Active, sensor-integrated layer
The actuator-sensor device with a central sensory and edge actuator design addresses the challenge of precise tactile stimulus detection and haptic feedback integration, enhancing human-machine interaction through a flexible, efficient manufacturing process.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- TECHNISCHE UNIVERSITAT DRESDEN
- Filing Date
- 2025-12-15
- Publication Date
- 2026-06-25
AI Technical Summary
Existing sensorimotor systems for soft robotics fail to precisely detect tactile stimuli where haptic feedback is provided, leading to non-homogeneous surfaces and inefficient interaction.
An actuator-sensor device comprising three membranes with integrated sensor and actuator electrodes, where the sensory part is centered and the actuator part is edge-based, utilizing a parallel-plate capacitor structure and a preload element for enhanced haptic feedback.
Enables precise detection of tactile stimuli with amplified haptic feedback, allowing safer and intuitive human-machine interaction through a flexible, thin skin that can be manufactured efficiently.
Smart Images
Figure EP2025087003_25062026_PF_FP_ABST
Abstract
Description
[0001] Dresden University of Technology
[0002] P149850PC00
[0003] Active, sensor-integrated layer
[0004] The invention relates to a sensorimotor system consisting of an active layer. This layer is intended to enable human-machine interaction. The implementation of this active layer utilizes dielectric elastomers. A functionally integrated membrane is designed to detect tactile stimuli on the surface of a structure. Haptic feedback is then used to provide a signal.
[0005] Soft robotics is a subfield of robotics that increasingly focuses on the use of compliant and soft structures. The deformability of such structures offers several advantages over conventional rigid structures. Their flexibility allows them to adapt to their environment, resulting in a broader range of applications. Furthermore, this enables safer human-machine interaction, which is essential in areas where people work in close proximity to robots. The risk of injury can thus be significantly reduced.
[0006] The integration of functional components into flexible structures plays a crucial role here. This enables interaction with the environment. Conventional sensors and actuators mostly consist of rigid structures. Integrating these into flexible structures alters their property profile. For this reason, the use of flexible functional elements is advantageous. Direct interactive operation of soft robots can be enabled through sensorimotor systems. Tactile stimuli on the surface of a structure are detected. Haptic feedback is then used to send a signal back. In this way, information about specific states can be transmitted to the user. Dielectric elastomers are used to implement an active, sensor-integrated layer.
[0007] Dielectric elastomers are multifunctional, flexible, and highly deformable electromechanical structures commonly used as actuators, sensors, for energy harvesting, or for signal processing. Depending on the design, they typically consist of a non-conductive elastomer element and conductive, flexible electrodes. Over the past two decades, dielectric elastomers have been primarily used as actuators for various applications and as sensors capable of handling large deformations. Following the development of the dielectric elastomer switch, so-called multifunctional dielectric elastomers have been particularly valued in robotics for several years, primarily due to their broad range of applications.
[0008] WO 2019 / 182459 discloses a flexible switch comprising a deformable body and a plurality of electrodes, wherein at least one of the electrodes is provided on the deformable body. The switch has a first state in which the electrodes are spaced apart and a second state in which the electrodes are in electrical contact, and the switch is configured to allow movement between the states when a force is applied to or removed from the deformable body.
[0009] Neu et al., Fully Polymerie Domes as High-Stroke Biasing System for Soft Dielectric Elastomer Actuators, DOI 10.3389 / frobt.2021.695918, discloses a dielectric elastomer actuator and a polymer dome as a mechanical preloading element that is placed on the actuator.
[0010] A sensorimotor system that detects tactile stimuli on the surface of a structure and provides haptic feedback would, according to the prior art, be implemented by arranging sensors and actuators made of dielectric elastomers on the surface of the structure. The problem with this approach is that this arrangement must be offset, meaning that the tactile stimuli cannot be detected where the haptic feedback is provided. Furthermore, if the prestressing element proposed in the prior art is applied, a homogeneous surface of the structure cannot be created; that is, flat sensors are always adjacent to raised actuators.
[0011] The invention is therefore based on the objective of proposing a device and a method that provides a combination of sensor and actuator in which a tactile stimulus is detected where haptic feedback is given. Furthermore, it should be possible to integrate a preload element into this combination within a sensorimotor system, thereby creating an active, sensor-integrated layer.
