Scrap material processing equipment

Abstract

To provide an offcut processing device capable of collecting and efficiently disposing an offcut generated by processing a workpiece while reducing manual labor by a worker.SOLUTION: An offcut processing device 40 processes an offcut W2 discharged when processing a CSP substrate W by a cutting device (processing device) 1 that processes a CSP substrate (workpiece) W with a cutting blade (processing tool) 21 while supplying processing fluid. The offcut processing device includes two gripping portions 52 and 53 gripping both ends of the opening of a bag B, an OPEN mechanism 80 that opens the opening of the bag B by bringing the grips 52 and 53 close to each other such that the offcut W2 can be thrown into the bag B, and a heater (CLOSE mechanism) 54 that closes the opening of the bag B into which the offcut W2 are placed.SELECTED DRAWING: Figure 3

Description

Technical Field

[0006] , ,

[0001] The present invention relates to an end material processing apparatus for processing end materials of a workpiece generated by processing the workpiece with a processing apparatus.

Background Art

[0002] For example, in the manufacturing process of semiconductor devices, the surface of a resin substrate (hereinafter referred to as "CSP substrate") is partitioned into a number of rectangular regions by division planned lines (hereinafter referred to as "streets") arranged in a grid pattern, and devices such as ICs and LSIs are formed in each rectangular region. Then, by cutting the CSP substrate on which a number of such devices are formed along the street with a cutting blade of a cutting device called a dicing saw, a plurality of semiconductor chips are formed (see, for example, Patent Document 1).

[0003] By the way, when cutting a CSP substrate or the like along a street while supplying a cutting fluid with a cutting blade of a cutting device, end materials are generated at the periphery (surplus portion) of the CSP substrate, and there is a problem that this end material scatters around together with the cutting fluid and contaminates the surroundings.

[0004] Therefore, Patent Document 2 proposes a cutting device provided with an end material processing means for collecting the end material together with the cutting fluid, separating the end material from the cutting fluid by centrifugal force, and drying it.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the cutting apparatus equipped with a scrap material processing means proposed in Patent Document 2, the scrap material adheres to the side wall of the scrap material processing means due to the surface tension of the cutting fluid. Therefore, the worker has to peel off and remove the attached scrap material by hand, and then put the removed scrap material into a bag or the like for disposal. Such manual work is not only troublesome and places a great burden on the worker, but it also has the problem of poor work efficiency.

[0007] The present invention has been made in view of the above problems, and its purpose is to provide a scrap material processing device that can collect and efficiently dispose of scrap materials generated by the processing of a workpiece while reducing manual labor by workers. [Means for solving the problem]

[0008] To achieve the above objective, the present invention is a scrap material processing device for processing scraps of a workpiece that are discharged when processing a workpiece with a processing tool while supplying a processing fluid, comprising: two gripping parts that grip both ends of the opening of a bag; an OPEN mechanism that brings the gripping parts close together to open the opening so that scraps can be put into the bag; and the bag into which the scraps have been put. Seal CLOSE mechanism, A basket that moves between the processing device and the top of the opening of the bag to receive scrap material from the processing device, a moving mechanism for moving the basket, and a dropping mechanism for dropping the scrap material from the basket, which has moved to the top of the opening, into the bag. It is characterized by being equipped with [the following features]. [Effects of the Invention]

[0009] According to the present invention, the opening of a bag, which is gripped at both ends by two gripping parts, can be opened by the OPEN mechanism, scrap material can be put into the bag through the opened opening, and then the opening of the bag can be closed by the CLOSE mechanism, thereby reducing manual labor by the worker and enabling the efficient collection and disposal of scrap material generated from the processing of the workpiece. [Brief explanation of the drawing]

