Measurement method, measurement system, and robot system

Abstract

A measurement method according to the present invention is for measuring a position of an object to be measured using measurement light and includes: setting setup information including coordinate calculation information used to calculate, from a coordinate value in either a first coordinate system or a second coordinate system, a coordinate value in the other of the first coordinate system or the second coordinate system, and registered position information related to the position of a measurement member disposed on the object to be measured in at least one of the first coordinate system and the second coordinate system; and acquiring information related to the position of the object to be measured in the second coordinate system on the basis of the coordinate calculation information and the measurement result of the position of the object to be measured in the first coordinate system obtained by emitting the measurement light on the basis of the registered position information.

Description

Measuring method, measuring system, and robot system

[0006]

[0001] The present invention relates to the technical field of a measuring method, a measuring system, and a robot system for measuring the position of a measurement object, for example.

[0002] As an example of a measuring system capable of measuring the position of a measurement object, Patent Document 1 describes a measuring system capable of measuring the position of a measurement object by irradiating a retroreflector as a measurement member arranged on the measurement object with a laser beam as measurement light using a laser tracker. In such a measuring system, it is required to shorten the measurement time necessary for measuring the position of the measurement object.

[0003] International Publication No. 2003 / 62744 pamphlet

[0004] According to a first aspect, there is provided a measuring method for measuring the position of a measurement object using measurement light, including setting setting information including coordinate calculation information used to calculate coordinate values in either the first coordinate system or the second coordinate system from coordinate values in one of the first coordinate system and the second coordinate system, and registration position information regarding the position of the measurement member arranged on the measurement object in at least one of the first and second coordinate systems; and obtaining information regarding the position of the measurement object in the second coordinate system based on the measurement result of the position of the measurement object in the first coordinate system obtained by irradiating the measurement light based on the registration position information indicated by the setting information and the coordinate calculation information.

[0005] According to a second aspect, there is provided a measuring method for measuring the position of a measurement object using measurement light, including measuring the position of the measurement member by irradiating the measurement member arranged on the measurement object with the measurement light in a first period; setting registration position information regarding the position of the measurement member calculated based on the measurement result of the position of the measurement member as setting information; and obtaining the position of the measurement member by irradiating the measurement member with measurement light based on the registration position information in a second period after the first period.

[0006] According to a third embodiment, a measurement method is provided for measuring the position of an object to be measured using measuring light, the method comprising: simulating a real space in which the object to be measured is located in a virtual space; setting information regarding a measurement position for measuring the position of the object to be measured located in the virtual space in the virtual space; and obtaining information regarding the position of a measuring member in the real space by irradiating a measuring member located in the real space in which the object to be measured is located with measuring light, based on the information regarding the measurement position.

[0007] According to a fourth aspect, a measurement method is provided for measuring the position of an object to be measured using measuring light, the method comprising: setting registered position information relating to the position of a measuring member placed on the object to be measured as setting information during a first period; and measuring the position of the measuring member by irradiating the measuring member with measuring light based on the registered position information during a second period following the first period.

[0008] According to a fifth embodiment, a measurement system is provided for measuring the position of an object to be measured using measuring light, comprising: a control device for setting setting information including coordinate calculation information used to calculate the coordinate value of the other of the first and second coordinate systems from the coordinate value of the one of the first and second coordinate systems; and registered position information relating to a position registered as the position of a measuring member, which is positioned at a fixed position relative to the object to be measured, in at least one of the first and second coordinate systems; and a measurement device for acquiring information relating to the position of the object to be measured by irradiating the measuring light at the position indicated by the registered position information.

[0009] According to the sixth aspect, the processing apparatus is a robot, comprising the robot and a measuring device that emits the measuring light and receives the reflected light of the measuring light from the measuring member arranged on the object to be measured, and a robot system is provided in which the measurement method provided in the first aspect is performed.

[0010] According to a seventh embodiment, a robot system is provided which includes a robot that processes a workpiece, and a measuring device that irradiates a measuring member, which is positioned on at least one of the workpiece and the robot, with measuring light to measure the position of the workpiece and the position of the robot, wherein the measuring device irradiates the measuring member with measuring light based on registered position information relating to the position of the measuring member, and the movement of the robot is controlled based on the measurement result of the measuring member obtained by irradiating the measuring member with measuring light based on the registered position information.

[0011] Figure 1 is a system configuration diagram showing an example of the system configuration of the robot system in this embodiment. Figure 2 is a schematic perspective view showing an example of the arrangement of the robot system. Figure 3 is a side view showing the configuration of the robot. Figure 4 is a front view showing the external appearance of the measuring device. Figure 5 is a cross-sectional view showing the configuration of the measuring optical system provided by the measuring device. Figure 6A is a block diagram showing the configuration of the robot control device, and Figure 6B is a block diagram showing the configuration of the measuring control device. Figure 7 is a flowchart showing the overall flow of the setting operation. Figure 8 conceptually shows the data structure of setting information including coordinate calculation information and registered position information. Figure 9 is a flowchart showing the processing flow for generating coordinate calculation information in step S11 of Figure 7. Figure 10 conceptually shows a measuring device that measures the positions of three reference members. Figure 11 shows the data structure of reference member information. Figure 12 shows the data structure of coordinate system information including coordinate calculation information. Figure 13 is a flowchart showing the processing flow for generating registered position information in step S12 of Figure 7. Figure 14 shows the data structure of recipe information including registered position information. Figures 15A to 15C conceptually show a measuring device for measuring a measuring member attached to a workpiece. Figures 16A to 16C conceptually show a measuring device for measuring a measuring member attached to a robot (end-effect arm member). Figures 17A to 17B conceptually show a measuring device for measuring a measuring member attached to a robot (end-effect arm member). Figure 18 is a flowchart showing the flow of robot control operation. Figure 19 is a flowchart showing the processing flow for generating registered position information and positional relationship information in the first modified example. Figure 20 shows the positional relationship between the robot's reference point and multiple measuring members attached to the robot. Figure 21 shows the data structure of recipe information including registered position information and positional relationship information. Figure 22 conceptually shows the evaluation operation performed in the second modified example. Figure 23 shows an example of a robot system in the third modified example. Figure 24 shows another example of a robot system in the third modified example. Figure 25 conceptually shows a virtual space that simulates real space. Figure 26 shows the display screen. Figures 27A to 27C each show examples of displays of information regarding the positional deviation between the registered position of the measurement member and the measurement position of the measurement member.Figure 28 shows an example of displaying information about multiple measurement positions obtained by measuring the measuring element 16 multiple times. Figures 29A and 29B each show examples of displaying information about the results of receiving reflected light from the light receiving element. Figure 30 shows the display screen. Figure 31 shows the display screen.

[0012] The following describes embodiments of the measurement method, measurement system, and robot system with reference to the drawings. In the following, the embodiments of the measurement method, measurement system, and robot system will be described using the robot system SYS.

[0013] (1) Configuration of the Robot System SYS First, the configuration of the robot system SYS in this embodiment will be described.

[0014] (1-1) Overall Configuration of the Robot System SYS First, the overall configuration of the robot system SYS in this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a system configuration diagram showing an example of the system configuration of the robot system SYS in this embodiment. Figure 2 is a schematic perspective view showing an example of the arrangement of the robot system SYS.

[0015] As shown in Figures 1 and 2, the robot system SYS comprises a robot 1 and a measuring device 2. The configuration and operation of robot 1 and measuring device 2 will be described in detail later, so a detailed explanation is omitted here, but a brief overview is provided below.

[0016] Robot 1 performs a predetermined process on workpiece W. For this reason, robot 1 may also be referred to as a processing unit. Workpiece W is the object that is the target of the predetermined process performed by robot 1. In particular, robot 1 performs the predetermined process on workpiece W using an end effector 15 (see Figure 3), which will be described later and is equipped with robot 1. That is, robot 1 performs the predetermined process on workpiece W using an end effector 15 that performs the predetermined process on workpiece W. In this case, robot 1 may perform the process on workpiece W according to the type of end effector 15 equipped with robot 1. The end effector 15 may also be referred to as a tool.

[0017] As a first example, robot 1 may use the end effector 15 to perform a machining process on a workpiece W as an example of a predetermined process. For example, robot 1 may use the end effector 15 to perform an additive machining process on workpiece W to add an object to workpiece W (additive machining process). An example of an additive machining process is an additive machining process in which an object is added to workpiece W by melting the molding material supplied to workpiece W with an energy beam. For example, robot 1 may use the end effector 15 to perform a removal machining process on workpiece W to remove a part of workpiece W (removal machining process). An example of a removal machining process is a removal machining process in which a part of workpiece W is removed by irradiating workpiece W with an energy beam (for example, light). An example of a removal machining process is a machining process in which workpiece W is machined using a tool (machining process). When robot 1 performs a machining process, the end effector 15 may include a machining head capable of machining workpiece W. In other words, a machining head capable of machining the workpiece W may be used as the end effector 15. The machining head may also be referred to as a machining device.

[0018] As a second example, robot 1 may use the end effector 15 to perform a measurement process to measure a workpiece W as an example of a predetermined process. In this case, workpiece W may be referred to as the object to be measured. Robot 1 may use the end effector 15 to perform a measurement process to measure the characteristics of workpiece W. Examples of characteristics of workpiece W include at least one of the position of at least a part of workpiece W, the shape of at least a part of workpiece W, and the size of at least a part of workpiece W. Robot 1 may use the end effector 15 to perform a measurement process to measure the appearance of workpiece W. Robot 1 may use the end effector 15 to measure the appearance of workpiece W and perform a measurement process (appearance inspection process) to inspect the appearance of workpiece W. When robot 1 performs a measurement process, the end effector 15 may include a measuring head capable of measuring workpiece W. In other words, a measuring head capable of measuring workpiece W may be used as the end effector 15. The measuring head may be referred to as a measuring device.

[0019] The workpiece W may be supported by a jig J for supporting the workpiece W. In this case, the robot 1 may perform a predetermined process on the workpiece W supported by the jig J. However, the workpiece W does not have to be supported by the jig J. The robot 1 may perform a predetermined process on the workpiece W that is not supported by the jig J.

[0020] However, robot 1 does not have to perform the predetermined processing on workpiece W. In other words, the robot system SYS may include a second robot 1 that does not perform the predetermined processing on workpiece W, instead of a first robot 1 that performs the predetermined processing on workpiece W. Alternatively, the robot system SYS may include both a first robot 1 that performs the predetermined processing on workpiece W and a second robot 1 that does not have to perform the predetermined processing on workpiece W. In summary, the robot system SYS may include at least one of a first robot 1 that performs the predetermined processing on workpiece W and a second robot 1 that does not have to perform the predetermined processing on workpiece W. For the sake of explanation, the following description will describe an example in which the robot system SYS includes a robot 1 that performs the predetermined processing on workpiece W.

[0021] Robot 1 is equipped with a robot control device 19. The robot control device 19 is capable of controlling robot 1. For example, the robot control device 19 may generate robot control signals for controlling robot 1 and control robot 1 based on the generated robot control signals. As an example, the robot control device 19 may generate robot control signals for controlling robot 1 to perform a predetermined process on workpiece W. The robot control device 19 may also be simply referred to as a control device.

[0022] Controlling robot 1 may include controlling the movement of robot 1. The movement of robot 1 may include the movement of robot arm 12. In this case, robot control device 19 may generate robot control signals to control the movement of robot 1 (for example, the movement of robot arm 12), and control the movement of robot 1 (for example, the movement of robot arm 12) based on the generated robot control signals. As an example, robot control device 19 may generate robot control signals to control the movement of robot 1 (for example, the movement of robot arm 12) so as to perform a predetermined process on workpiece W.

[0023] The measuring device 2 is capable of measuring the position of an object to be measured. In other words, the measuring device 2 is a device capable of performing a measurement method for measuring the position of an object to be measured. In this embodiment, the position of the object to be measured may mean the position of at least a part of the object to be measured.

[0024] In this embodiment, measuring the position of an object may include obtaining information regarding the position of the object. For example, the information regarding the position of the object may include information that directly indicates the position of the object (i.e., the position of the object itself). In this case, measuring the position of the object may include obtaining information that directly indicates the position of the object. As another example, the information regarding the position of the object may include information that indirectly indicates the position of the object (e.g., information that can be used to calculate the position of the object). In this case, measuring the position of the object may include obtaining information that indirectly indicates the position of the object. In any case, the measurement result of the position of the object (information regarding the measurement result) may include information that indicates the position of the object.

[0025] The object to be measured may include robot 1. In this case, the measuring device 2 may be able to measure the position of robot 1 (i.e., the position of at least a part of robot 1). In this embodiment, an example of the measuring device 2 measuring the position of robot arm 12 (see Figure 3) provided on robot 1 will be described as an example of the position of robot 1. In particular, in this embodiment, an example of the measuring device 2 measuring the position of tip arm member 123 (see Figure 3) at the tip of robot arm 12 provided on robot 1 will be described as an example of the position of robot 1. However, the measuring device 2 may measure the position of a part of robot 1 other than robot arm 12 (tip arm member 123) as an example of the position of robot 1. For example, the measuring device 2 may measure the position of link 121 (see Figure 3), described later, provided on robot arm 12 as an example of the position of at least a part of robot 1. For example, the measuring device 2 may measure the position of joint 122, described later, provided on robot arm 12 as an example of the position of at least a part of robot 1.

[0026] As mentioned above, the robot system SYS may include at least one of a first robot 1 that performs a predetermined process on the workpiece W, and a second robot 1 that does not have to perform a predetermined process on the workpiece W. In this case, the object to be measured may include at least one of the first robot 1 that performs a predetermined process on the workpiece W, and a second robot 1 that does not have to perform a predetermined process on the workpiece W. In other words, the measuring device 2 may be able to measure the position of at least one of the first robot 1 that performs a predetermined process on the workpiece W, and the second robot 1 that does not have to perform a predetermined process on the workpiece W.

[0027] The object to be measured may include a workpiece W in addition to, or instead of, the robot 1. In other words, the object to be measured may include at least one of the robot 1 and the workpiece W. In this case, the measuring device 2 may be able to measure the position of the workpiece W (i.e., the position of at least a part of the workpiece W).

[0028] The object to be measured may include, in addition to or instead of, the robot 1 and the workpiece W, a jig J that supports the workpiece W. In other words, the object to be measured may include the robot 1, the workpiece W, and at least one of the jig J. In this case, the measuring device 2 may be able to measure the position of the jig J (i.e., the position of at least a part of the jig J).

[0029] The measuring device 2 may be capable of measuring the position of the object to be measured in the measuring coordinate system. The measuring coordinate system is a three-dimensional coordinate system defined with respect to the measuring device 2. For example, the measuring coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X axis, Y axis, and Z axis) passing through an origin defined with respect to the measuring device 2. In this case, the measuring device 2 may be capable of measuring the position of the object to be measured along the X axis of the measuring coordinate system (X translation position). The measuring device 2 may be capable of measuring the position of the object to be measured along the Y axis of the measuring coordinate system (Y translation position). The measuring device 2 may be capable of measuring the position of the object to be measured along the Z axis of the measuring coordinate system (Z translation position). The measuring device 2 may be capable of measuring the position of the object to be measured in the rotational direction around the X axis of the measuring coordinate system (X rotation position). The measuring device 2 may be capable of measuring the position of the object to be measured in the rotational direction around the Y axis of the measuring coordinate system (Y rotation position). The measuring device 2 may be capable of measuring the position of the object to be measured in the rotational direction around the Z axis of the measuring coordinate system (Z rotation position). The position of the object to be measured in the rotational direction around the X axis of the measuring coordinate system (X rotation position), the position of the object to be measured in the rotational direction around the Y axis of the measuring coordinate system (Y rotation position), and the position of the object to be measured in the rotational direction around the Z axis of the measuring coordinate system (Z rotation position) may be considered equivalent to the orientation of the object to be measured around the X axis of the measuring coordinate system (X orientation), the orientation of the object to be measured around the Y axis of the measuring coordinate system (Y orientation), and the orientation of the object to be measured around the Z axis of the measuring coordinate system (Z orientation), respectively. In the following description, the X axis, Y axis, and Z axis of the measuring coordinate system will be referred to as X axis (M), Y axis (M), and Z axis (M), respectively.

[0030] The measuring device 2 can be of any type, as long as it is capable of measuring the position of the object to be measured. In this embodiment, an example in which the measuring device 2 optically measures the position of the object to be measured will be described. That is, in this embodiment, an example in which the measuring device 2 measures the position of the object to be measured using measuring light ML will be described. In this case, the measuring device 2 is capable of emitting measuring light ML toward the object to be measured. In other words, the measuring device 2 is capable of irradiating the object to be measured with measuring light ML. The measuring light ML is typically laser light. However, the measuring light ML may be light other than laser light. Furthermore, the measuring device 2 is capable of receiving the reflected light RL from the object to be measured that has been irradiated with measuring light ML. In other words, the measuring device 2 is capable of receiving the reflected light RL of the measuring light ML. Furthermore, the reflected light RL may include at least one of the following: reflected light, which is the measurement light ML reflected by the object being measured; scattered light, which is the measurement light ML scattered by the object being measured; diffracted light, which is the measurement light ML diffracted by the object being measured; and transmitted light, which is the measurement light ML that has passed through the object being measured.

[0031] The measuring device 2 is equipped with a measuring control device 29. The measuring control device 29 can control the measuring device 2. Specifically, the measuring control device 29 can control the measuring device 2 to measure the position of the object to be measured. The measuring control device 29 may also be simply referred to as a control device.

[0032] The measurement control device 29 may calculate the position of the object to be measured in a reference coordinate system used as a reference for the robot system SYS, based on the light reception result of the return light RL by the measurement device 2. For this reason, in this embodiment, measuring the position of the object to be measured may include calculating the position of the object to be measured. The measurement result of the position of the object to be measured may include the calculation result of the position of the object to be measured. Information regarding the measurement result of the position of the object to be measured may include information regarding the calculation result of the position of the object to be measured. In this case, the measurement result of the position of the object to be measured may include the calculation result of the position of the object to be measured. Information regarding the measurement result of the position of the object to be measured may be considered to include information that directly indicates the position of the object to be measured (i.e., the position of the object to be measured itself).

[0033] However, the measurement result of the position of the object to be measured (information regarding the measurement result) may include information that indirectly indicates the position of the object to be measured (for example, information that can be used to calculate the position of the object to be measured). An example of information that indirectly indicates the position of the object to be measured is the light reception result of the reflected light RL by the measuring device 2 (information regarding the light reception result). Another example of information that indirectly indicates the position of the object to be measured is the calculation result of the position of the measuring member 16, which will be described later (information regarding the calculation result). In this case, a device other than the measurement control device 29 (for example, the robot control device 19) may calculate the position of the object to be measured based on the information that indirectly indicates the position of the object to be measured.

[0034] Calculating the position of an object to be measured may include obtaining information about the position of the object to be measured. For example, calculating the position of an object to be measured may include calculating (i.e., obtaining) the position of the object to be measured from information that indirectly indicates the position of the object to be measured. In other words, calculating the position of an object to be measured may include calculating (i.e., obtaining or generating) information that directly indicates the position of the object to be measured from information that indirectly indicates the position of the object to be measured. For example, calculating the position of an object to be measured may include calculating (i.e., obtaining) the position of the object to be measured in another coordinate system different from one coordinate system (e.g., the reference coordinate system mentioned above) from information that indicates the position of the object to be measured in one coordinate system (e.g., the measurement coordinate system mentioned above). In other words, calculating the position of an object to be measured may include calculating (i.e., obtaining or generating) information that indicates the position of the object to be measured in another coordinate system different from one coordinate system (e.g., the reference coordinate system mentioned above) from information that indicates the position of the object to be measured in one coordinate system (e.g., the measurement coordinate system mentioned above). In either case, the calculation result of the position of the object being measured (information regarding the calculation result) may include information indicating the position of the object being measured.

[0035] The reference coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) used as the reference for the robot system SYS. In this case, the measurement control device 29 may be able to calculate the position of the object to be measured along the X-axis of the reference coordinate system (X translation position). The measurement control device 29 may be able to calculate the position of the object to be measured along the Y-axis of the reference coordinate system (Y translation position). The measurement control device 29 may be able to calculate the position of the object to be measured along the Z-axis of the reference coordinate system (Z translation position). The measurement control device 29 may be able to calculate the position of the object to be measured in the rotational direction around the X-axis of the reference coordinate system (X rotation position). The measurement control device 29 may be able to calculate the position of the object to be measured in the rotational direction around the Y-axis of the reference coordinate system (Y rotation position). The measurement control device 29 may be able to calculate the position of the object to be measured in the rotational direction around the Z-axis of the reference coordinate system (Z rotation position). Furthermore, the position of the object to be measured in the rotational direction around the X axis of the reference coordinate system (X rotation position), the position of the object to be measured in the rotational direction around the Y axis of the reference coordinate system (Y rotation position), and the position of the object to be measured in the rotational direction around the Z axis of the reference coordinate system (Z rotation position) may be considered equivalent to the orientation of the object to be measured around the X axis of the reference coordinate system (X orientation), the orientation of the object to be measured around the Y axis of the reference coordinate system (Y orientation), and the orientation of the object to be measured around the Z axis of the reference coordinate system (Z orientation), respectively. In the following explanation, the X axis, Y axis, and Z axis of the reference coordinate system will be referred to as X axis (G), Y axis (G), and Z axis (G), respectively.

[0036] A global coordinate system defined with respect to the robot system SYS may be used as the reference coordinate system. The global coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) passing through an origin defined with respect to the robot system SYS. A robot coordinate system defined with respect to the robot 1 may be used as the reference coordinate system. The robot coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) passing through an origin fixed to the robot 1 (for example, the base 11). A first process coordinate system defined with respect to the support surface SS may be used as the reference coordinate system. The first process coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) passing through an origin fixed to the support surface SS. A second process coordinate system defined with respect to the workpiece W may be used as the reference coordinate system. The second process coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X, Y, and Z axes) passing through an origin fixed to the workpiece W. If the robot system SYS is equipped with an automated guided vehicle that moves at least one of the robot 1 and the workpiece W, a third process coordinate system defined with respect to the automated guided vehicle may be used as the reference coordinate system. The third process coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X, Y, and Z axes) passing through an origin fixed to the automated guided vehicle. A fourth process coordinate system may be used as the reference coordinate system, defined with respect to the base 11 that functions as the base of the robot 1. The fourth process coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X, Y, and Z axes) passing through an origin fixed to the base 11. A fifth process coordinate system may be used as the reference coordinate system, defined with respect to objects arranged around the robot 1. The fifth process coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X axis, Y axis, and Z axis) that pass through a fixed origin relative to the objects arranged around the robot 1.Furthermore, an example of an object placed around robot 1 is a safety fence designed to prevent people from entering the robot's range of motion.

[0037] The measurement control device 29 may output (transmit) the measurement result of the position of the object to be measured by the measurement device 2 (i.e., the calculation result of the position of the object to be measured by the measurement control device 29) to the robot control device 19. The robot control device 19 may acquire (receive) the measurement result of the position of the object to be measured by the measurement device 2 from the measurement control device 29.

[0038] In this case, the robot control device 19 may control the robot 1 based on the measurement results from the measuring device 2 (i.e., the measurement results of the position of the object to be measured, and information regarding the position of the object to be measured). In other words, the robot control device 19 may generate a robot control signal based on the measurement results from the measuring device 2. For example, the robot control device 19 may control the robot 1 so that the robot 1, located at a position calculated by the measuring device 29, performs a predetermined process on the workpiece W. For example, the robot control device 19 may control the robot 1 so that the robot 1 performs a predetermined process on the workpiece W, located at a position calculated by the measuring device 29. For example, the robot control device 19 may control the robot 1 so that the robot 1 performs a predetermined process on the workpiece W supported by the jig J, located at a position calculated by the measuring device 29.

[0039] Furthermore, in the above explanation, the measurement control device 29 of the measurement device 2 primarily performs position calculation processing to calculate the position of the object to be measured, and the robot control device 19 of the robot 1 performs signal generation processing to generate robot control signals based on the calculation result of the position of the object to be measured. However, the measurement control device 29 may perform at least a part of the signal generation processing. In other words, the measurement control device 29 may function as at least a part of the robot control device 19. Also, the robot control device 19 may perform at least a part of the position calculation processing. In other words, the robot control device 19 may function as at least a part of the measurement control device 29.

[0040] Furthermore, the robot system SYS may include control devices different from those of the robot 1 and the measuring device 2. In other words, the robot system SYS may include control devices different from the robot control device 19 and the measuring device 29, and independent of the robot 1 and the measuring device 2. In this case, the independent control device may function as at least a part of the robot control device 19. The independent control device may function as at least a part of the measuring device 29. The independent control device may perform at least a part of the signal generation process. The independent control device may perform at least a part of the position calculation process.

[0041] Furthermore, in the example shown in Figure 1, the robot system SYS comprises a single robot 1. However, as will be detailed later in the third modification, the robot system SYS may comprise multiple robots 1. At least two of the multiple robots 1 may perform the same processing on the same workpiece W. At least two of the multiple robots 1 may each perform at least two different processing on the same workpiece W. At least two of the multiple robots 1 may each perform the same processing on at least two different workpieces W. At least two of the multiple robots 1 may each perform at least two different processing on at least two different workpieces W.

[0042] Furthermore, in the example shown in Figure 1, the robot system SYS is equipped with a single measuring device 2. However, as will be detailed later in the third modified example, the robot system SYS may be equipped with multiple measuring devices 2.

[0043] (1-2) Robot Configuration Next, the configuration of robot 1 will be explained with reference to Figure 3. Figure 3 is a side view showing the configuration of robot 1.

[0044] As shown in FIG. 3, the robot 1 includes a base 11, a robot arm 12, and an end effector 15. As described above, the robot 1 includes a robot control device 19, but the robot control device 19 will be described later with reference to FIG. 6A. Therefore, a detailed description of the robot control device 19 is omitted here.

[0045] The base 11 is a member that serves as the foundation of the robot 1. The base 11 is disposed on a support surface SS such as a floor surface. The base 11 may be fixed to the support surface SS. Alternatively, the base 11 may be movable with respect to the support surface SS. As an example, the base 11 may be capable of self-propelling on the support surface SS. In this case, the base 11 may be installed on an automatic guided vehicle. Alternatively, an automatic guided vehicle may be used as the base 11. As an example of an automatic guided vehicle, at least one of an AGV (Automated Guided Vehicle) and an AMR (Autonomous Mobile Robot) can be mentioned. As another example, the base 11 may be capable of flying on the support surface SS. In this case, the base 11 may be installed on an aircraft. As an example of an aircraft, an unmanned aircraft such as a drone can be mentioned. Alternatively, an aircraft may be used as the base 11. Note that FIG. 3 shows an example where the base 11 is fixed to the support surface SS.

[0046] The robot arm 12 is attached to the base 11. In the present embodiment, an example in which a robot arm having a vertically articulated structure is used as the robot arm 12 will be described. In this case, the robot arm 12 may be a device in which a plurality of links 121 are connected via joints 122. An actuator is built into the joint 122. The link 121 may be rotatable around an axis defined by the joint 122 by an actuator built into the joint 122. Note that at least one link 121 may be extendable and retractable along the direction in which the link 121 extends. A device including a device in which a plurality of links 121 are connected via joints 122 and the base 11 may also be referred to as the robot arm 12.

