Optical lens with two optical paths
The objects of wafers and solder joints are quickly obtained and compared with two optical optical lenses, which solves the problem of low wafer position and solder joint position identification efficiency in the semiconductor industry, and improves the welding quality and packaging effect.
Patent Information
- Application Number
- CN201810840584.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2018-07-27
- Publication Date
- 2024-12-20
- Estimated Expiration
- 2038-07-27
AI Technical Summary
In the semiconductor industry, the identification and comparison efficiency of wafer position and solder joint position is low, resulting in poor soldering quality.
Design an optical lens with two optical paths, including a first objective lens, a second objective lens and a CCD camera, and obtain the objects of the wafer and solder joints through the first optical path transmission unit and the second optical path transmission unit, and quickly perform the operation through the CCD camera. In contrast, if there is a deviation, the welding head nozzle will be compensated.
The efficiency of identifying and comparing wafer position and solder joint position is improved, the welding quality and packaging effect is ensured, the time to acquire two objects is shortened, and the efficiency of the comparison process is enhanced.
Smart Images

Figure CN108663779B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of optics, and in particular to an optical lens with two light paths. Background Art
[0002] Due to the high processing precision of the semiconductor industry, in the process of die bonding after flip-chip, it is necessary to accurately locate the position of the wafer and the solder joints sucked by the welding head nozzle to achieve higher welding quality. If the wafer position is offset relative to the solder joint position, it is necessary to compensate by adjusting the welding head nozzle to meet the welding quality requirements. In the semiconductor industry, the wafer position and solder joint position are generally identified by cameras to ensure a better packaging effect. However, the efficiency of general cameras in identifying and comparing the wafer position and solder joint position is low. Summary of the invention
[0003] Based on this, it is necessary to provide an optical lens with two light paths to achieve identification and comparison of wafer position and solder joint position with higher efficiency.
[0004] An optical lens with two optical paths includes a first objective lens, a second objective lens and a CCD camera, wherein the first objective lens and the second objective lens are arranged opposite to each other, the first objective lens can correspond to the wafer on the welding head suction nozzle, and the second objective lens can correspond to the welding point. A first optical path transfer unit is provided between the first objective lens and the CCD camera, which is used to transfer the object image formed by the first objective lens to the CCD camera, and a second optical path transfer unit is provided between the second objective lens and the CCD camera, which is used to transfer the object image formed by the second objective lens to the CCD camera. The CCD camera can respectively obtain the object image transferred by the first optical path transfer unit and the object image transferred by the second optical path transfer unit.
[0005] The above scheme provides an optical lens with two optical paths. When the optical lenses of the two optical paths are moved between the welding head suction nozzle and the welding point, the first objective lens can obtain the image corresponding to the wafer, and the second objective lens can obtain the image corresponding to the welding point. The image obtained by the first objective lens is transmitted to the CCD camera through the first optical path transmission unit, and the image obtained by the second objective lens can be transmitted to the CCD camera through the second optical path transmission unit. One displacement of the optical lens of the two optical paths can complete the acquisition process of the two images, thereby improving the efficiency of acquiring the two images. After the CCD camera receives the above two images respectively, it transmits the relevant data information to the control unit, and the control unit compares the two images to determine whether the positions of the wafer and the welding point correspond accurately. If there is a deviation between the positions of the wafer and the welding point, the welding head suction nozzle is controlled to move and compensate, thereby improving the welding quality and packaging effect. By reducing the time of acquiring the two images, the time of identifying and comparing the wafer position and the welding point position is greatly improved, thereby improving the efficiency of identification and comparison.
[0006] In one embodiment, the center of the first objective lens and the center of the second objective lens are located on the same vertical axis, the first optical path transfer unit and the second optical path transfer unit are respectively located on both sides of the vertical axis, and a right-angle prism is provided between the first objective lens and the second objective lens, and the right-angle prism can reflect the image obtained by the first objective lens to the first optical path transfer unit, and can also reflect the image obtained by the second objective lens to the second optical path transfer unit.
