Zoom sleeve lens device and microscopic imaging system
Patent Information
- Application Number
- CN202521917886.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-05
- Publication Date
- 2026-08-11
- Estimated Expiration
- 2035-09-05
AI Technical Summary
目前，国内大多数套筒透镜都是固定焦距，如需使用不同焦距的管径，需要人工更换套筒透镜，并重新调整光路
[0020] In the technical solution provided by this utility model, by setting a first lens group and a second lens group, compared with the original case where only the second lens group was used, an additional type of sleeve lens focal length is added. The first lens group can change the field of view of the emitted light from the sleeve lens, thereby changing the focal length of the sleeve lens system. By movably setting the first lens group along the radial direction of the sleeve, the first lens group and the second lens group are both on the optical axis, or only the second lens group is on the optical axis. Thus, the variable focal length sleeve lens device can automatically switch the focal length, realize the adjustment of the focal length of the entire optical system, reduce the cost of use, and improve the convenience of use.
Smart Images
Figure CN224624845U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sleeve lens technology, and in particular to a variable focal length sleeve lens device and a microscopic imaging system. Background Technology
[0002] Currently, in the semiconductor technology field, with the continuous advancement of integrated circuit and chip manufacturing processes, high-resolution, high-precision microscope systems are needed to observe and detect minute structures and defects on chips. Sleeve lenses, as a crucial component in optical systems, help achieve superior optical performance and image quality. Currently, most sleeve lenses in China have a fixed focal length. If different focal lengths are required, the sleeve lens must be manually replaced, and the optical path readjusted. For high-precision equipment, this can easily affect the equipment's accuracy and increase setup time. Utility Model Content
[0003] The main purpose of this invention is to provide a zoom lens device and a microscopic imaging system, which aims to provide a zoom lens device that can switch between different focal lengths without changing the lens.
[0004] To achieve the above objectives, this utility model proposes a variable focal length sleeve lens device, including a sleeve and a plurality of lens groups arranged sequentially from the object side to the image side. The plurality of lens groups are installed inside the sleeve along the axial direction of the sleeve, and an optical axis extending along the axial direction of the sleeve is formed between the plurality of lens groups. The plurality of lens groups include:
[0005] A first lens group, having positive optical power, is radially movably disposed along the sleeve; and...
[0006] The second lens group, having positive optical power, is fixedly mounted on the optical axis;
[0007] The zoom of the zoom sleeve lens device is achieved by moving the first lens group onto the optical axis.
[0008] Optionally, the first lens group has an aperture stop on one side facing the object side.
[0009] Optionally, the distance between the side of the first lens group facing the object and the aperture is L1, where 5mm ≤ L1 ≤ 50mm; and / or,
[0010] The distance between the object-facing side of the second lens group and the aperture is L2, where 80mm≤L2≤125mm.
[0011] Optionally, the first lens group includes a first lens, a second lens, a third lens, a fourth lens, and a fifth lens arranged sequentially from the object side to the image side, wherein the optical power of the first lens is positive, the optical power of the second lens is negative, the optical power of the third lens is positive, the optical power of the fourth lens is negative, and the optical power of the fifth lens is positive; and / or,
[0012] The second lens group includes a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, and an eleventh lens arranged sequentially from the object side to the image side, wherein the optical power of the sixth lens is positive, the optical power of the seventh lens is positive, the optical power of the eighth lens is negative, the optical power of the ninth lens is negative, the optical power of the tenth lens is positive, and the optical power of the eleventh lens is positive.
[0013] Optionally, the first lens and the second lens are cemented together to form a first cemented lens, the first cemented lens having a positive optical power; the fourth lens and the fifth lens are cemented together to form a second cemented lens, the second cemented lens having a negative optical power; the seventh lens and the eighth lens are cemented together to form a third cemented lens, the third cemented lens having a negative optical power; and the ninth lens and the tenth lens are cemented together to form a fourth cemented lens, the fourth cemented lens having a negative optical power.
[0014] Optionally, the first lens is a biconvex lens, the second lens is a biconcave lens, the third lens is a concave-convex lens with its convex surface facing the object side, the fourth lens is a biconcave lens, the fifth lens is a biconvex lens, the sixth lens is a biconvex lens, the seventh lens is a concave-convex lens with its convex surface facing the object side, the eighth lens is a concave-convex lens with its concave surface facing the image side, the ninth lens is a concave-convex lens with its concave surface facing the object side, the tenth lens is a concave-convex lens with its convex surface facing the image side, and the eleventh lens is a biconvex lens.
[0015] Optionally, the lenses in the plurality of lens groups are all configured as glass spherical lenses.
