a graphite base

A technology of graphite base and circular groove, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of poor luminous uniformity of epitaxial wafers and other issues

CN109666922BActive Publication Date: 2021-04-27HC SEMITEK ZHEJIANG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2021-04-27

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Abstract

The invention discloses a graphite base, which belongs to the field of epitaxial growth equipment. The substrate placed in the circular groove is mainly in close contact with the side wall part where the symmetry plane of the second part is located, so n arc-shaped grooves are opened on the side wall of the second part, and when n is an even number, The angle between the line of symmetry of at least one of the n arc-shaped grooves and the plane of symmetry of the second part is less than 90°; when n is an odd number, the arc-shaped surface of one of the arc-shaped grooves and the second part The symmetry planes intersect, and this arrangement can ensure that the position of the arc-shaped groove is set at the part where the substrate is in close contact with the side wall of the second part. Further, the central angle corresponding to the arc is less than 150°, and the substrate will not be in contact with the arc-shaped surface of the arc-shaped groove, which reduces the contact between the substrate, the epitaxial layer on the substrate, and the side wall of the second part area, thereby making the overall temperature on the substrate and the epitaxial layer relatively uniform, thereby improving the luminous uniformity of the final epitaxial wafer.
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Description

Technical field

[0001] The present invention relates to the field of epitaxial growth devices, and more particularly to a graphite base.Background technique

[0002] The graphite base is part of the metal organic compound chemical vapor deposition (English: MOCVD) equipment, the graphite base is a cylinder, and a plurality of circular grooves are provided on the end face of one end of the graphite base. The unit and the plurality of set of circular groove units are radially distributed along the end surface of one end of the graphite base. Each set of circular groove units each includes a plurality of circular grooves, and the plurality of circular grooves are connected along the circumferential direction of the end surface of one end of the graphite base, and the other end of the graphite base is connected to the drive structure of the MOCVD device.

[0003] When the epitaxial sheet is prepared, it is necessary to place the substrate within a circular groove, and the drive structure controls...

Examples

Embodiment Construction

[0024]In order to make the objects, technical solutions, and advantages of the present invention, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0025]figure 1 It is a structural view of a graphite base provided by the embodiment of the present invention.figure 2 It is a side view of a graphite base provided in the embodiment of the present invention, combinedfigure 1 versusfigure 2 The graphite base is a cylinder. A multi-set circular groove unit 2 is provided on the end face 1 of the graphite base, and the plurality of circular groove unit 2 taken along the end face 1 of the graphus base, each group of circular groove unit 2 includes more A circular groove 3, a plurality of circular grooves 3 along the circumference of the end face 1 of the graphite base, and the center O of the plurality of circular grooves 3 is in the same cylindrical surface 4.

[0026]The cylindrical surface 4 divides each of the circ...