Metasurface optical devices and electronic devices including metasurface optical devices

Abstract

An ultrathin optical device includes a plurality of phase modulation regions configured to modulate a phase of incident light, each of the plurality of phase modulation regions including a plurality of nanostructures, shapes and arrangements of the plurality of nanostructures being determined according to respective rules set for each of the plurality of phase modulation regions, and a compensation region located between kth and (k+1)th phase modulation regions adjacent to each other among the plurality of phase modulation regions and including a compensation structure for buffering an effective refractive index change occurring in a boundary region between the kth and (k+1)th phase modulation regions according to respective rules of the kth and (k+1)th phase modulation regions, where N is a number of the plurality of phase modulation regions, k and N are natural numbers, and k is equal to or greater than 1 and less than N.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2020-0120029, filed with the Korean Intellectual Property Office on September 17, 2020, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The apparatus and methods consistent with the example embodiments relate to a meta-optical device and an electronic device including the meta-optical device. Background Technology

[0004] Planar diffractive devices, including those with metastructures, can exhibit a variety of optical effects that conventional refractive devices may not be able to achieve. Therefore, such planar diffractive devices can be used to realize thin optical systems, thus increasing interest in the use of thin optical systems in many fields.

[0005] Metastructures include nanostructures in which values ​​smaller than the incident light wavelength are applied to shape, periodicity, etc. The nanostructures are designed to satisfy a phase profile set for each location for light in the desired wavelength band, thereby achieving the desired optical performance. When discontinuities occur in the phase profile, light diffraction occurs in unexpected directions, thus reducing optical efficiency. Summary of the Invention

[0006] One or more example embodiments provide super-optimal optics with improved diffraction efficiency.

[0007] In addition, one or more example embodiments provide electronic devices using super-intelligent optics.

[0008] Additional aspects will be set forth in part in the description which follows, and will also be apparent in part from the description, or may be learned by practice of the embodiments presented in this disclosure.

[0009] According to one aspect of the embodiments, a super-optical device is provided, comprising: a plurality of phase modulation regions arranged along a first direction and configured to modulate the phase of incident light, each of the plurality of phase modulation regions including a plurality of nanostructures, the shape and arrangement of the plurality of nanostructures being determined according to a corresponding rule set for each of the plurality of phase modulation regions; and a compensation region located between adjacent k-th phase modulation regions and (k+1)-th phase modulation regions of the plurality of phase modulation regions and including a compensation structure for buffering effective refractive index changes occurring in the boundary region between the k-th phase modulation region and the (k+1)-th phase modulation region according to the corresponding rule of the k-th phase modulation region and the (k+1)-th phase modulation region, wherein N is the number of the plurality of phase modulation regions, k and N are natural numbers, and k is equal to or greater than 1 and less than N.

[0010] The k-th phase modulation region and the (k+1)-th phase modulation region can be configured to modulate the phase of the incident light to have the same phase transition slope sign depending on their position in the first direction.

[0011] Among the multiple nanostructures in the k-th phase modulation region, the nanostructure closest to the compensation region has a width w in the first direction. a Among the multiple nanostructures in the (k+1)th phase modulation region, the nanostructure closest to the compensation region has a width w in the first direction. b And compensate for the width w of the structure c In w a and w b between.

[0012] The compensation structure may include two or more compensation structures having the same width in the first direction and arranged along the first direction.

[0013] The compensation structure may include two or more compensation structures arranged along a first direction, and the width of the two or more compensation structures may vary from w in the first direction. a to w b It changes gradually according to the pattern of change.

[0014] Multiple phase modulation regions can have a circular shape or an annular shape around a circular shape, and the first direction can be radial, extending from the center of the circular shape toward the boundary of the super-optical device.

[0015] When multiple phase modulation regions are the m-th region in order starting from the center and m is greater than or equal to 2 and increases from 2 to N, all m-th regions have a phase modulation range from the first phase to the second phase in the radial direction, and the first phase and the second phase can be different from each other and can be between -2π and 2π.

[0016] The difference between the first phase and the second phase can be 2π or less.

[0017] The radial width of multiple phase modulation regions can be reduced in the direction from the center to the boundary of the super-optical device.

[0018] The compensation region may include multiple compensation regions, and the widths of the multiple compensation regions arranged radially may have the same value or decrease in the direction from the center to the boundary of the super-optical device.

[0019] The compensation region may include multiple compensation regions, and in the phase modulation regions and compensation regions located adjacent to each other, the ratio of the width of the compensation region to the width of the phase modulation region may increase in the direction from the center to the boundary of the super-optical device.

[0020] This ratio can be 25% or less.

[0021] The compensation region may include multiple compensation regions, and the ratio of the number of multiple compensation regions to the number of multiple phase modulation regions may be 50% or greater.

[0022] When the radius of the super-optical device is R, the distance of the compensation region from the center can be greater than R / 2.

[0023] When the incident angle of the incident light is θ, the compensation region can be set at a position where θ is greater than or equal to 30°.

[0024] Each of the multiple nanostructures and compensation structures can have a column shape.

[0025] The super-optical device may also include: a substrate configured to support a plurality of nanostructures and compensation structures; and a surrounding material layer covering the plurality of nanostructures and compensation structures and having a refractive index different from that of the plurality of nanostructures and compensation structures.

[0026] Super-optical devices may also include a substrate and a surrounding material layer disposed on the substrate, and each of the plurality of nanostructures and compensation structures may have a hole shape formed by sculpting the surrounding material layer.

[0027] Multiple nanostructures and compensation structures can be arranged as a multilayer structure stacked in a second direction perpendicular to the first direction.

[0028] The multiple nanostructures may include multiple first nanostructures arranged on a first layer and multiple second nanostructures arranged on a second layer, and the compensation structure may include a first compensation structure arranged on the first layer and a second compensation structure arranged on the second layer.

[0029] When viewed from the second direction, the first compensation structure and the second compensation structure can be arranged to be offset relative to each other in the first direction.

[0030] The lengths of the first compensation structure and the second compensation structure offset from each other in the first direction can increase as the location of the compensation area moves further away from the center.

[0031] The super-optical device may further include: a substrate configured to support a plurality of first nanostructures and a first compensation structure; and a first surrounding material layer filling the region between the plurality of first nanostructures and the first compensation structure on the substrate, and having a refractive index different from that of the plurality of first nanostructures and the first compensation structure.

[0032] The super-optical device may further include: a second surrounding material layer, which fills the region between a plurality of second nanostructures and a second compensation structure on the first surrounding material layer, and has a refractive index different from that of the plurality of second nanostructures and the second compensation structure.

[0033] The super-optical device may also include a second surrounding material layer disposed on a first surrounding material layer, and each of the plurality of second nanostructures and second compensation structures may have a hole shape formed by engraving the second surrounding material layer.

[0034] When the center wavelength of the incident light is λ0, the height of multiple nanostructures and compensation structures can be greater than λ0 / 2 and less than 4λ0.

[0035] Super-intelligent optical components can be lenses.

[0036] Multiple phase modulation regions can have equal widths in the first direction.

[0037] Super-optical devices can be beam deflectors.

[0038] Super-optical devices can be beam shapers.

[0039] The incident light can have an infrared wavelength or a visible wavelength. Attached Figure Description

[0040] The above and / or other aspects will become clearer by referring to the accompanying drawings, which describe specific example embodiments in which:

[0041] Figure 1 This is a plan view illustrating a schematic configuration of the super-intelligent optical device according to an embodiment;

[0042] Figure 2 This is a graph illustrating an example of the phase profile of a super-intelligent optical device according to an embodiment;

[0043] Figure 3This is a cross-sectional view showing a partial region of the super-intelligent optical device structure according to an embodiment;

[0044] Figure 4 This illustrates that, according to the embodiment, light just passes through... Figure 3 A graph showing the phase profile of the local region shown.

[0045] Figure 5 This is a cross-sectional view of the arrangement of the nanostructures of the super-optical device based on the comparative example;

[0046] Figure 6 This illustrates that, according to the embodiment, light just passes through... Figure 5 A graph showing the phase profile after the location of the nanostructure.