[0047] However, as the robot arm 12, a robot arm different from the robot arm having a vertically articulated structure may be used. For example, as the robot arm 12, a polar coordinate type robot having a horizontally articulated structure may be used. As the robot arm 12, a cylindrical coordinate type robot may be used. As the robot arm 12, it may function as a Cartesian coordinate type robot. As the robot arm 12, a parallel link type robot may be used.

[0048] An end effector 15 is attached to the robot arm 12. FIG. 3 shows an example in which the end effector 15 is attached to the tip arm member 123 at the tip of the robot arm 12. However, the end effector 15 may be attached to a part of the robot arm 12 different from the tip arm member 123. As an example, the end effector 15 may be attached to any part of the robot arm 12 that moves as the robot arm 12 moves.

[0049] FIG. 3 shows an example in which the end effector 15 is directly attached to the robot arm 12. However, the end effector 15 may be indirectly attached to the robot arm 12. For example, the end effector 15 may be attached to the robot arm 12 via a support member capable of supporting the end effector 15. That is, a support member capable of supporting the end effector 15 may be attached to the robot arm 12, and the end effector 15 may be attached to the support member. In any case, the end effector 15 may be directly or indirectly attached to the robot arm 12 so as to satisfy the condition that the positional relationship between the end effector 15 and the robot arm 12 is fixed. The end effector 15 may be directly or indirectly attached to the robot arm 12 so as to satisfy the condition that the end effector 15 is disposed at a fixed position with respect to the robot arm 12.

[0050] Furthermore, a moving device capable of moving the end effector 15 may be used as a support member. In this case, the moving device capable of moving the end effector 15 may be attached to the robot arm 12, and the end effector 15 may be attached to the moving device. The moving device may move the end effector 15 relative to the robot arm 12. For example, the moving device may include a guide member extending along a predetermined translation axis, an actuator (motor), and a slider member that can move along the guide member using the power of the actuator. In this case, the end effector 15 may be attached to the slider member. As a result, the moving device can move the end effector 15 along a predetermined translation axis (i.e., translational movement) by moving the slide member along the guide member. Furthermore, the moving device may move the end effector 15 around a predetermined rotation axis (i.e., rotational movement).

[0051] The end effector 15 attached to the robot arm 12 may be replaceable. Specifically, the end effector 15 may be detachably attached to the robot arm 12. In this case, one end effector 15 attached to the robot arm 12 may be removed from the robot arm 12, and then another end effector 15 different from the one attached to the robot arm 12 may be newly attached to the robot arm 12.

[0052] Furthermore, a measuring member 16 is attached to the robot 1, which is the object to be measured. Similarly, a measuring member 16 is also attached to the workpiece W, which is also the object to be measured. In addition, although not shown in Figure 3 to avoid complicating the drawing, a measuring member 16 may also be attached to the jig J, which is also the object to be measured. In other words, a measuring member 16 is arranged on the object to be measured. To put it another way, the object to be measured is equipped with a measuring member 16.

[0053] The measuring member 16 may be directly attached to the object to be measured. Alternatively, the measuring member 16 may be indirectly attached to the object to be measured. For example, the measuring member 16 may be attached to a support member that supports the measuring member 16, and the support member to which the measuring member 16 is attached may be attached to the object to be measured. In either case, the measuring member 16 may be attached to a fixed position relative to the object to be measured.

[0054] The measuring element 16 is a reflective element that reflects light incident on the measuring element 16. In particular, the measuring element 16 is a retroreflective element that retroreflects light incident on the measuring element 16. The measuring element 16 may also be called a reflector. Retroreflection may also mean reflection in which the reflected light is selectively returned in a direction substantially along the optical path of the incident light over a wide irradiation angle.

[0055] The measuring member 16 is used by the measuring device 2 described above to measure the position of the object to be measured. Specifically, in order to measure the position of the object to be measured, the measuring device 2 measures the position of the measuring member 16 provided on the object to be measured. In order to measure the position of the measuring member 16, the measuring device 2 irradiates the measuring member 16 with measuring light ML. The measuring member 16 reflects the measuring light ML incident on it. The measuring device 2 receives the reflected light RL, which is the measuring light ML reflected by the measuring member 16.

[0056] The light reception result of the reflected light RL by the measuring device 2 (i.e., information regarding the light reception result) includes the measurement result of the position of the measuring member 16 in the measurement coordinate system. Specifically, the light reception result of the reflected light RL by the measuring device 2 includes information that indirectly indicates the position of the measuring member 16 in the measurement coordinate system (i.e., information that can be used to calculate the position of the measuring member 16 in the measurement coordinate system). Here, because the object to be measured is equipped with the measuring member 16, the measurement result of the position of the measuring member 16 substantially includes the measurement result of the position of the object to be measured equipped with the measuring member 16. For this reason, the measurement control device 29 may calculate the position of the object to be measured equipped with the measuring member 16 based on the light reception result of the reflected light RL from the measuring member 16. Specifically, the measurement control device 29 may calculate the position of the measuring member 16 equipped on the object to be measured based on the light reception result of the reflected light RL from the measuring member 16. Subsequently, the measurement control device 29 may calculate the position of the object to be measured equipped with the measurement member 16 based on the calculation result of the position of the measurement member 16 equipped on the object to be measured. In other words, the measurement control device 29 may acquire the reception result of the reflected light RL from the measurement member 16 as information regarding the position of the measurement member 16 equipped on the object to be measured, and acquire information regarding the position of the object to be measured equipped with the measurement member 16 based on the acquired information. For this reason, measuring (calculating) the position of the measurement member 16 equipped on the object to be measured is substantially equivalent to measuring (calculating) the position of the object to be measured equipped with the measurement member 16. In this embodiment, the measurement result of the position of the measurement member 16 may include the reception result of the reflected light RL from the measurement member 16, or it may include the calculation result of the position of the measurement member 16. The information regarding the position of the measuring member 16 may include information that indirectly indicates the position of the measuring member 16 (for example, information regarding the reception result of the reflected light RL from the measuring member 16), or it may include information that directly indicates the position of the measuring member 16 (for example, information regarding the calculation result of the position of the measuring member 16).

[0057] Here, as described above, the measuring device 2 measures the position of the object to be measured (the position of the measuring member 16) in the measurement coordinate system. In this case, the measuring control device 29 may calculate the position of the measuring member 16 in the measurement coordinate system based on the result of receiving the reflected light RL from the measuring member 16. Subsequently, the measuring control device 29 may calculate the position of the object to be measured in the measurement coordinate system based on the calculation result of the position of the measuring member 16 in the measurement coordinate system, and then calculate the position of the object to be measured in the reference coordinate system described above based on the calculation result of the position of the object to be measured in the measurement coordinate system. Alternatively, the measuring control device 29 may calculate the position of the measuring member 16 in the reference coordinate system based on the calculation result of the position of the measuring member 16 in the measurement coordinate system, and then calculate the position of the object to be measured in the reference coordinate system based on the calculation result of the position of the measuring member 16 in the reference coordinate system. In either case, the measuring control device 29 may calculate the position of the object to be measured in the reference coordinate system based on the result of receiving the reflected light RL from the measuring member 16.

[0058] In this embodiment, the object to be measured may have multiple measuring members 16. In particular, the object to be measured may have at least three measuring members 16. For example, as shown in Figure 3, the robot 1 may have at least three measuring members 16, and the workpiece W may have at least three measuring members 16. Although not shown in Figure 3, the jig J may have at least three measuring members 16. In this case, information regarding the relative positions of the multiple measuring members 16 may be known information to the measurement control device 29. In this case, the measurement control device 29 may calculate the positions of at least three measuring members 16 based on the reception results of the reflected light RL from each of the at least three measuring members 16. Subsequently, the measurement control device 29 may calculate the position of the object to be measured based on the calculated positions of at least three measuring members 16. In particular, the measurement control device 29 may calculate the following positions of the object to be measured based on the calculation results of the positions of at least three measuring members 16: the position of the object to be measured in a linear direction along the X-axis (G) of the reference coordinate system, the position of the object to be measured in a linear direction along the Y-axis (G) of the reference coordinate system, the position of the object to be measured in a linear direction along the Z-axis (G) of the reference coordinate system, the position of the object to be measured in a rotational direction around the X-axis (G) of the reference coordinate system, the position of the object to be measured in a rotational direction around the Y-axis (G) of the reference coordinate system, and the position of the object to be measured in a rotational direction around the Z-axis (G) of the reference coordinate system.

[0059] However, the object to be measured may have two or fewer measuring members 16. Even in this case, the measurement control device 29 may calculate at least one of the following based on the reception results of the reflected light RL from each of the two or fewer measuring members 16: the position of the object to be measured in a linear direction along the X-axis (G) of the reference coordinate system, the position of the object to be measured in a linear direction along the Y-axis (G) of the reference coordinate system, the position of the object to be measured in a linear direction along the Z-axis (G) of the reference coordinate system, the position of the object to be measured in a rotational direction around the X-axis (G) of the reference coordinate system, the position of the object to be measured in a rotational direction around the Y-axis (G) of the reference coordinate system, and the position of the object to be measured in a rotational direction around the Z-axis (G) of the reference coordinate system.

[0060] In the example shown in Figure 3, the measuring member 16 provided by the robot 1 is attached to the tip arm member 123 of the robot 1. This is because, as described above, in this embodiment, the measuring device 2 measures the position of the tip arm member 123 as an example of the position of the robot 1. In this case, the measurement control device 29 may calculate the position of the tip arm member 123 as the position of the robot 1 based on the reception result of the return light RL from the measuring member 16 attached to the tip arm member 123. However, the measuring member 16 provided by the robot 1 may be attached to a part of the robot 1 different from the tip arm member 123. In this case, the measurement control device 29 may calculate the position of a part of the robot 1 different from the tip arm member 123 as the position of the robot 1 based on the reception result of the return light RL from the measuring member 16 attached to a part of the robot 1 different from the tip arm member 123.

[0061] (1-3) Configuration of the measuring device Next, the configuration of the measuring device 2 will be explained with reference to Figure 4. Figure 4 is a front view showing the external appearance of the measuring device 2.

[0062] As shown in Figure 4, the measuring device 2 comprises a base 21 and a housing 22. As mentioned above, the measuring device 2 also includes a measurement control device 29, which will be explained later with reference to Figure 6B. Therefore, a detailed explanation of the measurement control device 29 is omitted here.

[0063] The base 21 is a fundamental component of the measuring device 2. The base 21 is placed on a support surface SS, such as a floor. The base 21 may be fixed to the support surface SS. Alternatively, the base 21 may be movable relative to the support surface SS. For example, the base 21 may be self-propelled on the support surface SS. In this case, the base 21 may be installed on an automated guided vehicle. Alternatively, the automated guided vehicle may be used as the base 21. Examples of automated guided vehicles include at least one of AGV (Automatic Guided Vehicle) and AMR (Autonomous Mobile Robot). Figure 5 shows an example in which the base 21 is fixed to the support surface SS.

[0064] The housing 22 is attached to the base 21. The housing 22 is a component that houses the measuring optical system 23. The housing 22 may be rotatable around a predetermined axis of rotation. In the example shown in Figure 4, the housing 22 is rotatable around an axis of rotation along the Y-axis (M) of the measuring coordinate system (for example, an axis extending horizontally) and an axis of rotation along the Z-axis (M) of the measuring coordinate system (for example, an axis extending vertically or in the direction of gravity). In other words, the housing 22 is rotatable in the pan direction (longitude direction), which is the direction of rotation around the axis of rotation along the vertical or gravity direction, and in the tilt direction (latitude direction), which is the direction of rotation around the axis of rotation along the horizontal direction.

[0065] The configuration of the measurement optical system 23 is shown in Figure 5. Note that Figure 5 is merely an example of the configuration of the measurement optical system 23, and the configuration of the measurement optical system 23 is not limited to the configuration shown in Figure 5. The measurement optical system 23 may have any configuration that irradiates the measurement member 16 with measurement light ML and receives the return light RL from the measurement member 16.

[0066] As shown in Figure 5, the measurement optical system 23 includes an interferometer 231, a beam steering mirror 232, a camera 233, and a half mirror 234.

[0067] The interferometer 231 emits measurement light ML. The measurement light ML emitted by the interferometer 231 passes through the half mirror 234, is reflected by the beam steering mirror 232, and is emitted outwards from the housing 22 through the opening 221 formed in the housing 22. As a result, the measurement light ML irradiates the measurement member 16.

[0068] The housing 22 rotates along at least one of the pan and tilt directions so that the measurement light ML is irradiated onto the measurement member 16. Specifically, when the housing 22 rotates along at least one of the pan and tilt directions, the direction in which the measurement light ML is emitted from the housing 22 is changed. Therefore, the housing 22 rotates along at least one of the pan and tilt directions so that the measurement light ML is emitted from the housing 22 toward the measurement member 16.

[0069] The reflected light RL from the measuring member 16 enters the housing 22 through the opening 221 formed in the housing 22, is reflected by the beam steering mirror 232, passes through the half mirror 234, and enters the interferometer 231. The interferometer 231 is further entered by reference light, which is part of the measuring light ML. As a result, the interferometer 231 receives (in other words, detects) both the reflected light RL and the reference light. In particular, the interferometer 231 receives (in other words, detects) interference light generated by the interference between the reflected light RL and the reference light. The result of receiving the reflected light RL (i.e., the result of receiving the interference light) is output to the measurement control device 29.

[0070] The measurement control device 29 may calculate the position of the measuring member 16 based on the reception result of the reflected light RL (i.e., the reception result of the interference light). In this embodiment, the measurement control device 29 may calculate the distance between the measuring device 2 and the measuring member 16 as an example of information regarding the position of the measuring member 16, based on the reception result of the reflected light RL (i.e., the reception result of the interference light). Furthermore, the measurement control device 29 may calculate the orientation of the measuring member 16 from the measuring device 2 as another example of information regarding the position of the measuring member 16, based on the amount of rotation of the housing 22 along at least one of the pan direction and tilt direction. Subsequently, the measurement control device 29 may calculate the position of the measuring member 16 (for example, a position along the X-axis (M), Y-axis (M), and Z-axis (M) of the measurement coordinate system, which is a three-dimensional position) based on the distance between the measuring device 2 and the measuring member 16, and the orientation of the measuring member 16 from the measuring device 2.

[0071] Furthermore, the measurement control device 29 may employ existing methods that utilize an interferometer as a distance meter, such as those disclosed in U.S. Patent Publication No. 2024 / 0085759, European Patent Publication No. 4332667, No. 4318107, and No. 4296763, as a method for calculating the distance to the measurement member 16 based on the reception result of the interfering light. For this reason, the explanation of the method for calculating the distance to the measurement member 16 based on the reception result of the interfering light is omitted. In addition, a TOF (Time Of Flight) type distance meter may be used as the distance meter for the measurement device 2. The TOF method may use intensity modulation or wavelength modulation. For example, the distance meters described in U.S. Patent No. 8,687,173 and U.S. Patent No. 7,139,446 may be used.

[0072] Furthermore, the reflected light NL from the ambient light (or illumination light) of the measuring member 16 may enter the interior of the housing 22 through the opening 221 formed in the housing 22. In this case, the reflected light NL may be reflected by the beam steering mirror 232, reflected by the half mirror 234, and entered by the camera 233. The camera 233 may image the measuring member 16 by receiving the reflected light NL using an image sensor. The image of the measuring member 16 captured by the camera 233 may be output to the measurement control device 29. The measurement control device 29 may track the measuring member 16 based on the image of the measuring member 16. Furthermore, the measurement control device 29 may control the rotational movement of the housing 22 based on the image of the measuring member 16 so that the measuring light ML is irradiated onto the measuring member 16.

[0073] Such a measuring device 2 may also be called a localizer or a laser tracker. Furthermore, the configuration of the measuring device 2 described above is merely an example, and the configuration of the measuring device 2 is not limited to the configuration shown in Figures 4 and 5. For example, the measuring device (localizer or laser tracker) described in International Patent Publication Nos. 2020 / 72484, 2020 / 198253, U.S. Patent Nos. 9,989,350 and 9,945,938 may be used as the measuring device 2.

[0074] (1-4) Configuration of the Robot Control Device 19 and the Measurement Control Device 29 Next, the configurations of the robot control device 19 and the measurement control device 29 will be described with reference to Figures 6A and 6B. Figure 6A is a block diagram showing the configuration of the robot control device 19, and Figure 6B is a block diagram showing the configuration of the measurement control device 29. As shown in Figure 6A, the robot control device 19 includes an arithmetic unit 191, a storage device 192, and a communication device 193. Furthermore, the robot control device 19 may also include an input device 194 and an output device 195. However, the robot control device 19 does not have to include at least one of the input device 194 and the output device 195. The arithmetic unit 191, the storage device 192, the communication device 193, the input device 194, and the output device 195 may be connected via a data bus 196.

[0075] The arithmetic unit 191 is hardware that includes at least one circuit (for example, at least one of an electronic circuit and an electrical circuit). For this reason, the arithmetic unit 191 may also be referred to as a circuit group.

[0076] The arithmetic unit 191 includes at least one processor (i.e., one or more processors) as hardware. The processor may include, for example, a processor conforming to a von Neumann computer architecture. A processor conforming to a von Neumann computer architecture may include at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor may also include, for example, a processor conforming to a non-von Neumann computer architecture. A processor conforming to a non-von Neumann computer architecture may include at least one of an FPGA (Field Programmable Gate Array) and an ASIC (Application Specific Circuit). The processor may be implemented by a group of circuits (e.g., at least one of an electronic circuit and an electrical circuit).

[0077] The arithmetic unit 191 reads a computer program 1921 which includes at least one of computer program code and computer program instructions. For example, the arithmetic unit 191 may read a computer program 1921 stored in a storage device 192. For example, the arithmetic unit 191 may read a computer program 1921 stored on a computer-readable and non-temporary recording medium using a recording medium reader (not shown) provided by the robot control device 19. The computer program 1921 read from the recording medium may be stored in the storage device 192. The arithmetic unit 191 may obtain (i.e., download or read) a computer program 1921 from a device (not shown) located outside the robot control device 19 via a communication device 193 (or other communication device). The downloaded computer program 1921 may be stored in the storage device 192.

[0078] The arithmetic unit 191 executes the loaded computer program 1921. As a result, a logical functional block for executing the processing that the robot control device 19 should perform (for example, the processing for controlling the robot 1 as described above) is realized within the arithmetic unit 191. In other words, the arithmetic unit 191, together with the storage device 192, etc., on which the computer program 1921 is recorded (in other words, together with the storage device 192 and the computer program 1921 recorded in the storage device 192, etc.), can function as a controller or computer for realizing a logical functional block for executing the processing that the robot control device 19 should perform. That is, together with at least one processor in the arithmetic unit 191, the memory (recording medium) in the storage device 192, etc., and the computer program 1921 are configured so that the robot control device 19 performs the processing that the robot control device 19 should perform (for example, the processing for controlling the robot 1 as described above).

[0079] The arithmetic unit 191 may include a single processor. In this case, the arithmetic unit 191 may use a single processor to perform the processing that the robot control device 19 should perform (for example, the processing for controlling the robot 1 as described above). For example, if the arithmetic unit 191 performs a first process (for example, a first process which is part of the processing for controlling the robot 1) and a second process (for example, a second process which is another part of the processing for controlling the robot 1), the arithmetic unit 191 may use a single processor to perform both the first and second processes. Alternatively, the arithmetic unit 191 may include multiple processors. In this case, the arithmetic unit 191 may use any one of the multiple processors to perform the processing that the robot control device 19 should perform (for example, the processing for controlling the robot 1 as described above). For example, if the arithmetic unit 191 includes a first and a second processor and performs the first and second processes, the arithmetic unit 191 may use any one of the first and second processors to perform the first and second processes, respectively. For example, the arithmetic unit 191 may perform a first process using the first processor, or a second process using the first processor, or a first process using the second processor, or a second process using the second processor.

[0080] The computing device 191 may implement a computational model that can be constructed by machine learning by executing a computer program 1921. An example of a computational model that can be constructed by machine learning is a computational model that includes a neural network (so-called artificial intelligence (AI)). In this case, the learning of the computational model may include learning the parameters of the neural network (for example, at least one of the weights and biases). The computing device 191 may control the robot 1 using the computational model. That is, the process of controlling the robot 1 may include the process of controlling the robot 1 using the computational model. The computing device 191 may also implement a computational model that has been constructed by offline machine learning using training data. Furthermore, the computational model implemented in the computing device 191 may be updated by online machine learning on the computing device 191. Alternatively, the arithmetic unit 191 may control the robot 1 using an arithmetic model implemented in an external device (i.e., a device provided outside the robot control device 19) in addition to or instead of the arithmetic model implemented in the arithmetic unit 191.

[0081] Furthermore, as the recording medium for recording the computer program 1921 executed by the arithmetic unit 191, at least one of the following may be used: optical discs such as CD-ROM, CD-R, CD-RW, flexible disk, MO, DVD-ROM, DVD-RAM, DVD-R, DVD+R, DVD-RW, DVD+RW, and Blu-ray (registered trademark); magnetic media such as magnetic tape; magneto-optical disks; semiconductor memory such as USB memory; and any other medium capable of storing a program. The recording medium may also include equipment capable of recording the computer program 1921 (for example, general-purpose or dedicated equipment on which the computer program 1921 is implemented in an executable state in at least one form such as software and firmware). Furthermore, each process and function included in the computer program 1921 may be realized by logical processing blocks implemented within the arithmetic unit 191 (i.e., the processor) when the arithmetic unit 191 executes the computer program 1921, or by hardware such as a predetermined gate array (FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Circuit)) provided by the arithmetic unit 191, or in a form in which logical processing blocks and partial hardware modules that realize some elements of the hardware are mixed.

[0082] The storage device 192 includes at least one memory capable of storing desired data. In other words, the storage device 192 includes at least one memory containing desired data. The memory may be implemented by a group of circuits (for example, at least one of an electronic circuit and an electrical circuit). For example, the storage device 192 may store a computer program 1921 executed by the arithmetic unit 191. In this case, the storage device 192 (memory) may be used as the recording medium described above for recording the computer program 1921 executed by the arithmetic unit 191. The storage device 192 may temporarily store data that the arithmetic unit 191 temporarily uses when the arithmetic unit 191 is executing the computer program 1921. The storage device 192 may store data that the robot control device 19 stores long-term. Furthermore, the storage device 192 may include at least one of the following: RAM (Random Access Memory), ROM (Read Only Memory), hard disk drive, magneto-optical disk drive, SSD (Solid State Drive), and disk array device. In other words, the storage device 192 may include a non-temporary recording medium.

[0083] The communication device 193 can communicate with the measuring device 2 via a communication network (not shown). Alternatively, the communication device 193 may communicate with other devices different from the measuring device 2, in addition to or instead of at least one of the measuring devices 2, via a communication network (not shown). In this embodiment, the communication device 193 may receive (i.e., acquire) the measurement results of the measuring device 2 (i.e., information relating to the position of the object to be measured, and the calculation result of the position of the object to be measured) from the measuring device 2.

[0084] The input device 194 is a device capable of receiving information input to the robot control device 19 from outside the robot control device 19. For example, the input device 194 may include an operating device that can be operated by the user of the robot control device 19 (e.g., at least one of a keyboard, mouse, and touch panel). For example, the input device 194 may include a recording medium reader capable of reading information recorded as data on a recording medium that can be attached externally to the robot control device 19.

[0085] Furthermore, the robot control device 19 can receive data from external devices via the communication device 193. In this case, the communication device 193 may function as an input device capable of receiving information from external sources to the robot control device 19.

[0086] The output device 195 is a device capable of outputting information to the outside of the robot control device 19. For example, the output device 195 may output information as an image. That is, the output device 195 may include a display device (so-called display) capable of displaying images. For example, the output device 195 may output information as sound. That is, the output device 195 may include an audio device (so-called speaker) capable of outputting sound. For example, the output device 195 may output information onto paper. That is, the output device 195 may include a printing device (so-called printer) capable of printing desired information onto paper. For example, the output device 195 may output information as data to a recording medium that can be attached externally to the robot control device 19.

[0087] Furthermore, the robot control device 19 can output information as data to external devices via the communication device 193. In this case, the communication device 193 may function as an output device capable of outputting information to the outside of the robot control device 19.

[0088] Next, as shown in Figure 6B, the measurement control device 29 includes an arithmetic unit 291, a storage device 292, and a communication device 293. Furthermore, the measurement control device 29 may also include an input device 294 and an output device 295. However, the measurement control device 29 does not have to include at least one of the input device 294 and the output device 295. The arithmetic unit 291, the storage device 292, the communication device 293, the input device 294, and the output device 295 may be connected via a data bus 296.

[0089] Furthermore, the above-mentioned description of the robot control device 19 can be reused as a description of the measurement control device 29. Specifically, the above-mentioned description of the robot control device 19 can be reused as a description of the measurement control device 29 by replacing the words "robot 1," "robot control device 19," "arithmetic unit 191," "storage device 192," "communication device 193," "input device 194," "output device 195," "data bus 196," "computer program 1921," and "measurement device 2" with the words "measurement device 2," "measurement control device 29," "arithmetic unit 291," "storage device 292," "communication device 293," "input device 294," "output device 295," "data bus 296," "computer program 2921," and "robot 1," respectively. For this reason, in order to eliminate redundant explanations, a detailed explanation of the measurement control device 29 will be omitted. However, the explanation for the communication device 293 is slightly different, as the communication device 293 may transmit (i.e., output) the measurement results of the measurement device 2 (i.e., information regarding the position of the object to be measured, and the calculation result of the position of the object to be measured) to the robot 1.

[0090] (2) Operation of the Robot System SYS Next, the operation of the robot system SYS in this embodiment will be described. As described above, the robot system SYS performs robot control operations to control the robot 1 by generating robot control signals. Furthermore, the robot system SYS performs setting operations to set (in other words, generate or register) the setting information 4 used in the robot control operations. In this case, the robot system SYS may perform robot control operations using the setting information 4 generated in the setting operations. The setting operations and robot control operations will be described in order below.

[0091] (2-1) Setup Operation (2-1-1) Overall Flow of Setup Operation First, we will explain the overall flow of the setup operation with reference to Figure 7. Figure 7 is a flowchart showing the overall flow of the setup operation.

[0092] As shown in Figure 7, the measurement control device 29 generates coordinate calculation information 413 in order to set the setting information 4 (step S11). However, the robot control device 19 may also generate the coordinate calculation information 413 in order to set the setting information 4. The coordinate calculation information 413 is information used to calculate the coordinate value in the other of the measurement coordinate system and the reference coordinate system from the coordinate value in either the measurement coordinate system or the reference coordinate system (for example, a three-dimensional coordinate value, a three-dimensional position, the same applies hereinafter). The coordinate calculation information 413 may also be considered as information showing the relationship between the measurement coordinate system and the reference coordinate system.

