Microobjective optimization method and electronic equipment

Abstract

The invention provides a microscope objective optimization method and electronic equipment, and relates to the technical field of microscopic imaging. The method comprises the following steps: acquiring initial design parameters of a microscope objective; respectively calculating the imaging quality of the microscope objective and the total ghost image intensity of the microscope objective based on the Kohler illumination system according to the initial design parameters of the microscope objective; according to the imaging quality and the total ghost image intensity of the microscope objective, a preset lens evaluation function is constructed, and the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement are iteratively calculated, so that compared with an existing mode of determining through multiple tests, the optimization efficiency can be improved; and through introduction of the preset lens evaluation function, comprehensive evaluation can be realized, and the optimization effect is ensured.

Description

Technical Field

[0001] The present application relates to the field of microscopic imaging technology, and in particular to an optimization method for a microscope objective lens and an electronic device. Background Art

[0002] As an important precision detection and imaging method, the Kohler illumination microscopic imaging system has been widely used in the fields of biomedicine, machine vision, precision manufacturing and industrial quality inspection. However, in this optical system, the reflection of the light source on the microscope lens is inevitable. If the reflected light converges near the image plane, additional light spots will be generated on the image plane, forming ghost images, which will affect the shooting and detection of the target.

[0003] The existing ghost image elimination method mainly relies on optimization personnel to conduct multiple tests and optimizations based on optimization experience. However, due to the lack of a unified optimization standard, there is often a problem of low optimization efficiency of the microscope objective. Summary of the invention

[0004] The purpose of the present application is to provide a microscope objective optimization method and electronic equipment to improve the optimization efficiency and ensure the optimization effect in view of the deficiencies in the above-mentioned prior art.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows: In a first aspect, the present invention provides a method for optimizing a microscope objective lens, the method comprising: Obtaining initial design parameters of the microscope objective; According to the initial design parameters of the microscope objective lens, the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens under the Kohler illumination system are calculated respectively, wherein the microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, wherein m is an integer greater than 1, and n>m; According to the imaging quality and total ghost image intensity of the microscope objective lens, a preset lens evaluation function is constructed, and the target design parameters of each target lens are iteratively calculated when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens.

[0006] In an optional embodiment, the calculating the imaging quality of the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, obtaining the initial technical index parameters of the microscope objective lens; The imaging quality of the microscope objective lens is calculated according to the initial technical indicator parameters of the microscope objective lens and the preset weight factor.

[0007] In an optional embodiment, the calculating, based on the initial design parameters of the microscope objective lens, the total ghost image intensity of the microscope objective lens under the Kohler illumination system comprises: Calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens; The total ghost image intensity of the microscope objective lens is calculated according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

[0008] In an optional embodiment, the step of calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, respectively obtaining factors of the ratio of the luminous flux forming ghost images in the coaxial Kohler illumination beam under the Kohler illumination system and the maximum image height of the ghost images introduced by the coaxial Kohler illumination beam on each mirror surface; The ghost image intensity corresponding to each mirror surface in the microscope objective lens is calculated according to the preset transmittance of the lens, the factor of the light flux ratio and the maximum image height.

[0009] In an optional embodiment, the step of obtaining a factor of a ratio of a light flux of the microscope objective lens that forms a ghost image in a coaxial Kohler illumination beam based on the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens for introducing ghost images on each mirror surface is obtained; According to the maximum opening angle and the divergence angle of the microscope objective lens based on the coaxial Kohler illumination beam on the objective lens pupil plane, a factor of the light flux ratio of the microscope objective lens based on the coaxial Kohler illumination beam forming a ghost image is calculated.

[0010] In an optional embodiment, obtaining the maximum image height of ghost images introduced by the coaxial Kohler illumination beam on each mirror surface according to the initial design parameters of the microscope objective lens comprises: When a preset ideal lens is in the imaging path of the microscope objective lens, a first light transmission matrix is ​​obtained when the light passes through the preset ideal lens, and according to the initial design parameters of the microscope objective lens, a second light transmission matrix is ​​obtained when the light passes through each mirror surface in the microscope objective lens, and a third light transmission matrix is ​​obtained when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface; Calculating the maximum image height of the ghost image introduced by the coaxial Kohler illumination light beam on each mirror surface according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix; The method of obtaining the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens that introduces ghost images on each mirror surface according to the initial design parameters of the microscope objective lens comprises: The maximum opening angle of the coaxial Kohler illumination light beam with ghost images introduced by the mirror on the entrance pupil plane of the microscope objective is calculated according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix.

[0011] In an optional embodiment, the first light transmission matrix of the acquired light when passing through the preset ideal lens includes: Obtaining the focal length of the preset ideal lens and the distance from the light incident position to the preset ideal lens; The first light transmission matrix is ​​calculated according to the focal length and the distance.