[0010] [Figure 1] This is a perspective view of a cutting apparatus equipped with a scrap material processing device according to the present invention. [Figure 2] This is a perspective view of the CSP substrate and mounting jig. [Figure 3] It is a perspective view showing the basic configuration of the waste portion of the end material processing apparatus according to the present invention. [Figure 4] It is a side sectional view showing the support structure of the sheet roll in the waste portion of the end material processing apparatus according to the present invention. [Figure 5] It is a plan view of the OPEN mechanism of the end material processing apparatus according to the present invention, where (a) is a view showing the state before opening the opening of the bag, and (b) is a view showing the state after opening the opening of the bag. [Figure 6A] It is a front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6B] It is a front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6C] It is a partial front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6D] It is a partial front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6E] It is a partial front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6F] It is a partial front view showing the operation of the end material processing apparatus according to the present invention. [Figure 6G] It is a partial front view showing the operation of the end material processing apparatus according to the present invention. [Figure 7] It is a plan view showing another form of the OPEN mechanism of the end material processing apparatus according to the present invention, where (a) is a view showing the state before opening the opening of the bag, and (b) is a view showing the state after opening the opening of the bag.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present invention will be described based on the accompanying drawings.

[0012] [Configuration of Cutting Device] First, the configuration of the cutting device provided with the end material processing apparatus according to the present invention will be described.

[0013] FIG. 1 is a perspective view of the cutting device, and FIG. 2 is a perspective view of the CSP substrate and the mounting jig. In the following description, the directions of the arrows shown in FIG. 1 are taken as the X-axis direction (left-right direction), the Y-axis direction (front-back direction), and the Z-axis direction (up-down direction), respectively.

[0014] The cutting device 1 shown in FIG. 1 is a device for cutting the rectangular plate-shaped CSP substrate W shown in FIG. 2, which is a workpiece. The synthetic resin CSP substrate W is partitioned into a plurality of rectangular regions W1 by streets L arranged in a grid pattern. Here, a CSP (Chip Size Package) (not shown) is formed in each rectangular region W1, and a rectangular frame-shaped surplus region R where no CSP is formed is formed at the peripheral portion of the CSP substrate W. When the CSP substrate W is cut along the street L as described later, a plurality of end materials W2 in the shape of rectangular plates are generated in the surplus region R.

[0015] Incidentally, the CSP substrate W is conveyed while being placed on the mounting jig J shown in FIG. 2. This mounting jig J is composed of a rectangular metal plate or the like that is slightly larger than the CSP substrate W. The central portion of the upper surface of this mounting jig J is partitioned into a plurality of rectangular regions J1 by a plurality of grooves K arranged in a grid pattern. Here, the plurality of rectangular regions J1 correspond to the rectangular regions W1 of the CSP substrate W, and the dimensions on the plane of both J1 and W1 are set to be the same.

[0016] In addition, circular suction holes Ja are respectively opened at the central portions of the respective rectangular regions J1 of the mounting jig J, and the plurality of suction holes Ja communicate with one suction groove (not shown) on the back surface of the mounting jig J. The CSP substrate W is placed on the upper surface of the mounting jig J in a state where the rectangular regions W1 and J1 of both W and J coincide, and is carried into the cutting device 1.

[0017] As described above, the cutting apparatus 1 for cutting a CSP substrate W, which is transported in a state where it is placed on the upper surface of a mounting jig J, along the street L, comprises, as shown in Figure 1, a chuck table 10 that holds the CSP substrate W together with the mounting jig J, a moving mechanism (not shown) that moves the chuck table 10 in the X-axis direction (cutting feed direction), a cutting means 20 that cuts the CSP substrate W held on the chuck table 10, and a scrap material processing apparatus 40 according to the present invention for processing the scrap material W2 (see Figure 2) of the CSP substrate W generated by cutting by the cutting means 20.

[0018] Next, the main components of the cutting apparatus 1, namely the chuck table 10, the moving mechanism (not shown), the cutting means 20, and the scrap material processing device 40, will be described in order below.

[0019] (Chuck table) As shown in Figure 1, the chuck table 10 is a rectangular plate-shaped member on the upper surface of the base 2 that is movable in the X-axis direction and has a rectangular suction plate 11 that is larger than the mounting jig J shown in Figure 2. Here, a circular suction port 11a is opened in the center of the suction plate 11, and this suction port 11a is connected to a suction source (not shown), such as a vacuum pump. Therefore, when the mounting jig J on which the CSP substrate W is placed is placed on the suction plate 11, the suction port 11a of the suction plate 11 opens into a suction groove (not shown) formed on the back surface of the mounting jig J. In the above, the CSP substrate W is placed on the mounting jig J and transported to the chuck table 10, but it is also possible to maintain a state in which the mounting jig J is held by suction on the chuck table 10 and transport the CSP substrate W to the mounting jig J. In that case, the suction plate 11 of the chuck table 10 may have a suction port separate from the suction port 11a that holds only the mounting jig J by suction.

