Correction method, correction device, computer readable storage medium and computer equipment

Abstract

The present invention discloses a correction method, a correction device, a computer-readable storage medium and a computer device, wherein the correction method of one embodiment includes: receiving a detection data text output by a device to be corrected, the detection data text includes multiple groups of detection coordinate data, and the detection coordinate data is the detection coordinate value of multiple sample points of a preset sample piece collected by a collection device of the device to be corrected; importing a standard data text of the preset sample piece; comparing the detection data text with the standard data text to generate a coordinate comparison file; obtaining the device center value and the optical center coordinate deviation value of the collection device according to the coordinate comparison file; and correcting the device to be corrected according to the device center value and the optical center coordinate deviation value. The correction method provided by the present invention generates a coordinate comparison file by comparing the detection data text of the preset sample point with the standard data text, so that the device center value and the optical center coordinate deviation value of the collection device can be automatically obtained, thereby improving the correction efficiency and accuracy.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a correction method, a correction device, a computer-readable storage medium and a computer device. Background Art

[0002] In the manufacturing process of a semiconductor factory (FAB, FABRICATION), there are many types of equipment and product processes. Under full production conditions, it is difficult for companies to provide sufficient financial, human and time resources to conduct machine error verification, detection rate verification and coordinate correction of production equipment.

[0003] Therefore, each main process needs to go through inspection equipment, such as automatic optical inspection equipment (AOI), laser sample preparation equipment, laser cutting and repair equipment, etc. In order to be accurate, the machine error debugging of these inspection equipment needs to be refined to each lens, and the traditional calibration method requires manual data processing of a large amount of data taken by each lens. It usually takes more than 10 hours to calibrate the coordinates of a device, which is inefficient and difficult to be precise to each lens. Summary of the invention

[0004] In order to solve at least one of the above problems, the first aspect of the present invention provides a correction method, comprising:

[0005] Receive a test data text output by the device to be calibrated, the test data text including multiple groups of test coordinate data, the test coordinate data being test coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the test coordinate values ​​being coordinate values ​​of a sample coordinate system relative to the preset sample sheet;

[0006] Importing a standard data text of a preset sample piece, the standard data text including standard coordinate values ​​of a plurality of sample points of the preset sample piece relative to a sample coordinate system;

[0007] Compare the test data text and the standard data text to generate a coordinate comparison file;

[0008] Obtain the device center value and the optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is the value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is the deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value;

[0009] The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

[0010] In some optional embodiments,

[0011] Comparing the test data text and the standard data text to generate a coordinate comparison file further includes:

[0012] According to the preset comparison distance, the detection coordinate values ​​of each sample point of the multiple groups of detection coordinate data of the detection data text and the standard coordinate values ​​of each sample point of the standard data text are respectively identified;

[0013] Match the detected coordinate values ​​and the standard coordinate values ​​and obtain matching sample points and deviation sample points;

[0014] Generate a coordinate comparison file based on the matching sample points and the deviation sample points;

[0015] Acquiring the center value and the optical center coordinate deviation value of the acquisition device according to the coordinate comparison file further includes:

[0016] The center value and the optical center coordinate deviation value of the acquisition device are obtained according to the matching sample points and the deviation sample points.

[0017] In some optional embodiments, correcting the device to be corrected according to the device center value and the optical center coordinate deviation value includes at least one of the following correction operations:

[0018] Automatically compensate the optical center coordinates according to the optical center coordinate deviation value;

[0019] Using partially overlapping detection coordinate values ​​and standard coordinate values, the position of the acquisition device is automatically adjusted according to the device center value;

[0020] Align the optical center coordinates with the preset geometric center coordinates of the sample piece;

[0021] The position of the acquisition device is automatically adjusted according to the device center value by using the partially overlapped optical center coordinates and the preset geometric center coordinates of the sample piece.

[0022] In some optional embodiments, the acquisition device includes at least two objective lenses, and the imaging size of each objective lens is different;

[0023] The correction method further includes: correcting each objective lens separately; or correcting each objective lens simultaneously.

[0024] In some optional embodiments, the preset sample sheet includes sample points of different shapes, different areas and different patterns, and each sample point includes at least one of a number, a word, a letter, a symbol and a figure, and the distribution of each sample point of the preset sample sheet corresponds to the field of view of the objective lens; and / or

[0025] The preset sample piece is prepared by the laser cutting and repairing equipment according to the preset laser sample preparation rules.

