Tin Organic Compounds TRIZ Cases
- Indium Multi-Metal CVD Source Material for Stable Film Formation
Bulky alkylcyclopentadienyl and mixed-metal compounds stabilize CVD sources, limit residues, and support controlled composite-oxide film formation.
Bulky alkylcyclopentadienyl and mixed-metal compounds stabilize CVD sources, limit residues, and support controlled composite-oxide film formation.