measurement light 230.
[0068] Figures 4a to 4c illustrate further variations of the lighting assembly.
[0069] Figure 4a shows a lighting assembly 400 equipped with multiple pump light sources 206. As shown in the drawing, the pump light sources 206 can be arranged so that the pump light 220 is directed to the orifice 204 from different locations and angles. By irradiating the photoluminescent component 208 with multiple pump light sources 206, the amount of pump light 220 per unit area on the light-emitting component can be further increased, and therefore the light conversion from pump light 220 to measurement light 230 and the intensity of the measurement light 230 can be increased.
[0070] Figure 4b shows the lighting assembly 500, which differs from the lighting assembly 200 in that it further includes an optical connection component 212. The connection component 212 is positioned on the first side of the aperture component 202 such that pump light 220 from the pump light source 206 can be input and directed to at least one orifice 204 via the connection component 212.
[0071] The connecting component 212 can be a beam splitter or dichroism filter positioned on the first side of the aperture component 202, such that the pump light 220 from the pump light source 206 can be reflected from (i.e., through) the beam splitter 212 to the orifice 204 and further enter the photoluminescence component 208 on the back of the aperture component 202, and the measurement light 230 emitted from the light-emitting component 208 can be transmitted through the connecting component 212.
[0072] Alternatively, the connecting component 212 may be a mirror or optical fiber positioned so as not to obstruct the propagation of the measurement light 230.
[0073] Figure 4c shows illumination assembly 600, which differs from assembly 500 in that the pump light source 208 and optical connection component 208 are configured to provide pump light 220 inside a measuring device that utilizes measurement light. In this design, the pump light source 206, connection component 212, and imaging optical system 302 are arranged for at least one orifice 204 such that pump light 220 from the pump light source 206 can be input and directed through the connection component 212 and further through the imaging optical system 302. The imaging optical system is configured to focus the pump light 220 onto at least one orifice 204 through the imaging optical system 302, and the measurement light 230 that has passed through at least one orifice 204 can be collected by the imaging optical system 302. In this design, it is not necessarily required to incorporate the optical system into the pump light source 206. However, when the optical system is incorporated into the pump light source 206, the illumination spot of the pump light 220 can be formed by a combination of the optical systems of the imaging optical system 302 and the pump light source 206.
[0074] In the design of Figure 4c, the imaging optical system 302 of the measuring device can be used to collect pump light 220 from at least one pump source 206 and focus it onto the light-emitting component 208, and to collect measurement light 230 that has passed through at least the orifice 204, which can be further focused onto the object being illuminated via the imaging optical system. This is an obvious advantage, which cannot be achieved by conventional illumination assemblies where it is impossible for the pump light and measurement light to pass through the same orifice.
[0075] As described above, the lighting assembly according to the present invention can be incorporated into an optical measuring device for providing measuring light 230 for an optical measuring device.
[0076] Generally, the lighting assemblies according to the present invention and disclosure can utilize reflected light emission when converting the pump light 220 into the measurement light 230 in the light-emitting component 208 for providing the measurement light 230.
[0077] The illumination assembly according to the present invention can be incorporated into an optical measuring device selected from the group consisting of a hyperspectral camera or scanner, a pushbloom hyper or multispectroscanner, a spectrometer, or a chromatic confocal measuring device for providing measurement light 230.
[0078] Generally, the illumination assembly according to the present invention can be incorporated into an optical measuring device that characterizes an object illuminated by multicolor measuring light that has passed through at least one orifice or slit.
[0079] The lighting assembly according to the present invention can be incorporated into a chromatic confocal measuring device, such as the one disclosed in, for example, Japanese Patent Application Publication No. EP2076733 or US8786836.
[0080] Figure 5 includes a flowchart 700 disclosing one embodiment of the method according to the present invention. This method involves the following actions, namely: Action 704: Directing the pump light 220 from at least one pump light source 206 through at least one orifice 204 of the aperture component 202 onto a photoluminescent component 208 located on the second side of the aperture component 202, wherein the pump light 220 is directed from the first side to the second side of the aperture component 202. Action 706: In the light-emitting component (208), convert the pump light 220 into multicolor measurement light 230, Action 708: Provide the measurement light 230 to the first side of the aperture component 202 by enabling the measurement light 230 to pass through the aperture component 202 through at least one orifice 204. Includes.
[0081] In one embodiment of the method, the pump light 220 and the measurement light 230 can be arranged to pass through the same at least one orifice 204 of the aperture component 202.
[0082] In one embodiment of the method, the material of the aperture component 202 may be transparent to the pump light 220 and opaque to the measurement light 230.
[0083] In one embodiment of the method, the second side of the aperture component 202 may be at least partially reflective to the pump light 220 and / or measurement light 230.
[0084] In one embodiment, the lighting assembly may further include a substrate component 210 attached to the side of the photoluminescent component 208 opposite to the other side of the photoluminescent component 208 facing the second side of the aperture component 202.
[0085] In one embodiment, the aperture component 202, the photoluminescent component 208, and the substrate component 210 are attached to each other such that the photoluminescent component 208 is at least partially sandwiched between the substrate component 210 and the aperture component 202, thereby forming a multilayer structure.
[0086] In one embodiment, the assembly may further include a connecting component 212 disposed on the first side of the aperture component, such that the pump light 220 can be input to at least one orifice 204 via a connecting component.