[0020] (Movement mechanism) The moving mechanism, not shown in the illustration, is a mechanism that reciprocates the chuck table 10 and the mounting jig J and CSP substrate W held therein in the X-axis direction (cutting feed direction). Although its configuration is not shown and a detailed explanation is omitted, it is composed of a well-known ball screw mechanism or the like arranged inside the base 2.

[0021] (cutting means) A support base 3 is erected at the left end (-X-axis direction end) corner of the base 2, and the cutting means 20 is supported on this support base 3. The cutting means 20 is positioned above the chuck table 10 that moves to the machining position P1 at the machining position P1, and consists of a rotatable spindle (not shown) arranged horizontally in the Y-axis direction (front-back direction), a spindle motor (not shown) that rotates the spindle, and a disc-shaped cutting blade 21 attached to the tip of the spindle. In this embodiment, a washer blade is used as the cutting blade 21, which is made by bonding abrasive grains such as diamond with a binder material.

[0022] Furthermore, as shown in Figure 1, the imaging unit 22 is supported at the lower part of the cantilevered support portion 3a of the support base 3.

[0023] The cutting means 20 configured as described above is index-feeded in the Y-axis direction (forward and backward direction) by an index-feed means (not shown) and moves up and down in the Z-axis direction (cutting direction) by a lifting means (not shown). The lifting means is configured by a well-known ball screw mechanism or the like.

[0024] Incidentally, in the cutting apparatus 1 according to this embodiment, as shown in Figure 1, an operation box 4 is attached to the -Y axis end (front end) of the base 2, and an input means 5 such as a keyboard for inputting various data is provided on this operation box 4. In addition, a monitor device 6 that displays images captured by the imaging unit 22 and cutting conditions of the CSP substrate W is installed on the support base 3.

[0025] (Scrap material processing device) As described later, when the CSP substrate W shown in Figure 2 is cut by the cutting device 1 shown in Figure 1 and the excess region R is removed, multiple scraps W2 are generated in the excess region R. These scraps W2 are collected in a rectangular box-shaped basket C by the collection unit 40A of the scrap processing device 40, and the scraps W2 collected in the basket C are then put into a bag B (see Figures 6F and 6G) ​​by the disposal unit 40B as described later and disposed of together with the bag B.

[0026] The above-mentioned recovery unit 40A recovers the scrap material W2 generated by the cutting of the CSP substrate W by the cutting means 20 together with the cutting debris, and discharges these scrap materials W2 and cutting debris from the discharge port 40a into the basket C. The specific configuration and explanation are omitted.

[0027] As described above, the basket C, which collects the scrap material W2 and cutting chips, is transported to the waste disposal section 40B and put into a bag B that is made in the waste disposal section 40B. The scrap material and cutting chips put into bag B are then disposed of together with bag B, but the details of the waste disposal section 40B will be described later. The bottom plate C1 of the basket C is rotatable around a hinge 7, and as described later, when the basket C is moved to the waste disposal section 40B by a moving mechanism (not shown) and the scrap material W2 collected in the basket C is put into bag B, the bottom plate C1 of the basket C rotates around the hinge 7 and opens, and the scrap material W2 falls from the basket C into bag B and is dropped into bag B. In other words, the bottom plate C1 of the basket C constitutes a dropping mechanism that drops the scrap material W2 in the basket C into bag B.

[0028] [Operation of cutting equipment] Next, the operation of the cutting device 1 configured as described above will be explained.