[0047] Figure 7 It is a graph showing the phase profile of the super-intelligent optical device according to the comparative example;

[0048] Figure 8 This is a view of the modeled refractive index distribution structure based on a comparative example, which calculates the effect of phase discontinuities in a super-optical device.

[0049] Figures 9A to 9C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 8 A view of the phase profile of light on the structure;

[0050] Figure 10 This is a view of a modeled refractive index distribution structure that computationally simulates the function of a compensation region disposed in a super-optical device according to an embodiment.

[0051] Figures 11A to 11C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 10 A view of the phase profile of light on the structure;

[0052] Figure 12 This is a view of a modeled refractive index distribution structure that computationally simulates the function of a compensation region disposed in a super-optical device according to another embodiment;

[0053] Figures 13A to 13C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 12 A view of the phase profile of light on the structure;

[0054] Figure 14 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0055] Figure 15 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0056] Figure 16 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0057] Figure 17 This is a plan view of the structure of a super-intelligent optical device according to another embodiment;

[0058] Figure 18 This is a plan view of the structure of a super-intelligent optical device according to another embodiment;

[0059] Figure 19 This is a plan view of the structure of a super-intelligent optical device according to another embodiment;

[0060] Figure 20 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0061] Figure 21A and Figure 21B This is a perspective view of an example of a nanostructure included in a super-optical device according to an embodiment;

[0062] Figure 22 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0063] Figure 23 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0064] Figure 24 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0065] Figure 25 This is a cross-sectional view showing a partial region of a super-intelligent optical device structure according to another embodiment;

[0066] Figure 26 This is a block diagram illustrating a schematic configuration of an electronic device according to an embodiment;

[0067] Figure 27 Included according to the embodiments Figure 26 A block diagram illustrating the schematic configuration of a camera module in an electronic device;

[0068] Figure 28 The settings according to the embodiment Figure 26 A block diagram illustrating a schematic configuration of a 3D sensor in an electronic device;

[0069] Figure 29 It is a block diagram illustrating a schematic configuration of an electronic device according to another embodiment; and

[0070] Figure 30 The settings according to the embodiment Figure 29 A block diagram illustrating a schematic configuration of an eye-tracking sensor in an electronic device. Detailed Implementation

[0071] Referring now to the embodiments, examples of which are illustrated in the accompanying drawings, wherein similar reference numerals throughout the drawings denote similar elements. In this respect, the presented embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, the embodiments are described below only with reference to the accompanying drawings to explain various aspects. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. Expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include: only a, only b, only c, both a and b, both a and c, both b and c, all of a, b, and c, or any variation of the foregoing examples.

[0072] In the following description, embodiments will be illustrated with reference to the accompanying drawings. The embodiments described below are merely examples, and therefore it should be understood that modifications can be made to the embodiments in various forms. The same reference numerals always denote the same elements. In the drawings, the dimensions of the constituent elements may be enlarged for clarity.

[0073] For example, when a component is referred to as being "on" or "above" another component, the component may be directly on the other component, or there may be an intermediate component.

[0074] It should be understood that while the terms "first," "second," etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. These terms do not limit the material or structure of the components.

[0075] As used herein, the singular form is intended to also include the plural form, unless the context explicitly indicates otherwise. Furthermore, it will be understood that when a unit is referred to as “including” another element, the possibility of the presence or addition of one or more other elements is not excluded.

[0076] In addition, the terms “...device”, “...machine” and “module” described in the specification refer to a unit for processing at least one function and / or operation, and can be implemented by hardware components or software components and combinations thereof.

[0077] The use of the terms “one,” “an,” and “the,” as well as similar indicators, should be interpreted to cover both the singular and the plural.

[0078] The operations constituting the method may be performed in any suitable order unless expressly stated that they should be performed in the described order. Furthermore, the use of any and all examples or exemplary language (e.g., “such as (e.g.)”) provided herein is intended only to better illustrate the inventive concept and does not impose a limitation on the scope of this disclosure, unless otherwise stated.

[0079] Figure 1 This is a plan view illustrating a schematic configuration of the super-intelligent optical device according to an embodiment.

[0080] The super-optical device 100 modulates the phase of incident light in a specific wavelength band and includes multiple nanostructures NS. The specific wavelength band can be the visible light band, the infrared band, or a band including both. The nanostructures NS can be disposed on a substrate SU, and... Figure 1 For simplicity, only a few nanostructures NS are illustrated below. These nanostructures NS have subwavelength shape dimensions smaller than the center wavelength λ0 of a specific wavelength band and possess a refractive index different from that of the substrate SU and other surrounding materials. Further details will be provided below. Figure 21A and Figure 21B The text describes a detailed example of the nanostructure NS. Based on the arrangement of the nanostructure NS, the super-optical device 100 can achieve various phase profiles of the incident light.

[0081] The super-optical device 100 includes multiple phase modulation regions, each comprising multiple nanostructures NS, the shape and arrangement of which are determined according to corresponding rules. The multiple phase modulation regions can be arranged along a specific direction defining a phase profile, and this direction can be as follows: Figure 1 The radial direction r shown extends from the center C of the super-optical device 100 to the outer boundary of the super-optical device 100. However, this disclosure is not limited thereto.

[0082] Nanostructures NS can be fabricated on a substrate SU, and Figure 1 For simplicity, only a few nanostructures NS are illustrated. Multiple phase modulation regions will be designated as region R1, region R2, ..., region N, in radial order from the center C of the super-optical device 100 along the radial direction r. N As shown in the figure, the first region R1 can be a circular region, and the second region R2 to the Nth region R... N It can be a ring-shaped region.

[0083] The compensation region RC can be set in the kth region R that is adjacent to each other in multiple phase modulation regions. k and the (K+1)th region R k+1Between (k is a natural number between 1 and N). The compensation region RC is shown as a region, but is not limited to this, and can also be set at a position between two other phase modulation regions. When setting the first region R1 to the Nth region R N When the rules are followed to enable the super-optical device 100 to achieve the desired phase profile, the compensation region RC is a region that buffers abrupt phase changes or abrupt changes in effective refractive index occurring in the boundary region between the two regions, according to the corresponding rules of the two regions. The compensation region RC provides a compensation structure CS with a certain shape and provides an arrangement suitable for this function. The compensation structure CS has a subwavelength shape and size and has a refractive index different from the surrounding material. This will be discussed later. Figure 3 The details of the compensation structure CS are described in detail.

[0084] The rules set in each region of the super-optical device 100 are applied to parameters such as the shape, size (width and height), spacing and arrangement of the nanostructures NS, and are set according to the phase profile that the super-optical device 100 wants to achieve overall.

[0085] When light enters and passes through the meta-optics 100 along the z-direction (e.g., a direction perpendicular to the surface plane of the substrate SU on which the nanostructures NS are disposed), the light encounters a refractive index distribution based on the arrangement of multiple nanostructures NS with a refractive index greater than 1. Before and after experiencing the refractive index distribution based on the arrangement of the nanostructures NS, the positions of the wavefront junctions of the same phase in the light path are different; this is referred to as phase retardation. At the position just after the light passes through the nanostructures NS of the meta-optics 100, the degree of phase retardation varies depending on the position of each variable in the refractive index distribution (i.e., the position (x and y coordinates) on a plane perpendicular to the light propagation direction (z-direction)). When the arrangement of the nanostructures NS has polar symmetry or rotational symmetry with respect to the z-axis at a specific angle, the phase profile can be expressed as a function of the distance r from the center C. This phase profile varies depending on the detailed shape and arrangement of the nanostructures NS constituting the meta-optics 100. In other words, the detailed shape and arrangement of the nanostructures NS disposed at each position can be determined based on the desired phase profile.

[0086] In the following text, expressions such as phase delay, phase modulation, and phase are used interchangeably, and all of these expressions refer to the relative phase before the refractive index distribution formed by the nanostructure NS at the position where the light just passes through the nanostructure NS.

