Wafer processing cleaning device

Abstract

The present invention discloses a cleaning device for wafer processing. It includes a lower frame, and columns extending vertically upward are provided at the four corners of the lower frame. An upper frame is provided at one end of a column spaced apart from the lower frame. The lower frame and the column form an installation frame with the upper frame, and an installation plate is disposed on the installation frame. A movement mechanism is provided on the installation plate, a vibration damping mechanism is provided below the movement mechanism, and a pneumatic assembly is provided above the movement mechanism. The vibration damping mechanism is connected to the pneumatic assembly via a conduit, and the vibration damping mechanism, the movement mechanism, and the pneumatic assembly are disposed on the installation frame. The vibration damping mechanism is connected to the movement mechanism via a second suspension slide base. The vibration damping mechanism includes a vibration damping head housing. A bottom plate is provided at the bottom of the vibration damping head housing, an opening is formed at the top of the vibration damping head housing, and a housing sealing cover is provided at the opening at the top of the vibration damping head housing. A positive pressure housing extending upward from the bottom plate is disposed within the vibration damping head housing. The present application implements intelligent cleaning by supplying a positive or negative pressure air source using two blower fans.

Description

Technology Field

[0001] The present invention relates to the field of semiconductor production technology, and in particular to a cleaning device for wafer processing. Background Technology

[0002] A wafer is a silicon chip used in the manufacture of silicon semiconductor integrated circuits and is used to produce integrated circuit chips. In the semiconductor manufacturing process, wafers are placed in wafer cassettes and transported onto carriers of various loadports via an AMHS (Automated Logistics Handling System). After a certain period of time, dust remains on the surface of the carriers, affecting the yield of wafer products.

[0003] To maintain the cleanliness of the carrier, the carriers of semiconductor processing equipment must be cleaned regularly. Conventional cleaning methods include manual cleaning and brush cleaning; however, manual cleaning is performed only when equipment maintenance is required, consumes significant time and manpower, is inefficient, is detrimental to the overall process environment, and cannot control the level of cleaning cleanliness. Brush cleaning is a contact-based method that poses a risk of scratching the carrier or generating static electricity. The problem to be solved

[0004] To solve the problems of conventional technology, the present invention aims to provide a cleaning device for wafer processing that adopts a non-contact floating positive and negative pressure air flow cleaning system. At the same time, the cleaning device improves the stability and yield of product processing by implementing the isolation of gas and electricity and independent operation. means of solving the problem

[0005] To achieve the above objective, the present invention adopts the following technical solution:

[0006] A cleaning device for wafer processing includes a lower frame, and columns extending vertically upward are provided at the four corners of the lower frame. An upper frame is provided at one end of a column spaced apart from the lower frame. The lower frame and the column form an installation frame with the upper frame, and an installation plate is disposed on the installation frame. A movement mechanism is provided on the installation plate, a vibration damping mechanism is provided below the movement mechanism, and a pneumatic assembly is provided above the movement mechanism. The vibration damping mechanism is connected to the pneumatic assembly via a conduit, and the vibration damping mechanism, the movement mechanism, and the pneumatic assembly are disposed on the installation frame.

[0007] The vibration isolation mechanism is connected to the movement mechanism via a second suspension slide base, and the vibration isolation mechanism includes a vibration isolation head housing. A bottom plate is disposed at the bottom of the vibration isolation head housing, an opening is formed at the top of the vibration isolation head housing, and a housing sealing cover is disposed at the opening at the top of the vibration isolation head housing. A positive pressure housing extending upward from the bottom plate is disposed within the vibration isolation head housing, and a separation gap is formed between the top of the positive pressure housing and the top of the vibration isolation head housing.

[0008] A separation gap is formed between the outer wall of the positive pressure housing and the inner wall of the vibration isolation head housing, a negative pressure chamber is provided on the outside of the positive pressure housing, and the negative pressure chamber is positioned between the inner wall of the vibration isolation head housing and the outer wall of the positive pressure housing.

[0009] The moving mechanism includes a first mounting slide rail and a first rack base, wherein the first rack base and the first mounting slide rail are fixedly installed on the lower side of the mounting plate, the first mounting slide rail and the first rack base are installed on one side of the mounting plate spaced apart from the column, and the first rack base and the first mounting slide rail are arranged parallel to the mounting plate.

[0010] A sliding first suspended slide base is suspended on a first mounting slide rail, a first motor is fixedly installed on the first suspended slide base, and the first motor is connected to a first rack base so as to be driven by meshing.

[0011] Furthermore, in some embodiments, a positive pressure sealing cover is provided at one end of a positive pressure housing spaced apart from a base plate, and an intake tube is provided in the positive pressure sealing cover extending upward and penetrating the housing sealing cover, and one end of the intake tube spaced apart from the positive pressure housing extends above the housing sealing cover, and a conduit is connected to the upper end of the intake tube, and the intake tube and the positive pressure housing are connected in a communicable manner.

[0012] An extraction port is provided in the housing sealing cover, and the extraction port and the negative pressure chamber are connected in a communicable manner. The positive pressure housing and the negative pressure chamber are each installed within the vibration isolation head housing, and the positive pressure housing and the negative pressure chamber are isolated from each other and do not communicate.

[0013] A first air blower dust removal slit is opened on the bottom surface of the positive pressure housing, penetrating the bottom plate in the transverse direction. A second air blower dust removal slit is provided symmetrically at the ends adjacent to both ends of the first air blower dust removal slit, a lateral air blower gap is formed between the second air blower dust removal slit and the top of the first air blower dust removal slit, and the second air blower dust removal slit and the first air blower dust removal slit are arranged vertically so as to communicate with each other.