[0012] In an optional embodiment, the step of obtaining a second light transmission matrix when light passes through each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the medium in front of and behind each mirror are obtained; The second light transmission matrix is ​​calculated according to the initial curvature radius of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror.

[0013] In an optional embodiment, the method of obtaining a third light transmission matrix when light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to a next mirror surface according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial thickness of the light in the microscope objective lens transmitted from each mirror surface through the preset uniform medium to the next mirror surface is obtained; The third light transmission matrix is ​​calculated according to the initial thickness.

[0014] In a second aspect, the present invention provides an electronic device, comprising: a processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium via the bus, and the processor executes the machine-readable instructions to perform the steps of the microscope objective optimization method as described in any of the aforementioned embodiments.

[0015] The beneficial effects of this application are: The optimization method and electronic device of the microscope objective provided in the embodiment of the present application include: obtaining the initial design parameters of the microscope objective; calculating the imaging quality of the microscope objective and the total ghost image intensity of the microscope objective under the Kohler illumination system according to the initial design parameters of the microscope objective, wherein the microscope objective includes m target lenses, the m target lenses include n mirror surfaces, m is an integer greater than 1, and n>m; constructing a preset lens evaluation function according to the imaging quality and the total ghost image intensity of the microscope objective, iteratively calculating the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement, wherein the target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective. Compared with the existing method of determining by multiple experiments, the optimization efficiency can be improved, and the introduction of the preset lens evaluation function can achieve comprehensive evaluation and ensure the optimization effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 The working principle of a Kohler lighting system provided in an embodiment of the present application; Figure 2 A schematic flow chart of a method for optimizing a microscope objective lens provided in an embodiment of the present application; Figure 3 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application; Figure 4 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application; Figure 5 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application; Figure 6 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application; Figure 7 The appearance structure diagram of two lenses provided for the application embodiment; Figure 8 A schematic diagram of ghost image simulation of the first lens provided in an embodiment of the present application; Fig. 9 A schematic diagram of ghost image simulation of the second lens provided in an embodiment of the present application; Fig.10A comparison chart of images taken with two lenses provided in an embodiment of the present application; Fig.11 A schematic diagram of functional modules of a lens parameter optimization device provided in an embodiment of the present application; Fig.12 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0020] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0021] Figure 1 The working principle of a Kohler illumination system provided in the embodiment of the present application. Kohler illumination microscopic imaging system is an important precision detection and imaging method, such as Figure 1 As shown, the light source 11 emits light, and the condenser 12 images the light source at the entrance pupil plane 131 of the microscope objective 13, so that the light emitted from each point on the light source can be evenly covered on the entrance pupil plane 131 of the microscope objective, laying a foundation for subsequent uniform illumination; in addition, the light reaches the beam splitter 14 after passing through the condenser 12, and the beam splitter 14 separates the light by reflection and transmission. A part of the light is reflected and changes the propagation direction, and the other part of the light is transmitted and continues to propagate in the original direction. In this illumination system, the reflected light will propagate toward the direction of the microscope objective to illuminate the sample.

[0022] During the sample illumination process, the light reflected by the beam splitter 14 enters the microscope objective 13 and finally irradiates the working surface 17 of the microscope objective 13 (i.e., the location of the sample). Since the light source has been imaged on the entrance pupil surface 131 of the microscope objective 13, the light emitted from the entrance pupil surface 131 can evenly illuminate the sample.

[0023] In the imaging process, after the sample is illuminated, the reflected or transmitted light passes through the microscope objective 13 again, then passes through the beam splitter 14, and then passes through the tube lens 15, and finally forms an image on the CMOS sensor 16. In this way, a clear image of the sample evenly illuminated can be obtained on the CMOS sensor 16.

[0024] However, if the microscope objective lens is not designed properly, the reflection of the light source on the lens in the microscope objective lens is inevitable. If the reflected light is gathered near the CMOS sensor 16, an additional light spot will be generated on the CMOS sensor 16, forming a ghost image, which affects the shooting and detection of the target.

[0025] Among them, ghost images can be understood as additional, unwanted images that appear in addition to the expected main image. Ghost images will be superimposed on the normal image, reducing the contrast of the image, blurring the details, and interfering with the observation and analysis of the target object. For example, when observing cell structures under a microscope, ghost images may make the boundaries of the cells unclear, affecting the judgment of cell morphology and internal structure. In addition, ghost images can produce visual illusions, misleading observers and making incorrect judgments about the shape and position of objects. In some occasions that require precise measurement and analysis, such as industrial inspection and scientific research, ghost images may cause inaccurate measurement results, affecting test conclusions and product quality control. Ghost image intensity refers to the brightness of the ghost image or the amount of light energy.

[0026] In the prior art, multiple trials are often performed to eliminate ghost images, so the lens optimization efficiency is low.

