Drying apparatus

Abstract

This application relates to a drying device, comprising: a drying chamber, a supporting structure, a drying structure, an air jet structure, a filtering structure, and a moving structure. The drying chamber is internally divided into a first receiving space and a second receiving space by a mounting plate. The supporting structure is disposed within the second receiving space. The drying structure is disposed within the second receiving space. The air jet structure includes a first air jet pipe and a second air jet pipe, both of which are oscillatingly disposed within the second receiving space. The filtering structure includes an air supply pipe located within the first receiving space and connected to the first and second air jet pipes. The oscillating structure is disposed within the first receiving space and cooperates with the first and second air jet pipes to drive them to oscillate. The technical solution of this application effectively solves the problem in the prior art where residual moisture on the surface of the protective plate cannot be effectively removed after cleaning.

Description

Technical Field

[0001] This application relates to the technical field of PVD protective plate cleaning, and more specifically, to a drying device. Background Technology

[0002] PVD stands for Physical Vapor Deposition. Under a certain vacuum environment and an applied electric field, the process gas is dissociated by the dissociation of high-energy electrons to form plasma glow discharge. The gas ions in the plasma are accelerated by the electric field and bombard the target material, causing the target material atoms to be sputtered onto the silicon wafer surface to form a dense thin film.

[0003] The protective plate is a key fixture installed inside the PVD coating equipment. Its main function is to protect the equipment cavity and critical components from being covered by the coating material, and to precisely control the coating area, thereby ensuring coating quality, improving production efficiency, and reducing maintenance costs. During coating, target particles deposit on the protective plate. Once a certain thickness is reached, adhesion weakens, and the film layer detaches onto the silicon wafer, causing yellow powder defects. Therefore, after a certain lifespan, the protective plate needs to be taken off the machine and cleaned externally to remove the deposited film layer. After cleaning, moisture remains on the surface of the protective plate, and during transportation and storage, impurities in the air are also adsorbed onto the protective plate. When the protective plate, carrying impurities and moisture, is loaded onto the machine, it reduces the permeability of the TCO film and increases its resistivity. In practical applications, drying devices (e.g., authorized publication number: CN 219199775 U, title: A drying device for insulation board production) are used to achieve good drying through a heating chamber and air jet pipes. However, during air jetting, impurities and moisture in the gas fall back onto the protective plate, making the cleaning incomplete. Utility Model Content

[0004] This application provides a drying device to solve the problem in the prior art that residual moisture on the surface of the protective plate cannot be effectively removed after cleaning.

[0005] A drying apparatus according to this application includes: a drying chamber, a supporting structure, a drying structure, an air jet structure, a filtering structure, and a moving structure. The drying chamber is divided into a first receiving space and a second receiving space by a mounting plate. The supporting structure is disposed within the second receiving space. The drying structure is disposed within the second receiving space. The air jet structure includes a first air jet pipe and a second air jet pipe, both of which are oscillatingly disposed within the second receiving space. The filtering structure includes an air supply pipe located within the first receiving space and connected to both the first and second air jet pipes. The oscillating structure is disposed within the first receiving space and cooperates with the first and second air jet pipes to drive them to oscillate.

[0006] In some embodiments, the support structure includes a plurality of support rollers rotatably disposed within a second accommodating space, and the drying structure includes a first heating plate and a second heating plate, which are respectively disposed on the upper and lower sides of the support rollers.

[0007] In some embodiments, the first jet pipe and the second jet pipe are respectively disposed on the upper and lower sides of the support roller, and the first jet pipe is disposed between the first heating plate and the support roller, and the second jet pipe is disposed between the second heating plate and the support roller. Both the first jet pipe and the second jet pipe have jet holes along the axial direction, and the jet holes are all facing the support roller.

[0008] In some embodiments, the swing structure includes a drive motor, a synchronous belt, two sets of pulleys and two sets of support plates. Both sets of support plates are mounted on a mounting plate. The two sets of pulleys and the two sets of support plates are arranged in a one-to-one correspondence. The drive motor is connected to the first set of pulleys for transmission, and the synchronous belt cooperates with the two sets of pulleys.

[0009] In some embodiments, the swing structure further includes a rotating rod, a mating rod, a gear disk, and a gear. The rotating rod is connected to a first set of pulleys, and the rotating rod and the first set of pulleys are respectively located on both sides of the first set of support plates. The rotating rod has a connecting post, and the mating rod has a connecting elongated hole. The connecting post is movably disposed in the connecting elongated hole. The gear disk is connected to the mating rod, and the gear disk meshes with the gear. The gear is connected to the first end of the first jet pipe, and the second end of the first jet pipe is swingably disposed on the side wall of the drying chamber.