[0093] An example of coordinate calculation information 413 is a coordinate transformation matrix used to convert coordinate values ​​in either the measurement coordinate system or the reference coordinate system to coordinate values ​​in the other of the measurement coordinate system or the reference coordinate system. The coordinate transformation matrix may include at least one translation matrix that can translate coordinates and a rotation matrix that can rotate coordinates. For example, the measurement control device 29 may generate a first coordinate transformation matrix used to convert coordinate values ​​in the measurement coordinate system to coordinate values ​​in the reference coordinate system as coordinate calculation information 413. For example, in addition to or instead of the first coordinate transformation matrix, the measurement control device 29 may generate a second coordinate transformation matrix used to convert coordinate values ​​in the reference coordinate system to coordinate values ​​in the measurement coordinate system as coordinate calculation information 413. Typically, one of the first and second coordinate transformation matrices is the inverse of the other of the first and second coordinate transformation matrices. Therefore, generating either the first or second coordinate transformation matrix may be considered equivalent to generating both the first or second coordinate transformation matrix and the other of the first or second coordinate transformation matrices that corresponds to the inverse of either the first or second coordinate transformation matrix.

[0094] The process for generating the coordinate calculation information 413 will be explained in detail later with reference to Figure 9, etc., so a detailed explanation is omitted here.

[0095] Furthermore, as shown in Figure 7, the measurement control device 29 generates registered position information 423 in order to set the setting information 4 (step S12). However, the robot control device 19 may also generate the registered position information 423 in order to set the setting information 4. The registered position information 423 is information relating to the position of the measuring member 16 attached to the object to be measured. In particular, the registered position information 423 is information relating to the position of the measuring member 16 in at least one of the measurement coordinate system and the reference coordinate system.

[0096] The measurement control device 29 may generate registered position information 423 for each object to be measured. For example, the measurement control device 29 may generate first registered position information 423 relating to the position of a measuring member 16 attached to a robot 1, which is an example of an object to be measured. For example, in addition to or instead of the first registered position information 423 relating to the position of the measuring member 16 attached to the robot 1, the measurement control device 29 may generate second registered position information 423 relating to the position of a measuring member 16 attached to a workpiece W, which is an example of an object to be measured. For example, in addition to or instead of the first registered position information 423 relating to the position of the measuring member 16 attached to the robot 1 and the second registered position information 423 relating to the position of the measuring member 16 attached to the workpiece W, the measurement control device 29 may generate third registered position information 423 relating to the position of a measuring member 16 attached to a jig J, which is an example of an object to be measured. In other words, the measurement control device 29 may generate multiple registered position information 423.

[0097] The process for generating the registered location information 423 will be explained in detail later with reference to Figure 13, etc., so a detailed explanation is omitted here.

[0098] Subsequently, the measurement control device 29 generates setting information 4 including the coordinate calculation information 413 generated in step S11 and the registered position information 423 generated in step S12 (step S13). In other words, the measurement control device 29 sets (in other words, registers) the setting information 4 including the coordinate calculation information 413 generated in step S11 and the registered position information 423 generated in step S12 (step S13). In other words, the measurement control device 29 sets (in other words, registers) the coordinate calculation information 413 generated in step S11 as part of the setting information 4, and sets (in other words registers) the registered position information 423 generated in step S12 as another part of the setting information 4 (step S13). However, the robot control device 19 may generate the setting information 4 including the coordinate calculation information 413 generated in step S11 and the registered position information 423 generated in step S12.

[0099] The generated setting information 4 may be stored in the storage device 292 of the measurement control device 29. Alternatively, at least a portion of the generated setting information 4 may be stored in the storage device 192 of the robot control device 19, in addition to or instead of the measurement control device 29.

[0100] An example of setting information 4 is shown in Figure 8. As shown in Figure 8, setting information 4 may include coordinate system information 41 including coordinate calculation information 413 and recipe information 42 including registered position information 423. Note that Figure 8 shows an example in which setting information 4 includes a single recipe information 42 including multiple registered position information 423. However, as will be described later, recipe information 42 is generated for each object to be measured. For this reason, if there are multiple objects to be measured, setting information 4 may include multiple recipe information 42 corresponding to each of the multiple objects to be measured. Alternatively, if there are multiple objects to be measured, setting information 4 may include a single recipe information 42 corresponding to multiple objects to be measured. In other words, setting information 4 may include a single recipe information 42 including multiple registered position information 423 corresponding to each of the multiple objects to be measured. For example, the setting information 4 may include a single recipe information 42 that includes a first registered position information 423 relating to the position of a measuring member 16 attached to a first object to be measured, and a second registered position information 423 relating to the position of a measuring member 16 attached to a second object to be measured, which is different from the first object to be measured. Also, Figure 8 shows an example in which the setting information 4 includes a single coordinate calculation information 413 (i.e., a single coordinate system information). However, as will be detailed later in the third modification, if the measurement control device 29 generates multiple coordinate calculation information 413 in step S11 of Figure 7, the setting information 4 may include multiple coordinate calculation information 413 (i.e., multiple coordinate system information 41, each containing multiple coordinate calculation information 413).

[0101] In the example shown in Figure 8, the setting information 4 includes both the coordinate calculation information 413 and the registered position information 423. However, the setting information 4 may include either the coordinate calculation information 413 or the registered position information 423, but may not include the other. In this case, the measurement control device 29 does not need to perform a process to generate the other of the coordinate calculation information 413 or the registered position information 423 as a setting operation.

[0102] The measurement and control device 29 may generate a plurality of different setting information 4. For example, the measurement and control device 29 may generate a first setting information 4 used when the robot 1 operates in a first environment, and a second setting information 4 used when the robot 1 operates in a second environment different from the first environment. Each of the plurality of setting information 4 may include a plurality of different coordinate system information 41.

[0103] If multiple different setting information 4 is generated, each of the multiple setting information 4 may contain multiple different recipe information 42. Each of the multiple setting information 4 may contain multiple different reference member information 43.

[0104] Alternatively, if multiple different setting information 4 are generated, each of the multiple setting information 4 may include the same coordinate system information 41. In other words, multiple setting information 4 may share the same coordinate system information 41. Each of the multiple setting information 4 may include the same recipe information 42. In other words, multiple setting information 4 may share the same recipe information 42. Each of the multiple setting information 4 may include the same reference member information 43. In other words, multiple setting information 4 may share the same reference member information 43. In this way, when multiple setting information 4 share one coordinate system information 41, one recipe information 42, and / or one reference member information 43, the measurement control device 29 can generate (in other words, set) the multiple setting information 4 together by generating one coordinate system information 41, one recipe information 42, and / or one reference member information 43. For this reason, the measurement control device 29 can reduce the time required to generate multiple setting information 4. Furthermore, if any abnormality occurs due to a single coordinate system information 41, a single recipe information 42, and / or a single reference member information 43 shared by multiple setting information 4, the measurement control device 29 can regenerate (in other words, modify or update) the single coordinate system information 41, a single recipe information 42, and / or a single reference member information 43 shared by multiple setting information 4, thereby regenerating (in other words, resetting, modifying, or updating) all of the multiple setting information 4 at once. For this reason, the measurement control device 29 can reduce the time required to regenerate (in other words, reset, modify, or update) all of the multiple setting information 4.

[0105] Furthermore, in the example shown in Figure 8, the setting information 4 includes coordinate system information 41, which includes coordinate calculation information 413, and recipe information 42, which includes registered position information 423, as well as reference member information 43. The reference member information 43 is information used in the process for generating the coordinate calculation information 413, which will be explained later with reference to Figure 9, etc. Therefore, the reference member information 43 will be explained together with the process for generating the coordinate calculation information 413, which will be explained later with reference to Figure 9, etc.

[0106] The robot system SYS may perform a setting operation to generate setting information 4 used in the robot control operation before performing the robot control operation. In other words, the robot system SYS may perform a setting operation to generate setting information 4 used in the robot control operation during a first period before performing the robot control operation. In this case, the robot system SYS may perform the robot control operation using the setting information 4 generated during the setting operation after performing the setting operation. In other words, the robot system SYS may perform the robot control operation using the setting information 4 generated during the setting operation during a second period after performing the setting operation (i.e., a second period later than the first period described above).

[0107] However, the robot system SYS may perform a setting operation again to generate (in this case, regenerate or update) the setting information 4 used in the robot control operation after performing the robot control operation. In other words, the robot system SYS may perform a setting operation to generate the setting information 4 used in the robot control operation during the third period after the robot control operation (i.e., the third period after the second period described above). In this case, the robot system SYS may perform the robot control operation again using the setting information 4 generated by the setting operation after performing the setting operation. In other words, the robot system SYS may perform the robot control operation during the fourth period after the setting operation (i.e., the fourth period after the third period described above) using the setting information 4 generated by the setting operation.

[0108] (2-1-2) Process for generating coordinate calculation information 413 Next, with reference to Figure 9, the process for generating coordinate calculation information 413 in step S11 of Figure 7 will be described. Figure 9 is a flowchart showing the flow of the process for generating coordinate calculation information 413 in step S11 of Figure 7.

[0109] As shown in Figure 9, the measuring device 2 measures the position of the reference member 17 whose position in the reference coordinate system (in this case, three-dimensional position, the same applies hereafter) is known (step S111). In other words, the measuring device 2 measures the position in the measurement coordinate system of the reference member 17 whose position in the reference coordinate system is known (step S111).

[0110] The reference member 17 is a reflective member that reflects light incident on the reference member 17, similar to the measuring member 16 described above. In particular, the reference member 17 is a retroreflective member that retroreflects light incident on the reference member 17, similar to the measuring member 16 described above. In this case, in order to measure the position of the reference member 17, the measuring device 2 may irradiate the reference member 17 with measuring light ML and receive the reflected light RL from the reference member 17. The reference member 17 may also be called a reflector, a reference measuring member, or a reference member.

[0111] The reference member 17 may differ from the measuring member 16, which is attached to at least one of the robot 1, workpiece W, and jig J, in that the reference member 17 does not need to be attached to the robot 1, workpiece W, or jig J. For example, the reference member 17 may be attached to a support surface SS such as the floor. For another example, the reference member 17 may be attached to a position fixed to the support surface SS such as the floor. If the robot 11 is fixed to the support surface SS, the reference member 17 attached to a position fixed to the support surface SS may be considered to be attached to a position fixed to the robot 1. However, the reference member 17 may be attached to at least one of the robot 1, workpiece W, and jig J, as long as the position of the reference member 17 in the reference coordinate system is known. Alternatively, at least one measuring member 16 attached to at least one of the robot 1, workpiece W, and jig J may be used as the reference member 17. In particular, at least one measuring member 16 attached to at least one of the robot 1, workpiece W, and jig J, and whose position in the reference coordinate system is known, may be used as the reference member 17.

[0112] In this embodiment, the measuring device 2 measures the position of each of the multiple reference members 17. For example, the measuring device 2 may measure the position of each of at least three reference members 17. For example, as shown in Figure 10, which conceptually illustrates a measuring device 2 that measures the positions of three reference members 17, the measuring device 2 may measure the position of a first reference member 17#1 whose three-dimensional position (X1G, Y1G, Z1G) in the reference coordinate system is known, the position of a second reference member 17#2 whose three-dimensional position (X2G, Y2G, Z2G) in the reference coordinate system is known, and the position of a third reference member 17#3 whose three-dimensional position (X3G, Y3G, Z3G) in the reference coordinate system is known. In other words, the measuring device 2 may measure the position of the first reference member 17#1 by irradiating the first reference member 17#1 with measuring light ML and receiving the reflected light RL from the first reference member 17#1, measure the position of the second reference member 17#2 by irradiating the second reference member 17#2 with measuring light ML and receiving the reflected light RL from the second reference member 17#2, and measure the position of the third reference member 17#3 by irradiating the third reference member 17#3 with measuring light ML and receiving the reflected light RL from the third reference member 17#3.

[0113] The operator of the robot system SYS may rotate the housing 22 of the measuring device 2 so that the measuring device 2 can irradiate the reference member 17 with measuring light ML and receive the return light RL from the reference member 17. In other words, the housing 22 of the measuring device 2 may be rotated based on the operator's instructions so that the measuring device 2 can irradiate the reference member 17 with measuring light ML and receive the return light RL from the reference member 17. For example, the operator may rotate the housing 22 of the measuring device 2 so that the measuring device 2 can irradiate the first reference member 17#1 with measuring light ML and receive the return light RL from the first reference member 17#1. As a result, the measuring device 2 may irradiate the first reference member 17#1 with measuring light ML and receive the return light RL from the first reference member 17#1. Subsequently, the operator may rotate the housing 22 of the measuring device 2 so that the measuring device 2 can irradiate the second reference member 17#2 with measuring light ML and receive the reflected light RL from the second reference member 17#2. As a result, the measuring device 2 may irradiate the second reference member 17#2 with measuring light ML and receive the reflected light RL from the second reference member 17#2. Subsequently, the operator may rotate the housing 22 of the measuring device 2 so that the measuring device 2 can irradiate the third reference member 17#3 with measuring light ML and receive the reflected light RL from the third reference member 17#3. As a result, the measuring device 2 may irradiate the third reference member 17#3 with measuring light ML and receive the reflected light RL from the third reference member 17#3.

[0114] Subsequently, the measurement control device 29 calculates the position of the reference member 17 in the measurement coordinate system based on the measurement result of the reference member 17 by the measurement device 2 in step S111 (i.e., the result of receiving the reflected light RL from the reference member 17). For example, the measurement control device 29 may calculate the position of the reference member 17 along the X axis (M) of the measurement coordinate system, the position of the reference member 17 along the Y axis (M) of the measurement coordinate system, and the position of the reference member 17 along the Z axis (M) of the measurement coordinate system. In other words, the measurement control device 29 may calculate the three-dimensional position of the reference member 17 in the measurement coordinate system.

[0115] In parallel with or immediately before or after the processing in step S111, the measurement control device 29 acquires reference member information 43, which is information relating to the reference member 17, from the setting information 4 (step S112). As described above, if the measurement device 2 measures the positions of multiple reference members 17, the setting information 4 may include multiple reference member information 43 indicating information relating to each of the multiple reference members 17. In other words, the setting information 4 may include multiple reference member information 43 corresponding to each of the multiple reference members 17. The measurement control device 29 may acquire multiple reference member information 43 corresponding to each of the multiple reference members 17 from the setting information 4.

[0116] In step S112, the measurement control device 29 specifically obtains reference member information 43 from the setting information 4, which indicates the position of the reference member 17 in the reference coordinate system (i.e., information about a known position) (step S112). In other words, the measurement control device 29 obtains the known position of the reference member 17 in the reference coordinate system (i.e., information about a known position) from the setting information 4 (step S112).

[0117] An example of reference member information 43 included in the setting information 4 is shown in Figure 11. As shown in Figure 11, the reference member information 43 may include a reference member identification number 431 for uniquely identifying the reference member information 43 (i.e., uniquely identifying a reference member 17 corresponding to the reference member information 43). For this reason, reference member information 43 may be provided for each reference member 17. The reference member information 43 may also be information relating to a reference member 17 corresponding to the reference member information 43. The reference member information 43 further includes defined position information 432 indicating the position (e.g., three-dimensional position) of the reference member 17 in the reference coordinate system. The measurement control device 29 may acquire the defined position information 432 as the position (position information) of the reference member 17 in the reference coordinate system.

[0118] The reference member information 43 may further include measurement result information relating to the actual measurement results (calculation results) of the position of the reference member 17. For example, as an example of measurement result information relating to the actual measurement results (calculation results) of the position of the reference member 17, the reference member information 43 may include measurement position information 433 showing the latest measurement results (calculation results) of the position of the reference member 17 in the measurement coordinate system, measurement position information 434 showing the latest measurement results (calculation results) of the position of the reference member 17 in the reference coordinate system, measurement position log information 435 showing past measurement results (calculation results) of the position of the reference member 17 in at least one of the measurement coordinate system and the reference coordinate system, and standard deviation information 436 showing the variability of the measurement results (calculation results) of the position of the reference member 17. In this case, the measurement control device 29 may reflect the actual measurement results (calculation results) of the position of the reference member 17 in the reference member information 43 each time the position of the reference member 17 is actually measured (calculated). In other words, the measurement control device 29 may update the reference member information 43 based on the actual measurement result (calculation result) of the position of the reference member 17 each time the position of the reference member 17 is actually measured (calculated). The measurement position log information 435 may include all of the past measurement results (calculation results) of the position of the reference member 17. Alternatively, the measurement position log information 435 may selectively include some of the past measurement results (calculation results) of the position of the reference member 17. For example, the measurement position log information 435 may selectively include the previous measurement result (calculation result) of the position of the reference member 17.

[0119] The reference member information 43 may further include sequence target information 437 indicating whether the reference member 17 is set as a reference member 17 (i.e., target) to be measured by the measuring device 2 in order to generate coordinate calculation information 413, and measurement status information 438 indicating whether the reference member 17 has actually been measured by the measuring device 2 in order to generate coordinate calculation information 413.

[0120] However, the reference member information 43 does not have to include at least one of the following: reference member identification number 431, measurement position information 433, measurement position information 434, measurement position log information 435, standard deviation information 436, sequence target information 437, and measurement status information 438.

[0121] In Figure 9 again, the measurement control device 29 then generates coordinate calculation information 413 based on the information regarding the known position of the reference member 17 in the reference coordinate system, which was acquired in step S112, and the measurement result (calculation result) of the position of the reference member 17 in the measurement coordinate system in step S111 (step S113). Specifically, the measurement control device 29 generates coordinate calculation information 413 that is used to calculate the position (coordinate value) of the reference member 17 in the other of the reference coordinate system and the measurement coordinate system from the position (coordinate value) of the reference member 17 in either the reference coordinate system or the measurement coordinate system (step S113).

[0122] For example, in step S111, the measurement control device 29 calculates the three-dimensional position (X1M, Y1M, Z1M) as the position of the first reference member 17#1 in the measurement coordinate system, calculates the three-dimensional position (X2M, Y2M, Z2M) as the position of the second reference member 17#2 in the measurement coordinate system, and calculates the three-dimensional position (X3M, Y3M, Z3M) as the position of the third reference member 17#3 in the measurement coordinate system. In this case, the measurement control device 29 may generate coordinate calculation information 413 that is used to (i) calculate the three-dimensional position (X1G, Y1G, Z1G) of the first reference member 17#1 in the reference coordinate system from the three-dimensional position (X1M, Y1M, Z1M) of the first reference member 17#1 in the measurement coordinate system, (ii) calculate the three-dimensional position (X2G, Y2G, Z2G) of the second reference member 17#2 in the reference coordinate system from the three-dimensional position (X2M, Y2M, Z2M) of the second reference member 17#2 in the reference coordinate system, and (iii) calculate the three-dimensional position (X3G, Y3G, Z3G) of the third reference member 17#3 in the reference coordinate system from the three-dimensional position (X3M, Y3M, Z3M) of the third reference member 17#3 in the reference coordinate system. The measurement control device 29 may generate coordinate calculation information 413, which is used to (i) calculate the three-dimensional position (X1M, Y1M, Z1M) of the first reference member 17#1 in the measurement coordinate system from the three-dimensional position (X1G, Y1G, Z1G) of the first reference member 17#1 in the reference coordinate system; (ii) calculate the three-dimensional position (X2M, Y2M, Z2M) of the second reference member 17#2 in the measurement coordinate system from the three-dimensional position (X2G, Y2G, Z2G) of the second reference member 17#2 in the measurement coordinate system; and (iii) calculate the three-dimensional position (X3M, Y3M, Z3M) of the third reference member 17#3 in the measurement coordinate system from the three-dimensional position (X3G, Y3G, Z3G) of the third reference member 17#3 in the measurement coordinate system.

[0123] As an example, the measurement control device 29 may generate information used to (i) convert the three-dimensional position (X1M, Y1M, Z1M) of the first reference member 17#1 in the measurement coordinate system to the three-dimensional position (X1G, Y1G, Z1G) of the first reference member 17#1 in the reference coordinate system, (ii) convert the three-dimensional position (X2M, Y2M, Z2M) of the second reference member 17#2 in the measurement coordinate system to the three-dimensional position (X2G, Y2G, Z2G) of the second reference member 17#2 in the reference coordinate system, and (iii) convert the three-dimensional position (X3M, Y3M, Z3M) of the third reference member 17#3 in the measurement coordinate system to the three-dimensional position (X3G, Y3G, Z3G) of the third reference member 17#3 in the reference coordinate system (for example, the first coordinate transformation matrix described above) as coordinate calculation information 413. The measurement control device 29 may generate information used to (i) convert the three-dimensional position (X1G, Y1G, Z1G) of the first reference member 17#1 in the reference coordinate system to the three-dimensional position (X1M, Y1M, Z1M) of the first reference member 17#1 in the measurement coordinate system, (ii) convert the three-dimensional position (X2G, Y2G, Z2G) of the second reference member 17#2 in the reference coordinate system to the three-dimensional position (X2M, Y2M, Z2M) of the second reference member 17#2 in the measurement coordinate system, and (iii) convert the three-dimensional position (X3G, Y3G, Z3G) of the third reference member 17#3 in the reference coordinate system to the three-dimensional position (X3M, Y3M, Z3M) of the third reference member 17#3 in the measurement coordinate system (for example, the second coordinate transformation matrix described above) as coordinate calculation information 413.

[0124] In order to generate coordinate calculation information 413 (in particular, a coordinate transformation matrix), the measurement control device 29 may perform a fitting process to fit the coordinate axes of one of the reference coordinate system and the measurement coordinate system to the coordinate axes of the other of the reference coordinate system and the measurement coordinate system by translating and / or rotating the coordinate axes of either the reference coordinate system or the measurement coordinate system. As a result, the coordinate calculation information 413 may be generated which includes information for translating the coordinate axes of either the reference coordinate system or the measurement coordinate system (for example, the translation matrix described above) and / or information for rotating the coordinate axes of either the reference coordinate system or the measurement coordinate system (for example, the rotation matrix described above) so as to minimize the amount of deviation (fitting error) between the coordinate axes of either the reference coordinate system or the measurement coordinate system and the coordinate axes of the other of the reference coordinate system and the measurement coordinate system.

[0125] The measurement control device 29 may set (register) the coordinate calculation information 413 generated in step S113 as part of the coordinate system information 41 in the setting information 4. In other words, the measurement control device 29 may set (register) the coordinate system information 41, which includes the coordinate calculation information 413 generated in step S113, in the setting information 4. The measurement control device 29 may set (register) the setting information 4, which includes the coordinate system information 41, which includes the coordinate calculation information 413 generated in step S113.

[0126] An example of coordinate system information 41 is shown in Figure 12. As shown in Figure 12, the coordinate system information 41 includes a coordinate system identification number 411 for uniquely identifying the coordinate system information 41 (i.e., uniquely identifying the combination of a reference coordinate system and a measurement coordinate system corresponding to the coordinate system information 41). For this reason, coordinate system information 41 may be prepared for each combination of a reference coordinate system and a measurement coordinate system. Coordinate system information 41 may also be information about one combination of a reference coordinate system and a measurement coordinate system corresponding to the coordinate system information 41. The coordinate system information 41 may further include name information 412 indicating the name of the coordinate system information 41. Furthermore, the coordinate system information 41 may include first coordinate calculation information 413 used to calculate coordinate values ​​in the reference coordinate system from coordinate values ​​in the measurement coordinate system, and second coordinate calculation information 413 used to calculate coordinate values ​​in the measurement coordinate system from coordinate values ​​in the reference coordinate system. Furthermore, the coordinate system information 41 may include matching error information 414 indicating the matching error described above, and calculation method information 415 indicating the calculation method used to generate the coordinate calculation information 413. However, the coordinate system information 41 does not have to include at least one of the coordinate system identification number 411, name information 412, first and second coordinate calculation information 413, matching error information 414, and calculation method information 415.

[0127] (2-1-3) Process for generating registered location information 423 Next, with reference to Figure 13, the process for generating registered location information 423 in step S12 of Figure 7 will be explained. Figure 13 is a flowchart showing the flow of the process for generating registered location information 423 in step S12 of Figure 7.

[0128] As shown in Figure 13, first, the object to be measured is positioned at a reference position (step S121). For example, workpiece W, which is an example of an object to be measured, may be moved so that it is positioned at a first reference position corresponding to workpiece W. For example, robot 1 (particularly the tip arm member 123), which is an example of an object to be measured, may be moved so that it is positioned at a second reference position corresponding to robot 1. For example, jig J, which is an example of an object to be measured, may be moved so that it is positioned at a third reference position corresponding to jig J, which supports workpiece W. However, if the object to be measured is already positioned at a reference position, the process in step S121 may not be performed.

[0129] An example of a reference position is the initial position of the object to be measured during the period in which the robot 1 performs a predetermined process on the workpiece W by the robot control operation described later. In this case, the measuring device 2 may measure the position of the object to be measured at the timing when the object is located in its initial position during the robot control operation described later.

[0130] Another example of a reference position is the position where the object to be measured should be located during the period in which the robot 1 performs a predetermined process on the workpiece W by the robot control operation described later. For example, when the robot 1 moves the end effector 15 attached to the tip arm member 123 located at the third position toward the workpiece W (or the workpiece W supported by the jig J located at the second position) in order to perform a predetermined process on the workpiece W located at the first position, the first position where the workpiece W is located may be used as the first reference position corresponding to the workpiece W, the third position which is the initial position of the tip arm member 123 may be used as the second reference position corresponding to the robot 1 (especially the tip arm member 123), and the default second position where the jig J is located may be used as the third reference position corresponding to the jig J. In this case, during the robot control operation described later, the measuring device 2 may measure the position of the object to be measured at the timing when the object to be measured is located at the reference position.

[0131] Another example of a reference position is the position where the object to be measured should stop during the period in which the robot 1 performs a predetermined process on the workpiece W by the robot control operation described later. For example, when the robot 1 moves the end effector 15 attached to the tip arm member 123, which is stopped at the sixth position, toward the workpiece W in order to perform a predetermined process on the workpiece W which is stopped at the fourth position (or the workpiece W supported by the jig J which is stopped at the fifth position), the fourth position where the workpiece W stops may be used as the first reference position corresponding to the workpiece W, the sixth position where the tip arm member 123 stops may be used as the second reference position corresponding to the robot 1 (especially the tip arm member 123), and the fifth position where the jig J stops may be used as the third reference position corresponding to the jig J. In this case, in the robot control operation described later, the measuring device 2 may measure the position of the object to be measured at the timing when the object to be measured stops at the reference position.

