Gas delivery system with electrical backplane

Abstract

A gas delivery system is provided comprising an electric backplane, a system controller operablely coupled to the electric backplane, and a plurality of mass flow controllers. Each mass flow controller comprises a respective mass flow control circuit operablely coupled to the electric backplane. The system controller and each mass flow control circuit are physically mounted to the electric backplane. Thus, a row associated with a flow process can be evaluated, and the mass flow controller can be replaced as needed.

Description

Technology Field

[0001] Cross-reference regarding related applications

[0002] This application claims priority to U.S. provisional patent application no. 62 / 963,880 filed on January 21, 2020, the entirety of which is incorporated herein by reference. Background Technology

[0003] Gas delivery systems are used to supply various types of gases in industrial fields such as semiconductor manufacturing. In such systems, different gases can flow through multiple gas supply channels to be mixed and supplied for various manufacturing processes. Mass flow controllers are typically provided at each gas supply channel to regulate the gas flow rate.

[0004] In some gas delivery systems, mass flow controllers can be connected to a central tool that both remotely sends commands to the mass flow controllers and requests process data over the network. Each mass flow controller maintains its own control loop using the central tool, which is synchronized with the commands transmitted from the central tool over the network. The manufacturing process is executed by transmitting sequential flow commands and settings from the central tool to the mass flow controllers over the network during the gas delivery process. This approach has the disadvantage that network latency, bandwidth limitations, and frequent errors occur in communication between the central tool and the mass flow controllers. As a result, there are limitations on the rate and volume of data that can be exchanged between the mass flow controllers and the central tool during the execution of the manufacturing process. These limitations restricted the functionality of previous gas delivery systems.

[0005] To solve these problems, according to one aspect of the present disclosure, a gas delivery system is provided comprising an electric backplane, a system controller operably coupled to the electric backplane, and a plurality of mass flow controllers. Each mass flow controller comprises a respective mass flow control circuit operably coupled to the electric backplane. The system controller and each mass flow control circuit are physically mounted to the electric backplane.

[0006] This summary is provided to introduce a selection of ideas in a simplified form, which is further explained in the detailed description below. This summary is not intended to identify the principal or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Furthermore, the claimed subject matter is not limited to an implementation that resolves any or all disadvantages mentioned in any part of this disclosure. Brief explanation of the drawing

[0007] FIG. 1 illustrates a basic electrical schematic diagram of a gas delivery system according to an exemplary embodiment. FIG. 2 illustrates a schematic diagram of a first memory interface according to an embodiment of FIG. 1. FIG. 3 illustrates a schematic diagram of a second memory interface according to an embodiment of FIG. 1. FIG. 4 shows a perspective view of a centralized gas delivery system according to an embodiment of FIG. 1. FIG. 5 illustrates a schematic diagram of the flow path and configuration flow control components of a centralized gas delivery system according to the embodiment of FIG. 1. Figure 6 illustrates a schematic diagram showing the flow of data and control signals between the system controller, the mass flow controller, and the flow rate controller through the electric bus system of the gas delivery system of Figure 1. FIG. 7 shows a top perspective view of the electric backplane of the centralized gas delivery system of FIG. 1, and the dashed lines illustrate the printed circuit boards of the mass flow controller, flow rate controller, and input / output module mounted on the electric backplane. FIG. 8 illustrates a side view of a typical flow channel used in the gas delivery system of FIG. 1, where the dashed line illustrates a flow path moving through an upstream flow block with a pair of upstream shut-off valves, a flow control valve, and a pair of downstream shut-off valves. FIG. 9 shows a schematic side view of a printed circuit board of a mass flow controller of the gas delivery system of FIG. 1, extending through a mechanical backplane to be physically and electrically connected to an electric backplane. FIG. 10a shows a perspective view of the upstream flow block of the gas delivery system of FIG. 1, which has a configuration similar to the downstream flow block of the gas delivery system. FIG. 10b illustrates a cross-sectional view of an upstream flow block taken along A-A' of FIG. 10a, illustrating a branch flow path connecting an inlet to an outlet and a purge port of the upstream flow block, and a pair of upstream shut-off valves for controlling gas flow through each branch of the branch flow path. FIG. 10c illustrates a cross-sectional view of a downstream flow block taken along A-A' of FIG. 10a, illustrating a branch flow path connecting an inlet to an outlet and a purge port of the downstream flow block, and a pair of downstream shut-off valves for controlling gas flow through each branch of the branch flow path. FIG. 10d illustrates a cross-sectional view of an upstream flow block taken along BB' of FIG. 10a, illustrating an inverted U-shaped channel connecting a pair of internal horizontal channels of a fuzzy branch of a branch flow path and the central bore of an inlet branch of a branch flow path. FIG. 11a shows a perspective view of the mass flow controller section of the gas delivery system of FIG. 1 with the printed circuit board removed, and shows the mass controller flow block and flow control valve, pressure sensor system and upstream pressure sensor attached thereto. FIG. 11b shows a perspective view of the mass flow controller flow block of FIG. 11a with various components removed. FIG. 11c schematically illustrates a cross-sectional view of a mass flow controller flow block taken along line CC of FIG. 11b, in which attached components are schematically depicted, and illustrates a gas flow path from inlet to outlet, a flow control valve, a bypass line combined with a pressure sensor system, and a flow path to an upstream pressure sensor, according to an example of the present disclosure. FIG. 12 shows a plan view of a mixing manifold of the gas delivery system of FIG. 1, coupled to a schematically illustrated chamber. FIG. 13 illustrates a schematic diagram of an exemplary computing environment that can be used to implement the gas delivery system of FIG. 1. Specific details for implementing the invention

[0008] With the above problem in mind, referring to FIG. 1, a centralized gas delivery system (10) is provided, comprising an integrated high-speed electric backplane (18) operably coupled and configured to enable communication between a system controller (12), a plurality of mass flow controllers (30), a plurality of flow rate controllers (26), a plurality of pressure controllers (24) and an input / output module (20) through an associated memory interface (22) and an electric connector (50). More specifically, the electric backplane (18) is operably coupled to the system controller (12) via the first memory interface (22A), operably coupled to a plurality of mass flow controllers (30A-30P) via the second memory interface (22B), operably coupled to the input / output module (20) via the third memory interface (22C), operably coupled to a plurality of pressure controllers (24A-24D) via the fourth memory interface (22D), and operably coupled to a plurality of flow rate controllers (26A-26D) via the fifth memory interface (22E). The client computing device (110) is operably coupled to the system controller (12) to transmit and receive data communication and / or commands to and from the system controller (12). Such data communication may include, for example, flow diagnostic information and flow monitoring information of the gas delivery system (10). The gas delivery system (10) may be configured as a gas delivery device that may be contained within the housing (11). The system controller (12) may be referred to as a controller module, and the mass flow controller (30), flow rate controller (26), pressure controller (24) and input / output module (20) may be referred to as controlled modules because they operate under the control of the system controller (12).

[0009] Although 16 mass flow controllers are shown in FIG. 1 interacting with the second memory interface (22B), it will be recognized that the number is not specifically limited and may be fewer or more than 16. Additionally, although 4 flow rate controllers (26A-26D) are shown in FIG. 1 interacting with the fifth memory interface (22E), the number is not specifically limited and may be fewer or more than 4. Additionally, although 4 pressure controllers (24A-24D) are shown in FIG. 1 interacting with the fourth memory interface (22D), it will be recognized that the number is also not specifically limited and may be fewer or more than 4.

[0010] The system controller (12) includes a processor (12A) and volatile memory (12B), such as random access memory (RAM). In some implementations, the system controller (12) may be configured as a system-on-module (SOM). The processor (12A) may be a central processing unit (CPU), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or another type of microprocessor, for example, a multi-core processor. The system controller (12) is operably coupled to non-volatile memory (14) containing a central data store (15), and the central data store (15) may, in turn, store a data log (15A) and an artificial intelligence (AI) model (15B). Each mass flow controller (30A-30P) includes a corresponding mass flow control circuit (30A1-30P1), each flow rate controller (26A-26D) includes a corresponding flow rate controller circuit (26A1-26D1), and each pressure controller (24A-24D) includes a corresponding pressure control circuit (24A1-24D1). As with the circuits of the system controller (12), each mass flow control circuit (30A1-30P1), flow rate control circuit (26A1-26D1), and pressure control circuit (24A1-24D1) may integrate a processor and associated volatile and non-volatile memory. The processors of each of these circuits (30A1-30P1, 26A1-26D1 and 24A1-24D1) may be in the form of a CPU, ASIC, FPGA or other type of microprocessor, and may be multi-core processors and / or may be configured as SOMs.

[0011] In order to reduce the length of various flow paths and electrical connections in the gas delivery system (10), the system controller (12) circuit, mass flow control circuit (30A1-30P1), flow rate control circuit (26A1-26D1) and pressure control circuit (24A1-24D1) are operably coupled to the electric backplane (18) by being electrically and physically mounted to the electric backplane (18) through corresponding electrical connectors (50A-50U), as shown in more detail in FIG. 7.

[0012] Continuing from FIG. 1, the electric backplane (18) includes an electric bus system (18A) comprising a communication bus (18B) and a power bus (18C). The electric backplane may be electrically coupled to a power supply unit (16) configured to supply power via a power bus (18C) configured to supply power to all controlled modules and controller modules physically mounted on the electric backplane (18), including a plurality of valves, a system controller (12), an input / output module (20), pressure controllers (24A-24D), flow rate controllers (26A-26D), mass flow control circuits (30A1-30P1) and a mass flow controller (30A-30P). Thus, the length of power lines required for the gas delivery system (10) is significantly reduced. In one particular example, the power supply unit (16) may include a common (i.e., shared) 24-volt DC power source shared via the power bus (18C) between all controller modules and controlled modules of the system. Alternatively or additionally, it will be understood that power supplies of different voltages, wattages, or types may be used. For example, a 24V power supply is used to power the processing circuits of the controller and the module under control, while a 150V DC power supply may be additionally provided to power the valve.

[0013] The electric backplane (18) forms the communication and power delivery backbone of the gas delivery system (10). Since all communication and control signals, as well as the power supply unit (16), are embedded in the electric backplane (18), this allows the system controller (12) to access all sensors and actuators within the gas flow path in real time. Additionally, since the system controller (12) is operably coupled to a non-volatile memory (14), which is a large high-speed data storage device that stores the central data repository (15), all sensor and actuator data can be stored in real time for post-processing analysis and long-term storage. That is, to facilitate data collection from components via high-speed data connections on an integrated electric backplane (18) rather than high-latency, bandwidth-limited network connections to a remotely located system controller, the system controller (12) and central data storage (15) as mass flow controllers (30A-30P), flow rate controllers (26A-26D), and pressure controllers (24A-24D) are generally centralized in the same housing (11) so that they are placed together in the same physical location.

[0014] The electric backplane (18) may include a backplane printed circuit board (PCB) having high-speed low-voltage differential signaling (LVDS) interface elements for serial communication and control lines. However, it will be recognized that the PCB is not specifically limited to LVDS elements, and other standard and interface elements may alternatively be implemented on the PCB to achieve a high-speed electric backplane (18).

