Actuator unit, head chip, liquid jet head, and liquid jet recording device

Abstract

An actuator unit according to one aspect of the present disclosure comprises: an actuator chip in which a pressure chamber for applying pressure to liquid is formed so as to open in a first direction; a flow path member which is provided outside the actuator chip in the first direction, and in which are formed a first common liquid chamber that communicates with a first-direction first side of the pressure chamber and a second common liquid chamber that communicates with a first-direction second side of the pressure chamber on the side opposite from the first side; and a sealing member which is provided between the actuator chip and the flow path member in the first direction so as to close the first common liquid chamber and the second common liquid chamber.

Description

Actuator Unit, Head Chip, Liquid Jet Head, and Liquid Jet Recording Device

[0001] Embodiments of the present disclosure relate to an actuator unit, a head chip, a liquid jet head, and a liquid jet recording device. The present disclosure claims priority based on Japanese Patent Application No. 2024-161768 filed in Japan on September 19, 2024, and incorporates the content herein by reference.

[0002] Patent Document 1 discloses that in a liquid chamber unit and an actuator unit constituting an inkjet head, the upper surface of a piezoelectric element bonded to a substrate and the upper surface of a component are simultaneously machined flat by a machine tool.

[0003] Japanese Patent Laid-Open No. HEI 8-108540

[0004] However, when the alignment accuracy of each member constituting the inkjet head is low, liquid may leak from the gaps between the members. When the designed shape of each member is changed, it becomes difficult to flexibly respond to the sealing structure. When each member is made of a different material, assembly becomes difficult. Since the accuracy required for member production becomes high, it is difficult to prepare the assembled members. Therefore, it is desired that the degree of freedom in product design is increased and cost reduction is possible.

[0005] The present disclosure has been made in view of the above problems, and aims to increase the degree of freedom in product design and enable cost reduction.

[0006] (1) An actuator unit according to one aspect of the present disclosure includes an actuator chip in which a pressure chamber for applying pressure to a liquid is formed to open in a first direction, a first common liquid chamber provided outside the actuator chip in the first direction and communicating with a first side of the pressure chamber in the first direction, and a second common liquid chamber communicating with a second side of the pressure chamber in the first direction opposite to the first side, a flow path member in which the first common liquid chamber and the second common liquid chamber are formed, and a sealing member provided between the actuator chip and the flow path member in the first direction so as to close the first common liquid chamber and the second common liquid chamber.

[0007] According to the actuator unit of this embodiment, even if the alignment accuracy of the actuator tip and the flow channel member in the first direction is low, the sealing member can seal the gap between the actuator tip and the flow channel member to prevent liquid leakage. Even if the design shape of the actuator tip or flow channel member is changed, the sealing structure can be flexibly adapted. Since machining is not required during the assembly of the actuator unit, assembly is possible even if the actuator tip and flow channel member are made of different materials, expanding the range of material selection. Since the accuracy required for manufacturing the members in the first direction is lower, the preparation of assembly members becomes simpler. Therefore, it is possible to provide an actuator unit that offers greater freedom in product design and reduces costs.

[0008] (2) In the actuator unit according to the embodiment of (1), the actuator tip is formed in a shape that extends in a second direction intersecting the first direction in a plan view, the flow channel member is formed in a frame shape that surrounds the actuator tip in a plan view, and the sealing member may be provided between the actuator tip and the flow channel member in the second direction.

[0009] With this configuration, even if the alignment accuracy of the actuator tip and the flow channel member in the second direction is low, the sealing member can seal the gap between the actuator tip and the flow channel member to prevent liquid leakage.

[0010] (3) In the actuator unit according to the embodiment of (1) or (2), the sealing member may be flexible in at least a part of it.

[0011] With this configuration, even if the alignment accuracy of the actuator tip and the flow channel member in the height direction (directions intersecting the first and second directions) is low, the sealing member can seal the gap between the actuator tip and the flow channel member to prevent liquid leakage.

[0012] (4) In any of the embodiments of (1) to (3) of the actuator unit, the flow path member comprises a first wall portion that forms the first common liquid chamber and a second wall portion that forms the second common liquid chamber, and the actuator tip may be in contact with either the first wall portion or the second wall portion.

[0013] This configuration allows the position of the flow path member to be fixed by contact with the actuator tip, thereby reducing the burden of assembling the actuator unit.

[0014] (5) In any of the actuator units according to (1) to (4), the flow channel member may be formed to be larger than the actuator tip in a direction intersecting the first direction in a side view.

[0015] This configuration allows for a wider cross-sectional area for both the first and second common liquid chambers compared to the case where the flow path member is formed to be smaller than or equal to the actuator tip. As a result, the pressure within the common liquid chambers can be kept uniform, reducing the pressure difference between pressure chambers and suppressing variations in liquid injection. Furthermore, because the liquid supply from the common liquid chamber to the pressure chamber is stable, stable discharge is possible even when the amount of liquid being injected increases.

[0016] (6) In any of the actuator units according to (1) to (4), the flow channel member may be formed to be the same size as the actuator tip in a direction intersecting the first direction in a side view.

[0017] This configuration makes it easier to seal the gap between the actuator tip and the flow channel member using the sealing member, compared to the case where the flow channel member is formed to a different size from the actuator tip.

[0018] (7) In any of the actuator units according to (1) to (6), the flow path member may include, in a plan view, a first roof portion extending from the portion forming the first common liquid chamber and covering the actuator tip, and a second roof portion extending from the portion forming the second common liquid chamber and covering the actuator tip.

[0019] With this configuration, the actuator tip is covered by the first and second roof sections, making it easier to seal the gap between the actuator tip and the flow path member with a sealing member. For example, if an adhesive or rubber material is used as the sealing member, it can also seal the gap between the actuator tip and each roof section, thereby enhancing the sealing effect.

[0020] (8) A head chip according to one aspect of the present disclosure comprises an actuator unit according to any of the embodiments of (1) to (7) and a nozzle plate having nozzle holes for spraying liquid.

[0021] This configuration results in a head chip that offers greater flexibility in product design.

[0022] (9) In the head tip according to the embodiment of (8), the flow channel member is joined to the first surface of the nozzle plate and may be formed of the same material as the nozzle plate.

[0023] For example, if the flow channel component and nozzle plate are made of different materials, there is a high possibility that they will warp due to differences in expansion rates during temperature changes. In contrast, this configuration suppresses warping during temperature changes, thus reducing the burden of assembling the head chip.

[0024] In the head tip according to the embodiment of (10)(9), the flow channel member may be formed integrally with the nozzle plate.

[0025] This configuration eliminates the need to bond the flow path components to the nozzle plate, thus reducing the burden of head tip assembly. Furthermore, since the flow path components do not need to be formed separately from the nozzle plate, costs can be reduced. It also contributes to improved durability by eliminating the use of adhesives.

[0026] In a head tip according to any of the embodiments of (11)(8) to (10), the nozzle holes are arranged in a plurality in a second direction that is along the first surface of the nozzle plate and intersects the first direction, and when the plurality of nozzle holes are made up of a nozzle row, the nozzle row is provided in a plurality of rows spaced apart in the first direction, and the actuator tips may be provided in a plurality at intervals in the first direction such that the pressure chambers are connected to each of the nozzle holes.

[0027] This configuration allows for multiple rows of nozzles in the first direction, which contributes to improved resolution.

[0028] (12) An actuator unit according to any embodiment of (1) to (7) comprises a plurality of actuator chips, including a first actuator chip having a first pressure chamber formed therein, and a second actuator chip positioned adjacent to the first actuator chip in the first direction and having a second pressure chamber formed therein, wherein the flow path member may include a partition wall that separates the first pressure chamber side from the second pressure chamber side in the first direction.

[0029] With this configuration, the first pressure chamber and the second pressure chamber are separated by a partition wall, thereby suppressing so-called crosstalk, where pressure fluctuations in the first pressure chamber are propagated to the second pressure chamber.

[0030] (13) In any of the actuator units according to (1) to (7) and (12), the flow channel member has a recess that opens outward from the outer edge of the actuator tip in a plan view, and the sealing member may cover the recess in a plan view.

[0031] With this configuration, when the sealing member seals the gap between the actuator tip and the flow channel member, the air around the actuator tip can be released outward through the recess, thus contributing to improved sealing performance and durability.

[0032] In the actuator unit according to the embodiment of (14)(13), the actuator tip is formed in a shape that extends in a second direction intersecting the first direction in the plan view, a plurality of recesses are formed so as to communicate outward from both ends of the actuator tip in the second direction, and the sealing member may extend so as to straddle both ends of the actuator tip and the recesses in the second direction.

[0033] With this configuration, when sealing the gap between the actuator tip and the flow path member with the sealing member, air can be released outward from both ends of the actuator tip along the second direction through the recess, thus enabling smoother sealing.

[0034] In the actuator unit according to the embodiment of (15)(14), the plurality of recesses include a first recess extending outward from one end of the actuator tip in the second direction and a second recess extending outward from the other end of the actuator tip in the second direction, wherein at least one of the first recess and the second recess may have an inclined edge that extends inward in the first direction in the plan view.

[0035] With this configuration, the dimensions of the flow channel member in the first direction (or second direction) can be reduced compared to cases where the first and second recesses each extend in the second direction in a plan view, or where they extend inclined outwards on both sides in the first direction, making it easier to miniaturize the head tip.

[0036] In the actuator unit according to the embodiments of (16) and (15), the flow path member is provided with a first common liquid chamber that leads to a first side of the pressure chamber in the first direction, and a second common liquid chamber that leads to a second side of the pressure chamber opposite to the first side in the first direction, and the flow path member is provided with an inlet port for supplying liquid to the first common liquid chamber and an outlet port for discharging liquid from the second common liquid chamber, and at least one of the inlet port and the outlet port may be positioned adjacent to the inclined edge in the plan view.

[0037] According to this configuration, at least one of the inlet port and the outlet port can be arranged inside the first direction, as compared with the case where each of the first concave portion and the second concave portion extends so as to be inclined outward in both sides in the first direction in a plan view. Therefore, it is easy to miniaturize the head chip.