[0132] Subsequently, the measuring device 2 measures the position of the measuring member 16 attached to the object to be measured (step S122). Specifically, the measuring device 2 may irradiate the measuring member 16 with measuring light ML and receive the reflected light RL from the measuring member 16. Subsequently, the measuring device 2 (in particular, the measuring control device 29) calculates the position of the measuring member 16 based on the result of receiving the reflected light RL from the measuring member 16. For example, the measuring control device 29 may calculate the position of the measuring member 16 in the measurement coordinate system (e.g., three-dimensional position) based on the result of receiving the reflected light RL from the measuring member 16. Specifically, the measuring control device 29 may calculate the position of the measuring member 16 along the X axis (M) of the measurement coordinate system, the position of the measuring member 16 along the Y axis (M) of the measurement coordinate system, and the position of the measuring member 16 along the Z axis (M) of the measurement coordinate system. Furthermore, if the coordinate system information 41 (in particular, the coordinate calculation information 413) described above has already been generated, the measurement control device 29 may calculate the position of the measurement member 16 in the reference coordinate system (for example, the three-dimensional position) based on the calculation result of the position of the measurement member 16 in the measurement coordinate system and the coordinate calculation information 413. Specifically, the measurement control device 29 may calculate the position of the measurement member 16 along the X-axis (G) of the reference coordinate system, the position of the measurement member 16 along the Y-axis (G) of the reference coordinate system, and the position of the measurement member 16 along the Z-axis (G) of the reference coordinate system.

[0133] As described above, if multiple measuring members 16 are attached to the object to be measured, the measuring device 2 may sequentially measure the positions of the multiple measuring members 16 attached to the object to be measured. For example, as described above, if at least three measuring members 16 are attached to the object to be measured, the measuring device 2 may sequentially measure the positions of at least three measuring members 16 attached to the object to be measured.

[0134] Subsequently, the measurement control device 29 determines whether the measurement device 2 has measured the positions of all measurement members 16 attached to the object to be measured (step S123). Specifically, the measurement control device 29 determines whether the measurement device 2 has measured the positions of all measurement members 16 that are attached to the object to be measured and whose positions the measurement device 2 should measure in order to generate registered position information 423 (step S123).

[0135] If, as a result of the determination in step S123, it is determined that the measuring device 2 has not measured the positions of all measuring members 16 attached to the object to be measured (i.e., there are measuring members 16 whose positions the measuring device 2 has not measured) (step S123: No), the measuring device 2 measures the positions of the measuring members 16 that are attached to the object to be measured and whose positions the measuring device 2 has not yet measured (step S122).

[0136] On the other hand, if the determination in step S123 determines that the measuring device 2 has measured the positions of all measuring members 16 attached to the object to be measured (i.e., there are no measuring members 16 whose positions have not been measured by the measuring device 2) (step S123: Yes), the measurement control device 29 determines whether the measuring device 2 has completed the operation of measuring the positions of the measuring members 16 for all objects to be measured (step S124). Specifically, the measurement control device 29 determines whether the measuring device 2 has completed the operation of measuring the positions of the measuring members 16 for all objects to be measured to which the measuring members 16 whose positions the measuring device 2 should measure in order to generate registered position information 423 are attached (step S124).

[0137] If, as a result of the determination in step S124, it is determined that the measuring device 2 has not completed the operation of measuring the position of the measuring member 16 for all objects to be measured (i.e., there are objects to be measured for which the measuring device 2 has not yet performed the operation of measuring the position of the measuring member 16) (step S124: No), then the objects to be measured for which the measuring device 2 has not yet performed the operation of measuring the position of the measuring member 16 are placed at the reference position (step S121), and the measuring device 2 measures the position of the measuring member 16 attached to the objects to which the measuring device 2 has not yet performed the operation of measuring the position of the measuring member 16 (step S122).

[0138] On the other hand, if the determination in step S124 determines that the measuring device 2 has completed the operation of measuring the position of the measuring member 16 for all objects to be measured (i.e., there are no objects to be measured for which the measuring device 2 has not yet performed the operation of measuring the position of the measuring member 16) (step S124: Yes), the measurement control device 29 generates registered position information 423 including the measurement result (calculation result) of the position of the measuring member 16 in step S122 (step S125). In other words, the measurement control device 29 generates registered position information 423 that indicates the position of the measuring member 16 in at least one of the measurement coordinate system and the reference coordinate system, as calculated in step S122 (step S125). If the measuring device 2 has measured the positions of multiple measuring members 16 as described above, the measurement control device 29 may generate multiple registered position information 423 that indicate the positions of each of the multiple measuring members 16 (step S125).

[0139] The measurement control device 29 may set (register) the registered location information 423 generated in step S125 as part of the recipe information 42 in the setting information 4. In other words, the measurement control device 29 may set (register) the recipe information 42 including the registered location information 423 generated in step S125 in the setting information 4. The measurement control device 29 may set (register) the setting information 4 including the recipe information 42 including the registered location information 423 generated in step S125. If the measurement control device 29 generates multiple registered location information 423 as described above, the measurement control device 29 may set the recipe information 42 including the multiple registered location information 423.

[0140] An example of recipe information 42 included in setting information 4 is shown in Figure 14. As shown in Figure 14, recipe information 42 may include a recipe identification number 421 for uniquely identifying recipe information 42 (i.e., uniquely identifying the object to be measured corresponding to recipe information 42). For this reason, recipe information 42 may be prepared for each object to be measured. Recipe information 42 may also be information about a single object to be measured corresponding to recipe information 42. Furthermore, recipe information 42 includes measurement member information 422, which is information about a measurement member 16 attached to the object to be measured. Measurement member information 422 is prepared for each measurement member 16. For this reason, if multiple measurement members 16 are attached to the object to be measured, recipe information 42 includes multiple measurement member information 422 corresponding to each of the multiple measurement members 16. The number of measurement member information 422 included in recipe information 42 is the same as the number of measurement members 16 attached to the object to be measured.

[0141] The measurement member information 422 includes registered position information 423 indicating the position (for example, three-dimensional position) of the measurement member 16.

[0142] The measurement member information 422 may further include measurement result information relating to the actual measurement results (calculation results) of the position of the measurement member 16 during the robot control operation described later. For example, the measurement member information 422 may include, as an example of measurement result information relating to the actual measurement results (calculation results) of the position of the measurement member 16, measurement position information 424 showing the latest measurement result (calculation result) of the position of the measurement member 16 in the measurement coordinate system, measurement position information 425 showing the latest measurement result (calculation result) of the position of the measurement member 16 in the reference coordinate system, measurement position log information 426 showing past measurement results (calculation results) of the position of the measurement member 16 in at least one of the measurement coordinate system and the reference member, and standard deviation information 427 showing the variability of the measurement results (calculation results) of the position of the measurement member 16. In this case, the measurement control device 29 may reflect the actual measurement result (calculation result) of the position of the measurement member 16 in the measurement member information 422 each time the position of the measurement member 16 is actually measured (calculated) by the robot control operation. In other words, the measurement control device 29 may update the measurement member information 422 based on the actual measurement result (calculation result) of the position of the measurement member 16 each time the position of the measurement member 16 is actually measured (calculated). The measurement position log information 426 may include all of the past measurement results (calculation results) of the position of the measurement member 16. Alternatively, the measurement position log information 426 may selectively include some of the past measurement results (calculation results) of the position of the measurement member 16. For example, the measurement position log information 426 may selectively include the previous measurement result (calculation result) of the position of the measurement member 16.

[0143] The measurement member information 422 may further include sequence target information 428 indicating whether the measurement member 16 is set as a measurement member 16 (i.e., target) to be measured by the measurement device 2 in the robot control operation described later, and measurement status information 429 indicating whether the measurement member 16 was actually measured by the measurement device 2 in the robot control operation described later.

[0144] However, the measurement member information 422 does not have to include at least one of the following: measurement position information 424, measurement position information 425, measurement position log information 426, standard deviation information 427, sequence target information 428, and measurement status information 429.

[0145] Next, as an example of an operation for measuring the position of a measuring member 16 attached to an object to be measured, an example of an operation for measuring the position of a measuring member 16 attached to a workpiece W or robot 1 will be further explained with reference to Figures 15A to 15C, Figures 16A to 16C, and Figures 17A to 17B. However, even when measuring the position of a measuring member 16 attached to an object to be measured other than the workpiece W and robot 1, the measuring device 2 may measure the position of the measuring member 16 using the measurement method described below.

[0146] Figure 15A conceptually shows a measuring device 2 for measuring the position of a measuring member 16 attached to a workpiece W, which is an example of an object to be measured. As shown in Figure 15A, the measuring device 2 may measure the position of the measuring member 16 attached to a workpiece W that is positioned at a reference location. That is, the measuring device 2 may irradiate the measuring member 16 attached to the workpiece W at the reference location with measuring light ML and receive the reflected light RL from the measuring member 16 attached to the workpiece W at the reference location. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W based on the result of receiving the reflected light RL from the measuring member 16 attached to the workpiece W.

[0147] If multiple measuring members 16 are attached to the workpiece W, the measuring device 2 may sequentially measure the positions of the multiple measuring members 16 attached to the workpiece W. For example, the measuring device 2 may irradiate the first measuring member 16 attached to the workpiece W with measuring light ML and receive the reflected light RL from the first measuring member 16 attached to the workpiece W. Subsequently, the measuring control device 29 may calculate the position of the first measuring member 16 attached to the workpiece W based on the result of receiving the reflected light RL from the first measuring member 16 attached to the workpiece W. For example, the measuring device 2 may irradiate the second measuring member 16 attached to the workpiece W with measuring light ML and receive the reflected light RL from the second measuring member 16 attached to the workpiece W. Subsequently, the measuring control device 29 may calculate the position of the second measuring member 16 attached to the workpiece W based on the result of receiving the reflected light RL from the second measuring member 16 attached to the workpiece W. For example, the measuring device 2 may irradiate the third measuring member 16 attached to the workpiece W with measuring light ML and receive the reflected light RL from the third measuring member 16 attached to the workpiece W. Subsequently, the measuring control device 29 may calculate the position of the third measuring member 16 attached to the workpiece W based on the result of receiving the reflected light RL from the third measuring member 16 attached to the workpiece W.

[0148] The workpiece W to which the measuring member 16 is attached, measured by the measuring device 2 in order to generate registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W, may be the same workpiece W to which the robot 1 actually performs a predetermined process by the robot control operation described later. In this case, in step S121 of Figure 13, the workpiece W to which the robot 1 actually performs a predetermined process by the robot control operation is placed at a reference position, and then in step S122 of Figure 13, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W. After that, the measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W based on the measurement result of the position of the measuring member 16 attached to the workpiece W. In other words, the measurement control device 29 may generate registered position information 423 regarding the position of the measuring member 16 attached to the workpiece W based on the measurement result of the position of the measuring member 16 attached to the workpiece W.

[0149] Alternatively, the workpiece W to which the measuring member 16, which is measured by the measuring device 2 to generate registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W, is attached may be a different workpiece Wr from the workpiece W to which the robot 1 actually performs a predetermined process by robot control operation. For the purposes of the following explanation, a workpiece Wr different from the workpiece W to which the robot 1 actually performs a predetermined process by robot control operation will be referred to as a registered workpiece Wr because it is used to generate registered position information 423. The registered workpiece Wr has a measuring member 16 attached to it, just like the workpiece W. For the purposes of the following explanation, the measuring member 16 attached to the registered workpiece Wr will be referred to as a measuring member 16r to distinguish it from the measuring member 16 attached to the workpiece W. The measuring member 16r may also be referred to as a registered member. When the registered workpiece Wr is used in this manner, in step S121 of Figure 13, the registered workpiece Wr is placed at a reference position, and then in step S122 of Figure 13, the measuring device 2 may measure the position of the measuring member 16r attached to the registered workpiece Wr. In this case, the measuring control device 29 may use the measurement result of the position of the measuring member 16r attached to the registered workpiece Wr as the measurement result of the position of the measuring member 16 attached to the workpiece W in which the robot 1 actually performs a predetermined process by robot control operation. In other words, the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to a workpiece W different from the registered workpiece W, based on the measurement result of the position of the measuring member 16r attached to the registered workpiece Wr. In other words, the measuring control device 29 may generate information regarding the position of the measuring member 16r attached to the registered workpiece Wr as registered position information 423 regarding the position of the measuring member 16 attached to a workpiece W different from the registered workpiece Wr.

[0150] The registered workpiece Wr may satisfy the condition that its shape is the same as the shape of workpiece W. The registered workpiece Wr may satisfy the condition that its size is the same as the size of workpiece W. The registered workpiece Wr may satisfy the condition that the number of measuring members 16r attached to the registered workpiece W is the same as the number of measuring members 16 attached to workpiece W. The registered workpiece Wr may satisfy the condition that the position of the measuring members 16r attached to the registered workpiece W is the same as the position of the measuring members 16 attached to workpiece W. The registered workpiece Wr may satisfy the condition that the orientation of the measuring members 16r attached to the registered workpiece W is the same as the orientation of the measuring members 16 attached to workpiece W. When these conditions are met, the discrepancy between the measurement result of the position of the measuring member 16r attached to the registered workpiece W at the reference position and the measurement result of the position of the measuring member 16 attached to workpiece W at the reference position becomes smaller compared to when these conditions are not met. Therefore, the measurement control device 29 is more likely to be able to appropriately generate registered position information 423 indicating the position of a measuring member 16 attached to a workpiece W different from the registered workpiece Wr, based on the measurement result of the position of the measuring member 16r attached to the registered workpiece Wr. However, the shape of the registered workpiece Wr may differ from the shape of the workpiece W, and the size of the registered workpiece Wr may differ from the size of the workpiece W.

[0151] Next, Figure 15B conceptually shows a measuring device 2 that measures the position of a measuring member 16 attached to each of several different workpieces W. For example, the robot system SYS may use one or more robots 1 to perform predetermined processing on each of several different workpieces W. For the sake of explanation, an example in which the robot system SYS performs predetermined processing on each of workpieces W#1 and W#2 will be described below, as shown in Figure 15B. In this case, the measuring device 2 may measure the position of a measuring member 16 attached to each of workpieces W#1 and W#2. The measurement control device 29 may generate registered position information 423 for each workpiece W, indicating the position of the measuring member 16 attached to the workpiece W.

[0152] For example, the measuring device 2 may measure the position of a measuring member 16 attached to a workpiece W#1 which is located at a first reference position P11 corresponding to workpiece W#1. Alternatively, the measuring device 2 may measure the position of a measuring member 16r attached to a registered workpiece Wr#1 (i.e., a registered workpiece Wr which corresponds to workpiece W#1 and is a different workpiece from workpiece W#1) which is located at the first reference position P11. In other words, the measuring device 2 may irradiate the measuring member 16 attached to the workpiece W#1 located at the first reference position P11 or the measuring member 16r attached to the registered workpiece Wr#1 located at the first reference position P11 with measuring light ML, and receive the reflected light RL from the measuring member 16 or 16r. Subsequently, the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to workpiece W#1 based on the result of receiving the reflected light RL from the measuring member 16 or 16r.

[0153] Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to workpiece W#2, which is located at a second reference position P12 corresponding to workpiece W#2. Note that the measuring member 16 attached to workpiece W#2 may be different from the measuring member 16 attached to workpiece W#1. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to registered workpiece Wr#2 (i.e., a registered workpiece Wr corresponding to workpiece W#2, but a different workpiece from workpiece W#2), which is located at the second reference position P12. In other words, the measuring device 2 may irradiate the measuring member 16 attached to workpiece W#2, which is located at the second reference position P12, or the measuring member 16r attached to registered workpiece Wr#2, which is located at the second reference position P12, with measuring light ML, and receive the return light RL from the measuring member 16 or 16r. Note that the measuring member 16r attached to registered workpiece Wr#2 may be different from the measuring member 16r attached to registered workpiece Wr#1. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the workpiece W#2 based on the light reception result of the return light RL from the measurement member 16 or 16r.

[0154] The second reference position P12 is different from the first reference position P11. However, the second reference position P12 may be the same as the first reference position P11. If the second reference position P12 is the same as the first reference position P11, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W#1 or the measuring member 16r attached to the registered workpiece Wr#1 after the workpiece W#1 or registered workpiece Wr#1 has been placed at the first reference position P11. Subsequently, after workpiece W#2 or registered workpiece Wr#2 has been newly placed at the first reference position P11 in place of workpiece W#1 or registered workpiece Wr#1, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W#2 or the measuring member 16r attached to the registered workpiece Wr#2.

[0155] Furthermore, registered workpiece Wr#2 may be the same as registered workpiece Wr#1. In other words, a single registered workpiece Wr may be used as both registered workpiece Wr#1 and Wr#2. For example, if at least one of the shape and size of workpiece W#1 is the same as at least one of the shape and size of workpiece W#2, then registered workpiece Wr#2 may be the same as registered workpiece Wr#1. For example, if at least one of the number, position, and orientation of the measuring members 16 attached to workpiece W#1 is the same as at least one of the number, position, and orientation of the measuring members 16 attached to workpiece W#2, then registered workpiece Wr#2 may be the same as registered workpiece Wr#1.

[0156] Alternatively, registered workpiece Wr#2 may be different from registered workpiece Wr#1. In other words, two different registered workpieces Wr may be used as registered workpiece Wr#1 and Wr#2, respectively. For example, if at least one of the shape and size of workpiece W#1 is different from at least one of the shape and size of workpiece W#2, then registered workpiece Wr#2 may be different from registered workpiece Wr#1. For example, if at least one of the number, position, and orientation of the measuring members 16 attached to workpiece W#1 is different from at least one of the number, position, and orientation of the measuring members 16 attached to workpiece W#2, then registered workpiece Wr#2 may be different from registered workpiece Wr#1.

[0157] Next, Figure 15C conceptually shows a measuring device 2 for measuring the position of a measuring member 16 attached to a moving workpiece W. For example, a robot system SYS may use one or more robots 1 to perform a first process as a predetermined process on a workpiece W located at one position, and then perform a second process as a predetermined process on a workpiece W that has moved from one position to another. In this case, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W before the workpiece W moves from one position to another, and measure the position of the measuring member 16 attached to the workpiece W after the workpiece W has moved from one position to another. The measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W for each position of the workpiece W (or for each movement of the workpiece W).

[0158] For example, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W located at the first reference position P21 before the workpiece W moves from the first reference position P21 to the second reference position P22. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to the registered workpiece Wr located at the first reference position P21. In other words, the measuring device 2 may irradiate the measuring member 16 attached to the workpiece W located at the first reference position P21 or the measuring member 16r attached to the registered workpiece Wr located at the first reference position P21 with measuring light ML, and receive the return light RL from the measuring member 16 or 16r. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the workpiece W (for example, the workpiece W located at the first reference position P21) before it moves from the first reference position P21 to the second reference position P22, based on the reception result of the return light RL from the measurement member 16 or 16r.

[0159] Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to the workpiece W located at the second reference position P22 after the workpiece W has moved from the first reference position P21 to the second reference position P22. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to the registered workpiece Wr located at the second reference position P22. In other words, the measuring device 2 may irradiate the measuring member 16 attached to the workpiece W located at the second reference position P22 or the measuring member 16r attached to the registered workpiece Wr located at the second reference position P22 with measuring light ML, and receive the return light RL from the measuring member 16 or 16r. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the workpiece W (for example, the workpiece W located at the second reference position P22) after it has moved from the first reference position P21 to the second reference position P22, based on the reception result of the return light RL from the measurement member 16 or 16r.

[0160] Next, Figure 16A conceptually shows a measuring device 2 for measuring the position of a measuring member 16 attached to a robot 1, which is an example of an object to be measured. As shown in Figure 16A, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 which is positioned at a reference position. That is, the measuring device 2 may irradiate the measuring member 16 attached to the robot 1 which is positioned at a reference position with measuring light ML and receive the reflected light RL from the measuring member 16 attached to the robot 1 which is positioned at a reference position. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 based on the result of receiving the reflected light RL from the measuring member 16 attached to the robot 1.

[0161] If multiple measuring members 16 are attached to the robot 1, the measuring device 2 may sequentially measure the positions of the multiple measuring members 16 attached to the robot 1. For example, the measuring device 2 may irradiate the fourth measuring member 16 attached to the robot 1 with measuring light ML and receive the reflected light RL from the fourth measuring member 16 attached to the robot 1. Subsequently, the measuring control device 29 may calculate the position of the fourth measuring member 16 attached to the robot 1 based on the result of receiving the reflected light RL from the fourth measuring member 16 attached to the robot 1. For example, the measuring device 2 may irradiate the fifth measuring member 16 attached to the robot 1 with measuring light ML and receive the reflected light RL from the fifth measuring member 16 attached to the robot 1. Subsequently, the measuring control device 29 may calculate the position of the fifth measuring member 16 attached to the robot 1 based on the result of receiving the reflected light RL from the fifth measuring member 16 attached to the robot 1. For example, the measuring device 2 may irradiate the sixth measuring member 16 attached to the robot 1 with measuring light ML and receive the reflected light RL from the sixth measuring member 16 attached to the robot 1. Subsequently, the measuring control device 29 may calculate the position of the sixth measuring member 16 attached to the robot 1 based on the result of receiving the reflected light RL from the sixth measuring member 16 attached to the robot 1.

[0162] The robot 1 to which the measuring member 16, measured by the measuring device 2 to generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1, is attached may be the same robot 1 that actually performs a predetermined process on the workpiece W by robot control operation. In this case, in step S121 of Figure 13, the robot 1 that actually performs a predetermined process on the workpiece W by robot control operation may be positioned at a reference position, and then in step S122 of Figure 13, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1. After that, the measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 based on the measurement result of the position of the measuring member 16 attached to the robot 1. In other words, the measurement control device 29 may generate registered position information 423 regarding the position of the measuring member 16 attached to the robot 1 based on the measurement result of the position of the measuring member 16 attached to the robot 1.

[0163] Alternatively, the robot 1 to which the measuring member 16, which is measured by the measuring device 2 in order to generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1, is attached may be a different robot 1r from the robot 1 that actually performs predetermined processing on the workpiece W through robot control operations. For the purposes of the following explanation, the robot 1r that is different from the robot 1 that actually performs predetermined processing on the workpiece W through robot control operations will be referred to as the registered robot 1r because it is used to generate registered position information 423. The registered robot 1r is attached to the measuring member 16, just like the robot 1. For the purposes of the following explanation, the measuring member 16 attached to the registered robot 1r will be referred to as the measuring member 16r, similar to the measuring member 16r attached to the registered robot 1r, to distinguish it from the measuring member 16 attached to the robot 1. When the registered robot 1r is used in this manner, in step S121 of Figure 13, the registered robot 1r is positioned at a reference position, and then in step S122 of Figure 13, the measuring device 2 may measure the position of the measuring member 16r attached to the registered robot 1r. In this case, the measuring control device 29 may use the measurement result of the position of the measuring member 16r attached to the registered robot 1r as the measurement result of the position of the measuring member 16 attached to the robot 1 that actually performs a predetermined process on the workpiece W by robot control operation. In other words, the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to a robot 1 different from the registered robot 1r, based on the measurement result of the position of the measuring member 16r attached to the registered robot 1r. In other words, the measuring control device 29 may generate information regarding the position of the measuring member 16r attached to the registered robot 1r as registered position information 423 indicating the position of the measuring member 16 attached to a robot 1 different from the registered robot 1r.

[0164] The registered robot 1r may be a robot that satisfies the condition that the shape of the registered robot 1r is the same as the shape of robot 1. The registered robot 1r may be a robot that satisfies the condition that the size of the registered robot 1r is the same as the size of robot 1. The registered robot 1r may be a robot that satisfies the condition that the number of measuring members 16r attached to the registered robot 1r is the same as the number of measuring members 16 attached to robot 1. The registered robot 1r may be a robot that satisfies the condition that the position of the measuring member 16r attached to the registered robot 1r is the same as the position of the measuring member 16 attached to robot 1. The registered robot 1r may be a robot that satisfies the condition that the posture of the measuring member 16r attached to the registered robot 1r is the same as the posture of the measuring member 16 attached to robot 1. When these conditions are met, the discrepancy between the measurement result of the position of the measuring member 16r attached to the registered robot 1r at the reference position and the measurement result of the position of the measuring member 16 attached to robot 1 at the reference position will be smaller compared to when these conditions are not met. Therefore, the measurement control device 29 is more likely to be able to appropriately generate registered position information 423 indicating the position of a measurement member 16 attached to a robot 1 different from the registered robot 1r, based on the measurement result of the position of the measurement member 16r attached to the registered robot 1r. However, the shape of the registered robot r may differ from the shape of the robot 1, and the size of the registered robot 1r may differ from the size of the robot 1.

[0165] Next, Figure 16B conceptually shows a measuring device 2 that measures the position of measuring members 16 attached to each of several different robots 1. For example, the robot system SYS may use several robots 1 to perform a predetermined process on one or more workpieces W. For the sake of explanation, an example will be described below in which the robot system SYS uses robot 1#1 to perform a third predetermined process on the workpiece W, and uses robot 1#2 to perform a fourth predetermined process on the workpiece W, as shown in Figure 16B. In this case, the measuring device 2 may measure the position of measuring members 16 attached to robots 1#1 and 1#2, respectively. The measurement control device 29 may generate registered position information 423 for each robot 1 indicating the position of the measuring member 16 attached to robot 1.

[0166] For example, the measuring device 2 may measure the position of a measuring member 16 attached to robot 1#1, which is located at a first reference position P31 corresponding to robot 1#1. Alternatively, the measuring device 2 may measure the position of a measuring member 16r attached to a registered robot 1r#1 (i.e., a registered robot 1r corresponding to robot 1#1, but a different robot from robot 1#1) located at the first reference position P31. In other words, the measuring device 2 may irradiate the measuring member 16 attached to robot 1#1 located at the first reference position P31 or the measuring member 16r attached to registered robot 1r#1 located at the first reference position P31 with measuring light ML, and receive the reflected light RL from the measuring member 16 or 16r. Subsequently, the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#1 based on the result of receiving the reflected light RL from the measuring member 16 or 16r.

[0167] Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#2, which is located at a second reference position P32 corresponding to robot 1#2. Note that the measuring member 16 attached to robot 1#2 may be different from the measuring member 16 attached to robot 1#1. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to registered robot 1r#2 (i.e., registered robot 1r, which corresponds to robot 1#2, and is a different robot from robot 1#2), which is located at the second reference position P32. In other words, the measuring device 2 may irradiate the measuring member 16 attached to robot 1#1, which is located at the second reference position P32, or the measuring member 16r attached to registered robot 1r#1, which is located at the second reference position P32, with measuring light ML, and receive the return light RL from the measuring member 16 or 16r. Note that the measuring member 16r attached to registered robot 1r#2 may be different from the measuring member 16r attached to registered robot 1r#1. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the robot 1#2 based on the light reception result of the return light RL from the measurement member 16 or 16r.

[0168] The second reference position P32 is different from the first reference position P31. However, the second reference position P32 may be the same as the first reference position P31. If the second reference position P32 is the same as the first reference position P31, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#1 after robot 1#1 is positioned at the first reference position P31. Subsequently, after robot 1#2 is newly positioned at the first reference position P31 in place of robot 1#1, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#2.

[0169] Furthermore, registered robot 1r#2 may be the same as registered robot 1r#1. In other words, a single registered robot 1r may be used as both registered robot 1r#1 and 1r#2. For example, if at least one of the shape and size of robot 1#1 is the same as at least one of the shape and size of robot 1#2, then registered robot 1r#2 may be the same as registered robot 1r#1. For example, if at least one of the number, position, and orientation of the measuring members 16 attached to robot 1#1 is the same as at least one of the number, position, and orientation of the measuring members 16 attached to robot 1#2, then registered robot 1r#2 may be the same as registered robot 1r#1.