[0087] The specific examples of the arrangement of the nanostructures NS in the meta-optical device 100 described below relate to the case where the meta-optical device 100 is used as a lens, but the embodiments are not limited thereto. When the meta-optical device 100 is used as a lens, the meta-optical device 100 may be referred to as a meta-lens.

[0088] Region 1 to Region N R N It is a region exhibiting a specific range of phase delay, and the second region R2 to the Nth region R N The phase modulation ranges can be the same. The phase modulation range can be 2π radians (rad) or less. The phase modulation range of the first region R1 can be 2π radians or less. The first region R1 to the Nth region R N All regions can be referred to as the 2π region.

[0089] The function of each region and the number of regions N or the width W1, ..., W2. K ... and W N It can be the main variable in the performance of the Super Optical Device 100.

[0090] To use the super-optical device 100 as a lens, a rule is set within each region such that the width of each region is not constant, and the diffraction direction of the incident light in each region is slightly different. The number of regions is related to the magnitude (absolute value) of the refractive power, and the sign of the refractive power can be determined according to the rule within each region. For example, positive refractive power can be achieved by arranging the size of the nanostructures NS in each region in a radially decreasing pattern (phase-decreasing arrangement), and negative refractive power can be achieved by arranging the size of the nanostructures NS in a radially increasing pattern (phase-increasing arrangement).

[0091] To use the super-optical device 100 as a beam deflector, rules can be set for each region such that each region (R1, R2, ..., R...)... N The widths W1, ..., W K ... and W N It is constant, and the incident light diffracts along a specific constant direction in each region.

[0092] In addition to lenses or beam deflectors, the super-optical device 100 can also be used as a beam shaper with arbitrary positional distribution.

[0093] In order for the above-mentioned functions to occur effectively within the desired wavelength range, discontinuities in the phase profile based on position should be avoided as much as possible. This is because, in the case of phase discontinuities, a portion of the light passing through the super-optical device 100 diffracts in directions other than the desired diffraction direction, thus potentially degrading the diffraction efficiency.

[0094] However, due to the phase modulation regions R1, ..., R1 set in the super-optical device 100 k ... and R N The phase of the incident light is modulated with the same range and / or trend, so discontinuities in the phase difference are essentially present at the boundaries between adjacent regions. The super-optical device 100 according to an embodiment has a compensation region RC capable of mitigating phase discontinuities at at least one of these locations.

[0095] Figure 2 This is an exemplary diagram showing the phase profile of a super-intelligent optical device according to an embodiment.

[0096] Referring to the curve, the second region R2, the third region R3, ... and the Nth region R N It possesses the optical property of changing the phase of the incident light from π to -π radially within each region. Therefore, a discontinuity in phase change from -π to π is formed at the boundaries of these regions. This discontinuity occurs between two adjacent regions (i.e., the k-th region R). k and the (k+1)th region R k+1 The compensation region RC between the two regions is set such that phase modulation gradually occurs from -π to π. That is, the adjacent regions with the compensation region RC (i.e., the k-th region R) are... k Compensation region RC and (k+1)th region R k+1 It becomes a region without phase discontinuities.

[0097] Figure 3 This is a cross-sectional view showing in detail the structure of the super-optical device according to an embodiment in a local region, and Figure 4 It shows that the light just passes through Figure 3 The curve of the phase profile after the local region shown.

[0098] Figure 3 It shows in Figure 1 In the cross section AA, the nanostructure NS in the k-th region R k Compensation region RC and (k+1)th region R k+1 The layout within.

[0099] Reference Figure 3 When in the k-th region R k The width of the nanostructure NS closest to the compensation region RC in the radial direction r of the nanostructure NS is D. a At that time, and when in the (k+1)th region R k+1 The width of the nanostructure closest to the compensation region RC in the radial direction r of the nanostructure NS is D. b At that time, the width D of the compensation structure CS c Having in Da and D b Values ​​between (e.g., greater than D) a And less than D b (value).

[0100] Through the compensation structure CS, the phase modulation value in the compensation region RC is the Kth region R k The phase at the end of the (K+1)th region R k+1 The intermediate phase between the initial phase π. Therefore, the phase modulation regions between two adjacent regions (i.e., the k-th region R) are reduced. k and the (k+1)th region R k+1 Phase discontinuity between ) . The phase modulation trend in the compensation region RC is similar to that in the adjacent k-th region R k and the (k+1)th region R k+1 The phase modulation trends are opposite. In the k-th region R k and the (k+1)th region R k+1 In the initial phase, the phase gradually decreases radially, while in the compensation region RC, the phase increases radially. Therefore, for example, when the k-th region R is modified in a manner that gradually increases radially,... k and the (K+1)th region R k+1 At that time, in the compensation region RC, the phase decreases radially.

[0101] The mitigation of phase discontinuities in the compensation region RC can be described by the effective refractive index. The effective refractive index is a concept that assumes the unit element of the superstructure 100 can be considered as a homogeneous medium. The nanostructure NS in the k-th region R... k The width at the end of the k-th region R k The smallest nanostructure NS is found in the (k+1)th region R. k+1 The width at the beginning of the region R is in the (K+1)th region. k+1 The maximum value is found in the nanostructure NS. Therefore, when a significant and abrupt change in effective refractive index occurs in the k-th region R... k and the (k+1)th region R k+1 When in the boundary region between, the compensation structure CS set in the compensation region RC buffers this effective refractive index change.

[0102] The effective refractive index variation trend in the compensation region RC is similar to that in the adjacent k-th region R. k and the (K+1)th region R k+1 The effective refractive index changes in the k-th region R shows the opposite trend. k and the (k+1)th region R k+1In the intermediate region R, the effective refractive index gradually decreases radially, while in the compensation region RC, the effective refractive index increases radially. Therefore, for example, when the effective refractive index is modified in the form of a radially increasing effective refractive index, the effective refractive index in the k-th region R... k and the (k+1)th region R k+1 At that time, in the compensation region RC, the effective refractive index decreases radially r.

[0103] Figure 5 It shows in detail a cross-sectional view of the structure of the super-intelligent optical device according to the comparative example in a local region, and Figure 6 It shows that the light just passes through Figure 5 The curve of the phase profile after the local region is shown.

[0104] The comparative example's super-optical device does not have a compensation region; that is, apart from the compensation region RC, the comparative example's super-optical device is similar to... Figure 1 The same as the super-intelligent optical devices.

[0105] Region k R k The first region includes nanostructures NS whose width gradually decreases radially by r, and whose phase changes radially from π to -π. The (k+1)th region includes nanostructures NS whose width gradually decreases radially by r, and whose phase again changes radially from π to -π. In other words, the kth region R... k The ending position is in the (K+1)th region R k+1 The region between the starting positions is a region where the effective refractive index changes rapidly, and the phase also shows a discontinuity that changes rapidly from -π to π.

[0106] Figure 7 This is a graph showing the phase profile of the super-intelligent optical device according to the comparative example.

[0107] Referring to the graph, phase discontinuities with rapid phase changes occur in all adjacent regions, for example, at the boundary between the first region R1 and the second region R2 in the super-intelligent optics, and at the boundary between the second region R2 and the third region R3.

[0108] Phase discontinuities can reduce the expected diffraction efficiency of meta-optics due to the shadowing effect caused by the discontinuity regions.

[0109] Figure 8 This is a view of the modeled refractive index distribution structure based on a comparative example, which calculates the effect of phase discontinuities in a super-optical device. Figures 9A to 9C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 8 A view of the phase profile of light on the structure.

[0110] Figure 8The refractive index distribution structure includes a refractive index distribution in which the effective refractive index changes abruptly from 1.75 to 2 on a substrate with a refractive index of 1.46.

[0111] The wavefront of light that has undergone a sharp change in effective refractive index is not continuous and exhibits the following characteristics: Figures 9A to 9C The shadow effect is indicated by the mark SE in the diagram. This effect becomes more pronounced as the angle of incidence increases.

