Valve device

Abstract

The present invention provides a valve device that allows adjustment of the position of the valve seat relative to the valve body. [Solution] The valve device 100 comprises a fluid inlet passage 12, a fluid outlet passage 12, a flow path forming block 1 having a communication chamber 14 that communicates with the fluid inlet passage 11 and the fluid outlet passage 12, a valve seat portion 2 provided in the communication chamber so as to be movable along the vertical direction, a valve body mechanism 3 having a valve body 31, a drive actuator 4 provided in the flow path forming block 1 that drives the valve body mechanism 3 so as to seat or disseat the valve body 31 with respect to the valve seat portion 2, and a position adjustment mechanism 5 provided in the communication chamber 14 to adjust the position of the valve seat portion 2 relative to the valve body 31 by moving the valve seat portion 2 along the vertical direction.

Description

Technical Field

[0001] The present invention relates to a valve device.

Background Art

[0002] Patent Document 1 discloses a valve device that opens and closes by driving a valve element.

Prior Art Document

Patent Document

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, the valve device described in Patent Document 1 has a problem that the position of the valve seat portion with respect to the valve element cannot be adjusted.

[0005] Therefore, the present invention has been made by focusing on this problem, and an object thereof is to provide a valve device capable of adjusting the position of the valve seat portion with respect to the valve element.

Means for Solving the Problems

[0006] According to an aspect of the present invention, there is provided a valve device including a fluid inflow passage, a fluid outflow passage, a passage forming block in which a communication chamber communicating with the fluid inflow passage and the fluid outflow passage is formed, a valve seat portion provided in the communication chamber so as to be movable along the vertical direction, a valve element mechanism having a valve element, a drive actuator provided in the passage forming block for driving the valve element mechanism so that the valve element is seated or unseated with respect to the valve seat portion, and a position adjustment mechanism provided in the communication chamber for moving the valve seat portion along the vertical direction to adjust the position of the valve seat portion with respect to the valve element.

Effects of the Invention

[0007] According to this embodiment, the position of the valve seat relative to the valve body can be adjusted. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a cross-sectional view showing the main part of the valve device in the closed state according to this embodiment. [Figure 2] Figure 2 is a cross-sectional view showing the main part of the valve device in the closed state according to a modified example. [Modes for carrying out the invention]

[0009] Hereinafter, embodiments of the present invention (hereinafter referred to as "these embodiments") will be described with reference to the attached drawings. Throughout this specification, the same elements will be denoted by the same reference numerals.

[0010] (Configuration of the valve device) First, the valve device 100 according to this embodiment will be described with reference to Figure 1.

[0011] Figure 1 is a cross-sectional view showing the main part of the valve device 100 in the closed state according to this embodiment.

[0012] As shown in Figure 1, the valve device 100 according to this embodiment is a valve device used in a fluid supply unit as a fluid supply means for supplying process gas or the like as a fluid from a fluid supply source (not shown) to semiconductor manufacturing equipment (CVD equipment, sputtering equipment, etching equipment, etc. / not shown). In this embodiment, the valve device 100 is composed of a normally closed (i.e., normally closed) solenoid valve, but is not limited to this, and may be composed of, for example, an air-supplied drive valve or a piezoelectric drive valve. As shown in Figure 1, the valve device 100 comprises a flow path forming block 1, a valve seat 2, a valve body mechanism 3, a drive actuator 4, and a position adjustment mechanism 5. The drive actuator 4 is attached to the flow path forming block 1 by, for example, screwing.

[0013] As shown in Figure 1, the flow path forming block 1 includes a block body 11, a fluid inlet flow path 12 and a fluid outlet flow path 13 formed in the block body 11, and a communication chamber 14 formed in the block body 11 so as to connect the outlet end, which is one end of the fluid inlet flow path 12, and the inlet end, which is one end of the fluid outlet flow path 13.

[0014] The communication chamber 14 has a recess 141 formed on the upper end surface of the block body 11 so as to communicate with the outlet end of the fluid inflow passage 12, and a through hole 142 that communicates with the inflow end of the fluid outflow passage 13 and extends vertically so as to connect the recess 141 (specifically, the bottom surface of the recess 141) and the lower end surface of the block body 11.

