Actuator for suppressing vibrations in vibration-insulated systems

Abstract

The problem addressed by the invention is that of being able to effectively carry out movements, in particular self-excited movement forces, on a vibration insulation system (3) with a compact and cost-effective device. For this purpose, the invention provides an actuator device (1) for vibration suppression of a part (5) of a vibration insulation system (3) suspended on a base part (4) in a vibration-insulated manner, wherein the actuator device (1) comprises a clamping element (7) and two oppositely arranged clamping jaws (9, 11) with a holder (13), wherein the clamping element (7) is arranged between the two clamping jaws (9, 11), and wherein at least one actuator apparatus (15) is provided, by means of which the clamping element (7) can be clamped between the clamping jaws (9, 11) by actuation. The holder (13) is mounted in a floating manner in a suspension (16) in such a way that the holder (13) can be moved along the movement direction (17) of the actuator apparatus (15) and is held rigidly in the plane (19) perpendicular to this direction (17), such that, in a locking position with the clamping element (7) clamped between the clamping jaws (9, 11), the clamping element (7) is fixed in this plane (19) relative to the suspension (16) of the holder (13).

Description

[0001] Integrated Dynamics Engineering GmbH 1 December 15, 2025 VA-0671 23ID 0056WOP

[0002] Actuator for suppressing vibrations in vibration-isolated systems

[0003] Description

[0004] Background of the invention

[0005] The invention relates generally to the operation of vibration-isolated systems. Specifically, the invention relates to the suppression of movements of the isolated part of the system.

[0006] Currently, to suppress movements resulting from mass accelerations and the associated after- and overshoots on the isolated side of a vibration-isolated system, magnetic control, for example with Lorenz motors, is used. Such a motor for active vibration damping is known, for instance, from DE 102010004642 Al. These motors have the advantage of operating without contact and thus not influencing the isolated side with parasitic stiffness. However, integrating such motors into the limited installation space increasingly leads to problems and reaches the limits of feasibility. Especially when rapid movements are to be performed on the vibration-decoupled part of the system, impulses are exerted whose active damping requires correspondingly large motors. Moreover, large motors are also expensive.The invention is therefore based on the objective of effectively capturing such impulses and movements, in particular the capture of self-excited kinetic forces, with a compact and cost-effective device. This objective is achieved by the subject matter of the independent claims. Advantageous embodiments are specified in the respective dependent claims.

[0007] Summary of the invention

[0008] To solve the problem, an actuator device is required for vibration or movement suppression of a vibration-isolated part of a vibration isolation system suspended from a base part, wherein the actuator device comprises a clamping element and two opposing Integrated Dynamics Engineering GmbH 2 15 December 2025 VA-0671 23ID 0056WOP

[0009] The clamping jaws are arranged in a holder, wherein the clamping element is arranged between the two clamping jaws, and wherein an actuator is provided with which the clamping element can be clamped between the clamping jaws by actuation, and wherein the holder is floatingly mounted in a suspension such that the holder is movable in the direction of movement of the actuator and rigidly held in the plane perpendicular to this direction, so that in a locking position with the clamping element clamped between the clamping jaws, the clamping element is fixed relative to the suspension of the holder in this plane. The term "rigid holder in the plane perpendicular to the direction of movement" is to be understood, within the meaning of the disclosure, as meaning that the stiffness with respect to a deflection in the plane perpendicular to the direction of movement is higher, in particular significantly higher, than in the direction of movement of the actuator.The direction of movement is the direction in which the clamping occurs. This is not necessarily the direction in which an actuator acts. For example, the force or movement of an actuator may first be redirected in the direction of the clamping, or a rotary movement may be converted into a linear or quasi-linear movement. The direction of movement of the actuator assembly is therefore the direction along which the clamping jaws and the clamping element move relative to each other.

[0010] By using such an actuator device, hereinafter also referred to as a clamping actuator, it is possible to temporarily fix the isolated side of a decoupled system, i.e., the vibration-isolated part, and to eliminate self-excited movement forces. According to the invention, the conventional concept of decoupling for motion suppression in vibration isolation is thus departed from. By clamping with the actuator device, the otherwise vibration-isolated part is temporarily fixed in place in order to dissipate self-excited forces via the suspension of the vibration-isolated part. Because the holder with the clamping jaws is floatingly mounted in a suspension, the vibration-isolated part can also be temporarily fixed at any point within its working range, both vertically and horizontally in the plane perpendicular to the axial direction from clamping jaw to clamping jaw.Integrated Dynamics Engineering GmbH 3 December 15, 2025 VA-0671 23ID 0056WOP.

