Test handler

Abstract

This test handler comprises: a press back plate that can be moved toward a tester; a press which supports a press actuator for pushing the press back plate, and which is disposed to be spaced apart from the press back plate; a first temperature-regulating unit and a second temperature-regulating unit, which are for supplying a temperature-regulating gas; and a duct unit which is disposed between the press and the press back plate so as to guide, to the press back plate, the temperature-regulating gas supplied from the first temperature-regulating unit and the second temperature-regulating unit, wherein the first temperature-regulating unit includes a first fan disposed to be higher than the duct unit, and the second temperature-regulating unit includes a second fan disposed to be lower than the duct unit.

Description

Test handler

[0001] The present invention relates to a test handler.

[0002] A test handler is a device that supports testing of electronic components, such as semiconductor devices, manufactured through a specified manufacturing process, and classifies the electronic components by grade based on the test results. The test handler can electrically connect electronic components to test sockets equipped in the tester.

[0003] Once the electronic component is connected to the test socket, testing of the electronic component is performed. This testing is conducted in a standard test temperature environment desired by the requesting client. The test handler supplies a temperature-regulating gas to the electronic component to establish the standard test temperature environment.

[0004] However, the test handler has a problem in that it cannot create the standard test temperature environment desired by the customer due to the self-heating of the electronic components during testing. If the electronic component test is performed in a temperature environment different from the standard temperature, part or all of the electronic component and the test handler may be damaged, and the reliability of the electronic component test may be lost.

[0005] Embodiments of the present invention were invented against the background described above and aim to provide a test handler capable of ensuring the reliability of electronic component testing by preventing changes in the test standard temperature environment desired by the customer.

[0006] A test handler according to an embodiment of the present invention comprises: a press backplate configured to be movable toward a tester; a press drive for pushing the press backplate; a press that supports the press drive and is spaced apart from the press backplate; a first temperature control unit and a second temperature control unit for supplying a temperature control gas; and a duct unit disposed between the press and the press backplate to guide the temperature control gas supplied from the first temperature control unit and the second temperature control unit to the press backplate, wherein the first temperature control unit includes a first fan disposed above the duct unit, and the second temperature control unit includes a second fan disposed below the duct unit, and the rotation center of the first fan and the rotation center of the second fan are disposed perpendicular to a virtual first plane extending from the press backplate and a virtual second plane extending from the press.

[0007] In addition, the first fan and the second fan may be positioned between the first plane and the second plane.

[0008] Additionally, the first fan may be positioned on the upper virtual plane among a plurality of virtual planes facing each other in the vertical direction, and the second fan may be positioned on the lower plane among the plurality of virtual planes facing each other in the vertical direction.

[0009] Additionally, the first fan and the second fan comprise a fan housing that provides a gas inlet for gas to be introduced, a gas outlet for the temperature-controlled gas to be discharged, and a hopper portion formed tapered to guide the temperature-controlled gas to the duct unit; a fan blade for blowing the temperature-controlled gas from the gas inlet to the duct unit; and a fan motor driven in a direction perpendicular to the rotation axis of the fan blade, and when viewed from the edge portion of the duct unit in a direction perpendicular to the rotation center of the first fan, the width of the fan blade may be greater than the width of the edge portion of the gas outlet and smaller than the width of the edge portion of the duct unit.

[0010] Additionally, the width of the fan blade may be smaller than the movement stroke in which the backplate is moved so that the electronic component is tested by a tester.

[0011] Additionally, the press backplate includes a first press backplate movable toward an upper test area of ​​the tester; and a second press backplate movable toward a lower test area of ​​the tester, wherein the first fan is positioned above the upper test area and the second fan is positioned below the lower test area.

[0012] Additionally, the test handler further includes a sealing unit, and the duct unit is configured to be movable toward the tester together with the press backplate, and the sealing unit may be placed at the connection point between the temperature control unit and the duct unit so as to prevent leakage of the temperature control gas when the duct unit moves toward the tester.

[0013] Additionally, the sealing unit may include a guide plate connected to the gas discharge portion of the temperature control unit; and a sliding bearing disposed at the edge portion of the duct unit and capable of sliding movement by being in close contact with the guide plate when the duct unit is moved by the press drive.

