A detection device and its alignment method and detection method

Abstract

The present application provides an alignment method for an optical device, the detection device includes a light source and a detection device, the detection device includes a first detector and a lens, the alignment method includes: emitting detection light to the object to be detected through the light source, the detection light forms a detection light spot on the surface of the object to be detected, so that the detection light spot forms a first signal light through the surface of the object to be detected; the photosensitive surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detection device collects the first signal light of the first detection area under different positional relationships; the light intensity of the first signal light under different positional relationships is obtained according to the first signal light; the positional relationship when the first signal light has the maximum light intensity is obtained as the alignment position, wherein the positional relationship is the relative position of the detection light spot and the first detection area; the positional relationship between the first detection area and the detection light spot is adjusted to the alignment position. Through the above settings, the alignment position can be quickly and accurately obtained, and the detection accuracy of the optical device can be improved.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, and more specifically, to a detection device and an alignment method and a detection method thereof. Background Art

[0002] At present, with the development of technology, the requirements for industrial inspection are getting higher and higher. Wafer defect inspection is a method to detect whether there are defects such as grooves, particles, scratches, etc. in the wafer and to detect the location of the defects in the wafer.

[0003] Light scattering technology is currently a widely used optical wafer defect detection method. Its basic principle is to use the scattered light of the defect as the signal light and judge the defect size by the collected light intensity. This method can measure particles smaller than the imaging resolution (such as tens of nanometers). The existing technology mainly uses point light sources for point scanning detection, but the main problem is that the detection speed is slow; using line scanning to increase the scanning area can reduce the number of scans and speed up the detection speed. In line scanning technology, in order to improve the detection accuracy, the detector needs to receive the strongest signal light and make the signal received by the detector more uniform. Summary of the invention

[0004] In view of this, the present invention provides a detection device and a light spot alignment method thereof, i.e., a detection method, to improve the accuracy of optical detection. The optical device includes a light source and a detection device, the detection device includes a first detector and a lens, and the alignment method includes:

[0005] An alignment method for an optical device, the optical device comprising a light source and a detection device, the detection device comprising a first detector and a lens, wherein the alignment method comprises:

[0006] The light source emits detection light to the object to be measured, and the detection light forms a detection light spot on the surface of the object to be measured, so that the detection light spot forms a first signal light through the surface of the object to be measured; the photosensitive surface of the first detector forms a first detection area on the surface of the object to be measured through the lens, so that the first detector collects the first signal light of the first detection area under different position relationships;

[0007] acquiring light intensity of the first signal light at different position relationships according to the first signal light;

[0008] Acquire a positional relationship when the first signal light has a maximum light intensity as an alignment position, wherein the positional relationship is a relative position between the detection light spot and the first detection area;

[0009] The positional relationship between the first detection area and the detection light spot is adjusted to the alignment position.

[0010] In one embodiment, the positional relationship includes: a relative position of the detection light spot and the first detection area along a first direction; a size of the detection light spot along the first direction is greater than a size of the first detection area along the first direction.

[0011] In one implementation, the detection light spot is in a linear shape, and the first direction is an extension direction of the detection light spot.

[0012] In one embodiment, the positional relationship also includes: the relative position of the detection light spot and the first detection area along a second direction, the second direction is not parallel to the first direction; the size of the detection light spot along the second direction is greater than the size of the first detection area along the second direction.

[0013] In one embodiment, the first detector is a non-time-delay linear array detector, or the first detector is a TDI detector and the TDI detector is set to a linear array mode.

[0014] In one embodiment, the detection device collects the first signal light of the first detection area under different position relationships, including: adjusting the relative position relationship between the detection light spot and the first detection area; after each adjustment of the relative position relationship between the detection light spot and the first detection area, collecting the first signal light of the first detection area by the detection device.

[0015] In one embodiment, the first detection device further includes an adjustment mechanism, and the adjustment of the relative position relationship between the detection light spot and the first detection area includes: relatively fixing the positions of the light source and the lens, and adjusting the relative position between the first detector and the lens by the adjustment mechanism.