[0012] This problem is solved according to the invention by an actuator-sensor device according to the main claim. Advantageous embodiments and further developments are described in the dependent claims.
[0013] An actuator-sensor device comprises at least one upper membrane, wherein at least one actuator electrode with a signal input is arranged on the at least one upper membrane, and the at least one upper membrane has at least one unused area in the form of a through-slit in which no actuator electrode is arranged. The device comprises at least one middle membrane, wherein the at least one middle membrane has at least one perforated recess. Furthermore, the device comprises at least one lower membrane, wherein at least one actuator electrode with a signal input is arranged on the at least one lower membrane, and the at least one lower membrane has at least one unused area in the form of a through-slit in which no actuator electrode is arranged.Finally, the device comprises at least one upper sensor electrode with a head and a lead with a signal output, wherein the head of the at least one upper sensor electrode and the lead of the at least one upper sensor electrode are arranged in the at least one free area in the form of a through-slit of the at least one upper membrane, and at least one lower sensor electrode with a head and a lead with a signal output, wherein the head of the at least one lower sensor electrode and the lead of the at least one lower sensor electrode are arranged in the at least one free area in the form of a through-slit of the at least one lower membrane.The at least one middle membrane is arranged between the at least one upper membrane and the at least one lower membrane in such a way that the head of the at least one upper sensor electrode and the head of the at least one lower sensor electrode are arranged directly on opposite sides of the at least one hole-shaped recess.
[0014] The advantage of this actuator-sensor device lies in the novel combination of sensors and actuators. The sensory part is located in the center of the device, while the actuator part is situated at the edge. This makes it possible to detect tactile stimuli precisely where haptic feedback is provided.
[0015] The actuator part of the actuator-sensor device consists of three individual layers: at least one upper, one middle, and one lower membrane. To generate an electrical voltage, at least one flexible electrode (actuator electrode) with a signal input is located on each of the at least one upper and at least one lower membrane. The at least one middle membrane has no actuator electrodes. It serves as a dielectric and prevents the actuator electrodes of the at least one upper and one lower membrane from touching. This results in the basic structure of a parallel-plate capacitor. When an electrical voltage is applied, electrostatic attraction between the positively and negatively charged particles on the opposing electrodes of the at least one upper and one lower membrane causes the dielectric in the middle, i.e., the at least one middle membrane, to compress.Since the volume of the material remains approximately constant (mechanical incompressibility), thickness compression leads to an enlargement of at least one central membrane in the plane. It becomes larger in area and thinner in thickness.
[0016] At the point where a tactile stimulus is to be detected, at least one upper and one lower membrane each have at least one unobstructed area in the form of a through-slit, in which no actuator electrode is located. The sensory part of the actuator-sensor device is integrated into this unobstructed area.
[0017] The sensory part of the invention also comprises three individual layers, namely the same at least one upper, middle, and lower membranes that already form the actuator part. However, the at least one recess in the form of a hole located on the at least one middle membrane, as well as the at least one remaining free area in the form of a through-slit on the at least one upper and lower membrane, each represent a passive area from the actuator's perspective. The sensory part is integrated into this passive area. Flexible electrodes (sensor electrodes) are located on the at least one upper and lower membrane for conducting the electrical current.
[0018] The at least one middle membrane acts as a dielectric between the sensor electrodes of the at least one upper and lower membranes, preventing them from touching without external pressure. This is because the perforated opening in the middle membrane is significantly smaller than the sensor electrode heads. However, if pressure is applied to the upper sensor electrode by a tactile stimulus, causing it to be pressed against the middle and lower membranes (i.e., deformed at this point), the sensor electrode heads of the upper and lower membranes make contact through the perforated opening in the middle membrane. This contact results in a sudden change in resistance, thus altering the signal output of the sensor electrodes.
[0019] Typically, the at least one upper membrane and the at least one lower membrane are designed as an elastomer comprising polydimethylsiloxane, and / or the at least one actuator electrode and / or the at least one upper sensor electrode and / or the at least one lower sensor electrode are designed as a matrix of an elastomer mixed with conductive particles comprising polydimethylsiloxane and carbon nanotubes.
