Diamond wire saw damping device and damping method thereof

Abstract

The application discloses a diamond wire saw damping device and a damping method thereof, which comprises a Z-shaped support with an upper horizontal rod, an inclined rod and a lower horizontal rod, an N-shaped bracket at the end of the upper horizontal rod, N-shaped guide wheels arranged in a Z shape on the N-shaped bracket and used for passing through the diamond wire saw, front end springs on the N-shaped bracket and used for absorbing the vibration of the saw wire, a support shell parallel to the upper horizontal rod and connected with the front side of the inclined rod, a bearing spring horizontally arranged in the support shell, a spring thin shaft vertically arranged on the lower surface of the upper horizontal rod and abutting against the end of the bearing spring, and a conical spring vertically arranged on the upper surface of the lower horizontal rod and connected with the rear side of the inclined rod at the upper end. The application realizes effective damping of the diamond wire saw by using a three-stage damping structure.

Description

Technical Field

[0001] This invention relates to a vibration damping device, and more particularly to a vibration damping device and method for a diamond wire saw. Background Technology

[0002] With the development of the wire EDM industry, the current product quality can no longer meet the requirements of silicon wafer cutting technology. Research has found that wire saw vibration is a significant factor restricting the surface quality of wire-cut products. Therefore, to further improve the product quality of diamond wire saw cutting, it is necessary to control the vibration of the diamond wire saw, thereby achieving the goal of improving product quality.

[0003] Controlling the vibration of a wire saw requires detecting it. However, traditional vibration sensors cannot be attached to a reciprocating wire saw, necessitating visual recognition technology to identify its vibration. Computer vision is used to generate vibration amplitude images, providing a reliable basis for wire saw vibration control. Existing technology (CN115082397A) discloses a method and apparatus for measuring the lateral vibration of a diamond wire saw. A given vibration excitation signal is applied to the two support ends of the diamond wire saw on a vibration measurement platform using a vibrator. An industrial camera is used to acquire images of the diamond wire saw at various moments during lateral vibration. The acquired images are preprocessed and traversed to obtain pixel information. Multiple least-squares linear fitting operations are used to obtain the inner diameter boundary and center coordinates of the wire saw, ultimately yielding the lateral vibration displacement curve of the diamond wire saw. However, this existing technology cannot effectively reduce the vibration of the diamond wire saw, resulting in poor vibration reduction.

[0004] Therefore, the above problems urgently need to be solved. Summary of the Invention

[0005] Purpose of the invention: The first objective of this invention is to provide a vibration damping device for diamond wire saws with good vibration reduction effect.

[0006] A second objective of this invention is to provide a vibration reduction method for a diamond wire saw vibration reduction device.

[0007] Technical Solution: To achieve the above objectives, this invention discloses a vibration damping device for a diamond wire saw, comprising a Z-shaped bracket having an upper crossbar, a diagonal bar, and a lower crossbar; an N-shaped bracket located at the end of the upper crossbar; N-shaped guide wheels located on the N-shaped bracket and arranged in a Z-shape for passing through the diamond wire saw; a front-end spring located on the N-shaped bracket for absorbing saw wire vibration; a support housing parallel to the upper crossbar and connected to the front side of the diagonal bar; a load-bearing spring located inside the support housing and horizontally arranged; a spring shaft vertically arranged on the lower surface of the upper crossbar with its end abutting against the load-bearing spring; and a conical spring vertically arranged on the upper surface of the lower crossbar with its upper end connected to the rear side of the diagonal bar.

[0008] The middle section of the supporting shell has a space to accommodate the deformation of the load-bearing spring.

[0009] Preferably, a circular end cap is fixed above the bearing spring, and the lower end of the spring shaft is embedded in the circular end cap.

[0010] Furthermore, the upper end of the conical spring is connected to the rear side of the diagonal bar via a connecting plate.

[0011] Furthermore, the taper of the conical spring is 25° to 30°, the large end of the conical spring is connected to the lower crossbar, and the small end of the conical spring is connected to the connecting plate.

[0012] Preferably, the N-shaped guide wheel includes two sets of guide wheels arranged obliquely opposite each other.

[0013] Furthermore, the lower crossbar has a counterweight at its tail end.

[0014] Furthermore, an ultrasonic vibration block is provided at the front end of the upper crossbar. The ultrasonic vibration block is connected to the host computer through a D / A converter. The host computer is connected to a high-speed camera, which is equipped with multiple laser spotlights that can project lasers onto the diamond wire saw.

