Flexible integrated array of myoelectricity and ultrasound collaborative perception and preparation method thereof

Abstract

The invention discloses a myoelectricity and ultrasound collaborative sensing flexible integrated array and a preparation method thereof. The flexible integrated array comprises an ultrasound sensing array and a myoelectricity sensing array which are integrated on a wearable flexible film, a piezoelectric module layer of each ultrasonic sensing module and a myoelectricity electrode layer of each myoelectricity sensing module in the array are connected to an external circuit, and the sensing modules are arranged and designed according to muscle positions and directions of specific parts of a human body to form a high-density and high-precision ultrasonic / myoelectricity cooperative sensing hybrid integrated array. According to the flexible integrated array, the ultrasonic signal and the electromyographic signal of the muscle can be obtained at the same time, so that multi-dimensional muscle state monitoring is achieved, when the flexible integrated array monitors the abnormal signal, the position of the abnormal muscle is determined through the array element receiving the abnormal signal, and automatic positioning of the abnormal muscle can be achieved.

Description

Technical Field

[0001] The present application relates to the technical field of signal fusion, and particularly to a flexible integrated array for collaborative perception of electromyogram and ultrasound and a preparation method thereof. Background Art

[0002] Electromyogram (EMG) signals are electrical signals generated during muscle contraction, which can objectively and accurately evaluate the functional state of muscles. For example, when muscles are fatigued or painful, the EMG signals will show the phenomena of increased time-domain amplitude and left shift of the frequency-domain spectrum. However, EMG signals belong to one-dimensional spatial signals, lacking spatial-domain information and being easily affected by interference such as subcutaneous fat. In contrast, ultrasound technology, especially high-frequency ultrasound, can clearly observe the structural conditions of soft tissues such as intervertebral discs, muscles, and ligaments, and intuitively reflect the spatial-domain state of muscles. Therefore, there is effective complementary information between ultrasound and EMG signals. Combining these two technologies can provide a more comprehensive understanding of the physiological state of human muscles and offer more comprehensive and accurate diagnostic information for clinical applications.

[0003] Currently, many studies have combined these two technologies to study the physiological state of muscles. However, these studies usually use two traditional detection methods to collect signals separately: using hard-textured Ag / AgCl gel electrodes to collect EMG signals and using handheld rigid probes to collect ultrasound signals. The traditional Ag / AgCl electrode collection method is difficult to form a reliable and stable contact with the skin interface, which greatly affects the accuracy of EMG signal monitoring. In addition, the traditional handheld rigid probe requires manual operation by professional physicians and cannot achieve long-term continuous measurement. At the same time, since two groups of signals need to be collected separately, the operation process becomes complex and the integration level is low.

[0004] Therefore, how to overcome the above limitations when combining ultrasound and EMG signals has become a hot and difficult issue in current research. Summary of the Invention

[0005] The purpose of the present application is to provide a flexible integrated array for collaborative perception of electromyogram and ultrasound and a preparation method thereof, which can simultaneously obtain ultrasound signals and EMG signals of muscles, thereby realizing multi-dimensional muscle state monitoring.

[0006] To achieve the above purpose, the present application provides the following solutions: In a first aspect, the present application provides a flexible integrated array for synergistic sensing of electromyogram and ultrasound, comprising: an ultrasound sensing array and an electromyogram sensing array, the ultrasound sensing array and the electromyogram sensing array being integrated on a wearable flexible film. The ultrasound sensing array includes a plurality of ultrasound sensing modules, and the electromyogram sensing array includes a plurality of electromyogram sensing modules. The plurality of ultrasound sensing modules and the plurality of electromyogram sensing modules are arranged and designed according to the muscle positions and orientations of specific parts of the human body. The ultrasound sensing module includes, from top to bottom, a first thin-film electrode layer, a piezoelectric module layer, and a second thin-film electrode layer. The first thin-film electrode layer includes, from top to bottom, a first elastic encapsulation layer, a first electromagnetic shielding layer, a first elastic isolation layer, and a ground electrode layer. The second thin-film electrode layer includes, from top to bottom, an excitation electrode layer, a second elastic isolation layer, a second electromagnetic shielding layer, and a second elastic encapsulation layer. The electromyogram sensing module includes, from top to bottom, a third thin-film electrode layer and an electrophysiological adhesion layer. The third thin-film electrode layer includes, from top to bottom, a third elastic encapsulation layer, a third electromagnetic shielding layer, a third elastic isolation layer, and an electromyogram electrode layer. The piezoelectric module layers of each ultrasound sensing module and the electromyogram electrode layers of each electromyogram sensing module are all connected to an external circuit.

