Electrostatic elimination device for glass substrate processing

Abstract

The application relates to the technical field of glass substrate static electricity elimination devices, and discloses a static electricity elimination device for glass substrate processing, which comprises a work platform, a cover body and a magnetic field generator. The work platform is provided with a conveying assembly for fixing and transporting glass plates. The cover body is arranged on the work platform and is internally provided with a spray head for spraying water vapor. Magnetic field generators capable of generating magnetic fields are arranged on the two sides of the cover body. The magnetic induction lines of the magnetic fields pass through the glass plates in the cover body. An electron emitter is further arranged inside the cover body and beside the spray head. During work, the magnetic field direction of the magnetic field generator is adjusted after the surface charges of the glass plates are detected. The water vapor generated by the spray head is used for wetting the surface of the glass plates, the surface liquid flow direction is controlled, the charges are moved in the magnetic field, the charges are concentrated under the influence of the Lorentz force, and the accumulated surface charges of the glass plates are neutralized by the electron emitter.

Description

Technical Field

[0001] This invention relates to the technical field of electrostatic elimination devices for glass substrates, specifically to an electrostatic elimination device for glass substrate processing. Background Technology

[0002] A glass substrate is a thin sheet of glass with an extremely smooth surface and is one of the key basic materials in the flat panel display industry. In the field of liquid crystal display manufacturing, glass substrates are usually used as carriers for conductive layers. A transparent conductive layer made of In2O3 or SnO2, namely an ITO film layer, is deposited on its surface. Transparent conductive patterns are then formed through photolithography. These patterns consist of pixel patterns and external lead patterns. However, the external leads cannot be soldered using traditional methods and can only be connected using conductive rubber strips or conductive tapes. There are three main production methods for glass substrates: float glass, overflow pull-down, and slot pull-down. Among them, the float glass manufacturing process utilizes… The most widely used and oldest flat glass manufacturing process has the advantages of high production capacity and easy scaling up of substrate glass area. Glass substrates are used in many fields. In semiconductor manufacturing, glass substrates are often used as auxiliary equipment such as electronic component connections and trays to ensure the stability and reliability of electronic components. In optoelectronics, glass substrates are mainly used in lasers and optical transceivers. In the field of solar cells, glass substrates are often used as protective materials for solar cell films, which can prevent moisture and other harmful gases from corroding solar cells, while enhancing the mechanical strength and stability of solar cells during use.

[0003] If static electricity is not effectively eliminated during the manufacturing process of glass substrates for electronic screens, it may cause a series of hazards. Static electricity may cause dust, impurities, and other tiny particles to be attracted to the surface of the glass substrate. These particles may be difficult to remove in subsequent processes, thus affecting the transparency and cleanliness of the glass substrate and reducing product quality. Static electricity may also affect the manufacturing quality of ITO (transparent conductive metal) films, such as causing defects such as short circuits and breaks, which in turn affect the performance of TFT (thin-film transistor) and ultimately affect the screen display effect. Static electricity may generate sparks or discharge phenomena, which may cause fires or explosions in some flammable and explosive environments, posing a threat to the safety of personnel and equipment.

[0004] There are some problems with eliminating static electricity on glass substrates. Static electricity is the accumulation of charge on the surface of non-conductive materials, and the amount and distribution of the accumulated charge are uncertain. If the charge on the surface of the glass substrate is eliminated by grounding the conductor, it is necessary to consider that the glass is non-conductive and the charge on the surface is not easy to move. If the charge accumulated on the surface needs to be completely removed, the conductor needs to completely cover the glass plate. However, this method cannot completely eliminate all static electricity, especially when there is insulating material on the charged object. The grounding effect will be limited, and there may be residual charge. In some application scenarios, it may be difficult to achieve a good connection between the conductor and the ground. For example, in the microelectronics manufacturing process, the grounding of equipment, tools or workbenches may require a complex layout and precise control of grounding resistance. Summary of the Invention

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this invention provides an electrostatic elimination device for glass substrate processing, which has the advantage of being able to concentrate and neutralize the charge on the glass substrate, thus solving the problem of incomplete elimination caused by charge distribution and difficulty in charge movement on the glass plate.

