Quantitative analysis method and device for elements

Abstract

The invention discloses a quantitative analysis method and a quantitative analysis device for elements, which are applied to the technical field of data analysis, and the quantitative analysis method comprises the following steps: acquiring and carrying out X-ray energy dispersive spectrum data acquisition on a sample to be analyzed to obtain an X-ray energy dispersive spectrum; determining a standard sample corresponding to each element in the X-ray energy dispersion spectrum; carrying out X-ray energy dispersion spectrum data acquisition on the standard sample corresponding to each element for each element to obtain a target X-ray energy dispersion spectrum corresponding to the standard sample; acquiring an original text file corresponding to the target X-ray energy dispersive spectrum from X-ray energy dispersive spectrometer control software; and setting detector parameters in the X-ray energy dispersion spectrum offline analysis software by using the original text file, and carrying out element content calculation on elements to obtain content calculation results corresponding to the elements. Therefore, by setting hardware parameters and experimental parameters in advance, off-line calculation is realized, and element content calculation can be carried out on any computer.

Description

Technical Field

[0001] This application relates to the field of data analysis technology, and in particular to a method and apparatus for quantitative analysis of elements. Background Technology

[0002] X-ray energy-dispersive X-ray spectrometry (XEDS) is an analytical instrument commonly used in scanning electron microscopy (SEM). It is widely applied in materials science and biomedicine, primarily for qualitative and quantitative elemental identification and analysis in micro-areas. Its basic working principle involves bombarding the sample with a high-energy electron beam emitted from the SEM, exciting characteristic X-rays of the elements within the sample. These X-ray signals are then received and analyzed by the X-ray energy-dispersive spectrometer. By dispersing the energy of the X-rays, the spectrometer can accurately identify the elements in the sample and calculate the content of each element through signal processing.

[0003] Existing X-ray energy-dispersive spectroscopy (EDS) analysis software is typically online, meaning it must work in conjunction with the hardware of the X-ray energy-dispersive spectrometer (XDM). During initial installation, the online analysis software reads the hardware technical parameters of the XDM, including detector type, window material, and window thickness. In addition, the software also reads the experimental parameters of the scanning electron microscope (SEM) in real time, such as accelerating voltage, working distance, and elevation angle.

[0004] However, existing software requires data processing to be performed on the control unit connected to the X-ray energy dispersive spectrometer, meaning users can only complete all data analysis tasks in front of the equipment in the laboratory. This limits user flexibility, preventing data analysis from being performed remotely or processed on other computers. Summary of the Invention

[0005] In view of the shortcomings of the prior art, this application provides a method and apparatus for quantitative analysis of elements to solve the problem that data analysis in the prior art cannot be completed remotely or processed on other computers.

[0006] To achieve the above objectives, this application provides the following technical solution:

[0007] The first aspect of this application provides a method for quantitative analysis of elements, comprising:

[0008] The sample to be analyzed is acquired, and X-ray energy dispersive spectroscopy data is collected on the sample to be analyzed to obtain an X-ray energy dispersive spectrum.

[0009] Identify the standard sample corresponding to each element in the X-ray energy dispersive spectrum;

[0010] For each of the elements, X-ray energy dispersive spectroscopy data were acquired from the standard samples corresponding to the element to obtain the target X-ray energy dispersive spectrum of the standard sample.

[0011] Obtain the original text file corresponding to the target X-ray energy dispersive spectrometer control software;

[0012] The detector parameters in the X-ray energy dispersive spectroscopy offline analysis software are set using the original text file;

[0013] The elemental content of the element is calculated using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, and the corresponding content calculation results of the element are obtained.

[0014] Optionally, in the above-described quantitative analysis method for elements, the step of acquiring X-ray energy dispersive spectroscopy data of the sample to be analyzed to obtain an X-ray energy dispersive spectrum includes:

[0015] The current height of the sample to be analyzed is adjusted to the preset working height, and the accelerating voltage of the scanning electron microscope with the X-ray energy dispersive spectrometer pre-installed is set.