[0027] In view of this, an embodiment of the present application provides an optimization method for a microscope objective lens. By applying this method, the imaging quality and the total ghost image intensity of the microscope objective lens can be combined by presetting a lens evaluation function. The target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement are obtained by iterative calculation. Finally, the initial design parameters of the microscope objective lens are adjusted according to the target design parameters, thereby realizing rapid optimization of the design parameters of the microscope objective lens. Compared with the existing method of determining through multiple experiments, the optimization efficiency and optimization effect can be improved.

[0028] Figure 2 The present invention provides a schematic flow chart of a method for optimizing a microscope objective lens, which can be applied to electronic devices such as computers, servers, and processors. Figure 2 As shown, the method may include: Step 101: Obtain initial design parameters of the microscope objective lens.

[0029] Optionally, the initial design parameters of the microscope objective lens may include: initial radius of curvature, initial refractive index, initial thickness, initial relative setting position of each target lens in the microscope objective lens, etc., which are not limited here. According to the actual application scenario, some initial design parameters of the microscope objective lens may be preset default values, or may be set based on experience.

[0030] Step 102: Calculate the imaging quality of the microscope objective and the total ghost image intensity of the microscope objective under the Kohler illumination system according to the initial design parameters of the microscope objective.

[0031] The microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, where m is an integer greater than 1, and n>m. The relationship between n and m can be expressed as: m+1≤n≤2m.

[0032] Reference Figure 1 As shown, the target lens may include 4 target lenses, and the 4 target lenses may include 8 mirror surfaces, that is, m=4, n=8. It should be noted that the number of target lenses and the number of mirror surfaces in the microscope objective are not limited to this.

[0033] Among them, the imaging quality of the microscope objective can characterize the imaging effect of the microscope, such as the clarity, contrast and color accuracy of the image; the total ghost image intensity of the microscope objective can characterize the brightness or light energy of the ghost images corresponding to all target lenses in the microscope objective.

[0034] Step 103: construct a preset lens evaluation function according to the imaging quality and total ghost image intensity of the microscope objective lens, and iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement.

[0035] The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens. It can be understood that the relative setting position of each target lens in the microscope objective lens can represent the relative setting position between each target lens.

[0036] Optionally, the preset lens evaluation function can be expressed as ,in, Represents the lens image quality evaluation item of the microscope objective, which is used to evaluate the imaging quality; It represents the ghost image intensity evaluation item, which is used to evaluate the total ghost image intensity of the display objective; Represents the damping term, which is used to control the update amplitude of the design parameters of each target lens during the iterative optimization process. The damping term can be set based on the damped least squares (DLS) method to control the iteration step size and prevent the algorithm from falling into the local optimal solution, thereby ensuring that the global optimal solution with high image quality and low ghost intensity is found.

[0037] It should be noted that, when performing iterative calculations, the design parameters of each target lens corresponding to the minimum function value of the preset lens evaluation function (that is, the optimal solution of the function) can be used as the target design parameters of each target lens. In addition, it can be seen from the function expression that the preset lens evaluation function should be able to simultaneously reflect the imaging quality and total ghost image intensity of the microscope objective lens, so that the overall performance of the microscope objective lens can be comprehensively and accurately evaluated. Therefore, compared with the existing method of determining through multiple tests, the optimization efficiency can be improved, and through the introduction of the preset lens evaluation function, a comprehensive evaluation can be achieved, and the optimization effect can be guaranteed.

[0038] The first preset requirement may indicate the target imaging quality of the lens, and the second preset requirement may indicate the total target ghost image intensity. In some embodiments, specifically when performing iterative calculations, the preset lens evaluation function constructed as described above may be used to iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. For example, the target design parameters of each target lens in a microscope objective under the requirements of high image quality and low ghost image intensity may be iteratively calculated.

[0039] In summary, an embodiment of the present application provides an optimization method for a microscope objective lens, the method comprising: obtaining initial design parameters of the microscope objective lens; according to the initial design parameters of the microscope objective lens, respectively calculating the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens under the Kohler illumination system, the microscope objective lens comprises m target lenses, the m target lenses comprise n mirror surfaces, m is an integer greater than 1, and n>m; according to the imaging quality and the total ghost image intensity of the microscope objective lens, constructing a preset lens evaluation function, iteratively calculating the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement, the target design parameters of each target lens comprising at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and the relative setting position of each target lens in the microscope objective lens. Compared with the existing method of determining by multiple experiments, the optimization efficiency can be improved, and by introducing the preset lens evaluation function, a comprehensive evaluation can be achieved to ensure the optimization effect.

[0040] In addition, the preset lens evaluation function should be able to simultaneously evaluate the imaging quality and total ghost image intensity of the microscope objective, so that the overall performance of the microscope objective can be comprehensively and accurately evaluated. Therefore, compared with the ghost image elimination method that performs image quality optimization, ghost image evaluation and ghost image elimination processes separately, the present application can improve the optimization efficiency, realize comprehensive evaluation, and achieve better optimization effects.

