MEMBRANVENTIL

Abstract

Diaphragm valve suitable for 200°C high-temperature and high-corrosion applications, which may be a metal-free diaphragm valve or a metal diaphragm valve, wherein the diaphragm valve comprises a valve (10a) and an actuator cylinder (10b), wherein the valve (10a) has a valve body (2) and a diaphragm (3) made of fluoropolymer resin, wherein the actuator cylinder (10b) has an upper valve body (5), an upper valve cover (6), a valve shaft (4), an actuator air port (171) and a cooling air port (161), wherein the membrane (3) has an edge section (31), an elastic section (32) and a middle section (33); the valve body (2) has an annular section (24) and a square section (25), wherein the square section (25) has an inlet pipe (21), an outlet pipe (22) and a valve chamber (23), wherein the valve chamber (23) has a valve seat (231) and a channel (232), wherein the annular section (24) has a sealing surface (240), an opening (241), an inner annular surface (243) and an outer annular surface (246), wherein the inner annular surface (243) forms a sealing groove (245) and an O-ring groove; the upper valve body (5) has an outer annular surface (51), a pressure section (52), a shaft hole (53) and a diaphragm chamber (56), wherein the upper valve body (5) is arranged in the annular section (24), wherein the pressure section (52) serves to press the edge section (31) of the diaphragm (3) into the sealing groove (245) of the annular section (24); the valve shaft (4) has a screwing section (41), a hollow shaft (42) and a piston section (43), wherein the screwing section (41) serves to fasten the central section (33) of the diaphragm (3), wherein the hollow shaft (42) passes through the shaft hole (53) of the upper valve body (5) and is sealed by several O-rings; the upper valve cover (6) has an interior (61), an upper section (62), a central through-hole (621), an outer annular surface (63) and a sealing surface (64), wherein the upper valve cover (6) is tightly screwed to the valve body (2) and forms a cylinder structure (8) having a cylinder chamber (175) which is divided by the piston section (43) into an upper cylinder chamber and a lower cylinder chamber; the diaphragm (3), the valve shaft (4) and the upper valve body (5) form a valve shaft group (7), wherein the end of the valve shaft (4) passes through the central through-hole (621) of the upper valve cover (6), wherein the annular section (24) and the valve chamber (23) form a cup-shaped structure, the valve shaft group (7) and the cylinder structure (8) being supported by the cup-shaped structure; The heat source zones comprise a valve chamber heat source zone, a duct heat source zone, an inlet pipe heat source zone, and an outlet pipe heat source zone, wherein the square section (25), the annular section (24), the upper valve body (5), and the diaphragm (3) form a heat transfer path, wherein the square section (25) has a square plate (251) and several finned plates, the finned plates being arranged below the square plate (251) to connect the inlet pipe (21), the outlet pipe (22), and the duct side wall (233), wherein a heat transfer limiting zone (147) comprises the square plate (251) and the finned plates and has a heat transfer cross-sectional thickness, the thickness of which is not greater than or equal to the thickness of the inlet pipe and less than 3 mm, and wherein the square plate (251) has a central opening.which accommodates the valve chamber (23) and is connected to the channel side wall (233), wherein the smallest diameter portion (242) of the annular section (24) is connected to the top of the square plate (251), wherein the outer side wall of the sealing groove (245) forms the inner annular surface (243) of the annular section (24) and the inner side wall of the sealing groove (245) forms the channel side wall (233), wherein the square plate (251) forms the bottom wall of the sealing groove (245), wherein the sealing groove (245) and the smallest diameter portion (242) also form a heat transfer limitation zone (147), wherein a plurality of cooling fins (248) are provided on the outer annular surface (246) which is connected to the square plate (251), wherein the cooling fins (248) also form a heat transfer limitation zone (147); , a variety of cooling structures, including a variety of natural cooling structures and an internal cooling structure; the natural cooling structure is formed by the surface of the square plate (251), the cooling fins (248) of the annular section (24) and the cooling fins (633) of the upper valve cover (6), the internal cooling structure is formed by the cooling air and a cooling air duct, wherein the cooling air duct is formed by one or more than one cooling air hole of the annular section (24), wherein the cooling air hole is connected to a cooling air annular groove (163), wherein the cooling air annular groove is connected to the cooling air guide holes (164) of the pressure section of the upper valve body (5), wherein the cooling air guide holes (164) are connected to the side of the diaphragm space (165) not in contact with the liquid, and wherein the air guide holes of the hollow shaft (42) are connected to the shaft hole (53).

Description

Technical field

[0001] The invention relates to a diaphragm valve, in particular a diaphragm valve made of fluorinated resin with a very low heat transfer coefficient of about 0.25 W / (mK), which is much lower than that of ceramic aluminum oxide Al₂O₃ at about 30 W / (mK). These extremely low heat transfer properties enable these materials to withstand high temperatures of about 250°C. When the diaphragm valve is pressurized, it can only be used for high-temperature and high-corrosion applications below 160°C. To achieve a high-temperature operating environment of 250°C, metal component support is required. However, the metal ball valve lined with fluorinated resin can only be used for high-temperature and high-corrosion applications at 200°C. High-temperature and high-corrosion applications at 200°C pose a significant challenge for a fluorinated resin diaphragm valve. State of the art

[0002] The diaphragm valve consists of a diaphragm made of a fluorinated resin and a valve body, and is driven by a valve stem to isolate the corrosive fluid. Conventional corrosion-resistant diaphragm valves are widely used, have different structures for various applications, and are suitable for high-temperature and highly corrosive applications with temperatures below 160°C.

[0003] Conventional diaphragm valves can have one or more of the following features: 1. The compressed air drives the piston of the valve shaft to switch; 2. manual shifting mechanism; 3. motorized switching mechanism 4. The flow rate is regulated by an adjustment mechanism; 5. The static electricity generated by the transport fluid can be eliminated; 6. The valve body is fastened with metal screws; 7. The valve body is attached with a non-metallic thread; 8. No particle release structure; 9. Creep of the structure can be prevented; 10. The leak can be detected.

[0004] The conventional diaphragm valve made of fluoropolymer consists of a valve and an actuator cylinder. The valve comprises a valve body, a diaphragm, and the like. The actuator cylinder comprises an upper valve body, an upper valve cover, a valve stem, and the like. The valve body has a square section and an annular section. The state-of-the-art actuator cylinder has an upper valve body and an upper valve cover to accommodate the valve stem, piston, spring, and the like. Compressed air drives the opening and closing of the diaphragm on the opposite side of the spring force. The actuator cylinder also has a cylindrical structure.Depending on the application, it can be divided into a metal-free diaphragm valve and a metal diaphragm valve, a metal-free normally closed diaphragm valve, a metal-free normally open diaphragm valve, a normally closed metal diaphragm valve, and a normally open metal diaphragm valve. The valve body, upper valve body, and upper valve cover of the metal-free diaphragm valve are tightly screwed together, which is best suited for high-purity liquid transport. The four corners of the cylindrical structure of the metal diaphragm valve each have a metal screw to tightly connect the valve body, upper valve body, and upper valve cover. Each screw is protected by an upper screw bushing, a lower screw bushing, and a valve body.The upper valve stem bushing is located on the outer annular surface of the upper valve cover, and the lower valve stem bushing is located on the outer annular surface of the upper valve body. A first sealing surface is formed between the upper and lower valve stem bushings, and a second sealing surface is formed between the lower valve stem bushing and the annular section of the valve body. The conventional diaphragm is attached to the inside of the valve body opening. The edge of the diaphragm is pressed firmly into the sealing groove by the upper valve body. The valve stem assembly, which is arranged within the cylinder structure, comprises a diaphragm, a valve stem, and an upper valve body, and can be divided into a normally closed valve stem assembly and a normally open valve stem assembly.For the valve stem assembly of a metal diaphragm valve, the upper valve body is often used for mounting. For the valve stem assembly of a metal-free diaphragm valve, the external thread of the upper valve body is often used for mounting. In some cases, the radial flange of the upper valve body is used for mounting.

[0005] The cylinder chamber of the conventional cylinder design is located on the inner annular surface of the upper valve body or the upper valve cover. As the piston moves up and down within the cylinder chamber, the upper valve body is subjected to vibration and the force of the cylinder chamber, causing the valve stem to deflect and resulting in diaphragm leakage. The position of the second sealing surface of the lower screw bushing is close to the edge of the diaphragm, which can also lead to bidirectional contamination. The process engineer should continuously monitor the corrosion condition of the metal screws.

[0006] Most state-of-the-art diaphragm valve specifications: Operating temperature: below 80°C, some special versions below 160°C. Normal temperature resistance: 3 kg / cm². 2 , 5 kg / cm 2

[0007] If the diaphragm is specially designed and the valve housing structure is thickened, the normal temperature resistance can also reach 7 kg / cm². 2 However, these conventional technologies cannot meet the requirement of an operating temperature of 200°C.

[0008] The heat transfer coefficient of fluorinated resin is the product of the heat transfer coefficient, the heat transfer area, and the temperature gradient. The extremely low heat transfer coefficient of approximately 0.25 W / (mK) enables high-temperature operation of fluorinated resin. The larger the heat transfer area, the greater the heat transfer rate and the higher the overall temperature of the diaphragm valve. Similarly, the higher the temperature gradient, the greater the heat transfer rate. A higher temperature gradient also results in more normal temperature zones within the diaphragm valve. A normal-temperature structure can provide better structural strength but requires more robust heat dissipation to maintain its stability and ensure structural integrity.The heat source zones of the diaphragm valve include a valve chamber heat source zone, a channel heat source zone, an inlet pipe heat source zone, an outlet pipe heat source zone, an inlet nozzle heat source zone, and an outlet nozzle heat source zone. The high-temperature fluid is guided to the outside through the pipe wall, the structure, and the diaphragm. The edge section of the diaphragm is located near the channel heat source zone. The pressure section of the valve body and the upper valve body are the main pathways for heat transfer to the outside from the heat source zones. The square section has a thickened structure above the inlet and outlet pipes, which is one of the main pathways for heat transfer to the cylindrical structure.The structure of a conventional diaphragm valve causes heat to accumulate continuously within the valve, resulting in a high overall temperature and a reduced temperature gradient, thus compromising structural integrity. Sealing components such as fluorinated O-rings cannot mitigate the high-temperature hazard and are only suitable for applications below 160°C.

[0009] Diaphragm valves for applications at 200°C must meet the following four structural requirements: First, thermal insulation is required for multiple heat source zones, comprising a heat transfer restriction structure and a heat dissipation structure. The heat transfer restriction structure limits the thickness of the structure's heat transfer cross-section, thus forming the heat transfer restriction zone. The heat dissipation structure incorporates natural cooling and internal cooling. This reduces heat transfer from the heat source to the structure and exhibits a high temperature gradient to maintain structural strength. The thermal insulation challenge is as follows: Problem 1: Heat Transfer Limitation: The heat transfer area refers to the structural cross-sectional area along the heat transfer path of the heat source zone and must be limited to achieve the goal of reducing heat transfer. The heat from the heat source zone is transferred via the square plate of the square section, the thickened structure, the channel side wall, and the vertical finned plate to the annular section and the upper valve body, thus transferring more heat to the cylinder structure. The central part of the diaphragm is extensively immersed in the transport fluid and can transfer a large amount of heat to the valve stem. The thickened structure above the inlet and outlet pipes has a large heat transfer area, so the heat from the outlet and inlet heat source zones is transferred directly to the square plate, the annular section, and the upper valve body.The annular section and the upper valve body both have a large heat transfer surface area, thus forming a primary heat transfer pathway. The inlet and outlet pipe connectors are also connected to the thickened area. The four screw bushings also have a large volume and surface area and can transfer a significant amount of heat. The four metal screws themselves are also good conductors of heat. Problem 2: Natural Cooling: The outer surface must be sufficiently cooled naturally, otherwise it cannot dissipate enough heat to maintain the temperature gradient and structural integrity. In particular, the hot air within the square section cannot escape to the outside, meaning that most of the heat can only be transferred upwards to the annular section. Thus, most of the heat is transferred to the upper valve body via the large cross-sectional area of ​​the annular section and the upper valve body. Problem 3: Internal Cooling: The diaphragm borders the heat source zone, and its edge is in close contact with the annular section, creating a heat-concentrated area that is easily deformed and thus prone to leakage. The central part of the diaphragm is largely immersed in the transport fluid, concentrating a significant amount of heat and transferring it to the valve stem. External cooling air must meet the cooling requirements of the diaphragm's edge and the valve stem. Furthermore, the valve and actuator cylinder, as well as the load pressure, reciprocating motion, and ambient corrosive gases, can all contribute to seal failure, as explained below. Problem 4: Tight sealing, including buildup strength, piston reciprocating motion, and ambient gas corrosion. The buildup strength, cylinder structure, and valve body are subjected to four metal screws for sealing. If the buildup strength of the component is insufficient, creep will occur. For example, if the structure is too thin, high temperatures can cause deformation, reducing the screw clamping force and resulting in diaphragm leakage. The piston reciprocating motion, spring counterforce, and actuating air pressure are all absorbed by the cylinder structure. The force is applied directly to the upper valve body and then transferred to the valve body, thus affecting the pressure force on the diaphragm.The cylinder structure and valve body can also be subjected to creep and deformation due to vibration, reducing the clamping force of the screws. This, in turn, reduces the pressure on the diaphragm's outer edge, leading to leakage. The four screws are protected by screw bushings. Due to the high penetration force, the corrosive gas still penetrates the first and second sealing surfaces of the screw bushings, damaging the screws and reducing the clamping force. In particular, the second sealing surface of the screw bushing is located near the outer edge of the diaphragm, significantly increasing the risk of screw corrosion and contamination from penetration in both directions.

[0010] Problems 1 through 4 above occur when the diaphragm valve operates at a high temperature of 200°C. Other important requirements include the following problems.

[0011] Problem 5: Vibration damping: The reciprocating motion of the piston and the opposing force of the spring generate vibration. Over time, the structure deforms due to creep, reducing the contact pressure. Many conventional techniques use springs, damping rubber, etc., to reduce vibration, thereby preventing diaphragm leakage, reducing vibration, and minimizing the formation of friction particles.

[0012] Problem 6: Friction particles: The concentricity and verticality of the valve stem must be ensured, especially at 200°C, to guarantee that the diaphragm and valve seat are properly fused and no friction particles form between them. If the structure of the valve body, upper valve body, and upper valve cover is deformed, the concentricity and verticality of the valve stem cannot be maintained. If the diaphragm and valve seat cannot be properly fused, friction between them will occur, forming particles.