[0029] During the cutting process of the CSP substrate W using the cutting device 1, the mounting jig J (see Figure 2) on which the CSP substrate W is placed is transported to the chuck table 10 waiting at the transfer position P2 shown in Figure 1, and the mounting jig J is placed on the suction platen 11 of the chuck table 10 together with the CSP substrate W. At this time, the suction port 11a opening to the suction platen 11 communicates with a suction groove (not shown) formed on the back surface of the mounting jig J and a plurality of suction ports Ja (see Figure 2) opening to the suction groove, so that the upper surface of the suction platen 11 is evacuated by a suction source (not shown). As a result, the mounting jig J placed on the suction platen 11 is held in place by suction to the upper surface of the suction platen 11 due to negative pressure, and the CSP substrate W is held in place by suction to the mounting jig J.

[0030] As described above, once the CSP substrate W is held in place by suction on the chuck table 10 together with the mounting jig J, the chuck table 10, which is located at the handover position P2, moves in the -X axis direction toward the processing position P1 shown in Figure 1 by a moving mechanism (not shown).

[0031] On the other hand, at the processing position P1 shown in Figure 1, once an image is obtained by imaging the surface of the CSP substrate W with the imaging unit 22, the street L to be cut is detected by pattern matching processing based on that image. Once the street L of the CSP substrate W is detected in this way, the position of the cutting blade 21 in the Y-axis direction (indexing direction) is determined, and the position of the cutting blade 21 in the Y-axis direction is aligned with the position of the street L to be cut on the CSP substrate W by an index feeding means (not shown).

[0032] Then, from the above state, the cutting blade 21 is driven to rotate at high speed, and is lowered by a predetermined cutting depth by a lifting mechanism (not shown), while the chuck table 10 and the CSP substrate W held therein move in the -X axis direction by a moving mechanism (not shown). In addition, cutting fluid is sprayed toward the cutting blade 21 from a cutting fluid supply source (not shown).

[0033] Then, at the processing position P1, the CSP substrate W, held together with the mounting jig J on the chuck table 10, is cut along the street L by the cutting blade 21 while receiving a supply of cutting fluid.

[0034] Then, once the above cutting process is performed on the CSP substrate W along all streets L in one direction, the chuck table 10 and the CSP substrate W it holds are rotated by 90° by a rotating mechanism (not shown), and cutting is similarly performed on the CSP substrate W along the other street L perpendicular to the street L where cutting has been completed. When cutting along all streets L of the CSP substrate W is completed, multiple chips, each with a device mounted on it, are obtained.

[0035] As described above, the scrap material W2 and cutting debris generated by cutting the CSP substrate W are collected in a basket C by the collection unit 40A of the scrap material processing device 40 and then put into a bag B manufactured by the waste unit 40B for disposal. The waste unit 40B, which constitutes a major component of the present invention, will be described below.

[0036] [Waste Disposal Section Configuration] First, the configuration of the waste disposal unit 40B will be explained below based on Figures 3 to 5.

[0037] The waste disposal section 40B shown in Figure 3 is equipped with a pair of rotatable sheet rolls SR1 and SR2 at its top, which are arranged parallel to each other at a predetermined distance apart. Each sheet roll SR1 and SR2 is wound with a thin, strip-shaped sheet S1 and S2 made of resin such as polyethylene (PE), and the longitudinal ends of a cylindrical core material 41 that penetrates the center of each of these in the width direction are rotatably supported by a pair of support members 42.

[0038] Specifically, as shown in Figure 4, for example, bearing members 43 are fitted to both axial ends of a core material 41 that penetrates the center of one sheet roll SR1, and each bearing member 43 is rotatably fitted into a groove 42a formed along the longitudinal direction (perpendicular to the plane of the paper in Figure 4) in each support member 42. Here, the pair of support members 42 are held on the outer circumference of the bearing member 43 so as to be movable in the axial direction (left-right direction in Figure 4) so ​​as to be able to move closer to and further apart from each other, and each support member 42 is biased toward each other by a spring 44 compressed between it and the bearing member 43 in the groove 42a. As a result, the pair of support members 42 each abut against the axial end face of the sheet roll SR1 and apply a load (braking force due to friction) to the rotation of the sheet roll SR1. Note that Figure 4 shows only the support structure of one sheet roll SR1, but the support structure of the other sheet roll SR2 is the same as the support structure of the one sheet roll SR1, so its illustration and explanation are omitted.

