A control method for quickly enabling and shielding multi-station test channels in wafer testing

Abstract

The present application belongs to the technical field of semiconductor, and particularly relates to a control method for quickly enabling and shielding multi-station test channels in wafer testing, which comprises generating a multi-station physical resource mapping matrix according to a hardware board card in a test initialization stage; when a station state is changed, a computer system broadcasts a station enabling control vector to each hardware board card; each board card performs an element-by-element logical AND operation on the vector by using a local mapping matrix, and performs a logical OR compression on a result row to generate a physical channel enabling vector to drive channel enabling or shielding. By adopting the above technical scheme, a station-level broadcast instruction and a local matrix operation of a hardware board card are cooperated to avoid the computer system from performing full-amount physical channel traversal and cross-board card state coordination at each station change; channel enabling state determination under resource sharing is completed in parallel by a special logic circuit built in each hardware board card, and real-time performance and certainty of multi-station dynamic adjustment are ensured.

Images