[0013] Problem 7: Eliminating Static Electricity: When a non-conductive liquid is transported, the valve and diaphragm are susceptible to the buildup of static electricity. In severe cases, the diaphragm can be damaged by the resulting discharge spark. Many conventional techniques utilize a conductive material attached to the non-liquid-contacting back side of the diaphragm to dissipate the accumulated static electricity and prevent damage to the diaphragm from discharge. Reference 1

[0014] The description of this reference may refer to the similar Japanese patent JP 2009-002 442 A “Fluid Control Valve”. The operating temperature is ≤ 160°C. As in Fig. 6A and Fig. As shown in Figure 6B, the conventional fluorinated resin diaphragm valve 9 has a normally closed metal diaphragm valve and a normally closed valve shaft assembly 961 ( Fig. 6C). The diaphragm valve comprises a valve 90a and an actuator cylinder 90b. The valve 90a and the actuator cylinder 90b have a square outer contour and a circular inner structure. Screw holes for four metal screws are provided at the four corners to achieve an airtight connection. The metal screws are arranged in screw bushings. The screw bushing is divided into an upper screw bushing and a lower screw bushing. An upper sealing surface is formed between the upper screw bushing and the lower screw bushing, and a lower sealing surface is formed between the lower screw bushing and the valve. The valve 90a has a valve body 91, a diaphragm 92, and a mounting plate. The actuator cylinder 90b has an upper valve body 93, an upper valve cover 94, and a valve stem 95.

[0015] The task mentioned in this reference is to improve the stiffness of the valve body 91. Since the valve body 91 can be deformed by the pressure of the inlet and outlet pipes at high temperatures, the sealing section of the diaphragm 92, in particular, cannot be kept circular, resulting in leakage, as described in Fig. 11 of JP 2009-002 442 A “Fluid Control Valve” shown.

[0016] The valve body 91 has an inlet pipe 911, an outlet pipe 912, a valve chamber 913, an annular section 915, and a square section 916. The diaphragm 92 has an edge section 921, an elastic section 922, and a central section 923. The upper valve body 93 has an outer annular surface 931, an inner annular surface 932, a sealing surface 933, a pressure section 934, a shaft hole 935, and a diaphragm chamber 936. The upper valve cover 94 has an interior 941, an upper section 942, an outer annular surface 943, and a sealing surface 944. The valve shaft 95 has a threaded section 951, a shaft 952, and a piston section 953. The valve chamber 913 has a valve seat 9131, a channel 9132, and a sealing groove 9133. and a channel side wall 9134. The upper valve body 93 and the upper valve cover 94 form a cylindrical structure.The cylinder structure includes a cylinder chamber which is divided into an upper cylinder chamber and a lower cylinder chamber by the piston section 953.

[0017] The edge section 921 of the diaphragm 92 is attached to the sealing groove 9133 of the upper side wall of the channel 9134. The valve chamber 913 can be completely sealed. The central section 923 can open and close the valve seat 9131. The lower sealing surface is located on the upper side of the edge section 921 of the diaphragm 92.

[0018] The upper valve body 93 is arranged between the annular section 915 of the valve body 91 and the upper valve cover 94. The upper valve body 93 is a cup-shaped structure. A cylinder chamber 937 is formed on the inner annular surface 932 of the upper valve body 93, which serves to couple the piston section 953 of the valve shaft 95. The underside of the upper valve body 93 has a pressure section 934 for pressing the edge section 921 of the diaphragm 92. The underside has a conical shape and forms the central shaft hole 935. A diaphragm chamber 936 is formed below the conical underside. The shaft hole 935 serves to receive the valve shaft 95. The outer annular surface 931 is provided with a drive air port 171.

[0019] The upper valve cover 94 is cup-shaped and attached inverted to the upper valve body 93. The upper valve body 93 and the interior of the upper valve cover 94 form a cylindrical structure, which also constitutes a drive cylinder, and accommodates the valve stem 95, the piston section 953, the spring 12, and the like.

[0020] The inlet pipe connector is attached to one side of the outer wall of the square section 916 and connected to the inlet pipe 911. The inlet pipe 911 runs horizontally through it. The opening of the inlet pipe is located in the center of the valve chamber 913, thus forming the valve seat 9131, which rests against the central section 923 of the diaphragm 92.

[0021] The opening of the outlet pipe 912 is located on the channel side wall 9134. The outlet pipe runs through the other side wall of the square section 916 and is connected to the outlet pipe connector.

[0022] The channel 9132 is formed around the valve seat 9131 in the valve chamber 913. The highest point of the channel 9132 is located above the horizontal inlet pipe 911. It extends downwards along both sides of the horizontal inlet pipe 911 and surrounds the valve seat 9131. The lowest point connects with the lower side of the inner diameter of the horizontal outlet pipe 912. The upper surface of the channel side wall 9134 is provided with the sealing groove 9133 and connected to the annular section 915.

[0023] The square plate 9161 of the square section 916 is open in the center to accommodate the valve chamber 913. The square plate 9161 is connected to the channel side wall 9134 and also connects to the underside of the annular section 915. In addition to a square outer wall extending downwards, the underside of the square plate 9161 has lattice-shaped vertical longitudinal rib plates 9162, which are open downwards and extend from the underside to the square plate 9161, the annular section 915, and the valve chamber 913. The vertical longitudinal rib plates 9162 overlap the inlet pipe 911, the outlet pipe 912, and the valve chamber 913 beneath the square plate 9161 to form a supporting structure. The square section of this structure is referred to as the square section of the first type.Since the valve body 91 is formed by PFA injection molding or pressing, the vertical longitudinal rib plates 9162 are formed by the bottom section of the slide, so that the space between the horizontal center line of the square plate 9161 above the inlet pipe 911 and the outlet pipe 912 is filled with the PFA material. The accumulation of this material is called thickened material 9163. The thickened material 9163 directly connects the square plate 9161, the channel side wall 9134, the sealing groove 9133, the inlet pipe 911, and the outlet pipe 912. When the inlet pipe 911, the outlet pipe 912, and the valve chamber 913 are filled with high-temperature and high-pressure fluid and deformed, the square plate 9161 will inevitably also be deformed by the pressure and temperature deformation of the inlet pipe 911 and the outlet pipe 912, which affects the roundness of the channel side wall 9134 and thus the sealing of the diaphragm 92.

[0024] The underside of the annular section 915 is mounted on the square plate 9161. It is located outside the sealing groove 9133 of the valve chamber 913, extends upwards, and has a sealing surface 9151, an opening, an outer ring-shaped surface, and a vent hole 9155. The annular section 915 also has a vent hole 9155 above the sealing groove 9133 to meet the ventilation requirement of the diaphragm 92 when it is switched. The height of the annular section 915 only meets the requirements of the sealing groove 9133 and the vent hole 9155, so that the annular section 915 and the valve chamber 913 form a cup-shaped structure. The opening of the cup-shaped structure is sealed by the diaphragm 92. The cup-shaped structure contains the high-temperature fluid and is also subjected to the fluid pressure. The outer surface of the cup-shaped structure is the annular section 915.A height is formed between the annular section 915 and the edge section 921 of the diaphragm. For example, a 1-inch diaphragm valve has an outer height of approximately 6 mm. The cup-shaped structure has only a shallow cup form. When the valve chamber 913 is exposed to a fluid at high temperature and high pressure, the edge section 921 of the diaphragm is positioned close to the outside of the cup-shaped structure and is easily deformed, causing leakage. Since the outer height is approximately 6 mm, it does not provide sufficient structural strength. Furthermore, if the inlet tube 911, the outlet tube 912, and the thickened material 9163 are deformed due to the high temperature and high pressure, the sealing groove 9133 can very easily leak. The vent hole 9155 is sometimes also used for leak detection. It is located on... Fig. Reference 11 to the reference JP 2009-002 442 A “Fluid Control Valve”.

[0025] The valve shaft assembly comprises a diaphragm 92, a valve shaft 95, an upper valve body 93, and the like. The shaft 952 of the valve shaft 95 passes through the shaft hole 935 of the upper valve body 93 and is screwed into the diaphragm 92 by the threaded section 951. The shaft hole 935 is fitted with a fluorinated O-ring to prevent leakage of fluid if the diaphragm 92 is damaged and to make the cylinder assembly airtight. The piston section 953 is connected to the shaft 952 above the upper valve body 93. The outer surface of the piston section 953, where the fluorinated O-ring and the cylinder chamber 90d are located, is sealed and divided into an upper cylinder chamber and a lower cylinder chamber. When compressed air flows into either cylinder, the piston section 953 is driven by the compressed air to rotate relative to the inner annular surface 932.The upper valve body 93 thus absorbs the force from the piston section 953 and the pressure of the drive air and can therefore be deformed, causing the concentricity and verticality of the valve shaft 95 to deviate and even reducing the service life of the diaphragm 92, because the upper valve body 93 is located on the sealing surface 9151 of the annular section 915.

[0026] Fig. Figure 6C shows the heat source zones of the diaphragm valve 9, which include the valve chamber heat source zone 140a, the channel heat source zone 140b, the inlet pipe heat source zone 140c, the outlet pipe heat source zone 140d, the inlet connector heat source zone 140e, and the outlet connector heat source zone 140f. The high-temperature fluid is transported to the outside through the pipe wall, the structure, and the diaphragm 92. The edge section 921 of the diaphragm 92 adjoins the channel heat source zone 140b. The annular section 915 of the valve body 91 and the pressure section 934 of the upper valve body 93 are the main paths for heat dissipation from the heat source zones. As a result, the ring-shaped section 915 and the edge section 921 of the membrane 92 will be most easily thermally deformed and leak.The heat is conducted through the heat transfer path 14 via the valve body 91, the upper valve body 93 and the upper valve cover 94, resulting in a reduction of the structural strength of the cylinder structure and the contact force.

[0027] Fig. 6B and Fig. Figure 6D shows the heat transfer path of the diaphragm valve 9. The valve shaft heat transfer path 141 transfers heat from the valve chamber 913 directly through the central section 923 of the diaphragm 92 to the valve shaft 95. The square plate heat transfer path 142 transfers heat from the outlet pipe heat source zone 140d and the inlet pipe heat source zone 140c along the thickened material 9163, the channel heat source zone 140b through the channel side wall 9134 and the sealing groove 9133 towards the annular section 915 and the upper valve body 93. Through the connector heat transfer path 143, the heat from the inlet connector heat source zone 140e and the outlet connector heat source zone 140f is transferred via the square section 916 to the annular section 915.The annular section heat transfer path 144 transfers heat upwards to the upper valve body 93 and the upper valve cover 94, while some heat is conducted via the upper valve body 93 to the shaft hole 935. The shaft hole heat transfer path 145 transfers heat from the connector heat transfer path 143 to the shaft hole 935 and the valve shaft 95. The square section heat transfer path transfers heat from the outlet pipe heat source zone 140d and the inlet pipe heat source zone 140c along the vertical longitudinal fin plate 9162 to the square section. The thickness of the channel side wall 9134 allows for the formation of the sealing groove 9133 and the arrangement of a retaining ring with higher hardness. The thickness of the channel side wall 9134 increases the heat transfer surface, thereby increasing the heat of the square plate heat transfer path 142.Since each heat source zone of this reference has a large heat transfer surface, more heat is transferred to the diaphragm valve, causing creep and deformation due to the high temperature, thus reducing the clamping force of the four metal screws and increasing the risk of leakage.

[0028] Fig. Figure 6E shows the heat dissipation of the diaphragm valve 9 and the natural heat dissipation path. The heat dissipation path 151 of the square section of the valve 90a dissipates heat through the square finned plate 152. The heat dissipation path 153 of the upper cylinder body and the heat dissipation path 154 of the upper valve cover of the drive cylinder 90b each dissipate heat through the upper valve body 93 and the upper valve cover 94, respectively. The aforementioned heat dissipation occurs through natural convection of the outer surface. The heat dissipation effect is not significant. The square section 916 is a vertically enclosed structure. Most heat source zones are located within the square section 916. It is difficult to dissipate heat to the outside.Heat enters the annular section 915 and the valve stem 95 via the square plate 9161, increasing the temperature of the upper valve body 93 and leading to a loss of the sealing force of the four screws of the cylinder structure. The fluorinated O-ring on the valve stem 95 and the piston section 953 fails to maintain its function, causing wear. The concentricity and verticality of the valve stem 95 can also be problematic. The pressure section 934 also fails to generate an effective pressure force on the edge section 921 of the diaphragm 92, causing leakage. Furthermore, the leaked fluid flows through the adjacent lower sealing surface to the screw bushing, corroding the metal screw. The reaction product flows back into the channel 9132 by diffusion, contaminating the fluid.

[0029] The feature of the present reference is that the thickened upper surface of the channel side wall 9134 extends through the central opening of the square plate 9161, and the sealing groove 9133 is located on the upper surface of the channel side wall 9134. The annular section 915 is connected to the outer annular surface of the channel side wall 9134 and the upper surface of the square plate 9161. The edge section 921 of the membrane 92 is provided with a fastening groove for attaching a fastening ring of higher hardness. Such a fastening ring can maintain the roundness of the sealing groove 9133 and effectively withstand the compressive force of the pressure section 934. The supporting force is increased by the thick wall of the channel side wall 9134, thus preventing the edge section 921 of the membrane 92 from being affected by high-temperature deformation.This patent significantly improves the high-temperature deformation of the outer surface of the cup-shaped structure of the valve body 91 and solves the leakage problem of the edge section 921. It can achieve high-temperature application with an operating temperature of ≤ 160°C, as in JP 2009-002 442 A “Fluid Control Valve”. Fig. 3 shown.

[0030] The edge section 921 of the diaphragm 92 is provided with a retaining ring of higher hardness. Such a retaining ring can only maintain the roundness of the sealing groove 9133 below 160 °C. It does not solve the deformation problem when the valve body 91 bears the pressure of the inlet and outlet pipes. If the inlet pipe 911 and the outlet pipe 912 are deformed by a fluid with high temperature and high pressure, the square plate 9161 will also deform along with the inlet and outlet pipes 911 and 912. This impairs the roundness of the channel side wall 9134 and thus the sealing of the diaphragm 92. This deformation is worse when the temperature exceeds 160 °C to 200 °C.