[0170] Alternatively, registered robot 1r#2 may be different from registered robot 1r#1. In other words, two different registered robots 1r may be used as registered robots 1r#1 and 1r#2, respectively. For example, if at least one of the shape and size of robot 1r#1 is different from at least one of the shape and size of robot 1r#2, then registered robot 1r#2 may be different from registered robot 1r#1. For example, if at least one of the number, position, and orientation of the measuring members 16 attached to robot 1r#1 is different from at least one of the number, position, and orientation of the measuring members 16 attached to robot 1r#2, then registered robot 1r#2 may be different from registered robot 1r#1.

[0171] Next, Figure 16C conceptually shows a measuring device 2 for measuring the position of a measuring member 16 attached to a moving robot 1. For example, the robot system SYS may use the robot 1 located at one position to perform a fifth process as a predetermined process on one workpiece W, and then use the robot 1, which has moved from one position to another position, to perform a sixth process as a predetermined process on one workpiece W or another workpiece W different from the first workpiece W. In this case, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 before the robot 1 moves from one position to another position, and measure the position of the measuring member 16 attached to the robot 1 after the robot 1 moves from one position to another position. The measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 for each position of the robot 1 (for example, the position of the tip arm member 123). The measurement control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 for each movement of the robot 1 (for example, each movement of the tip arm member 123).

[0172] For example, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 located at the first reference position P41 before the robot 1 moves from the first reference position P41 to the second reference position P42. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to the registered robot 1r located at the first reference position P41. In other words, the measuring device 2 may irradiate the measuring member 16 attached to the robot 1#1 located at the first reference position P41 or the measuring member 16r attached to the registered robot 1r#1 located at the first reference position P41 with measuring light ML, and receive the return light RL from the measuring member 16 or 16r. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the robot 1 (for example, the robot 1 positioned at the first reference position P41) before it moves from the first reference position P41 to the second reference position P42, based on the reception result of the return light RL from the measurement member 16 or 16r.

[0173] Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 located at the second reference position P42 after the robot 1 has moved from the first reference position P41 to the second reference position P42. Alternatively, the measuring device 2 may measure the position of the measuring member 16r attached to the registered robot 1r located at the second reference position P42. In other words, the measuring device 2 may irradiate the measuring member 16 attached to the robot 1#1 located at the second reference position P42 or the measuring member 16r attached to the registered robot 1r#1 located at the second reference position P42 with measuring light ML and receive the return light RL from the measuring member 16 or 16r. Subsequently, the measurement control device 29 may generate registered position information 423 indicating the position of the measurement member 16 attached to the robot 1 (for example, the robot 1 located at the second reference position P42) after it has moved from the first reference position P41 to the second reference position P42, based on the reception result of the return light RL from the measurement member 16 or 16r.

[0174] The state of robot 1 before moving from the first reference position P41 to the second reference position P42 (for example, robot 1 positioned at the first reference position P41) may be set to the first state. The state of robot 1 after moving from the first reference position P41 to the second reference position P42 (for example, robot 1 positioned at the second reference position P42) may be set to a second state different from the first state. In other words, the state of robot 1 may be switched between the first state and the second state. To put it another way, the state of robot 1 may be switched between multiple different states. In this case, the measurement control device 29 may be considered to generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1 for each state of robot 1. However, the first state may be the same as the second state. The state of robot 1 does not have to be switched.

[0175] The first state may include a state in which a first end effector 15#1, used to perform process #1 as a predetermined process, is attached to the robot 1, as shown in Figure 17A. On the other hand, the second state may include a state in which a second end effector 15#2, used to perform process #2 as a predetermined process, is attached to the robot 1, as shown in Figure 17B. In other words, the state of the robot 1 may be switched by changing the end effector 15 attached to the robot 1. In this case, the measurement control device 29 may be considered to generate registered position information 423 indicating the position of the measurement member 16 attached to the robot 1 for each type of end effector 15 attached to the robot 1.

[0176] Furthermore, the state of robot 1 may be switched between multiple different states, regardless of the movement of robot 1. For example, the state of robot 1 may be switched by changing the end effector 15 attached to robot 1, regardless of the movement of robot 1. In this case, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1 in the first state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1 in the first state based on the measurement result of the position of the measuring member 16 attached to robot 1 in the first state. Alternatively, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1 in the second state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1 in the second state based on the measurement result of the position of the measuring member 16 attached to robot 1 in the second state.

[0177] Furthermore, as shown in Figure 16B, even when the measuring device 2 measures the position of a measuring member 16 attached to each of several different robots 1, the state of at least one of the several different robots 1 may be switched between several different states. For example, in Figure 16B, the state of robot 1#1 may be switched between a third state in which a third end effector 15 used to perform process #3 as a predetermined process is attached to robot 1#1, and a fourth state in which a fourth end effector 15 used to perform process #4 as a predetermined process is attached to robot 1#1. For example, in Figure 16B, the state of robot 1#2 may be switched between a fifth state in which a fifth end effector 15 used to perform process #5 as a predetermined process is attached to robot 1#2, and a sixth state in which a sixth end effector 15 used to perform process #6 as a predetermined process is attached to robot 1#2. In this case, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#1 in the third state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#1 in the third state based on the measurement result of the position of the measuring member 16 attached to robot 1#1 in the third state. Alternatively, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#1 in the fourth state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#1 in the fourth state based on the measurement result of the position of the measuring member 16 attached to robot 1#1 in the fourth state. Alternatively, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#2 in the fifth state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#2 in the fifth state based on the measurement result of the position of the measuring member 16 attached to robot 1#2 in the fifth state.Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1#2 in the sixth state, and the measuring control device 29 may generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1#2 in the sixth state based on the measurement result of the position of the measuring member 16 attached to the robot 1#2 in the sixth state.

[0178] The measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 in order to generate registered position information 423 for at least a portion of the period during which robot teaching is being performed. Note that robot teaching may include operations that teach the robot 1 information regarding a predetermined process to be performed by the robot 1. In this case, if the measuring device 2 measures the position of the measuring member 16 in order to generate registered position information 423 for at least a portion of the period during which robot teaching is being performed, at least a portion of the robot teaching period can be used as the period during which the measuring device 2 measures the position of the measuring member 16 in order to generate registered position information 423. Therefore, it becomes unnecessary to specifically reserve a period for the measuring device 2 to measure the position of the measuring member 16 in order to generate registered position information 423, separate from the period during which robot teaching is being performed. This makes it possible to shorten the time required to complete operations including robot teaching and setting operations (i.e., preliminary operations performed before robot control operations).

[0179] Furthermore, as shown in Figure 16B, when the robot system SYS uses multiple robots 1 to perform a predetermined process, the measuring device 2 may measure the position of the measuring member 16 attached to each robot 1 in order to generate registered position information 423 during at least a portion of the period in which robot teaching is being performed for each robot 1. For example, Figure 16B shows an example in which the robot system SYS uses robot 1#1 to perform a third process as a predetermined process on a workpiece W, and uses robot 1#2 to perform a fourth process as a predetermined process on the workpiece W. In this case, the measuring device 2 may measure the position of the measuring member 16 attached to robot 1#1 in order to generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#1 in order to generate registered position information 423 indicating the position of the measuring member 16 attached to robot 1#1 during at least a portion of the period in which robot teaching is being performed, which includes an operation to teach robot 1#1 information about the third process to be performed by robot 1#1. Furthermore, the measuring device 2 may measure the position of the measuring member 16 attached to the robot 1#2 in order to generate registered position information 423 indicating the position of the measuring member 16 attached to the robot 1#2, at least for a portion of the period during which robot teaching is being performed, which includes an operation to teach the robot 1#2 information related to the fourth process performed by the robot 1#2.

[0180] (2-2) Robot Control Operation Next, the robot control operation will be explained with reference to Figure 18. Figure 18 is a flowchart showing the flow of the robot control operation.

[0181] As shown in Figure 18, the robot control device 19 outputs designation information to the measuring device 2, specifying registered position information 423 that indicates the position of the measuring member 16 to be measured by the measuring device 2 (step S21). For example, the robot control device 19 may output a recipe identification number 421 as designation information to the measuring device 2 for identifying the recipe information 422 that contains the registered position information 423 that indicates the position of the measuring member 16 to be measured by the measuring device 2 (step S21). The measuring device 2 (in particular, the measurement control device 29) acquires the designation information output by the robot control device 19 (step S21). Note that the processing in step S21 may be included in the position calculation processing described above.

[0182] The measuring member 16 to be measured by the measuring device 2 may include a measuring member 16 attached to a robot 1 that performs a predetermined process on a workpiece W by robot control operation. In this case, the robot control device 19 may output to the measuring device 2 designation information that specifies registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 that performs a predetermined process on the workpiece W by robot control operation. In other words, the robot control device 19 may output to the measuring device 2 designation information that specifies recipe information 42 corresponding to the robot 1 that performs a predetermined process on the workpiece W by robot control operation.

[0183] The measuring member 16 to be measured by the measuring device 2 may include a measuring member 16 attached to a workpiece W on which the robot 1 performs a predetermined process by robot control operation. In this case, the robot control device 19 may output to the measuring device 2 designation information that specifies registered position information 423 indicating the position of the measuring member 16 attached to the workpiece W on which the robot 1 performs a predetermined process by robot control operation. In other words, the robot control device 19 may output to the measuring device 2 designation information that specifies recipe information 42 corresponding to the workpiece W on which the robot 1 performs a predetermined process by robot control operation.

[0184] The measuring member 16 to be measured by the measuring device 2 may include a measuring member 16 attached to a jig J that supports a workpiece W on which the robot 1 performs a predetermined process by robot control operation. In this case, the robot control device 19 may output to the measuring device 2 designation information that specifies registered position information 423 indicating the position of the measuring member 16 attached to the jig J that supports the workpiece W on which the robot 1 performs a predetermined process by robot control operation. In other words, the robot control device 19 may output to the measuring device 2 designation information that specifies recipe information 42 corresponding to the jig J that supports the workpiece W on which the robot 1 performs a predetermined process by robot control operation.

[0185] Subsequently, the measuring device 2 measures the position of the measuring member 16 corresponding to the registered position information 423, based on the registered position information 423 specified by the designated information acquired in step S21 (step S22). However, before the measuring device 2 measures the position of the measuring member 16, the object to be measured to which the measuring member 16 is attached is placed at the above-mentioned reference position. Note that the processing in step S22 may be included in the position calculation processing described above.

[0186] Specifically, the measuring device 2 emits measurement light ML based on the registered position information 423 specified by the designated information acquired in step S21. For example, the measuring device 2 may emit measurement light ML toward the position indicated by the registered position information 423 specified by the designated information acquired in step S21. For example, if the registered position information 423 indicates the position of the measuring member 16 in the reference coordinate system, the measuring device 2 may calculate the position of the measuring member 16 in the measurement coordinate system from the position of the measuring member 16 in the reference coordinate system indicated by the registered position information 423, based on the coordinate system information 41 (in particular, the coordinate calculation information 413). After that, the measuring device 2 may emit measurement light ML toward the position of the measuring member 16 in the measurement coordinate system. For example, if the registered position information 423 indicates the position of the measuring member 16 in the measurement coordinate system, the measuring device 2 may emit measurement light ML toward the position of the measuring member 16 in the measurement coordinate system indicated by the registered position information 423.

[0187] Here, since the object to be measured to which the measuring member 16 is attached is placed in a reference position before the measuring device 2 measures the position of the measuring member 16, the measuring member 16 corresponding to the registered position information 423 should exist at the position indicated by the registered position information 423 specified by the designated information. For this reason, the measuring device 2 can irradiate the measuring member 16 corresponding to the registered position information 423 with the measuring light ML by emitting the measuring light ML toward the position indicated by the registered position information 423 specified by the designated information acquired in step S21. As a result, the measuring device 2 can receive the reflected light RL from the measuring member 16 corresponding to the registered position information 423.

[0188] However, for some reason, there is a possibility that the measuring member 16 corresponding to the registered position information 423 does not exist at the position indicated by the registered position information 423. In this case, the measuring device 2 may not be able to irradiate the measuring member 16 corresponding to the registered position information 423 with the measuring light ML simply by emitting the measuring light ML toward the position indicated by the designated information obtained in step S21. On the other hand, even if the measuring member 16 does not exist at the position indicated by the registered position information 423, there is a high possibility that the measuring member 16 exists in the vicinity of the position indicated by the registered position information 423. Therefore, in step S22, the measuring device 2 may scan a desired scanning area including the position indicated by the registered position information 423 with the measuring light ML. In other words, emitting the measuring light ML toward the position indicated by the registered position information 423 in step S22 may include scanning a desired scanning area including the position indicated by the registered position information 423 with the measuring light ML. As an example, the measuring device 2 may set the position indicated by the registered position information 423 as the starting point of the scanning path by which the measuring light ML moves to scan the scanning area, and then scan the desired scanning area with the measuring light ML. As another example, the measuring device 2 may set the position indicated by the registered position information 423 as an intermediate point (in other words, a waypoint) of the scanning path by which the measuring light ML moves to scan the scanning area, and then scan the desired scanning area with the measuring light ML. As yet another example, the measuring device 2 may set the position indicated by the registered position information 423 as the end point of the scanning path by which the measuring light ML moves to scan the scanning area, and then scan the desired scanning area with the measuring light ML. As a result, even if the measuring member 16 is not present at the position indicated by the registered position information 423, the measuring device 2 is more likely to be able to irradiate the measuring member 16 corresponding to the registered position information 423 with the measuring light ML. As a result, the measuring device 2 is more likely to be able to receive the return light RL from the measuring member 16 corresponding to the registered position information 423.

[0189] Subsequently, the measurement control device 29 calculates the position of the measurement member 16 in the measurement coordinate system based on the reception result of the reflected light RL from the measurement member 16. For example, the measurement control device 29 may calculate the position of the measurement member 16 along the X axis (M) of the measurement coordinate system, the position of the measurement member 16 along the Y axis (M) of the measurement coordinate system, and the position of the measurement member 16 along the Z axis (M) of the measurement coordinate system. In other words, the measurement control device 29 may calculate the three-dimensional position of the measurement member 16 in the measurement coordinate system.

[0190] If the recipe information 42 includes multiple measurement member information 422 (in particular, multiple registered position information 423), the measurement device 2 may measure multiple measurement members 16 corresponding to each of the multiple measurement member information 422. In other words, the measurement device 2 may sequentially measure the positions of multiple measurement members 16 based on the multiple registered position information 423 included in the recipe information 422 specified by the designated information acquired in step S21. For example, the measurement device 2 may sequentially irradiate multiple measurement members 16 corresponding to each of the multiple registered position information 423 with measurement light ML. As a result, the measurement device 2 may sequentially receive reflected light RL from multiple measurement members 16 corresponding to each of the multiple registered position information 423. Subsequently, the measurement control device 29 may calculate the positions of each of the multiple measurement members 16 in the measurement coordinate system based on the results of receiving reflected light RL from the multiple measurement members 16.

[0191] When the position of the measuring member 16 is calculated, as described above, the measurement control device 29 may update the recipe information 42 (in particular, the measuring member information 422) based on the calculation result (measurement result) of the position of the measuring member 16. Specifically, the measurement control device 29 may (i) update at least one of the measurement position information 424 and 425 so that at least one of them includes the latest calculation result (measurement result) of the position of the measuring member 16, and (ii) update the measurement position log information 426 so that the measurement position log information 426 newly includes information that was previously included in the measurement position information 424 and 425. In other words, the measurement control device 29 may save the measurement position log information 426 that includes the calculation result (measurement result) of the position of the measuring member 16. Furthermore, if necessary, the measurement control device 29 may update the standard deviation information 427 that shows the variation in the measurement result (calculation result) of the position of the measuring member 16.

[0192] The measurement control device 29 may calculate the amount of variation in the measurement result of the position of the measurement member 16 based on the measurement log information 426 showing the measurement result of the position of the measurement member 16 and the standard deviation information 427 showing the variation in the measurement result of the position of the measurement member 16. If the amount of variation in the measurement result of the position of the measurement member 16 exceeds a predetermined allowable upper limit, the measurement control device 29 may determine that there is an abnormality in at least one of the measurement device 2 that measures the measurement member 16 and the measurement member 16 measured by the measurement device 2. In this case, the measurement control device 29 may output a warning to notify the operator that there is an abnormality in at least one of the measurement device 2 and the measurement member 16. If there is an abnormality in at least one of the measurement device 2 and the measurement member 16, the robot system SYS may regenerate at least a part of the setting information 4 (in particular, the information part of the setting information 4 related to the abnormality) by performing the setting operation again (in other words, it may be reset, modified or updated).

[0193] However, in addition to or instead of the measurement control device 29, the robot control device 19 may calculate the position of the measurement member 16 in the measurement coordinate system based on the reception result of the reflected light RL from the measurement member 16. In this case, the measurement control device 29 may use the communication device 293 to output (transmit) information regarding the reception result of the reflected light RL from the measurement member 16 to the robot 1. The robot control device 19 may also use the communication device 193 to acquire (receive) information regarding the reception result of the reflected light RL from the measurement member 16 from the measurement device 2. Subsequently, the robot control device 19 may calculate the position of the measurement member 16 based on the information regarding the reception result of the reflected light RL from the measurement member 16.

[0194] Furthermore, if the measuring device 2 measures the positions of multiple measuring members 16, in step S21, the robot control device 19 may output designation information to the measuring device 2, specifying a plurality of registered position information 423 that indicate the positions of the plurality of measuring members 16 to be measured by the measuring device 2. Subsequently, the measuring device 2 may sequentially measure the positions of the plurality of measuring members 16 corresponding to the plurality of registered position information 423, based on the plurality of registered position information 423 specified by the designation information acquired in step S21. In this case, the number of times the robot control device 19 and the measuring control device 29 communicate in step S21 can be reduced.

[0195] Alternatively, if the measuring device 2 measures the positions of multiple measuring members 16, the measuring device 2 may alternately repeat the operation of acquiring designation information that specifies a registered position information 423 indicating the position of one measuring member 16, and the operation of measuring the position of one measuring member 16, until the measurement of the positions of multiple measuring members 16 is completed. In this case, the measuring device 2 can adjust the timing of measuring each measuring member 16.

[0196] Subsequently, the measurement control device 29 calculates the position of the object to be measured to which the measurement member 16 is attached, based on the measurement result (calculation result) of the position of the measurement member 16 (step S23). For example, the measurement control device 29 may calculate the position of the object to be measured to which the multiple measurement members 16 are attached, based on the calculation results of the positions of multiple (for example, at least three) measurement members 16 attached to the object to be measured. Note that the processing in step S23 may be included in the position calculation processing described above.

[0197] As a first example, the measurement control device 29 calculates the positions of multiple measurement members 16 in the measurement coordinate system. In this case, the measurement control device 29 may calculate the position of the object to be measured in the measurement coordinate system from the calculation results of the positions of the multiple measurement members 16 in the measurement coordinate system. Subsequently, the measurement control device 29 may calculate the position of the object to be measured in the reference coordinate system based on the coordinate system information 41 (in particular, coordinate calculation information 413) included in the setting information 4 and the calculation results of the position of the object to be measured in the measurement coordinate system. Specifically, the measurement control device 29 may calculate the position of the object to be measured in the reference coordinate system by converting the calculation results of the position of the object to be measured in the measurement coordinate system to coordinate values ​​in the reference coordinate system based on the coordinate system information 41 (in particular, coordinate calculation information 413).

[0198] As a second example, the measurement control device 29 may calculate the positions of the multiple measurement members 16 in the reference coordinate system based on the coordinate system information 41 (particularly the coordinate calculation information 413) included in the setting information 4 and the calculation results of the positions of the multiple measurement members 16 in the measurement coordinate system. Specifically, the measurement control device 29 may calculate the positions of the multiple measurement members 16 in the reference coordinate system by converting the calculation results of the positions of the multiple measurement members 16 in the measurement coordinate system into coordinate values ​​in the reference coordinate system based on the coordinate system information 41 (particularly the coordinate calculation information 413). Subsequently, the measurement control device 29 may calculate the position of the object to be measured in the reference coordinate system based on the calculation results of the positions of the multiple measurement members 16 in the reference coordinate system.

[0199] Furthermore, the measurement control device 29 may, if necessary, calculate the position of the object to be measured in the measurement coordinate system based on the coordinate system information 41 (in particular, the coordinate calculation information 413) included in the setting information 4 and the calculation result of the position of the object to be measured in the reference coordinate system.

[0200] However, in addition to or instead of the measurement control device 29, the robot control device 19 may calculate the position of the object to be measured to which the measurement member 16 is attached, based on the measurement result (calculation result) of the position of the measurement member 16 in step S22 (step S23). In this case, the measurement control device 29 may use the communication device 293 to output (transmit) the measurement result (calculation result) of the position of the measurement member 16 in step S22 to the robot 1. The robot control device 19 may also use the communication device 193 to acquire (receive) the measurement result (calculation result) of the position of the measurement member 16 in step S22 from the measurement device 2. Alternatively, if the robot control device 19 calculates the position of the measurement member 16 as described above, the measurement control device 29 does not need to output (transmit) the measurement result (calculation result) of the position of the measurement member 16 to the robot 1. After that, the robot control device 19 may calculate the position of the object to be measured to which the measurement member 16 is attached, based on the measurement result (calculation result) of the position of the measurement member 16 in step S22.

[0201] Here, as an example of an operation for measuring the position of an object to be measured, we will further explain an example of an operation for measuring the positions of the workpiece W and the robot 1.

[0202] First, as a first example, we will describe an example in which, in step S21, the measurement control device 29 acquires first designation information that specifies a plurality of registered position information 423 indicating the positions of a plurality of measuring members 16 attached to the workpiece W#1 shown in Figure 15B. In this case, the measurement device 2 may sequentially emit measurement light ML toward the plurality of positions indicated by the plurality of registered position information 423 specified by the first designation information. As a result, the measurement device 2 can sequentially irradiate the plurality of measuring members 16 attached to the workpiece W#1 with measurement light ML and sequentially receive the reflected light RL from the plurality of measuring members 16 attached to the workpiece W#1. Subsequently, the measurement control device 29 may calculate the positions of the plurality of measuring members 16 attached to the workpiece W#1 based on the results of receiving the reflected light RL from the plurality of measuring members 16 attached to the workpiece W#1. Subsequently, the measurement control device 29 may calculate the position of the workpiece W#1 in the reference coordinate system based on the calculation results of the positions of the plurality of measuring members 16 attached to the workpiece W#1 and the coordinate calculation information 413.

[0203] Next, as a second example, we will describe an example in which, in step S21, the measurement control device 29 acquires second designation information that specifies a plurality of registered position information 423 indicating the positions of a plurality of measuring members 16 attached to the workpiece W#2 shown in Figure 15B. In this case, the measurement device 2 may sequentially emit measurement light ML toward the plurality of positions indicated by the plurality of registered position information 423 specified by the second designation information. As a result, the measurement device 2 can sequentially irradiate the plurality of measuring members 16 attached to the workpiece W#2 with measurement light ML and sequentially receive the reflected light RL from the plurality of measuring members 16 attached to the workpiece W#2. Subsequently, the measurement control device 29 may calculate the positions of the plurality of measuring members 16 attached to the workpiece W#2 based on the results of receiving the reflected light RL from the plurality of measuring members 16 attached to the workpiece W#2. Subsequently, the measurement control device 29 may calculate the position of the workpiece W#2 in the reference coordinate system based on the calculation results of the positions of the plurality of measuring members 16 attached to the workpiece W#2 and the coordinate calculation information 413.

[0204] Next, as a third example, we will describe an example in which, in step S21, the measurement control device 29 acquires third designation information that specifies a plurality of registered position information 423 indicating the positions of a plurality of measurement members 16 attached to the robot 1#1 shown in Figure 16B. In this case, the measurement device 2 may sequentially emit measurement light ML toward the plurality of positions indicated by the plurality of registered position information 423 specified by the third designation information. As a result, the measurement device 2 can sequentially irradiate the plurality of measurement members 16 attached to the robot 1#1 with measurement light ML and sequentially receive the reflected light RL from the plurality of measurement members 16 attached to the robot 1#1. Subsequently, the measurement control device 29 may calculate the positions of the plurality of measurement members 16 attached to the robot 1#1 based on the results of receiving the reflected light RL from the plurality of measurement members 16 attached to the robot 1#1. Subsequently, the measurement control device 29 may calculate the position of the robot 1#1 in the reference coordinate system based on the calculation results of the positions of the plurality of measurement members 16 attached to the robot 1#1 and the coordinate calculation information 413.

[0205] Next, as a fourth example, we will describe an example in which, in step S21, the measurement control device 29 acquires a fourth designation information that specifies a plurality of registered position information 423 indicating the positions of a plurality of measurement members 16 attached to the robot 1#2 shown in Figure 16B. In this case, the measurement device 2 may sequentially emit measurement light ML toward the plurality of positions indicated by the plurality of registered position information 423 specified by the fourth designation information. As a result, the measurement device 2 can sequentially irradiate the plurality of measurement members 16 attached to the robot 1#2 with measurement light ML and sequentially receive the reflected light RL from the plurality of measurement members 16 attached to the robot 1#2. Subsequently, the measurement control device 29 may calculate the positions of the plurality of measurement members 16 attached to the robot 1#2 based on the results of receiving the reflected light RL from the plurality of measurement members 16 attached to the robot 1#2. Subsequently, the measurement control device 29 may calculate the position of the robot 1#2 in the reference coordinate system based on the calculation results of the positions of the plurality of measurement members 16 attached to the robot 1#2 and the coordinate calculation information 413.

[0206] Subsequently, the robot control device 19 controls the robot 1 based on the calculation result of the position of the object to be measured (for example, robot 1, workpiece W, and at least one of the fixture J) in step S23 (step S24). For example, the robot control device 19 may control the robot 1 so that the robot 1 located at the position calculated by the measurement control device 29 performs a predetermined process on the workpiece W. For example, the robot control device 19 may control the robot 1 so that the robot 1 performs a predetermined process on the workpiece W located at the position calculated by the measurement control device 29. For example, the robot control device 19 may control the robot 1 so that the robot 1 performs a predetermined process on the workpiece W supported by the fixture J located at the position calculated by the measurement control device 29. Note that the processing in step S24 may be included in the signal generation process described above.

[0207] (3) Technical effects of the robot system SYS As described above, in this embodiment, the measuring device 2 emits measuring light ML based on the setting information 4 (in particular, registered position information 423) that is set in advance by the setting operation, in order to measure the position of the object to be measured, which includes the robot 1, the workpiece W, and the jig J, during robot control operation. As a result, the measuring device 2 can measure the position of the measuring member 16 located at the position indicated by the registered position information 423, and calculate the position of the object to be measured based on the measurement result of the position of the measuring member 16.