[0014] The height ratio of the positive pressure housing height to the vibration damping head housing is 2 / 3 to 3 / 4:1.

[0015] Furthermore, in some embodiments, a pneumatic assembly base is provided below the first suspension slide base, the pneumatic assembly base is fixedly connected to the first suspension slide base, the pneumatic assembly base is positioned perpendicular to the first mounting slide rail, and one end of the pneumatic assembly base extends outwardly to the mounting plate. A bearing wheel is positioned at one end of the pneumatic assembly base spaced apart from the mounting plate, the bearing wheel is installed on a support beam, and the support beam is positioned between two adjacent columns.

[0016] A second mounting slide rail and a second rack base are fixedly installed parallel to each other on one side of a pneumatic assembly base spaced apart from a first suspension slide base, and the parallel second mounting slide rail and second rack base are arranged perpendicularly to the first mounting slide rail.

[0017] A sliding second suspended slide base is suspended on the second mounting slide rail, a second motor is positioned on the second suspended slide base, and the second motor is connected to the second rack base so as to be engaged and drive.

[0018] A pneumatic assembly is provided on one side of a pneumatic assembly base spaced apart from the mounting plate, and the pneumatic assembly is positioned on the outer side of the mounting plate.

[0019] The pneumatic assembly includes a negative pressure blower fan and a positive pressure blower fan, and a negative pressure high-performance filter chamber is provided above the negative pressure blower fan, and the intake port of the negative pressure high-performance filter chamber extends laterally and is positioned outside the negative pressure blower fan.

[0020] The intake port of the negative pressure high-performance filter chamber is connected to the extraction port of the vibration isolation mechanism via a conduit, and the positive pressure blower fan is connected to the intake tube of the vibration isolation mechanism via another conduit.

[0021] Furthermore, in some embodiments, a silencer box is provided on one side of the negative pressure blower fan, and the discharge port of the negative pressure blower fan is connected to the silencer box through a conduit.

[0022] A square honeycomb tube is provided in the silencer box, and a plurality of through holes are formed on the surface of the square tube plate of the frame of the square honeycomb tube, and an inclined honeycomb baffle is provided on the square honeycomb tube that is staggered from left to right.

[0023] The inclined honeycomb baffles extend upward at an angle from the inner wall of the square honeycomb tube, and the inclined honeycomb baffles on both sides are arranged in an alternating pattern vertically, and the inclined honeycomb baffles on both sides intersect each other, and as the upper portions of the inclined honeycomb baffles on both sides overlap each other in the vertical direction vertically, the intersecting inclined honeycomb baffles on both sides form an S-shaped air duct within the square honeycomb tube.

[0024] The negative pressure blower fan is provided with a side discharge port, and the side discharge port is connected to the silencer box through a conduit.

[0025] Furthermore, in some embodiments, a first suction slit and a second suction slit are opened in the bottom surface of the negative pressure chamber, penetrating the bottom plate in the transverse direction. The first suction slit and the second suction slit are arranged parallel to the first blower dust removal slit. The first suction slit is arranged adjacent to the first blower dust removal slit, and the second suction slit is arranged spaced apart from the first blower dust removal slit, and a gap is formed between the first suction slit and the second suction slit.

[0026] Two mutually corresponding variable cross-section rods are installed on the bottom surface of the positive pressure chamber of the positive pressure housing, the variable cross-section rods are arranged parallel to the first air blower dust removal slit, and the two variable cross-section rods are each placed on both sides of the first air blower dust removal slit.

[0027] The variable cross-section rods are provided with compressed air convex sections protruding inward, and an air supply gap D1 is formed between the upper ends of two mutually corresponding variable cross-section rods. A convex section gap D2 is formed between the compressed air convex sections facing each other on both sides at the middle ends of the two variable cross-section rods, such that the air supply gap D1 > convex section gap D2. A discharge gap D3 is formed between the lower ends of two mutually corresponding variable cross-section rods, and a blower dust removal gap D4 is formed in the first blower dust removal slit opened on the bottom surface of the positive pressure chamber. The blower dust removal gap D4 corresponds to the width of the first blower dust removal slit. The air supply gap D1 = discharge gap D3, and the discharge gap D3 > blower dust removal gap D4.

[0028] Furthermore, in some embodiments, the compressed airflow convex portion is in the form of a convex strip. Or the compressed airflow convex portion is a long strip with an arc-shaped cross section. Or the compressed airflow convex portion is a long strip with a single-chord shape cross section.

[0029] The ratio of the air supply gap D1 to the convex gap D2 is 5 to 10:1.

[0030] The supply gap D1 is equal to the discharge gap D3. The ratio of the blower dust removal gap D4 to the convex gap D2 is 1:1 to 1.5.

[0031] A third suction slit is opened on the bottom surface of the short sides of both sides of the negative pressure chamber, penetrating the bottom plate in the longitudinal direction. The third suction slit is positioned between the outer wall of the short sides of both sides of the positive pressure housing and the inner wall of the vibration isolation head housing, and the third suction slit is positioned parallel to the second blower vibration isolation slit.

[0032] The second blower vibration damping slit is positioned adjacent to the inner walls of the short sides on both sides of the positive pressure housing.

[0033] The ratio of the width of the first blower dust removal slit, the width of the first suction slit, and the width of the second suction slit is 1:4 to 5:4 to 5.

[0034] The ratio of the width of the second blower dust removal slit to the width of the third suction slit is 1:4 to 5.

