A three-dimensional imaging all-solid-state laser radar device

Abstract

A three-dimensional imaging all-solid-state laser radar device relates to the laser radar technical field, and solves the problems of existing laser radar system integration miniaturization and weak external anti-interference ability. The device includes: a tunable semiconductor laser array, a transmitting chip, an optical path lens system, a laser receiving chip and a digital processing system. The transmitting chip and the laser receiving chip are both optical phased arrays. The tunable semiconductor laser array can emit a laser beam array. The transmitting chip can convert the laser beam array emitted by the tunable semiconductor laser array into a scanning beam with a phase difference. The laser echo signal obtained by reflection from the target object can be received by the laser receiving chip after being transmitted through the optical path lens system. The laser receiving chip can process the laser echo signal to obtain an analog signal and send the analog signal to the digital processing system. The present invention realizes integrated miniaturization and realizes high-precision, high-anti-interference three-dimensional imaging function.

Description

Technical Field

[0001] The present invention relates to the field of laser radar technology, and in particular to a three-dimensional imaging all-solid-state laser radar device. Background Art

[0002] LiDAR is one of the main sensors for autonomous driving and robotic applications. Its importance to driverless cars is like that of sonar systems to whales and eyes to humans, so it is called the eyes of smart cars. LiDAR mainly measures the position, speed and other characteristics of the target by emitting a laser beam to scan the target object and receiving the echo signal reflected from the target object. At the same time, the cloud computing system processes this information to form a 3D environmental map with an accuracy of up to centimeters. Since the laser wavelength of the LiDAR system is generally only in the micrometer range, it can detect very small targets, has strong directionality, fast response, and its measurement accuracy is much higher than that of millimeter-wave radar and other standard vehicle-mounted radars. It is currently the most effective solution for environmental sensing of smart cars.

[0003] According to the presence or absence of mechanical rotating parts, laser radar can be divided into mechanical laser radar and solid-state laser radar. Traditional two-dimensional mechanical rotating laser radar is heavy, expensive, and has large mechanical wear. Its internal structure includes optical devices, electronic components, and laser devices, which are numerous and scattered, and the process is difficult. In particular, the debugging process of precision components is complicated, making it difficult to achieve mass production and promotion. For solid-state laser radar, it is smaller in size and has relatively high measurement accuracy. It can be hidden in the car body without destroying the appearance. At present, the laser radar that is most likely to meet the requirements of automotive regulations is the fully solid-state optical phased array laser radar implemented by the optical phased array (OPA) principle. There are no macroscopic and microscopic moving parts inside, so there is no mechanical wear and high reliability. It is recognized as an ideal choice for low-cost and miniaturized laser radar.

[0004] At present, the transmitting and receiving ends of the OPA-type all-solid-state laser radar are both large-scale optical phased arrays. The transmitting end is used to complete two-dimensional beam scanning. This process requires laser wavelength tuning and phase shifters to control one dimension respectively to complete the collaborative work, which is difficult to control. In addition, the phase shifter at the transmitting end also needs to be driven by the control circuit, and its power consumption and area increase dramatically with the increase in the number of these components; the receiving end is used to receive and process the echo signal reflected back from the laser contact target. When encountering extreme weather, the light energy is affected by the refractive index, which will cause the distortion of the receiving end light signal, causing the laser radar to misidentify. How to achieve the miniaturization of the overall system integration and how to improve the radar's anti-interference ability to the external environment, and achieve efficient coupling of the receiving end light signal have always been the focus and difficulty in the field of laser radar. Summary of the invention

[0005] In order to solve the above-mentioned problems, the present invention provides a three-dimensional imaging all-solid-state laser radar device.

[0006] The technical solution adopted by the present invention to solve the technical problem is as follows:

[0007] A three-dimensional imaging all-solid-state laser radar device comprises a tunable semiconductor laser array, a transmitting chip, an optical path lens system, a laser receiving chip and a digital processing system. The transmitting chip and the laser receiving chip are both optical phased arrays. The tunable semiconductor laser array can emit a laser beam array. The transmitting chip can convert the laser beam array emitted by the tunable semiconductor laser array into a scanning beam with a phase difference. The scanning beam emitted by the transmitting chip can be transmitted through the optical path lens system and then irradiated onto a target object, and a laser echo signal can be obtained after being reflected by the target object. The laser echo signal can be transmitted through the optical path lens system and then received by the laser receiving chip. The laser receiving chip can process the laser echo signal to obtain an analog signal and send the analog signal to the digital processing system. The digital processing system can process the analog signal. The processing of the analog signal by the digital processing system can realize three-dimensional imaging of the target object.

