Laser Lift-off Platform, Laser Lift-off Equipment and Preparation Method of Flexible Display Device

Abstract

The present invention relates to a laser lift-off platform, a laser lift-off device, and a method for manufacturing a flexible display device. The laser lift-off platform includes: a main platform; and at least one side platform disposed at the edge of the main platform, and the side platform is configured to move relative to the main platform within the same plane to move away from or close to the main platform. By providing a movable side platform, during the scanning process of the laser emitting device, the edge region of the workpiece to be lifted off corresponding to the side platform can be expanded outward relative to the main body region of the corresponding main platform, thereby promoting the edge region and the main body region of the workpiece to be lifted off to resist the shrinking trend caused by stress release during the scanning process, thereby improving the wrinkling problem of the flexible display device during the lift-off process, improving the flatness of the flexible substrate, and thus improving the manufacturing yield of the flexible display device. When using the above-mentioned laser lift-off device for laser lift-off, the front-stage protective film attachment process can be omitted, reducing the process steps and lowering the cost.

Description

Technical Field

[0001] The present invention relates to the technical field of display devices, and particularly to a laser lift-off platform, a laser lift-off device, and a method for manufacturing a flexible display device. Background Art

[0002] Currently, in the manufacturing process of flexible display devices, most of them are to coat a layer of polyimide (abbreviated as PI in English) on a carrier substrate as a flexible substrate, and then fabricate a flexible display device on the polyimide. After being irradiated by a laser with a specific wavelength, the viscosity of this flexible substrate will change greatly. The flexible display device is separated from the carrier substrate through a laser lift-off (LLO) process, thereby obtaining the flexible display device.

[0003] As the adhesive transition layer material commonly used between the carrier substrate and the flexible display device in the current flexible display device manufacturing technology, the main manufacturing methods of polyimide are spin coating and blade coating. The polyimide solution is evenly coated on the carrier substrate, and then cured to form a layer of polyimide as the flexible substrate. Finally, a flexible display device is fabricated on the flexible substrate; finally, the flexible display device is separated from the carrier glass using laser lift-off technology. However, during the laser lift-off process, polyimide undergoes a cross-linking reaction when irradiated by a laser with a specific wavelength, and the cross-linking reaction will cause stress release. The flexible display device will shrink due to the stress release of polyimide, and then wrinkles will occur, ultimately leading to damage to the flexible display device. In order to improve the wrinkle problem of the flexible display device during the peeling process, a protective film can be formed on the cured polyimide, and then a flexible display device is fabricated on the protective film. However, this method requires adding a step of attaching the protective film, making the process complicated and increasing the production cost; at the same time, after the protective film is attached, the thickness of the entire flexible display device increases. In addition, the area where the protective film is attached needs to be larger than the coating area of the polyimide solution, which will have a certain impact on the utilization rate of the carrier substrate and the fabrication of narrow-bezel flexible display devices. Summary of the Invention

[0004] Based on this, it is necessary to provide a laser lift-off platform, a laser lift-off device, and a method for manufacturing a flexible display device, which can improve the wrinkle problem of the flexible display device during peeling and do not require attaching a protective film.

[0005] A laser lift-off platform, comprising:

[0006] A main platform; and

[0007] At least one side platform, the side platform is arranged at the edge of the main platform, and the side platform is used to move relative to the main platform in the same plane to move away from or close to the main platform.

[0008] In some of these embodiments, vacuum adsorption holes are provided on both the main platform and the side platform, and the adsorption force of the vacuum adsorption holes on the side platform is greater than that of the vacuum adsorption holes on the main platform; and / or

[0009] The side platform has a closed state in which it abuts against the side of the main platform and an expanded state in which it is separated from the main platform.

[0010] In some of these embodiments, the main platform is rectangular, and at least two of the side platforms are respectively provided on two opposite sides of the main platform.

[0011] In some of these embodiments, one side platform is provided on each of the four sides of the main platform, and each side platform is used to abut against the main platform and form a rectangular outer contour. The sides of the outer contour formed by each side platform are equidistant from the corresponding sides of the outer contour of the main platform.

