Beam splitting phase shift light path system

Abstract

The invention discloses a beam splitting phase shift optical path system which comprises at least one waveguide structure. The waveguide structure includes a coupling-in section, a coupling-out section, and at least one group of beam-splitting phase-shifting sections located between the coupling-in section and the coupling-out section. The beam-splitting phase-shifting branch part comprises at least two stages of beam-splitting phase-shifting modules which are arranged along a first direction, and each stage of beam-splitting phase-shifting module comprises at least one beam-splitting unit and at least one reflecting unit; the at least two stages of beam splitting and phase shifting modules comprise a first-stage beam splitting and phase shifting module and an ith-stage beam splitting and phase shifting module, the first-stage beam splitting and phase shifting module is located on a propagation path of an incident beam, and the ith-stage beam splitting and phase shifting module is located on an emergent light path of the (i-1) th-stage beam splitting and phase shifting module. Wherein i > = 2 and i is an integer. Light beams are expanded through the multi-stage beam splitting and phase shifting module, the light beam expansion scheme is simple and efficient, the problem that in the prior art, in optical waveguide light beam expansion, the cost of an optical machine is high is solved, and small size and high optical efficiency are achieved.

Description

Technical Field

[0001] The present invention relates to the field of optical system technology, and in particular to a beam-splitting phase-shifting optical path system. Background Technology

[0002] Augmented Reality (AR) technology integrates virtual information with real-world scenes through optical display systems to achieve human-computer interaction. It is primarily used in near-eye displays (NED) and head-up displays (HUD). Current common AR display solutions include freeform prisms, off-axis mirrors, and waveguide technology. Among these, freeform prisms are limited by optical path length, making ultra-thin designs difficult to achieve; off-axis mirrors face challenges in correcting asymmetric aberrations; and waveguide technology, with its compact structure and near-glasses form factor, has become the mainstream solution. It achieves directional beam extension through three stages: coupling in, total internal reflection (TIR) ​​transmission, and coupling out. Figure 1 As shown, the specific process is as follows:

[0003] A light beam emitted from a microdisplay (such as LCD / Micro-OLED / Micro-LED / LCoS / DLP / LBS, etc.) is coupled into a waveguide via coupling elements (such as prisms / mirrors / diffraction gratings, etc.). The beam propagates within the waveguide via total internal reflection (TIR). It then exits through coupling elements (such as surface relief gratings / volume holographic gratings / beam-splitters, etc.) and enters the human eye. Simultaneously, light from the real world also enters the eye via optical see-through (OST), achieving a fusion of virtual and real worlds. AR technology has significant application value in entertainment, social networking, navigation, healthcare, and military fields.

[0004] Existing waveguide pupil expansion schemes are divided into one-dimensional pupil expansion waveguides and two-dimensional pupil expansion waveguides, such as... Figure 2 and Figure 3 As shown, both have the following bottlenecks: One-dimensional pupil-expanding waveguides: large optomechanical volume (volume > 1cc) and high weight (> 10g), leading to discomfort when worn and limitations in industrial design. While two-dimensional pupil-expanding waveguides can reduce volume, they also have drawbacks. For example, in geometric waveguides: multiple heterogeneous reflective films need to be deposited in the transition region (reflectivity gradient change), the film system design is complex and the production yield is < 60%; in diffraction waveguides: the diffraction efficiency in the transition region is low (< 50%) and there is zero-order optical loss (> 30%), requiring optomechanical brightness ≥ 1,000,000 nits, forcing the use of high-cost Micro LED or low-image-quality LCoS / LBS solutions. Existing beam-expanding technologies cannot simultaneously meet the requirements of high optical efficiency (> 25%), small volume (optomechanical ≤ 0.5cc), and low cost.

[0005] Therefore, there is an urgent need to provide an augmented reality display solution that has good display effect, small size, light weight and low cost to meet the needs of AR display. Summary of the Invention

[0006] Based on this, the present invention provides a beam splitting phase-shifting optical path system to solve the problems of high optomechanical costs in optical waveguide beam extension in the prior art, while achieving small size and high optical efficiency.

[0007] This application provides a beam-splitting phase-shifting optical path system, including at least one waveguide structure;

[0008] The waveguide structure includes an input section, an output section, and at least one beam-shifting section located between the input section and the output section;

[0009] The beam splitting phase shifting section includes at least two levels of beam splitting phase shifting modules arranged along a first direction, and each level of the beam splitting phase shifting module includes at least one beam splitting unit and at least one reflection unit;

[0010] The at least two-stage beam splitting phase shifting module includes a first-stage beam splitting phase shifting module and an i-th-stage beam splitting phase shifting module. The first-stage beam splitting phase shifting module is located on the propagation path of the incident beam, and the i-th-stage beam splitting phase shifting module is located on the outgoing light path of the (i-1)-th-stage beam splitting phase shifting module; where i ≥ 2 and i is an integer.

[0011] Optionally, the beam-splitting phase-shifting section includes n beam-splitting units and m reflection units;

[0012] The emitted beam from the beam-splitting phase-shifting section includes 2 (n-1) A beam of light is emitted.

[0013] Where n≥3 and n is an integer, and 2≤m≤n and m is an integer.

[0014] Optionally, 2 (n-1) The energy of any two of the emitted beams is the same.

[0015] The beam splitting unit includes a transmittance-reflection beam splitting unit, and any two of the n beam splitting units have the same reflectivity; or, the beam splitting unit includes a polarization beam splitting unit.

[0016] Any two of the m reflective elements have the same reflectivity.

[0017] Optionally, the first-stage beam splitting phase shifting module includes at least one first beam splitting unit and one first reflection unit; the second-stage beam splitting phase shifting module includes at least one second beam splitting unit and at least one second reflection unit.

[0018] The number of the first beam splitter unit and the second beam splitter unit are different, and / or the number of the first reflection unit and the second reflection unit are different.

[0019] Optionally, the number of the first beam splitting units is less than the number of the second beam splitting units, and the number of the first reflection units is less than the number of the second reflection units.

[0020] Optionally, the first-stage beam splitting phase shifting module includes a first transmission-reflection beam splitting unit;

[0021] The second-stage beam splitting and phase shifting module includes a second A-type transmission-reflection beam splitting unit, a second B-type transmission-reflection beam splitting unit, a second A-type reflection unit, and a second B-type reflection unit;

[0022] The first beam splitter unit is located on the propagation path of the incident beam, and the first reflection unit is located on the propagation path of the reflected beam of the first beam splitter unit.

[0023] The second A-type beam splitter is located on the propagation path of the transmitted beam of the first A-type beam splitter, and the second A-type reflection unit is located on the propagation path of the reflected beam of the second A-type beam splitter.

[0024] The second B-type beam splitter is located on the propagation path of the reflected beam of the first reflector, and the second B-type reflector is located on the propagation path of the reflected beam of the second B-type beam splitter.

[0025] Optionally, the first-stage beam splitting phase shifting module includes a first transmission-reflection beam splitting unit;

[0026] The second-stage beam splitting and phase shifting module includes a second A-type transmission-reflection beam splitting unit, a second B-type transmission-reflection beam splitting unit, a second A-type reflection unit, and a second B-type reflection unit;

[0027] The first transmission-reflection beam splitter is located on the propagation path of the incident beam, and the first reflection unit is located on the propagation path of the transmitted beam of the first transmission-reflection beam splitter.

[0028] The second A-type beam splitter is located on the propagation path of the reflected beam of the first A-type beam splitter, and the second A-type reflection unit is located on the propagation path of the reflected beam of the second A-type beam splitter.

[0029] The second B-type beam splitter is located on the propagation path of the reflected beam of the first reflector, and the second B-type reflector is located on the propagation path of the reflected beam of the second B-type beam splitter.

[0030] Optionally, the first-stage beam splitting phase shifting module includes a first polarization beam splitting unit;

[0031] The second-stage beam splitting and phase shifting module includes a second polarization A beam splitting unit, a second polarization B beam splitting unit, a second A reflection unit, and a second B reflection unit;

[0032] The beam splitting phase shifting section also includes a 1 / 4 waveplate located in the optical path between the first-stage beam splitting phase shifting module and the second-stage beam splitting phase shifting module;

[0033] The first polarization beam splitter is located on the propagation path of the incident beam, and the first reflection unit is located on the propagation path of the first polarized ray after passing through the first polarization beam splitter; the first polarized ray forms first circularly polarized light after passing through the quarter-wave plate; the second polarized ray after passing through the first polarization beam splitter forms second circularly polarized light after passing through the quarter-wave plate.

[0034] The second polarization beam splitter unit A is located on the propagation path of the second circularly polarized light. After adjusting the polarization of the second circularly polarized light, it forms a third polarized beam that is emitted and a fourth polarized beam that is reflected by the second polarization beam unit A and then emitted.