[0031] As in Fig. As shown in Figure 6F, in other structures similar to the present reference, the valve body 91 does not have a square section 916, which is referred to as the second type of valve body. That is, there is only the square plate 9161, which has four screw holes. The outlet pipe 912, the inlet pipe 911, the channel, the inlet connector, and the outlet connector are all partially exposed and are referred to as the second type of square section. The top of the outlet pipe 912 and the inlet pipe 911 abuts the square plate 9161. There is also a thickened material 9163 with a large surface area. Such a structure can reduce the heat-source surface area of ​​the inlet connector and the heat-source surface area of ​​the outlet connector, thereby increasing direct heat dissipation through the outer surface and thus solving the problem of heat accumulation in the square section 916.The thickened material 9163 still provides a large heat transfer surface. The heat is transferred to the annular section 915, the upper valve body 93, the upper valve cover, and the valve stem 95. The second type of square section structure also fails to solve the original problem; that is, the outer height of the cup-shaped structure is approximately 6 mm, which does not provide sufficient structural strength. The cup-shaped structure deforms when the inlet pipe 911 and the outlet pipe 912 are filled with a high-temperature, high-pressure fluid because the square vertical fin plates are missing. The square plate 9161 deforms with the deformation of the inlet pipe 911 and the outlet pipe 912, affecting the roundness of the channel side wall 9134 and thus the sealing of the diaphragm 92. It can only be used in applications with lower operating pressure and lower temperature, e.g.,a working pressure of 3 kg / cm. 2 and an operating temperature <100°C. If the requirement is a working pressure of 5 kg / cm² at normal temperature. 2 To achieve this, it is necessary to increase the thickness of the annular section 915 and the outer height of the cup-shaped structure, which leads to a problem of a large heat transfer surface. When attaching the pipe connector, the valve body of the second type lacks the square section 916, thus increasing the difficulty of the installation.

[0032] The solution to problems 1 to 4 in Reference 1 is as follows: Problem 1: Heat transfer limitation: A thickened area with a width corresponding to the pipe diameter is formed between the square plate and the inlet and outlet pipes. Such a large heat transfer surface results in a significant amount of heat being transferred to the annular section and the upper valve body. The thickness of the channel side wall also increases the heat transfer surface. The retaining ring on the edge section of the diaphragm also increases the heat transfer surface. Four metal screws and screw bushings in the immediate vicinity of the annular section also contribute to high heat transfer.

[0033] Problem 2: Natural Cooling: Only natural surface cooling is available; the upper valve body and the upper valve cover rely solely on natural surface cooling. The grid-like vertical fin plates of the square section of the first type cannot efficiently dissipate heat, leading to heat buildup within the diaphragm valve and resulting in a high overall temperature for the structure. The grid-like vertical fin plates of the square section of the second type are completely ineffective for heat dissipation.

[0034] Problem 3: Internal Cooling: There is no supply of outside air to cool the internal mechanism. The valve shaft assembly is not cooled.

[0035] Problem 4: Heat is continuously transferred to the seal, the annular section, the pressure section, the diaphragm's edge section, and the diaphragm's central section, and continuously accumulates in the cylinder structure. The entire cylinder structure reaches a high temperature, leading to increased structural creep and deformation, which causes the four metal screws to loosen. The cylinder chamber is located within the upper valve body. The piston's reciprocating motion and the pressure in the cylinder chamber exert a direct force on the upper valve body, preventing the pressure section from effectively pressing the diaphragm's edge section. The square plate is tightly connected to the inlet and outlet pipes and has a thickened area. When the inlet and outlet pipes are filled with a high-temperature, high-pressure fluid, deformation occurs.The square plate also deforms, and the roundness of the channel sidewall cannot be maintained. This design only improves the deformation of the outer surface of the cup-shaped structure. The diaphragm valve can only operate at temperatures below 160°C and cannot meet the high-temperature requirement of less than 200°C. The second type of valve body can only meet the operating pressure requirement of 3 kg / cm². 2 at normal temperature, as the support from the ribbed plate of the square section is missing. Reference 2

[0036] Japanese patent JP H08-152 078 A, "Air-Operated Valve," describes a linear magnetic structure capable of detecting diaphragm opening. This design is suitable for use at normal temperatures and is not intended for high-temperature applications. The pipe connector is exposed, and it lacks dedicated inlet and outlet heat source zones. The inlet and outlet heat source zones are relatively small. Compared to other prior art designs, this design features relatively small heat source zones. However, both the inlet and outlet pipes still incorporate a large thickened area, forming a heat transfer channel directly connected to the square plate and the annular section.The upper valve body of this design is screwed to the outside of the annular section of the valve body, thus reducing the heat transfer cross-sectional area of ​​the annular section. The annular element for securing the diaphragm is screwed inside the annular section and has a large heat transfer cross-sectional area. There is still a large heat transfer surface on the upper surface of the diaphragm's center. Therefore, this design lacks a heat source insulation mechanism. In the center of the upper valve cover is a drive air intake hole, which is connected to the center of the valve stem via the drive air connector. This allows air to enter the cylinder and reach the side of the piston to drive it. However, these air intake holes cannot meet the cooling requirements of the valve stem, nor do they provide sufficient cooling.Regarding the heat dissipation mechanism, the valve body is directly exposed to the outside air to ensure direct natural cooling, as it does not feature a design with a high temperature gradient. The Japanese patent JP H04-181 079 A, ​​"Pneumatic Operating Valve," also features a similar valve shaft with drive air guide holes.

[0037] The solution to reference 2 for problems 1 to 4 is as follows: Problem 1: Heat transfer limitation: The annular section is separated from the edge section of the membrane. The heat transferred through the annular section is not concentrated at the edge of the membrane. The annular element used to attach the membrane still has a large heat transfer cross-sectional area. There is still a large heat transfer area on the top of the central section of the membrane, resulting in a large amount of heat being transferred through the membrane. Problem 2: Natural Cooling: The membrane has a large number of heat transfer problems. Natural surface cooling alone cannot dissipate enough heat to maintain the temperature gradient. Problem 3: Internal cooling: There is no intake of cooling air from outside. While the drive air guide holes in the shaft can assist in cooling the valve shaft, they are ineffective for cooling the diaphragm. Problem 4: the ring-shaped element is screwed tightly to the inside of the ring-shaped section to press down the edge section of the diaphragm, thereby increasing the tightness of the upper valve body and reducing the influence of the piston's reciprocating motion on pressing down the diaphragm. Reference 3

[0038] Japanese patent JP H09-217 845 A, "Diaphragm Valve," describes a normally closed diaphragm valve with a damping spring. This design is suitable for use at normal temperatures and is not intended for high-temperature applications. A normally closed spring is located above the piston to ensure the diaphragm is pressed against the valve seat. An auxiliary spring below the piston allows the diaphragm to close smoothly, significantly reducing the amount of particles generated by the seat.

[0039] Reference 3 is used for the purpose of normal temperature. In addition to solving problems 1 to 4, problems 5 and 6 are also solved. The solution is as follows: Problem 1: Heat Transfer Limitation: There is a large, thickened area. The inlet and outlet pipe connectors are also connected to this thickened area. The annular section has a larger heat transfer surface at the edge of the diaphragm. The thickness of the channel sidewall also significantly increases the heat transfer surface. Four metal bolts and bolt bushings also contribute a large amount of heat transfer. At high temperatures, this heat is transferred to the upper valve body, reducing its structural strength and causing serious creep and deformation. Problem 2: Natural cooling: only natural surface cooling, no special cooling design, no high temperature gradient. Problem 3: Internal cooling: There is no intake of cooling outside air. Problem 4: Application to room temperature; the problem of heat accumulation in the diaphragm valve is not considered. Structural creep and deformation caused by high temperatures are not taken into account. Problem 5: Vibration damping: The reciprocating motion of the piston and the opposing force of the spring generate vibration. Over time, the structure deforms due to creep, reducing the contact pressure. This design uses springs to reduce vibrations, thus preventing diaphragm leakage. Reducing vibrations can also decrease friction particles. Problem 6: Friction particles: This reference lacks a dedicated cooling design to prevent the high-temperature deformation of the valve body, upper valve stem, and upper valve cover. Particularly at 200°C, the concentricity and verticality of the valve stem cannot be guaranteed, making particle formation unavoidable. Reference 4

[0040] Chinese patent CN 104 633 171 A "Valve Apparatus": The structure of this reference is suitable for use at normal temperatures and not at high temperatures. It is a valve structure in which a conductive material is positioned in the center of the valve stem to make contact with the fluid and dissipate static electricity from the diaphragm. When conveying non-conductive high-purity water or other non-conductive fluids, the non-conductive diaphragm and the valve body accumulate static frictional electricity. When the static electricity from the diaphragm discharges to the upper valve body, the diaphragm ruptures. Under normal conditions, the conductive material on the valve stem is also a thermal conductor, readily transferring heat from the valve chamber to other structures, which is highly detrimental when designing insulation for heat sources.The Japanese patent JP 2010-121 689 A “Diaphragm Valve” deals with a conductive material on the side of the membrane that is not in contact with the liquid.

[0041] The structures of the two references above are suitable for normal temperature applications. In addition to solving problems 1 to 4, the solution to problems 5 and 7 is as follows: Problem 1: Heat transfer limitation: There is a large, thickened area. The inlet and outlet pipe connectors are also connected to this thickened area. The thickness of the duct sidewall further increases the heat transfer surface. The central section of the membrane also has a large heat transfer surface. Problem 2: Natural cooling: only natural surface cooling, no special cooling design, no high temperature gradient. Problem 3: Internal cooling: There is no intake of cooling outside air. Problem 4: Tight seal: The upper valve body is screwed to the valve body. The upper valve cover is screwed to the upper valve body. The upper valve body directly absorbs the movement of the piston, the force of the spring, and the high pressure of the actuating air, which impairs the seal of the upper valve body against the edge of the diaphragm. Problem 5: Vibration damping: In this reference, elastic rubber is attached to the upper valve body to reduce vibrations and prevent diaphragm leakage. Problem 7: Elimination of static electricity: A conductive material is located in the center of the valve stem, which can transfer static electricity and is detrimental to the insulation of the heat source. JP 2010-121 689 A "Diaphragm Valve" has an electrostatic guide mode that can avoid the heat transfer problem. Reference 5

[0042] US Patent US 6,612,538 B2, "Two-way valve," is designed for use at normal temperatures and is not suitable for high-temperature applications. In this design, a metal screw is located in the center of the valve stem, securing the diaphragm to the stem. Threads are provided at both ends of the upper valve body for attachment to the valve body and connection to the upper valve cover, thus keeping the valve's outer surface free of metal screws and preventing corrosion from the ambient gas. This design also features a rotatable annular body for attaching a drive air connector. This facilitates the routing of the high-pressure drive air line. The annular body is sealed by the valve body and the upper valve cover. A shock absorber is mounted on the upper valve body to reduce piston vibration and prevent the upper valve body from loosening.The annular body is an important feature, but in practice, the compressed air line must be attached to the ambient gas pipeline. Furthermore, these pipes have a fixed orientation, so such a device cannot increase the valve's value. Additionally, extra sealing requirements must be met, making it unsuitable for high-temperature applications, and the increased number of parts increases the risk of creep. The inlet and outlet pipes have a large thickened section that forms a heat transfer channel and is directly connected to the square plate and the annular section. The diaphragm's edge is positioned above the channel's side wall. The upper valve body is screwed tightly to the inside of the annular section to press against the diaphragm's edge. The diaphragm's edge provides a large heat transfer surface.The metal screws of the valve stem lead to a failure of the thermal insulation, preventing the formation of a high temperature gradient. The annular section of the valve body and the pressure section of the upper valve body are both primary heat transfer pathways. The annular section and the thickened area form a heat transfer path. At high temperatures, this heat is transferred to the upper valve body, reducing its structural strength and causing significant creep and deformation. A large area of ​​the diaphragm's central section is immersed in the transport fluid. A significant amount of heat is transferred to the valve stem. The metal screws of the stem create a high-speed heat transfer channel. The fluorinated O-ring contacting the valve stem loses its sealing function when the temperature exceeds 160°C.The metal shaft still suffers from the problem of metal corrosion and contamination if the membrane leaks. There is also the issue of high heat at the membrane's edge. Dedicated cooling is lacking, and it is impossible to create a high temperature gradient.

[0043] The solution to reference 5 for problems 1 to 4 is as follows: Problem 1: There is a large thickened area. The inlet and outlet pipe connectors are also connected to the thickened area.

[0044] The thickness of the channel sidewall also increases the heat transfer surface area. The central section of the membrane also has a large heat transfer surface area.

[0045] Problem 2: Natural cooling: only natural surface cooling, no special cooling design, no high temperature gradient.

[0046] Problem 3: Internal cooling: There is no intake of cooling outside air.

[0047] Problem 4: Tightening: The four screws outside the diaphragm valve are prevented from corroding due to ambient gas exposure. This prevents the screws from loosening or even breaking, which would result in insufficient sealing force on the diaphragm and thus leakage. The valve body is screwed to the valve body. The upper valve cover is screwed to the upper valve body. The upper valve body directly absorbs the piston movement, the spring force, and the high pressure of the actuating air, compromising the seal of the upper valve body against the diaphragm's outer edge. The rotatable annular body is positioned between the valve body and the upper valve cover and seals against the outer annular surface of the upper valve body, increasing the risk of the upper valve body coming loose. Reference 6

[0048] The Chinese patent, CN 103 717 954 A "Fluid control," is suitable for high-temperature applications. The actuator cylinder of this reference has an upper valve body, referred to here as the cylinder body. A key feature is the inclusion of a neck section between the cylinder chamber and the valve body's contact surface. This contact surface is located between the valve and the actuator cylinder to compress the diaphragm's edge. The valve body's contact surface is referred to here as the annular section. The neck section is formed on the cylinder body to reduce its cross-sectional area. A disc-shaped flange is provided below the neck section. The valve body and the metal mounting plate are secured by metal screws. The diaphragm's edge can maintain pressure under the clamping force of the mounting plate and the disc-shaped flange.Furthermore, a cooling air port is provided on the side of the diaphragm not in contact with the liquid. This port is connected to the outlet of the cylinder chamber via a central opening in the shaft to enable operation at high temperatures of 200°C to 250°C. The preferred embodiment of this reference features a valve made of fluoropolymer resin. The actuator cylinder, with the exception of the sealing element, is made of metal. Heat from the valve body is transferred to the disc-shaped flange via the annular section. The heat transfer path is limited by the reduced cross-sectional area of ​​the throat section. Therefore, heat cannot be effectively transferred to the actuator cylinder. Additionally, cooling by ambient air ensures reliable high-temperature operation. When the fluoropolymer valve part is at temperatures above 200°C, significant creep occurs.The annular section of the valve body is held in place by the mounting plate and the disc-shaped flange. The metal screws on the mounting plate are not affected by high temperatures. Creep caused by the valve does not lead to loosening of the metal screws.