[0012] In some of these embodiments, the laser lift-off platform further includes:

[0013] A sliding guide rail, and the side platform is provided on the sliding guide rail and moves along the sliding guide rail so that the side platform moves away from or closer to the main platform.

[0014] In some of these embodiments, one side platform is provided on each side of the main platform;

[0015] There are two sliding guide rails. Two relatively arranged side platforms share the same sliding guide rail respectively, and the extending directions of the two sliding guide rails are the same as the extending directions of two adjacent sides of the main platform respectively.

[0016] A laser lift-off device, comprising:

[0017] A laser emitting device for emitting laser; and

[0018] The laser lift-off platform as described in any one of the above, wherein the main platform and the side platform of the laser lift-off platform are used to carry the workpiece to be lifted off, and the side platform is further used to move away from the main platform in the same plane relative to the main platform when the laser emitting device emits laser to scan the workpiece to be lifted off.

[0019] A method for manufacturing a flexible display device, using the laser lift-off device as described in any one of the above, comprising the following steps:

[0020] Place the workpiece to be lifted off on the main platform and the side platform. The workpiece to be lifted off includes a carrier substrate and a flexible display device provided on the carrier substrate;

[0021] The laser emission device emits laser light and sequentially scans the interface between the carrier substrate and the flexible display device. When sequentially scanning the interface between the carrier substrate and the flexible display device, the side platform moves away from the main platform in the same plane relative to the main platform, so that the edge region of the workpiece to be peeled corresponding to the side platform expands outward relative to the main body region corresponding to the main platform; and

[0022] separate the flexible display device from the carrier substrate.

[0023] In some embodiments, both the main platform and the side platform are provided with vacuum adsorption holes. When sequentially scanning the interface between the carrier substrate and the flexible display device, control the adsorption force of the vacuum adsorption holes on the side platform to be greater than the adsorption force of the vacuum adsorption holes on the main platform.

[0024] In some embodiments, the adsorption pressure of the side platform is 5Kpa to 20Kpa;

[0025] The adsorption pressure of the main platform is 0.3Kpa to 0.5Kpa.

[0026] In some embodiments, after sequentially scanning the interface between the carrier substrate and the flexible display device and before the step of separating the flexible display device from the carrier substrate, the following steps are further included:

[0027] Control the side platform to stop moving away from the main platform relative to the main platform and maintain a relatively static state with the main platform.

[0028] The above laser peeling device and its laser peeling platform, by providing a movable side platform, can make the edge region of the workpiece to be peeled corresponding to the side platform expand outward relative to the main body region corresponding to the main platform during the scanning process of the laser emission device, thereby promoting the edge region and the main body region of the workpiece to be peeled to resist the shrinkage trend caused by stress release during the scanning process, thereby improving the wrinkle problem of the flexible display device during the peeling process, improving the flatness of the flexible substrate, and thus improving the preparation yield of the flexible display device.

[0029] In addition, using a laser peeling device containing the above laser peeling platform for laser peeling can eliminate the need for the front-end protective film attachment process, reduce the process flow, and thus reduce the cost. In addition, since there is no need for the front-end film attachment process, the problem that the attachment area of the protective film affects the utilization rate of the carrier substrate and the production of narrow-bezel flexible display devices is avoided. Therefore, the production requirements of narrow-bezel flexible display devices can be met to a greater extent, and at the same time, the utilization rate of the carrier substrate is also improved. Description of the Drawings

[0030] Figure 1 Schematic top view of a laser lift-off platform according to an embodiment of the present invention;

[0031] Figure 2 is Figure 1 Schematic diagram of another state of the laser lift-off platform shown;

[0032] Figure 3 is Figure 1 Front view of the laser lift-off platform shown;

[0033] Figure 4 is Figure 2 Front view of the laser lift-off platform shown;

[0034] Figure 5 Photo of the flexible substrate of a flexible display device prepared by a conventional method;

[0035] Figure 6 Photo of the flexible substrate of a flexible display device prepared according to an embodiment of the present invention;

[0036] Figure 7 Photo of the flexible substrate of a flexible display device prepared according to another embodiment of the present invention.

