Radar-based position measurement for a robotic system

Abstract

A device comprising at least one transmitter configured to emit energy; and at least one receiver configured to receive the emitted energy, wherein the at least one transmitter is mounted on at least one of the following: a robotic arm, an end effector of the robotic arm, a substrate on the robotic arm, or a substrate processing module, and wherein the at least one receiver is mounted on at least one of the following: a robotic arm, an end effector of the robotic arm, a substrate on the robotic arm, or a substrate processing module.

Description

Technical Field

[0001] Examples and non - limiting embodiments generally relate to robots, and more particularly, to positioning systems for robots.

[0002] Brief Description of Prior Developments

[0003] U.S. Patent No. 9,196,518 discloses an adaptive placement system and method for a substrate handling robot, which is incorporated herein by reference in its entirety. Summary of the Invention

[0004] The following summary of the invention is only intended as an example. The summary of the invention is not intended to limit the scope of the claims.

[0005] According to one aspect, example embodiments are provided in a device that includes: at least one transmitter configured to transmit energy; at least one receiver configured to receive the transmitted energy, wherein at least one transmitter is mounted on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module, and wherein at least one receiver is mounted on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module.

[0006] According to another aspect, an example method is provided that includes: mounting at least one transmitter on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module, wherein at least one transmitter is configured to transmit energy; mounting at least one receiver on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module, wherein at least one receiver is configured to receive the transmitted energy.

[0007] According to another aspect, an example method is provided that includes: transmitting energy from a transmitter and receiving the transmitted energy by a receiver, wherein at least one transmitter is mounted on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module, and wherein at least one receiver is mounted on at least one of the following: a robotic arm, an end - effector of the robotic arm, a substrate on the robotic arm, or a substrate handling module; determining, at least in part based on the energy received by at least one receiver, at least one of the following with respect to the substrate handling module: the position, and / or extent, and / or angle, and / or velocity of the substrate, or the position, and / or extent, and / or angle, and / or velocity of the robotic arm, or the position, and / or extent, and / or angle, and / or velocity of the end - effector, or the position of the substrate on the end - effector and / or the robotic arm. Brief Description of the Drawings

[0008] The above aspects and other features are explained in connection with the accompanying drawings in the following description, wherein:

[0009] Figure 1 is a schematic top plan view showing an example embodiment including features as described herein;

[0010] Figure 2A is Figure 1 a side view of a portion of the robot shown;

[0011] Figure 2B is Figure 2A a schematic cross-sectional view of the robot shown;

[0012] Figure 3 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown;

[0013] Figure 4 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown;

[0014] Figure 5 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown;

[0015] Figure 6 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown;

[0016] Figure 7 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown;

[0017] Figure 8 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown; and

[0018] Figure 9 is Figure 1 a schematic top plan view of an example of a system used in the embodiment shown. DETAILED DESCRIPTION

[0019] Referring to Figure 1 , there is shown a schematic top plan view of a substrate processing apparatus 30 incorporating features of an example embodiment. Although the features will be described with reference to the example embodiments shown in the drawings, it should be understood that the features may be implemented in many alternative forms of embodiments. Additionally, any suitable size, shape, or type of element or material may be used.

[0020] The substrate processing apparatus 30 generally includes a substrate transfer chamber 32, a substrate processing module 16, a load lock 18', an equipment front end module (EFEM) 20 having a substrate cassette elevator 22, and a linear robot 34, the linear robot 34 including a dual-link arm 36 and a robot drive 38 (see Figures 2A - 2B ). The apparatus 30 is connected to a controller 40, the controller 40 including at least one processor 42 and at least one memory 44, the at least one memory 44 including computer program code 46. Figure 1 is an example of a linear robot having a dual-link arm in a compact retracted position.