[0041] Figure 3 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application. In an optional embodiment, as Figure 3 As shown, the above calculation of the imaging quality of the microscope objective lens based on the initial design parameters of the microscope objective lens includes: Step 201: Obtain initial technical index parameters of the microscope objective lens according to the initial design parameters of the microscope objective lens.

[0042] Among them, the initial technical indicator parameters of the microscope objective may include: modulation transfer function term, RMS point diagram radius term, coma term, field curvature term, distortion term, etc., which are not limited here and may include other items according to the actual application scenario.

[0043] It should be noted that various initial technical index parameters can be calculated based on the initial design parameters of the microscope objective lens. The specific calculation can be found in the relevant formula, which will not be described in detail here.

[0044] Step 202: Calculate the imaging quality of the microscope objective lens according to the initial technical indicator parameters of the microscope objective lens and the preset weight factor.

[0045] In some embodiments, when performing calculations, the formula may be: Calculate the image quality of a microscope objective.

[0046] in, Represents the lens image quality evaluation item of the microscope objective, which is used to evaluate the imaging quality. represents the modulation transfer function corresponding to the microscope objective, represents the RMS point diagram radius term corresponding to the microscope objective, represents the coma term corresponding to the microscope objective, represents the field curvature term corresponding to the microscope objective, represents the distortion term corresponding to the microscope objective, They represent the weight factors of the corresponding items respectively. The value of each weight factor can be determined according to the design requirements. For example, if an item is more important, a larger weight factor can be set for the item.

[0047] Figure 4 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application. In an optional embodiment, as Figure 4As shown above, based on the initial design parameters of the microscope objective, the total ghost image intensity of the microscope objective under the Kohler illumination system is calculated, including: Step 301: Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens.

[0048] Step 302: Calculate the total ghost image intensity of the microscope objective lens according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

[0049] Among them, each mirror surface in the microscope objective can correspond to a corresponding ghost image intensity, and the ghost image intensity corresponding to each mirror surface can be determined according to the initial design parameters of the microscope objective; the total ghost image intensity of the microscope objective can be determined according to the ghost image intensity corresponding to each mirror surface and the ghost image weight factor corresponding to each mirror surface.

[0050] Optionally, the total ghost image intensity of the microscope objective can be calculated by referring to the calculation formula: ,in, Represents the ghost image intensity evaluation item, which is used to evaluate the total ghost image intensity of the display objective. represents the ghost image weight factor corresponding to the J-th mirror surface in the microscope objective, It represents the ghost image intensity introduced by the coaxial Kohler illumination beam at the Jth mirror in the microscope objective, where 1≤J≤n.

[0051] Figure 5 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application. In an optional embodiment, as Figure 5 As shown, the above calculation of the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens includes: Step 501: According to the initial design parameters of the microscope objective, respectively obtain the factor of the light flux ratio forming the ghost image in the coaxial Kohler illumination beam and the maximum image height of the ghost image introduced by the coaxial Kohler illumination beam on each mirror surface.

[0052] Among them, the factor of the luminous flux ratio that forms ghost images in the coaxial Kohler illumination beam and the calculation of the maximum image height of the ghost images introduced by the coaxial Kohler illumination beam on each mirror surface can be calculated based on the initial curvature radius, initial refractive index, initial thickness of the microscope objective lens, and the initial relative setting position of each target lens in the microscope objective lens.

[0053] Step 502: Calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the preset transmittance of the lens, the factor of the light flux ratio and the maximum image height.

[0054] The calculation of the ghost image intensity corresponding to each mirror surface in the microscope objective can refer to the following formula:

[0055] in, represents the ghost image intensity introduced by the J-th mirror surface of the coaxial Kohler illumination beam in the microscope objective, and T represents the preset transmittance of the lens, which can be 0.995, but is not limited thereto; A factor that expresses the ratio of the light flux that forms ghost images in a microscope objective based on the coaxial Kohler illumination beam. It represents the maximum image height of the ghost image introduced by the Jth mirror in the microscope objective by the coaxial Köhler illumination beam.

[0056] By using the embodiments of the present application, the intensity of ghost images caused by each mirror surface in the microscope objective can be calculated, thereby quantifying the contribution of each mirror surface to the ghost image.

[0057] In an optional embodiment, the above-mentioned method of obtaining the factor based on the ratio of the luminous flux forming the ghost image in the coaxial Kohler illumination beam according to the initial design parameters of the microscope objective lens includes: According to the initial design parameters of the microscope objective, the maximum opening angle of the coaxial Kohler illumination beam that introduces ghost images on each mirror surface on the entrance pupil plane of the microscope objective is obtained; according to the maximum opening angle and the divergence angle of the microscope objective based on the coaxial Kohler illumination beam on the pupil plane of the objective, the factor of the luminous flux ratio that forms ghost images in the coaxial Kohler illumination beam is calculated.