[0007] (II) Technical Solution

[0008] To achieve the above-mentioned objective of concentrating and neutralizing the charge on the glass substrate, the present invention provides the following technical solution: an electrostatic elimination device for glass substrate processing, comprising a working platform, a cover, and a magnetic field generator. The working platform is provided with a conveying assembly for fixing and transporting the glass plate. The cover is disposed on the working platform and has a nozzle for spraying water vapor inside. Magnetic field generators capable of generating magnetic fields are provided on both sides of the cover. The magnetic field lines pass through the glass plate located inside the cover. An electron emitter is also provided inside the cover and next to the nozzle.

[0009] During operation, after detecting the charge on the glass plate surface, the magnetic field direction of the magnetic field generator is adjusted. Water vapor generated by the nozzle wets the glass plate surface, controls the direction of surface liquid flow, and the charged particles move in the magnetic field. Under the influence of the Lorentz force, the charge is concentrated, and the accumulated charge on the glass plate surface is neutralized by the electron emitter.

[0010] Preferably, the magnetic field generator has an internal current-carrying conductor, and the direction of the current flow in the conductor is parallel to the transport direction of the conveying component, so that the magnetic field generator forms a ring magnetic field and the magnetic field lines pass through the glass plate transported by the conveying component.

[0011] Preferably, the conveying assembly includes a fixed frame and a transmission belt. The fixed frame is arranged on both sides of the working platform, and a guide rail is provided on the inner side of the fixed frame. The transmission belts on both sides fix the glass plate by clamping and then move within the guide rail.

[0012] Preferably, the mounting bracket is equipped with a probe, which contacts the glass plate through its own probe and can detect the surface charge of the glass plate by means of its own charge change.

[0013] Preferably, the surface of the working platform is provided with a groove-shaped drain outlet, which is located inside the transmission belts on both sides. Timely drainage of accumulated water through the drain outlet can prevent the formation of an uneven conductive layer of water film on the glass plate surface, which would affect the uniform distribution and neutralization effect of the charge. This ensures that the equipment operates in a stable environment and improves the efficiency and accuracy of static electricity elimination. Long-term accumulation of water may lead to internal corrosion of the equipment or damage to electrical components due to moisture. Timely drainage through the groove-shaped drain outlet can reduce these potential problems and lower the maintenance cost and failure rate of the equipment.

[0014] Preferably, the surface of the work platform is inclined, and the glass plate is raised as it is transported by the conveying assembly. The inclination angle does not exceed 6°. The inclined surface of the work platform helps water film or accumulated water to flow naturally to the trough-shaped drain, thereby improving drainage efficiency, avoiding prolonged retention of water on the work platform, and keeping the work platform clean and dry. The inclined design can promote the movement of charges on the surface of the glass plate along the inclined direction. This helps the charges to concentrate more quickly in the center when subjected to the Lorentz force in the magnetic field, thereby improving the charge transfer efficiency and making the charge neutralization process faster and more effective.

[0015] Preferably, the housing contains an airflow in the opposite direction to that of the conveying component.

[0016] Preferably, the electron emitter is a thermionic emitter that uses a heated metal wire to emit electrons, and the electron emitter is located in the middle of the housing. The heat generated can be exchanged with the transport pipe of the nozzle. The thermionic emitter can generate electrons stably and efficiently by heating the metal wire. This emission method has been widely verified as a highly efficient and reliable electron emission technology, ensuring that electrons can escape from the emitter quickly and stably. The heat generated is exchanged with the transport pipe of the nozzle, which means that the heat energy generated by the electron emitter is not wasted, but is used to heat the water vapor or liquid in the nozzle. This heat exchange improves the energy utilization efficiency and reduces the energy consumption of the overall system. Due to the heat exchange, the temperature of the equipment is stabilized, which helps to maintain the fluidity and stability of water vapor or liquid. At the same time, the stable temperature also reduces the possibility of equipment failure due to temperature changes.