[0037] Explanation of reference numerals:

[0038] 10: Laser lift-off platform; 110: Main platform;

[0039] 120: Side platform; 130: Sliding guide rail. Detailed description of the invention

[0040] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Preferred embodiments of the present invention are shown in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0041] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "length", "width", "thickness", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In the description of the present invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0042] In the present invention, unless otherwise clearly defined or limited, terms such as "connected" and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] In the present invention, unless otherwise clearly defined or limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0044] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which this invention belongs. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0046] An embodiment of the present invention provides a laser lift-off device and its laser lift-off platform 10 (see Figure 1 ). The laser lift-off device includes a laser emitting device (not shown in the figure) and the laser lift-off platform 10.

[0047] The laser emitting device is used to emit laser light.

[0048] The laser lift-off platform 10 is used to carry the workpiece to be lifted off.

[0049] Please refer to Figure 1, the laser lift-off platform 10 includes a main platform 110 and at least one side platform 120. The main platform 110 and the side platform 120 of the laser lift-off platform 10 are used to carry the workpiece to be lifted off. Specifically, the workpiece to be lifted off includes a main body area and an edge area located at the edge of the main body area. The main body area is placed on the main platform 110, and at least a part of the edge area is placed on the side platform 120; in other words, the main body area of the workpiece to be lifted off corresponds to the main platform 110, and the edge area of the workpiece to be lifted off corresponds to the side platform 120.

[0050] The side platform 120 of the laser lift-off platform 10 is provided at the edge of the main platform 110. As Figure 2 shown, the side platform 120 is used to move relative to the main platform 110 in the same plane to move away from or close to the main platform 110. The side platform 120 is also used to move away from the main platform 110 in the same plane relative to the main platform 110 when the laser emitting device emits laser to scan the workpiece to be lifted off, so that the edge area of the workpiece to be lifted off corresponding to the side platform 120 expands outwards relative to the main body area corresponding to the main platform 110.

[0051] For the above-mentioned laser lift-off device and its laser lift-off platform 10, by setting the movable side platform 120, during the scanning process of the laser emitting device, the edge area of the workpiece to be lifted off corresponding to the side platform 120 can be made to expand outwards relative to the main body area corresponding to the main platform 110, thereby promoting the edge area and the main body area of the workpiece to be lifted off to resist the shrinking trend caused by stress release during the scanning process, thereby improving the wrinkle problem of the flexible display device during the lift-off process, improving the flatness of the flexible substrate, and thus improving the production yield of the flexible display device.

[0052] In addition, when using the laser lift-off device including the above-mentioned laser lift-off platform 10 for laser lift-off, the front-end protective film attachment process can be omitted, reducing the process steps, and thus reducing the cost. In addition, since the front-end film attachment process is not required, the problem that the attachment area of the protective film affects the utilization rate of the carrier substrate and the production of narrow-bezel flexible display devices is avoided, so that the production requirements of narrow-bezel flexible display devices can be met to a greater extent, and at the same time, the utilization rate of the carrier substrate is also improved.

[0053] The present invention also provides a method for manufacturing a flexible display device, that is, the workpiece to be lifted off is a flexible display device formed on a carrier substrate. The method for manufacturing the flexible display device will be introduced in detail below in combination with the structure of the laser lift-off device.

[0054] Using the above-mentioned laser lift-off device to lift off the workpiece to be lifted off, the workpiece to be lifted off includes a carrier substrate and a flexible display device provided on the carrier substrate, to manufacture a flexible display device, including the following steps S10-20:

[0055] S10: Place the workpiece to be peeled on the main platform 110 and the side platform 120 of the laser peeling platform 10. Specifically, the workpiece to be peeled is placed on the laser peeling platform 10 with the carrier substrate facing upward, and the flexible display device contacts the laser peeling platform 10 downward.