[0038] In the actuator unit according to the aspect of (17), (15) or (16), at least one of the first concave portion and the second concave portion has an outer inclined edge portion that extends so as to be inclined outward in the first direction in the plan view, and a notch may be formed in the flow path member outside the outer inclined edge portion in the plan view.

[0039] According to this configuration, since the forming material of the flow path member can be reduced in the notch, it contributes to cost reduction and weight reduction.

[0040] In the actuator unit according to any one of the aspects of (18), (1) to (7), (12) to (17), the sealing member may be joined to the actuator chip by an adhesive or welding.

[0041] The liquid ejection head according to one aspect of the present disclosure includes the actuator unit according to any one of the aspects of (1) to (7), (12) to (18).

[0042] According to the liquid ejection head according to this aspect, a liquid ejection head with increased freedom in product design can be obtained.

[0043] The liquid ejection recording apparatus according to one aspect of the present disclosure includes the liquid ejection head according to the aspect of (19).

[0044] [[ID=2))According to the liquid ejection recording apparatus according to this aspect, a liquid ejection recording apparatus with increased freedom in product design can be obtained.

[0045] This is a schematic diagram of the inkjet printer according to the first embodiment. This is a schematic configuration of the inkjet head and ink circulation mechanism according to the first embodiment. This is a plan view of the head chip according to the first embodiment. This is a cross-sectional view of the head chip corresponding to the IV-IV line in Figure 3. This is a cross-sectional view of the head chip corresponding to the V-V line in Figure 3. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the first modified example of the first embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the second modified example of the first embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the third modified example of the first embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the fourth modified example of the first embodiment. This is a plan view of the head chip according to the second embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the third embodiment. This is a cross-sectional view of the head chip corresponding to the XZ plane according to the third embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the fourth embodiment. This is a cross-sectional view of the head chip corresponding to the XZ plane according to the fourth embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the first modified example of the fourth embodiment. This is a cross-sectional view of the head chip corresponding to the YZ plane according to the fifth embodiment. This is a plan view of the head chip according to the sixth embodiment. This is a cross-sectional view of the head chip corresponding to the XVIII-XVIII line in Figure 17. This is a cross-sectional view of the head tip corresponding to the YZ plane according to the first modified example of the sixth embodiment. This is a plan view of the head tip according to the seventh embodiment. This is a plan view of the head tip according to the eighth embodiment.

[0046] Embodiments relating to this disclosure will be described below with reference to the drawings. In the embodiments and modifications described below, corresponding components may be denoted by the same reference numerals and their descriptions may be omitted. In the following description, expressions indicating relative or absolute arrangements such as "parallel," "orthogonal," "center," and "coaxial" will not only strictly represent such arrangements, but will also represent states of relative displacement with tolerances or angles and distances that allow the same function to be obtained.

[0047] In the following embodiments, as an example of a liquid jet recording apparatus including the liquid jet head of the present disclosure, an inkjet printer (hereinafter simply referred to as a "printer") that performs recording on a recording medium using ink (liquid) will be described as an example. In the drawings used in the following description, the scales of each member are appropriately changed in order to make each member recognizable in size.

[0048] <First Embodiment> <Printer> FIG. 1 is a schematic configuration diagram of a printer 1. As shown in FIG. 1, the printer 1 of the present embodiment includes a pair of transport mechanisms 2 and 3, an ink tank 4, an inkjet head 5 (liquid jet head), an ink circulation mechanism 6, and a scanning mechanism 7.

[0049] In the following description, the orthogonal coordinate system of X, Y, and Z will be used for explanation as necessary. The X direction coincides with the transport direction (sub-scanning direction) of the recording medium P (for example, paper or the like). The Y direction coincides with the scanning direction (main scanning direction) of the scanning mechanism 7. The Z direction indicates the height direction (gravity direction) orthogonal to the X direction and the Y direction. In the following description, among the X direction, the Y direction, and the Z direction, the side of the arrow in the figure is taken as the plus (+) side, and the side opposite to the arrow is taken as the minus (-) side for explanation. In this specification, the +Z side corresponds to above the gravity direction, and the -Z side corresponds to below the gravity direction.

[0050] The transport mechanisms 2 and 3 transport the recording medium P to the +X side. The transport mechanisms 2 and 3 each include, for example, a pair of rollers 11 and 12 extending in the Y direction. The ink tank 4 stores, for example, four colors of ink, namely yellow, magenta, cyan, and black, separately. Each inkjet head 5 is configured to be able to eject the four colors of ink, namely yellow, magenta, cyan, and black, according to the connected ink tank 4.

[0051] Figure 2 is a schematic diagram of the inkjet head 5 and the ink circulation mechanism 6. Referring to Figure 2, the ink circulation mechanism 6 circulates ink between the ink tank 4 and the inkjet head 5. The ink circulation mechanism 6 comprises a circulation channel 23 having an ink supply pipe 21 and an ink discharge pipe 22, a pressure pump 24 connected to the ink supply pipe 21, and a suction pump 25 connected to the ink discharge pipe 22.

[0052] The pressurizing pump 24 pressurizes the ink supply pipe 21 and sends ink to the inkjet head 5 through the ink supply pipe 21. As a result, the ink supply pipe 21 side is under positive pressure relative to the inkjet head 5.

[0053] The suction pump 25 reduces the pressure inside the ink discharge pipe 22 and draws ink from the inkjet head 5 through the ink discharge pipe 22. As a result, there is negative pressure on the ink discharge pipe 22 side relative to the inkjet head 5. The ink can be circulated between the inkjet head 5 and the ink tank 4 through the circulation channel 23 by the drive of the pressurizing pump 24 and the suction pump 25.

[0054] As shown in Figure 1, the scanning mechanism 7 causes the inkjet head 5 to reciprocate in the Y direction. The scanning mechanism 7 includes a guide rail 28 extending in the Y direction and a carriage 29 movably supported on the guide rail 28.

[0055] <Inkjet Head> The inkjet head 5 is mounted on a carriage 29. In the illustrated example, multiple inkjet heads 5 are mounted in a row in the Y direction on a single carriage 29. The inkjet head 5 includes a head chip 30 (see Figure 2), an ink supply unit (not shown) connecting the ink circulation mechanism 6 and the head chip 30, and a control unit (not shown) that applies a drive voltage to the head chip 30.

[0056] The inkjet head 5 of this embodiment is an electromechanical conversion type inkjet head that ejects ink from a head chip 30 which includes an actuator plate 40 formed from a piezoelectric element such as PZT (lead zirconate titanate).

[0057] In this inkjet head 5, to eject ink, a voltage is applied between the electrodes of the drive wall of the ejection channel 42 (pressure chamber) formed in the actuator plate 40, causing the drive wall to undergo thickness sliding deformation. As a result, the volume inside the ejection channel 42 changes, and the ink inside the ejection channel 42 is ejected through the nozzle hole 31a. Note that the ink ejection method is not limited to the electromechanical conversion method described above, but may also be a charge control method, a pressurized vibration method, an electrothermal conversion method, an electrostatic attraction method, etc.

[0058] The electrostatic control method involves applying an electric charge to the material using a charging electrode and controlling the direction of the material's flight with a deflection electrode to discharge it from the nozzle. The pressurized vibration method, on the other hand, applies ultra-high pressure to the material to discharge it towards the nozzle tip. If no control voltage is applied, the material travels in a straight line and is discharged from the nozzle. When a control voltage is applied, electrostatic repulsion occurs between the material particles, causing them to scatter and not be discharged from the nozzle.

[0059] Furthermore, the electrothermal conversion method involves rapidly vaporizing the material using a heater placed within the space where the material is stored, generating bubbles, and then using the pressure of these bubbles to discharge the material from the space. The electrostatic attraction method involves applying a small amount of pressure to the space where the material is stored, forming a meniscus of material in the nozzle, and then applying electrostatic attraction to draw out the material. In addition, other technologies such as methods that utilize changes in fluid viscosity due to an electric field, and methods that use discharge sparks to propel the material can also be applied.

[0060] <Head Tip> Figure 3 is a plan view of the head tip 30 according to the first embodiment. Figure 4 is a cross-sectional view of the head tip 30 corresponding to the line IV-IV in Figure 3. Figure 5 is a cross-sectional view of the head tip 30 corresponding to the line V-V in Figure 3. Referring to Figures 3 to 5 together, the head tip 30 is a so-called circulating side-chute type head tip that circulates ink with the ink tank 4 and discharges ink from the center of the extending direction (Y direction) of the discharge channel 42. The head tip 30 comprises an actuator unit and a nozzle plate 31. The actuator unit comprises an actuator tip 32, a flow path member 33, and a sealing member 34. Note that the sealing member 34 is not shown in Figure 3.

[0061] <Nozzle Plate> The nozzle plate 31 is formed of, for example, a resin material (polyimide, etc.). The nozzle plate 31 may also be made of a single-layer structure or a laminated structure of a metal material (SUS, Ni-Pd, etc.), a resin material (polyimide, etc.), glass, silicon, etc. The form of the nozzle plate 31 can be changed according to the design specifications.

[0062] The nozzle plate 31 has nozzle holes 31a formed therein for ejecting ink. Multiple nozzle holes 31a are formed, penetrating the nozzle plate 31 in the Z direction. The nozzle holes 31a may be formed in a tapered shape, for example, with the inner diameter gradually decreasing from top to bottom. The multiple nozzle holes 31a are spaced apart in the X direction. Each nozzle hole 31a communicates separately with a corresponding discharge channel 42. The upper end opening of each nozzle hole 31a may open, for example, in the center of the discharge channel 42 in the Y direction.

[0063] The nozzle plate 31 is provided on the -Z plane side of the actuator unit. The nozzle plate 31 covers the lower surface of the actuator plate 40 and the lower surface of the flow path member 33 together. The nozzle plate 31 is joined to the lower surface of the actuator plate 40 and the lower surface of the flow path member 33 via adhesive or the like. The nozzle plate 31 covers the lower end openings of the first common liquid chamber 61 and the second common liquid chamber 62, and the lower end openings of the channels 42 and 43 together.