[0112] Figure 10 This is a view of a modeled refractive index distribution structure that computationally simulates the function of the compensation region disposed in a meta-optical device according to an embodiment, and... Figures 11A to 11C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 10 A view of the phase profile of light on the structure.

[0113] Figure 10 The refractive index distribution structure is such that the effective refractive index gradually changes to 1.75 on a substrate with a refractive index of 1.46. c The distribution of 2 and 2. Figure 8 compared to, Figure 10 The refractive index distribution structure corresponds to changing a portion of the region with a refractive index of 2 to a refractive index of n. c The case of a compensation structure with a value of 1.871.

[0114] Will Figure 11A , Figure 11B and Figure 11C respectively with Figure 9A , Figure 9B and Figure 9C The comparison shows that the shadowing effect has been reduced.

[0115] Figure 12 This is a view of a modeled refractive index distribution structure that computationally simulates the function of the compensation region disposed in a meta-optical device according to an embodiment, and... Figures 13A to 13C The incident light was incident at angles of 0 degrees, 30 degrees, and 45 degrees respectively. Figure 12 A view of the phase profile of light on the structure.

[0116] Figure 12 The refractive index distribution structure is such that the effective refractive index gradually changes to 1.75 on a substrate with a refractive index of 1.46. c1 n c2 n c3 The distribution of 2 and 2. Figure 8 compared to, Figure 12 The refractive index distribution structure corresponds to changing a portion of the region with a refractive index of 2 to a refractive index of n. c1 =1.8125, n c2 =1.871 and nc3 The case of three compensation structures with a value of 1.9375.

[0117] Will Figure 13A , Figure 13B and Figure 13C respectively with Figure 9A , Figure 9B and Figure 9C The comparison shows that the shadowing effect has been reduced. Additionally, [the following text is incomplete and requires further context: "will..."] Figure 13A , Figure 13B and Figure 13C respectively with Figure 11A , Figure 11B and Figure 11C The comparison shows that the shading effect is significantly reduced when a subdivided compensation structure is introduced.

[0118] Figure 14 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0119] Super-intelligent optical device 101 includes a device disposed in region K R k and the (K+1)th region R k+1 The compensation region RC1 is defined as follows: the width of the two compensation structures CS within the compensation region RC1 can be increased based on the radial position of the compensation structures CS. For example, when the compensation structure CS includes a first compensation structure and a second compensation structure, and the first compensation structure is closer to the center C of the super-optical device 101 than the second compensation structure (i.e., the second compensation structure is farther from the center C than the first compensation structure), the width of the second compensation structure is greater than the width of the first compensation structure. Both the width of the first compensation structure and the width of the second compensation structure can be greater than the width in the k-th region R. k The width of the nanostructure NS closest to RC1 is smaller than that of R in the (k+1)th region. k+1 The width of the nanostructure NS closest to RC1.

[0120] Figure 15 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0121] Super-intelligent optical device 102 includes a region R disposed in the kth region. k and the (k+1)th region R k+1 The compensation region RC2 is between the two sides, and the compensation region RC2 includes a plurality of compensation structures CS having the same width in the radial direction and arranged along the radial direction r.

[0122] Figure 16 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0123] Super-intelligent optical device 103 includes a region R disposed in the kth region. k and the (K+1)th region R k+1 The compensation region RC3 is defined as a region between the compensation regions, and the compensation region RC3 comprises multiple compensation structures CS arranged in a manner whose width gradually increases radially (r). The number of compensation structures CS is related to the width of the compensation region RC3, and the k-th region R adjacent to the compensation region RC3 can be considered. k and the (k+1)th region R k+1 The width of the compensation area RC3 is determined by the width of the area.

[0124] Figure 17 This is a plan view of the structure of a super-intelligent optical device according to another embodiment.

[0125] The super-optical device 104 may include multiple compensation regions RC4. The compensation regions RC4 may be located in all adjacent phase modulation regions R1, ..., R2. k And...R N The number of compensation regions can be between, but not limited to, and can be set in some of these regions. The ratio of the number of compensation regions to the number of phase modulation regions can be approximately 50% or greater.

[0126] In the phase modulation region PA and compensation region RC4 located adjacent to each other among multiple phase modulation regions and multiple compensation regions, the width W of the compensation region RC4 is... c Width W of the phase modulation region PA p The ratio (W) c / W p The width W of the compensation region RC4 increases as the compensation region moves further away from the center C. As mentioned above, it can be considered that the compensation region RC4 works well when the angle of incidence of light is large. For example, when the super-optical device 104 is used as a lens, the closer to the center, the closer the angle of incidence of light is to 0 degrees, and the further away from the center, the larger the angle of incidence of light. Therefore, the width W of the adjacent phase modulation regions PA increases. p Width W of the compensation region RC4 c The ratio can be set to enhance the effect of the compensation region RC4 outwards. In other words, the ratio can be expressed as the ratio of the number of compensation structures arranged radially in the compensation region RC4 to the number of nanostructures arranged radially in the phase modulation region PA.

[0127] The ratio (W) c / W p The ratio (W) gradually increases from the center to the periphery, reaching approximately 20% to 25% at the outermost edge. c / W pThe effective aperture ratio (R / f) of the super-optical device 104 can increase as the effective aperture ratio of the super-optical device 104 increases, where f and R represent the focal length and effective radius of the super-optical device 104, respectively. For example, when the effective aperture ratio of the super-optical device 104 is 0.8, the value of this ratio can be approximately 25%.

[0128] The width of the compensation region RC4 can be the same as shown in the figure, but it is not limited to this. Any of the compensation regions RC, RC1, RC2 and RC3 mentioned above can be applied to the compensation region RC4.

[0129] Figure 18 This is a plan view of the structure of a super-intelligent optical device according to another embodiment.

[0130] Multiple compensation regions RC5 can be included in the super-optical device 105, or can be set in all adjacent phase modulation regions R1, ..., R2. k And...R N Between these regions, the width of adjacent phase modulation regions decreases as the distance from the center C increases. As shown in the figure, from the first region R1 to the Nth region R... N When the width of the compensation region RC5 gradually decreases in the direction away from the center C, the width of the compensation region RC5 can also decrease with increasing distance from the center C. Even in this case, in multiple phase modulation regions R k Among the multiple compensation regions RC5, the phase modulation region PA is located in an adjacent position, and the width W of the compensation region RC5 is... c Width W of the phase modulation region PA p The ratio (W) c / W p The ratio (W) can also increase as the compensation region RC5 moves further away from the center C. However, this disclosure is not limited to this, and the ratio (W) can also increase. c / W p It can be constant.

[0131] Figure 19 This is a plan view of the structure of a super-intelligent optical device according to another embodiment.

[0132] The compensation region RC6 set in the super-optical device 106 can be arranged in adjacent phase modulation regions R1, ..., R2. k And...R NThe compensation region RC6 is located at the outer periphery of the position between the points. It can be considered that the compensation region RC6 is effective in areas with larger incident angles of light. When the super-optical device 106 is used as a lens, the closer to the center, the closer the incident angle of light is to 0 degrees, and the farther away from the center, the larger the incident angle of light. To effectively represent the function of the compensation region RC6, it can be positioned on the outer periphery, for example, at a position where the incident angle of light is 30 degrees or greater. For example, when the effective radius of the super-optical device 106 is R, the compensation region RC6 can be positioned at a distance of R / 2 or greater from the center. In this embodiment, the number of compensation regions RC6 is minimized, and the reduction in diffraction efficiency due to phase discontinuities can be effectively prevented.

[0133] Figure 20 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0134] The super-optical device 107 includes a substrate SU, a nanostructure NS and a compensation structure CS disposed on the substrate SU, and a surrounding material layer 150 covering the nanostructure NS and the compensation structure CS.

[0135] The substrate SU has the property of being light-transparent within the operating wavelength range of the super-optical device 107, and may include any of glass (fused silica, BK7, etc.), quartz, polymer (PMMA, SU-8, etc.) and other transparent plastics.