[0208] In the comparative example, if the setting information 4 is not pre-set by the setting operation (in particular, the registered position information 423 is not pre-generated), the measuring device 2 needs to determine the position of the measuring member 16 (i.e., the position where the measuring light ML should be irradiated to measure the position of the object to be measured) after starting the robot control operation and before emitting the measuring light ML. For example, the camera takes an image of the object to be measured, and the measuring device 2 needs to determine the position of the measuring member 16 based on the image generated by the camera taking an image of the object to be measured. Therefore, in the comparative example, compared to this embodiment, extra time is required for the camera to take an image of the object to be measured and for the camera to determine the position of the measuring member 16 based on the image generated. However, in this embodiment, since the position of the measuring member 16 is pre-set (registered) as setting information 4 (in particular, the registered position information 423), these extra times are unnecessary. As a result, the measuring device 2 can enjoy the effect of shortening the measurement time required to measure the position of the object to be measured.

[0209] In addition, in this embodiment, the registered position information 423 is generated based on the actual measurement result of the position of the measuring member 16. In other words, the registered position information 423 is generated by actually measuring the position of the measuring member 16. For this reason, the registered position information 423 indicates the position of the measuring member 16 with relatively high accuracy. On the other hand, the accuracy of the position of the measuring member 16 identified based on the image generated by the camera in the comparative example described above is not necessarily high. This is because the accuracy of the position of the measuring member 16 identified based on the image generated by the camera varies depending on the performance of the camera and the performance of the calculation for calculating the position of the measuring member 16 from the image. Therefore, in the comparative example, even if the measuring device 2 emits measurement light ML towards the position of the measuring member 16 identified based on the image generated by the camera, the measuring device 2 may not be able to properly irradiate the measuring member 16 with measurement light ML. In this case, the measuring device 2 needs to scan the position of the measuring member 16 and its surroundings with measurement light ML and identify the position of the measuring member 16 with high accuracy based on the intensity of the reflected light RL. For example, when the measuring member 16 is irradiated with measuring light ML, the measuring member 16 reflects the measuring light ML (resulting in the reflected light RL returning to the measuring device 2). Therefore, the measuring device 2 needs to identify the position where the measuring light ML was irradiated at the moment the intensity of the reflected light RL is maximum as the position of the measuring member 16. For this reason, in the comparative example, compared to this embodiment, the measuring device 2 needs extra time to scan the position of the measuring member 16 and its surroundings with the measuring light ML based on the image generated by the camera. However, in this embodiment, the measuring device 2 can irradiate the measuring member 16 with measuring light ML based on setting information 4 (in particular, registered position information 423) that indicates the position of the measuring member 16 with relatively high accuracy. Therefore, this extra time is unnecessary. As a result, the measuring device 2 can enjoy the effect of shortening the measurement time required to measure the position of the object to be measured.

[0210] However, even in this embodiment, the measuring device 2 may scan the position of the measuring member 16 and its surroundings indicated by the registered position information 423 with the measuring light ML and determine the position of the measuring member 16 with higher accuracy based on the intensity of the reflected light RL. Even in this case, in this embodiment, the time required for the camera to image the object to be measured and the time required to determine the position of the measuring member 16 based on the image generated by the camera remain unnecessary. Therefore, the effect of shortening the measurement time required to measure the position of the object to be measured remains unchanged.

[0211] Such effects become particularly pronounced when the position of the object being measured is calculated multiple times. An example of a scenario in which the position of the object being measured is calculated multiple times is when robot 1 sequentially holds (in other words, picks up) multiple workpieces W contained in a container. For example, robot 1 may (i) move the end effector 15 to its initial position, then (ii) hold the first workpiece W contained in the container, then (iii) place the held first workpiece W on another object, then (iv) return the end effector 15 to its initial position, then (ii) hold the second workpiece W contained in the container, and then (iii) place the held second workpiece W on another object. In this case, the measuring device 2 may measure the position of robot 1 each time robot 1 moves to its initial position. That is, the measuring device 2 may calculate the position of robot 1 in order to hold the first workpiece W, and then recalculate the position of robot 1 in order to hold the second workpiece W. Thus, the measuring device 2 may calculate the position of one object to be measured in the first period, and then recalculate the position of the same object to be measured in a second period different from the first period. In this case, in the comparative example, (i) in the first period, the camera takes an image of one object to be measured, and the measuring device 2 identifies the position of the measuring member 16 attached to one object to be measured based on the image generated by the camera, and (ii) in the second period, the camera takes an image of the same object to be measured, and the measuring device 2 identifies the position of the measuring member 16 attached to one object to be measured based on the image generated by the camera. Furthermore, if necessary, (i) during the first period, the measuring device 2 scans the position of the measuring member 16 and its surroundings, which are identified based on the image generated by the camera, with the measuring light ML, and identifies the position of the measuring member 16 with high accuracy based on the intensity of the reflected light RL; and (ii) during the second period, the measuring device 2 also scans the position of the measuring member 16 and its surroundings, which are identified based on the image generated by the camera, with the measuring light ML, and identifies the position of the measuring member 16 with high accuracy based on the intensity of the reflected light RL. For this reason, in the comparative example, compared to this embodiment, the above-mentioned extra time is required each time the position of a measurement target is measured.However, in this embodiment, (i) in the first period, the measuring device 2 measures the position of one object to be measured based on the registered position information 423, and (ii) in the second period, the measuring device 2 can measure the position of one object to be measured based on the same registered position information 423. In other words, the measuring device 2 can reuse the registered position information 423 corresponding to one object to be measured in order to measure the position of one object multiple times. For this reason, in this embodiment, the extra time required in the comparative example is eliminated. As a result, the measuring device 2 can enjoy the effect of shortening the measurement time required to measure the position of one object to be measured multiple times (in other words, to measure repeatedly).

[0212] Furthermore, in this embodiment, the setting information 4, which includes the registered position information 423, also includes coordinate calculation information 413. Therefore, the measuring device 2 does not need to generate new coordinate calculation information 413 when calculating the position of the object to be measured. As a result, compared to the case where it is necessary to generate new coordinate calculation information 413 to calculate the position of the object to be measured, the measuring device 2 can enjoy the effect of shortening the measurement time required to calculate the position of the object to be measured.

[0213] (4) Modified Examples Next, modified examples of the robot system SYS will be described. In the following description, components that have already been described will be given the same reference numerals, and their detailed explanations will be omitted. Furthermore, in the following description, processes that have already been described in each flowchart will be given the same step numbers, and their detailed explanations will be omitted.

[0214] (4-1) First Modification In the first modification, when the measuring device 2 generates registered position information 423 indicating the position of the measuring member 16 attached to the robot 1 in step S12 of Figure 7, it may also generate positional relationship information 442 in addition to the registered position information 423. The positional relationship information 442 includes information regarding the positional relationship between the measuring member 16 attached to the robot 1 and the reference point BP of the robot 1. If a plurality of measuring members 16 are attached to the robot 1, the positional relationship information 442 includes information regarding the positional relationship between the plurality of measuring members 16 attached to the robot 1 and the reference point BP of the robot 1. For the convenience of explanation, in the following description, an example will be described in which the positional relationship information 442 includes information regarding the positional relationship between the plurality of measuring members 16 attached to the robot 1 and the reference point BP of the robot 1.

[0215] The following describes the process for generating registered location information 423 and location relationship information 442 in the first modified example, with reference to Figure 19. Figure 19 is a flowchart showing the flow of the process for generating registered location information 423 and location relationship information 442 in the first modified example.

[0216] As shown in Figure 19, in the first modified example as well, the object to be measured is placed in a reference position (step S121), and the measuring device 2 measures the position of the measuring member 16 attached to the object to be measured (steps S122 to S124).

[0217] In the first modified example, when the object to be measured is the robot 1, the measuring device 2 acquires information regarding the position of the reference point BP of the robot 1, which is positioned at a reference location (step S126a). An example of the reference point BP is a predetermined part of the robot 1. An example of a predetermined part of the robot 1 is a predetermined part of the end effector 15 provided on the robot 1. An example of the reference point BP is the tool center point of the end effector 15. However, the reference point BP of the robot 1 is not limited to these examples. For example, if the end effector 15 includes a tool that can be machined (e.g., a drill), the tip position of the tool (e.g., the tip position of the drill) may be used as the tool center point.

[0218] The measuring device 2 may acquire information from the robot 1 regarding the position of the robot's reference point BP. For example, the position of the reference point BP changes with the movement of the robot arm 12. Furthermore, the movement of the robot arm 12 is controlled by the robot control device 19. Therefore, the position of the reference point BP is known information to the robot control device 19. For this reason, the robot control device 19 may acquire information regarding the position of the robot's reference point BP using the communication device 193.

[0219] Information regarding the reference point BP of robot 1 may include information regarding the position of the reference point BP of robot 1 in a reference coordinate system. Information regarding the position of the reference point BP of robot 1 in a reference coordinate system may include at least one of the following: the position of the reference point BP along the X-axis (G) of the reference coordinate system, the position of the reference point BP along the Y-axis (G) of the reference coordinate system, the position of the reference point BP along the Z-axis (G) of the reference coordinate system, the position of the reference point BP in the rotational direction around the X-axis (G) of the reference coordinate system, the position of the reference point BP in the rotational direction around the Y-axis (G) of the reference coordinate system, and the position of the reference point BP in the rotational direction around the Z-axis (G) of the reference coordinate system. However, information regarding the reference point BP of robot 1 may include information regarding the position of the reference point BP of robot 1 in a coordinate system different from the reference coordinate system.

[0220] Subsequently, if the determination in step S124 determines that the measuring device 2 has completed the operation of measuring the position of the measuring member 16 for all objects to be measured (i.e., there are no objects to be measured for which the measuring device 2 has not yet performed the operation of measuring the position of the measuring member 16) (step S124: Yes), then, in the first modified example as well, the measurement control device 29 generates registered position information 423 including the measurement result (calculation result) of the position of the measuring member 16 in step S122 (step S125).

[0221] In the first modified example, the measurement control device 29 further generates positional relationship information 442 based on the measurement result (calculation result) of the position of the measurement member 16 in step S122 and the information regarding the position of the reference point BP of the robot 1 acquired in step S126a (step S127a).

[0222] The positional relationship information 442 can be any information, as long as it directly or indirectly indicates the positional relationship between the multiple measuring members 16 attached to the robot 1 and the reference point BP of the robot 1. As a first example, as shown in Figure 20, the positional relationship information 442 may include first positional relationship information for calculating the position of the reference point BP of the robot 1 from the positions of the multiple measuring members 16 attached to the robot 1. An example of the first positional relationship information is a transformation matrix for converting the positions of the multiple measuring members 16 attached to the robot 1 to the positions of the reference point BP of the robot 1. As a second example, as shown in Figure 20, the positional relationship information 442 may include second positional relationship information for calculating the positions of the multiple measuring members 16 attached to the robot 1 from the positions of the reference point BP of the robot 1. An example of the second positional relationship information is a transformation matrix for converting the positions of the reference point BP of the robot 1 to the positions of the multiple measuring members 16 attached to the robot 1.

[0223] The measurement result (calculation result) of the position of the measuring member 16 in step S122 indicates the position of the measuring member 16 in the measurement coordinate system. On the other hand, the information regarding the position of the robot 1's reference point BP acquired in step S126a indicates the position of the robot 1's reference point BP in the reference coordinate system. In this case, the measurement control device 29 may use the coordinate calculation information 413 to calculate the position of the measuring member 16 in the reference coordinate system from the position of the measuring member 16 in the measurement coordinate system, and generate positional relationship information 442 regarding the positional relationship between the measuring member 16 in the reference coordinate system and the robot 1's reference point BP. Alternatively, the measurement control device 29 may use the coordinate calculation information 413 to calculate the position of the reference point BP in the measurement coordinate system from the position of the reference point BP in the reference coordinate system, and generate positional relationship information 442 regarding the positional relationship between the measuring member 16 in the measurement coordinate system and the robot 1's reference point BP.

[0224] If a predetermined part of the end effector 15 (for example, the tool center point of the end effector 15) is used as the reference point BP, the position of the reference point BP may change when the end effector 15 attached to the robot 1 is replaced. For this reason, the measuring device 2 may generate positional relationship information 442 for each end effector 15. For example, the measuring device 2 may generate first positional relationship information 442 regarding the positional relationship between the reference point BP of the robot 1 to which the first end effector 15 is attached and a plurality of measuring members 16 attached to the robot 1, and generate second positional relationship information 442 regarding the positional relationship between the reference point BP of the robot 1 to which a second end effector 15 different from the first end effector 15 is attached and a plurality of measuring members 16 attached to the robot 1.

[0225] The measurement control device 29 may set (register) the positional relationship information 442 generated in step S127a as part of the recipe information 42 in the setting information 4. In other words, the measurement control device 29 may set (register) the recipe information 42 including the positional relationship information 442 generated in step S127a in the setting information 4. The measurement control device 29 may set (register) the setting information 4 including the recipe information 42 including the positional relationship information 442 generated in step S127a. If the measurement control device 29 generates multiple positional relationship information 442 as described above, the measurement control device 29 may set the recipe information 42 including the multiple positional relationship information 442.

[0226] An example of recipe information 42 including positional relationship information 442 is shown in Figure 21. As shown in Figure 21, in addition to the recipe identification number 421 and measurement member information 422 described above, the recipe information 42 may also include reference point information 44, which is information about the reference point BP. Reference point information 44 may be provided for each reference point BP. Therefore, as described above, if the position of the reference point BP changes when the end effector 15 is replaced (i.e., multiple reference point BPs are set), the recipe information 42 may include multiple reference point information 44 corresponding to each of the multiple reference point BPs.

[0227] The reference point information 44 may include registered position information 441 indicating the position of the reference point BP acquired in step S126a of Figure 19 when generating the position relationship information 442, and the position relationship information 442 generated in step S127a of Figure 19. Furthermore, the reference point information 44 may include measured position information 443 indicating the position of the reference point BP actually acquired (measured or calculated) during robot control operation. Furthermore, if a process for fitting two different coordinate systems is performed when generating the position relationship information 442 (for example, a transformation matrix), the reference point information 44 may include matching error information 444, similar to the coordinate system information 41. However, the reference point information 44 does not have to include at least one of the registered position information 441, measured position information 443, and matching error information 444.

[0228] If reference point information 44 (particularly positional relationship information 442) is generated by the setting operation, the measuring device 2 may, in robot control operation, measure the position of the measuring member 16 attached to the robot 1 based on the positional relationship information 442, in addition to or instead of the registered position information 423. Specifically, in step S22 of Figure 18, the measuring device 2 may acquire information regarding the position of the robot 1's reference point BP in order to measure the position of the measuring member 16 attached to the robot 1. For example, similar to the process in step S126a of Figure 19, the measuring device 2 may acquire information regarding the position of the robot 1's reference point BP from the robot 1. Subsequently, the measuring device 2 (measurement control device 29) may calculate the positions of multiple measuring members 16 attached to the robot 1 based on the acquired information regarding the position of the reference point BP and the positional relationship information 442. For example, the measuring device 2 (measurement control device 29) may calculate the positions of multiple measuring members 16 attached to the robot 1 from the acquired information regarding the position of the reference point BP based on the positional relationship information 442. Subsequently, the measuring device 2 may sequentially emit measurement light ML toward the multiple calculated positions. As a result, the measuring device 2 can sequentially irradiate the multiple measurement members 16 attached to the robot 1 with measurement light ML and sequentially receive the reflected light RL from the multiple measurement members 16 attached to the robot 1.

[0229] The measuring device 2 may measure the position of the measuring member 16 attached to the robot 1 based on the positional relationship information 442, even when the robot 1 is not located in the reference position. Specifically, when the robot 1 is not located in the reference position, the measuring member 16 attached to the robot 1 may not be located in the position indicated by the registered position information 423. As a result, even if the measuring device 2 emits measuring light ML toward the position indicated by the registered position information 423 as described above, the measuring device 2 may not be able to irradiate the measuring member 16 attached to the robot 1 with measuring light ML. Even in this case, the measuring device 2 can irradiate the measuring member 16 attached to the robot 1 with measuring light ML based on the positional relationship information 442. However, the measuring device 2 may also measure the position of the measuring member 16 attached to the robot 1 based on the positional relationship information 442, even when the robot 1 is located in the reference position.

[0230] (4-2) Second Modification In the second modification, after the setting information 4 is set by the setting operation (in particular, the registered location information 423 is generated), the measuring device 2 may perform an evaluation operation to evaluate the reliability of the registered location information 423.

[0231] As part of the evaluation operation, the measuring device 2 may perform a measurement operation to actually measure the position of the measuring member 16 whose position is indicated by the registered position information 423, as shown in Figure 22. Note that the measurement operation to actually measure the position of the measuring member 16 whose position is indicated by the registered position information 423 may be the same as the operation to measure the position of the measuring member 16 in the robot control operation (i.e., the operation to measure the position of the measuring member 16 in step S22 of Figure 18). For this reason, a detailed explanation of the measurement operation included in the evaluation operation will be omitted.

[0232] The measuring device 2 may, as at least part of its evaluation operation, perform a deviation calculation operation to calculate the difference (i.e., a positional deviation, or difference) between the measurement result of the position of the measuring member 16 obtained by the measurement operation and the position of the measuring member 16 indicated by the registered position information 423. The deviation calculation operation may be considered equivalent to a comparison operation that compares the measurement result of the position of the measuring member 16 obtained by the measurement operation with the position of the measuring member 16 indicated by the registered position information 423.

[0233] The measuring device 2 may, as part of its evaluation operation, perform a warning output operation if the positional deviation of the measuring member 16 calculated by the positional deviation calculation operation is greater than a predetermined first tolerance. This is because, when the positional deviation of the measuring member 16 is greater than a predetermined first tolerance, the position of the measuring member 16 indicated by the registered position information 423 differs significantly from the actual position of the measuring member 16. Therefore, the position of the measuring member 16 indicated by the registered position information 423 may be unreliable. In other words, the registered position information 423 may be unreliable. For this reason, the measuring device 2 may output a warning to warn that the registered position information 423 is unreliable. For example, the measuring device 2 may output a warning using the output device 295. As a result, the operator of the robot system SYS can recognize that the registered position information 423 is unreliable. As a result, the operator can consider the need to regenerate the registered position information 423.

[0234] Alternatively, if the positional deviation of the measuring member 16 calculated by the positional deviation calculation operation is greater than a predetermined first allowable amount, the measuring device 2 may, in addition to or instead of outputting a warning, regenerate the registered position information 423 corresponding to the measuring member 16. In other words, the measuring device 2 may, in addition to or instead of outputting a warning, regenerate the registered position information 423 which may have low reliability.

[0235] Furthermore, the measuring device 2 may store the measurement result of the position of the measuring member 16 due to the measurement operation in the measurement position log information 426 included in the recipe information 42. The measuring device 2 may also store the calculation result of the positional displacement of the measuring member 16 due to the displacement calculation operation in the measurement position log information 426 included in the recipe information 42. In other words, the measuring device 2 may store information regarding the positional displacement of the measuring member 16 due to the displacement calculation operation in the measurement position log information 426 included in the recipe information 42. The measuring device 2 may also store information regarding the history of warning outputs due to the warning output operation in the measurement position log information 426 included in the recipe information 42. In other words, the measuring device 2 may store log information of evaluation operations in the measurement position log information 426. As a result, the operator can check the results of the evaluation operation by referring to the measurement position log information 426.

[0236] The measuring device 2 may perform an evaluation operation after the setting information 4 has been set by the setting operation, but before the robot control operation is started using the setting information 4. In this case, the possibility of situations occurring where the measuring device 2 is unable to irradiate the measuring member 16 with measuring light ML based on unreliable registered position information 423 can be reduced.

[0237] The measuring device 2 may perform the evaluation operation after the setting information 4 has been set by the setting operation and after the robot control operation has started using the setting information 4. In this case, it is possible to reduce the possibility that, after the robot control operation has started under circumstances where the reliability of the registered position information 423 included in the setting information 4 is low, the measuring device 2 may be unable to irradiate the measuring member 16 with measuring light ML based on the unreliable registered position information 423.

[0238] The measuring device 2 may perform the evaluation operation after the setting information 4 has been set by the setting operation and after the robot control operation performed using the setting information 4 has been completed. In this case, the possibility of a situation occurring after the next robot control operation starts in which the measuring device 2 is unable to irradiate the measuring member 16 with measuring light ML based on unreliable registered position information 423 can be reduced.

[0239] The measuring device 2 may perform evaluation operations periodically or regularly. The measuring device 2 may perform evaluation operations randomly. The measuring device 2 may perform evaluation operations each time the number of times the robot system SYS has performed robot control operations reaches a predetermined number. The measuring device 2 may perform evaluation operations in accordance with the operator's instructions. The measuring device 2 may perform evaluation operations when conditions that lead to a decrease in the reliability of the registered position information 423 are met. An example of a condition that leads to a decrease in the reliability of the registered position information 423 is when the measuring member 16, which was attached to the object to be measured for purposes such as cleaning, is removed and then reattached.

[0240] Alternatively, even if no evaluation operation is performed, the measuring device 2 may periodically or regularly perform the operation to generate registered position information 423. Even if no evaluation operation is performed, the measuring device 2 may randomly perform the operation to generate registered position information 423. Even if no evaluation operation is performed, the measuring device 2 may perform the operation to generate registered position information 423 each time the number of times the robot system SYS has performed robot control operations reaches a predetermined number. Even if no evaluation operation is performed, the measuring device 2 may perform the operation to generate registered position information 423 in accordance with the operator's instructions. The measuring device 2 may perform the operation to generate registered position information 423 when conditions that lead to a decrease in the reliability of the registered position information 423 are met.

[0241] As described above, the position of the measuring member 16 calculated during the robot control operation is stored in the measurement position log information 426. In this case, the measuring device 2 may perform evaluation operations (particularly the displacement calculation operation and the warning output operation) using the measurement results of the position of the measuring member 16 stored in the measurement position log information 426, without performing a measurement operation as part of the evaluation operation. In this case, the measuring device 2 does not need to perform a separate measurement operation to measure the position of the measuring member 16 for the evaluation operation, separate from the operation to measure the position of the measuring member 16 during the robot control operation. In other words, the measuring device 2 can perform the operation to measure the position of the measuring member 16 during the robot control operation as a measurement operation to measure the position of the measuring member 16 for the evaluation operation. As a result, the measuring device 2 does not need to interrupt the robot control operation to perform evaluation operations. Therefore, the throughput of the robot system SYS is improved.

[0242] Furthermore, the measuring device 2 may measure the position of the reference member 17 used to generate the coordinate calculation information 413 in order to evaluate the reliability of the measuring device 2 itself. In this case, if the deviation (i.e., positional deviation, difference) between the measured position of the reference member 17 and the known position of the reference member 17 is greater than a predetermined second allowable amount, the measuring device 2 may determine that the reliability of the measuring device 2 is low. This is because, since the position of the reference member 17 is known, if the measured position of the reference member 17 differs significantly from the known position (i.e., a highly reliable position), there is a possibility that some kind of abnormality has occurred in the measuring device 2. In this case as well, the measuring device 2 may output a warning. As a result, the operator of the robot system SYS can recognize that the reliability of the measuring device 2 is low (for example, that there is an abnormality in the measuring device 2).

[0243] The measuring device 2 may measure the reference member 17 at regular intervals to evaluate the reliability of the measuring device 2 itself. In other words, the measuring device 2 may periodically measure the reference member 17 to evaluate the reliability of the measuring device 2 itself. The measuring device 2 may measure the reference member 17 according to a fixed schedule to evaluate the reliability of the measuring device 2 itself. In other words, the measuring device 2 may periodically measure the reference member 17 to evaluate the reliability of the measuring device 2 itself. The measuring device 2 may measure the reference member 17 each time the number of times the robot system SYS has performed robot control operations reaches a predetermined number of times to evaluate the reliability of the measuring device 2 itself. The measuring device 2 may measure the reference member 17 in accordance with the operator's instructions to evaluate the reliability of the measuring device 2 itself. The measuring device 2 may measure the reference member 17 when conditions that lead to a decrease in the reliability of the measuring device 2 are met to evaluate the reliability of the measuring device 2 itself.

[0244] The measuring device 2 may measure the position of robot 1 at a reference position during a first period in which coordinate calculation information 413 is generated, and may also measure the position of robot 1 at a reference position during a second period after the robot control operation has started, in order to calibrate the position of robot 1. In this case, if the difference (i.e., positional deviation, difference) between the measurement result of robot 1's position in the first period and the position of robot 1 in the second period is greater than a predetermined third allowable amount, the measuring device 2 may determine that the position of robot 1 has shifted unintentionally. In this case, robot 1 (robot control device 19) may calibrate the position of robot 1 based on the measurement result of the measuring device 2. For example, the robot control device 19 may calibrate the position of robot 1 so that the difference between the measurement result of robot 1's position in the first period and the position of robot 1 in the second period is less than the third allowable amount (and in some cases, they match). The calibration of the position of robot 1 may include the calibration of the movement of robot 1. The calibration of the position of robot 1 may include the calibration of the movement of robot arm 12.

[0245] Furthermore, in the first modified example, as explained in the second modified example, the measuring device 2 may also perform an evaluation operation.

[0246] (4-3) Third Modification In the third modification, as shown in Figure 23, multiple measurement coordinate systems may be defined. Specifically, when multiple measurement coordinate systems are defined, the robot system SYS may be equipped with multiple measuring devices 2, as shown in Figure 23. In the example shown in Figure 23, the robot system SYS is equipped with measuring device 2#1 and measuring device 2#2. In this case, multiple measurement coordinate systems may be defined, each based on one of the multiple measuring devices 2. For example, in the example shown in Figure 23, a first measurement coordinate system based on measuring device 2#1 (for example, a coordinate system defined by the X axis (M1), Y axis (M1), and Z axis (M1)) and a second measurement coordinate system based on measuring device 2#2 (for example, a coordinate system defined by the X axis (M2), Y axis (M2), and Z axis (M2)) may be defined.

[0247] When multiple measurement coordinate systems are defined in this manner, the robot system SYS may generate multiple coordinate system information 41 corresponding to each of the multiple measurement coordinate systems as coordinate system information 41 generated for each combination of measurement coordinate system and reference coordinate system. Specifically, each measuring device 2 may generate coordinate system information 41 containing information about the measurement coordinate system of each measuring device as coordinate system information 41 generated for each combination of measurement coordinate system and reference coordinate system.

[0248] As a first example, the first measuring device 2#1 may generate first coordinate system information 41 corresponding to the first measurement coordinate system. That is, the first measuring device 2#1 may generate first coordinate system information 41 corresponding to a combination of the first measurement coordinate system and a reference coordinate system. The first coordinate system information 41 may include, as coordinate calculation information 413, first coordinate calculation information 413 used to calculate coordinate values ​​in the other of the first measurement coordinate system and the reference coordinate system from coordinate values ​​in either the first measurement coordinate system or the reference coordinate system. In this case, in order to generate the first coordinate calculation information 413, the first measuring device 2#1 measures the position of the reference member 17 in the first measuring coordinate system (step S111 in Figure 9), and the measuring control device 29 may generate the first coordinate calculation information 413 based on the known position of the reference member 17 in the reference coordinate system and the measurement result of the position of the reference member 17 in the first measuring coordinate system (step S113 in Figure 9).