[0064] <Actuator Tip> The actuator tip 32 is provided on the +Z plane side (one side) of the nozzle plate 31. The actuator tip 32 includes an actuator plate 40 made of piezoelectric material. The actuator tip 32 is formed with a discharge channel 42 (pressure chamber) leading to the nozzle hole 31a opening in the Y direction (first direction) along the +Z plane (one side) of the nozzle plate 31.

[0065] The actuator tip 32 is formed in a shape that follows the +Z plane of the nozzle plate 31 and extends in the X direction (a second direction intersecting the first direction). The actuator tip 32 is formed in a block shape with the Z direction as the thickness direction and the X direction as the longitudinal direction.

[0066] The actuator tip 32 has a thickness in the Z direction that is thinner than the flow channel member 33, and its plan view shape is smaller than the inner edge of the rectangular frame-shaped flow channel member 33. The actuator tip 32 is spaced apart from the flow channel member 33. The +X side end face of the actuator tip 32 may be spaced apart from the inner surface of the flow channel member 33 that faces the -X side. The -X side end face of the actuator tip 32 may be spaced apart from the inner surface of the flow channel member 33 that faces the +X side. The +Y side end face of the actuator tip 32 may be spaced apart from the inner surface of the flow channel member 33 that faces the -Y side. The -Y side end face of the actuator tip 32 may be spaced apart from the inner surface of the flow channel member 33 that faces the +Y side. Within the flow channel member 33, the first common liquid chamber 61 and the second common liquid chamber 62 are separated by the actuator tip 32.

[0067] The actuator chip 32 comprises an actuator plate 40 and a cover plate 50.

[0068] The actuator plate 40 is made of a piezoelectric material such as PZT (lead zirconate titanate). The actuator plate 40 is a so-called chevron substrate, which is made by laminating two piezoelectric plates with different polarization directions in the Z direction. Alternatively, the actuator plate 40 may be a so-called monopole substrate, in which the polarization direction is unidirectional throughout the entire Z direction.

[0069] The actuator plate 40 has a channel row 41 formed therein. The channel row 41 has an ejection channel 42 (pressure chamber) into which ink is filled, and a non-ejection channel 43 into which ink is not filled. The channels 42 and 43 are arranged alternately on the actuator plate 40 with spacing in the X direction.

[0070] The discharge channel 42 penetrates the actuator plate 40 in the Z direction and extends linearly in the Y direction along the entire length of the actuator plate 40. The +Y side opening of each discharge channel 42 communicates with the first common liquid chamber 61. The -Y side opening of each discharge channel 42 communicates with the second common liquid chamber 62. The first common liquid chamber 61 and the second common liquid chamber 62 communicate through each discharge channel 42.

[0071] The non-discharge channel 43 extends linearly in the Y direction in the portion of the actuator plate 40 located between adjacent discharge channels 42. The portions of the actuator plate 40 located between adjacent discharge channels 42 and non-discharge channels 43 each constitute a drive wall 44 facing the discharge channel 42. Channels 42 and 43 are surrounded on both sides in the X direction by a pair of drive walls 44.

[0072] The Y-direction ends of the non-discharge channel 43 terminate within the actuator plate 40. The non-discharge channel 43 does not communicate with the first common liquid chamber 61 and the second common liquid chamber 62. The non-discharge channel 43 is formed in a convex arc shape that is downward when viewed from the X-direction. The Y-direction dimension of the non-discharge channel 43 gradually decreases from top to bottom. Although not shown in the figures, the actuator plate 40 has common wiring and individual wiring formed therein as drive wiring. Note that in Figures 3 and 4, the electrodes 45 that constitute the drive wiring are shown in a simplified manner.

[0073] The cover plate 50 is a component for connecting the actuator chip 32 and the flexible printed circuit board (external wiring). The cover plate 50 is a plate material made of, for example, a resin material (e.g., PI, PE, PET, PP, PPS, PC, PEEK, etc.). The Z-direction dimension of the cover plate 50 may be smaller than that of the actuator plate 40.

[0074] In addition to resin materials, the cover plate 50 may also be made of piezoelectric materials such as PZT, glass, silicon, or other non-conductive materials. Furthermore, the cover plate 50 may be made by coating the outer surface of a non-conductive material with a conductive material such as a metal material as the base.

[0075] The cover plate 50 has the same external shape as the actuator plate 40 when viewed from above. The cover plate 50 is superimposed on the entire upper surface of the actuator plate 40. The cover plate 50 is bonded to the upper surface of the actuator plate 40 with an adhesive or the like.

[0076] <Flow channel member> The flow channel member 33 is provided on the +Z plane side of the nozzle plate 31, outside the actuator tip 32 in the Y direction. The flow channel member 33 has a first common liquid chamber 61 that leads to the +Y side (first side in the first direction) of the discharge channel 42, and a second common liquid chamber 62 that leads to the -Y side (second side opposite to the first side in the first direction) of the discharge channel 42.

[0077] The flow channel member 33 is formed of, for example, a metal material (such as SUS or Ni-Pd). In addition to metal materials, the flow channel member 33 may also be a single-layer or laminated structure made of resin materials (such as PI, PE, PET, PP, PPS, PC, PEEK, etc.), glass, silicon, etc. The form of the flow channel member 33 can be changed according to the design specifications.

[0078] The flow path member 33 includes an outer wall portion 66 that forms the outer shape of the flow path member 33 in a plan view, and an inner wall portion 67 that is positioned inside the outer wall portion 66 and has an inclined surface 67a that slopes inward in the Y direction and toward the -Z side. Each of the first common liquid chamber 61 and the second common liquid chamber 62 is demarcated by the +Z plane of the nozzle plate 31, the Y-direction inner surface of the outer wall portion 66 of the flow path member 33 (the inner surface in the first direction), the -Z plane of the inner wall portion 67 of the flow path member 33, and the Y-direction outer surface of the actuator tip 32 (the outer surface in the first direction). The flow path member 33 is formed in a frame shape so as to surround the actuator tip 32 when viewed from the Z direction (the direction intersecting one surface of the nozzle plate). The flow path member 33 is formed in a rectangular frame shape so as to surround the actuator tip 32 when viewed from the Z direction.

[0079] The flow channel member 33 is formed in the shape of a rectangular frame with the Z direction as the thickness direction and the X direction as the longitudinal direction. The flow channel member 33 separates the chip housing section 63, the first common liquid chamber 61, and the second common liquid chamber 62. The chip housing section 63, the first common liquid chamber 61, and the second common liquid chamber 62 are in communication with each other and penetrate the flow channel member 33 in the Z direction.

[0080] The chip housing portion 63 is formed in the center of the flow channel member 33 in the Y direction. In a plan view, the chip housing portion 63 is formed as an elongated hole with the X direction as its longitudinal direction. In a plan view, the chip housing portion 63 may be formed to be larger than the outer shape of the actuator chip 32.

[0081] The first common liquid chamber 61 is formed in the portion of the flow channel member 33 located on the +Y side relative to the chip housing portion 63. The first common liquid chamber 61 is formed in the same way as the chip housing portion 63, with the X direction as its longitudinal direction. The +X side end of the first common liquid chamber 61 may protrude in the X direction relative to the chip housing portion 63.

[0082] The second common liquid chamber 62 is formed in the portion of the flow path member 33 located on the -Y side with respect to the chip housing portion 63. The second common liquid chamber 62 is formed in the same way as the first common liquid chamber 61, with the X direction as its longitudinal direction. The -X side end of the second common liquid chamber 62 may protrude in the X direction relative to the chip housing portion 63.

[0083] The flow path member 33 comprises a first wall portion 81 forming a first common liquid chamber 61 and a second wall portion 82 forming a second common liquid chamber 62. Each of the first wall portion 81 and the second wall portion 82 extends in the X direction in a plan view. The flow path member 33 further comprises a third wall portion 83 extending in the Y direction to connect the +X side ends of each of the first wall portion 81 and the second wall portion 82, and a fourth wall portion 84 extending in the Y direction to connect the -X side ends of each of the first wall portion 81 and the second wall portion 82. The actuator tip 32 is spaced apart from each of the first wall portion 81, the second wall portion 82, the third wall portion 83, and the fourth wall portion 84. The actuator tip 32 is not covered by the flow path member 33 when viewed from the Z direction.

[0084] The flow channel member 33 is formed to be larger than the actuator tip 32 in the Z direction (the direction intersecting the first direction in a side view). As shown in Figure 4, in the head tip 30 of this embodiment, in the Z direction, the height Z2 from the +Z plane of the nozzle plate 31 to the +Z plane of the flow channel member 33 is higher than the height Z1 from the +Z plane of the nozzle plate 31 to the +Z plane of the actuator tip 32 (Z2 > Z1).

[0085] Height Z1 corresponds to the height from the +Z plane of the nozzle plate 31 to the +Z plane of the cover plate 50. Height Z2 corresponds to the height from the +Z plane of the nozzle plate 31 to the +Z plane of the outer wall portion 66 of the flow path member 33. For example, height Z2 may be 0.01 mm or more higher than height Z1.

[0086] The flow channel member 33 is provided with an inlet port 71 and an outlet port 72. The inlet port 71 is located at the +Y and +X ends of the flow channel member 33. The inlet port 71 protrudes upward from the flow channel member 33. The inlet port 71 communicates with the first common liquid chamber 61 through the +X end of the first common liquid chamber 61 (the portion that protrudes relative to the chip housing 63). The ink flowing through the ink supply pipe 21 is supplied to the first common liquid chamber 61 through the inlet port 71.

[0087] The outlet port 72 is located at the -Y and -X ends of the flow path member 33. The outlet port 72 protrudes upward from the flow path member 33. The outlet port 72 communicates with the second common liquid chamber 62 through the -X end of the second common liquid chamber 62 (the portion that protrudes relative to the tip housing 63). The ink flowing through the second common liquid chamber 62 is discharged to the ink discharge pipe 22 through the outlet port 72.