[0035] The ratio of the air volume of the first blower dust removal slit to the air volume of the first suction slit is 1:1.5 to 3, and the air volume of the second suction slit is the same as the air volume of the first suction slit.

[0036] The ratio of the air volume of the second blower dust removal slit to the air volume of the third suction slit is 1:1.5 to 3.

[0037] Furthermore, in some embodiments, the mounting plate is installed in the center of the mounting frame, one side of the mounting plate is connected to two adjacent columns, and the other side of the mounting plate is connected to the upper frame through a vertical plate. A vertical frame is installed between one end of the mounting plate adjacent to the columns and the lower frame, and a support beam is installed between two columns spaced apart from the mounting plate.

[0038] A pneumatic assembly is positioned on the upper side of the moving mechanism, and the vibration damping mechanism is connected to the pneumatic assembly via a conduit; the vibration damping mechanism, the moving mechanism, and the pneumatic assembly are positioned on an installation frame. A housing sealing cover is connected to the moving mechanism via a second suspension slide base.

[0039] Furthermore, in some embodiments, the mounting plate is installed in the center of the mounting frame, one end of the mounting plate is fixedly installed in the center of two adjacent columns, and the other end of the mounting plate, spaced apart from the columns, is connected to the upper frame through a vertical plate. A vertical frame is installed between the end of the mounting plate adjacent to the columns and the lower frame, and a support beam is installed between the two columns spaced apart from the mounting plate.

[0040] The gear of the first motor output shaft is connected to the first rack base so as to enable meshing transmission. The gear of the second motor output shaft is connected to the second rack base so as to enable meshing transmission.

[0041] A vibration damping mechanism is installed on one end of the second suspension slide base, which is spaced apart from the second mounting slide rail. Effects of the invention

[0042] The present application performs cleaning using a non-contact dust-removing head and utilizes an automated cleaning device. The cleaning device of the present application cleans the carrier according to the size of the chip box (wafer cassette) on the upper part of the carrier, and performs cleaning by positioning the device of the present application on the upper side of the carrier. In a process environment, there are generally numerous wafer processing carriers (points), and the process environment is equipped with a ceiling transfer system, which is fitted with a movable clamp. When cleaning is completed at one process position, the ceiling transfer system moves the cleaning device of the present application to the next cleaning waiting position (carrier position). That is, cleaning can be performed by sequentially moving to waiting process positions according to the process position path diagram.

[0043] This application adopts a non-contact floating design with gas and electricity isolation to seal the dust removal workspace through dust removal via wave airflow → wind barrier blocking (negative pressure suction). The suction fan (negative pressure fan) is provided with a high-efficiency filter to filter dust (efficiently), and the two fans provide a positive or negative pressure source without an external power source. Additionally, power is supplied using a battery without the need to connect an external power source. Both the fans and the motor are 24 volts, and the entire unit is isolated from external gas and electricity. The two fans are installed on mounting rails (transverse guide rails) to allow movement, and the fans and the dust removal head are connected via air ducts. Since the fans move in synchronization with the dust removal head, the fans move along with the dust removal head (dust removal assembly) when it moves. The distance between the fans and the dust removal head is not too far, so interference with surrounding plates or shafts is minimized, thereby enabling intelligent cleaning.

[0044] In this application, the dust removal head (blowing and suction head) performs blowing cleaning through an intermediate blowing dust removal slit and is sucked in by a peripheral suction slit. The dust removal head is installed on a carrier in a non-contact floating manner, and as air is blown through the intermediate blowing dust removal slit and sucked in by the peripheral suction slit, dust is not leaked to the outside. In other words, since airflow is not leaked by the peripheral negative pressure suction (suction slit), dust scattering can be prevented.

[0045] Two suction slits (narrow suction passages) are provided on each side of the dust removal head, and the width of the suction slits is formed to be larger than the width of the blower dust removal slits. The airflow ejected from the blower dust removal slit in the middle of the dust removal head (work gun) spreads to both sides, and the two suction slits positioned on each side form a wind barrier to suck up and remove dust. Additional blower dust removal slits and suction slits are installed at the end portions of both ends of the dust removal head, and the surrounding suction slits form a suction wind barrier. This prevents dust from spreading from inside the blower dust removal gun, thereby improving cleaning efficiency and increasing the level of automation of the device. Brief explanation of the drawing

[0046] FIG. 1 is an application perspective view according to an embodiment of the present invention. FIG. 2 is a structural perspective view according to an embodiment of the present invention. FIG. 3 is a three-dimensional perspective view according to an embodiment of the present invention. FIG. 4 is a bottom perspective view according to an embodiment of the present invention. FIG. 5 is a structural perspective view of a part of a pneumatic assembly according to an embodiment of the present invention. FIG. 6 is a structural perspective view of a part of a pneumatic assembly base according to an embodiment of the present invention. FIG. 7 is a structural perspective view of a part of a negative pressure blower fan according to an embodiment of the present invention. FIG. 8 is a structural perspective view of a part of a moving mechanism according to an embodiment of the present invention. FIG. 9 is a perspective view of the airflow direction according to an embodiment of the present invention. FIG. 10 is an assembled perspective view of a part of a vibration damping mechanism according to an embodiment of the present invention. FIG. 11 is a cross-sectional perspective view of a part of a vibration damping mechanism according to an embodiment of the present invention. FIG. 12 is a structural perspective view of a part of a vibration damping mechanism according to an embodiment of the present invention. FIG. 13 is a structural perspective view according to one embodiment of part A in FIG. 11. FIG. 14 is a structural perspective view according to another embodiment of part A in FIG. 11. Specific details for implementing the invention

[0047] In order to better understand the features, technical means, specific objectives, and functions of the present invention, the present invention is described in detail below by combining specific embodiments.