[0014] In addition, the sealing unit may further include an elastic member that applies elastic force to the sliding bearing in a direction in which the sliding bearing comes into close contact with the guide plate.

[0015] In addition, the sliding bearing may have a length longer than the perimeter of the edge of the duct unit so that it extends along the edge of the duct unit and its two ends overlap each other.

[0016] Additionally, the test handler may further include a main body providing a chamber in which the press backplate, the press, the first temperature control unit and the second temperature control unit, and the duct unit are housed.

[0017] According to embodiments of the present invention, by effectively supplying the temperature control gas of the temperature control unit to the press backplate through the duct unit, it is possible to create a test standard temperature environment desired by the customer even if self-heating occurs in the electronic components.

[0018] In addition, according to embodiments of the present invention, when the duct unit is moved together with the press backplate, the sliding bearing on the duct unit side slides along the guide plate on the temperature control unit side, thereby preventing leakage of the temperature control gas at the connection point between the temperature control unit and the duct unit.

[0019] In addition, according to embodiments of the present invention, by making the width of the fan blade of the temperature control unit larger than the width of the edge portion of the gas discharge part of the fan housing and manufacturing the diameter of the fan blade longer, the blowing performance of the temperature control unit can be improved.

[0020] FIG. 1 is a conceptual diagram illustrating a test handler according to the present invention.

[0021] FIG. 2 is a configuration diagram illustrating a connection device of a test handler according to the present invention.

[0022] FIG. 3 is a perspective view illustrating the connection device of the test handler of FIG. 2.

[0023] Figure 4 is a cross-sectional view taken by cutting along line IV-IV of Figure 3.

[0024] Figure 5 is a cross-sectional view taken by cutting the VV line of Figure 3.

[0025] FIG. 6 is a perspective view illustrating a connection structure between a sealing unit and a duct unit according to the present invention.

[0026] FIG. 7 is an exploded perspective view showing the sealing unit of FIG. 6 disassembled.

[0027] FIG. 8 is a diagram showing the state in which the duct unit of the present invention is moved in one direction (right direction in FIG. 8).

[0028] FIG. 9 is a diagram showing the state in which the duct unit of the present invention is moved in the other direction (left direction of FIG. 8).

[0029] Hereinafter, specific embodiments for implementing the technical concept of the present invention will be described in detail with reference to the drawings.

[0030] In addition, in describing the present invention, if it is determined that a detailed description of related known components or functions may obscure the essence of the invention, such detailed description is omitted.

[0031] Furthermore, when it is mentioned that one component is 'connected,' 'supplied,' or 'transmitted' to another component, it should be understood that while it may be directly connected, supplied, or transmitted to that other component, there may also be other components present in between.

[0032] The terms used in this specification are used merely to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

[0033] Furthermore, it should be noted in advance that the representations indicating direction in this specification are described based on the drawings, and may be expressed differently if the direction of the object changes. For the same reason, some components in the attached drawings are exaggerated, omitted, or schematically depicted, and the size of each component does not entirely reflect its actual size.

[0034] Additionally, terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but such components are not limited by such terms. These terms are used solely for the purpose of distinguishing one component from another.

[0035] The meaning of "comprising" as used in the specification is to specify certain characteristics, regions, integers, steps, actions, elements, and / or components, and does not exclude the existence or addition of other specific characteristics, regions, integers, steps, actions, elements, components, and / or groups.

[0036] Hereinafter, a test handler according to the present invention will be described.

[0037] Referring to FIG. 1, a test handler (1) according to the present invention can connect a plurality of electronic components to a plurality of test sockets (TS) provided in a tester (T). This test handler (1) may include a test tray (10), a loading device (20), a soak chamber (30), a test chamber (40), a connecting device (50), a desoak chamber (60), and an unloading device (70).

[0038] The test tray (10) can be circulated along a cyclic path leading to the loading area (LP), the test area (TP), and the unloading area (UP) and back to the loading area (LP). Electronic components (e.g., semiconductor devices) can be placed on the test tray (10).

[0039] The loading device (20) can load electronic components to be tested, which are loaded on a customer tray, into a test tray (10) in a loading area (LP).

