Wafer rolling full-automatic manipulator

Abstract

This utility model relates to the semiconductor field, specifically to a fully automatic wafer rolling robot, including a horizontally extending guide rail, a mounting plate slidably mounted on the guide rail driven by a power mechanism, a connecting seat mounted on the mounting plate driven by a telescopic component, a basket holder fixedly mounted on the connecting seat, the basket holder having a horizontally arranged support plate and a vertically arranged connecting plate fixedly mounted on the support plate, the upper end of the connecting plate being fixedly connected to the connecting seat, a wafer basket placed on the support plate, two horizontally extending rolling shafts rotatably mounted on the support plate, the two rolling shafts being parallel and both in contact with the bottom of the wafer in the wafer basket, and a drive mechanism for driving the two rolling shafts to rotate synchronously; the mounting plate is driven laterally along the guide rail by a chain, moving the basket holder and the wafer basket directly above the etching tank or cleaning tank, thereby facilitating the transfer of the wafer basket between different tanks.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a fully automatic wafer rolling robot. Background Technology

[0002] During wafer manufacturing, wafers require etching and cleaning. In the prior art, utility model patent application number CN202322965961.3 discloses a rolling wafer cleaning device, including a cleaning tank body and a drive mechanism. A wafer basket is disposed within the cleaning tank body. The drive mechanism includes a drive device, a transmission component, and a rolling device. The drive device is connected to one side of the cleaning tank body, and the rolling device is positioned below the wafer basket and contacts the bottom of the wafers arranged within the basket. The drive device drives the rolling device to rotate via the transmission component, thereby causing the wafers to rotate synchronously, improving the cleaning effect on the wafers.

[0003] However, the aforementioned rolling wafer cleaning equipment requires manual loading and unloading of wafer baskets into the cleaning tank, resulting in low work efficiency and the cleaning fluid potentially harming operators. Furthermore, the rolling device can only rotate the wafers during the cleaning process, making its function relatively limited and requiring improvement. Utility Model Content

[0004] The purpose of this invention is to provide a fully automatic wafer rolling robot that facilitates the transfer of wafers between etching and cleaning tanks, and can rotate the wafers during both the cleaning and etching processes, thereby solving the defects mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A fully automatic wafer rolling robot includes a horizontally extending guide rail, on which a mounting plate driven by a power mechanism is slidably mounted. A connecting seat driven by a telescopic component is mounted on the mounting plate. A basket holder is fixedly mounted on the connecting seat. The basket holder has a horizontally positioned tray and a vertically positioned connecting plate fixedly mounted on the tray. The upper end of the connecting plate is fixedly connected to the connecting seat. A wafer basket is placed on the tray. Two horizontally extending rolling shafts are rotatably mounted on the tray. The two rolling shafts are parallel and both contact the bottom of the wafer inside the wafer basket. The basket holder is equipped with a drive mechanism for synchronously rotating the two rolling shafts.

[0007] As a preferred technical solution, the power mechanism includes a chain that is driven to move by a power device, and the mounting plate is fixedly connected to one of the links of the chain.

[0008] As a preferred technical solution, the telescopic component is a cylinder, the cylinder body is fixedly mounted on the mounting plate, the piston rod of the cylinder extends upward, and the connecting seat is fixedly mounted on the upper end of the piston rod of the cylinder.

[0009] As a preferred technical solution, two opposing upright plates are fixedly installed on the top of the pallet, and the two ends of the rolling shaft are respectively rotatably installed on the two upright plates; the driving mechanism includes a vertically extending transmission shaft rotatably installed on the connecting plate, the upper end of the transmission shaft is connected to a drive motor, and the lower end of the transmission shaft is fixedly installed with a driving bevel gear; a connecting shaft parallel to the rolling shaft is rotatably installed on one of the upright plates, one end of the connecting shaft is fixedly installed with a driven bevel gear meshing with the driving bevel gear, and the other end of the connecting shaft is fixedly installed with a drive gear; and driven gears meshing with the drive gear are respectively fixedly installed on the two rolling shafts.

[0010] As a preferred technical solution, four limiting blocks arranged in a rectangular pattern are fixedly installed on the top of the tray, and the wafer basket is placed between the four limiting blocks.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. This application uses a cylinder to extend and move the basket support upward to lift the wafer basket, so that the wafer basket is removed from the etching tank or cleaning tank. Alternatively, the cylinder can retract and move the basket support downward to submerge the wafer basket in the etching tank or cleaning tank. The chain drives the mounting plate to move laterally along the guide rail, so that the basket support and the wafer basket are moved directly above the etching tank or cleaning tank. This facilitates the transfer of the wafer basket between different tanks without the need for manual handling of the wafer basket. It is highly efficient and avoids harm to operators from etching or cleaning solutions.