[0017] (III) Beneficial Effects

[0018] Compared with the prior art, the present invention provides an electrostatic elimination device for glass substrate processing, which has the following beneficial effects:

[0019] 1. This electrostatic eliminator for glass substrate processing utilizes a water film formed by water vapor on the glass surface as a conductive layer, providing a medium for the movement of static charges that were previously difficult to move. This significantly improves charge transfer efficiency. Due to the Lorentz force, charges in a magnetic field experience a force perpendicular to both the direction of charge movement and the direction of the magnetic field. This allows charges to accumulate in a specific area. In electrostatic eliminator equipment, this helps concentrate charges in the center of the glass plate, facilitating subsequent neutralization. The concentrated charge elimination also effectively reduces the elimination range, lowers equipment requirements, and can adapt to different charge distribution locations. The Lorentz force provides a clear direction of charge movement based on the direction of the magnetic field and the direction of charge movement. In the equipment, by adjusting the magnetic field... The direction of the Lorentz force ensures that the charge moves in the expected direction, thereby improving the efficiency of charge transfer. By adjusting the strength and direction of the magnetic field generated by the magnetic field generator, the magnitude and direction of the Lorentz force can be precisely controlled, thus achieving precise control of charge movement. This precise control allows the equipment to transfer the charge to the predetermined location more accurately, improving the accuracy of static electricity elimination. Different charge amounts and distributions may require different processing methods. By adjusting the magnitude and direction of the Lorentz force, the equipment can adapt to different static electricity elimination needs, improving its adaptability and flexibility. Using the Lorentz force for charge transfer and neutralization avoids direct physical or chemical treatment of the glass plate surface, thereby reducing the risk of damage to the glass plate. As a physical force, the Lorentz force is stable and reliable. In the equipment, the application of the Lorentz force makes the charge transfer and neutralization process more stable and reliable, improving the safety and reliability of the equipment. The application of the Lorentz force does not require the use of any chemical reagents or materials, so it does not produce any chemical pollution, which meets environmental protection requirements and helps protect the environment and human health.

[0020] 2. The electrostatic elimination device for processing this glass substrate promptly removes accumulated water through a groove-shaped drain outlet. This prevents the formation of an uneven conductive layer on the glass surface by water film, which would affect the uniform distribution and neutralization of charges. This ensures the equipment operates in a stable environment, improving the efficiency and accuracy of electrostatic elimination. Long-term water accumulation can lead to internal corrosion or damage to electrical components due to moisture. Timely drainage through the groove-shaped drain outlet reduces these potential problems, lowering maintenance costs and the failure rate. The working platform surface is inclined, with the glass plate rising as it is transported by the conveyor assembly, and the tilt angle does not exceed 6°. The inclined surface of the work platform facilitates the natural flow of water film or accumulated water to the trough-shaped drain outlet, thereby improving drainage efficiency and preventing water from lingering on the work platform for extended periods, keeping the platform clean and dry. The inclined design also encourages charge movement along the inclined direction on the glass plate surface, which helps the charge concentrate more quickly towards the center when subjected to the Lorentz force in a magnetic field, thus improving charge transfer efficiency and making the charge neutralization process faster and more effective. The electron emitter is a thermionic cathode emitter that uses a heated metal wire to emit electrons, and the electron emitter is located in the center of the enclosure, where the generated heat can interact with... The heat exchanger, which heats a metal wire, can stably and efficiently generate electrons through the exchange of transport channels in the nozzle. This emission method has been widely verified as a highly efficient and reliable electron emission technology, ensuring that electrons can escape from the emitter quickly and stably. The heat generated is exchanged with the transport channels in the nozzle, meaning that the heat energy generated by the electron emitter is not wasted but is used to heat the water vapor or liquid in the nozzle. This heat exchange improves energy utilization efficiency and reduces the overall system energy consumption. Due to the heat exchange, the temperature of the equipment is stabilized, which helps maintain the fluidity and stability of water vapor or liquid. At the same time, the stable temperature also reduces the possibility of equipment failure due to temperature changes. By wetting the surface of the glass plate, the movement of charges is increased, and the binding of charges on the glass plate is reduced. In addition, airflow and drainage channels are added inside the enclosure. After static removal, the liquid on the surface of the glass plate can be removed, making the surface of the glass plate cleaner after static removal. This is because when the surface of the glass plate has static charges, it is more likely to attract dust, resulting in dust accumulation on the surface. During subsequent electronic product assembly, dust may be introduced, or after static removal, additional dust treatment is required, which reduces processing efficiency or product quality.

