Dynamic freeform optics for lithography illumination beam shaping

Abstract

This system comprises a light source configured to emit light, and a pair of optical elements, either reflective or refractive, arranged in the path of the light. The pair of optical elements are spatially separated in a parallel plane and have a connecting non-planar surface. This connecting non-planar surface is configured to generate a first beam shape consisting of light emitted from the light source, directed onto the specimen. The pair of optical elements are configured to be movable within the aforementioned parallel plane so that a second beam shape, different in shape from the first beam shape and directed onto the specimen, is generated from the light emitted from the light source, with the connecting non-planar surface configured accordingly.

Description

Technical Field

[0001] Cross - Reference to Related Applications In this application, priority is claimed based on U.S. Provisional Patent Application No. 63 / 464632, filed on May 8, 2023, and its disclosure is incorporated herein by reference.

[0002] This disclosure relates to semiconductor manufacturing, and more particularly to illumination systems for lithography processes.

Background Art

[0003] As semiconductor manufacturing evolves, the demand for yield management, particularly for metrology and inspection systems, is intensifying. Critical dimensions continue to shrink, and the industry still requires shortening the time to achieve high - yield, high - value - added production. The total time from detecting a yield problem to correcting it determines the return on investment for semiconductor manufacturers.

[0004] When manufacturing semiconductor devices such as logic devices and memory devices, typically, multiple manufacturing processes are used to process semiconductor workpieces (e.g., wafers, substrates, display panels, etc.) to form various features and multiple layers of those semiconductor devices. For example, in a semiconductor manufacturing process such as lithography, a pattern is transferred from a reticle to a photoresist arranged on a semiconductor workpiece. Additional examples of semiconductor manufacturing processes include, but are not limited to, chemical mechanical polishing (CMP), etching, deposition, and ion implantation. Multiple semiconductor devices can be arrayed on a single semiconductor workpiece and then separated into individual semiconductor devices.

[0005] In the lithography process, a lighting system directs light (e.g., deep ultraviolet (DUV) light, extreme ultraviolet (EUV) light, etc.) onto a semiconductor workpiece, exposing the photoresist to that light. In some cases, it may be desirable to expose the photoresist to only a portion of that light. For example, by changing the pupil shape of the light beam, it is possible to change which portion of the light is directed onto the semiconductor workpiece. Customized beam shapes can be generated by placing and using hard apertures within the pupil plane, but these can result in light loss due to intentional vignetting, and changing the beam shape requires changing individual dedicated hard apertures within the lighting system. Alternatively, a multi-faceted array can be used to increase the number of beam shapes, but the accuracy of the shapes that can be created is limited by the number of mirrors in the array due to cost and complexity. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] U.S. Patent Application Publication No. 2002 / 0036763 [Patent Document 2] U.S. Patent Application Publication No. 2002 / 0085276 [Overview of the project] [Problems that the invention aims to solve]

[0007] Therefore, there is a need for lighting systems that can dynamically generate a variety of beam shapes. [Means for solving the problem]

[0008] In one embodiment of the present disclosure, a system is provided comprising a light source, an imaging mirror, and a pair of reflective optical elements. The light source is configured to emit light, which may be deep ultraviolet (DUV) or extreme ultraviolet (EUV) light. The imaging mirror is positioned in the optical path of the light emitted from the light source, and is configured to reflect the light emitted from the light source onto a specimen. The pair of reflective optical elements are positioned in the optical path between the light source and the imaging mirror, and the pair of reflective optical elements are spatially separated in a parallel plane and have a coordinating non-planar surface. The light emitted from the light source is reflected between these coordinating non-planar surfaces to generate a first beam shape of light that is reflected onto the specimen by the imaging mirror. At least one of the pair of reflective optical elements is movable to a position within one of the parallel planes where a second beam shape, different from the first beam shape, is generated by the light emitted from the light source and reflected between the coordinating non-planar surfaces.

[0009] In certain embodiments, the system may further include a collimator positioned in the optical path between the light source and the aforementioned pair of reflective optical elements. The collimator may be configured to direct the light emitted by the light source and reflect it between the interlocking non-planar surfaces of the pair of reflective optical elements.

[0010] In certain embodiments, the system may further include a pupil positioned in the optical path between the aforementioned pair of reflective optical elements and an imaging mirror. Light of the first or second beam shape can be directed through the pupil towards the imaging mirror.

[0011] In certain embodiments, a right-angle prism can be formed by the coordinated non-planar surfaces of the aforementioned pair of reflective optical elements.

[0012] In certain embodiments, the system may further include a first actuator. The first actuator can be configured to move the first reflective optical element of the aforementioned pair of reflective optical elements along a first direction in the first plane of the pair of parallel planes to a position where a second beam shape is created by light emitted by a light source and reflected between the interconnected non-planar surfaces.

[0013] In certain embodiments, the system may further include a second actuator. The second actuator can be configured to move the second reflective optical element of the pair of reflective optical elements described above along a second direction within the second plane of the parallel surfaces described above, to a position where a second beam shape is created by light emitted by a light source and reflected between the interconnected non-planar surfaces. The second direction may be the opposite direction to the first direction.