[0011] A floating mounting of the bracket within the suspension can be achieved in a further development using at least one of the following devices: at least one spring element, at least one linear ball bearing, or at least one plain bearing. One or more spring elements for suspension are particularly suitable and preferred for the actuator device. With such spring elements, in addition to a floating suspension, damping of the vibration transmission to the vibration-isolated part of the vibration isolation system can also be achieved. Furthermore, a suspension using spring elements is particularly simple and therefore cost-effective to implement.

[0012] The clamping actuator can be connected to, or rather attached to, the vibration-isolated part by connecting the suspension to the base part and the clamping element to the vibration-isolated suspended part, or vice versa. This ensures that the base part and the vibration-isolated suspended part of the vibration-isolated system are rigidly connected in the plane perpendicular to the actuator's direction of action when the clamping element is locked. Locking the clamping element thus bridges the vibration isolation. The combined use of a clamping mechanism with a sufficient switching frequency and the floating bearing of this mechanism allows for fixation regardless of position. This operating principle is ideally suited for force-sensitive applications in the field of vibration isolation. The clamping mechanism requires no sensors for its intended function.

[0013] It is preferred to design the actuator device such that the switching frequency between the maximum and minimum of the additional stiffness generated by the actuator device, i.e., the switching frequency between the clamped state of the clamping element and the fully open state of the clamping element, is greater than 50 Hz. The switching time for clamping the clamping element is therefore at most 10 ms.

[0014] The invention is described in more detail below with reference to the figures. In the figures, identical reference numerals denote identical or corresponding elements. Integrated Dynamics Engineering GmbH 4 15 December 2025 VA-0671 23ID 0056WOP

[0015] Brief description of the characters

[0016] Fig. 1 shows a schematic view of an embodiment of an actuator device.

[0017] Fig. 2 shows a variant of the embodiment according to Fig. 1.

[0018] Fig. 3 shows the actuator device 1 in the locking position.

[0019] Fig. 4 shows a variant of the actuator device with an expandable clamping element.

[0020] Fig. 5 shows an embodiment of an actuator device with pneumatic lifting cylinders.

[0021] Fig. 6 shows a vibration isolation system with an actuator device. Fig. 7 shows a top view of a diaphragm spring.

[0022] Fig. 8 shows a sector of a diaphragm spring in perspective view.

[0023] Detailed description of the invention

[0024] Fig. 1 shows a schematic cross-sectional view of an actuator device 1, which can generally be used to stop or prevent movements, particularly vibrations, of a vibration-isolated part of a vibration isolation system. The actuator device 1 is suitable for suppressing even strong forces or moments while maintaining low weight and simple construction. If such a device can suppress larger forces compared to known vibration dampers, then it can also withstand larger forces generated by movements on the isolated side without compromising the performance of the vibration isolation system. This means that higher masses and / or higher accelerations can be tolerated on the isolated side of the system.

[0025] The actuator device 1 can be attached to a vibration-isolated part of a vibration isolation system suspended on a base part for vibration suppression, in particular by providing a rigid connection to the base part of the vibration isolation system.

[0026] The actuator device is preferably connected directly to the base part. Integrated Dynamics Engineering GmbH 5 15 December 2025 VA-0671 23ID 0056WOP

[0027] The actuator device 1 comprises a clamping element 7 and two opposing clamping jaws 9, 11 with a holder 13. As shown, the clamping element 7 is arranged between the two clamping jaws 9, 11. The actuator device 1 is further designed such that the clamping element 7 can be selectively clamped and released in the clamping jaws 9, 11 by actuating an actuator 15. In general, without being limited to the specific mechanism shown in Fig. 1, at least one actuator 15 is provided with which the clamping element 7 can be clamped between the clamping jaws 9, 11 by actuating it. Without being limited to the specific embodiment shown, the clamping jaws 9, 11 can be moved towards each other by means of one or more actuators 15 in order to clamp the clamping element 7 arranged between them.In a preferred embodiment, which is also realized in the example of Fig. 1, two opposing actuator devices 15 are provided, each of which actuates one of the clamping jaws 9, 11, wherein the actuator devices are fixed relative to each other in the actuator device 1, or fixed in the floatingly suspended holder 13.