[0016] In one embodiment, the detection device further includes a second detector, the photosensitive surface of the second detector forms a second field of view on the surface of the object to be detected through the lens, and the size of the second detection area in at least the third direction is larger than the first detection area;

[0017] Before the first detector collects the first signal light of the first detection area, the alignment method further includes:

[0018] enabling the second detector to collect the second signal light of the second detection area through the lens;

[0019] Acquire image information of the object to be detected in the second detection area according to the second signal light, and acquire position information of the center of the detection light spot according to the image information;

[0020] A first adjustment process is performed on the relative positions of the detection light spot and the second detection area according to the image information, so as to at least reduce the distance between the center of the detection light spot and the center of the second detection area along the third direction.

[0021] In one embodiment, along any direction, the size of the second detection area is larger than the size of the light spot.

[0022] In one embodiment, the detection light spot is linear; before performing a first adjustment process on the relative position of the detection light spot and the second detection area according to the image information, it also includes: performing a second adjustment process on the detection light spot according to the image information so that the extension direction of the detection light spot is in a preset direction.

[0023] In one embodiment, the surface of the object to be detected in the second detection area has a characteristic pattern, and the characteristic pattern has a characteristic direction; the second adjustment process includes: adjusting the extension direction of the detection spot according to the characteristic direction.

[0024] In one embodiment, the first adjustment process includes: obtaining the position information of the detection spot center and the second detection area center based on the image information; adjusting one or more combinations of the light source, the lens and the second detector based on the position information of the detection spot center and the second detection area center to reduce the distance between the center of the second detection area and the center of the detection spot.

[0025] In one implementation, acquiring the position information of the detection spot center according to the image information includes: acquiring contour information of the detection spot image according to the image information; and acquiring the position information of the detection spot center according to the contour information.

[0026] In one embodiment, the second detector is an area array detector, or a TDI detector is used and the TDI detector is set to an area array mode.

[0027] In one embodiment, before the second detector collects the second signal light of the second detection area, the light spot alignment method further includes: positioning the surface of the object to be measured at a focal plane of the detection device.

[0028] In one embodiment, the optical device includes a plurality of the detection devices; the alignment method further includes: adjusting the positional relationship between the first detection area and the detection spot of each detection device to the alignment position according to any one of the alignment methods described above.

[0029] The present invention also provides a detection method for an optical device, comprising: adjusting the position relationship to an alignment position by using any of the alignment methods described above; after adjusting the position relationship to the alignment position, detecting the object to be detected by using the detection device to obtain detection information of the object to be detected.

[0030] The present invention further provides a detection method for an optical device, comprising: a light source, the light source is used to emit detection light to an object to be detected, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms a first signal light through the surface of the object to be detected; a detection device, comprising a first detector and a lens, the photosensitive surface of the first detector is configured to form a first detection area on the surface of the object to be detected through the lens, and the first detector is configured to detect the first signal light of the first detection area through the lens; a control device, used to enable the detection device to collect the first signal light of the first detection area under different position relationships; a processing system, used to obtain the light intensity of the first signal light under different position relationships according to the first signal light; obtaining the position relationship when the first signal light has the maximum light intensity as the light spot alignment position, wherein the position relationship is the relative position of the detection light spot and the first detection area; adjusting the position relationship between the first detection area and the detection light spot to the alignment position; the control device is also used to adjust the position relationship between the first detection area and the detection light spot to the alignment position.

[0031] Compared with the prior art, the technical solution provided by the present invention has the following advantages: the relative position of the first detection area and the detection light spot can be quickly and accurately adjusted to the alignment position according to the light intensity of the first signal light, which is simple and efficient; in addition, before or during the detection of the object to be detected, the relative position of the first detection area and the detection light spot of the detection device is adjusted to the alignment position so that the light intensity of the first signal light in the first detection area collected by the first detector is maximized, thereby improving the detection accuracy.

