Micro-gap breakdown characteristic measurement method and device based on contact separation electrification

Abstract

The invention relates to the technical field of device performance detection, in particular to a micro-gap breakdown characteristic measurement method and device based on contact separation electrification, and the method comprises the steps: enabling two target electrodes to be in contact based on a contact electrification effect to form a positive electrode and a negative electrode; discharge breakdown is caused by single separation of the positive electrode and the negative electrode to measure the Paschen curve between the positive electrode and the negative electrode. Therefore, the problems that an existing Paschen curve measuring method needs to depend on an external voltage source and a circuit, repeated measurement is needed, a current threshold value needs to be subjectively selected, and then the measuring efficiency of the micro-gap breakdown characteristic and the accuracy of a measuring result are affected are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of device performance detection, and particularly relates to a method and device for measuring the breakdown characteristics of a micro-gap based on contact-separation electrification. Background Art

[0002] During the manufacturing, processing, and operation of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), any improper discharge phenomenon may cause device breakdown and failure, thus affecting the stability of the entire system. With the continuous miniaturization of the feature size of electronic devices, once encountering sudden interference (such as static electricity), the voltage may instantaneously reach tens of thousands of volts, resulting in the formation of an extreme electric field inside, and then triggering spark discharge and breakdown short circuit. Therefore, to prevent discharge between high- and low-potential components, micro-devices need to simulate the use environment to conduct breakdown voltage tests before formal production, so as to obtain a breakdown curve (or called Paschen curve) for evaluating breakdown characteristics, and provide important guidance for subsequent insulation design and electrostatic protection.

[0003] The currently commonly used method for measuring the Paschen curve is to fix the gap distance, then connect a DC voltage and a current-limiting resistor in series between the electrodes, and gradually increase the applied voltage until a set current threshold is reached. At this time, the applied voltage when reaching this current threshold is considered as the breakdown voltage value at this distance. Further, change the gap distance and repeat the measurement according to the same method, so as to obtain a Paschen curve with the distance as the independent variable.

[0004] However, the existing methods for measuring the Paschen curve have the following several significant defects: (1) This method relies on an external voltage source and circuit, which not only increases the equipment investment, but also may introduce additional maintenance and operation complexities; (2) The experiment needs to change the gap distance and conduct repeated experiments to obtain a complete Paschen curve, which undoubtedly increases the time cost of the experiment and reduces the overall efficiency; (2) During the measurement process, the current threshold must be subjectively selected, and this subjective factor may affect the accuracy and consistency of the results.

[0005] Therefore, there is an urgent need for a more efficient, objective, and economical method for measuring the breakdown characteristics of a micro-gap based on contact-separation electrification. Summary of the Invention

[0006] The present invention provides a method and device for measuring the breakdown characteristics of a micro-gap based on contact-separation electrification, so as to solve the problems that the existing methods for measuring the Paschen curve need to rely on an external voltage source and circuit, need repeated measurement, and need to subjectively select the current threshold, thereby affecting the measurement efficiency and the accuracy of the measurement results of the breakdown characteristics of the micro-gap, etc.

[0007] An embodiment of the first aspect of the present invention provides a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification, including the following steps: Based on the contact electrification effect, bring two target electrodes into contact to form positive and negative electrodes; trigger a discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes.

[0008] Optionally, the step of bringing two target electrodes into contact to form positive and negative electrodes based on the contact electrification effect includes:

[0009] Obtain the work function difference between the two target electrodes; based on the contact electrification effect, bring the two target electrodes into contact so that charges are transferred from one target electrode to the other to form the positive and negative electrodes, and determine whether to inject external charges into the positive and negative electrodes according to the work function difference.

[0010] Optionally, the step of determining whether to inject external charges according to the work function difference includes:

[0011] Compare the work function difference with a preset threshold. When the work function difference is greater than or equal to the preset threshold, there is no need to inject the external charges into the positive and negative electrodes. When the work function difference is less than the preset threshold, inject the external charges into the positive and negative electrodes.