[0028] In general, without being limited to the specific example shown, the actuator assembly 15 can comprise at least one lifting cylinder 150. In particular, as in the illustrated example, two lifting cylinders 150 can be provided, with each clamping jaw 9, 11 being movable by means of one of the lifting cylinders 150. Generally, the lifting cylinders can be hydraulically or pneumatically actuated. To achieve high switching frequencies, it is generally preferred to use double-acting lifting cylinders. According to further embodiments, an actuator assembly 15 with an electric motor drive or a piezoelectric actuator can alternatively or additionally be provided. Suitable electric motor drives include rotary servo motors, linear motors, in particular Lorentz motors, or electric lifting cylinders.The selection of a suitable actuator can depend on the requirements of switching speed, the necessary movement space between the clamping jaws, and the required clamping force. For example, very high switching speeds can be achieved with a piezo actuator. Integrated Dynamics Engineering GmbH 6 15 December 2025 VA-0671 23ID 0056WOP.

[0029] It is possible to achieve this, however the stroke is very small. On the other hand, it is possible to increase the stroke using a lever.

[0030] The clamping reference, or clamping element 7, is generally preferably shaped such that it can be clamped homogeneously over the clamping jaws 9, 11 in any possible position within the working area. In a preferred embodiment, not limited to the specific example shown, the surfaces of the clamping element 7 on which it is clamped are designed as spherical surfaces 70. As shown, the clamping element 7 can be easily configured with a spherical head 72. However, it is not necessary for the head to be completely spherical. It is sufficient if only the surface areas contacted by the clamping jaws 9, 11 during clamping are designed as curved surfaces, in particular as spherical surfaces 70.To achieve clamping within the working range with a constant stroke, independent of the position of the clamping element 7, it is generally advantageous if the clamping surfaces 90, 111 of the clamping jaws 9, 11 are planar. The combination of two parallel clamping jaws 9, 11, particularly with planar clamping surfaces 90, 111, and a clamping reference designed as a sphere allows force application, at least over a certain range, in only one degree of freedom, namely along the direction of movement 17, and in the other five degrees of freedom, it is independent of the position of the clamping reference or the clamping element 7. For this positional independence, it is generally advantageous if the clamping jaws 9, 11 and the clamping element 7 are shaped such that they make contact via point contacts during clamping.A combination of spherical surfaces and flat surfaces is one possible realization of such point contacts.

[0031] In a preferred embodiment, the temporary fixing of the isolated side of a vibration-isolated system is achieved by means of a horizontally applied force. While the opposing actuator devices 15 apply the intended force Fi, F2 for clamping, they are, in a preferred embodiment, designed such that they cannot displace relative to each other. This means, in particular, that even if there is an unequal force applied by the actuator devices, the clamping force remains fixed.

[0032] The forces Fi, F2 exerted on the clamping element 7 prevent its position relative to the holder 13 from changing. For example, without limiting itself to the specific example shown, a preferred embodiment provides that the one or more actuator devices 15 are designed such that the central position 27 between the clamping jaws 9, 11, which is characterized by way of example in Fig. 3, cannot shift relative to the holder 13, at least in the locked state, i.e., when the clamping element 7 is clamped.

[0033] The necessary force is achieved by changing the distance (from xi to X2, reducing the distance between the clamping jaws 9, 11 by 2 x Ax) between the two actuator assemblies 15. The clamping jaws 9, 11 are designed such that their clamping surfaces 90, 110 are at least parallel to each other and perpendicular to the direction of the force.

[0034] The holder 13 is movably mounted, or rather floatingly mounted, in a suspension 16 such that the holder 13 is movable along the direction of movement 17 of the actuator assembly 15. On the other hand, the mounting is also designed such that the holder 13 is rigidly fixed in a plane 19 perpendicular to this direction 17. This ensures that, in a locking position with the clamping element 7 clamped between the clamping jaws 9, 11, the clamping element 7 is fixed relative to the suspension 16 of the holder 13 in this plane 19.

[0035] In the illustration of Fig. 1, movement in the direction from top to bottom in the image plane, as well as perpendicular to the image plane, is thus fixed. Only movement from left to right along direction 17 remains possible.