[0016] X-ray energy dispersive spectroscopy data were acquired on the adjusted sample to be analyzed using a pre-configured scanning electron microscope to obtain the X-ray energy dispersive spectrum.

[0017] Optionally, in the above-described quantitative analysis method for elements, the step of setting the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software using the original text file includes:

[0018] Obtain the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file;

[0019] Based on the spectrometer hardware parameters and the setting parameters, the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software are set.

[0020] Optionally, in the above-described quantitative analysis method for elements, the step of using the pre-configured X-ray energy dispersive spectroscopy offline analysis software to calculate the elemental content and obtain the corresponding content calculation result for the element includes:

[0021] Obtain the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample corresponding to the element;

[0022] The characteristic X-ray intensities of the element and the characteristic X-ray intensities of the standard sample are corrected using the pre-configured X-ray energy dispersive spectroscopy offline analysis software to obtain the content calculation results of the element.

[0023] Optionally, in the above-described quantitative analysis method for elements, after calculating the elemental content using a pre-set detector to obtain the content calculation result corresponding to the element, the method further includes:

[0024] The calculation results of the content of all the elements are visualized.

[0025] A second aspect of this application provides a quantitative analysis apparatus for elements, comprising:

[0026] The first acquisition unit is used to acquire the sample to be analyzed and to acquire X-ray energy dispersive spectroscopy data of the sample to be analyzed to obtain an X-ray energy dispersive spectroscopy pattern.

[0027] The sample determination unit is used to determine the standard sample corresponding to each element in the X-ray energy dispersive spectrum.

[0028] The second acquisition unit is used to acquire X-ray energy dispersive spectroscopy data of the standard sample corresponding to each element, and obtain the target X-ray energy dispersive spectrum of the standard sample.

[0029] The file acquisition unit is used to acquire the original text file corresponding to the target X-ray energy dispersive spectrometer from the X-ray energy dispersive spectrometer control software;

[0030] The setting unit is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software using the original text file;

[0031] The content calculation unit is used to calculate the element content of the element using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, and obtain the content calculation result corresponding to the element.

[0032] Optionally, in the above-described quantitative analysis device for elements, the first acquisition unit includes:

[0033] The adjustment unit is used to adjust the current height of the sample to be analyzed to a preset working height and to set the accelerating voltage of the scanning electron microscope pre-installed with an X-ray energy dispersive spectrometer.

[0034] The data acquisition unit is used to acquire X-ray energy dispersive spectroscopy data of the adjusted sample to be analyzed using a pre-set scanning electron microscope, and obtain X-ray energy dispersive spectroscopy patterns.

[0035] Optionally, in the above-described quantitative analysis apparatus for elements, the setting unit includes:

[0036] The parameter acquisition unit is used to acquire the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file;

[0037] The setting subunit is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software according to the spectrometer hardware parameters and the setting parameters.

[0038] Optionally, in the above-mentioned quantitative analysis device for elements, the content calculation unit includes:

[0039] An acquisition unit is used to acquire the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample corresponding to the element;

[0040] The correction unit is used to correct the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, so as to obtain the content calculation result of the element.

[0041] Optionally, the above-mentioned quantitative analysis apparatus for elements further includes:

[0042] The display unit is used to visually display the content calculation results corresponding to all the elements.

[0043] This application provides a quantitative elemental analysis method. The method involves acquiring a sample to be analyzed and performing X-ray energy dispersive spectroscopy (XEDS) to obtain an X-ray energy dispersive spectroscopy (XEDS) spectrum. Next, standard samples corresponding to each element in the XEDS spectrum are retrieved from a standard sample library. Then, for each element, XEDS data is acquired on the corresponding standard samples to obtain the target XEDS spectrum. The original text file corresponding to the target XEDS spectrum is then retrieved from the XEDS spectrometer control software. The detector parameters in the offline XEDS analysis software are set using the original text file. Finally, the elemental content is calculated using the pre-configured offline XEDS analysis software, yielding the elemental content calculation results. By pre-setting hardware and experimental parameters, offline elemental content calculation based on XEDS analysis is achieved, enabling XEDS data analysis to be performed on any computer, effectively improving flexibility. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0045] Figure 1 A flowchart illustrating a quantitative analysis method for elements provided in this application embodiment;

