Composite member and method for manufacturing composite member

Abstract

In a composite member configured by fitting a shaft part of a second member into an insertion hole of a first member, the second member has an irradiation region formed by being irradiated with a laser in a portion excluding both axial-direction ends of the outer peripheral surface of the shaft part, and functions as a supported part of which both axial-direction ends are supported by the insertion hole.

Description

Composite member and method for manufacturing the same

[0001] This specification discloses a composite member and a method for manufacturing the same.

[0002] Conventionally, a composite member composed of two members has been known. For example, Patent Document 1 describes a member configured by adhering a tip member having a suction port and a flange member with an adhesive as a suction nozzle for sucking parts. Further, it is also described that the tip member is coated with, for example, Teflon (registered trademark, the same shall apply hereinafter).

[0003] International Publication No. 2021 / 085073

[0004] In the above-described composite member, if a coating layer is also formed on the adhesion surface of the members, the adhesion strength may decrease, and the members may separate over time. Further, even if the coating layer is not formed, depending on the surface properties of the members, the adhesion strength may decrease, and there is a similar risk. In order to obtain a surface property suitable for adhesion, it is conceivable to perform a treatment for roughening the surface, such as laser irradiation. On the other hand, in a composite member configured by fitting the shaft portion of one member into the insertion hole of the other member, it is required to suppress the rattling of the shaft portion with respect to the insertion hole. Therefore, it is not preferable that the dimensions of the entire shaft portion decrease due to the above treatment.

[0005] The main object of the present disclosure is to improve the fitting accuracy of the shaft portion of the second member into the insertion hole of the first member and to more appropriately configure the composite member.

[0006] The present disclosure has adopted the following means to achieve the above main object.

[0007] The composite member of the present disclosure is a composite member configured by fitting the shaft portion of the second member into the insertion hole of the first member, wherein the second member has an irradiation region formed by irradiating a portion of the outer peripheral surface of the shaft portion excluding both axial ends, and both ends function as supported portions supported by the insertion hole. This is the gist.

[0008] In the composite member of this disclosure, the accuracy of fitting the shaft portion of the second member into the insertion hole of the first member can be improved, allowing for a more appropriate configuration.

[0009] A schematic diagram showing the general configuration of the mounting device 10. A block diagram showing the general configuration of the mounting device 10. A cross-sectional view of the suction nozzle 30. A process diagram showing an example of a method for manufacturing the suction nozzle. An explanatory diagram showing an example of a tip member 41A that has been Teflon coated. An explanatory diagram showing an example of laser irradiation of the shaft portion 43 of the tip member 41A. An explanatory diagram showing an example of laser irradiation of the shaft portion 43 of the tip member 41A. An explanatory diagram showing an example of laser irradiation with two-sided irradiation. A side view of the tip member 41. An explanatory diagram showing an example of assembling the tip member 41 to the main body member 31. An explanatory diagram showing an example of laser irradiation with four-sided irradiation. A photograph of the shaft surface before laser irradiation. A photograph of the shaft surface after laser irradiation.

[0010] Embodiments of this disclosure will be described with reference to the drawings. Figure 1 is a schematic diagram showing the configuration of the mounting device 10. Figure 2 is a schematic block diagram showing the configuration of the mounting device 10. In this embodiment, the left-right direction (X-axis), front-back direction (Y-axis), and up-down direction (Z-axis) are as shown in Figure 1.

[0011] As shown in Figure 1, the mounting apparatus 10 includes a feeder 12, a substrate transport unit 14, a mounting head 20, a moving unit 50, and a control unit 60 (see Figure 2). The feeder 12 is detachably mounted on a feeder stand (not shown) installed at the front of the mounting apparatus 10. The feeder 12 is, for example, a tape feeder and includes a tape in which components are contained in a plurality of cavities formed at predetermined intervals, a reel around which the tape is wound, and a tape feeding device that feeds the tape from the reel. The substrate transport unit 14 includes, for example, a pair of conveyor belts that are spaced apart in the front-to-back direction (Y-axis direction) and spanned in the left-to-right direction, and transports the substrate S from left to right in Figure 1 by driving the conveyor belts with the drive of a motor (not shown).