[0088] <Sealing Member> The sealing member 34 is flexible in at least a part of it. The sealing member 34 is provided between the actuator tip 32 and the flow path member 33 in the Y direction so as to close the first common liquid chamber 61 and the second common liquid chamber 62. If a damper portion is formed in the first common liquid chamber 61 and / or the second common liquid chamber 62, the sealing member 34 closes the first common liquid chamber 61 and the second common liquid chamber 62 together with the damper portion. For example, if the actuator tip 32 is spaced apart from the flow path member 33, the sealing member 34 closes the first common liquid chamber 61 and the second common liquid chamber 62 together with the gap (damper portion) in the spaced-away portion.

[0089] The sealing member 34 extends from the flow channel member 33 to the actuator tip 32. The sealing member 34 extends in the Y direction so as to seal the first common liquid chamber 61 and the second common liquid chamber 62. The sealing member 34 extends in the X direction so as to straddle the actuator tip 32 and the flow channel member 33. In the example of Figure 4, the sealing member 34 extends from the +Z plane of the outer wall portion 66, the +Z plane of the inner wall portion 67 and the inclined surface 67a of the flow channel member 33 to the +Z plane of the outer circumference of the cover plate 50 of the actuator tip 32.

[0090] The sealing member 34 extends from at least one of the four sides along the outer circumference of the flow channel member 33, as viewed from the Z direction, to the actuator tip 32. In the examples of Figures 3 and 4, the sealing member 34 extends from each of the four sides along the outer circumference of the flow channel member 33, as viewed from the Z direction, to the actuator tip 32. The sealing member 34 may also be formed in a frame shape so as to cover the outer edge of the actuator tip 32 and the flow channel member 33, as viewed from the Z direction.

[0091] The sealing member 34 is formed of, for example, a film. In this case, the film is low-cost and flexible, so it can be applied to various head chip shapes. Examples of film materials include resin materials (e.g., PI, PE, PET, PP, PPS, PC, PEEK, etc.). However, the film material is not limited to the above and can be changed according to the design specifications.

[0092] The thickness of the sealing member 34 (film) is set to a range of, for example, 0.02 mm or more and 0.2 mm or less. In the example shown in the figure, the thickness of the sealing member 34 is approximately 0.05 mm. The thickness of the sealing member 34 can be changed according to the design specifications, as long as flexibility during sealing is maintained.

[0093] The sealing member 34 is joined to the actuator tip 32 and the flow path member 33 so as to close the first common liquid chamber 61 and the second common liquid chamber 62. The sealing member 34 is joined to the actuator tip 32 by adhesive or welding. The sealing member 34 is joined to the actuator tip 32 and the flow path member 33 by adhesive or welding.

[0094] Examples of adhesives include epoxy, silicone, acrylic, urethane, and fluorine-based adhesives. However, the type of adhesive is not limited to those listed above and can be changed according to the design specifications.

[0095] Examples of welding methods include resin welding. Types of resin welding include hot plate welding, ultrasonic welding, vibration welding, and laser welding. When joining by resin welding, it is desirable that the material used to form the sealing member 34 be the same resin material as the material used to form the cover plate 50 of the actuator tip 32 and / or the material used to form the flow channel member 33.

[0096] The sealing member 34 is superimposed on the upper surfaces of the flow channel member 33 and the actuator tip 32. The sealing member 34 is joined to the upper surfaces of the flow channel member 33 and the actuator tip 32 by adhesive or welding.

[0097] A slit 70a is formed in the central part of the sealing member 34 in the Y direction. The slit 70a penetrates the sealing member 34 in the Z direction and extends in the X direction.

[0098] The slit 70a is formed in a position that overlaps with the central part (excluding the outer periphery) of the actuator tip 32 in a plan view. The Y-direction dimension of the slit 70a is smaller than the Y-direction dimension of the actuator tip 32. The X-direction dimension of the slit 70a is smaller than the X-direction dimension of the actuator tip 32.

[0099] Although not shown in the diagram, the flexible printed circuit board is pressed against the upper surface of the cover plate 50 through the slit 70a. For example, after being pulled upward, the flexible printed circuit board is connected to a control unit (not shown).

[0100] <Printer Operation Method> Next, we will explain how to record characters, figures, etc., onto the recording medium P using the printer 1 configured as described above. Initially, it is assumed that the four ink tanks 4 shown in Figure 1 are each sufficiently filled with ink of a different color. Also, the ink in the ink tanks 4 is filled into the inkjet head 5 via the ink circulation mechanism 6.

[0101] In this initial state, when the printer 1 is activated, the recording medium P is carried to the +X side while being gripped by the rollers 11 and 12 of the transport mechanisms 2 and 3. At the same time, the carriage 29 moves in the Y direction, causing the inkjet heads 5 mounted on the carriage 29 to move back and forth in the Y direction. While the inkjet heads 5 are moving back and forth, ink is ejected from each inkjet head 5 onto the recording medium P as needed. This allows for the recording of characters, images, etc., on the recording medium P.

[0102] The movement of each inkjet head 5 is described in detail below. In the circulating side-chute type inkjet head 5, ink is first circulated through the circulation channel 23 by operating the pressure pump 24 and suction pump 25 shown in Figure 2. In this case, the ink circulating in the ink supply pipe 21 is supplied to the first common liquid chamber 61 through the inlet port 71. The ink supplied to the first common liquid chamber 61 is distributed to each discharge channel 42 through the +Y side opening in each discharge channel 42, and then circulates through each discharge channel 42 to the -Y side. After that, the ink is discharged to the second common liquid chamber 62 through the -Y side opening of each discharge channel 42. The ink discharged to the second common liquid chamber 62 flows into the ink discharge pipe 22 through the outlet port 72 and is returned to the ink tank 4. This allows ink to be circulated between the inkjet head 5 and the ink tank 4.

[0103] Then, when the reciprocating movement of the inkjet head 5 begins due to the movement of the carriage 29 (see Figure 1), a drive voltage is applied between the common electrode and the individual electrodes via a flexible printed circuit board (not shown). At this time, the common electrode is set to a reference potential GND and the individual electrodes are set to a drive potential Vdd when the drive voltage is applied. As a result, a potential difference is generated in the X direction between the common electrode and the individual electrodes facing each other across the drive wall 44. Due to the potential difference generated in the X direction, an electric field is generated in the actuator plate 40 in a direction perpendicular to the polarization direction (Z direction). As a result, the actuator plate 40 undergoes thickness sliding deformation in the Z direction due to shear mode. Specifically, thickness sliding deformation occurs in the two drive walls 44 that define the ejection channel 42, and these two drive walls 44 deform so that they protrude toward the non-ejection channel 43 side. That is, since the actuator plate 40 is made up of two piezoelectric substrates that have been polarized in the thickness direction (Z direction) stacked on top of each other, when a drive voltage is applied, it bends in a V shape around the midpoint position in the Z direction of the drive wall 44. As a result, the discharge channel 42 deforms as if it were expanding.

[0104] Subsequently, when the drive voltage is reduced to zero, the actuator plate 40 returns to its original state, causing the volume in the ejection channel 42 to return to its original size. During the process of the actuator plate 40 returning to its original state, the pressure in the ejection channel 42 increases, and the ink in the ejection channel 42 is ejected to the outside through the nozzle hole 31a. The ink ejected to the outside lands on the recording medium P, and the printed information is recorded on the recording medium P.

[0105] <Effects and Effects> The actuator unit 39 of this embodiment comprises an actuator tip 32 formed with a pressure chamber 42 for applying pressure to the ink opening in the Y direction; a flow path member 33 provided on the outside of the actuator tip 32 in the Y direction and having a first common liquid chamber 61 that leads to the +Y side of the pressure chamber 42 in the Y direction and a second common liquid chamber 62 that leads to the -Y side of the pressure chamber 42; and a sealing member 34 provided between the actuator tip 32 and the flow path member 33 in the Y direction so as to close the first common liquid chamber 61 and the second common liquid chamber 62.

[0106] With this configuration, even if the alignment accuracy of the actuator chip 32 and the flow channel member 33 in the Y direction is low, the sealing member 34 can seal the gap between the actuator chip 32 and the flow channel member 33 to prevent ink leakage. Even if the design shape of the actuator chip 32 or the flow channel member 33 is changed, the sealing structure can be flexibly adapted. Since machining is not required when assembling the actuator unit 39, assembly is possible even if the actuator chip 32 and the flow channel member 33 are made of different materials, expanding the range of material selection. The required precision for manufacturing the components in the Y direction is lower, making it easier to prepare the assembly components. Therefore, it is possible to provide an actuator unit 39 that offers greater freedom in product design and reduces costs.

[0107] In this embodiment, the actuator tip 32 is formed in a shape that extends in the X direction when viewed from above. The flow channel member 33 is formed in a frame shape that surrounds the actuator tip 32 when viewed from above. The sealing member 34 is provided between the actuator tip 32 and the flow channel member 33 in the X direction. With this configuration, even if the alignment accuracy of the actuator tip 32 and the flow channel member 33 in the X direction is low, the sealing member 34 can seal the gap between the actuator tip and the flow channel member 33 so that ink does not leak out.

[0108] The sealing member 34 in this embodiment is flexible in at least a portion of it. With this configuration, even if the alignment accuracy of the actuator chip 32 and the flow path member 33 in the height direction (directions intersecting the Y direction and the second direction) is low, the sealing member 34 can seal the gap between the actuator chip 32 and the flow path member 33 so that ink does not leak out.

[0109] In this embodiment, the flow channel member 33 is formed to be larger than the actuator tip 32 in the Z direction when viewed from the side. With this configuration, the cross-sectional area of ​​the first common liquid chamber 61 and the second common liquid chamber 62 can be made larger compared to the case where the flow channel member 33 is formed to be smaller than or equal to the actuator tip 32. As a result, the pressure in the common liquid chambers 61 and 62 can be kept uniform, the pressure difference between the pressure chambers 42 can be reduced, and variations in ink ejection can be suppressed. Furthermore, since the amount of ink supplied from the common liquid chambers 61 and 62 to the pressure chamber 42 is stable, stable ejection is possible even when the amount of ink to be ejected increases.