[0035] The second B polarization beam splitter is located on the propagation path of the first circularly polarized light. After adjusting the polarization of the first circularly polarized light, it forms a fifth polarized beam that is emitted and a sixth polarized beam that is reflected by the second B reflection unit and then emitted.

[0036] Optionally, the number of the first beam splitting units is greater than the number of the second beam splitting units, and the number of the first reflection units is equal to the number of the second reflection units.

[0037] Optionally, the first-stage beam splitting phase shifting module includes a first A-type transmission-reverse beam splitting unit and a first B-type transmission-reverse beam splitting unit;

[0038] The second-stage beam splitting phase shifting module includes a second transmission-reflection beam splitting unit;

[0039] The first A-type beam splitter is located on the propagation path of the incident beam, the first B-type beam splitter is located on the propagation path of the reflected beam of the first A-type beam splitter, and the first reflection unit is located on the propagation path of the transmitted beam of the first B-type beam splitter.

[0040] The second transmission-reflection beam splitter is located on the propagation path of the transmitted beam of the first transmission-reflection beam splitter, and the second reflection unit is located on the propagation path of the reflected beam of the second transmission-reflection beam splitter.

[0041] Optionally, the first-stage beam splitting phase shifting module includes a first A-type transmission-reverse beam splitting unit and a first B-type transmission-reverse beam splitting unit;

[0042] The second-stage beam splitting phase shifting module includes a second transmission-reflection beam splitting unit;

[0043] The first A-type beam splitter is located on the propagation path of the incident beam, the first B-type beam splitter is located on the propagation path of the transmitted beam of the first A-type beam splitter, and the first reflection unit is located on the propagation path of the transmitted beam of the first B-type beam splitter.

[0044] The second beam splitter is located on the propagation path of the reflected beam of the first beam splitter, and the second reflection unit is located on the propagation path of the reflected beam of the second beam splitter.

[0045] Optionally, the second reflection unit is coplanar with the first A-type transmission-reflection-splitting unit, the first B-type transmission-reflection-splitting unit, or the first reflection unit.

[0046] Optionally, the coupling-in portion, the beam splitting phase shift portion, and the coupling-out portion are arranged along the first direction.

[0047] Optionally, the beam-splitting units and the reflection units in the same level of the beam-splitting phase-shifting module are arranged along a second direction, which intersects with the first direction;

[0048] Along the first direction, the coupling portion is located on one side of the beam-splitting phase-shifting portion;

[0049] Along the second direction, the coupling portion is located on the side of the beam-splitting unit away from the reflection unit in the same level of the beam-splitting phase-shifting module.

[0050] Optionally, the first-stage beam splitting phase shifting module includes a first transmission-reflection beam splitting unit and a first reflection unit; the second-stage beam splitting phase shifting module includes a second transmission-reflection beam splitting unit and a second reflection unit; and the third-stage beam splitting phase shifting module includes a third transmission-reflection beam splitting unit and a third reflection unit.

[0051] The first beam splitter unit is located on the propagation path of the incident beam, and the first reflection unit is located on the propagation path of the reflected beam or the transmitted beam of the first beam splitter unit.

[0052] The second transmission-reflection beam splitter is located on the propagation path of the transmitted or reflected beam of the first transmission-reflection beam splitter, and the second reflection unit is located on the propagation path of the reflected beam of the second transmission-reflection beam splitter.

[0053] The third beam splitter is located on the propagation path of the reflected beam of the first reflector, and the third reflector is located on the propagation path of the reflected beam of the third beam splitter.

[0054] Optionally, the first-stage beam splitting phase shifting module includes a first polarization beam splitting unit and a first reflection unit; the second-stage beam splitting phase shifting module includes a second polarization beam splitting unit and a second reflection unit; and the third-stage beam splitting phase shifting module includes a third polarization beam splitting unit and a third reflection unit.

[0055] The beam splitting phase shifting section also includes a 1 / 4 waveplate located in the optical path between the first-stage beam splitting phase shifting module and the second-stage beam splitting phase shifting module;

[0056] The first polarization beam splitter is located on the propagation path of the incident beam, and the first reflection unit is located on the propagation path of the first polarized ray after passing through the first polarization beam splitter; the first polarized ray forms a first circularly polarized light after passing through the quarter-wave plate, and the second polarized ray after passing through the first polarization beam splitter forms a second circularly polarized light after passing through the quarter-wave plate.

[0057] The second polarization beam splitter is located on the propagation path of the second circularly polarized light. After the polarization of the second circularly polarized light is adjusted, a third polarized beam is formed and emitted, and a fourth polarized beam is formed and emitted after being reflected by the second reflection unit.

[0058] The third polarization beam splitter is located on the propagation path of the first circularly polarized light. After adjusting the polarization of the first circularly polarized light, it forms a fifth polarized beam that is emitted and a sixth polarized beam that is reflected by the third reflection unit and then emitted.

[0059] Optionally, the waveguide structure includes a first beam-splitting phase-shifting section and a second beam-splitting phase-shifting section;

[0060] The beam-splitting unit and the reflection unit in the same level beam-splitting phase-shifting module are arranged along the second direction, and the first beam-splitting phase-shifting portion and the second beam-splitting phase-shifting portion are arranged along the second direction.

[0061] Optionally, the first beam phase shift section and the second beam phase shift section are symmetrically arranged about the boundary line between the first beam phase shift section and the second beam phase shift section.

[0062] Optionally, the angle between the beam splitting unit and the incident beam is 20° to 70°, and the angle between the reflecting unit and the incident beam is 20° to 70°.

[0063] In summary, this application discloses a beam-splitting phase-shifting optical path system, including at least one waveguide structure. The waveguide structure includes an input section, an output section, and at least one set of beam-splitting phase-shifting sections located between the input and output sections. Each beam-splitting phase-shifting section includes at least two levels of beam-splitting phase-shifting modules arranged along a first direction. Each level of beam-splitting phase-shifting module includes at least one beam-splitting unit and at least one reflection unit. The at least two levels of beam-splitting phase-shifting modules include a first-level beam-splitting phase-shifting module and an i-th-level beam-splitting phase-shifting module. The first-level beam-splitting phase-shifting module is located on the propagation path of the incident beam, and the i-th-level beam-splitting phase-shifting module is located on the output optical path of the (i-1)-th-level beam-splitting phase-shifting module. Here, i ≥ 2 and i is an integer. This application expands the beam using multi-level beam-splitting phase-shifting modules. The beam expansion scheme is simple and efficient, solving the problems of high optomechanical costs in existing waveguide beam expansion technologies, and achieving small size and high optical efficiency. Attached Figure Description

[0064] Figure 1 This is a schematic diagram of the structure of an optical waveguide device provided by existing technology;

[0065] Figure 2 This is a schematic diagram of a one-dimensional pupil-expanding waveguide structure provided by existing technology;

[0066] Figure 3 This is a schematic diagram of a two-dimensional pupil-expanding waveguide structure provided by existing technology;

[0067] Figure 4 This is a schematic diagram of the structure of a beam-splitting phase-shifting optical path system provided by the present invention;

[0068] Figure 5 This is a schematic diagram of the structure of a beam-splitting phase-shifting section provided by the present invention;

[0069] Figure 6 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention;

[0070] Figure 7 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0071] Figure 8 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0072] Figure 9 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0073] Figure 10 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0074] Figure 11 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0075] Figure 12 These are schematic diagrams of the structures of three other beam-splitting phase-shifting components provided by this invention;

[0076] Figure 13 These are schematic diagrams of the structures of three other beam-splitting phase-shifting components provided by this invention;

[0077] Figure 14 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention;

[0078] Figure 15 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention;

[0079] Figure 16 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0080] Figure 17 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0081] Figure 18 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention;

[0082] Figure 19 This is a schematic diagram of another beam-splitting phase-shifting section provided by the present invention.

[0083] Explanation of reference numerals in the attached figures:

[0084] 1. Waveguide structure; 2. Display structure; 3. Optomechanical structure;

[0085] 10. Coupled-in section; 20. Coupled-out section; 30. Beam splitting phase shift section;

[0086] 30a. First beam phase shift section; 30b. Second beam phase shift section;

[0087] 301. First-stage beam splitting phase shifting module; 302. Second-stage beam splitting phase shifting module; 303. Third-stage beam splitting phase shifting module;

[0088] 304, 1 / 4 wave plate;

[0089] B / S, beam splitter unit;

[0090] T / R1, First Transmission-Reflection Beam Splitter; T / R2, Second Transmission-Reflection Beam Splitter (Type A); T / R3, Second Transmission-Reflection Beam Splitter (Type B);

[0091] T / R4, First Transmission-Reflection Beam Splitter Unit A; T / R5, First Transmission-Reflection Beam Splitter Unit B; T / R6, Second Transmission-Reflection Beam Splitter Unit B;

[0092] T / R7, third transflective beam splitter unit;

[0093] PBS1, First polarization beam splitter unit; PBS2, Second polarization A beam splitter unit; PBS3, Second polarization B beam splitter unit;

[0094] PBS-2, the second polarization beam splitter; PBS-3, the third polarization beam splitter;

[0095] M, Reflection unit; M1, First reflection unit; T / M2, Second A reflection unit; T / M3, Second B reflection unit;

[0096] M2, the second reflective unit; M3, the third reflective unit. Detailed Implementation

[0097] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the present application and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the present application are shown in the drawings, not the entire structure. Various modifications and variations can be made to the present application without departing from its spirit or scope, which will be apparent to those skilled in the art. Therefore, the present application is intended to cover modifications and variations of the present application that fall within the scope of the technical solutions claimed in the corresponding claims and their equivalents. It should be noted that the implementation methods provided in the embodiments of the present application can be combined with each other without contradiction.