[0036] Fig. 2 shows a modification of the embodiment shown in Fig. 1. In this modification, the floating mounting of the bracket 13 in the suspension 16 is achieved not by means of linear ball bearings 21, but by spring elements 22. These are particularly simple in design and can also dampen vibration transmission between the suspension 16 and the bracket 13, and thus, in the locked position, also from a base part to a vibration-isolated part of a vibration isolation system. For mechanical stability in general, without being limited to the example shown, it is advantageous to provide several spring elements 22, which are spaced apart along the direction of movement 17 of the actuator assembly 15 and attached to the bracket 13. [In the example shown, Integrated Dynamics Engineering GmbH 8 15 December 2025 VA-0671 23ID 0056WOP]

[0037] For example, the spring elements 22 are attached directly to the lifting cylinders 150, which in turn are connected to the bracket 13. However, this arrangement is merely exemplary. The spring elements 22 can also be fixed directly to the bracket 13, for example. To achieve a fixation of a vibration-isolated part of a vibration isolation system in the plane perpendicular to direction 17 with a significant increase in the overall stiffness of the system in the locked state, it is generally advantageous if the spring element(s) 22 have a lower stiffness C2H in the direction of movement 17 compared to the stiffness C2V in the perpendicular plane 19. A particularly suitable type of spring element 22 in this respect is a diaphragm spring 220. Other spring elements are also possible, such as coil springs or solid-state joints. The latter, like diaphragm springs, can also exhibit significantly anisotropic stiffnesses.For the oscillating suspension of the bracket 13, various types of spring elements 22 can also be combined. For example, a diaphragm spring 220 could be provided on one side of the bracket 13, while one or more coil springs or solid-state joints are arranged on the other side. Different suspension elements can also be combined with one another, such as linear ball bearings according to the example in Fig. 1 with spring elements 22 according to Fig. 2.

[0038] Fig. 3 shows the actuator device 1 with the actuated actuator 15 in the locking position. The original distance xi between the clamping jaws 9, 11 is reduced to the distance X2 corresponding to the dimensions of the clamping element 7, whereby the clamping jaws 9, 11 are pressed against the clamping element by the actuator 15. Regardless of the type of actuator 15 used, the actuator 15 and the distances Ax are preferably designed such that a switching time of less than 1 / 100 s between the open state, as shown in Fig. 1, and the clamped state of the clamping element 7, as shown in Fig. 3, or a switching frequency of more than 50 Hz, is achieved.

[0039] Regardless of the design of the floating bearing, the invention enables the clamping or fixing of a decoupled part of a vibration isolation system without centering around a zero position and an Integrated Dynamics Engineering GmbH 9 15 December 2025 VA-0671 23ID 0056WOP

[0040] Avoidance of disruptive forces that could displace the isolated part of the system relative to the non-isolated part. Likewise, rotational movements or moments are also avoided by mounting the actuator with mobility along the direction of action of the actuator 15.

[0041] In Fig. 3, a linear ball bearing 21 for suspension is combined with diaphragm springs 22 as an example. The diaphragm springs 22 are shown slightly deflected. This occurs particularly when the clamping element is not positioned exactly centrally between the clamping jaws 9, 11 at the time of clamping, due to the momentary position of the vibration-isolated part of a vibration isolation system.

[0042] To enable the actuator device 1 to be attached to the vibration-isolated system, suitable fastening devices 23 are preferably provided on the clamping element 7 and the suspension 16. With these fastening devices 23, the actuator device 1 can then be attached to a vibration isolation system 3 such that, with the clamping element 7 clamped in the clamping jaws 9, 11, a vibration-isolated part of the vibration isolation system is fixed relative to a base part. In a preferred embodiment, the clamping element 7 is attached to the vibration-isolated part of the vibration isolation system, while the suspension 16 is attached to the base part or, alternatively, to an element that is fixed relative to the base part.

[0043] In a preferred embodiment, the clamping element 7 has a shaft 71. This shaft can serve as a fastening device 23 or connect the spherical head 72 of the clamping element 7 (in one embodiment) to a fastening device 23. In the example shown in Fig. 1, the fastening device 23 for the suspension 16 comprises eyelets 25 with which the suspension can be screwed to a base part or another element that is fixed relative to the base part. Of course, these fastening devices 23 are merely examples.

[0044] Figure 4 shows a variant of the actuator device 1. This variant is based on the fact that, instead of the clamping jaws 9, 11, the clamping element 7 is moved by an actuator 15. The example shown is specifically Integrated Dynamics Engineering GmbH 10 15 December 2025 VA-0671 23ID 0056WOP

[0045] One embodiment in which the clamping element 7 has two parts 73, 74, wherein the actuator 15 is configured to move the two parts 73, 74 apart and press them against the clamping jaws 9, 11. In this example, a lifting cylinder 150 is also used as the actuator 15. Of course, other actuator types, such as suitable electromechanical or piezoelectric drives, are also possible.