[0014] In certain embodiments, the first beam shape and the second beam shape can be different shapes selected from a group including circular, annular, dipole, quasar, slit, and pinhole shapes.

[0015] Another embodiment of the present disclosure provides a system comprising a light source, an imaging mirror, and a pair of refractive optical elements. The light source is configured to emit light, which may be deep ultraviolet (DUV) or extreme ultraviolet (EUV) light. The imaging mirror is positioned in the optical path of the light emitted from the light source, and is configured to reflect the light emitted from the light source onto a specimen. The pair of refractive optical elements are positioned in the optical path between the light source and the imaging mirror, and the pair of refractive optical elements are spatially separated in a parallel plane and have a coordinating non-planar surface. The light emitted from the light source is refracted through these coordinating non-planar surfaces to generate a first beam shape of light that is reflected onto the specimen by the imaging mirror. At least one of the pair of refractive optical elements should be made movable to a position within one of their parallel planes where a second beam shape, different from the first beam shape, is created by light emitted by a light source and refracted through a connecting non-planar surface.

[0016] In certain embodiments, the system may further include a collimator positioned in the optical path between the light source and the aforementioned pair of refractive optical elements. The collimator can be configured to direct the light emitted from the light source and refract it through the interlocking non-planar surface of the pair of refractive optical elements.

[0017] In certain embodiments, the system may further include a pupil positioned in the optical path between the aforementioned pair of refractive optical elements and the imaging mirror. Light in a first beam shape or a second beam shape may be directed through the pupil towards the imaging mirror.

[0018] In certain embodiments, a right-angle prism can be formed by the coordinated non-planar surfaces of the aforementioned pair of refractive optical elements.

[0019] In certain embodiments, the system may further include a first actuator. The first actuator can be configured to move the first refractive optical element of the aforementioned pair of refractive optical elements along a first direction in the first plane of the pair of parallel planes to a position where a second beam shape is created by light emitted by a light source and refracted through the interconnected non-planar surface.

[0020] In certain embodiments, the system may further include a second actuator. The second actuator can be configured to move the second refractive optical element of the pair of refractive optical elements described above along a second direction within the second plane of the aforementioned parallel planes to a position where a second beam shape is created by light emitted by the light source and refracted through the interconnected non-planar surface. The second direction may be the opposite direction to the first direction.

[0021] In certain embodiments, the first beam shape and the second beam shape can be different shapes selected from a group including circular, annular, dipole, quasar, slit, and pinhole shapes.

[0022] Another embodiment of the Disclosure provides a method. This method may include emitting light from a light source, which may be deep ultraviolet (DUV) or extreme ultraviolet (EUV) light. The method may further include propagating the light through a pair of optical elements, which may be spatially separated in parallel planes and which have a linked non-planar surface configured to produce a first beam shape consisting of the light emitted from the light source. The method may further include directing the first beam shape onto a specimen. The method may further include moving the pair of optical elements within the parallel planes to a position where the linked non-planar surface is configured such that the light emitted from the light source produces a second beam shape different in shape from the first beam shape. The method may further include directing the second beam shape onto a specimen.

[0023] In certain embodiments, the method may further include collimating, with a collimator, the light emitted by the light source so as to direct the light emitted by the light source toward and propagate it through the pair of optical elements prior to propagating the light through the pair of optical elements.

[0024] In certain embodiments, the pair of optical elements may include a pair of reflective optical elements, and generating light of a first beam shape by reflecting the light emitted by the light source between cooperating non-planar surfaces may be included in propagating the light through the pair of optical elements.

[0025] In certain embodiments, the pair of optical elements may include a pair of refractive optical elements, and generating light of a first beam shape by refracting the light emitted by the light source through cooperating non-planar surfaces may be included in propagating the light through the pair of optical elements.

[0026] In certain embodiments, moving, with a first actuator, a first optical element of the pair of optical elements along a first direction within a first plane of the parallel planes to a position where a second beam shape is produced may be included in moving the pair of optical elements within the parallel planes to a position where the cooperating non-planar surfaces are configured to produce the second beam shape.

[0027] In certain embodiments, moving, with a second actuator, a second optical element of the pair of optical elements along a second direction within a second plane of the parallel planes to a position where a second beam shape is produced may be further included in moving the pair of optical elements within the parallel planes to a position where the cooperating non-planar surfaces are configured to produce the second beam shape. The second direction may be opposite to the first direction.