[0015] Preferably, the camera housing of the high-speed camera has several lamp holders evenly distributed on it, and each laser spotlight is fixed to the lamp holder by bolts.

[0016] The present invention discloses a vibration reduction method for a diamond wire saw vibration reduction device, comprising the following steps:

[0017] (1) The diamond wire saw on the wire storage wheel passes through the N-shaped guide wheel;

[0018] (2) Turn on the laser spotlight and project the laser spotlight onto the wire saw. The focusing effect of the wire saw will produce a light spot.

[0019] (3) When the diamond wire saw is cutting the product, the motion image of the light spot is collected by a high-speed camera and the recorded motion image is transmitted to the host computer.

[0020] (4) The visual recognition module in the host computer reads the motion image, selects the target area, and uses the maximum entropy segmentation method to separate the background from the target object.

[0021] (5) The host computer uses a threshold segmentation method to reduce background noise in motion images;

[0022] (6) The host computer selects the area where the target, i.e. the light spot, is located;

[0023] (7) The host computer uses the centroid recognition algorithm to obtain the centroid coordinates of the light spot in each frame;

[0024] (8) By connecting the centroid coordinates of the light spot into a coordinate image, the vibration image of the saw wire can be obtained, and then the vibration frequency and amplitude of the saw wire can be calculated.

[0025] (9) Compare the vibration frequency value of the wire saw processed by the host computer with the preset vibration frequency, and then output the digital analog quantity to the ultrasonic vibration block after conversion by the D / A converter. Control the ultrasonic vibration block to vibrate, and the vibration is transmitted to the N-shaped guide wheel to cancel the external work that causes the saw wire to vibrate.

[0026] Beneficial Effects: Compared with the prior art, the present invention has the following significant advantages: When the saw wire vibrates, the front spring acts as the first damping device, absorbing the vibration transmitted from the saw wire using the spring's elasticity; when the vibration after the first damping is transmitted to the middle part of the Z-shaped support, the thin spring shaft absorbs the kinetic energy of the vibration due to its elasticity, while the supporting spring acts as a damping damper. The two work together to form the second damping, which can further weaken the vibration energy; when the vibration after the second damping is transmitted to the conical spring, the conical spring acts as the third damping device. Its spring diameter increases from small to large, layer by layer, and its own elasticity further enhances the absorption of vibration and impact energy, weakening the vibration energy again; the present invention uses visual recognition technology to detect the vibration of the wire saw, accurately identifying the vibration frequency amplitude of the saw wire, and controlling the vibration of the ultrasonic vibrating block according to the vibration frequency amplitude of the wire saw, further offsetting the external work that causes the saw wire to vibrate, and reducing the vibration of the wire saw. Attached Figure Description

[0027] Figure 1 This is a front view of the three-stage vibration reduction method in this invention;

[0028] Figure 2 This is a schematic diagram of the three-stage vibration reduction structure in this invention;

[0029] Figure 3 This is a schematic diagram of the high-speed camera in this invention;

[0030] Figure 4 This is a schematic diagram of the rays emitted by the laser spotlight in this invention;

[0031] Figure 5 This is a schematic diagram of the structure of the present invention. Detailed Implementation

[0032] The technical solution of the present invention will be further described below with reference to the accompanying drawings.

[0033] like Figure 5 As shown, the present invention provides a vibration damping device for a diamond wire saw, comprising a Z-shaped bracket 1, an N-shaped support 2, an N-shaped guide wheel 3, a front spring 4, a support housing 5, a load-bearing spring 6, a spring shaft 7, a conical spring 8, a circular end cap 9, a connecting plate 10, an ultrasonic vibration block 11, a D / A converter 12, a host computer 13, a high-speed camera 14, a laser spotlight 15, and a lamp bracket 16.