[0015] The electric backplane (18) may include two independent serial communication subsystems within the communication bus (18B): a configuration bus (18B1) configured to route configuration signals between the system controller (12) and each controlled mass flow controller (30A-30P), and a control bus (18B2) configured to route control signals between the system controller (12) and each controlled mass flow controller (30A-30P). Both may operate completely independently and simultaneously. All configuration data, module identification data, calibration data, etc., are transmitted to each individual module (20, 24A-24D, 26A-26D, 30A-30P) via the configuration bus (18B1) during the system power supply, module configuration, and system configuration phases. During these system power supply, module configuration, and system configuration phases, the control bus (18B2) may be in standby mode. When these steps are completed using the configuration bus (18B1), the control bus (18B2) can be switched to an operating mode that allows for the exchange of control signals between the controller module and the controlled module. In addition to the previously described function of the configuration bus (18B1), during normal operation of the gas delivery system (10) after startup, historical data (i.e., log data) is transmitted from each controlled module to the system controller (12) via the configuration bus (18B1) and stored in the log (15A), thereby allowing the process record to be stored in near real-time. On the other hand, during normal operation, the control bus (18B2) transmits control commands from the system controller (12) to each controlled module and transmits sensor data and other feedback back from each module to the system controller (12) so that feedback control operations can be performed.

[0016] As described above, in the gas delivery system (10), the system controller (12) is designated as the controller module, and the mass flow controller (30A-30P), flow rate controller (26A-26D), pressure controller (24A-24D), and input / output module (20) are designated as the modules under control. As described in detail below, it will be recognized that the modules under control may include other modules, such as an external bus extension module, a precursor module, an in-situ metrology system, a thermal-based mass flow controller, and a restrictor-less mass flow controller that does not include a restrictor. As a fully asynchronous system, the controller module (12), the modules under control, and the electric backplane (18) all operate independently and asynchronously without waiting or forced interrupts to the local processor. The electric backplane (18) functions as a full-duplex serial bus that handles all communication between the controller module (i.e., the system controller (12)) and all controlled modules, and transmits read and write data simultaneously in each cycle. A coprocessor (13) mounted on the electric backplane (18) and operably coupled to the first memory interface (22A) coordinates or coordinates data exchange between the system controller (12) and the controlled modules. In an alternative embodiment, the coprocessor (13) may be integrated into the first memory interface (22A).

[0017] Referring to FIG. 2, the first memory interface (22A) for the system controller (12) may be configured such that the system controller (12) is an FPGA, an ASIC, a complex programmable logic device (CPLD), or another type of memory control processor that receives serial data from the controlled module via a serial read register (22A7) and transmits serial data to the controlled module via a serial write register (22A6). Transmission and reception of serial data are performed by executing serial bus logic bits (22A8). For each controlled module, a read data register (22A1) and a write data register (22A2) are provided within the first memory interface (22A) to exchange data between the system controller (12) and the electric bus system (18A). A control register (22A3) can track the acceptance of data transmitted by each controlled module, as verified by receiving a control signal from the controlled module. The module activity register (22A4) of the first memory interface (22A) can notify the controller module (i.e., system controller (12)) of the serial bus status along with any fault in the transmission or reception of serial data. Control logic (22A5) for performing such memory control functions of the first memory interface (22A) is also provided.

[0018] The coprocessor (13) may be configured to coordinate asynchronous data communication from the controller module (i.e., the system controller (12)) to the controlled module and from the controlled module to the controller module, including coordinating asynchronous data communication between the system controller (12) and each mass flow control circuit (30A1-30P1). The coprocessor (13) may coordinate and transmit serial data to and from various data registers. For example, when serial data is received from the controlled module, the coprocessor (13) may asynchronously deserialize the serialized data stream to produce a deserialized data stream and write the deserialized data to the read data register (22A1) assigned to the controlled module. The deserialized data stream of the read data register (22A1) may then be asynchronously transmitted to the system controller (12) by the coprocessor (13). When the system controller (12) transmits data to the module under control, the data may be written to the module write data register (22A2) assigned to the module under control; the coprocessor (13) may then serialize the data stream from the module write data register (22A2) to create a serialized data stream and transmit the serialized data stream to the module under control, which includes the respective mass flow control circuits (30A1-30P1), through the serial write register (22A6). Thus, the coprocessor (13) checks the integrity of the received serial data, confirms the acceptance of the transmitted data by the module under control via a control signal, transmits the received data to the correct read register, constructs the transmitted data stream in the write register of the appropriate module under control, and continuously updates the module activity register (22A4) with the latest module communication status with any errors. Thus, the first memory interface (22A) and the coprocessor (13) can control communication between the controller module and the module under control.

[0019] Referring to FIG. 3, the second memory interface (22B) includes read registers (22B1-22B3) and write registers (22B4) for exchanging data between the controlled modules (30A-30P) and the electric bus system (18A). The second memory interface (22B) for the mass flow controllers (30A-30P) may be configured with a CPLD state machine or other suitable type of memory control processor that executes control logic to receive and transmit write data of a data stream transmitted to individual mass flow controllers (30A-30P) by the controller module, as well as to receive and transmit read data of a data stream transmitted from the mass flow control circuits (30A1-30P1) of each individual mass flow controller (30A-30P) to the controller module (i.e., system controller (12)). The second memory interface (22B) is configured to handle the logistics and data transfer between the local processor of the mass flow control circuit (30A1-30P1) and the electric backplane (18) using registers (22B1-22B4) under the control of the control logic (22B5). Similar to the first memory interface (22A) for the controller module, the second memory interface (22B) is completely independent and asynchronous for each processor of the controlled module (e.g., no standby state or interrupt). It will be recognized that the third memory interface (22C), the fourth memory interface (22D), and the fifth memory interface (22E) can be similarly configured as CPLD state machines to mediate data communication between the controller module and the associated controlled module in a similar manner. When data is transferred from the system controller (12) to the controlled module through the electric backplane (18), the controlled module is individually selected by the address of each controlled module encoded in the data stream. For example, each data stream may include the address of the mass flow control circuit (30A1-30P1) to which the data stream was transmitted.A second memory interface (22B) receiving a data stream from a system controller (12) transmits the data stream to a controlled module indicated by an address encoded in the data stream. When transmitting the data stream to the system controller (12), each controlled module may be configured to encode the address of the controlled module within the data stream, which causes the internal register to transmit the data back to the controller module along with the driver output. Each data stream received by the first memory interface (22A) has an embedded address, so the individual controlled module from which the data stream was generated can be identified. Thus, the system controller (12) obtains information regarding the address of each controlled module to which the data stream is transmitted. When the address identifies a physical mapping or location associated with the controlled module, the system controller (12) obtains information regarding the physical mapping or location associated with each controlled module to which the data stream is transmitted.

[0020] Referring to FIGS. 4 and 5, the layout of a gas delivery system (10) is illustrated and illustrates a plurality of mass flow controllers (30A-30P) and a plurality of flow rate controllers (26A-26D) mounted on a mechanical backplane (19) and an electric backplane (18). The mass flow controllers (30A-30P) and flow rate controllers (26A-26D) are mounted on the upper surface (19A) of the mechanical backplane (19) and extend upward from therefrom. The electric backplane (18) is mounted on the lower surface (19B) of the mechanical backplane (19) and is spaced apart from the lower surface (19B) by a gap, and is accessed by an opening (19C) formed in the mechanical backplane through which the mass flow controllers (30A-30P) and flow rate controllers (26A-26D) extend to reach the electric connectors (50A-50U) on the electric backplane (18) (see FIG. 7). That is, a portion of each mass flow controller (30A-30P) extends through each of the openings (19C) of the plurality of openings to reach the electric backplane (18). Mass flow controllers (30A-30P) and flow rate controllers (26A-26D) are mounted in a module row of multiple elements of a mass flow control circuit (30A1-30P1) and in a module row of multiple elements of a flow rate control circuit (26A1-26D1) mounted on an electric backplane (18) and a mechanical backplane (19). In each row, each mass flow controller includes an associated upstream flow block (80) and an associated downstream flow block (82) that are mechanically and fluidly connected to a mass flow controller flow block (81), each having a flow path for the row extending from each inlet to each outlet leading to a mixing manifold (48). The number of rows in the gas delivery system (10) may be variable.

[0021] The printed circuit boards of each mass flow control circuit (30A1-30P1) element and flow rate control circuit (26A1-26D1) element are mechanically secured to the flow block (81) of the mass flow controller via fasteners (25B), such as screws. The flow block (81) is then mounted on the upper surface of another flow block (39), and then mounted on the upper surface (19A) of the mechanical backplane (19) via fasteners (not shown), such as screws. The printed circuit boards extend from the upper surface (19A) through the opening (19C) of the mechanical backplane (19) to the electrical connectors (50A-50U) on the electrical backplane (18). Generally, the printed circuit boards are terminated at the upper surface of the electrical backplane (18) and therefore do not extend through the electrical backplane (18). Since the module rows comply with standardized dimensions, each flow rate control circuit (26A1-26D1) element is interchangeable and replaceable with other elements, and each mass flow control circuit (30A1-30P1) element is interchangeable and replaceable with other elements. In the illustrated embodiment, the mass flow controllers (30A-30P) are arranged in substantially parallel rows, and the flow rate controllers (26A-26D) are arranged in a number of different substantially parallel rows extending from the inlet side to the outlet side of the gas delivery system (10). Each mass flow controller (30A-30P) may be provided with a flow control valve (36A-36P), an upstream shut-off valve (32A-32P), an upstream purge shut-off valve (34A-34P), a downstream purge shut-off valve (38A-38P), a downstream shut-off valve (40A-40P), and a pressure sensor pair (52A). These components are illustrated in FIG. 8, which shows a side view of the mass flow controller (30A). As illustrated, the mass flow controller (30A) includes a mass flow control circuit (30A1), a flow control valve (36A), and a pair of pressure sensors (52A).A flow control valve (36A) is mounted in the flow path and configured to control the flow rate of gas flowing through the flow path. During operation, it will be recognized that the mass flow control circuit (30A1) reads the pressure from the pressure sensor pair (52A) and controls the gas flow through the device to a set point by controlling the degree of opening of the flow control valve (36A). It will be understood that the mass flow controller (30A) is not specifically limited to the pressure sensor pair (52A). In other embodiments, the pressure sensor pair (52A) may be replaced, for example, with a single pressure sensor.

[0022] Returning to FIGS. 4 and 5, each flow rate control circuit element (26A1-26D1) may be provided with a flow rate control valve (44A-44D), a flow rate shut-off valve (42A-42D), and a flow rate pressure sensor (46A-46D, 47A-47D). Multiple gas sources (28A-28P) may be externally connected to an upstream shut-off valve (32A-32P) at the inlet side of the gas delivery system (10). During the gas delivery process, gas injected from the first gas source (28A) may flow through the open first upstream shut-off valve (32A), the first flow control valve (36A), and the first downstream shut-off valve (40A), and then enter the mixing manifold (48) to be mixed with other gas from other gas sources that flowed to the mixing manifold (48) through their respective flow paths and flow control valves. The mixing manifold (48) is configured to receive gas from each mass flow controller (30A-30P) and mix the gas. The mixed gas from the mixing manifold (48) is guided by the mixing manifold (48) to each inlet of the flow rate controller (26A-26D) so that it flows through the flow rate shut-off valve (42A-42D) and the flow rate control valve (44A-44D) and is output as a gas output (AD) at the outlet side of the gas delivery system (10).