[0021] 3. The electrostatic elimination device for glass substrate processing. The magnetic field generator, nozzle, conveying components and other parts of the device can be modularly designed for easy replacement and maintenance. This design enables the device to quickly resume normal operation in the event of a failure, improving the reliability and stability of the device. With the advancement of technology and changes in demand, the functions and performance of the device may need to be continuously expanded and upgraded. Since the application of Lorentz force is based on physical principles, the functions and performance of the device can be expanded by adjusting the parameters of the magnetic field generator or adding new components to make it more adaptable to new needs. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the present invention;

[0023] Figure 2 This is a schematic diagram showing the details of the delivery component of the present invention;

[0024] Figure 3 This is a schematic diagram of the internal structure of the cover of the present invention;

[0025] Figure 4 This is a schematic diagram of the airflow inside the cover of the present invention;

[0026] Figure 5 This is a schematic diagram of the positive charge movement in the glass plate of the present invention;

[0027] Figure 6 This is a schematic diagram of the positively charged magnetic field of the glass plate of the present invention;

[0028] Figure 7 This is a schematic diagram of the movement of negative charges on the glass plate of the present invention;

[0029] Figure 8 This is a schematic diagram of the negatively charged magnetic field of the glass plate of the present invention.

[0030] In the diagram: 1. Working platform; 11. Cover; 12. Conveying assembly; 13. Magnetic field generator; 101. Drain outlet; 111. Electron transmitter; 112. Nozzle; 121. Probe; 122. Fixture; 123. Drive belt. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Please see Figure 1-8An electrostatic elimination device for glass substrate processing includes a work platform 1, a cover 11, and a magnetic field generator 13. The work platform 1 is equipped with a conveying assembly 12 for fixing and transporting the glass substrate. The cover 11 is mounted on the work platform 1 and contains a nozzle 112 for spraying water vapor. Magnetic field generators 13 capable of generating magnetic fields are located on both sides of the cover 11. The magnetic field lines pass through the glass substrate located inside the cover 11. An electron emitter 111 is also located inside the cover 11 and next to the nozzles 112. The magnetic field generator 13... An internal current-carrying conductor is provided, and the direction of the current flow in the conductor is parallel to the transport direction of the conveying component 12, so that the magnetic field generator 13 forms a ring magnetic field. The magnetic field lines pass through the glass plate transported by the conveying component 12. The conveying component 12 includes a fixed frame 122 and a transmission belt 123. The fixed frame 122 is set on both sides of the working platform 1, and a guide rail is provided on the inner side of the fixed frame 122. The transmission belts 123 on both sides fix the glass plate by clamping and then move within the guide rail. An airflow opposite to the transport direction of the conveying component 12 passes through the cover 11.

[0033] The mounting bracket 122 is equipped with a probe 121. The probe 121 contacts the glass plate through its own probe and can detect the surface charge of the glass plate by the change of its own charge. If the object surface has a charge of the same polarity as the probe, the charge on the probe will decrease; if the object surface has a charge of the opposite polarity to the probe, the charge on the probe will increase. In this way, the polarity of the surface charge of the object can be determined.