[0032] Furthermore, the size of the detection light spot along the first direction is larger than the size of the first detection area along the first direction, and the detection result is sensitive to whether the light spot is aligned with the field of view of the first detector, and the alignment accuracy is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a flow chart of an alignment method of an optical device in one embodiment of the present application;

[0034] Figure 2 is a schematic structural diagram of an optical system in one embodiment of the present application;

[0035] Figure 3is a schematic structural diagram of a light source in an embodiment of the present application;

[0036] Figure 4 is a schematic structural diagram of a detection device in one embodiment of the present application;

[0037] Figure 5 The figure is a flow chart of an alignment method of an optical device in one embodiment of the present application. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0040] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0041] An embodiment of the present invention provides an alignment method for an optical device, wherein the optical device includes a light source and a detection device, wherein the detection device includes: a first detector and a lens, and the alignment method includes:

[0042] The detection light is emitted to the object to be measured by the light source; the detection light forms a detection light spot on the surface of the object to be measured, so that the detection light spot forms a first signal light through the surface of the object to be measured; the photosensitive surface of the first detector forms a first detection area on the surface of the object to be measured through the lens, so that the first detector collects the first signal light of the first detection area under different position relationships; according to the first signal light, the light intensity of the first signal light under different position relationships is obtained; the position relationship when the first signal light has the maximum light intensity is obtained as the alignment position, wherein the position relationship is the relative position of the detection light spot and the first detection area; the position relationship between the first detection area and the detection light spot is adjusted to the alignment position.

[0043] In the alignment method provided by the technical solution of the present invention, the relative position of the first detection area and the detection light spot can be quickly and accurately adjusted to the alignment position according to the light intensity of the first signal light, which is simple and efficient. In addition, before or during the detection of the object to be detected, the relative position of the first detection area and the detection light spot of the detection device is adjusted to the alignment position so that the light intensity of the first signal light in the first detection area collected by the first detector is maximized, thereby improving the detection accuracy.

[0044] According to the attached Figures 1 to 4 The optical device and alignment method involved in the embodiments of the present application are introduced in detail:

[0045] An embodiment of the present invention provides an alignment method for an optical device. The optical device includes a light source 110 and a detection device 120 . The detection device 120 includes a first detector 121 and a lens 122 .

[0046] like Figure 2 As shown, the light source 110 includes a light emitter 111, a beam shaping component 112, and optical elements 113 and 114; the detection light emitted by the light emitter 111 is expanded and shaped by the beam shaping component 112, and then reflected by the optical element 113 and converged by the optical element 114 to irradiate the surface of the object to be measured 130, forming a detection light spot.

[0047] like Figure 2 and 3 As shown, the detection device 120 includes a first detector 121 and a lens 122; the lens 122 is used to collect the first signal light on the surface of the object to be detected 130; the first detector 121 is used to detect the first signal light collected by the lens 122. In this embodiment, the first detector 121 is a linear array detector, specifically, the first detector 122 is a non-delayed linear array detector, or the first detector 122 is a TDI detector and the TDI detector is set to a linear array mode.

[0048] In this embodiment, the first detector is a line detector. In other embodiments, the first detector can be a surface detector or a point detector.

[0049] In addition, the object to be tested in the embodiment of the present invention may be a wafer with a pattern on the surface, or may be a wafer without a pattern or a substrate in a display device, etc., and the present invention is not limited to this.

[0050] Step S101: emitting detection light to the object to be detected by the light source; the detection light forms a detection light spot on the surface of the object to be detected, so that the detection light spot forms a first signal light through the surface of the object to be detected.

[0051] In this embodiment, the light source 110 emits detection light to the object to be measured 130 . The detection light may be linearly polarized light or circularly polarized light. The detection light irradiates the surface of the object to be measured 130 to form a detection light spot.

