MEMS (Micro Electro Mechanical System) gyroscope capable of rotating in plane

Abstract

The invention relates to the technical field of MEMS (Micro Electro Mechanical System) gyroscopes, and discloses an in-plane rotating MEMS gyroscope, which comprises two driving frames distributed along a second direction; the driving connecting frame is located between the two driving frames; the two coupling frames are distributed in the first direction and are both located in the driving connection frame; each coupling frame is provided with four orthogonal correction electrodes which are symmetrically distributed relative to the first direction and are antisymmetrically distributed relative to the second direction; the two detection frames are located between the two coupling frames; each detection frame is provided with two detection electrodes which are distributed in an anti-symmetric manner relative to the first direction; and the first inclined U-shaped beam can drive the two detection frames to do reverse reciprocating motion along the second direction in the detection mode. According to the in-plane rotating MEMS gyroscope disclosed by the invention, the structure of the MEMS gyroscope is optimized to improve the consistency of motion in a driving mode and inhibit coupling errors, so that the detection performance of the gyroscope is improved, and the in-plane rotating MEMS gyroscope is suitable for application scenes with higher requirements.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of MEMS gyroscopes, and particularly to an in-plane rotation MEMS gyroscope. BACKGROUND

[0002] Single-axis MEMS gyroscopes measure angular velocity using the Coriolis effect, have the characteristics of simple structure and easy integration, and are widely used in the field of inertial sensing. However, the existing technology still has the following problems in structure design and performance optimization: First, the mechanical coupling between the drive mode and the detection mode will cause orthogonal errors, the asymmetry of the detection force will introduce in-phase errors, and the coupling of the same direction and the reverse direction mode will produce additional interference. The superposition of these errors seriously affects the measurement accuracy. Second, the detection accuracy is limited due to inconsistent driving. With the increasing demand for high-precision inertial sensing, it is urgent to optimize the structure design of the gyroscope to overcome the above problems and meet the higher application requirements. SUMMARY

[0003] Based on the above, the purpose of the present application is to provide an in-plane rotation MEMS gyroscope, which optimizes the structure of the MEMS gyroscope to improve the consistency of motion under the drive mode and suppress coupling errors, thereby improving the detection performance of the gyroscope and adapting to higher requirement application scenarios.

[0004] To achieve the above purpose, the technical scheme adopted by the present application is as follows:

[0005] An in-plane rotation MEMS gyroscope, defining two perpendicular first directions, second directions and third directions, comprising:

[0006] Two drive frames are distributed along the second direction, and each drive frame is elastically connected to the substrate along the first direction;

[0007] A drive connection frame is located between the two drive frames, and the drive connection frame is connected to each drive frame through a drive straight beam;

[0008] Two coupling frames are distributed along the first direction and located inside the drive connection frame. Under the drive mode, the two drive frames that move synchronously and reversely along the first direction can drive the drive connection frame to rotate along the third direction, and drive the two coupling frames to move reversely along the second direction;

[0009] Orthogonal correction electrodes are provided on each coupling frame, and four orthogonal correction electrodes are symmetrically distributed with respect to the first direction and antisymmetrically distributed with respect to the second direction;

[0010] Two detection frames are located between the two coupling frames and are distributed along the second direction, each of the detection frames is rigidly connected to the substrate along the first direction and elastically connected to the substrate along the second direction, and each of the detection frames is connected to the two coupling frames;

[0011] Detection electrodes, two detection electrodes are arranged on each of the detection frames and are distributed in anti-symmetry with respect to the first direction;

[0012] A first inclined U-shaped beam is connected to the coupling frame at one end and connected to the detection frame at the other end, and the first inclined U-shaped beam can drive the two detection frames to make reverse reciprocating motion along the second direction in the detection mode.

[0013] As a preferred scheme of the in-plane rotation MEMS gyroscope, the driving straight beam extends along the second direction, and the driving connection frame is symmetrically arranged with the axis on which the driving straight beam is located as the axis of symmetry.