[0056] S20: The laser emitting device emits laser light and sequentially scans the interface between the carrier substrate and the flexible display device to separate the flexible display device from the carrier substrate. Specifically, adjust the laser emitting device so that the laser energy passes through the carrier substrate, and the focal point or focal plane of the laser scans on the flexible substrate of the flexible display device for laser scanning to separate the flexible display device from the carrier substrate. When the laser emitting device sequentially scans the interface between the carrier substrate and the flexible display device, the side platform 120 moves away from the main platform 110 in the same plane relative to the main platform 110, so that the edge area of the workpiece to be peeled corresponding to the side platform 120 expands outward relative to the main body area of the corresponding main platform 110.

[0057] S30: Separate the flexible display device from the carrier substrate.

[0058] Specifically, for example, the carrier substrate can be adsorbed by physical methods such as adsorption to separate the flexible display device from the carrier substrate.

[0059] In some embodiments, vacuum adsorption holes are provided on both the main platform 110 and the side platform 120. Negative pressure can be generated through the vacuum adsorption holes to adsorb the workpiece to be peeled.

[0060] Furthermore, during the scanning process of the laser emitting device, control the adsorption force of the vacuum adsorption holes of the side platform 120 to be greater than the adsorption force of the vacuum adsorption holes of the main platform 110. In this way, a structure is formed in which the main platform 110 has weak vacuum adsorption and the surrounding side platform 120 has strong vacuum adsorption, which can prevent the workpiece to be peeled from detaching from the side platform 120 during the expansion process of the side platform 120.

[0061] Furthermore, in a specific example, the adsorption pressure of the side platform 120 is 5 Kpa to 20 Kpa; the adsorption pressure of the main platform 110 is 0.3 Kpa to 0.5 Kpa.

[0062] In some embodiments, after the laser emitting device sequentially scans the interface between the carrier substrate and the flexible display device and before the step of separating the flexible display device from the carrier substrate, the following steps are further included: control the side platform 120 to stop moving away from the main platform 110, that is, stop expanding outward, and keep it stationary in the expanded state, that is, keep the relative stationary state with the main platform 110.

[0063] Further, the time for the control side platform 120 to stay in the expanded state can be 10 s to 20 s. Keeping the side platform 120 in the expanded state for a period of time can prompt the complete release of the stress of the flexible substrate after laser scanning, so as to further improve the flatness of the flexible substrate, and further improve the preparation yield of the flexible display device.

[0064] In some embodiments, there are multiple side platforms 120, and the multiple side platforms 120 are distributed around the main platform 110. The multiple side platforms 120 can expand the edge area of the workpiece to be peeled outward relative to the main body area at multiple positions, which is further beneficial to improving the wrinkling problem of the flexible display device during the peeling process.

[0065] In some embodiments, the main platform 110 is rectangular, and at least one side of the main platform 110 is provided with a side platform 120. It can be understood that the shape of the main platform 110 is not limited to this, and it can be circular or the like.

[0066] Further, the laser scanning is a method of keeping the laser beam emitted by the laser emitting device fixed and moving the laser peeling platform 10 to complete the full-surface scanning. Therefore, the direction of laser scanning is the moving direction of the laser peeling platform 10. In other words, the main platform 110 can move relative to the laser emitting device, and the direction of laser scanning is the same as the moving direction of the main platform 110.

[0067] In some embodiments, the above laser peeling device further includes a first driving mechanism (not shown in the figure), and the first driving mechanism is connected to the main platform 110 and is used to drive the main platform 110 to move linearly relative to the laser emitting device.

[0068] Further, the expansion direction of at least one side platform 120 (i.e., the moving direction relative to the main platform 110) is the same as the direction of laser scanning or the moving direction of the main platform 110 relative to the laser emitting device. Generally, the moving direction of the main platform 110 relative to the laser emitting device is the long side direction of the main platform 110.

[0069] In a specific example, the speed of laser scanning is 30 mm / s to 80 mm / s; the expansion speed of the side platform 120 is 0.05 mm / s to 0.1 mm / s.