[0110] The head chip 30 of this embodiment comprises the actuator unit 39 described above and a nozzle plate 31 having nozzle holes 31a for ejecting ink. This configuration provides a head chip 30 that offers greater freedom in product design.

[0111] In this embodiment, the sealing member 34 is joined to the actuator tip 32 by adhesive or welding.

[0112] The inkjet head 5 of this embodiment includes the actuator unit 39 described above. This configuration provides a liquid ejection head that offers greater flexibility in product design.

[0113] The printer 1 of this embodiment includes the inkjet head 5 described above. This configuration provides a printer 1 that offers greater flexibility in product design.

[0114] Incidentally, in the liquid chamber unit and actuator unit that constitute an inkjet head, it has been disclosed that the upper surface of the piezoelectric element bonded to the substrate and the upper surface of the component are simultaneously planarized using a machine tool (Patent Document 1: Japanese Patent Application Publication No. 8-108540). However, a processing step equivalent to planarization or planarization is required during the assembly of the components. As a result, this can lead to increased lead time and reduced yield due to processing errors. Furthermore, since the above processing step requires high precision, it is necessary to use components with similar thermal expansion coefficients, processability, and strength. As a result, the selection of materials used for the components is limited, leading to increased costs.

[0115] In contrast, in the present embodiment described above, the head tip 30 can be assembled according to the following steps 1 to 3. First, the actuator tip 32 is attached to the +Z side of the nozzle plate 31 with adhesive (step 1). Next, the flow path member 33 is attached to the outside of the actuator tip 32 on the +Z side of the nozzle plate 31 to which the actuator tip 32 is joined, using adhesive (step 2). Next, a flexible sealing member 34 is attached to the actuator tip 32 and the flow path member 33 joined to the nozzle plate 31 with adhesive (step 3). As a result, the gap between the actuator tip 32 and the flow path member 33 is filled by the sealing member 34, thereby sealing it. Furthermore, because the flexibility of the film constituting the sealing member 34 allows it to be attached along each member, the gap between the actuator tip 32 and the flow path member 33 can be sealed even if there are dimensional errors or irregularities. Note that the size of the flow path member 33 and the actuator tip 32 may change depending on design changes to the flow rate and discharge performance, but the same method as described above can be used.

[0116] <Modifications> The technical scope of the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the invention. Figure 6 is a cross-sectional view of the head chip 30A corresponding to the YZ plane according to the first modification of the first embodiment. In this modification, the same reference numerals are used for components similar to those in the embodiments described above, and detailed descriptions are omitted. In the first embodiment described above, the sealing member 34 was described as extending from the +Z plane of the outer wall portion 66 of the flow channel member 33, the +Z plane of the inner wall portion 67, and the inclined surface 67a to the +Z plane of the outer circumference of the cover plate 50 of the actuator chip 32, but it is not limited to this. For example, as shown in Figure 6, the sealing member 34A may seal only the minimum gap.

[0117] In the example shown in the figure, the sealing member 34A extends from a portion of the inclined surface 67a of the inner wall portion 67 of the flow channel member 33 (the portion on the -Z end side) to the +Z plane of the outer circumference portion (the portion on the outer end side in the Y direction) of the cover plate 50 of the actuator tip 32. The sealing member 34A is not provided on the outer wall portion 66 of the flow channel member 33.

[0118] According to the configuration of the head tip 30A in the first modified example, the area sealed by the sealing member 34A is limited, thus reducing the cost of the sealing material.

[0119] Figure 7 is a cross-sectional view of the head chip 30B corresponding to the YZ plane in a second modified example of the first embodiment. In this modified example, the same reference numerals are used for components similar to those in the above-described embodiment, and detailed descriptions are omitted. In the first embodiment described above, an example was given in which the sealing member 34 is formed of a film, but it is not limited to this. For example, as shown in Figure 7, the sealing member 34B may be formed of an adhesive. Examples of adhesives include epoxy, silicone, acrylic, urethane, and fluorine-based adhesives. The type of adhesive is not limited to those described above and can be changed according to the design specifications.

[0120] In the example shown in the figure, the sealing member 34B extends from the +Z plane of the outer wall portion 66 of the flow channel member 33, the +Z plane of the inner wall portion 67, and the inclined surface 67a to the +Z plane of the outer circumference of the cover plate 50 of the actuator tip 32. A portion of the sealing member 34B is interposed in the gap between the cover plate 50 of the actuator tip 32 and the inner wall portion 67 of the flow channel member 33. For example, when forming the sealing member 34B, an amount of adhesive sufficient to seal the above gap may be applied and poured in.

[0121] According to the configuration of the head chip 30B in the second modified example, when an adhesive is used for the sealing member 34B, the adhesive also flows into the gap between the actuator chip 32 and the flow channel member 33, thereby enhancing the sealing effect.

[0122] Figure 8 is a cross-sectional view of the head tip 30C corresponding to the YZ plane according to a third modified example of the first embodiment. In this modified example, the same reference numerals are used for components similar to those in the above-described embodiment, and detailed descriptions are omitted. For example, as shown in Figure 8, the sealing member 34C may be made of a rubber material. Examples of rubber materials include chloroprene rubber, nitrile rubber, ethylene propylene rubber, acrylic rubber, fluororubber, urethane rubber, and silicone rubber. The form of the rubber material is not limited to those listed above and can be changed according to the design specifications.

[0123] The thickness of the sealing member 34C (rubber material) is set to a range of, for example, 0.02 mm or more and 0.2 mm or less. In the example shown in the figure, the thickness of the sealing member 34C is approximately 0.05 mm. The thickness of the sealing member 34C can be changed according to the design specifications, as long as flexibility during sealing is maintained.

[0124] The sealing member 34C is bonded to the actuator tip 32 and the flow channel member 33 by an adhesive. Examples of adhesives include epoxy, silicone, acrylic, urethane, and fluorine-based adhesives. The type of adhesive is not limited to those mentioned above and can be changed according to the design specifications. A portion of the sealing member 34C may be interposed in the gap between the actuator tip 32 and the flow channel member 33.

[0125] According to the configuration of the head tip 30C in the first modified example, when a rubber material is used for the sealing member 34C, the sealing structure can be maintained even if high pressure is generated inside the head tip 30C because the elasticity of the material is higher than that of a film. Furthermore, even if the member warps due to thermal expansion caused by temperature changes, the elasticity of the rubber material can mitigate the effects.

[0126] Figure 9 is a cross-sectional view of the head tip 30D corresponding to the YZ plane according to the fourth modified example of the first embodiment. In this modified example, the same reference numerals are used for components similar to those in the above-described embodiment, and detailed descriptions are omitted. For example, as shown in Figure 9, the sealing member 34D may be formed in a wedge shape in a YZ cross-sectional view. The sealing member 34D may only seal the minimum gap.

[0127] In the example shown in the figure, the sealing member 34D has a wedge-shaped outer slope that abuts against the lower end (-Z end) of the inclined surface 67a of the inner wall portion 67 of the flow channel member 33, and a wedge-shaped inner slope that abuts against the outer peripheral end (Y-direction outer end) of the cover plate 50 of the actuator tip 32.

[0128] According to the configuration of the head tip 30D in the fourth modified example, the area sealed by the sealing member 34D is limited, thus reducing the cost of the sealing material.

[0129] <Second Embodiment> Figure 10 is a plan view of the head chip 230 according to the second embodiment. In the second embodiment, components similar to those in the above-described embodiment are denoted by the same reference numerals, and detailed descriptions are omitted. In the first embodiment described above, an example was given in which the actuator chip 32 is spaced apart from the flow channel member 33, but this is not limited to this. For example, as shown in Figure 10, the actuator chip 32 may be in contact with the flow channel member 33. Note that the sealing member 34 is not shown in Figure 10.

[0130] The flow path member 33 includes a first wall portion 81 that forms a first common liquid chamber 61 and a second wall portion 82 that forms a second common liquid chamber 62. The actuator tip 32 is in contact with either the first wall portion 81 or the second wall portion 82. The actuator tip 32 is also in contact with either the third wall portion 83 or the fourth wall portion 84.

[0131] In the example shown in the figure, the actuator tip 32 is positioned off-center to the +Y and -X sides in a plan view. The actuator tip 32 is in contact with the first wall portion 81 and the fourth wall portion 84, respectively, and spaced apart from the second wall portion 82 and the third wall portion 83, respectively. The +X side end face of the actuator tip 32 is spaced apart from the inner surface of the flow channel member 33 that faces the -X side. The -X side end face of the actuator tip 32 is in contact with the inner surface of the flow channel member 33 that faces the +X side. The +Y side end face of the actuator tip 32 is in contact with the inner surface of the flow channel member 33 that faces the -Y side. The -Y side end face of the actuator tip 32 is spaced apart from the inner surface of the flow channel member 33 that faces the +Y side.

[0132] The flow path member 33 of this embodiment includes a first wall portion 81 that forms a first common liquid chamber 61 and a second wall portion 82 that forms a second common liquid chamber 62. The actuator tip 32 is in contact with either the first wall portion 81 or the second wall portion 82. With this configuration, the position of the flow path member 33 can be fixed by contact with the actuator tip 32, thereby reducing the burden of assembling the actuator unit 39.

[0133] <Third Embodiment> Figure 11 is a cross-sectional view of the head chip 330 according to the third embodiment, corresponding to the YZ plane. Figure 12 is a cross-sectional view of the head chip 330 according to the third embodiment, corresponding to the XZ plane. In the third embodiment, components similar to those in the above-described embodiments are denoted by the same reference numerals, and detailed descriptions are omitted. In the first embodiment described above, an example was given in which the flow channel member 33 is formed to be larger than the actuator chip 32 in the Z direction, but the embodiment is not limited to this. For example, as shown in Figures 11 and 12, the flow channel member 333 may be formed to be the same size as the actuator chip 32 in the Z direction.