[0026] In some optional embodiments, the detection data text is detection coordinate values ​​of multiple sample points of a preset sample slice collected by a collection device of the device to be calibrated according to a preset gray scale.

[0027] In some optional embodiments, comparing the detection data text with the standard data text to generate a coordinate comparison file further includes:

[0028] The coordinate comparison file is stored, and the coordinate comparison file is parsed to generate a coordinate parsing file.

[0029] In some optional embodiments, after comparing the detection data text and the standard data text to generate a coordinate comparison file, the correction method further includes:

[0030] Generate a visual image of the deviation of the acquisition device based on the coordinate analysis file;

[0031] Output deviation visualization images, including:

[0032] Display deviation visualization image;

[0033] and / or

[0034] Transmit the deviation visualization image to an external device.

[0035] In some optional embodiments, each sample point of the preset sample sheet includes at least one of numbers, words, letters, symbols, graphics and patterns.

[0036] A second aspect of the present invention provides a correction device for the correction method described above, comprising a control device, wherein the control device is configured as follows:

[0037] Receive a test data text output by the device to be calibrated, the test data text including multiple groups of test coordinate data, the test coordinate data being test coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the test coordinate values ​​being coordinate values ​​of a sample coordinate system relative to the preset sample sheet;

[0038] Importing a standard data text of a preset sample piece, the standard data text including standard coordinate values ​​of a plurality of sample points of the preset sample piece relative to a sample coordinate system;

[0039] Compare the test data text and the standard data text to generate a coordinate comparison file;

[0040] Obtain the device center value and the optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is the value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is the deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value;

[0041] The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

[0042] A third aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, which implements the method described above when executed by a processor.

[0043] A fourth aspect of the present invention provides a computer device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the method described above is implemented when the processor executes the program.

[0044] The beneficial effects of the present invention are as follows:

[0045] In view of the existing problems, the present invention develops a correction method, a correction device, a computer-readable storage medium and a computer device. Based on a preset sample piece, according to the detection data text and the standard data text of the preset sample point of the preset sample piece obtained, a coordinate comparison file is generated by a file-level comparison operation of the two data texts, so that the device center value and the optical center coordinate deviation value of the acquisition device of the device to be calibrated can be automatically obtained, and the device calibration is completed according to the device center value and the optical center coordinate deviation value, without the need for manual data processing, thereby improving the correction efficiency and correction accuracy of the device to be calibrated, while reducing the production cost, and having broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0047] Figure 1 A schematic flow chart of a correction method according to an embodiment of the present invention is shown;

[0048] Figure 2 A schematic diagram showing a device calibrated according to a calibration method according to an embodiment of the present invention;

[0049] Figure 3 A correction device according to a correction method according to an embodiment of the present invention is shown;

[0050] Figure 4 An exemplary display interface of the calibration device according to an embodiment of the present invention is shown;

[0051] Figure 5 A schematic structural diagram of a computer device according to another embodiment of the present invention is shown. DETAILED DESCRIPTION

[0052] In order to more clearly illustrate the present invention, the present invention is further described below in conjunction with preferred embodiments and accompanying drawings. Similar components in the accompanying drawings are represented by the same reference numerals. It should be understood by those skilled in the art that the content specifically described below is illustrative rather than restrictive, and should not be used to limit the scope of protection of the present invention.

[0053] In the prior art, when calibrating the equipment to be calibrated, a GLS file is obtained based on the coordinate images of multiple sample points collected by the lens, and the GLS file needs to be manually imported into an Excel table; the technician deletes irrelevant items from the data listed in the Excel table, and performs data matching and comparison processing on the relevant items to obtain a coordinate difference table; the coordinates of the equipment to be calibrated are corrected according to the coordinate difference table, and then a calibration report is manually written. Because the data is processed manually, it is necessary to process multiple sample point coordinate images one by one, and the operation time is calculated in days, which is time-consuming; and intermittent operation is required, which is costly. At the same time, because each processing step is completed manually, the processing comparison can only be based on defects, the processing error is large, and the equipment calibration is inaccurate.

[0054] To solve one of the above problems, refer to Figure 1 The embodiment of the present invention provides a correction method, comprising:

[0055] S1. Receive a test data text output by a device to be calibrated, wherein the test data text includes multiple groups of test coordinate data, wherein the test coordinate data are test coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the test coordinate values ​​are coordinate values ​​of a sample coordinate system relative to the preset sample sheet;

[0056] S2, importing the standard data text of the preset sample slice, wherein the standard data text includes standard coordinate values ​​of a plurality of sample points of the preset sample slice relative to the sample coordinate system;

[0057] S3, comparing the detection data text with the standard data text to generate a coordinate comparison file;

[0058] S4. Acquire a device center value and an optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is a value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is a deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value;

[0059] S5. Correct the device to be corrected according to the device center value and the optical center coordinate deviation value.