[0012] The mounting head 20 includes one or more cylindrical syringes to which suction nozzles 30 for picking up parts are detachably attached, and a lifting unit for raising and lowering the syringes. The moving unit 50 has an X-axis slider 52 that moves in the left-right direction (X-axis direction) and a Y-axis slider 54 that moves in the front-back direction (Y-axis direction). The Y-axis slider 54 is supported by a pair of Y-axis guide rails 53 that extend in the front-back direction (Y-axis direction) and moves back and forth by the drive of a motor (not shown). The X-axis slider 52 is supported by a pair of X-axis guide rails 51 that extend from the Y-axis slider 54 in the left-right direction (X-axis direction) and moves left and right by the drive of a motor (not shown). The mounting head 20 is attached to the X-axis slider 52. The moving unit 50 moves the mounting head 20 in the horizontal direction (XY-axis direction) by the X-axis slider 52 and the Y-axis slider 54.

[0013] The mounting apparatus 10 also includes a mark camera 16, a parts camera 18, and a nozzle stocker 19. The mark camera 16 images reference marks and other markings on the substrate S from above. The mark camera 16 is mounted on an X-axis slider 52 and is movable horizontally (in the XY axis direction) by a moving part 50. The parts camera 18 images parts and other markings held by the suction nozzle 30 from below. The parts camera 18 is installed between the feeder 12 and the substrate transport unit 14. The nozzle stocker 19 is, for example, located next to the parts camera 18 and has multiple storage compartments capable of accommodating multiple types of suction nozzles 30. The suction nozzles 30 attached to the mounting head 20 are appropriately replaced with those suitable for the type of part to be mounted.

[0014] The control unit 60 is configured as a microprocessor centered on a CPU 61 and includes a ROM 62 for storing processing programs, a RAM 63 used as a work area, an HDD 64 as a storage unit for various data, and an input / output interface. Note that the storage unit is not limited to an HDD 64 and may be an SSD or other. The control unit 60 outputs control signals to the feeder 12, the substrate transport unit 14, the mounting head 20, the moving unit 50, the mark camera 16, the parts camera 18, the nozzle stocker 19, etc. The control unit 60 also receives various signals from the feeder 12, the substrate transport unit 14, the mounting head 20, the moving unit 50, etc., as well as images captured by the mark camera 16 and the parts camera 18. The HDD 64 stores production information of the substrate S. The production information of the substrate S includes information such as the type of substrate to be mounted, the type of components, the mounting order, the mounting position, the number of components mounted, and the type of suction nozzle 30 to be used.

[0015] The configuration of the suction nozzle 30 will be described below. Figure 3 is a cross-sectional view of the suction nozzle 30. The suction nozzle 30 comprises a main body member 31 and a tip member 41.

[0016] The main body member 31 comprises a sleeve 32, a pin 34, and a pipe 36. The sleeve 32 is a cylindrical member formed to have an outer diameter that allows it to be installed inside the syringe of the mounting head 20. The sleeve 32 has an annular flange portion 33 that extends radially outward from below the center in the vertical direction. The outer diameter of the flange portion 33 is larger than the outer diameter of the housing portion (not shown) of the nozzle stocker 19. The flange portion 33 is supported by the edge of the housing portion when the suction nozzle 30 is housed in the housing portion. On the cylindrical wall portion of the sleeve 32, above the flange portion 33, a pair of pin holes 32a are formed at radially opposing positions. The pin 34 is positioned in the pair of pin holes 32a so as to penetrate the sleeve 32 radially and protrudes radially outward from the outer circumferential surface of the sleeve 32. Furthermore, the syringe to which the suction nozzle 30 (sleeve 32) is attached has a slit-shaped engagement hole, and when the suction nozzle 30 is attached to the syringe, the pin 34 slidably engages with the engagement hole of the syringe.

[0017] The pipe 36 is a cylindrical member slidably positioned within the sleeve 32 and has a central hole 37 that penetrates it axially (vertically). The pipe 36 can be made of materials such as SUS303 or A2017. The pipe 36 has a pair of elongated holes 36a formed at radially opposing positions. The aforementioned pin hole 32a is located within the formation range of the elongated holes 36a in the axial direction. The pin 34 is positioned to move relatively vertically within the elongated holes 36a. Therefore, the pipe 36 can slide vertically within the sleeve 32 within the range in which the pin 34 can move relatively within the elongated holes 36a. Although not shown in the illustration, when the suction nozzle 30 is attached to the syringe of the mounting head 20, the upper end of the pipe 36 abuts against the air piping inside the syringe, and the central hole 37 communicates with the air piping. The air piping is biased downward by a spring located inside the syringe. The biasing force of this spring also biases the pipe 36 downward, positioning it in a predetermined position (see Figure 3). Furthermore, when an upward force is applied to the pipe 36 via the tip member 41, the pin 34 moves upward within the range of relative movement possible within the elongated hole 36a, against the biasing force of the spring.