[0014] As a preferred scheme of the in-plane rotation MEMS gyroscope, the in-plane rotation MEMS gyroscope further comprises a center anchor point, a first detection coupling elastic beam and a first detection connection elastic beam, the first detection coupling elastic beam can be deformed along the second direction and one end thereof is connected to one of the detection frames and the other end thereof is connected to the other detection frame; the first detection connection elastic beam can be deformed along the second direction and one end thereof is connected to the center anchor point and the other end thereof is connected to the detection frame.

[0015] As a preferred scheme of the in-plane rotation MEMS gyroscope, the in-plane rotation MEMS gyroscope further comprises a first anchor point, a driving connection elastic beam and a first driving coupling vertical beam, the first anchor point is fixed on the substrate, the driving connection elastic beam can be deformed along the second direction and one end thereof is connected to the first anchor point and the other end thereof is connected to the driving connection frame; one end of the first driving coupling vertical beam is connected to the driving connection frame and the other end thereof is connected to the coupling frame.

[0016] As a preferred scheme of the in-plane rotation MEMS gyroscope, the in-plane rotation MEMS gyroscope further comprises a second anchor point and a second detection connection elastic beam, the second detection connection elastic beam can be deformed along the second direction and one end thereof is connected to the second anchor point and the other end thereof is connected to the detection frame.

[0017] As a preferred scheme of the in-plane rotation MEMS gyroscope, the in-plane rotation MEMS gyroscope further comprises a third anchor point and a driving elastic beam, the driving elastic beam can be deformed along the first direction and one end thereof is connected to the third anchor point and the other end thereof is connected to the driving frame.

[0018] As a preferred scheme of the in-plane rotation MEMS gyroscope, the first inclined U-shaped beam comprises a first horizontal beam and at least two first inclined beams arranged at intervals, one end of each of the first inclined beams is connected with the first horizontal beam, the other end of at least one of the first inclined beams is connected with the detection frame, and the other end of at least one of the first inclined beams is connected with the coupling frame.

[0019] As a preferred scheme of the in-plane rotation MEMS gyroscope, the in-plane rotation MEMS gyroscope further comprises a second inclined U-shaped beam and a second driving coupling vertical beam connected with each other, the second driving coupling vertical beam is connected with the driving connection frame, and the second inclined U-shaped beam is connected with the coupling frame.

[0020] As a preferred scheme of the in-plane rotation MEMS gyroscope, the second inclined U-shaped beam comprises a second horizontal beam and at least two second inclined beams arranged at intervals, the same end of each of the second inclined beams is connected with the second horizontal beam, the other end of at least one of the second horizontal beams is connected with the other end of the second driving coupling vertical beam, and the other end of at least one of the second inclined beams is connected with the coupling frame.

[0021] As a preferred scheme of the in-plane rotation MEMS gyroscope, the number of the first inclined U-shaped beams is four, the number of the second inclined U-shaped beams and the second driving coupling vertical beams is four, and each of the coupling frames corresponds to two first inclined U-shaped beams, two second inclined U-shaped beams and two second driving coupling vertical beams.

[0022] The in-plane rotation MEMS gyroscope has the following beneficial effects:

[0023] The two driving frames moving in the first direction in a synchronous and reverse manner can drive the driving connection frame to rotate in the third direction, and the rotating driving connection frame drives the two coupling frames to move in the second direction in a synchronous and reverse reciprocating manner, compared with the prior art in which the driving frame directly drives the coupling frame, the consistency of the motion of the coupling frame in the driving mode is improved, which helps to increase the detection accuracy of the in-plane rotation MEMS gyroscope, in addition, the four orthogonal correction electrodes on each coupling frame can suppress the orthogonal coupling signal generated between the driving mode and the detection mode due to mechanical coupling, reduce the coupling error, and the two detection electrodes on each detection frame can simultaneously suppress the detection capacitance change introduced by the same direction motion and rotation of the detection frame, reduce the error introduced by the interference mode coupling, and improve the detection accuracy of the in-plane rotation MEMS gyroscope. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed in the description of the embodiments of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from the contents of the embodiments of the present application and these drawings without any creative effort.