[0048] Referring to the drawings, the present application includes a lower frame (11), and columns (12) extending vertically upward are provided at the four corners of the lower frame (11). An upper frame (13) is installed at one end of a column (12) spaced apart from the lower frame (11), and the lower frame (11) and the column (12) form an installation frame with the upper frame (13). An installation plate (14) is provided in the installation frame, and the installation plate (14) is positioned in the center of the installation frame. One end of the installation plate (14) is fixedly installed in the center of two adjacent columns (12), and the other end of the installation plate (14) spaced apart from the column (12) is connected to the upper frame (13) through a vertical plate. A vertical frame (16) is installed between one end of the installation plate (14) adjacent to the column (12) and the lower frame (11), and a support beam (15) is installed between two columns (12) spaced apart from the installation plate (14). The lower frame (11) is placed on the carrier (81).

[0049] A moving mechanism (21) is installed on the mounting plate (14), a vibration damping mechanism (41) is provided on the lower side of the moving mechanism (21), and a pneumatic assembly (61) is provided on the upper side of the moving mechanism (21). The vibration damping mechanism (41) is connected to the pneumatic assembly (61) through a conduit (59), and the vibration damping mechanism (41), the moving mechanism (21), and the pneumatic assembly (61) are placed on the mounting frame.

[0050] The vibration damping mechanism (41) includes a vibration damping head housing (42), and the vibration damping head housing (42) is also a partial pressure chamber. A bottom plate (49) is provided at the bottom of the vibration damping head housing (42), and the vibration damping head housing (42) and the bottom plate (49) are formed integrally. A housing sealing cover (48) is placed at the top of the vibration damping head housing (42).

[0051] Furthermore, in one embodiment, an opening is formed at the top of the vibration damping head housing (42), and a housing sealing cover (48) is provided at the opening at the top of the vibration damping head housing (42). That is, the housing sealing cover (48) is a sealing cover plate of the vibration damping head housing (42). A positive pressure housing (44) extending upward from the bottom plate (49) is provided within the vibration damping head housing (42). That is, a frame-shaped positive pressure housing (44) is provided within the vibration damping head housing (42). A separation gap is formed between the top of the positive pressure housing (44) and the top of the vibration damping head housing (42). That is, a gap exists between the top of the positive pressure housing (44), which is spaced apart from the bottom plate (49), and the housing sealing cover (48). Furthermore, the ratio of the height of the positive pressure housing (44) to the height of the vibration damping head housing (42) is 2 / 3 to 3 / 4:1.

[0052] Furthermore, in one embodiment, a positive pressure sealing cover (46) (positive pressure chamber cover plate) is provided at one end of a positive pressure housing (44) spaced apart from the bottom plate (49), and an intake tube (47) is provided in the positive pressure sealing cover (46) that extends upward and penetrates the housing sealing cover (48). One end of the intake tube (47) spaced apart from the positive pressure housing (44) extends above the housing sealing cover (48), and the upper end of the intake tube (47) is connected to a conduit (59), and the intake tube (47) and the positive pressure housing (44) are connected in a communicable manner.

[0053] A separation gap is formed between the outer wall of the positive pressure housing (44) and the inner wall of the vibration damping head housing (42), and the space between the inner wall of the vibration damping head housing (42) and the outer wall of the positive pressure housing (44) forms a negative pressure chamber (43). That is, a negative pressure chamber (43) is formed on the outside of the positive pressure housing (44), and an annular negative pressure chamber (43) is placed in the vibration damping head housing (42). An extraction port (57) is provided in the housing sealing cover (48), and the extraction port (57) and the negative pressure chamber (43) are connected so as to be communicable. The positive pressure housing (44) and the negative pressure chamber (43) are each installed within the vibration damping head housing (42), and the positive pressure housing (44) and the negative pressure chamber (43) are isolated from each other and not communicable.

[0054] The housing sealing cover (48) is connected to the movement mechanism (21) through the second suspension slide base (34).

[0055] Furthermore, in one embodiment, a first air blower dust removal slit (54) is provided on the bottom surface of the positive pressure housing (44) and penetrates the bottom plate (49) in a transverse direction. A second air blower dust removal slit (56) is provided symmetrically at the ends adjacent to both ends of the first air blower dust removal slit (54). A side air blower gap (spacing gap) is located between the top of the second air blower dust removal slit (56) and the first air blower dust removal slit (54). The second air blower dust removal slit (56) (side air blower dust removal slit) and the first air blower dust removal slit (54) (central air blower dust removal slit) are arranged vertically so as to communicate with each other. The first air blower dust removal slit (54) and the second air blower dust removal slit (56) are installed to penetrate the bottom plate (49) of the positive pressure housing (44). That is, the first blower dust removal slit (54) and the second blower dust removal slit (56) are opened by penetrating the bottom plate (49), and the second blower dust removal slit (56) is installed adjacent to the inner wall of the short side of both sides of the positive pressure housing (44). The second blower dust removal slit (56) must not be too close to the edge, and a gap is maintained between the second blower dust removal slit (56) and the third suction slit (55) for the blower and suction operation space, so that when the second blower dust removal slit (56) blows air to the side and outside, the third suction slit (55) can sufficiently suck in air, thereby preventing airflow leakage and dust outflow.

[0056] Furthermore, in one embodiment, two mutually corresponding variable cross-section rods (45) are provided on the bottom surface (51) of the positive pressure chamber of the positive pressure housing (44), the variable cross-section rods (45) and the first air blower dust removal slit (54) are arranged parallel to each other, and the two variable cross-section rods (45) are each placed on both sides of the first air blower dust removal slit (54).