[0060] In this embodiment, a coordinate comparison file is generated by performing a file-level comparison operation on two data texts, so that the device center value and the optical center coordinate deviation value of the acquisition device of the device to be calibrated can be automatically obtained, and the device calibration is completed according to the device center value and the optical center coordinate deviation value. No manual data processing is required, which improves the correction efficiency and correction accuracy of the device to be calibrated, while reducing the production cost, and has broad application prospects.

[0061] The correction method of the present invention is described in detail below with reference to specific examples. Figure 2 The image acquisition structure principle of the device to be calibrated in the embodiment of the present invention is briefly described. Figure 2 A schematic structural diagram of the image acquisition part of the AOI equipment is given.

[0062] The image acquisition part of the AOI device includes a light source and an acquisition device. In the AOI device, the acquisition device can be a CCD (Charge coupled Device, charge coupled device / imaging sensor) lens. An AOI device can include multiple CCD lenses. Multiple CCD lenses can simultaneously or time-sharingly acquire images of panels to be inspected. Here, the panels can be panels in various process steps in the production of semiconductor circuit boards or semiconductor chips. When performing automatic inspection, the AOI device controls the CCD lens to scan the panel within the field of view of the lens, and obtains the coordinate data of each image point in the panel by performing image processing on the captured image. Whether there are defects in the panel is determined by comparing the captured image with the normal circuit pattern, and the defect location is determined based on the acquired coordinate data, thereby completing the inspection process. Therefore, the coordinates of the AOI device need to be calibrated regularly to ensure the accuracy of the inspection. The present invention aims to utilize the image acquisition function of the AOI device to propose an automatic correction method for the coordinates of the device.

[0063] It should be noted that although Figure 2 Although the AOI device is shown, other devices such as laser sample preparation equipment, laser cutting and repair equipment, etc. that collect images through an objective lens are also applicable to the correction method of the present invention, that is, the method of the present invention is applicable to devices including grating rulers (grating ruler displacement sensors). For ease of description, the following description is based on the AOI device as an example.

[0064] In addition, if Figure 3 As shown, the calibration method of the embodiment of the present invention is implemented by being mounted on a calibration device 300 capable of communicating with the device to be calibrated, and the calibration device 300 may be, for example, a computer, an industrial computer, a tablet computer, etc. The calibration method may be specifically implemented as a program application programmed in various software or hardware languages ​​and mounted on the calibration device.

[0065] In addition, the calibration device 300 can communicate with the AOI device in a wired manner or in various wireless manners, and the present invention does not make any special restrictions. The communication method is subject to the hardware structure of the AOI. In addition, the calibration device 300 can also communicate with the server through the Internet or a local area network to obtain other data support.

[0066] The correction device 300 includes a control device to control the execution of each step of the correction method, and may also include a display device 303 with a display function to display the program interface of the program or display a chart image that needs to be shown to the operator.

[0067] The correction method of the present invention is described in detail below with a specific example.

[0068] When preparing to calibrate the AOI equipment, it is necessary to prepare a preset standard template, that is, a preset sample sheet. The preset sample sheet is made according to the preset sample preparation rules and coordinates. For example, multiple sample points can be obtained by laser dotting at preset positions on the glass substrate. Because the present invention is intended to obtain sample points with multiple known coordinates, it can be understood that the pattern formed by each sample point on the preset sample sheet is not limited and can include at least one of numbers, text, letters, symbols, and graphics. In addition, the multiple sample points can also have different shapes, different areas and different patterns, and the distribution of each sample point of the preset sample sheet corresponds to the field of view of the objective lens.

[0069] In addition, in order to specifically mark the position of the sample point coordinates in the glass substrate, the color is used to mark and distinguish the point laser sample size of each sample point in the mapping (MAP) diagram. For example, the color calibration of one or more colors of green, purple, yellow, blue and red is marked on the preset sample sheet; for each color calibration, there are calibration sizes with different ranges, for example, the size of green calibration is greater than or equal to 0μm and less than 3μm, the size of purple calibration is greater than or equal to 3μm and less than or equal to 10μm, the size of yellow calibration is greater than or equal to 10μm and less than or equal to 20μm, the size of blue calibration is greater than or equal to 20μm and less than or equal to 100μm, and the size of red calibration is greater than or equal to 100μm and less than or equal to 9999μm; the color calibration of each color in the field of view of each CCD lens has a predetermined number, such as 30 green calibrations, 30 purple calibrations, 30 yellow calibrations, 7 blue calibrations, and 3 red calibrations. Through this sample preparation rule, the operator can quickly know the sample preparation size and the specific position in the glass substrate.