[0039] As shown in Figure 3, sheets S1 and S2 are pulled out vertically downward from each of the pair of sheet rolls SR1 and SR2. The pulled-out sheets S1 and S2 are then wrapped around rotatable fixed rollers 45 located below each sheet roll SR1 and SR2 and extend horizontally. The horizontally extended sheets S1 and S2 are then wrapped around rotatable movable rollers 46 located parallel to the fixed rollers 45 and folded back into a horizontal U-shape. They then extend horizontally towards a rotatable fixed roller 47 located parallel to and below the fixed rollers 45. In the state shown in Figure 3, the ends of each sheet S1 and S2 hang down vertically by a predetermined length from each fixed roller 47.

[0040] Here, each of the pair of movable rollers 46 is supported so as to be movable in the horizontal direction, and at one end of each of these movable rollers 46 in the axial direction, there is a tension adjustment part 48 (only one is shown in Figure 3) for adjusting the tension of the sheets S1 and S2 wrapped around the movable roller 46. By moving the movable roller 46 away from the fixed rollers 45 and 47 using this tension adjustment part 48, the required tension is applied to the sheets S1 and S2 stretched between the fixed rollers 45 and 47 and the movable roller 46, so that no wrinkles occur in the sheets S1 and S2.

[0041] Below a pair of sheets S1 and S2 that hang vertically downward from a pair of fixed rollers 47 arranged parallel to each other, a rectangular plate-shaped gap-forming plate 49 is erected vertically. Near both ends of this gap-forming plate 49 in the width direction, a total of four heaters 50, each constituting a side-forming mechanism, are erected vertically. Here, each heater 50 is electrically connected to a power supply (not shown). Furthermore, each heater 50 can move closer to and further apart from each other by a mechanism (not shown).

[0042] Furthermore, below the gap-forming plate 49, a pair of heaters 51 constituting the bottom-forming mechanism are arranged parallel and horizontally to each other, and these heaters 51 are electrically connected to a power supply (not shown). Each heater 51 can be moved closer to and further apart from each other by a mechanism (not shown).

[0043] Below the heater 51, there is a pair of gripping parts 52 and 53 for gripping both ends of the two sheets S1 and S2 that are stacked on top of each other, a horizontal movement mechanism 60 for moving one movable gripping part 52 horizontally relative to the other fixed gripping part 53, a vertical movement mechanism 70 for moving both gripping parts 52 and 53 up and down vertically, and a pair of heaters 54 that constitute the CLOS mechanism. The pair of heaters 54 are electrically connected to a power supply (not shown). These heaters 54 can also be moved closer to and further apart from each other by a mechanism (not shown).

[0044] The vertical movement mechanism 70 includes a vertical guide rail 72 attached to a vertically erected rectangular plate-shaped base plate 71, and a slider 73 that moves up and down along the guide rail 72. A rotatable ball screw shaft 74 is provided parallel to the guide rail 72 on the base plate 71, and a reversible electric motor 75, which is the rotation drive source, is connected to the upper end of the ball screw shaft 74. The lower end of the ball screw shaft 74 is rotatably supported on the base plate 71 by a bearing 76. The ball screw shaft 74 is screwed into the slider 73.

[0045] Furthermore, one longitudinal end of a rectangular plate-shaped lifting plate 77 that overhangs horizontally is attached to the slider 73, and a fixed gripping portion 53 is attached to the tip of this lifting plate 77 by a fixed block 55. A movable gripping portion 52 is supported at the base end of the lifting plate 77 so as to be able to move horizontally via a horizontal movement mechanism 60.

[0046] Therefore, when the electric motor 75 is started and the ball screw shaft 74 is rotated forward and backward, the slider 73 and the lifting plate 77 move up and down along the guide rail 72, and the fixed gripping part 53 attached to the lifting plate 77 via the fixing block 55 and the movable gripping part 52 attached to the lifting plate 77 via the horizontal movement mechanism 60 move up and down.