[0098] Figure 4 This is a schematic diagram of the structure of a beam-splitting phase-shifting optical path system provided by the present invention. Figure 5 This is a schematic diagram of the structure of a beam-splitting phase-shifting section provided by the present invention, for reference. Figures 4-5 As shown, this application provides a beam-splitting phase-shifting optical path system, which includes at least one waveguide structure 1. Its function is to controllably "transmit" and "replicate" the display light emitted by a micro-projection engine (such as Micro-LED, LCoS, etc.) to the user's eye, thereby forming a bright, wide-view virtual image while ensuring the user can clearly see the real world through the waveguide structure 1. The waveguide structure 1 is made of materials including, but not limited to, high-transmittance, high-refractive-index optical glass and polymer materials, such as glass substrates, polycarbonate, cyclic olefin copolymers / polymers, etc., which possess characteristics such as low cost, stable physicochemical properties, and excellent optical performance. This application does not limit the materials used.

[0099] The waveguide structure 1 includes an input section 10, an output section 20, and at least one beam-splitting phase-shifting section 30 located between the input section 10 and the output section 20. The input section 10 serves as the "entry point" for the incident beam L entering the waveguide structure 1, and is used to efficiently couple the collimated beam from the micro-projection engine into the interior of the waveguide structure 1. The area of ​​the input section 10 matches the light spot projected onto the surface of the waveguide structure 1 by the pupil of the optomechanical system, and this portion of the beam is transmitted to the beam-splitting phase-shifting section 30 by total internal reflection.

[0100] The beam-splitting phase-shifting section 30 includes at least two stages of beam-splitting phase-shifting modules 01 arranged along a first direction. Each stage of the beam-splitting phase-shifting module 01 includes at least one beam-splitting unit B / S and at least one reflecting unit M. The beam-splitting unit B / S can be a beam splitter (B / S), and the reflecting unit M can be a mirror (M). Based on the principle of beam-splitting phase shifting, this invention expands a single incident beam L into multiple beams of equal-efficiency outgoing light.

[0101] The at least two-stage beam splitting phase shifting module 01 includes a first-stage beam splitting phase shifting module 301 and an i-th-stage beam splitting phase shifting module 30i. The first-stage beam splitting phase shifting module 301 is located on the propagation path of the incident beam, and the i-th-stage beam splitting phase shifting module 30i is located on the outgoing light path of the (i-1)-th-stage beam splitting phase shifting module 30(i-1). Where i ≥ 2 and i is an integer.

[0102] like Figure 4 and Figure 5 As shown, taking i=2, a beam splitting phase shifting section 30 includes two-stage beam splitting phase shifting modules 01, namely the first-stage beam splitting phase shifting module 301 and the second-stage beam splitting phase shifting module 302. Each stage beam splitting phase shifting module 01 includes a beam splitting unit B / S and a reflection unit M. After the incident beam L (total energy E) enters the beam splitting phase shifting section 30, it is split along the following path:

[0103] Path 1: The incident beam L is transmitted through the beam splitting unit B / S in the first-stage beam splitting phase shift module 301. The transmitted light is then transmitted through the beam splitting unit B / S in the second-stage beam splitting phase shift module 302 and output with energy E1.

[0104] Path 2: The incident beam L is transmitted through the beam splitting unit B / S in the first-stage beam splitting phase shifting module 301. The transmitted light is reflected by the beam splitting unit B / S in the second-stage beam splitting phase shifting module 302, and then reflected by the reflection unit M in the second-stage beam splitting phase shifting module 302 before being output with energy E2.

[0105] Path 3: The incident beam L is reflected by the beam splitting unit B / S in the first-stage beam splitting phase shifting module 301. The reflected light is reflected again by the reflection unit M in the first-stage beam splitting phase shifting module 301 and then output with energy E3.

[0106] Incident beam L in the transverse direction ( Figure 4 and Figure 5 The beam is replicated and expanded in the Y direction to achieve phase shift. This expanded and multiplied beam is transmitted through total internal reflection within the waveguide structure 1 to the coupling section 20. The coupling section 20 is the "exit" and "final shaper" of the total internal reflection transmitted light in the waveguide structure 1. Its function is to receive the expanded beam transmitted from the beam-splitting phase-shifting section 30 and finally couple it out of the waveguide structure 1, ultimately transmitting it to the user's eye. The area of ​​the coupling section 20 can be reasonably set according to the size of the user's viewing area. The phase-shifted output beam expands the user's eye movement range (Eyebox), which means that the user's eyes do not need to be precisely aligned with a small exit. When moving within a certain range laterally (i.e., within the Eyebox), they can receive an image with sufficient brightness, thus greatly improving wearing comfort and experience.

[0107] In some embodiments, the energy ratio of E1, E2, and E3 can be adjusted by the splitting ratio of the beam splitting unit B / S, such as E1=E2=E3=33.3%E, which is 33.3% of the incident beam luminous efficacy. Here, the luminous efficacy is the value under ideal conditions without additional loss.

[0108] The beam-splitting phase-shifting optical path system provided in this embodiment can achieve efficient multi-beam expansion and effectively reduce production costs by reasonably setting the number of multi-stage beam-splitting phase-shifting modules and the number of beam-splitting units and reflection units in each stage of the beam-splitting phase-shifting module, combined with low-cost beam-splitting units and reflection units.

[0109] It should be noted that, Figure 4 Only two beam-shifting sections 30 are shown in the illustration. The waveguide structure 1 provided in this application embodiment can have multiple such beam-shifting sections 30. Each section can be responsible for processing light of the same color or different colors (such as red, green, and blue), or light from different angles, thereby combining them into a complete color image and a virtual object with a three-dimensional feel. These sections will not be shown one by one in this application embodiment.

[0110] Figure 6 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention. Figure 7 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, combined with... Figures 6-7 As shown, the beam splitting phase shifting section 30 includes n beam splitting units B / S and m reflecting units M. The emitted beam of the beam splitting phase shifting section 30 includes 2 (n-1) The emitted beam; where n ≥ 3 and n is an integer, 2 ≤ m ≤ n and m is an integer. In this embodiment, when the beam splitting phase shifting section 30 includes at least two stages of beam splitting phase shifting modules 01, the number of beam splitting units B / S is greater than or equal to the number of reflecting units M, and the expanded emitted beam quantity 2(n-1) It is exponentially related to the number of beam splitting units (B / S).

[0111] For example, refer to Figure 6 and Figure 7 The beam splitting phase shifting section 30 includes two-stage beam splitting phase shifting modules 01. Each stage of the beam splitting phase shifting module 01 is equipped with one or two beam splitting units (B / S). The beam splitting phase shifting section 30 includes a total of three beam splitting units and three reflection units. The emitted beam is four beams, so a single beam splitting phase shifting section 30 forms a four-fold beam expansion.

[0112] Based on the above embodiments, refer to Figure 6 and Figure 7 ,2 (n-1) Any two outgoing beams have the same energy. The beam splitting unit includes a transmission-reflection beam splitting unit, and any two beam splitting units among the n units have the same reflectivity. For example, the transmission-reflection beam splitting unit can be a beam splitter with a fixed splitting ratio of transmittance T and reflectivity R, such as 50 / 50, 70 / 30, 90 / 10, etc., where 50 / 50 means T:R = 50%:50%. For ease of distinction, the beam splitting unit in the first-stage beam splitting phase shift module 301 is labeled as the first beam splitting unit B / S1, and the reflection unit is labeled as the first reflection unit M1. The two beam splitting units in the second-stage beam splitting phase shift module 302 are labeled as the second beam splitting unit B / S2 and the third beam splitting unit B / S3, and the second reflection unit M2 and the third reflection unit M3, respectively. The incident beam L (total energy E) is split along the following path, satisfying the beam splitting transmission process shown in Table 1.

[0113] Table 1 Beam transmission process

[0114]

[0115] For example, the splitting ratio of all beam-splitting units in the beam-splitting phase-shifting section 30 is 50 / 50, that is, the reflectivity of all beam-splitting units is 50%; the reflectivity of all reflection units is 100%, and the output energy satisfies: E1=E2=E3=E4=1 / 4E.