[0007] In one embodiment, the first optical path transmission unit and the second optical path transmission unit share a first double-glued convex lens, and the first double-glued convex lens is arranged corresponding to the CCD camera. The image transmitted by the first optical path transmission unit is transmitted to the CCD camera after passing through the first double-glued convex lens, and the image transmitted by the second optical path transmission unit is transmitted to the CCD camera after passing through the first double-glued convex lens.
[0008] In one embodiment, the optical lens of the two light paths also includes a first light source and a second light source. A first incident light transfer unit is provided between the first light source and the first objective lens, for transferring the light emitted by the first light source to the first objective lens. A second incident light transfer unit is provided between the second light source and the second objective lens, for transferring the light emitted by the second light source to the second objective lens. When it is necessary to obtain the image corresponding to the wafer on the welding head nozzle, the first light source is powered on and the second light source is powered off. When it is necessary to obtain the image corresponding to the welding point, the second light source is powered on and the first light source is powered off.
[0009] In one embodiment, the first incident light transmission unit includes a first Fresnel lens, a first reflector and a second double-cemented convex lens, and the first Fresnel lens, the first reflector and the second double-cemented convex lens are arranged in sequence from the first light source to the first objective lens. The light emitted by the first light source can pass through the first Fresnel lens and then be reflected by the first reflector, and then pass through the second double-cemented convex lens to reach the first objective lens.
[0010] In one embodiment, the first optical path transmission unit includes a first beam splitter and a first object image reflector, the first beam splitter is arranged between the first Fresnel lens and the first reflector, the light focused by the first Fresnel lens can pass through the first beam splitter and then be reflected by the first reflector, the object image obtained by the first objective lens passes through the second double-cemented convex lens, and is reflected by the first reflector, the first beam splitter and the first object image reflector in sequence and transmitted to the CCD camera.
[0011] In one embodiment, the second incident light transmission unit includes a second Fresnel lens, a second reflector and a third double-cemented convex lens, and the second Fresnel lens, the second reflector and the third double-cemented convex lens are arranged in sequence from the second light source to the second objective lens. The light emitted by the second light source can pass through the second Fresnel lens and then be reflected by the second reflector, and then pass through the third double-cemented convex lens to reach the second objective lens.
[0012] In one embodiment, the second optical path transmission unit includes a second beam splitter and a second object image reflector, the second beam splitter is arranged between the second Fresnel lens and the second reflector, the light focused by the second Fresnel lens can pass through the second beam splitter and then be reflected by the second reflector, the object image acquired by the second objective lens passes through the third double-cemented convex lens, and is reflected by the second reflector, the second beam splitter and the second object image reflector in sequence and transmitted to the CCD camera.
[0013] In one embodiment, the optical lens of the two light paths also includes a main mirror body assembly, a first channel matching the first light path transfer unit is dug in the main mirror body assembly, the first objective lens is installed at the entrance of the first channel, a second channel matching the second light path transfer unit is dug in the main mirror body assembly, the second objective lens is installed at the entrance of the second channel, the first channel and the second channel share a common output section, the first double-glued convex lens is installed in the output section, the outlet of the output section corresponds to the CCD camera, a third channel matching the first incident light transfer unit is dug in the main mirror body assembly, the first light source is installed at the entrance of the third channel, a fourth channel matching the second incident light transfer unit is dug in the main mirror body assembly, and the second light source is installed at the entrance of the fourth channel.