[0047] The horizontal movement mechanism 60 described above includes a guide rail 61 horizontally mounted on the lifting plate 77 and a movable block 62 that moves horizontally along the guide rail 61. A horizontally positioned, rotatable ball screw shaft 63 is screwed into the movable block 62. One axial end of the ball screw shaft 63 is connected to an electric motor 64, which is a rotational drive source, and the other axial end of the ball screw shaft 63 is rotatably supported on the lifting plate 77 by a bearing 65.

[0048] Therefore, when the electric motor 64 is started and the ball screw shaft 63 is rotated forward and backward, the movable block 62 and the movable gripping portion 52 attached thereto move horizontally along the guide rail 61. As a result, the movable gripping portion 52 can move closer to or further away from the fixed gripping portion 53. Both gripping portions 52 and 53 are provided with reversing cylinders 56 for reversing (rotating by 180°) the gripping portions 52 and 53, respectively.

[0049] Incidentally, in the space between the pair of gripping parts 52 and 53, shown by the dashed line in Figure 1, there is an OPEN mechanism 80 for widening the opening of the bag B (see Figures 6F and 6G), which will be made from two sheets S1 and S2, as described later. The configuration of this OPEN mechanism 80 will be explained below based on Figure 5.

[0050] As shown in Figure 5, each gripping section 52, 53 has one longitudinal end of each pair of links 81A, 81B and 82A, 82B pivotally attached by a shaft 84 so as to be horizontally rotatable. The other longitudinal ends of the two links 81A, 82A on one side (upper side of Figure 5) are connected to the longitudinal ends of one link 83A by shafts 85. The other longitudinal ends of the two links 81B, 82B on the other side (lower side of Figure 5) are connected to the longitudinal ends of one link 83B by shafts 86. Here, vertical pins 87 are attached to the longitudinal ends of each link 83A, 83B.

[0051] As described above, the four pairs of links 81A, 81B, 82A, 82B and the two links 83A, 83B that make up the OPEN mechanism 80 constitute a parallel link mechanism. As shown in Figure 5(b), when the movable gripping portion 52 moves horizontally in the direction of the arrow and approaches the fixed gripping portion 53, the two links 83A, 83B move parallel to each other in a direction away from each other.

[0052] [Function of the waste disposal unit] Next, the operation of the waste disposal unit 40B, configured as described above, will be explained.

[0053] As shown in Figure 1, the worker grasps the ends of the sheets S1 and S2, which have been pulled out from the pair of sheet rolls SR1 and SR2 and are hanging down below the fixed roller 47, and pulls the sheets S1 and S2 downward toward the gripping parts 52 and 53. Then, as shown in Figure 6A, the pair of gripping parts 52 and 53, which have been moved to the upper limit position by the vertical movement mechanism 70, grip both sides of the lower ends of the two sheets S1 and S2. From this state, the two sides of the two sheets S1 and S2 are sandwiched between the four heaters 50, and when power is supplied to each heater 50 from a power source (not shown), each heater 50 heats up, and the two sides of the two sheets S1 and S2 are heat-sealed together by the heaters 50, forming a cylindrical portion at the bottom of the two sheets S1 and S2.

[0054] Next, as shown in Figure 6B, the pair of gripping parts 52 and 53 are lowered to their lowest position by the vertical movement mechanism 70, and the two sheets S1 and S2, whose sides are joined (heat-sealed), are sandwiched between the two sheets S1 and S2 by a pair of heaters 51 located above the side joints a (the hatched parts in Figure 6B), and the heaters 51 are energized from a power source (not shown). As a result, the heated heaters 51 heat-seal the upper parts of the side joints a (the parts that will become the bottom of the bag B (see Figures 6F and 6G) ​​described later) of the two sheets S1 and S2 by heat welding.

[0055] Next, as shown in Figure 6C, the portion above the heater 51 (joint) of the two sheets S1 and S2 is cut with the cutter 57. That is, by sliding the cutter 57 laterally along the top of the heater 51, the portion above the heater 51 (joint) of the two sheets S1 and S2 is cut with the cutter 57, and the bag B formed by the two sheets S1 and S2 is separated, and the lower ends of the separated bag B are held on both sides by the gripping parts 52 and 53.

