Three-dimensional printing system and method of using the same

Abstract

The present invention provides a three-dimensional printing system, a method for making metal micro-nano structures and a method for making micro-nano structures on a film substrate using the same. The three-dimensional printing system comprises: a conveying mechanism for conveying a transparent film conveyor belt, a feeding mechanism, a transparent support plate arranged above the projection window of a machine, a loading mechanism and an imaging mechanism. The feeding mechanism comprises at least one feeding device arranged above the transparent film conveyor belt, the loading mechanism comprises a loading plate and a loading driving component, and the loading driving component drives the loading plate to approach or move away from the transparent film conveyor belt; the imaging mechanism is located below the projection window of the machine and is used to generate a predetermined projection pattern. The three-dimensional printing system in the present invention can not only realize normal three-dimensional printing, but also can make micro-nano structures on film substrates, and can also make metal micro-nano structures.

Description

Technical Field

[0001] The present invention relates to the technical field of three-dimensional printing, and in particular to a three-dimensional printing system and a method for using the same. Background Art

[0002] As a forward-looking and strategic technology, 3D printing technology has important applications in high-end fields such as aerospace, biomedicine, weapons and equipment, automobiles, and molds. In the field of biomedicine, 3D printing technology provides a new method for flexible preparation of biochips and biochemical devices, and also provides new research methods and platforms for the fields of biomaterials and artificial organs, realizing the production of complex 3D carrier scaffolds. However, the existing 3D printing technology still cannot meet the application requirements in terms of printing accuracy and printing format. For biological application fields, 3D printing technology has not effectively solved the problem that printing accuracy and printing size cannot be taken into account. On the one hand, the photocuring stereo modeling technology based on two-photon or laser direct writing can realize the printing of complex structures as small as 0.1 microns, but it is not suitable for biochip production due to the limitation of printing size (less than a few hundred microns). On the other hand, the photocuring stereo modeling technology based on projection is limited by the printing accuracy (greater than 30 microns) and cannot meet the production requirements of tiny structures in biochips. At present, the lateral resolution of commercial 3D printers is mostly only 50 microns, and the depth resolution is about 50-100 microns. At the same time, the surface roughness of biochips printed by existing 3D printing technology is relatively large (~±2.5 microns), which brings inconvenience to biological detection.

[0003] Therefore, it is necessary to propose an improved solution to overcome the above problems. Summary of the invention

[0004] One of the purposes of the present invention is to provide a three-dimensional printing system, which can realize three-dimensional printing and meet the requirements of printing accuracy in the biomedical field.

[0005] A second object of the present invention is to provide a method for manufacturing metal micro-nano structures using a three-dimensional printing system, thereby expanding the application scope of the three-dimensional printing system.

[0006] A third object of the present invention is to provide a method for fabricating a micro-nano structure on a thin film substrate using a three-dimensional printing system, thereby expanding the application scope of the three-dimensional printing system.

[0007] To solve the above problems, according to one aspect of the present invention, a three-dimensional printing system is provided, which includes: a conveying mechanism, used to transport a transparent film conveyor belt at a first position to a second position; a loading mechanism, including at least one loading device arranged above the transparent film conveyor belt, the loading device including a material storage chamber, a discharge port, and a discharge drive component, the material storage chamber is used to place printing materials, the discharge port is connected to the material storage chamber, and the discharge drive component discharges the printing materials from the discharge port to the transparent film conveyor belt; a transparent support plate, which is arranged above the projection window of the machine and is located below the transparent film conveyor belt; a loading mechanism, including a loading plate and a loading drive component, the loading plate is located above the transparent film conveyor belt and is arranged opposite to the transparent support plate, and the loading drive component drives the loading plate to approach or move away from the transparent film conveyor belt; an imaging mechanism, which is located below the projection window of the machine, and is used to generate a predetermined projection pattern.

[0008] In a preferred embodiment, the three-dimensional printing system also includes: a rolling mechanism located between the loading device and the loading mechanism, the rolling mechanism including a rolling part located above the transparent film conveyor belt and used to flatten the printing material; a supporting part located below the transparent film conveyor belt and supporting the transparent film; the gap between the rolling part and the supporting part is adjustable, and the thickness of the thin layer of printing material is adjusted by adjusting the gap.

[0009] In a preferred embodiment, the feeding mechanism further includes a translation driving component for driving each feeding device to move along the width direction of the transparent film conveyor belt to control the falling position of the printing material in the width direction of the transparent film conveyor belt.

[0010] In a preferred embodiment, the three-dimensional printing system also includes: a laminating mechanism located on both sides of the carrier plate, wherein when the transparent film conveyor belt transports the printing material to the transparent support plate, the laminating mechanism fixes the transparent film conveyor belt on the machine table, and after the printing material is solidified, the laminating mechanism releases the transparent film conveyor belt.

[0011] In a preferred embodiment, the conveying mechanism also includes a unwinding disk located at a first position, a driving roller and a winding disk located at a second position, the unwinding disk is wound with a transparent film conveyor belt, the winding disk is used to wind up the transparent film conveyor belt, and the driving roller drives the transparent film conveyor belt to pass through the feeding mechanism and the loading mechanism in sequence and move toward the direction close to the winding disk.