[0034] After nozzle 112 sprays water vapor, the water vapor comes into contact with the glass plate. The high-temperature water vapor liquefies, forming a liquid water film on the glass plate surface. The charge accumulated on the glass plate is a stationary charge. Because glass itself is an insulating material, the charge is difficult to move. After the water film formed on the glass plate surface by nozzle 112, this water film, containing dissolved ions, can act as a conductive layer, allowing the charge to have a medium for its movement. At the same time, the liquefaction of water vapor is also an exothermic process. Heating can increase the thermal motion of particles in the material. For particles containing charges, thermal motion will also cause them to begin to move. Therefore, the stationary charge originally located on the glass plate surface is transferred to the water film, enabling it to move. When probe 121 detects a positive charge on the glass plate, refer to... Figures 5-6 The direction of the current in the magnetic field generator 13 is Figure 5 As shown by the arrow, in the diagram, the cross indicates the magnetic field direction is outward, and the dot indicates the magnetic field direction is inward. The direction of the magnetic field when viewed from one side is as follows: Figure 6 As shown, at this time, the water film on the surface of the glass plate is used to make the liquid move in the opposite direction to the conveying component 12, for example, by applying airflow inside the cover 11. Figure 4As shown by the middle arrow, the liquid carrying charge moves in the magnetic field. The charge is affected by the Lorentz force, which is the force exerted on the moving charge in the magnetic field, i.e., the force of the magnetic field on the moving charge. The formula for the Lorentz force is F = QvB, where F represents the Lorentz force, Q represents the charge, v represents the velocity of the charge, and B represents the magnetic induction intensity. Using the left-hand rule, with the palm facing the direction of the magnetic field, the four fingers pointing in the direction of the charge's movement, and the thumb pointing in the direction of the Lorentz force, the positive charges on both sides of the glass plate surface will move towards the center, causing the charge to concentrate in the middle. Some charges will leave the glass plate surface with the water flow, but some charges will remain on the surface. Using the electron emitter 111 located in the middle of the enclosure 11, charges opposite to those on the glass plate surface are emitted to neutralize the charges on the glass plate, achieving the elimination effect. When the glass plate surface is negatively charged, the direction of the current in the magnetic field generator 13 and the direction of the magnetic field are as follows: Figures 7-8 As shown, the direction of charge movement is as follows Figure 4 As shown by the middle arrow, the negative charge also moves towards the center of the glass plate to neutralize the charge. The process of static electricity elimination is to release ions or particles with opposite charges onto the surface of a charged object to neutralize the original charge, thereby achieving the purpose of eliminating static electricity. Under normal circumstances, this neutralization process is safe and will not cause physical or chemical damage to the glass plate. Furthermore, the direction of movement of the neutralized charge is almost parallel to the direction of the magnetic field and is not affected by the Lorentz force, which would cause a deviation in the emission position.

[0035] The working platform 1 is provided with a groove-shaped drain outlet 101 on its surface. The drain outlet 101 can remove accumulated water in time, which can prevent the water film from forming an uneven conductive layer on the glass plate surface, thereby affecting the uniform distribution and neutralization effect of the charge. This can ensure that the equipment operates in a stable environment and improve the efficiency and accuracy of static elimination. Long-term accumulation of water may lead to internal corrosion of the equipment or damage to electrical components due to moisture. Timely drainage through the groove-shaped drain outlet 101 can reduce these potential problems and reduce the maintenance cost and failure rate of the equipment.

[0036] The surface of the working platform 1 is inclined, and the glass plate is transported and lifted by the conveying component 12. The inclination angle does not exceed 6°. The inclined working platform surface helps water film or accumulated water to flow naturally to the trough-shaped drain, thereby improving drainage efficiency, avoiding water from staying on the working platform for a long time, and keeping the working platform 1 clean and dry. The inclined design can promote the movement of charges on the surface of the glass plate along the inclined direction. This helps the charges to concentrate more quickly in the center when subjected to the Lorentz force in the magnetic field, thereby improving the charge transfer efficiency and making the charge neutralization process faster and more effective.

[0037] The electron emitter 111 is a thermionic emitter that uses a heated metal wire to emit electrons. The electron emitter 111 is located in the middle of the housing 11. The heat generated can be exchanged with the transport pipe of the nozzle 112. The thermionic emitter can generate electrons stably and efficiently by heating the metal wire. This emission method has been widely verified as a highly efficient and reliable electron emission technology, ensuring that electrons can escape from the emitter quickly and stably. The heat generated is exchanged with the transport pipe of the nozzle 112, which means that the heat energy generated by the electron emitter is not wasted, but is used to heat the water vapor or liquid in the nozzle. This heat exchange improves the energy utilization efficiency and reduces the overall system energy consumption. Due to the heat exchange, the temperature of the equipment is stabilized, which helps to maintain the fluidity and stability of water vapor or liquid. At the same time, the stable temperature also reduces the possibility of equipment failure due to temperature changes.