[0014] In one embodiment, a section of the first channel close to the first light source is a first input section, a section of the second channel close to the second light source is a second input section, the main mirror assembly includes a main mirror body, the first input section, the output section and the second input section are all formed in the main mirror body, the first input section, the output section and the second input section are arranged in parallel, and the first input section and the second input section are respectively located on both sides of the output section. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the structure of the optical lens of the two light paths described in this embodiment;
[0016] Figure 2 A schematic diagram of the structure of the optical lens of the two light paths described in this embodiment from another perspective;
[0017] Figure 3 This is a schematic diagram of the optical lens light path propagation of the two light paths described in this embodiment;
[0018] Figure 4 Schematic diagram of the structure of the main mirror body of this embodiment;
[0019] Figure 5 This is a schematic structural diagram of another viewing angle of the main mirror body of this embodiment;
[0020] Figure 6 This is a schematic diagram of the light path propagation principle of the right-angle prism part of the optical lens of the two light paths described in this embodiment.
[0021] Description of reference numerals:
[0022] 10. Optical lens of two optical paths, 11. First objective lens, 12. Second objective lens, 13. CCD camera, 14. First optical path transmission unit, 141. First beam splitter, 142. First image reflector, 15. Second optical path transmission unit, 151. Second beam splitter, 152. Second image reflector, 16. Right-angle prism, 17. First double-cemented convex lens, 18. First light source, 181. First incident light transmission unit, 1811. First Fresnel lens, 1812. A reflector, 1813, a second double-glued convex lens, 19, a second light source, 191, a second incident light transmission unit, 1911, a second Fresnel lens, 1912, a second reflector, 1913, a third double-glued convex lens, 20, a main mirror assembly, 21, a main mirror body, 211, an output section, 212, a first input section, 213, a second input section, 22, a first corner fixing member, 23, a second corner fixing member, 24, an object reflector fixing member, 25, a side light fixing member. DETAILED DESCRIPTION
[0023] like Figure 1 and Figure 2 As shown, in one embodiment, an optical lens 10 with two optical paths is provided, including a first objective lens 11, a second objective lens 12 and a CCD camera 13, wherein the first objective lens 11 and the second objective lens 12 are arranged opposite to each other, the first objective lens 11 can correspond to the wafer on the welding head nozzle, and the second objective lens 12 can correspond to the welding point, as shown in FIG. Figure 3 As shown, a first optical path transfer unit 14 is provided between the first objective lens 11 and the CCD camera 13, for transferring the image formed by the first objective lens 11 to the CCD camera 13, and a second optical path transfer unit 15 is provided between the second objective lens and the CCD camera 13, for transferring the image formed by the second objective lens 12 to the CCD camera 13. The CCD camera 13 can respectively obtain the image transferred by the first optical path transfer unit 14 and the image transferred by the second optical path transfer unit 15.
[0024] The above solution provides an optical lens 10 with two light paths, such as Figure 3 As shown, when the optical lens 10 of the two optical paths moves between the welding head suction nozzle and the welding point, the first objective lens 11 can obtain the image corresponding to the wafer, and the second objective lens 12 can obtain the image corresponding to the welding point. The image obtained by the first objective lens 11 is transmitted to the CCD camera 13 through the first optical path transmission unit 14, and the image obtained by the second objective lens 12 can be transmitted to the CCD camera 13 through the second optical path transmission unit 15. The optical lens 10 of the two optical paths can complete the acquisition process of the two images by one displacement, thereby improving the efficiency of acquiring the two images. After receiving the above two images respectively, the CCD camera 13 transmits the relevant data information to the control unit, and the control unit compares the two images to determine whether the wafer corresponds to the welding point position accurately. If there is a deviation between the wafer and the welding point position, the welding head suction nozzle is controlled to move and compensate, thereby improving the welding quality and packaging effect. By reducing the time of acquiring the two images, the time of identifying and comparing the wafer position and the welding point position is greatly improved, thereby improving the efficiency of identification and comparison.