[0249] Furthermore, when robot control operations are performed using the first measuring device 2#1, the first measuring device 2#1 may measure the position of the measuring member 16 in the first measuring coordinate system using the first coordinate system information 41 (first coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the reference coordinate system, the first measuring device 2#1 may calculate the position of the measuring member 16 in the first measuring coordinate system from the position of the measuring member 16 in the reference coordinate system indicated by the registered position information 423, based on the first coordinate calculation information 413. After that, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the first measuring coordinate system, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measuring coordinate system indicated by the registered position information 423. As a result, the first measuring device 2#1 calculates the position of the measuring member 16 in the first measuring coordinate system. Subsequently, the first measuring device 2#1 may calculate the position of the object to be measured in the reference coordinate system or the first measuring coordinate system based on the calculation result of the position of the measuring member 16 in the first measuring coordinate system and the first coordinate calculation information 413.

[0250] As a second example, the second measuring device 2#2 may generate second coordinate system information 41 corresponding to the second measuring coordinate system. That is, the second measuring device 2#2 may generate second coordinate system information 41 corresponding to a combination of the second measuring coordinate system and a reference coordinate system. The second coordinate system information 41 may include, as coordinate calculation information 413, second coordinate calculation information 413 used to calculate coordinate values ​​in the other of the second measuring coordinate system and the reference coordinate system from coordinate values ​​in either the second measuring coordinate system or the reference coordinate system. In this case, in order to generate the second coordinate calculation information 413, the second measuring device 2#2 measures the position of the reference member 17 in the second measuring coordinate system (step S111 in Figure 9), and the measuring control device 29 may generate the second coordinate calculation information 413 based on the information regarding the known position of the reference member 17 in the reference coordinate system and the measurement result of the position of the reference member 17 in the second measuring coordinate system (step S113 in Figure 9).

[0251] Furthermore, when robot control operations are performed using the second measuring device 2#1, the second measuring device 2#2 may measure the position of the measuring member 16 in the second measuring coordinate system using the second coordinate system information 41 (second coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the reference coordinate system, the second measuring device 2#2 may calculate the position of the measuring member 16 in the second measuring coordinate system from the position of the measuring member 16 in the reference coordinate system indicated by the registered position information 423, based on the second coordinate calculation information 413. After that, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the second measuring coordinate system, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measuring coordinate system indicated by the registered position information 423. As a result, the second measuring device 2#2 calculates the position of the measuring member 16 in the second measuring coordinate system. Subsequently, the second measuring device 2#2 may calculate the position of the object to be measured in the reference coordinate system or the second measuring coordinate system based on the calculation result of the position of the measuring member 16 in the second measuring coordinate system and the second coordinate calculation information 413.

[0252] Furthermore, if multiple measurement coordinate systems are defined, the setting information 4 described above may include information regarding the position in at least one of the multiple measurement coordinate systems as information regarding the position in the measurement coordinate systems. For example, as described above, the recipe information 42 included in the setting information 4 may include registered position information 423 indicating the position of the measurement member 16 in the measurement coordinate system, measurement position information 424 indicating the latest measurement result (calculation result) of the position of the measurement member 16 in the measurement coordinate system, and measurement position log information 426 indicating past measurement results (calculation results) of the position of the measurement member 16 in the measurement coordinate system as information regarding the position in the measurement coordinate system. In this case, the recipe information 42 may include registered position information 423 indicating the position of the measurement member 16 in at least one of the multiple measurement coordinate systems, measurement position information 424 indicating the latest measurement result (calculation result) of the position of the measurement member 16 in at least one of the multiple measurement coordinate systems, and measurement position log information 426 indicating past measurement results (calculation results) of the position of the measurement member 16 in at least one of the multiple measurement coordinate systems. Furthermore, as described above, the reference member information 43 included in the setting information 4 may also include, as information relating to the position in the measurement coordinate system, measurement position information 433 showing the latest measurement result (calculation result) of the position of the reference member 17 in the measurement coordinate system, and measurement position log information 435 showing past measurement results (calculation results) of the position of the reference member 17 in the measurement coordinate system. In this case, the reference member information 43 may include measurement position information 433 showing the latest measurement result (calculation result) of the position of the reference member 17 in at least one of the multiple measurement coordinate systems, and measurement position log information 435 showing past measurement results (calculation results) of the position of the reference member 17 in at least one of the multiple measurement coordinate systems.

[0253] Furthermore, if the measuring device 2 moves (for example, if the measuring device 2 is installed on an AGV), a measurement coordinate system may be defined for each position of the measuring device 2. In other words, if the measuring device 2 moves, multiple measurement coordinate systems may be defined in accordance with the movement of the measuring device 2. For example, a first measurement coordinate system may be defined based on the measuring device 2 located at a first position, and a second measurement coordinate system may be defined based on the measuring device 2 located at a second position different from the first position. Thus, the situations in which multiple measurement coordinate systems are defined are not limited to situations in which the robot system SYS is equipped with multiple measuring devices 2.

[0254] Furthermore, as shown in Figure 24, multiple reference coordinate systems may be defined in addition to or instead of multiple measurement coordinate systems. For example, Figure 24 shows an example in which a robot system SYS comprises multiple robots 1 (e.g., robots 1#1 and 1#2). In this case, as shown in Figure 24, multiple reference coordinate systems may be defined to be used as references in multiple spaces in which the multiple robots 1 each perform predetermined processing. For example, in the example shown in Figure 24, a first reference coordinate system (e.g., a coordinate system defined by the X axis (G1), Y axis (G1), and Z axis (G1)) is defined in the space in which robot 1#1 performs predetermined processing. Furthermore, a second reference coordinate system (e.g., a coordinate system defined by the X axis (G2), Y axis (G2), and Z axis (G2)) is defined in the space in which robot 1#2 performs predetermined processing.

[0255] When multiple reference coordinate systems are defined in this manner, the robot system SYS may generate multiple coordinate system information 41 corresponding to each of the multiple reference coordinate systems as coordinate system information 41 generated for each combination of the measurement coordinate system and the reference coordinate system. In Figure 24, multiple measurement coordinate systems and multiple reference coordinate systems are defined. In this case, the robot system SYS may generate multiple coordinate system information 41 corresponding to each of the multiple patterns relating to the combination of the measurement coordinate system and the reference coordinate system as coordinate system information 41 generated for each combination of the measurement coordinate system and the reference coordinate system. The coordinate system information 41 generated when the first and second measurement coordinate systems and the first and second reference coordinate systems are defined will be described below.

[0256] As a first example, the first measuring device 2#1 may generate third coordinate system information 41 corresponding to a combination of the first measuring coordinate system and the first reference coordinate system. The third coordinate system information 41 may include, as coordinate calculation information 413, third coordinate calculation information 413 used to calculate coordinate values ​​in the other of the first measuring coordinate system and the first reference coordinate system from coordinate values ​​in either the first measuring coordinate system or the first reference coordinate system. In this case, in order to generate the third coordinate calculation information 413, the first measuring device 2#1 measures the position of the reference member 17 in the first measuring coordinate system (step S111 in Figure 9), and the measurement control device 29 may generate the third coordinate calculation information 413 based on information regarding the known position of the reference member 17 in the first reference coordinate system and the measurement result of the position of the reference member 17 in the first measuring coordinate system (step S113 in Figure 9).

[0257] Furthermore, when a robot control operation is performed using the first measuring device 2#1 on a space where a first reference coordinate system is defined, the first measuring device 2#1 may measure the position of the measuring member 16 in the first measuring coordinate system using the third coordinate system information 41 (third coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the first reference coordinate system, the first measuring device 2#1 may calculate the position of the measuring member 16 in the first measuring coordinate system from the position of the measuring member 16 in the first reference coordinate system indicated by the registered position information 423, based on the third coordinate calculation information 413. After that, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the first measurement coordinate system, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measurement coordinate system indicated by the registered position information 423. As a result, the first measuring device 2#1 calculates the position of the measuring member 16 in the first measurement coordinate system. Subsequently, the first measuring device 2#1 may calculate the position of the object to be measured in the first reference coordinate system or the first measurement coordinate system based on the calculation result of the position of the measuring member 16 in the first measurement coordinate system and the third coordinate calculation information 413.

[0258] As a second example, the first measuring device 2#1 may generate fourth coordinate system information 41 corresponding to a combination of a first measurement coordinate system and a second reference coordinate system. The fourth coordinate system information 41 may include, as coordinate calculation information 413, fourth coordinate calculation information 413 used to calculate coordinate values ​​in the other of the first measurement coordinate system and the second reference coordinate system from coordinate values ​​in either the first measurement coordinate system or the second reference coordinate system. In this case, in order to generate the fourth coordinate calculation information 413, the first measuring device 2#1 measures the position of the reference member 17 in the first measurement coordinate system (step S111 in Figure 9), and the measurement control device 29 generates the fourth coordinate calculation information 413 based on information regarding the known position of the reference member 17 in the second reference coordinate system and the measurement result of the position of the reference member 17 in the first measurement coordinate system (step S113 in Figure 9).

[0259] Furthermore, when a robot control operation is performed using the first measuring device 2#1 on a space where a second reference coordinate system is defined, the first measuring device 2#1 may measure the position of the measuring member 16 in the first measuring coordinate system using the fourth coordinate system information 41 (fourth coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the second reference coordinate system, the first measuring device 2#1 may calculate the position of the measuring member 16 in the first measuring coordinate system from the position of the measuring member 16 in the second reference coordinate system indicated by the registered position information 423, based on the fourth coordinate calculation information 413. After that, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the first measurement coordinate system, the first measuring device 2#1 may emit measuring light ML toward the position of the measuring member 16 in the first measurement coordinate system indicated by the registered position information 423. As a result, the first measuring device 2#1 calculates the position of the measuring member 16 in the first measurement coordinate system. Subsequently, the first measuring device 2#1 may calculate the position of the object to be measured in the second reference coordinate system or the first measurement coordinate system based on the calculation result of the position of the measuring member 16 in the first measurement coordinate system and the fourth coordinate calculation information 413.

[0260] As a third example, the second measuring device 2#2 may generate fifth coordinate system information 41 corresponding to a combination of the second measuring coordinate system and the first reference coordinate system. The fifth coordinate system information 41 may include, as coordinate calculation information 413, fifth coordinate calculation information 413 used to calculate coordinate values ​​in the other of the second measuring coordinate system and the first reference coordinate system from coordinate values ​​in either the second measuring coordinate system or the first reference coordinate system. In this case, in order to generate the fifth coordinate calculation information 413, the second measuring device 2#2 measures the position of the reference member 17 in the second measuring coordinate system (step S111 in Figure 9), and the measurement control device 29 generates the fifth coordinate calculation information 413 based on information regarding the known position of the reference member 17 in the first reference coordinate system and the measurement result of the position of the reference member 17 in the second measuring coordinate system (step S113 in Figure 9).

[0261] Furthermore, when robot control operations are performed on a space where the first reference coordinate system is defined using the second measuring device 2#2, the second measuring device 2#2 may measure the position of the measuring member 16 in the second measuring coordinate system using the fifth coordinate system information 41 (fifth coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the first reference coordinate system, the second measuring device 2#2 may calculate the position of the measuring member 16 in the second measuring coordinate system from the position of the measuring member 16 in the first reference coordinate system indicated by the registered position information 423, based on the fifth coordinate calculation information 413. After that, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the second measurement coordinate system, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measurement coordinate system indicated by the registered position information 423. As a result, the second measuring device 2#2 calculates the position of the measuring member 16 in the second measurement coordinate system. Subsequently, the second measuring device 2#2 may calculate the position of the object to be measured in the first reference coordinate system or the second measurement coordinate system based on the calculation result of the position of the measuring member 16 in the second measurement coordinate system and the fifth coordinate calculation information 413.

[0262] As a fourth example, the second measuring device 2#2 may generate sixth coordinate system information 41 corresponding to a combination of the second measurement coordinate system and the second reference coordinate system. The sixth coordinate system information 41 may include, as coordinate calculation information 413, sixth coordinate calculation information 413 used to calculate coordinate values ​​in the other of the second measurement coordinate system and the second reference coordinate system from coordinate values ​​in either the second measurement coordinate system or the second reference coordinate system. In this case, in order to generate the sixth coordinate calculation information 413, the second measuring device 2#2 measures the position of the reference member 17 in the second measurement coordinate system (step S111 in Figure 9), and the measurement control device 29 generates the sixth coordinate calculation information 413 based on information regarding the known position of the reference member 17 in the second reference coordinate system and the measurement result of the position of the reference member 17 in the second measurement coordinate system (step S113 in Figure 9).

[0263] Furthermore, when robot control operations are performed on a space in which a second reference coordinate system is defined using the second measuring device 2#2, the second measuring device 2#2 may measure the position of the measuring member 16 in the second measuring coordinate system using the sixth coordinate system information 41 (sixth coordinate calculation information 413). For example, if the registered position information 423 indicates the position of the measuring member 16 in the second reference coordinate system, the second measuring device 2#2 may calculate the position of the measuring member 16 in the second measuring coordinate system from the position of the measuring member 16 in the second reference coordinate system indicated by the registered position information 423, based on the sixth coordinate calculation information 413. After that, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measuring coordinate system. However, if the registered position information 423 indicates the position of the measuring member 16 in the second measurement coordinate system, the second measuring device 2#2 may emit measuring light ML toward the position of the measuring member 16 in the second measurement coordinate system indicated by the registered position information 423. As a result, the second measuring device 2#2 calculates the position of the measuring member 16 in the second measurement coordinate system. Subsequently, the second measuring device 2#2 may calculate the position of the object to be measured in the second reference coordinate system or the second measurement coordinate system based on the calculation result of the position of the measuring member 16 in the second measurement coordinate system and the sixth coordinate calculation information 413.

[0264] However, even if multiple measurement coordinate systems are defined, a single common reference coordinate system may be defined in the robot system SYS. In this case, if the registered position information 423 indicated by the recipe information 42 described above indicates the position of the measurement member 16 in the reference coordinate system, the same recipe information 42 (especially the registered position information 423) may be used in common across multiple measurement coordinate systems. This is because, even if multiple measurement coordinate systems are defined, the position of the measurement member 16 in a single common reference coordinate system remains unchanged. For example, the recipe information 42 (especially the registered position information 423) may be used in common by multiple measurement devices 2, each using a different measurement coordinate system, to measure the measurement member 16. As a result, the amount of data in the setting information 4, including the recipe information 42, can be reduced compared to the case where recipe information 42 (especially the registered position information 423) is generated for each of the multiple measurement coordinate systems.

[0265] Furthermore, in at least one of the first and second modifications, multiple measurement coordinate systems may be defined as described in the third modification.

[0266] (4-4) Fourth Modification In the fourth modification, the measuring device 2 may generate registered position information 423 indicating the position of the measuring member 16 in real space based on information regarding the position of the measuring member 16 in virtual space. Real space means the space in which the measuring member 16 is actually placed (i.e., the object to be measured to which the measuring member 16 is attached is actually placed). On the other hand, virtual space means a space that mimics real space. Virtual space may also mean a simulation space.

[0267] In this case, the operator of the robot system SYS (in other words, the user) may specify the position of the measuring member 16 in the virtual space. The position of the measuring member 16 specified by the operator in the virtual space may be used by the measuring device 2 as information regarding the position of the measuring member 16 in the virtual space.

[0268] In order for the operator to specify the position of the measuring member 16 in the virtual space, the measuring device 2 (in particular, the measuring control device 29) may set up a virtual space that mimics the real space in which the object to be measured is located. In other words, the measuring control device 29 may simulate the real space in which the object to be measured is located in the virtual space. Specifically, as shown in Figure 25, the measuring control device 29 may set up a virtual space in which an object model OM, which is a virtual model (simulation model) that mimics the object to be measured located in the real space, is located at a position corresponding to the position in the real space where the object to be measured is located (for example, the reference position described above). For example, as shown in Figure 25, if the robot 1, which is the object to be measured, is located in the real space, the measuring control device 29 may set up a virtual space in which the robot model RM, which is the object model OM of the robot 1, is located at a position corresponding to the position in the real space where the robot 1 is located. For example, as shown in Figure 25, if the workpiece W, which is the object to be measured, is located in the real space, the measuring control device 29 may set up a virtual space in which the workpiece model WM, which is the object model OM of the workpiece W, is located at a position corresponding to the position in the real space where the workpiece W is located. For example, if the jig J, which is the object to be measured, is located in real space, even though it is not shown in the drawing for the sake of simplicity, the measurement control device 29 may set up a virtual space in which the object model OM of the jig J is located at a position corresponding to the position where the jig J is located in real space.

[0269] Furthermore, if other objects (hereinafter referred to as surrounding objects) exist around the robot 1 in real space, the measurement control device 29 may set up a virtual space in which a model of the surrounding objects, which simulates the surrounding objects, is placed at a position corresponding to the position where the surrounding objects are located in real space. An example of a surrounding object is at least one of the stand on which the measurement device 2 is placed and the container containing the workpiece W. In this case, compared to the case in which a virtual space without a surrounding object model is used, the operator (in other words, the user) can specify the position of the measurement member 16 while also considering the position of the surrounding objects.

[0270] The measurement control device 29 may display the set virtual space using an output device 295 that can function as a display device. The operator may specify the position of the measuring member 16 using the input device 294 on the display screen of the output device 295 where the virtual space is displayed. In other words, the operator may specify the position (measurement position) that the measuring device 2 should measure in order to measure the position of the object to be measured, using the input device 294 on the display screen of the output device 295 where the virtual space is displayed. As a result, information regarding the position that the measuring device 2 should measure in order to measure the position of the object to be measured (i.e., the position of the measuring member 16) is set in the virtual space. In other words, information regarding the position in the virtual space that the measuring device 2 should measure in order to measure the position of the object to be measured (i.e., the position of the measuring member 16 in the virtual space) is input to the measurement control device 29.

[0271] For example, the operator may specify on the display screen of the output device 295, which displays the virtual space in which the robot model RM is placed, the position that the measuring device 2 should measure in order to measure the position of robot 1. The position that the measuring device 2 should measure in order to measure the position of robot 1 may be equivalent to the position of robot 1 (specifically, the position of a part of robot 1). For this reason, the operator may specify on the display screen of the output device 295, which displays the virtual space in which the robot model RM is placed, the position of the robot model RM placed in the virtual space (i.e., the position of a part of robot 1) as the position of robot 1 that the measuring device 2 should measure in order to measure the position of robot 1 (i.e., the position of a part of robot 1).

[0272] For example, the operator may specify on the display screen of the output device 295, which displays the virtual space where the work model WM is placed, the position that the measuring device 2 should measure in order to measure the position of the workpiece W. The position that the measuring device 2 should measure in order to measure the position of the workpiece W may be equivalent to the position of the workpiece W (specifically, the position of a part of the workpiece W). For this reason, the operator may specify on the display screen of the output device 295, which displays the virtual space where the work model WM is placed, the position of the workpiece W that the measuring device 2 should measure in order to measure the position of the workpiece W (i.e., the position of a part of the workpiece W), which is the position of the work model WM placed in the virtual space (i.e., the position of a part of the workpiece WM).

[0273] As described above, the object to be measured may move. For example, as explained with reference to Figure 15C, the workpiece W may move. For example, as explained with reference to Figure 16C, the robot 1 (end effector 15) may move. In this case, the measurement control device 29 may simulate the movement of the object to be measured in real space in virtual space. That is, the measurement control device 29 may set up a virtual space in which an object model OM that moves in the same way as the movement of the object to be measured in real space is placed. In this case, the operator may specify multiple positions in the virtual space that the measurement device 2 should measure in order to measure the position of the object to be measured (i.e., the position of the measurement member 16 in virtual space), in accordance with the movement of the object model OM in the virtual space.

[0274] For example, the operator may specify in the virtual space a first position that the measuring device 2 should measure in order to measure the position of the object to be measured during the period in the virtual space when the object model OM is located at a first virtual position. In this case, the measuring device 2 may use the information regarding the specified first position in the virtual space as information regarding the position of the measuring member 16 that the measuring device 2 should measure in the real space in order to measure the position of the object to be measured during the period when the object to be measured is located at a first real position corresponding to the first virtual position in the real space.

[0275] Furthermore, the operator may specify in the virtual space a second position that the measuring device 2 should measure in order to measure the position of the object to be measured during the period in the virtual space when the object model OM is located at a second virtual position different from the first virtual position. In this case, the measuring device 2 may use the information regarding the specified second position in the virtual space as information regarding the position of the measuring member 16 that the measuring device 2 should measure in the real space in order to measure the position of the object to be measured during the period when the object to be measured is located at a second real position corresponding to the second virtual position in the real space.

[0276] After information regarding the position of the measuring member 16 in the virtual space is set, the measuring device 2 (for example, the measuring control device 29) may generate registered position information 423 based on the information regarding the position of the measuring member 16 in the virtual space (i.e., the position in the virtual space that is specified in the virtual space). An example of generating registered position information 423 based on information regarding the position of the measuring member 16 in the virtual space will be described below.

[0277] As a first example, the measuring device 2 may actually measure the position of the measuring member 16 in real space based on information regarding the position of the measuring member 16 in virtual space. For example, the measurement control device 29 may calculate the position in real space corresponding to the position of the measuring member 16 in virtual space based on information regarding the position of the measuring member 16 in virtual space. Subsequently, the measuring device 2 may emit measurement light ML toward the position in real space corresponding to the position of the measuring member 16 in virtual space. Because the operator, who is aware of the real space in which the object to be measured is actually located, specifies the position of the measuring member 16 in virtual space, the measuring member 16 should actually exist at the position in real space corresponding to the position of the measuring member 16 in virtual space. For this reason, the measuring device 2 can irradiate the measuring member 16 with measurement light ML by emitting it toward the position in real space corresponding to the position of the measuring member 16 in virtual space. As a result, the measuring device 2 can measure (calculate) the position of the measuring member 16 in real space. Subsequently, the measurement control device 29 may generate registered position information 423 based on the measurement result (calculation result) of the position of the measurement member 16 in real space. Specifically, the measurement control device 29 may generate registered position information 423 that includes the measurement result (calculation result) of the position of the measurement member 16. In this case, the measurement device 2 generates registered position information 423 based on the position of the measurement member 16 actually measured in real space, based on information regarding the position of the measurement member 16 in virtual space. Therefore, the measurement device 2 can generate registered position information 423 that accurately indicates the position of the measurement member 16 in real space.

[0278] As a second example, the measuring device 2 may generate registered position information 423 based on information regarding the position of the measuring member 16 in virtual space, without actually measuring the position of the measuring member 16 in real space. For example, the measuring control device 29 may calculate the position in real space corresponding to the position of the measuring member 16 in virtual space based on information regarding the position of the measuring member 16 in virtual space. Subsequently, the measuring control device 29 may set information indicating the position in real space corresponding to the position of the measuring member 16 in virtual space as registered position information 423. In other words, the measuring control device 29 may generate registered position information 423 indicating the position in real space corresponding to the position of the measuring member 16 in virtual space. In this case, the measuring device 2 does not need to actually measure the position of the measuring member 16 in real space in order to generate the registered position information 423. Therefore, the measuring device 2 can reduce the time required to generate the registered position information 423.

[0279] However, virtual space does not necessarily perfectly simulate real space. In other words, there may be discrepancies between virtual space and real space. For example, there may be discrepancies between the position of the object model OM placed in virtual space and the position of the object to be measured placed in real space. In this case, the measuring member 16 may not actually exist at the position in real space corresponding to the position of the measuring member 16 specified by the operator in virtual space. As a result, the registered position information 423 generated based on the second example described above may not accurately represent the position of the measuring member 16 in real space.

[0280] Therefore, in order to generate registered position information 423 that accurately indicates the position of the measuring member 16 in real space while shortening the time required to generate the registered position information 423, the measuring device 2 may generate the registered position information 423 using the third example described below. First, in the third example, in the virtual space, the operator specifies multiple positions as the positions of the measuring member 16 in the virtual space. For the purposes of the following explanation, the positions specified by the operator in the virtual space will be referred to as designated positions. For example, if a first and second measuring member 16 (i.e., multiple measuring members 16) are attached to the object to be measured, the operator may specify a first designated position in the virtual space that indicates the position of the first measuring member 16, and also specify a second designated position that indicates the position of a second measuring member 16 that is different from the first measuring member 16. After that, the measuring device 2 may actually measure the position of the measuring member 16 in real space based on information regarding the designated position of any one of the multiple measuring members 16. In the following, for the sake of explanation, we will describe an example in which the measuring device 2 actually measures the position of the first measuring member 16 in real space based on information about the designated position of the first measuring member 16 (i.e., the first designated position). Note that the operation of actually measuring the position of the measuring member 16 in real space based on information about the designated position (i.e., the position of the measuring member 16 in virtual space) has already been explained in the first example described above, so a detailed explanation will be omitted here. As a result, the measurement control device 29 may generate registered position information 423 that includes the measurement result (calculation result) of the position of the first measuring member 16 as registered position information 423 indicating the position of the first measuring member 16.

[0281] Subsequently, the measurement control device 29 may calculate a spatial displacement, which is the difference between the position in the real space corresponding to the first designated position in the virtual space and the position of the first measuring member 16 actually measured in the real space. In other words, the measurement control device 29 may acquire information regarding the spatial displacement.

[0282] Subsequently, if the spatial displacement is zero, the measurement control device 29 may determine that there is no displacement between the virtual space and the real space (i.e., a virtual space that accurately simulates the real space has been set up). In this case, because there is no displacement between the virtual space and the real space, the measurement member 16 should exist at the position in the real space corresponding to the specified position in the virtual space. For this reason, in this case, the measurement control device 29 may set information indicating the position in the real space corresponding to the specified position in the virtual space as registered position information 423 indicating the position of the remaining measurement member 16 among the multiple measurement members 16. In other words, the measurement control device 29 may generate registered position information 423 indicating the position of the remaining measurement member 16 as registered position information 423 indicating the position of the remaining measurement member 16 without actually measuring the position of the remaining measurement member 16.

[0283] On the other hand, the measurement control device 29 may determine that a discrepancy exists between the virtual space and the real space if the spatial discrepancy is not zero. In this case, because a discrepancy exists between the virtual space and the real space, there is a possibility that the measurement member 16 does not exist at the position in the real space corresponding to the specified position in the virtual space. On the other hand, because the discrepancy between the virtual space and the real space (i.e., spatial discrepancy) has already been calculated, the measurement member 16 should exist at a position shifted by an amount equivalent to the spatial discrepancy from the position in the real space corresponding to the specified position in the virtual space. For this reason, the measurement device 2 should be able to irradiate the measurement member 16 with measurement light ML in the real space based on information regarding the specified position in the virtual space (i.e., the position of the measurement member 16 specified in the virtual space) and information regarding the spatial discrepancy. Therefore, the measurement device 2 may generate registered position information 423 indicating the position of the remaining measurement member 16 among the multiple measurement members 16 based on information regarding the specified position in the virtual space (i.e., the position of the measurement member 16 specified in the virtual space) and information regarding the spatial discrepancy. Specifically, the measuring device 2 may calculate the position of the remaining measuring member 16 in real space as a position shifted by an amount corresponding to the spatial displacement from the designated position specified in the virtual space as the position of the remaining measuring member 16. Subsequently, the measuring device 2 may irradiate the remaining measuring member 16 with measurement light ML in real space by emitting measurement light ML toward the calculated position. After that, the measurement control device 29 may generate registered position information 423, which includes the measurement result (calculation result) of the position of the remaining measuring member 16, as registered position information 423 indicating the position of the remaining measuring member 16.