[0023] Each flow path between the upstream shut-off valves (32A-32P) and the flow control valves (36A-36P) may have a branched flow path leading to the upstream purge shut-off valves (34A-34P). When open, the upstream purge shut-off valves (34A-34P) allow fluid to flow from the upstream shut-off valves (32A-32P) to the upstream purge manifold (35) to discharge fluid from the gas delivery system (10). When closed, the upstream purge shut-off valves (34A-34P) allow fluid to flow from the gas source (28A-28P) to the flow control valves (36A-36P) without being divided. Thus, by controlling the individual upstream shut-off valves (32A-32P) and upstream purge shut-off valves (34A-34P), the flow paths of the individual module rows may be intended to purge fluid from the gas delivery system (10) in a compartmentalized manner. That is, the system controller (12) is configured to control each shut-off valve (34A-34P) to control the purging of gas in each row of modules on the machine backplane (19). It will be recognized that when the mass flow controller (30A-30P) requires replacement, the valves (32, 34, 38 and 40) can be used to empty or isolate specific parts of the gas delivery system (10).

[0024] The upstream shut-off valves (32A-32P) and upstream purge shut-off valves (34A-34P) can be controlled by a mass flow controller (30A-30P) to create a vacuum in the flow path between the upstream shut-off valves (32A-32P) and the flow control valves (36A-36P). For example, if a vacuum is required between the first upstream shut-off valve (32A) and the first flow control valve (36A), the first upstream shut-off valve (32A) and the first flow control valve (36A) can be completely closed, and the first upstream purge shut-off valve (34A) can be opened so that the gas in the flow path between the first upstream shut-off valve (32A) and the first flow control valve (36A) is purge into the upstream purge manifold (35) and discharged out of the gas delivery system (10), thereby effectively creating a vacuum in the flow path between the first upstream shut-off valve (32A) and the first flow control valve (36A). Alternatively or additionally, the first upstream shut-off valve (32A) and the first flow control valve (36A) may be completely closed, and the first upstream purge shut-off valve (34A) may be opened so that gas in the flow path between the first upstream shut-off valve (32A) and the first flow control valve (36A) is purge into the upstream purge manifold (35) and new gas is injected into the gas delivery system (10), thereby effectively creating pressure in the flow path between the first upstream shut-off valve (32A) and the first flow control valve (36A). It will be recognized that the purge manifold (35 and 41) may be connected to a purge system or a vacuum system, and the downstream shut-off valves (40A-40P) may be used to control or stop the purge or vacuuming process.

[0025] As briefly discussed above, with reference to FIGS. 1 and 4, two backplanes are exemplified: an electric backplane (18) and a mechanical backplane (19) stacked on the electric backplane (18) and having a gap formed between them. When the gas delivery system (10) is configured as a gas delivery device, the electric backplane (18) and the mechanical backplane (19) are enclosed within the housing (11) of the gas delivery device. On the electric backplane (18), a system controller (12) and a module under control (20, 24A-24D, 26A-26D, 30A-30P) are physically mounted via an electric connector (50A-50U), which has a slot configured to accommodate a printed circuit board of the module under control. On the mechanical backplane (19), a plurality of mass flow controllers (30A-30P) are physically mounted in a flow block (81). The flow path passes through the flow block (81) of the mass flow controller (30A-30P) and passes through a plurality of valves (upstream shut-off valve (32A-32P), upstream purge shut-off valve (34A-34P), flow control valve (36A-36P), downstream purge shut-off valve (38A-38P), downstream shut-off valve (40A-40P)) located in the flow path and operably coupled to a plurality of mass flow control circuit (30A-30P) elements. Each flow path flexibly connects a plurality of valves (upstream shut-off valve (32A-32P), upstream purge shut-off valve (34A-34P), flow control valve (36A-36P), downstream purge shut-off valve (38A-38P), downstream shut-off valve (40A-40P)) to a plurality of mass flow controllers (30A-30P).Additionally, on the mechanical backplane (19), a plurality of valves (flow rate shut-off valves (42A-42D) and flow rate control valves (44A-44D)) are physically mounted as well as flow paths that flexibly connect the plurality of valves to a plurality of flow rate controllers (26A-26D), and flow rate control circuits (26A1-26D1). Thus, the plurality of valves and flow paths are arranged in modular rows on the mechanical backplane (19).

[0026] Although the input / output module (20) is shown in FIGS. 4 and 7 as being mounted at the lower right corner of the gas delivery system (10), it will be recognized that, additionally or alternatively, a flow rate change measuring device (21) may be installed at the same location downstream of the mass flow controller (30) and the mixing manifold (48) or nearby thereto. The flow rate change measuring device (21) may be configured to perform a rise rate (ROR) measurement of the mass flow controller (30) to determine the flow rate or flow profile of the mass flow controller (30), or to perform a fall rate (ROF) measurement of the flow rate controller (26) to determine the flow rate or flow profile of the flow rate controller (26). Additionally, although both are illustrated in FIG. 4 and 7 as being alternatively located in the same position, it will be recognized that both the input / output module (20) and one or more rate of change measuring devices (21) may be installed as controlled modules downstream of the mixing manifold (48), for example, in a space provided next to the flow rate controller. Additionally, other components may be mounted at this location, including an external bus extension, a bulb module, a field instrumentation system, a thermal-based mass flow controller, and a limiter-free mass flow controller that does not include a limiter. The bulb module may be a gas line configured to carry bulb gas. The thermal-based mass flow controller may be configured with a temperature sensor instead of a pressure sensor to control the flow of fluid through the mass flow controller. The limiter-free mass flow controller may be configured to accurately estimate the flow rate by modeling the dynamics of the fluid flowing through the mass flow controller through a regression model or a trained machine learning model. The flow rate may be estimated based on inputs from at least two pressure sensors, a temperature sensor, and a valve position sensor. A mass flow controller without a limiter can be configured to control the position of the control valve according to the estimated flow rate and does not include a limiter.Examples of mass flow controllers without limiters that may be used are described in co-pending U.S. Patent Application No. 62 / 953,803, the entire disclosure of which is incorporated herein by reference. An in-situ measurement system may receive feedback from a downstream process chamber regarding a measurement process occurring in a workpiece being manufactured, and based on the feedback, change the characteristics of the gas flow (e.g., temperature, pressure, flow rate, or flow duration) through a gas delivery system. For example, the feedback may be a signal indicating the thickness of a material deposited on a wafer in a semiconductor processing chamber, which is measured in the chamber by an optical emitter and a detector.

[0027] Continuing in FIGS. 1 and 4, each flow path between the downstream shut-off valves (40A-40P) and the corresponding flow control valves (36A-36P) may have a branched flow path leading to downstream purge shut-off valves (38A-38P). When open, the downstream purge shut-off valves (38A-38P) allow fluid to flow from each flow control valve (36A-36P) to the downstream purge manifold (41) to discharge fluid from the gas delivery system (10). When closed, the downstream purge shut-off valves (38A-38P) allow fluid to flow from the flow control valves (36A-36P) to the mixing manifold (48) without being divided.

[0028] The downstream shut-off valves (40A-40P) and downstream purge shut-off valves (38A-38P) can be controlled by a mass flow controller (30A-30P) to create a vacuum in the flow path between the flow control valves (36A-36P) and the downstream shut-off valves (40A-40P). For example, if a vacuum is required between the first flow control valve (36A) and the first downstream shut-off valve (40A), the first flow control valve (36A) and the downstream shut-off valve (40A) can be completely closed, and the first downstream purge shut-off valve (38A) can be opened so that the gas in the flow path between the first flow control valve (36A) and the first downstream shut-off valve (40A) is purge into the downstream purge manifold (41) and discharged out of the gas delivery system (10), thereby effectively creating a vacuum in the flow path between the first flow control valve (36A) and the downstream shut-off valve (40A). Alternatively or additionally, the first flow control valve (36A) and the downstream shut-off valve (40A) can be completely closed, and the first downstream purge shut-off valve (38A) can be opened so that gas in the flow path between the first flow control valve (36A) and the first downstream shut-off valve (40A) is purge into the downstream purge manifold (41) and new gas is injected into the gas delivery system (10), thereby effectively creating pressure in the flow path between the first flow control valve (36A) and the first downstream shut-off valve (40A). The vacuum source may be a vacuum pump coupled to the outlet of the purge manifold (41). Alternatively, as discussed elsewhere in this specification, the purge can be achieved by allowing the purge gas to flow into the inlet of the upstream flow block (80) and opening the upstream and downstream shut-off valves and the upstream and downstream purge shut-off valves so that the purge gas flows out of the purge manifold (35, 41) through the flow block (80-82).Accordingly, by controlling individual downstream shut-off valves (40A-40P) and downstream purge shut-off valves (38A-38P), the flow path of individual module rows can be intended to purge fluid from the gas delivery system (10) in a compartmentalized manner. That is, the system controller (12) is configured to control each shut-off valve (38A-38P) to control the purge of gas in each module row on the mechanical backplane (19).

[0029] FIG. 6 is an exemplary schematic diagram showing the flow of data and control signals for the first mass flow control circuit (30A1) and the first flow rate control circuit (26A1). For brevity, the flow of data and control signals related to other controlled modules is not shown in this schematic diagram.

[0030] Referring to FIG. 6, an example of an asynchronous flow of data signals from a pressure sensor pair (52A) will be described. The pressure sensor pair (52A) detects pressure in a flow path corresponding to the first mass flow controller (30A) and transmits a pressure signal to the first mass flow control circuit (30A1). Then, the first mass flow control circuit (30A1) embeds an address corresponding to the first mass flow control circuit (30A1) and the pressure sensor pair (52A) into a data stream and transmits the data stream containing the embedded address and the pressure signal to the second memory interface (22B). The second memory interface (22B) sends the data stream to the electric backplane (18), and the electric backplane (18) transmits the data stream to the first memory interface (22A). The coprocessor (13) deserializes the data stream and stores the data stream in the read data register of the first memory interface (22A) corresponding to the first mass flow control circuit (30A1). This transfer of the data stream from the first mass flow control circuit (30A1) to the first memory interface (22A) can be triggered by a request from the coprocessor (13). The system controller (12) accesses the read data register of the first memory interface (22A) corresponding to the first mass flow control circuit (30A1), and the system controller (12) recognizes the pressure signal as originating from the pressure sensor pair (52A) corresponding to the first mass flow controller (30A). This data can be stored in the data log (15A) of the central data storage (15) of the non-volatile memory (14), and thus the data in the data log (15A) will be available for subsequent analysis, for example, through an AI model (15B).It may be recognized that pressure signals from pressure sensors (46A and 47A) of the first flow rate controller (26A) are similarly processed by the flow rate control circuit (26A1), the fifth memory interface (22E), the electric backplane (18), the first memory interface (22A), and the system controller (12) to store the pressure signals of the pressure sensors (46A and 47A) in the data log (15A). Accordingly, during the operation process, the system controller (12) can collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to a plurality of mass flow controllers (30A-30P) and flow rate controllers (26A-26D), and can store the valve position information and sensor information in the data log (15A) stored in the non-volatile memory (14). After the operation process, the valve position information and sensor information can be uploaded to a remote computer, for example, in batches.

