A two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling

Abstract

The present invention discloses a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling, comprising: a fixed platform; a first micro-motion platform connected to the fixed platform via a first compliant mechanism, the first compliant mechanism causing the first micro-motion platform to micro-move in a lateral direction; a second micro-motion platform connected to the first micro-motion platform via a second compliant mechanism, the second compliant mechanism causing the second micro-motion platform to micro-move in a longitudinal direction. The present invention has the beneficial effect of realizing motion decoupling for a two-degree-of-freedom compliant precision positioning platform.

Description

Technical Field

[0001] The present invention relates to the field of precision mechanical equipment, and more specifically, to a two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling. Background Art

[0002] A compliant mechanism is a new type of mechanism that relies on the deformation of its own elastic components to achieve the transmission of energy, force and motion. It is different from traditional mechanical structures in that traditional mechanical structures try their best to avoid the adverse effects of component deformation during movement, while compliant mechanisms make full use of elastic deformation and achieve high-precision movement through the study of deformation characteristics and control modeling. The emergence and development of compliant mechanisms have broken through the development barriers of mechanical science, proposed a new research direction for mechanism design, and are a hot spot in future mechanical research.

[0003] The compliant mechanism adopts one-piece molding, abandoning the kinematic pair in the traditional mechanical structure, which can simplify processing and installation, and is conducive to eliminating the friction and wear problems between components, reducing the maintenance and maintenance of the mechanism, and can extend the service life of the mechanism, and improve the movement accuracy and performance of the mechanism. The advantages of the compliant mechanism have attracted extensive attention and research from scholars at home and abroad, and its research results have been applied in many industries and fields. In particular, with the rapid development of nanotechnology and the large-scale application of piezoelectric ceramics, nano-level precision positioning technology based on compliant mechanisms and piezoelectric ceramics has become a research hotspot in the mechanical field due to its high precision, stability and fast response.

[0004] In recent years, domestic and foreign scholars have conducted a series of designs and studies on precision positioning platforms based on compliant mechanisms, from one degree of freedom to multiple degrees of freedom, from planar compliant positioning platforms to spatial compliant positioning platforms. However, compliant mechanisms are prone to parasitic motion, and the resulting motion coupling interferes with the modeling control and motion accuracy of the compliant positioning platform. The existing compliant positioning platform designs that aim to achieve motion decoupling often have the problem of incomplete decoupling. Summary of the invention

[0005] An object of the present invention is to solve at least the above problems and to provide at least the advantages which will be described hereinafter.

[0006] Another object of the present invention is to provide a two-degree-of-freedom compliant precision positioning platform that can achieve motion decoupling, which can achieve two-degree-of-freedom compliant precision positioning that can achieve motion decoupling.

[0007] In order to achieve these purposes and other advantages according to the present invention, a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling is provided, comprising:

[0008] Determine the platform;

[0009] A first micro-motion platform connected to the fixed platform via a first compliance mechanism, wherein the first compliance mechanism enables the first micro-motion platform to micro-move in a lateral direction;

[0010] The second fine-motion platform is connected to the first fine-motion platform through a second compliant mechanism, and the second compliant mechanism enables the second fine-motion platform to fine-move in the longitudinal direction.

[0011] Preferably, the fixed platform is in a circular ring shape.

[0012] Preferably, the first fine-motion platform is in a circular ring shape, and the outer diameter of the first fine-motion platform is smaller than the inner diameter of the fixed platform.

[0013] Preferably, the second fine-motion platform is circular, and the diameter of the second fine-motion platform is smaller than the inner diameter of the first fine-motion platform.

[0014] Preferably, the fixed platform, the first fine-motion platform, and the second fine-motion platform are in a nested structure.

[0015] Preferably, the first compliance mechanism includes a pair of first compliance components symmetrically arranged along the longitudinal direction, and the first compliance components connect the fixed platform and the first micro-motion platform.

[0016] Preferably, the first compliant component includes a first piezoelectric ceramic driver, a first compliant four-bar mechanism, and a first compliant parallel guiding mechanism. The first piezoelectric ceramic driver is fixed on the fixed platform. The first piezoelectric ceramic driver expands and contracts in the transverse direction to drive the first compliant four-bar mechanism to undergo transverse deformation. The first compliant parallel guiding mechanism produces longitudinal deformation to compensate for the longitudinal shortening caused by the transverse deformation of the first compliant four-bar mechanism.

[0017] Preferably, the second compliance mechanism comprises a pair of second compliance components symmetrically arranged in the transverse direction, and the second compliance components connect the first fine-motion platform and the second fine-motion platform.