[0284] Thus, when no spatial displacement occurs, the measuring device 2 can generate registered position information 423 primarily using the second example, which generates registered position information 423 based on information regarding the position of the measuring member 16 in virtual space. As a result, the measuring device 2 can generate registered position information 423 that accurately indicates the position of the measuring member 16 in real space. On the other hand, when a spatial displacement occurs, the measuring device 2 can generate registered position information 423 primarily using the first example, which generates registered position information 423 based on information regarding the position of the measuring member 16 in virtual space. As a result, the measuring device 2 can reduce the time required to generate the registered position information 423. For this reason, the measuring device 2 generates registered position information 423 that accurately indicates the position of the measuring member 16 in real space while reducing the time required to generate the registered position information 423.

[0285] As mentioned above, if the spatial displacement is not zero, there is a possibility that the measuring member 16 is located at a position in the real world that is shifted by an amount equivalent to the spatial displacement from the designated position in the virtual world that corresponds to the designated position in the virtual world. Therefore, if the spatial displacement is not zero, the measuring device 2 may generate registered position information 423 indicating the position of the remaining measuring member 16, without actually measuring the position of the remaining measuring member 16 in the real world, by an amount equivalent to the spatial displacement from the designated position that was specified as the position of the remaining measuring member 16 in the virtual world. As a result, even if the spatial displacement is not zero, the measuring device 2 can reduce the time required to generate the registered position information 423.

[0286] Furthermore, even if the spatial displacement is not zero, if the spatial displacement is sufficiently small (for example, if the spatial displacement is smaller than a predetermined tolerance), there is a high probability that the measuring member 16 is located at or near the position in real space corresponding to the specified position in virtual space. On the other hand, if the spatial displacement is large (for example, if the spatial displacement is larger than a predetermined tolerance), there is a high probability that the measuring member 16 is not located at or near the position in real space corresponding to the specified position in virtual space. Therefore, if the spatial displacement is sufficiently small (for example, if the spatial displacement is smaller than a predetermined tolerance), the measuring device 2 may generate the registered position information 423 for the remaining measuring member 16 by performing the operation performed in the above example when the spatial displacement is determined to be zero. On the other hand, if the spatial displacement is large (for example, if the spatial displacement is larger than a predetermined tolerance), the measuring device 2 may generate the registered position information 423 for the remaining measuring member 16 by performing the operation performed in the above example when the spatial displacement is determined to be non-zero. As a result, the measuring device 2 can generate registered position information 423 that accurately indicates the position of the measuring member 16 in real space, while further reducing the time required to generate the registered position information 423.

[0287] Furthermore, as explained in Figures 15C and 16C, even when the object to be measured moves (and as a result the measuring member 16 moves), the operator may specify multiple designated positions in the virtual space. For example, the operator may specify a first designated position indicating the position of the measuring member 16 when the object to be measured is at a first position, and a second designated position indicating the position of the measuring member 16 when the object to be measured is at a second position different from the first position. In this case as well, the measuring device 2 may generate registered position information 423 in the same manner as when the operator specifies multiple positions (multiple designated positions) of the measuring member 16 in the virtual space.

[0288] Specifically, the measuring device 2 may actually measure the position of the measuring member 16 in real space based on information regarding any one of the designated positions of the measuring member 16. For the sake of explanation, the following describes an example in which the measuring device 2 actually measures the position of the measuring member 16 in real space based on information regarding a first designated position (i.e., the designated position of the measuring member 16 when the object to be measured is located at the first position). In this case, the measurement control device 29 may generate registered position information 423 that includes the measurement result (calculation result) of the position of the measuring member 16 when the object to be measured is located at the first position, as registered position information 423 indicating the position of the measuring member 16 when the object to be measured is located at the first position.

[0289] Subsequently, the measurement control device 29 may calculate a spatial displacement, which is the difference between the position in the real space corresponding to the first designated position in the virtual space and the position of the measurement member 16 actually measured when the object to be measured is located at the first position in the real space.

[0290] Subsequently, if the spatial displacement is zero (or the spatial displacement is smaller than the allowable value), the measurement control device 29 may generate registered position information 423 indicating the remaining designated positions among the multiple designated positions as registered position information 423 indicating the position of the measurement member 16. For example, the measurement control device 29 may generate registered position information 423 indicating the second designated position (i.e., the designated position of the measurement member 16 when the object to be measured is located at the second position) as registered position information 423 indicating the position of the measurement member 16 when the object to be measured is located at the second position.

[0291] On the other hand, if the spatial displacement is not zero (or the spatial displacement is greater than the allowable value), the measurement device 29 may generate registered position information 423 indicating the position of the measurement member 16 when the object to be measured is located at another position, based on the information regarding the remaining designated positions specified in the virtual space and the information regarding the spatial displacement. For example, the measurement device 2 may emit measurement light ML toward a position shifted by an amount equivalent to the spatial displacement from the second designated position, thereby irradiating the measurement member 16 with measurement light ML when the object to be measured is located at the second position. However, in this case, the object to be measured moves to the second position in real space before the measurement device 2 emits the measurement light ML. After that, the measurement control device 29 may generate registered position information 423 including the measurement result (calculation result) of the position of the measurement member 16 as registered position information 423 indicating the position of the measurement member 16 when the object to be measured is located at the second position. Alternatively, if the spatial displacement is not zero (or if the spatial displacement is greater than the allowable value), the measuring device 2 may generate registered position information 423 indicating a position shifted by an amount equivalent to the spatial displacement from the remaining designated position, without actually measuring the position of the measuring member 16 when the object to be measured is in another position.

[0292] Alternatively, if the spatial displacement is not zero, the measurement control device 29 may readjust the virtual space so that the spatial displacement becomes zero. In other words, the measurement control device 29 may readjust the virtual space so that it matches the real space. As a result, compared to the case where the virtual space is not readjusted, the measurement control device 29 can set up a virtual space that more accurately simulates the real space. After that, the operator may specify the position of the measuring member 16 in the readjusted virtual space.

[0293] Alternatively, if the spatial displacement is not zero, the conditions of the real space may be altered so that the virtual space accurately simulates the real space. In other words, the real space may be adjusted to match the virtual space. For example, the position of the object to be measured placed in the real space may be changed. In this case, the measurement control device 29 may use the output device 295 to notify the operator of information regarding the spatial displacement. The operator may then change the conditions of the real space based on the information regarding the spatial displacement.

[0294] Furthermore, when the measurement control device 29 performs robot control operations, it may calculate the position of the measurement member 16 using a computational model that can be constructed by machine learning. In this case, an example of a computational model that can be constructed by machine learning is a computational model including a neural network (so-called artificial intelligence (AI)). As an example of a computational model, there is a computational model that outputs the position of the measurement member 16 attached to the object to be measured when an image generated by a camera capturing an image of the object to be measured is input. In this case, in the learning phase in which the computational model is generated, the camera may capture an image of the object to be measured for at least a part of the period during which at least one of the setting operation and the robot control operation is performed, or for other periods, thereby generating an image as learning data to be used for machine learning of the computational model. Furthermore, the position of the measurement member 16 at the time the camera captures an image of the object to be measured may be collected as learning data (in particular, the correct label) to be used for machine learning of the computational model. Subsequently, the computational model may be generated by machine learning using the learning data. Specifically, the parameters of the computational model may be adjusted so that the difference between the position output by the computational model after an image is input and the position indicated by the correct label is minimized. In the inference phase using the computational model after it has been generated, the measurement control device 29 may input an image generated by the camera capturing the object to be measured into the computational model to calculate the position of the measurement member 16 attached to the object. Subsequently, the measurement device 2 may calculate the position of the measurement member 16 by emitting measurement light ML toward the position output by the computational model. In this case, even if an unknown object to be measured exists, the measurement device 2 can measure the position of the measurement member 16 attached to the unknown object to be measured. As a result, the measurement device 2 can measure the position of the unknown object to be measured based on the measurement result of the position of the measurement member 16 attached to the unknown object to be measured.

[0295] Furthermore, in at least one of the first to third modifications, as described in the fourth modification, the measuring device 2 may generate registered position information 423 indicating the position of the measuring member 16 in real space based on information regarding the position of the measuring member 16 in virtual space.

[0296] (4-5) Fifth Modification In the fifth modification, the measurement control device 29 may use an output device 295 that functions as a display device to display a display screen 5 that includes a UI (User Interface) for displaying information about the robot system SYS.

[0297] Display screen 5 may display information related to the setting operation described above. The information related to the setting operation may include information related to the generation of the coordinate system information 41 described above. The information related to the generation of coordinate system information 41 may include at least one of the generated coordinate system information 41, reference member information 43 used to generate the coordinate system information 41, and reference member 17 measured to generate the coordinate system information 41. The information related to the setting operation may include information related to the generation of the recipe information 42 described above. The information related to the generation of recipe information 42 may include at least one of the generated recipe information 42 and measuring member 16 measured to generate the recipe information 42.

[0298] Display screen 5 may display information related to the robot control operation described above. The information related to the robot control operation may include at least one of the recipe information 42 used in the robot control operation and information related to the measuring member 16 measured in the robot control operation.

[0299] The display screen 5 may display information related to the evaluation operation described above (i.e., the operation to confirm or evaluate the reliability of the registered position information 423). The information related to the evaluation operation may include at least one of the following: recipe information 42 used in the evaluation operation, information related to the positional deviation of the measuring member 16 calculated in the evaluation operation, information related to warnings output in the evaluation operation, and information related to the measuring member 16 measured in the evaluation operation.

[0300] An example of display screen 5 is shown in Figure 26. As shown in Figure 26, display screen 5 may include at least one of the following: information selection button 51, information display screen 52, object information screen 53, display format selection button 54, and common status display screen 55.

[0301] The information selection button 51 is a button for selecting information to be displayed on the display screen 5. For example, the display ...

Claims

1. A measurement method for measuring the position of an object to be measured using measuring light, comprising setting setting information which includes coordinate calculation information used to calculate the coordinate value of the other of the first and second coordinate systems from the coordinate value of the other of the first and second coordinate systems, and registered position information relating to the position of a measuring member placed on the object to be measured in at least one of the first and second coordinate systems; and acquiring information relating to the position of the object to be measured in the second coordinate system based on the measurement result of the position of the object to be measured in the first coordinate system obtained by irradiating the object with measuring light based on the registered position information indicated by the setting information, and the coordinate calculation information.

2. The measurement method according to claim 1, further comprising: irradiating a reference member whose position in the second coordinate system is known with the measurement light to measure the position of the reference member in the first coordinate system; and generating coordinate calculation information based on information regarding the known position of the reference member in the second coordinate system and the measurement result of the position of the reference member in the first coordinate system.

3. The measurement method according to claim 2, wherein measuring the position of the reference members includes measuring the position of each of the at least three reference members in the second coordinate system by irradiating at least three of the reference members with the measurement light, and the coordinate calculation information is generated based on information relating to the known positions of the at least three reference members in the second coordinate system and the measurement results of the positions of the at least three reference members in the first coordinate system.

4. The measurement method according to any one of claims 1 to 3, further comprising: irradiating the measuring member with the measuring light to measure the position of the measuring member; and generating the registered position information based on the measurement result of the position of the measuring member.

5. The measurement method according to claim 4, further comprising: irradiating the measurement light onto at least three of the measurement members, each of which is positioned at at least three different locations on the object to be measured, to measure the positions of the at least three measurement members; and generating the registered position information based on the measurement results of the positions of the at least three measurement members.

6. The measurement method according to any one of claims 1 to 5, wherein the object to be measured includes at least one of a workpiece processed by the processing device and the processing device.

7. The measurement method according to claim 6, wherein the measuring member includes a measuring member placed on the workpiece, and the registered position information includes information relating to the position of a registered member placed on a registered workpiece different from the workpiece in at least one of the first and second coordinate systems.

8. The measurement method according to claim 7, further comprising: irradiating the registered member with the measurement light to measure the position of the registered member; and generating the registered position information based on the measurement result of the position of the registered member.

9. The measurement method according to claim 7 or 8, wherein obtaining information regarding the position of the object to be measured includes irradiating the measuring member, which is placed on the workpiece based on the registered position information, with the measuring light to obtain information regarding the position of the workpiece in the second coordinate system.

10. The measurement method according to any one of claims 7 to 9, wherein the workpiece includes a first workpiece and a second workpiece different from the first workpiece; the registered workpiece includes a first registered workpiece and a second registered workpiece different from the first registered workpiece; the registered member includes a first registered member placed on the first registered workpiece and a second registered member placed on the second registered workpiece and different from the first registered member; the measuring member includes a first measuring member placed on the first workpiece and a second measuring member placed on the second workpiece and different from the first measuring member; and the registered position information includes first registered position information relating to the position of the first registered member in at least one of the first and second coordinate systems and second registered position information relating to the position of the second registered member in at least one of the first and second coordinate systems.

11. The measurement method according to claim 10, further comprising: measuring the position of the first registered member by irradiating the first registered member with the measurement light, and generating first registered position information based on the measurement result of the position of the first registered member; and measuring the position of the second registered member by irradiating the second registered member with the measurement light, and generating second registered position information based on the measurement result of the position of the second registered member.

12. The measurement method according to claim 10 or 11, wherein obtaining information relating to the position of the object to be measured includes obtaining information relating to the position of the first workpiece in the second coordinate system by irradiating a first measuring member, which is positioned on a first workpiece different from the first registered workpiece based on the first registered position information, with the measuring light, and obtaining information relating to the position of the second workpiece in the second coordinate system by irradiating a second measuring member, which is positioned on a second workpiece different from the second registered workpiece based on the second registered position information, with the measuring light.

13. The measurement method according to any one of claims 7 to 12, wherein the registered workpiece is processed by the processing device.

14. The measurement method according to any one of claims 6 to 13, wherein the object to be measured is the processing apparatus.

15. The measurement method according to claim 14, wherein obtaining information relating to the position of the object to be measured includes obtaining information relating to the position of the measuring member in a first coordinate system and the coordinate calculation information obtained by irradiating the measuring member, which is arranged in the processing device, with the measuring light based on the registered position information, and obtaining information relating to the position of the processing device in a second coordinate system.

16. The measurement method according to claim 15, wherein the registered position information includes information relating to the position of the measuring member arranged in the processing device in at least one of the first and second coordinate systems.

17. The measurement method according to claim 16, wherein the registered position information is generated based on the measurement result of the position of the measuring member obtained by irradiating the measuring member, which is placed in the processing device, with measuring light during a period in which the processing device is taught information about the processing to be performed by the processing device.

18. The measurement method according to claim 16 or 17, wherein the state of the processing apparatus includes a first state in which a first processing is performed and a second state in which a second processing is performed, and the registered position information includes the registered position information relating to the position of the measuring member arranged in the processing apparatus in the first state in at least one of the first and second coordinate systems, and the registered position information relating to the position of the measuring member arranged in the processing apparatus in the second state in at least one of the first and second coordinate systems.

19. The measurement method according to claim 18, wherein the first state is a state in which a first tool used for performing the first processing is attached to the processing apparatus, and the second state is a state in which a second tool used for performing the second processing is attached to the processing apparatus.

20. The measurement method according to claim 14, wherein the processing apparatus includes a first processing apparatus and a second processing apparatus different from the first processing apparatus, the measuring member includes a third measuring member disposed in the first processing apparatus and a fourth measuring member disposed in the second processing apparatus and different from the third measuring member, and the registered position information includes a third registered position information relating to the position of the third measuring member disposed in the first processing apparatus in at least one of the first and second coordinate systems, and a fourth registered position information relating to the position of the fourth measuring member disposed in the second processing apparatus in at least one of the first and second coordinate systems.

21. The measurement method according to claim 20, further comprising: irradiating the third measuring member with the measurement light to measure the position of the third measuring member, and generating the third registered position information based on the measurement result of the position of the third measuring member; and irradiating the fourth measuring member with the measurement light to measure the position of the fourth measuring member, and generating the fourth registered position information based on the measurement result of the position of the fourth measuring member.

22. The measurement method according to claim 20 or 21, wherein obtaining information relating to the position of the object to be measured includes, in a second period different from the first period for irradiating the measurement light to generate the registered position information, irradiating the measurement light onto the third measurement member arranged in the first processing device based on the third registered position information to obtain information relating to the position of the first processing device in the first coordinate system, and irradiating the measurement light onto the fourth measurement member arranged in the processing device based on the fourth registered position information to obtain information relating to the position of the first processing device in the first coordinate system.

23. The measurement method according to any one of claims 20 to 22, wherein the third registered position information is generated based on the measurement result of the position of the third measuring member obtained by irradiating the third measuring member, which is positioned in the first processing unit, with measuring light during a period in which the first processing unit is taught information about the first processing unit to be performed by the first processing unit, and the fourth registered position information is generated based on the measurement result of the position of the fourth measuring member obtained by irradiating the fourth measuring member, which is positioned in the second processing unit, with measuring light during a period in which the second processing unit is taught information about the second processing unit to be performed by the second processing unit.

24. The measurement method according to any one of claims 20 to 23, wherein the state of the first processing apparatus includes a third state in which the third process is performed as the first process, and a fourth state in which the fourth process is performed as the first process; the state of the second processing apparatus includes a fifth state in which the fifth process is performed as the second process, and a sixth state in which the sixth process is performed as the second process; the third registered position information includes the registered position information relating to the position of the third measuring member arranged in the first processing apparatus in the third state in at least one of the first and second coordinate systems, and the registered position information relating to the position of the third measuring member arranged in the first processing apparatus in the fourth state in at least one of the first and second coordinate systems; and the fourth registered position information includes the registered position information relating to the position of the fourth measuring member arranged in the second processing apparatus in the fifth state in at least one of the first and second coordinate systems, and the registered position information relating to the position of the fourth measuring member arranged in the second processing apparatus in the sixth state in at least one of the first and second coordinate systems.

25. The measurement method according to claim 24, wherein the third state is a state in which a third tool used for performing the third processing is attached to the first processing apparatus, the fourth state is a state in which a fourth tool used for performing the fourth processing is attached to the first processing apparatus, the fifth state is a state in which a fifth tool used for performing the fifth processing is attached to the second processing apparatus, and the sixth state is a state in which a sixth tool used for performing the sixth processing is attached to the second processing apparatus.

26. The measurement method according to any one of claims 14 to 25, wherein the setting information includes information relating to the positional relationship between the measuring member arranged in the processing apparatus and a reference point of the processing apparatus.

27. The measurement method according to claim 26, wherein setting the setting information includes: measuring the position of the measuring member by irradiating the measuring member with the measuring light; obtaining information regarding the position of the reference point; and generating information regarding the positional relationship based on the measurement result of the position of the measuring member and the information regarding the position of the reference point.

28. The measurement method according to claim 26 or 27, wherein the processing apparatus comprises a tool that performs a predetermined process on the workpiece, and the reference point includes information relating to a predetermined position of the tool.

29. The measurement method according to any one of claims 26 to 28, further comprising: acquiring information regarding the position of the reference point after the setting information has been set; estimating the position of the measuring member based on the information regarding the position of the reference point and the information regarding the positional relationship; and measuring the position of the object to be measured by irradiating the estimated position with the measuring light.

30. The measurement method according to any one of claims 6 to 29, wherein the setting information includes a plurality of registered location information, the measurement method further includes obtaining designation information that specifies at least one of the plurality of registered location information, obtaining information regarding the position of the object to be measured includes measuring the position of the object to be measured by irradiating the measurement light toward the position indicated by the at least one registered location information specified by the designation information, obtaining the designation information includes obtaining the designation information from the processing device, and information regarding the measurement result of the position of the object to be measured is output to the processing device.

31. The measurement method according to any one of claims 1 to 29, wherein the setting information includes a plurality of registered location information, the measurement method further includes obtaining designation information that specifies at least one of the plurality of registered location information, and obtaining information regarding the position of the object to be measured includes measuring the position of the object to be measured by irradiating the measurement light toward the position indicated by the at least one registered location information specified by the designation information.

32. The measurement method according to any one of claims 1 to 31, wherein the object to be measured includes a jig for supporting any workpiece.

33. The measurement method according to any one of claims 1 to 32, further comprising saving log information that includes information regarding the measurement result of the position of the object to be measured.

34. The measurement method according to any one of claims 1 to 33, wherein obtaining information relating to the position of the object to be measured includes measuring the position of the measuring member by irradiating the registered position, which is the position indicated by the registered position information, with respect to calculating the position of the object to be measured based on the measurement result of the position of the measuring member, and further includes storing the measurement method as log information including information relating to the discrepancy between the measurement result of the position of the measuring member and the registered position.

35. A measurement method according to any one of claims 1 to 34, comprising: measuring the position of the measuring member by irradiating the measuring light to a registered position which is the position indicated by the registered position information; calculating the difference between the measurement result of the position of the measuring member and the registered position indicated by the registered position information; and outputting a warning if the difference is greater than an allowable amount.

36. The measurement method according to claim 35, further comprising measuring the position of the measuring member after the setting information has been set and before measuring the position of the object to be measured using the setting information, calculating the difference after the setting information has been set and before measuring the position of the object to be measured using the setting information, and outputting the warning after the setting information has been set and before measuring the position of the object to be measured using the setting information.

37. The measurement method according to claim 35 or 36, further comprising measuring the position of the measuring member after the setting information has been set and measurement of the position of the object to be measured has been started using the setting information, calculating the difference after the setting information has been set and measurement of the position of the object to be measured has been started using the setting information, and outputting the warning after the setting information has been set and measurement of the position of the object to be measured has been started using the setting information.

38. The measurement method according to any one of claims 1 to 37, wherein the coordinate calculation information is first coordinate calculation information, and the setting information further comprises second coordinate calculation information used to calculate the coordinate value of the other of the second and third coordinate systems from the coordinate value of the other of the second and third coordinate systems.

39. The measurement method according to claim 38, wherein the registered position information includes information relating to the position of the measuring member in at least one of the first, second, and third coordinate systems.

40. The measurement method according to claim 38 or 39, wherein obtaining information relating to the position of the object to be measured includes: calculating the registered position in the first coordinate system from the registered position indicated by the registered position information based on the first coordinate calculation information; measuring the position of the object to be measured in the first coordinate system by irradiating the registered position in the first coordinate system with the measurement light from the first measuring device; calculating the registered position in the third coordinate system from the registered position indicated by the registered position information based on the second coordinate calculation information; and measuring the position of the object to be measured in the third coordinate system by irradiating the registered position in the third coordinate system with the measurement light from the second measuring device.

41. The measurement method according to claim 40, wherein the first coordinate system is a coordinate system defined with respect to the first measuring device, and the third coordinate system is a coordinate system defined with respect to the second measuring device.

42. The measurement method according to any one of claims 1 to 41, further comprising generating registered position information of the measurement member in the real space based on information regarding the position of the measurement member in a virtual space that mimics the real space.

43. The measurement method according to claim 42, wherein generating the registered position information in the real space includes measuring the position of the measuring member in the real space by irradiating the measuring member with measuring light in the real space based on the information relating to the position of the measuring member in the virtual space, and the registered position information is generated based on the measurement result of the measuring member in the real space.

44. The measurement method according to claim 43, wherein information is obtained regarding the difference between the position of the measurement member in the virtual space and the position of the measurement member in the real space, based on the measurement results.

45. The measurement method according to claim 44, further comprising measuring the position of the other measuring member in the real space by irradiating the other measuring member in the real space with measurement light based on information regarding the position of another measuring member different from the measuring member in the virtual space and information regarding the difference, wherein another registered position information different from the registered position information is generated based on the measurement result of the other measuring member in the real space.

46. ​​The measurement method according to claim 44, further comprising measuring the position of the measuring member in the real space by irradiating the measuring member in the real space with measurement light based on information relating to a position different from the position of the measuring member in the virtual space and information relating to the difference, wherein another registered position information different from the registered position information is generated based on the measurement result of the measuring member in the real space.

47. A measurement method for measuring the position of an object to be measured using measuring light, comprising: measuring the position of a measuring member by irradiating the measuring light onto the object to be measured in a first period; setting registered position information relating to the position of the measuring member, calculated based on the measurement result of the position of the measuring member, as setting information; and obtaining the position of the measuring member by irradiating the measuring light onto the measuring member based on the registered position information in a second period following the first period.

48. A measurement method for measuring the position of an object to be measured using measuring light, comprising: simulating a virtual space in which the object to be measured is located; setting information regarding a measurement position for measuring the position of the object to be measured located in the virtual space in the virtual space; and obtaining information regarding the position of a measuring member in the real space by irradiating a measuring member located in the real space in which the object to be measured is located with measuring light, based on the information regarding the measurement position.

49. The measurement method according to claim 48, wherein the object to be measured includes a processing device that performs a predetermined process on a workpiece, the simulation includes simulating the movement of the processing device in the real space in the virtual space, and the information relating to the measurement position includes first position information of the processing device during the period in which the processing device is located in a first position and second position information of the processing device during the period in which the processing device is located in a second position.

50. The measurement method according to claim 48 or 49, which includes setting setting information including registered position information generated based on information regarding the position of the measuring member in the real space, and after setting the registered position information, obtaining the position of the measuring member in the real space by irradiating the measuring member, which is placed on the object to be measured in the real space, with measuring light based on the registered position information.

51. A measurement method for measuring the position of an object to be measured using measuring light, comprising: setting registered position information relating to the position of a measuring member placed on the object to be measured as setting information during a first period; and measuring the position of the measuring member by irradiating the measuring member with measuring light based on the registered position information during a second period following the first period.

52. A measurement system for measuring the position of an object to be measured using measuring light, comprising: a control device for setting setting information including coordinate calculation information used to calculate the coordinate value of the other of the first and second coordinate systems from the coordinate value of the one of the first and second coordinate systems; and registered position information relating to a position registered as the position of a measuring member, which is positioned at a fixed position relative to the object to be measured, in at least one of the first and second coordinate systems; and a measurement device for acquiring information relating to the position of the object to be measured by irradiating the measuring light at the position indicated by the registered position information.

53. The processing apparatus is a robot, comprising the robot and a measuring device that emits the measuring light and receives the reflected light of the measuring light from the measuring member placed on the object to be measured, wherein the measurement method described in any one of claims 6 to 30 is performed.

54. A robot system comprising: a robot that processes a workpiece; and a measuring device that irradiates a measuring member, which is positioned on at least one of the workpiece and the robot, with measuring light to measure the position of the workpiece and the position of the robot, wherein the measuring device irradiates the measuring member with measuring light based on registered position information relating to the position of the measuring member, and the movement of the robot is controlled based on the measurement result of the measuring member obtained by irradiating the measuring member with measuring light based on the registered position information.

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