[0070] Preferably, in the present invention, laser cutting and repair equipment is used for sample preparation. The cutting and repair principle of the laser cutting and repair equipment is: the actual pattern recognized by the objective lens is compared with the standard pattern of the standard plate to determine the position that needs cutting and repair and perform cutting and repair. This setting uses the existing production line to produce preset sample sheets with a large number of sample points. Data comparison can only be achieved through file-level data processing, completing a workload far greater than that of human processing, so that the correction method of the present invention can be implemented at the lowest cost.

[0071] When the preset sample sheet is produced, a standard data text is generated, and the standard data text includes standard coordinate values ​​of multiple sample points of the preset sample sheet relative to the sample coordinate system, and the sample coordinate system is a coordinate system with the center point of the preset sample sheet as the coordinate origin. The text can be a file in GLS format or a file in other formats, which is downloaded and stored in the calibration device 300 or uploaded to a server, such as a TMS BD server, and downloaded and used when needed, which is not particularly limited here.

[0072] More specifically, when calibration begins, the calibration device 300 starts calibration software and establishes a calibration task. In step S1, the calibration device 300 receives the detection data text output by the AOI device to be calibrated. The calibration device 300 receives the detection data text output by the AOI device through a communication connection with the AOI device.

[0073] In this embodiment, a preset sample sheet with multiple sample points is used for calibration detection. First, the preset sample sheets are respectively captured by multiple CCD lenses of the AOI device to be calibrated and multiple images are obtained. Then, image processing and recognition are performed on each image, and the detection coordinate value of each sample point in each image is obtained and a detection data text is generated, wherein the detection coordinate value is the coordinate value of the sample coordinate system relative to the preset sample sheet.

[0074] It can be seen that the detected coordinate values ​​are detected values ​​collected by the device to be calibrated. Because they have not been calibrated, for the sample point coordinate values ​​obtained based on the same preset sample piece, these detected coordinate values ​​may have deviations from the standard coordinate values ​​in the same coordinate system.

[0075] Optionally, the detection data text is the detection coordinate values ​​of multiple sample points of a preset sample sheet collected by the CCD lens of the AOI device according to the preset grayscale. During detection and collection, there will be differences in the images scanned by light of different colors for the same glass substrate, which will cause detection errors for the AOI device based on graphic contrast, so contrast is used to distinguish light sources. Contrast represents the difference between the highest grayscale and the lowest grayscale, so the grayscale range needs to be set to meet different contrast requirements, thereby improving detection accuracy.

[0076] It should be understood that the CCD lens captures a preset sample piece to obtain multiple images, and the images are processed to obtain the detection coordinate values ​​of multiple sample points. In order to collect data accurately, each CCD lens can collect dozens or hundreds of images, all of which are processed to obtain multiple groups of detection coordinate values ​​of sample points, and then the average value is taken to generate the detection data text of the group of detection coordinate data collected by the CCD lens.

[0077] Specifically, for example, LED direct light can be selected as the lighting condition, white light can be selected as the light color, the luminosity is within the range of 400 or more and 1500 or less, the minimum scanning size is 1 μm, the bright field threshold is greater than or equal to 18 and less than or equal to 23, and the dark field threshold is greater than or equal to 18 and less than or equal to 23 as the test conditions, and the preset sample sheet with a thickness of 0.5 μm on the device AOI is tested and scanned 5 times, repeated 3 times, and 200 images are collected for each lens. Different test conditions can also be selected for AOI devices with different hardware conditions. For example, LED direct light can be selected as the lighting condition, white light can be selected as the light color, the luminosity is within the range of 800 or more and 3000 or less, the minimum scanning size is 1 μm, the bright field threshold is greater than or equal to 225 and less than or equal to 255, and the dark field threshold is greater than or equal to 70 and less than or equal to 80 as the test conditions, and the preset sample sheet with a thickness of 0.5 μm on the device AOI is tested and scanned 3 times, repeated 3 times, and 30 images are collected for each lens. Through the above settings, accurate data collection can be performed based on the characteristics of the AOI equipment to improve detection accuracy.