[0025] Figure 1 is a schematic diagram of a face-rotation MEMS gyroscope provided by the embodiments of the present application;

[0026] Figure 2 is a schematic diagram of a center anchor point, a first detection connection elastic beam, a first detection coupling elastic beam and a second detection coupling elastic beam of a face-rotation MEMS gyroscope provided by the embodiments of the present application;

[0027] Figure 3 is a partial structure schematic diagram of a face-rotation MEMS gyroscope provided by the embodiments of the present application;

[0028] Figure 4 is a schematic diagram of a face-rotation MEMS gyroscope in a driving mode provided by the embodiments of the present application;

[0029] Figure 5 is a schematic diagram of a face-rotation MEMS gyroscope in a detection mode provided by the embodiments of the present application.

[0030] In the drawings:

[0031] 11, driving frame; 12, driving straight beam; 13, driving connection elastic beam; 14, first driving coupling vertical beam; 15, second driving coupling vertical beam; 16, driving electrode; 17, driving detection electrode; 18, driving elastic beam;

[0032] 2, driving connection frame;

[0033] 31, coupling frame; 32, orthogonal correction electrode;

[0034] 41, detection frame; 42, detection electrode;

[0035] 51, first inclined U-shaped beam; 511, first horizontal beam; 512, first inclined beam; 52, second inclined U-shaped beam; 521, second horizontal beam; 522, second inclined beam;

[0036] 61, center anchor point; 62, first anchor point; 63, second anchor point; 64, third anchor point;

[0037] 71, first detection connection elastic beam; 72, first detection coupling elastic beam; 73, second detection connection elastic beam; 74, second detection coupling elastic beam. DETAILED DESCRIPTION

[0038] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects reached more clear, the technical solutions of the embodiments of the present application will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0039] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0040] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] The present embodiment provides a MEMS gyroscope rotating in-plane, defining a first direction, a second direction and a third direction perpendicular to each other, such as Figures 1 to 3As shown in the figure, the in-plane rotation MEMS gyroscope comprises two drive frames 11, a drive connecting frame 2, two coupling frames 31, orthogonal correction electrodes 32, two detection frames 41, detection electrodes 42 and a first inclined U-shaped beam 51, the two drive frames 11 are distributed along the second direction, each drive frame 11 is elastically connected to the substrate along the first direction, the drive connecting frame 2 is located between the two drive frames 11, the drive connecting frame 2 is connected to each drive frame 11 through a drive straight beam 12, and the two coupling frames 31 are distributed along the first direction and located inside the drive connecting frame 2. In the drive mode, the two drive frames 11 which synchronously and reversely reciprocate along the first direction can drive the drive connecting frame 2 to rotate clockwise and counterclockwise along the third direction, thereby driving the two coupling frames 31 to reciprocate reversely along the second direction, each coupling frame 31 is provided with four orthogonal correction electrodes 32, the four orthogonal correction electrodes 32 are symmetrically distributed with respect to the first direction and antisymmetrically distributed with respect to the second direction, the two detection frames 41 are located between the two coupling frames 31 and distributed along the second direction, each detection frame 41 is rigidly connected to the substrate along the first direction and elastically connected along the second direction, each detection frame 41 is connected to the two coupling frames 31, each detection frame 41 is provided with two detection electrodes 42 which are antisymmetrically distributed with respect to the first direction, one end of the first inclined U-shaped beam 51 is connected to the coupling frame 31, and the other end is connected to the detection frame 41, and the first inclined U-shaped beam 51 can drive the two detection frames 41 to reciprocate reversely along the second direction in the detection mode.