[0052] In this embodiment, the detection light spot is in a linear shape, and the extension direction of the detection light spot is a first direction; the detection light spot forms a first signal light after being reflected, scattered or diffracted by the surface of the object to be measured, and the first signal light includes one or more of the reflected light, scattered light or diffracted light of the surface of the object to be measured. In other embodiments, the detection light spot can also be a surface light spot, such as a circular light spot, an elliptical light spot or a rectangular light spot.

[0053] In this embodiment, the detection device 120 further includes a second detector, the photosensitive surface of the second detector forms a second detection area on the surface of the object to be detected through the lens 122, and the size of the second detection area in at least the third direction is larger than the first detection area.

[0054] In this embodiment, the second detector is a planar array detector, or a TDI detector is used and the TDI detector is set to a planar array mode; the detection light spot is in a line shape.

[0055] Step S102: Perform a first adjustment process, and after the first adjustment process, replace the second detector with the first detector.

[0056] The following is a detailed description of step S102. Figure 5 , the alignment method further comprises:

[0057] Step S1021: enabling the second detector to collect the second signal light in the second detection area through the lens 122; and obtaining image information of the object to be detected in the second detection area according to the second signal light.

[0058] In this embodiment, along any direction, the size of the second detection area is larger than the size of the detection spot, and the second detector collects the second signal light of the second detection area through the lens 122. The second detector can collect all the second signal lights generated by the detection spot within its field of view; image information of the object to be detected in the second detection area is obtained based on the second signal light, and the image information is the image information of the detection spot.

[0059] In this embodiment, before the second detector collects the second signal light of the second detection area, the light spot alignment method further includes: making the surface of the object to be measured 130 located at the focal plane of the detection device 120. Specifically, the surface of the object to be measured 130 is located at the focal plane of the lens 122, so that the second signal light on the surface of the object to be measured 130 is clearly imaged on the photosensitive surface of the second detector through the lens 122.

[0060] Step S1022: Acquire the position information of the center of the detection light spot according to the image information.

[0061] In this embodiment, acquiring the position information of the center of the detection light spot according to the image information includes: acquiring contour information of the detection light spot image according to the image information, and acquiring the position information of the center of the detection light spot according to the contour information.

[0062] Step S1023: performing a second adjustment process on the detection light spot according to the image information, so that the extension direction of the detection light spot is in a preset direction.

[0063] It should be noted that, in this embodiment, before subsequently performing a first adjustment on the positions of the detection light spot and the second detection area according to the image information, the alignment method further includes: performing a second adjustment process on the detection light spot according to the image information. In other embodiments, the second adjustment process step may not be included.

[0064] In this embodiment, the surface of the object to be detected in the second detection area has a characteristic pattern, and the characteristic pattern has a characteristic direction. The second adjustment process includes: adjusting the extension direction of the detection light spot according to the characteristic direction so that the extension direction of the detection light spot is in a preset direction.

[0065] In this embodiment, the detection light spot is used to scan the surface of the object to be measured, so as to perform a full inspection on the surface of the object to be measured. The preset direction is perpendicular to the direction in which the detection light spot scans the object to be measured. Specifically, in this embodiment, the object to be measured is a wafer, and the preset direction is along the radius of the wafer surface.

[0066] Step S1024: performing a first adjustment process on the relative positions of the detection light spot and the second detection area according to the image information, so as to at least reduce the distance between the center of the detection light spot and the center of the second detection area along the third direction.

[0067] In this embodiment, the first adjustment includes: obtaining the position information of the center of the detection light spot and the center of the second detection area according to the image information; adjusting one or more of the light source, the lens and the second detector according to the position information of the center of the detection light spot and the center of the second detection area to reduce the distance between the center of the second detection area and the center of the detection light spot.

[0068] Step S1025: After the first adjustment process, the second detector is replaced with the first detector.

[0069] The first adjustment process can make the center of the detection light spot coincide with the center of the field of view of the detection device as much as possible, so that after the second detector is replaced by the first detector, the detection light spot can be located in the field of view of the first detector.

[0070] During the process of replacing the second detector with the first detector, the lens is not replaced, and the position of the first detector can be determined by the position of the lens, so that the first detection area of ​​the first detector coincides with the center of the second detection area.