[0031] The system controller (12) is not specifically limited to the collection and storage of information, and the system controller (12) is also configured to perform calculations based on stored valve position and sensor information. In this example, the system controller (12) is also configured to calculate flow and control values ​​based on valve position and sensor information from the active mass flow controller and the active flow rate controller in real time during control operation. For example, when the system controller (12) obtains pressure information, temperature information, and valve position information of the first flow control valve (36A) from the first mass flow controller (30A), the system controller (12) can calculate the flow and determine a new appropriate valve position accordingly, and then store the new valve position in the first memory interface (22A). The coprocessor (13) can send the new valve position back to the first mass flow controller (30A) and then adjust the first flow control valve (36A) to the new valve position. That is, the system controller (12) can process data and control calculations for the gas delivery system (10) during real-time operation.

[0032] As an example of the actual application of the AI ​​model (15B), the system controller (12) may be further configured to execute the AI ​​model (15B) stored in the non-volatile memory (14) to train the AI ​​model (15B) on sensor information from multiple sensors and valve position information from multiple valves during the golden manufacturing process at training time. At runtime, the system controller (12) may subsequently execute an AI model feedback module to monitor performance changes in the manufacturing process for the golden manufacturing process or perform feedback training on the AI ​​model (15B) based on sensor information and valve position information, and may determine performance changes in the manufacturing process at runtime for the golden manufacturing process using the trained AI model (15B).

[0033] As illustrated in FIG. 6, in this example, the first mass flow control circuit (30A1) is operably coupled to the shut-off valves (32A, 34A, 38A, 40A) and the flow control valve (36A). The first mass flow control circuit (30A1) can control the opening position of each valve (32A, 34A, 36A, 38A, 40A) by transmitting a control signal to each of the valves (32A, 34A, 36A, 38A, 40A). In turn, each valve (32A, 34A, 36A, 38A, 40A) can transmit a data signal indicating the opening position of each valve (32A, 34A, 36A, 38A, 40A) to the first mass flow control circuit (30A1). Likewise, the first flow rate control circuit (26A1) is operably coupled to the flow rate shut-off valve (42A) and the flow rate control valve (44A). The first flow rate control circuit (26A1) can transmit a control signal to each valve (42A, 44A) to control the opening position of each valve (42A, 44A). In turn, each valve (42A, 44A) can transmit a data signal indicating the opening position of each valve (42A, 44A) to the first flow rate control circuit (26A1). For the shut-off valves (32A, 34A, 38A, 40A, 42A), the opening position may be an open state that is on or off. For the control valves (36A and 44A), the opening position may be an opening position that can be selectively varied among a plurality of possible opening positions, such as an opening ratio or an opening angle, and may be a linear scale.

[0034] For example, when the system controller (12) closes the first upstream shut-off valve (32A) in an asynchronous process, the system controller (12) transmits a data stream in which the addresses of the first upstream shut-off valve (32A) and the first mass flow control circuit (30A1) are embedded. The data stream enters the first memory interface (22A) into a write data register corresponding to the first mass flow control circuit (30A1). The coprocessor (13) serializes the data stream and transmits it to the electric backplane (18), where the data stream is directed to the second memory interface (22B). The second memory interface (22B) reads the address embedded in the data stream and transmits the data stream to the first mass flow control circuit (30A1). Next, the first mass flow control circuit (30A1) sends a control signal to the first upstream shut-off valve (32A) and controls the opening of the first upstream shut-off valve (32A) according to instructions from the system controller (12) of the data stream. It will be recognized that the system controller (12) can control other valves of the gas delivery system (10) in a manner similar to asynchronous.

[0035] Referring to FIG. 7, a perspective view of an electric backplane (18) is shown. The electric backplane (18) comprises a printed circuit board provided with a plurality of backplane interfaces, each backplane interface configured to mount a module under control (20, 24A-24D, 26A-26D, 30A-30P). The backplane interfaces are in the form of electrical connectors (50A-50U). In one example, the electrical connection is a board-to-board right-angle printed circuit board receptacle, such as a PCIe slot configured to accommodate the printed circuit board of the module under control. In this example, each mass flow control circuit (30A1-30P1) comprises a local printed circuit board physically mounted on the electric backplane (18) via a board-to-board electrical connection between the local printed circuit board and the backplane printed circuit board. The system controller (12), coprocessor (13), non-volatile memory (14), and memory interfaces (22A-22E) are exemplified by a chipset that is mounted directly on the top of the electric backplane (18), connected by electrical traces of the configuration bus (18B1) and control bus (18B2), and connected to the power supply bus (16A). However, the system controller (12), coprocessor (13), and non-volatile memory (14) may alternatively be mounted on the rear of the electric backplane (18), or mounted on a separate printed circuit board and connected to the electric backplane via a slot receptacle such as a PCIe slot. Configuring the electric backplane (18) as a single circuit board achieves centralization of data processing and hardware control by the system controller, thereby reducing bandwidth limitations and latency associated with the controller being separated from the hardware that controls and communicates through the computer network. Mounting the element to the electrical connector (50A-50U) may involve plugging the element into a slot of the electrical connector (50A-50U), such as the PCIe receptacle discussed above.The power supply bus (16A) can be configured to supply power to a plurality of mass flow controllers (30A-30P), flow rate controllers (26A-26D), system controllers (12) and a plurality of valves (upstream shut-off valves (32A-32P), upstream purge shut-off valves (34A-34P), flow control valves (36A-36P), downstream purge shut-off valves (38A-38P), downstream shut-off valves (40A-40P), flow rate shut-off valves (42A-42D) and flow control valves (44A-44D)).

[0036] FIG. 8 illustrates a side view of a first mass flow controller (30A) and its corresponding first upstream flow shut-off valve (32A), first upstream purge shut-off valve (34A), downstream purge shut-off valve (38A), downstream shut-off valve (40A), and first flow control valve (36A) according to the embodiment of FIG. 1. It will be understood that this standardized valve arrangement and the configuration of the mass flow control circuit represent the arrangement of hardware corresponding to the remaining mass flow control circuits (30B-30P) according to the embodiment of FIG. 1. Standardization of the hardware arrangement allows the mass flow control circuit to be easily installed or removed from the electrical backplane according to user preferences. The valves and controllers are provided in an orderly arrangement of modules, increasing the ease of management and maintenance of the gas delivery system (10). In each row, each mass flow controller (30A-30P) has an associated upstream flow block (80) and an associated downstream flow block (82). The first upstream flow shut-off valve (32A) and the first upstream purge shut-off valve (34A) are provided adjacent to the upstream purge manifold (35) in the upstream flow block (80), and the downstream purge shut-off valve (38A) and the downstream shut-off valve (40A) are provided adjacent to the downstream purge manifold (41) in the downstream flow block (82). The mass flow controller (30A) is provided adjacent to the first flow control valve (36A), the pressure sensor pair (52A), and the shut-off valves (32A, 34A, 38A, 40A). These close proximity and adjacent arrangements achieve a concise arrangement of flow elements and circuits of the gas delivery system (10). Furthermore, the upstream flow block (80) and the downstream flow block (82) have modular, standardized shapes, mounts, and connectors so that they can be compatible and interact with each other on the mechanical backplane (19).Accordingly, as long as the flow block complies with the standard that allows it to interface with the mechanical backplane (19) and interact with the rest of the gas delivery system (10), the flow block can be freely exchanged and replaced with other valves, flow paths, and sensors accommodated in different flow blocks.

[0037] FIG. 9 illustrates a mass flow control circuit (30A1) of an exemplary mass flow controller (30A) of a gas delivery system (10). The mass flow control circuit (30A1) comprises a printed circuit board having an upper half extending over the upper surface (19A) of the mechanical backplane (19), a middle part extending through an opening (19C) of the mechanical backplane (19), and a lower part extending to an electrical connector (50A) on the electric backplane (18) below the lower surface (19B) of the mechanical backplane (19). A solenoid driver (58), which may include an electric or pneumatic solenoid driver, is contained, for example, in non-volatile memory. A valve control circuit (68) is provided capable of reading a driver and reading a pressure signal detected by a pressure sensor pair (52A), and outputting a drive signal to a flow control valve (36A), as well as to an upstream shut-off valve (32A), an upstream purge shut-off valve (34A), a downstream purge shut-off valve (38A), and a downstream shut-off valve (40A). A CPLD circuit (62) is provided that can be configured as a memory interface to enable the valve control circuit (68) to communicate with a system controller (12) via pins on the PCB of the mass flow controller and a local bus, an electrical connector (50A), and a communication bus (18B) of the electrical backplane (18). It will be recognized that the flow rate controllers (26A-26D) and pressure controllers (24A-24D) can be configured similarly to the mass flow controller (30A).

[0038] It will be recognized that the electric backplane (18) is not specifically limited to being operably coupled to a particular arrangement of flow blocks and controlled modules shown in FIG. 4, and alternatively may be operably coupled to other arrangements of flow blocks and controlled modules to achieve similar potential benefits of centralized data collection and control.

[0039] Although the second memory interface (22B) is depicted in the drawing as a single interface connected to a plurality of mass flow controllers (30A-30P), it will be recognized that the second memory interface (22B) may alternatively be implemented as a plurality of interfaces connected to a plurality of mass flow controllers (30A-30P). In one alternative embodiment, the second memory interface (22B) may include a plurality of interfaces, each interface being connected to a single mass flow controller. Although the fourth memory interface (22D) is depicted in the drawing as a single interface connected to a plurality of pressure controllers, it will be recognized that the fourth memory interface (22D) may alternatively be implemented as a plurality of interfaces connected to a plurality of pressure controllers. In one alternative embodiment, the fourth memory interface (22D) may include a plurality of interfaces, each interface being connected to a single pressure controller. Although the fifth memory interface (22E) is depicted in the drawing as a single interface connected to a plurality of flow rate controllers, it will be recognized that the fifth memory interface (22E) may alternatively be implemented as a plurality of interfaces connected to a plurality of flow rate controllers. In one alternative embodiment, the fifth memory interface (22E) may include a plurality of interfaces, each interface being connected to a single flow rate controller.

[0040] FIG. 10a illustrates a perspective view of the upstream flow block (80) of the gas delivery system of FIG. 1. It will be recognized that the downstream flow block (82) of the gas delivery system (10) has a similar configuration, and therefore FIG. 10a and 10d will be used to describe both flow blocks. In a similar case, for brevity, only the upstream flow block (80) will be described. One difference in the configuration between the upstream flow block (80) and the downstream flow block (82) is as shown in FIG. 10a. The inlet and outlet of the downstream flow block (82) are formed on the lower surface of the flow block, whereas the inlet of the upstream flow block (80) is formed on the side of the flow block. The dashed line in FIG. 10a indicates the configuration of the downstream flow block (82) having an inlet on the lower surface. The upstream flow block (80) and downstream flow block (82) are each mounted on the dual-purpose mounting and flow blocks (37 and 39), which are subsequently mounted on the upper surface (19A) of the mechanical backplane (19).