[0034] like Figure 1 and Figure 2 As shown, the Z-shaped support 1 has an upper horizontal bar 101, a diagonal bar 102, a lower horizontal bar 103, and a counterweight 104. The counterweight 104 is located at the tail of the lower horizontal bar 103 and is used to maintain the balance of the Z-shaped support. The N-shaped bracket 2 is located at the end of the upper horizontal bar 101, and the N-shaped guide wheel 3 is located on the N-shaped bracket 2. The N-shaped guide wheel 3 includes two sets of guide wheels that are obliquely opposite each other and arranged in a Z-shape, which facilitates the oblique installation of the wire saw. The diamond wire saw passes through the two sets of guide wheels in sequence, which limits the amplitude of the wire saw's lateral vibration. The front spring 4 is located on the N-shaped bracket. The front spring 4 can absorb the vibration transmitted from the saw wire to the N-shaped bracket 2. The support housing 5 is parallel to the upper crossbar 101 and is connected to the front side of the diagonal bar 102. The middle of the support housing 5 is excavated to accommodate the deformation of the load-bearing spring. The load-bearing spring 6 is horizontally set in the space of the support housing 5. A circular end cap 9 is fixed above the load-bearing spring 6. The spring shaft 7 is vertically set on the lower surface of the upper crossbar. The lower end of the spring shaft 7 is embedded in the circular end cap 9 and abuts against the load-bearing spring. The load-bearing spring shaft and the load-bearing spring form a T-shaped structure to enhance the shock absorption effect. The conical spring 8 is vertically set on the upper surface of the lower crossbar 103. The upper end of the conical spring 8 is connected to the rear side of the diagonal bar 102 through the connecting plate 10. The taper of the conical spring 8 is 25° to 30°. The large end of the conical spring 8 is connected to the lower crossbar 103, and the small end of the conical spring 8 is connected to the connecting plate 10. When the saw wire vibrates, the front spring acts as the first damping device, absorbing the vibration transmitted from the saw wire using its elasticity. After the vibration is damped by the first damping, it is transmitted to the middle part of the support. The thin spring shaft absorbs the kinetic energy of the vibration due to its elasticity, while the supporting spring acts as a damping element. The two work together to form the second damping, which can further weaken the vibration energy. After the vibration is damped by the second damping, it is transmitted to the conical spring, which acts as the third damping device. The spring coil diameter increases from small to large, and the layers are stacked. Combined with its own elasticity, it strengthens the absorption of vibration and impact energy, further weakening the vibration energy.

[0035] like Figure 3 and Figure 4As shown, the ultrasonic vibrating block 11 is located at the front end of the upper crossbar 101. The ultrasonic vibrating block 11 is connected to the host computer 13 via a D / A converter 12. The host computer 13 is connected to a high-speed camera 14. The high-speed camera 14 is equipped with multiple laser spotlights 15. The laser spotlights 15 project laser light onto the diamond wire saw to form a spindle-shaped light spot. The projected laser spot is elliptical. The high-speed camera captures the motion image of the spindle-shaped light spot. Several lamp holders 16 are evenly distributed on the camera housing of the high-speed camera 14. Each laser spotlight 15 is fixed by bolts. The laser spotlight 15 can rotate up and down within a 160-degree range on the lamp holder 16. When in use, the spotlight is adjusted to a suitable angle. In the preferred embodiment, the camera housing has 5 apex corners, and the laser spotlight is installed on the apex corners. The apex corner of the lamp holder 16 is mushroom-shaped, with a length of 2.5cm and a small hole of 0.04cm. It can cooperate with the laser spotlight to achieve up and down rotation within a 160-degree range. The lamp holder 16 is shaped like a ruyi (a traditional Chinese symbol of good fortune). The head handle is crescent-shaped with a small hole for mounting on the side of the lamp head. The tail handle is figure-eight shaped to support the lamp body.

[0036] like Figure 5 As shown, the vibration reduction method of a diamond wire saw vibration reduction device of the present invention includes the following steps:

[0037] (1) The diamond wire saw on the wire storage wheel passes through the N-shaped guide wheel;

[0038] (2) Turn on the laser spotlight and project the elliptical spot of light emitted by the laser spotlight onto the wire saw. Because there are diamond particles on the diamond wire saw, it has a focusing effect and forms a spot.

[0039] (3) When the diamond wire saw is cutting the product, the motion image of the light spot is collected by a high-speed camera and the recorded motion image is transmitted to the host computer.

[0040] (4) The visual recognition module in the host computer reads the motion image, selects the target area, and uses the maximum entropy segmentation method to separate the background from the target object and reduce noise.

[0041] (5) The host computer uses the threshold segmentation method to reduce background noise in motion images; after the maximum entropy algorithm is used to segment the light spot and the background, there is still some background noise, which interferes with the stability of the recognition result. Threshold segmentation is used to reduce background noise.

[0042] (6) The host computer selects the area where the target, i.e. the light spot, is located;

[0043] (7) The host computer uses the centroid recognition algorithm to obtain the centroid coordinates of the light spot in each frame;

[0044] (8) By connecting the centroid coordinates of the light spot into a coordinate image, the vibration image of the saw wire can be obtained. The number of peaks and valleys and the difference between peak and valley values ​​can be identified by the algorithm. Then the vibration frequency and amplitude of the saw wire can be calculated.