[0012] Optionally, the step of triggering a discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes includes:

[0013] Separate the positive and negative electrodes once according to a preset separation speed to trigger a continuous discharge breakdown; measure the potential curve of the potential difference between the positive and negative electrodes changing with distance during the single separation process, and use the potential curve as the Paschen curve.

[0014] An embodiment of the second aspect of the present invention provides a device for measuring the micro-gap breakdown characteristics based on contact-separation electrification, including: a contact module for bringing two target electrodes into contact to form positive and negative electrodes based on the contact electrification effect; a separation and measurement module for triggering a discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes.

[0015] Optionally, the contact module includes: an acquisition unit for acquiring the work function difference between the two target electrodes; a contact unit for bringing the two target electrodes into contact according to the work function so that charges are transferred from one target electrode to the other to form the positive and negative electrodes, and determining whether to inject external charges into the positive and negative electrodes according to the work function difference.

[0016] Optionally, the contact unit includes: comparing the work function difference with a preset threshold value; when the work function difference is greater than or equal to the preset threshold value, no external charge is injected into the positive and negative electrodes; when the work function difference is less than the preset threshold value, external charge is injected into the positive and negative electrodes.

[0017] Optionally, the separation measurement module includes:

[0018] a separation unit configured to separately separate the positive and negative electrodes once according to a preset separation speed to initiate continuous discharge breakdown; a measurement unit configured to measure a potential curve of the potential difference between the positive and negative electrodes varying with distance during the single separation process, and use the potential curve as the Paschen curve.

[0019] An embodiment of a third aspect of the present invention provides an electronic device, including: a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the program to implement the method for measuring the micro-gap breakdown characteristics based on contact-separation electrification as described in the above embodiments.

[0020] The method and device for measuring the micro-gap breakdown characteristics based on contact-separation electrification proposed in the embodiments of the present invention provide a method for quickly measuring the Paschen curve without an additional voltage source, without repeated measurement, and without subjectively selecting a threshold; only two steps of contact and separation are required, and a large number of repeated experiments are not needed, greatly improving the experimental efficiency; contact electrification is achieved through the difference in the ability of materials to bind charges themselves, avoiding the need for an additional voltage source and reducing the experimental cost; the contact electrification phenomenon widely exists between any two objects, and is not only applicable to the measurement of the Paschen curve between metal electrodes, but also applicable to the measurement between metal and insulator, and between insulators; there is no need to set a current threshold to determine whether the gap breaks down, thus avoiding the error introduced by subjective factors and improving the measurement accuracy; it is not only applicable to measuring the breakdown characteristics of various MEMS and NMES devices, but also can be applied to the research of micro-plasma sources, gas sensing, and energy conversion.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the following description of the embodiments in conjunction with the drawings, where:

[0023] Figure 1 is a schematic flowchart of a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention;

[0024] Figure 2 Schematic diagram of the specific implementation of a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention;

[0025] Figure 3 Schematic diagram of the requirements for the contact charge amount in a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention;

[0026] Figure 4 Schematic diagram of the requirements for the separation speed in a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention;

[0027] Figure 5 Schematic diagram of the universality verification results provided by an embodiment of the present invention, where (a) is the Paschen curve and the measured potential curve under different electric field enhancement factors, and (b) is the Paschen curve and the measured potential curve under different secondary electron emission coefficients;

[0028] Figure 6 Schematic block diagram of a device for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention;

[0029] Figure 7 Schematic diagram of the structure of an electronic device provided by an embodiment of the present invention. Detailed implementation manners

[0030] The embodiments of the present invention are described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation to the present invention.

[0031] The method and device for measuring the micro-gap breakdown characteristics based on contact-separation electrification according to the embodiments of the present invention are described below with reference to the drawings.