[0041] As illustrated in FIG. 10a, a first mount (80A) is provided on an upstream flow block (80) to accommodate and secure an upstream shut-off valve (32A), and a second mount (80B) is provided on an upstream flow block (80) to accommodate and secure a first upstream purge shut-off valve (34A). A first mount (82A) is provided on a downstream flow block (82) to accommodate and secure a downstream shut-off valve (40A), and a second mount (82B) is provided on a downstream flow block (82) to accommodate and secure a downstream purge shut-off valve (38A). Threads (80A2, 80B2) are provided on the first mount (80A) and the second mount (80B) so that the valves (32A, 34A) can be screwed into the upstream flow block (80). Additionally, within each mount (80A and 80B), a corresponding valve seat surface (80A1, 80B1) is formed, wherein two ports are formed: a first port (80A3, 80B3) formed in the center of the valve seat surface (80A1, 80B1) and a second port (80A4, 80B4) formed in a partially radial arc shape at a position radially outward from the first port (80A3, 80B3). A protrusion (80C) in the central region of the upper surface of the upstream flow block (80) accommodates a flow path extending laterally within the flow block as described below.

[0042] FIG. 10b illustrates a cross-sectional view of an upstream flow block (80) taken along A-A' of FIG. 10a. Each upstream flow block (80) includes an inlet (72A), an outlet (72B), and a purge port (72C). Each upstream flow block (80) includes a branch flow path (70) flowing through a flow channel (72) from the inlet (72A) of the flow channel to the outlet (72B), and through a purge branch (70C) leading from the branch point (70B) to the purge port (72C) of the flow channel. At least a portion of the branch flow path (70) may include a heating line configured to vaporize the incoming liquid into a gas supplied to the mass flow controller (30). An upstream flow block (80) equipped with such a heated vaporization line may be referred to as a vaporization module. A subset of rows of the gas delivery device (10) may be provided with a vaporization module such as an upstream flow block, and one or both of the flow blocks (37, 39) and / or the mixing manifold (48) may be equipped with a passage for mixing the gas flowing through the upstream flow block (37) without a heating line with the vaporized gas from the evaporation module. The branch flow path (70) extends from the inlet (72A) to the branch point (70B) along the inlet branch (70A) of the flow path, where the flow path is divided into an outlet branch (70D) and a purge branch (70C). At the branch point (70B), the flow path flows along the outlet branch (70D) leading from the branch point (70B) to the outlet (72B), and along the purge branch (70C) leading from the branch point (70B) to the purge port (72C) of the flow channel (72). A first upstream purge shut-off valve (34A) is located in the purge branch (70C) and is configured to control the gas flow from the inlet (72A) to the purge port (72C), and a first upstream shut-off valve (32A) is located in the inlet branch (70A) and is configured to control the gas flow from the inlet (72A) to the outlet (72B) through the internal outlet channel (72B1) along the outlet branch (70D).When the first upstream shut-off valve (32A) is opened, gas can flow from the inlet (72A) to the branch point (70B). Thus, during the purge operation, it will be recognized that the two shut-off valves (32A and 34A) are opened, allowing purge gas to flow from the inlet (72A) to the purge port (72C) and ultimately out of the upstream purge manifold (35). The outlet (72B) of the upstream flow block (80) is connected to the flow block (37), and the flow block (37) guides the gas to the inlet of each mass flow controller. During the non-purge operation, the first upstream purge shut-off valve (34A) is closed and the upstream shut-off valve (32A) is opened, allowing gas to flow from the gas source (28A) to the mass flow controller (30A) through the inlet branch (70A) and outlet branch (70D) of the flow path (70). Another flow block (39) is positioned to guide gas from the outlet of the mass flow controller (30A) to the inlet of the downstream flow block (82).

[0043] Referring to FIG. 10c, a first mount (82A) is provided on the downstream flow block (82) to accommodate and secure a downstream shut-off valve (40A), and a second mount (82B) is provided on the downstream flow block (82) to accommodate and secure a downstream purge shut-off valve (38A). Threads are provided on the first mount (82A) and the second mount (82B) so that the valves (38A, 40A) can be screwed into the downstream flow block (82). Additionally, corresponding valve seat surfaces (82A1, 82B1) are formed within each mount (82A and 82B). A bulge (82C) in the central region of the upper surface of the downstream flow block (82) accommodates a flow path extending laterally within the flow block, similar to the bulge (80C) of the upstream flow block (80).

[0044] Additionally, referring to FIG. 10c, it will be recognized that each downstream flow block (82) includes an inlet (72A'), an outlet (72B'), and a purge port (72C). Unlike the upstream flow block (80), the inlet (72A') of the downstream flow block (82) is located on the lower surface of the flow block as illustrated in FIG. 10c. Each downstream flow block (82) includes a branched flow path (70) flowing through a flow channel (72) extending from the inlet (72A') to a branch point (70B) along the inlet branch (70A) of the flow path (70), wherein the flow path (70) is divided into an outlet branch (70D) leading from the branch point (70B) to an outlet (72B') and a purge branch (70C) leading from the branch point (70B) to a purge port (72C). The downstream flow block (82) further includes a first downstream purge shut-off valve (38A) located in the purge branch (70C) and configured to control the gas flow from the inlet (72A') to the purge port (72C), and a second downstream shut-off valve (40A) located in the outlet branch (70D) and configured to control the gas flow from the inlet (72A') to the outlet (72B') along the outlet branch (70D). The outlet (72B') of each downstream flow block (82) is flexibly connected to the respective inlet of the mixing manifold (48). The outlet (72B') of the downstream flow block (82) is connected to the mixing manifold (48), and the mixing manifold (48) guides the gas to the inlet of each flow rate controller. It will be recognized that both the downstream purge shut-off valve (38A) and the downstream shut-off valve (40A) are opened during the purge operation to allow the purge gas to flow from the inlet (72A) to the purge port (72C) and ultimately to the downstream purge manifold (41). During the controlled flow operation into the chamber, the first downstream purge shut-off valve (38A) is closed to prevent gas flow to the purge manifold (41), and the second downstream shut-off valve (40A) is opened.

[0045] Referring to FIGS. 10b and 10c, at least one of the upstream and downstream flow blocks (80, 82) includes an internal channel (72C1) that extends in the horizontal and longitudinal directions and is located between the upper surface (80D, 82D) and the lower surface (80E, 82E) of the flow block (80, 82). The internal channel (72C1) forms part of the purge branch (70C) of the flow path (70) and connects the radially shaped second port (80B4) shown in FIG. 10a to the U-shaped channel of FIG. 10c. In the case of the upstream flow block (80), the internal channel (72C1) is fluidly connected to a first upstream purge shut-off valve (34A) through a first vertical channel (72C2) that extends downward from the second port (80B4). For the downstream flow block (82), the internal channel (72C1) is flexibly connected to the downstream purge shut-off valve (38A) through the first vertical channel (72C2). Although only these internal channel (72C1) and vertical channel (72C2) are shown in FIG. 10b, as shown by the dashed line in FIG. 10a, left and right internal channels (72C1, 72C1') and left and right first vertical channels (72C2, 72C2') are provided and flexibly connected to each end of the second port (80B4).

[0046] Continuing with FIG. 10b, the inner channel (72C1) is flexibly connected to the purge port (72C) through the second vertical channel (72C3), and the inner channel (72C1') shown in FIG. 10a is also connected to the purge port (72C) through the second vertical channel (72C3') shown in FIG. 10a and 10d. As described below, the left and right second vertical channels (72C3, 72C3') are flexibly connected by a channel (72C3a) extending laterally. Referring further to FIG. 10b and 10c, it can be seen that the first upstream purge shut-off valve (34A) and the second downstream shut-off valve (40A) are each located closer to the outlet than to the inlet. Since the inner channel (72C1) cannot be easily formed by traditional manufacturing processes such as milling or drilling due to its location inside the flow block, an alternative manufacturing process may be used. For example, an upstream flow block (80) containing internal channels (72C1 and 72C1') can be formed by an additive manufacturing process such as 3D printing. Additive manufacturing refers to a manufacturing process in which materials are bonded together to create the final shape of a workpiece layer by layer based on a 3D computer-aided design (CADCAM) model, and can be contrasted with reductive processes such as machining to remove material. For example, additive manufacturing processes such as 3D printing, powder bed fusion, sheet lamination, direct energy deposition, or direct metal laser sintering may be utilized. By additively manufacturing the flow block, flow channels with complex internal shapes can be created as a single block of material, thus reducing the need to bolt, weld, machine, or join sections of the flow block that could cause leakage. Additionally, additive manufacturing can create internal contours and flow paths that were not possible with conventional machining processes.

[0047] FIG. 10b also illustrates the operation of upstream shut-off valves (32A, 34A). Each of these valves includes an actuator that drives the valve surface (32A1, 34A1) up and down to selectively contact or separate from the valve seat surface (80A1, 80B1). This movement controls the opening and closing of the valve and allows gas to selectively flow through the valve along the respective inlet branch (70A) or purge branch (70C) of the flow path (70) as indicated. FIG. 10c similarly illustrates the operation of downstream purge shut-off valve (38A) and downstream shut-off valve (40A). Each of these valves includes an actuator that drives the valve surface (38A1, 40A1) up and down to selectively contact or separate from the valve seat surface (82A1, 82B1). These movements control the opening and closing of the valves and allow gas to flow selectively through the valves along each inlet branch (70A) or purge branch (70C) of the flow path (70) as indicated. Each shut-off valve (32A, 34A, 38A, 40A) may be of a different valve type, but is generally a pneumatically controlled shut-off valve.

[0048] FIG. 10d illustrates a cross-sectional view of an upstream flow block (80) taken along B-B' of FIG. 10a, and a downstream flow block (82) is identical in this cross-section. An inverted U-shaped channel is formed in the upstream flow block (80) by a second vertical channel on the right (72C3), a second vertical channel on the left (72C3'), and a transverse extension channel (72C3a) that fluidly connects each of the pair of second vertical channels on the right and left (72C3, 72C3'). The U-shaped channel is fluidly connected to each of a pair of internal horizontal channels (72C1, 72C1') extending from the right and left sides of the upstream flow block (80) in the longitudinal direction of the fuzzy branch of the branch flow path from the first vertical channel (72C2) to the second vertical channel (72C3), and from the first vertical channel (72C2') to the second vertical channel (72C3') as illustrated in FIG. 10a. Furthermore, referring to FIG. 10d, the central bore of the inlet channel (72A1) of the inlet branch (70A) of the branch flow path (70) is formed in the transverse and vertical central region of the upstream flow block (80), and the upper, right, and left sides are surrounded by the U-shaped channel. In this way, the inlet branch of the flow path is delivered to the inlet channel (72A1) and is fluidly separated from the purge branch (70C) of the flow path, which is delivered to the U-shaped channel and the inner horizontal channel (72C1, 72C1') in this drawing. In some examples, the purge branch (70C) may be configured as a purge / vacuum branch, and the purge manifold (35, 41) connected to the purge / vacuum branch may be connected to a vacuum pump to purge gas from the system, whereas in other examples, the purge gas may flow out of the purge manifold (35, 41) through the system to complete the purge operation.