[0007] Optionally, the ultrasound sensing module and the electromyogram sensing module located at the same muscle position are integrated together through VIA vias, and the electrophysiological adhesion layer of the electromyogram sensing module is in contact with the human skin surface.

[0008] Optionally, the ground electrode layer, the excitation electrode layer, and the electromyogram electrode layer are structural layers made by spin-coating a solution on a silicon wafer with patterned grooves, with a composite conductive material mainly composed of a layered transition metal carbon / nitride MXene and a metal nanomaterial AgNW.

[0009] Optionally, the first electromagnetic shielding layer, the second electromagnetic shielding layer, and the third electromagnetic shielding layer are structural layers made by spin-coating a film from a solution, with a composite conductive material mainly composed of a layered transition metal carbon / nitride MXene and a metal nanomaterial AgNW.

[0010] Optionally, the first elastic encapsulation layer, the first elastic isolation layer, the second elastic isolation layer, the second elastic encapsulation layer, the third elastic isolation layer, and the third elastic encapsulation layer are structural layers made by spin-coating a film from a solution formed by mixing a hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer as the main material and a dichlorobenzene organic solution as the auxiliary material.

[0011] In a second aspect, the present application provides a preparation method for a flexible integrated array for synergistic sensing of electromyogram and ultrasound, which is used to prepare the flexible integrated array for synergistic sensing of electromyogram and ultrasound as described above. The preparation method includes the following steps: A number of thin-film electrode layers are prepared; the thin-film electrode layer includes an elastic encapsulation layer, an electromagnetic shielding layer, an elastic isolation layer, and an electrode layer from top to bottom.

[0012] Take any two thin-film electrode layers as the first thin-film electrode layer and the second thin-film electrode layer, and adhere them to the upper and lower sides of a piezoelectric module layer respectively to obtain an ultrasonic sensing module; both the first thin-film electrode layer and the second thin-film electrode layer are adhered to the piezoelectric module layer through their respective electrode layers.

[0013] Take a thin-film electrode layer as the third thin-film electrode layer, and prepare an electrophysiological adhesion layer at the bottom of the electrode layer of the third thin-film electrode layer to obtain a myoelectric sensing module.

[0014] Arrange and integrate a number of ultrasonic sensing modules and a number of myoelectric sensing modules according to the muscle position and orientation of the specific part of the human body on a wearable flexible film to obtain a flexible integrated array for synergistic myoelectric and ultrasonic sensing; a number of ultrasonic sensing modules form an ultrasonic sensing array, and a number of myoelectric sensing modules form a myoelectric sensing array.

[0015] Optionally, preparing a number of thin-film electrode layers specifically includes the following steps: Using a dry etching process, pattern-etch a groove with a certain depth on a silicon substrate according to the patterns of the myoelectric sensing module and the ultrasonic sensing module.

[0016] Drop-coat an electro-sensing material on the etched silicon substrate with patterns to obtain a corresponding electrode layer; the electrode layer is a myoelectric electrode layer, a ground electrode layer, or an excitation electrode layer.

[0017] Prepare an elastic isolation layer, an electromagnetic shielding layer, and an elastic encapsulation layer on the electrode layer in sequence to obtain a thin-film electrode layer.