[0018] The tip member 41 comprises a substantially cylindrical suction portion 42 and a cylindrical shaft portion 43 with a smaller outer diameter than the suction portion 42, and is formed as a stepped shaft-shaped member. The tip member 41 can be made of materials such as SUS303, A2017, or HPM38. The tip surface of the suction portion 42 (the lower end surface in Figure 3) is formed to have an opening for adsorbing parts, namely a suction port 42a. The shaft portion 43 is formed to have an outer diameter that allows it to be fitted into the pipe 36 of the main body member 31. The tip member 41 is attached to the main body member 31 by bonding the outer circumferential surface of the shaft portion 43, which is fitted into the pipe 36 of the main body member 31, to the inner circumferential surface of the pipe 36 using an adhesive 38. The adhesive 38 can be an anaerobic adhesive, a two-component epoxy adhesive, or a one-component epoxy adhesive. The tip member 41 also has a through hole 44 that penetrates axially and communicates with the suction port 42a. The through-hole 44 communicates with the central hole 37 of the pipe 36 when the tip member 41 is attached to the main body member 31. Therefore, when the suction nozzle 30 is attached to the syringe of the mounting head 20, the suction port 42a of the tip member 41 communicates with the air piping inside the syringe via the through-hole 44 and the central hole 37, and negative or positive pressure from the air piping acts upon it.

[0019] In this embodiment, the suction nozzle 30 is configured to adsorb and hold a component 70 as illustrated in Figure 1. The component 70 is, for example, an LED chip having a chip body 71 with an LED as a light-emitting element, and a dome portion 72 formed in a hemispherical shape with a light-transmitting resin to cover the LED. The width and height of the opening of the suction port 42a of the suction nozzle 30 are formed to accommodate the dome portion 72. In addition, the upper surface of the chip body 71 and the dome portion 72 of the component 70 may be formed of an adhesive resin. In that case, when mounting the component 70 adsorbed by the suction nozzle 30 onto the substrate S, the component 70 is likely to remain attached to the suction nozzle 30 without detaching from the suction port 42a, a phenomenon known as "sticking back." To prevent such sticking back, in this embodiment, the tip member 41 of the suction nozzle 30 is coated with Teflon during manufacturing to provide slipperiness.

[0020] The manufacturing method for the suction nozzle 30 is described below. Figure 4 is a process diagram showing an example of the manufacturing method for the suction nozzle. In the manufacturing of the suction nozzle 30, first, each component of the suction nozzle 30, namely the sleeve 32, pin 34, pipe 36, and the rough shape of the tip member 41 are prepared (step S100). The sleeve 32, pin 34, and pipe 36 prepared in S100 are in the required shape and dimensions and are ready for assembly. The rough shape of the tip member 41 is then processed from step S120 onwards to obtain the required shape and dimensions for the tip member 41. Next, the pipe 36 is inserted into the sleeve 32, and with the pair of pin holes 32a of the sleeve 32 and the pair of elongated holes 36a of the pipe 36 communicating with each other, the pin 34 is inserted so as to pass through the pin holes 32a and the elongated holes 36a to attach the pin 34 and assemble the main body member 31 (step S110). Furthermore, the assembly of the main body component 31 is not limited to process S110, but may be performed before process S140.

[0021] Next, the rough shape of the tip member 41 is coated with Teflon (step S120). As shown in Figure 5, step S120 forms a tip member 41A with a Teflon coating layer TC formed on its surface. The formation of this Teflon coating layer TC improves the slipperiness of the suction port 42a of the tip member 41, thereby preventing the aforementioned part 70 from being picked up.