[0071] In this embodiment, if Figure 4 As shown, the lens 122 and the detector 121 are connected to the mounting platform respectively, the lens 122 is not replaced, only the second detector is replaced with the first detector, and after the replacement, the first detection area of ​​the first detector coincides with the center of the second detection area.

[0072] In other embodiments, the positions of the lens and the second detector can be determined by a mounting platform. In this case, the lens and the detector are connected to the mounting platform separately, or the lens and the detector are fixedly connected and then connected to the mounting platform. After the first adjustment process, the lens can also be replaced.

[0073] Step S103: The photosensitive surface of the first detector forms a first detection area on the surface of the object to be detected through the lens, so that the first detector collects the first signal light of the first detection area under different position relationships.

[0074] It should be noted that the first detection area is the area on the surface of the object to be detected that can be detected by the first detector through the lens.

[0075] In this embodiment, the photosensitive surface of the first detector 121 forms a first detection area on the surface of the object to be measured 130 through the lens 122, and the size of the first detection area along the first direction is smaller than the size of the detection spot along the first direction; the first detector 121 collects the first signal light of the first detection area under different position relationships, and accordingly, the position relationship includes: the relative position of the detection spot and the first detection area along the first direction.

[0076] In this embodiment, the size of the first detection area along the second direction is smaller than the size of the detection light spot along the second direction, and the second direction is not parallel to the first direction. Correspondingly, the positional relationship also includes: the relative position of the detection light spot and the first detection area along the second direction. It should be noted that when the size of the detection light spot along the first direction is larger than the size of the first detection area along the first direction, the detection result is sensitive to whether the light spot is aligned with the field of view of the first detector, and the alignment is determined using the light intensity signal detected by the first detector, with higher accuracy. Similarly, when the size of the detection light spot along the second direction is larger than the size of the first detection area along the second direction, the detection result is sensitive to whether the light spot is aligned with the field of view of the first detector, and the alignment is determined using the light intensity signal detected by the first detector, with higher accuracy.

[0077] Specifically, in this embodiment, the size of the first detection area along any direction is smaller than the size of the detection light spot.

[0078] The step of enabling the first detector to collect the first signal light of the first detection area under different position relationships includes: adjusting the relative position relationship between the detection light spot and the first detection area; and collecting the first signal light of the first detection area by the detection device after adjusting the relative position relationship between the detection light spot and the first detection area each time.

[0079] refer to Figure 4 In this embodiment, the detection device 120 also includes an adjustment mechanism 123, which is used to adjust the relative position between the first detector 121 and the lens 122, thereby adjusting the relative position between the first detection area of ​​the first detector 121 located on the surface of the object to be measured 130 and the detection spot.

[0080] In this embodiment, adjusting the relative position relationship between the detection light spot and the first detection area includes: making the positions of the light source 110 and the lens 122 relatively fixed, adjusting the relative position between the first detector 121 and the lens 122 through the adjustment mechanism 123, changing the relative position of the first detection area and the detection light spot along the first direction, and / or the relative position of the first detection area and the detection light spot along the second direction.

[0081] Step S104: acquiring the light intensity of the first signal light at different position relationships according to the first signal light.

[0082] The light intensity of the first signal light is the total light intensity of the first signal light acquired by the first detector at different positions.

[0083] Step S105: acquiring a positional relationship when the first signal light has a maximum light intensity as an alignment position, wherein the positional relationship is a relative position between the detection light spot and the first detection area.

[0084] The adjustment mechanism 123 needs to be adjusted repeatedly for multiple times to adjust the relative position of the detection light spot and the first detection area, and the position relationship when the first signal light has the maximum light intensity is obtained as the alignment position.

[0085] Step S106: adjusting the positional relationship between the first detection area and the detection light spot to the alignment position.

[0086] The positional relationship between the first detection area and the detection light spot is adjusted to the alignment position. At this time, the first signal light of the first detection area collected by the first detector 121 is the strongest, which is beneficial to improving the accuracy of the detection result of the first detector 121.