[0028] For a more complete understanding of the nature and purpose of this disclosure, please refer to the attached drawings and the detailed description below. [Brief explanation of the drawing]

[0029] [Figure 1] This is a diagram of the system according to one embodiment of the disclosure. [Figure 2] This is a diagram of a system according to another embodiment of the disclosure. [Figure 3A] This is a diagram showing an example of a pair of reflective optical elements disclosed in this document. [Figure 3B] This is a diagram showing an example of a pair of refractive optical elements disclosed in this application. [Figure 4A] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 4B] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 4C] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 4D] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 4E] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 4F] This figure shows an example of the beam shape produced by the system disclosed in this document. [Figure 5] This is a flowchart of the method according to one embodiment of the disclosure. [Figure 6] This is a flowchart of a method according to another embodiment of the disclosure. [Figure 7] This is a flowchart of a method according to another embodiment of the disclosure. [Figure 8] This is a flowchart of a method according to another embodiment of the disclosure. [Figure 9] This is a flowchart of a method according to another embodiment of the disclosure. [Modes for carrying out the invention]

[0030] While the subject matter described in the claims is illustrated by specific embodiments, other embodiments also exist within the technical scope of this disclosure, including embodiments that do not provide all of the benefits and features described herein. Various structural, logical, process-step, and electronic modifications can be made without deviating from the technical scope of this disclosure. Thus, the technical scope of this disclosure is defined solely by reference to the claims set forth in a separate section.

[0031] In some embodiments of the present disclosure, a system 100 is provided. This system 100 may be part of a lighting system used to generate light for lithography processes in semiconductor manufacturing and reticle and wafer inspection.

[0032] The system 100 may include a light source 110. The light source 110 may be configured to emit light 111. Depending on the application of the system 100, the light 111 emitted by the light source 110 may be deep ultraviolet (DUV) light, extreme ultraviolet (EUV) light, or other types of light. In certain embodiments, the light source 110 may be a plasma DUV light source or a plasma EUV light source.

[0033] The system 100 may further include an imaging mirror 120. The imaging mirror 120 should be placed in the path of the light 111 emitted by the light source 110. The imaging mirror 120 should be configured to reflect the light 111 emitted by the light source 110 onto the specimen 101. The specimen 101 can be a semiconductor substrate, wafer, workpiece, etc. The imaging mirror 120 can be a plane mirror, a concave mirror, a convex mirror, or of other shapes. In certain embodiments, the system 100 may have a combination of optical elements (reflective and / or refractive) in addition to the imaging mirror 120, which are configured to reflect the light 111 emitted by the light source 110 onto the specimen 101. The specimen 101 may be placed on a stage 105. The stage 105 can be moved in one or more directions (e.g., in-plane directions (e.g., x and y directions) and / or out-of-plane directions (e.g., z direction)) by one or more actuators, allowing the position of the specimen 101 to be adjusted, and consequently, the direction in which the light 111 emitted by the light source 110 is reflected onto the specimen 101 can be changed.

[0034] The system 100 may further include a pair of optical elements arranged between the light source 110 and the imaging mirror 120 along the path of light 111 emitted by the light source 110. These optical elements may be spatially separated in a manner that forms parallel planes and have a coordinating non-planar surface configured to produce a first beam shape consisting of light 111 emitted by the light source 110. At least one of these optical elements may be made movable within one plane of the parallel planes to a position where the coordinating non-planar surface is configured to produce a second beam shape consisting of light 111 emitted by the light source 110 and different from the first beam shape. For example, Figures 4A to 4F depict various beam shapes of light 112 reflected onto the sample 101. In these figures, the first and second beam shapes are independently selected from circular (see Figure 4A), annular (see Figure 4B), dipole (see Figure 4C), quasar (see Figure 4D), slit (see Figure 4E), pinhole (see Figure 4F), or other shapes, but this application is not limited to these. In Figures 4A to 4F, the darkened portions of the shapes can be associated with the light 112 reflected onto the sample 101 (i.e., the unshaded portions of the shapes can be associated with the light-free areas). Alternatively, in some or all of Figures 4A to 4F, the darkened portions of the shapes can be associated with the light-free areas, while the unshaded portions of the shapes within the circles can be associated with the light 112 reflected onto the sample 101.

[0035] In certain embodiments, the aforementioned pair of optical elements may include a pair of reflective optical elements 130, as shown in Figure 1. This pair of reflective optical elements 130 may consist of a first reflective optical element 131a and a second reflective optical element 131b. The first reflective optical element 131a may be placed in a first plane 132a, and the second reflective optical element 131b may be placed in a second plane 132b, and the first reflective optical element 131a and the second reflective optical element 131b may be spatially separated so that the first plane 132a and the second plane 132b form parallel planes. For example, the first reflective optical element 131a and the second reflective optical element 131b may be spatially separated by a distance of several millimeters to several tens of millimeters. The pair of reflective optical elements 130 may have a connected non-planar surface. For example, the first reflective optical element 131a may have a first non-flat reflective surface 133a, and the second reflective optical element 131b may have a second non-flat reflective surface 133b. As shown in Figure 3A, a right-angle prism can be formed by the cooperation of the first non-flat reflective surface 133a and the second non-flat reflective surface 133b. Depending on the embodiment, if the first non-flat reflective surface 133a and the second non-flat reflective surface 133b are integrally joined, the pair of reflective optical elements 130 may form non-right-angle, irregular, or other shapes, so the invention is not limited to the right-angle prism shown in Figure 3A. By reflecting the light 111 emitted by the light source 110 between these cooperating non-flat surfaces, a first beam-shaped light 112 can be generated, which will be reflected onto the sample 101 by the imaging mirror 120. In certain embodiments, the first reflective optical element 131a and the second reflective optical element 131b may be made of glass or other reflective material. In certain embodiments, the first non-planar reflective surface 133a and the second non-planar reflective surface 133b may have a reflective coating.At least one of the first reflective optical element 131a and the second reflective optical element 131b can be made movable to a position in the corresponding plane of the first plane 132a and the second plane 132b, that is, to a position where light 111 emitted by the light source 110 and reflected between the interconnected non-planar surfaces generates light 112 with a second beam shape different from the first beam shape, which is then reflected onto the sample 101 by the imaging mirror 120. Based on the profiles of the first non-planar reflective surface 133a and the second non-planar reflective surface 133b, light 111 is reflected between the pair of reflective optical elements 130 to generate light 112 with the first beam shape. By moving at least one of the pair of reflective optical elements 130, the path of light 111 reflected between the pair of reflective optical elements 130 can be changed, thereby generating light 112 with the second beam shape.