[0012] In a preferred embodiment, the imaging mechanism includes a light source, a beam shaper, a DMD light modulator, a plurality of reflectors and a projection lens with interchangeable magnification, wherein the beam shaper is used to shape the light beam emitted by the light source; the DMD light modulator is used to generate a planar projection pattern from the shaped light beam; the reflector is used to reflect the projection pattern to the projection lens; the projection lens projects the projection pattern after reducing it according to the magnification of the lens, and the imaging mechanism also includes a computer and a controller, wherein the computer is used to provide displacement data and divide the exposure data into a series of pattern files in strips, and send the displacement data and pattern files to the controller, wherein the controller sequentially uploads the pattern files to the DMD light modulator so that the DMD light modulator generates a projection pattern, and wherein the controller controls the projection lens to move in a direction close to the transparent film conveyor belt according to the displacement data. The imaging mechanism also includes a computer and a controller, wherein the computer is used to provide displacement data and divide the exposure data into a series of pattern files in strips, and send the displacement data and pattern files to the controller, wherein the controller sequentially uploads the pattern files to the DMD light modulator so that the DMD light modulator generates a projection pattern, and wherein the controller controls the projection lens to move in a direction close to the transparent film conveyor belt according to the displacement data. The displacement data and pattern file are sent to the controller, and the controller uploads the pattern file to the DMD light modulator in a timed manner, so that the DMD light modulator generates a projection pattern. The controller controls the projection lens to move toward the direction close to the transparent film conveyor belt through the displacement data. The imaging mechanism also includes a CCD monitoring system and a photoelectric detector. The CCD monitoring system is used to monitor the printing situation and the morphology and layer thickness of the current printing layer, and send the printing data to the computer. The computer can calculate the printing accuracy through the printing data. The controller controls the CCD monitoring system through the displacement data) to move synchronously with the projection lens; the photoelectric detector is used to collect the light reflected from the surface of the printing material, and send the generated morphology data to the controller. The controller adjusts the projection focal length of the projection lens according to the morphology data. The imaging mechanism also includes a yellow light source. The light emitted by the yellow light source is reflected to the projection lens through the reflector. The CCD monitoring system monitors the height of the four corners of the transparent support plate, and is used to adjust the support plate to be parallel to the object loading platform.

[0013] According to another aspect of the present invention, the present invention provides a method for making micro-nano structures on a film substrate using the three-dimensional printing system described above. The method comprises: coating a hydrophobic film on the lower surface of a substrate fixed on a carrier; the loading device discharges the printing material therein from the discharge port to the transparent film conveyor belt; when the transparent film conveyor belt carrying the printing material moves to the bottom of the carrier plate, the carrier plate moves downward by a predetermined distance so that the substrate fixed on the carrier plate and the transparent support plate clamp the transparent film conveyor belt and the thin layer of printing material carried on the transparent film conveyor belt; the imaging mechanism generates a predetermined projection pattern, and irradiates the predetermined projection pattern through the transparent support plate and the transparent film conveyor belt on the thin layer of printing material on the transparent film conveyor belt, so that the irradiated thin layer of printing material is cured to form a layer of a predetermined printing structure; when the carrier plate is driven to move upward, the cured predetermined printing structure is fixed on the transparent film conveyor belt, and then the uncured part of the thin layer of printing material is removed, thereby forming a predetermined printing structure on the transparent film conveyor belt.

[0014] In a preferred embodiment, the thin layer of printing material is formed by a roller mechanism in front of the carrier plate pressing the printing material on the transparent film conveyor belt, or by a substrate fixed on the carrier plate directly pressing the printing material on the transparent film conveyor belt.

[0015] According to another aspect of the present invention, the present invention provides a method for making a metal micro-nano structure using the above-mentioned three-dimensional printing system, the method comprising: performing three-dimensional printing under a substrate of a conductive medium to form a three-dimensional printed structure, wherein the substrate is fixed to the carrier plate; removing the printing material remaining on the substrate having the three-dimensional printed structure; using an electroforming growth process to grow a metal material on a portion other than the three-dimensional printed structure; and using a strong removal solution to melt the three-dimensional printed structure.

[0016] In a preferred embodiment, the step of performing three-dimensional printing to form a three-dimensional printed structure under the substrate of the conductive medium includes: the loading device discharges the printing material therein from the discharge port to the transparent film conveyor belt; when the transparent film conveyor belt carries the printing material and moves to the bottom of the carrier plate, the carrier plate moves downward by a predetermined distance so that the substrate fixed on the carrier plate and the transparent support plate clamp the transparent film conveyor belt and the thin layer of printing material carried on the transparent film conveyor belt; the imaging mechanism generates a predetermined projection pattern, and irradiates the predetermined projection pattern through the transparent support plate and the transparent film conveyor belt onto the thin layer of printing material on the transparent film conveyor belt, so that the irradiated thin layer of printing material is cured to form a layer of predetermined printed structure; the carrier plate is driven to move upward so that the substrate with the predetermined printed structure also moves upward, and the uncured part of the thin layer of printing material remains on the transparent film conveyor belt and is subsequently cured by the residual material curing lamp and then conveyed away by the transparent film conveyor belt; after completing the printing of a layer of structure on the lower surface of the substrate, repeating the above steps to continue to complete the printing of the next layer of structure.

[0017] In a preferred embodiment, the thin layer of printing material is formed by a roller mechanism in front of the carrier plate pressing the printing material on the transparent film conveyor belt, or by a substrate fixed on the carrier plate directly pressing the printing material on the transparent film conveyor belt.

[0018] Compared with the prior art, the 3D printing system provided by the present invention can realize 3D printing and meet the requirements of printing accuracy in the biomedical field. In addition, during 3D printing, a transparent film is used to transmit the printing material, so that each layer of the printed graphics can be exposed independently, and the exposure between layers does not affect each other, fundamentally eliminating the influence of traditional printing cumulative exposure on structural widening, and the 3D printing accuracy is high. The 3D printing system in the present invention can not only realize normal 3D printing, but also can make micro-nano structures on film substrates, and can also make metal micro-nano structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the structure of a three-dimensional printing system in one embodiment of the present invention;

[0020] Figure 2 It is a schematic diagram of a top view of a part of the three-dimensional printing system of the present invention, showing a loading device and a transparent film conveyor belt;

[0021] Figure 3 It is a three-dimensional schematic diagram of a partial area of ​​the three-dimensional printing system of the present invention, which shows that a transparent support plate or a photolithography plate is arranged on the projection window of the machine platform;

[0022] Figure 4 It is a cross-sectional schematic diagram of a partial area of ​​the three-dimensional printing system of the present invention, which shows that a transparent support plate or a photolithography plate is arranged on the projection window of the machine platform;

[0023] Figure 5 It is a structural schematic diagram of a partial area of ​​the three-dimensional printing system of the present invention, which shows the state in which the printing material is conveyed to the bottom of the carrying mechanism by the transparent film conveyor belt and the carrying mechanism has not fallen;

[0024] Figure 6 It is a structural schematic diagram of a partial area of ​​the three-dimensional printing system of the present invention, which shows the state where the printing material is conveyed to the bottom of the carrying mechanism by the transparent film conveyor belt and the carrying mechanism falls down;

[0025] Figure 7 is a structural schematic diagram of a partial area of ​​the three-dimensional printing system of the present invention, which shows a state in which the carrying mechanism is not lifted after the thin layer of printing material on the transparent film conveyor belt is irradiated by the projected image;