[0015] The through-hole 142 has small-diameter chambers 142a arranged in a continuous sequence from top to bottom, a stepped chamber 142b with a diameter larger than that of the small-diameter chambers 142a, a medium-diameter chamber 142c with a diameter larger than that of the stepped chambers 142b, and a large-diameter chamber 142d with a diameter larger than that of the medium-diameter chambers 142c. The small-diameter chambers 142a, 142b, 142c, and 142d are formed coaxially. The medium-diameter chamber 142c is in communication with the inlet end of the fluid outflow channel 13. A female thread 143 is formed at the lower end of the large-diameter chamber 142d, which is close to the lower end surface of the block body 11.

[0016] As shown in Figure 1, the valve seat portion 2 is provided across both the recess 141 and the through hole 142 of the communication chamber 14 so as to be guided into the through hole 142 along the vertical direction. The valve seat portion 2 also includes a cylindrical tubular portion 21, an orifice valve seat 22 as a valve seat provided at the upper end of the tubular portion 21, and a flange 23 provided on the outer circumference of the lower end of the tubular portion 21.

[0017] The cylindrical portion 21 is guided to move vertically along either the small-diameter chamber 142a or the medium-diameter chamber 142c. The cylindrical portion 21 and flange 23 of the valve seat portion 2 are housed in the through hole 142. On the other hand, the orifice valve seat 22 of the valve seat portion 2 protrudes from the through hole 142 and is exposed in the recess 141. Specifically, a portion of the cylindrical portion 21 located above the flange 23 is housed in the small-diameter chamber 142a and the stepped chamber 142b, while the other portion of the cylindrical portion 21 is housed in the medium-diameter chamber 142c.

[0018] As shown in Figure 1, the valve mechanism 3 includes a valve body 31 consisting of a valve body 311 and a projection 312 that protrudes downward from the valve body 311, a seat 32 embedded at the tip of the projection 312 of the valve body 31, a spring 33 provided on the lower surface of the valve body 311, and a spring retainer 34 provided on the outer circumferential surface of the projection 312.

[0019] As shown in Figure 1, the drive actuator 4 is a drive unit that drives the valve mechanism 3 so that the valve body 31 (specifically, the seat 32) seats or separates from the valve seat portion 2 (specifically, the orifice valve seat 22). Note that the configuration of the drive actuator 4 is not a key part of this embodiment, so a detailed description of the drive actuator 4 is omitted.

[0020] As shown in Figure 1, the position adjustment mechanism 5 is provided in the communication chamber 14 to adjust the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32) by moving the valve seat portion 2 along the vertical direction. This makes it possible to adjust the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32). As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0021] In addition, since the communication chamber 14 formed in the flow path forming block 1 (specifically, the block body 11) can be effectively utilized as a space for accommodating the position adjusting mechanism 5, it is possible to realize the position adjustment of the valve seat portion 2 (specifically, the orifice valve seat 22) with respect to the valve body 31 (specifically, the seat 32) without increasing the size of the entire valve device 100.

[0022] The position adjusting mechanism 5 includes a bottomed cylindrical body 51 provided below the valve seat portion 2 so that the bottom is separated from the valve seat portion 2 and abuts against the valve seat portion 2, a male screw portion 52 provided below the bottomed cylindrical body 51 so as to be screwed with the female screw 143, and an annular (specifically, circular) plate 53 sandwiched between the bottomed cylindrical body 51 and the male screw portion 52.

[0023] The bottomed cylindrical body 51 is guided by the through hole 142 so as to be movable along the vertical direction. The bottomed cylindrical body 51 includes a cylindrical main body 511 that abuts against the valve seat portion 2, a bottom 512 provided at the lower end of the cylindrical main body 511, a communication hole 513 formed in the peripheral wall of the cylindrical main body 511 so as to communicate the inside of the cylindrical main body 511 and the inflow end of the fluid outflow passage 13, and a flange 514 provided on the outer peripheral side of the cylindrical main body 511.