[0022] Furthermore, the laser head 100 of the laser device irradiates the area of ​​the shaft portion 43 of the tip member 41A, excluding both ends (step S130, Figures 6 and 7). In step S130, as shown in Figure 6, the laser irradiates the outer surface of the shaft portion 43 of the tip member 41A, with both ends in the axial direction designated as non-irradiated areas and the center as the irradiated area. In this embodiment, the length of the non-irradiated area in the axial direction is set to a constant value (for example, 0.5 mm). Although not particularly limited, the length of the irradiated area in the axial direction is several millimeters, for example, 2.5 mm, and is longer than the non-irradiated area. In addition, the laser device irradiates the laser head 100 in a direction perpendicular to the shaft portion 43 of the tip member 41A (scanning direction in Figure 6(a)) and in a direction parallel to the shaft portion 43 of the tip member 41A (scanning direction in Figure 6(b)), and laser irradiation is performed in either scanning direction. Figure 7 illustrates laser irradiation from one direction to the outer surface of the shaft portion 43. In the laser device, the laser head 100 and the shaft portion 43 are configured to be rotatable relative to each other. Therefore, as shown in Figure 8, for example, the laser head 100 and the shaft portion 43 can be rotated 180 degrees relative to each other to perform laser irradiation from two directions, that is, laser irradiation to each region of the outer circumferential surface of the shaft portion 43 divided into two in the circumferential direction (two-sided irradiation).

[0023] In this step S130, the manufacturing of the tip member 41 is completed. In addition, the Teflon coating layer TC that was formed in the central irradiation area 43a in the axial direction of the shaft portion 43 of the tip member 41 is removed by laser irradiation. Also, the outer diameter of the central irradiation area 43a in the axial direction of the shaft portion 43 becomes slightly smaller than the outer diameter of the non-irradiated areas 43b at both ends (Figure 9). Next, adhesive 38 is applied to the entire outer surface of the shaft portion 43 of the tip member 41, and then the shaft portion 43 is inserted into the central hole 37 of the pipe 36 of the main body member 31 and fitted (step S140, Figure 10). This completes the manufacturing of the suction nozzle 30 (Figure 3). Note that in step S140, it is sufficient to apply adhesive 38 to at least the central irradiation area 43a of the outer surface of the shaft portion 43.

[0024] In this embodiment, as described above, a Teflon coating layer TC is formed on the tip member 41, resulting in good lubricity not only on the suction port 42a but also on the shaft portion 43. Therefore, even if adhesive 38 is applied to the shaft portion 43 with the Teflon coating layer TC still formed on it and fitted into the central hole 37 of the pipe 36, sufficient adhesive strength may not be ensured. In that case, problems such as the tip member 41 falling off the main body member 31 may occur due to the long-term use of the suction nozzle 30. On the other hand, even if Teflon coating is performed with the shaft portion 43 masked, it is not possible to completely prevent the formation of the Teflon coating layer TC on the shaft portion 43, so similar problems may occur. In this embodiment, after Teflon coating, the central region (irradiation region 43a) of the shaft portion 43 is irradiated with a laser to remove the Teflon coating layer TC and roughen the surface, thereby reducing the lubricity of the irradiation region 43a and ensuring sufficient adhesive strength of the adhesive 38. Furthermore, although the outer diameter of the central irradiation area 43a becomes slightly smaller due to laser irradiation, the outer diameter of both ends can be prevented from becoming smaller by forming non-irradiated areas 43b at both ends. Therefore, the non-irradiated areas 43b at both ends of the shaft portion 43 can function as supported parts supported by the central hole 37, allowing the shaft portion 43 to be securely fitted into the pipe 36. This prevents the shaft portion 43 from rattling relative to the pipe 36, thereby suppressing misalignment of the axial centers of the main body member 31 and the tip member 41, and preventing a decrease in the mounting accuracy of the components.

[0025] Here, the correspondence between the components of this embodiment and the components of the present disclosure will be clarified. The main body member 31 of this embodiment corresponds to the first component (main body member) of the present disclosure, and the tip member 41 corresponds to the second component (tip member). The suction nozzle manufacturing method shown in Figure 4 corresponds to the manufacturing method of the composite component of the present disclosure.

[0026] The suction nozzle 30 of the embodiment described above comprises a main body member 31 having a central hole 37 (insertion hole) formed in the axial direction to which negative pressure for component suction is supplied, and a tip member 41 having a through hole 44 that penetrates in the axial direction to connect the component suction port 42a with the central hole 37 of the main body member 31. This suction nozzle 30 is constructed by fitting the shaft portion 43 of the tip member 41 into the central hole 37 of the main body member 31. Furthermore, the tip member 41 has an irradiation region 43a formed on the outer circumferential surface of the shaft portion 43, excluding both ends in the axial direction, where the laser is irradiated, and a non-irradiated region 43b formed at both ends in the axial direction where the laser is not irradiated. Since these non-irradiated regions 43b at both ends function as supported portions supported by the central hole 37 of the shaft portion 43, rattle of the shaft portion 43 relative to the central hole 37 can be suppressed, and the suction nozzle 30 can be configured more appropriately.