[0026] Figure 8 A schematic structural diagram of a partial area of ​​the three-dimensional printing system of the present invention is shown, which shows the state of the thin layer of printing material on the transparent film conveyor belt being lifted by the object-carrying mechanism after being illuminated by the projected image;

[0027] Fig. 9 A schematic diagram of a flow chart of a three-dimensional printing method of a three-dimensional printing system in the present invention;

[0028] Fig.10 It is a structural schematic diagram of a part of the area when the three-dimensional printing system in the present invention is used to make a micro-nano structure on a film substrate, which shows a carrier mechanism and a transparent film conveyor belt;

[0029] Fig.11 Schematic diagram of the process of making micro-nano structures on a film substrate, wherein (a) is a schematic diagram of a thin layer of printed material on a transparent film conveyor belt, (b) is a schematic diagram of the thin layer of printed material after being cured and printed, and (c) is a schematic diagram after removing the uncured portion of the thin layer of printed material;

[0030] Fig.12 Schematic diagram of the process of making metal micro-nano in one embodiment, wherein (a) is a schematic diagram of a structure in which a layer of printed structure is printed under a substrate of a conductive medium, (b) is a schematic diagram of a structure in which a portion other than the printed structure is grown as a metal material using an electroforming growth process; (c) is a schematic diagram of a structure after removing the printed structure;

[0031] Fig.13 A schematic flow chart of a method for fabricating a micro-nano structure on a thin film substrate in one embodiment is shown;

[0032] Fig.14 A schematic flow chart of a method for fabricating a metal micro-nano structure in one embodiment is shown. DETAILED DESCRIPTION

[0033] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0034] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0035] The present invention provides a three-dimensional printing system and a method for using the same, which can realize three-dimensional printing and meet the requirements of the biomedical field for printing accuracy, and can also support laser direct writing, realizing multiple functions of one device, and can also be called a laser direct writing and three-dimensional printing composite system.

[0036] System Introduction

[0037] Figure 1 Schematic diagram of the structure of the three-dimensional printing system 10 of the present invention. Figure 1 As shown, the system 10 includes a loading mechanism 11 , a conveying mechanism 12 , a transparent supporting plate 13 , a loading mechanism 14 and an imaging mechanism 16 .

[0038] Transmission mechanism

[0039] The conveying mechanism 12 is capable of conveying the transparent film conveyor belt 124 at the first position to the second position. In one embodiment, the conveying mechanism 12 includes an unwinding disk (121) at the first position, an active roller (122) and a winding disk (123) at the second position. The transparent film conveyor belt 124 is wound on the unwinding disk (121), and the winding disk (123) is used to wind up the transparent film conveyor belt 124. The active roller (122) is arranged behind the unwinding disk (121) and is used to drive the transparent film conveyor belt 124 to pass through the feeding mechanism 11 and the loading mechanism 14 in sequence and move toward the winding disk (123). In other embodiments, other transmission methods can also be used, as long as the transparent film conveyor belt 124 can be conveyed from the first position to the second position through the feeding mechanism 11 and the loading mechanism 14 in sequence.

[0040] The transparent film conveyor belt 124 is made of a light-transmissive material, that is, light can pass through the transparent film conveyor belt 124. In this embodiment, the transparent film conveyor belt 124 is arranged along the horizontal direction. The active roller 122 includes two symmetrical driving rollers, and the two surfaces of the transparent film conveyor belt 124 are in contact with the two driving rollers respectively.

[0041] Feeding mechanism

[0042] The feeding mechanism 11 includes at least one feeding device, which is arranged above the transparent film conveyor belt 124. Figure 1 Three feeding devices 11a, 11b and 11c are shown, and it is obvious that other numbers may be used in other embodiments. Each feeding device 11a, 11b or 11c has a material storage chamber for accommodating printing materials, a discharge port connected to the material storage chamber, and a discharge drive component for driving the printing materials in the material storage chamber out of the discharge port. The printing materials discharged from the discharge port of the feeding device fall on the transparent film conveyor belt 124 and move with the transparent film conveyor belt. The materials of the printing materials in each feeding device 11a, 11b and 11c can be different or the same, and can be set as needed. In this way, the printing materials in the specified feeding device can be discharged onto the transparent film conveyor belt 124 as needed, so that mixed printing of multiple materials can be achieved, which is of great significance for biological applications.

[0043] In a preferred embodiment, Figure 2 As shown, the feeding mechanism 11 further includes a translation driving component 112, which is used to drive each feeding device 11a, 11b and 11c to move along the width direction of the transparent film conveyor belt 124. The translation driving component drives each feeding device 11a, 11b and 11c to move along the width direction of the transparent film conveyor belt to control the falling position of the printing material in the width direction of the transparent film conveyor belt 124. In this way, by controlling the transmission of the transparent film conveyor belt 124 and controlling the position of the discharge port of each feeding device 11a, 11b and 11c loaded with different printing materials in the width direction of the transparent film conveyor belt 124, the position of the printing material in the length direction and width direction of the transparent film conveyor belt 124 can be set arbitrarily, and the control of the position of multiple printing materials in different regions on a two-dimensional plane is realized. In this way, the printing material in the designated feeding device is discharged to a predetermined position on the transparent film conveyor belt according to the setting.

[0044] The system 10 of the present invention can support three-dimensional multi-material mixed printing. The three-dimensional multi-material mixed printing is divided into single-layer multi-material mixed printing by region and multi-layer three-dimensional printing of different materials. Single-layer multi-material mixed printing by region is mainly achieved by controlling the transmission of the translation drive component 112 and the transparent conveyor belt, and multi-layer three-dimensional printing of different materials can be achieved by controlling the system 10 to send different printing materials when printing each layer.