[0024] The cylindrical main body 511 is guided by the medium diameter chamber 142c so as to be movable along the vertical direction. A part of the cylindrical main body 511 located above the flange 514 is accommodated in the medium diameter chamber 142c, while other parts other than a part of the cylindrical main body 511 are accommodated in the large diameter chamber 142d.

[0025] In this embodiment, an annular (specifically, circular) metal gasket 7 as a sealing material is sandwiched between the upper surface of the flange 514 and an annular (specifically, circular) protrusion provided on the upper wall of the large diameter chamber 142d, but it is not limited thereto. For example, an annular (specifically, circular) resin material as a sealing material may be sandwiched.

[0026] The male threaded portion 52 is housed in the large-diameter chamber 142d so as to screw into the female thread 143. By rotating the male threaded portion 52 relative to the female thread 143, the bottomed cylindrical body 51 and the valve seat portion 2, which are guided into the through hole 142 via the plate 53, can be moved vertically, thereby adjusting the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32). As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0027] Furthermore, even when the valve seat portion 2 and the bottomed cylindrical body 51 move along the vertical direction, the communication hole 513 and the inlet end of the fluid outflow passage 13 remain in communication. This prevents the communication between the communication hole 513 and the inlet end of the fluid outflow passage 13 from being interrupted due to the vertical movement of the valve seat portion 2 and the bottomed cylindrical body 51.

[0028] The through-hole 142 houses a biasing member 6, which serves as an annular (specifically, circular) sealing material. Specifically, the biasing member 6 is housed between the peripheral wall of the stepped chamber 142b and the outer peripheral surface of the cylindrical portion 21. The biasing member 6 is made of, for example, an elastic resin material. The biasing member 6 is also sandwiched between the upper surface of the flange 23 and the upper wall of the stepped chamber 142b so as to be compressed. This allows the biasing member 6 to bias the valve seat portion 2 downward. As a result, the valve seat portion 2, which has been moved vertically by the position adjustment mechanism 5, can be positioned. Thus, the biasing member 6 combines both sealing and positioning functions.

[0029] In this embodiment, the valve seat is composed of an orifice valve seat 22 provided at the upper end of the cylindrical portion 21, but it is not limited to this, and may be composed of, for example, a large-diameter valve seat provided at the upper end of the cylindrical portion 21.

[0030] Furthermore, in this embodiment, a plate 53 is provided between the bottomed cylindrical body 51 and the male threaded portion 52 to suppress the rotation of the bottomed cylindrical body 51 due to the rotation of the male threaded portion 52, but this is not limited to this, and the plate 53 may be omitted. In this case, the male threaded portion 52 is provided below the bottomed cylindrical body 51 so as to abut against the bottomed cylindrical body 51. In this case, it is preferable to provide a linear guide mechanism that allows the bottomed cylindrical body 51 to move only in the vertical direction.

[0031] Furthermore, in this embodiment, the communication hole 513 is formed only in the peripheral wall of the cylindrical body 511 of the bottomed cylindrical body 51, but it is not limited to this, and may be formed only in the peripheral wall of the cylindrical portion 21 of the valve seat portion 2. In this case, the cylindrical portion 21 extends to the inlet end of the fluid outflow passage 13, and the communication hole 513 connects the inside of the cylindrical portion 21 to the inlet end of the fluid outflow passage 13. Alternatively, the communication hole 513 may be formed in both the peripheral wall of the cylindrical body 511 and the peripheral wall of the cylindrical portion 21. In this case, the communication hole 513 connects the inside of the cylindrical portion 21 and the inside of the cylindrical body 511 to the inlet end of the fluid outflow passage 13.

[0032] Furthermore, in this embodiment, the valve seat portion 2 and the bottomed cylindrical body 51 are formed separately, but this is not limited to this configuration, and for example, they may be formed integrally. In this case, the valve seat portion 2 and the bottomed cylindrical body 51 are formed by a 3D printer.

[0033] Furthermore, in this embodiment, the valve seat portion 2 and the bottomed cylindrical body 51 are arranged to overlap vertically, but this is not the only way to do so, and they may be connected by screwing or press-fitting.