[0087] In addition, an embodiment of the present invention further provides a detection method for an optical device, comprising:

[0088] S201: adjusting the position relationship to an aligned position by the alignment method as described above; specifically, adjusting the relative position relationship between the first detection area and the detection light spot to an aligned position.

[0089] S202: After adjusting the positional relationship to the alignment position, detecting the object to be detected by the detection device to obtain detection information of the object to be detected.

[0090] When the relative position relationship between the first detection area and the detection light spot is adjusted to an aligned position, the intensity of the first signal light detected by the detection device is maximum, and the accuracy of the detection result obtained by the optical device is high.

[0091] In this embodiment, the optical device includes a plurality of the detection devices; the alignment method further includes: adjusting the positional relationship between the first detection area of ​​each detection device and the detection light spot to the alignment position. At this time, the first signal light of the first detection area collected by the plurality of detection devices is the strongest, which is conducive to improving the accuracy of the detection result of the detection device.

[0092] In addition, the present invention also provides a detection device, please refer to Figure 2The detection device includes: a light source 110, the light source is used to emit detection light to the object to be detected, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms a first signal light through the surface of the object to be detected; a detection device 120, including a first detector and a lens, the photosensitive surface of the first detector is configured to form a first detection area on the surface of the object to be detected through the lens, and the first detector is configured to detect the signal light of the first detection area through the lens; a control device 130, used to enable the detection device to collect the first signal light of the first detection area under different position relationships; a processing system 140, used to obtain the light intensity of the first signal light under different position relationships according to the first signal light; obtain the position relationship when the first signal light has the maximum light intensity as the light spot alignment position, wherein the position relationship is the relative position of the detection light spot and the first detection area; adjust the position relationship between the first detection area and the detection light spot to the alignment position; the control device is also used to adjust the position relationship between the first detection area and the detection light spot to the alignment position.

[0093] Although the present invention has been described with reference to specific examples, wherein these specific examples are intended to be illustrative only and not limiting of the present invention, it is obvious to those skilled in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the present invention.

Claims

1. A method for aligning an optical device, wherein the optical device comprises a light source and a detection device, wherein the detection device comprises a first detector and a lens, wherein: The alignment method comprises: The light source emits detection light to the object to be measured, and the detection light forms a detection light spot on the surface of the object to be measured, so that the detection light spot forms a first signal light through the surface of the object to be measured; the photosensitive surface of the first detector forms a first detection area on the surface of the object to be measured through the lens, so that the first detector collects the first signal light of the first detection area under different position relationships; acquiring light intensity of the first signal light at different position relationships according to the first signal light; Acquire a positional relationship when the first signal light has a maximum light intensity as an alignment position, wherein the positional relationship is a relative position between the detection light spot and the first detection area; Adjusting the positional relationship between the first detection area and the detection light spot to the alignment position; The positional relationship includes: the relative position of the detection light spot and the first detection area along the first direction; The size of the detection light spot along the first direction is greater than the size of the first detection area along the first direction; The positional relationship also includes: a relative position of the detection light spot and the first detection area along a second direction, the second direction is not parallel to the first direction; and a size of the detection light spot along the second direction is greater than a size of the first detection area along the second direction.

2. The alignment method according to claim 1, characterized in that: The detection light spot is in a line shape, and the first direction is an extension direction of the detection light spot.

3. The alignment method according to claim 1, characterized in that: The first detector is a non-time-delay linear array detector, or the first detector is a TDI detector and the TDI detector is set to a linear array mode.

4. The alignment method according to claim 1, characterized in that: The first detector collecting the first signal light of the first detection area in different position relationships includes: The relative position relationship between the detection light spot and the first detection area is adjusted; after each adjustment of the relative position relationship between the detection light spot and the first detection area, the first signal light of the first detection area is collected by the detection device.