[0018] Preferably, the second compliant component includes a second piezoelectric ceramic driver, a second compliant four-bar mechanism, and a second compliant parallel guiding mechanism. The second piezoelectric ceramic driver is fixed on the first micro-motion platform. The second piezoelectric ceramic driver extends and retracts in the longitudinal direction to drive the second compliant four-bar mechanism to undergo longitudinal deformation. The second compliant parallel guiding mechanism produces lateral deformation to compensate for the lateral shortening caused by the longitudinal deformation of the second compliant four-bar mechanism.

[0019] The present invention has at least the following beneficial effects:

[0020] The platform adopts the first compliant mechanism and the second compliant mechanism design, which can realize the decoupling of the two-degree-of-freedom motion in the plane;

[0021] The platform design changes the traditional platform shape and adopts a circular platform shape, making the platform more adaptable to experimental conditions and more beautiful.

[0022] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through study and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a structural diagram of a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling according to one of the technical solutions of the present invention;

[0024] Figure 2 This is a structural diagram of a compliant four-bar mechanism before and after deformation according to one of the technical solutions of the present invention;

[0025] Figure 3 This is a structural diagram of the compliant parallel guide mechanism of one of the technical solutions of the present invention before and after deformation. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0027] In the description of the present invention, the terms "lateral", "longitudinal", "upper", "lower", "symmetrical", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] like Figures 1 to 3 As shown, the present invention provides a two-degree-of-freedom compliant precision positioning platform capable of realizing motion decoupling, comprising:

[0029] A fixed platform 1, which provides a fixed position for the first micro-motion platform 2;

[0030] A first fine-motion platform 2, which is connected to the fixed platform 1 through a first compliant mechanism 3, wherein the first compliant mechanism 3 enables the first fine-motion platform 2 to fine-move laterally, and the first fine-motion platform 2 provides a laterally movable platform for the second fine-motion platform 4 and provides a fixed position for the second fine-motion platform 4;

[0031] The second fine-motion platform 4 is connected to the first fine-motion platform 2 via a second compliance mechanism 5. The second compliance mechanism 5 enables the second fine-motion platform 4 to fine-move in the longitudinal direction, thereby achieving decoupling of two-degree-of-freedom motion in the plane.

[0032] In the above technical solution, when a lateral displacement is input, the first compliant mechanism 3 undergoes lateral micro-movement, thereby driving the first micro-motion platform 2 to undergo lateral micro-movement. When a longitudinal displacement is input, the second compliant mechanism 5 undergoes longitudinal micro-movement, thereby driving the second micro-motion platform 4 to undergo longitudinal micro-movement. The longitudinal position of the first micro-motion platform 2 is adjusted, and the lateral and longitudinal positions of the second micro-motion platform 4 are adjusted, thereby achieving the purpose of decoupling the two degrees of freedom in the plane.

[0033] Based on the above technical solution, further, the fixed platform 1 is in a circular ring shape, which provides a structural basis for embedding the first fine-motion platform 2 and the second fine-motion platform 4. The circular ring design has no edges and corners and has little wear.

[0034] Based on the above technical solution, the first micro-motion platform 2 is in a circular shape, and the outer diameter of the first micro-motion platform 2 is smaller than the inner diameter of the fixed platform 1 , which is convenient for embedding into the fixed platform 1 and provides a structural basis for embedding the second micro-motion platform 4 .

[0035] Based on the above technical solution, further, the second fine-motion platform 4 is circular, and the diameter of the second fine-motion platform 4 is smaller than the inner diameter of the first fine-motion platform 2 , so as to facilitate embedding in the first fine-motion platform 2 .

[0036] Based on the above technical solution, further, the fixed platform 1, the first fine-motion platform 2, and the second fine-motion platform 4 are in a nested structure to reduce friction between components, and the fixed platform 1, the first fine-motion platform 2, and the second fine-motion platform 4 are located on the same plane.

[0037] Based on the above technical solution, further, the first compliant mechanism 3 includes a pair of first compliant components symmetrically arranged along the longitudinal direction, the first compliant components connect the fixed platform 1 and the first micro-motion platform 2, and the lateral micro-motion of the first micro-motion platform 2 is completed by the movement of the pair of first compliant components.