[0016] This utility model also provides a microscopic imaging system, which further includes a variable focal length sleeve lens device. The variable focal length sleeve lens device includes a sleeve and a plurality of lens groups arranged sequentially from the object side to the image side. The plurality of lens groups are installed inside the sleeve along the axial direction of the sleeve, and an optical axis extending along the axial direction of the sleeve is formed between the plurality of lens groups. The plurality of lens groups include:
[0017] A first lens group, having positive optical power, is radially movably disposed along the sleeve; and...
[0018] The second lens group, having positive optical power, is fixedly mounted on the optical axis;
[0019] The zoom of the zoom sleeve lens device is achieved by moving the first lens group onto the optical axis.
[0020] In the technical solution provided by this utility model, by setting a first lens group and a second lens group, compared with the original case where only the second lens group was used, an additional type of sleeve lens focal length is added. The first lens group can change the field of view of the emitted light from the sleeve lens, thereby changing the focal length of the sleeve lens system. By movably setting the first lens group along the radial direction of the sleeve, the first lens group and the second lens group are both on the optical axis, or only the second lens group is on the optical axis. Thus, the variable focal length sleeve lens device can automatically switch the focal length, realize the adjustment of the focal length of the entire optical system, reduce the cost of use, and improve the convenience of use. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.
[0022] Figure 1 A schematic diagram of an embodiment of the variable focal length sleeve lens device provided by this utility model;
[0023] Figure 2 for Figure 1 MTF diagram of the zoom telescopic lens device when the first lens group is not on the optical axis;
[0024] Figure 3 for Figure 1 A schematic diagram of the distortion / curvature of the zoom telescopic lens device when the first lens group is not on the optical axis;
[0025] Figure 4 for Figure 1 A schematic diagram of a TFM (Transformer-to-Mechanical) variable focal length telescopic lens device when the first lens group is not on the optical axis;
[0026] Figure 5 for Figure 1 MTF diagram of the zoom telescopic lens device when the first lens group is on the optical axis;
[0027] Figure 6 for Figure 1 A schematic diagram of the distortion / curvature field of the variable focal length telescopic lens device when the first lens group is on the optical axis;
[0028] Figure 7 for Figure 1 A schematic diagram of a TFM (Transient Focal Module) for a variable focal length telescopic lens device when the first lens group is on the optical axis.
[0029] Explanation of icon numbers:
[0030]
[0031] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation
[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0033] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.
[0034] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.
[0035] Currently, in the semiconductor technology field, with the continuous advancement of integrated circuit and chip manufacturing processes, high-resolution, high-precision microscope systems are needed to observe and detect minute structures and defects on chips. Sleeve lenses, as a crucial component in optical systems, help achieve superior optical performance and image quality. Currently, most sleeve lenses in China have a fixed focal length. If different focal lengths are required, the sleeve lens must be manually replaced, and the optical path readjusted. For high-precision equipment, this can easily affect the equipment's accuracy and increase setup time.
[0036] The main purpose of this invention is to provide a zoom lens device and a microscopic imaging system, which aims to provide a zoom lens device that can switch between different focal lengths without changing the lens. Figures 1 to 7 A schematic diagram of the structure of one embodiment of the present utility model.
[0037] Please refer to Figure 1 The zoom lens device 1000 includes a sleeve and a plurality of lens groups arranged sequentially from the object side to the image side. The plurality of lens groups are installed inside the sleeve along the axial direction of the sleeve, and an optical axis extending along the axial direction of the sleeve is formed between the plurality of lens groups. The plurality of lens groups include a first lens group 100 and a second lens group 200. The first lens group 100 has positive optical power and is movably arranged radially along the sleeve. The second lens group 200 has positive optical power and is fixedly arranged on the optical axis. The zoom of the zoom lens device 1000 is achieved by moving the first lens group 100 onto the optical axis.
[0038] In the technical solution provided by this utility model, by setting a first lens group 100 and a second lens group 200, compared with the original case where only the second lens group 200 is used, an additional type of sleeve lens focal length is added. The first lens group 100 can change the field of view of the sleeve lens, thereby changing the focal length of the sleeve lens system. By movably setting the first lens group 100 along the radial direction of the sleeve, the first lens group 100 and the second lens group 200 are both on the optical axis, or only the second lens group 200 is on the optical axis. Thus, the variable focal length sleeve lens device 1000 can automatically switch the focal length, realize the adjustment of the focal length of the entire optical system, and reduce the cost of use.
[0039] It should be noted that optical power is equal to the difference between the image-side beam convergence and the object-side beam convergence, reflecting the optical system's ability to deflect light. The optical power of the first lens group 100 when imaging an object at infinity, in conjunction with the positive optical power of the second lens group 200, together precisely projects the light beam in the direction required by the design.