[0038] Working Principle: Static electricity is a state of stationary electric charge, or non-flowing electric charge. Flowing electric charge forms an electric current. When electric charge accumulates on an object or surface, static electricity is formed. Electric charge is divided into two types: positive and negative. Therefore, static electricity phenomena are also divided into two types: positive static electricity and negative static electricity. When positive charge accumulates on an object, positive static electricity is formed; when negative charge accumulates on an object, negative static electricity is formed. However, regardless of whether it is positive or negative static electricity, when a charged object comes into contact with an object with zero potential, a grounded object, or an object with a potential difference, charge transfer occurs. This is the spark discharge phenomenon we see in daily life. Under normal circumstances, the material... The positive and negative charges inside an object are evenly distributed, so they do not exhibit obvious electrostatic effects. However, when factors such as friction, contact, or induction cause an imbalance in the charge distribution on the object's surface, the object becomes statically charged. The main raw materials for electronic glass are silicate glass substrates and metal thin-film materials. During manufacturing, these materials, due to their inherent physical and chemical properties, are prone to charge imbalances during contact, friction, or separation. Furthermore, insulating materials are more prone to static electricity than conductive materials because they do not readily conduct electrons. During the manufacturing process, the surface of electronic glass may acquire a certain degree of insulation due to processing techniques, thus... The increased likelihood of static electricity generation means that static electricity accumulates on the glass plate due to excessive charge. The glass plate is fixed to the work platform 1 by the conveying assembly 12 and transported into the enclosure 11. The enclosure 11 is equipped with nozzles 112 for spraying water vapor. When the nozzles 112 spray water vapor, it comes into contact with the glass plate, liquefying at high temperature and forming a liquid water film on the glass surface. The charge accumulated on the glass plate is a stationary charge. Because glass is an insulating material, the charge is difficult to move. The water film formed on the glass surface by the nozzles 112, containing dissolved ions, acts as a conductor. The electric layer provides a medium for the movement of charges. At the same time, the liquefaction of water vapor is also an exothermic process. Heating can increase the thermal motion of particles in the material. For particles containing charges, thermal motion will also cause them to start moving. Therefore, the static charges that were originally located on the surface of the glass plate are transferred to the water film, enabling them to move. During the transport of the glass plate by the conveying component 12, a probe 121 is provided to contact the glass plate. By contacting the glass plate with the probe 121, it is possible to determine whether the surface of the glass plate is charged. Then, the change of charge on the probe is observed. If the surface of the object has a charge of the same polarity as the probe, then the charge on the probe will decrease.If the surface of an object carries a charge of opposite polarity to that of the probe, the charge on the probe will increase. In this way, the polarity of the charge on the surface of the object can be determined. Magnetic field generators 13 capable of generating magnetic fields are provided on both sides of the cover 11. Inside the magnetic field generator 13 is a current-carrying conductor parallel to the conveying component 12, so that a ring-shaped magnetic field can be generated when the conductor is energized, and the magnetic field lines pass through the glass plate. When the probe 121 detects a positive charge on the glass plate, see reference. Figures 5-6 The direction of the current in the magnetic field generator 13 is Figure 5 As shown by the arrow, in the diagram, the cross indicates the magnetic field direction is outward, and the dot indicates the magnetic field direction is inward. The direction of the magnetic field when viewed from one side is as follows: Figure 6 As shown, at this time, the water film on the surface of the glass plate is used to make the liquid move in the opposite direction to the conveying component 12, for example, by applying airflow inside the cover 11. Figure 4 As shown by the middle arrow, the liquid carrying charge moves in the magnetic field. The charge is affected by the Lorentz force, which is the force exerted on the moving charge in the magnetic field, i.e., the force of the magnetic field on the moving charge. The formula for the Lorentz force is F = QvB, where F represents the Lorentz force, Q represents the charge, v represents the velocity of the charge, and B represents the magnetic induction intensity. Using the left-hand rule, with the palm facing the direction of the magnetic field, the four fingers pointing in the direction of the charge's movement, and the thumb pointing in the direction of the Lorentz force, the positive charges on both sides of the glass plate surface will move towards the center, causing the charge to concentrate in the middle. Some charges will leave the glass plate surface with the water flow, but some charges will remain on the surface. Using the electron emitter 111 located in the middle of the enclosure 11, charges opposite to those on the glass plate surface are emitted to neutralize the charges on the glass plate, achieving the elimination effect. When the glass plate surface is negatively charged, the direction of the current in the magnetic field generator 13 and the direction of the magnetic field are as follows: Figures 7-8 As shown, the direction of charge movement is as follows Figure 4 As shown by the middle arrow, the negative charge also moves towards the center of the glass plate to neutralize the charge. The process of static electricity elimination is to release ions or particles with opposite charges onto the surface of a charged object to neutralize the original charge, thereby achieving the purpose of eliminating static electricity. Under normal circumstances, this neutralization process is safe and will not cause physical or chemical damage to the glass plate. Furthermore, the direction of movement of the neutralized charge is almost parallel to the direction of the magnetic field and is not affected by the Lorentz force, which would cause a deviation in the emission position.