[0042] As shown in the figure, Figure 1 The two drive frames 11 of the embodiment are of the same mass and symmetrical structure, the structure of the drive connecting frame 2 is symmetrical with respect to the first direction and the second direction, the two coupling frames 31 are of the same mass and symmetrical structure, and the two detection frames 41 are of the same mass and symmetrical structure. The in-plane rotation MEMS gyroscope with such a structure can improve the consistency of the motion speed of the two coupling frames 31, thereby reducing the coupling error caused by the inconsistency of the motion speed; on the other hand, it can ensure that the forces acting on the two coupling frames 31 are simultaneously transmitted to the detection frames 41, thereby ensuring that the forces acting on the two detection frames 41 are ultimately the same, ensuring the consistency of detection, reducing the in-phase coupling error introduced by the detection force of the in-plane rotation MEMS gyroscope, and improving the differential effect of the detection electrodes 42, thereby further increasing the accuracy and sensitivity of detection.

[0043] As shown in the figure, Figure 1 The first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. It should be noted that in other embodiments of the present application, the first direction can also be the Y-axis direction, at this time the second direction is the X-axis direction and the third direction is the Z-axis direction, which is specifically set according to actual needs.

[0044] The in-plane rotation MEMS gyroscope of the embodiment can drive the driving connection frame 2 to rotate along the third direction by the two driving frames 11 moving synchronously and reversely along the first direction, and the two coupling frames 31 move synchronously and reversely along the second direction by the driving connection frame 2 rotating, compared with the prior art that the driving frame 11 directly drives the coupling frame 31, the consistency of the movement of the coupling frame 31 in the driving mode is improved, which helps to increase the detection accuracy of the in-plane rotation MEMS gyroscope, in addition, the four orthogonal correction electrodes 32 on each coupling frame 31 can suppress the orthogonal coupling signal between the driving mode and the detection mode due to mechanical coupling, reduce the coupling error, and the two detection electrodes 42 on each detection frame 41 can simultaneously suppress the detection capacitance change introduced by the same direction movement and rotation of the detection frame 41, reduce the error introduced by the interference mode coupling, and improve the detection accuracy of the in-plane rotation MEMS gyroscope.

[0045] As shown in Figure 1 The in-plane rotation MEMS gyroscope further comprises driving electrodes 16 and driving detection electrodes 17, the driving electrodes 16 and the driving detection electrodes 17 are arranged on the driving frames 11, the driving electrodes 16 can drive the driving frames 11 to move along the second direction, and the two driving frames 11 move synchronously and reversely, and the driving detection electrodes 17 on each driving frame 11 can reflect the movement of the driving frame 11, thereby facilitating adjustment of the movement of the driving frame 11 driven by the driving electrodes 16, and ensuring the stability of the movement of the driving frame 11 in the driving mode.

[0046] The driving straight beams 12 of the embodiment extend along the second direction, the number of the driving straight beams 12 is two, the two driving straight beams 12 correspond to the two driving frames 11 respectively, and the number of the driving connection frame 2 is one, and the driving connection frame 2 is symmetrically arranged with the axis of the driving straight beam 12 as the axis of symmetry. According to the simulation results, as long as the length and stiffness of the driving straight beam 12 are designed reasonably, compared with the prior art MEMS gyroscope, under the condition of the same driving displacement of the driving frame 11, the in-plane rotation MEMS gyroscope with this structure can increase the movement amplitude of the coupling frame 31, thereby increasing the detection displacement of the detection frame 41, and improving the detection accuracy and sensitivity.