[0136] Nanostructures NS and compensating structures CS include materials whose refractive index differs from that of surrounding materials such as the surrounding material layer 150 and the substrate SU. For example, the material may have a high refractive index that differs from the refractive index of the surrounding materials by 0.5 or greater, or a low refractive index that differs from the refractive index of the surrounding materials by 0.5 or greater. Nanostructures NS and compensating structures CS may also include materials with the same refractive index.

[0137] When the nanostructure NS and the compensating structure CS include materials with a refractive index higher than that of the surrounding material, the nanostructure NS and the compensating structure CS can include c-Si, p-Si, and a-Si III-V group compound semiconductors (GaAs, GaP, GaN, GaAs, etc.), SiC, TiO2, TiSiO2, etc. x The low refractive index surrounding material may include at least one of SiN, and may include polymeric materials such as SU-8 and PMMA, SiO2 or SOG.

[0138] When the nanostructure NS and the compensating structure CS include materials with a refractive index lower than that of the surrounding materials, the nanostructure NS and the compensating structure CS may include SiO2 or air, and the high-refractive-index surrounding materials may include c-Si, p-Si, and a-Si III-V compound semiconductors (GaAs, GaP, GaN, GaAs, etc.), SiC, TiO2, TiSiO2, etc. x At least one of SiN.

[0139] Figure 21A and Figure 21B This is a perspective view of an exemplary form of a nanostructure included in a super-intelligent optical device according to an embodiment.

[0140] The nanostructure NS and the compensating structure CS can be columnar structures. For example, the nanostructure NS and the compensating structure CS can have the following characteristics: Figure 21A The cylindrical shape shown or as Figure 21B The shape shown is a rectangular column. The width D of the nanostructure NS and the compensation structure CS is subwavelength, and the height H can be greater than the center wavelength λ0 of the operating band. For example, the height H can be greater than λ0 / 2 and less than 4λ0. In addition to the shape shown, various column shapes with cross-sectional shapes such as rectangles, crosses, polygons, or ellipses can be applied to the nanostructure NS and the compensation structure CS.

[0141] The height of multiple nanostructures and compensation structures can be greater than the center wavelength of a specific band.

[0142] Figure 22 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0143] The super-optical device 108 includes a substrate SU and multiple nanostructures NS and compensation structures CS formed on the substrate SU.

[0144] The nanostructure NS and the compensation structure CS differ from the embodiments described above in that the surrounding material layer 160 is etched with a specific pillar shape (e.g., as shown in the previous examples). Figure 21A The cylindrical shape shown or as Figure 21B The hole is in the shape of a square column (as shown).

[0145] The value of the width Dc of the hole forming the compensation structure CS is in the formation of the Kth region R k The width Da of the pore in the nanostructure NS closest to the compensation region RC8 is related to the formation of the (K+1)th region R. k+1 The width Db of the pores in the nanostructure NS closest to the compensation region RC8 is between.

[0146] Figure 23This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0147] The super-optical device 109 includes a substrate SU and a plurality of nanostructures NS1 and NS2 and compensation structures CS1 and CS2 formed on the substrate SU. The difference between the super-optical device 109 of this embodiment and the above embodiments is that the nanostructures NS1 and NS2 and the compensation structures CS1 and CS2 are arranged in a two-layer structure.

[0148] Multiple nanostructures NS1 and compensation structures CS1 are arranged on a substrate SU, and a first surrounding material layer 151 is formed covering the multiple nanostructures NS1 and compensation structures CS1. Multiple nanostructures NS2 and compensation structures CS2 are formed on the first surrounding material layer 151. The thickness of the first surrounding material layer 151 is shown to match the height of the nanostructures NS1 and compensation structures CS1, but this is exemplary and not a limitation. The thickness of the first surrounding material layer 151 may be greater than the height of the nanostructures NS1 and compensation structures CS1. The nanostructures NS2 and compensation structures CS2 may be formed by sculpting a second surrounding material layer 161 into a specific pillar shape. The width of the compensation structure CS1 located in the first layer of the compensation region RC9 is between the widths of two adjacent nanostructures NS1. The compensation structure CS2 located in the second layer of the compensation region RC9 has a recessed shape, and the width of the hole is between the widths of the holes forming two adjacent nanostructures NS2.

[0149] In the following description, the multilayer structure will be described as forming a second layer of nanostructure NS2 and compensation structure CS2 in the form of sculpted surrounding material layer 161, but is not limited thereto. The second layer may also have nanostructure NS1 and compensation structure CS1 similar to the first layer.

[0150] Figure 24 This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0151] Super Optical Devices 110 and Figure 23 The similarity to the embodiments is that the nanostructure NS and the compensation structure CS are arranged in a multilayer structure, and are similar to Figure 23 The difference in the embodiment is that, when viewed along the z-direction, the compensation region RC10 is offset in the radial direction r. The compensation region RC10 is formed in such a way that it works well not only for incident light L1 incident at a 0-degree angle of incidence but also for incident light L2 incident at a specific angle of incidence.

[0152] Figure 25This is a cross-sectional view showing the structure of a super-optical device in a local region according to another embodiment.

[0153] Super-intelligent optical devices 111 and Figure 24 The similarity of the embodiments lies in that the nanostructure NS and the compensation structure CS are arranged in a multilayer structure, and the compensation region RC11 is offset in the radial direction r when viewed along the stacking direction (z direction). The degree of offset of the compensation region RC11 in the radial direction r is shown to be slightly greater than Figure 24 The compensation region RC11 works well for incident light L1 incident at a 0-degree angle of incidence and incident light L2 incident at a larger angle of incidence.

[0154] Figure 23 Implementation examples Figure 24 Implementation examples and Figure 25 The embodiments described can be applied to another embodiment of the super-optical device. At locations with smaller incident angles of light, the compensation region RC9 can be formed as... Figure 23 The shape shown allows the compensation region RC10 to be formed at a slightly larger angle of light incidence. Figure 24 The shape shown, and at the position of maximum incident angle of light, allows the compensation region RC11 to be formed as follows: Figure 25 The shape shown.

[0155] The aforementioned super-optical devices can be applied to a variety of electronic devices. For example, these super-optical devices can be installed in electronic devices such as smartphones, wearable devices, Internet of Things (IoT) devices, home appliances, tablet PCs, personal digital assistants (PDAs), portable multimedia players (PMPs), navigation devices, drones, robots, driverless vehicles, autonomous vehicles, and advanced driver assistance systems (ADAS).

[0156] Figure 26 This is a block diagram illustrating a schematic configuration of an electronic device according to an embodiment.

[0157] refer to Figure 26In network environment 2200, electronic device 2201 can communicate with another electronic device 2202 through a first network 2298 (near-field wireless communication network, etc.), or can communicate with another electronic device 2204 and / or server 2208 through a second network 2299 (telecommunications network, etc.). Electronic device 2201 can communicate with electronic device 2204 through server 2208. Electronic device 2201 may include processor 2220, memory 2230, input device 2250, audio output device 2255, display device 2260, audio module 2270, sensor module 2210, interface 2277, haptic module 2279, camera module 2280, power management module 2288, battery 2289, communication module 2290, user identification module 2296, and / or antenna module 2297. In electronic device 2201, some of these components (display device 2260, etc.) may be omitted, or other components may be added. Some of these components may be implemented as an integrated circuit. For example, the fingerprint sensor 2211 or iris sensor, illuminance sensor, etc. of the sensor module 2210 can be implemented by embedding it in the display device 2260 (such as a display).

[0158] Processor 2220 can execute software (program 2240, etc.) to control one or more other components (hardware or software components, etc.) connected to electronic device 2201, and can perform various data processing or operations. As part of the data processing or operations, processor 2220 can load commands and / or data received from other components (sensor module 2210, communication module 2290, etc.) into volatile memory 2232, can process the commands and / or data stored in volatile memory 2232, and can store the result data in non-volatile memory 2234. Processor 2220 may include a main processor 2221 (central processing unit, application processor, etc.) and an auxiliary processor 2223 (graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently or together. Auxiliary processor 2223 uses less power than main processor 2221 and can perform specialized functions.