[0008] A three-dimensional imaging all-solid-state laser radar system comprises a plurality of three-dimensional imaging all-solid-state laser radar devices, wherein the field of view of the all-solid-state laser radar system in one dimension is 360°.

[0009] The beneficial effects of the present invention are:

[0010] A three-dimensional imaging all-solid-state laser radar device of the present invention replaces the traditional single laser tube with a tunable semiconductor laser array, and the output light energy is higher, which is beneficial to the penetration ability of light signals in extreme weather and improves the radar's anti-interference ability to the external environment; the beam shaping technology of the optical path lens system is used to achieve efficient coupling and integrated miniaturization of the transmitting chip and the laser receiving chip, and the laser echo signal reflected by the target object is received by the laser receiving chip, thereby improving the radar's sensitivity to the signal during detection. The present invention can also realize the high-precision, high-interference-resistant three-dimensional imaging function of the entire all-solid-state laser radar. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The figure is a schematic diagram of an overall three-dimensional imaging all-solid-state laser radar device according to the present invention.

[0012] Figure 2 A schematic diagram of a transmitting chip of a three-dimensional imaging all-solid-state laser radar device of the present invention.

[0013] Figure 3 Schematic diagram of a microlens array of a three-dimensional imaging all-solid-state laser radar device of the present invention.

[0014] Figure 4 This is a schematic diagram of a laser receiving chip of a three-dimensional imaging all-solid-state laser radar device of the present invention.

[0015] Figure 5 A schematic diagram of a pixel sensor unit of a three-dimensional imaging all-solid-state laser radar device of the present invention.

[0016] In the figure: 1. tunable semiconductor laser array, 2. transmitting chip, 201. first optical beam splitting network, 202. beam splitter, 203. multimode interference coupler, 204. phased array, 205. phase shifter, 206. antenna, 3. first lens group, 4. microlens array, 5. second lens group, 6. polarizer one, 7. Faraday rotator, 8. lens one, 9. target, 10. polarizer two, 11. lens two, 12. objective lens, 13. laser receiving chip, 1301. second optical beam splitting network, 1302. delay line group, 1303. pixel sensor array, 1304. silicon waveguide, 1305. directional coupler, 1306. grating coupler, 1307. pin photodiode, 1308. transimpedance amplifier, 1309. electrode, 1310. signal output end, 14. digital processing system. DETAILED DESCRIPTION

[0017] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0018] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0019] A three-dimensional imaging all-solid-state laser radar device includes a tunable semiconductor laser array 1, a transmitting chip 2, an optical path lens system, the transmitting chip 2 and a digital processing system 14. The transmitting chip 2 and the laser receiving chip 13 are both optical phased arrays. The tunable semiconductor laser array 1 can emit a laser beam array. The transmitting chip 2 can convert the laser beam array emitted by the tunable semiconductor laser array 1 into a scanning beam with a phase difference. The scanning beam emitted by the transmitting chip 2 can be transmitted through the optical path lens system and then irradiated onto a target object, and a laser echo signal can be obtained after being reflected by the target object. The laser echo signal can be transmitted through the optical path lens system and then received by the laser receiving chip 13. The laser receiving chip 13 can process the laser echo signal to obtain an analog signal and send the analog signal to the digital processing system 14. The digital processing system 14 can process the analog signal. The processing of the analog signal by the digital processing system 14 can realize three-dimensional imaging of the target object, that is, obtain a three-dimensional imaging image of the target object.

[0020] As a laser light source of a three-dimensional imaging all-solid-state laser radar device, the tunable semiconductor laser array has an operating band of 1500nm to 1600nm, and is used to provide energy and realize the longitudinal scanning of the light beam in the field of view (the field of view is the field of view of the all-solid-state laser radar device). The longitudinal angle range of the wavelength tuning is 15 degrees. The direction of the light beam incident on the transmitting chip 2 is longitudinal, and the transverse direction is perpendicular to the longitudinal direction. Figure 1 , both horizontal and vertical directions are directions parallel to the horizontal plane, the vertical direction is the horizontal direction to the right, and the horizontal direction refers to the direction perpendicular to the paper surface.