[0034] Furthermore, although the valve device 100 in this embodiment is configured as a normally closed type, it is not limited to this, and may be configured as, for example, a normally open type (i.e., always open) solenoid valve.

[0035] (modified version) Next, a modified version of the position adjustment mechanism 5 will be described with reference to Figure 2. In this modified version, points that are consistent with the above-described embodiment will be omitted, and only the points that differ from the above-described embodiment will be described.

[0036] Figure 2 is a cross-sectional view showing the main part of the valve device 100 in the closed state according to a modified example.

[0037] In the embodiment described above, the position adjustment mechanism 5 is configured to have a bottomed cylindrical body 51, a male threaded portion 52, and a plate 53, but it is not limited to this configuration. For example, as shown in Figure 2, it may be configured to have a retaining ring 54, a positioning ring 55, a female threaded ring 56, a diaphragm 57 as a sealing material, a diaphragm retainer 58, and a male threaded portion 52.

[0038] In this case, as shown in Figure 2, the valve seat portion 2 is provided such that the cylindrical portion 21 extends below the inlet end of the fluid outflow passage 13. A communication hole 513 is formed in the peripheral wall of the cylindrical portion 21, connecting the inside of the cylindrical portion 21 with the inlet end of the fluid outflow passage 13.

[0039] As shown in Figure 2, the retaining ring 54, the positioning ring 55, and the female thread ring 56 are housed in the large-diameter chamber 142d so as to be arranged sequentially from top to bottom.

[0040] The retaining ring 54, together with an annular (specifically, circular) projection provided on the upper wall of the large-diameter chamber 142d, clamps the outer edge of the diaphragm 57. In this modified example, the positioning ring 55 is positioned by screwing it into the female thread 143, but it is not limited to this, and for example, the retaining ring 54 may be positioned by press-fitting it into the large-diameter chamber 142d.

[0041] The inner circumferential surface of the female thread ring 56 has a female thread that engages with the male thread portion 52. In this modified example, the female thread ring 56 is provided in the large-diameter chamber 142d by being screwed into the female thread 143, but it is not limited to this, and for example, it may be provided in the large-diameter chamber 142d by being press-fitted into the large-diameter chamber 142d.

[0042] As shown in Figure 2, the diaphragm 57 is housed in the large-diameter chamber 142d such that its outer peripheral edge is held and fixed between the retaining ring 54 and a projection provided on the upper wall of the large-diameter chamber 142d, and its inner region, located inside the outer peripheral edge, is held between the lower end of the cylindrical portion 21 and the tip of the diaphragm retainer 58.

[0043] As shown in Figure 2, the diaphragm retainer 58 is housed in the large-diameter chamber 142d so as to be located below the diaphragm 57 and inside the retaining ring 54, and fixed to the upper part of the male threaded portion 52. In this modified example, the diaphragm retainer 58 is provided separately from the male threaded portion 52, but is not limited to this, and may be provided integrally with the male threaded portion 52, for example. In this case, the tip (i.e., the upper end) of the male threaded portion 52 functions as the diaphragm retainer.

[0044] As shown in Figure 2, the male threaded portion 52 is housed in the large-diameter chamber 142d so as to screw into the female thread of the female threaded ring 56. By rotating the male threaded portion 52 relative to the female threaded ring 56, the degree of deflection of the diaphragm 57 can be changed via the diaphragm retainer 58, thereby moving the valve seat portion 2, which is guided in the through hole 142, along the vertical direction. This allows the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32) to be adjusted. As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0045] Furthermore, even when the valve seat portion 2 moves along the vertical direction, the communication hole 513 and the inlet end of the fluid outflow passage 13 remain in communication. This prevents the communication between the communication hole 513 and the inlet end of the fluid outflow passage 13 from being interrupted due to the vertical movement of the valve seat portion 2.

[0046] As described above, the diaphragm 57 is housed in the large-diameter chamber 142d such that its outer peripheral edge is sandwiched and fixed between the retaining ring 54 and a projection provided on the upper wall of the large-diameter chamber 142d. This prevents the diaphragm 57 from rotating together with the male screw portion 52 and the diaphragm retainer 58 due to their rotation.