[0056] As described above, once bag B is detached, the reversing cylinders 56 are driven to rotate (reverse) the gripping parts 52 and 53 by 180°, as shown in Figure 6D, inverting the top and bottom of bag B. As a result, the part b (the shaded area in Figure 6D) joined by the heater 51 is positioned at the bottom, forming the bottom of bag B.

[0057] As described above, when the top and bottom of bag B are inverted and the upper end gripped by the pair of gripping parts 52 and 53 of bag B opens, the opening at the top of bag B is widened by the OPEN mechanism 80 shown in Figure 5, as shown in Figure 6E.

[0058] In other words, as shown in Figure 5(a), when the upper opening of the bag B is closed, with both upper ends gripped by the two gripping parts 52 and 53, as shown in Figure 5(b), when the horizontal movement mechanism 60 shown in Figure 1 is driven and the movable gripping part 52 moves horizontally toward the fixed gripping part 53, the pair of links 81A, 81B and 82A, 82B each rotate around the axis 84 in the direction of the arrows shown, causing the pair of links 83A, 83B to move parallel to each other in the direction of the arrows shown, and the distance between the two links 83A, 83B widens. As a result, the pins 87 attached to both longitudinal ends of each link 83A, 83B push open the opening of the bag B, and the upper end of the bag B opens up into a large rectangular shape in plan view.

[0059] As described above, when the opening of bag B is widened, the basket C in which the scrap material W2 has been collected in the collection section 40A shown in Figure 1 moves above bag B by a moving mechanism (not shown). When the bottom plate C1 (see Figure 3) of basket C, which has moved above bag B, opens, the scrap material W2 collected in basket C is put into bag B through the opening of bag B, as shown in Figure 6F. When a predetermined amount of scrap material W2 has been put into bag B, as shown in Figure 6F, the upper end of bag B is clamped between a pair of heaters 54 and power is supplied to the heaters 54 from a power source (not shown), and the upper end of bag B is joined (heat sealed) by heat welding, sealing bag B. The joined portion c at the upper end of bag B is shown as a shaded portion in Figure 6G.

[0060] As described above, once the opening of bag B containing a predetermined amount of scrap material W2 is sealed, as shown in Figure 6G, the movable gripping part 52 is moved by the horizontal movement mechanism 60 shown in Figure 3 to widen the distance between the two gripping parts 52 and 53. When the gripping parts 52 and 53 release the grip on bag B, bag B containing the scrap material W2 falls onto the trolley 100 under its own weight. Therefore, when bag B is transported to a designated disposal location by the trolley 100 and disposed of, the scrap material W2 and cutting shavings are disposed of together with bag B.

[0061] As described above, the waste disposal apparatus 40 according to this embodiment collects the scrap material W2 generated by the cutting process of the CSP substrate W by the cutting device 1 into a basket C in the collection section 40A, and in the waste section 40B, a bag B is made with almost no manual work by the operator, and the basket C containing the collected scrap material W2 and cutting debris is transferred to the waste section 40B, where the scrap material W2 and cutting debris contained in the basket C are put into the bag B for disposal. As a result, manual work by the operator is reduced, and the scrap material W2 generated by the cutting process of the CSP substrate W is collected together with the cutting debris and disposed of efficiently.

[0062] Furthermore, by heat-sealing the opening of bag B, into which the scrap material W2 and cutting chips are placed, and disposing of the scrap material W2 and cutting chips together in this sealed bag B, it is possible to prevent problems such as cutting chips scattering into the cleanroom where the cutting process takes place and contaminating the cleanroom.

[0063] In the above embodiment, the parallel link mechanism shown in Figure 5 was used as the OPEN mechanism for opening the bag B, but the OPEN mechanism 90 shown in Figure 7 can be used instead.