[0021] Continuing to refer to Figures 2A - 2B , the dual-link arm 36 generally includes an upper arm 90 and an end effector 92, the end effector 92 being rotatably connected to the upper arm 90 at a joint 94. The robot drive 38 includes a first motor 52 and a second motor 54, having corresponding first and second encoders 56 and 58, the first and second encoders 56 and 58 being coupled to a housing 60 and driving a first shaft 62 and a second shaft 64 accordingly. Here the shaft 62 can be coupled to a pulley 66 and the shaft 64 can be coupled to the upper arm 90, where the first shaft 62 and the second shaft 64 can be concentric or otherwise arranged. In alternative aspects, any suitable drive can be provided. The housing 60 can communicate with a chamber 68, where bellows 70, the chamber 68, and an interior portion of the housing 60 isolate a vacuum environment 72 from an atmospheric environment 74. The housing 60 can slide in the Z direction as a carriage on a slider 76, where a lead screw or other suitable vertical or linear Z drive 78 can be provided to selectively move the housing 60 and the dual-link arm 36 coupled thereto in the Z direction 80. The robotic arm 34 is mounted on a linear transfer device 98, the linear transfer device 98 being configured to move the robotic arm 36 along a linear path inside the chamber 32, as shown by the arrow 100 in Figure 1 . For example, this may be related to the use of tracks or magnetic levitation.

[0022] Modern semiconductor processing technologies are constantly striving to fit more devices in smaller packages. Processing smaller devices requires wafer processing equipment with higher position repeatability and accuracy. Conventional wafer handling robots use encoder-based position feedback to track the position on the input side of the robotic arm linkage or gearing, but mainly rely on the repeatability of the mechanical gearing to deliver the payload to the output side of the linkage or gearing in a repeatable and accurate position. Some systems use external sensors to measure the wafer position relative to the commanded robot position, but this method also relies on the accuracy of the mechanical gearing.

[0023] In one example embodiment having the features described herein, a sensor may be located on the output side of a linkage or mechanical transmission, the sensor being configured to measure the position of a payload (e.g., a substrate) relative to the actual end effector of the robot and / or measure the position of the robot relative to features around a transfer point and / or verify the wafer delivery position relative to the transfer point after wafer placement, which will allow the robot control system to adapt to the initial wafer position, wafer slippage, or mechanism changes over time such as mechanical wear, thermal expansion, or deflection due to the payload weight. One method of such sensing is to use a local radar system mounted on the robot base, arm, or end effector, which can see or sense the robot payload or the robot environment. Another example method is to mount the radar to the system and measure the position of the robot or the substrate.

[0024] Referring Figure 3 , which shows a top view of an example embodiment. The robotic arm 36 holds the substrate 14 on the end effector 92 and positions the substrate 14 into the processing module 16. The robotic arm 36 includes a radar transmitter and receiver 200 on the robotic arm 36. The radar transmitter and receiver 200 are configured to transmit radio waves, as shown at 202, and then detect reflected waves 204 from the substrate 14 and reflected waves 206 from the processing chamber 16. The reflected waves 204, 206 detected by the radar transmitter and receiver 200 can be used to determine the position, range, angle, or velocity of the substrate 14 and the processing chamber. This can be relative to the robotic arm 36 and / or relative to each other. In an alternative embodiment, an optical system or a sonar system may be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system may be used.

[0025] Still referring Figure 4 , as Figure 3 an alternative to the system shown, or as Figure 3 an addition to the system shown, the processing module 16 may include one or more radar transmitters and receivers 200 on the inner wall of the processing module 16. Figure 4 shows three (33) radar transmitters and receivers 200 on the inner wall of the processing module 16. The radar transmitters and receivers 200 are configured to transmit radio waves, as shown at 202, and then detect reflected waves 204 from the substrate 14 (and possibly the end effector 92). The reflected waves 204, 206 detected by the radar transmitters and receivers 200 can be used to determine the position, range, angle, or velocity of the substrate 14 (and the end effector 92) relative to the processing chamber 16. In an alternative embodiment, an optical system or a sonar system may be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system may be used.