[0046] Figure 2 A flowchart illustrating a method for obtaining an X-ray energy dispersive spectrum, provided as another embodiment of this application;

[0047] Figure 3 A schematic flowchart illustrating a detector setting method according to another embodiment of this application;

[0048] Figure 4 A flowchart illustrating a method for calculating element content according to another embodiment of this application;

[0049] Figure 5 A schematic diagram of X-ray energy dispersive spectroscopy data analysis of a sample to be analyzed, provided for another embodiment of this application;

[0050] Figure 6 A schematic diagram of X-ray energy dispersive spectroscopy data analysis of a B standard sample provided in another embodiment of this application;

[0051] Figure 7 A schematic diagram of X-ray energy dispersive spectroscopy data analysis of a Si3N4 standard sample provided in another embodiment of this application;

[0052] Figure 8 This is a schematic diagram of the structure of a quantitative elemental analysis device provided in another embodiment of this application. Detailed Implementation

[0053] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0054] In this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0055] This application provides a method for quantitative analysis of elements, such as... Figure 1 As shown, the specific steps include:

[0056] S101. Obtain the sample to be analyzed and perform X-ray energy dispersive spectroscopy data acquisition on the sample to be analyzed to obtain the X-ray energy dispersive spectrum.

[0057] Here, "sample to be analyzed" refers to the sample for which elemental composition analysis is to be performed.

[0058] Understandably, to determine the elemental composition of a sample, X-ray energy dispersive spectroscopy (EDS) data can be acquired. When the sample is excited by an electron beam, the atoms within it undergo "excitation," ejecting electrons from their inner orbitals. As outer electrons fill the vacancies, they release X-rays of specific energies. Each element releases different X-ray energies, allowing the identification of elements by analyzing these energy peaks. The acquired data is then converted into an EDS spectrum, which displays the relationship between X-ray energy and the number of elements in the sample. The horizontal axis of the spectrum represents energy, showing the energy peaks corresponding to the characteristic X-rays of all contained elements.

[0059] Optionally, in another embodiment of this application, a specific implementation of step S101, which involves acquiring X-ray energy dispersive spectroscopy data of the sample to be analyzed to obtain an X-ray energy dispersive spectrum, is as follows: Figure 2 As shown, it includes the following steps:

[0060] S201. Adjust the current height of the sample to be analyzed to the preset working height, and set the accelerating voltage of the scanning electron microscope with the X-ray energy dispersive spectrometer pre-installed.

[0061] It is understood that this application embodiment has developed a parameter reading module. In this module, relevant experimental parameters of the scanning electron microscope and X-ray energy dispersive spectrometer used in the experiment can be set, including parameters such as window type, elevation angle, optimal working distance, detector area, number of signal processing channels, energy scale, energy null offset, and energy resolution, thereby realizing offline data analysis of X-ray energy dispersive spectra based on these parameters.

[0062] Furthermore, because the sample stage height needs to be adjusted according to the optimal working distance during actual experiments, which is generally in the range of 8 to 12 mm, the sample to be analyzed needs to be adjusted to an appropriate working height before using a scanning electron microscope (SEM) to analyze the sample. Then, a suitable accelerating voltage is selected. Typically, when performing X-ray energy dispersive spectroscopy (EDS), the voltage of the scanning electron microscope is usually selected in the range of 15 to 25 kV. Therefore, the voltage of the scanning electron microscope will be adjusted to the selected accelerating voltage.

[0063] S202. Using a pre-set scanning electron microscope, X-ray energy dispersive spectroscopy data is acquired on the adjusted sample to obtain an X-ray energy dispersive spectrum.

[0064] Understandably, by acquiring X-ray energy dispersive spectroscopy data, all elements in the sample to be analyzed can be identified, so that the relative content of each element can be estimated subsequently.