[0018] Optionally, the elastic encapsulation layer and the elastic isolation layer are structural layers made by solution spin-coating after mixing a hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer as the main material and a dichlorobenzene organic solution as the auxiliary material to form a solution; the electromagnetic shielding layer is a structural layer made by solution spin-coating with a composite conductive material composed of layered transition metal carbon / nitride MXene and metal nanomaterial AgNW as the main material; the electrode layer is a structural layer made by spin-coating a solution of a composite conductive material composed of layered transition metal carbon / nitride MXene and metal nanomaterial AgNW on a silicon wafer with patterned grooves.

[0019] Optionally, the organic solution adhesion method is used when adhering the first thin-film electrode layer and the second thin-film electrode layer to the upper and lower sides of the piezoelectric module layer respectively.

[0020] Optionally, after obtaining the ultrasonic sensing module and the electromyography sensing module, the electrode pads in the electromyography sensing module are made to be in the same plane as the electrode pads of the ultrasonic sensing module through VIA vias, and the electrode pads of both are connected to the flexible PCB board.

[0021] According to the specific embodiments provided by the present application, the following technical effects are disclosed in the present application: The present application provides a flexible integrated array for synergistic sensing of electromyography and ultrasound and a preparation method thereof. The flexible integrated array includes an ultrasonic sensing array and an electromyography sensing array integrated on a wearable flexible film. Specifically, the ultrasonic sensing array includes several ultrasonic sensing modules, and the electromyography sensing array includes several electromyography sensing modules. The piezoelectric module layers of each ultrasonic sensing module and the electromyography electrode layers of each electromyography sensing module are all connected to an external circuit, and these are arranged and designed according to the muscle positions and orientations of specific parts of the human body; the formed high-density and high-precision ultrasonic / electromyography synergistic sensing hybrid integrated array can simultaneously acquire ultrasonic signals and electromyography signals of muscles, thereby realizing multi-dimensional muscle state monitoring. At the same time, it can perform electrical stimulation on specific parts and provide timely rehabilitation treatment for muscle fatigue and injuries. Since the flexible integrated array is arranged and designed according to the muscle positions and orientations of specific parts of the human body, when the flexible integrated array detects an abnormal signal, the position of the abnormal muscle can be determined by the array element that receives the abnormal signal, and thus automatic positioning of the abnormal muscle can be achieved. Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 Schematic diagram of a flexible integrated array for synergistic sensing of electromyography and ultrasound provided by an embodiment of the present application.

[0024] Figure 2 Hierarchical schematic diagram of an ultrasonic sensing module in a flexible integrated array for synergistic sensing of electromyography and ultrasound provided by an embodiment of the present application.

[0025] Figure 3 Hierarchical schematic diagram of an electromyography sensing module in a flexible integrated array for synergistic sensing of electromyography and ultrasound provided by an embodiment of the present application.

[0026] Figure 4 Flowchart of a preparation method of a flexible integrated array for synergistic sensing of electromyography and ultrasound provided by an embodiment of the present application.

[0027] Figure 5 Process flow diagram for fabricating a thin-film electrode layer in a method for fabricating a flexible integrated array with synergistic electromyogram and ultrasound sensing provided by an embodiment of the present application. Detailed implementation manners

[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0029] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below in conjunction with the accompanying drawings and specific implementation manners.

[0030] A flexible integrated array with synergistic electromyogram and ultrasound sensing provided by an embodiment of the present application, in an exemplary embodiment, as Figure 1 shown, includes: an ultrasound sensing array and an electromyogram sensing array. The ultrasound sensing array and the electromyogram sensing array are integrated on a wearable flexible film. The ultrasound sensing array includes a plurality of ultrasound sensing modules, and the electromyogram sensing array includes a plurality of electromyogram sensing modules. The plurality of ultrasound sensing modules and the plurality of electromyogram sensing modules are arranged and designed according to the muscle positions and orientations of specific parts of the human body.