[0058] Among them, the divergence angle of the coaxial Kohler illumination light beam of the microscope objective on the pupil plane of the objective can be a preset value, and the maximum opening angle of the coaxial Kohler illumination light beam that introduces ghost images on the entrance pupil plane of the microscope objective can be calculated based on the light transmission matrix determined based on the initial design parameters of the microscope objective.

[0059] Optionally, the factor of the ratio of the luminous flux forming a ghost image in the coaxial Kohler illumination beam can be calculated by referring to the following formula:

[0060] in, Factor that represents the proportion of the light flux that forms ghost images in a coaxial Kohler illumination beam, represents the divergence angle of the coaxial Kohler illumination beam on the pupil plane of the microscope objective, It represents the maximum opening angle of the coaxial Kohler illumination beam on the entrance pupil plane of the microscope objective when the J-th mirror introduces ghost images.

[0061] Figure 6 A schematic flow chart of another method for optimizing a microscope objective lens provided in an embodiment of the present application. In an optional embodiment, as Figure 6As shown, in the above optional implementation, according to the initial design parameters of the microscope objective, obtaining the maximum image height of the coaxial Kohler illumination beam introduced by the ghost image on each mirror surface and the maximum opening angle of the coaxial Kohler illumination beam introduced by the ghost image on each mirror surface on the entrance pupil plane of the microscope objective comprises: Step 601, when the tube lens is a preset ideal lens in the imaging path of the microscope objective, a first light transmission matrix when the light passes through the preset ideal lens is obtained, and according to the initial design parameters of the microscope objective, a second light transmission matrix when the light passes through each mirror surface in the microscope objective, and a third light transmission matrix when the light is transmitted from each mirror surface in the microscope objective through a preset uniform medium to the next mirror surface.

[0062] The construction of the first light transmission matrix, the second light transmission matrix and the third light transmission matrix can be based on the principle of matrix optics.

[0063] Step 602: Calculate the maximum image height of the ghost image introduced by the coaxial Kohler illumination beam on each mirror surface and the maximum opening angle of the coaxial Kohler illumination beam on the entrance pupil plane of the microscope objective lens based on the first light transmission matrix, the second light transmission matrix and the third light transmission matrix.

[0064] Optionally, based on the constructed light transmission matrix, the maximum image height of the coaxial Kohler illumination beam that introduces ghost images on each mirror surface and the maximum angle of the coaxial Kohler illumination beam that introduces ghost images on each mirror surface on the entrance pupil plane of the microscope objective can be calculated in combination with the maximum angle of the coaxial Kohler illumination beam that introduces ghost images on each mirror surface on the entrance pupil plane of the microscope objective.

[0065] In some embodiments, the formulas can be referred to for specific calculations to derive the maximum image height of the ghost image introduced by the coaxial Kohler illumination beam on each mirror surface and the maximum opening angle of the coaxial Kohler illumination beam on the entrance pupil plane of the microscope objective lens that introduces the ghost image on each mirror surface:

[0066] in, It represents the maximum image height of the ghost image introduced by the Jth mirror surface in the microscope objective lens when the coaxial Kohler illumination beam is illuminated. represents the height of the coaxial Kohler illumination beam on the CMOS surface that introduces the ghost image of the Jth mirror, represents the maximum opening angle of the coaxial Kohler illumination beam of the J-th mirror introducing ghost images on the entrance pupil plane of the microscope objective, P represents the first light transmission matrix when the light passes through the preset ideal lens, The second light transmission matrix when the light passes through the kth mirror in the microscope objective, It represents the third light transmission matrix when the light is transmitted from the k-th mirror surface in the microscope objective through the preset uniform medium to the k+1-th mirror surface, 0≤k≤j-1.

[0067] In an optional embodiment, the above-mentioned method of obtaining a first light transmission matrix when light passes through a preset ideal lens according to initial design parameters of the microscope objective lens includes: The focal length of a preset ideal lens and the distance from the light incident position to the preset ideal lens are obtained; and a first light transmission matrix is ​​calculated according to the focal length and the distance.

[0068] Among them, the tube lens is a preset ideal lens, the focal length of the preset ideal lens can be obtained according to the property parameters of the preset ideal lens, and the distance from the incident position of the light to the preset ideal lens can be obtained by measurement.

[0069] Optionally, the first light transmission matrix when the light passes through the preset ideal lens can be calculated according to the formula: It is calculated, where f represents the focal length of the preset ideal lens, and d represents the distance from the incident position of the light to the preset ideal lens.

[0070] In an optional embodiment, the method of obtaining the second light transmission matrix when the light passes through each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens includes: According to the initial design parameters of the microscope objective, the initial radius of curvature of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror are obtained; according to the initial radius of curvature of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror, the second light transmission matrix is ​​calculated.