[0116] This embodiment uses low-cost, standardized reflective film-based beam-splitting and reflection units to construct the optical path beam-splitting system. Compared to existing technologies, it achieves efficient multi-beam spreading without the need for depositing multiple layers of heterogeneous reflective films, effectively reducing costs and yield. Uniform beam spreading is achieved, and these beams are ultimately guided to the coupling distribution and then coupled out.

[0117] Furthermore, the core advantage of this optical path beam splitting architecture lies in:

[0118] First, the beam splitter and reflector units are standardized, requiring only two standard film systems (such as 50% beam splitter film + 100% reflector film), avoiding the need for customized multi-reflectivity in existing technologies, thereby reducing manufacturing costs.

[0119] Second, the beam extension capability is doubled, increasing the amount of emitted beam. The beam spread is exponentially related to the number of beam splitting units (B / S). Each additional level of beam splitting and reflecting units increases the beam spread factor by 2 times, achieving a 2i-fold spread (where i is the number of levels in the beam splitting phase shifting module).

[0120] Third, it has excellent process compatibility.

[0121] Based on the above embodiments, refer to Figures 4-7 The beam-splitting unit may further include a polarization beam-splitting unit. For example, the polarization beam-splitting unit may be a linear polarizer. That is, at least one stage of the beam-splitting phase-shifting module in the embodiments of the present invention can adopt a combination of a polarization beam-splitting unit and a reflection unit. This can also ensure that the beam-splitting phase-shifting optical path system has the core advantages of simple beam-splitting and reflection unit settings, multiplied beam extension capability, and excellent process compatibility.

[0122] Based on the above embodiments, continue to refer to Figure 7 The first-stage beam-splitting phase-shifting module 301 includes at least one first beam-splitting unit B / S1 and one first reflection unit M1; the second-stage beam-splitting phase-shifting module 302 includes at least one second beam-splitting unit B / S2 and at least one second reflection unit M2. The number of first beam-splitting units B / S1 and second beam-splitting units B / S2 may differ, and / or the number of first reflection units M1 and second reflection units M2 may differ. When the beam-splitting phase-shifting section 30 includes two stages of beam-splitting phase-shifting modules 01, by making the number of beam-splitting units and / or reflection units differ between the two stages, it is beneficial to construct diverse beam-splitting phase-shifting configurations, thereby flexibly meeting different beam-splitting requirements.

[0123] It should be noted that, for the sake of convenience in describing the optical path, this application includes... Figure 7 In the second-stage beam splitting phase shifting module 302: the first second beam splitting unit is labeled as second beam splitting unit B / S2, and the second second beam splitting unit is labeled as third beam splitting unit B / S3; the first second reflection unit is labeled as second reflection unit M2, and the second second reflection unit is labeled as third reflection unit M3.

[0124] As a feasible implementation, the number of optical elements in the first-stage beam splitting phase shifting module 301 can be less than the number of optical elements in the second-stage beam splitting phase shifting module 302. For example, the number of first beam splitting units is less than the number of second beam splitting units, and the number of first reflection units is less than the number of second reflection units.

[0125] For details, please refer to [link / reference]. Figures 6-8 The first-stage beam-splitting phase-shifting module 301 includes a first beam-splitting unit B / S1 and a first reflection unit M1; the second-stage beam-splitting phase-shifting module 302 includes two beam-splitting units and two reflection units, namely a second beam-splitting unit B / S2, a third beam-splitting unit B / S3, a second reflection unit M2, and a third reflection unit M3. With this configuration, the number of optical elements in the first-stage beam-splitting phase-shifting module 301 is less than that in the second-stage beam-splitting phase-shifting module 302, thus enabling effective beam expansion through two-stage beam splitting.

[0126] Figure 8 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, please refer to... Figure 8 The first-stage beam-splitting phase-shifting module 301 includes a first transmission-reflection beam-splitting unit T / R1 and a first reflection unit M1. The second-stage beam-splitting phase-shifting module 302 includes a second A transmission-reflection beam-splitting unit T / R2, a second B transmission-reflection beam-splitting unit T / R3, a second A reflection unit T / M2, and a second B reflection unit T / M3. Exemplarily, all transmission-reflection beam-splitting units use beam-splitting mirrors with a transmission-to-reflection ratio of 50 / 50, i.e., 50% transmittance and 50% reflectance. All reflection units use total reflection mirrors, i.e., 0% transmittance and 100% reflectance.

[0127] Specifically, the first transmission-reflection beam splitter T / R1 is located on the propagation path of the incident beam L, and is used to split the incident beam L into two beams: a transmitted beam and a reflected beam. The first reflection unit M1 is located on the propagation path of the reflected beam of the first transmission-reflection beam splitter T / R1, and is used to reflect this beam. The second transmission-reflection beam splitter T / R2 is located on the propagation path of the transmitted beam of the first transmission-reflection beam splitter T / R1, and further splits the transmitted beam, outputting a portion of the beam with energy E1. The second reflection unit T / M2 is located on the propagation path of the reflected beam of the second transmission-reflection beam splitter T / R2, reflecting and outputting the corresponding beam with energy E2. The second transmission-reflection beam splitter T / R3 is located on the propagation path of the reflected beam of the first reflection unit M1, and performs a third split on this beam, transmitting and outputting the corresponding beam with energy E3. The second B-type reflector unit T / M3 is located on the propagation path of the reflected beam of the second B-type transmissive-reflective beam splitter unit T / R3, reflecting and outputting the corresponding beam with energy E4. Through the above beam splitting structure, the optical path system can achieve two-stage beam splitting and phase control of the incident beam.

[0128] Figure 9 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, refer to... Figure 9The first-stage beam-splitting phase-shifting module 301 includes a first transmission-reflection beam-splitting unit T / R1 and a first reflection unit M1. The second-stage beam-splitting phase-shifting module 302 includes a second A transmission-reflection beam-splitting unit T / R2, a second B transmission-reflection beam-splitting unit T / R3, a second A reflection unit T / M2, and a second B reflection unit T / M3. Exemplarily, all transmission-reflection beam-splitting units use beam-splitting mirrors with a transmission-to-reflection ratio of 50 / 50, i.e., 50% transmittance and 50% reflectance. All reflection units use total reflection mirrors, i.e., 0% transmittance and 100% reflectance.

[0129] Specifically, this application can further adjust the incident direction of the incident beam L, and set the first transmission-reflection beam splitting unit T / R1 on the propagation path of the incident beam L to split the incident beam into two beams, one transmitted and one reflected. The first reflection unit M1 is located on the propagation path of the transmitted beam of the first transmission-reflection beam splitting unit T / R1 to reflect the beam. The second transmission-reflection beam splitting unit T / R2 is located on the propagation path of the reflected beam of the first transmission-reflection beam splitting unit T / R1, and splits the transmitted beam again, outputting a portion of the beam with energy E1. The second reflection unit T / M2 is located on the propagation path of the reflected beam of the second transmission-reflection beam splitting unit T / R2, reflecting and outputting the corresponding beam with energy E2. The second transmission-reflection beam splitting unit T / R3 is located on the propagation path of the reflected beam of the first reflection unit M1, and performs a third split on the beam, transmitting and outputting the corresponding beam with energy E3. The second B-type reflector unit T / M3 is located on the propagation path of the reflected beam of the second B-type transmissive-reflective beam splitter unit T / R3, reflecting and outputting the corresponding beam with energy E4. Through the aforementioned beam splitting structure, this application reasonably adjusts the incident direction of the incident beam L, and the optical path system can still achieve two-stage beam splitting and phase control of the incident beam.

[0130] Figure 10 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, refer to... Figure 10 The first-stage beam-splitting phase-shifting module 301 includes a first polarization beam-splitting unit PBS1 and a first reflection unit M1. The second-stage beam-splitting phase-shifting module 302 includes a second polarization-aber beam-splitting unit PBS2, a second polarization-bber beam-splitting unit PBS3, a second reflection-aber unit T / M2, and a second reflection-bber unit T / M3. Exemplarily, all beam-splitting units are polarization beam splitters. All reflection units are total reflection mirrors, i.e., 0% transmittance and 100% reflectivity. The beam-splitting phase-shifting section 30 also includes a quarter-wave plate 304 located in the optical path between the first-stage beam-splitting phase-shifting module 301 and the second-stage beam-splitting phase-shifting module 302. When linearly polarized light passes through the quarter-wave plate 304, it becomes circularly polarized light.