[0159] The auxiliary processor 2223 can replace the main processor 2221 when the main processor 2221 is inactive (e.g., in sleep) or, when the main processor 2221 is active (e.g., in application execution), work with the main processor 2221 to control the functions and / or states of some components of the electronic device 2201 (display device 2260, sensor module 2210, communication module 2290, etc.). The auxiliary processor 2223 (image signal processor, communication processor, etc.) can be implemented as part of other functionally related components (camera module 2280, communication module 2290, etc.).

[0160] The memory 2230 can store various data required by the components of the electronic device 2201 (processor 2220, sensor module 2210, etc.). This data may include, for example, input and / or output data of software (program 2240, etc.) and associated commands. The memory 2230 may include volatile memory 2232 and / or non-volatile memory 2234.

[0161] The program 2240 can be stored as software in the memory 2230, and the program 2240 may include an operating system 2242, middleware 2244, and / or application 2246.

[0162] Input device 2250 can receive commands and / or data from outside the electronic device 2201 (such as from a user) that will be used by components of the electronic device 2201 (such as processor 2220). Input device 2250 may include a microphone, mouse, keyboard, and / or digital pen (such as a stylus pen).

[0163] Audio output device 2255 can output audio signals to the outside of electronic device 2201. Audio output device 2255 may include a speaker and / or a receiver. The speaker can be used for general purposes such as multimedia playback or recording playback, while the receiver can be used to receive incoming calls. The receiver can be integrated into the speaker or can be implemented as a separate device.

[0164] Display device 2260 can visually provide information to the outside of electronic device 2201. Display device 2260 may include a display, holographic device or projector, and control circuitry for controlling these devices. Display device 2260 may include touch circuitry configured to sense touch, and / or sensor circuitry (pressure sensor, etc.) configured to measure the intensity of the force generated by touch.

[0165] Audio module 2270 can convert sound into electrical signals and vice versa. Audio module 2270 can obtain sound through input device 2250, or output sound through audio output device 2255 and / or through speakers and / or headphones of another electronic device (electronic device 2202, etc.) directly or wirelessly connected to electronic device 2201.

[0166] Sensor module 2210 can detect the operating status (power, temperature, etc.) or external environmental status (user status, etc.) of electronic device 2201, and can generate electrical signals and / or data values ​​corresponding to the detected status. Sensor module 2210 may include fingerprint sensor 2211, accelerometer 2212, position sensor 2213, 3D sensor 2214, etc., and may also include iris sensor, gyroscope sensor, barometric pressure sensor, magnetic sensor, grip sensor, proximity sensor, color sensor, infrared (IR) sensor, biometric sensor, temperature sensor, humidity sensor and / or illuminance sensor.

[0167] The 3D sensor 2214 senses the shape and movement of an object by radiating specific light onto it and analyzing the light reflected by the object, and may include any one of the super-optical devices 100, 101, 102, 103, 104, 105 and 106 according to the above embodiments.

[0168] Interface 2277 may support one or more specified protocols and can be used to connect electronic device 2201 directly or wirelessly to other electronic devices (electronic device 2202, etc.). Interface 2277 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, a Secure Digital Card (SD) interface, and / or an audio interface.

[0169] Connection terminal 2278 may include a connector through which electronic device 2201 can be physically connected to other electronic devices (electronic device 2202, etc.). Connection terminal 2278 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (headphone connector, etc.).

[0170] The haptic module 2279 can convert electrical signals into mechanical stimuli (vibration, movement, etc.) or electrical stimuli that can be perceived by the user through touch or motion. The haptic module 2279 may include a motor, a piezoelectric element, and / or an electrical stimulation device.

[0171] Camera module 2280 can capture still images and moving images. Camera module 2280 may include a lens assembly, an image sensor, an image signal processor, and / or a flash, wherein the lens assembly includes one or more lenses. The lens assembly included in camera module 2280 can collect light emitted from the object to which the image will be captured, and may include any of the super-optical devices 100-111 according to the above embodiments.

[0172] The power management module 2288 can manage the power supplied to the electronic device 2201. The power management module 2288 can be implemented as part of a power management integrated circuit (PMIC).

[0173] Battery 2289 can power components of electronic device 2201. Battery 2289 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0174] Communication module 2290 can support the establishment of direct (wired) communication channels and / or wireless communication channels between electronic device 2201 and other electronic devices (electronic device 2202, electronic device 2204, server 2208, etc.), and communicate through the established communication channels. Communication module 2290 operates independently of processor 2220 (application processor, etc.) and may include one or more communication processors that support direct and / or wireless communication. Communication module 2290 may include wireless communication module 2292 (cellular communication module, short-range wireless communication module, Global Navigation Satellite System (GNSS), etc.) and / or wired communication module 2294 (local area network (LAN) communication module, power line communication module, etc.). The corresponding communication modules among these communication modules can communicate with other electronic devices through a first network 2298 (a LAN such as Bluetooth, WiFi Direct, or Infrared Data Association (IrDA)) or a second network 2299 (a telecommunications network such as a cellular network, the Internet, or a computer network (LAN, WAN, etc.). These various types of communication modules can be integrated into a single component (a single chip, etc.) or implemented as multiple separate components (multiple chips). The wireless communication module 2292 can use user information (International Mobile Subscriber Identity (IMSI), etc.) stored in the user identification module 2296 to identify and authenticate electronic device 2201 within a communication network (e.g., a first network 2298 and / or a second network 2299).

[0175] Antenna module 2297 can transmit and / or receive signals and / or power from external sources (other electronic devices, etc.). The antenna may include a radiator made of a conductive pattern formed on a substrate (PCB, etc.). Antenna module 2297 may include one or more antennas. When multiple antennas are included, communication module 2290 can select an antenna suitable for a communication method used in a communication network such as first network 2298 and / or second network 2299. Signals and / or power can be transmitted or received between communication module 2290 and other electronic devices via the selected antenna. Other components besides antennas (RFIC, etc.) may also be included as part of antenna module 2297.

[0176] Some of the components can be interconnected and exchange signals (commands, data, etc.) through communication methods between peripheral devices (bus, general purpose input and output (GPIO), serial peripheral interface (SPI), mobile industry processor interface (MIPI), etc.).

[0177] Commands or data can be sent or received between electronic device 2201 and external electronic device 2204 via server 2208 connected to the second network 2299. Other electronic devices 2202 and 2204 may be the same as or different from electronic device 2201. All or some of the operations performed in electronic device 2201 can be performed in one or more of the other electronic devices 2202, 2204, and 2208. For example, when electronic device 2201 needs to perform a specific function or service, it can request one or more other electronic devices to perform some or all of the function or service, instead of directly performing the function or service. The one or more other electronic devices receiving the request can perform additional functions or services related to the request and can transmit the execution results to electronic device 2201. For this purpose, cloud computing, distributed computing, and / or client-server computing technologies can be used.

[0178] Figure 27 Is included Figure 26 A block diagram illustrating the schematic configuration of a camera module in an electronic device.

[0179] refer to Figure 27The camera module 2280 may include a lens assembly 2310, a flash 2320, an image sensor 2330, an image stabilizer 2340, a memory 2350 (buffer memory, etc.), and / or an image signal processor 2360. The lens assembly 2310 can collect light emitted from the object to be imaged and may include any of the super-optical elements 100-111. The lens assembly 2310 may include one or more refractive lenses and super-optical elements. The super-optical elements configured therein may be designed as lenses with a specific phase profile and a compensation structure to reduce phase discontinuities. The lens assembly 2310 including such super-optical elements achieves the desired optical performance and can have a shorter optical length.

[0180] Additionally, the camera module 2280 may also include an actuator. The actuator can drive the position of the lens elements constituting the lens assembly 2310 for zooming and / or autofocus (AF), and can adjust the spacing between the lens elements.