[0040] The soak chamber (30) can preheat or precool the electronic components of the test tray (10) that has been transported before testing. The soak chamber (30) can change the electronic components to a test temperature according to the test environment conditions before testing. The soak chamber (30) can be placed between the loading area (LP) and the test area (TP) on the circulation path.

[0041] The test chamber (40) can support testing of electronic components on a test tray (10) that has been transferred to a test area (TP) after being preheated or precooled in a soak chamber (30).

[0042] The connecting device (50) can electrically connect the electronic components of the test tray (10) in the test area (TP) to the test socket (TS) of the tester (T) by pressing the electronic components toward the test socket (TS). Specific details regarding the connecting device (50) will be described later.

[0043] The disock chamber (60) can restore the electronic components of the test tray (10) transferred from the test chamber (40) to a temperature such that unloading operations are not difficult. The disock chamber (60) can be positioned between the test area (TP) and the unloading area (UP) in the circulation path.

[0044] The unloading device (70) can unload electronic components from the test tray (10) in the unloading area (UP) by classifying them by test grade and unloading them into an empty customer tray.

[0045] Below, the connection device of the test handler will be described in detail.

[0046] Referring to FIGS. 2 and 3, the connecting device (50) can move an electronic component toward a test socket (TS) to connect the electronic component to the test socket. The connecting device (50) may include a main body (100), a press drive (200), a press backplate (300), a press (400), a temperature control unit (500), a duct unit (600), and a sealing unit (700).

[0047] The main body (100) can support a press drive (200), a press backplate (300), a press (400), a temperature control unit (500), a duct unit (600), and a sealing unit (700). The main body (100) can be provided in the form of a housing having a chamber. In other words, the main body (100) can provide an internal space in which the press drive (200), the press backplate (300), the press (400), the temperature control unit (500), the duct unit (600), and the sealing unit (700) can be housed.

[0048] The press drive (200) can provide driving force to the press backplate (300) to move the press backplate. For example, the press drive (200) may be an actuator capable of pushing the press backplate (300) from the press (400) toward the tester. As a more detailed example, the press drive (200) may move the press backplate in the forward and backward directions. The press drive (200) may be placed in the press (400).

[0049] The press backplate (300) may be positioned to be movable from the press (400) toward the tester. The press backplate (300) may be driven and connected to the press drive (200) so as to be movable by the press drive (200). The press backplate (300) may be positioned opposite the duct unit (600). The front side of the press backplate (300) may be positioned opposite the head of the tester. The press backplate (300) may include a first press backplate (310) and a second press backplate (320).

[0050] The first press backplate (310) may be a backplate movable toward the upper test area of ​​the tester. The first press backplate (310) may be positioned above the second press backplate (320). The first press backplate (310) may be positioned opposite the first duct unit (610). When the press drive (200) is operated, the first press backplate (310) may be moved by receiving driving force from the drive arm (420) to be described later. A plurality of backplate holes (301) may be formed in the first press backplate (310). The plurality of backplate holes (301) may each be connected to a plurality of duct discharge pipes (602) of the first duct unit (610) to be described later. Multiple backplate holes (301) can be spaced apart along the vertical and horizontal directions of the first press backplate (310).

[0051] The second press backplate (320) may be a backplate movable toward the lower test area of ​​the tester. The second press backplate (320) may be positioned lower than the first press backplate (310). The second press backplate (320) may be positioned opposite the second duct unit (620). When the press drive (200) is operated, the second press backplate may be moved by receiving driving force from the drive arm (420). A plurality of backplate holes (301) may be formed in the second press backplate (320). The plurality of backplate holes (301) may each be connected to a plurality of duct discharge pipes (602) of the second duct unit (620). The plurality of backplate holes (301) may be spaced apart along the vertical and horizontal directions of the second press backplate (320).

[0052] The press (400) may include a press base (410) and a drive arm (420). The press base (410) may support a press drive (200). A plurality of drive arms (420) may be disposed on the press base (410). The drive arms (420) may be driven and connected to the press drive (200). When the press drive (200) is operated, the drive arms (420) may move the press backplate (300). When the press backplate (300) is moved in the forward and backward directions, the electronic components may be electrically connected to a test socket or may not be connected to a test socket.