[0087] In one embodiment of the method, the connecting component 212 can be a beam splitter or a dichroism filter, and the measurement light 230 can pass through the connecting component 212.
[0088] In one embodiment of the method, the connecting component 212 can be a mirror or an optical fiber.
[0089] In one embodiment of the method, at least one orifice 204 can be a point orifice.
[0090] In one embodiment of the method, at least one orifice 204 is a slit-shaped orifice.
[0091] In one embodiment of the method, the aperture component 202 may include a masking layer, preferably a metal film layer, on the photoluminescent component 202, which is preferably produced by vapor deposition technology.
[0092] In one embodiment, the lighting assembly may further include a light-transmitting substrate 214 positioned on the first side of the aperture component 202, the aperture component having a masking layer, preferably a metal film layer, on the side of the transmissive substrate 214 facing the light-emitting component 208. The masking is preferably generated by vapor deposition technology.
[0093] The present invention has been described above with reference to the embodiments described above, and several advantages of the present invention have been demonstrated. The present invention is not limited to these embodiments, and it is clear that the concepts of the present invention can be applied in numerous ways within the scope of the claims.
[0094] The features and dependent claims described in the various embodiments above can be freely combined with each other unless otherwise explicitly stated.
Claims
1. A chromatic confocal measuring device for determining one or more properties of the surface of an object, The chromatic confocal measuring device includes an illumination assembly, The aforementioned lighting assembly body, - An aperture component (202) having a first side and a second side on the opposite side and at least one orifice (204), - At least one pump light source (206) for providing pump light (220), - A photoluminescent component (208) located on the second side of the aperture component (202) for converting pump light (220) receivable on the photoluminescent component (208) from at least one pump light source (206) into multicolor measurement light (230) and Equipped with, A portion of the multicolor measurement light (230) can pass through the aperture component (202) via the at least one orifice (204) and provide the measurement light (230) to the first side of the aperture component (202). The pump light source (206) is positioned on the first side of the aperture component (202), A chromatic confocal measuring device in which the at least one orifice (204) comprises one slit-shaped orifice or a plurality of point-shaped orifices.
2. The chromatic confocal measuring apparatus according to claim 1, wherein the pump light (220) and the measurement light (230) are capable of passing through the same at least one orifice (204) of the aperture component (202).
3. The chromatic confocal measuring apparatus according to claim 1 or 2, wherein the material of the aperture component (202) is transparent to the pump light (220) and opaque to the measurement light (230).
4. The chromatic confocal measuring apparatus according to claim 1 or 2, wherein the second side of the aperture component (202) is at least partially reflective to the pump light (220) and / or the measurement light (230).
5. The chromatic confocal measuring apparatus according to claim 1, wherein the lighting assembly further comprises a substrate component (210) attached to one side of the photoluminescence component (208), the one side being opposite to the other side of the photoluminescence component (208) toward the second side of the aperture component (202).
6. The chromatic confocal measuring apparatus according to claim 5, wherein the aperture component (202), the photoluminescent component (208), and the substrate component (210) are attached to each other such that the photoluminescent component (208) is at least partially sandwiched between the substrate component (210) and the aperture component (202) to form a multilayer structure.
7. The chromatic confocal measuring apparatus according to claim 1, wherein the illumination assembly further comprises the optical connection component (212) disposed on the first side of the aperture component (202) such that the pump light (220) can be input to the at least one orifice (204) via the optical connection component (212).
8. The optical connection component (212) is a beam splitter or a dichroism filter, The chromatic confocal measuring apparatus according to claim 7, wherein the measurement light (230) is capable of passing through the optical connection component (212).
9. The chromatic confocal measuring apparatus according to claim 7, wherein the optical connection component (212) is a mirror or an optical fiber.
10. The chromatic confocal measuring apparatus according to claim 1, wherein the aperture component (202) comprises a masking layer on the photoluminescence component (208).
11. The lighting assembly further comprises a light-transmitting substrate (214) positioned on the first side of the aperture component (202), The chromatic confocal measuring apparatus according to claim 1, wherein the aperture component (202) is provided with a masking layer on one side of the light-transmitting substrate (214) facing the photoluminescence component (208).
12. The chromatic confocal measurement device includes an imaging optical system (302), The chromatic confocal measuring apparatus according to claim 7, wherein the pump light source (206), the connecting component (212), and the imaging optical system (302) are arranged relative to the at least one orifice (204), so that the pump light (220) can be input through the imaging optical system (302) via the connecting component (212) and focused through the imaging optical system (302) to the at least one orifice (204), and the measurement light (230) that has passed through the at least one orifice (204) can be collected by the imaging optical system (302).
13. The chromatic confocal measuring device according to claim 1, wherein the chromatic confocal measuring device is a spectroscopic measuring device for determining the transmission spectrum or reflection spectrum of the object or the color of the surface of the object.
14. A method for providing measuring light for a chromatic confocal measuring device for determining one or more properties of the surface of an object, - Directing the pump light (220) onto the photoluminescent component (208), wherein the pump light (220) is directed from the first side to the second side of the aperture component (202), and the photoluminescent component (208) is positioned on the second side of the aperture component (202), - The photoluminescent component (208) converts the pump light (220) into multicolor measurement light (230), - To provide the measurement light (230) to the first side of the aperture component (202) by enabling the measurement light (230) to pass through the aperture component (202) through at least one orifice (204) and Includes, A method wherein the at least one orifice (204) comprises one slit-shaped orifice or a plurality of point-shaped orifices.