[0047] (Effects and Benefits) Next, the effects and benefits of the embodiments and modifications described above will be explained.

[0048] The valve device 100 according to the above embodiment comprises a fluid inlet passage 12, a fluid outlet passage 13, a flow path forming block 1 having a communication chamber 14 that communicates with the fluid inlet passage 12 and the fluid outlet passage 13, a valve seat portion 2 provided in the communication chamber 14 so as to be movable along the vertical direction, a valve body mechanism 3 having a valve body 31, a drive actuator 4 provided in the flow path forming block 1 for driving the valve body mechanism 3 so as to seat or disseat the valve body 31 with respect to the valve seat portion 2, and a position adjustment mechanism 5 provided in the communication chamber 14 for adjusting the position of the valve seat portion 2 relative to the valve body 31 by moving the valve seat portion 2 along the vertical direction.

[0049] This configuration allows for adjustment of the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32). As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0050] Furthermore, since the communication chamber 14 formed in the flow path forming block 1 (specifically, the block body 11) can be effectively utilized as space for housing the position adjustment mechanism 5, the position adjustment of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32) can be achieved without increasing the overall size of the valve device 100.

[0051] Furthermore, in the embodiment described above, the communication chamber 14 has a recess 141 formed on the upper end surface of the flow path forming block 1 so as to communicate with the fluid inflow passage 12, and a through hole 142 that communicates with the fluid outflow passage 13 and extends vertically so as to connect the recess 141 and the lower end surface of the flow path forming block 1. The valve seat portion 2 is provided in both the recess 141 and the through hole 142 so as to be guided vertically into the through hole 142, and the position adjustment mechanism 5 is provided in the through hole 142.

[0052] With this configuration, the valve seat portion 2, which is guided by the through hole 142 extending in the vertical direction, can be moved along the vertical direction by the position adjustment mechanism 5.

[0053] Furthermore, in the embodiment described above, the valve device 100 further includes a biasing member 6 housed in the through hole 142 so as to bias the valve seat portion 2 downward.

[0054] With this configuration, the biasing member 6 housed in the through hole 142 can bias the valve seat portion 2 downward, allowing the positioning of the valve seat portion 2, which has been moved along the vertical direction by the position adjustment mechanism 5, to be controlled.

[0055] Furthermore, in the embodiment described above, a female thread 143 is formed at the lower end of the through hole 142, and the position adjustment mechanism 5 has a bottomed cylindrical body 51 provided below the valve seat portion 2 such that its bottom is spaced apart from the valve seat portion 2 and in contact with the valve seat portion 2, and a male threaded portion 52 provided below the bottomed cylindrical body 51 so as to screw into the female thread 143.

[0056] With this configuration, by rotating the male thread portion 52 relative to the female thread 143, the bottomed cylindrical body 51 and the valve seat portion 2, which are guided by the through hole 142, can be moved along the vertical direction, thereby allowing adjustment of the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32). As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0057] Furthermore, in the above-described embodiment, a plate is provided between the bottomed cylindrical body and the male threaded portion.

[0058] This configuration makes it possible to suppress the rotation of the bottomed cylindrical body 51 due to the rotation of the male screw portion 52.

[0059] Furthermore, in the embodiment described above, at least one of the valve seat portion 2 and the bottomed cylindrical body 51 has a communication hole 513 that communicates with the fluid outflow passage 13, and even when the valve seat portion 2 and the bottomed cylindrical body 51 move along the vertical direction, the communication hole 513 and the fluid outflow passage 13 remain in communication.

[0060] This configuration makes it possible to avoid the communication between the communication hole 513 and the inlet end of the fluid outflow passage 13 being blocked by the vertical movement of the valve seat 2 and the bottomed cylindrical body 51.