[0046] In this embodiment, as also shown in the example, the clamping jaws 9, 11 can be rigidly connected to the holder 13. The locking position with parts 73, 74 of the clamping element 7 spread open and pressed against the clamping jaws 9, 11 is illustrated by the outlines of parts 73, 74 shown with dashed lines. Here, too, the surfaces of the clamping element 7, or of parts 73, 74 that are pressed against the clamping jaws 9, 11, are designed as spherical surfaces.

[0047] The embodiment with an expandable clamping element 7, as shown in the example of Fig. 4, can not only be used as an alternative to the embodiment according to Fig. 1. Rather, these embodiments can also be combined by moving both the clamping jaws 9, 11 and parts 73, 74 of the clamping element 7 with actuator devices 15 in order to press them against each other.

[0048] Fig. 5 shows details of an actuator device 1 with pneumatic lifting cylinders 150. This arrangement is an example of how a suitable actuator device 15 prevents the center position between the clamping jaws 9, 11 from shifting relative to the holder 13 when the clamping element 7 is clamped. The two pneumatic lifting cylinders 150 are supplied with compressed air via a common supply line 152. The compressed air is directed at a valve 151 into two supply lines 153, to each of which one of the lifting cylinders 150 is connected. When compressed air is applied via the supply line, both lifting cylinders are actuated until they clamp the clamping element 7. If the force of one of the lifting cylinders 150 is slightly greater than that of the other, a resultant force would act on the clamping element 7 and move it. To prevent this, the valve 151 can be closed after clamping.A slight movement of the clamping jaws 9, 11 relative to the position shown in Fig. 5 only Integrated Dynamics Engineering GmbH 11 15 December 2025 VA-0671 23ID 0056WOP.

[0049] The symbolically indicated bracket 13 can only be used up to the point where the forces exerted by the lifting cylinders are balanced by pressure adjustment. Other mechanisms are also possible, such as a mechanical coupling of the movement of the clamping jaws 9, 11.

[0050] The disclosure relates not only to the actuator device 1 but also, more generally, to a vibration isolation system comprising a base part and a vibration-isolated suspended part, wherein the actuator device 1 is attached to the vibration-isolated suspended part of the vibration isolation system and connected to the base part. In particular, the attachment to the base part and the vibration-isolated suspended part is effected on the one hand by the clamping element and on the other hand by the suspension 16. Preferably, the clamping element 7

[0051] Figure 6 shows a vibration isolation system 3 with an actuator device 1 according to this disclosure. The vibration isolation system 3 comprises a base part 4 and a part 5 suspended from the base part 4 in a vibration-isolated manner. The actuator device 1 is connected to both the vibration-isolated part 5 of the vibration isolation system 3 and the base part 5. Specifically, the connection is made via the suspension 16 and the clamping element 7. According to one embodiment, which is also realized in the illustrated example, the clamping element 7 is connected to the vibration-isolated part 5, and the suspension 16 is connected to the base part 4 of the vibration isolation system 3. For fixing to the base part 4, the base part 4 preferably has one or more suitable fastening devices 24, which are connected to the fastening devices 23 on the suspension 16 of the actuator device 1.The actuator device 1 does not necessarily have to be directly connected to the base part 4. For example, the base part could be mounted on a foundation. In that case, the actuator device 1 can also be fixed to the foundation to achieve a rigid connection to the base part 4.

[0052] The suspension of part 5 on the base part 4 can be achieved, for example, with vibration isolators 30, which are simplified as springs in Fig. 6. These generate horizontal stiffnesses Cm and vertical stiffnesses Civ. The vibration isolators 30 can be passively and / or actively isolated. Integrated Dynamics Engineering GmbH 12 15 December 2025 VA-0671 23ID 0056WOP

[0053] As can be seen from the illustration in Fig. 6, regardless of the specific configuration shown, the vibration-isolated part 5 of the vibration isolation system can move freely in all six possible degrees of freedom—namely, three translational degrees of freedom and three rotational degrees of freedom—when the clamping element 7 is not clamped. With the actuator device 1 according to the invention, it is now possible to temporarily fix the isolated part 5 in any position within its range of motion. For this purpose, a flexible bearing is provided in the direction of movement of the actuator devices 15, so that fixing is only possible for five of the six possible degrees of freedom, namely all degrees of freedom except the translational degree of freedom, in the direction of the flexible bearing, i.e., along direction 17.Without limiting itself to specific examples, the actuator device 1 is thus, in a preferred embodiment, designed to spatially fix the clamping element 7 by clamping it in the clamping jaws 9, 11 with respect to the suspension 16 in two of three translational degrees of freedom and / or in three of three, or all rotational degrees of freedom.