[0013] 2. In this application, when the wafer basket is immersed in the etching tank or cleaning tank, the drive motor drives the transmission shaft to rotate, and the transmission shaft drives two rolling shafts to rotate synchronously through the connecting shaft. In turn, the two rolling shafts drive the wafer in the wafer basket to rotate, so that the wafer is in uniform contact with the etching solution or cleaning solution, thereby improving the etching and cleaning efficiency of the wafer.

[0014] 3. This application provides four limiting blocks on the top of the tray, all of which are L-shaped and match the four corners of the wafer basket. This prevents the wafer basket from shifting and improves the stability of the wafer basket placement. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model;

[0017] Figure 2 This is a top view of the tray according to an embodiment of the present utility model;

[0018] Figure 3 yes Figure 1 A schematic diagram of the structure for removing the wafer basket.

[0019] Figure 4 This is a schematic diagram of the structure of the rolling shaft according to an embodiment of the present invention.

[0020] In the diagram: 1-Guide rail; 2-Mounting plate; 3-Chain; 4-L-shaped plate; 5-Connecting seat; 6-Cylinder; 7-Flower basket bracket; 8-Panel; 9-Connecting plate; 10-Connecting column; 11-Wafer flower basket; 12-Upright plate; 13-Rolling shaft; 14-Drive shaft; 15-Driving bevel gear; 16-Connecting shaft; 17-Driven bevel gear; 18-Drive gear; 19-Driven gear; 20-Limit block; 21-Drive box. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] like Figure 1 and Figure 4 As shown, the fully automatic wafer rolling robot includes a horizontally extending guide rail 1, with both ends of the guide rail 1 fixedly mounted on a bracket. A mounting plate 2, driven by a power mechanism, is slidably mounted on the rear side of the guide rail 1. The power mechanism includes a chain 3 driven by a power unit. The mounting plate 2 and the chain 3 are connected by an L-shaped plate 4. The vertical part of the L-shaped plate 4 is fixedly mounted on the lower front side of the mounting plate 2 by screws, and the horizontal part of the L-shaped plate 4 is fixedly mounted on one of the links at the top of the chain 3 by screws.

[0023] Specifically, the chain 3 extends laterally, with its two ends respectively fitted onto sprockets. One of the sprockets is connected to a power motor, which drives the sprocket to rotate. In turn, the sprocket drives the chain 3 to move laterally, and the chain 3 drives the mounting plate 2 to slide laterally along the guide rail 1.

[0024] Mounting plate 2 is equipped with a connecting seat 5 that is driven to rise and fall by a telescopic component. The telescopic component is a cylinder 6. The cylinder body of the cylinder 6 is fixedly mounted on the rear side of mounting plate 2 by bolts. The piston rod of the cylinder 6 extends upward. The connecting seat 5 is fixedly mounted on the upper end of the piston rod of the cylinder 6 by bolts. A flower basket bracket 7 is fixedly mounted on the connecting seat 5. The flower basket bracket 7 is located on the front side of the guide rail 1. The flower basket bracket 7 is provided with a horizontally set support plate 8 and an upwardly extending connecting plate 9 that is welded or fixedly mounted on the rear end of the support plate 8 by bolts. The upper rear side of the connecting plate 9 is fixedly connected to the connecting seat 5 by a connecting post 10.

[0025] A wafer basket 11 is placed on tray 8, such as Figure 2 As shown, the bottom of the wafer basket 11 is hollowed out, and several wafers are placed inside the wafer basket 11 at intervals. The top of the support plate 8 is fixed with two upright plates 12 arranged opposite each other. The wafer basket 11 is located inside the two upright plates 12. Between the two upright plates 12, two rolling shafts 13 arranged opposite each other are rotatably installed via bearings. Both rolling shafts 13 extend horizontally back and forth, and both rolling shafts 13 are in contact with the bottom of the wafers in the wafer basket 11. The rolling shafts 13 are tangent to the bottom of the wafers. The two rolling shafts 13 support the left and right sides of the bottom of the wafers respectively. The basket bracket 7 is equipped with a drive mechanism for driving the two rolling shafts 13 to rotate synchronously.