[0025] Specifically, Figure 3 As shown, the optical lens 10 based on the two optical paths adopts a CCD camera 13 to receive two images. Therefore, in the process of acquiring the images, the two images need to be transmitted to the CCD camera 13 respectively, so as to distinguish whether the image information acquired at this time is the position information of the wafer or the solder joint. In order to enable the two images to be transmitted to the CCD camera 13 respectively, a shielding switching element can be used. When it is necessary to collect the wafer position information, the shielding switching element is used to shield the image corresponding to the solder joint, so that only the image corresponding to the wafer is transmitted to the CCD camera 13; when it is necessary to collect the solder joint position information, the shielding switching element is switched to shield the image corresponding to the wafer, so that only the image corresponding to the solder joint is transmitted to the CCD camera 13. Optionally, the light source corresponding to the first objective lens 11 and the light source corresponding to the second objective lens 12 can be controlled separately. When it is necessary to collect the wafer position information, the light source corresponding to the first objective lens 11 is powered on and emits light, and the light source corresponding to the second objective lens 12 is in a power-off state, so that only the first objective lens 11 can obtain the image corresponding to the wafer; when it is necessary to collect the position information of the solder joint, the light source corresponding to the second objective lens 12 is powered on and emits light, and the light source corresponding to the first objective lens 11 is in a power-off state, so that only the second objective lens 12 can obtain the image corresponding to the solder joint.
[0026] After the CCD camera 13 obtains two images respectively, the control unit needs to compare the information corresponding to the two images to determine whether the positions of the wafer and the solder joints correspond. To further simplify the comparison process of the control unit, in one embodiment, Figures 1 to 3As shown, the center of the first objective lens 11 and the center of the second objective lens 12 are located on the same vertical axis, and the first optical path transmission unit 14 and the second optical path transmission unit 15 are respectively located on both sides of the vertical axis. Figure 6 As shown, a right-angle prism 16 is provided between the first objective lens 11 and the second objective lens 12. The right-angle prism 16 can reflect the image acquired by the first objective lens 11 to the first optical path transfer unit 14, and can also reflect the image acquired by the second objective lens 12 to the second optical path transfer unit 15.
[0027] The center of the first objective lens 11 and the center of the second objective lens 12 are set on the same vertical axis, so that when the control unit determines whether the position of the wafer corresponds to the position of the solder joint, it only needs to overlap and compare the information corresponding to the two images. If the center of the first objective lens 11 and the center of the second objective lens 12 are not located on the same vertical axis, that is, there is an offset between the two, after obtaining the two image information, the control unit needs to compensate for the offset between the two image information, and then compare the compensated data to determine whether the position of the wafer corresponds to the position of the solder joint.
[0028] Moreover, based on the fact that the center of the first objective lens 11 and the center of the second objective lens 12 are located on the same vertical axis, in order to make the structure of the optical lens 10 of the two light paths more compact, as shown in FIG. Figure 6 As shown, the first optical path transfer unit 14 and the second optical path transfer unit 15 are respectively located on both sides of the vertical axis, and then the right-angle prism 16 is arranged between the first objective lens 11 and the second objective lens 12 to reflect the image formed by the first objective lens 11 to the first optical path transfer unit 14, and reflect the image formed by the second objective lens 12 to the second optical path transfer unit 15.
[0029] Furthermore, to further simplify the structure, as Figure 3 As shown, in one embodiment, the first optical path transfer unit 14 and the second optical path transfer unit 15 share a first double-glued convex lens 17, and the first double-glued convex lens 17 is arranged corresponding to the CCD camera 13. The image transmitted by the first optical path transfer unit 14 is transmitted to the CCD camera 13 after passing through the first double-glued convex lens 17, and the image transmitted by the second optical path transfer unit 15 is transmitted to the CCD camera 13 after passing through the first double-glued convex lens 17.
[0030] Further, in one embodiment, if Figure 3As shown, the optical lens of the two light paths also includes a first light source 18 and a second light source 19. A first incident light transfer unit 181 is provided between the first light source 18 and the first objective lens 11, for transferring the light emitted by the first light source 18 to the first objective lens 11. A second incident light transfer unit 191 is provided between the second light source 19 and the second objective lens 12, for transferring the light emitted by the second light source 19 to the second objective lens 12. When it is necessary to obtain the image corresponding to the wafer on the welding head nozzle, the first light source 18 is powered on and the second light source 19 is powered off. When it is necessary to obtain the image corresponding to the welding point, the second light source 19 is powered on and the first light source 18 is powered off.