[0049] Claim 1 of this reference does not include metallic materials, but in practice, such a fluorinated material structure does not provide data indicating that the claimed temperature of 250°C can be reached, as the fluorinated resin can exhibit significant creep upon reaching 200°C. Metal diaphragm valves often employ a neck structure at high temperatures. US patent US 2001 / 0 028 049 A1, "High-temperature gas control valve," and Taiwanese patent TW 2017-025 08 A, "Diaphragm valve," both feature a neck structure and drive air holes on the shaft to achieve a similar cooling effect.

[0050] Reference 6 still exhibits the following problems when using fluorinated material: Problem 1: Heat Transfer Limitation: The diaphragm's edge section is located near the duct's heat source zone, making the sealing groove of the annular section and the diaphragm's edge section most susceptible to thermal deformation and leakage. Furthermore, the annular section of the valve body becomes the primary heat transfer pathway. Heat accumulates at the metal-free, disc-shaped flange. While the metal-free mounting plate can help maintain the diaphragm's edge seal, the risk of leakage due to structural deformation at high temperatures remains high. The most significant heat transfer limitation zone is the neck section of the upper valve body, which is prone to high-temperature deformation of the fluoropolymer structure. Problem 2: Natural Cooling: The edge section of the diaphragm is located near the channel heat source zone, making the sealing groove of the annular section and the edge section of the diaphragm the position most susceptible to thermal deformation and leakage. Both the valve body and the upper valve body rely on natural surface cooling, which cannot guarantee the structural strength of the fluoropolymer neck section or maintain the concentricity and verticality of the valve stem. Problem 3: Internal Cooling: There is no external cooling air intake. A cooling air intake is located on the side of the diaphragm not in contact with the liquid and is connected to the cylinder's exhaust port via the central hole in the shaft, which does not provide any further cooling for the diaphragm's outer section. Problem 4: Tightening: The disc-shaped flange made of fluoromaterial and the metal-free mounting plate are deformed by the high heat. The screws can loosen, reducing the contact force with the diaphragm. The high temperature also causes the vibration from the reciprocating motion of the drive cylinder to directly deform the neck structure. Reference 7

[0051] Japanese patent JP 2004-019 792 A, "TRANSMISSION GAS DISCHARGE STRUCTURE OF DIAPHRAGM VALVE," addresses the extremely small amount of fluid that permeates the diaphragm and continues to accumulate on its back side. This constantly accumulating corrosive fluid can damage the internal components of the valve. Four screws are used to connect the valve body, the upper valve body, and the upper valve cover. The interior of the upper valve cover houses the actuator cylinder and includes an actuator air port. The valve stem piston moves back and forth within the cylinder chamber. The upper valve body has a cleaning air port and a port on the side of the diaphragm not in contact with the fluid. These ports are connected to form an inlet and an outlet for discharging the accumulated fluid.

[0052] Reference 7 refers only to the removal of fluid accumulated on the back side of the diaphragm and is not designed for high-temperature applications. The design of the cleaning air guide hole can also be used for diaphragm and valve stem cooling in high-temperature applications. However, the structure still cannot meet the cooling requirements of the diaphragm's edge section. The outlet pipe is positioned higher than the inlet pipe, so the valve chamber lacks a channel. An annular section with a thickened wall is used. A sealing groove is located on the inside of the opening. The edge section used to fix the diaphragm causes a large amount of heat to be transferred axially upwards from the valve chamber through the annular section and the valve stem.

[0053] Reference 7 still exhibits the following problems in high-temperature applications: Problem 1: Heat Transfer Limitation: The edge section of the diaphragm is located near the duct's heat source zone, making the sealing groove of the annular section and the diaphragm's edge section most susceptible to thermal deformation and leakage. Furthermore, the upper valve body has a large heat transfer surface, causing heat to accumulate. Four metal screws and screw bushings can also transfer significant heat. The risk of leakage from the entire structure remains high. Problem 2: Natural Cooling: The diaphragm's edge is located near the channel's heat source zone, making the sealing groove of the annular section and the diaphragm's edge the most susceptible to thermal deformation and leakage. The valve body relies solely on natural surface cooling and is therefore unable to maintain the structural integrity of the annular section at high temperatures, nor the concentricity and verticality of the valve stem. Problem 3: Internal Cooling: There is no external cooling air intake. The upper valve body has a cleaning air guide hole and a nozzle on the side of the diaphragm not in contact with the fluid. These are connected to each other, forming an inlet and an outlet to discharge the accumulated fluid. Such a device can also be used for diaphragm and valve stem cooling, thereby reducing the temperature of the upper valve body. However, it cannot provide any additional cooling for the edge section of the diaphragm. Problem 4: Tight pressure: The ring-shaped section is deformed by most of the heat, and a high temperature gradient cannot be achieved. The screws loosen, and the pressure at the edge of the membrane is reduced.

[0054] From the above description of references 1 to 7 and the discussion of problems 1 to 4, it can be concluded that the diaphragm valve made from the prior art fluororesin material does not meet the high temperature requirement of 200°C at all. corrosive liquid: hydrofluoric acid, hydrochloric acid, sulfuric acid, etc.

[0055] Further valves are described in DE 11 2004 001 147 T5, US 6 123 320 A, DE 38 08 478 A1, US 5 007 328 A, US 6 086 039 A, DE 103 19 061 A1, US 2 823 696 A, US 2006 / 0 145 107 A1 and US 2019 / 0 093 772 A1. Object of the invention

[0056] The invention is based on the objective of creating a diaphragm valve that can eliminate the disadvantage of the creep of fluorinated resin at 200°C, wherein the fluorinated resin diaphragm valve comprises a valve and a drive cylinder, wherein the valve has a valve body and a diaphragm, wherein the drive cylinder has an upper valve body, an upper valve cover and a valve shaft, a drive air port and a cooling air port, wherein the upper valve cover is tightly screwed to the valve body and forms a cylinder structure having a cylinder chamber which is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber;wherein the diaphragm, the valve stem and the upper valve body form a valve stem assembly, the end of the valve stem passing through the central through-hole of the upper valve cover, and the cylinder structure being attached to the annular section or the upper valve cover in accordance with the structure of the diaphragm valve.

[0057] According to the invention, a diaphragm valve according to claim 1 is provided. Further examples of such a diaphragm valve are defined in the dependent claims.

[0058] The valve body has an inlet pipe, an outlet pipe, a valve chamber, an annular section and a square section.

[0059] The heat source zones are located on the valve body and include a valve chamber heat source zone, a channel heat source zone, an inlet pipe heat source zone, and an outlet pipe heat source zone. The high-temperature fluid is conveyed to the outside through the square section, the annular section, the upper valve body, and the diaphragm.

[0060] The valve chamber has a valve seat and a channel. The diaphragm has an edge section, an elastic section, and a central section. The edge section can completely seal the valve chamber. The central section can open and close the valve seat.

[0061] The valve shaft has a screw-in section, a hollow shaft and a piston section, the screw-in section serving to fasten the central section of the diaphragm, the hollow shaft passing through the shaft hole of the upper valve body and sealed by several O-rings.

[0062] The annular section has a sealing surface, an opening, a part with the smallest diameter, an inner annular surface, a sealing groove, an outer annular surface and an O-ring groove.

[0063] The square section has a square plate, several horizontal ribbed plates, several vertical longitudinal ribbed plates, and several vertical transverse ribbed plates. The square plate forms a central opening to accommodate the valve chamber and is connected to the channel sidewall. The vertical longitudinal ribbed plates and the vertical transverse ribbed plates are arranged below the square plate to connect the inlet pipe, the outlet pipe, and the channel sidewall.

[0064] The upper valve body is mounted on the inside of the annular section. The upper valve body has an outer annular surface, a pressure section, the shaft hole, a first annular groove, a second annular groove, and a diaphragm chamber. The upper valve body is positioned within the annular section. The pressure section presses the edge of the diaphragm into the sealing groove of the annular section.

[0065] The upper valve body has an interior, an upper section, a central through-hole, an outer annular surface, and a sealing surface. The upper valve body is positioned on the annular section.

[0066] The annular section and the valve chamber form a cup-shaped structure. This cup-shaped structure has a deep cup shape. Its external height is the distance from the sealing groove to the sealing surface. This external height is at least 80% to 160% of the height of the upper valve body. The diaphragm is positioned near the bottom of the cup-shaped structure. An internal cooling channel is also provided at this location. The annular section, with its high structural strength, provides support during deformation under high temperatures. The valve stem assembly is mounted on the annular section. This means the cup-shaped structure provides stable support for the valve stem assembly. The concentricity and verticality of the valve stem are ensured during the opening and closing movements. This also contributes to reducing particle release.

[0067] The different types of diaphragm valve according to the invention are: a metal-free diaphragm valve and a metal diaphragm valve. The metal-free diaphragm valve can be divided into a metal-free diaphragm valve that is normally closed and a metal-free diaphragm valve that is normally open. The metal diaphragm valve can be divided into a metal diaphragm valve that is normally closed and a metal diaphragm valve that is normally open. The electrostatic valve shaft assembly is formed by adding a bundle of conductive fibers to the valve shaft assembly. The conductive fibers run through the hollow shaft chamber and the screwed section in a loop connected to the side of the diaphragm. The conductive fibers run through the hollow shaft chamber and cannot rotate with the valve shaft.

[0068] The thermal insulation method, which does not have all the features of claim 1, comprises a heat transfer limitation method and a heat dissipation method that can be used to insulate heat and improve heat dissipation so that the temperature gradient of the structure can be maintained. The heat transfer limitation method according to the invention limits the thickness of the heat transfer cross-section of the structure, hereinafter referred to as the heat transfer limitation zone, which reduces the heat transfer from the heat source zone in order to achieve the goal of thermal insulation.

[0069] The heat transfer limitation method limits the wall thickness of the multiple heat transfer limitation zones of the diaphragm valve, wherein the wall thickness does not exceed the thickness of an inlet tube of the diaphragm valve or is ≤ 3 mm to dissipate the heat from the heat source zones, thereby achieving thermal insulation between a cylindrical structure and multiple heat source zones. The heat dissipation method utilizes a natural cooling structure and an internal cooling structure. The natural cooling structure provides natural convection cooling through a plurality of finned plates of a square section of the diaphragm valve, a plurality of finned plates of an annular section, and a plurality of finned plates of an upper valve cover. The internal cooling structure introduces external cooling air through a cooling air duct of the annular section.which flows through a side of the membrane that is not in contact with the liquid and a hollow shaft.

[0070] The heat dissipation method of the thermal insulation method, which does not have all the features of claim 1, includes external natural cooling and internal cooling. External natural cooling is achieved by the square section and cooling fins of the annular section of the valve body and the cooling fins of the upper valve cover. Internal cooling is achieved by an internal cooling channel with one or more cooling air holes in the valve body, the cooling air annular groove, the plurality of cooling air guide holes in the upper valve body, a diaphragm chamber of the diaphragm chamber of the upper valve body, a plurality of air guide holes in the valve shaft, and the hollow shaft chamber of the hollow shaft.

[0071] Internal natural cooling utilizes the buoyancy of the hollow shaft at high temperatures to draw in external cooling air through the internal cooling channel, thus dissipating heat. Internal forced cooling forces cooling air through the internal cooling channel to dissipate heat. The cooling air is forced through the internal cooling channel, with the cooling air nozzle connected to the air being drawn in through the cooling channel, thereby dissipating heat through the hollow shaft. Heat from the central section of the diaphragm can be dissipated to prevent the fluorinated O-ring from being affected by the high temperature.

[0072] The annular section and the edge section of the diaphragm are susceptible to deformation and leakage. The edge section is attached to the sealing groove and pressed against the pressure section, thus bordering the cooling air hole. The cup-shaped structure has a deep cup form. Its external height is the distance from the sealing groove to the sealing surface. This external height is at least 80% to 160% of the height of the upper valve body. The diaphragm is positioned near the bottom of the cup-shaped structure. An internal cooling channel is also provided at this location. The annular section, with its high structural strength, can provide support during deformation under high temperatures. The valve stem assembly is mounted on the annular section. Therefore, the cup-shaped structure provides robust support for the valve stem assembly.The concentricity and verticality of the valve stem can be ensured during the opening and closing movement of the valve stem. This also contributes to reducing particle release. The cylindrical structure is located above the heat transfer limitation zone, comprising the square plate and the annular section. External natural cooling is achieved through the grid-like rib structure of the square section and the numerous cooling fin plates of the outer annular surface of the annular section, providing a large number of natural heat dissipation areas. To maintain a high temperature gradient across the structure, the horizontally open, multi-layered fin plates feature an open-vented design that accelerates natural heat dissipation.

[0073] In internal cooling, the cooling air ring groove directs cooling air through several cooling air guide holes in the upper valve body to cool the diaphragm's edge section. This ensures that the fluorinated O-ring seal is not affected by high temperatures and allows the fluorinated resin diaphragm valve to withstand high-temperature applications up to 200°C. In natural cooling, the buoyancy of hot air within the valve's hollow axial passage is used to direct outside air through one or more of the cooling air ports. The introduction of high-pressure cooling air during forced cooling can further enhance the reliability and durability of high-temperature and high-corrosion applications up to 200°C.

[0074] The diaphragm valve according to the invention comprises a valve and an actuating cylinder, wherein the valve has a valve body and a diaphragm made of fluoropolymer, wherein the actuating cylinder has an upper valve body, an upper valve cover and a valve shaft, wherein the valve body has an annular section and a square section, wherein the square section has a first side surface, a second side surface, a bottom surface, an inlet tube, an outlet tube and a valve chamber, wherein the valve chamber has a valve seat and a channel; the diaphragm has an edge section, an elastic section and a central section; the upper valve body is arranged in the annular section and presses the diaphragm against it;the upper valve cover is tightly screwed to the valve body and forms a cylinder structure which has a cylinder chamber that is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber; the valve stem has a screw-in section which is screwed to the central section of the diaphragm; a plurality of ribbed plates are arranged on the first side face, the second side face or the bottom face.