[0032] Figure 1 Schematic flow diagram of a method for measuring the micro-gap breakdown characteristics based on contact-separation electrification provided by an embodiment of the present invention.

[0033] As Figure 1 shown, the method for measuring the micro-gap breakdown characteristics based on contact-separation electrification includes the following steps:

[0034] In step S101, based on the contact electrification effect, two target electrodes are brought into contact to form positive and negative electrodes.

[0035] In some embodiments, based on the contact electrification effect, bringing two target electrodes into contact to form positive and negative electrodes includes:

[0036] Obtain the work function difference between two target electrodes;

[0037] Based on the contact electrification effect, bring the two target electrodes into contact so that charges are transferred from one target electrode to the other target electrode, forming positive and negative electrodes, and determine whether to inject external charges into the positive and negative electrodes according to the work function difference.

[0038] In some embodiments, determining whether to inject external charges according to the work function difference includes:

[0039] Compare the work function difference with a preset threshold. When the work function difference is greater than or equal to the preset threshold, there is no need to inject external charges into the positive and negative electrodes. When the work function difference is less than the preset threshold, inject external charges into the positive and negative electrodes.

[0040] In the actual execution process, the embodiments of the present invention respectively obtain the work functions of the two target electrodes, compare the work functions of the two target electrodes to obtain the work function difference, and then compare the work function difference with the preset threshold. When the work function difference is greater than or equal to the preset threshold, bring the two target electrodes into contact with each other by an external force. Based on the difference in bound charges between the two target electrodes, charges are transferred from one electrode to the other electrode, forming positive and negative electrodes, so as to achieve the effect of replacing the DC voltage source.

[0041] For example, as Figure 2 shown, the materials of the two target electrodes are chromium (Cr) and gold (Au) respectively. After bringing the two target electrodes into contact, when the distance between them is less than 2.5 nanometers, due to the quantum tunneling effect, electrons will flow from the metal chromium (Cr) with a lower work function to the gold (Au) with a higher work function until the Fermi levels of the two are equal. When equilibrium is reached, a certain potential difference is generated between the two metals, and equal amounts of opposite charges appear on both sides of the interface, thus forming positive and negative electrodes.

[0042] Further, when the work function difference is less than the preset threshold, it means that the difference in bound charges between the two target electrodes is extremely small. Although the two target electrodes can be brought into contact with each other by an external force to form positive and negative electrodes, the charge transfer between the two target electrodes during the contact stage is too small, so it may not be sufficient to trigger gas discharge during the separation stage. As Figure 3 shown, the U b -d curve is the Paschen curve, U difThe -d curve is the measured potential curve. If the contact charge between the positive and negative electrodes is too small and the air-gap electric field during separation is too small to trigger discharge breakdown, then the potential curve is much lower than the Paschen curve, and thus the subsequently measured potential curve cannot be regarded as the Paschen curve. Only when the contact charge is high enough and the potential curve can intersect or coincide with the Paschen curve can part or all of the Paschen curve be accurately measured. Therefore, in the embodiments of the present invention, when the work function difference is less than a preset threshold, external charges are injected into the positive and negative electrodes by means of an electrostatic gun or capacitor charging to replace the contact charge, ensuring that there is enough charge to achieve discharge breakdown during the separation stage.

[0043] In step S102, the Paschen curve between the positive and negative electrodes is measured by triggering discharge breakdown through a single separation of the positive and negative electrodes.

[0044] In some embodiments, measuring the Paschen curve between the positive and negative electrodes by triggering discharge breakdown through a single separation of the positive and negative electrodes includes:

[0045] The positive and negative electrodes are separated once according to a preset separation speed to trigger continuous discharge breakdown;

[0046] Measure the potential curve of the potential difference between the positive and negative electrodes changing with distance during the single separation process, and use the potential curve as the Paschen curve.

[0047] During the actual execution process, the positive and negative electrodes are separated once by an external force according to a preset separation speed to trigger gas discharge. During the separation process, the distance between the two target electrodes is constantly changing, triggering continuous discharge breakdown.