[0078] Furthermore, in step S2, the standard data text of the preset sample piece is imported.

[0079] The standard data text may be pre-stored in the memory of the calibration device 300 and imported, or may be stored in a server, such as TMS BD, and downloaded and imported via the Internet. This is not specifically limited in the present invention.

[0080] In step S3, the test data text and the standard data text are compared to generate a coordinate comparison file.

[0081] Reference Figure 4 As shown, the operator selects a path through the display instructions on the display interface and imports the test data text with one click. Usually, if there are multiple test data texts of AOI devices in the calibration device, the operator can select the test data text output by the corresponding device according to the device ID of the AOI device and import it with one click. Similarly, the operator selects a path through the display instructions on the display interface and imports the standard data text with one click. Similarly, the standard data text usually corresponds to different AOI devices. The operator can select the test data text output by the corresponding device according to the device ID of the AOI device to be calibrated and import it with one click.

[0082] The correction device 300 automatically compares the detection coordinate values ​​in the detection data text with the corresponding standard coordinate values ​​to generate a coordinate comparison file. Since the standard coordinate values ​​and the detection coordinate values ​​belong to the same coordinate system, a computer is used to process the file data, for example, matching and comparing multiple coordinate values ​​in each file data, thereby significantly improving the data processing speed.

[0083] Specifically, the detection coordinate values ​​of each sample point of the multiple groups of detection coordinate data of the detection data text and the standard coordinate values ​​of each sample point of the standard data text are respectively identified according to the preset comparison distance; the detection coordinate values ​​and the standard coordinate values ​​are matched and the matching sample points and the deviation sample points are obtained; and a coordinate comparison file is generated according to the matching sample points and the deviation sample points.

[0084] The coordinate comparison file includes the comparison parameters of various coordinate values. Figure 5 From the example, we can see that the original number on the preset sample piece is 277, the target number in the detection text is 276, the matched number after comparison is 253, the unmatched number is 24, and the corresponding matched and unmatched coordinate values ​​are included. Of course, the coordinate comparison file also includes other comparison parameters of each sample point.

[0085] Optionally, the calibration device 300 stores the coordinate comparison file, parses the coordinate comparison file and generates a coordinate parsing file. The calibration device 300 may also upload the coordinate comparison file to a server, such as TMS BD, and parse the file using the server. The parsed file is used to visualize and further process the obtained coordinate comparison results.

[0086] Specifically, the calibration device 300 may be integrated with a visualization tool, establish a data model using spatial and temporal information, and generate a visualization image of the deviation of the acquisition device based on the data model according to the coordinate analysis file, so as to achieve visualization charts and graphic outputs of the comparison results. For example, a display device with a display function of the calibration device 300 may be controlled to display a visualization image of the deviation. The visualization image of the deviation may also be transmitted to an external device for subsequent use in generating reports or other project applications.

[0087] In step S4, the device center value and the optical center coordinate deviation value of the acquisition device are obtained according to the coordinate comparison file.

[0088] The device center value is the value of the center point of the acquisition device relative to the sample coordinate system. In this example, it is the coordinate value of the center point of the CCD lens in the sample coordinate system. The optical center coordinate deviation value is the deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system. The optical center coordinate is the center value of the detection coordinate value.

[0089] In step S5, the AOI device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

[0090] It should be understood that the obtained device center value and optical center coordinate deviation value include a situation, that is, when the optical center coordinate deviation value is judged to be within the acceptable error range of the device deviation, no correction processing is performed.

[0091] When it is determined that the optical center coordinate deviation value exceeds the acceptable error range of the equipment deviation, one of the following methods can be used to calibrate the AOI equipment.

[0092] Method 1: Automatically compensate the optical center of the AOI device according to the optical center coordinate deviation value. This step is optical compensation, which aims to make the optical center coordinate consistent with the device center value of the acquisition device by numerically compensating the optical coordinate.

[0093] Method 2: Use partially overlapping detection coordinate values ​​and standard coordinate values ​​to automatically adjust the position of the acquisition device according to the device center value. Specifically, when the optical center coordinates partially overlap with the device center value of the acquisition device, the physical position of the acquisition device is adjusted so that the optical center coordinates overlap with the device center value of the acquisition device. With this method, when the detection coordinate value and the standard coordinate value partially overlap, the final precise correction is completed by automatically performing physical fine-tuning.

[0094] Method three: align the optical center coordinates with the geometric center coordinates of a preset sample piece. The calibration accuracy can be further improved by automatically adjusting the optical center coordinates and the preset sample piece.