[0010] In some embodiments, the filter structure includes an air intake pump, a mounting box, a filter plate, and a limiting member. The air intake pump and the mounting box are disposed outside the drying chamber and on the top surface of the drying chamber. The air intake pump is disposed above the mounting box and is connected to an air supply pipe. The filter plate is detachably disposed inside the mounting box via the limiting member.

[0011] In some embodiments, the mounting box has an internal accommodating space, and a supporting boss is provided circumferentially inside the mounting box. A first opening and a second opening are provided on one side of the mounting box. The filter plate is placed on the supporting boss through the first opening. A third opening is provided on the supporting boss on one side. The limiting member includes an L-shaped limiting block and a limiting spring. The first end of the limiting spring is fixed to the bottom surface of the second opening, and the second end of the limiting spring is fixed to the bottom surface of the L-shaped limiting block. The L-shaped limiting block is partially movable through the third opening and placed inside the first opening, and abuts against the filter plate to limit the position of the filter plate.

[0012] In some embodiments, the support roller is an electric conveyor roller, and the drying chamber has a flow opening on the side wall corresponding to the position of the support roller.

[0013] In some embodiments, the bottom of the drying chamber has an air outlet.

[0014] In some embodiments, a sealed door is provided on the drying chamber.

[0015] According to the technical solution of this application, the drying device includes: a drying chamber, a supporting structure, a drying structure, an air jet structure, a filtering structure, and a swinging structure. The drying chamber is divided into a first receiving space and a second receiving space by a mounting plate. The supporting structure is located in the second receiving space and is used to support the protective plate. The drying structure is located in the second receiving space and is used to dry the protective plate. The air jet structure includes a first air jet pipe and a second air jet pipe, both of which are swingably arranged in the second receiving space. The first and second air jet pipes are used to blow air onto the protective plate to prevent moisture and impurities from falling back onto it. The filtering structure includes an air supply pipe located in the first receiving space and connected to the first and second air jet pipes. Clean air is delivered to the first and second air jet pipes through the air supply pipe. The swinging structure is located in the first receiving space and cooperates with the first and second air jet pipes to swing them, achieving all-round blowing of the protective plate and making the removal of moisture more thorough. The technical solution of this application effectively solves the problem in the prior art that residual moisture on the surface of the protective plate cannot be effectively removed after cleaning. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the drying apparatus according to an embodiment of this application is shown; Figure 2 A schematic diagram of the drying chamber according to an embodiment of this application is shown; Figure 3 A schematic diagram of the installation of the swing structure and jet structure according to an embodiment of this application is shown; Figure 4 A partial structural schematic diagram of the swing structure according to an embodiment of this application is shown; Figure 5 This invention provides a schematic diagram of the swing structure and jet structure from another angle, representing an embodiment of the present application. Figure 6 A schematic diagram of the filtering structure according to an embodiment of this application is shown; Figure 7 It shows Figure 6 A magnified structural diagram of point A in the middle.

[0019] The above figures include the following reference numerals: 10. Drying chamber; 11. Mounting plate; 12. First receiving space; 13. Second receiving space; 14. Flow opening; 15. Air outlet; 16. Sealing door; 20. Support structure; 21. Support roller; 30. Drying structure; 31. First heating plate; 32. Second heating plate; 40. Air jet structure; 41. First air jet pipe; 42. Second air jet pipe; 421. Air jet hole; 50. Filter structure; 51. Air supply pipe; 52. Air inlet pump; 53. Mounting box; 531. Support boss; 5311. Third opening; 532. First opening; 533. Second opening; 54. Filter plate; 55. Limiting component; 551. L-shaped limiting block; 552. Limiting spring; 60. Swinging structure; 61. Drive motor; 62. Synchronous belt; 63. Pulley; 64. Support plate; 65. Rotating rod; 651. Connecting column; 66. Matching rod; 661. Connecting elongated hole; 67. Gear plate; 68. Gear. Detailed Implementation

[0020] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0021] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0022] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, rotated 90 degrees, or in other orientations, and the spatial relative descriptions used herein will be interpreted accordingly.

[0023] like Figure 1 and Figure 2 As shown, the embodiment relates to a drying device, including: a drying chamber 10, a support structure 20, a drying structure 30, an air jet structure 40, a filter structure 50, and a swing structure 60. The drying chamber 10 is internally divided into a first receiving space 12 and a second receiving space 13 by a mounting plate 11. The support structure 20 is disposed within the second receiving space 13. The drying structure 30 is disposed within the second receiving space 13. The air jet structure 40 includes a first air jet pipe 41 and a second air jet pipe 42, both of which are swingably disposed within the second receiving space 13. The filter structure 50 includes an air supply pipe 51, which is located within the first receiving space 12 and communicates with both the first air jet pipe 41 and the second air jet pipe 42. The swing structure 60 is disposed within the first receiving space 12 and cooperates with the first air jet pipe 41 and the second air jet pipe 42 to drive them to swing.