[0071] Among them, based on the initial design parameters of the microscope objective, the initial curvature radius of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror can be extracted, and the second light transmission matrix when the light passes through each mirror in the microscope objective is constructed accordingly.

[0072] Optionally, for specific calculations, see the formula ,in, represents the third light transmission matrix when the light passes through the kth mirror in the microscope objective, and They represent the initial refractive index of the medium before and after the kth mirror in the microscope objective, represents the initial curvature radius of the kth mirror surface in the microscope objective.

[0073] In an optional embodiment, the third light transmission matrix obtained when light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens includes: According to the initial design parameters of the microscope objective, the initial thickness of the light in the microscope objective transmitted from each mirror surface through the preset uniform medium to the next mirror surface is obtained; and according to the initial thickness, the third light transmission matrix is ​​calculated.

[0074] Among them, based on the initial design parameters of the microscope objective, the initial thickness of light transmitted from each mirror surface through the preset uniform medium to the next mirror surface can be extracted, and based on the initial thickness, a third light transmission matrix can be constructed.

[0075] Optionally, refer to the formula for the specific construction ,in, It represents the light transmission matrix when the light in the microscope objective is transmitted from the kth mirror surface to the k+1th mirror surface through the preset uniform medium. It represents the thickness of the light in the microscope objective lens transmitted from the kth mirror surface to the k+1th mirror surface through the preset uniform medium.

[0076] Table 1 is a comparison table of the optical performance design results of two lenses provided in the embodiment of the present application. Figure 7 The appearance structure diagram of two lenses provided in the application embodiment. Among them, the lens (microscope objective lens) A is not optimized by the method of the application (that is, the lens before optimization). The lens A includes 4 lenses from left to right, namely A1, A2, A3 and A4. The arrangement position and appearance of each lens are as follows: Figure 7 As shown in (a) of FIG. 1 ; lens B is optimized by the method of the present application (i.e., the optimized lens), and lens B includes 4 lenses, B1, B2, B3, and B4, from left to right. The arrangement position and appearance of each lens are as shown in FIG. Figure 7 As shown in (b) in .

[0077] From the comparison, it can be seen that both lenses meet the technical requirements of lens design, and their imaging performance, distortion and other optical indicators are similar, but the settings of each lens in the two lenses are not the same.

[0078] Table 1 Comparison of optical performance design results of two lenses

[0079] Figure 8 This is a schematic diagram of ghost image simulation of the first lens provided in the embodiment of the present application. Figure 8 As shown, for lens A, lens A includes 4 lenses, corresponding to 8 mirror surfaces, among which, Figure 8 (a)-(i) are the incoherent irradiance diagrams of the ghost images contributed by each mirror surface in lens A. It can be seen that the ghost image intensity (in W / cm2) corresponding to each mirror surface is 0.0048, 0.0622, 0.0010, 0.0290, 0.0148, 0.1663, 0.0018, 0.0010 respectively; Figure 8 (i) is the incoherent irradiance diagram of the ghost image contributed by lens A. It can be seen that the total ghost image intensity of lens A is 0.2280.

[0080] Fig. 9Schematic diagram of ghost image simulation of the second lens provided in the embodiment of the present application. For lens B, lens B includes 4 lenses, corresponding to 8 mirror surfaces, among which: Fig. 9 (a)-(i) are the incoherent irradiance diagrams of the ghost images contributed by each mirror surface in lens B. It can be seen that the ghost image intensity (in W / cm2) corresponding to each mirror surface is 0.0036, 0.00, 0.0302, 0.0352, 0.0096, 0.0022, 0.0021, and 0.0070 respectively; Fig. 9 (i) in the figure is the incoherent irradiance diagram of the ghost image contributed by lens B. It can be seen that the total ghost image intensity of lens B is 0.0898.

[0081] In summary, comparison Figure 8 and Fig. 9 It can be seen that the total ghost image intensity of lens A is 0.2280, and the total ghost image intensity of lens B is 0.0898. The total ghost image intensity of lens B is smaller, so the ghost image of lens B is greatly suppressed.

[0082] Fig.10 The comparison diagram of the images taken by two lenses provided in the embodiment of the present application. Among them, the shooting target is a circuit board, such as Fig.10 (a) in the figure shows an image taken by lens A, where area S has a ghost image. Fig.10 (b) shows an image captured by lens B. There is no ghost image in area S, and the ghost image is greatly suppressed. Therefore, the method of the present application can effectively eliminate the ghost image in the image, and the optimization effect is good.

