Liquid supply device, liquid supply method, and computer storage medium

By setting up a detection unit and a control unit in the liquid supply device, and using sensors to automatically control the liquid flow process, the problem of long-term monitoring during the liquid flow of high-viscosity liquids is solved, and efficient monitoring and automated control of the liquid flow status are achieved.

CN114713397BActive Publication Date: 2026-06-16TOKYO ELECTRON LTD
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Patent Information

Application Number
CN202111633708.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2021-01-05
Filing Date
2021-12-29
Publication Date
2026-06-16
Estimated Expiration
2041-12-29

AI Technical Summary

Technical Problem

When flushing piping that has not been flushed with treatment fluid, operators need to visually monitor the fluid flow status for a long time, especially when using high-viscosity corrosion inhibitors, which leads to excessively long monitoring time.

Method used

The liquid supply device is equipped with a detection unit and a control unit. The sensor detects the liquid presence in the piping and controls the liquid flow process of each module. The liquid flow is automated in steps, reducing the time required for manual monitoring.

Benefits of technology

It shortens the time operators spend monitoring the liquid flow status, improves the automation and efficiency of the liquid flow process, and reduces the monitoring burden when flowing high-viscosity liquids.

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Abstract

The present disclosure relates to a liquid supply apparatus, a liquid supply method, and a computer storage medium. The liquid supply apparatus includes a storage section configured to store a treatment liquid; an ejection section configured to eject the treatment liquid toward a substrate; a pipe provided in a liquid delivery line from the storage section to the ejection section; a liquid delivery section configured to be positioned between the storage section and the ejection section of the liquid delivery line and configured to deliver the treatment liquid; a detection section configured to be positioned between the storage section and the liquid delivery section of the liquid delivery line and between the liquid delivery section and the ejection section, respectively, and configured to detect whether the treatment liquid is present; and a control section configured to control delivery of the treatment liquid to at least one of the storage section, the liquid delivery section, the ejection section, and the pipe based on a detection result of the detection section when the treatment liquid is delivered to the pipe in which the treatment liquid is not delivered.
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Citation Information

Patent Citations

  • Pump, pump device, and liquid supply system

    JP2016084803A

  • Photoresist supply apparatus

    JP2007324383A

  • Liquid processing method and removing device for gas in filter

    JP2013191843A