[0047] The center of mass line is a line connecting the centers of mass of the two coupling frames 31 and the driving connection frame 2, the centers of mass of the two coupling frames 31 and the driving connection frame 2 are located on the center of mass line, the center of mass line extends along the first direction, and the two detection frames 41 are symmetrically distributed relative to the center of mass line. In the driving mode, the coupling frame 31 of the in-plane rotating MEMS gyroscope with the above structure can make linear reciprocating motion along the second direction without rotating with the driving connection frame 2, thereby ensuring that the coupling frame 31 makes linear reciprocating motion, and further ensuring that the coupling frame 31 is subjected to the Coriolis force along the first direction at the angular velocity of the third direction without being deflected, so that the detection frame 41 moves along the second direction under the steering action of the first inclined U-shaped beam 51, and the detection of the detection electrode 42 is facilitated.

[0048] As shown in Figure 2 , the in-plane rotating MEMS gyroscope further comprises four center anchor points 61, four first detection connection elastic beams 71, and a first detection coupling elastic beam 72. The first detection coupling elastic beam 72 can deform along the second direction, one end of the first detection coupling elastic beam 72 is connected to one detection frame 41, and the other end of the first detection coupling elastic beam 72 is connected to the other detection frame 41, so that the two detection frames 41 are coupled and connected. Specifically, when the in-plane rotating MEMS gyroscope is subjected to a same-direction detection force introduced due to process errors, the motion directions of the two detection frames 41 are the same, the first detection coupling elastic beam 72 can suppress the same-direction motion of the two detection frames 41, thereby reducing the motion displacement of the detection electrode 42 under the action of the same-direction detection force, and reducing the coupling error. Each first detection connection elastic beam 71 corresponds to one center anchor point 61, the first detection connection elastic beam 71 can deform along the second direction, one end of the first detection connection elastic beam 71 is connected to the center anchor point 61, and the other end of the first detection connection elastic beam 71 is connected to the detection frame 41, the four center anchor points 61 and the four first detection connection elastic beams 71 can ensure smooth motion of the detection frame 41 along the second direction.

[0049] As shown in Figure 2 , the in-plane rotating MEMS gyroscope further comprises two second detection coupling elastic beams 74, one end of each second detection coupling elastic beam 74 is connected to the center anchor point 61, and the other end of each second detection coupling elastic beam 74 is connected to the middle part of the first detection coupling elastic beam 72. The second detection coupling elastic beam 74 is a serpentine beam and can deform along the first direction. The second detection coupling elastic beam 74 can prevent the first detection coupling elastic beam 72 from colliding with the center anchor point 61 and avoid interference. The second detection coupling elastic beam 74 cooperates with the first detection coupling elastic beam 72 to realize the same-direction suppression function. The second detection coupling elastic beam 74 has a large stiffness in the second direction, but can rotate around the third direction.

[0050] As shown in Figure 1 and Figure 3As shown, the MEMS gyroscope rotating in the plane of this embodiment also includes a first anchor point 62, a drive connection elastic beam 13 and a first drive coupling vertical beam 14. The first anchor point 62 is fixed on the substrate. The drive connection elastic beam 13 can be deformed along the second direction and one end of it is connected to the first anchor point 62, and the other end is connected to the drive connection frame 2; one end of the first drive coupling vertical beam 14 is connected to the drive connection frame 2, and the other end is connected to the coupling frame 31; the drive connection elastic beam 13 and the first drive coupling vertical beam 14 cooperate so that the drive connection frame 2 rotating along the third direction can drive the two coupling frames 31 to perform synchronous reverse reciprocating motion along the second direction.

[0051] Specifically, there are eight first anchor points 62, drive connection elastic beams 13 and first drive coupling vertical beams 14. The eight first anchor points 62 correspond one-to-one to the eight drive connection elastic beams 13. Each coupling frame 31 corresponds to four first anchor points 62, four drive connection elastic beams 13 and four first drive coupling vertical beams 14. The four first anchor points 62 are respectively located at the four corners of the coupling frame 31. The four first drive coupling vertical beams 14 are respectively connected to the four corners of the coupling frame 31. This structure can ensure that the coupling frame 31 moves along the second direction under the drive connection frame 2 in the driving mode, and can also ensure that the coupling frame 31 will not drive the drive connection frame 2 to move along the first direction in the detection mode, thereby realizing the decoupling connection of the drive detected.