[0061] In the modified example described above, a female threaded ring 56 is provided at the lower end of the through hole 142, and the position adjustment mechanism 5 has a diaphragm 57 provided below the valve seat portion 2 so as to contact the valve seat portion 2, a diaphragm retainer 58 provided below the diaphragm 57 so as to hold down the diaphragm 57, and a male threaded portion 52 provided so as to screw into the female threaded ring 56, with the diaphragm retainer 58 provided on the male threaded portion 52.

[0062] With this configuration, by rotating the male threaded portion 52 relative to the female threaded ring 56, the valve seat portion 2, which is guided into the through hole 142 via the diaphragm retainer 58 and the diaphragm 57, can be moved vertically, thereby adjusting the position of the valve seat portion 2 (specifically, the orifice valve seat 22) relative to the valve body 31 (specifically, the seat 32). As a result, the flow rate in the open state of the valve device 100 can be adjusted to a predetermined flow rate, and the amount of seat leak (closing characteristics) in the closed state of the valve device 100 can be adjusted to a predetermined amount.

[0063] In the modified example described above, the valve seat portion 2 is formed with a communication hole 513 that communicates with the fluid outflow passage 13, and even when the valve seat portion 2 moves along the vertical direction, the communication hole 513 and the fluid outflow passage 13 remain in communication.

[0064] This configuration makes it possible to avoid the communication between the communication hole 513 and the inlet end of the fluid outflow passage 13 being blocked by the vertical movement of the valve seat portion 2.

[0065] Although this embodiment and its modifications have been described above, the above-described embodiment and modifications only represent a part of the application of the present invention, and are not intended to limit the technical scope of the present invention to the specific configurations of the above-described embodiment and modifications. [Explanation of Symbols]

[0066] 1. Flow channel forming block 2. Valve seat 3. Valve mechanism 4 Drive actuators 5 Position adjustment mechanism 12 Fluid inflow channel 13 Fluid Outlet Channel 14 Communication room 31 Valve body 100 Valve device

Claims

1. A fluid inflow channel, a fluid outflow channel, and a flow path forming block having a communication chamber that communicates with the fluid inflow channel and the fluid outflow channel, A valve seat portion is provided in the communication chamber so as to be movable along the vertical direction, A valve mechanism having a valve body, A drive actuator provided in the flow path forming block drives the valve mechanism so that the valve body seats or separates from the valve seat portion, The system includes a position adjustment mechanism provided in the communication chamber to adjust the position of the valve seat relative to the valve body by moving the valve seat along the vertical direction. Valve device.

2. The aforementioned communication chamber is A recess formed on the upper end surface of the flow path forming block so as to communicate with the fluid inflow channel, It has a through hole that communicates with the fluid outflow channel and extends vertically to connect the recess and the lower end surface of the channel forming block, The valve seat portion is provided in both the recess and the through hole so as to be guided into the through hole along the vertical direction. The position adjustment mechanism is provided in the through hole, The valve device according to claim 1.

3. The system further comprises a biasing member housed in the through-hole so as to bias the valve seat portion downward, The valve device according to claim 2.

4. A female thread is attached to the lower end of the through hole. The position adjustment mechanism is, A bottomed cylindrical body is provided below the valve seat so that its bottom is spaced apart from the valve seat and in contact with the valve seat, It has a male threaded portion provided below the bottomed cylindrical body so as to screw into the female thread, The valve device according to claim 2.

5. A communication hole is formed in at least one of the valve seat portion and the bottomed cylindrical body, which communicates with the fluid outflow passage. Even when the valve seat and the bottomed cylindrical body move along the vertical direction, the communication hole and the fluid outflow passage remain in communication. The valve device according to claim 4.

6. A female threaded ring is provided at the lower end of the through hole. The position adjustment mechanism is, A diaphragm is provided below the valve seat so as to contact the valve seat, A diaphragm retainer is provided below the diaphragm to hold down the diaphragm, It has a male threaded portion that is provided to screw into the female threaded ring, The male screw portion is provided with a diaphragm retainer. The valve device according to claim 2.

7. The valve seat portion has a communication hole that communicates with the fluid outflow passage. Even when the valve seat moves along the vertical direction, the communication hole and the fluid outflow passage remain in communication. The valve device according to claim 6.

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