[0036] In certain embodiments, the aforementioned pair of optical elements may include a pair of refractive optical elements 140, as shown in Figure 2. This pair of refractive optical elements 140 may consist of a first refractive optical element 141a and a second refractive optical element 141b. The first refractive optical element 141a may be placed in a first plane 142a, and the second refractive optical element 141b may be placed in a second plane 142b, and the first refractive optical element 141a and the second refractive optical element 141b may be spatially separated so that the first plane 142a and the second plane 142b form parallel planes. For example, the first refractive optical element 141a and the second refractive optical element 141b may be spatially separated by a distance of several millimeters to several tens of millimeters. The pair of refractive optical elements 140 may have a connected non-planar surface. For example, the first refractive optical element 141a may have a first non-flat refractive surface 143a, and the second refractive optical element 141b may have a second non-flat refractive surface 143b. As shown in Figure 3B, a right-angle prism can be formed by the cooperation of the first non-flat refractive surface 143a and the second non-flat refractive surface 143b. Depending on the embodiment, if the first non-flat refractive surface 143a and the second non-flat refractive surface 143b are integrally joined, the pair of refractive optical elements 140 may form non-right-angle, irregular, or other shapes, so the invention is not limited to the right-angle prism shown in Figure 3B. By refracting the light 111 emitted from the light source 110 through these coordinating non-flat surfaces, a first beam-shaped light 112 can be generated, which will be reflected onto the sample 101 by the imaging mirror 120. In certain embodiments, the first refractive optical element 141a and the second refractive optical element 141b may be made of optical glass, such as BK7 or fused silica. In certain embodiments, the thickness of the first refractive optical element 141a and the second refractive optical element 141b may range from several millimeters to several hundred millimeters, depending on the diameter / width of the elements.At least one of the first refractive optical element 141a and the second refractive optical element 141b can be made movable to a position in the corresponding planes of the first plane 142a and the second plane 142b, that is, to a position where light 111 emitted by the light source 110 and refracted through the interconnected non-planar surface generates light 112 with a second beam shape different from the first beam shape, which is then reflected onto the sample 101 by the imaging mirror 120. Based on the profiles of the first non-planar refractive surface 143a and the second non-planar refractive surface 143b, light 111 is reflected between the pair of refractive optical elements 140 to produce light 112 with the first beam shape. By moving at least one of the pair of refractive optical elements 140, the path of light 111 reflected between the pair of refractive optical elements 140 can be changed, thereby generating light 112 with the second beam shape.

[0037] By coordinating the two surfaces of a pair of reflective optical elements 130 and a pair of refractive optical elements 140, a beam shape equivalent to that of a single surface with a different profile can be created. By shifting these two coordinating surfaces relative to each other, several different beam shapes can be generated. For example, five or more different beam shapes can be generated with just two surfaces by shifting them relative to each other along the x and y directions. In contrast, conventional systems cannot generate the same five beam shapes without relying on five or more sets of different optical systems.

[0038] The system 100 may further include a processor 150. The processor 150 may include a microprocessor, microcontroller, or other device. By connecting the processor 150 to the components of the system 100 in some preferred manner (e.g., via one or more transmission media, including wired and / or wireless transmission media), it becomes possible to receive outputs from the processor 150. The processor 150 can be configured to perform numerous functions using its outputs. A test tool can receive instructions and other information from the processor 150. Optionally, the processor 150 may communicate electronically with another test tool, weighing tool, repair tool, or review tool (not visualized) to receive additional information or send instructions.

[0039] The processor 150 can be part of a variety of systems, including personal computer systems, image computers, mainframe computer systems, workstations, network equipment, internet equipment, and other devices. Furthermore, its subsystem(s) or system(s) may have any suitable processor known in the present art, such as a parallel processor. In addition, its subsystem(s) or system(s) may have a platform with high-speed processing and software, whether standalone or networked.