[0065] S102. Determine the standard sample corresponding to each element in the X-ray energy dispersive spectrum.

[0066] Specifically, standard samples refer to samples with known composition. The elemental composition and content of these samples are known, and single-element or simple binary compounds are usually selected as standard samples. Standard samples can be used for control experiments to help confirm whether the identification and content determination of elements in the sample to be analyzed are accurate.

[0067] Therefore, in order to ensure the accuracy of the analysis results, in this embodiment of the application, it is necessary to first obtain the standard sample corresponding to each element, so as to ensure that the experimental parameters of the scanning electron microscope and X-ray energy dispersive spectrometer used are completely consistent with the data acquisition of the sample to be analyzed.

[0068] S103. For each element, X-ray energy dispersive spectroscopy data are collected from the standard sample corresponding to the element to obtain the target X-ray energy dispersive spectrum of the standard sample.

[0069] Understandably, in order to improve the accuracy and reliability of data acquisition and thus conduct more precise analysis of the elemental composition of the sample to be analyzed, it is also necessary to acquire X-ray energy dispersive spectroscopy data of the standard sample corresponding to the element to obtain the target X-ray energy dispersive spectrum of the standard sample.

[0070] S104. Obtain the original text file corresponding to the target X-ray energy dispersive spectrometer control software.

[0071] Understandably, in order to ensure that the elements in the sample to be analyzed can be accurately captured and identified in the subsequent analysis process, it is necessary to obtain the original text file corresponding to the target X-ray energy dispersive spectrum from the X-ray energy dispersive spectrometer control software in advance, so as to perform subsequent calibration of the analytical instrument.

[0072] S105. Use the original text file to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software.

[0073] Specifically, setting the detector using the original text file of a standard sample can significantly improve data accuracy. Since the composition of the standard sample is known, it can serve as a benchmark, ensuring that the offline X-ray energy dispersive spectroscopy analysis software does not deviate when analyzing unknown samples.

[0074] Therefore, using raw text files to help adjust detector parameters in X-ray energy dispersive spectroscopy (EDS) offline analysis software helps improve the reliability of subsequent analyses. By reading raw text files and setting detector parameters in the X-ray energy dispersive spectroscopy offline analysis software based on the data information within, the software can help ensure optimal performance, thereby achieving accurate identification and quantitative analysis of elements in the sample.

[0075] Optionally, in another embodiment of this application, one specific implementation of step S105 is as follows: Figure 3 As shown, the specific steps include:

[0076] S301. Obtain the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file.

[0077] Understandably, spectrometer hardware parameters can be obtained by the user manually inputting the experimental process. These parameters may include the window type, optimal working distance, and detector area of ​​the X-ray energy spectrometer used.

[0078] The settings can include parameters such as elevation angle, number of signal processing channels, energy scale, energy zero offset, and energy resolution.

[0079] S302. Based on the spectrometer hardware parameters and settings, set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software.

[0080] Specifically, the spectrometer hardware parameters determine the detector's basic performance, such as its detection range and sensitivity, thereby allowing for appropriate adjustments to the detector's physical characteristics.

[0081] Setting parameters helps the detector to be finely adjusted according to experimental needs, ensuring the accuracy of the analyzed data. For example, adjusting the energy scale ensures that the characteristic peaks of elements in the spectrum are within the correct energy range.

[0082] S106. Use the pre-configured X-ray energy dispersive spectroscopy offline analysis software to calculate the elemental content and obtain the corresponding content calculation results.

[0083] Specifically, the k-ratio algorithm in the pre-configured detector is used to calculate the content of each element in the sample to be analyzed, thereby obtaining the element content calculation results based on the characteristic X-ray intensity of the elements.

[0084] Optionally, in another embodiment of this application, one specific implementation of step S106 is as follows: Figure 4 As shown, the specific steps include:

[0085] S401. Obtain the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the corresponding standard sample.