[0095] Method 4: Use the partially overlapped optical center coordinates and the geometric center coordinates of the preset sample piece to automatically adjust the position of the acquisition device according to the device center value. Through this method, when the optical center coordinates and the geometric center coordinates of the preset sample piece partially overlap, the final precise calibration is completed by automatically performing physical fine-tuning.

[0096] Those skilled in the art should understand that the correction method of the present invention can be performed in any order, or even simultaneously, because the correction device 300 automatically controls the automatic correction process of the AOI device. If multiple steps of the above four correction steps are taken, the final correction purpose can be achieved in parallel because of the linkage between the adjustments. Compared with the manual correction method of the prior art, the correction efficiency is significantly improved. When the above four correction steps need to be taken, the automatic correction processing in three dimensions can be achieved, from the optical compensation of the optical center coordinates, to the physical center coordinates of the acquisition device, and then to the geometric center coordinates of the preset sample piece, which significantly improves the accuracy of the equipment correction.

[0097] It should also be noted that, whether the AOI device to be corrected in this example, or the laser sample preparation device, laser cutting and repairing device and other devices to which the correction method of the embodiment of the present invention can be applied, the acquisition device often includes at least two objective lenses, and the imaging size of each objective lens is different. During the correction process, each objective lens can be corrected separately, for example, steps S1-S5 in the embodiment of the present invention are performed for each objective lens. In some optional embodiments, for each objective lens, each objective lens can be corrected simultaneously under the control of the correction device 300, the detection data text of each objective lens is processed in parallel, and the optical compensation correction and the physical adjustment correction are performed in parallel, which will not be repeated here.

[0098] In practical applications, the above calibration process may be performed regularly according to the frequency of use of the device. Those skilled in the art should understand that the preset sample slices may be reused in subsequent device calibrations, which will not be described in detail herein.

[0099] Through the above settings, the detection data text and the standard data text are automatically compared, and the device center value and the optical center coordinate deviation value of the acquisition device of the equipment to be calibrated are obtained according to the coordinate comparison file, and the optical calibration and physical calibration of the equipment are automatically completed according to the device center value and the optical center coordinate deviation value. No manual data processing is required, which improves the calibration efficiency and calibration accuracy of the equipment to be calibrated and reduces the production cost.

[0100] Based on the same inventive concept, Figure 3 As shown, an embodiment of the present invention further provides a correction device 300 of the correction method of the above embodiment, comprising a control device 301, wherein the control device 301 is configured as follows:

[0101] Receive a test data text output by the device to be calibrated, the test data text including multiple groups of test coordinate data, the test coordinate data being test coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the test coordinate values ​​being coordinate values ​​of a sample coordinate system relative to the preset sample sheet;

[0102] Importing a standard data text of a preset sample piece, the standard data text including standard coordinate values ​​of a plurality of sample points of the preset sample piece relative to a sample coordinate system;

[0103] Compare the test data text and the standard data text to generate a coordinate comparison file;

[0104] Obtain the device center value and the optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is the value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is the deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value;

[0105] The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

[0106] In this embodiment, a correction device is provided, and the correction device is set to compare the detection data text of the preset sample point and the standard data text to generate a coordinate comparison file, so that the device center value and the optical center coordinate deviation value of the acquisition device of the device to be calibrated can be automatically obtained, and the device calibration is completed according to the device center value and the optical center coordinate deviation value, without the need for manual data processing, thereby improving the correction efficiency and correction accuracy of the device to be calibrated, while reducing the production cost, and has broad application prospects.

[0107] Another embodiment of the present invention provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements:

[0108] Receive a detection data text output by the device to be calibrated, wherein the detection data text includes multiple groups of detection coordinate data, wherein the detection coordinate data are detection coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the detection coordinate values ​​are coordinate values ​​of a sample coordinate system relative to the preset sample sheet;

[0109] Importing a standard data text of the preset sample slice, wherein the standard data text includes standard coordinate values ​​of a plurality of sample points of the preset sample slice relative to the sample coordinate system;

[0110] Comparing the detection data text with the standard data text to generate a coordinate comparison file;

[0111] Acquire a device center value and an optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is a value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is a deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value;

[0112] The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

[0113] In practical applications, the computer-readable storage medium can adopt any combination of one or more computer-readable media. The computer-readable medium can be a computer-readable signal medium or a computer-readable storage medium. The computer-readable storage medium can be, for example, but not limited to, a system, device or device of electricity, magnetism, light, electromagnetic, infrared, or semiconductor, or any combination of the above. More specific examples (non-exhaustive list) of computer-readable storage media include: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present embodiment, the computer-readable storage medium can be any tangible medium containing or storing a program, which can be used by an instruction execution system, device or device or used in combination with it.