[0181] Camera module 2280 may include multiple lens assemblies 2310, and in this case, may be a dual-camera, 360-degree camera, or spherical camera. Some of the multiple lens assemblies 2310 may have the same lens properties (angle of view, focal length, autofocus, f-number, optical zoom, etc.) or different lens properties. Lens assembly 2310 may include wide-angle lenses or telephoto lenses.

[0182] Flash 2320 can emit light to amplify light emitted or reflected from an object. Flash 2320 may include one or more light-emitting diodes (red-green-blue (RGB) LEDs, white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or xenon lamps. Image sensor 2330 can acquire an image corresponding to an object by converting light emitted or reflected from an object and transmitted through lens assembly 2310 into an electrical signal. Image sensor 2330 may include one or more sensors selected from image sensors with different properties, such as RGB sensors, black-and-white (BW) sensors, IR sensors, or UV sensors. Each sensor included in image sensor 2330 may be implemented as a charge-coupled device (CCD) sensor and / or a complementary metal-oxide-semiconductor (CMOS) sensor.

[0183] Image stabilizer 2340 can move one or more lenses or image sensors 2330 included in lens assembly 2310 in a specific direction in response to movement of camera module 2280 or electronics 2201 including camera module, or can control the operating characteristics of image sensor 2330 (adjust readout timing, etc.) to compensate for negative effects caused by movement. Image stabilizer 2340 can use a gyroscope sensor or accelerometer sensor arranged inside or outside camera module 2280 to detect movement of camera module 2280 or electronics 2201. Image stabilizer 2340 can be implemented optically.

[0184] In memory 2350, some or all of the data acquired by image sensor 2330 can be stored for use in the next image processing operation. For example, when multiple images are acquired at high speed, the acquired raw data (Bayer patterning data, high-resolution data, etc.) can be stored in memory 2350, and only the low-resolution image can be displayed. Then, memory 2350 can be used to transfer the raw data of the selected image (user selection, etc.) to image signal processor 2360. Memory 2350 can be integrated into memory 2230 of electronic device 2201, or it can be configured as a separate memory that operates independently.

[0185] Image signal processor 2360 can perform one or more image processing operations on images acquired by image sensor 2330 or image data stored in memory 2350. One or more image processing operations may include depth map generation, 3D modeling, panorama generation, feature point extraction, image compositing, and / or image compensation (noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). Image signal processor 2360 can control components (image sensor 2330, etc.) included in camera module 2280 (exposure time control or readout timing control, etc.). Images processed by image signal processor 2360 can be stored again in memory 2350 for further processing, or can be provided to external components of camera module 2280 (memory 2230, display device 2260, electronic device 2202, electronic device 2204, server 2208, etc.). Image signal processor 2360 can be integrated into processor 2220, or can be configured as a separate processor operating independently of processor 2220. When the image signal processor 2360 is configured as a processor separate from the processor 2220, the image processed by the image signal processor 2360 can be displayed by the display device 2260 after further image processing by the processor 2220.

[0186] Electronic device 2201 may include multiple camera modules 2280, each with its own attributes or functions. In this case, one of the multiple camera modules 2280 may be a wide-angle camera, while another may be a telephoto camera. Similarly, one of the multiple camera modules 2280 may be a front-facing camera, while another may be a rear-facing camera.

[0187] Figure 28 It is set in Figure 26 A block diagram illustrating a schematic configuration of a three-dimensional (3D) sensor in an electronic device.

[0188] The 3D sensor 2214 radiates specific light onto an object and receives and analyzes the light reflected by the object to sense the object's shape and movement. The 3D sensor 2214 includes a light source 2420, a meta-optics device 2410, a photodetector 2430, a signal processor 2440, and a memory 2450. The meta-optics device 2410 can be any of the meta-optics devices 100-111 according to the above embodiments, and a target phase delay profile can be set to act as a beam deflector or beam shaper.

[0189] Light source 2420 radiates light that will be used to analyze the shape or position of an object. Light source 2420 may include a light source that generates and radiates light with a shorter wavelength. Light source 2420 may include a light source such as a laser diode (LD), a light-emitting diode (LED), or a superluminescent diode (SLD), which generates and radiates light in a wavelength band suitable for analyzing the position and shape of the object, for example, light in the infrared band. Light source 2420 may be a laser diode with a variable wavelength. Light source 2420 may generate and illuminate light in multiple different wavelength bands. Light source 2420 may generate and illuminate pulsed light or continuous light.

[0190] The meta-optical device 2410 modulates the light radiated from the light source 2420 and emits the modulated light toward the object. When the meta-optical device 2410 acts as a beam deflector, it can deflect the incident light in a specific direction to guide it toward the object. When the meta-optical device 2410 acts as a beam shaper, it modulates the incident light so that the distribution of the incident light has a specific pattern. The meta-optical device 2410 can form structured light suitable for 3D shape analysis.

[0191] The photodetector 2430 receives reflected light from light radiated onto an object via the super-optical device 2410. The photodetector 2430 may include an array of multiple sensors for sensing light, or it may include only a single sensor.

[0192] Signal processor 2440 can analyze the shape of an object by processing signals sensed by photodetector 2430. Signal processor 2440 can analyze the 3D shape of the object, including its depth position. Signal processor 2440 can be integrated into... Figure 26 In the processor 2220 shown.

[0193] For 3D shape analysis, operations for measuring optical time-of-flight can be performed. Various computational methods can be used to measure optical time-of-flight. For example, in direct time measurement methods, distance is obtained by projecting a pulse of light onto an object and using a timer to measure the time it takes for the light to be reflected and return to the object. In related methods, a pulse of light is projected onto an object, and the distance is measured based on the brightness of the light reflected and returned by the object. In phase delay measurement methods, continuous wave light, such as a sine wave, is projected onto the object, and the phase difference between the reflected and returned light is detected and converted into distance.

[0194] When an object is illuminated with structured light, its depth position can be calculated based on the pattern changes of the structured light reflected from the object (i.e., the result of comparing it with the pattern of the incident structured light). The depth information of the object can be extracted by tracking the pattern changes at each coordinate of the structured light reflected from the object, and 3D information related to the object's shape and movement can be extracted from this depth information.

[0195] The memory 2450 can store the program and other data required for the operation of the signal processor 2440.

[0196] The signal processor 2440's operational results, i.e., information about the shape and position of an object, can be sent to another unit in electronic device 2201 or to another electronic device. For example, this information can be used by application 2246 stored in memory 2230. The other electronic device to which the results are sent can be a display device or printer that outputs the results. Furthermore, the electronic device can be, but is not limited to, autonomous driving devices (e.g., driverless cars, autonomous vehicles, robots, drones, etc.), smartphones, smartwatches, mobile phones, PDAs, laptops, PCs, various wearable devices, other mobile or non-mobile computing devices, and IoT devices.

[0197] Figure 29 This is a block diagram illustrating a schematic configuration of an electronic device according to another embodiment.

[0198] Figure 29 The electronic device 3000 can be a glasses-type augmented reality device. The electronic device 3000 includes a display engine 3400, a processor 3300, an eye-tracking sensor 3100, an interface 3500, and a memory 3200.

[0199] The processor 3300 can control the overall operation of the augmented reality device, including the display engine 3400, by driving the operating system or applications, and can process and calculate various types of data, including image data. For example, the processor 3300 can process image data that includes left-eye and right-eye virtual images rendered with binocular parallax.

[0200] Interface 3500 is an input / output of data or operation commands from an external source, and may include, for example, a user interface such as a touchpad, a controller, and user-operable operation buttons. Interface 3500 may include a wired communication module such as a USB module or a wireless communication module such as Bluetooth, and may receive user operation information or virtual image data transmitted from an interface included in an external device through them.

[0201] Memory 3200 may include internal memory (e.g., volatile or non-volatile memory). Memory 3200 may store various data, programs or applications, and input / output signals or virtual images used to drive and control the augmented reality device under the control of processor 3300.