[0027] Furthermore, the tip member 41 has a Teflon coating layer TC that provides slipperiness, except for the irradiation area 43a of the shaft portion 43, and is bonded to the central hole 37 of the main body member 31 (pipe 36) via adhesive 38 in at least the irradiation area 43a. Therefore, it is possible to ensure adhesion in the irradiation area 43a where the Teflon coating layer TC is not formed, while providing slipperiness to parts of the tip member 41 other than the shaft portion 43, such as the suction port 42a.

[0028] Furthermore, the non-irradiated regions 43b at both ends of the shaft portion 43 of the tip member 41 are formed to be approximately the same length in the axial direction. As a result, both ends of the shaft portion 43 are supported approximately evenly within the central hole 37 of the pipe 36, thereby suppressing rattling of the shaft portion 43.

[0029] Furthermore, the irradiation area 43a of the tip member 41 is formed by irradiating each portion of the outer circumferential surface of the shaft portion 43, which is divided into two parts in the circumferential direction, with a laser. Therefore, the laser can be efficiently irradiated onto the outer circumferential surface of the shaft portion 43 to form the irradiation area 43a.

[0030] It goes without saying that this disclosure is not limited in any way to the embodiments described above, and can be implemented in various forms as long as they fall within the technical scope of this disclosure.

[0031] In the embodiment described above, the irradiation area 43a of the tip member 41 is formed by irradiating each portion of the outer circumferential surface of the shaft portion 43 with a laser, but it is not limited to this. For example, as shown in Figure 11, the laser head 100 and the shaft portion 43 may be rotated 90 degrees relative to each other to irradiate with a laser from four directions, that is, to irradiate each of the four regions of the outer circumferential surface of the shaft portion 43 with a laser (four-sided irradiation). In this way, the outer circumferential surface of the shaft portion 43 can be evenly irradiated with a laser to form the irradiation area 43a. Note that it is not limited to two-sided or four-sided irradiation, and the outer circumferential surface of the shaft portion 43 may be further divided in the circumferential direction and irradiated with a laser. Alternatively, it may be one-sided irradiation (see Figure 7), but it is preferable to irradiate two or more sides in order to ensure adhesion.

[0032] In this embodiment, the non-irradiated regions 43b at both ends of the shaft portion 43 are formed to be approximately the same length in the axial direction, but the invention is not limited to this, and one of the non-irradiated regions 43b at both ends may be formed to be longer than the other non-irradiated region 43b.

[0033] In this embodiment, the tip member 41 has a slippery Teflon coating layer TC formed on it, except for the irradiation area 43a of the shaft portion 43, but it is not limited to this. For example, a slippery coating layer may be formed by a coating other than Teflon coating, such as a silicone coating or a urethane coating. Alternatively, it is not limited to having such a slippery coating layer formed, and a coating layer may not be formed at all.

[0034] In this embodiment, the tip member 41 has its shaft portion 43 bonded to the central hole 37 of the main body member 31 via adhesive 38, but it is not limited to this. That is, it is not limited to being bonded via adhesive 38, and it is acceptable as long as the shaft portion 43 of the tip member 41 is fitted into the central hole 37 of the main body member 31.

[0035] In this embodiment, the present disclosure is applied to a suction nozzle 30 used in a mounting device 10, but it is not limited to this, and any suction nozzle 30 that picks up parts is acceptable, and may be a suction nozzle used in articulated robots or the like. Alternatively, the present disclosure is not limited to applying it to a suction nozzle 30, but may be applied to any composite member that is constructed by fitting the shaft portion of a second member into the insertion hole of a first member.

[0036] The present disclosure may be configured as follows. For example, the present disclosure is a method for manufacturing a composite member comprising fitting the shaft portion of a second member into an insertion hole of a first member, and the gist of the method is to include: an irradiation step of forming an irradiation area by irradiating the outer circumferential surface of the shaft portion of the second member, excluding both ends in the axial direction, with a laser; and a fitting step of fitting the shaft portion of the second member into the insertion hole of the first member.