[0075] The diaphragm valve according to the invention comprises a valve and an actuating cylinder, wherein the valve has a valve body and a diaphragm made of fluoropolymer, wherein the actuating cylinder has an upper valve body, an upper valve cover and a valve shaft, wherein the valve body has an annular section and a square section, the annular section having a cooling air hole; the diaphragm has an edge section, an elastic section and a central section; the upper valve body has a diaphragm chamber in which the annular section is arranged and presses the diaphragm against it; the upper valve cover is screwed tightly to the valve body and forms a cylinder structure having a cylinder chamber which is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber;the valve shaft has a screwed section, a hollow shaft and a hollow shaft chamber, wherein the screwed section is screwed to the central section of the diaphragm, wherein the hollow shaft has an air guide hole which is connected to the hollow shaft chamber, wherein the air guide hole and the cooling air hole are connected to the diaphragm chamber, thereby forming a cooling air channel.

[0076] The diaphragm valve according to the invention comprises a valve and an actuating cylinder, wherein the valve has a valve body and a diaphragm made of fluoropolymer, wherein the actuating cylinder has an upper valve body, an upper valve cover and a valve shaft, wherein the valve body has an annular section and a square section; the diaphragm has an edge section, an elastic section and a central section; the upper valve body is arranged in the annular section, presses the diaphragm against it and has a first annular groove; the upper valve cover is screwed tightly to the valve body and forms a cylinder structure having a cylinder chamber which is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber;the valve shaft has a screw-in section, a hollow shaft and a damping ring, wherein the screw-in section is screwed to the central section of the diaphragm, and the damping ring is arranged in the first annular groove.

[0077] The diaphragm valve according to the invention comprises a valve and an actuating cylinder, wherein the valve has a valve body and a diaphragm made of fluoropolymer, wherein the actuating cylinder has an upper valve body, an upper valve cover and a valve shaft, wherein the square section has an inlet pipe and an outlet pipe, wherein the square section has a smallest diameter at the junction with the annular section, wherein the annular section has an inner annular surface, wherein the inner annular surface is provided with a sealing groove, wherein the sealing groove is located at the part with the smallest diameter; the diaphragm has an edge section, an elastic section and a central section; the upper valve body is arranged in the annular section and has a pressure section that presses the edge section of the diaphragm into the sealing groove;the upper valve cover is tightly screwed to the valve body and forms a cylinder structure which has a cylinder chamber which is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber; the valve stem has a screw-in section wherein the screw-in section is screwed to the central section of the diaphragm.;

[0078] The diaphragm valve according to the invention comprises a valve and an actuating cylinder, wherein the valve has a valve body and a diaphragm made of fluoropolymer, wherein the actuating cylinder has an upper valve body, an upper valve cover and a valve shaft, wherein the valve body has an annular section and a square section, wherein the square section has a valve chamber, wherein the annular section and the valve chamber form a cup-shaped structure, wherein the outer height of the cup-shaped structure is 80% to 160% of the height of the upper valve body; the diaphragm has an edge section, an elastic section and a central section; the upper valve body is arranged in the annular section and presses the edge section of the diaphragm into the sealing groove;the upper valve cover is tightly screwed to the valve body and forms a cylinder structure which has a cylinder chamber that is divided by the piston section into an upper cylinder chamber and a lower cylinder chamber.

[0079] The best thermal insulation solutions for problems 1 to 4, which can meet the requirements for high-temperature applications of 200°C, are as follows: Problem 1: Heat Transfer Limitation: The channel sidewall, the square plate, the upper valve body, and the annular section all possess heat transfer limitation zones with a limited cross-sectional area. The inlet pipe connector, the outlet pipe connector, the inlet pipe, the outlet pipe, and the channel of the heat source zones are all supported by the grid-like fin structure of the square section, thus limiting the heat transfer area and transferring heat outwards to the finned plates with horizontal openings for heat dissipation. The heat transfer limitation zone is formed at the bottom of the first annular groove and the second annular groove of the upper valve body. The heat in the heat source zones is significantly reduced by the limitation of the heat transfer area. This reduction in heat transfer also allows heat to be dissipated naturally via the heat dissipation fins and the outer surface of the components. Problem 2: Natural Cooling: The valve body utilizes a large number of natural heat dissipation surfaces to maintain a high temperature gradient across the structure. The grid-like horizontal multi-layer fin plates of the square section allow for ventilation and can accelerate natural heat dissipation. They are sufficient to maintain a high temperature gradient, thus ensuring structural rigidity. The cooling fins on the outer annular surface of the annular section provide natural heat dissipation when heat is transferred to the annular section. Problem 3: Internal Cooling: The cooling air channel serves to cool the diaphragm and valve stem within the diaphragm valve, enhancing the original thermal insulation effect, forced cooling, or natural cooling. Cooling air flows through the cooling air ring groove and the multiple air guide holes of the upper valve body to cool the edge section of the diaphragm. It flows over the side of the diaphragm not in contact with the liquid. It then enters the center hole through the air guide hole of the hollow stem, dissipating heat from the central section of the diaphragm to prevent high temperatures from affecting the fluorinated O-ring. This ensures that the fluorinated resin diaphragm valve can withstand high-temperature applications up to 200°C and provides either natural or forced cooling.

[0080] In natural cooling, the buoyancy of the hot air in the hollow shaft space inside the valve is used to guide the outside air so that it flows in through one or more air guide holes.

[0081] In forced cooling, high-pressure cooling air is supplied via the cooling gas connector, which further improves the reliability and resilience of high-temperature and high-corrosion applications at 200°C.

[0082] Problem 4: Tight pressure: the valve body, cylinder structure and valve shaft assembly must meet high structural strength requirements, resistance to corrosive gas in the environment and the stress of a reciprocating piston movement.

[0083] The square section of the valve body features a grid-like ribbed plate with horizontal openings, which increases the structural strength of the valve body and limits heat transfer. The annular section and the valve chamber form a cup-shaped structure. This cup-shaped structure has a deep cup shape. The outer height of the cup-shaped structure is at least 80% to 160% of the height of the upper valve body 5. The diaphragm is located near the bottom of the cup-shaped structure. Cooling is provided by a cooling channel in this position. During deformation due to high temperatures, the annular section, with its high structural strength, provides support, giving the structure greater strength than prior art designs. The valve shaft assembly is attached to the annular section; that is, the deep cup-shaped structure provides the most stable support structure for the valve shaft assembly.Concentricity and verticality are ensured during the opening and closing movement of the valve stem, which also helps to reduce particle release. The cylinder structure is supported by the annular section to ensure rigid support of the shaft bore and the verticality and concentricity of the valve stem. Cooling fins on the outer annular surface provide additional support for the cylinder chamber. The actuating air pressure and the spring vibration of the piston in the cylinder chamber are transferred to the valve body, significantly reducing the impact of structural loosening due to creep. Furthermore, the cylinder structure is located above the heat transfer limitation zone of the annular section.The upper valve body also has a heat transfer limitation zone, which can reduce heat transfer in the heat source zone and maintain the structural strength of the cylinder.

[0084] If there is no metal structure, the upper valve cover is bolted to the valve body, thus eliminating any issues with metal oxide contamination. With a metal structure, the metal bolts of the cylinder structure are protected by the bolt bushings. The bolt bushings have only one sealing surface. The height difference between the sealing surface and the edge of the diaphragm is at least 80% or more of the length of the upper valve body. If metal oxide is present, this height difference is sufficient to limit the contamination problem. The plant inspector does not need to check whether the bolts are corroded and need replacing. This means that even if the outer surface of the valve body is eroded by ambient corrosive gases, the sealing force is not reduced.

[0085] During the piston's reciprocating motion in the cylinder chamber, with the upper valve body attached to the inner annular surface of the annular section, the valve body absorbs most of the piston force and air pressure. The upper valve body is not deformed or loosened, thus maintaining the sealing force and preventing diaphragm leakage. The concentricity and verticality of the valve stem and the sealing force on the diaphragm's edge are ensured, thereby reducing leakage and extending the valve's service life. Brief description of the drawings Fig. 1A a sectional view of the metal-free, normally closed diaphragm valve of the first embodiment of the invention; Fig. 1B a perspective view of the metal diaphragm valve of the second embodiment of the invention when closed in the normal state; Fig. 2A a representation of the heat source zones of the invention; Fig. 2B a representation of the heat transfer path of the invention; Fig. 2C a representation of the natural cooling of the invention; Fig. 2D representation of the internal cooling of the invention; Fig. 3A a sectional view of the valve body of the invention; Fig. 3B a sectional view of the inlet pipe of the invention; Fig. 3C a sectional view of the valve body of the second type of the invention; Fig. 4A a representation of the valve shaft assembly with external thread when closed in the normal state; Fig. 4B a representation of the valve shaft assembly, which is open in the normal state and has an external thread; Fig. 4C shows a representation of the flange valve shaft assembly with external thread when closed in the normal state; Fig. 4D representation of the normally open flange valve shaft assembly with external thread; Fig. 4E a representation of the electrostatic valve shaft group of the invention; Fig. 5A a representation of the cylindrical structure of the annular section with external thread of the invention; Fig. 5B a representation of the cylinder structure of the upper valve cover with external thread of the invention; Fig. 5C a representation of the cylinder structure of the upper valve cover with flange of the invention; Fig. 6A a sectional view of the diaphragm valve of the conventional solution; Fig. 6B a sectional view of the valve body of the conventional solution, Fig. 6C a representation of the heat source zones of the conventional solution; Fig. 6D shows a representation of the heat transfer path of the conventional solution; Fig. 6E a representation of the cooling of the conventional solution; Fig. Figure 6F shows a sectional view of the valve body of the second type of the conventional solution. Ways to implement the invention

[0086] The thermal insulation method, which does not have all the features of claim 1, comprises a heat transfer limitation method and a heat dissipation method that can be used to insulate heat and improve heat dissipation so that the temperature gradient of the structure can be maintained. The heat transfer limitation method limits the thickness of the heat transfer cross-section of the structure, hereinafter referred to as the heat transfer limitation zone 147, which reduces the heat transfer from the heat source zone to achieve the goal of thermal insulation.

[0087] It will be on Fig. 1A, Fig. 1B, Fig. 2A, Fig. 2B, Fig. 2C, Fig. 2D, Fig. 3A, Fig. 3B, Fig. 3C, Fig. 4A, Fig. 4B, Fig. 4C, Fig. 4D, Fig. 4E, Fig. 5A, Fig. 5B and Fig. Reference is made to 5C.

[0088] A diaphragm valve made of resin, such as a metal-free, normally closed diaphragm valve 1a, consists of a valve 10a and an actuator cylinder 10b and employs a thermal insulation method. The valve 10a comprises a valve body 2, a diaphragm 3, and other components. The actuator cylinder 10b comprises an upper valve body 5, an upper valve cover 6, a valve stem 4, an actuator air port 171, and a cooling air port 161. The actuator air port 171 and the cooling air port 161 are both located above a heat transfer zone 147.

[0089] The upper valve cover 6 is tightly connected to the valve body 2 to form a cylinder structure 8. The interior of the cylinder structure 8 houses a valve stem assembly 7, a spring, and other components. The cylinder structure 8 has a cylinder chamber 175. The valve stem assembly 7 includes the diaphragm 3, the valve stem 4, and the upper valve body 5. The cylinder chamber 175 is located on the valve body 2 or on the upper valve cover 6, depending on the configuration of the diaphragm valve.

[0090] The valve body 2 has an annular section 24 and a square section 25. The square section 25 has an inlet pipe 21, an outlet pipe 22 and a valve chamber 23, wherein the inlet pipe 21 is connected to the pipe connector 211 and the outlet pipe 22 is connected to the pipe connector 221.

[0091] The valve chamber 23 has a valve seat 231, a channel 232, and a channel side wall 233. The valve seat 231 is located in a central position. The channel 232 is formed around the valve seat.

[0092] The annular section 24 has a sealing surface 240, an opening 241, a minimum diameter portion 242, an inner annular surface 243, a sealing groove 245, an outer annular surface 246, cooling fins 248, drive air holes 172, and cooling air holes 162. The minimum diameter portion 242 at one end of the annular section 24 is connected to the square section 25. The cooling fins 248 are attached to the outer annular surface 246 of the minimum diameter portion 242 and connected to the square section 25. The square section 25, the minimum diameter portion 242, the sealing groove 245, and the cooling fins 248 are all heat transfer limiting zones 147.

[0093] The square section 25 has a square plate 251 and several finned plates. The finned plates include several horizontal finned plates 253, one vertical longitudinal finned plate 254, and several vertical transverse finned plates 255. The square plate 251 forms a central opening for receiving the valve chamber 23 and is connected to the channel side wall 233. The vertical longitudinal finned plate 254 and the vertical transverse finned plates 255 are arranged below the square plate 251 to connect the inlet pipe 21, the outlet pipe 22, and the channel side wall 233. The square plate 251, the vertical longitudinal finned plate 254, and the vertical transverse finned plates 255 are all heat transfer limiting zones 147.

[0094] The membrane 3 has an edge section 31, an elastic section 32 and a central section 33, the central section 33 being provided with a threaded hole 331.

[0095] The valve shaft 4 has a screw-in section 41, a hollow shaft 42, and a piston section 43. The screw-in section 41 serves to fasten the central section 33 of the diaphragm 3. The hollow shaft 42 passes through a shaft hole 53 in the upper valve body 5 and is sealed by several O-rings. The hollow shaft 42 has a hollow shaft chamber 425 and several air guide holes 426. The piston section has a disc section 431, a lower annular ribbed plate 432, and an upper annular ribbed plate 433. The upper annular ribbed plate 433 is mounted on the top side of the disc section 431. The lower annular ribbed plate 432 is mounted on the underside of the disc section 431.

[0096] The upper valve body 5 is attached to the inside of the annular section 24. The upper valve body 5 has an outer annular surface 51, a pressure section 52, the shaft hole 53, a first annular groove 54, a second annular groove 55, and a diaphragm chamber 56. The pressure section 52 has several cooling air guide holes 164 and drive air guide holes 174. The second annular groove 55 is provided with several radial ribbed plates 551. The bottom of the first annular groove 54 and the bottom of the second annular groove 55 are both heat transfer limiting zones 147.

[0097] The upper valve cover 6 is cup-shaped and attached upside down to the valve body 2. The upper valve cover has an interior 61, an upper section 62, an outer annular surface 63, and a sealing surface 64. The interior 61 has an inner annular surface 611. The upper section 62 has a central through-hole 621 and several cooling fins 625.

[0098] The pipe connector 211 is attached to one side of the square section 25. The inlet pipe 21 runs horizontally through one side of the square section 25 and is connected to the channel 232 of the valve seat 231. The opening of the valve seat 231 serves to support the central section 33 of the diaphragm 3. The inlet opening of the outlet pipe 22 is located on the channel side wall 233 of the valve chamber, runs through the other side of the square section 25, and is connected to the pipe connector 221.