[0049] During operation, the gas source (28A) is activated and gas flows from the gas source (28A) to the inlet of the upstream flow block (80). The upstream shut-off valve (32A) is opened to allow gas to flow through the upstream flow block, and the first upstream purge shut-off valve (34A), which controls the branch flow to the purge manifold, is closed. Thus, all gas entering the inlet can flow through the upstream flow block (80) to the outlet. The gas then passes through the flow block (37) and enters the inlet of the mass flow controller flow block (81), which will be described in detail below. The mass flow controller flow block (81) includes a flow path from the inlet to the outlet of the mass flow controller flow block (81). The first flow control valve (36A) controls the flow rate of the gas flowing through the mass flow controller flow block (81). The gas exits the mass flow controller flow block (81), travels through the flow block (39), and enters the downstream flow block (82). The downstream shut-off valve (40A) of the downstream flow block (82) is opened to allow gas to flow through the downstream flow block (82), and the downstream purge shut-off valve (38A) is closed to prevent gas from escaping from the purge manifold (41). The gas exits the outlet of the downstream flow block (82) to enter a mixing manifold (48) where it is mixed with gas from another row of the gas delivery system (10) before being guided to one of the multiple flow rate controllers (26A-26D). Each of the flow rate controllers (26A-26D) performs flow rate control for the gas exiting the mixing manifold (48) to deliver a total flow of a predetermined rate from each outlet.

[0050] Now, referring to FIG. 11a, the mass flow controller flow block (81) of the mass flow controller (30A) is shown in a perspective view having a flow control valve (36A), a restrictor housing (53) housing a restrictor (53A), a pressure sensor pair (52A) comprising a first pressure sensor (52A1) positioned to measure the pressure of a fluid channel on the first side of the restrictor (53A) and a second pressure sensor (52A2) positioned to measure the pressure of a fluid channel on the second side of the restrictor (53A), and an upstream pressure sensor (51) installed upstream of the restrictor (53A) and configured to measure pressure in the vicinity adjacent to the flow control valve (36A). It will be recognized that the first and second pressure sensors (52A1 and 52A2) are each located on opposite sides of the restrictor (53A). A pair of threaded holes (25A) are located on the side of the mass flow controller flow block (81), and a fastener (25B) (see FIG. 4) is inserted therein to secure the printed circuit board of the mass flow control circuit (30A1).

[0051] In FIG. 11b, the upstream pressure sensor (51), the pressure sensor pair (52A), and the flow control valve (36A) are omitted to show the valve seat surface (83A) where the valve of the flow control valve is closed to seal the valve. A thread (83C) for securing the flow control valve (36A) to the flow block is shown. A mounting surface (83B) is shown on the mass flow controller flow block (81) and is configured to receive and secure the first pressure sensor (52A1) and the second pressure sensor (52A2) of the pressure sensor pair (52A).

[0052] Referring to FIG. 11c, a cross-sectional view of a mass flow controller flow block (81) is shown. In this drawing, the upstream pressure sensor (51), the limiter (53A), the first pressure sensor (52A1) and the second pressure sensor (52A2) of the pressure sensor pair (52A), and the flow control valve (36A) are schematically shown in their typical attachment positions, which are more accurately illustrated in FIG. 11a. This cross-sectional view shows a flow path (84) passing through a flow channel (86) extending from an inlet (86A) to an outlet (86B). The inlet branch (84A) of the flow path (84) extends from the inlet (86A), passes through the upstream pressure sensor (51), and flows through the flow control valve (36A). The flow control valve (36A) is mounted on the flow path (84) on the inlet branch (84A) and is configured to control the flow rate of the gas flowing through the flow path (84). An upstream pressure sensor (51) is mounted upstream of the control valve (36A) and configured to detect the pressure of the gas flowing along the flow path (84) in the inlet branch (84A) upstream of the control valve (36A). The first pressure sensor (52A1) and the second pressure sensor (52A2) of the pressure sensor pair (52A) are mounted downstream of the flow control valve (36A). When the gas flows from the inlet to the outlet in FIG. 11c, the first pressure sensor (52A1) is located upstream of the restrictor (53A), while the second pressure sensor (52A2) is located downstream of the restrictor (53A). The restrictor (53A) is provided in the internal channel (86C) to block the flow of gas flowing in the internal channel (86C). The first pressure sensor (52A1) is located at the end of the first branch channel (86D) branching from the internal channel (86C) upstream of the limiter (53A) and is configured to detect the pressure of the gas flowing along the main internal branch (84C) upstream of the limiter (53A).The main internal branch (84C) of the flow path (84) travels through the internal channel (86C), where it first flows horizontally in the longitudinal direction, then moves downward toward the limiter (53A), and then turns upward toward the outlet (86B). It will be recognized that such a structure containing the internal channel (86C) having multiple 90-degree bends cannot be manufactured in a monolithic flow block by conventional approaches such as drilling or milling. Therefore, the mass flow controller flow block (81) having such internal horizontal channels can be manufactured by an additive manufacturing process, as with other flow blocks described herein.

[0053] The second branch channel (84D) is provided by branching from the outlet branch (84B) of the flow path (84) of the internal channel (86C) located downstream of the restrictor (53A). The second pressure sensor (52A2) of the pressure sensor pair (52A) is located at the end of the second branch channel (84D) and is configured to detect the pressure of the gas flowing along the outlet branch (84B) downstream of the restrictor (53A). The upstream and downstream pressures of the restrictor (53A) are measured by the first pressure sensor (52A1) and the second pressure sensor (52A2), respectively, and the flow rate of the gas flow can be calculated from the difference between these detected pressures. This information can be continuously used in a feedback control loop by the mass flow control circuit (30A1) of the mass flow controller (30A) to control the flow through the flow control valve (36A), for example, to flow in the direction toward a flow setpoint, i.e., a desired flow rate. In this way, gas can be delivered from the outlet (86B) of the mass flow controller (30A) at a stable flow rate. The upstream pressure sensor (51) detects the upstream pressure of the limiter (53A) near the flow control valve (36A), and the processing circuit of the mass flow controller (30A) checks to ensure that the detected pressure is within an acceptable operating range during operation.

[0054] In other embodiments, it will be recognized that the pressure sensor pair (52A) may be replaced with a single pressure sensor or a single thermal mass flow sensor (54). For example, as illustrated in FIG. 11c, when the mass flow controller (30A) is configured as a heat-based mass flow controller, the pressure sensor pair (52A) may be configured as a single thermal mass flow sensor (54) that measures a temperature change associated with applying a known amount of heat to the flowing fluid, or measures the amount of heat required to maintain the thermal mass flow sensor (54) at a constant temperature. Here, one bypass line (54a) is provided to the thermal mass flow sensor (54) instead of two branch channels (86D, 84D) provided with two pressure sensors (52A1, 52A2) at each end. It will be recognized that, unlike a pressure mass flow controller, a heat mass flow controller has a flow path through a bypass line (54a) that fluidly connects two branch channels (86D, 84D) from one side of the restrictor to the other.

[0055] Referring to FIG. 12, a partial plan view of a mixing manifold (48) mounted on a mechanical backplane (19) is illustrated according to an example of the present disclosure. In this drawing, open downstream shut-off valves (40A-40D) allow gas to flow into the flow inlets (41A-41D) of the mixing manifold (48). The gas flowing into the flow inlets (41A-41D) is mixed within a mixing chamber (48A), which is configured to induce turbulence within the mixing chamber (48A) to improve the mixing of the gas entering the mixing manifold (48). Structural elements within the mixing chamber (48A) that aid in mixing the gas may include, for example, spiral grooves and / or meandering flow paths. The gas mixed within the mixing chamber (48A) flows out of the mixing manifold (48) through the flow outlets (43A-43C) and leaves the mixing manifold (48) to enter the flow rate shut-off valves (42A-42D). In the example of FIG. 12, the gas passes through the flow rate shut-off valves (42A-42D) and reaches the chambers (90A, 90B).

[0056] According to the present disclosure, stricter gas control and delivery are achieved by reducing redundancy within the gas delivery system. The reduction of redundant components lowers material costs, thereby reducing the overall size and weight. Centralized data collection, data communication, and control improve long-term repeatability. A local data repository maintains all data for each process execution, allowing end users to review yield versus gas delivery performance. Integrated real-time central control can process all sensor data from a single location, control the entire gas supply, and record all data in real-time to a central data repository. Furthermore, with all real-time sensor data stored in one location, sophisticated performance analysis can be performed through machine learning and real-time adjustment of flow parameters during the process, thereby improving the performance and repeatability of the gas delivery system.