[0086] Specifically, the characteristic X-ray intensity of an element can be obtained from an X-ray energy dispersive spectrum, and the characteristic X-ray intensity of the standard sample corresponding to the element can be obtained from the target X-ray energy dispersive spectrum.

[0087] S402. Using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, the characteristic X-ray intensities of the elements and the characteristic X-ray intensities of the standard samples are corrected to obtain the corresponding content calculation results of the elements.

[0088] Specifically, after obtaining the characteristic X-ray intensity, the concentration and target concentration need to be corrected using a correction factor. The calculation of the correction factor requires the detector parameters (elevation angle, number of signal processing channels, energy scale, energy null offset, energy resolution, etc.) in the X-ray energy dispersive spectroscopy offline analysis software that have been set above.

[0089] Therefore, the formula for calculating the content of the corresponding element is:

[0090]

[0091] in, This is the correction factor calculated using the configured detector. The content (concentration) of element i in the sample to be analyzed. The content (target concentration) of element i in the standard sample. The characteristic X-ray intensity of element i in the sample to be analyzed is... k represents the characteristic X-ray intensity of element i in the standard sample. i This represents the relative proportion of element i in the sample to be analyzed.

[0092] Optionally, after obtaining the calculated content of each element in the sample to be analyzed, in order to flexibly and conveniently view the element content in the sample to be analyzed, another embodiment of this application also provides a method for viewing the element content, specifically including:

[0093] The calculation results of the content of all elements are visualized.

[0094] Specifically, after obtaining the calculated content of each element, the system generates the final elemental composition results based on this data. This process typically includes generating a table listing the content of each element in the sample (usually expressed as a weight percentage or molar percentage), which directly reflects the elemental composition of the sample. Alternatively, to visually demonstrate the sample's composition, the system can also generate an elemental composition graph, typically a bar chart or pie chart, showing the proportion of each element in the sample. In more advanced analyses, the system can also generate two-dimensional or three-dimensional elemental distribution maps, displaying the elemental distribution in different regions of the sample surface. This is particularly useful for multi-element analysis or complex samples.

[0095] It should be noted that the embodiments of this application provide the following specific implementation process for detailed description:

[0096] First, X-ray energy dispersive spectroscopy (EDS) data were acquired using a scanning electron microscope equipped with an X-ray energy dispersive spectrometer (SEM). The sample was a compound containing boron and nitrogen. The X-ray energy dispersive spectroscopy data were acquired at a scanning electron microscope voltage of 20 kV. Figure 5 As shown, the optimal working distance of the X-ray energy dispersive spectrometer used is 10 mm, therefore the working distance is adjusted to 10 mm.

[0097] Secondly, the sample to be analyzed contains boron and nitrogen, but the content of these two elements is unknown. For boron and nitrogen, elemental boron (B) and Si₃N₄ were selected as standard samples, respectively. X-ray energy dispersive spectroscopy (EDS) data were acquired from these two samples using a scanning electron microscope and an X-ray energy dispersive spectroscopy (EDS) instrument. Figure 6 and Figure 7The contents shown are obtained by ensuring that the experimental parameters of the scanning electron microscope and X-ray energy dispersive spectrometer are completely consistent with those in step 1.

[0098] Next, export the raw text files of the X-ray energy dispersive spectra of the sample to be tested and the standard sample. The raw files contain parameters such as elevation angle, number of signal processing channels, energy scale, energy zero offset, and energy resolution.

[0099] Then, the X-ray energy dispersive spectroscopy analysis software is used to read the raw data file of the standard spectrum obtained in the above steps to set the detector. In addition to the parameters that can be read directly, the spectrometer hardware parameters such as the window type, optimal working distance, and detector area of ​​the X-ray energy spectrometer used in the experiment need to be manually entered.

[0100] Finally, the k-ratio algorithm was used to calculate the content of each element in the experimental sample. The parameters preset in the above steps could be directly called within the k-ratio algorithm, thus completing the elemental content calculation based on the characteristic X-ray intensity of the elements. The calculated mass fraction of boron in the sample was 44.14 wt%, and the mass fraction of nitrogen was 55.86 wt%.