[0031] By setting the first light source 18 and the second light source 19, it is controlled that only the image corresponding to the wafer or only the image corresponding to the solder joint is transmitted to the CCD camera 13 at the same time. Specifically, when it is necessary to obtain the image corresponding to the wafer, the first light source 18 is powered on, the second light source 19 is powered off, the light emitted by the first light source 18 is transmitted to the first objective lens 11 in the first incident light transmission unit 181, and the image formed by the first objective lens 11 is then transmitted to the CCD camera 13 through the first optical path transmission unit 14. When it is necessary to obtain the image corresponding to the solder joint, the second light source 19 is powered on, the first light source 18 is powered off, the light emitted by the second light source 19 is transmitted to the second objective lens 12 in the second incident light transmission unit 191, and the image formed by the second objective lens 12 is then transmitted to the CCD camera 13 through the second optical path transmission unit 15.
[0032] Specifically, Figure 3 and Figure 6 As shown, in one embodiment, the first incident light transmission unit 181 includes a first Fresnel lens 1811, a first reflector 1812, and a second double-cemented convex lens 1813-1813, wherein the first Fresnel lens 1811, the first reflector 1812, and the second double-cemented convex lens 1813-1813 are sequentially arranged in a direction from the first light source 18 to the first objective lens 11, and the light emitted by the first light source 18 can pass through the first Fresnel lens 1811 and then be reflected by the first reflector 1812, and then reach the first objective lens 11 after passing through the second double-cemented convex lens 1813. The first incident light transmission unit 181 can also be composed of other optical lenses, as long as it can transmit the light emitted by the first light source 18 to the first objective lens 11, it falls within the scope of the aforementioned solution.
[0033] Further, in one embodiment, if Figure 3As shown, the first optical path transmission unit 14 includes a first beam splitter 141 and a first object image reflector 142, the first beam splitter 141 is arranged between the first Fresnel lens 1811 and the first reflector 1812, the light focused by the first Fresnel lens 1811 can pass through the first beam splitter 141 and then be reflected by the first reflector 1812, the image captured by the first objective lens 11 passes through the second double-cemented convex lens 1813, and is reflected by the first reflector 1812, the first beam splitter 141 and the first object image reflector 142 in sequence and transmitted to the CCD camera 13.
[0034] The first light path transmission unit 14 and the first incident light transmission unit 181 share the first reflector 1812 and the second double-cemented convex lens 1813, making the overall structure more compact. The light emitted by the first light source 18 can pass through the first Fresnel lens 1811 and the first beam splitter 141 in sequence, then be reflected by the first reflector 1812, and then reach the first objective lens 11 after passing through the second double-cemented convex lens 1813. The image formed by the first objective lens 11 passes through the second double-cemented convex lens 1813, and then is reflected by the first reflector 1812, the first beam splitter 141, and the first object image reflector 142 in sequence and transmitted to the CCD camera 13.
[0035] More specifically, in one embodiment, the second incident light transmission unit 191 includes a second Fresnel lens 1911, a second reflector 1912, and a third double-cemented convex lens 1913, and the second Fresnel lens 1911, the second reflector 1912, and the third double-cemented convex lens 1913 are sequentially arranged in the direction from the second light source 19 to the second objective lens 12, and the light emitted by the second light source 19 can pass through the second Fresnel lens 1911, be reflected by the second reflector 1912, and reach the second objective lens 12 after passing through the third double-cemented convex lens 1913. Similar to the arrangement of the first incident light transmission unit 181, the light generated by the second light source 19 is transmitted through the second Fresnel lens 1911, the second reflector 1912, and the third double-cemented convex lens 1913. Other optical lens combinations can also be used to transmit the light generated by the second light source 19, as long as the light emitted by the second light source 19 can be transmitted to the second objective lens 12, it belongs to the scope of the above-mentioned scheme.