[0114] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, which carry computer-readable program code. Such propagated data signals may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium other than a computer-readable storage medium, which may send, propagate, or transmit a program for use by or in conjunction with an instruction execution system, apparatus, or device.

[0115] The program code embodied on the computer readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.

[0116] Computer program code for performing the operations of the present invention may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0117] like Figure 5As shown, a structural schematic diagram of a computer device provided by another embodiment of the present invention. Figure 5 The computer device 12 shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present invention.

[0118] like Figure 5 As shown, the computer device 12 is in the form of a general-purpose computing device. The components of the computer device 12 may include, but are not limited to: one or more processors or processing units 16, a system memory 28, and a bus 18 that connects various system components (including the system memory 28 and the processing unit 16).

[0119] Bus 18 represents one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, an accelerated graphics port, a processor or a local bus using any of a variety of bus architectures. By way of example, these architectures include, but are not limited to, an Industry Standard Architecture (ISA) bus, a Micro Channel Architecture (MAC) bus, an Enhanced ISA bus, a Video Electronics Standards Association (VESA) local bus, and a Peripheral Component Interconnect (PCI) bus.

[0120] The computer device 12 typically includes a variety of computer system readable media. These media can be any available media that can be accessed by the computer device 12, including volatile and non-volatile media, removable and non-removable media.

[0121] The system memory 28 may include computer system readable media in the form of volatile memory, such as random access memory (RAM) 30 and / or cache memory 32. The computer device 12 may further include other removable / non-removable, volatile / non-volatile computer system storage media. By way of example only, the storage system 34 may be used to read and write non-removable, non-volatile magnetic media ( Figure 5 not shown, usually called a "hard drive"). Although Figure 5 Not shown in the figure, a disk drive for reading and writing to a removable non-volatile disk (e.g., a "floppy disk"), and an optical disk drive for reading and writing to a removable non-volatile optical disk (e.g., a CD-ROM, a DVD-ROM, or other optical media) may be provided. In these cases, each drive may be connected to the bus 18 via one or more data medium interfaces. The memory 28 may include at least one program product having a set (e.g., at least one) of program modules that are configured to perform the functions of the various embodiments of the present invention.

[0122] A program / utility 40 having a set (at least one) of program modules 42 may be stored, for example, in the memory 28, such program modules 42 including, but not limited to, an operating system, one or more application programs, other program modules, and program data, each of which or some combination may include an implementation of a network environment. The program modules 42 generally perform the functions and / or methods of the embodiments described herein.

[0123] The computer device 12 may also communicate with one or more external devices 14 (e.g., keyboards, pointing devices, displays 24, etc.), one or more devices that enable a user to interact with the computer device 12, and / or any device that enables the computer device 12 to communicate with one or more other computing devices (e.g., network cards, modems, etc.). Such communication may be performed through an input / output (I / O) interface 22. Furthermore, the computer device 12 may also communicate with one or more networks (e.g., local area networks (LANs), wide area networks (WANs), and / or public networks, such as the Internet) through a network adapter 20. Figure 5 As shown, the network adapter 20 communicates with other modules of the computer device 12 via the bus 18. It should be understood that although Figure 5 Not shown, other hardware and / or software modules may be used in conjunction with computer device 12, including but not limited to microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0124] The processor unit 16 executes various functional applications and data processing by running programs stored in the system memory 28, such as implementing the correction method provided by the embodiment of the present invention.

[0125] In view of the existing problems, the present invention develops a correction method, a correction device, a computer-readable storage medium and a computer device. Based on a preset sample piece, according to the detection data text and the standard data text of the preset sample point of the preset sample piece obtained, a coordinate comparison file is generated by a file-level comparison operation of the two data texts, so that the device center value and the optical center coordinate deviation value of the acquisition device of the device to be calibrated can be automatically obtained, and the device calibration is completed according to the device center value and the optical center coordinate deviation value, without the need for manual data processing, thereby improving the correction efficiency and correction accuracy of the device to be calibrated, while reducing the production cost, and having broad application prospects.