[0040] The processor 150 can be part of the system 100, such as by being installed inside the system 100 or another device. For example, the processor 150 can be part of a standalone control unit or installed in a centralized quality control unit. Multiple processors 150 may be used to form multiple subsystems of the system 100.

[0041] The processor 150 can be implemented in practice by any combination of hardware, software, and firmware. Furthermore, its functions, as described herein, may be performed by a single unit or shared among separate components, and conversely, each of these components may be implemented by any combination of hardware, software, and firmware. Program code or instructions for causing the processor 150 to perform various methods and functions may be stored in a readable storage medium, such as memory.

[0042] If the system 100 has multiple subsystems, the separate processors 150 can be coupled to each other to enable the transmission of images, data, information, instructions, etc., between these subsystems. For example, one subsystem can be coupled to an additional subsystem(s) by some suitable transmission medium, such as some suitable wired and / or wireless transmission medium known in the present art. Alternatively, two or more such subsystems may be substantially coupled by a shared computer-readable storage medium (not shown).

[0043] The processor 150 can be configured to perform a number of functions using the outputs of the system 100 or other outputs. For example, the processor 150 can be configured to send outputs to an electronic data storage unit or other storage media. The processor 150 can be further configured as described in this application.

[0044] The processor 150 may also be configured according to any of the embodiments described herein. Furthermore, the processor 150 may be configured to perform other functions or additional steps using the output of the system 100 or using images or data from other sources.

[0045] The processor 150 can be communicated to any of the various components or subsystems of the system 100 in any manner known in the art. Furthermore, the processor 150 can be configured to receive and / or acquire data or information from other systems (e.g., inspection systems that provide inspection results, such as review tools, or remote databases containing design data) by a transmission medium, including wired and / or wireless sections. In this manner, the transmission medium would act as a data link between the processor 150 and other subsystems of the system 100 or systems outside of the system 100. Various steps, functions, and / or operations of the system 100 and methods described herein are performed by one or more of the following: electronic circuits, logic gates, multiplexers, programmable logic devices, ASICs, analog or digital controllers / switches, microcontrollers, or information processing systems. Program instructions for performing these methods, for example, described herein, can be transmitted on or stored on a carrier medium. The carrier medium may include storage media such as read-only memory, random-access memory, magnetic or optical disks, non-volatile memory, solid-state memory, and magnetic tape. The carrier medium may also include transmission media such as wires, cables, or wireless transmission links. For example, the various steps described throughout this disclosure may be performed by a single processor 150 (or computer subsystem) or by multiple processors 150 (or computer subsystems). Furthermore, one or more information processing or logic systems may be incorporated into the various subsystems of the system 100. Therefore, the above statements should be understood as illustrative examples only, and not as limitations on this disclosure.

[0046] The processor 150 may communicate electronically with the light source 110. For example, the processor 150 can be configured to send instructions to the light source 110, causing it to emit light 111 that will propagate through a pair of optical elements.

[0047] The processor 150 may communicate electronically with the stage 105. For example, the processor 150 can be configured to send commands to the motor or actuator of the stage 105 to translate or rotate the stage, thereby causing the sample 101 to be scanned across with the light 112 reflected onto the sample 101, or to change which part of the sample 101 is illuminated by the light 112.

[0048] The processor 150 may communicate electronically with one or more actuators configured to control the position of the aforementioned pair of optical elements. For example, the system 100 may further include a first actuator 151a configured to move the first optical element in a first plane among the aforementioned parallel planes, and a second actuator 151b configured to move the second optical element in a second plane among those parallel planes. As an example, as shown in Figure 1, the first actuator 151a may be configured to move the first reflective optical element 131a in the first plane 132a, and the second actuator 151b may be configured to move the second reflective optical element 131b in the second plane 132b. As shown in Figure 3A, the first actuator 151a and the second actuator 151b may be configured to move the pair of reflective optical elements 130 along the X or Y direction of each plane. Alternatively, as shown in Figure 2, the first actuator 151a may be configured to move the first refractive optical element 141a in the first plane 142a, and the second actuator 151b may be configured to move the second refractive optical element 141b in the second plane 142b. As shown in Figure 3B, the first actuator 151a and the second actuator 151b may be configured to move a pair of refractive optical elements 140 along the X or Y direction of each plane.

[0049] For example, the processor 150 can be configured to send instructions to move only one of the pair of optical elements relative to the other, thereby generating a second beam-shaped light 112 that is reflected onto the sample 101. For example, the first actuator 151a may be configured to move the corresponding element from the first reflective optical element 131a and the first refractive optical element 141a while keeping the second reflective optical element 131b or the second refractive optical element 141b stationary. Alternatively, the second actuator 151b may be configured to move the corresponding element from the second reflective optical element 131b and the second refractive optical element 141b while keeping the first reflective optical element 131a or the first refractive optical element 141a stationary. In this way, depending on the linear position of the pair of optical elements, it is possible to define which of the first beam shape, the second beam shape, and other beam shapes will be produced, as controlled by the first actuator 151a or the second actuator 151b.