[0021] The transmitting chip 2 is an expandable optical phased array, which can split the light beam input thereto to obtain multiple optical signals and change the phase of the optical signals so that there is a phase difference between the optical signals, thereby completing the scanning of another dimension in the field of view and completing the lateral scanning in the field of view. That is, the tunable semiconductor laser array is used to realize the scanning in one dimension of the field of view, and the transmitting chip 2 is used to realize the scanning in another dimension of the field of view.

[0022] The transmitting chip 2 includes a grating coupler, a first optical beam splitting network 201 and a phased array 204, as shown in the specific schematic diagram. Figure 2As shown. The grating coupler is used to couple the laser beam array emitted by the tunable semiconductor laser array to the transmitting chip 2 to obtain an optical signal. The first optical splitting network is used for optical signal branching. The first optical splitting network includes a beam splitter 202 and a multimode interference coupler 203. The grating coupler, the beam splitter 202 and the multimode interference coupler 203 are arranged in sequence. The beam splitter 202 is used for beam splitting. The single-channel optical signal obtained by the grating coupler is split to obtain a multi-channel optical signal. The optical signal output by the beam splitter 202 can be transmitted to the phased array 204 through the multimode interference coupler 203. The multimode interference coupler 203 can reduce the loss of optical transmission so that the phases of all optical signals incident on the phased array 204 are the same. The multimode interference coupler 203 can be directly connected to the phased array 204. Other devices such as optical amplifiers and beam splitting devices can be connected between the multimode interference coupler 203 and the phased array 204. The phases of all optical signals incident on the phased array 204 are the same. The phased array 204 is used to phase-control the optical signals emitted by the first optical splitting network and incident thereon so that there is a phase difference between the optical signals emitted by the phased array 204. The optical signal with a phase difference emitted by the phased array 204 is a scanning light beam with a phase difference. The phased array 204 includes a phase shifter 205 and an antenna 206. The phase shifter 205 is used to change the phase of the optical signal input thereto, and the antenna 206 is used to transmit the optical signal controlled by the phase shifter 205. The grating coupler couples the laser emitted by the tunable semiconductor laser array into the transmitting chip 2. After the beam splitter 202 divides the single optical signal into multiple optical signals, the multiple optical signals are distributed to the phased array 204 through the multimode interference coupler 203. The phase of the optical signal emitted by each antenna 206 in the phased array is changed by adjusting the phase shifter 205 through the external circuit to generate a phase difference, which is then transmitted through the antenna 206 to complete the scanning of the lateral dimension in the field of view. The lateral scanning range is 120 degrees. The phased array 204 is an array of m (columns) × n (rows), where m and n are both integers greater than 1. Each phased unit of the phased array 204 includes a phase shifter 205 and an antenna 206 corresponding to the phase shifter 205. There are m phase shifters 205 and m antennas 206. The phase of the optical signal incident on each phase shifter 205 is the same. The beam splitter 202 divides the optical signal incident thereon into n paths, and there are n multimode interference couplers 203. The above-mentioned phase shifter 205 is an electrically driven thermo-optical modulation. The transmitting chip 2 changes the phase of the optical signal of each antenna in the phased array 204 through the phase shifter 205 to generate a phase difference and complete the horizontal scanning in the field of view.