[0048] For example, such as Figure 2As shown, the materials of the two target electrodes are chromium (Cr) and gold (Au) respectively. When the positive and negative electrodes start to separate, the gap distance is at the nanoscale. At this time, the tunneling effect is still effective and charges can also move. At the same time, the actual contact surface is not smooth, and the electric field at the micro-protrusions is locally enhanced, resulting in field emission at the protrusions on the surface of the negatively charged gold electrode. When the positive and negative electrodes are separated to the micron scale, the field-emitted electrons are accelerated in the electric field and obtain corresponding kinetic energy. Electrons with energy higher than the gas ionization energy will ionize gas molecules or atoms to generate new free electrons and positive ions. These free electrons will continue to accelerate under the action of the electric field and collide and ionize with more gas molecules or atoms, forming an electron avalanche, which leads to a sharp increase in the number of charged particles in the gas and a rapid enhancement of the gas conductivity, thus triggering discharge breakdown. When the positive and negative electrodes are separated to a larger scale, the surface electric field generated by the remaining charges on the gold electrode is not sufficient to maintain field emission, and the surface process is dominated by ion-induced secondary electron emission (SEE) rather than field emission, and a quasi-neutral plasma region is formed in the gap. In some cases, metastable particles, photons, electrons, and fast neutral particles can also cause secondary electron emission, thereby maintaining discharge breakdown.

[0049] Furthermore, during the single separation process of the positive and negative electrodes, devices such as force sensors, electrometers, or non-contact electrostatic measuring instruments can be used to measure signals such as electrostatic force and surface charge during the separation process to calculate the potential difference between the positive and negative electrodes, and then construct a potential curve of the potential difference varying with distance, and use the potential curve as the Paschen curve.

[0050] For example, two force sensors with different ranges are used. The large-range and low-precision sensor is used to control the contact force between the positive and negative electrodes. To a certain extent, it can also adjust the contact area and thus change the contact charge. The small-range and high-precision sensor is used to measure the electrostatic force between the positive and negative electrodes. Under the assumption of an infinitely large parallel plate (i.e., the gap distance is much smaller than the electrode radius), the potential difference V and the electrostatic force F satisfy the relationship: In the formula, R is the electrode radius, d is the gap distance, and ε0 is the vacuum permittivity. Based on this relationship, the potential difference between the positive and negative electrodes can be calculated through the collected electrostatic force signal. At the same time, a high-precision nanoscale electric displacement platform is used to separate the positive and negative electrodes, and the electrostatic force, potential difference, and separation distance are measured in real time to construct a potential curve of the potential difference varying with distance, which is the Paschen curve.

[0051] It should be noted that as Figure 4 shown, the U b -d curve is the Paschen curve, and U difThe U-d curve is the measured potential curve. When the positive and negative electrodes are separated until the breakdown threshold is reached, if the separation speed is too fast, the air gap will not break down immediately. Instead, it will continue to separate within the breakdown delay time range and reach the overvoltage state. The discharge in the overvoltage state is stronger, and more surface charges of the electrodes are dissipated by the gas discharge. Therefore, there is an obvious potential drop in the potential curve, and the potential difference drops below the breakdown threshold, causing the discharge to extinguish. During the continuous separation of the positive and negative electrodes, according to the relationship U dif =(Qd) / (ε0S) (where Q is the total charge of the electrodes and S is the surface area of the electrodes), it can be seen that the potential difference between the positive and negative electrodes increases linearly, and then reaches the breakdown threshold again. After the breakdown delay, the discharge is ignited again and repeats in this way. Finally, the potential curve oscillates up and down around the Paschen curve and cannot accurately reflect the true Paschen curve. Therefore, the preset separation speed preset in the embodiments of the present invention should not be too fast (the present invention does not specifically limit the separation speed, and those skilled in the art can set it according to the actual situation). If the separation speed is too fast, the potential curve may oscillate up and down around the Paschen curve, resulting in a non-smooth measurement result and being unable to reflect the true Paschen curve through the potential curve.