[0202] The display engine 3400 is configured to generate virtual images by receiving image data generated by the processor 3300, and includes a left-eye optical engine 3410 and a right-eye optical engine 3420. Both the left-eye optical engine 3410 and the right-eye optical engine 3420 include a light source for outputting light and a display panel that uses the light output from the light source to form a virtual image, and have the same functionality as a small projector. The light source can be implemented using, for example, an LED, and the display panel can be implemented using, for example, liquid crystal on silicon (LCoS).

[0203] An eye-tracking sensor 3100 can be mounted at the location of the pupils of a user wearing an augmented reality device and can send signals corresponding to the user's gaze to a processor 3300. The eye-tracking sensor 3100 can detect gaze information such as the gaze direction toward the user's eyes, the position of the user's pupils, or the coordinates of the center point of the pupils. The processor 3300 can determine the shape of eye movements based on the user gaze information detected by the eye-tracking sensor 3100. For example, based on the gaze information obtained from the eye-tracking sensor, the processor 3300 can determine various types of eye movements, including: gazing at any point, tracking a moving object, and saccades where the gaze rapidly moves from one gaze point to another.

[0204] Figure 30 It is set in Figure 29 A block diagram illustrating a schematic configuration of an eye-tracking sensor in an electronic device.

[0205] The eye-tracking sensor 3100 includes an illumination optics unit 3110, a detection optics unit 3120, a signal processor 3150, and a memory 3160. The illumination optics unit 3110 may include a light source that radiates light (e.g., infrared light) at the location of an object (the user's eye). The detection optics unit 3120 detects reflected light and may include an ultrasonic lens 3130 and a sensor 3140. The signal processor 3150 calculates the pupil position of the user's eye based on the sensing results from the detection optics unit 3120.

[0206] As the super-lens 3130, any one or a combination of examples or modifications of the super-optical devices according to the above embodiments can be used. The super-lens 3130 can converge light from an object to the sensor 3140. The angle of incidence of light incident on the sensor 3140 in the eye-tracking sensor 3100, which is very close to the user's eye, can be, for example, about 30 degrees or greater. The super-lens 3130 has a structure including a compensation region, and even for light with a large angle of incidence, efficiency degradation is reduced. Therefore, the accuracy of eye tracking can be improved.

[0207] By reducing phase profile discontinuities, the aforementioned meta-optical devices can exhibit high diffraction efficiency.

[0208] Even for incident light with a large incident angle, the aforementioned super-optical devices can exhibit good diffraction efficiency.

[0209] The aforementioned advanced optical devices can be used as lenses, beam deflectors, beam shapers, etc., and can be used in various electronic devices that utilize these devices.

[0210] The foregoing exemplary embodiments are merely illustrative and should not be construed as limiting. This teaching can be readily applied to other types of devices. Furthermore, the description of the exemplary embodiments is intended to be illustrative and not to limit the scope of the claims, and many alternatives, modifications, and variations will be apparent to those skilled in the art.

Claims

1. A super-intelligent optical device, comprising: Multiple phase modulation regions are arranged along a first direction and configured to modulate the phase of incident light. Each of the multiple phase modulation regions includes multiple nanostructures, the shape and arrangement of which are determined according to a corresponding rule set for each of the multiple phase modulation regions. as well as A compensation region, located between two adjacent phase modulation regions (k-th and (k+1-th)-th phase modulation regions), includes a compensation structure for buffering phase discontinuities occurring in the boundary region between the k-th and (k+1-th)-th phase modulation regions according to corresponding rules of the k-th and (k+1-th)-th phase modulation regions. The phase modulation trend in the compensation region is opposite to the phase modulation trends in its adjacent k-th and (k+1-th)-th phase modulation regions. Where k is equal to or greater than 1 and less than N, N is the number of the plurality of phase modulation regions, and k and N are natural numbers.

2. The super-intelligent optical device according to claim 1, wherein, The k-th phase modulation region and the (k+1)-th phase modulation region are configured to modulate the phase of the incident light to have the same phase transition slope sign depending on their position in the first direction.

3. The super-intelligent optical device according to claim 2, wherein: Among the plurality of nanostructures in the k-th phase modulation region, the nanostructure closest to the compensation region has a width w in the first direction. a , Among the plurality of nanostructures in the (k+1)th phase modulation region, the nanostructure closest to the compensation region has a width w in the first direction. b ,and The width w of the compensation structure c In w a and w b between.

4. The super-intelligent optical device according to claim 3, wherein, The compensation structure includes two or more compensation structures having the same width in the first direction and arranged along the first direction.

5. The super-intelligent optical device according to claim 3, wherein, The compensation structure includes two or more compensation structures arranged along the first direction, and Wherein, the width of the two or more compensation structures increases from w in the first direction. a to w b It changes gradually according to its changing pattern.

6. The super-intelligent optical device according to claim 1, wherein: The plurality of phase modulation regions have a circular shape or an annular shape surrounding the circular shape, and The first direction is a radial direction extending from the center of the circular shape toward the boundary of the super-optical device.

7. The super-intelligent optical device according to claim 6, wherein, When the plurality of phase modulation regions are, in order from the center, the m-th region and m is greater than or equal to 2 and increases from 2 to N, all of the m-th regions have a phase modulation range from the first phase to the second phase in the radial direction, and The difference between the first phase and the second phase is 2π or less.

8. The super-intelligent optical device according to claim 6, wherein, The width of the plurality of phase modulation regions in the radial direction decreases from the center to the boundary of the super-optical device.

9. The super-intelligent optical device according to claim 6, wherein: The compensation area includes multiple compensation areas, and The widths of the plurality of compensation regions arranged along the radial direction have the same value or decrease in the direction from the center to the boundary of the super-optical device.

10. The super-intelligent optical device according to claim 6, wherein: The compensation area includes multiple compensation areas, and In the phase modulation regions and compensation regions located adjacent to each other among the plurality of phase modulation regions and the plurality of compensation regions, the ratio of the width of the compensation region to the width of the phase modulation region increases in the direction from the center to the boundary of the super-optical device.

11. The super-intelligent optical device according to claim 10, wherein, The ratio is 25% or less.

12. The super-intelligent optical device according to claim 6, wherein: The compensation area includes multiple compensation areas, and The ratio of the number of the plurality of compensation regions to the number of the plurality of phase modulation regions is 50% or greater.

13. The super-intelligent optical device according to claim 6, wherein, When the radius of the super-optical device is R, the distance of the compensation region from the center is greater than R / 2.

14. The super-intelligent optical device according to claim 6, wherein, The plurality of nanostructures and the compensation structure are arranged as a multilayer structure stacked in a second direction perpendicular to the first direction.

15. The super-intelligent optical device according to claim 14, wherein: The plurality of nanostructures includes a plurality of first nanostructures disposed on a first layer and a plurality of second nanostructures disposed on a second layer, and The compensation structure includes a first compensation structure arranged on the first layer and a second compensation structure arranged on the second layer.

16. The super-intelligent optical device according to claim 15, wherein, When viewed from the second direction, the first compensation structure and the second compensation structure are arranged to be offset relative to each other in the first direction.

17. The super-intelligent optical device according to claim 16, wherein, The lengths of the first compensation structure and the second compensation structure offset from each other in the first direction increase as the position of the compensation region moves further away from the center.

18. The super-intelligent optical device according to claim 15, further comprising: A substrate is configured to support the plurality of first nanostructures and the first compensation structure; as well as A first surrounding material layer fills the region between the plurality of first nanostructures and the first compensation structure on the substrate, and has a refractive index different from that of the plurality of first nanostructures and the first compensation structure.

19. The super-intelligent optical device according to claim 18, further comprising: A second surrounding material layer fills the region between the plurality of second nanostructures and the second compensation structure on the first surrounding material layer, and has a refractive index different from that of the plurality of second nanostructures and the second compensation structure.

20. The super-optical device of claim 18, further comprising a second surrounding material layer disposed on the first surrounding material layer, and Each of the plurality of second nanostructures and the second compensation structure has a pore shape formed by sculpting the second surrounding material layer.

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