[0057] A variable cross-section rod (45) is provided with a compressed air flow convex portion (19) protruding inward (in a mutually opposing direction), a supply air gap D1 is provided between the upper ends of two mutually corresponding variable cross-section rods (45), and a convex portion gap D2 is formed between the compressed air flow convex portions (19) facing each other on both sides in the middle of the two variable cross-section rods (45), such that the supply air gap D1 > convex portion gap D2. A discharge gap D3 is formed between the lower ends of two mutually corresponding variable cross-section rods (45), and a blower dust removal gap D4 is formed in the first blower dust removal slit (54) opened on the bottom surface (51) of the positive pressure chamber, such that the blower dust removal gap D4 also corresponds to the width of the first blower dust removal slit (54). The supply air gap D1 = discharge gap D3, and the discharge gap D3 > blower dust removal gap D4.

[0058] The compressed air convex portion (19) is in the form of a convex strip. Or the compressed air convex portion (19) is a long strip with an arc-shaped cross section. Or the compressed air convex portion (19) is a long strip with a single-chord shape cross section.

[0059] Through the variable cross-section rod (45), as compressed air passes through the variable cross-section air passage, a wave airflow is formed through repeated compression and diffusion by the passage where the cross-section changes from wide to narrow, and as a high-frequency high-speed pulse airflow is generated at the outlet position (first blower dust removal slit (54)), ultrafine particles are separated from the substrate and then sucked in and collected by the surrounding negative pressure airflow.

[0060] The ratio of the air supply gap D1 to the convex gap D2 is 5 to 10:1.

[0061] Supply interval D1 = discharge interval D3, meaning D1 and D3 are identical.

[0062] The ratio of the air blower dust isolation gap D4 to the convex gap D2 is 1:1 to 1.5.

[0063] The airflow gap size is D1=D3>D2≥D4, and as the airflow passes through D1→D2→D3→D4 and the width of the air duct changes from wide→narrow→wide→narrow, a wave-like change occurs in the air flow path, generating a high-frequency high-speed pulse airflow, and dust is removed by strong blowing at the discharge port of the first blower dust removal slit (54).

[0064] A first suction slit (52) and a second suction slit (53) are formed on the bottom surface of the negative pressure chamber (43) and penetrate the bottom plate (49) in a transverse direction, and the first suction slit (52) and the second suction slit (53) are arranged parallel to the first blower dust removal slit (54). The first suction slit (52) (inner suction slit) is arranged adjacent to the first blower dust removal slit (54), and the second suction slit (53) (outer suction slit) is arranged spaced apart from the first blower dust removal slit (54), and a gap is formed between the first suction slit (52) and the second suction slit (53). Furthermore, the first suction slit (52) and the second suction slit (53) are installed by penetrating the bottom plate (49) of the negative pressure chamber (43) in a transverse direction. That is, the first suction slit (52) and the second suction slit (53) are opened through the bottom plate (49) in a transverse direction parallel to each other, and a separation gap is formed between the first blower dust removal slit (54) and the first suction slit (52).

[0065] A third suction slit (55) is opened on the lower side of both short sides of the negative pressure chamber (43) and penetrates the bottom plate (49) in the longitudinal direction. The third suction slit (55) is positioned between the outer wall of both short sides of the positive pressure housing (44) and the inner wall of the vibration damping head housing (42), and the third suction slit (55) is positioned parallel to the second blower vibration damping slit (56). Furthermore, the third suction slit (55) (side suction slit) extends downward and penetrates the bottom plate (49), and the third suction slit (55) and the negative pressure chamber (43) are connected so as to be in communication.

[0066] Furthermore, in one embodiment, the ratio of the width of the first blower dust removal slit (54), the width of the first suction slit (52), and the second suction slit (53) is 1:4 to 5:4 to 5.

[0067] The ratio of the width of the second blower dust removal slit (56) to the width of the third suction slit (55) is 1:4 to 5.

[0068] The width of the first blower dust removal slit (54) and the second blower dust removal slit (56) is the same, and the width of the first suction slit (52) and the second suction slit (53) is the same as the third suction slit (55).

[0069] Furthermore, in one embodiment, the ratio of the air volume of the first blower dust removal slit (54) to the air volume of the first suction slit (52) is 1:1.5 to 3, and the air volume of the second suction slit (53) is the same as the air volume of the first suction slit (52).

[0070] The ratio of the air volume of the second blower dust removal slit (56) to the air volume of the third suction slit (55) is 1:1.5 to 3.

[0071] Furthermore, in one embodiment, a battery (58) is provided on the top of the mounting plate (14), and the battery (58) supplies power to all power assemblies. The moving mechanism (21) includes a first mounting slide rail (28) and a first rack base (27), the first rack base (27) and the first mounting slide rail (28) are fixedly installed on the lower side of the mounting plate (14), the first mounting slide rail (28) and the first rack base (27) are installed on one side of the mounting plate (14) spaced apart from the column (12), and the first rack base (27), the first mounting slide rail (28) and the mounting plate (14) are arranged in parallel. A sliding first suspension slide base (29) is suspended on the first mounting slide rail (28), a first motor (23) is fixedly installed on the first suspension slide base (29), and the first motor (23) and the first rack base (27) are connected to enable interlocking electric power. Specifically, the gear of the output shaft of the first motor (23) and the first rack base (27) are connected to enable meshing.