[0052] As Figure 5 shown, the micro-gap breakdown characteristic measurement method based on contact-separation electrification proposed in the embodiments of the present invention has been verified for universality. In the figure, the U b -d curve is the Paschen curve, and the U dif -d curve is the measured potential curve. Under various electric field enhancement factors β e and secondary electron emission coefficients γ se , the potential curve completely coincides with the Paschen curve, indicating that this method can be applied to electrode materials with any surface smoothness and electron emission ability and has wide universality.

[0053] In summary, according to the micro-gap breakdown characteristic measurement method based on contact-separation electrification proposed in the embodiments of the present invention, the following beneficial effects are achieved:

[0054] (1) Only two steps of contact and separation are required, and there is no need to conduct a large number of repeated experiments, greatly improving the experimental efficiency;

[0055] (2) Contact electrification is achieved through the difference in the ability of materials to bind their own charges, avoiding the need for an additional voltage source and reducing the experimental cost;

[0056] (3) The contact electrification phenomenon widely exists between any two objects, and it is applicable not only to the measurement of the Paschen curve between metal electrodes but also to the measurement between metal and insulator, and between insulators;

[0057] (4) There is no need to set a current threshold to determine whether the gap breaks down, thus avoiding errors introduced by subjective factors and improving the measurement accuracy;

[0058] (5) is applicable not only to measuring the breakdown characteristics of various MEMS and NMES devices, but also to the research of microplasma sources, gas sensing, and energy conversion.

[0059] Next, a micro-gap breakdown characteristic measurement device based on contact-separation electrification according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0060] Figure 6 It is a block diagram of a micro-gap breakdown characteristic measurement device based on contact-separation electrification provided by an embodiment of the present invention.

[0061] As Figure 6 shown, the micro-gap breakdown characteristic measurement device 60 based on contact-separation electrification includes: a contact module 601 and a separation measurement module 602.

[0062] Among them, the contact module 601 is used to form positive and negative electrodes by contacting two target electrodes based on the contact electrification effect. The separation measurement module 602 is used to trigger a discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes.

[0063] In some embodiments, the contact module 601 includes:

[0064] An acquisition unit, configured to acquire the work function difference between two target electrodes;

[0065] A contact unit, configured to contact the two target electrodes according to the work function, so that charges are transferred from one target electrode to the other target electrode to form positive and negative electrodes, and determine whether to inject external charges into the positive and negative electrodes according to the work function difference.

[0066] In some embodiments, the contact unit includes:

[0067] Compare the work function difference with a preset threshold. When the work function difference is greater than or equal to the preset threshold, there is no need to inject external charges into the positive and negative electrodes. When the work function difference is less than the preset threshold, inject external charges into the positive and negative electrodes.

[0068] In some embodiments, the separation measurement module 602 includes:

[0069] A separation unit, configured to separate the positive and negative electrodes once according to a preset separation speed to trigger a continuous discharge breakdown;

[0070] A measurement unit, configured to measure the potential curve of the potential difference between the positive and negative electrodes changing with distance during the single separation process, and use the potential curve as the Paschen curve.

[0071] It should be noted that the foregoing explanation of the embodiment of the measurement method for the breakdown characteristics of a micro-gap based on contact-separation electrification also applies to the measurement device for the breakdown characteristics of a micro-gap based on contact-separation electrification in this embodiment, and will not be elaborated here.