[0083] Fig.11 This is a functional module diagram of a lens parameter optimization device provided in an embodiment of the present application. The basic principle and technical effects of the device are the same as those of the corresponding method embodiment described above. For the sake of brief description, the parts not mentioned in this embodiment can be referred to the corresponding contents in the method embodiment. Fig.11 As shown, the optimization device 100 includes: An acquisition module 110 is used to acquire initial design parameters of the microscope objective lens; A first calculation module 120 is used to calculate the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens under the Kohler illumination system according to the initial design parameters of the microscope objective lens, wherein the microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, where m is an integer greater than 1, and n>m; The second calculation module 130 is used to construct a preset lens evaluation function according to the imaging quality and the total ghost image intensity of the microscope objective lens, and iteratively calculate the target design parameters of each target lens when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens.

[0084] In an optional embodiment, the first calculation module 120 is specifically used to obtain the initial technical index parameters of the microscope objective lens according to the initial design parameters of the microscope objective lens; The imaging quality of the microscope objective lens is calculated according to the initial technical indicator parameters of the microscope objective lens and the preset weight factor.

[0085] In an optional embodiment, the first calculation module 120 is specifically used to calculate the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens; The total ghost image intensity of the microscope objective lens is calculated according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

[0086] In an optional embodiment, the first calculation module 120 is specifically used to obtain, based on the initial design parameters of the microscope objective lens, a factor of the luminous flux ratio of the ghost image formed in the coaxial Kohler illumination beam under the Kohler illumination system and a maximum image height of the ghost image introduced by the coaxial Kohler illumination beam on each mirror surface; The ghost image intensity corresponding to each mirror surface in the microscope objective lens is calculated according to the preset transmittance of the lens, the factor of the light flux ratio and the maximum image height.

[0087] In an optional embodiment, the first calculation module 120 is specifically used to obtain the maximum opening angle of the coaxial Kohler illumination light beam that introduces ghost images on each mirror surface on the entrance pupil plane of the microscope objective lens according to the initial design parameters of the microscope objective lens; According to the maximum opening angle and the divergence angle of the microscope objective lens based on the coaxial Kohler illumination beam on the objective lens pupil plane, a factor of the light flux ratio of the microscope objective lens based on the coaxial Kohler illumination beam forming a ghost image is calculated.

[0088] In an optional embodiment, the first calculation module 120 is specifically used to obtain a first light transmission matrix when the preset ideal lens is in the imaging path of the microscope objective lens, and obtain a second light transmission matrix when the light passes through each mirror surface in the microscope objective lens and a third light transmission matrix when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens; According to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix, the maximum image height of the ghost image introduced by the coaxial Kohler illumination beam on each mirror surface and the maximum opening angle of the coaxial Kohler illumination beam on the entrance pupil plane of the microscope objective lens that introduces ghost images on each mirror surface are calculated respectively.

[0089] In an optional implementation manner, the first calculation module 120 is specifically used to obtain the focal length of the preset ideal lens and the distance from the incident position of the light to the preset ideal lens; The first light transmission matrix is ​​calculated according to the focal length and the distance.

[0090] In an optional embodiment, the first calculation module 120 is specifically used to obtain the initial radius of curvature of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror according to the initial design parameters of the microscope objective; The second light transmission matrix is ​​calculated according to the initial curvature radius of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror.

[0091] In an optional embodiment, the first calculation module 120 is specifically used to obtain the initial thickness of the light in the microscope objective lens transmitted from each mirror surface through a preset uniform medium to the next mirror surface according to the initial design parameters of the microscope objective lens; The third light transmission matrix is ​​calculated according to the initial thickness.

[0092] The above-mentioned device is used to execute the method provided by the aforementioned embodiment, and its implementation principle and technical effect are similar, which will not be repeated here.

[0093] The above modules may be one or more integrated circuits configured to implement the above methods, such as one or more application specific integrated circuits (ASICs), or one or more microprocessors, or one or more field programmable gate arrays (FPGAs). For another example, when a module is implemented in the form of a processing element scheduling program code, the processing element may be a general-purpose processor, such as a central processing unit (CPU) or other processor that can call program code. For another example, these modules may be integrated together and implemented in the form of a system-on-a-chip (SOC).

[0094] Fig.12The following is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. The electronic device can be integrated into the above-mentioned optimization device. Fig.12 As shown, the electronic device may include: a processor 210, a storage medium 220 and a bus 230, the storage medium 220 stores machine-readable instructions executable by the processor 210, when the electronic device is running, the processor 210 and the storage medium 220 communicate through the bus 230, and the processor 210 executes the machine-readable instructions to perform the steps of the above method embodiment. The specific implementation method and technical effect are similar and will not be repeated here.

[0095] Optionally, the present application further provides a storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the above method embodiment are executed. The specific implementation method and technical effect are similar and will not be repeated here.

[0096] In the several embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0097] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0098] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0099] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) or a processor (English: processor) to perform some steps of the methods of each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (English: Read-Only Memory, abbreviated: ROM), random access memory (English: Random Access Memory, abbreviated: RAM), disk or optical disk and other media that can store program codes.