[0020] The use of these materials has the advantage that the actuator-sensor device can be designed as a flexible, thin skin. Carbon nanotubes allow the conductivity of the matrix to be adjusted.
[0021] In a typical embodiment, at least one actuator-sensor device is designed as a sensorimotor system with at least one preloading element, wherein the at least one preloading element is configured to preload the at least one actuator-sensor device in such a way that, when at least one signal input of the at least one actuator electrodes of the at least one upper membrane and the at least one lower membrane is changed, a user can perceive the signal response haptically.
[0022] This has the advantage that haptic feedback can be enhanced using a simple mechanical means. When a voltage is applied to the signal inputs of the at least one actuator electrode of the at least one upper and at least one lower membrane, electrostatic attraction forces cause a thickness compression of the at least one middle membrane and simultaneously an increase in its length and width. As a result of this compression, the surface of the actuator-sensor device lowers, and this lowering can be perceived haptically. However, in a suitably compact actuator-sensor device, the thickness compression is minimal and therefore difficult for a user to perceive. Furthermore, a user might perceive a lifting of the surface more readily than a lowering.By using a preload element, the actuator-sensor device is deformed in such a way that an angle of inclination exists between the sensor and actuator parts. The surface of the actuator-sensor device therefore no longer lies in the same reference plane, but is deflected from it. The reference plane is an existing or virtual flat surface on which the actuator-sensor device rests. The sensor lies in a plane spaced apart from and parallel to the reference plane (sensor plane). The actuator lies between the reference plane and the sensor plane and is inclined relative to both.A thickness compression of the at least one middle membrane, i.e., the signal response to an applied voltage at the signal inputs of the at least one actuator electrode of the at least one upper and at least one lower membrane, thus causes an increase in the membrane's length and width, with the length and width directions each pointing outwards from the reference plane. In this way, the overall change in shape of the actuator contributes to a displacement of the sensory part along an axis orthogonal to the reference plane. The signal response, the haptic feedback in the form of a displacement of the sensory part, is thus amplified.
[0023] To enable increased movement out of the reference plane, the actuator-sensor device must be mechanically biased out of the plane. Various spring elements can be used for this purpose. The use of a so-called nonlinear-biased spring (NBS) made of a compliant material, such as silicone, thermoplastic polyurethane, TPU, or other polymers, is advantageous. However, coil springs or buckling rods can also be used.
[0024] Typically, at least one preload element is designed as a spring element with bistable deformation behavior.
[0025] The advantage of this is that the resulting force on the spring element exhibits a non-linear behavior. When the spring element is compressed, the resulting force initially increases. A stable stress state exists during this period. Subsequently, the resulting force decreases again, as the stress state can be described as unstable. Following this, the stress increases again due to the stabilization of the stress state.
[0026] Preferably, the at least one prestressing element is designed as a polymer dome, comprising a force application area, a spring action area and a stiffening area.
[0027] If a polymer dome is used as the spring element for the diaphragm, larger adjustment ranges are possible in conjunction with an actuator compared to a linear spring. Furthermore, such spring elements can be adapted to the corresponding actuator. Thus, after characterizing the at least one upper, middle, and lower diaphragm, the polymer dome can be matched to it. The geometry of the spring element is characterized by three areas. The first area is located on the upper surface and serves as the force application area for the sensory part of the actuator-sensor device. The second area contains the actual polymer dome, which is responsible for the spring action. This area is characterized by the wall thickness t of the dome geometry and its radius r. The third area of the polymer dome is located on the underside and serves as a stiffening frame for the structure.
[0028] The special feature of this polymer dome geometry is its bistable deformation behavior, which can be adapted to the properties of at least one upper, middle, and lower membrane. The resulting force on the spring element is nonlinear and can be influenced by varying the parameters of the polymer dome. In this way, the force distribution of the spring element can be adapted to the force distribution of the at least one upper, middle, and lower membrane.
[0029] This is a particularly advantageous adaptation of the polymer dome to the actuator-sensor device when the sensory part precisely covers the force application area. Depending on the size and stiffness of the at least one upper, middle, and lower membrane, the spring effect can also be adjusted via the wall thickness t and the radius r of the polymer dome. Likewise, the desired deflection of the at least one upper, middle, and lower membrane, particularly depending on its stiffness, can be adjusted by the height h of the polymer dome.