[0053] Referring to FIGS. 4 to 7, the temperature control unit (500) can supply a temperature control gas to the duct unit (600). The temperature control gas may refer to a gas having a temperature necessary to create a test standard temperature environment desired by the customer. The temperature of the temperature control gas may change according to changes in the test standard temperature environment desired by the customer. Since the temperature control unit (500) is built into the main body (100), the temperature control unit (500) does not require a separate cover, and even if the external temperature changes, frost may not form on the temperature control unit (500) due to the temperature change. The temperature control unit (500) may include a first temperature control unit (510) and a second temperature control unit (520).

[0054] The first temperature control unit (510) can provide a temperature-controlled gas at a temperature corresponding to the test standard temperature environment to the first duct unit (610) by heating or cooling the gas. The first temperature control unit (510) may be positioned above the first duct unit (610). The first temperature control unit (510) may include a first fan (511) and a first heater (512).

[0055] The first fan (511) may be positioned on the upper virtual plane among a plurality of virtual planes that are opposite each other in the vertical direction. The first fan (511) may be positioned between a virtual first plane extending from the press backplate (300) and a virtual second plane extending from the press (400). The center of rotation of the first fan (511) may be positioned perpendicular to the first plane and the second plane. The first fan (511) may be provided in a plurality of units positioned on the upper side of the first duct unit (610). Since the rotation axes of the plurality of first fans (511) are arranged parallel to each other, the temperature difference between the plurality of second fans (521) can be minimized. The plurality of first fans (511) can blow temperature-controlled gas into a single upper test area.

[0056] Each first fan (511) may include a fan housing (501), a fan blade (502), and a fan motor (503). The fan housing (501) may include a gas inlet section (501-1), a gas outlet section (501-2), and a hopper section (501-3). The gas inlet section (501-1) may provide a passage for gas to enter. The gas outlet section (501-2) may provide a passage for gas to exit. The hopper section (501-3) may guide gas from the fan housing (501) to the duct unit (600). The hopper section (501-3) may be formed tapered so that its cross-sectional area gradually narrows from the fan housing (501) toward the duct unit (600).

[0057] Referring again to FIG. 4, the fan blade (502) can blow temperature-controlled gas from the gas inlet (501-1) to the duct unit (600). When looking at the edge of the duct unit (600) in a direction perpendicular to the rotation center of the first fan (511), the width (W1) of the fan blade (502) may be larger than the width (W2) of the edge of the gas outlet (501-2) and smaller than the width (W3) of the edge of the duct unit (600). Additionally, the width of the fan blade (502) may be smaller than the movement stroke of the press backplate (300) to be moved so that the electronic component is tested by a tester. By configuring the width (W1) of the fan blade (502) to be greater than the width (W2) of the edge portion of the gas discharge portion (501-2) and smaller than the width (W3) of the edge portion of the duct unit (600), the phenomenon of stagnation of the temperature control gas can be reduced in the flow of the temperature control gas, and the loss of flow rate of the temperature control gas can be prevented. Through this, it was confirmed that the blowing performance of the temperature control unit (500) increased by more than 20% compared to the conventional blowing performance. The fan motor (503) can provide rotational force to the fan blade (502). The fan motor (503) can be driven and connected in a direction perpendicular to the rotation axis of the fan blade (502). The fan motor (503) can be fixed to the fan housing (501).

[0058] The first heater (512) may be a heating device capable of heating gas. The first heater (512) may be positioned on the side of the gas inlet (501-1) of the fan housing (501). In this embodiment, the first heater (512) may be provided in the form of a plurality of rods, and a plurality of first heaters (512) may be arranged side by side at the center of the gas inlet (501-1). When gas is introduced into the interior of the fan housing (501) through the gas inlet (501-1), the gas may be heated by the first heater (512) to a temperature that corresponds to the test standard temperature environment, and the temperature-controlled gas heated to a temperature that corresponds to the test standard temperature environment may be supplied to the first duct unit (610).