[0026] Still referringFigure 5 , shows another exemplary embodiment. This can be used separately from the embodiments shown in Figure 3 and Figure 4 , or in addition to the features in those embodiments. The robotic arm 36 is shown holding the substrate 14 on the end effector 92 and positioning the substrate 14 into the processing module 16. The robotic arm 36 includes a radar transmitter 208 on the robotic arm 36. The radar transmitter 208 is configured to transmit radio waves, as shown at 202. The wave 202 is detected by a receiver 210 on the wall of the processing module 16. The wave 202 can be used to determine the position, range, angle, or velocity of the substrate 14 and the end effector 92. In an alternative embodiment, an optical system or a sonar system can be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0027] Also referring to Figure 6 , shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 - 5 , or in addition to the features in those embodiments. The shown robotic arm 36 holds the substrate 14 on the end effector 92 and positions the substrate 14 into the processing module 16. The robotic arm 36 includes a radar receiver 212 on the robotic arm 36. The robotic arm processing module 16 includes a radar transmitter 214 on the wall of the processing module 16. The radar transmitter 214 is configured to transmit radio waves, as shown at 202. The wave 202 is detected by the receiver 212. The wave 202 can be used to determine the position, range, angle, or velocity of the substrate 14 and the end effector 92. In an alternative embodiment, an optical system or a sonar system can be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0028] Also refer to Figure 7 , shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 - 6 , or in addition to the features in those embodiments. The shown robotic arm 36 holds the substrate 14 on the end effector 92 and positions the substrate 14 into the processing module 16. This figure shows the sourced and measured end point positions of the substrate or fixture. The radar transmitter and receiver 200 can be located on the substrate or on a fixture 36 carried by the robot. The radar transmitter and receiver 200 are configured to transmit radio waves, as shown at 202, and then detect the reflected wave 206 from the processing chamber 16. The reflected wave 206 detected by the radar transmitter and receiver 200 can be used to determine the position, range, angle, or velocity. In an alternative embodiment, an optical system or a sonar system can be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0029] Reference is also made to Figure 8 which shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 - 7 or in addition to the features of those embodiments. The robotic arm 36 shown holds the substrate 14 on the end effector 92 and positions the substrate 14 into the processing module 16. This figure shows the substrate or fixture source and the endpoint positions measured by the system or the robot. The radar transmitter 208 is located on the base or a fixture 36 carried by the robot, and the receiver 210 is located in the processing module 16 and the receiver 212 is located on the robot 36. Waves 202 and 206 can be used to determine position, range, angle, or velocity. In alternative embodiments, an optical system or a sonar system can be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0030] Reference is also made to Figure 9 which shows another exemplary embodiment. This can be used separately from the embodiments shown in Figures 3 - 8 or in addition to the features of those embodiments. The robotic arm 36 shown holds the substrate 14 on the end effector 92 and positions the substrate 14 into the processing module 16. This figure shows the system or robotic arm source and the endpoint positions measured by the substrate or a fixture. The radar receiver 230 is located on the substrate or a fixture carried by the robot 36, and the transmitter 200 is located in the robot or the system. Wave 202 can be used to determine position, range, angle, or velocity. In alternative embodiments, an optical system or a sonar system can be used instead of radar. Alternatively, a combination of these systems or any other non-contact sensing system can be used.

[0031] Radar-based position measurement for a robotic system can be used for but not limited to:

[0032] · Substrate presence detection

[0033] · Substrate breakage detection

[0034] · Substrate position measurement relative to the robotic arm or system features

[0035] · Substrate position correction relative to the robotic arm or system features

[0036] · Robotic endpoint position measurement relative to the system features or the environment

[0037] · Detect performance changes of the robot's position, velocity, acceleration, vibration over time

[0038] · Detect changes in the environment, physical dimensions, shape, or position

[0039] · Teach, verify, or adjust the robotic mechanical settings and reference positions

[0040] · Teach, verify, or adjust the robotic transfer positions

[0041] · Obstacle detection within the robotic workspace

[0042] · Safety interlock verification (verifying the opening / closing of the trough valve before the robotic arm extends)

[0043] · Error recovery, the position of the robot in the system, the position of the payload, payload damage, the performance / damage of the robotic mechanism after a collision

[0044] · The operator, maintenance technician, collaborative robot / machine, or the sensor installation configuration of the AGV in the robotic workspace can be arranged in but not limited to the following configurations:

[0045] · Radar transmitters and receivers installed on the robot (e.g., see Figure 3 )

[0046] · Radar transmitters and receivers installed on the system (e.g., see Figure 4 )

[0047] · Radar transmitters installed on the robot and receivers installed on the system (e.g., see Figure 5 )

[0048] · Radar transmitters installed on the system and receivers installed on the robot (e.g., see

[0049] Figure 6 )

[0050] An example device can be provided, the device includes:

[0051] At least one transmitter, configured to transmit energy;

[0052] At least one receiver, configured to receive the transmitted energy,

[0053] wherein at least one transmitter is installed on at least one of the following:

[0054] The robotic arm,

[0055] The end effector of the robotic arm,

[0056] The substrate on the robotic arm, or

[0057] The substrate processing module,

[0058] wherein at least one receiver is installed on at least one of the following:

[0059] The robotic arm,

[0060] The end effector of the robotic arm,

[0061] the substrate on the robotic arm, or

[0062] the substrate processing module.