[0026] The drive mechanism includes a vertically extending drive shaft 14 rotatably mounted on the front side of the connecting plate 9. A bearing seat is bolted to the front side of the connecting plate 9, and the drive shaft 14 is rotatably connected to the bearing seat. A drive box 21 is bolted to the upper end of the front side of the connecting plate 9, and a drive motor is bolted to the drive box 21. The upper end of the drive shaft 14 is connected to the drive motor via a coupling. A driving bevel gear 15 is fixedly mounted on the lower end of the drive shaft 14. A connecting shaft 16, parallel to the rolling shaft 13, is rotatably mounted on the rear vertical plate 12 via a bearing. The connecting shaft 16 is located below the two rolling shafts 13. A driven bevel gear 17 meshing with the driving bevel gear 15 is fixedly mounted at the rear end of the connecting shaft 16. A drive gear 18 is fixedly mounted at the front end of the connecting shaft 16. Driven gears 19 meshing with the drive gear 18 are fixedly mounted on the two rolling shafts 13 respectively.

[0027] To improve the stability of the wafer basket 11, four rectangular limiting blocks 20 are fixedly installed on the top of the tray 8 by bolts. The wafer basket 11 is placed between the four limiting blocks 20. The four limiting blocks 20 correspond to the four bottom corners of the wafer basket 11, and the four limiting blocks 20 are all L-shaped to match the four corners of the wafer basket 11, which can prevent the wafer basket 11 from shifting.

[0028] In use, an etching tank and a cleaning tank are placed on the front side of the guide rail 1 and along its length. The extension of the cylinder 6 moves the basket support 7 upward, lifting the wafer basket 11. Then, the chain drives the mounting plate 2 to move laterally along the guide rail 1. The mounting plate 2 moves the basket support 7 and the wafer basket 11 directly above the etching tank or cleaning tank, facilitating the transfer of the wafer basket 11 between different tanks. After the wafer basket 11 is directly above the etching tank or cleaning tank, the cylinder 6 retracts, moving the basket support 7 downward so that the wafer basket 11 is submerged in the etching tank or cleaning tank, thus realizing different processing steps for the wafer.

[0029] In addition, when the wafer basket 11 is immersed in the etching tank or cleaning tank, the drive motor drives the transmission shaft 14 to rotate. The transmission shaft 14 drives the driven bevel gear 17 and the connecting shaft 16 to rotate through the driving bevel gear 15. The connecting shaft 16 drives the two driven gears 19 and the two rolling shafts 13 to rotate synchronously through the drive gear 18. In turn, the two rolling shafts 13 drive the wafer in the wafer basket 11 to rotate, so that the wafer is in uniform contact with the etching solution or cleaning solution, thereby improving the etching and cleaning efficiency of the wafer.

[0030] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. Wafer rolling full-automatic mechanical hand, characterized in that: The device includes a horizontally extending guide rail, on which a mounting plate driven by a power mechanism is slidably mounted. A connecting seat driven by a telescopic component is mounted on the mounting plate. A basket holder is fixedly mounted on the connecting seat. The basket holder has a horizontally arranged support plate and a vertically arranged connecting plate fixedly mounted on the support plate. The upper end of the connecting plate is fixedly connected to the connecting seat. A wafer basket is placed on the support plate. Two horizontally extending rolling shafts are rotatably mounted on the support plate. The two rolling shafts are parallel and both contact the bottom of the wafer inside the wafer basket. The basket holder is equipped with a drive mechanism for synchronously rotating the two rolling shafts.

2. The wafer roll full-automatic robot according to claim 1, wherein: The power mechanism includes a chain that is driven to move by a power unit, and the mounting plate is fixedly connected to one of the links of the chain.

3. The wafer roll full-automatic robot as claimed in claim 1, wherein: The telescopic component is a cylinder, the cylinder body is fixedly mounted on the mounting plate, the piston rod of the cylinder extends upward, and the connecting seat is fixedly mounted on the upper end of the piston rod of the cylinder.

4. The wafer roll full-automatic robot as claimed in claim 1, wherein: Two opposing upright plates are fixedly mounted on the top of the pallet, and the two ends of the rolling shaft are rotatably mounted on the two upright plates respectively. The driving mechanism includes a vertically extending transmission shaft rotatably mounted on the connecting plate. The upper end of the transmission shaft is connected to a drive motor, and the lower end of the transmission shaft is fixedly mounted with a driving bevel gear. A connecting shaft parallel to the rolling shaft is rotatably mounted on one of the upright plates. A driven bevel gear meshing with the driving bevel gear is fixedly mounted on one end of the connecting shaft, and a drive gear is fixedly mounted on the other end of the connecting shaft. Driven gears meshing with the drive gear are fixedly mounted on the two rolling shafts respectively.

5. The wafer roll full-automatic robot as claimed in claim 1, wherein: The top of the tray is fixedly equipped with four limiting blocks arranged in a rectangle, and the wafer basket is placed between the four limiting blocks.

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