[0057] The following paragraphs provide further support for the claims of the present application. One embodiment provides a gas delivery system comprising an electric backplane; a system controller operablely coupled to the electric backplane; and a plurality of mass flow controllers, each of which comprises a mass flow control circuit operablely coupled to the electric backplane, and the system controller and each of which is physically mounted to the electric backplane. In this embodiment, additionally or alternatively, each mass flow controller may be physically mounted to the electric backplane via an electric connector. In this embodiment, additionally or alternatively, the electric backplane may comprise a backplane printed circuit board; and each of which is physically mounted to the electric backplane via a board-to-board electrical connection between a local printed circuit board and a backplane printed circuit board. In this embodiment, additionally or alternatively, the gas delivery system may further comprise a mechanical backplane to which the plurality of mass flow controllers are physically mounted. In this embodiment, additionally or alternatively, the mechanical backplane may include an upper surface, a lower surface, and a plurality of openings extending from the upper surface to the lower surface; the electric backplane may be mounted on the lower surface of the mechanical backplane and spaced apart from the lower surface by a gap; each mass flow controller may be mounted on the upper surface of the mechanical backplane; and a portion of each mass flow controller may extend through each of the openings of the plurality of openings to reach the electric backplane. In this embodiment, additionally or alternatively, the mass flow controllers may be mounted in rows, and each row may include an associated flow path extending from each inlet to a mixing manifold.In this embodiment, additionally or alternatively, the mass flow controller is selected from the group consisting of pressure mass flow controllers, thermal mass flow controllers, and mass flow controllers without a limiter. In this embodiment, additionally or alternatively, each mass flow controller may include: a mass flow controller flow block comprising a flow path from the inlet to the outlet of the mass flow controller flow block; a flow control valve mounted in the flow path and configured to control the flow rate of gas flowing through the flow path; a pressure sensor pair comprising a first pressure sensor and a second pressure sensor located on both sides of the limiter of the flow path; and an upstream pressure sensor mounted upstream of the limiter and configured to measure the pressure of a flow channel adjacent to the flow control valve. In this embodiment, additionally or alternatively, each mass flow controller in each row may have an associated upstream flow block; each upstream flow block may include an inlet, an outlet, and a purge port, and each upstream flow block may include a branch flow path comprising an inlet branch from the inlet to a branch point, an outlet branch leading from the branch point to an outlet, and a purge branch leading from the branch point to a purge port; It may include an upstream shut-off valve located in the inlet branch and configured to control the gas flow from the inlet to the outlet along the outlet branch; and an upstream purge shut-off valve located in the purge branch and configured to control the gas flow from the inlet to the purge port.In this embodiment, additionally or alternatively, each mass flow controller in each row may have an associated downstream flow block; each downstream flow block may include an inlet, an outlet, and a purge port, and each downstream flow block may include a branch flow path comprising an inlet branch from the inlet to a branch point, an outlet branch leading from the branch point to an outlet, and a purge branch leading from the branch point to a purge port; a downstream purge shut-off valve located in the purge branch and configured to control gas flow from the inlet to the purge port; and a downstream shut-off valve located in the inlet branch and configured to control gas flow from the inlet to the outlet along the outlet branch. In this embodiment, additionally or alternatively, at least one of the upstream and downstream flow blocks may include an internal channel extending horizontally and located between the upper surface and the lower surface of the upstream or downstream flow block—the internal channel forming part of the purge branch of the flow path. In this embodiment, additionally or alternatively, the internal channel may be fluidly connected to either the upstream purge shut-off valve or the downstream purge shut-off valve through a first vertical channel; The internal channel may be flexibly connected to a purge port through a second vertical channel; and either an upstream purge shut-off valve or a downstream purge shut-off valve may be located closer to the outlet than to the inlet. In this embodiment, additionally or alternatively, the internal channel may be formed by an additive manufacturing process. In this embodiment, additionally or alternatively, the gas delivery system may further include a plurality of flow rate controllers, each of which includes a respective flow rate control circuit operably coupled to an electric backplane, and the flow rate control circuit is physically mounted to the electric backplane.In this embodiment, additionally or alternatively, the gas delivery system may further include a mixing manifold configured to receive gas from each mass flow controller, mix the gas, and guide the gas to each inlet of each flow rate controller. In this embodiment, additionally or alternatively, the gas delivery system may further include a plurality of pressure controllers, each pressure controller comprising a respective pressure control circuit operably coupled to an electric backplane, and the pressure control circuit is physically mounted to the electric backplane. In this embodiment, additionally or alternatively, the electric backplane may include an electric bus system comprising a control bus configured to route control signals between a system controller and each controlled mass flow controller. In this embodiment, additionally or alternatively, the electric backplane may further include an electric bus system comprising a configuration bus configured to route configuration signals between a system controller and each controlled mass flow controller. In this embodiment, additionally or alternatively, the electric backplane may include a power bus configured to supply power to each mass flow control circuit, a system controller, and a plurality of valves. In this embodiment, additionally or alternatively, the gas delivery system may further include a non-volatile memory operably coupled to the system controller. The system controller may be further configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each mass flow control circuit and to store the valve position information and sensor information in a data log stored in the non-volatile memory. In this embodiment, additionally or alternatively, the gas delivery system may further include a coprocessor mounted on the electric backplane. The coprocessor can coordinate asynchronous data communication between the system controller and each mass flow control circuit.In this embodiment, additionally or alternatively, the coprocessor may deserialize a serialized data stream from each mass flow control circuit to generate a deserialized data stream and transmit the deserialized data stream to a system controller; and the coprocessor may additionally serialize a data stream from the system controller to generate a serialized data stream and transmit the serialized data stream to each mass flow control circuit. In this embodiment, additionally or alternatively, each data stream may include the address of the mass flow control circuit to which the data stream was transmitted.

[0058] Another aspect provides a gas delivery system comprising: an electric backplane; a system controller operably coupled to and physically mounted to the electric backplane; and a plurality of controlled modules—each of which comprises a printed circuit board operably coupled to the electric backplane, and the printed circuit board of each controlled module is electrically connected to and physically mounted to the electric backplane via a board-to-board electrical connector. The controlled modules are selected from the group consisting of a mass flow controller, a flow rate controller, a pressure controller, an external bus extension, a precursor module, an in-situ metrology system, a thermal-based mass flow controller, and a mass flow controller without a limiter. In this aspect, additionally or alternatively, the gas delivery system may further comprise a non-volatile memory mounted to the electric backplane and operably coupled to the system controller. The system controller may be further configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each printed circuit board of each module under control, and to store the valve position information and sensor information in a data log stored in non-volatile memory. In this embodiment, additionally or alternatively, the gas delivery system may further include a mechanical backplane on which a plurality of modules under control are physically mounted—the mechanical backplane comprises an upper surface, a lower surface, and a plurality of openings extending from the upper surface to the lower surface. An electric backplane may be mounted on the lower surface of the mechanical backplane and spaced apart from the lower surface by a gap; each module under control may be mounted on the upper surface of the mechanical backplane; and a portion of the printed circuit board of each module under control may extend through a corresponding opening of the plurality of openings to reach a corresponding board-to-board electrical connector on the electric backplane.

[0059] Another aspect provides a gas delivery system comprising: an electric backplane; a system controller operably coupled to and physically mounted to the electric backplane; and a plurality of controlled modules—each of which comprises a circuit operably coupled to the electric backplane, and the system controller and each of which is physically mounted to the electric backplane. The controlled modules are selected from the group consisting of mass flow controllers, flow rate controllers, and pressure controllers. The electric backplane comprises an electric bus system—the electric bus system comprises a control bus configured to route control signals between the system controller and each of which is a controlled mass flow controller, a first memory interface having a read register and a write register for exchanging data between the system controller and the electric bus system, and a second memory interface having a read register and a write register for exchanging data between the controlled modules and the electric bus system. In this embodiment, additionally or alternatively, the system controller may be further configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each printed circuit board of each module under control, and to store the valve position information and sensor information in a data log stored in the non-volatile memory of the electrical backplane. In this embodiment, additionally or alternatively, the system controller may be further configured to execute an artificial intelligence (AI) model stored in the non-volatile memory to train the AI ​​model on the sensor information from the plurality of sensors and the valve position information from the plurality of valves during the golden manufacturing process at training time, and to determine the performance change of the runtime manufacturing process for the golden manufacturing process using the trained AI model at runtime.In this embodiment, additionally or alternatively, the electric bus system may further include a configuration bus configured to route configuration signals between a system controller and each controlled mass flow controller. In this embodiment, additionally or alternatively, the electric bus system may further include a power bus configured to supply power to each mass flow control circuit, a system controller, and a plurality of valves.

[0060] In some embodiments, the methods and processes described herein may be connected to a computing system of one or more computing devices. In particular, such methods and processes may be implemented as computer application programs or services, application programming interfaces (APIs), libraries and / or other computer program products.

[0061] FIG. 13 schematically illustrates a non-limiting embodiment of a computing system (300) capable of executing one or more of the aforementioned processes. The computing system (300) is illustrated in a simplified form. The computing system (300) may implement a system controller (12) or a controlled module (20, 24A-24D, 26A-26D, 30A-30P) described above and illustrated in FIG. 1 through 4.

[0062] The computing system (300) includes a logic processor (302), volatile memory (304), and a non-volatile storage device (306). The computing system (300) may optionally include a display subsystem (308), an input subsystem (310), a communication subsystem (312), and / or other components not shown in FIG. 13.

[0063] A logic processor (302) includes one or more physical devices configured to execute instructions. For example, the logic processor may be configured to execute instructions that are part of one or more applications, programs, routines, libraries, objects, components, data structures, or other logic structures. These instructions may be implemented to perform tasks, implement data types, transform the state of one or more components, achieve technical effects, or reach desired results.

[0064] A logic processor may include one or more physical processors (hardware) configured to execute software instructions. Additionally or alternatively, the logic processor may include one or more hardware logic circuits or firmware devices configured to execute hardware-implemented logic or firmware instructions. The processor of the logic processor (302) may be single-core or multi-core, and the instructions executed thereon may be configured for sequential, parallel, and / or distributed processing. Individual components of the logic processor may optionally be distributed among two or more individual devices, which may be remotely located and / or configured for coordinated processing. An embodiment of the logic processor may be virtualized and executed by a remotely accessible network computing device configured in a cloud computing configuration. In such cases, this virtualized embodiment is executed on different physical logic processors on various different machines.

[0065] A non-volatile storage device (306) comprises one or more physical devices configured to hold instructions executable by a logic processor to implement the method and process described herein. When such method and process are implemented, the state of the non-volatile storage device (306) may be changed, for example, to hold different data.

[0066] The nonvolatile storage device (306) may include a removable and / or embedded physical device. The nonvolatile storage device (306) may include optical memory (e.g., CD, DVD, HD-DVD, Blu-Ray disc, etc.), semiconductor memory (e.g., ROM, EPROM, EEPROM, FLASH memory, etc.) and / or magnetic memory (e.g., hard disk drive, floppy disk drive, tape drive, MRAM, etc.), or other mass storage device technologies. The nonvolatile storage device (306) may include a nonvolatile, dynamic, static, read / write, read-only, sequential access, location addressable, file addressable, and / or content addressable device. It will be recognized that the nonvolatile storage device (306) is configured to retain commands even when power to the nonvolatile storage device (306) is cut off.

[0067] Volatile memory (304) may include a physical device comprising random access memory. Volatile memory (304) is generally used by a logic processor (302) to temporarily store information during the processing of software instructions. It will be recognized that volatile memory (304) generally does not continue to store instructions when power to volatile memory (304) is cut off.

[0068] Aspects of a logic processor (302), volatile memory (304), and non-volatile storage device (306) may be integrated together into one or more hardware-logic components. Such hardware logic components may include, for example, field programmable gate arrays (FPGAs), program and application specific integrated circuits (PASIC / ASIC), program and application specific standard products (PSSP / ASSP), system-on-chip (SOC), and complex programmable logic devices (CPLD).

[0069] The terms “module,” “program,” and “engine” may be used to describe an aspect of a computing system (300) that is typically implemented in software by a processor to perform a specific function using a portion of volatile memory, and the function includes variant processing that specifically configures the processor to perform the function. Thus, a module, program, or engine may be instantiated through a logical processor (302) that executes instructions held by a non-volatile storage device (306) using a portion of volatile memory (304). It will be understood that different modules, programs, and / or engines may be instantiated from the same application, service, code block, object, library, routine, API, function, etc. Likewise, the same module, program, and / or engine may be instantiated by different applications, services, code block, object, routine, API, function, etc. The terms “module,” “program,” and “engine” may include objects or groups such as executable files, data files, libraries, drivers, scripts, database records, etc.

[0070] If included, the display subsystem (308) may be used to present a visual representation of data held by the non-volatile storage device (306). The visual representation may take the form of a graphical user interface (GUI). As the method and process described herein change the state of the non-volatile storage device by changing the data held by the non-volatile storage device, the state of the display subsystem (308) may likewise be changed to visually represent the change in the underlying data. The display subsystem (308) may include one or more display devices utilizing virtually any type of technology. Such display devices may be combined with the logic processor (302), volatile memory (304), and / or non-volatile storage device (306) in a shared enclosure, or such display devices may be peripheral display devices.

[0071] If included, the input subsystem (310) may include or interact with one or more user input devices, such as a keyboard, mouse, touch screen, etc.

[0072] Where included, the communication subsystem (312) may be configured to communicately connect the various computing devices described herein to one another and to other devices. The communication subsystem (312) may include wired and / or wireless communication devices compatible with one or more different communication protocols. As a non-limiting example, the communication subsystem may be configured for communication over a wired or wireless short-range or wide-area network, such as a wireless telephone network or an HDMI connection over Wi-Fi. In some embodiments, the communication subsystem may enable the computing system (300) to transmit and / or receive messages to and / or from other devices over a network such as the Internet.