[0063] The emitted energy may include at least one of the following:

[0064] Radio waves,

[0065] light energy, or

[0066] sound energy.

[0067] The at least one transmitter and the at least one receiver may include a transceiver configured to both emit the emitted energy and receive the reflected energy as the received energy.

[0068] The at least one receiver may be configured to receive the emitted energy as reflected energy that has been reflected from at least one of the following:

[0069] The robotic arm,

[0070] the end effector of the robotic arm,

[0071] the substrate on the robotic arm, or

[0072] the substrate processing module.

[0073] The at least one transmitter may be mounted on the robotic arm and the at least one receiver is mounted on the robotic arm.

[0074] The at least one transmitter may include a plurality of transmitters, wherein the plurality of transmitters are mounted to a chamber of the substrate processing module and have respective different energy transmission directions that are directed toward a central substrate positioning area in the chamber.

[0075] The at least one transmitter may be mounted on the robotic arm and the at least one receiver is mounted on the substrate processing module, wherein the at least one receiver includes a plurality of receivers, wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module.

[0076] The at least one transmitter may be mounted to the substrate processing module, wherein the at least one transmitter includes a plurality of transmitters, wherein the plurality of transmitters are located at different angular positions relative to the center of the chamber of the substrate processing module, and wherein the at least one receiver is located on the robotic arm.

[0077] The at least one transmitter and the at least one receiver may be mounted on the substrate.

[0078] At least one emitter can be mounted on a substrate, wherein at least one receiver includes a plurality of receivers, and wherein the plurality of receivers are located at different angular positions relative to the center of a chamber of a substrate processing module.

[0079] At least one emitter can be mounted to a robotic arm and a substrate processing module, wherein at least one emitter includes a plurality of emitters, and wherein the plurality of emitters on the substrate processing module are located at different angular positions relative to the center of a chamber of the substrate processing module, and at least one receiver is located on the substrate.

[0080] An example method can be provided that includes:

[0081] Mounting at least one emitter on at least one of:

[0082] A robotic arm,

[0083] An end effector of the robotic arm,

[0084] A substrate on the robotic arm, or

[0085] A substrate processing module,

[0086] Wherein at least one receiver is configured to emit energy;

[0087] Mounting at least one receiver on at least one of:

[0088] A robotic arm,

[0089] An end effector of the robotic arm,

[0090] A substrate on the robotic arm, or

[0091] A substrate processing module,

[0092] Wherein at least one receiver is configured to receive the emitted energy.

[0093] At least one emitter and at least one receiver can include a transceiver that is configured to both emit energy and receive reflected energy as received energy.

[0094] A receiver can be configured to receive the emitted energy as reflected energy that has been reflected from at least one of the following:

[0095] A robotic arm,

[0096] An end effector on the robotic arm,

[0097] A substrate on the robotic arm, or

[0098] A substrate processing module.

[0099] At least one transmitter can be mounted on a robotic arm, and at least one receiver is mounted on the robotic arm. At least one transmitter can include a plurality of transmitters, wherein the plurality of transmitters are mounted to a chamber of the substrate processing module and have respective different energy transmission directions that are oriented toward a central substrate positioning region in the chamber. At least one transmitter can be mounted on a robotic arm, and at least one receiver is mounted on the substrate processing module, wherein at least one receiver includes a plurality of receivers, wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module. At least one transmitter can be mounted to the substrate processing module, wherein at least one transmitter includes a plurality of transmitters, wherein the plurality of transmitters are located at different angular positions relative to the center of the chamber of the substrate processing module, and at least one receiver is located on the robotic arm. At least one transmitter and at least one receiver can be mounted on a substrate. At least one transmitter can be mounted on a substrate, and wherein at least one receiver includes a plurality of receivers, wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module. At least one transmitter can be mounted to the robotic arm and the substrate processing module, wherein at least one transmitter includes a plurality of transmitters, wherein the plurality of transmitters on the substrate processing module are located at different angular positions relative to the center of the chamber of the substrate processing module, and at least one receiver is located on the substrate.