[0072] The measurement device for the breakdown characteristics of a micro-gap based on contact-separation electrification proposed according to the embodiment of the present invention has the following beneficial effects:

[0073] (1) Only two steps of contact and separation are required, and there is no need to conduct a large number of repeated experiments, greatly improving the experimental efficiency;

[0074] (2) Contact electrification is achieved through the difference in the ability of materials to bind charges themselves, avoiding the need for an additional voltage source and reducing the experimental cost;

[0075] (3) The phenomenon of contact electrification widely exists between any two objects, and it is not only applicable to the measurement of the Paschen curve between metal electrodes, but also applicable to the measurement between metal and insulator, as well as between insulators;

[0076] (4) There is no need to set a current threshold to determine whether the gap breaks down, thus avoiding errors introduced by subjective factors and improving the measurement accuracy;

[0077] (5) It is not only applicable to the measurement of the breakdown characteristics of various MEMS and NMES devices, but also can be applied to the research of micro-plasma sources, gas sensing, and energy conversion.

[0078] Figure 7 The structural schematic diagram of the electronic device provided by the embodiment of the present invention. The electronic device may include:

[0079] A memory 701, a processor 702, and a computer program stored on the memory 701 and executable on the processor 702.

[0080] When the processor 702 executes the program, it implements the measurement method for the breakdown characteristics of a micro-gap based on contact-separation electrification provided in the above embodiment.

[0081] Furthermore, the electronic device further includes:

[0082] A communication interface 703 for communication between the memory 701 and the processor 702.

[0083] The memory 701 is used for storing a computer program executable on the processor 702.

[0084] The memory 701 may include a high-speed RAM memory, and may also include a non-volatile memory, such as at least one disk memory.

[0085] If the memory 701, the processor 702, and the communication interface 703 are implemented independently, the communication interface 703, the memory 701, and the processor 702 can be interconnected via a bus and communicate with each other. The bus can be an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus, an Extended Industry Standard Architecture (EISA) bus, or the like. The bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 7 only a thick line is used in Figure 7 , but it does not mean that there is only one bus or one type of bus.

[0086] Optionally, in a specific implementation, if the memory 701, the processor 702, and the communication interface 703 are integrated on a single chip, the memory 701, the processor 702, and the communication interface 703 can communicate with each other via an internal interface.

[0087] The processor 702 may be a Central Processing Unit (CPU), or an Application Specific Integrated Circuit (ASIC), or one or more integrated circuits configured to implement the embodiments of the present invention.

[0088] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or N embodiments or examples in a suitable manner. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0089] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "N" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0090] Any process or method description represented in a flowchart or otherwise described herein can be understood to represent a module, segment, or portion of code including one or N executable instructions for implementing a customized logical function or process. The scope of the preferred embodiments of the present invention includes additional implementations, where functions may be performed in a substantially simultaneous manner or in a reverse order according to the functions involved, rather than in the order shown or discussed, which should be understood by those skilled in the art to which the embodiments of the present invention pertain.

[0091] The logic and / or steps represented in a flowchart or otherwise described herein, for example, can be considered a sequenced list of executable instructions for implementing a logical function, and can be embodied specifically in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, a system including a processor, or other systems that can fetch and execute instructions from the instruction execution system, apparatus, or device. For the purposes of this specification, a "computer-readable medium" can be any device that can contain, store, communicate, propagate, or transport a program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium include the following: an electrical connection portion (electronic device) having one or N wirings, a portable computer diskette (magnetic device), a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium can even be paper or other suitable media on which the program can be printed, as the program can be obtained electronically by optically scanning the paper or other media, followed by editing, interpretation, or otherwise processing as appropriate, and then stored in a computer memory.

[0092] It should be understood that various parts of the present invention can be implemented by hardware, software, firmware, or a combination thereof. In the above-described embodiments, the N steps or methods can be implemented by software or firmware stored in a memory and executed by a suitable instruction execution system. If implemented in hardware, as in another embodiment, any one or a combination of the following techniques well known in the art can be used: discrete logic circuits having logic gate circuits for implementing logical functions on data signals, application specific integrated circuits having appropriate combinational logic gate circuits, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), and the like.