[0059] The second temperature control unit (520) can provide a temperature-controlled gas at a temperature corresponding to the test standard temperature environment to the second duct unit (620) by heating or cooling the gas. The first temperature control unit (510) may be positioned below the second duct unit (620). The second temperature control unit (520) may include a second fan (521) and a second heater (522).

[0060] The second fan (521) may be positioned on the lower virtual plane among a plurality of virtual planes that are opposite each other in the vertical direction. The second fan (521) may be positioned between a virtual first plane extending from the press backplate (300) and a virtual second plane extending from the press (400). The center of rotation of the second fan (521) may be positioned perpendicular to the first plane and the second plane. The second fan (521) may be provided in multiple units positioned on the upper side of the first duct unit (610). Since the rotation axes of the multiple second fans (521) are positioned parallel to each other, the temperature difference between the multiple second fans (521) can be minimized. The multiple second fans (521) can blow temperature-controlled gas into a single lower test area. Each second fan (521) may include a fan housing (501), a fan blade (502), and a fan motor (503). Since the fan housing (501), fan blade (502), and fan motor (503) of the second fan (521) correspond to the configuration of the fan housing (501), fan blade (502), and fan motor (503) of the first fan (511), a detailed description thereof will be omitted.

[0061] The second heater (522) may be a heating device capable of heating gas. In this embodiment, the second heater (522) may be provided in the form of a plurality of rods, and the plurality of second heaters (522) may be arranged side by side at the center of the gas inlet (501-1). When gas is introduced into the interior of the fan housing (501) through the gas inlet (501-1), the gas may be heated by the second heater (522) to a temperature that corresponds to the test standard temperature environment, and the temperature-controlled gas heated to a temperature that corresponds to the test standard temperature environment may be supplied to the second duct unit (620).

[0062] The duct unit (600) can receive a temperature-controlled gas from the temperature-controlled unit (500) and can supply the received temperature-controlled gas to a plurality of electronic components through the press backplate (300). The duct unit (600) can provide a flow path that guides the temperature-controlled gas toward the press backplate (300). The duct unit (600) may include a first duct unit (610) and a second duct unit (620).

[0063] The first duct unit (610) can be connected to the first temperature control unit (510). The first duct unit (610) can receive temperature control gas from the first temperature control unit (510) and can supply the received temperature control gas to the upper part of the press back plate (300). When the press back plate (300) is moved by the press drive (200), the duct unit (600) can be moved together with the press back plate (300). The first duct unit (610) may include a first duct inlet (611), a first duct outlet (612), and a first duct frame (613).

[0064] The first duct inlet (611) may provide a receiving space for receiving temperature-controlled gas from the first temperature-controlled unit (510). The first duct inlet (611) may be positioned above the press backplate (300) and the press (400). The upper part of the first duct inlet (611) may be connected to the first temperature-controlled unit (510). The lower part of the first duct inlet (611) may be connected to the upper part of the first duct frame. The first duct inlet (611) may be formed in a hopper shape such that the lower part tapers to be narrower than the upper part.

[0065] The first duct discharge section (612) can guide the temperature-controlled gas to the press backplate (300). The first duct discharge section (612) may include a duct discharge hole (601) and a duct discharge pipe (602). The duct discharge hole (601) may be a through hole that penetrates the front of the first duct frame section (613) in the front-rear direction. Multiple duct discharge holes (601) may be provided. Multiple duct discharge holes (601) may be spaced apart along the vertical and horizontal directions of the first duct frame section (613). Multiple duct discharge holes (601) may be formed in different sizes depending on the points (locations) arranged on the press backplate (300). For example, among the plurality of duct discharge holes (601), the size of the duct discharge hole (601) located at the center of the press back plate (300) may be larger than the size of the duct discharge hole (601) located at the edge of the press back plate (300). A duct discharge pipe (602) may be disposed in the plurality of duct discharge holes (601). The duct discharge pipe (602) may provide a passage for guiding the temperature-controlled gas to the press back plate (300). One end of the duct discharge pipe (602) may be oriented toward the inner space of the first duct frame part (613), and the other end of the duct discharge pipe (602) may be oriented toward the press back plate (300). Each of the plurality of duct discharge pipes (602) may correspond one-to-one with the plurality of duct discharge holes (601).