[0131] Specifically, the first polarization beam splitter unit PBS1 is located on the propagation path of the incident beam L, and the first reflection unit M1 is located on the propagation path of the first polarized ray after being polarized by the first polarization beam splitter unit PBS1. The first polarized ray forms a first circularly polarized light LCP after passing through the quarter-wave plate 304; the second polarized ray after being polarized by the first polarization beam splitter unit PBS1 forms a second circularly polarized light RCP after passing through the quarter-wave plate 304. The second polarization beam splitter unit PBS2 is located on the propagation path of the second circularly polarized light RCP. After polarizing the second circularly polarized light RCP, it forms a third polarized beam that is emitted, and a fourth polarized beam is formed and emitted after being reflected by the second reflection unit T / M2. The second polarization beam splitter unit PBS3 is located on the propagation path of the first circularly polarized light LCP. After polarizing the first circularly polarized light LCP, it transmits and forms a fifth polarized beam that is emitted, and a sixth polarized beam is formed and emitted after being reflected by the second reflection unit T / M3.

[0132] For example, refer to Figure 10 The incident beam L can be circularly polarized light, natural light, etc. This optical path can decompose the incident beam L and convert it into four output beams with controllable polarization states. Specific optical path:

[0133] First optical path: The incident beam L is polarized and split by the first polarization beam splitter unit PBS1 to form first polarized light (such as S-beam). This polarized light is reflected by the first reflection unit M1 and passes through the quarter-wave plate 304, where it is converted into first circularly polarized light LCP. Subsequently, the first circularly polarized light LCP arrives at the second bis-polarization beam splitter unit PBS3.

[0134] Second optical path: The incident beam L is polarized and split by the first polarization beam splitter unit PBS1 to form a second polarized light (such as P light). This light directly passes through the quarter-wave plate 304 and is converted into a second circularly polarized light RCP. Subsequently, the second circularly polarized light RCP arrives at the second polarization beam splitter unit PBS2.

[0135] The third optical path: The second circularly polarized light RCP is split at the second polarization beam splitter PBS2: its transmitted part is emitted directly as the third polarized beam, forming P-beam; the reflected part is emitted as the fourth polarized beam after being reflected by the second reflection beam T / M2, forming S-beam.

[0136] Fourth optical path: The first circularly polarized light LCP is split at the second bis-polarization beam splitter PBS3: its transmission part is directly emitted as the fifth polarized beam to form P-beam; the reflection part is emitted as the sixth polarized beam after being reflected by the second bis-reflection unit T / M3 to form S-beam.

[0137] This application, through the combination of polarization beam splitting and a quarter-wave plate, decomposes the incident beam L into four controllable polarization output beams, which are then transmitted to the coupling section 20. This achieves polarization beam splitting and expansion, which can ultimately be combined to form a complete color image and a three-dimensional virtual object. For example, the S-polarized beam and P-polarized light can be applied to polarization displays and privacy displays.

[0138] When the beam splitting phase shifting section 30 includes two-stage beam splitting phase shifting modules 01, as another feasible implementation, the number of optical elements in the first-stage beam splitting phase shifting module 301 can be set to be greater than the number of optical elements in the second-stage beam splitting phase shifting module 302.

[0139] Specifically, Figure 11 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, refer to... Figure 11 The number of first beam-splitting units B / S1 is greater than the number of second beam-splitting units B / S2, and the number of first reflection units M1 is equal to the number of second reflection units M2. In this embodiment, the first-stage beam-splitting phase-shifting module 301 contains two first beam-splitting units B / S1 and one first reflection unit M1, and the second-stage beam-splitting phase-shifting module 302 contains one second beam-splitting unit B / S2 and one second reflection unit M2. The arrangement of the first-stage beam-splitting phase-shifting module 301 and the second-stage beam-splitting phase-shifting module 302 can be varied.

[0140] Figure 12 These are schematic diagrams of three other beam-splitting phase-shifting components provided by the present invention. Based on the above embodiments, refer to... Figure 12 The first-stage beam-splitting phase-shifting module 301 includes a first transmission-reflection beam-splitting unit T / R4, a first transmission-reflection beam-splitting unit T / R5, and a first reflection unit M1. The second-stage beam-splitting phase-shifting module 302 includes a second transmission-reflection beam-splitting unit T / R6 and a second reflection unit M2. Exemplarily, all transmission-reflection beam-splitting units can use 50 / 50 beam-splitting mirrors, i.e., 50% transmittance and 50% reflectance. All reflection units use total reflection mirrors, i.e., 0% transmittance and 100% reflectance, thus E1=E2=E3=E4=1 / 4E. This configuration ensures balanced optical power across all output optical paths.

[0141] This configuration ensures that the output optical power is initially balanced across all optical paths.

[0142] Specifically, the incident beam L can follow... Figure 12An incident beam is incident in the X direction. The first A-type beam splitter T / R4 is located on the propagation path of the incident beam L, splitting it into two equal beams: a transmitted beam and a reflected beam. The first B-type beam splitter T / R5 is located on the propagation path of the reflected beam from the first A-type beam splitter T / R4, splitting the reflected beam a second time into two equal beams, resulting in an output energy of E2 for the reflected beam. The first reflection unit M1 is located on the propagation path of the transmitted beam from the first B-type beam splitter T / R5, reflecting this beam; the output energy of the reflected beam is E3. The second B-type beam splitter T / R6 is located on the propagation path of the transmitted beam from the first A-type beam splitter T / R4, splitting the transmitted beam a second time into two equal beams, resulting in an output energy of E1 for the transmitted beam. The second reflection unit M2 is located on the propagation path of the reflected beam from the second B-type beam splitter T / R6, reflecting this beam; the output energy of the reflected beam is E4. The above optical path structure enables two-stage beam splitting and path allocation of the incident beam L incident in the horizontal direction, achieving a beam phase shift expansion of 4 times the width.

[0143] Figure 13 These are schematic diagrams of three other beam-splitting phase-shifting components provided by the present invention. Based on the above embodiments, refer to... Figure 13 The first-stage beam-splitting phase-shifting module 301 includes a first transmission-reflection beam-splitting unit T / R4, a first transmission-reflection beam-splitting unit T / R5, and a first reflection unit M1. The second-stage beam-splitting phase-shifting module 302 includes a second transmission-reflection beam-splitting unit T / R6 and a second reflection unit M2. For example, when all the anti-reflection beam-splitting units use 50 / 50 beam-splitting mirrors (i.e., 50% transmittance and 50% reflectance) and all the reflection units use total reflection mirrors (i.e., 0% transmittance and 100% reflectance), then E1=E2=E3=E4=1 / 4E. This configuration ensures balanced optical power across all output optical paths.

[0144] Specifically, the incident beam L can follow... Figure 13An incident beam is incident along the Y-direction. The first beam splitter T / R4 (transmission / reflection beam splitter unit A) is located on the propagation path of the incident beam L, splitting it into two equal beams: a transmitted beam and a reflected beam. The first beam splitter T / R5 (transmission / reflection beam splitter unit B) is located on the propagation path of the transmitted beam from the first beam splitter T / R4, splitting it a second time into two equal beams, resulting in a reflected beam with an output energy of E2. The first reflection unit M1 is located on the propagation path of the transmitted beam from the first beam splitter T / R5 (transmission / reflection beam splitter unit B), reflecting the beam, with an output energy of E3. The second beam splitter T / R6 (transmission / reflection beam splitter unit B) is located on the propagation path of the reflected beam from the first beam splitter T / R4, splitting it a second time into two equal beams, resulting in a transmitted beam with an output energy of E1. The second reflection unit M2 is located on the propagation path of the reflected beam from the second beam splitter T / R6, reflecting the beam, with an output energy of E4. The above optical path structure enables two-stage beam splitting and path allocation of the incident beam L incident in the longitudinal direction, achieving a beam phase shift expansion of 4 times the width.

[0145] It should be emphasized that, compared to the above-mentioned appendix Figures 7-10 The embodiment provides a beam-splitting phase-shifting section 30, with attachments. Figures 11-13 The beam splitting phase shifting section 30 provided in the embodiment reduces at least one reflecting unit, achieving the same beam extension. This structural design can effectively reduce production costs while reducing the volume of the beam splitting phase shifting section 30.

[0146] Based on the above embodiments, continue to refer to Figure 12 and Figure 13 The position of the second reflection unit M2 can be reasonably set according to the needs of the optical path. Specifically, the second reflection unit M2 can be set coplanarly with the first A-type transmission-reflection-splitting unit T / R4, the first B-type transmission-reflection-splitting unit T / R5, or the first reflection unit M1.

[0147] refer to Figure 12 (1) and Figure 13 In (1), the second reflective unit M2 and the first reflective unit M1 are coplanar.

[0148] refer to Figure 12 (2) and Figure 13 In (2), the second reflection unit M2 and the first transmissive beam splitter T / R5 are coplanar.

[0149] refer to Figure 12 (3) and Figure 13 In (3), the second reflection unit M2 and the first transparent beam splitter T / R4 are coplanar.

[0150] The above-mentioned optical path structure reduces the optical path length in the longitudinal direction, thus achieving a small volume. On the other hand, it can prevent the second reflection unit M2 from blocking the reflected optical paths of the first A-type transmission-reflection beam splitter T / R4, the first B-type transmission-reflection beam splitter T / R5, and the first reflection unit M1, ensuring that the energy of all output optical paths is maximized.