[0073] It will be understood that the configurations and / or approaches described herein are by nature exemplary, and that these specific embodiments or examples should not be considered in a limiting sense, as many variations are possible. The specific routines or methods described herein may represent one or more of any number of processing strategies. As such, the various actions described and / or examples may be in the order described and / or examples, in a different order, in parallel, or omitted. Likewise, the order of the aforementioned processes may be changed.

[0074] The subject matter of this disclosure includes various processes, systems, and configurations, as well as all novel and non-specified combinations and sub-combinations of other features, functions, operations, and / or attributes disclosed herein, as well as all equivalents.

Claims

Claim 1 A gas delivery system comprising: an electric backplane; a system controller operably coupled to the electric backplane; a plurality of mass flow controllers; and a mechanical backplane on which the plurality of mass flow controllers are physically mounted, wherein each of the mass flow controllers comprises a respective mass flow control circuit operably coupled to the electric backplane, and the system controller and each of the mass flow control circuits are physically mounted to the electric backplane. Claim 2 In claim 1, each of the mass flow controllers is a gas delivery system physically mounted to the electric backplane through each electric connector. Claim 3 A gas delivery system according to claim 2, wherein the electric backplane comprises a backplane printed circuit board; and each of the mass flow control circuits comprises each of the local printed circuit boards physically mounted to the electric backplane through a board-to-board electrical connection between the local printed circuit board and the backplane printed circuit board. Claim 4 delete Claim 5 The present invention of claim 1, wherein the mechanical backplane comprises an upper surface, a lower surface, and a plurality of openings extending from the upper surface to the lower surface; the electric backplane is mounted on the lower surface of the mechanical backplane and spaced apart from the lower surface by a gap; each of the mass flow controllers is mounted on the upper surface of the mechanical backplane; and a gas delivery system in which a portion of each of the mass flow controllers extends through each of the plurality of openings to reach the electric backplane. Claim 6 A gas delivery system according to claim 5, wherein the mass flow controllers are mounted in rows, and each row includes an associated flow path extending from each inlet to a mixing manifold. Claim 7 In claim 6, the mass flow controller is a gas delivery system selected from the group consisting of a pressure mass flow controller, a thermal mass flow controller, and a restrictor-less mass flow controller. Claim 8 A gas delivery system according to claim 6, wherein each of the mass flow controllers comprises: a mass flow controller flow block including a flow path from the inlet to the outlet of the mass flow controller flow block; a flow control valve mounted on the flow path and configured to control the flow rate of a gas flowing through the flow path; a pressure sensor pair including a first pressure sensor and a second pressure sensor located on both sides of a restrictor of the flow path; and an upstream pressure sensor mounted upstream of the restrictor and configured to measure the pressure of a flow channel adjacent to the flow control valve. Claim 9 A gas delivery system comprising: a mass flow controller in each row having an associated upstream flow block; each of the upstream flow blocks including an inlet, an outlet and a purge port, and each of the upstream flow blocks including a branch flow path including an inlet branch from the inlet to a branch point, an outlet branch leading from the branch point to the outlet, and a purge branch leading from the branch point to the purge port; an upstream shut-off valve located in the inlet branch and configured to control gas flow from the inlet to the outlet along the outlet branch; and an upstream purge shut-off valve located in the purge branch and configured to control gas flow from the inlet to the purge port. Claim 10 A gas delivery system comprising: a mass flow controller in each row having an associated downstream flow block; each of the downstream flow blocks including an inlet, an outlet and a purge port, and each of the downstream flow blocks including a branch flow path including an inlet branch from the inlet to a branch point, an outlet branch leading from the branch point to the outlet, and a purge branch leading from the branch point to the purge port; a downstream purge shut-off valve located in the purge branch and configured to control gas flow from the inlet to the purge port; and a downstream shut-off valve located in the inlet branch and configured to control gas flow from the inlet to the outlet along the outlet branch. Claim 11 A gas delivery system according to claim 10, wherein at least one of the upstream and downstream flow blocks comprises an internal channel that extends horizontally and is located between the upper surface and the lower surface of the upstream or downstream flow block—the internal channel forming part of a purge branch of the flow path. Claim 12 A gas delivery system according to claim 11, wherein the internal channel is fluidly connected to one of the upstream purge shut-off valve or the downstream purge shut-off valve through a first vertical channel; the internal channel is fluidly connected to the purge port through a second vertical channel; and one of the upstream purge shut-off valve or the downstream purge shut-off valve is located closer to the outlet than to the inlet. Claim 13 In claim 12, the internal channel is a gas delivery system formed by an additive manufacturing process. Claim 14 A gas delivery system according to claim 1, further comprising a plurality of flow rate controllers, wherein each of the flow rate controllers comprises a respective flow rate control circuit operably coupled to the electric backplane, and the flow rate control circuit is physically mounted to the electric backplane. Claim 15 A gas delivery system comprising: an electric backplane; a system controller operably coupled to the electric backplane; a plurality of mass flow controllers; a plurality of flow rate controllers; and a mixing manifold, wherein each of the mass flow controllers comprises a respective mass flow control circuit operably coupled to the electric backplane, and the system controller and each of the mass flow control circuits are physically mounted to the electric backplane, and each of the flow rate controllers comprises a respective flow rate control circuit operably coupled to the electric backplane, and the flow rate control circuits are physically mounted to the electric backplane, and the mixing manifold is configured to receive gas from each of the mass flow controllers, mix the gas, and guide the gas to each inlet of each of the flow rate controllers. Claim 16 A gas delivery system comprising: an electric backplane; a system controller operably coupled to the electric backplane; a plurality of mass flow controllers; and a plurality of pressure controllers, wherein each of the mass flow controllers comprises a respective mass flow control circuit operably coupled to the electric backplane, and the system controller and each of the mass flow control circuits are physically mounted to the electric backplane, and each of the pressure controllers comprises a respective pressure control circuit operably coupled to the electric backplane, and the pressure control circuits are physically mounted to the electric backplane. Claim 17 A gas delivery system according to claim 1, wherein the electric backplane comprises an electric bus system comprising a control bus configured to route control signals between the system controller and each of the controlled mass flow controllers. Claim 18 A gas delivery system according to claim 1, wherein the electric backplane further comprises an electric bus system comprising a configuration bus configured to route configuration signals between the system controller and each of the controlled mass flow controllers. Claim 19 A gas delivery system according to claim 1, wherein the electric backplane comprises a power bus configured to supply power to each of the mass flow control circuits, the system controller, and a plurality of valves. Claim 20 A gas delivery system comprising: an electric backplane; a system controller operably coupled to the electric backplane; a plurality of mass flow controllers; and a non-volatile memory operably coupled to the system controllers, wherein each of the mass flow controllers comprises a respective mass flow control circuit operably coupled to the electric backplane, and the system controllers and each of the mass flow control circuits are physically mounted to the electric backplane, and the system controllers are configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each of the mass flow control circuits and to store the valve position information and the sensor information in a data log stored in the non-volatile memory. Claim 21 A gas delivery system comprising: an electric backplane; a system controller operably coupled to the electric backplane; a plurality of mass flow controllers; and a coprocessor mounted on the electric backplane, wherein each of the mass flow controllers comprises a respective mass flow control circuit operably coupled to the electric backplane, and the system controller and each of the mass flow control circuits are physically mounted on the electric backplane, and the coprocessor coordinates asynchronous data communication between the system controller and each of the mass flow control circuits. Claim 22 A gas delivery system according to claim 21, wherein the coprocessor deserializes a serialized data stream from each of the mass flow control circuits to generate a deserialized data stream and transmits the deserialized data stream to the system controller; and the coprocessor further serializes a data stream from the system controller to generate a serialized data stream and transmits the serialized data stream to each of the mass flow control circuits. Claim 23 A gas delivery system according to claim 22, wherein each of the data streams includes the address of the mass flow control circuit to which the data stream was transmitted. Claim 24 A gas delivery system comprising: an electric backplane; a system controller operably coupled to and physically mounted to the electric backplane; and a plurality of controlled modules—each of which comprises a printed circuit board operably coupled to the electric backplane, wherein the printed circuit board of each of which is electrically connected to and physically mounted to the electric backplane via a board-to-board electrical connector—the gas delivery system comprising the controlled modules selected from the group consisting of a mass flow controller, a flow rate controller, a pressure controller, an external bus extension, a precursor module, an in-situ metrology system, a thermal-based mass flow controller, and a mass flow controller without a limiter. Claim 25 A gas delivery system according to claim 24, further comprising a non-volatile memory mounted on the electric backplane and operably coupled to the system controller, wherein the system controller is further configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each printed circuit board of each of the modules under control, and to store the valve position information and the sensor information in a data log stored in the non-volatile memory. Claim 26 The invention of claim 24 further comprises a mechanical backplane on which the plurality of controlled modules are physically mounted—the mechanical backplane comprises an upper surface, a lower surface, and a plurality of openings extending from the upper surface to the lower surface—and the electric backplane is mounted on the lower surface of the mechanical backplane and spaced apart from the lower surface by a gap; each of the controlled modules is mounted on the upper surface of the mechanical backplane; and a gas delivery system in which a portion of the printed circuit board of each of the controlled modules extends through a corresponding opening of the plurality of openings to reach a corresponding board-to-board electrical connector on the electric backplane. Claim 27 A gas delivery system comprising: an electric backplane; a system controller operably coupled to and physically mounted to the electric backplane; and a plurality of modules to be controlled—each of which comprises a circuit operably coupled to the electric backplane, and which comprises the system controller and each of which is to be controlled physically mounted to the electric backplane, and which is to be controlled selected from a group consisting of a mass flow controller, a flow rate controller, and a pressure controller—the electric backplane comprises an electric bus system—the electric bus system comprises a control bus configured to route control signals between the system controller and each of which is to be controlled mass flow controller, a first memory interface having a read register and a write register for exchanging data between the system controller and the electric bus system, and a second memory interface having a read register and a write register for exchanging data between the modules to be controlled and the electric bus system. Claim 28 A gas delivery system according to claim 27, wherein the system controller is further configured to collect valve position information and sensor information from at least a plurality of sensors and valves operably coupled to each printed circuit board of each of the modules to be controlled, and to store the valve position information and the sensor information in a data log stored in the non-volatile memory of the electric backplane. Claim 29 A gas delivery system according to claim 28, wherein the system controller is further configured to execute an artificial intelligence (AI) model stored in the non-volatile memory to train the AI ​​model on sensor information from the plurality of sensors and valve position information from the plurality of valves during a golden manufacturing process at training time, and to determine a change in performance of the runtime manufacturing process for the golden manufacturing process using the trained AI model at runtime. Claim 30 A gas delivery system according to claim 27, wherein the electric bus system further comprises a configuration bus configured to route configuration signals between the system controller and each of the controlled mass flow controllers. Claim 31 A gas delivery system according to claim 27, wherein the electric bus system further comprises a power bus configured to supply power to each mass flow control circuit, the system controller, and a plurality of valves.

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