[0099] The inlet pipe 21 and the outlet pipe 22 extend horizontally. The highest point of the duct 232 is located above the inlet pipe 21 and the outlet pipe 22. The duct side wall 233 has the same thickness as the inlet pipe 21. The duct side wall 233 is a heat transfer restriction zone 147.

[0100] The edge section 31 is attached to the sealing groove 245 and pressed by the pressure section 52, thus bordering the cooling air hole 162 to completely seal the valve chamber 23. This places the diaphragm 3 and the smallest diameter section 242 in essentially the same horizontal position. The central section 33 can open and close the valve seat 231.

[0101] The cylinder structure 8 comprises the upper valve cover 6, the upper valve body 5, and the annular section 24. The cylinder chamber 175 is divided into an upper cylinder chamber 175a and a lower cylinder chamber 175b by the piston section 43 of the valve shaft assembly 7. The cylinder chamber 175 can be attached to the inner annular surface 243 of the annular section 24 or to the inner annular surface 611 of the interior 61 of the upper valve cover 6. The outer surface of the piston section 43 interacts with the cylinder chamber 175 to move back and forth. The rear end of the valve shaft 4 passes through the central through-hole 621 of the upper valve cover 6. The cylinder structure 8 is located above the heat transfer limitation zone 147.

[0102] The horizontal ribbed plate 253, the vertical longitudinal ribbed plate 254, and the vertical transverse ribbed plate 255 are connected to the inlet pipe 21, the outlet pipe 22, and the channel side wall 233. There is no problem with the thickened material 9163 in the prior art.

[0103] The lower annular ribbed plate 432 is coupled to the second annular groove 55, and the size between the two is slidably adjusted. When the diaphragm 3 moves up and down, a damping effect can be generated to reduce the vibration.

[0104] The cylinder structure 8 is supported by the structure of the annular section 24 to ensure the rigid support of the shaft bore 53 and the perpendicularity and concentricity of the valve shaft 4. The cooling fins 248 are arranged on the outer annular surface 246, which provides additional support for the cylinder structure 8. Since the outer annular surface 51 of the upper valve body 5 is located within the annular section 24, the actuating air pressure and spring vibration of the piston section 43 in the cylinder chamber 175 can be transmitted to the valve body 2; that is, the structure of the valve body 2 can absorb the pressure force without easily causing structural creep and loosening. Furthermore, the cylinder structure 8 is arranged above the heat transfer limitation zone 147.The upper valve body 5 also has a heat transfer limitation zone 147, which reduces the heat transfer from the heat source zone and can maintain the strength of the cylinder structure 8.

[0105] The annular section 24 and the valve chamber 23 form a cup-shaped structure 26. The cup-shaped structure 26 has a deep cup shape. The cup-shaped structure 26 has an outer height 261(H), which is the height from the sealing groove 245 to the sealing surface 240. The outer height 261(H) is at least 80% to 160% of the height of the upper valve body 5. The diaphragm 3 is located near the bottom of the cup-shaped structure 26. An internal cooling channel is also provided at this position. The annular section 24, with its high structural strength, can provide support during deformation under high temperature. This ensures that the probability of leakage at the edge section 31 of the diaphragm is minimized. Furthermore, the valve shaft assembly 7 is located on the annular section 24; that is, the cup-shaped structure 26 provides the most stable support for the valve shaft assembly 7.Concentricity and verticality can be ensured during the opening and closing movement of the valve shaft 4. This also contributes to reducing particle release.

[0106] The heat dissipation method of the thermal insulation method, which does not have all the features of claim 1, comprises external natural cooling 15 and internal cooling 16. The external natural cooling 15 is achieved by the square section 25 and the cooling fins 248 of the annular section 24 of the valve body 2 and the cooling fins of the upper valve cover 6. The internal cooling 16 is achieved by an internal cooling channel with one or more cooling air holes 162 of the valve body 2, the cooling air annular groove 163, the plurality of cooling air guide holes 164 of the upper valve body 5, a diaphragm space 165 of the diaphragm chamber 56 of the upper valve body 5, a plurality of air guide holes 426 of the valve shaft 4, and the hollow shaft space 425 of the hollow shaft 42. The internal cooling 16 is subdivided into internal natural cooling and internal forced cooling.Internal natural cooling utilizes the lift generated by the hollow shaft 42 at high temperatures to draw in external cooling air through the internal cooling channel, thereby dissipating heat. Internal forced cooling forces cooling air through the internal cooling channel to dissipate heat. The square plate 251, the horizontal finned plate 253, the vertical longitudinal finned plate 254, and the vertical transverse finned plate 255 have a heat transfer cross-sectional thickness of 1 cm to no greater than the thickness of the inlet pipe 21 and the outlet pipe 22, and less than 3 mm. The cooling fins 625 also have a heat transfer cross-sectional thickness of 1 cm to no greater than the thickness of the inlet pipe 21 and the outlet pipe 22, and less than 3 mm. The annular section 24 has a heat transfer cross-sectional thickness of [missing information].The thickness of the heat transfer cross-section at the smallest diameter part 242 is smaller than the thickness of the heat transfer cross-section of the other section of the annular section 24. The thickness of the heat transfer cross-section of the smallest diameter part 242 is 1 cm, not greater than the thickness of the inlet pipe 21 and the outlet pipe 22, and less than 3 mm. Such a design can achieve good heat dissipation and sufficient structural strength.

[0107] The different types of diaphragm valve according to the invention are: a metal-free diaphragm valve 1a and a metal diaphragm valve. The metal-free diaphragm valve 1a can be divided into a metal-free diaphragm valve that is normally closed and a metal-free diaphragm valve that is normally open. The metal diaphragm valve can be divided into a metal diaphragm valve that is normally closed and a metal diaphragm valve that is normally open. An electrostatically derived diaphragm valve is an extension of the two valves mentioned above.

[0108] The outer annular surface 246 of the annular section 24 of the valve body 2 has a metal-free annular section 24a with an external thread 247, or the outer annular surface 246 has an annular metal section 24b with several screw bushings 13.

[0109] The square section 25 of the valve body 2 is subdivided into the square plate 251, the plurality of vertical longitudinal rib plates 254, the plurality of horizontal rib plates 253, and the plurality of vertical transverse rib plates 255, which are referred to as square section 25a of the first type. Alternatively, the square section 25 is subdivided into the square plate 251 and two vertical transverse rib plates 255, which are referred to as square section 25b of the second type. The lower structure of the square plate 251 of square section 25a of the first type serves to support the inlet pipe 21, the outlet pipe 22, and the channel 232, and forms a grid-like rib plate with a plurality of horizontal openings. The vertical longitudinal rib plates 254 are located below the square plate 251 and connect the top and bottom of the inlet pipe 21 and the outlet pipe 22.The horizontal ribbed plates 253 are located on both sides and the underside of the inlet pipe 21, the outlet pipe 22, and the channel 232. The vertical transverse ribbed plates 255 overlap the inlet pipe 21, the outlet pipe 22, and the channel 232. The lower structure of the square plate 251 of the square section 25b of the second type serves to support the inlet pipe 21, the outlet pipe 22, and the channel 232 and forms a structure with horizontal openings. The vertical longitudinal rib plates 254 are arranged below the square plate 251 and connect the top of the inlet pipe 21 and the outlet pipe 22. The vertical transverse rib plates 255 overlap the underside of the inlet pipe 21 and the outlet pipe 22. That is, the square section 25 has a first side surface, a second side surface and a bottom surface.The vertical longitudinal rib plates 254, the horizontal rib plates 253 and the vertical transverse rib plates 255 form a grid-like rib plate on the first side surface and / or the second side surface and / or the bottom surface.

[0110] Since the valve body 2 is formed by PFA injection molding or pressing, the grid-like ribbed plate with horizontal openings is formed by the horizontal sliding of the slides on both sides. Therefore, there is no thickened material 9163 in the space between the horizontal center line and the square plate on the outer surface of the inlet pipe 21 and the outlet pipe 22. Furthermore, the bottom four corners of the square section 25 can fasten the valve body 2 to the mounting plate 10a1 with four nuts and bolts.

[0111] The valve shaft 4 can be further subdivided into a rotatable valve shaft and a fixed valve shaft. The screwed section 41 of the rotatable valve shaft has a screw hole 411 for attaching a screw 416. The screw 416 is inserted through the screw hole 411, tightened with a nut 414, and screwed into the threaded hole 331 of the diaphragm 3. The nut 414 secures the diaphragm in the opposite direction. The outer diameter of the screw 416 is smaller than that of the screw hole 411 to maintain radial clearance. The screwed section 41 of the fixed valve shaft has a threaded section 413 that can be screwed into the threaded hole 331 of the diaphragm 3.

[0112] The rotatable valve shaft can be divided into a normally closed valve shaft 4ac and a normally open valve shaft 4ad. A damping ring 434 is located below the piston section 43 of the normally closed valve shaft 4ac. The damping ring 434 engages in the first annular groove 54. A spring is located above the piston section 43 of the normally closed valve shaft 4ac to ensure that the diaphragm valve 1 is closed in the normal state. The space between them is a sliding fit. When the diaphragm 3 moves up and down, damping can be generated to reduce vibration. The underside of the piston section 43 of the normally open valve shaft 4ad receives the spring in the first annular groove 54 to ensure that the diaphragm valve is open in the normal state.

[0113] The fixed valve shaft 4b can be divided into a normally closed valve shaft 4bc and a normally open valve shaft 4bd. A damping ring 434 is located below the piston section 43 of the normally closed valve shaft 4bc. The damping ring 434 engages in the first annular groove 54. A spring is located above the piston section 43 of the normally closed valve shaft 4bc to ensure that the diaphragm valve is closed in the normal state. The space between them is a sliding fit. When the diaphragm 3 moves up and down, damping can be generated to reduce vibration. The underside of the piston section 43 of the normally open valve shaft 4bd receives the spring in the first annular groove 54 to ensure that the diaphragm valve 1 is open in the normal state.

[0114] The outer annular surface 51 of the upper valve body 5 has an external thread 511, thus forming an upper valve body 5a with an external thread. Or the outer annular surface 51 has a radial flange 512, thus forming an upper flanged valve body 5b.

[0115] The upper valve cover 6 is divided into a metal-free upper valve cover 6a with an internal thread 632 or an upper metal valve cover 6b with screw bushings 13 on the outer annular surface 63.

[0116] The valve shaft assembly 7 comprises the diaphragm 3, the upper valve body 5, and the valve shaft 4. The externally threaded valve shaft assembly 71 uses the rotatable valve shaft and the externally threaded upper valve body 5a. The flanged valve shaft assembly 72 uses the fixed valve shaft and the flanged upper valve body 5b. The electrostatic valve shaft assembly 73 is formed by adding a bundle of conductive fibers 44 to the valve shaft assembly 7. The conductive fibers 44 extend through the hollow shaft chamber 425 and the threaded section 41 in a loop connected to the side of the diaphragm 3 that is not in contact with the fluid. When using the rotatable valve shaft, the conductive fibers extend through the radial clearance of the screw hole 411. When using the fixed valve shaft, the conductive fibers 44 extend through the air guide hole 426.

[0117] The cylinder chamber 175 of the cylinder structure 8, which is arranged in the annular section, is referred to as the annular cylinder chamber 176. The cylinder chamber 175, which is arranged at the upper valve cover, is referred to as the valve cover cylinder chamber 177. The annular cylinder chamber 176 must use the rotatable valve shaft assembly. The valve cover cylinder chamber 177 can use either the rotatable valve shaft assembly or the fixed valve shaft assembly, depending on the structure.

[0118] The cylinder structure 8 is divided into a metal-free cylinder structure 8a and a metal cylinder structure 8b. The metal-free cylinder structure 8a uses a screw connection between the metal-free annular section 24a and the metal-free upper valve cover 6a. This forms the metal-free diaphragm valve. The four corners of the metal cylinder structure 8b are each provided with a metal screw that tightly connects the annular metal section 24b to the upper metal valve cover 6b. Each screw is protected by a screw bushing 13, which includes an upper screw bushing 131 and a lower screw bushing 132. This forms the metal diaphragm valve.

[0119] Fig. 1A, Fig. 2A, Fig. 2B, Fig. 2C, Fig. 2D, Fig. 3A, Fig. 3C, Fig. 4A and Fig. Figure 5A shows the first embodiment of the invention. The metal-free, normally closed diaphragm valve 1a, made of fluoropolymer resin, comprises a valve body 2, a normally closed valve shaft assembly 71a with external thread, and a metal-free upper valve cover 6a, and employs a thermal insulation method. The valve body 2 has an inlet pipe 21, an outlet pipe 22, a valve chamber 23, a metal-free annular section 24a, and a square section 25a of the first type. The metal-free annular section 24a has an annular cylinder chamber 176 and a normally closed valve shaft assembly 71a with external thread, which uses a normally closed valve shaft 4ac. The annular section 24a, the normally closed valve shaft assembly 71a with external thread, and the metal-free upper valve cover 6a form a metal-free cylinder structure 8a.In the metal-free cylinder structure 8a, the annular section 24a is screwed to the metal-free upper valve cover 6a.

[0120] The grid-like ribbed plates with horizontal openings of square section 25a of the first type are formed by PFA injection molding or pressing. The grid-like ribbed plates with horizontal openings are formed by horizontal sliding of the slides on both sides. The lowest vertical grid-like ribbed plate is formed by vertical sliding of the slides. Therefore, there is no thickened material 9163 in the space between the horizontal center line and the square plate on the outer surface of the inlet pipe 21 and the outlet pipe 22.

[0121] The metal-free annular section 24a has a portion with a smallest diameter 242 at one end, which is connected to the square section 25a of the first type. The outer annular surface 246 is provided with cooling fins 248. The sealing groove 245 is located on the portion with the smallest diameter 242. The inner side wall forms a channel side wall 233. The outer side wall forms an inner annular surface 243. The bottom of the sealing groove forms a square plate 251 for receiving the edge section 31 of the diaphragm 3 and is pressed by the upper valve body 5 to create a seal. When the inlet pipe 21 and the outlet pipe 22 are filled with high-temperature and high-pressure fluid and thus deform, the insulation of the vertical longitudinal ribbed plate 254 ensures that the deformation of the square plate 251 is greatly reduced.Furthermore, the cooling fins 248, the part with the smallest diameter 242, the cup-shaped structure 26 and the outer height 261 (H) can maintain the roundness of the sealing groove 245.