[0024] The drying device, using the technical solution of this embodiment, includes: a drying chamber, a supporting structure, a drying structure, an air jet structure, a filtering structure, and a swinging structure. The drying chamber is divided into a first receiving space and a second receiving space by a mounting plate. The supporting structure is disposed within the second receiving space and is used to support the protective plate. The drying structure is disposed within the second receiving space and is used to dry the protective plate. The air jet structure includes a first air jet pipe and a second air jet pipe, both of which are swingably disposed within the second receiving space. The first and second air jet pipes are used to blow air onto the protective plate to prevent moisture and impurities from falling back onto it. The filtering structure includes an air supply pipe located within the first receiving space and connected to the first and second air jet pipes. Clean air is delivered to the first and second air jet pipes through the air supply pipe. The swinging structure is disposed within the first receiving space and cooperates with the first and second air jet pipes to swing them, achieving all-around blowing of the protective plate and making moisture removal more thorough. The technical solution of this application effectively solves the problem in the prior art that residual moisture on the surface of the protective plate cannot be effectively removed after cleaning.

[0025] like Figure 1 As shown, in some embodiments, the support structure 20 includes multiple support rollers 21, which are rotatably disposed within the second accommodating space 13. The drying structure 30 includes a first heating plate 31 and a second heating plate 32, which are respectively disposed on the upper and lower sides of the support rollers 21. The first heating plate 31 and the second heating plate 32 can dry both sides of the protective plate. Both the first heating plate 31 and the second heating plate 32 are electric heating plates. In addition, wiring holes are adaptively opened on the side wall of the drying chamber 10. The first heating plate 31 and the second heating plate 32 are respectively fixed to the top and bottom surfaces of the drying chamber.

[0026] like Figure 1 As shown, in some embodiments, the first air jet pipe 41 and the second air jet pipe 42 are respectively disposed on the upper and lower sides of the support roller 21, with the first air jet pipe 41 positioned between the first heating plate 31 and the support roller 21, and the second air jet pipe 42 positioned between the second heating plate 32 and the support roller 21. Both the first air jet pipe 41 and the second air jet pipe 42 have air jet holes 421 along the axial direction, and the air jet holes 421 are both facing the support roller 21. The first air jet pipe 41 and the second air jet pipe 42 can not only blow the protective plate by spraying gas, but the blown gas can also be heated by the first heating plate 31 and the second heating plate 32, and the hot gas can further improve the drying effect.

[0027] like Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments, the swing structure 60 includes a drive motor 61, a synchronous belt 62, two sets of pulleys 63, and two sets of support plates 64. Both sets of support plates 64 are mounted on the mounting plate 11. The two sets of pulleys 63 and the two sets of support plates 64 are arranged in a one-to-one correspondence. The drive motor 61 is connected to the first set of pulleys 63, and the synchronous belt 62 cooperates with the two sets of pulleys 63. The drive motor 61 delivers driving force, enabling the two sets of pulleys 63 to rotate synchronously.

[0028] like Figure 3 and Figure 5 As shown, in some embodiments, the swing structure 60 further includes a rotating rod 65, a mating rod 66, a gear 67, and a gear 68. The rotating rod 65 is connected to the first set of pulleys 63, which drive the rotating rod 65 to rotate synchronously. The rotating rod 65 and the first set of pulleys 63 are located on both sides of the first set of support plates 64. The rotating rod 65 has a connecting post 651, and the mating rod 66 has a connecting elongated hole 661. The connecting post 651 is movably disposed in the connecting elongated hole 661. As the rotating rod 65 rotates, the connecting post 651 reciprocates within the connecting elongated hole 661. During the rotation, the connecting post 651 drives the rotating rod 65 to rotate synchronously. After rotating to two extreme positions, the connecting post 651 moves within the connecting elongated hole 661. Therefore, the movement of the mating rod 66 at this time is a left-right swing. The toothed disc 67 is connected to the mating rod 66. The mating rod 66 drives the toothed disc 67 to swing synchronously. The toothed disc 67 meshes with the gear 68. The toothed disc 67 drives the gear 68 to swing. The gear 68 is connected to the first end of the first jet pipe 41. The second end of the first jet pipe 41 is swayably set on the side wall of the drying chamber 10. As the gear 68 swings, the first jet pipe 41 swings synchronously.