[0072] The first motor (23) drives the first suspension slide base (29) to reciprocate on the first mounting slide rail (28), and the first motor (23) drives the first suspension slide base (29) on the first rack base (27) by meshing with the gear of the output shaft.

[0073] Furthermore, in one embodiment, a pneumatic assembly base (22) is provided on the lower side of the first suspension slide base (29), the pneumatic assembly base (22) is fixedly connected to the first suspension slide base (29), the pneumatic assembly base (22) and the first mounting slide rail (28) are arranged vertically, and one end of the pneumatic assembly base (22) extends outward from the mounting plate (14). A bearing wheel (25) is provided on one end of the pneumatic assembly base (22) spaced apart from the mounting plate (14), the bearing wheel (25) is installed on a support beam (15), and the support beam (15) is positioned between two adjacent columns (12). On one side of the pneumatic assembly base (22) spaced apart from the first suspension slide base (29), a second mounting slide rail (33) and a second rack base (26) are fixedly installed parallel to each other, and the parallel second mounting slide rail (33), second rack base (26) and the first mounting slide rail (28) are arranged vertically.

[0074] Furthermore, in one embodiment, a sliding second suspended slide base (34) is suspended on a second mounting slide rail (33), and a second motor (24) is provided on the second suspended slide base (34), and the second motor (24) is connected to a second rack base (26) so as to be engaged and driven. Specifically, the gear of the output shaft of the second motor (24) and the second rack base (26) are connected so as to be engaged and driven.

[0075] Furthermore, in one embodiment, a vibration damping mechanism (41) is installed at one end of a second suspension slide base (34) spaced apart from a second mounting slide rail (33). A second motor (24) drives the second suspension slide base (34) to reciprocate on the second mounting slide rail (33), and the second motor (24) drives the second suspension slide base (34) on the second mounting slide rail (33) by meshing with a gear on the output shaft. The first motor (23) and the second motor (24) drive the vibration damping mechanism (41) forward, backward, left, and right to move it in vertical and horizontal directions.

[0076] A pneumatic assembly (61) is provided on one side of the pneumatic assembly base (22) spaced apart from the mounting plate (14), and the pneumatic assembly (61) is positioned on the outside of the mounting plate (14).

[0077] Furthermore, in one embodiment, the pneumatic assembly (61) includes a negative pressure blower fan (62) and a positive pressure blower fan (63), and a negative pressure high-performance filter chamber (66) is provided above the negative pressure blower fan (62), and the intake port of the negative pressure high-performance filter chamber (66) extends laterally and is positioned outside the negative pressure blower fan (62).

[0078] Furthermore, in one embodiment, the intake port of the negative pressure high-performance filter chamber (66) is connected in communication with the extraction port (57) of the vibration damping mechanism (41) through a conduit (59), and the positive pressure blower fan (63) is connected in communication with the intake tube (47) of the vibration damping mechanism (41) through another conduit (59).

[0079] The operating pressure of the positive pressure blower fan (63) is 5 to 12 kPa, and the operating pressure of the negative pressure blower fan (62) is -6 to -1.5 kPa. The ratio of the airflow of the positive pressure blower fan (63) to the airflow of the negative pressure blower fan (62) is 1:1.5 to 3. Since the positive pressure blower fan (63) and the negative pressure blower fan (62) are connected to the intake tube (47) and the extraction port (57) of the dust removal mechanism (41) through the conduit (59), the dust is better sealed during dust removal, and as the dust is blocked within the clean space inside the periphery of the dust removal head (dust removal mechanism (41)), a wind barrier is formed that completely seals the entire dust collection workspace.

[0080] A silencer box (65) is provided on one side of the negative pressure blower fan (62). A side discharge port (68) is provided on the negative pressure blower fan (62), and the side discharge port (68) is connected to the silencer box (65) through a conduit (59). A square honeycomb tube (69) is provided on the silencer box (65), and a plurality of through holes are formed on the surface of the frame square tube plate of the square honeycomb tube (69), and an inclined honeycomb baffle (71) that is staggered from left to right is provided on the square honeycomb tube (69).

[0081] The inclined honeycomb baffles (71) extend upward at an angle from the inner wall of the square honeycomb tube (69), and the inclined honeycomb baffles (71) on both sides are arranged in an alternating pattern vertically and cross each other. As the upper portions of the inclined honeycomb baffles (71) on both sides overlap each other in the vertical direction (longitudinal direction), an S-shaped air duct is formed within the square honeycomb tube (69), thereby reducing the impact effect of airflow waves.

[0082] The embodiments described above represent multiple embodiments of the present invention. Although the description is relatively specific and detailed, it should not be understood as limiting the scope of the patent of the present invention. A person skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and all such modifications and improvements are included within the scope of protection of the present invention. Accordingly, the scope of patent protection of the present invention is defined by the appended claims.