[0045] Transparent support plate, object loading mechanism, film pressing mechanism, roller pressing mechanism, photolithography plate, imaging mechanism overview

[0046] like Figure 1 As shown, the transparent support plate 13 is located below the transparent film conveyor belt 124 and at the rear side of the loading device 11. The front and rear in this article are relative concepts, and the "front" may refer to the upstream of the transparent film conveyor belt 124 being conveyed, and the "rear" may refer to the downstream of the transparent film conveyor belt 124 being conveyed. Figure 3 and Figure 4 As shown, the transparent support plate 13 can be detachably arranged on the projection window 21 of the machine platform 20, wherein Figure 3 and 4 Only one part of the machine 20 is shown in FIG. When the transparent support plate 13 is arranged on the projection window 21 of the machine 20, the system can operate in a three-dimensional printing mode. Figure 3 and 4 As shown, after the transparent support plate 13 is removed, the photoresist plate 30 with photoresist can be placed on the projection window 21 of the machine 20, and the shape of the photoresist plate 30 can be the same as that of the transparent support plate 13. At this time, the system can operate in the laser direct writing mode, and the system 10 can be used as a laser direct writing machine. The transparent support plate 13 can be glass quartz, which has good light transmittance.

[0047] In a preferred embodiment, a vacuum adsorption hole is provided at the edge of the projection window 21 of the machine 20, and the transparent support plate 13 is adsorbed on the projection window 21 of the machine 20 through the vacuum adsorption hole. The photoresist plate 30 with photoresist can also be fixed on the projection window 21 of the machine 20 through the vacuum adsorption hole. At this time, the photoresist plate is turned upside down with the photoresist side facing down, and adsorbed on the projection window 21 of the machine through the vacuum adsorption hole.

[0048] The object-carrying mechanism 14 includes an object-carrying plate 142 and an object-carrying driving component 143. The object-carrying plate 142 is located above the transparent film conveyor belt 124 and is disposed opposite to the transparent support plate 13. The object-carrying driving component 143 drives the object-carrying plate to move closer to or away from the transparent film conveyor belt. Figure 5 and 6As shown, the carrier plate 142 of the carrier mechanism 14 is provided with vacuum adsorption holes, and the substrate 40 is fixed on the carrier plate 142 through the vacuum adsorption holes on the carrier plate 142. When the transparent film conveyor belt 124 carrying the printing material 50 moves to the bottom of the carrier plate 142, the carrier plate 142 moves downward by a predetermined distance so that the substrate 40 fixed on the carrier plate 142 and the transparent support plate 13 clamp the transparent film conveyor belt 124 and the printing material 50 carried on the transparent film conveyor belt.

[0049] In one embodiment, when the system 10 operates in the laser direct writing mode, the carrier plate 142 of the carrier mechanism 14 can be used as an automatic pick-and-place component for the photolithography plate 30 .

[0050] In an optional embodiment, the printing material discharged by the feeding device 11 falls on the transparent film conveyor belt and is directly brought to the position of the carrying mechanism 14 by the transparent film conveyor belt, such as Figure 5 As shown, at this time, the printing material 50 has not yet formed a uniform printing material thin layer 51, and the carrier plate 142 moves downward so that the substrate 40 fixed on the carrier plate 142 and the transparent support plate 13 clamp the transparent film conveyor belt 124 and the printing material carried on the transparent film conveyor belt, thereby forming the printing material 50 into a printing material thin layer 51 of a predetermined thickness, as shown in FIG. Figure 6 shown.

[0051] In another alternative embodiment, Figure 1 As shown, the system 10 includes a roller pressing mechanism 19 between the loading device 11 and the object carrier 14. The roller pressing mechanism 19 includes a roller pressing portion 191 and a support portion 192. The roller pressing portion 191 is located above the transparent film conveyor belt 124 and is used to flatten the printing material. The support portion 192 is located below the transparent film conveyor belt and supports the bottom of the transparent film conveyor belt. The support portion 192 can be a part of the machine table 20. The roller pressing portion 191 can roll the printing material loaded on the transparent film conveyor belt 124 with the cooperation of the support portion 192 to form a printing material thin layer 51. The gap between the roller pressing portion 191 and the support portion 192 is adjustable, and the thickness of the formed printing material thin layer 51 can be adjusted by adjusting the gap. In this way, the printing material 50 falling on the transparent film conveyor belt 124 has been processed into a printing material thin layer 51 before being conveyed to the object carrier 14.

[0052] In yet another optional embodiment, other solutions may be adopted, in which the printing materials carried on the transparent film conveyor belt 124 are arranged to form a printing material thin layer 51 before the printing materials are transported to the carrying device 14 .

[0053] In an alternative embodiment, if Figure 1 As shown, the system 10 further includes a laminating mechanism 17 located on both sides of the carrier plate 142. When the transparent film conveyor belt 124 transports the printing material to the transparent support plate 13, the laminating mechanism 17 fixes the transparent film conveyor belt 124 on the machine table 20 to keep the transparent film conveyor belt 124 flat and stable during the printing process so as to perform three-dimensional printing. After the printing material is solidified, the laminating mechanism 17 releases the transparent film conveyor belt.

[0054] Combined with reference Figure 7 and 8 As shown, the imaging mechanism 16 is located below the projection window 21 of the machine platform, and is used to generate a predetermined projection pattern 60. In the three-dimensional printing mode, the imaging mechanism 16 can irradiate the predetermined projection pattern onto the printing material thin layer 51 on the transparent film conveyor belt 124 through the transparent support plate 13 and the transparent film conveyor belt 142, so that the irradiated printing material thin layer 51 is solidified to form a layer of predetermined printing structure 52. In the laser direct mode, the imaging mechanism 16 can directly irradiate the predetermined projection pattern onto the photoresist on the photolithography plate 30 so that the irradiated photoresist forms a predetermined photolithography structure. The predetermined photolithography structure and the predetermined printing structure are both micro-nano structures.

[0055] In one embodiment, Figure 8 As shown, the cured predetermined printing structure 52 is fixed on the substrate 40, and the carrier plate 142 is driven to move upward so that the substrate 40 with the predetermined printing structure 52 also moves upward, and the uncured part 53 of the printing material remains on the transparent film conveyor belt 124 and is then conveyed away by the transparent film conveyor belt 124. The system 10 also includes a residual material curing lamp 18. The residual material curing lamp 18 is arranged above the transparent film conveyor belt 124 and at the rear side of the carrier mechanism 14, and can emit ultraviolet light to cure the remaining printing material after printing.

[0056] Combination Figure 5-8 As shown, after one layer of structure is printed on the lower surface of the substrate 40 , the next layer of structure can be printed on the substrate 40 in the same manner.