[0052] like Figure 1 As shown, the in-plane rotating MEMS gyroscope also includes two second anchor points 63 and four second detection connection elastic beams 73. The two second anchor points 63 are fixed on the substrate and are located at both ends of the two detection frames 41 along the second direction. Each second anchor point 63 is located between the drive connection frame 2 and the detection frame 41. Each second anchor point 63 corresponds to two second detection connection elastic beams 73. Each second detection connection elastic beam 73 can be deformed along the second direction and one end thereof is connected to the second anchor point 63 and the other end is connected to the detection frame 41. The second detection connection elastic beam 73 can ensure that the detection frame 41 moves along the second direction, and ensures that the detection frame 41 moves smoothly along the second direction.

[0053] like Figure 1As shown, the in-plane rotation MEMS gyroscope of the embodiment further comprises third anchor points 64 and driving elastic beams 18, the driving elastic beams 18 are deformable along the first direction and one end of each of the driving elastic beams 18 is connected with a third anchor point 64 and the other end is connected with the driving frame 11. In the embodiment, the number of the third anchor points 64 is twelve and the number of the driving elastic beams 18 is twenty-four, each of the third anchor points 64 corresponds to two driving elastic beams 18, and each of the driving frames 11 corresponds to six third anchor points 64, wherein two of the third anchor points 64 are located at the two ends of the driving frame 11 along the first direction and the other four third anchor points 64 are located in the driving frame 11. It should be noted that in other embodiments of the application, the number of the third anchor points 64 and the driving elastic beams 18 is not limited to the above-mentioned number, and can be other numbers, which are set according to actual needs.

[0054] As shown in FIG. 1, Figure 3 As shown, the first inclined U-shaped beam 51 comprises a first horizontal beam 511 and two first inclined beams 512 which are spaced apart and parallel, one end of each of the two first inclined beams 512 is connected with the first horizontal beam 511, and the other end of one of the first inclined beams 512 is connected with the detection frame 41, and the other end of the other first inclined beam 512 is connected with the coupling frame 31. In other embodiments, the number of the first inclined beams 512 is not limited to two, and can be three or more than three which are spaced apart, one end of each of the first inclined beams 512 is connected with the first horizontal beam 511, and the other end of at least one of the first inclined beams 512 is connected with the detection frame 41, and the other end of the remaining first inclined beams 512 is connected with the coupling frame 31, which is set according to actual needs.

[0055] As shown in FIG. 1, Figure 1 and Figure 3 As shown, the in-plane rotation MEMS gyroscope further comprises the second inclined U-shaped beam 52 and the second driving coupling vertical beam 15 which are connected, the second driving coupling vertical beam 15 is connected with the driving connection frame 2, the second inclined U-shaped beam 52 is connected with the coupling frame 31, and the second inclined U-shaped beam 52 cooperates with the first inclined U-shaped beam 51 to enable the coupling frame 31 moving along the first direction to drive the detection frame 41 to move smoothly along the second direction.

[0056] Specifically, as shown in FIG. 1, Figure 3As shown, the second oblique U-shaped beam 52 includes a second transverse beam 521 and two second oblique beams 522 spaced apart and arranged in parallel. The same end of the two second oblique beams 522 is connected to the second transverse beam 521, the other end of one of the second oblique beams 522 is connected to the other end of the second drive coupling vertical beam 15, and the other end of the other second oblique beam 522 is connected to the coupling frame 31. In other embodiments, the number of second oblique beams 522 can also be three or more, the same end of each second turning oblique beam is connected to the second transverse beam 521, the other end of at least one second transverse beam 521 is connected to the other end of the second drive coupling vertical beam 15, and the other ends of the remaining second oblique beams 522 are connected to the coupling frame 31, and the specific arrangement is based on actual needs.