[0134] As shown in Figure 11, in the head tip 330 of this embodiment, the height Z2 from the +Z plane of the nozzle plate 31 to the +Z plane of the flow path member 333 in the Z direction may be the same as the height Z1 from the +Z plane of the nozzle plate 31 to the +Z plane of the actuator tip 32 (Z2 = Z1).

[0135] According to the configuration of the head chip 330 in this embodiment, it becomes easier to seal the gap between the actuator chip 32 and the flow channel member 333 with the sealing member 34, compared to the case where the flow channel member is formed to a different size from the actuator chip.

[0136] <Fourth Embodiment> Figure 13 is a cross-sectional view of the head chip 430 according to the fourth embodiment, corresponding to the YZ plane. Figure 14 is a cross-sectional view of the head chip 430 according to the fourth embodiment, corresponding to the XZ plane. In the fourth embodiment, components similar to those in the embodiments described above are denoted by the same reference numerals, and detailed descriptions are omitted. In the first embodiment described above, an example was given in which the actuator chip 32 is not covered by the flow channel member 33 when viewed from the Z direction, but the invention is not limited to this. For example, as shown in Figures 13 and 14, the flow channel member 433 may include, in a plan view, a first roof portion 433a extending from the portion forming the first common liquid chamber 61 and covering the actuator chip 32, and a second roof portion 433b extending from the portion forming the second common liquid chamber 62 and covering the actuator chip 32.

[0137] The first roof portion 433a is provided in the flow channel member 433 on the portion of the inner wall portion 67 (the side forming the first common liquid chamber) that has an inclined surface 67a and faces the -Y side. The -Z plane of the first roof portion 433a is formed to be aligned with the XY plane. The -Z plane of the first roof portion 433a may be spaced apart from the +Z plane of the portion of the actuator tip 32 that is on the +Y end side.

[0138] The second roof portion 433b is provided in the flow channel member 433 on the portion of the inner wall portion 67 (the side forming the second common liquid chamber) that has an inclined surface 67a and faces the +Y side. The -Z plane of the second roof portion 433b is formed to be aligned with the XY plane. The -Z plane of the second roof portion 433b may be spaced apart from the +Z plane of the -Y end portion of the actuator tip 32.

[0139] The sealing member 34 extends from the +Z plane of the outer wall portion 66 of the flow channel member 433, the +Z plane of the inner wall portion 67, and the inclined surface 67a (the inclined surfaces of each roof portion 433a, 433b) to the +Z plane of the outer peripheral portion of the cover plate 50 of the actuator tip 32 (the portion in the Y direction inward from the outer peripheral end).

[0140] The flow path member 433 of this embodiment comprises, in a plan view, a first roof portion 433a extending from the portion forming the first common liquid chamber 61 and covering the actuator tip 32, and a second roof portion 433b extending from the portion forming the second common liquid chamber 62 and covering the actuator tip 32. With this configuration, since the actuator tip 32 is covered by the first roof portion 433a and the second roof portion 433b, it becomes easy to seal the gap between the actuator tip 32 and the flow path member 33 with the sealing member 34. For example, if an adhesive or rubber material is used as the sealing member 34, the gap between the actuator tip 32 and each roof portion 433a, 433b can also be sealed, thus enhancing the sealing effect.

[0141] <First Modification of the Fourth Embodiment> Figure 15 is a cross-sectional view of the head chip 430A corresponding to the YZ plane according to the first modification of the fourth embodiment. In this modification, the same reference numerals are used for components similar to those in the above-described embodiment, and detailed explanations are omitted. In the above-described fourth embodiment, the sealing member 34 (film) was described as extending from the +Z plane of the outer wall portion 66 of the flow channel member 433, the +Z plane of the inner wall portion 67, and the inclined surface 67a (the inclined surfaces of each roof portion 433a, 433b) to the +Z plane of the outer peripheral portion of the cover plate 50 of the actuator chip 32 (the portion in the Y direction inward from the outer peripheral end), but is not limited to this. For example, as shown in Figure 15, the sealing member 434A may fill the space between the upper part of the actuator chip 32 and the flow channel member 433. The sealing member 434A may be formed of, for example, an adhesive or a rubber material.

[0142] In this modified example, the sealing member 434A is provided between the -Z plane of each roof portion 433a, 433b of the flow channel member 433 and the +Z plane of the portion of the actuator tip 32 that is on the outer end side in the Y direction. The sealing member 434A may only seal the minimum gap area.

[0143] According to the configuration of the head chip 430A in the first modified example of the fourth embodiment, the area to be sealed by the sealing member 434A is limited, thus reducing the cost of the sealing material.

[0144] <Fifth Embodiment> Figure 16 is a cross-sectional view of the head tip 530 according to the fifth embodiment, corresponding to the YZ plane. In the fifth embodiment, the same reference numerals are used for components similar to those in the embodiments described above, and detailed descriptions are omitted. In the first embodiment described above, the nozzle plate 31 was described as being joined to the lower surface of the flow path member 33 via an adhesive or the like, but the invention is not limited to this. For example, as shown in Figure 16, the flow path member 533 may be integrally formed from the same material as the nozzle plate 531. The flow path member 533 may be joined to the +Z plane (first surface) of the nozzle plate 531 and may also be formed from the same material as the nozzle plate 531. The flow path member 533 may be integrally formed with the nozzle plate 531.

[0145] For example, the flow channel member 533 is formed integrally with the nozzle plate 531 using the same metal material (such as SUS or Ni-Pd). The material used to form the flow channel member 533 integrally with the nozzle plate 531 may be a single-layer or laminated structure made of a resin material (such as PI, PE, PET, PP, PPS, PC, PEEK, etc.), glass, or silicon, in addition to a metal material. The manner in which the flow channel member 533 is formed integrally with the nozzle plate 531 can be changed according to the design specifications.

[0146] In this embodiment, the flow channel member 533 is joined to the +Z plane of the nozzle plate 531 and is formed from the same material as the nozzle plate 531. For example, if the flow channel member and the nozzle plate are made of different materials, there is a high possibility that they will warp due to differences in expansion rates when the temperature changes. In contrast, with this configuration, warping when the temperature changes occurs can be suppressed, thus reducing the burden of assembling the head tip 530.

[0147] In this embodiment, the flow path member 533 is formed integrally with the nozzle plate 531. This configuration eliminates the need to bond the flow path member 533 to the nozzle plate 531, thus reducing the assembly burden of the head tip 530. Furthermore, since the flow path member 533 does not need to be formed separately from the nozzle plate 531, cost reduction is possible. This also contributes to improved durability by eliminating the use of adhesives.

[0148] <Sixth Embodiment> Figure 17 is a plan view of the head tip 630 according to the sixth embodiment. Figure 18 is a cross-sectional view of the head tip 630 corresponding to the line XVIII-XVIII in Figure 17. In the sixth embodiment, components similar to those in the embodiments described above are denoted by the same reference numerals, and detailed descriptions are omitted. In the first embodiment described above, the example was given in which the plurality of nozzle holes 31a are spaced apart in the X direction (one row of nozzles is provided), but the invention is not limited to this. For example, as shown in Figures 17 and 18, the nozzle rows 631A and 631B may be provided in multiple rows spaced apart in the Y direction.

[0149] Multiple nozzle holes 31a are arranged along the +Z plane of the nozzle plate 631 and in the X direction. When the multiple nozzle holes 31a are designated as nozzle rows 631A and 631B, multiple nozzle rows 631A and 631B are provided with spacing in the Y direction. Multiple actuator tips 632A and 632B are provided with spacing in the Y direction so that their pressure chambers 642A and 642B lead to their respective nozzle holes 31a.

[0150] The multiple actuator chips 632A and 632B include a first actuator chip 632A in which a first pressure chamber 642A is formed, and a second actuator chip 632B positioned adjacent to the first actuator chip 632A in the Y direction and in which a second pressure chamber 642B is formed. In the Y direction, the first pressure chamber 642A side and the second pressure chamber 642B side are connected to each other. The nozzle hole 31a on the first pressure chamber 642A side may be positioned offset in the X direction relative to the nozzle hole 31a on the second pressure chamber 642B side.

[0151] The flow channel member 633 is formed to be larger than each of the first actuator tip 632A and the second actuator tip 632B in the Z direction. The flow channel member 633 includes a partition wall portion 685 between the first actuator tip 632A and the second actuator tip 632B in the Y direction. The sealing member 634 extends in the Y direction so as to span the first actuator tip 632A, the partition wall portion 685 and the second actuator tip 632B.

[0152] In this embodiment, the nozzle holes 31a are arranged in multiple rows along the +Z plane of the nozzle plate 631 and in the X direction. When the multiple nozzle holes 31a are designated as nozzle rows 631A and 631B, the nozzle rows 631A and 631B are arranged in multiple rows with spacing in the Y direction. The actuator tips 632A and 632B are arranged in multiple rows with spacing in the Y direction so that the pressure chambers 642A and 642B lead to their respective nozzle holes 31a. With this configuration, since the nozzle rows 631A and 631B are arranged in multiple rows in the Y direction, it contributes to improving resolution.

[0153] <First Modification of the Sixth Embodiment> Figure 19 is a cross-sectional view of the head tip 630A corresponding to the YZ plane according to the first modification of the sixth embodiment. In this modification, the same reference numerals are used for components similar to those in the above-described embodiment, and detailed explanations are omitted. In the sixth embodiment described above, an example was given in which the first pressure chamber 642A side and the second pressure chamber 642B side are connected to each other in the Y direction, but the invention is not limited to this. For example, as shown in Figure 19, the flow path member 633 may include a partition wall portion 686 that separates the first pressure chamber 642A side and the second pressure chamber 642B side in the Y direction.