[0057] In one embodiment, the printing material is a photosensitive adhesive, and the imaging mechanism projects an ultraviolet curing light source. The portion of the printing material layer 51 irradiated by the ultraviolet curing light source will be cured, and the portion not irradiated will not be cured.

[0058] Specific structure of the imaging mechanism

[0059] In this embodiment, the imaging mechanism 16 includes a light source 160a, a beam shaper 161, a DMD light modulator 162, a plurality of reflectors 163, a projection lens 164 with interchangeable magnifications, a CCD monitoring system 165, a controller 166, a computer 167, a photodetector 168, a focusing light source 160b and a yellow light source 169.

[0060] The light source 160a is used to provide printing light required for printing. In this embodiment, the light source 160a of the imaging mechanism 16 is, for example, a UV light source, but is not limited thereto.

[0061] The beam shaper 161 is used to shape the light emitted by the light source 160a. In this embodiment, the beam shaper 161 can shape the light into a flat-top beam.

[0062] The DMD light modulator 162 is used to generate a planar projection pattern from the shaped light beam. In this embodiment, the DMD light modulator 162 can display a print pattern, so that the shaped light beam generates a projection pattern when passing through the DMD light modulator 162.

[0063] The reflector 163 is used to reflect the shaped light to the DMD light modulator 162 and reflect the projection pattern to the projection lens 164 .

[0064] The projection lens 164 is disposed opposite to the projection window 21 and is disposed below the transparent support plate 13 . The projection lens 164 can reduce the projection pattern according to the magnification of the lens and then project it onto the printing material layer 51 .

[0065] The CCD monitoring system 165 is used to monitor the printing situation and the morphology and thickness of the current printing layer, and send the printing data to the computer 167. The computer 167 can calculate the printing accuracy through the printing data. The controller 166 controls the CCD monitoring system 165 and the projection lens 164 to move synchronously through the displacement data; the photodetector 168 is used to collect the light reflected from the surface of the printing material, and send the generated morphology data to the controller 166. The controller 166 adjusts the projection focal length of the projection lens 164 according to the morphology data.

[0066] It should be noted that before three-dimensional printing, the transparent support plate 13 may be in an inclined state, and the carrier plate 142 will squeeze the transparent film conveyor belt 124. At this time, it is necessary to pre-print a layer of material on the transparent support plate 13 to ensure that the surface of the carrier plate 142 and the upper surface of the pre-printed material remain parallel. Specifically, the height of the four corners of the transparent support plate 13, that is, the inclination of the transparent support plate 13, is first monitored by the CCD monitoring system 165. Then, the computer sets the layer thickness of the pre-printed material according to the inclination of the transparent support plate 13 to ensure that the surface of the carrier plate 142 and the upper surface of the pre-printed material remain parallel.

[0067] The computer 167 is used to provide displacement data and divide the exposure data into a series of strip pattern files, and send the displacement data and the pattern files to the controller 166. In this embodiment, the computer 167 can divide the exposure data into a series of strip pattern files (BMP files) with a width equal to or less than the width pixel of the DMD light modulator 162.

[0068] The controller 166 is used to control the coordinated operation of various components of the imaging mechanism 16, such as data import, motion synchronization control, focus control, etc. Specifically, the controller 166 uploads the pattern file to the DMD light modulator 162 according to the timing of the received pattern file. At this time, the DMD light modulator 162 can display the printing pattern in sequence, so that the corresponding projection pattern is generated when the shaped light passes through the DMD light modulator 162. The controller 166 also controls the projection lens 164 to move along the length direction of the transparent film conveyor belt 124 according to the received displacement data. In this embodiment, the imaging mechanism 16 of the present invention uses the timing synchronization technology. Each time the DMD light modulator 162 sends out a projection pattern for printing, the pattern file is translated on the DMD light modulator 162 by a certain pixel, and another projection pattern is sent out accordingly. At the same time, the controller 166 controls the projection lens 164 to move a certain distance according to the received displacement data.

[0069] The photodetector 168 is used to collect light reflected from the surface of the printing material and send the generated shape data to the controller 166. The controller 166 adjusts the projection focal length of the projection lens 164 according to the shape data.

[0070] The focused light source 160b is used to provide light before three-dimensional printing, thereby adjusting the focal length of the projection lens 164. The light emitted by the focused light source 160b is reflected to the projection lens 164 and the photodetector 168 through multiple reflectors 163. The projection lens 164 projects on the surface of the transparent film conveyor belt 124. At the same time, the photodetector 168 collects the light reflected from the surface of the transparent film conveyor belt 124 and sends the differential shape data to the controller 166. The controller 166 adjusts the projection focal length of the projection lens 164 according to the shape data.

[0071] The yellow light source 169 is used to monitor whether the transparent support plate 13 is parallel to the carrier plate 142. The light emitted by the yellow light source 169 is reflected by the reflector 163 to the projection lens 164, and the CCD monitoring system 165 monitors the height of the four corners of the transparent support plate 13. By pre-printing a layer of material, the surface of the carrier plate 142 and the upper surface of the pre-printed material are kept parallel.

[0072] 3D Printing and Laser Direct Writing

[0073] The following is an introduction to the three-dimensional printing method of the system 10 of the present invention. Fig. 9 FIG. 1 is a flow chart of a three-dimensional printing method 300 of the system 10 of the present invention. As described above, in the three-dimensional printing mode, the transparent support plate 13 is disposed on the projection window 21 of the machine platform 20. Fig. 9 As shown, the three-dimensional printing method 300 includes the following steps.

[0074] In step 310 , the loading device 11 a , 11 b or 11 c discharges the printing material therein from the discharge port to the transparent film conveyor belt 124 .

[0075] Step 320, feeding and pressing step, specifically, combined with Figure 5-6 As shown, when the transparent film conveyor belt 124 carries the printing material and moves to the bottom of the carrier plate 142, the carrier plate 142 moves downward by a predetermined distance so that the substrate 40 fixed on the carrier plate and the transparent support plate 13 clamp the transparent film conveyor belt 124 and the printing material thin layer 51 carried on the transparent film conveyor belt 124. When the transparent film conveyor belt moves the printing material to the roller pressing structure 19, the printing material is flattened into the printing material thin layer 51. The printing material thin layer 51 can also be formed by the substrate 40 fixed on the carrier plate 142 directly pressing the printing material 50. The thickness of the printing material thin layer 51 can be 2um to 20um.