[0151] Based on the above embodiments, continue to refer to Figure 6 The coupling input section 10, the beam splitting phase shift section 30, and the coupling output section 20 are along... Figure 6 The first direction X is arranged. In this embodiment, the coupling-in portion 10 and the coupling-out portion 20 are located on different sides of the beam-splitting phase-shifting portion 30, respectively. After the incident beam L is coupled into the waveguide structure 1 in the coupling-in portion 10, it moves along... Figure 6 The beam is transmitted via total internal reflection in the X direction to the beam-splitting phase-shifting section 30, and after beam splitting and expansion, it exits into the coupling section 20. During transmission, the beam travels in the transverse direction perpendicular to the propagation direction (…). Figure 6 Width expansion was implemented in the Y direction.

[0152] Figure 14 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention. Figure 15 This is a schematic diagram of another beam-splitting phase-shifting optical path system provided by the present invention, for reference. Figure 14 and Figure 15 As shown, the beam-splitting units B / S and the reflection unit M in the same-level beam-splitting phase-shifting module 01 are arranged along the second direction Y, which intersects with the first direction X. Along the first direction X, the coupling-out portion 20 is located on one side of the beam-splitting phase-shifting portion 30. Along the second direction Y, the coupling-in portion 10 is located on the side of the beam-splitting unit B / S in the same-level beam-splitting phase-shifting module 01 away from the reflection unit M.

[0153] In this embodiment, the position of the coupling-in section 10 can be adjusted so that it and the coupling-out section 20 are located on the lateral and longitudinal sides of the beam-splitting phase-shifting section 30, respectively. After the incident beam L is coupled into the waveguide structure 1 from the coupling-in section 10, it then travels along... Figure 14 and Figure 15 The beam is transmitted via total internal reflection in the Y direction to the beam splitting and phase shifting section 30. After being split and expanded by the two-stage beam splitting and phase shifting module 01, it travels along... Figure 14 The beam enters and exits from the coupling section 20 in the X direction. During propagation, the beam achieves a 90° deflection in the transverse direction (Y direction) perpendicular to the propagation direction, resulting in a width expansion. This optical path structure is compact and simple in layout, effectively reducing waveguide area and achieving miniaturization.

[0154] It should be noted that, Figure 14 and Figure 15 The structure of the mid-beam phase shift section 30 is illustrated in two feasible embodiments, and can also be further... Figures 5-13The structure of the beam splitting phase shifting section 30 shown in the figure is replaced with... Figure 14 and Figure 15 In order to achieve beam splitting with multiple optical path structures, it has more adaptability to optical path changes to meet different beam splitting and expansion needs. The embodiments of this application will not be shown one by one.

[0155] Figure 16 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Based on the above embodiments, refer to... Figure 16 This application also provides another structure for the beam-splitting phase-shifting section. The at least two-stage beam-splitting phase-shifting module 01 includes a first-stage beam-splitting phase-shifting module 301, a second-stage beam-splitting phase-shifting module 302, and a third-stage beam-splitting phase-shifting module 303. The first-stage beam-splitting phase-shifting module 301 includes a first transmission-reflection beam-splitting unit T / R1 and a first reflection unit M1; the second-stage beam-splitting phase-shifting module 302 includes a second transmission-reflection beam-splitting unit T / R6 and a second reflection unit M2; and the third-stage beam-splitting phase-shifting module 303 includes a third transmission-reflection beam-splitting unit T / R7 and a third reflection unit M3.

[0156] Specifically, refer to Figure 16 (1) The incident beam L can follow Figure 16 The incident beam is incident in the X direction. The first transmission-reflection beam splitter T / R1 is located on the propagation path of the incident beam L, splitting it into two equal beams: a transmitted beam and a reflected beam. The first reflection unit M1 is located on the propagation path of the reflected beam from the first transmission-reflection beam splitter T / R1, reflecting the beam. The second transmission-reflection beam splitter T / R6 is located on the propagation path of the transmitted beam from the first transmission-reflection beam splitter T / R1, splitting the transmitted beam a second time into two equal beams, resulting in an output energy of E1 for the transmitted beam. Alternatively, refer to... Figure 16 (2) The incident beam L can follow Figure 16 The incident beam is incident along the Y-direction. A first transmission-reflection beam splitter unit T / R1 is located on the propagation path of the incident beam L, splitting it into two equal beams: a transmitted beam and a reflected beam. A first reflection unit M1 is located on the propagation path of the transmitted beam from the first transmission-reflection beam splitter unit T / R1, reflecting the transmitted beam. A second transmission-reflection beam splitter unit T / R6 is located on the propagation path of the reflected beam from the first transmission-reflection beam splitter unit T / R1, splitting the reflected beam a second time into two equal beams: a transmitted beam and a reflected beam. The output energy of the transmitted beam is E1.

[0157] The second reflection unit M2 is located on the propagation path of the reflected beam of the second transmission-reflection beam splitter T / R6, and is used to reflect this beam. The output energy of the reflected beam is E3. The third transmission-reflection beam splitter T / R7 is located on the propagation path of the reflected beam of the first reflection unit M1, and is used to split the reflected beam into two equally divided beams, a transmitted beam and a reflected beam. The output energy of the transmitted beam is E2. The third reflection unit M3 is located on the propagation path of the reflected beam of the third transmission-reflection beam splitter T / R7, and is used to reflect this beam. The output energy of the reflected beam is E4.

[0158] For example, when all anti-beam splitting units use 50 / 50 beam splitters (i.e., 50% transmittance and 50% reflectance) and all reflection units use total reflection mirrors (i.e., 0% transmittance and 100% reflectance), then E1 = E2 = E3 = E4 = 1 / 4E. This configuration ensures balanced optical power across all output optical paths.

[0159] Based on the above embodiments, this application also provides a structure for a beam-splitting phase-shifting section. Figure 17 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention, for reference. Figure 17 The first-stage beam splitting and phase shifting module 301 includes a first polarization beam splitting unit PBS1 and a first reflection unit M1; the second-stage beam splitting and phase shifting module 302 includes a second polarization beam splitting unit PBS-2 and a second reflection unit M2; and the third-stage beam splitting and phase shifting module 303 includes a third polarization beam splitting unit PBS-3 and a third reflection unit M3.

[0160] The beam-splitting phase-shifting section 30 also includes a quarter-wave plate 304 located in the optical path between the first-stage beam-splitting phase-shifting module 301 and the second-stage beam-splitting phase-shifting module 302. The first polarization beam-splitting unit PBS1 is located on the propagation path of the incident beam L, and the first reflection unit M1 is located on the propagation path of the first polarized ray after passing through the first polarization beam-splitting unit PBS1. The first polarized ray forms a first circularly polarized light LCP after passing through the quarter-wave plate 304, and the second polarized ray after passing through the first polarization beam-splitting unit PBS1 forms a second circularly polarized light RCP after passing through the quarter-wave plate 304. The second polarization beam-splitting unit PBS-2 is located on the propagation path of the second circularly polarized light RCP. After polarization adjustment of the second circularly polarized light RCP, a third polarized beam is emitted, which can be, for example, a P-beam; and a fourth polarized beam is formed and emitted after reflection by the second reflection unit M2. The fourth polarized beam can be, for example, an S-beam. The third polarization beam splitter unit PBS-3 is located on the propagation path of the first circularly polarized light LCP. After adjusting the polarization of the first circularly polarized light LCP, it forms a fifth polarized beam that is emitted, such as a P-beam. It also forms a sixth polarized beam that is reflected by the third reflection unit M3 and emitted, such as an S-beam.

[0161] For example, refer to Figure 17 The incident beam L can be circularly polarized light, natural light, etc. This optical path can decompose the incident beam L and convert it into four output beams with controllable polarization states. Specific optical path:

[0162] First optical path: The incident beam L is polarized and split by the first polarization beam splitter unit PBS1 to form first polarized light (such as S-beam). This polarized light is reflected by the first reflection unit M1 and passes through a quarter-wave plate, where it is converted into first circularly polarized light LCP. Subsequently, the first circularly polarized light LCP reaches the third polarization beam splitter unit PBS-3 and is split. Its polarization-modulated transmitted portion is directly emitted as the fifth polarized beam, forming P-beam.

[0163] Second optical path: The incident beam L is polarized and split by the first polarization beam splitter unit PBS1 to form a second polarized light (such as P-beam). This light directly passes through the quarter-wave plate and is converted into a second circularly polarized light RCP. Subsequently, the second circularly polarized light RCP reaches the second polarization beam splitter unit PBS-2 and is split. Its polarized transmission portion is directly emitted as a third polarized beam to form P-beam.

[0164] The third optical path: The reflected portion of the second circularly polarized light RCP, which is split at the second polarization beam splitter unit PBS-2, serves as the fourth polarized beam. After being reflected by the second reflection unit M2, it is emitted to form an S-beam.