[0122] The external thread 247 is located on the outer annular surface 246 of the opening 241 for screwing onto the metal-free upper valve cover 6a. The inner annular surface 243 is also provided with an internal thread 244 for screwing onto the externally threaded upper valve body 5a. The overlap length of the external thread 247 and the internal thread 244 is at least two pitches of the internal thread 244 to achieve high structural strength.

[0123] The cooling air nozzle 161 and the drive air nozzle 171 are arranged above the smallest diameter part and are located above the square plate 251, i.e., above the heat transfer limitation zone 147. The cooling air nozzle 161 is connected via cooling air hole 162 to the cooling air annular groove 163 above the sealing groove 245 in order to cool the edge section 31 of the membrane 3 and to meet the requirement for high-temperature use.

[0124] The externally threaded upper valve body 5a has a plurality of cooling air guide holes 164, which are connected to the cooling air annular groove 163 to ensure sufficient cooling of the edge section 31 and the side of the diaphragm 3 not in contact with the liquid. The outer annular surface 51 of the externally threaded upper valve body 5a is provided with an external thread 511 for screwing into the internal thread 244 of the inner annular surface 243 of the annular section 24. The externally threaded upper valve body 5a is not subjected to the force from the piston section 43 and is not deformed by the pressure of the actuating air. The concentricity and verticality of the valve stem 4 can be ensured, and the contact force on the edge section 31 of the diaphragm 3 can be ensured to reduce leakage and extend service life.

[0125] The upper section 62 of the metal-free upper valve cover 6a has a central through-hole 621 for receiving the rear end of the valve stem 4. The rear end of the valve stem 4 rises when the diaphragm lifts and opens. The operator can see the operating state. The upper section 62 is provided with cooling fins 625. The outer annular surface 63 is provided with cooling fins 633.

[0126] As in Fig. 2D, Fig. 3A and Fig. As shown in Figure 3B, the valve body 2, which is suitable for the metal-free, normally closed diaphragm valve, has an inlet pipe 21, an outlet pipe 22, a valve chamber 23, and a metal-free annular section 24a and a square section 25a of the first type. The inlet pipe 21 is connected to the pipe connector 211, and the outlet pipe 22 is connected to the pipe connector 221. The valve chamber 23 has a valve seat 231, a channel 232, and a channel side wall 233. The valve seat 231 is located in a central position. The channel 232 is formed around the valve seat.The metal-free annular section 24a has a sealing surface 240, an opening 241, a minimum diameter portion 242, an inner annular surface 243, a sealing groove 245, a drive air groove 173, a cooling air groove 163, an outer annular surface 246, cooling fins 248, an external thread 247, and an internal thread 244, and is provided with cooling air holes 162 and a cooling air nozzle 161, as well as drive air holes 172 and a drive air nozzle 171. One end of the annular metal section 24b has a minimum diameter portion 242 and is connected to the square section 25b of the second type. It is located outside the channel 232. The cooling fins 248 are arranged on the outer annular surface 246 with the smallest diameter 242 and are connected to the square section 25b of the second type. The part with the smallest diameter 242 and the sealing groove 245 are both heat transfer limiting zones 147.The square section 25a of the first type has a square plate 251, a plurality of vertical longitudinal rib plates 254, a plurality of vertical transverse rib plates 255, and a plurality of horizontal rib plates 253. The square plate 251 forms a central opening for receiving the valve chamber 23 and is connected to the channel side wall 233. The lower structure of the square plate 251 serves to support the inlet pipe 21, the outlet pipe 22, and the channel 232 and forms a grid-like rib plate with a plurality of horizontal openings. The vertical longitudinal rib plates 254 are located below the square plate 251 and connect the top and bottom of the inlet pipe 21 and the outlet pipe 22. The horizontal rib plates 253 are located on both sides and the bottom of the inlet pipe 21, the outlet pipe 22 and the channel 232.The vertical transverse rib plates 255 overlap the inlet pipe 21, the outlet pipe 22, and the channel 232. The valve chamber 23 of the valve body 2 and the metal-free annular section 24a form a cup-shaped structure 26 with an outer height 261 (H), which is the height from the sealing groove 245 to the sealing surface 240. The outer height 261 (H) is at least 80% to 160% of the height of the upper valve body 5.

[0127] Fig. 2D, Fig. 3C and Fig. Figure 5A shows the metal-free, normally closed diaphragm valve, which uses the rotatable valve stem and the externally threaded upper valve body 5a. The cylinder chamber 175, located within the metal-free annular section 24a, is an annular cylinder chamber 176. The normally closed valve stem assembly 71a with external thread includes the diaphragm 3, the externally threaded upper valve body 5a, and the normally closed valve stem 4ac. The normally closed valve shaft 4ac has a screw-in section 41, a hollow shaft 42, and a piston section 43. The screw-in section 41 has a screw hole 411, a nut 414, and a screw 416. The hollow shaft 42 has a hollow shaft chamber 425 and an air guide hole 426. The piston section 43 has a disc section 431, a lower annular ribbed plate 432, an upper annular ribbed plate 433, and a damping ring 434.The upper valve body 5a with external thread has an outer annular surface 51, a pressure section 52, a shaft hole 53, a first annular groove 54, a second annular groove 55, and a diaphragm chamber 56. The outer annular surface 51 is provided with an external thread 511. The pressure section 52 is provided with a cooling air guide hole 164 and a drive air guide hole 174. The second annular groove 55 is provided with several radial rib plates 551.

[0128] Fig. 4A and Fig. Figure 5A shows the normally closed valve shaft assembly 71a with external thread for the metal-free normally closed diaphragm valve. It uses the normally closed valve shaft 4ac and the upper valve body 5a with external thread. The cylinder chamber 175, which is arranged within the metal-free annular section 24a, is an annular cylinder chamber 176. The normally closed valve shaft assembly 71a with external thread includes the diaphragm 3, the upper valve body 5a with external thread, and the normally closed valve shaft 4ac.

[0129] Fig. 4B and Fig. Figure 5B shows the normally open valve shaft assembly with external thread 71b for the normally open metal diaphragm valve, which uses the rotatable valve shaft and the upper valve body 5a with external thread. The difference to Fig. 4A consists in the fact that the cylinder chamber 175 is arranged within the upper metal valve cover 6b, forming a valve cover cylinder chamber 177. The valve shaft assembly 71 with external thread includes the diaphragm 3, the upper valve body 5a with external thread, and the valve shaft 4ad, which is open in the normal state.

[0130] Fig. Figure 5A shows the metal-free cylinder structure 8a of the cylinder chamber of the annular section, which uses the normally closed valve shaft assembly 71a with external thread and serves for the metal-free normally closed diaphragm valve. When the normally closed valve shaft 4ac and the upper valve body 5a with external thread are used and the cylinder chamber 175 is arranged within the metal-free annular section 24a, an annular cylinder chamber 176 is formed.

[0131] Fig. Figure 5B shows the metal cylinder structure 8b, which uses the normally closed valve shaft assembly 71a with external thread and serves for the normally closed metal diaphragm valve. When the normally closed valve shaft 4ac and the upper valve body 5a with external thread are used, it differs from Fig. 5A by the fact that the cylinder chamber 175 is arranged within the upper metal valve cover 6b, thus forming a valve cover cylinder chamber 177. The valve shaft assembly 71a with external thread includes the diaphragm 3, the upper valve body 5a with external thread, and the valve shaft 4ac, which is closed in the normal state.

[0132] Fig. 1B, Fig. 2A, Fig. 2B, Fig. 2C, Fig. 2D, Fig. 3B, Fig. 4D and Fig. Figure 5C shows the second embodiment of the invention. The normally open diaphragm valve 1a, made of fluoropolymer, comprises a valve body 2, a flanged valve shaft assembly 72, and an upper metal valve cover 6b. The valve body 2 has an inlet pipe 21, an outlet pipe 22, a valve chamber 23, an annular metal section 24b, and a square section 25b of the second type, and forms an internal cooling element. The inner annular surface 243 of the annular metal section 24b serves to mount the flanged valve shaft assembly 72. The upper metal valve cover 6b has an internal cylinder chamber 175. The flanged valve shaft assembly 72 uses the normally open valve shaft 4bd. The annular metal section 24b, the flanged valve shaft assembly 72, and the upper metal valve cover 6b form a metal cylinder structure 8b. In the metal cylinder structure 8b, the annular metal section 24b is screwed to the upper metal valve cover 6b.The flange valve shaft group 72 is clamped tightly to the radial flange 512 by the two.

[0133] The upper metal valve cover 6b is cup-shaped and arranged on the annular metal section 24b. The upper metal valve cover 6b, the flange valve shaft group 72, and the annular metal section 24b form a metal cylinder structure 8b, which has a valve cover cylinder chamber 177 located above the heat transfer limitation zone.

[0134] At each of the four corners of the upper metal valve cover 6b and the annular metal section 24b, a screw bushing 13 is formed, positioned above the smallest diameter portion of the annular section 24 and above the square plate 251, i.e., above the heat transfer limitation zone 147. This prevents the thick structure of the screw bushings 13 from becoming a large heat transfer surface and thus reducing the thermal insulation effect. The lower screw bushing of the annular metal section 24b has an internal metal thread into which a metal screw can be screwed to seal the sealing surface 240. An upper sealing surface 133 is provided between the upper screw bushing 131 and the lower screw bushing 132 to prevent corrosion of the metal screw.

[0135] The upper metal valve cover 6b and the annular metal section 24b are each provided with an air sleeve 11 on the side of the inlet pipe 21 or the side of the outlet pipe 22, located next to the screw bushing 13. The cooling air duct 161 and the drive air duct 171 are arranged on the upper metal valve cover 6b. The drive air duct 171 can be directly connected to the cylinder chamber 175. The upper valve cover 6b and the annular section 24b are each provided with cooling air holes 162 and drive air holes 172. Two air sleeves 169 are fitted with an O-ring at the sealing surface 113 to ensure airtightness. The air sleeves 169 are arranged above the smallest diameter portion of the annular section 24b and are located above the square plate 251.above the heat transfer restriction zone 147, to avoid the thick structure of the air sleeves 169 becoming a large heat transfer surface and thus reducing the heat insulation effect.

[0136] The drive air is supplied to the top of the piston via the drive air port 171. The outer surface of the piston is moved up and down relative to the cylinder chamber 175.

[0137] The internal cooling system 16 employs an internal forced cooling system 16b. Cooling air flows through the cooling air nozzle 161 and enters the cooling air ring groove 163 through the cooling air holes 162. It then passes through the cooling air guide holes 164 onto the side of the diaphragm 3 not in contact with the liquid within the diaphragm chamber 165 and finally flows through the air guide holes 426 into the hollow shaft chamber 167, where it is recovered through the air recovery nozzle 168. The internal forced cooling system 16b further cools the edge section 31 of the diaphragm 3 to maintain the pressure force of the pressure section 52. The valve shaft 4, which dissipates heat poorly, and the fluorinated O-ring on the piston section 43 can also dissipate heat via the hollow shaft channel 158. The concentricity of the valve shaft 4 can be ensured.

[0138] Tightness, high structural strength, resistance to the corrosive gas in the environment and the back-and-forth movement of the piston.

[0139] High structural strength; the cylinder structure, the four screw bushings 13 and the air sleeves 11 are located above the smallest diameter part 242 of the annular section 24, also above the square plate and above the heat transfer limitation zone 147. The driving air pressure of the piston and the oscillation of the spring 12 are transmitted to the valve body 2, which is absorbed and received by the structure of the valve body 2.

[0140] Resistance to corrosive gases in the environment: The cup-shaped structure 26 and the outer height 261 (H) keep the metal screws away from the membrane 3, thereby reducing erosion by trace gases or liquids that penetrate the membrane 3 and thus preventing the problem of metal oxide contamination. Operators do not need to check whether the screws are corroded and need to be replaced.

[0141] Absorption of the piston's reciprocating motion: The cup-shaped structure 26 and the outer height 261 (H) ensure that the upper flange valve body 5b has stable support and does not absorb the force generated by the piston section 43 and the actuating air. This provides a highly reliable sealing force to reduce deformation and creep. It does not reduce the sealing pressure and therefore does not cause the diaphragm 3 to leak. The concentricity and verticality of the fixed valve shaft 4b and the pressure force on the edge section 31 of the diaphragm 3 are ensured to reduce leakage and extend service life.

[0142] As in Fig. As shown in Figure 3B, the valve body 2 for the normally open metal diaphragm valve 1d has an inlet pipe 21, an outlet pipe 22, a valve chamber 23, an annular metal section 24b, and a square section 25b of the second type. The inlet pipe 21 is connected to the pipe connector 211, and the outlet pipe 22 is connected to the pipe connector 221. The valve chamber 23 has a valve seat 231, a channel 232, and a channel side wall 233. The valve seat 231 is located in a central position. The channel 232 is formed around the valve seat. The annular metal section 24b has a sealing surface 240, an opening 241, a part with smallest diameter 242, an inner annular surface 243, a sealing groove 245, a cooling air annular groove 163, an outer annular surface 246, cooling fins 248, a lower air bushing 112, a plurality of lower screw bushings 132 and cooling air holes 162.The smallest diameter part 242 at one end of the annular section 24 is connected to the square section 25b of the second type and is located outside the channel 232. The cooling fins 248 are attached to the outer annular surface 246 of the smallest diameter part 242 and connected to the square section 25b of the second type. The smallest diameter part 242 and the sealing groove 245 are heat transfer limiting zones 147. The square section 25b of the second type has a square plate 251, several vertical longitudinal fin plates 254, and several vertical transverse fin plates 255. The square plate 251 forms a central opening for receiving the valve chamber 23 and is connected to the channel side wall 233.The vertical longitudinal rib plates 254 are arranged below the square plate 251 to connect the top of the inlet pipe 21 and the outlet pipe 22, and are connected to the duct side wall 233. The square plate 251 and the vertical longitudinal rib plates 254 are all heat transfer limiting zones 147. The annular metal section 24b and the valve chamber 23 of the valve body 2 form a cup-shaped structure 26. The cup-shaped structure 26 has an outer height 261(H), which is the height from the sealing groove 245 to the sealing surface 240. The outer height 261(H) is at least 80% to 160% of the height of the upper valve body 5.

[0143] Fig. Figure 4C shows the normally closed flanged valve shaft assembly 72a for a normally closed metal diaphragm valve 1c, which uses a fixed normally closed valve shaft 4bc and an upper flanged valve body 5b. The cylinder chamber 175, which is arranged within the metal-free annular section 24a, is an annular cylinder chamber 176. The externally threaded valve shaft assembly 71a includes the diaphragm 3, the upper flanged valve body 5b, and the fixed normally closed valve shaft 4bc.