[0023] The optical path lens system is used to match the transmission function of the transmitting chip 2 and the receiving function of the receiving chip. The optical path lens system includes a microlens array 4, an objective lens 12, a Faraday rotator 7 and a polarizing plate 2 10, and also includes a first lens group 3, a second lens group 5, a reflecting device, a lens 1 8 and a lens 2 11. The transmitting chip 2, the first lens group 3, the microlens array 4, the second lens group 3 and the reflecting device are arranged in sequence, and the lens 1 8, the Faraday rotator 7, the polarizing plate 2 10, the lens 2 11, the objective lens 12 and the laser receiving chip 13 are arranged in sequence. The scanning light beam emitted by the transmitting chip 2 is emitted to the first lens group 3, and after the first lens group 3 expands the light beam, it is incident on the microlens array 4. The microlens array 4 allows the light beams to be collimated and emitted in parallel without interfering with each other, and then the second lens group 5 combines the light beams, that is, the scanning light beams are converged. After the second lens group 5 combines the light beams, it is reflected to the second polarizer 10 through the reflection device. The polarization direction of the scanning light beam is changed by the second polarizer 10, and then it is incident on the Faraday rotator 7 (at this time, it is reflected to the Faraday rotator 7 through the second polarizer 10). The Faraday rotator 7 changes the polarization direction of the scanning light beam. After the direction is rotated, it is converged by lens 1 8 and finally directed to target object 9; target object 9 reflects the scanning light beam irradiated thereon to obtain a laser echo signal. The laser echo signal reflected by target object 9 is first expanded by lens 1 8 and then rotated in its polarization direction by Faraday rotator 7 before being incident on polarizer 2 10. After the polarization direction of the laser echo signal is changed by polarizer 2 10 (at this time, it is transmitted through polarizer 2 10), it is incident on lens 2 11, and coupled to laser receiving chip 13 through objective lens 12. Laser receiving chip 13 receives the laser echo signal. Faraday rotator 7 is used for light polarization rotation. The polarization direction of the laser echo signal after passing through Faraday rotator 7 and not incident on polarizer 2 10 is completely different from the polarization direction of the scanning light beam after passing through polarizer 2 10 and about to be incident on Faraday rotator 7, that is, the rotation of the polarization direction of the light beam passing through it by Faraday rotator 7 is not equal to 90°. Among them, the schematic diagram of microlens array 4 is as shown in FIG. Figure 3 As shown, its shape can be square, hexagonal, triangular, pentagonal, etc. In this embodiment, each microlens unit is circular; the reflection device adopts a polarizer 6, and the polarizers include two groups of polarizers, polarizer 1 6 and polarizer 2 10, and the polarizers are used to branch light signals with different transmittances; the first lens group 3 and the second lens group 5 have the same focal length, the first lens group 3 expands the light beam, and the second lens group 5 converges the light beam. In this embodiment, the first lens group 3 and the second lens group 5 have the same structure, and the second lens group 5 is equivalent to the inversion of the first lens group 3.

[0024] The laser receiving chip 13 is an optical phased array of a scalable pixel sensor, as shown in the specific schematic diagram. Figure 4As shown, the laser receiving chip 13 includes a second optical splitting network 1301, a delay line group 1302 and a pixel sensor array 1303. The number of laser echo signals that can be split by the second optical splitting network 1301, the number of delay lines of the delay line group 1302, and the number of pixel sensor units are equal and are arranged one by one in sequence. The second optical splitting network 1301 is used to split the laser echo signal to obtain multiple laser echo signals. The delay line group 1302 is used to delay and compensate for each laser echo signal received. The pixel sensor array 1303 is a rectangular array. The pixel sensor units of the pixel sensor array 1303 are as follows: Figure 5 As shown, the pixel sensor unit includes a silicon waveguide 1304, a directional coupler 1305, a grating coupler 1306, a pin photodiode 1307 and a transimpedance amplifier 1308. The transimpedance amplifier 1308 is provided with an electrode 1309 and a signal output terminal 1310. The laser receiving chip 13 is connected to the digital processing system 14 through the signal output terminal 1310. The laser echo signal is coupled into the laser receiving chip 13 after being processed by the optical path lens system. After the laser echo signal is split by the second optical beam splitting network 1301, each laser echo signal after the splitting enters the delay line group 1302. Each laser echo signal is delayed and compensated, and finally transmitted to the pixel sensor array 1303. The lengths of each single delay line in the delay line group 1302 are different. Each pixel sensor unit corresponds to a delay line. In a single pixel sensor unit, the silicon waveguide 1304 is used to obtain the laser echo signal transmitted by the delay line. The directional coupler 1305 can couple the laser echo signal of the silicon waveguide 1304 into the pin photodiode 1307. The grating coupler 1306 is used to absorb scattered light and can couple the laser echo signal scattered by the field of view into the pin photodiode 1307. The pin photodiode 1307 can convert the laser echo signal coupled thereto by the directional coupler 1305 and the grating coupler 1306 into an analog signal. The analog signal is transmitted to the transimpedance amplifier 1308. The transimpedance amplifier 1308 can amplify the analog signal. The amplified analog signal is finally output from the signal output terminal 1310 to the digital processing system 14. The material of the pin photodiode 1307 is germanium, which is used to receive the coupled laser echo signal to form a detector. The above-mentioned transimpedance amplifier 1308 is used to amplify the optical signal and suppress the noise signal.

[0025] The digital processing system 14 includes a digital-to-analog converter and a field programmable gate array (FPGA). The analog signal sent by the laser receiving chip 13 is digitized by the digital-to-analog converter, and the digitized digital signal is digitally processed by the FPGA to achieve three-dimensional imaging of the target object 9.

[0026] The all-solid-state laser radar device of this embodiment has a horizontal field of view angle of 120°, a vertical field of view angle of 15°, and a maximum scanning distance of 150m.