[0165] Fourth optical path: The reflected portion of the first circularly polarized light LCP, which is split at the third polarization beam splitter unit PBS-3, serves as the sixth polarized beam. After being reflected by the third reflection unit M3, it is emitted to form an S-beam.

[0166] This application combines multiple polarization beam splitters with a quarter-wave plate to decompose and convert the incident beam L into four controllable polarization output beams, which are then transmitted to the coupling section. This achieves polarization beam splitting and expansion, which can be combined to form complete color images and virtual objects with a three-dimensional effect. For example, S-polarized beams and P-polarized light can be applied to polarization displays and privacy displays.

[0167] Based on the above embodiments, this application also provides a structure for a beam-splitting phase-shifting section. Figure 18 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention. Figure 19 This is a schematic diagram of another beam-splitting phase-shifting component provided by the present invention, for reference. Figure 18 The waveguide structure 1 includes a first beam-splitting phase-shifting section 30a and a second beam-splitting phase-shifting section 30b. The beam-splitting units B / S and the reflection units M in the same level beam-splitting phase-shifting module 01 are arranged along the second direction Y, and the first beam-splitting phase-shifting section 30a and the second beam-splitting phase-shifting section 30b are arranged along the second direction Y.

[0168] In this embodiment, the beam-splitting phase-shifting optical path system can achieve beam multiplication and expansion by splicing and combining multiple beam-splitting phase-shifting components, as shown in the reference. Figure 18 This application takes the phase-shifting component of a two-component beam as an example, and analyzes the incident beam L along... Figure 18 It extends in the Y direction. Specifically, the phase shift portion 30 of the dual-component beam extends along... Figure 18 The configuration is a stacked and spliced ​​structure in the Y direction, that is, the first beam phase shifting part 30a and the second beam phase shifting part 30b are stacked and arranged in the direction of perpendicular incident plane, and the two incident beams L are expanded and split to form eight beams of equal light effect output light.

[0169] Further, refer to Figure 19 The first beam phase shift section 30a and the second beam phase shift section 30b are symmetrically arranged about the boundary line between them. In this embodiment, the first beam phase shift section 30a and the second beam phase shift section 30b are arranged along... Figure 19 The configuration of the upper and lower mirror splicing in the Y direction is that the two beam phase shifting parts 30 are arranged in a mirror image with the boundary line symmetrically aligned at the center. The two incident beams L are expanded and split to form eight beams of equal light output.

[0170] In other embodiments of this application, the number of combinations N of the beam-splitting phase-shifting sections 30 is ≥2. For example, N is 2 to 8, achieving a beam spread of 4N times. Here, N is the number of combinations, and the arrangement of the N combinations of beam-splitting phase-shifting sections 30 includes, but is not limited to, stacking, mirror stitching, radial symmetrical arrangement, or irregular topological arrangement, etc., and the embodiments of this application do not impose any restrictions.

[0171] In summary, by rationally setting the arrangement of the multi-beam phase shifting section 30, this application can meet the incident requirements of different incident beams L, achieving small volume and high optical efficiency.

[0172] Based on the above embodiments, refer to Figure 18 As shown, the angle between the beam-splitting unit B / S and the incident beam L is 20°~70°, and the angle between the reflecting unit M and the incident beam L is 20°~70°. Furthermore, this application can control the exit angle of the beam-splitting light entering the coupling section 20 by adjusting the angle θ1 between the beam-splitting unit B / S and the incident beam L, and the angle θ2 between the reflecting unit M and the incident beam L. This makes the exit light adjustable from 20° to 70°, ensuring that each beam of light, after phase shift, can be directed towards the human eye at the same or approximately the same angle. This avoids problems such as image blurring caused by beam divergence, thereby improving display clarity. This angle design gives the beam-splitting unit, reflecting unit, and incident beam of this application excellent process compatibility.

[0173] The angle between the beam splitter and the incident beam refers to the angle between the plane containing the beam splitter and the optical axis of the initial incident beam entering the phase-shifting section of the beam splitter. Similarly, the angle between the reflection unit and the incident beam refers to the angle between the plane containing the reflection unit and the optical axis of the initial incident beam entering the phase-shifting section of the beam splitter.

[0174] As an example, continue to refer to Figure 18 The angle between the beam splitter unit B / S and the incident beam L is θ1, and the angle between the reflection unit M and the incident beam L is θ2. θ1=θ2, which can also be understood as the optical planes of the beam splitter unit B / S and the reflection unit M always being arranged in parallel, for example, θ1=θ2=50°, with a tolerance of ±0.1°.

[0175] Based on the above embodiments, continue to refer to Figure 4 and Figure 6 The beam-splitting phase-shifting optical path system also includes a display structure 2 and an optomechanical structure 3, with the latter located in the optical path between the display structure 2 and the waveguide structure 1. Specifically, the display structure 2 provides the incident light beam to generate digital images, such as video footage and navigation information. The display structure 2 includes, but is not limited to, microdisplays such as LCD, Micro-OLED, Micro-LED, LCoS, DLP, and LBS. The optomechanical structure 3 seamlessly integrates the digital images generated by the microdisplay with the user's real-world view through a series of optical elements, creating an AR display effect.

[0176] Based on the above embodiments, combined with Figures 4-19Waveguide structure 1 includes either a geometric waveguide structure or a diffractive waveguide structure. The geometric waveguide structure, also known as an arrayed waveguide, is a waveguide technology based on traditional geometric optics principles (such as reflection and refraction) rather than diffractive optics principles. For example, a series of highly precise semi-transparent and semi-reflective mirror arrays are embedded within a transparent glass or plastic substrate. These mirrors are parallel to each other and arranged at a specific angle. Light propagates and couples to the exit pupil not through diffraction within the waveguide, but through multiple partial reflections between these mirrors. The diffractive waveguide structure has a diffraction grating on it. Using a nanoscale "grating" fabricated on the waveguide structure as a control tool, virtual image light is guided, replicated, and distributed to the user's eye through the diffraction effect. The beam-splitting phase-shifting component provided in this embodiment is suitable for diffractive structures such as surface relief gratings, blazed gratings, volume holographic gratings, and meta-gratings in diffractive waveguide pupil expansion applications. Integrating the beam-splitting phase-shifting component into a one-dimensional diffractive waveguide can reduce the volume of the coupled optomechanism by more than 50%. Compared to two-dimensional diffractive waveguides, this invention can effectively improve optical efficiency. While traditional two-dimensional diffractive waveguides suffer from efficiency less than 50% in the transition region and significant zero-order optical loss exceeding 30%, the beam-splitting phase-shifting distribution provided by this invention can achieve an optical energy utilization rate greater than 95%, approaching zero optical energy loss, thus exhibiting high optical efficiency. The waveguide structure 1 in this application has various structural configurations, which will not be listed individually in this application.

[0177] The coupling section 10 includes a prism or a mirror. Specifically, a dispersion reduction mechanism is proposed here: the incident light is coupled using a prism or mirror as a coupling element, the beam is expanded by the beam-splitting phase-shifting section, and finally coupled out from the grating region. This optical path structure design can eliminate the dispersion phenomenon in the coupling and transmission process of traditional diffractive waveguides, greatly reduce the dispersion phenomenon when a single waveguide is used to achieve full-color display, and improve the imaging effect.

[0178] In summary, the beam-splitting phase-shifting optical path system provided in this application embodiment can be configured with a single optomechanical drive for a single beam-splitting phase-shifting section. This design facilitates a reduction in the optomechanical volume to ≤0.2cc. For multi-beam expansion requirements, this embodiment proposes using low-cost, standardized reflective film systems for beam-splitting and reflecting units to construct the optical path beam-splitting system. Compared to existing technologies, this eliminates the need for depositing multiple layers of heterogeneous reflective films, achieving efficient multi-beam expansion and effectively reducing costs and yield. Uniform beam expansion is achieved, and these beams are ultimately guided to the coupling section and coupled out, resulting in better display effects and lower costs.

[0179] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein. Features of various embodiments of the present invention can be partially or wholly coupled or combined with each other, and can cooperate and be technically driven in various ways. Various obvious changes, readjustments, combinations, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A beamsplitting phase shifting optical path system, characterized by, The waveguide structure comprises at least one waveguide structure; The waveguide structure comprises an in-coupling section, an out-coupling section, and at least one set of beam-splitting phase-shifting sections between the in-coupling section and the out-coupling section; The beam-splitting phase-shifting section comprises at least two levels of beam-splitting phase-shifting modules arranged along a first direction, each level of the beam-splitting phase-shifting modules comprises at least one beam-splitting unit and at least one reflecting unit; The at least two levels of the beam-splitting phase-shifting modules comprise a first level of beam-splitting phase-shifting modules and an i-th level of beam-splitting phase-shifting modules, the first level of beam-splitting phase-shifting modules is located on a propagation path of the incident light beam, and the i-th level of beam-splitting phase-shifting modules is located on an exit light path of the (i-1)-th level of beam-splitting phase-shifting modules; wherein i≥2 and i is an integer.