5. The alignment method according to claim 4, characterized in that: The detection device further includes an adjustment mechanism, and the adjustment of the relative position relationship between the detection light spot and the first detection area includes: The positions of the light source and the lens are relatively fixed, and the relative position between the first detector and the lens is adjusted by the adjustment mechanism.

6. The alignment method according to claim 1, characterized in that: The detection device further comprises a second detector, the photosensitive surface of the second detector forms a second detection area on the surface of the object to be detected through the lens, and the size of the second detection area in at least the third direction is larger than the first detection area; Before the first detector collects the first signal light of the first detection area, the alignment method further includes: enabling the second detector to collect the second signal light of the second detection area through the lens; Acquire image information of the object to be detected in the second detection area according to the second signal light; acquire position information of the center of the detection light spot according to the image information; Performing a first adjustment process on the relative positions of the detection light spot and the second detection area according to the image information, so as to at least reduce the distance between the center of the detection light spot and the center of the second detection area along the third direction; After the first adjustment process, the second detector is replaced with the first detector.

7. The alignment method according to claim 6, characterized in that: In any direction, the size of the second detection area is larger than the size of the detection light spot.

8. The alignment method according to claim 6, characterized in that: The detection light spot is in a linear shape; before performing a first adjustment process on the relative position of the detection light spot and the second detection area according to the image information, the method further includes: A second adjustment process is performed on the detection light spot according to the image information, so that an extension direction of the detection light spot is in a preset direction.

9. The alignment method according to claim 8, characterized in that: The surface of the object to be detected in the second detection area has a characteristic pattern, and the characteristic pattern has a characteristic direction; The second adjustment process includes: The extension direction of the detection light spot is adjusted according to the characteristic direction.

10. The alignment method according to claim 7, characterized in that: The first adjustment process includes: acquiring the position information of the center of the detection light spot and the center of the second detection area according to the image information; According to the position information of the center of the detection light spot and the center of the second detection area, one or more combinations of the light source, the lens and the second detector are adjusted to reduce the distance between the center of the second detection area and the center of the detection light spot.

11. The alignment method according to claim 10, characterized in that: The acquiring the position information of the center of the detection light spot according to the image information comprises: acquiring contour information of the detection light spot image according to the image information; and acquiring the position information of the center of the detection light spot according to the contour information.

12. The alignment method according to claim 6, characterized in that: The second detector is an area array detector, or a TDI detector is used and the TDI detector is set to an area array mode.

13. The alignment method according to claim 6, characterized in that: Before the second detector collects the second signal light of the second detection area, the light spot alignment method further includes: making the surface of the object to be measured be located at the focusing plane of the detection device.

14. The alignment method according to claim 1, characterized in that: The optical device comprises a plurality of the detection devices; The alignment method further comprises: according to the alignment method according to any one of claims 1 to 13, adjusting the positional relationship between the first detection area of ​​each detection device and the detection light spot to the alignment position.

15. A method for detecting an optical device, comprising: adjusting the positional relationship to an aligned position by the alignment method according to any one of claims 1 to 13; After the positional relationship is adjusted to the alignment position, the object to be detected is detected by the detection device to obtain detection information of the object to be detected.

16. A detection device, used to perform the method according to any one of claims 1 to 15, characterized in that: It comprises: a light source, the light source is used to emit detection light to the object to be detected, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light spot forms a first signal light through the surface of the object to be detected; The detection device comprises a first detector and a lens, wherein the photosensitive surface of the first detector is configured to form a first detection area on the surface of the object to be detected through the lens, and the first detector is configured to detect a first signal light in the first detection area through the lens; A control device, used for causing the first detector to collect the first signal light of the first detection area in different position relationships; A processing system is used to obtain the light intensity of the first signal light under different positional relationships according to the first signal light; obtain the positional relationship when the first signal light has a maximum light intensity as an alignment position, wherein the positional relationship is the relative position of the detection light spot and the first detection area; adjust the positional relationship between the first detection area and the detection light spot to the alignment position; and the control device is also used to adjust the positional relationship between the first detection area and the detection light spot to the alignment position.

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