[0030] In another embodiment, an active, sensor-integrated layer is constructed, comprising at least one sensorimotor system and at least one control unit, wherein the at least one control unit is connected to the signal inputs of the at least one actuator electrodes of the at least one upper membrane and the at least one lower membrane, as well as to the signal outputs of the at least one upper sensor electrode and the at least one lower sensor electrode of the at least one sensorimotor system, wherein the at least one sensorimotor system is assembled modularly such that the signal inputs of the at least one actuator electrodes of the at least one upper membrane and the at least one lower membrane are configured to be jointly controlled and / or the signal outputs of the at least one upper sensor electrode and the at least one lower sensor electrode are configured to be jointly evaluated.
[0031] By modularly assembling multiple sensorimotor systems in this way, a comprehensive, active, sensor-integrated layer can be created. This results in a kind of interactive skin in which several sensorimotor systems are combined into arrays. It can simultaneously serve as an input and communication interface and acknowledge inputs via active feedback.
[0032] Typically, the active, sensor-integrated layer is used for human-machine interaction (HMI), where at least one signal output of the at least one upper sensor electrode and the at least one lower sensor electrode is modified by mechanical pressure applied by a user, causing the heads of the at least one upper sensor electrode and the heads of the at least one lower sensor electrode to make electrical contact. As a result, at least one signal input of the at least one actuator electrode of the at least one upper membrane and the at least one lower membrane is modified such that the user perceives the signal response haptically.
[0033] The core concept is therefore the use of the active, sensor-integrated layer for MMI applications. The sensors detect external touch, the measured signals are evaluated using metrological methods, and a response is derived from this. This response is then sent as a high-voltage signal to the actuators, which provide the user with haptic feedback through movement. The preferred direction of movement is from the surface of the skin.
[0034] In this way, the working environment for humans interacting with machines can be made safer. Furthermore, intuitive interaction is enabled, where the detection of specific contact points triggers a response from the machine. The embodiment is an interactive skin for human-machine interaction, for example, for controlling, communicating with, and collaborating with machines. It can be used as an enclosure for technical systems. Preferably, the active, sensor-integrated layer is used to control at least one robot arm by at least one user; thus, the human-machine interaction consists of the user controlling this robot arm.
[0035] To manufacture the actuator-sensor device with the properties described above, at least one upper membrane, at least one middle membrane, and at least one lower membrane, each comprising a dielectric elastomer, are perforated, punched, or otherwise cut such that at least one recess in the form of a hole is created on the at least one middle membrane. Subsequently, at least one actuator electrode is applied to each of the at least one upper membrane and the at least one lower membrane, at least one upper sensor electrode is applied to each of the at least one upper membrane, and at least one lower sensor electrode is applied to each of the at least one lower membrane using electrically conductive ink and an automatic doctor blade.Finally, the at least one upper membrane, the at least one middle membrane and the at least one lower membrane are joined together by gluing in such a way that the head of the at least one upper sensor electrode and the head of the at least one lower sensor electrode are arranged directly on opposite sides of the at least one hole-shaped recess.
[0036] An advantage of this manufacturing process is that it can be largely automated, and in particular the automatic doctor blading process is a particularly efficient and precise method for applying a multiple of electrodes to a membrane made of a dielectric elastomer.
[0037] Exemplary embodiments are shown in the drawings and are explained below with reference to the figures. Recurring features are identified by identical reference numerals.
[0038] They show:
[0039] Figs. 1A to 1C show an actuator-sensor device with an upper, middle and lower membrane, wherein the three superimposed membranes are shown individually;
[0040] Fig. 2 shows an actuator-sensor device in top view with an upper, middle and lower membrane;
[0041] Fig. 3 shows a force-resistance characteristic curve for the sensor circuit;
[0042] Figs. 4A and 4B show a sensorimotor system with a preload element in a cutaway side view;
[0043] Fig. 5 shows a sensorimotor system with a preload element in a cutaway, isometric view;
[0044] Fig. 6A shows a polymer dome in a cutaway side view;
[0045] Fig. 6B a displacement-force diagram for a sensorimotor system; and Fig. 7 an active, sensor-integrated layer for human-machine interaction with a robot.