[0027] Another aspect of the present invention provides a three-dimensional imaging all-solid-state laser radar system, including the above-mentioned three-dimensional imaging all-solid-state laser radar device. Preferably, multiple three-dimensional imaging all-solid-state laser radar devices can form a 360-degree field of view scan in the horizontal direction, and the horizontal scanning fields of view can be superimposed. When multiple three-dimensional imaging all-solid-state laser radar devices are used, the scanning intervals of each all-solid-state laser radar device do not interfere with each other during scanning, that is, any two all-solid-state laser radar devices do not scan at the same time. According to the above-mentioned specific implementation method, at least three three-dimensional imaging all-solid-state laser radars need to be combined, and the horizontal field of view angles can be superimposed on each other to complete the image stitching in the horizontal direction of the space.

[0028] The three-dimensional imaging all-solid-state laser radar device of the present invention can be shared with other radars to achieve 360° scanning of the horizontal field of view. At this time, the three-dimensional imaging all-solid-state laser radar device of the present invention is required to be insensitive to the receiving signals of other radars, and other radars are also insensitive to the laser echo signals of the present invention.

[0029] A three-dimensional imaging all-solid-state laser radar device of the present invention replaces the traditional single laser tube with a tunable semiconductor laser array, and the output light energy is higher, which is beneficial to the penetration ability of light signals in extreme weather and improves the radar's anti-interference ability to the external environment; the beam shaping technology of the optical path lens system is used to achieve efficient coupling and integrated miniaturization with the OPA chip (transmitting chip 2 and laser receiving chip 13), and the laser echo signal reflected by the target object 9 is received by the OPA chip, thereby improving the radar's sensitivity to the signal during detection. The present invention can also realize the high-precision, high-interference-resistant three-dimensional imaging function of the entire all-solid-state laser radar.

[0030] Specifically, the laser echo signal reflected by the target object 9 is received by the pixel sensor array 1303 on the laser receiving chip 13, and distributed to each pin photodiode 1307 by the waveguide network. The signal is amplified and then processed to improve the sensitivity of the signal during radar detection. At the same time, the high-precision, high-anti-interference three-dimensional imaging function of the entire all-solid-state laser radar can be realized.

Claims

1. A three-dimensional imaging all-solid-state laser radar device, It is characterized in that The invention comprises a tunable semiconductor laser array (1), a transmitting chip (2), an optical path lens system, a laser receiving chip (13) and a digital processing system (14), wherein the transmitting chip (2) and the laser receiving chip (13) are both optical phased arrays (204), the tunable semiconductor laser array (1) can transmit a laser beam array, the transmitting chip (2) can convert the laser beam array emitted by the tunable semiconductor laser array (1) into a scanning beam with a phase difference, the scanning beam emitted by the transmitting chip (2) can be transmitted through the optical path lens system and then irradiated onto a target object (9), and a laser echo signal can be obtained after being reflected by the target object (9), the laser echo signal can be transmitted through the optical path lens system and then received by the laser receiving chip (13), the laser receiving chip (13) can process the laser echo signal to obtain an analog signal and send the analog signal to the digital processing system (14), and the digital processing system (14) can process the analog signal to achieve three-dimensional imaging of the target object (9); The laser receiving chip (13) comprises a second optical splitting network (1301), a delay line group (1302) and a pixel sensor array (1303) connected in sequence; the pixel sensor array (1303) is connected to a digital processing system (14); the laser echo signal enters the second optical splitting network (1301) after being transmitted through an optical path lens system; the second optical splitting network (1301) is capable of splitting the laser echo signal; the delay line group (1302) is capable of delay compensating for each received laser echo signal; and the pixel sensor array (1303) is capable of processing the delay-compensated laser echo signal to obtain an analog signal and is capable of sending the analog signal to the digital processing system (14).

2. A three-dimensional imaging all-solid-state laser radar device as claimed in claim 1, It is characterized in that The transmitting chip (2) comprises a grating coupler, a first optical beam splitting network (201) and a phased array (204); the grating coupler is used to couple a laser beam array emitted by a tunable semiconductor laser array into the transmitting chip (2) to obtain an optical signal; the first optical beam splitting network (201) is used to branch the optical signal coupled by the grating coupler; and the phased array (204) is used to perform phase control on the optical signal emitted by the first optical beam splitting network (201) and incident thereon, so that the optical signal emitted by the phased array (204) is a scanning optical beam with a phase difference.