[0031] Specifically, as Figure 2 shown, the ultrasound sensing module includes, from top to bottom, a first thin-film electrode layer, a piezoelectric module layer, and a second thin-film electrode layer; the first thin-film electrode layer includes, from top to bottom, a first elastic encapsulation layer, a first electromagnetic shielding layer, a first elastic isolation layer, and a ground electrode layer; the second thin-film electrode layer includes, from top to bottom, an excitation electrode layer, a second elastic isolation layer, a second electromagnetic shielding layer, and a second elastic encapsulation layer; as Figure 3 shown, the electromyogram sensing module includes, from top to bottom, a third thin-film electrode layer and an electrophysiological adhesion layer; the third thin-film electrode layer includes, from top to bottom, a third elastic encapsulation layer, a third electromagnetic shielding layer, a third elastic isolation layer, and an electromyogram electrode layer; the piezoelectric module layers of each ultrasound sensing module and the electromyogram electrode layers of each electromyogram sensing module are all connected to an external circuit.

[0032] In the above structure, the function of the elastic encapsulation layer is to protect the internal structure of the device, improve durability and wearing comfort. The function of the elastic isolation layer is to prevent the flexible electrode from being damaged during use. The function of the electromagnetic shielding layer is to shield external electromagnetic interference. The electromyogram electrode layer is used to collect electromyogram signals, and the electrophysiological adhesion layer helps the patch adhere better to the skin and is not easily detached.

[0033] In the following, this embodiment takes the design of measuring the lower back muscles of the human body as an example. The structure of the flexible integrated array for collaborative perception of EMG and ultrasound is as follows Figure 1 shown. According to the position distribution of the lower back muscles, the ultrasound sensing module and the EMG sensing module are respectively designed into a 4×8 array structure. Among them, the disc-shaped probe represents the EMG electrode, and the square probe represents the piezoelectric module in the ultrasound probe. They are distributed in the erector spinae and multifidus muscles on both the left and right sides. The size of each electrode module can be determined according to the muscle size of different parts. By constructing a high-density lower back ultrasound and EMG sensing array, synchronous collaborative perception of multi-source signals is achieved, improving the monitoring stability and accuracy of the lower back condition, realizing precise monitoring of specific abnormal lower back muscle tissues, and meeting the requirements for precise lower back muscle state assessment. In addition, this structure can be expanded into a structure with more array elements to meet the actual usage requirements.

[0034] Figure 1 The overall thickness of the flexible integrated array shown is about 1 mm, where the thickness of the ultrasound sensing module is 800 microns, and the thickness of the EMG sensing module is 200 microns. In the ultrasound sensing module, the thickness of the piezoelectric module layer is 500 microns, and the total thickness of the upper first elastic encapsulation layer, first electromagnetic shielding layer, first elastic isolation layer, and ground electrode layer is 150 microns. The total thickness of the lower second elastic encapsulation layer, second electromagnetic shielding layer, second elastic isolation layer, and excitation electrode layer is 150 microns. The total thickness of the third elastic encapsulation layer, third electromagnetic shielding layer, third elastic isolation layer, and EMG electrode layer in the EMG sensing module is 150 microns, and the thickness of the electrophysiological adhesion layer is 50 microns. The spacing between the ultrasound sensing module and the EMG sensing module is 2 cm, maintaining a roughly the same arrangement. This arrangement spacing can be adjusted according to the muscle arrangement of the actual application site.

[0035] In an exemplary embodiment, the ultrasound sensing module and the EMG sensing module located at the same muscle position are integrated together through VIA vias, and the electrophysiological adhesion layer of the EMG sensing module is in contact with the human skin surface.

[0036] Specifically in this embodiment, the ground electrode layer, excitation electrode layer, and EMG electrode layer are made of a composite conductive material mainly composed of a layered transition metal carbon / nitride MXene and a metal nanomaterial AgNW, and are formed by spin-coating a solution on a silicon wafer with patterned grooves. It can be extended to other nanomaterials with conductive and shielding properties according to the application.

[0037] The first electromagnetic shielding layer, the second electromagnetic shielding layer, and the third electromagnetic shielding layer are structural layers made of a composite conductive material composed of layered transition metal carbon / nitride MXene and metal nanomaterial AgNW by solution spin coating. It can be extended to other nanomaterials with conductive and shielding properties according to applications. This electromagnetic shielding layer can shield noise interference introduced by other instruments and improve the signal-to-noise ratio.