[0076] Step 330, printing and curing step, specifically, combined with Figure 7 As shown, the imaging mechanism 16 generates a predetermined projection pattern, and irradiates the predetermined projection pattern onto the printing material layer 51 on the transparent film conveyor belt 124 through the transparent support plate 13 and the transparent film conveyor belt 124, so that the irradiated printing material layer 51 is cured to form a layer of predetermined printing structure 52.

[0077] Step 340, stripping step, combining Figure 8As shown, the carrier plate 142 is driven to move upward so that the substrate 40 with the predetermined printing structure 52 also moves upward, and the uncured portion 53 of the printing material layer 51 remains on the transparent film conveyor belt 124 and is then conveyed away by the transparent film conveyor belt 124. Afterwards, the residual material curing lamp 18 emits ultraviolet light to cure the remaining printing material 53 after printing.

[0078] In this way, a layer of structure is printed on the lower surface of the substrate 40 , and then one or more layers of structure can be printed on the lower surface of the substrate 40 in the same manner.

[0079] In the three-dimensional printing mode, the method of use 300 also includes fixing the transparent film conveyor belt on the machine platform by a laminating mechanism when the transparent film conveyor belt transports the printing material to the transparent support plate, and releasing the transparent film conveyor belt by the laminating mechanism after the printing material is solidified.

[0080] The transparent support plate is removed from the projection window 21 of the machine 20, and the photoresist plate 30 with photoresist is placed on the projection window 21. At this time, the system 10 of the present invention can be used as a laser direct writer. At this time, the imaging mechanism 16 directly irradiates the predetermined projection pattern onto the photoresist on the photoresist plate 30 so that the irradiated photoresist forms a predetermined photolithographic structure. Since in the laser direct mode, the light is directly projected onto the photoresist without passing through the transparent support plate 13 and the transparent film conveyor belt 142, its photolithography accuracy is much higher than that in the three-dimensional printing mode.

[0081] It can be seen that the three-dimensional printing system provided by the present invention can not only realize three-dimensional printing, but also meet the requirements of printing accuracy in the biomedical field, and can also support laser direct writing. In addition, during three-dimensional printing, a transparent film is used to transmit the printing material, so that each layer of the printed graphics can be independently exposed, and the exposure between layers does not affect each other, fundamentally eliminating the influence of traditional printing cumulative exposure on structural widening, and the three-dimensional printing accuracy is high. In addition, the three-dimensional printing system of the present invention realizes mixed printing of multiple materials by using a feeding device equipped with printing materials of different materials, which is of great significance to biological applications.

[0082] The three-dimensional printing system 10 of the present invention uses a DMD light modulator 162 to emit a projection pattern, and the brightness of the projection pattern in different areas in the same plane can be controlled, meeting the needs of three-dimensional printing of different shapes in the same cross section. The three-dimensional printing system 10 of the present invention adds a film pressing mechanism 13 and places the active roller 122 in front to keep the transparent film conveyor belt 124 flat. When performing three-dimensional printing, the film pressing mechanism 13 is used to press the transparent film conveyor belt 124 to improve the printing accuracy. At the same time, a yellow light source 169 is added, and the yellow light source 169 is used to detect whether the transparent support plate 13 and the carrier plate 142 are parallel. By printing a layer of pre-printed layer, the surface of the carrier plate 142 and the surface of the pre-printed layer are kept parallel, which helps to improve the printing accuracy. The three-dimensional printing system 10 of the present invention has high printing accuracy, can achieve a two-dimensional structure accuracy of 5um, a layer thickness accuracy of 5um, can well meet the specific requirements of biological devices for molding size (for example, the size of microfluidic biological devices is 1 to 4 inches), and provides a technical platform with innovative significance for the design of biological devices and research in the field of biomedicine.

[0083] In addition, the three-dimensional printing system 10 of the present invention can achieve mixed printing of multiple materials by coating the printing material layer by layer, which is of great significance to biological applications. For example, taking the three-dimensional printing of simulating human ears as an example, it requires mixed printing of cartilage-like materials, muscle-like materials and muscle fibers to achieve it. The loading device 11a can be used to provide cartilage-like materials, the loading device 11b can be used to provide muscle-like materials, and the loading device 11c can be used to provide muscle fibers. During three-dimensional printing, the loading devices 11a, 11b and 11c are controlled to feed materials in sequence to achieve mixed printing.

[0084] Method for making micro-nano structure on thin film substrate

[0085] Fig.13 FIG. 4 is a flow chart of a method 400 for fabricating a micro-nano structure on a thin film substrate using the system 10 of the present invention in one embodiment. Fig.13 As shown, the method 400 includes the following steps.

[0086] Step 405, a hydrophobic film 70 is applied to the lower surface of the substrate 40 fixed on the carrier 142, such as Fig.10 As shown;

[0087] Step 410, the loading device discharges the printing material therein from the discharge port to the transparent film conveyor belt;

[0088] In step 310 , the loading device 11 a , 11 b or 11 c discharges the printing material therein from the discharge port to the transparent film conveyor belt 124 .

[0089] Step 420 is a feeding and pressing step. Specifically, when the transparent film conveyor belt 124 carries the printing material and moves to the bottom of the carrier plate 142, the carrier plate 142 moves downward by a predetermined distance so that the substrate 40 fixed on the carrier plate and the transparent support plate 13 clamp the transparent film conveyor belt 124 and the printing material thin layer 51 carried on the transparent film conveyor belt 124. When the transparent film conveyor belt moves the printing material to the roller pressing structure 19, the printing material is flattened into the printing material thin layer 51. The printing material thin layer 51 can also be formed by the substrate 40 fixed on the carrier plate 142 directly pressing the printing material 50.

[0090] Step 430 is a printing and curing step. Specifically, the imaging mechanism 16 generates a predetermined projection pattern 60, and irradiates the predetermined projection pattern 60 onto the printing material thin layer 51 on the transparent film conveyor belt 124 through the transparent support plate 13 and the transparent film conveyor belt 124, so that the irradiated printing material thin layer 51 is cured to form a layer of predetermined printing structure 52.