[0057] like Figure 1 As shown, there are four first oblique U-shaped beams 51, two second oblique U-shaped beams 52 and two second drive coupling vertical beams 15, each coupling frame 31 corresponds to two first oblique U-shaped beams 51, two second oblique U-shaped beams 52 and two second drive coupling vertical beams 15, the two first oblique U-shaped beams 51, two second oblique U-shaped beams 52 and two second drive coupling vertical beams 15 are all connected to the same coupling frame 31, and the connection position of the two second drive coupling vertical beams 15 and the coupling frame 31 is located at the center inside the coupling frame 31. This connection can ensure that the drive connection frame 2 rotating along the third direction can drive the two coupling frames 31 to move along the second direction.

[0058] In this embodiment, the angle between the first oblique beam 512 of the first oblique U-shaped beam 51 and the first direction is 40°, and the angle between the second oblique beam 522 of the second oblique U-shaped beam 52 and the first direction is also 40°, and the first oblique beam 512 and the second oblique beam 522 are symmetrically arranged about the symmetry axis along the second direction. It should be noted that in other embodiments of the present invention, the angle between the first oblique beam 512 and / or the second oblique beam 522 and the first direction is not limited to 40° as defined in this embodiment, and can also be any angle between 30° and 45°, or other angles, as long as the first oblique U-shaped beam 51 and the second oblique U-shaped beam 52 can drive the detection frame 41 to move along the second direction, which specifically depends on the ratio of the total stiffness of the first detection connection elastic beam 71, the second detection connection elastic beam 73 and the total stiffness of the first drive coupling vertical beam 14, the second drive coupling vertical beam 15.

[0059] In the driving mode, Figure 4As shown, the driving electrode 16 drives the corresponding driving frame 11 to move along the X-axis direction, and the two driving frames 11 synchronously and reversely reciprocate, and the driving connecting frame 2 is driven by the two driving frames 11 to rotate along the Z-axis direction along the clockwise and counterclockwise directions alternately, and the coupling frame 31 is synchronously and reversely reciprocated along the Y-axis direction under the driving of the first driving coupling vertical beam 14, and the existence of the first inclined U-shaped beam 51, the second inclined U-shaped beam 52 and the driving connecting elastic beam 13 makes the detection frame 41 not move with the coupling frame 31 moving along the Y-axis direction.

[0060] In the detection mode, as shown in the figure, Figure 5 When the angular velocity in the Z-axis direction is detected, the coupling frame 31 reciprocates along the X-axis direction due to the Coriolis force in the X-axis direction, the two coupling frames 31 move in opposite directions at the same time, the detection frame 41 moves along the Y-axis direction under the action of the first inclined U-shaped beam 51, and the two detection frames 41 synchronously and reversely reciprocate. According to the simulation results, as long as the structure, material and stiffness of the first inclined U-shaped beam 51, the second inclined U-shaped beam 52, the first driving coupling vertical beam 14, the second driving coupling vertical beam 15, the first detection coupling elastic beam 72, the first detection connecting elastic beam 71, the second detection connecting elastic beam 73 and the second detection coupling elastic beam 74 are designed reasonably, the detection displacement of the detection frame 41 can be greater than the displacement of the coupling frame 31, which plays a role in amplifying the displacement, thereby further improving the detection sensitivity of the in-plane rotation MEMS gyroscope.