2. The beam splitting phase shifting optical train system of claim 1, wherein, The beam-splitting phase-shifting section comprises n beam-splitting units and m reflecting units; The exit beam of the beam splitting phase division section includes 2 (n-1) Beam exit beam; Wherein, n≥3 and n is an integer, 2≤m≤n and m is an integer.

3. The beam-splitting phase-shifting optical train system of claim 2, wherein, 2 (n-1) the energy of any two of the exit beams is the same; The beam-splitting unit comprises a transmissive and reflective beam-splitting unit, and the reflectivity of any two beam-splitting units in the n beam-splitting units is the same; or the beam-splitting unit comprises a polarized beam-splitting unit; The reflectivity of any two reflecting units in the m reflecting units is the same.

4. The beam-splitting phase-shifting optical train system of claim 3, wherein, The first level of beam-splitting phase-shifting modules comprises at least one first beam-splitting unit and one first reflecting unit; and the second level of beam-splitting phase-shifting modules comprises at least one second beam-splitting unit and at least one second reflecting unit. The number of the first beam-splitting units is different from the number of the second beam-splitting units, and / or the number of the first reflecting units is different from the number of the second reflecting units.

5. The beam-splitting phase-shifting optical train system of claim 4, wherein, The number of the first beam-splitting units is less than the number of the second beam-splitting units, and the number of the first reflecting units is less than the number of the second reflecting units.

6. The beam-splitting phase-shifting optical train system of claim 5, wherein, The first level of beam-splitting phase-shifting modules comprises one first transmissive and reflective beam-splitting unit; The second level of beam-splitting phase-shifting modules comprises a second alpha transmissive and reflective beam-splitting unit, a second beta transmissive and reflective beam-splitting unit, a second alpha reflecting unit, and a second beta reflecting unit; The first transmissive and reflective beam-splitting unit is located on the propagation path of the incident light beam, and the first reflecting unit is located on the propagation path of the reflected light beam of the first transmissive and reflective beam-splitting unit; The second alpha transmissive and reflective beam-splitting unit is located on the propagation path of the transmitted light beam of the first transmissive and reflective beam-splitting unit, and the second alpha reflecting unit is located on the propagation path of the reflected light beam of the second alpha transmissive and reflective beam-splitting unit; The second beta transmissive and reflective beam-splitting unit is located on the propagation path of the reflected light beam of the first reflecting unit, and the second beta reflecting unit is located on the propagation path of the reflected light beam of the second beta transmissive and reflective beam-splitting unit.

7. The beam-splitting phase-shifting optical train system of claim 5, wherein, The first level of beam-splitting phase-shifting modules comprises one first transmissive and reflective beam-splitting unit; The second level of beam-splitting phase-shifting modules comprises a second alpha transmissive and reflective beam-splitting unit, a second beta transmissive and reflective beam-splitting unit, a second alpha reflecting unit, and a second beta reflecting unit; The first transmissive and reflective beam-splitting unit is located on the propagation path of the incident light beam, and the first reflecting unit is located on the propagation path of the transmitted light beam of the first transmissive and reflective beam-splitting unit; The second alpha transmissive and reflective beam-splitting unit is located on the propagation path of the reflected light beam of the first transmissive and reflective beam-splitting unit, and the second alpha reflecting unit is located on the propagation path of the reflected light beam of the second alpha transmissive and reflective beam-splitting unit; The second birefringent reflective beam splitting unit is located on the propagation path of the reflected light beam of the first reflective unit, and the second reflective unit is located on the propagation path of the reflected light beam of the second birefringent reflective beam splitting unit.

8. The beam-splitting phase-shifting optical train system of claim 5, wherein, The first level beam splitting phase shift module comprises a first polarization beam splitting unit; The second level beam splitting phase shift module comprises a second polarization beam splitting unit, a second birefringent reflective beam splitting unit, a second reflective unit and a second reflective unit; The beam splitting phase shift module further comprises a 1 / 4 wave plate located in the optical path between the first level beam splitting phase shift module and the second level beam splitting phase shift module; The first polarization beam splitting unit is located on the propagation path of the incident light beam, and the first reflective unit is located on the propagation path of the first polarized light beam after the first polarization beam splitting unit; the first polarized light beam forms a first circularly polarized light after the 1 / 4 wave plate; the second polarized light beam after the first polarization beam splitting unit forms a second circularly polarized light after the 1 / 4 wave plate; The second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light; the second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and the second polarization beam splitting unit is located on the propagation path of the second circular ​ 9. The beam-splitting phase-shifting optical train system of claim 4, wherein, ​ 10. The beam-splitting phase-shifting optical train system of claim 9, wherein, ​ ​ ​ ​ 11. The beam-splitting phase-shifting optical train system of claim 9, wherein, ​ ​ ​ ​ 12. The beam-splitting phase-shifting optical system according to claim 10 or 11, characterized in that, The second reflection unit is arranged in the same plane as the first transmissive-reflection beam splitting unit, the first transmissive-reflection beam splitting unit or the first reflection unit.

13. The beam-splitting phase-shifting optical system according to claim 6 or 10, wherein The coupling-in subunit, the beam splitting phase shift subunit and the coupling-out subunit are arranged along the first direction.

14. The beam-splitting phase-shifting optical system according to claim 7 or 11, wherein The beam splitting unit and the reflection unit in the same beam splitting phase shift module are arranged along a second direction, and the second direction intersects the first direction. Along the first direction, the coupling-out subunit is located on one side of the beam splitting phase shift subunit. Along the second direction, the coupling-in subunit is located on one side of the beam splitting unit away from the reflection unit in the same beam splitting phase shift module.

15. The beam-splitting phase-shifting optical train system of claim 3, wherein, The first beam splitting phase shift module includes a first transmissive-reflection beam splitting unit and a first reflection unit; the second beam splitting phase shift module includes a second transmissive-reflection beam splitting unit and a second reflection unit; and the third beam splitting phase shift module includes a third transmissive-reflection beam splitting unit and a third reflection unit. The first transmissive-reflection beam splitting unit is located on the propagation path of the incident light beam, and the first reflection unit is located on the propagation path of the reflected light beam or the transmitted light beam of the first transmissive-reflection beam splitting unit. The second transmissive-reflection beam splitting unit is located on the propagation path of the transmitted light beam or the reflected light beam of the first transmissive-reflection beam splitting unit, and the second reflection unit is located on the propagation path of the reflected light beam of the second transmissive-reflection beam splitting unit. The third transmissive-reflection beam splitting unit is located on the propagation path of the reflected light beam of the first reflection unit, and the third reflection unit is located on the propagation path of the reflected light beam of the third transmissive-reflection beam splitting unit.

16. The beam splitting phase shifting optical train system of claim 3, wherein, The first beam splitting phase shift module includes a first polarization beam splitting unit and a first reflection unit; the second beam splitting phase shift module includes a second polarization beam splitting unit and a second reflection unit; and the third beam splitting phase shift module includes a third polarization beam splitting unit and a third reflection unit. The beam splitting phase shift subunit further includes a 1 / 4 wave plate located in the optical path between the first beam splitting phase shift module and the second beam splitting phase shift module. The first polarization beam splitting unit is located on the propagation path of the incident light beam, and the first reflection unit is located on the propagation path of the first polarized light ray after the first polarization beam splitting unit; the first polarized light ray forms a first circularly polarized light after the 1 / 4 wave plate, and the second polarized light ray after the first polarization beam splitting unit forms a second circularly polarized light after the 1 / 4 wave plate; The second polarization beam splitting unit is located on the propagation path of the second circularly polarized light, and performs polarization adjustment on the second circularly polarized light to form a third polarized light beam and a fourth polarized light beam which is emitted after being reflected by the second reflection unit; The third polarization beam splitting unit is located on the propagation path of the first circularly polarized light, and performs polarization adjustment on the first circularly polarized light to form a fifth polarized light beam and a sixth polarized light beam which is emitted after being reflected by the third reflection unit.

17. The beam splitting phase shifting optical train system of claim 1, wherein, The waveguide structure includes a first beam splitting phase shift subunit and a second beam splitting phase shift subunit. The beam splitting unit and the reflection unit in the same beam splitting phase shift module are arranged along a second direction, and the first beam splitting phase shift subunit and the second beam splitting phase shift subunit are arranged along the second direction.

18. The beam-splitting phase-shifting optical train system of claim 17, wherein, The first beam-splitting phase-shifting subunit and the second beam-splitting phase-shifting subunit are symmetrically arranged about a boundary between the first beam-splitting phase-shifting subunit and the second beam-splitting phase-shifting subunit.

19. The beam splitting phase shifting optical train system of claim 1, wherein, An included angle between the beam-splitting unit and the incident light beam is 20°-70°, and an included angle between the reflecting unit and the incident light beam is 20°-70°.

Images