[0091] Step 440, stripping step, combining Fig.11 As shown, when the carrier plate 142 is driven to move upward, the cured predetermined printing structure 52 is fixed on the transparent film conveyor belt 124, and then the uncured portion of the thin layer of printing material is removed, thereby forming a predetermined printing structure 52 on the transparent film conveyor belt 124.

[0092] It can be seen that the steps of the method for making a micro-nano structure on a thin film substrate are substantially the same as the steps of the three-dimensional printing method 300, except that:

[0093] The former requires coating a hydrophobic film 70 on the lower surface of the substrate 40, such as Fig.10 ;

[0094] In the peeling step, the cured micro-nano structure will not adhere to the substrate 40, but remain on the transparent film conveyor belt 124. This is because the surface of the substrate 40 is coated with a hydrophobic film 70, and the adhesion between the cured micro-nano structure and the substrate 40 is less than the adhesion between the cured micro-nano structure and the transparent film conveyor belt 124.

[0095] After the peeling step, the cured micro-nano structure and the uncured portion 53 of the printed material thin layer 51 are connected to the transparent film conveyor belt 124. Fig.11 As shown in (b), it is necessary to subsequently remove the uncured portion 53 of the printing material thin layer 51, thereby forming a predetermined printing structure 52 on the transparent film conveyor belt 124, as shown in FIG. Fig.11 as shown in (c).

[0096] Fig.10 The schematic diagram of the structure of a part of the system of the present invention when making micro-nano structures on a thin film substrate shows the object-carrying mechanism and the transparent film conveyor belt. Fig.11 Schematic diagram of the process of making micro-nano structures on a film substrate, wherein (a) is a schematic diagram of a thin layer of printing material 51 on a transparent film conveyor belt, (b) is a schematic diagram of the thin layer of printing material 51 after being cured and printed, and (c) is a schematic diagram after removing the uncured portion of the thin layer of printing material 51.

[0097] The method for manufacturing a micro-nano structure on a thin film substrate in the present invention is simpler than the traditional method for manufacturing a micro-nano structure on a thin film substrate, and the precision of the manufactured micro-nano structure is higher.

[0098] Method for making metal micro-nano structure

[0099] When manufacturing the metal micro-nano structure, a substrate 40 of a conductive medium is required, such as ITO glass, a metal substrate, etc.

[0100] Fig.14 FIG. 1 is a flow chart showing a method for making a metal micro-nano structure using the system 10 of the present invention in one embodiment. Fig.14 As shown, the method 500 includes the following steps.

[0101] Step 510, three-dimensional printing is performed under the substrate 40 of the conductive medium to form a three-dimensional printed structure, wherein the substrate 40 is fixed on the carrier plate 142, and the three-dimensional printed structure can be one layer or more layers, such as Fig.12 As shown in (a), a layer of printed structure 52 is exemplarily given.

[0102] Step 520 , removing the remaining printing material on the substrate 40 having the three-dimensional printing structure formed thereon.

[0103] Step 530, using an electroforming growth process to grow the metal material 80 outside the three-dimensional printed structure, such as Fig.12 (b)

[0104] Step 540, using a strong removal solution to melt the 3D printed structure, thus completing the production of the metal micro-nano structure, that is, the metallization of the 3D printed structure, such as Fig.12 (c) as shown.

[0105] Fig.12Schematic diagram of the metallization process of the printed structure in one embodiment, wherein (a) is a schematic diagram of the structure in which a layer of printed structure 52 is printed under a substrate 40 of a conductive medium, (b) is a schematic diagram of the structure in which a metal material 80 is grown on a portion outside the printed structure 52 by an electroforming growth process; and (c) is a schematic diagram of the structure after the printed structure 52 is removed.

[0106] The three-dimensional printing method 300 described above can be used to perform three-dimensional printing under the substrate 40 of the conductive medium to form a three-dimensional printed structure, and the detailed steps will not be repeated here.

[0107] The method for manufacturing a metal micro-nano structure in the present invention is simpler than the conventional method for manufacturing a metal micro-nano structure, and the precision of the manufactured metal micro-nano structure is higher.

[0108] In this document, the terms "comprises," "comprising," or any other variations thereof, are intended to cover a non-exclusive inclusion of elements other than those listed and may also include additional elements not expressly listed.

[0109] In this document, the directional words such as front, back, top, and bottom are defined by the positions of the components in the drawings and the positions of the components relative to each other, and are only for the sake of clarity and convenience in expressing the technical solution. It should be understood that the use of the directional words should not limit the scope of protection claimed in this application.

[0110] In the absence of conflict, the above embodiments and features in the embodiments may be combined with each other.

[0111] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A three-dimensional printing system, characterized in that: It includes: A conveying mechanism, used for conveying the transparent film conveyor belt at the first position to the second position; A feeding mechanism, comprising at least one feeding device arranged above the transparent film conveyor belt, the feeding device comprising a material storage chamber, a material discharge port, and a material discharge driving component, the material storage chamber is used to place printing materials, the material discharge port is connected to the material storage chamber, and the material discharge driving component discharges the printing materials from the material discharge port onto the transparent film conveyor belt; A transparent support plate is arranged above the projection window of the machine platform and below the transparent film conveyor belt; The object-carrying mechanism comprises an object-carrying plate and an object-carrying driving component, wherein the object-carrying plate is located above the transparent film conveyor belt and is arranged opposite to the transparent supporting plate, and the object-carrying driving component drives the object-carrying plate to approach or move away from the transparent film conveyor belt; An imaging mechanism, located below the projection window of the machine platform, for generating a predetermined projection pattern; The transparent support plate can be detachably arranged on the projection window of the machine, and the edge of the projection window of the machine is provided with a vacuum adsorption hole, and the transparent support plate is adsorbed on the projection window of the machine through the vacuum adsorption hole; After the transparent support plate is removed, the photoresist plate with the photoresist can also be fixed on the projection window of the machine through the vacuum adsorption hole; The loading plate of the loading mechanism is provided with vacuum adsorption holes, and the substrate is fixed on the loading plate through the vacuum adsorption holes on the loading plate; The carrier plate of the carrier mechanism can be used as an automatic pick-up and place component for the photolithography plate.