[0054] According to one embodiment, which is also realized in the example of Fig. 6, the actuator device 1 is connected to the vibration-isolated part 5 such that the direction of movement 17 of the actuator device 15 is parallel to a support or mounting surface 50 of the vibration-isolated part 5. On this support or mounting surface 50, in particular, the vibration-isolated components of a machine, such as components of a semiconductor manufacturing machine, can be mounted.

[0055] Due to the flexible mounting, both actuator units 15 will generate a force equilibrium on the clamping element 7 and, depending on the total horizontal stiffness CAH of the mounting of the holder 13, will position themselves centrally in the suspension 16 relative to the clamping element 7 and its respective position. Fixing the isolated side is therefore no longer possible in all six degrees of freedom, because the horizontal stiffness should be as low as possible to prevent significant displacement of the isolated side, or part 5, by the force applied in an off-center position. The displacement x s t can be described by the following formula: Integrated Dynamics Engineering GmbH 13 15 December 2025 VA-0671 23ID 0056WOP

[0056]

[0057] In this formula, CAH denotes the total horizontal stiffness of the bracket 13 relative to the suspension 16, ABAX the horizontal displacement of the isolated side, or of the vibration-isolated suspended part 5, relative to the ideal center of the clamping, and CH the total horizontal stiffness of the suspension of the vibration-isolated suspended part 5. Thus, with the clamping jaws open, ABAX represents the deviation of the position of the clamping element 7 from the center position between the clamping jaws 9 and 11. In an arrangement according to Fig. 6, the stiffness CH is generated in particular by the horizontally acting forces, or the sum of the stiffnesses Cm of the vibration isolators 30. In the simplified example of Fig. 1, a linear ball bearing 21 is provided to support the bracket 13 in the suspension 16. With this, the bracket 13 would be movable without restoring forces, and the total stiffness CAH would be zero.In a preferred embodiment, however, a spring suspension is generally provided to hold the bracket 13 in the suspension 16. A spring suspension is generally understood to be a suspension with at least one spring element. Such a bearing can also be provided in addition to a ball bearing mount, for example, by having one or more spring elements center the bracket 13 in the suspension. If one or more spring elements exert forces in the direction of a centered position of the clamping element 7, a corresponding non-zero overall stiffness CAH is present, so that in the case of an off-center position of the clamping element 7, a non-zero displacement x also occurs when clamped. s t is caused.

[0058] The clamping force (FR) arises purely from friction between the clamping jaws 9, 11 and the clamping reference, or the clamping element 7, and should be greater than a disturbance force Fdisturb acting on the vibration-isolated part 5 of the vibration isolation system 3. Therefore, the vibration isolation system 3 should be designed such that FR > Fdisturb. Accordingly, a material pairing for the clamping element 7 and the clamping jaws 9, 11 with a sufficiently high coefficient of friction is preferred. For two opposing actuator devices 15 acting on the clamping jaws 9, 11, as described in Integrated Dynamics Engineering GmbH, December 15, 2025, VA-0671 23ID 0056WOP

[0059] In one embodiment, which is also implemented in the example of Fig. 1 with the two lifting cylinders 150, the following applies to the clamping force:

[0060] (2) F R = (Fi + F2)*|i r ,

[0061] where Fi and F2 denote the forces exerted by the actuator devices 15 on the clamping element 7.

[0062] To prevent movement of the vibration-isolated part of a vibration isolation system in the plane 19 perpendicular to the direction of movement 17 of the actuator(s) 15, the clamping force FR should be greater than the forces acting on the vibration-isolated part. The actuator 1 can be designed accordingly. However, excessive movement can also occur if the transverse stiffness C2V of the spring element(s) 22 is too low. As already explained with reference to Fig. 2, it is advantageous if the at least one spring element 22 has a lower stiffness in the direction of movement 17 of the actuator 15 than in the plane 19 perpendicular to the direction of movement 17. Without limiting itself to specific examples, one embodiment provides that the stiffness perpendicular to the direction of movement 17 is at least 100 times greater than the stiffness along the direction of movement 17.