[0126] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. A calibration method, characterized in that: include: Receive a detection data text output by the device to be calibrated, wherein the detection data text includes multiple groups of detection coordinate data, wherein the detection coordinate data are detection coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the detection coordinate values ​​are coordinate values ​​of a sample coordinate system relative to the preset sample sheet; Importing a standard data text of the preset sample slice, wherein the standard data text includes standard coordinate values ​​of a plurality of sample points of the preset sample slice relative to the sample coordinate system; Comparing the detection data text with the standard data text to generate a coordinate comparison file; Acquire a device center value and an optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is a value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is a deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value; The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

2. The calibration method according to claim 1, characterized in that: The step of comparing the detection data text with the standard data text to generate a coordinate comparison file further includes: Identify the detection coordinate values ​​of each sample point of the multiple groups of detection coordinate data of the detection data text and the standard coordinate values ​​of each sample point of the standard data text according to the preset comparison distance; Matching the detected coordinate value and the standard coordinate value and obtaining matching sample points and deviation sample points; Generate a coordinate comparison file according to the matching sample points and the deviation sample points; The step of obtaining the center value and the optical center coordinate deviation value of the acquisition device according to the coordinate comparison file further includes: The center value and the optical center coordinate deviation value of the acquisition device are obtained according to the matching sample points and the deviation sample points.

3. The calibration method according to claim 2, characterized in that: The correcting the device to be corrected according to the device center value and the optical center coordinate deviation value includes at least one of the following correction operations: Automatically compensate the optical center coordinates according to the optical center coordinate deviation value; Using the partially overlapping detection coordinate values ​​and standard coordinate values, the position of the acquisition device is automatically adjusted according to the device center value; Aligning the optical center coordinates with the geometric center coordinates of the preset sample piece; The position of the acquisition device is automatically adjusted according to the device center value by using the partially overlapping optical center coordinates and the geometric center coordinates of the preset sample piece.

4. The calibration method according to claim 1, characterized in that: The acquisition device comprises at least two objective lenses, and the imaging size of each objective lens is different; The correction method further comprises: correcting each objective lens separately; or correcting each objective lens simultaneously.

5. The calibration method according to claim 4, characterized in that: The preset sample sheet includes sample points of different shapes, different areas and different patterns, and each sample point includes at least one of numbers, words, letters, symbols and graphics, and the distribution of each sample point of the preset sample sheet corresponds to the field of view of the objective lens; and / or The preset sample piece is prepared by the laser cutting and repairing equipment according to the preset laser sample preparation rules.

6. The calibration method according to claim 1, characterized in that: The detection data text is detection coordinate values ​​of a plurality of sample points of the preset sample slice collected by the collection device of the device to be calibrated according to a preset gray scale.

7. The calibration method according to claim 1, characterized in that: The generating of the coordinate comparison file by comparing the detection data text with the standard data text further comprises: The coordinate comparison file is stored and parsed to generate a coordinate parsing file.

8. The calibration method according to claim 7, characterized in that: After the coordinate comparison file is generated by comparing the detection data text with the standard data text, the correction method further includes: Generate a visual image of the deviation of the acquisition device according to the coordinate analysis file; Outputting the deviation visualization image includes: Displaying the deviation visualization image; and / or The deviation visualization image is transmitted to an external device.

9. A correction device for the correction method according to any one of claims 1 to 8, characterized in that: The invention comprises a control device, wherein the control device is configured as follows: Receive a detection data text output by the device to be calibrated, wherein the detection data text includes multiple groups of detection coordinate data, wherein the detection coordinate data are detection coordinate values ​​of multiple sample points of a preset sample sheet collected by a collection device of the device to be calibrated, and the detection coordinate values ​​are coordinate values ​​of a sample coordinate system relative to the preset sample sheet; Importing a standard data text of the preset sample slice, wherein the standard data text includes standard coordinate values ​​of a plurality of sample points of the preset sample slice relative to the sample coordinate system; Comparing the detection data text with the standard data text to generate a coordinate comparison file; Acquire a device center value and an optical center coordinate deviation value of the acquisition device according to the coordinate comparison file, wherein the device center value is a value of the center point of the acquisition device relative to the sample coordinate system, the optical center coordinate deviation value is a deviation value of the optical center coordinate relative to the origin coordinate of the sample coordinate system, and the optical center coordinate is the center value of the detection coordinate value; The device to be calibrated is calibrated according to the device center value and the optical center coordinate deviation value.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the method according to any one of claims 1 to 8 is implemented.

11. A computer device comprising a memory, a processor and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the method according to any one of claims 1 to 8 is implemented.

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