2. The three-dimensional printing system according to claim 1, characterized in that: It also includes: a rolling mechanism located between the feeding device and the object carrying mechanism, the rolling mechanism including a rolling part located above the transparent film conveyor belt and used to flatten the printing material; a supporting part located below the transparent film conveyor belt and supporting the transparent film; The gap between the rolling part and the supporting part is adjustable, and the thickness of the printing material layer is adjusted by adjusting the gap.

3. The three-dimensional printing system according to claim 1, characterized in that: The feeding mechanism also includes a translation driving component for driving each feeding device to move along the width direction of the transparent film conveyor belt to control the falling position of the printing material in the width direction of the transparent film conveyor belt.

4. The three-dimensional printing system according to claim 1, characterized in that: The materials of the printing materials in each feeding device are the same or different.

5. The three-dimensional printing system according to claim 1, characterized in that: It also includes: The laminating mechanism is located on both sides of the carrier plate, wherein when the transparent film conveyor belt transports the printing material to the transparent support plate, the laminating mechanism fixes the transparent film conveyor belt on the machine table, and after the printing material is solidified, the laminating mechanism releases the transparent film conveyor belt.

6. The three-dimensional printing system according to claim 1, characterized in that: The conveying mechanism also includes an unwinding disk located at a first position, an active roller and a winding disk located at a second position, a transparent film conveyor belt is wound on the unwinding disk, the winding disk is used to wind up the transparent film conveyor belt, and the active roller drives the transparent film conveyor belt to pass through the feeding mechanism and the loading mechanism in sequence and move toward the direction close to the winding disk.

7. The three-dimensional printing system according to claim 1, characterized in that: The imaging mechanism includes a light source, a beam shaper, a DMD light modulator, a plurality of reflectors and a projection lens with interchangeable magnification. The beam shaper is used to shape the light beam emitted by the light source; The DMD light modulator is used to generate a planar projection pattern from the shaped light beam; The reflector is used to reflect the projection pattern to the projection lens; The projection lens projects the projection pattern after reducing it according to the magnification of the lens. The imaging mechanism also includes a computer and a controller. The computer is used to provide displacement data and divide the exposure data into a series of pattern files, and send the displacement data and pattern files to the controller. The controller sequentially uploads the pattern files to the DMD light modulator to enable the DMD light modulator to generate a projection pattern. The controller controls the projection lens to move toward the direction close to the transparent film conveyor belt through the displacement data. The imaging mechanism also includes a CCD monitoring system and a photoelectric detector. The CCD monitoring system is used to monitor the printing situation and the morphology and thickness of the current printing layer, and send the printing data to the computer. The computer can calculate the printing accuracy through the printing data. The controller controls the CCD monitoring system through the displacement data) to move synchronously with the projection lens; The photoelectric detector is used to collect light reflected from the surface of the printing material and send the generated shape data to the controller, and the controller adjusts the projection focal length of the projection lens according to the shape data. The imaging mechanism also includes a yellow light source, the light emitted by the yellow light source is reflected to the projection lens through the reflector, and the CCD monitoring system monitors the height of the four corners of the transparent support plate, and is used to adjust the support plate to be parallel to the object carrier plate.

8. A method for fabricating a micro-nano structure on a thin film substrate using the three-dimensional printing system according to any one of claims 1 to 7, characterized in that: The method comprises: A hydrophobic film is applied to the lower surface of the substrate fixed on the carrier plate; The loading device discharges the printing material therein from the discharge port to the transparent film conveyor belt; When the transparent film conveyor belt carrying the printing material moves to the bottom of the carrier plate, the carrier plate moves downward by a predetermined distance so that the substrate fixed on the carrier plate and the transparent support plate clamp the transparent film conveyor belt and the thin layer of printing material carried on the transparent film conveyor belt; The imaging mechanism generates a predetermined projection pattern, and irradiates the predetermined projection pattern onto the printing material thin layer on the transparent film conveyor belt through the transparent support plate and the transparent film conveyor belt, so that the irradiated printing material thin layer is solidified to form a layer of predetermined printing structure; When the carrier plate is driven to move upward, the cured predetermined printing structure is fixed on the transparent film conveyor belt, and then the uncured part of the printing material layer is removed, thereby forming a predetermined printing structure on the transparent film conveyor belt.

9. The method according to claim 8, characterized in that The thin layer of printing material is formed by the printing material carried on the transparent film conveyor belt being rolled by a rolling mechanism in front of the carrier plate, or by the printing material carried on the transparent film conveyor belt being directly pressed by a substrate fixed on the carrier plate.

10. A method for manufacturing a metal micro-nano structure using the three-dimensional printing system according to any one of claims 1 to 7, characterized in that: The method comprises: Performing three-dimensional printing under a substrate of a conductive medium to form a three-dimensional printed structure, wherein the substrate is fixed on the carrier plate; Removing the remaining printing material on the substrate having the three-dimensional printing structure; Using an electroforming growth process to grow metal material at the portion outside the three-dimensional printed structure; The 3D printed structure is melted away using a strong removal solution.

11. The method according to claim 10, characterized in that The steps of performing three-dimensional printing to form a three-dimensional printed structure under the substrate of the conductive medium include: The loading device discharges the printing material therein from the discharge port to the transparent film conveyor belt; When the transparent film conveyor belt carrying the printing material moves to the bottom of the carrier plate, the carrier plate moves downward by a predetermined distance so that the substrate fixed on the carrier plate and the transparent support plate clamp the transparent film conveyor belt and the thin layer of printing material carried on the transparent film conveyor belt; The imaging mechanism generates a predetermined projection pattern, and irradiates the predetermined projection pattern onto the printing material thin layer on the transparent film conveyor belt through the transparent support plate and the transparent film conveyor belt, so that the irradiated printing material thin layer is solidified to form a layer of predetermined printing structure; The carrier plate is driven to move upward so that the substrate with the predetermined printing structure also moves upward, and the uncured portion of the thin layer of printing material remains on the transparent film conveyor belt and is subsequently cured by the residual material curing lamp and then conveyed away by the transparent film conveyor belt; After one layer of structure is printed on the lower surface of the substrate, the above steps are repeated to continue printing the next layer of structure.

12. The method according to claim 10, characterized in that The thin layer of printing material is formed by the printing material carried on the transparent film conveyor belt being rolled by a rolling mechanism in front of the carrier plate, or by the printing material carried on the transparent film conveyor belt being directly pressed by a substrate fixed on the carrier plate.

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