[0070] In some embodiments, the above laser peeling device further includes a second driving mechanism (not shown in the figure), and the second driving mechanism is connected to the side platform 120 and is used to drive the side platform 120 to move relative to the main platform 110 in the same plane to move away from or close to the main platform 110.

[0071] Further, the first driving mechanism and / or the second driving mechanism can be a driving mechanism such as a driving motor.

[0072] Further, at least two side platforms 120 are respectively disposed on two opposite sides of the main platform 110. For example, at least two side platforms 120 are respectively disposed on two opposite short sides of the main platform 110, that is, at least two side platforms 120 expand outward along the long side direction of the main platform 110 relative to the main platform 110.

[0073] It can be understood that in a specific example, only one of the above-mentioned side platforms 120 is provided on one short side or one long side of the main platform 110; one of the above-mentioned side platforms 120 can also be provided on each of the two short sides of the main platform 110; one of the above-mentioned side platforms 120 can also be provided on each of the two long sides of the main platform 110; one of the above-mentioned side platforms 120 can also be provided on each of the two short sides and two long sides of the main platform 110.

[0074] Further, the side platform 120 can move relative to the main platform 110 in the same plane to reset close to the main platform 110. Specifically, the side platform 120 can move relative to the main platform 110 in the same plane in a direction close to the main platform 110 to a closed state in contact with the side of the main platform 110. In other words, in this specific example, the side platform 120 has a closed state in contact with the side of the main platform 110 (as Figure 1 shown) and an expanded state separated from and expanded relative to the main platform 110 (as Figure 2 shown). In a specific example, the object to be peeled is first placed on the main platform 110 and the side platform 120 in the closed state, and during the start of scanning and the scanning process, the side platform 120 is adjusted from the closed state to the expanded state.

[0075] In a specific example, the main platform 110 is rectangular. One side platform 120 is provided on each of the four sides of the main platform 110. Each side platform 120 is used to abut against the main platform 110 and form a rectangular outer contour. The sides of the outer contour formed by each side platform 120 are equidistant from the corresponding sides of the outer contour of the main platform 110. That is: in the closed state, the four side platforms 120 located on the four sides of the main platform 110 are connected end to end and abut against the main platform 110 to form a rectangular platform.

[0076] Please refer to Figure 2 , in some of the embodiments, the laser peeling platform 10 further includes a sliding guide rail 130. The side platform 120 is disposed on the sliding guide rail 130 and moves along the sliding guide rail 130 so that the side platform 120 moves away from or close to the main platform 110.

[0077] Please refer to Figures 3 to 4 , further, the sliding guide rail 130 is disposed below the main platform 110, and both ends of the sliding guide rail 130 are exposed from the main platform 110. Two relatively arranged side platforms 120 are respectively disposed at both ends of the same sliding guide rail 130.

[0078] In some of these embodiments, a side platform 120 is provided on each side of the main platform 110, so that the edge regions of the workpiece to be peeled are all placed on the side platform 120. There are two sliding guide rails 130, and the two relatively arranged side platforms 120 share the same sliding guide rail 130 respectively. The extending directions of the two sliding guide rails 130 are perpendicular to each other. As Figures 3 to 4 shown, the extending directions of the two sliding guide rails 130 are the same as the extending directions of the adjacent two sides of the main platform 110 respectively.

[0079] As Figure 5 shown, when using a traditional non-expandable laser peeling platform to prepare a flexible display device by laser peeling, serious wrinkling phenomena occur in the flexible substrate after laser peeling.

[0080] In a specific example, when using the above-mentioned laser peeling device to peel a flexible display device formed on a carrier substrate, the two side platforms 120 provided on the short side of the main platform 110 expand outwards along the long side direction, while the two side platforms 120 on both sides of the remaining short side do not expand. The wrinkling phenomenon of the flexible substrate of the obtained flexible display device is greatly reduced, as Figure 6 shown.