[0046] Figures 1A to 1C show a typical embodiment of an actuator-sensor device 1. In this example, the device 1 has exactly one upper 2, exactly one middle 3, and exactly one lower 5 membrane. Each of these membranes 2, 3, 5 is circular and made of an elastomer. Figure 1A shows the underside view of the upper membrane 2. A plurality of actuator electrodes with signal inputs are arranged on the upper membrane 2. However, no actuator electrodes are arranged in a free area in the form of a through-gap from the center to the periphery. The upper membrane 2 thus forms the active area of the actuator in the region where the actuator electrodes are applied. The free area in the form of a through-gap, on the other hand, is the passive area of the actuator. The sensory part is arranged in this area. The head of an upper sensor electrode 6 is arranged at the center of the upper membrane 2. It is also circular.Starting from the head, the lead of the upper sensor electrode 6 is arranged in the unobstructed area in the form of a through-slit. The upper sensor electrode 6 is thus guided outwards through the active area of the actuator. Fig. 1B shows a top view of the middle membrane 3, which has a recess in the form of a hole 4 at its center. This recess is smaller than the head of the upper sensor electrode 6. The middle membrane 3 has no actuator electrodes. Rather, it serves as a dielectric between the upper membrane 2 and the lower membrane 5. In this way, a parallel-plate capacitor is formed between the upper membrane 2 and the lower membrane 5, and the current flow between the upper sensor electrode 6 and the lower sensor electrode 7 is interrupted. Fig. 1C shows a top view of the lower membrane 5, which has the same structure as the upper membrane 2.Thus, the upper sensor electrode 6 and the lower sensor electrode 7 are not in electrical contact. They are separated from each other by the middle membrane 3. However, since the membranes 2, 3, 5 are flexible, this distance can, in principle, be overcome by applying a force F perpendicular to the membrane plane. Electrical contact is then possible due to the recess in the form of a hole 4 on the middle membrane 3. The heads of the upper 6 and the lower sensor electrode 7 therefore rest directly on opposite sides of the recess in the form of a hole 4, and are thus in direct contact with the hole 4. In this embodiment, the membranes 2, 3, 5 are therefore arranged parallel to each other.
[0047] Fig. 2 shows a top view of the actuator-sensor device 1 in its assembled state, with the membranes 2, 3, and 5 in contact. The position of the head and lead of the upper sensor electrode 6, as well as the position of the lead of the lower sensor electrode 7, are indicated by dashed lines. It can be seen that, in this top view, the heads of the upper 6 and the lower sensor electrode 7 are positioned exactly one above the other, so that the head of the upper sensor electrode 6 covers the recess (hole 4) in the middle membrane 3 and the head of the lower sensor electrode 7. Thus, in a small section between the heads of the sensor electrodes 6 and 7, there is no dielectric material in the space between them. Therefore, by applying a force in the direction of the top view, a direct electrical contact can be established.
[0048] Fig. 3 shows a force-resistance diagram of the sensor circuit. For contact evaluation, different states are considered. If the actuator-sensor device 1 is subjected to no or only a slight force in a direction perpendicular to the plane of the membranes 2, 3, 5, there is no electrical contact between the sensor electrodes 6, 7. Therefore, the resistance to current flow due to a measurement voltage applied to the signal outputs of the sensor electrodes 6, 7 is very high. In the undeformed state, both electrodes are thus separated from each other, and no electrical current flows. If the force is significantly increased, for example, because a user deliberately activates the sensor by pressing on it with their finger, the sensor electrodes 6, 7 come into direct electrical contact. As a result, the resistance decreases rapidly, and a measurement current flows between the signal outputs, which can then be evaluated.Contact between the two electrodes in the deformed state closes the circuit, resulting in a sudden change in electrical resistance. This electrical resistance in the deformed state depends on the cross-section of the electrodes and the specific resistance of the electrically conductive ink used in the manufacturing process. In particular, the spacing, determined by the thickness of the central membrane 3, establishes a switching threshold for the pressure or force applied and thus represents a measure of the sensor's sensitivity, which can be adjusted accordingly.