[0144] Fig. Figure 4D shows the flanged valve shaft assembly 72 for the normally open metal diaphragm valve 1d, which uses the normally open valve shaft 4bd and the upper flanged valve body 5b. The externally threaded valve shaft assembly 71 includes the diaphragm 3, the upper flanged valve body 5b, and the normally open valve shaft 4bd.

[0145] Fig. Figure 4E shows the electrostatic valve shaft assembly 73, which is formed by adding a bundle of conductive fibers 44 to the flanged valve shaft assembly 72. The conductive fibers 44 pass through the hollow shaft chamber 425. The conductive fibers 44 are then secured in a loop on the side of the diaphragm 3 not in contact with the liquid and connected to the external grounding wire through the radial clearance of the screw hole 411 of the rotatable valve shaft 4a. The conductive fibers 44 are not affected by the rotation of the valve shaft 4. The embodiment can also use a valve shaft 4bd that is open in its normal state. The conductive fibers 44 pass through the hollow shaft chamber 425. The conductive fibers 44 are then secured in a loop on the side of the diaphragm 3 not in contact with the liquid and connected to the external grounding wire through the air guide hole 426 of the fixed valve shaft 4b.

[0146] Fig.Figure 5C shows the cylinder structure of the upper valve cover cylinder chamber for the normally open metal diaphragm valve 1d, which uses the flange valve shaft assembly 72, the normally closed valve shaft 4bc, and the upper flange valve body 5b. The cylinder chamber 175, located in the upper metal valve cover 6b, is a valve cover cylinder chamber 177. The flange valve shaft assembly 72 includes the diaphragm 3, the upper flange valve body 5b, and the normally closed valve shaft 4bc. Reference list 1a Metal-free, normally closed diaphragm valve 10a Valve 10a1 Mounting plate 10b Drive cylinder 11 Air sleeve 111 upper air sleeve 112 lower air sleeve 113 Sealing surface 12 springs 13 screw bushing 131 upper screw bushing 132 lower screw bushing 133 Sealing surface 140a Valve chamber heat source zone 140b Channel Heat Source Zone 140°C Inlet pipe heat source zone 140d Outlet pipe heat source zone 140e Inlet connector heat source zone 140f Outlet connector heat source zone 141 Valve shaft heat transfer path 142 square plate heat transfer path 143 Pipe connector heat transfer path 144 ring-shaped section - heat transfer path 145 Wave-hole heat transfer path 146 square section heat transfer path 147 Heat transfer restriction zone 15 external natural cooling 151 Heat dissipation path 152 ribbed plates of the square section 153 upper valve body heat dissipation path 154 upper valve cover heat dissipation path 16 internal cooling 161 Cooling air ducts 162 Cooling air hole 163 Cooling air ring groove 164 Cooling air guide hole 165 Membrane space 168 air recovery nozzles 169 Air sleeve 171 Drive air duct 172 Drive air hole 173 Drive air ring groove 174 Drive air guide hole 175 cylinder chamber 175a upper cylinder chamber 175b lower cylinder chamber 176 annular cylindrical chamber 177 Valve cover cylinder chamber 2 valve bodies 21 Inlet pipe 211 pipe connectors 22 Outlet pipe 221 pipe connectors 23 Valve chamber 231 Valve seat Channel 232 233 Channel side wall 24 ring-shaped section 24a metal-free annular section 24b ring-shaped metal section 240 sealing surface 241 Opening 242 smallest diameter 243 inner ring-shaped surface 244 internal thread 245 Sealing groove 246 outer ring-shaped surface 247 external threads 248 cooling fins 25 square section 25a square section of the first type 25b square section of the second type 251 square plate 253 horizontal ribbed plate 254 vertical longitudinal rib plate 255 vertical transverse ribbed plate 26 cup-shaped structures 261 Exterior height 3 Membran 31 Marginal section 32 elastic section 33 Middle section 331 Threaded hole 4 valve shaft 4ac valve shaft closed in normal state 4ad in normal state open valve shaft 4bc valve shaft closed in normal state 4bd in normal state open valve shaft 41 Screw section 411 screw hole 413 Thread section 414 Mother 416 screw 42 Hollow shaft 425 Hollow shaft space 426 Air guide hole 43 Piston section 431 Disc section 432 lower ring-shaped ribbed plate 433 upper ring-shaped ribbed plate 434 Damping ring 44 conductive fibers 5 upper valve body 5a upper valve body with external thread 5b Flange valve body 51 outer ring-shaped surface 511 External thread 512 radial flange 52 Print section 53 wave hole 54 first ring groove 55 second ring groove 551 radial ribbed plate 56 Membrane chamber 6 upper valve cover 6a metal-free upper valve cover 6b upper metal valve cover 61 Interior 611 inner ring-shaped surface 62 upper section 621 central through hole 622 Sealing groove 625 Cooling fin 63 outer ring-shaped surface 631 screw hole 632 Internal thread 633 Cooling fin 64 Sealing surface 641 Recess 7 Valve shaft group 71 Valve shaft assembly with external thread 71a Normally closed valve shaft assembly with external thread 71b in normal state open valve shaft assembly with external thread 72 Flange valve shaft group 73 electrostatic valve shaft group 8 cylinder structure 8a metal-free cylindrical structure 8b Metal cylinder structure 9 Diaphragm valve 90a valve 90b Drive cylinder 91 Valve bodies 911 Inlet pipe 912 Outlet pipe 913 Valve chamber 9131 Valve seat Channel 9132 9133 Sealing groove 9134 Channel side wall 915 ring-shaped section 9151 Sealing surface 9155 Breathing hole 916 square section 9161 square plate 9162 vertical longitudinal ribbed plate 9163 thickened material 92 Membran 921 marginal section 922 elastic section 923 Middle section 93 upper valve body 931 outer ring-shaped surface 932 inner ring-shaped surface 933 Sealing surface 934 Print section 935 wave hole 936 Membrane chamber 937 cylinder chamber 94 upper valve cover 941 Interior 942 upper section 943 outer ring-shaped surface 944 sealing surface 95 Valve shaft 951 Thread section 952 wave 953 Piston section 961 valve shaft assembly closed in normal state

Claims

[1] Diaphragm valve suitable for 200°C high-temperature and high-corrosion applications, which may be a metal-free diaphragm valve or a metal diaphragm valve, wherein the diaphragm valve comprises a valve (10a) and an actuator cylinder (10b), wherein the valve (10a) has a valve body (2) and a diaphragm (3) made of fluoropolymer resin, wherein the actuator cylinder (10b) has an upper valve body (5), an upper valve cover (6), a valve shaft (4), an actuator air port (171) and a cooling air port (161), wherein the membrane (3) has an edge section (31), an elastic section (32) and a middle section (33); the valve body (2) has an annular section (24) and a square section (25), wherein the square section (25) has an inlet pipe (21), an outlet pipe (22) and a valve chamber (23), wherein the valve chamber (23) has a valve seat (231) and a channel (232), wherein the annular section (24) has a sealing surface (240), an opening (241), an inner annular surface (243) and an outer annular surface (246), wherein the inner annular surface (243) forms a sealing groove (245) and an O-ring groove; the upper valve body (5) has an outer annular surface (51), a pressure section (52), a shaft hole (53) and a diaphragm chamber (56), wherein the upper valve body (5) is arranged in the annular section (24), wherein the pressure section (52) serves to press the edge section (31) of the diaphragm (3) into the sealing groove (245) of the annular section (24); the valve shaft (4) has a screwing section (41), a hollow shaft (42) and a piston section (43), wherein the screwing section (41) serves to fasten the central section (33) of the diaphragm (3), wherein the hollow shaft (42) passes through the shaft hole (53) of the upper valve body (5) and is sealed by several O-rings; the upper valve cover (6) has an interior (61), an upper section (62), a central through-hole (621), an outer annular surface (63) and a sealing surface (64), wherein the upper valve cover (6) is tightly screwed to the valve body (2) and forms a cylinder structure (8) having a cylinder chamber (175) which is divided by the piston section (43) into an upper cylinder chamber and a lower cylinder chamber; the diaphragm (3), the valve shaft (4) and the upper valve body (5) form a valve shaft group (7), wherein the end of the valve shaft (4) passes through the central through-hole (621) of the upper valve cover (6), wherein the annular section (24) and the valve chamber (23) form a cup-shaped structure, wherein the valve shaft group (7) and the cylinder structure (8) are supported by the cup-shaped structure; The heat source zones comprise a valve chamber heat source zone, a duct heat source zone, an inlet pipe heat source zone, and an outlet pipe heat source zone, wherein the square section (25), the annular section (24), the upper valve body (5), and the diaphragm (3) form a heat transfer path, wherein the square section (25) has a square plate (251) and several finned plates, the finned plates being arranged below the square plate (251) to connect the inlet pipe (21), the outlet pipe (22), and the duct side wall (233), wherein a heat transfer restriction zone (147) comprises the square plate (251) and the finned plates and has a heat transfer cross-sectional thickness, the thickness of which is not greater than or equal to the thickness of the inlet pipe and less than 3 mm, and wherein the square plate (251) has a central opening.which accommodates the valve chamber (23) and is connected to the channel side wall (233), wherein the smallest diameter portion (242) of the annular section (24) is connected to the top of the square plate (251), wherein the outer side wall of the sealing groove (245) forms the inner annular surface (243) of the annular section (24) and the inner side wall of the sealing groove (245) forms the channel side wall (233), wherein the square plate (251) forms the bottom wall of the sealing groove (245), wherein the sealing groove (245) and the smallest diameter portion (242) also form a heat transfer limitation zone (147), wherein a plurality of cooling fins (248) are provided on the outer annular surface (246) which is connected to the square plate (251), wherein the cooling fins (248) also form a heat transfer limitation zone (147); a variety of cooling structures, including a variety of natural cooling structures and an internal cooling structure; the natural cooling structure is formed by the surface of the square plate (251), the cooling fins (248) of the annular section (24) and the cooling fins (633) of the upper valve cover (6), the internal cooling structure is formed by the cooling air and a cooling air duct, wherein the cooling air duct is formed by one or more than one cooling air hole of the annular section (24), wherein the cooling air hole is connected to a cooling air annular groove (163), wherein the cooling air annular groove is connected to the cooling air guide holes (164) of the pressure section of the upper valve body (5), wherein the cooling air guide holes (164) are connected to the side of the diaphragm space (165) not in contact with the liquid, and wherein the air guide holes of the hollow shaft (42) are connected to the shaft hole (53). [2] Diaphragm valve according to claim 1, characterized by , that the diameter of the opening of the valve chamber (23) is 2.54 cm and the thickness of the heat transfer cross-section is greater than 1 mm. [3] Diaphragm valve according to claim 1, characterized by , that the cylindrical structure (8) includes part of the annular section (24) and is located above the heat transfer limitation zone (147) with the square plate (251) and the annular section (24). [4] Diaphragm valve according to claim 1, characterized by , that the inlet pipe (21) and the outlet pipe (22) extend in the horizontal direction and the square section (25) comprises the square plate (251), several horizontal rib plates (253), a vertical longitudinal rib plate (254) and several vertical transverse rib plates (255), forming a rib plate with horizontal openings. [5] Diaphragm valve according to claim 4, characterized by, that the square section (25) is connected to the valve chamber heat source zone, the duct heat source zone, the inlet pipe heat source zone and the outlet pipe heat source zone, and that the horizontal finned plates (253) are located on both sides and the underside of the inlet pipe (21), the outlet pipe (22) and the duct (232), and that the vertical transverse finned plates (255) overlap the inlet pipe (21), the outlet pipe (22) and the duct (232). [6] Diaphragm valve according to claim 1, characterized by , that the heat transfer restriction zone (147) comprises the valve chamber heat source zone, wherein the valve chamber heat source zone comprises the smallest diameter part (242) of the annular section (24), the channel side wall (233) of the valve chamber (23) and the square plate (251). [7] Diaphragm valve according to claim 1, characterized by, that the upper valve body (5) has a first annular groove (54) and a second annular groove (55), wherein the heat transfer limitation zone (147) comprises the bottom of the first annular groove (54) and the bottom of the second annular groove (55). [8] Diaphragm valve according to claim 1, characterized by , that the internal cooling structure uses the internal natural cooling, which utilizes the buoyancy of the hollow shaft (42) at a high temperature to introduce the external cooling air through the internal cooling channel so that heat dissipation through the hollow shaft (42) is achieved. [9] Diaphragm valve according to claim 1, characterized by , that the internal cooling structure uses internal forced cooling, wherein the cooling air is forcibly guided through the internal cooling channel, wherein the cooling air nozzle is connected to the cooling air introduced through the cooling channel, thereby achieving heat dissipation through the hollow shaft (42). [10] Diaphragm valve according to claim 1, characterized by, that the cooling air ring groove (163) is attached to the inner annular surface (243) of the annular section (24). [11] Diaphragm valve according to claim 1, characterized by , that the cooling air ring groove (163) is attached to the outer annular surface (51) of the upper valve body (5). [12] Diaphragm valve according to claim 1, characterized by , that an O-ring is provided on the cooling air ring groove (163) for insulating the compressed air. [13] Diaphragm valve according to claim 1, characterized by , that the cooling air nozzle (161) is attached to the annular section (24) and is located above the heat transfer limitation zone (147) with the part with the smallest diameter (242) and the square plate (251). [14] Diaphragm valve according to claim 1, characterized by, that the drive air nozzle (171) is attached to the annular section (24) and is located above the heat transfer limitation zone (147) with the part with the smallest diameter (242) and the square plate (251). [15] Diaphragm valve according to claim 1, characterized by , that when the cylindrical structure is tightly fastened by a plurality of screw bushings (13) and metal screws, the screw bushings (13) and the metal screws are located above the heat transfer limiting zone (147) with the part with the smallest diameter (242) and the square plate (251). [16] Diaphragm valve according to claim 1, characterized by , that the cooling air duct (161) is attached to the upper valve cover (6), with the air sleeves (11) being located outside the cylinder structure above the heat transfer limitation zone (147) with the smallest diameter part (242) and the square plate (251). [17] Diaphragm valve according to claim 1, characterized by , that the drive air duct (171) is attached to the upper valve cover (6), with the air sleeves (11) being located outside the cylinder structure above the heat transfer limitation zone (147) with the smallest diameter part (242) and the square plate (251).

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