[0038] The first elastic encapsulation layer, the first elastic isolation layer, the second elastic isolation layer, the second elastic encapsulation layer, the third elastic isolation layer, and the third elastic encapsulation layer are structural layers made of a hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer as the main material and dichlorobenzene organic solution as the auxiliary material. After mixing to form a solution, it is made by solution spin coating. It can be extended to more types of high-elastic polymer materials according to actual applications.

[0039] The piezoelectric module layer is mainly made of composite piezoelectric ceramics and can be extended to more types of piezoelectric materials according to applications.

[0040] In the above embodiments of the present application, a highly ductile and highly biocompatible layered MXene-based elastic conductive film is developed. This film is prepared from a silver nanowire (AgNW) and MXene conductive mixed solution, which not only realizes reliable and stable myoelectric sensing, but also provides a highly reliable excitation and echo signal transmission channel for flexible ultrasonic transducers; finally, it is integrally prepared by large-area, low-cost transfer printing and liquid-phase film-forming processes.

[0041] Based on the same inventive concept, the embodiments of the present application also provide a preparation method for a flexible integrated array for synergistic myoelectric and ultrasonic sensing as described above. The solution for solving the problem provided by this preparation method is similar to the solution described in the above method. It will adopt large-area, low-cost transfer printing and liquid-phase film-forming processes to prepare a high-density, high-precision muscle ultrasound / myoelectric synergistic sensing hybrid integrated device. In an exemplary embodiment, as Figure 4 shown, a preparation method for a flexible integrated array for synergistic myoelectric and ultrasonic sensing is provided, including the following steps: A1. Prepare a plurality of thin-film electrode layers; the thin-film electrode layer includes an elastic encapsulation layer, an electromagnetic shielding layer, an elastic isolation layer, and an electrode layer from top to bottom. In this embodiment, the process flow for preparing the thin-film electrode layer in step A1 is as Figure 5 shown, and specifically includes the following steps: Adopt a dry etching process to pattern and etch a groove with a certain depth on the silicon substrate according to the myoelectric sensing module and ultrasonic sensing module patterns. Specifically, adopt a dry etching process to etch on the silicon substrate according to Figure 1The horizontal structure shown etches grooves with a certain depth on a silicon substrate according to the patterns of the electromyogram sensing module and the ultrasonic sensing module respectively. The ultrasonic sensing module includes an excitation electrode layer and a ground electrode layer.

[0042] Drop an electro-sensing material on the silicon substrate etched with patterns to obtain the corresponding electrode layer; the electrode layer is an electromyogram electrode layer, a ground electrode layer or an excitation electrode layer. In this step, drop the AgNW / MXene conductive hybrid solution into the grooves etched in the above step, and heat and anneal for curing.

[0043] Prepare an elastic isolation layer, an electromagnetic shielding layer and an elastic encapsulation layer in sequence on the electrode layer to obtain a thin-film electrode layer. In this step, select the thermoplastic elastomer SEBS as the base material of the entire skin-like electronic device, which has good mechanical stretchability, high biocompatibility, low elastic modulus and other characteristics. Specifically, it includes the following steps: First, by the solution spin-coating method, spin-coat the elastic base material solution on the electrode layer obtained in the previous step, and place it on a heating table for annealing and curing. Prepare a stretchable and highly stable electrode thin film on the substrate by the liquid-phase film-forming method as the elastic isolation layer. Further, drop the AgNW / MXene conductive hybrid solution on the surface of the elastic isolation layer and anneal for curing to form an electromagnetic shielding layer. Finally, drop the elastic material solution consistent with the base material on the surface of the electromagnetic shielding layer and anneal for curing to form an elastic encapsulation layer to ensure the long-term use of the entire skin-like electronic device.