Claims

Claim 1 A cleaning device for wafer processing comprises a lower frame (11), and columns (12) extending vertically upward are provided at the four corners of the lower frame (11), and an upper frame (13) is installed at one end of the columns (12) spaced apart from the lower frame (11), and the lower frame (11) and the columns (12) form an installation frame with the upper frame (13), and an installation plate (14) is provided on the installation frame; a movement mechanism (21) is installed on the installation plate (14), a vibration damping mechanism (41) is provided below the movement mechanism (21), and a pneumatic assembly (61) is provided above the movement mechanism (21), and the vibration damping mechanism (41) is connected to the pneumatic assembly (61) through a conduit (59), and the vibration damping mechanism (41), the movement mechanism (21), and the pneumatic assembly (61) are arranged on the installation frame; The vibration damping mechanism (41) is connected to the moving mechanism (21) via the second suspension slide base (34), and the vibration damping mechanism (41) includes a vibration damping head housing (42), a bottom plate (49) is provided at the bottom of the vibration damping head housing (42), an opening is formed at the top of the vibration damping head housing (42), and a housing sealing cover (48) is provided at the opening at the top of the vibration damping head housing (42); a positive pressure housing (44) extending upward from the bottom plate (49) is provided within the vibration damping head housing (42), and a separation gap is formed between the top of the positive pressure housing (44) and the top of the vibration damping head housing (42); A separation gap is formed between the outer wall of the positive pressure housing (44) and the inner wall of the vibration damping head housing (42), and a negative pressure chamber (43) is provided on the outer side of the positive pressure housing (44), and the negative pressure chamber (43) is positioned between the inner wall of the vibration damping head housing (42) and the outer wall of the positive pressure housing (44);A cleaning device for wafer processing, characterized in that the moving mechanism (21) includes a first mounting slide rail (2) and a first rack base (27), the first rack base (27) and the first mounting slide rail (28) are fixedly installed on the lower side of the mounting plate (14), the first mounting slide rail (28) and the first rack base (27) are installed on one side of the mounting plate (14) spaced apart from the column (12), and the first rack base (27) and the first mounting slide rail (28) are arranged parallel to the mounting plate (14); a sliding first suspension slide base (29) is suspendedly installed on the first mounting slide rail (28), a first motor (23) is fixedly installed on the first suspension slide base (29), and the first motor (23) is connected to the first rack base (27) so as to be driven by meshing. Claim 2 In claim 1, a positive pressure sealing cover (46) is provided at one end of the positive pressure housing (44) spaced apart from the bottom plate (49), and an intake tube (47) is provided in the positive pressure sealing cover (46) and extends upward and penetrates the housing sealing cover (48), and one end of the intake tube (47) spaced apart from the positive pressure housing (44) extends above the housing sealing cover (48), and the upper end of the intake tube (47) is connected to a conduit (59) so that the intake tube (47) and the positive pressure housing (44) are connected in a communicable manner; an extraction port (57) is provided in the housing sealing cover (48), and the extraction port (57) and the negative pressure chamber (43) are connected in a communicable manner; the positive pressure housing (44) and the negative pressure chamber (43) are each installed within the vibration damping head housing (42), and the positive pressure housing (44) and the negative pressure chamber (43) are isolated from each other and are not connected in a communicable manner; A cleaning device for wafer processing, characterized in that a first blower dust removal slit (54) is opened on the bottom surface of a positive pressure housing (44) and penetrates the bottom plate (49) in a transverse direction, and a second blower dust removal slit (56) is provided symmetrically at the ends adjacent to both ends of the first blower dust removal slit (54), a lateral blower gap is formed between the second blower dust removal slit (56) and the top of the first blower dust removal slit (54), and the second blower dust removal slit (56) and the first blower dust removal slit (54) are arranged vertically so as to communicate with each other; and the height ratio of the positive pressure housing (44) to the dust removal head housing (42) is 2 / 3 to 3 / 4:

1. Claim 3 In claim 1, a pneumatic assembly base (22) is provided on the lower side of the first suspension slide base (29), the pneumatic assembly base (22) is fixedly connected to the first suspension slide base (29), the pneumatic assembly base (22) and the first mounting slide rail (28) are arranged vertically, and one end of the pneumatic assembly base (22) extends to the outside of the mounting plate (14); a bearing wheel (25) is provided on one end of the pneumatic assembly base (22) spaced apart from the mounting plate (14), the bearing wheel (25) is installed on a support beam (15), and the support beam (15) is positioned between two adjacent columns (12); On one side of the pneumatic assembly base (22) spaced apart from the first suspension slide base (29), a second mounting slide rail (33) and a second rack base (26) are fixedly installed parallel to each other, and the parallel second mounting slide rail (33), second rack base (26) and the first mounting slide rail (28) are arranged vertically; a sliding second suspension slide base (34) is suspended and installed on the second mounting slide rail (33), and a second motor (24) is provided on the second suspension slide base (34), and the second motor (24) is connected to the second rack base (26) so as to be driven by meshing; and on one side of the pneumatic assembly base (22) spaced apart from the mounting plate (14), a pneumatic assembly (61) is provided, and the pneumatic assembly (61) is arranged on the outside of the mounting plate (14); The pneumatic assembly (61) includes a negative pressure blower fan (62) and a positive pressure blower fan (63), and a negative pressure high-performance filter chamber (66) is provided above the negative pressure blower fan (62), and the intake port of the negative pressure high-performance filter chamber (66) extends laterally and is positioned outside the negative pressure blower fan (62); the intake port of the negative pressure high-performance filter chamber (66) is connected in communication with the extraction port (57) of the vibration damping mechanism (41) through a conduit (59), and the positive pressure blower fan (63) is connected in communication with the intake tube (47) of the vibration damping mechanism (41) through another conduit (59).A cleaning device for wafer processing characterized by Claim 4 In paragraph 3, a silencer box (65) is provided on one side of the negative pressure blower fan (62), and the discharge port of the negative pressure blower fan (62) is connected to the silencer box (65) through a conduit (59); a square honeycomb tube (69) is provided in the silencer box (65), and a plurality of through holes are formed on the surface of the frame square tube plate of the square honeycomb tube (69), and an inclined honeycomb baffle (71) that is staggered from left to right is provided in the square honeycomb tube (69); A cleaning device for wafer processing, characterized in that an inclined honeycomb baffle (71) extends upwardly at an angle from the inner wall of a square honeycomb tube (69), the inclined honeycomb baffles (71) on both sides are arranged in an alternating pattern vertically, the inclined honeycomb baffles (71) on both sides intersect each other, and the upper portions of the inclined honeycomb baffles (71) on both sides overlap each other in the vertical direction vertically, so that the intersecting inclined honeycomb baffles (71) on both sides form an S-shaped air duct within the square honeycomb tube (69); a side discharge port (68) is provided in the negative pressure blower fan (62), and the side discharge port (68) is connected to a silencer box (65) through a conduit (59). Claim 5 In claim 1, a first suction slit (52) and a second suction slit (53) are formed on the bottom surface of the negative pressure chamber (43) and penetrate the bottom plate (49) in a transverse direction, and the first suction slit (52) and the second suction slit (53) are arranged parallel to the first blower dust removal slit (54); the first suction slit (52) is arranged adjacent to the first blower dust removal slit (54), and the second suction slit (53) is arranged spaced apart from the first blower dust removal slit (54), and a spaced gap is formed between the first suction slit (52) and the second suction slit (53); Two mutually corresponding variable cross-section rods (45) are provided on the bottom surface (51) of the positive pressure chamber of the positive pressure housing (44), the variable cross-section rods (45) and the first blower dust removal slit (54) are arranged parallel to each other, and the two variable cross-section rods (45) are each arranged on both sides of the first blower dust removal slit (54); A cleaning device for wafer processing is characterized by the following: a variable cross-section rod (45) is provided with a compressed air flow convex portion (19) protruding inwardly; a supply gap D1 is formed between the upper ends of two mutually corresponding variable cross-section rods (45); a convex portion gap D2 is formed between the compressed air flow convex portions (19) facing each other on both sides in the middle of the two variable cross-section rods (45), such that the supply gap D1 > convex portion gap D2; a discharge gap D3 is formed between the lower ends of two mutually corresponding variable cross-section rods (45); a blower dust removal gap D4 is formed in the first blower dust removal slit (54) opened on the bottom surface (51) of the positive pressure chamber, such that the blower dust removal gap D4 also corresponds to the width of the first blower dust removal slit; and the supply gap D1 = discharge gap D3, such that the discharge gap D3 > blower dust removal gap D4. Claim 6 In claim 5, the compressed airflow convex portion (19) is in the form of a convex strip; or the compressed airflow convex portion (19) is a long strip with an arc-shaped cross section; or the compressed airflow convex portion (19) is a long strip with a chord-shaped cross section; the ratio of the supply air interval D1 to the convex portion interval D2 is 5 to 10:1; the supply air interval D1 = discharge interval D3; the ratio of the blower dust removal interval D4 to the convex portion interval D2 is 1:1 to 1.5; a third suction slit (55) penetrating the bottom plate (49) in the longitudinal direction is opened on the bottom surface of both short sides of the negative pressure chamber (43), the third suction slit (55) is positioned between the outer wall of both short sides of the positive pressure housing (44) and the inner wall of the dust removal head housing (42), and the third suction slit (55) is positioned parallel to the second blower dust removal slit (56); A cleaning device for wafer processing, characterized in that a second blower dust removal slit (56) is positioned adjacent to the inner wall of the short side of both sides of the positive pressure housing (44); the ratio of the width of the first blower dust removal slit (54), the width of the first suction slit (52), and the width of the second suction slit (53) is 1:4 to 5:4 to 5; the ratio of the width of the second blower dust removal slit (56) to the width of the third suction slit (55) is 1:4 to 5; the ratio of the air volume of the first blower dust removal slit (54) to the air volume of the first suction slit (52) is 1:1.5 to 3, the air volume of the second suction slit (53) is the same as the air volume of the first suction slit (52); and the ratio of the air volume of the second blower dust removal slit (56) to the air volume of the third suction slit (55) is 1:1.5 to 3. Claim 7 In claim 1, the installation plate (14) is installed in the center of the installation frame, one side of the installation plate (14) is connected to two adjacent columns (12), and the other side of the installation plate (14) is connected to the upper frame (13) through a vertical plate; a vertical frame (16) is installed between one end of the installation plate (14) adjacent to the column (12) and the lower frame (11), and a support beam (15) is installed between two columns (12) spaced apart from the installation plate (14); A cleaning device for wafer processing, characterized in that a pneumatic assembly (61) is positioned on the upper side of a moving mechanism (21), a vibration damping mechanism (41) is connected to the pneumatic assembly (61) through a conduit (59), and the vibration damping mechanism (41), moving mechanism (21), and pneumatic assembly (61) are positioned on an installation frame; and a housing sealing cover (48) is connected to the moving mechanism (21) through a second suspension slide base (34). Claim 8 A cleaning device for wafer processing, characterized in that, in claim 1, the mounting plate (14) is installed in the center of the mounting frame, one end of the mounting plate (14) is fixedly installed in the center of two adjacent columns (12), and the other end of the mounting plate (14), spaced apart from the columns (12), is connected to the upper frame (13) through a vertical plate; a vertical frame (16) is installed between the one end of the mounting plate (14) adjacent to the columns (12) and the lower frame (11), and a support beam (15) is installed between the two columns (12) spaced apart from the mounting plate (14); the gear of the output shaft of the first motor (23) is connected to the first rack base (27) so as to be able to engage and drive; the gear of the output shaft of the second motor (24) is connected to the second rack base (26) so as to be able to engage and drive; and a vibration damping mechanism (41) is installed suspended at one end of the second suspension slide base (34) spaced apart from the second mounting slide rail (33).

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