[0040] Furthermore, in order to improve imaging quality, in this embodiment, the first lens group 100 is provided with an aperture stop 300 on one side facing the object side. The aperture stop 300 limits the light transmission aperture on the axis and blocks part of the light during zooming, thereby reducing large aberration light at the edge of the field of view, improving image contrast, and helping to improve image quality.
[0041] Specifically, to precisely control the range of motion of the first lens group 100 and the second lens group 200, in this embodiment, the distance between the object-side side of the first lens group 100 and the aperture stop 300 is L1, where 5mm ≤ L1 ≤ 50mm; the distance between the object-side side of the second lens group 200 and the aperture stop 300 is L2, where 80mm ≤ L2 ≤ 125mm. It should be noted that the above two related technical features must be provided simultaneously.
[0042] Specifically, in the optical design process, lens groups are grouped according to their functions and tasks. The first lens group 100 includes a first lens 1, a second lens 2, a third lens 3, a fourth lens 4, and a fifth lens 5 arranged sequentially from the object side to the image side. The optical power of the first lens 1 is positive, the optical power of the second lens 2 is negative, the optical power of the third lens 3 is positive, the optical power of the fourth lens 4 is negative, and the optical power of the fifth lens 5 is positive. The second lens group 200 includes a sixth lens 6, a seventh lens 7, an eighth lens 8, a ninth lens 9, a tenth lens a, and an eleventh lens b arranged sequentially from the object side to the image side. The optical power of the sixth lens 6 is positive, the optical power of the seventh lens 7 is positive, the optical power of the eighth lens 8 is negative, the optical power of the ninth lens 9 is negative, the optical power of the tenth lens a is positive, and the optical power of the eleventh lens b is positive.
[0043] Furthermore, to reduce or eliminate chromatic aberration, in this embodiment, the first lens 1 and the second lens 2 are cemented together to form a first cemented lens, the first cemented lens having a positive optical power; the fourth lens 4 and the fifth lens 5 are cemented together to form a second cemented lens, the second cemented lens having a negative optical power; the seventh lens 7 and the eighth lens 8 are cemented together to form a third cemented lens, the third cemented lens having a negative optical power; and the ninth lens 9 and the tenth lens a are cemented together to form a fourth cemented lens, the fourth cemented lens having a negative optical power. This lens cementing method, by bonding two lenses of different materials together, corrects the dispersion of the glass, further improving the performance of polychromatic (white light) imaging compared to single-lens imaging.
[0044] Furthermore, the first lens 1 is a biconvex lens, the second lens 2 is a biconcave lens, the third lens 3 is a concave-convex lens with its convex surface facing the object side, the fourth lens 4 is a biconcave lens, the fifth lens 5 is a biconvex lens, the sixth lens 6 is a biconvex lens, the seventh lens 7 is a concave-convex lens with its convex surface facing the object side, the eighth lens 8 is a concave-convex lens with its concave surface facing the image side, the ninth lens 9 is a concave-convex lens with its concave surface facing the object side, the tenth lens a is a concave-convex lens with its convex surface facing the image side, and the eleventh lens b is a biconvex lens.
[0045] Furthermore, the lenses in the multiple lens groups are all made of glass spherical lenses. Since glass spherical lenses are not easily affected by thermal expansion and contraction and thus do not easily lose focus, they can effectively resist the problem of lens deformation due to heat, maintain the high precision of the lens for a long time, and reduce costs while ensuring image quality and reliability. They also have lower assembly sensitivity and improve the yield of finished products.
[0046] Furthermore, all lenses are made of Chengdu Guangming brand materials, namely H-FK61, H-LAK51A, H-LAK53B, H-ZPK5 and H-TF3L, and it is worth mentioning that these materials are all environmentally friendly.
[0047] It should be noted that the basic parameters of the zoom telescopic lens device 1000 in this embodiment are shown in Table 1, where the radius and center distance are in millimeters (mm).
[0048] Table 1
[0049]
[0050]
[0051] Please refer to Figure 2 and Figure 4 The optical performance of the system when the first lens group 100 is not on the optical axis can be evaluated based on the MTF curve, distortion / curvature curve and TFM curve. As can be seen from the above figure, the spherical aberration, field curvature and distortion in this embodiment can be well corrected.
[0052] Please refer to Figure 5 and Figure 7 The optical performance of the system when the first lens group 100 is on the optical axis can be evaluated based on the MTF curve, distortion / curvature curve and TFM curve. As can be seen from the above figure, the spherical aberration, field curvature and distortion in this embodiment can be well corrected.