[0100] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0101] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, various changes and variations may be made. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method for optimizing a microscope objective lens, characterized in that: The method comprises: Obtaining initial design parameters of the microscope objective; According to the initial design parameters of the microscope objective lens, the imaging quality of the microscope objective lens and the total ghost image intensity of the microscope objective lens under the Kohler illumination system are calculated respectively, wherein the microscope objective lens includes m target lenses, and the m target lenses include n mirror surfaces, wherein m is an integer greater than 1, and n>m; According to the imaging quality and total ghost image intensity of the microscope objective lens, a preset lens evaluation function is constructed, and the target design parameters of each target lens are iteratively calculated when the imaging quality meets the first preset requirement and the total ghost image intensity meets the second preset requirement. The target design parameters of each target lens include at least one of the following: radius of curvature, refractive index, Abbe number, thickness, and relative setting position of each target lens in the microscope objective lens.

2. The method according to claim 1, characterized in that The step of calculating the imaging quality of the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, obtaining the initial technical index parameters of the microscope objective lens; The imaging quality of the microscope objective lens is determined according to the initial technical indicator parameters of the microscope objective lens and the preset weight factors.

3. The method according to claim 1, characterized in that The total ghost image intensity of the microscope objective lens under the Kohler illumination system is calculated according to the initial design parameters of the microscope objective lens, including: Calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens; The total ghost image intensity of the microscope objective lens is calculated according to the ghost image intensity corresponding to each mirror surface in the microscope objective lens and the ghost image weight factor corresponding to each mirror surface.

4. The method according to claim 3, characterized in that The step of calculating the ghost image intensity corresponding to each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, respectively obtaining factors of the ratio of the luminous flux forming ghost images in the coaxial Kohler illumination beam under the Kohler illumination system and the maximum image height of the ghost images introduced by the coaxial Kohler illumination beam on each mirror surface; The ghost image intensity corresponding to each mirror surface in the microscope objective lens is calculated according to the preset transmittance of the lens, the factor and the maximum image height.

5. The method according to claim 4, characterized in that The step of obtaining a factor of a ratio of a light flux of the microscope objective lens that forms a ghost image in a coaxial Kohler illumination beam according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens for introducing ghost images on each mirror surface is obtained; According to the maximum opening angle and the divergence angle of the microscope objective lens based on the coaxial Kohler illumination beam on the objective lens pupil plane, a factor of the light flux ratio of the microscope objective lens based on the coaxial Kohler illumination beam forming a ghost image is calculated.

6. The method according to claim 5, characterized in that The method of obtaining the maximum image height of ghost images introduced by the coaxial Kohler illumination beam on each mirror surface according to the initial design parameters of the microscope objective lens comprises: When the tube lens in the imaging path of the microscope objective lens is a preset ideal lens, a first light transmission matrix when the light passes through the preset ideal lens is obtained, and according to the initial design parameters of the microscope objective lens, a second light transmission matrix when the light passes through each mirror surface in the microscope objective lens and a third light transmission matrix when the light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to the next mirror surface are respectively obtained; Calculating the maximum image height of the ghost image introduced by the coaxial Kohler illumination light beam on each mirror surface according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix; The method of obtaining the maximum opening angle of the coaxial Kohler illumination light beam on the entrance pupil plane of the microscope objective lens that introduces ghost images on each mirror surface according to the initial design parameters of the microscope objective lens comprises: The maximum opening angle of the coaxial Kohler illumination light beam with ghost images introduced by the mirror on the entrance pupil plane of the microscope objective is calculated according to the first light transmission matrix, the second light transmission matrix and the third light transmission matrix.

7. The method according to claim 6, characterized in that The first light transmission matrix when the acquired light passes through the preset ideal lens includes: Obtaining the focal length of the preset ideal lens and the distance from the light incident position to the preset ideal lens; The first light transmission matrix is ​​calculated according to the focal length and the distance.

8. The method according to claim 6, characterized in that The step of obtaining a second light transmission matrix when light passes through each mirror surface in the microscope objective lens according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial radius of curvature of each mirror surface in the microscope objective lens and the initial refractive index of the medium in front of and behind each mirror are obtained; The second light transmission matrix is ​​calculated according to the initial curvature radius of each mirror surface in the microscope objective and the initial refractive index of the medium before and after each mirror.

9. The method according to claim 6, characterized in that The method of obtaining a third light transmission matrix when light is transmitted from each mirror surface in the microscope objective lens through a preset uniform medium to a next mirror surface according to the initial design parameters of the microscope objective lens comprises: According to the initial design parameters of the microscope objective lens, the initial thickness of the light in the microscope objective lens transmitted from each mirror surface through the preset uniform medium to the next mirror surface is obtained; The third light transmission matrix is ​​calculated according to the initial thickness.

10. An electronic device, characterized in that: include: A processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium via the bus, and the processor executes the machine-readable instructions to perform the steps of the optimization method of the microscope objective lens as described in any one of claims 1 to 9.

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