[0066] The first duct frame section (613) can guide the temperature-regulating gas from the first duct inlet section (611) to the first duct outlet section (612). An internal space in which the temperature-regulating gas can flow can be formed in the first duct frame section (613).

[0067] The second duct unit (620) can be connected to the second temperature control unit (520). The second duct unit (620) can receive temperature control gas from the second temperature control unit (520) and can supply the received temperature control gas to the upper part of the press back plate (300). The second duct unit (620) may include a second duct inlet (621), a second duct outlet (622), and a second duct frame.

[0068] The second duct inlet (621) may provide a receiving space for receiving temperature-controlled gas from the second temperature-controlled unit (520). The second duct inlet (621) may be positioned below the press backplate (300) and the press (400). The lower part of the second duct inlet (621) may be connected to the second temperature-controlled unit (520). The upper part of the second duct inlet (621) may be connected to the lower part of the second duct frame. The second duct inlet (621) may be formed in a hopper shape such that the upper part tapers to be narrower than the lower part.

[0069] The second duct discharge section (622) can guide the temperature-controlled gas to the press backplate (300). The second duct discharge section (622) may include a duct discharge hole (601) and a duct discharge pipe (602). The duct discharge hole (601) may be a through hole that penetrates the front of the second duct frame section (623) in the front-rear direction. Multiple duct discharge holes (601) may be provided. Multiple duct discharge holes (601) may be spaced apart along the vertical and horizontal directions of the second duct frame section (623). A duct discharge pipe (602) may be placed in the multiple duct discharge holes (601). The duct discharge pipe (602) may provide a passage that guides the temperature-controlled gas to the press backplate (300). One end of the duct discharge pipe (602) can be oriented toward the inner space of the second duct frame part (623), and the other end of the duct discharge pipe (602) can be oriented toward the press back plate (300). Each of the multiple duct discharge pipes (602) can correspond one-to-one with each of the multiple duct discharge holes (601).

[0070] The second duct frame section (623) can guide the temperature-regulating gas from the second duct inlet section (621) to the second duct outlet section (622). An internal space in which the temperature-regulating gas can flow can be formed in the second duct frame section (623).

[0071] A sealing unit (700) may be placed at the connection point of a temperature control unit (500) and a duct unit (600) to prevent leakage of the temperature control gas. The sealing unit (700) may maintain airtightness at the connection point of the temperature control unit (500) and the duct unit (600). The sealing unit (700) may include a first sealing unit (710) and a second sealing unit (720).

[0072] The first sealing unit (710) may be placed at the connection point of the first temperature control unit (510) and the first duct unit (610). The first sealing unit (710) may maintain airtightness at the connection point of the first temperature control unit (510) and the first duct unit (610). The first sealing unit (710) may include a guide plate (701), a sliding bearing (702), an elastic member (703), and a supporter (704).

[0073] The guide plate (701) can guide the forward and backward movement of the duct unit (600) when the duct unit (600) is moved. The guide plate (701) can be positioned between the gas discharge section (501-2) of the temperature control unit (500) and the edge section of the duct unit (600). The guide plate (701) can be connected to the gas discharge section (501-2) of the temperature control unit (500). The guide plate (701) can support the edge section of the duct unit (600) so that it can slide. A sliding bearing (702) can be positioned in close contact with the guide plate (701). A guide hole (701-1) communicating with the gas discharge section (501-2) of the temperature control unit (500) can be formed in the center of the guide plate (701). The guide hole (701-1) may be a through hole smaller in size than the gas discharge part (501-2) of the temperature control unit (500).

[0074] The sliding bearing (702) may be positioned at the upper edge or lower edge of the duct unit (600). For example, the sliding bearing (702) may be positioned at the upper edge of the first duct unit (610) and at the lower edge of the second duct unit (620). When the duct unit (600) is moved by the press drive (200), the sliding bearing (702) may slide in close contact with the guide plate (701). The sliding bearing (702) may be provided in the shape of a ring-shaped band extending along the edge of the duct unit (600). The sliding bearing (702) may be formed from a material having a relatively small coefficient of friction. In other words, the coefficient of friction between the sliding bearing (702) and the guide plate (701) may be smaller than the coefficient of friction between the supporter (704) and the guide plate (701).