[0029] It should be noted that the gear 68 and the first jet pipe 41 are located on both sides of the mounting plate 11, and the mounting plate 11 is provided with a first through hole and a support hole to facilitate the installation of the first jet pipe.

[0030] It should also be noted that the rotating rod 65, the mating rod 66, the gear plate 67, and the gear 68 are all provided in two sets, which respectively cooperate with the first set of pulleys 63, the second set of pulleys 63, the first jet pipe 41, and the second jet pipe 42. The cooperation method with the second set of pulleys 63 and the second jet pipe 42 is the same as that with the first set of pulleys 63 and the first jet pipe 41, and will not be described again here.

[0031] like Figure 1 and Figure 6 As shown, in some embodiments, the filter structure 50 includes an air intake pump 52, a mounting box 53, a filter plate 54, and a limiting member 55. The air intake pump 52 and the mounting box 53 are disposed outside the drying chamber 10 and on the top surface of the drying chamber 10. The air intake pump 52 is positioned above the mounting box 53 and is connected to the air supply pipe 51. A second through hole is provided on the top surface of the drying chamber 10 to facilitate connection to the air supply pipe 51. Gas from the external environment, or gas supplied through a dedicated supply pipe, is supplied by the air intake pump 52 to the air supply pipe 51. The filter plate 54 is detachably mounted inside the mounting box 53 via the limiting member 55. The gas pumped in by the air intake pump 52 first passes through the filter plate 54 for filtration before flowing into the air supply pipe 51. The detachable nature of the filter plate 54 allows for convenient replacement.

[0032] like Figure 6 and Figure 7As shown, in some embodiments, the mounting box 53 has an internal accommodating space, and a support boss 531 is provided circumferentially inside the mounting box 53. A first opening 532 and a second opening 533 are provided on one side of the mounting box 53. The filter plate 54 is placed on the support boss 531 through the first opening 532. The support boss 531 supports the filter plate 54, and the filter plate 54 can be pulled out and replaced along the support boss 531. A third opening 5311 is provided on one side of the support boss 531. The limiting member 55 includes an L-shaped limiting block 551 and a limiting spring 552. The first end of the limiting spring 552 is fixed to the bottom surface of the second opening 533, and the second end of the limiting spring 552 is fixed to the bottom surface of the L-shaped limiting block 551. The L-shaped limiting block 551 can be raised and lowered through the third opening 5311 and placed inside the first opening 532, and abuts against the filter plate 54 to limit the filter plate 54. At this time, the limiting spring 552 is in a compressed state and not compressed to the limit state or in an uncompressed and unstretched state. When the filter plate 54 needs to be replaced, the L-shaped limiting block 551 is pressed down, which drives the limiting spring 552 to compress so that the L-shaped limiting block 551 is dislodged from the third opening 5311 and no longer abuts against the filter plate 54. At this time, the filter plate 54 can be pulled out for replacement.

[0033] like Figure 1 As shown, in some embodiments, the support roller 21 is an electric conveyor roller, and a flow opening 14 is provided on the side wall of the drying chamber 10 corresponding to the position of the support roller 21. Multiple electric conveyor rollers are provided, with gaps between them. The electric conveyor rollers enable drying during the flow of the protective plate, significantly improving production efficiency. The electric conveyor rollers can be an integrated, one-piece structure, or a motor or other structure can be mounted on the side wall of the drying chamber. The choice can be made according to actual needs, and since this is existing technology, it will not be described in detail here.

[0034] In addition, the support structure 20 can also be a support plate with openings spaced apart to facilitate ventilation. After drying, the sealing door 16 is opened to remove the protective plate.

[0035] like Figure 1 As shown, in some embodiments, the drying chamber 10 has an air outlet 15 at its bottom. The air outlet 15 is used to exhaust air and maintain stable air pressure inside the drying chamber 10. Additionally, a set of filter plates 54 can be installed at the air outlet 15 to prevent impurities from entering through the air outlet 15. An exhaust fan can also be added to improve exhaust efficiency.

[0036] like Figure 2 As shown, in some embodiments, a sealing door 16 is provided on the drying chamber 10, which facilitates the operator to inspect and maintain the components inside the drying chamber 10.

[0037] It should be noted that the drying chamber 10 is equipped with temperature and pressure sensors to detect temperature and pressure. A control module and an audible and visual alarm are also included. The control module is electrically connected to the temperature sensor, pressure sensor, air pump 52, drive motor 61, the motor of the electric conveyor roller, and the audible and visual alarm. The temperature and pressure sensors can detect temperature and pressure and transmit the detected information to the control module. Once an abnormal signal is detected, the control module controls the air pump 52, drive motor 61, and other components to stop working and notifies the operator to perform maintenance via the audible and visual alarm.