[0044] After that, to ensure the success rate of peeling the device from the silicon substrate, the contact surface between the elastic base material and the silicon wafer and the contact quality of the composite film are crucial. A high-performance skin-like electronic device is obtained by a simple mechanical peeling method. After peeling the thin-film electrode layer, the patterned etched silicon mold can be reused, greatly reducing the preparation process of electrode pattern pretreatment and significantly reducing the process cost of the entire prepared device, laying a solid foundation for obtaining a low-cost integrated system.

[0045] A2. Take any two thin-film electrode layers as the first thin-film electrode layer and the second thin-film electrode layer, and adhere them to the upper and lower sides of a piezoelectric module layer respectively to obtain an ultrasonic sensing module. Both the first thin-film electrode layer and the second thin-film electrode layer are adhered to the piezoelectric module layer through their respective electrode layers. Specifically, after dropping an organic solvent on the composite piezoelectric ceramic sheet, it is attached to the thin-film electrode layer obtained in the above step. One side of the piezoelectric ceramic sheet is adhered to the excitation electrode layer, and the other side is adhered to the grounding electrode layer. In this embodiment, when the first thin-film electrode layer and the second thin-film electrode layer are respectively adhered to the upper and lower sides of the piezoelectric module layer, the organic solution adhesion method is adopted. Solution bonding has more advantages compared with traditional conductive silver glue bonding. Conductive silver glue needs to be manually applied, and the dosage is not easy to control. While the organic solution method is directly dropped on the surface at one time, which solves the error caused by the dosage of manually applying conductive silver glue, and can minimize the differences between channels as much as possible.

[0046] A3. Take a thin-film electrode layer as the third thin-film electrode layer, and prepare an electrophysiological adhesion layer at the bottom of the electrode layer of the third thin-film electrode layer to obtain an electromyogram sensing module.

[0047] A4. Arrange and integrate several ultrasonic sensing modules and several electromyogram sensing modules according to the muscle position and orientation of the specific human body part on a wearable flexible film to obtain a flexible integrated array for synergistic sensing of electromyogram and ultrasound. Several ultrasonic sensing modules form an ultrasonic sensing array, and several electromyogram sensing modules form an electromyogram sensing array.

[0048] Specifically, in this embodiment, the elastic encapsulation layer and the elastic isolation layer are structural layers made by solution spin coating after mixing a hot-melt high-elastic polymer monomer powder, hydrogenated styrene-butadiene block copolymer, as the main material and a dichlorobenzene organic solution as the auxiliary material to form a solution. The electromagnetic shielding layer is a structural layer made by solution spin coating with a composite conductive material mainly composed of a layered transition metal carbon / nitride MXene and a metal nanomaterial AgNW. The electrode layer is a structural layer made by solution spin coating a composite conductive material mainly composed of a layered transition metal carbon / nitride MXene and a metal nanomaterial AgNW on a silicon wafer with a patterned groove.

[0049] In this embodiment, the flexible and stretchable electrodes with different AgNW:MXene ratios were studied and compared in terms of different properties, including electrical properties, tensile properties, stability, and elastic modulus. Through in-depth research and analysis, it was found that the AgNW:MXene (3:0.2) flexible and stretchable electrode has excellent conductivity (the conductivity reaches 3597 S / cm), tensile properties, stability, and a low elastic modulus (27.3 MPa), which ensures that even during human movement, this electrode can stably and reliably monitor high-quality physiological electrical signals. In this embodiment, Ti3C2Tx was used as MXene, and the preparation steps of the AgNW / MXene conductive hybrid solution are as follows: First, use a pipette to sequentially suck 3 mL of AgNW (10 mg / mL) solution and 6.6 mL of deionized water, inject them into a glass bottle, and use an ultrasonic cell disruptor for ultrasonic treatment. Place the bottle containing the AgNW solution in a beaker filled with ice water, and at the same time, place the ultrasonic probe in the AgNW solution, ensuring that the ultrasonic probe is immersed below the water surface and does not touch the inner wall of the glass bottle, and perform ultrasonic treatment in an ice-water bath. The ultrasonic power is 60 - 80 W, and ultrasonic treatment is carried out for 10 min to obtain a uniformly distributed AgNW solution.