[0100] An example method can be provided that includes:

[0101] Emit energy from a transmitter,

[0102] Receive the emitted energy by a receiver,

[0103] wherein at least one transmitter is mounted on at least one of the following:

[0104] A robotic arm,

[0105] An end effector of the robotic arm,

[0106] A substrate on the robotic arm, or

[0107] A substrate processing module,

[0108] wherein at least one receiver is mounted on at least one of the following:

[0109] A robotic arm,

[0110] An end effector of the robotic arm,

[0111] A substrate on the robotic arm, or

[0112] A substrate processing module;

[0113] Determine, at least in part based on energy received by at least one receiver:

[0114] At least one of the following with respect to the substrate processing module:

[0115] The position, and / or extent, and / or angle, and / or velocity of the substrate,

[0116] The position, and / or extent, and / or angle, and / or velocity of the robotic arm, or

[0117] The position, and / or extent, and / or angle, and / or velocity of the end effector,

[0118] Or

[0119] The position of the substrate on the end effector and / or the robotic arm.

[0120] An example apparatus may be provided that includes at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code being configured to, with the at least one processor, cause the apparatus to:

[0121] Cause energy to be transmitted from a transmitter and received by a receiver,

[0122] Wherein at least one transmitter is mounted on at least one of the following:

[0123] The robotic arm,

[0124] The end effector of the robotic arm,

[0125] The substrate on the robotic arm, or

[0126] The substrate processing module,

[0127] Wherein at least one receiver is mounted on at least one of the following:

[0128] The robotic arm,

[0129] The end effector of the robotic arm,

[0130] The substrate on the robotic arm, or

[0131] The substrate processing module; and

[0132] At least in part based on the energy received by at least one receiver,

[0133] Determine at least one of the following with respect to the substrate processing module:

[0134] The position, and / or extent, and / or angle, and / or velocity of the substrate,

[0135] The position, and / or range, and / or angle, and / or speed of the robotic arm, or

[0136] The position, and / or range, and / or angle, and / or speed of the end effector,

[0137] Or

[0138] Determine the position of the substrate on the end effector and / or the robotic arm.

[0139] An example apparatus can be provided, the apparatus including:

[0140] Means for emitting energy from a transmitter,

[0141] Means for receiving the emitted energy by a receiver,

[0142] Wherein at least one transmitter is mounted on at least one of the following:

[0143] The robotic arm,

[0144] The end effector of the robotic arm,

[0145] The substrate on the robotic arm, or

[0146] The substrate processing module,

[0147] Wherein at least one receiver is mounted on at least one of the following:

[0148] The robotic arm,

[0149] The end effector of the robotic arm,

[0150] The substrate on the robotic arm, or

[0151] The substrate processing module; and

[0152] An apparatus, at least in part based on the energy received by at least one receiver, for:

[0153] Determine at least one of the following relative to the substrate processing module:

[0154] The position, and / or range, and / or angle, and / or speed of the substrate,

[0155] The position, and / or range, and / or angle, and / or speed of the robotic arm, or

[0156] The position, and / or range, and / or angle, and / or speed of the end effector,

[0157] Or

[0158] Determine the position of the substrate on the end effector and / or the robotic arm.

[0159] It should be understood that the foregoing description is merely illustrative. Those skilled in the art can design various alternatives and modifications. For example, the features recited in the various dependent claims can be combined with each other in any suitable combination. In addition, the features from the above different embodiments can be selectively combined into new embodiments. Therefore, this specification is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. A device, comprising: At least one emitter, configured to emit energy; At least one receiver, configured to receive the emitted energy, wherein the at least one emitter is mounted on at least one of the following: A robotic arm, An end effector of the robotic arm, A substrate on the robotic arm, or A substrate processing module, wherein the at least one receiver is mounted on at least one of the following: The robotic arm, The end effector of the robotic arm, The substrate on the robotic arm, or The substrate processing module; wherein the at least one emitter includes a plurality of emitters, and the plurality of emitters are mounted to a chamber of the substrate processing module and have respective different energy transmission directions, and the respective different energy transmission directions are oriented towards a central substrate positioning area in the chamber.

2. The device according to claim 1, wherein the emitted energy comprises at least one of the following: radio waves, light energy, or sound energy.

3. The device according to claim 1, wherein the at least one transmitter and the at least one receiver comprise a transceiver configured to both emit the emitted energy and receive the reflected energy as the received energy.

4. The device according to claim 1, wherein the at least one receiver is configured to receive the emitted energy as reflected energy that has been reflected from at least one of the following: the robotic arm, the end effector on the robotic arm, the substrate on the robotic arm, or the substrate processing module.

5. The device according to claim 1, wherein the at least one transmitter is mounted on the robotic arm and the at least one receiver is mounted on the robotic arm.