[0063] Fig. 7 shows a top view of a diaphragm spring 220 as a particularly preferred means for the floating suspension of the bracket 13 in the suspension 16. A diaphragm spring can also be referred to as a slotted or, more generally, as an interrupted disc spring. The diaphragm spring comprises a disc or disk 221. This may have a central opening 229 for fastening. According to a preferred embodiment of the diaphragm spring 220, it has an arrangement of elongated openings 222 which extend along several circles of different diameters around the center of the disk 221. In the illustrated example, openings 222 are provided along three concentric circles. In addition, radially extending slots 223 are provided which connect openings 222 on an outer and an inner circle and pass by intermediate openings 222.This creates a structure with U-shaped brackets 224 in the disc, which provides high elasticity in the direction perpendicular to the disc surface. These brackets 224 are provided by Integrated Dynamics Engineering GmbH 15 15 December 2025 VA-0671 23ID 0056WOP.

[0064] Web-shaped sections 225 are formed, which are connected to each other at their ends. Other configurations are also possible, such as an arrangement in which the brackets 224 extend not circumferentially but radially. Without limiting oneself to the illustrated example, one embodiment provides that at least one diaphragm spring 220 is present for the floating suspension of the bracket 13 in the suspension 16, wherein the diaphragm spring 220 has openings such that brackets 224 are formed through the openings 222 from web-shaped sections 225 connected to each other at their ends.

[0065] Fig. 8 shows a sector of a diaphragm spring 220 in a perspective view. In this example, there is no central opening 229. In one embodiment, the following dimensions and technical data are provided to achieve a suspension that is very flexible in the direction of movement of the actuator devices and sufficiently rigid perpendicular to it:

[0066]

[0067] Integrated Dynamics Engineering GmbH 16 December 15, 2025 VA-0671 23ID 0056WOP

[0068] As explained above, the ratio of vertical to horizontal stiffness of the spring element is important for effectively suppressing movements of the isolated part of a vibration isolation system 3 with an actuator device 1. In the case of a diaphragm spring, the ratio of the two direction-dependent stiffnesses improves the thinner the diaphragm spring 220 is, or the greater the ratio of diameter to thickness of the spring. In the embodiment according to the table above, a ratio of stiffnesses perpendicular to the direction of movement 17 to stiffness along the direction of movement 17 of the actuator devices 15 of 1350 is achieved.

[0069] By cleverly connecting these elements, or spring elements, in parallel or in series, the overall stiffness can be adjusted. Further limits include the maximum overall axial stiffness, which results from the maximum permissible movement by an engaging actuator. In an exemplary embodiment with diaphragm springs having the characteristics according to the table above, the overall stiffness of the actuator device is 17.23 N / mm.

[0070] One way to combine spring elements 22, in particular diaphragm springs 220, to adjust desired stiffnesses is shown in the example of Fig. 6. According to an embodiment realized in this example, several spring elements 22, in particular several diaphragm springs 220, connected in series, are used for floating suspension at least on one side of the bracket 13. Specifically, as shown, two spring elements 22, or diaphragm springs 220, connected in series can be used on both sides. Integrated Dynamics Engineering GmbH 17 15 December 2025 VA-0671 23ID 0056WOP

[0071] Reference symbol list

[0072]

[0073] Integrated Dynamics Engineering GmbH 18 December 15, 2025 VA-0671 23ID 0056WOP

[0074]

Claims

Integrated Dynamics Engineering GmbH 19 December 15, 2025 VA-0671 23ID 0056WOP Patent claims 1. Actuator device (1) for vibration suppression of a part (5) of a vibration isolation system (3) suspended on a base part (4) in a vibration-isolated manner, wherein the actuator device (1) comprises a clamping element (7) and two opposing clamping jaws (9, 11) with a holder (13), wherein the clamping element (7) is arranged between the two clamping jaws (9, 11), and wherein at least one actuator device (15) is provided with which the clamping element (7) can be clamped between the clamping jaws (9, 11) by actuation, and wherein the holder (13) is floatingly mounted in a suspension (16) such that the holder (13) is movable along the direction of movement (17) of the actuator device (15) and rigidly held in the plane (19) perpendicular to this direction (17), so that in a Locking position with between the clamping jaws (9,11) clamped clamping element (7) the clamping element (7) is fixed relative to the suspension (16) of the holder (13) in this plane (19).