[0038] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0039] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0040] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A drying apparatus, characterized by, include: The drying chamber (10) is divided into a first accommodating space (12) and a second accommodating space (13) by a mounting plate (11). A support structure (20) is disposed within the second accommodating space (13); A drying structure (30) is disposed within the second accommodating space (13); The jet structure (40) includes a first jet pipe (41) and a second jet pipe (42), both of which are swayably disposed within the second accommodating space (13). The filter structure (50) includes an air supply pipe (51), which is located in the first accommodating space (12) and is connected to the first jet pipe (41) and the second jet pipe (42). A swing structure (60) is disposed in the first accommodating space (12). The swing structure (60) cooperates with the first jet pipe (41) and the second jet pipe (42) to drive the first jet pipe (41) and the second jet pipe (42) to swing.

2. The drying apparatus according to claim 1, wherein The support structure (20) includes a plurality of support rollers (21), which are rotatably disposed in the second accommodating space (13). The drying structure (30) includes a first heating plate (31) and a second heating plate (32), which are respectively disposed on the upper and lower sides of the support rollers (21).

3. The drying apparatus according to claim 2, wherein The first jet pipe (41) and the second jet pipe (42) are respectively disposed on the upper and lower sides of the support roller (21), and the first jet pipe (41) is placed between the first heating plate (31) and the support roller (21), and the second jet pipe (42) is placed between the second heating plate (32) and the support roller (21). Both the first jet pipe (41) and the second jet pipe (42) have jet holes (421) along the axial direction, and the jet holes (421) are all facing the support roller (21).

4. The drying apparatus according to claim 1, wherein The swing structure (60) includes a drive motor (61), a synchronous belt (62), two sets of pulleys (63) and two sets of support plates (64). Both sets of support plates (64) are mounted on the mounting plate (11). The two sets of pulleys (63) and the two sets of support plates (64) are arranged in a one-to-one correspondence. The drive motor (61) is connected to the first set of pulleys (63) for transmission. The synchronous belt (62) cooperates with the two sets of pulleys (63).

5. The drying apparatus according to claim 4, wherein The swing structure (60) further includes a rotating rod (65), a mating rod (66), a gear disc (67), and a gear (68). The rotating rod (65) is connected to the first set of pulleys (63), and the rotating rod (65) and the first set of pulleys (63) are located on both sides of the first set of support plates (64). The rotating rod (65) has a connecting post (651), and the mating rod (66) has a connecting elongated hole (661). The connecting post (651) is movably disposed in the connecting elongated hole (661). The gear disc (67) is connected to the mating rod (66), and the gear disc (67) meshes with the gear (68). The gear (68) is connected to the first end of the first jet pipe (41), and the second end of the first jet pipe (41) is swingably disposed on the side wall of the drying chamber (10).

6. The drying apparatus of claim 1, wherein The filter structure (50) includes an air inlet pump (52), a mounting box (53), a filter plate (54), and a limiting member (55). The air inlet pump (52) and the mounting box (53) are located outside the drying chamber (10) and on the top surface of the drying chamber (10). The air inlet pump (52) is located above the mounting box (53). The air inlet pump (52) is connected to the air supply pipe (51). The filter plate (54) is detachably mounted inside the mounting box (53) through the limiting member (55).

7. The drying apparatus of claim 6, wherein The mounting box (53) has an internal accommodating space. A support boss (531) is provided circumferentially inside the mounting box (53). A first opening (532) and a second opening (533) are provided on one side of the mounting box (53). The filter plate (54) is placed on the support boss (531) through the first opening (532). A third opening (5311) is provided on one side of the support boss (531). The limiting member (55) includes an L-shaped limiting block (551) and a limiting spring (552). The first end of the limiting spring (552) is fixed to the bottom surface of the second opening (533). The second end of the limiting spring (552) is fixed to the bottom surface of the L-shaped limiting block (551). The L-shaped limiting block (551) is partially able to pass through the third opening (5311) and be placed inside the first opening (532), and abut against the filter plate (54) to limit the filter plate (54).

8. The drying apparatus according to claim 2, characterized in that, The support roller (21) is an electric conveyor roller, and the drying chamber (10) has a flow opening (14) on the side wall corresponding to the position of the support roller (21).

9. The drying apparatus of claim 1, wherein, The drying chamber (10) has an air outlet (15) at the bottom.

10. The drying apparatus of claim 1, wherein, The drying chamber (10) is equipped with a sealing door (16).

Images