[0050] Then, use a pipette to suck 0.4 mL of MXene (5 mg / mL) solution and inject it into the above-mentioned glass bottle containing the AgNW solution. Mix the two conductive materials together, and then perform the same ice-water bath ultrasonic treatment method as in step 1). The ultrasonic power is 60 - 100 W, and ultrasonic treatment is carried out for 20 - 30 min. Finally, a uniform AgNW / MXene conductive hybrid solution is obtained.

[0051] To ensure the consistency of electrode contact and the accuracy of signal transmission between the two sensing modules, after obtaining the ultrasonic sensing module and the electromyogram sensing module, the electrode pads in the electromyogram sensing module are made to be on the same plane as the electrode pads of the ultrasonic sensing module through VIA vias, and the electrode pads of the two are connected to a flexible PCB board. The flexible electrode is connected to the flexible PCB board by the solution method and placed on a heating table for annealing and drying. After annealing and drying, the final flexible integrated device for synergistic sensing of electromyogram and ultrasound can be obtained.

[0052] The above-mentioned flexible integrated array for high-density and high-precision myoelectric and ultrasonic collaborative sensing proposed in this application can simultaneously acquire ultrasonic signals and myoelectric signals of muscles, so as to realize multi-dimensional muscle state monitoring. At the same time, it can perform electrical stimulation on specific parts for timely rehabilitation treatment of muscle fatigue and injury. This hybrid integrated array has the advantages of automatic positioning and convenient use. It is arranged and designed according to the muscle position and orientation of specific parts of the human body. When the integrated array detects abnormal signals, the position of the abnormal muscle is determined by the array elements that receive the abnormal signals, thus realizing automatic positioning. At the same time, an AgNW / MXene hybrid solution is developed and used as the conductive material, and the preparation process is simple and the cost is low, which provides great application value for the diagnosis and rehabilitation of muscle states.

[0053] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0054] Specific examples are used in this article to elaborate on the principle and implementation mode of this application. The description of the above embodiments is only used to help understand the method and its core idea of this application; at the same time, for those of ordinary skill in the art, according to the idea of this application, there will be changes in the specific implementation mode and application scope. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A flexible integrated array for myoelectric and ultrasonic collaborative sensing, characterized in that: include: An ultrasonic sensing array and an electromyographic sensing array, wherein the ultrasonic sensing array and the electromyographic sensing array are integrated on a wearable flexible film, wherein the ultrasonic sensing array includes a plurality of ultrasonic sensing modules, and the electromyographic sensing array includes a plurality of electromyographic sensing modules, wherein the plurality of ultrasonic sensing modules and the plurality of electromyographic sensing modules are arranged and designed according to the muscle positions and directions of specific parts of the human body; wherein the ultrasonic sensing module includes a first thin-film electrode layer, a piezoelectric module layer and a second thin-film electrode layer from top to bottom; wherein the first thin-film electrode layer includes a first elastic packaging layer, a first electromagnetic shielding layer, a first elastic isolation layer and a ground electrode layer from top to bottom; wherein the second thin-film electrode layer includes an excitation electrode layer, a second elastic isolation layer, a second electromagnetic shielding layer and a second elastic packaging layer from top to bottom; wherein the electromyographic sensing module includes a third thin-film electrode layer and an electrophysiological adhesion layer from top to bottom; wherein the third thin-film electrode layer includes a third elastic packaging layer, a third electromagnetic shielding layer, a third elastic isolation layer and an electromyographic electrode layer from top to bottom; wherein the piezoelectric module layer of each ultrasonic sensing module and the electromyographic electrode layer of each electromyographic sensing module are connected to an external circuit.

2. The flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 1 is characterized in that: The ultrasonic sensing module and the electromyographic sensing module located at the same muscle position are integrated together through a VIA through hole, and the electrophysiological adhesion layer of the electromyographic sensing module is in contact with the surface of human skin.