[0050] Alternatively, the processor 150 can be configured to send instructions to move both of the aforementioned pair of optical elements to generate a second beam of light 112 that is reflected onto the sample 101. For example, the first actuator 151a may be configured to move the corresponding first reflective optical element 131a and the first refractive optical element 141a, and the second actuator 151b may be configured to move the corresponding second reflective optical element 131b and the second refractive optical element 141b. Each optical element may be moved in different directions and / or along different axes. For example, both the first actuator 151a and the second actuator 151b may be configured to move the corresponding optical element along the X-axis in the plane corresponding to itself. In this configuration, the pair of optical elements can be moved in opposite directions according to the control of the first actuator 151a and the second actuator 151b, reaching a position where it is determined which of the first beam shape, second beam shape, or other beam shape will be produced, and relative motion and motion time can be reduced compared to the case where only one actuator is used. Alternatively, the first actuator 151a may be configured to move the first optical element along the X-axis in the first plane, and the second actuator 151b may be configured to move the second optical element along the Y-axis in the second plane. In this configuration, the two-dimensional position of the pair of optical elements can be used to determine which of the first beam shape, second beam shape, or other beam shape will be produced, according to the control of the first actuator 151a and the second actuator 151b.

[0051] In certain embodiments, the system 100 may be equipped with additional actuators configured to move each of the aforementioned pair of optical elements along an additional direction. For example, each of the first reflective optical element 131a and the second reflective optical element 131b, or each of the first refractive optical element 141a and the second refractive optical element 141b, may be moved along both the X and Y directions in their corresponding planes by one or more actuators for further position control.

[0052] In certain embodiments, the system 100 may further include a collimator 115. The collimator 115 may be placed in the path of light 111 emitted by the light source 110 between the light source 110 and the aforementioned pair of optical elements. The collimator 115 may be configured to direct the light 111 and propagate it through the pair of optical elements. For example, the collimator 115 may be configured to direct the light 111 and reflect it between the pair of reflective optical elements 130. Alternatively, the collimator 115 may be configured to direct the light 111 and refract it through the pair of refractive optical elements 140. By using the collimator 115, only a small amount of light 111 can be lost when it propagates through the pair of optical elements, and its use can form light 112 with a first beam shape and a second beam shape that will be reflected onto the sample 101.

[0053] In certain embodiments, the system 100 may further include a pupil 125. The pupil 125 can be positioned in the path of the light 112 reflected onto the specimen 101 between the aforementioned pair of optical elements and the imaging mirror 120. The light 112 in the first or second beam shape can be directed through the pupil 125 to the imaging mirror 120 and reflected onto the specimen.

[0054] In certain embodiments, the collimator 115 and imaging mirror 120 can be replaced by some type of optical element consisting of a single reflective element, a single refractive element, or a plurality of elements having reflective and / or refractive surfaces. In certain embodiments, a pair of reflective optical elements 130 or a pair of refractive optical elements 140 can be arranged between other elements of the system 100 instead of being arranged between the collimator and imaging mirror 120.

[0055] According to this system 100, various beam shapes can be generated by propagating light 111 through a pair of optical elements, and by moving one of these optical elements relative to the other, the beam shape of the light 112 reflected onto the sample 101 can be dynamically changed, thus improving efficiency and accuracy compared to conventional beam shaping methods.

[0056] Another embodiment of the present disclosure provides Method 200. As shown in Figure 5, Method 200 may have the following steps.

[0057] In step 210, light is emitted from the light source. The light emitted from the light source should be deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light.

[0058] In step 220, the light is propagated through a pair of optical elements. These optical elements are spatially separated in a manner that forms parallel planes and have a connecting non-planar surface, and the connecting non-planar surface is configured such that a first beam shape consisting of light emitted from the light source is created.

[0059] In step 230, a first beam of light is directed onto the specimen. The specimen can be a semiconductor substrate, wafer, workpiece, etc. The light can be directed by one or more optical components, such as imaging mirrors. These optical components should be reflective and / or refractive, capable of directing light onto the specimen. The light should be configured to cure a photoresist placed on the specimen according to the first beam shape.

[0060] In step 240, the pair of optical elements are moved in a parallel plane to a position where a linked non-planar surface is formed such that a second beam shape consisting of light emitted from the light source is created. The second beam shape can be different from the first beam shape.

[0061] In step 250, the light in the second beam shape is directed onto the specimen. The light in the second beam shape can be directed onto the specimen in step 250 using one or more optical elements in the same arrangement as those used to direct the light in the first beam shape onto the specimen in step 230.

[0062] In certain embodiments, the method 200 may further include a step 215, as shown in Figure 6. In step 215, light emitted from a light source is collimated by a collimator and directed to propagate through the aforementioned pair of optical elements. Step 215 may be performed between steps 210 and 220, as shown in Figure 6. By collimating the light, only a small amount of light can be lost as it propagates through the pair of optical elements, and this method can be used to form a first beam shape and a second beam shape of light that will be directed onto the specimen.