[0036] Further, in one embodiment, if Figure 3As shown, the second optical path transmission unit 15 includes a second beam splitter 151 and a second object image reflector 152. The second beam splitter 151 is arranged between the second Fresnel lens 1911 and the second reflector 1912. The light focused by the second Fresnel lens 1911 can pass through the second beam splitter 151 and then be reflected by the second reflector 1912. The object image obtained by the second objective lens 12 passes through the third double-cemented convex lens 1913, and is reflected by the second reflector 1912, the second beam splitter 151 and the second object image reflector 152 in sequence and transmitted to the CCD camera 13.
[0037] Similar to the configuration of the first optical path transmission unit 14 , the second optical path transmission unit 15 and the second incident light transmission unit 191 share the second reflector 1912 and the third double-cemented convex lens 1913 , making the overall structure more compact.
[0038] Further, in one embodiment, if Figure 1 and Figure 2 As shown, the optical lens of the two light paths also includes a main mirror body assembly 20, a first channel matching the first light path transfer unit 14 is dug in the main mirror body assembly 20, the first objective lens 11 is installed at the entrance of the first channel, a second channel matching the second light path transfer unit 15 is dug in the main mirror body assembly 20, the second objective lens 12 is installed at the entrance of the second channel, the first channel and the second channel share an output section 211, the first double-glued convex lens 17 is installed in the output section 211, the outlet of the output section 211 corresponds to the CCD camera 13, a third channel matching the first incident light transfer unit 181 is dug in the main mirror body assembly 20, the first light source 18 is installed at the entrance of the third channel, a fourth channel matching the second incident light transfer unit 191 is dug in the main mirror body assembly 20, and the second light source 19 is installed at the entrance of the fourth channel.
[0039] The transmission requirements of each optical path in the optical lens 10 of the two optical paths are realized by setting the first channel, the second channel, the third channel and the fourth channel in the main mirror assembly 20. Each optical lens is set at the corresponding position of the corresponding channel to complete the setting of the first optical path transmission unit 14, the second optical path transmission unit 15, the first incident light transmission unit 181 and the second incident light transmission unit 191. Since the first optical path transmission unit 14 and the second optical path transmission unit 15 share a first double-glued convex lens 17, the first channel and the second channel share an output section 211, and the first double-glued convex lens 17 is installed on the output section 211. The various optical lenses included in the first optical path transmission unit 14, the second optical path transmission unit 15, the first incident light transmission unit 181 and the second incident light transmission unit 191 can also be set up through other supporting structures, as long as the transmission of the corresponding optical path can be achieved, it belongs to the scope of the aforementioned scheme.
[0040] Furthermore, in one embodiment, in order to make the overall structural layout more reasonable and concise, as Figure 4 and Figure 5 As shown, a section of the first channel close to the first light source 18 is a first input section 212, a section of the second channel close to the second light source 19 is a second input section 213, the main mirror assembly 20 includes a main mirror body 21, the first input section 212, the output section 211 and the second input section 213 are all formed in the main mirror body 21, the first input section 212, the output section 211 and the second input section 213 are arranged in parallel, and the first input section 212 and the second input section 213 are respectively located on both sides of the output section 211.
[0041] Specifically, in one embodiment, Figure 1 and Figure 2 As shown, when the first incident light transmission unit 181 includes the first Fresnel lens 1811, the first reflector 1812 and the second double-cemented convex lens 1813, the first Fresnel lens 1811 is installed at the outlet of the first input section 212, and when the second incident light transmission unit 191 includes the second Fresnel lens 1911, the second reflector 1912 and the third double-cemented convex lens 1913, the second Fresnel lens 1911 is installed at the outlet of the second input end.
