Optical beam member

The integration of an optical beam member in a charged particle-optical device enhances defect contrast by controlling optical beam phase and power, addressing charge accumulation issues and improving defect detection efficiency.

WO2026125441A1PCT designated stage Publication Date: 2026-06-18ASML NETHERLANDS BV
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
ASML NETHERLANDS BV
Filing Date
2025-12-10
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

During semiconductor manufacturing, defects on substrates reduce yield due to charge accumulation on samples from large beam currents in electron microscopes, affecting defect contrast in inspection processes.

⚗Method used

An optical beam member is integrated into a charged particle-optical device to emit optical beams that combine with a charged particle beam, allowing control over phase and power to enhance defect contrast.

🎯Benefits of technology

Improves defect contrast during inspection by increasing the intensity of the light beam on the sample, enabling faster and more accurate defect detection.

✦ Generated by Eureka AI based on patent content.

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Abstract

An optical beam member is for a charged particle-optical device configured to direct a charged particle beam along a charged particle-optical axis of the charged particle-optical device and towards a sample location. The optical beam member comprises a plurality of emitter arrangements configured to emit respective optical beams that combine into a combined optical beam towards the sample location. The plurality of emitter arrangements are adjacent a first beam aperture defined in the optical beam member for passage of the charged particle beam towards the sample location. The optical beam member is configured such that at least one of phase and power of the respective optical beams is controllable.
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