[0063] In certain embodiments, the pair of optical elements described above may include a pair of reflective optical elements. Accordingly, steps 220 and 240 of the method 200 can be replaced with steps 220a and 240a, as shown in Figure 7. In step 220a, light emitted from a light source is reflected between the interlocking non-planar surfaces of the pair of reflective optical elements to produce light in a first beam shape. In step 240a, the pair of reflective optical elements are moved in parallel planes to a position where the interlocking non-planar surfaces are configured to produce a second beam shape, which is different from the first beam shape and consists of light emitted from the light source. Based on the profiles of these interlocking non-planar surfaces, light is reflected between the pair of reflective optical elements to produce light in a first beam shape. By moving at least one of the pair of reflective optical elements, the path of the light reflected between the pair of reflective optical elements can be changed, thereby generating light in a second beam shape.

[0064] In certain embodiments, the pair of optical elements described above may include a pair of refractive optical elements. Accordingly, steps 220 and 240 of the method 200 can be replaced with steps 220b and 240b, as shown in Figure 8. In step 220b, light emitted from a light source is refracted through the interlocking non-planar surface of the pair of refractive optical elements to produce light in a first beam shape. In step 240b, the pair of refractive optical elements are moved in parallel planes to a position where the interlocking non-planar surface is configured to produce a second beam shape different from the first beam shape. Based on the profile of the interlocking non-planar surface, light is refracted through the pair of refractive optical elements to produce light in a first beam shape. By moving at least one of the pair of refractive optical elements, the path of the light refracted through the pair of refractive optical elements can be changed, thereby generating light in a second beam shape.

[0065] In certain embodiments, step 240 may include at least one of the following steps, as shown in Figure 9.

[0066] In step 241, the first optical element of the pair of optical elements is moved by the first actuator to a position in the first plane of the parallel planes where the second beam shape is generated.

[0067] In step 242, the second optical element of the pair of optical elements is moved by the second actuator to a position in the second plane of the parallel planes where the second beam shape is generated.

[0068] For example, step 240 may include either step 241 or step 242. In other words, the second beam shape may be created by moving only one of the pair of optical elements relative to the other. In this way, the linear position of the pair of optical elements can be defined as being controlled by the first actuator or the second actuator, determining whether the first beam shape, the second beam shape, or any other beam shape is produced.

[0069] Alternatively, step 240 may include both steps 241 and 242. In other words, the second beam shape may be created by moving each of the pair of optical elements relative to the other. Each optical element may be moved in different directions and / or along different axes. For example, a first actuator may be configured to move the first optical element along the X-axis in the first plane, and a second actuator may be configured to move the second optical element along the X-axis in the second plane. This allows the pair of optical elements to be moved in opposite directions as controlled by the first and second actuators, to a position where it is determined whether the first beam shape, the second beam shape, or any other beam shape will be created, and reduces relative motion and motion time compared to using only one actuator. Alternatively, a first actuator may be configured to move the first optical element along the X-axis in the first plane, and a second actuator may be configured to move the second optical element along the Y-axis in the second plane. In this way, the two-dimensional position of the pair of optical elements, controlled by the first and second actuators, can define which of the first beam shape, second beam shape, and other beam shapes will be produced.

[0070] According to this method 200, various beam shapes can be generated by propagating light through a pair of optical elements, and by moving one of these optical elements relative to the other, the beam shape of the light reflected onto the sample can be dynamically changed, thus improving efficiency and accuracy compared to conventional beam shaping methods.

[0071] Although this disclosure has been described in relation to one or more specific embodiments, other embodiments of this disclosure can be constructed without deviating from the technical scope of this disclosure. That is, this disclosure is considered to be limited only by the attached claims and their reasonable interpretation.

Claims

1. It is a system, A light source configured to emit light, wherein the emitted light is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light, An imaging mirror is positioned in the optical path of the light emitted by the aforementioned light source, and is configured to reflect the light emitted by the aforementioned light source onto the specimen. A pair of reflective optical elements disposed between the light source and the imaging mirror in the optical path, the pair of reflective optical elements spatially separated in a parallel plane and having a coordinating non-planar surface, the pair of reflective optical elements that reflect light emitted from the light source between their coordinating non-planar surfaces so that a first beam shape of light is generated that is reflected onto the specimen by the imaging mirror, A system comprising, wherein at least one of the pair of reflective optical elements is movable to a position within one of the parallel planes in which a second beam shape different from the first beam shape is created by light emitted by the light source and reflected between the coordinating non-flat planes.

2. A system according to claim 1, further comprising a collimator disposed between the light source and the pair of reflective optical elements in the optical path, wherein the collimator is configured to direct the light emitted by the light source and reflect it between the interlocking non-planar surfaces of the pair of reflective optical elements.

3. A system according to claim 1, further comprising a pupil disposed between the pair of reflective optical elements and the imaging mirror in the optical path, wherein light of the first beam shape or the second beam shape is directed through the pupil to the imaging mirror.