[0037] The manufacturing method for composite members of the present disclosure allows for the more appropriate manufacturing of composite members formed by fitting the shaft portion of a second member into an insertion hole of a first member. Steps to realize each function of the composite member of the present disclosure may be added to this manufacturing method for composite members. For example, the manufacturing method for composite members of the present disclosure may include a coating step of forming a slippery coating layer on the shaft portion of the second member before the irradiation step, and in the fitting step, an adhesive may be applied to at least the irradiation area of ​​the shaft portion of the second member before fitting it into the insertion hole of the first member. In this way, slipperiness can be provided to the portion of the second member other than the shaft portion while ensuring adhesion in the irradiation area where the coating layer is not formed.

[0038] The following describes a specific example of the fabrication of a composite member of the pipe 36 and tip member 41 of the suction nozzle 30 of this disclosure. However, this disclosure is not limited to the following embodiments.

[0039] [Examples 1-4] Examples 1-4 were created by applying adhesive 38 to a tip member 41 manufactured by S120 and S130 of the above-described method for manufacturing the suction nozzle 30 and fitting it onto a pipe 36, thereby creating a composite member of the tip member 41 and the pipe 36. In these examples, for example, a pipe 36 made of SUS303 was used. The tip member 41 was formed by applying a Teflon coating to a rough material made of SUS303, for example, to form a Teflon coating layer TC. In addition, an irradiation area 43a was formed by irradiating with a laser head 100, for example, a YVO4 laser. In Examples 1-3, the scanning direction of the laser head 100 was perpendicular to the shaft portion 43 (see Figure 6(a)), and in Example 4, it was parallel to the shaft portion 43 (see Figure 6(b)). In Example 1, the laser irradiation surface on the shaft portion 43 was one surface (see Figure 7), in Example 2, it was two surfaces (see Figure 8), and in Examples 3 and 4, it was four surfaces (see Figure 11).

[0040] [Comparative Example 1] As a comparative example, a composite member of the tip member 41 and the pipe 36 was manufactured using the same process as in Examples 1 to 4, except that laser irradiation was not performed, and this was designated as Comparative Example 1.

[0041] [Evaluation] The adhesive strength (pull-out strength), fracture torque, and diameter change were evaluated for the composite members of Examples 1 to 4 and Comparative Example 1. For adhesive strength, a force was applied to the tip member 41 and the pipe 36 in a direction that pulls them apart (axial direction), and the force at which the tip member 41 (shaft portion 43) detached from the pipe 36 was measured. For fracture torque, a torque was applied to rotate the tip member 41 and the pipe 36 relative to each other, and the torque at which the adhesive 38 (adhesive portion) broke and rotated was measured. For diameter change, the amount of change in the dimension of the irradiated area 43a of the shaft portion 43 was measured before and after laser irradiation.

[0042] As shown in Table 1, the adhesive strength was a low value of less than 200 N in Comparative Example 1, whereas it was a high value of 400 N or more in all of Examples 1 to 4, and particularly a high value of 480 N or more in Examples 2 to 4. The breaking torque was a low value of less than 20 cN·m (15 cN·m or less) in Comparative Example 1, whereas it was a high value of 20 cN·m or more in all of Examples 1 to 4, and particularly a high value of 27.0 cN·m or more in Examples 2 to 4. From these results, in Examples 1 to 4 in which the shaft portion 43 was irradiated with a laser to form the irradiation region 43a, both the adhesive strength and the breaking torque were larger than those in Comparative Example 1 where the laser was not irradiated, indicating that the adhesive force increased. Further, in Examples 2 to 4 in which the laser irradiation was performed by two-sided irradiation or four-sided irradiation, it was found that the adhesive force increased more than that in Example 1 where the one-sided irradiation was performed. It was confirmed that the difference between the two-sided irradiation and the four-sided irradiation was not large, and the difference between the orthogonal direction and the parallel direction in the scanning direction was also not large. The change in the diameter dimension was 0.002 mm in Example 1 and 0.004 mm in Examples 2 to 4, and no change was observed that would affect the fitting between the shaft portion 43 and the pipe 36.