[0075] The sliding bearing (702) can be formed to extend longer than the perimeter of the edge portion of the duct unit (600). Since the length of the sliding bearing (702) extends longer than the perimeter of the edge portion of the duct unit (600), when the sliding bearing (702) is placed at the edge portion of the duct unit (600), the two ends of the sliding bearing (702) can be positioned to overlap each other. For example, as shown in FIG. 7, the two ends of the sliding bearing (702) can be positioned to overlap each other in the front-rear direction. Since the two ends of the sliding bearing (702) are positioned to overlap each other, the sliding bearing (702) can effectively respond to thermal expansion due to temperature changes.

[0076] The elastic member (703) can provide elastic force to the sliding bearing (702) in a direction in which the sliding bearing (702) comes into contact with the guide plate (701). By providing elastic force in a direction in which the sliding bearing (702) comes into contact with the guide plate (701), the elastic member (703) can improve the sealing performance through the sliding bearing (702), and even if wear occurs on the sliding bearing (702), the sealing performance of the sealing unit can be continuously maintained. The elastic member (703) can be provided in multiple units spaced apart along the edge portion of the duct unit (600). The multiple elastic members (703) can elastically support the sliding bearing (702) in a balanced manner.

[0077] The supporter (704) can support the elastic member (703) and the sliding bearing (702). A channel groove (704-1) in which the sliding bearing (702) and the elastic member (703) can be seated may be formed in the supporter (704). In the channel groove (704-1), a spaced-out space may be formed in which the end of the sliding bearing (702) that does not overlap with each other and the remaining part other than the end of the sliding bearing (702) are located. The supporter (704) can be fixed to the edge of the duct unit (600) through a supporter bracket (705). The supporter bracket (705) may be placed at the connection point between the supporter (704) and the edge of the duct unit (600). The supporter bracket (705) may be provided in a shape corresponding to that of the supporter (704). The support bracket (705) can be joined with a nut together with the supporter (704) and the edge portion of the duct unit (600).

[0078] The second sealing unit (720) may be placed at the connection point of the second temperature control unit (520) and the second duct unit (620). The second sealing unit (720) can maintain airtightness at the connection point of the second temperature control unit (520) and the second duct unit (620). The second sealing unit (720) may include a guide plate (701), a sliding bearing (702), an elastic member (703), and a supporter (704). Since the guide plate (701), sliding bearing (702), elastic member (703), and supporter (704) of the second sealing unit (720) correspond to the configuration of the guide plate (701), sliding bearing (702), elastic member (703), and supporter (704) of the second sealing unit (720), a detailed description thereof will be omitted.

[0079] The operation and effects of a test handler according to one embodiment of the present invention will be described below.

[0080] Referring to FIGS. 8 and 9, the test handler (1) can pressurize a plurality of electronic components placed at a test position so that the terminals of the electronic components are electrically connected to the test socket of the tester. When the terminals of the electronic components are connected to the test socket, the tester can perform a test of the electronic components. While the test of the electronic components is being performed, the temperature control unit (500) can supply a temperature control gas to the electronic components through a supply unit to create a test standard temperature environment.

[0081] In addition, since the width of the fan blade (502) of the temperature control unit (500) is greater than the width of the edge portion of the gas discharge portion (501-2) of the fan housing (501) and the diameter of the fan blade (502) is made longer, the airflow performance of the temperature control unit (500) can be improved when the temperature control gas is blown to the supply unit.

[0082] Meanwhile, when testing of electronic components is performed, the duct unit (600) can be moved toward the test area of ​​the tester together with the press backplate (300). During this process, the guide plate (701) connected to the temperature control unit (500) can guide the duct unit (600) to move in all directions toward the test area of ​​the tester.

[0083] When the edge portion of the duct unit (600) slides on the guide plate (701), the elastic member (703) provides elastic force in the direction in which the sliding bearing (702) comes into close contact with the guide plate (701), thereby improving the sealing performance through the sliding bearing (702) and maintaining the sealing performance of the sealing unit (700) even if wear occurs on the sliding bearing (702).