[0049] Figures 4A and 4B show a sectional side view of a sensorimotor system comprising an actuator-sensor device 1 and a preload element 8 designed as a polymer dome. The polymer dome preloads the actuator-sensor device 1 such that a user perceives the signal response haptically when the signal inputs of the actuator electrodes of the upper 2 and the lower membrane 5 change. The force application area of the polymer dome, i.e., the radius of the area on the upper surface, covers the sensory part of the upper 2 and the lower membrane 5. Thus, the sensory part with the sensor electrodes 6, 7 is located precisely on this force application area and in a plane parallel to the reference plane, which is understood as the existing or virtual background of the sensorimotor system. The actuator part, in the form of the active area of the upper 2 and lower membrane 5, is located in planes inclined to the reference plane.This results in the actuator area having a surface geometry resembling a hollow cone segment. When a voltage is applied to the actuator electrodes, i.e., when the signal input is changed, and thus a thickness compression of the central membrane 3 is initiated, the surface area of the central membrane 3 subsequently increases. Due to its fixation to the substrate and the circumferentially closed shape of the actuator-sensor device 1, the central membrane 3 can only effectively increase its surface area by increasing its width in the direction of the imaginary hollow cone apex. Thus, the entire increase occurs in a direction orthogonal to the reference plane, i.e., in the vertical direction. Furthermore, because two actuator sections face each other in cross-section at the recess 4 in the central membrane 3, the increase in the surface area of the central membrane 3 is doubly pronounced in the aforementioned vertical direction.These effects represent the amplification of the signal response, namely the shift of the sensory part in the vertical direction.
[0050] Fig. 4A shows a cutaway side view in the ground state, i.e., without a voltage being applied to the actuator electrodes and without a force or pressure being exerted on the sensor electrodes 6, 7. The spring-loaded area of the polymer dome simultaneously supports the active area of the actuator part of the actuator-sensor device 1. Fig. 4B shows the operation when a force or pressure is applied, using the example of finger pressure. The sensor electrodes 6, 7 are directly contacted with each other, resulting in a change in the signal outputs of the sensor electrodes 6, 7 of the actuator-sensor device 1, i.e., a flow of measuring current. This input is answered with feedback in the form of a change in the signal inputs of the actuator electrodes of the actuator-sensor device 1, i.e., the application of a voltage to the actuator part.The resulting compression of the thickness of the middle membrane 3 leads to an increase in its surface area, which in turn causes the sensory part to shift vertically, i.e., orthogonally to the reference plane. The user thus perceives a counter-pressure from the sensory part as haptic feedback to their finger pressure. The displacement paths are indicated in Fig. 4B by a double arrow pointing vertically. The feedback therefore occurs precisely at the location where the user input took place.
[0051] Fig. 5 shows a sectional, isometric view of a sensorimotor system. It is clearly visible that the outer part of the actuator-sensor device 1, i.e., the outer edge of the membranes 2, 3, 5, is attached to the substrate. The sensory part, on the other hand, rests precisely on the force application area of the polymer dome 8. Thus, the surface shape of the remaining active area of the actuator part is that of a conical segment.
[0052] Figures 6A and 6B show a cross-section of the polymer dome 8 and a displacement-force diagram of the sensorimotor system and the polymer dome 8. As shown in Figure 6A, the polymer dome 8 is adapted to the actuator-sensor device 1. The radius of the force application area covers the sensory part of the upper 2 and lower diaphragm 5. The wall thickness t and the radius r of the polymer dome 8 are matched to the desired spring effect. The height h is matched to the desired displacement.
[0053] Figure 6B shows the bistable deformation behavior of the preload element 8, i.e., the nonlinear-biased spring (NBS) implemented as a polymer dome 8, once without an applied stress (characteristic curve Kl) and once with an applied stress (characteristic curve K2). Due to the two stable deformation states, the polymer dome 8 exhibits the haptic feel of a button with a perceptible switching threshold when a force is applied by finger pressure.
[0054] Fig. 7 shows an active, sensor-integrated layer with an array of many sensorimotor systems, each consisting of an actuator-sensor device 1 and a preload element 8. This active layer forms an interactive skin, which in this example is used as an enclosure for a robot arm and thus for controlling the robot by a user. This is a typical example of the use of the active, sensor-integrated layer for human-machine interaction. The signal inputs and outputs of the sensorimotor systems are jointly evaluated and controlled by a control unit 9.
[0055] Only features of the various embodiments disclosed in the exemplary embodiments can be combined and claimed individually.