[0101] This application provides a quantitative elemental analysis method. The method involves acquiring a sample to be analyzed and performing X-ray energy dispersive spectroscopy (XEDS) to obtain an X-ray energy dispersive spectroscopy (XEDS) spectrum. Next, standard samples corresponding to each element in the XEDS spectrum are retrieved from a standard sample library. Then, for each element, XEDS data is acquired on the corresponding standard samples to obtain the target XEDS spectrum. The original text file corresponding to the target XEDS spectrum is then retrieved from the XEDS spectrometer control software. The detector parameters in the offline XEDS analysis software are set using the original text file. Finally, the elemental content is calculated using the pre-configured offline XEDS analysis software, yielding the elemental content calculation results. By pre-setting hardware and experimental parameters, offline elemental content calculation based on XEDS analysis is achieved, enabling XEDS data analysis to be performed on any computer, effectively improving flexibility.

[0102] Another embodiment of this application provides a quantitative analysis device for elements, such as... Figure 8 As shown, it specifically includes the following units:

[0103] The first acquisition unit 801 is used to acquire the sample to be analyzed and to acquire X-ray energy dispersive spectroscopy data of the sample to be analyzed, so as to obtain an X-ray energy dispersive spectrum.

[0104] The sample determination unit 802 is used to determine the standard sample corresponding to each element in the X-ray energy dispersive spectrum.

[0105] The second acquisition unit 803 is used to acquire X-ray energy dispersive spectroscopy data of the standard sample corresponding to each element, and obtain the target X-ray energy dispersive spectrum of the standard sample.

[0106] The file acquisition unit 804 is used to acquire the original text file corresponding to the target X-ray energy dispersive spectrometer control software.

[0107] Setting unit 805 is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software using a raw text file.

[0108] The content calculation unit 806 is used to calculate the element content of elements using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, and obtain the content calculation results of the corresponding elements.

[0109] Optionally, in another embodiment of this application, a quantitative analysis device for elements is provided, wherein the first acquisition unit 801 includes:

[0110] The adjustment unit is used to adjust the current height of the sample to be analyzed to the preset working height and to set the accelerating voltage of the scanning electron microscope pre-installed with an X-ray energy dispersive spectrometer.

[0111] The data acquisition unit is used to acquire X-ray energy dispersive spectroscopy data of the adjusted sample to be analyzed using a pre-set scanning electron microscope, and obtain X-ray energy dispersive spectroscopy patterns.

[0112] Optionally, in another embodiment of this application, a quantitative analysis device for elements is provided, comprising a unit 805, including:

[0113] The parameter acquisition unit is used to acquire the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file.

[0114] The settings subunit is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software based on the spectrometer hardware parameters and settings parameters.

[0115] Optionally, in another embodiment of this application, a quantitative analysis device for elements includes a content calculation unit 806, comprising:

[0116] The acquisition unit is used to acquire the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the corresponding standard sample.

[0117] The correction unit is used to correct the characteristic X-ray intensities of elements and standard samples using pre-configured X-ray energy dispersive spectroscopy offline analysis software, thereby obtaining the corresponding content calculation results of elements.

[0118] Optionally, another embodiment of this application provides a quantitative analysis device for elements, which further includes:

[0119] The display unit is used to visualize the calculation results of the content of all elements.

[0120] It should be noted that the specific working process of each module provided in the above embodiments of this application can be referred to the corresponding steps in the above method embodiments, and will not be repeated here.

[0121] It should also be noted that the quantitative analysis device for elements provided in this application has the technical effects of any of the above embodiments, and will not be described in detail here.