6. The device according to claim 1, wherein the at least one transmitter is mounted on the robotic arm and the at least one receiver is mounted on the substrate processing module, wherein the at least one receiver comprises a plurality of receivers, and wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module.

7. The apparatus according to claim 1, wherein the at least one emitter is mounted to the substrate processing module, wherein the at least one emitter includes a plurality of emitters, wherein the plurality of emitters are located at different angular positions relative to the center of the chamber of the substrate processing module, and wherein the at least one receiver is located on the robotic arm.

8. The apparatus according to claim 1, wherein the at least one emitter and the at least one receiver are mounted on the substrate.

9. The apparatus according to claim 1, wherein the at least one emitter is mounted on the substrate, and wherein the at least one receiver includes a plurality of receivers, wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module.

10. The apparatus according to claim 1, wherein the at least one emitter is mounted to the robotic arm and the substrate processing module, wherein the at least one emitter includes a plurality of emitters, wherein the plurality of emitters on the substrate processing module are located at different angular positions relative to the center of the chamber of the substrate processing module, and wherein the at least one receiver is located on the substrate.

11. A method, comprising: Mount at least one emitter on at least one of the following: A robotic arm, An end effector of the robotic arm, A substrate on the robotic arm, or A substrate processing module, wherein the at least one emitter is configured to emit energy; Mount at least one receiver on at least one of the following: The robotic arm, The end effector of the robotic arm, The substrate on the robotic arm, or The substrate processing module, wherein the at least one receiver is configured to receive the emitted energy; wherein the at least one emitter includes a plurality of emitters, and the plurality of emitters are mounted to a chamber of the substrate processing module and have respective different energy transmission directions, and the respective different energy transmission directions are oriented towards a central substrate positioning area in the chamber.

12. The method according to claim 11, wherein the at least one emitter and the at least one receiver include a transceiver configured to both emit the emitted energy and receive the reflected energy as the received energy.

13. The method according to claim 11, wherein the receiver is configured to receive the emitted energy as reflected energy that has been reflected from at least one of: the robotic arm, The end effector on the robotic arm, the substrate on the robotic arm, or the substrate processing module.

14. The method according to claim 11, wherein, The at least one emitter is mounted on the robotic arm, and the at least one receiver is mounted on the robotic arm.

15. The method according to claim 11, wherein at least one transmitter is mounted on the robotic arm, and at least one receiver is mounted on the substrate processing module, wherein the at least one receiver includes a plurality of receivers, and wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module.

16. The method according to claim 11, wherein at least one transmitter is mounted to the substrate processing module, wherein the at least one transmitter includes a plurality of transmitters, wherein the plurality of transmitters are located at different angular positions relative to the center of the chamber of the substrate processing module, and wherein at least one receiver is located on the robotic arm.

17. The method according to claim 11, wherein at least one transmitter and at least one receiver are mounted on the substrate.

18. The method according to claim 11, wherein at least one transmitter is mounted on the substrate, and wherein the at least one receiver includes a plurality of receivers, and wherein the plurality of receivers are located at different angular positions relative to the center of the chamber of the substrate processing module.

19. The method according to claim 11, wherein at least one transmitter is mounted to the robotic arm and the substrate processing module, wherein the at least one transmitter includes a plurality of transmitters, wherein the plurality of transmitters on the substrate processing module are located at different angular positions relative to the center of the chamber of the substrate processing module, and wherein at least one receiver is located on the substrate.

20. A method, comprising: Emit energy from the emitter, Receive the emitted energy by the receiver, where at least one emitter is mounted on at least one of the following: A robotic arm, An end effector of the robotic arm, A substrate on the robotic arm, or A substrate processing module, where at least one receiver is mounted on at least one of the following: The robotic arm, The end effector of the robotic arm, The substrate on the robotic arm, or The substrate processing module; Determine, at least in part based on the energy received by the at least one receiver: With respect to at least one of the following of the substrate processing module: The position, and / or extent, and / or angle, and / or velocity of the substrate, The position, and / or extent, and / or angle, and / or velocity of the robotic arm, Or The position, and / or extent, and / or angle, and / or velocity of the end effector, Or The position of the substrate on the end effector and / or the robotic arm; wherein the at least one emitter includes a plurality of emitters, and the plurality of emitters are mounted to a chamber of the substrate processing module and have respective different energy transmission directions, and the respective different energy transmission directions are oriented towards a central substrate positioning area in the chamber.

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