[0093] Those of ordinary skill in the art can understand that all or part of the steps carried out in implementing the above-described embodiment methods can be completed by instructing relevant hardware through a program. The said program can be stored in a computer-readable storage medium. When the program is executed, it includes one or a combination of the steps of the method embodiment.

[0094] In addition, in each of the embodiments of the present invention, each functional unit can be integrated into a processing module, or each unit can exist physically alone, or two or more units can be integrated into one module. The above-mentioned integrated module can be implemented in the form of hardware or in the form of a software functional module. When the above-mentioned integrated module is implemented in the form of a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium.

[0095] The above-mentioned storage medium can be a read-only memory, a magnetic disk, an optical disc, etc. Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

Claims

1. A method for measuring the breakdown characteristics of a micro-gap based on contact-separation electrification, characterized in that It includes the following steps: Based on the contact electrification effect, bring two target electrodes into contact to form positive and negative electrodes; Trigger discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes.

2. The method for measuring the micro-gap breakdown characteristics based on contact-separation electrification according to claim 1, wherein The step of bringing two target electrodes into contact to form positive and negative electrodes based on the contact electrification effect includes: Obtain the work function difference of the two target electrodes; Based on the contact electrification effect, bring the two target electrodes into contact so that charges are transferred from one target electrode to the other target electrode to form the positive and negative electrodes, and determine whether to inject external charges into the positive and negative electrodes according to the work function difference.

3. The method for measuring the micro-gap breakdown characteristics based on contact-separation electrification according to claim 2, characterized in that, The step of determining whether to inject external charges according to the work function difference includes: Compare the work function difference with a preset threshold. When the work function difference is greater than or equal to the preset threshold, there is no need to inject the external charges into the positive and negative electrodes. When the work function difference is less than the preset threshold, inject the external charges into the positive and negative electrodes.

4. The method for measuring the micro-gap breakdown characteristics based on contact-separation electrification according to claim 1, wherein The step of triggering discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes includes: Separate the positive and negative electrodes once according to a preset separation speed to trigger continuous discharge breakdown; Measure the potential curve of the potential difference between the positive and negative electrodes changing with distance during the single separation process, and use the potential curve as the Paschen curve.

5. A measuring device for the breakdown characteristics of a micro-gap based on contact-separation electrification, characterized in that It includes: A contact module, which is used to bring two target electrodes into contact to form positive and negative electrodes based on the contact electrification effect; A separation measurement module, which is used to trigger discharge breakdown by separating the positive and negative electrodes once to measure the Paschen curve between the positive and negative electrodes.

6. The micro-gap breakdown characteristic measuring device based on contact-separation electrification according to claim 5, characterized in that The contact module includes: An acquisition unit, which is used to obtain the work function difference of the two target electrodes; A contact unit, which is used to bring the two target electrodes into contact according to the work function so that charges are transferred from one target electrode to the other target electrode to form the positive and negative electrodes, and determine whether to inject external charges into the positive and negative electrodes according to the work function difference.

7. The measuring device for micro-gap breakdown characteristics based on contact-separation electrification according to claim 6, wherein The contact unit includes: Compare the work function difference with a preset threshold. When the work function difference is greater than or equal to the preset threshold, there is no need to inject the external charges into the positive and negative electrodes. When the work function difference is less than the preset threshold, inject the external charges into the positive and negative electrodes.

8. The measuring device for micro-gap breakdown characteristics based on contact-separation electrification according to claim 5, characterized in that The separation measurement module includes: A separation unit, which is used to separate the positive and negative electrodes once according to a preset separation speed to trigger continuous discharge breakdown; A measurement unit, which is used to measure the potential curve of the potential difference between the positive and negative electrodes changing with distance during the single separation process, and use the potential curve as the Paschen curve.

9. An electronic device, characterized in that, It includes: A memory, a processor, and a computer program stored on the memory and executable on the processor. The processor executes the program to implement the method for measuring the micro-gap breakdown characteristics based on contact separation electrification as described in any one of claims 1-4.

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