[0064] In other words, the OPEN mechanism 90 shown in Figure 7 is constructed by pivotally attaching one end of each of a pair of links 91A, 91B and 92A, 92B in the longitudinal direction to a movable gripping part 52 and a fixed gripping part 53, respectively, which can be moved horizontally by a horizontal movement mechanism 60, via an axis 93. The other ends of links 91A, 92A on one side (upper side of Figure 7) and the longitudinal ends of links 91B, 92B on the other side (lower side of Figure 7) are rotatably connected via an axis 94 to form a quadrilateral link, and pins 95 are attached to the ends of links 91A, 92B on the axis 94 side. The heaters 50, 51, 54 are configured in pairs as described above, and may be of a type that heats both of the pair, or may be of a type that has a heating part (heater wire) on only one of the pair. In the type that has a heating part on only one, the other is made of a heat-resistant material.

[0065] As the OPEN mechanism 90 configured as described above is folded as shown in Figure 7(a), the movable gripping part 52 moves horizontally towards the fixed gripping part 53 in the direction of the arrow by the horizontal movement mechanism 60, and the distance between the two gripping parts 52 and 53 narrows. Then, as shown in Figure 7(b), each link 91A, 91B and 92A, 92B rotates around the axis 93 in the direction of the arrow, causing the pins 95 attached to links 91A and 92B to move away from each other in the direction of the arrow (up and down in Figure 7(b)). As a result, the opening of the bag B is opened into a rectangular shape in plan view by the pins 95, and the scrap material W2 is put into the bag B through this opening.

[0066] In the above embodiment, bags are manufactured from two sheet rolls, but this is not the only way to go. Bags may also be manufactured by pulling out a tubular roll of sheet. Furthermore, the gripping part may be designed to grip pre-manufactured bags.

[0067] Furthermore, the present invention is not limited to the embodiments described above, and various modifications are possible within the scope of the technical idea described in the claims, specification, and drawings. [Explanation of symbols]

[0068] 1: Cutting device, 2: Base, 3: Support stand, 3a: Cantilever section of the support stand, 4: Operation box, 5: Input means, 6: Monitoring device, 7: Hinge, 10: Chuck table, 11: Suction cup, 11a: Suction port, 20: Cutting means, 21: Cutting blade, 22: Imaging unit, 40: Scrap material processing unit, 40A: Recovery unit, 40a: Discharge port, 40B: waste section, 41: core material, 42: support member, 42a: groove, 43: bearing member, 44: Spring, 45: Fixed roller, 46: Movable roller, 47: Fixed roller, 48: Tension adjustment section, 49: Gap forming plate, 50, 51: Heater, 52, 53: Gripping part, 54: Heater (CLOSE mechanism), 55: Fixing block, 56: Reversing cylinder, 57: Cutter, 60: Horizontal movement mechanism, 61: Guide rail, 62: Movable block, 63: Ball screw shaft, 64: Electric motor, 65: Bearing, 70: Vertical movement mechanism, 71: Base plate, 72: Guide rail, 73: Slider, 74: Ball screw shaft, 75: Electric motor, 76: Bearing, 77: Lifting plate 80: Open mechanism, 81A, 81B, 82A, 82B, 83A, 83B: Link, 84, 85, 86: Shaft, 87: Pin, 90: Open mechanism 91A, 91B, 92A, 92B: Link, 93, 94: Axle, 95: Pin 100: Dolly, a, b, c: Seat joint, B: Bag, C: Basket, C1: Cage bottom plate (dropping mechanism), J: Mounting jig, J1: Rectangular area, Ja: Suction hole, K: Groove, L: Street, P1: Machining position, P2: Transfer position, R: Excess area S1, S2: Sheet, SR1, SR2: Sheet roller, W: CSP substrate (workpiece) W1: Rectangular area, W2: Scrap material

Claims

[Claim 1] A scrap material processing device for processing scraps of a workpiece that are discharged when processing a workpiece with a processing tool while supplying a processing fluid, Two gripping parts that grip both ends of the opening of the bag, An OPEN mechanism that opens the opening by bringing the gripping parts close together so that scrap material can be placed into the bag, A CLOSE mechanism that seals the bag into which the scrap material is placed, A basket that moves between the processing device and the top of the opening of the bag to receive scrap material from the processing device, A moving mechanism for moving the basket, A dropping mechanism that drops scrap material into the bag from the basket which has moved above the opening, A scrap material processing device equipped with the following features.

Images