Claims
Dresden University of Technology P149850PC00 Patent claims 1. Actuator-sensor device (1) comprising at least one upper membrane (2), wherein at least one actuator electrode with signal input is arranged on the at least one upper membrane (2), wherein the at least one upper membrane (2) has at least one unused area in the form of a through-slit in which no actuator electrode is arranged; at least one middle membrane (3), wherein the at least one middle membrane (3) has at least one recess in the form of a hole (4); at least one lower membrane (5), wherein at least one actuator electrode with signal input is arranged on the at least one lower membrane (5), wherein the at least one lower membrane (5) has at least one unused area in the form of a through-slit in which no actuator electrode is arranged;at least one upper sensor electrode (6) with a head and a lead with signal output, wherein the head of the at least one upper sensor electrode (6) and the lead of the at least one upper sensor electrode (6) are arranged in the at least one free area in the form of a through-slit of the at least one upper membrane (2); and at least one lower sensor electrode (7) with a head and a lead with signal output, wherein the head of the at least one lower sensor electrode (7) and the lead of the at least one lower sensor electrode (7) are arranged in the at least one free area in the form of a through-slit of the at least one lower membrane (5), wherein; the at least one middle membrane (3) is arranged between the at least one upper membrane (2) and the at least one lower membrane (5) such that the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) are arranged on opposite sides of the at least one perforated recess (4).
2. Actuator-sensor device (1) according to claim 1, wherein the at least one upper membrane (2) and the at least one lower membrane (5) are configured as an elastomer comprising polydimethylsiloxane, and / or the at least one actuator electrode and / or the at least one upper sensor electrode (6) and / or the at least one lower sensor electrode (7) are configured as a matrix of an elastomer mixed with conductive particles comprising polydimethylsiloxane and carbon nanotubes.
3. Sensorimotor system comprising at least one actuator-sensor device (1) according to claims 1 to 2; and at least one preloading element (8), wherein the at least one preloading element (8) is configured to preload the at least one actuator-sensor device (1) such that, upon a change in at least one signal input of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5), a user perceives the signal response haptically.
4. Sensorimotor system according to claim 3, wherein the at least one preload element (8) is designed as a spring element with bistable deformation behavior.
5. Sensorimotor system according to claim 3, wherein the at least one preload element (8) is designed as a polymer dome, comprising a force application area, a spring action area and a stiffening area.
6. Active, sensor-integrated layer comprising at least one sensorimotor system according to claims 3 to 5; at least one control unit (9), wherein the at least one control unit (9) is connected to the signal inputs of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5) and to the signal outputs of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) of the at least one sensorimotor system, wherein the at least one sensorimotor system is assembled modularly such that the signal inputs of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5) are configured to be jointly controlled and / or the signal outputs of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) are configured to be jointly evaluated.
7. Use of an active, sensor-integrated layer according to claim 6 for human-machine interaction, wherein at least one signal output of the at least one upper sensor electrode (6) and the at least one lower sensor electrode (7) is modified by a mechanical pressure applied by a user in such a way that the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) make electrical contact, wherein as a result at least one signal input of the at least one actuator electrode of the at least one upper membrane (2) and the at least one lower membrane (5) is modified such that the user perceives the signal response haptically.
8. Use according to claim 7, wherein the human-machine interaction is the control of at least one robot arm by at least one user.
9. Method for manufacturing an actuator-sensor device (1) according to claims 1 to 2, wherein at least one upper membrane (2), at least one middle membrane (3) and at least one lower membrane (5), each comprising a dielectric elastomer, are perforated, punched or otherwise cut such that at least one recess in the form of a hole (4) is formed on the at least one middle membrane (3), wherein at least one actuator electrode is applied to the at least one upper membrane (2) and at least one lower membrane (5), at least one upper sensor electrode (6) is applied to the at least one upper membrane (2) and at least one lower sensor electrode (7) is applied to the at least one lower membrane (5) using electrically conductive ink by automatic squeegeeing, wherein the at least one upper membrane (2), the at least one middle membrane (3) and the at least one lower membrane (5) are joined together by adhesive bonding such thatthat the head of the at least one upper sensor electrode (6) and the head of the at least one lower sensor electrode (7) are arranged on opposite sides of the at least one hole-shaped recess (4) and are directly resting on it.