3. The all-solid-state laser radar device for three-dimensional imaging as claimed in claim 2, It is characterized in that The first optical splitting network (201) comprises a beam splitter (202) and a multimode interference coupler (203); the beam splitter (202) can split a single optical signal coupled by a grating coupler to obtain multiple optical signals; all optical signals incident on a phased array (204) after being split by the first optical splitting network (201) have the same phase; the phased array (204) comprises a phase shifter (205) and an antenna (206); the multimode interference coupler (203) is located between the beam splitter (202) and the phased array (204); the multiple optical signals emitted by the beam splitter (202) are transmitted through the multimode interference coupler (203) and finally received by the phase shifter (205); the phase shifter (205) is used to change the phase of the optical signal input thereto; and the antenna (206) is used to transmit the optical signal regulated by the phase shifter (205).

4. The all-solid-state laser radar device for three-dimensional imaging as claimed in claim 1, It is characterized in that The optical path lens system comprises a microlens array (4), an objective lens (12), a Faraday rotator (7) and a second polarizer (10). The scanning light beam emitted by the transmitting chip (2) is collimated by the microlens array (4), and then the polarization direction of the scanning light beam is changed by the second polarizer (10) before being incident on the Faraday rotator (7). The Faraday rotator (7) rotates the polarization direction of the scanning light beam and then emits it to the target object (9). The target object (9) reflects the scanning light beam irradiated thereon to obtain a laser echo signal. The laser echo signal reflected by the target object (9) rotates its polarization direction by the Faraday rotator (7) and then is incident on the second polarizer (10). After the polarization direction of the laser echo signal is changed by the second polarizer (10), it is combined and coupled to the laser receiving chip (13) by the objective lens (12). The rotation of the polarization direction of the light beam passing thereon by the Faraday rotator (7) is not equal to 90 degrees.

5. A three-dimensional imaging all-solid-state laser radar device as claimed in claim 4, It is characterized in that The optical path lens system further comprises a first lens group (3), a second lens group (5), a reflecting device, a lens 1 (8) and a lens 2 (11); the transmitting chip (2), the first lens group (3), the microlens array (4), the second lens group (5) and the reflecting device are arranged in sequence; the lens 1 (8), the Faraday rotator (7), the polarizing plate 2 (10), the lens 2 (11), the objective lens (12) and the laser receiving chip (13) are arranged in sequence; the first lens group (3) can diverge the scanning light beam; the second lens group (5) can converge the scanning light beam; the reflecting device can reflect the scanning light beam converged by the second lens group (5) to the polarizing plate 2 (10); the lens 1 (8) can converge the scanning light beam and diverge the laser echo signal; the polarizing plate 2 (10) can reflect the scanning light beam and transmit the laser echo signal; and the lens 2 (11) can diverge the laser echo signal.

6. The all-solid-state laser radar device for three-dimensional imaging as claimed in claim 1, It is characterized in that The lengths of individual delay lines in the delay line group (1302) are different.

7. A three-dimensional imaging all-solid-state laser radar device as claimed in claim 6, It is characterized in that The pixel sensor array (1303) includes a silicon waveguide (1304), a directional coupler (1305), a grating coupler (1306), a pin photodiode (1307) and a transimpedance amplifier (1308). The transimpedance amplifier (1308) is provided with a signal output terminal (1310) connected to a digital processing system (14). The silicon waveguide (1304) can obtain a laser echo signal transmitted by a delay line. The directional coupler (1305) can transmit the laser echo signal of the silicon waveguide (1304) to the optical fiber. Coupled into the pin photodiode (1307), the grating coupler (1306) can couple the scattered laser echo signal into the pin photodiode (1307), the pin photodiode (1307) can convert the laser echo signal coupled thereto into an analog signal and transmit the analog signal to the transimpedance amplifier (1308), the transimpedance amplifier (1308) can amplify the analog signal and output the amplified analog signal from the signal output terminal (1310) to the digital processing system (14).

8. The all-solid-state laser radar device for three-dimensional imaging as claimed in claim 1, It is characterized in that The digital processing system (14) includes a digital-to-analog converter and an FPGA. The digital-to-analog converter can digitize the analog signal sent by the laser receiving chip (13). The digitized digital signal is then digitally processed by the FPGA to achieve three-dimensional imaging of the target object (9).

9. A three-dimensional imaging all-solid-state laser radar system, It is characterized in that It comprises a plurality of all-solid-state laser radar devices for three-dimensional imaging as described in any one of claims 1 to 8, wherein the field of view of the all-solid-state laser radar system in one dimension is 360°.

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