[0081] In another specific example, when using the above-mentioned laser peeling device to peel a flexible display device formed on a carrier substrate, the two side platforms 120 provided on the short side of the main platform 110 expand outwards along the long side direction, and the two side platforms 120 provided on the long side of the main platform 110 expand outwards along the short side direction, that is, the side platforms 120 around the main platform 110 all expand outwards. No wrinkling phenomenon appears in the flexible substrate of the obtained flexible display device, as Figure 7 shown.

[0082] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0083] The above-described embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it cannot be understood as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent should be subject to the appended claims, and the description and drawings can be used to explain the content of the claims.

Claims

1. A laser lift-off device, characterized in that, Comprising: A laser emission device for emitting laser light; And A laser lift-off platform including a main platform and at least one side platform. The side platform is provided at the edge of the main platform and is used to move relative to the main platform in the same plane to move away from or close to the main platform; the main platform and the side platform of the laser lift-off platform are used to carry the workpiece to be lifted off, the laser emission device is used to emit laser light to scan the lift-off interface of the workpiece to be lifted off, and the side platform is further used to move away from the main platform in the same plane relative to the main platform when the laser emission device emits laser light to scan the lift-off interface of the workpiece to be lifted off; The side platform has a closed state in which it abuts against the side of the main platform and an expanded state in which it is separated from the main platform; the initial state of the side platform is the closed state, and the side platform is in the expanded state during the scanning process of the laser emission device.

2. The laser lift-off device according to claim 1, wherein Vacuum suction holes are provided on both the main platform and the side platform, and the suction force of the vacuum suction holes on the side platform is greater than that of the vacuum suction holes on the main platform.

3. The laser lift-off device according to claim 1, characterized in that, The main platform is rectangular, and at least two side platforms are respectively provided on the opposite two sides of the main platform.

4. The laser lift-off device according to claim 3, wherein One side platform is provided on each of the four sides of the main platform, and each side platform is used to abut against the main platform and form a rectangular outer contour. The sides of the outer contour formed by each side platform are equidistant from the corresponding sides of the outer contour of the main platform.

5. The laser lift-off device according to claim 3, wherein The laser lift-off platform further includes: A sliding guide rail, and the side platform is provided on the sliding guide rail and moves along the sliding guide rail to move the side platform away from or close to the main platform.

6. The laser lift-off device according to claim 5, wherein, One side platform is provided on each side of the main platform; There are two sliding guide rails, and two relatively arranged side platforms share the same sliding guide rail respectively. The extending directions of the two sliding guide rails are the same as the extending directions of the adjacent two sides of the main platform respectively.

7. The laser lift-off device according to claim 1, wherein The side platform is further used to stop moving away from the main platform relative to the main platform and remain stationary in the expanded state after the laser emission device finishes scanning the lift-off interface of the workpiece to be lifted off.

8. A method for preparing a flexible display device, characterized in that, Using the laser lift-off device according to any one of claims 1 to 7, the preparation method includes the following steps: Placing the workpiece to be lifted off on the main platform and the side platform. The workpiece to be lifted off includes a carrier substrate and a flexible display device provided on the carrier substrate; The laser emission device emits laser light and sequentially scans the interface between the carrier substrate and the flexible display device. When sequentially scanning the interface between the carrier substrate and the flexible display device, the side platform moves away from the main platform in the same plane relative to the main platform, so that the edge area of the workpiece to be lifted off corresponding to the side platform expands outward relative to the main body area corresponding to the main platform; and Separating the flexible display device from the carrier substrate.

9. The preparation method according to claim 8, characterized in that, Vacuum adsorption holes are provided on both the main platform and the side platform. When sequentially scanning the interface between the carrier substrate and the flexible display device, the adsorption force of the vacuum adsorption holes on the side platform is controlled to be greater than that of the vacuum adsorption holes on the main platform.

10. The preparation method according to any one of claims 8 to 9, characterized in that, Before the step of separating the flexible display device from the carrier substrate after sequentially scanning the interface between the carrier substrate and the flexible display device, the following steps are further included: Controlling the side platform to stop moving away from the main platform relative to the main platform and maintaining the expanded state for static settlement.

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