[0053] In one embodiment, the zoom lens assembly 1000 has a limiting resolution of 5 μm, a field curvature of less than 50 μm, and relative distortion controlled within 0.1%. The zoom lens assembly 1000 is an image-side telecentric optical path, with the telecentricity of the principal wavelength on the image side controlled within ±1°. When the first lens group 100 is not on the optical axis, the focal length of the zoom lens assembly 1000 is 200 mm; when the first lens group 100 is on the optical axis, the focal length is 300 mm. When the entrance pupil distance of the first lens group 100 varies within the range of 5 mm to 105 mm, and the entrance pupil distance of the second lens group 200 varies within the range of 80 mm to 180 mm, the system's imaging quality remains essentially unaffected.
[0054] In one embodiment, the zoom lens sleeve device 1000 further includes an electronic control system, which includes a controller and a motor. The controller controls the motor to drive the first lens group 100 to move in the radial direction of the sleeve, thereby realizing the switching of the focal length of the zoom lens sleeve device 1000.
[0055] This utility model also provides a microscopic imaging system, which includes the above-mentioned zoom lens sleeve device 1000. Since the microscopic imaging system includes the zoom lens sleeve device 1000, the specific structure of the zoom lens sleeve device 1000 is as described in the above embodiments. Because the zoom lens sleeve device 1000 of this microscopic imaging system adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be described in detail here.
[0056] The above description is only an optional embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.
Claims
1. A variable focal length sleeve lens device, characterized in that, The system includes a sleeve and a plurality of lens groups arranged sequentially from the object side to the image side. The plurality of lens groups are mounted within the sleeve along its axial direction, and an optical axis extending along the axial direction of the sleeve is formed between the plurality of lens groups. The plurality of lens groups include: A first lens group, having positive optical power, is radially movably disposed along the sleeve; and... The second lens group, having positive optical power, is fixedly mounted on the optical axis; The zoom of the zoom sleeve lens device is achieved by moving the first lens group onto the optical axis.
2. The zoom telescopic lens device as described in claim 1, characterized in that, The first lens group has an aperture stop on one side facing the object side.
3. The zoom telescopic lens device as described in claim 2, characterized in that, The distance between the object-facing side of the first lens group and the aperture stop is L1, where 5mm ≤ L1 ≤ 50mm; and / or, The distance between the object-facing side of the second lens group and the aperture is L2, where 80mm≤L2≤125mm.
4. The zoom telescopic lens device as described in claim 1, characterized in that, The first lens group includes a first lens, a second lens, a third lens, a fourth lens, and a fifth lens arranged sequentially from the object side to the image side, wherein the optical power of the first lens is positive, the optical power of the second lens is negative, the optical power of the third lens is positive, the optical power of the fourth lens is negative, and the optical power of the fifth lens is positive; and / or, The second lens group includes a sixth lens, a seventh lens, an eighth lens, a ninth lens, a tenth lens, and an eleventh lens arranged sequentially from the object side to the image side, wherein the optical power of the sixth lens is positive, the optical power of the seventh lens is positive, the optical power of the eighth lens is negative, the optical power of the ninth lens is negative, the optical power of the tenth lens is positive, and the optical power of the eleventh lens is positive.
5. The zoom telescopic lens device as described in claim 4, characterized in that, The first lens and the second lens are cemented together to form a first cemented lens, the first cemented lens having a positive optical power; the fourth lens and the fifth lens are cemented together to form a second cemented lens, the second cemented lens having a negative optical power; the seventh lens and the eighth lens are cemented together to form a third cemented lens, the third cemented lens having a negative optical power; and the ninth lens and the tenth lens are cemented together to form a fourth cemented lens, the fourth cemented lens having a negative optical power.
6. The zoom telescopic lens device as described in claim 4, characterized in that, The first lens is a biconvex lens, the second lens is a biconcave lens, the third lens is a concave-convex lens with its convex surface facing the object side, the fourth lens is a biconcave lens, the fifth lens is a biconvex lens, the sixth lens is a biconvex lens, the seventh lens is a concave-convex lens with its convex surface facing the object side, the eighth lens is a concave-convex lens with its concave surface facing the image side, the ninth lens is a concave-convex lens with its concave surface facing the object side, the tenth lens is a concave-convex lens with its convex surface facing the image side, and the eleventh lens is a biconvex lens.
7. The zoom telescopic lens device as described in claim 4, characterized in that, The lenses in the multiple lens groups are all configured as glass spherical lenses.
8. A microscopic imaging system, characterized in that, Includes the zoom telescopic lens device as described in any one of claims 1 to 7.