[0039] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0040] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An electrostatic elimination device for glass substrate processing, comprising a work platform (1), a cover (11), and a magnetic field generator (13), characterized in that: The working platform (1) is provided with a conveying assembly (12) for fixing and transporting glass plates. The cover (11) is set on the working platform (1) and is provided with a nozzle (112) for spraying water vapor inside. The cover (11) is provided with magnetic field generators (13) on both sides that can generate magnetic fields. The magnetic field lines pass through the glass plates located inside the cover (11). An electronic transmitter (111) is also provided inside the cover (11) and next to the nozzle (112). During operation, after detecting the surface charge of the glass plate, the magnetic field direction of the magnetic field generator (13) is adjusted. The water vapor generated by the nozzle (112) is used to wet the surface of the glass plate, control the flow direction of the surface liquid, carry the charge and move in the magnetic field. Under the influence of the Lorentz force, the charge is concentrated. The charge accumulated on the surface of the glass plate is neutralized by the electron emitter (111). The conveying component (12) includes a fixed frame (122) and a transmission belt (123). The fixed frame (122) is set on both sides of the working platform (1), and the fixed frame (122) is provided with a guide rail inside. The transmission belts (123) on both sides fix the glass plate by clamping and then move in the guide rail. The fixed frame (122) is provided with a probe (121). The probe (121) can detect the surface charge of the glass plate by contacting the glass plate with its own probe through the change of its own charge. The surface of the working platform (1) is generally inclined. The glass plate is transported and climbed with the conveying component (12), and the inclination angle does not exceed 6°.

2. The electrostatic elimination device for glass substrate processing according to claim 1, characterized in that: The magnetic field generator (13) has an internal current-carrying conductor. The direction of the current flow in the conductor is parallel to the transport direction of the transport component (12), so that the magnetic field generator (13) forms a ring magnetic field and the magnetic field lines pass through the glass plate transported by the transport component (12).

3. The electrostatic elimination device for glass substrate processing according to claim 1, characterized in that: The surface of the work platform (1) is provided with a groove-shaped drain outlet (101), and the groove-shaped drain outlet (101) is located inside the transmission belts (123) on both sides.

4. An electrostatic elimination device for glass substrate processing according to any one of claims 1-3, characterized in that: The cover (11) is filled with airflow that is opposite to the conveying direction of the conveying assembly (12).

5. An electrostatic elimination device for glass substrate processing according to any one of claims 1-3, characterized in that: The electron emitter (111) is a thermionic emitter that uses a heated metal wire to emit electrons, and the electron emitter (111) is located in the middle of the cover (11), and the heat generated can be exchanged with the transport pipe of the nozzle (112).

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