[0038] Based on the above technical solution, further, the first compliant component includes a first piezoelectric ceramic driver 301, a first compliant four-bar mechanism 302, and a first compliant parallel guiding mechanism 303. The first piezoelectric ceramic driver 301 is fixed on the fixed platform 1, and the first piezoelectric ceramic driver 301 is extended and retracted in the horizontal direction. The extension direction of a pair of first piezoelectric ceramic drivers 301 is the same. When the first piezoelectric ceramic driver 301 extends horizontally, the extension of the pair of first piezoelectric ceramic drivers 301 causes the first micro-motion platform 2 to move and deform horizontally. At this time, the first compliant four-bar mechanism 302 is longitudinally shortened, and the first compliant parallel guiding mechanism 303 is longitudinally deformed to compensate for the longitudinal shortening caused by the lateral movement of the first compliant four-bar mechanism 302, so that the longitudinal position of the first micro-motion platform 2 does not change.

[0039] Based on the above technical solution, further, the second compliant mechanism 5 includes a pair of second compliant components symmetrically arranged in the transverse direction, the second compliant components connect the first micro-motion platform 2 and the second micro-motion platform 4, and the longitudinal movement of the second micro-motion platform 4 is completed by the second compliant components.

[0040] Based on the above technical solution, further, the second compliant component includes a second piezoelectric ceramic driver 501, a second compliant four-bar mechanism 502, and a second compliant parallel guiding mechanism 503. The second piezoelectric ceramic driver 501 is fixed on the first micro-motion platform 2. The second piezoelectric ceramic driver 501 is retracted and extended in the longitudinal direction. The extension direction of a pair of second piezoelectric ceramic drivers 501 is the same. When the second piezoelectric ceramic driver 501 extends longitudinally, the extension of the pair of second piezoelectric ceramic drivers 501 causes the second micro-motion platform 4 to move and deform longitudinally. At this time, the second compliant four-bar mechanism 502 is laterally shortened, and the second compliant parallel guiding mechanism 503 is laterally deformed to compensate for the lateral shortening caused by the longitudinal movement of the second compliant four-bar mechanism 502, so that the lateral position of the second micro-motion platform 4 does not change.

[0041] Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and the implementation modes, and they can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling, characterized in that: include: Set platform (1); A first micro-motion platform (2) connected to the fixed platform (1) via a first compliance mechanism (3), wherein the first compliance mechanism (3) enables the first micro-motion platform (2) to micro-move in a lateral direction; A second fine-motion platform (4) connected to the first fine-motion platform (2) via a second compliance mechanism (5), wherein the second compliance mechanism (5) enables the second fine-motion platform (4) to fine-move in the longitudinal direction; The first compliant mechanism (3) comprises a pair of first compliant components symmetrically arranged in the longitudinal direction, wherein the first compliant components connect the fixed platform (1) and the first micro-motion platform (2); The first compliant component comprises a first piezoelectric ceramic driver (301), a first compliant four-bar mechanism (302), and a first compliant parallel guiding mechanism (303); the first piezoelectric ceramic driver (301) is fixed on the fixed platform (1); the first piezoelectric ceramic driver (301) is extended and retracted in the transverse direction to drive the first compliant four-bar mechanism (302) to deform in the transverse direction; the first compliant parallel guiding mechanism (303) is deformed in the longitudinal direction to compensate for the longitudinal shortening caused by the transverse deformation of the first compliant four-bar mechanism (302); The second compliance mechanism (5) comprises a pair of second compliance components symmetrically arranged in the transverse direction, and the second compliance components connect the first fine-motion platform (2) and the second fine-motion platform (4); The second compliant component comprises a second piezoelectric ceramic driver (501), a second compliant four-bar mechanism (502), and a second compliant parallel guiding mechanism (503); the second piezoelectric ceramic driver (501) is fixed on the first micro-motion platform (2); the second piezoelectric ceramic driver (501) is extended and retracted in the longitudinal direction to drive the second compliant four-bar mechanism (502) to undergo longitudinal deformation; the second compliant parallel guiding mechanism (503) is deformed in the transverse direction to compensate for the transverse shortening caused by the longitudinal deformation of the second compliant four-bar mechanism (502).

2. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 1, characterized in that: The fixed platform (1) is in the shape of a circular ring.

3. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 2, characterized in that: The first fine-motion platform (2) is in the shape of a circular ring, and the outer diameter of the first fine-motion platform (2) is smaller than the inner diameter of the fixed platform (1).

4. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 3, characterized in that: The second fine-motion platform (4) is circular, and the diameter of the second fine-motion platform (4) is smaller than the inner diameter of the first fine-motion platform (2).

5. The two-degree-of-freedom compliant precision positioning platform capable of achieving motion decoupling as claimed in claim 4, characterized in that: The fixed platform (1), the first micro-motion platform (2), and the second micro-motion platform (4) are in a nested structure.

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