[0042] Further, in one embodiment, if Figure 1 and Figure 2As shown, the main mirror body assembly 20 also includes a first corner fixing member 22, a second corner fixing member 23, an object reflector fixing member 24 and two side light fixing members 25. The first corner fixing member 22 and the second corner fixing member 23 are arranged opposite to each other, and the object reflector is arranged between the first corner fixing member 22 and the second corner fixing member 23. The two side light fixing members 25 are arranged opposite to each other and are both mounted between the first corner fixing member 22 and the second corner fixing member 23. A placement space is enclosed between the first corner fixing member 22, the second corner fixing member 23, the object reflector fixing member 24 and the two side light fixing members 25, and the right-angle prism 16 is placed in the placement space.
[0043] The first beam splitter 141, the first reflector 1812, and the second double-cemented convex lens 1813 are installed in the first corner fixing member 22, and a corresponding channel is dug in the first corner fixing member 22, so that the first beam splitter 141, the first reflector 1812, and the second double-cemented convex lens 1813 can achieve the transmission of corresponding light. The second beam splitter 151, the second reflector 1912, and the third cemented convex lens 1913 are installed in the second corner fixing member 23, and a corresponding channel is dug in the second corner fixing member 23, so that the second beam splitter 151, the second reflector 1912, and the third cemented convex lens 1913 can achieve the transmission of corresponding light. The object image reflector fixture 24 is located between the first corner fixture 22 and the second corner fixture 23, and is provided with a V-shaped groove for placing the first object image reflector 142 and the second object image reflector 152. The first object image reflector 142 is mounted on the side wall of the V-shaped groove close to the first corner fixture 22, and the second object image reflector 152 is mounted on the other side wall. A corresponding channel is dug in the object image reflector fixture 24 for the transmission of the corresponding light paths of the first object image reflector 142 and the second object image reflector 152. A pair of side lights arranged in an inclined manner are provided in each of the two side light fixtures 25. The first objective lens 11 is placed on one side light fixture 25, and the second objective lens 12 is placed on the other side light fixture 25. A heat insulating glass is provided between the first objective lens 11 and the corresponding side light, and a heat insulating glass is also provided between the second objective lens 12 and the corresponding side light. The light emitted by the pair of side lights can pass through the corresponding heat insulating glass and irradiate the first objective lens 11 or the second objective lens 12. The object image formed by the first objective lens 11 can pass through the corresponding side light fixture 25 to reach the right angle prism 16 , and the object image formed by the second objective lens 12 can also pass through the corresponding side light fixture 25 to reach the right angle prism 16 .
[0044] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0045] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.
Claims
1. An optical lens with two optical paths, characterized in that: The invention comprises a first objective lens, a second objective lens and a CCD camera, wherein the first objective lens and the second objective lens are arranged opposite to each other, the first objective lens can correspond to the wafer on the welding head suction nozzle, and the second objective lens can correspond to the welding point, a first optical path transmission unit is arranged between the first objective lens and the CCD camera, and is used to transmit the object image formed by the first objective lens to the CCD camera, a second optical path transmission unit is arranged between the second objective lens and the CCD camera, and is used to transmit the object image formed by the second objective lens to the CCD camera, and the CCD camera can respectively obtain the object image transmitted by the first optical path transmission unit and the object image transmitted by the second optical path transmission unit; the center of the first objective lens and the center of the second objective lens are located on the same vertical axis line, the first optical path transfer unit and the second optical path transfer unit are respectively located on both sides of the vertical axis, and a right-angle prism is arranged between the first objective lens and the second objective lens; the optical lens of the two optical paths also includes a main lens body assembly, and the main lens body assembly also includes a first corner fixing member, a second corner fixing member, an object image reflector fixing member and two side light fixing members, and a placement space is enclosed between the first corner fixing member, the second corner fixing member, the object image reflector fixing member and the two side light fixing members, and the right-angle prism is placed in the placement space; the right-angle prism can reflect the object image obtained by the first objective lens to the first optical path transfer unit, and can also reflect the object image obtained by the second objective lens to the second optical path transfer unit.