2. Actuator device (1) according to the preceding claim, characterized in that the holder (13) is floatingly mounted in the suspension by means of at least one of the following devices: - at least one spring element (22), - at least one linear ball bearing (21). - at least a plain bearing.

3. Actuator device (1) according to the preceding claim, characterized by at least one of the following features: - The at least one spring element (22) comprises a diaphragm spring (220), - The at least one spring element (22) has a lower stiffness in the direction of movement (17) of the actuator assembly (15) than in the plane (19) perpendicular to the direction of movement (17). Integrated Dynamics Engineering GmbH 20 15 December 2025 VA-0671 23ID 0056WOP 4. Actuator device according to one of the two preceding claims, characterized in that the stiffness of the at least one spring element (22) perpendicular to the direction of movement (17) is at least a factor (100) greater than the stiffness along the direction of movement (17).

5. Actuator device (1) according to one of the preceding claims, characterized in that the clamping jaws (9, 11) can be moved towards each other by means of at least one actuator device (15) in order to clamp the clamping element (7) arranged between them.

6. Actuator device (1) according to one of the preceding claims, characterized by at least one of the following features: - the clamping element (7) has two parts (73, 74), wherein the actuator device (15) is configured to move the two parts (73, 74) apart and press them against the clamping jaws (9, 11), - the actuator device (1) has two opposing actuator devices (15), each of which actuates one of the clamping jaws (9, 11), wherein the actuator devices (15) are fixed relative to each other in the actuator device (1).

7. Actuator device (1) according to one of the preceding claims, characterized in that the actuator device (15) comprises at least one of the following devices: - a lifting cylinder (150) - an electric motor drive, - a piezo actuator.

8. Actuator device (1) according to the preceding claim, characterized in that two lifting cylinders (150) are provided, each wherein a clamping jaw (9, 11) is actuated by means of one of the lifting cylinders (150). Integrated Dynamics Engineering GmbH 21 15 December 2025 VA-0671 23ID 0056WOP is movable.

9. Actuator device (1) according to one of the preceding claims, characterized in that the actuator device (15) is designed such that the center position between the clamping jaws (9, 11) cannot shift relative to the holder (13) when the clamping element (7) is clamped.

10. Actuator device (1) according to one of the preceding claims, characterized by fastening devices (23) on clamping element (7) and suspension (16) in order to attach the actuator device (1) to a vibration isolation system (3) in such a way that, when the clamping element (7) is clamped in the clamping jaws (9, 11), a vibration-isolated suspended part (5) of the vibration isolation system (3) is fixed relative to a base part (4).

11. Actuator device (1) according to one of the preceding claims, characterized in that the clamping element (7) can be spatially fixed by clamping it in the clamping jaws (9, 11) with respect to the suspension (16) in two of three translational degrees of freedom and in all rotational degrees of freedom.

12. Actuator device (1) according to one of the preceding claims, characterized by at least one of the following features: - the clamping jaws (9, 11) and the clamping element (7) are shaped such that the clamping jaws (9, 11) and the clamping element (7) come into contact via point contacts when clamping, - the surfaces of the clamping element (7), on which the clamping element (7) is clamped, are designed as spherical surfaces (70), - The clamping surfaces (90, 111) of the clamping jaws (9, 11) are flat. Integrated Dynamics Engineering GmbH 22 15 December 2025 VA-0671 23ID 0056WOP 13. Actuator device according to one of the preceding claims, characterized by a spring suspension to hold the holder (13) in the suspension (16).

14. Actuator device (1) according to one of the preceding claims, characterized by at least one of the following features: - the actuator device (1) is configured for a switching frequency between the clamped state of the clamping element (7) and the fully open state of more than 50 Hz - the switching time for clamping the clamping element (7) is at most 10 ms.

15. Vibration isolation system (3) comprising a base part (5) and a vibration-isolated suspended part (5) and an actuator device (1) according to one of the preceding claims, wherein the actuator device (1) is connected to both the vibration-isolated suspended part (5) of the vibration isolation system (3) and to the base part (5).

16. Vibration isolation system (3) according to the preceding claim, characterized in that the clamping element (7) of the actuator device (1) is connected to the vibration-isolated suspended part (5) of the vibration isolation system (3) and the suspension (16) of the actuator device (1) is connected to the base part 4 of the vibration isolation system 3.

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