[0084] This test handler (1) has the effect of preventing leakage of the temperature control gas at the connection point between the temperature control unit (500) and the duct unit (600) when the duct unit (600) moves together with the press back plate (300), as the sliding bearing (702) on the duct unit (600) side slides along the guide plate (701) on the temperature control unit (500) side.

[0085] Although the embodiments of the present invention have been described above as specific embodiments, they are merely examples and the present invention is not limited thereto, but should be interpreted as having the broadest scope in accordance with the technical concept disclosed in this specification. Those skilled in the art may implement patterns of shapes not specified by combining or substituting the disclosed embodiments, and this also does not deviate from the scope of the present invention. Furthermore, those skilled in the art may easily modify or alter the disclosed embodiments based on this specification, and it is evident that such modifications or alterations also fall within the scope of the rights of the present invention.

Claims

1. A press backplate configured to be movable toward a tester; A press drive for pushing the above press backplate; A press that supports the above-mentioned press drive and is spaced apart from the above-mentioned press backplate; A first temperature control unit and a second temperature control unit for supplying a temperature control gas; and It includes a duct unit disposed between the press and the press backplate to guide the temperature control gas supplied from the first temperature control unit and the second temperature control unit to the press backplate, and The first temperature control unit includes a first fan positioned above the duct unit, and the second temperature control unit includes a second fan positioned below the duct unit. The rotation center of the first fan and the rotation center of the second fan are positioned perpendicular to a virtual first plane extending from the press backplate and a virtual second plane extending from the press. Test handler.

2. In Paragraph 1, The first fan and the second fan are positioned between the first plane and the second plane. Test handler.

3. In Paragraph 2, The first fan is positioned on the upper virtual plane among a plurality of virtual planes facing each other in the vertical direction, and the second fan is positioned on the lower plane among the plurality of virtual planes facing each other in the vertical direction. Test handler.

4. In Paragraph 1, The first fan and the second fan mentioned above are, A fan housing providing a gas inlet for gas to be introduced, a gas outlet for the temperature-controlled gas to be discharged, and a hopper portion formed tapered to guide the temperature-controlled gas to the duct unit; A fan blade for blowing the above temperature-controlled gas from the gas inlet to the duct unit; and It includes a fan motor driven in a direction perpendicular to the rotation axis of the fan blade, and When looking at the edge of the duct unit in a direction perpendicular to the rotation center of the first fan, the width of the fan blade is greater than the width of the edge of the gas discharge portion and has a width smaller than the width of the edge of the duct unit. Test handler.

5. In Paragraph 4, The width of the above fan blade is Smaller than the movement stroke of the backplate to be moved for the electronic component to be tested by the tester, Test handler.

6. In Paragraph 1, The above press backplate is A first press backplate movable toward the upper test area of ​​the above tester; and It includes a second press backplate movable toward the lower test area of ​​the above tester, and The first fan is positioned above the upper test area, and The second fan is positioned below the lower test area, Test handler.

7. In Paragraph 1, It further includes a sealing unit, The above duct unit is configured to be movable toward the tester together with the above press backplate, and The sealing unit is positioned at the connection point between the temperature control unit and the duct unit so as to prevent leakage of the temperature control gas when the duct unit moves toward the tester. Test handler.

8. In Paragraph 7, The above sealing unit is A guide plate connected to the gas discharge part of the above temperature control unit; and A sliding bearing disposed at the edge of the above duct unit and capable of sliding movement by being in close contact with the guide plate when the above duct unit is moved by the press drive, Test handler.

9. In Paragraph 8, The above sealing unit is A further comprising an elastic member that applies elastic force to the sliding bearing in a direction in which the sliding bearing is in close contact with the guide plate. Test handler.

10. In Paragraph 8, The sliding bearing extends along the edge portion of the duct unit and has a length longer than the perimeter of the edge portion of the duct unit so that both ends are arranged to overlap each other. Test handler.

11. In Paragraph 1, A main body further comprising the above-mentioned press backplate, the above-mentioned press, the above-mentioned first temperature control unit and the above-mentioned second temperature control unit, and a chamber in which the above-mentioned duct unit is housed. Test handler.

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