3. The flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 1 is characterized in that: The ground electrode layer, the excitation electrode layer and the myoelectric electrode layer are mainly made of a composite conductive material mixed with layered transition metal carbon / nitride MXene and metal nanomaterial AgNW, and are structural layers made by spin coating a solution on a silicon wafer with patterned grooves.

4. The flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 1, characterized in that: The first electromagnetic shielding layer, the second electromagnetic shielding layer and the third electromagnetic shielding layer are structural layers made of a composite conductive material mainly composed of a mixture of layered transition metal carbon / nitride MXene and metal nanomaterial AgNW, and are made by a solution spin coating method.

5. The flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 1, characterized in that: The first elastic packaging layer, the first elastic isolation layer, the second elastic isolation layer, the second elastic packaging layer, the third elastic isolation layer and the third elastic packaging layer are structural layers made of hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer as the main material and dichlorobenzene organic solution as the auxiliary material, which are mixed to form a solution and then made by solution spin coating method.

6. A method for preparing a flexible integrated array for coordinated myoelectric and ultrasonic sensing, characterized in that: Used to prepare a flexible integrated array for myoelectric and ultrasonic collaborative sensing as claimed in any one of claims 1 to 5, the preparation method comprising: A plurality of thin-film electrode layers are prepared; the thin-film electrode layers include, from top to bottom, an elastic packaging layer, an electromagnetic shielding layer, an elastic isolation layer and an electrode layer; Any two thin-film electrode layers are used as the first thin-film electrode layer and the second thin-film electrode layer, which are respectively adhered to the upper and lower sides of a piezoelectric module layer to obtain an ultrasonic sensing module; the first thin-film electrode layer and the second thin-film electrode layer are both adhered to the piezoelectric module layer through their respective electrode layers; Using a thin-film electrode layer as a third thin-film electrode layer, preparing an electrophysiological adhesion layer at the bottom of the electrode layer of the third thin-film electrode layer, and obtaining an electromyographic sensing module; Several of the ultrasonic sensing modules and several of the electromyographic sensing modules are arranged and designed according to the muscle positions and directions of specific parts of the human body and integrated on a wearable flexible film to obtain a flexible integrated array for collaborative electromyographic and ultrasonic sensing; several of the ultrasonic sensing modules constitute an ultrasonic sensing array, and several of the electromyographic sensing modules constitute an electromyographic sensing array.

7. The method for preparing the flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 6, characterized in that: Several thin-film electrode layers are prepared, specifically including: A dry etching process is used to pattern the electromyography sensing module and the ultrasonic sensing module to form grooves with a certain depth on the silicon substrate; Drop coating of an electrosensitive material on the silicon substrate etched with a pattern to obtain a corresponding electrode layer; the electrode layer is an electromyographic electrode layer, a grounding electrode layer or an excitation electrode layer; An elastic isolation layer, an electromagnetic shielding layer and an elastic packaging layer are sequentially prepared on the electrode layer to obtain a thin film electrode layer.

8. The method for preparing the flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 7, characterized in that: The elastic packaging layer and the elastic isolation layer are structural layers made of hot-melt high-elastic polymer monomer powder hydrogenated styrene-butadiene block copolymer as the main material and dichlorobenzene organic solution as the auxiliary material, and are mixed to form a solution and then made by solution spin coating; the electromagnetic shielding layer is a structural layer made of a composite conductive material mixed with layered transition metal carbon / nitride MXene and metal nanomaterial AgNW as the main material, and is made by solution spin coating on a silicon wafer with patterned grooves.

9. The method for preparing the flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 6, characterized in that: When the first thin-film electrode layer and the second thin-film electrode layer are respectively bonded to the upper and lower sides of the piezoelectric module layer, an organic solution bonding method is used.

10. The method for preparing the flexible integrated array for myoelectric and ultrasonic collaborative sensing according to claim 6, characterized in that: After obtaining the ultrasonic sensing module and the electromyographic sensing module, the electrode pads in the electromyographic sensing module are kept on the same plane as the electrode pads of the ultrasonic sensing module through VIA through holes, and the electrode pads of the two are connected to a flexible PCB board.

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