[0045] (9) Compare the vibration frequency value of the wire saw processed by the host computer with the preset vibration frequency, and then output the digital analog signal to the ultrasonic vibration block after conversion by the D / A converter. Control the ultrasonic vibration block to vibrate. The vibration frequency and amplitude of the ultrasonic vibration block are different from those of the saw wire vibration to avoid resonance with the saw wire vibration. The vibration of the ultrasonic vibration block is transmitted to the N-shaped guide wheel to cancel the external work that causes the saw wire to vibrate and reduce the wire saw vibration as much as possible.

Claims

1. A vibration damping device for a diamond wire saw, characterized in that: The system includes a Z-shaped bracket (1) with an upper crossbar (101), a diagonal bar (102), and a lower crossbar (103); an N-shaped bracket (2) located at the end of the upper crossbar; an N-shaped guide wheel (3) located on the N-shaped bracket and arranged in a Z-shape for passing through the diamond wire saw; a front spring (4) located on the N-shaped bracket for absorbing saw wire vibration; a support housing (5) parallel to the upper crossbar and connected to the front side of the diagonal bar; a load-bearing spring (6) located inside the support housing and horizontally arranged; and a spring shaft vertically arranged on the lower surface of the upper crossbar with its end abutting against the load-bearing spring. (7) and a conical spring (8) vertically arranged on the upper surface of the lower crossbar and connected to the rear side of the diagonal bar at its upper end; the upper end of the conical spring (8) is connected to the rear side of the diagonal bar (102) through a connecting plate (10); an ultrasonic vibration block (11) is provided at the front end of the upper crossbar (101), the ultrasonic vibration block (11) is connected to the host computer (13) through a D / A converter (12), the host computer (13) is connected to a high-speed camera (14), and the high-speed camera (14) is equipped with multiple laser spotlights (15) that can project lasers onto the diamond wire saw.

2. The vibration damping device for diamond wire saws according to claim 1, characterized in that: The middle of the support shell (5) is excavated to have a space to accommodate the deformation of the bearing spring.

3. The vibration damping device for diamond wire saws according to claim 1, characterized in that: A circular end cap (9) is fixed above the bearing spring (6), and the lower end of the spring shaft (7) is embedded in the circular end cap (9).

4. The vibration damping device for diamond wire saws according to claim 1, characterized in that: The cone spring (8) has a taper of 25°~30°. The large end of the cone spring (8) is connected to the lower crossbar (103), and the small end of the cone spring (8) is connected to the connecting plate (10).

5. The vibration damping device for diamond wire saws according to claim 1, characterized in that: The N-shaped guide wheel (3) includes two sets of guide wheels arranged obliquely opposite each other.

6. The vibration damping device for diamond wire saws according to claim 1, characterized in that: The lower crossbar (103) has a counterweight (104) at its tail end.

7. The vibration damping device for diamond wire saws according to claim 1, characterized in that: The high-speed camera (14) has several lamp holders (16) evenly distributed on its camera housing, and each laser spotlight (15) is fixed to the lamp holder (16) by bolts.

8. A vibration reduction method for a diamond wire saw vibration reduction device according to claim 1 or 7, characterized in that, Includes the following steps: (1) The diamond wire saw on the wire storage wheel passes through the N-shaped guide wheel; (2) Turn on the laser spotlight and project the laser spotlight onto the wire saw. The focusing effect of the wire saw will produce a light spot. (3) When the diamond wire saw is cutting the product, the motion image of the light spot is collected by a high-speed camera and the recorded motion image is transmitted to the host computer; (4) The visual recognition module in the host computer reads the motion image, selects the target area, and uses the maximum entropy segmentation method to separate the background from the target object; (5) The host computer uses threshold segmentation to reduce background noise in motion images; (6) The host computer selects the area where the target, i.e. the light spot, is located; (7) The host computer uses the centroid recognition algorithm to obtain the centroid coordinates of the light spot in each frame; (8) By connecting the centroid coordinates of the light spot into a coordinate image, the vibration image of the saw wire can be obtained, and then the vibration frequency and amplitude of the saw wire can be calculated. (9) Compare the vibration frequency value of the wire saw processed by the host computer with the preset vibration frequency, and then output the digital analog quantity through the D / A converter to output the current to the ultrasonic vibration block, control the ultrasonic vibration block to vibrate, and transmit the vibration to the N-shaped guide wheel to cancel the external work that causes the saw wire to vibrate.

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