2. The optical lens with two light paths according to claim 1, characterized in that: The first optical path transmission unit and the second optical path transmission unit share a first double-glued convex lens, and the first double-glued convex lens is arranged corresponding to the CCD camera. The object image transmitted by the first optical path transmission unit is transmitted to the CCD camera after passing through the first double-glued convex lens, and the object image transmitted by the second optical path transmission unit is transmitted to the CCD camera after passing through the first double-glued convex lens.
3. The optical lens with two light paths according to claim 2, characterized in that: It also includes a first light source and a second light source, a first incident light transfer unit is provided between the first light source and the first objective lens, and is used to transfer the light emitted by the first light source to the first objective lens, and a second incident light transfer unit is provided between the second light source and the second objective lens, and is used to transfer the light emitted by the second light source to the second objective lens. When it is necessary to obtain the object image corresponding to the wafer on the welding head nozzle, the first light source is powered on and the second light source is powered off; when it is necessary to obtain the object image corresponding to the welding point, the second light source is powered on and the first light source is powered off.
4. The optical lens with two light paths according to claim 3, characterized in that: The first incident light transmission unit includes a first Fresnel lens, a first reflector and a second double-cemented convex lens. The first Fresnel lens, the first reflector and the second double-cemented convex lens are arranged in sequence from the first light source to the first objective lens. The light emitted by the first light source can pass through the first Fresnel lens and then be reflected by the first reflector, and then pass through the second double-cemented convex lens to reach the first objective lens.
5. The optical lens with two light paths according to claim 4, characterized in that: The first optical path transmission unit includes a first beam splitter and a first object image reflector, the first beam splitter is arranged between the first Fresnel lens and the first reflector, the light focused by the first Fresnel lens can pass through the first beam splitter and then be reflected by the first reflector, the object image acquired by the first objective lens passes through the second double-cemented convex lens, and is reflected by the first reflector, the first beam splitter and the first object image reflector in sequence and transmitted to the CCD camera.
6. The optical lens with two light paths according to claim 3, characterized in that: The second incident light transmission unit includes a second Fresnel lens, a second reflector and a third double-cemented convex lens. The second Fresnel lens, the second reflector and the third double-cemented convex lens are arranged in sequence from the second light source to the second objective lens. The light emitted by the second light source can pass through the second Fresnel lens and then be reflected by the second reflector, and then pass through the third double-cemented convex lens to reach the second objective lens.
7. The optical lens with two light paths according to claim 6, characterized in that: The second optical path transmission unit includes a second beam splitter and a second object image reflector, the second beam splitter is arranged between the second Fresnel lens and the second reflector, the light focused by the second Fresnel lens can pass through the second beam splitter and then be reflected by the second reflector, the object image obtained by the second objective lens passes through the third double-cemented convex lens, and is reflected by the second reflector, the second beam splitter and the second object image reflector in sequence and transmitted to the CCD camera.
8. The optical lens with two light paths according to claim 3, characterized in that: A first channel matching the first optical path transfer unit is dug in the main mirror body assembly, the first objective lens is installed at the entrance of the first channel, a second channel matching the second optical path transfer unit is dug in the main mirror body assembly, the second objective lens is installed at the entrance of the second channel, the first channel and the second channel share a common output section, the first double-glued convex lens is installed in the output section, the outlet of the output section corresponds to the CCD camera, a third channel matching the first incident light transfer unit is dug in the main mirror body assembly, the first light source is installed at the entrance of the third channel, a fourth channel matching the second incident light transfer unit is dug in the main mirror body assembly, and the second light source is installed at the entrance of the fourth channel.
9. The optical lens with two light paths according to claim 8, characterized in that: A section of the first channel close to the first light source is a first input section, a section of the second channel close to the second light source is a second input section, the main mirror assembly includes a main mirror body, the first input section, the output section and the second input section are all formed in the main mirror body, the first input section, the output section and the second input section are arranged in parallel, and the first input section and the second input section are respectively located on both sides of the output section.