[0043]

[0044] Further, Table 2 shows the results of surface component analysis before and after the laser irradiation to the irradiation region 43a of the shaft portion 43. As shown in Table 2, C and Ni increased, while O, F, P, and Fe decreased. In particular, it was found that F, which is one of the main components of Teflon, decreased significantly to about 1 / 6. Therefore, it is considered that the influence of Teflon was reduced by the laser irradiation, resulting in a decrease in the slipperiness. Fig. 11 is a photograph of the surface of the shaft portion before the laser irradiation, and Fig. 12 is a photograph of the surface of the shaft portion after the laser irradiation. The surface roughness Rz before the laser irradiation was 3.7 μm. In contrast, the surface roughness Rz after the laser irradiation was 6.1 μm. Therefore, it is considered that the surface roughness became rougher due to the laser irradiation, leading to an increase in the adhesive force. As described above, it is considered that the adhesive force increased due to the synergistic effect of the decrease in the slipperiness due to the decrease in the Teflon component and the increase in the surface roughness by the laser irradiation to the irradiation region 43a of the shaft portion 43.

[0045]

[0046] In this specification, the technical idea of changing the "composite member described in claim 1 or 2" in claim 4 at the time of filing the application to the "composite member described in any one of claims 1 to 3", the technical idea of changing the "composite member described in claim 1 or 2" in claim 5 at the time of filing the application to the "composite member described in any one of claims 1 to 4", the technical idea of changing the "composite member described in claim 1 or 2" in claim 6 at the time of filing the application to the "composite member described in any one of claims 1 to 4", and the technical idea of changing the "composite member described in claim 1 or 2" in claim 7 at the time of filing the application to the "composite member described in any one of claims 1 to 6" are also disclosed.

[0047] The present disclosure is applicable to the technical field of a composite member configured by fitting a shaft portion of a second member into an insertion hole of a first member.

[0048] 10 Mounting device, 12 Feeder, 14 Substrate conveyance unit, 16 Mark camera, 18 Parts camera, 19 Nozzle stocker, 20 Mounting head, 30 Suction nozzle, 31 Body member, 32 Sleeve, 32a Pin hole, 33 Flange portion, 34 Pin, 36 Pipe, 36a Long hole, 37 Center hole, 38 Adhesive (adhesive portion), 41 Tip member, 42 Suction portion, 42a Suction port, 43 Shaft portion, 43a Irradiation region, 43b Non-irradiation region, 44 Through hole, 50 Moving portion, 51 X-axis guide rail, 52 X-axis slider, 53 Y-axis guide rail, 54 Y-axis slider, 60 Control unit, 61 CPU, 62 ROM, 63 RAM, 64 HDD, 100 Laser head, S Substrate, TC Teflon coating layer.

Claims

1. A composite member comprising a shaft portion of a second member fitted into an insertion hole of a first member, wherein the second member has an irradiation region formed by irradiating the outer circumferential surface of the shaft portion with respect to both ends in the axial direction, and the two ends function as supported portions supported by the insertion hole.

2. The composite member according to claim 1, wherein the second member has a slippery coating layer formed on the portion excluding the irradiation area, and the shaft portion is bonded to the insertion hole via an adhesive, at least in the irradiation area.

3. The composite member according to claim 2, wherein the second member has a Teflon coating layer formed as the coating layer.

4. The composite member according to claim 1 or 2, wherein the second member has non-irradiated regions at both ends of the shaft portion that are not irradiated with a laser, and these regions are substantially the same length in the axial direction.

5. The composite member according to claim 1 or 2, wherein the irradiation area of ​​the second member is formed by irradiating each portion obtained by dividing the outer surface of the shaft portion in the circumferential direction into two parts with a laser.

6. The composite member according to claim 1 or 2, wherein the irradiation area of ​​the second member is formed by irradiating each of the four portions obtained by dividing the outer surface of the shaft portion in the circumferential direction with a laser.

7. The composite member according to claim 1 or 2, wherein the composite member is an adsorption nozzle that adsorbs a part by negative pressure, the first member is a cylindrical main body member having a central hole formed in the axial direction as the insertion hole, through which negative pressure is supplied, and the second member is a tip member having an adsorption port for a part formed so as to open on the opposite side of the shaft in the axial direction, and a through hole formed so as to communicate the adsorption port with the central hole of the first member.

8. A method for manufacturing a composite member, comprising fitting the shaft portion of a second member into an insertion hole of a first member, the method comprising: an irradiation step of irradiating the outer circumferential surface of the shaft portion of the second member, excluding both ends in the axial direction, with a laser to form an irradiation area; and a fitting step of fitting the shaft portion of the second member into the insertion hole of the first member.

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