[0154] The partition wall 686 is provided to separate the lower region of the partition wall 685 (the passage between the first pressure chamber 642A and the second pressure chamber 642B) in the Y direction. The partition wall 686 extends in a straight line along the Z direction in a YZ cross-sectional view. The partition wall 686 extends from the center of the +Z plane of the nozzle plate 631 in the Y direction to the height of the -Z plane of the center of the Y direction of the partition wall 685.

[0155] The plurality of actuator chips 632A, 632B according to the first modified example of the sixth embodiment include a first actuator chip 632A in which a first pressure chamber 642A is formed, and a second actuator chip 632B positioned adjacent to the first actuator chip 632A in the Y direction and in which a second pressure chamber 642B is formed. The flow path member 633 includes a partition wall portion 686 that separates the first pressure chamber 642A side from the second pressure chamber 642B side in the Y direction. With this configuration, the partition wall portion 686 separates the first pressure chamber 642A side from the second pressure chamber 642B side, thereby suppressing so-called crosstalk, in which pressure fluctuations in the first pressure chamber 642A are propagated to the second pressure chamber 642B.

[0156] <Seventh Embodiment> Figure 20 is a plan view of the head tip 730 according to the seventh embodiment. In the seventh embodiment, components similar to those in the embodiments described above are denoted by the same reference numerals, and detailed descriptions are omitted. In the first embodiment described above, the flow path member 33 was described as comprising a third wall portion 83 extending in the Y direction to connect the +X side ends of the first wall portion 81 and the second wall portion 82, and a fourth wall portion 84 extending in the Y direction to connect the -X side ends of the first wall portion 81 and the second wall portion 82, but is not limited to this. For example, as shown in Figure 20, the flow path member 733 may be configured by removing the third wall portion 83 and the fourth wall portion 84 (see Figure 3) from the first wall portion 81 and the second wall portion 82.

[0157] The flow channel member 733 has recesses 791 and 792 formed therein that open outward from the outer edge of the actuator chip 32 when viewed from the Z direction. The recesses 791 and 792 are formed in a rectangular shape that is elongated in the Y direction when viewed from the Z direction. When viewed from the Z direction, the inner surfaces of the recesses 791 and 792 in the Y direction extend in the X direction so as to connect with the inner surface of the chip housing 63 in the Y direction. The bottom surface (+Z plane) of the recesses 791 and 792 is lower in the Z direction than the upper surfaces (+Z plane) of the first wall portion 81 and the second wall portion 82, respectively. The sealing member 734 (film) covers the recesses 791 and 792 when viewed from the Z direction. When viewed from the Z direction, the sealing member 734 is provided so as to overlap the outer periphery of the actuator chip 32 and the flow channel member 733 in which the recesses 791 and 792 are formed. In Figure 20, the sealing member 734 is shown by a dashed line.

[0158] The actuator tip 32 is formed in a shape that follows the +Z plane of the nozzle plate 31 and extends in the X direction. Multiple recesses 791 and 792 are formed so as to communicate outward from both ends of the actuator tip 32 in the X direction. The sealing member 734 extends across both ends of the actuator tip 32 and the recesses 791 and 792 in the X direction.

[0159] The plurality of recesses 791, 792 include a first recess 791 that extends outward from one end of the actuator tip 32 in the X direction and a second recess 792 that extends outward from the other end of the actuator tip 32 in the X direction. The sealing member 734 extends across both ends of the actuator tip 32 and across the first recess 791 and the second recess 792 in the X direction.

[0160] In this embodiment, the flow channel member 733 has recesses 791 and 792 formed therein that open outward from the outer edge of the actuator tip 32 when viewed from the Z direction. The sealing member 734 covers the recesses 791 and 792 when viewed from the Z direction. With this configuration, when the sealing member 734 seals the gap between the actuator tip 32 and the flow channel member 733, the air around the actuator tip 32 can escape outward through the recesses 791 and 792, thereby contributing to improved sealing performance and durability.

[0161] In this embodiment, the actuator tip 32 is formed in a shape that extends along the +Z plane of the nozzle plate 31 and in the X direction. Multiple recesses 791 and 792 are formed so as to communicate outward from both ends of the actuator tip 32 in the X direction. The sealing member 734 extends across both ends of the actuator tip 32 and the recesses 791 and 792 in the X direction. With this configuration, when sealing the gap between the actuator tip 32 and the flow path member 733 with the sealing member 734, air can be released outward from both ends of the actuator tip 32 along the X direction through the recesses 791 and 792, making it possible to seal more smoothly.

[0162] <Eighth Embodiment> Figure 21 is a plan view of the head chip 830 according to the eighth embodiment. In the eighth embodiment, the same reference numerals are used for components similar to those in the embodiments described above, and detailed descriptions are omitted. In the seventh embodiment described above, the recesses 791 and 792 were described as being formed in a rectangular shape that is long in the Y direction when viewed from the Z direction, but the invention is not limited to this. For example, as shown in Figure 21, the recesses 891 and 892 may be formed in a shape that is inclined with respect to the X direction when viewed from the Z direction.

[0163] The sealing member 834 (film) covers the recesses 891 and 892 when viewed from the Z direction. The sealing member 834 is provided so as to overlap the outer periphery of the actuator tip 32 and the flow channel member 833 in which the recesses 891 and 892 are formed, when viewed from the Z direction. In Figure 21, the sealing member 834 is shown by a dashed line.

[0164] The actuator tip 32 is formed in a shape that extends along the +Z plane of the nozzle plate 831 and in the X direction. The plurality of recesses 891, 892 include a first recess 891 that extends outward from one end of the actuator tip 32 in the X direction and a second recess 892 that extends outward from the other end of the actuator tip 32 in the X direction. At least one of the first recess 891 and the second recess 892 has inclined edges 891a, 892a that extend inward in the Y direction when viewed from the Z direction.

[0165] In the example shown in Figure 21, the first recess 891 and the second recess 892 each have inclined edges 891a and 892a that extend inward in the Y direction when viewed from the Z direction. The inclined edge 891a of the first recess 891 extends inward from the +X end of the Y-direction inner surface (+Y-side inner surface) of the chip housing 63, inclined toward the +X and -Y sides when viewed from the Z direction. The inclined edge 892a of the second recess 892 extends inward from the -X end of the Y-direction inner surface (-Y-side inner surface) of the chip housing 63, inclined toward the -X and +Y sides when viewed from the Z direction. Note that either the first recess 891 or the second recess 892 may have inclined edges 891a and 892a that extend inward in the Y direction when viewed from the Z direction. The installation configuration of the inclined edges 891a and 892a can be changed according to the design specifications.

[0166] The flow path member 833 has a first common liquid chamber 61 that leads to the +Y side of the discharge channel 42 and a second common liquid chamber 62 that leads to the -Y side of the discharge channel 42. The flow path member 833 is provided with an inlet port 71 for supplying liquid to the first common liquid chamber 61 and an outlet port 72 for discharging liquid from the second common liquid chamber 62. At least one of the inlet port 71 and the outlet port 72 is positioned adjacent to the inclined edges 891a and 892a when viewed from the Z direction.

[0167] In the example shown in Figure 21, the inlet port 71 and the outlet port 72 are positioned adjacent to the inclined edges 891a and 892a when viewed from the Z direction. The inlet port 71 is positioned adjacent to the -X side of the inclined edge 891a of the first recess 891 (the part closer to the +X end of the chip housing 63) when viewed from the Z direction. The outlet port 72 is positioned adjacent to the +X side of the inclined edge 892a of the second recess 892 (the part closer to the -X end of the chip housing 63) when viewed from the Z direction. Note that either the inlet port 71 or the outlet port 72 (one side) may be positioned adjacent to the inclined edges 891a and 892a when viewed from the Z direction. The arrangement of the inlet port 71 and the outlet port 72 with respect to the inclined edges 891a and 892a can be changed according to the design specifications.

[0168] At least one of the first recess 891 and the second recess 892 has outward-sloping edges 891b, 892b that extend inclined outward in the Y direction when viewed from the Z direction. In the example of Figure 21, each of the first recess 891 and the second recess 892 has outward-sloping edges 891b, 892b that extend inclined outward in the Y direction when viewed from the Z direction. The outward-sloping edge 891b of the first recess 891 extends inclined from the +X end of the Y-direction inner surface (-Y side inner surface) of the chip housing 63 toward the +X side and toward the -Y side when viewed from the Z direction. The outward-sloping edge 891b of the first recess 891 extends substantially parallel to the inward-sloping edge 891a of the first recess 891 when viewed from the Z direction. The outer inclined edge 892b of the second recess 892 extends from the -X end of the inner surface (+Y side inner surface) of the chip housing 63 in the Y direction, inclined toward both the -X and +Y sides, as viewed from the Z direction. The outer inclined edge 892b of the second recess 892 extends substantially parallel to the inner inclined edge 892a of the second recess 892, as viewed from the Z direction. Either the first recess 891 or the second recess 892 (one side) may have outer inclined edges 891b, 892b that extend inclined toward the outside in the Y direction, as viewed from the Z direction. The installation configuration of the outer inclined edges 891b, 892b can be changed according to the design specifications.

[0169] The flow channel member 833 has notches 895 formed on the outside of the outward-sloping edges 891b and 892b when viewed from the Z direction. In the example of Figure 21, the notches 895 are formed on the outside (+X side and -Y side) of the outward-sloping edge 891b of the first recess 891 and on the outside (-X side and +Y side) of the outward-sloping edge 892b of the second recess 892, when viewed from the Z direction. When viewed from the Z direction, the length of the outward-sloping edge 891b of the first recess 891 is shorter than the length of the inward-sloping edge 891a of the first recess 891. When viewed from the Z direction, the length of the outward-sloping edge 892b of the second recess 892 is shorter than the length of the inward-sloping edge 892a of the second recess 892. The notch 895 may be formed on either the outside of the outward-sloping edge 891b of the first recess 891 or the outside of the outward-sloping edge 892b of the second recess 892, when viewed from the Z direction. The manner in which the notch 895 is formed on the outside of the outward-sloping edges 891b and 892b can be changed according to the design specifications.