[0061] Note that the above is only the preferred embodiment of the present application and the applied technical principle. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and those skilled in the art can make various obvious changes, readjustments and substitutions without departing from the scope of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A MEMS gyroscope that rotates in a plane, characterized in that: The first direction, the second direction, and the third direction that are perpendicular to each other are defined, including: two driving frames distributed along the second direction, each of the driving frames being elastically connected to the substrate along the first direction; A driving connection frame is located between the two driving frames, and the driving connection frame is connected to each driving frame via a driving straight beam; Two coupling frames are distributed along the first direction and are both located inside the driving connection frame. In the driving mode, the two driving frames that synchronously reciprocate in opposite directions along the first direction can drive the driving connection frame to rotate along the third direction and drive the two coupling frames to reciprocate in opposite directions along the second direction. Orthogonal correction electrodes, each coupling frame is provided with four of the orthogonal correction electrodes, and the four orthogonal correction electrodes are symmetrically distributed with respect to the first direction and antisymmetrically distributed with respect to the second direction; two detection frames, located between the two coupling frames and distributed along the second direction, each detection frame being rigidly connected to the substrate along the first direction and elastically connected along the second direction, and each detection frame being connected to the two coupling frames; Detection electrodes, each detection frame is provided with two detection electrodes antisymmetrically distributed relative to the first direction; A first oblique U-shaped beam has one end connected to the coupling frame and the other end connected to the detection frame. The first oblique U-shaped beam can drive the two detection frames to perform reverse reciprocating motion along the second direction in the detection mode.

2. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The driving straight beam extends along the second direction, and the driving connection frame is symmetrically arranged with the axis of the driving straight beam as the symmetry axis.

3. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The in-plane rotating MEMS gyroscope also includes a central anchor point, a first detection coupling elastic beam and a first detection connection elastic beam, wherein the first detection coupling elastic beam can be deformed along the second direction and one end of the first detection coupling elastic beam is connected to one detection frame and the other end is connected to another detection frame; the first detection connection elastic beam can be deformed along the second direction and one end of the first detection connection elastic beam is connected to the central anchor point and the other end is connected to the detection frame.

4. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The in-plane rotating MEMS gyroscope also includes a first anchor point, a drive connection elastic beam and a first drive coupling vertical beam. The first anchor point is fixed on the substrate. The drive connection elastic beam can be deformed along the second direction and one end of it is connected to the first anchor point and the other end is connected to the drive connection frame; one end of the first drive coupling vertical beam is connected to the drive connection frame and the other end is connected to the coupling frame.

5. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The in-plane rotating MEMS gyroscope further includes a second anchor point and a second detection connection elastic beam, wherein the second detection connection elastic beam can be deformed along the second direction and has one end connected to the second anchor point and the other end connected to the detection frame.

6. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The in-plane rotating MEMS gyroscope further includes a third anchor point and a driving elastic beam. The driving elastic beam can be deformed along the first direction and one end of the driving elastic beam is connected to the third anchor point, and the other end is connected to the driving frame.

7. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The first inclined U-shaped beam includes a first cross beam and at least two first inclined beams arranged at intervals, one end of each first inclined beam is connected to the first cross beam, the other end of at least one first inclined beam is connected to the detection frame, and the other end of at least one first inclined beam is connected to the coupling frame.

8. The in-plane rotating MEMS gyroscope according to claim 1, characterized in that: The in-plane rotating MEMS gyroscope further includes a second oblique U-shaped beam and a second drive coupling vertical beam connected to each other, wherein the second drive coupling vertical beam is connected to the drive connection frame, and the second oblique U-shaped beam is connected to the coupling frame.

9. The in-plane rotating MEMS gyroscope according to claim 8, characterized in that: The second oblique U-shaped beam includes a second cross beam and at least two second oblique beams arranged at intervals, the same end of each second oblique beam is connected to the second cross beam, the other end of at least one second oblique beam is connected to the other end of the second drive coupling vertical beam, and the other end of at least one second oblique beam is connected to the coupling frame.

10. The in-plane rotating MEMS gyroscope according to claim 8, characterized in that: The number of the first oblique U-shaped beams is four, the number of the second oblique U-shaped beams and the second drive coupling vertical beams are both four, and each of the coupling frames corresponds to two of the first oblique U-shaped beams, two of the second oblique U-shaped beams and two of the second drive coupling vertical beams.

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