4. A system according to claim 1, wherein a right-angle prism is formed by the interlocking non-planar surfaces of the pair of reflective optical elements.

5. A system according to claim 1, further comprising a first actuator configured to move the first reflective optical element of the pair of reflective optical elements along a first direction in the first plane of the pair of parallel planes to the position where the second beam shape is produced by light emitted by the light source and reflected between the linked non-flat surfaces.

6. A system according to claim 5, further comprising a second actuator configured to move the second reflective optical element of the pair of reflective optical elements along a second direction in a second plane among the parallel planes to the position where the second beam shape is produced by light emitted by the light source and reflected between the linked non-flat surfaces, wherein the second direction is opposite to the first direction.

7. A system according to claim 1, wherein the first beam shape and the second beam shape are different shapes, and are selected from the group including circular shape, annular shape, dipole shape, quasar shape, slit shape and pinhole shape.

8. It is a system, A light source configured to emit light, wherein the emitted light is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light, An imaging mirror is positioned in the optical path of the light emitted by the aforementioned light source, and is configured to reflect the light emitted by the aforementioned light source onto the specimen. A pair of refractive optical elements disposed between the light source and the imaging mirror in the optical path, the pair of refractive optical elements spatially separated in a parallel plane and having a coordinating non-planar surface, the pair of refractive optical elements that refract the light emitted by the light source through the coordinating non-planar surface so that a first beam shape of light is generated reflected onto the specimen by the imaging mirror, A system comprising, wherein at least one of the pair of refractive optical elements is movable to a position within one of the parallel planes in which a second beam shape different from the first beam shape is created by light emitted by the light source and refracted through the coordinating non-flat plane.

9. A system according to claim 8, further comprising a collimator disposed between the light source and the pair of refractive optical elements in the optical path, wherein the collimator is configured to direct the light emitted by the light source and refract it through the interlocking non-planar surfaces of the pair of refractive optical elements.

10. A system according to claim 8, further comprising a pupil disposed between the pair of refractive optical elements and the imaging mirror in the optical path, wherein light of the first beam shape or the second beam shape is directed through the pupil to the imaging mirror.

11. A system according to claim 8, wherein a right-angle prism is formed by the interlocking non-planar surfaces of the pair of refractive optical elements.

12. A system according to claim 8, further comprising a first actuator configured to move the first refractive optical element of the pair of refractive optical elements along a first direction in the first plane of the pair of parallel planes to the position where the second beam shape is produced by light emitted by the light source and refracted through the linked non-flat surfaces.

13. A system according to claim 12, further comprising a second actuator configured to move the second refractive optical element of the pair of refractive optical elements along a second direction in a second plane among the parallel planes to the position where the second beam shape is produced by light emitted by the light source and refracted through the linked non-flat surfaces, wherein the second direction is opposite to the first direction.

14. A system according to claim 8, wherein the first beam shape and the second beam shape are different shapes, and are selected from the group including circular shape, annular shape, dipole shape, quasar shape, slit shape and pinhole shape.

15. It is a method, A light source emits light, provided that the light emitted by that light source is deep ultraviolet (DUV) light or extreme ultraviolet (EUV) light. The light is propagated through a pair of optical elements, wherein the pair of optical elements are spatially separated in a manner that forms parallel planes, and the pair has a coordinating non-planar surface configured to produce a first beam shape consisting of light emitted by the light source. Direct the light of the first beam shape onto the specimen, The pair of optical elements are moved within the parallel plane to a position where the linked non-planar surface is configured such that a second beam shape, which is different in shape from the first beam shape and consists of light emitted from the light source, is created, and The light of the second beam shape is directed onto the specimen. method.

16. The method according to claim 15, wherein prior to propagating light through the pair of optical elements, A method of collimating light emitted from the aforementioned light source using a collimator so that the light is directed and propagated through the pair of optical elements.

17. The method according to claim 15, wherein the pair of optical elements includes a pair of reflective optical elements, and when light is propagated through the pair of optical elements, A method for generating the first beam shape of light by reflecting light emitted from the light source between the connected non-flat surfaces.

18. The method according to claim 15, wherein the pair of optical elements includes a pair of refractive optical elements, and when light is propagated through the pair of optical elements, A method for generating light in the first beam shape by refracting light emitted from the light source through the connecting non-flat surfaces.

19. The method according to claim 15, wherein when moving the pair of optical elements in the parallel plane to the position where the coordinating non-planar surface is configured such that the second beam shape is produced, A method of moving the first optical element of the pair of optical elements to the position in which the second beam shape is generated, along a first direction within the first plane of the parallel surfaces, using the first actuator.

20. The method according to claim 19, wherein when moving the pair of optical elements in the parallel plane to the position where the coordinating non-planar surface is configured such that the second beam shape is produced, A method of moving the second optical element of the pair of optical elements with a second actuator along a second direction within the second plane of the parallel planes to the position where the second beam shape is generated, wherein the second direction is opposite to the first direction.

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