[0170] The plurality of recesses 891 and 892 in this embodiment include a first recess 891 that extends outward from one end of the actuator tip 32 in the X direction and a second recess 892 that extends outward from the other end of the actuator tip 32 in the X direction. Each of the first recess 891 and the second recess 892 has an inclined edge portion 891a, 892a that extends inward in the Y direction when viewed from the Z direction. With this configuration, the dimensions in the Y direction (or X direction) of the flow channel member 833 can be reduced compared to the case where each of the first recess 891 and the second recess 892 extends in the X direction when viewed from the Z direction (as shown in Figure 20) or the case where they extend inclined outward on both sides in the Y direction (the opposite direction to the case shown in Figure 21, i.e., each inclined edge portion of each recess extends inclined outward on both sides in the Y direction), making it easier to miniaturize the head tip 830. The miniaturized head chip 830 allows for a smaller inkjet head, making it easier to handle, for example, when multiple inkjet heads are lined up in a printer.

[0171] The flow path member 833 of this embodiment has a first common liquid chamber 61 that leads to the +Y side of the discharge channel 42 and a second common liquid chamber 62 that leads to the -Y side of the discharge channel 42. The flow path member 833 is provided with an inlet port 71 for supplying liquid to the first common liquid chamber 61 and an outlet port 72 for discharging liquid from the second common liquid chamber 62. The inlet port 71 and the outlet port 72 are positioned adjacent to the inclined edges 891a and 892a when viewed from the Z direction. With this configuration, compared to the case where the first recess 891 and the second recess 892 each extend inclined outwards in the Y direction when viewed from the Z direction, the inlet port 71 and the outlet port 72 can each be positioned inward in the Y direction, making it easier to miniaturize the head tip 830.

[0172] In this embodiment, the first recess 891 and the second recess 892 each have outward-sloping edges 891b and 892b that extend outward in the Y direction when viewed from the Z direction. The flow channel member 833 has a notch 895 formed on the outside of the outward-sloping edges 891b and 892b when viewed from the Z direction. This configuration allows for a reduction in the material used to form the flow channel member 833 in the notch 895, thus contributing to cost reduction and weight reduction.

[0173] (Other Modifications) The scope of the present disclosure is not limited to the embodiments described above, and various modifications can be made without departing from the spirit of the disclosure. For example, in the embodiments described above, an inkjet printer was used as an example of a liquid jet recording device, but it is not limited to a printer. For example, the liquid jet recording device may be a fax machine or an on-demand printer. In the embodiments described above, a configuration in which the inkjet head moves relative to the recording medium during printing (a so-called shuttle machine) was used as an example, but it is not limited to this configuration. The configuration according to the present disclosure may be adopted in a configuration in which the recording medium is moved relative to the inkjet head while the inkjet head is fixed (a so-called fixed-head machine). In the embodiments described above, the case in which the recording medium is paper was described, but it is not limited to this configuration. The recording medium is not limited to paper, but may be a metal material, a resin material, or even food. In the embodiments described above, a configuration in which the liquid jet head is mounted on the liquid jet recording device was described, but it is not limited to this configuration. In other words, the liquid sprayed from the liquid spray head is not limited to liquids that are to be sprayed onto a recording medium, but may also be, for example, a drug solution to be mixed in a compounding agent, a food additive such as a seasoning or flavoring to be added to food, or a fragrance to be sprayed into the air. In the embodiment described above, a configuration in which the Z direction coincides with the direction of gravity was described, but the embodiment is not limited to this configuration. For example, the Z direction may be aligned with the horizontal direction.

[0174] In the embodiment described above, a discharge channel that serves as a pressure chamber is formed in the actuator plate itself, and the direction of the pressure applied to the ink and the direction of ink discharge intersect, a so-called wall-vent type actuator tip was used as an example. However, the configuration is not limited to this. A roof-chute type actuator tip (where the direction of the pressure applied to the ink and the direction of ink discharge are the same) may also be used.

[0175] The embodiments described above describe a side-chute actuator chip, but are not limited to this. For example, the above embodiments may be appropriately applied to a so-called edge-chute type actuator chip that ejects ink from the extending end of the ejection channel.

[0176] Furthermore, without departing from the spirit of the present invention, the components in the embodiments described above may be replaced with well-known components as appropriate, and the modifications described above may be combined as appropriate.

[0177] While preferred embodiments and variations of the Disclosure have been described and explained above, it should be understood that these are illustrative examples of the Disclosure and should not be considered as limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the scope of the Disclosure. Therefore, the Disclosure should not be considered limited by the foregoing description, but rather limited by the claims.

[0178] 1… Printer (liquid ejection recording device) 5… Inkjet head (liquid ejection head) 30, 30A-30D, 230, 330, 430, 430A, 530, 630, 630A, 730, 830… Head chip 31, 531, 631, 831… Nozzle plate 31a… Nozzle hole 32… Actuator chip 33, 333, 433, 533, 633, 733, 833… Flow channel member 34, 34A-34D, 434A, 634, 734, 834… Sealing member 39… Actuator unit 42… Discharge channel (pressure chamber) 61… First common liquid chamber 62… Second common liquid chamber 71… Inlet port 72… Outlet port 81… First wall 82… Second wall 433a… First roof section 433b... Second roof sections 631A, 631B... Nozzle row 632A... First actuator tip (actuator tip) 632B... Second actuator tip (actuator tip) 642A... First pressure chamber 642B... Second pressure chamber 686... Partition wall section 791, 891... First recess (recess) 792, 892... Second recess (recess) 891a, 892a... Inner inclined edge section 891b, 892b... Outer inclined edge section 895... Notch

Claims

1. An actuator unit comprising: an actuator tip formed with a pressure chamber for applying pressure to a liquid opening in a first direction; a flow channel member provided on the outside of the actuator tip in the first direction and having a first common liquid chamber that leads to the first side of the pressure chamber in the first direction and a second common liquid chamber that leads to the second side of the pressure chamber opposite to the first side in the first direction; and a sealing member provided between the actuator tip and the flow channel member in the first direction so as to close the first common liquid chamber and the second common liquid chamber.

2. The actuator unit according to claim 1, wherein the actuator tip is formed in a shape that extends in a second direction intersecting the first direction in a plan view, the flow channel member is formed in a frame shape that surrounds the actuator tip in a plan view, and the sealing member is provided between the actuator tip and the flow channel member in the second direction.

3. The actuator unit according to claim 1 or 2, wherein the sealing member is flexible in at least a portion of it.

4. The actuator unit according to claim 1 or 2, wherein the flow path member comprises a first wall portion forming the first common liquid chamber and a second wall portion forming the second common liquid chamber, and the actuator tip is in contact with either the first wall portion or the second wall portion.

5. The actuator unit according to claim 1 or 2, wherein the flow channel member is formed to be larger than the actuator tip in a direction intersecting the first direction in a side view.

6. The actuator unit according to claim 1 or 2, wherein the flow channel member is formed to be the same size as the actuator tip in a direction intersecting the first direction in a side view.

7. The actuator unit according to claim 1 or 2, wherein the flow channel member comprises, in a plan view, a first roof portion extending from the portion forming the first common liquid chamber and covering the actuator tip, and a second roof portion extending from the portion forming the second common liquid chamber and covering the actuator tip.

8. A head tip comprising the actuator unit according to claim 1 or 2, and a nozzle plate having nozzle holes for spraying liquid.

9. The head tip according to claim 8, wherein the flow path member is joined to the first surface of the nozzle plate and is formed of the same material as the nozzle plate.

10. The head tip according to claim 9, wherein the flow channel member is formed integrally with the nozzle plate.

11. The head tip according to claim 8, wherein the nozzle holes are arranged in a plurality in a second direction that is along the first surface of the nozzle plate and intersects the first direction, and when the plurality of nozzle holes form a nozzle row, the nozzle row is provided in a plurality of rows spaced apart in the first direction, and the actuator tips are provided in a plurality at intervals in the first direction such that the pressure chambers lead to each of the nozzle holes.

12. The actuator unit according to claim 1 or 2, comprising a plurality of actuator tips, including a first actuator tip having a first pressure chamber formed therein, and a second actuator tip positioned adjacent to the first actuator tip in the first direction and having a second pressure chamber formed therein, wherein the flow path member includes a partition wall portion that separates the first pressure chamber side from the second pressure chamber side in the first direction.

13. The actuator unit according to claim 1 or 2, wherein the flow channel member has a recess formed therein that opens outward from the outer edge of the actuator tip in a plan view, and the sealing member covers the recess in a plan view.

14. The actuator unit according to claim 13, wherein the actuator tip is formed in a shape that extends in a second direction intersecting the first direction in a plan view, the recesses are formed in a plurality so as to communicate outward from both ends of the actuator tip in the second direction, and the sealing member extends so as to straddle both ends of the actuator tip and the recesses in the second direction.

15. The actuator unit according to claim 14, wherein the plurality of recesses include a first recess extending outward from one end of the actuator tip in the second direction, and a second recess extending outward from the other end of the actuator tip in the second direction, and at least one of the first recess and the second recess has an inclined edge that inclins inward in the first direction in the plan view.

16. The actuator unit according to claim 15, wherein the flow path member has a first common liquid chamber that leads to a first side in the first direction of the pressure chamber and a second common liquid chamber that leads to a second side of the pressure chamber opposite to the first side in the first direction, the flow path member is provided with an inlet port for supplying liquid to the first common liquid chamber and an outlet port for discharging liquid from the second common liquid chamber, and at least one of the inlet port and the outlet port is positioned adjacent to the inclined edge in the plan view.

17. The actuator unit according to claim 15, wherein at least one of the first recess and the second recess has an outward-sloping edge that extends so as to be inclined outward in the first direction in the plan view, and the flow path member has a notch formed on the outside of the outward-sloping edge in the plan view.

18. The actuator unit according to claim 1 or 2, wherein the sealing member is joined to the actuator tip by adhesive or welding.

19. A liquid injection head comprising the actuator unit according to claim 1 or 2.

20. A liquid injection recording device comprising the liquid injection head described in claim 19.

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