[0122] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0123] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for quantitative analysis of elements, characterized in that, include: The sample to be analyzed is acquired, and X-ray energy dispersive spectroscopy data is collected on the sample to be analyzed to obtain an X-ray energy dispersive spectrum. Identify the standard sample corresponding to each element in the X-ray energy dispersive spectrum; For each of the elements, X-ray energy dispersive spectroscopy data were acquired from the standard samples corresponding to the element to obtain the target X-ray energy dispersive spectrum of the standard sample. Obtain the original text file corresponding to the target X-ray energy dispersive spectrometer control software; The detector parameters in the X-ray energy dispersive spectroscopy offline analysis software are set using the original text file; The elemental content of the element is calculated using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, and the corresponding content calculation results of the element are obtained.

2. The method according to claim 1, characterized in that, The process of acquiring X-ray energy dispersive spectroscopy data from the sample to be analyzed to obtain an X-ray energy dispersive spectrum includes: The current height of the sample to be analyzed is adjusted to the preset working height, and the accelerating voltage of the scanning electron microscope with the X-ray energy dispersive spectrometer pre-installed is set. X-ray energy dispersive spectroscopy data were acquired on the adjusted sample to be analyzed using a pre-configured scanning electron microscope to obtain the X-ray energy dispersive spectrum.

3. The method according to claim 1, characterized in that, The step of setting the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software using the original text file includes: Obtain the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file; Based on the spectrometer hardware parameters and the setting parameters, the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software are set.

4. The method according to claim 1, characterized in that, The step of using the pre-configured X-ray energy dispersive spectroscopy offline analysis software to calculate the elemental content of the element, and obtaining the corresponding content calculation results, includes: Obtain the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample corresponding to the element; The characteristic X-ray intensities of the element and the characteristic X-ray intensities of the standard sample are corrected using the pre-configured X-ray energy dispersive spectroscopy offline analysis software to obtain the content calculation results of the element.

5. The method according to claim 1, characterized in that, After calculating the elemental content of the element using the pre-configured X-ray energy dispersive spectroscopy offline analysis software and obtaining the corresponding content calculation result, the method further includes: The calculation results of the content of all the elements are visualized.

6. A quantitative analysis device for an element, characterized in that, include: The first acquisition unit is used to acquire the sample to be analyzed and to acquire X-ray energy dispersive spectroscopy data of the sample to be analyzed to obtain an X-ray energy dispersive spectroscopy pattern. The sample determination unit is used to determine the standard sample corresponding to each element in the X-ray energy dispersive spectrum. The second acquisition unit is used to acquire X-ray energy dispersive spectroscopy data of the standard sample corresponding to each element, and obtain the target X-ray energy dispersive spectrum of the standard sample. The file acquisition unit is used to acquire the original text file corresponding to the target X-ray energy dispersive spectrometer from the X-ray energy dispersive spectrometer control software; The setting unit is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software using the original text file; The content calculation unit is used to calculate the element content of the element using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, and obtain the content calculation result corresponding to the element.

7. The apparatus according to claim 6, characterized in that, The first acquisition unit includes: The adjustment unit is used to adjust the current height of the sample to be analyzed to a preset working height and to set the accelerating voltage of the scanning electron microscope pre-installed with an X-ray energy dispersive spectrometer. The data acquisition unit is used to acquire X-ray energy dispersive spectroscopy data of the adjusted sample to be analyzed using a pre-set scanning electron microscope, and obtain X-ray energy dispersive spectroscopy patterns.

8. The apparatus according to claim 6, characterized in that, The setting unit includes: The parameter acquisition unit is used to acquire the spectrometer hardware parameters of the X-ray energy spectrometer and read the setting parameters from the original text file; The setting subunit is used to set the detector parameters in the X-ray energy dispersive spectroscopy offline analysis software according to the spectrometer hardware parameters and the setting parameters.

9. The apparatus according to claim 6, characterized in that, The content calculation unit includes: An acquisition unit is used to acquire the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample corresponding to the element; The correction unit is used to correct the characteristic X-ray intensity of the element and the characteristic X-ray intensity of the standard sample using the pre-configured X-ray energy dispersive spectroscopy offline analysis software, so as to obtain the content calculation result of the element.

10. The apparatus according to claim 6, characterized in that, Also includes: The display unit is used to visually display the content calculation results corresponding to all the elements.

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