tooling fixtures

By designing the base, cover plate, and limiting structure of the tooling fixture, the damage problem caused by mechanical shock and high-frequency vibration to CQFP devices in particle collision noise detection was solved, resulting in more accurate test results and higher operational efficiency.

CN114384397BActive Publication Date: 2026-03-10INST OF MICROELECTRONICS CHINESE ACAD OF SCI LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-23
Publication Date
2026-03-10

AI Technical Summary

Technical Problem

In the prior art, CQFP devices are prone to lead frame damage and test result interference due to mechanical shock and high-frequency vibration during particle collision noise detection, which affects the accuracy of detection.

Method used

A tooling fixture including a base, cover plate and limiting structure was designed. The fixture achieves stable fixation of CQFP devices through components such as positioning grooves, limiting pins and adjusting bolts, transforming it into a rigid connection structure and avoiding friction, collision and electrostatic damage.

Benefits of technology

It improves the accuracy of particle collision noise detection tests, reduces device damage, increases test efficiency, and lowers testing costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

This disclosure provides a tooling fixture, comprising: a base (1) with a positioning groove area (11) in the middle, the positioning groove area (11) being used to place the device under test; a cover plate (2) detachably covering the base (1) and cooperating with the base (1) to fix the device under test; and a limiting structure (3) being annular, the base (1) being embedded in the limiting structure (3) so that the base (1) does not rotate spirally relative to the limiting structure (3). By transforming a large-size packaged device with a flexible lead frame protective ring into a rigid connection structure, this tooling fixture solves the problem of deformation and shaking of the device under test under mechanical shock and high-frequency vibration in particle collision noise detection tests, which causes the transducer to collect noise and affect the test results, thereby improving the accuracy of the test results.
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Description

Technical Field

[0001] This disclosure relates to the field of integrated circuit technology, and in particular to a tooling fixture for particle collision noise detection testing of integrated circuits. Background Technology

[0002] Particle Impact Noise Detection (PIND) is used after electronic component packaging to detect unwanted particles within the device's encapsulation cavity. The purpose is to detect free particles present in the package cavity. PIND utilizes a vibration table to generate a series of specified mechanical impacts and vibrations. The impacts loosen particles (i.e., unwanted materials) trapped within the product, and the vibrations at a specific frequency cause these unwanted materials to displace within the system. The displacement of these moving unwanted materials is a random combination of sliding and impact processes relative to the product casing. This process generates stress elastic waves and sound waves. These two waves propagate within the product casing, forming a reverberant signal, which is defined as the displacement signal. After being picked up by a piezoelectric sensor and amplified by a preamplifier, the displacement signal is collected, processed, and displayed by the main unit of the detection device.

[0003] For conventional electronic devices, PIND testing does not require specialized fixtures; it can be performed by directly connecting the transducer to the device under test (DUT). However, for PIND testing of Ceramic Quad Flat Pack (CQFP) devices with guard rings, special fixtures customized for the package are required. In existing technologies, CQFP devices are directly connected to the transducer via coupling agent (water-based adhesive) or adhesive tape. Signals are collected by sensors on the transducer to detect free particles inside the DUT package. This method is prone to mechanical impacts during testing, leading to severe collisions between the leadframe and the transducer. This can cause the ceramic insulating ribs in the leadframe to shatter or the leadframe to deform. High-frequency vibrations during testing also cause severe collisions between the leadframe and the transducer, damaging the CQFP device and generating significant noise that interferes with the test results, thus affecting their accuracy. Summary of the Invention

[0004] In view of this, this disclosure provides a tooling fixture, comprising: a base with a positioning groove area in the middle for placing a device under test; a cover plate that is detachably covered on the base and cooperates with the base to fix the device under test; and a limiting structure that is annular, wherein the base is embedded in the limiting structure and the base does not rotate relative to the limiting structure.

[0005] According to an embodiment of this disclosure, the central part of the positioning groove area is hollowed out to expose the housing of the device under test.

[0006] According to an embodiment of this disclosure, the boundary of the positioning groove area is provided with a circular chamfer, and the cover plate is provided with a first positioning pin corresponding to the circular chamfer. The first positioning pin is embedded in the circular chamfer to limit the housing of the device under test.

[0007] According to an embodiment of this disclosure, the positioning groove region includes four positioning grooves formed by insulating ribs, and the four positioning grooves form a rectangular structure.

[0008] According to an embodiment of this disclosure, the edge of the base is provided with at least one second positioning pin, and the inner side of the limiting structure ring is provided with a positioning groove corresponding to the second positioning pin, wherein the second positioning pin is embedded in the positioning groove.

[0009] According to an embodiment of this disclosure, the edge of the base is further provided with at least one limiting adjustment bolt, and the limiting structure is provided with a limiting adjustment track corresponding to the limiting adjustment bolt. The second positioning pin is adjusted to slide along the positioning groove by adjusting the limiting adjustment bolt to move along the limiting adjustment track.

[0010] According to an embodiment of this disclosure, the base is provided with at least one first threaded hole, and the cover plate is provided with a second threaded hole corresponding to the first threaded hole. The first threaded hole and the second threaded hole are used to fix the base and the cover plate by bolts.

[0011] According to an embodiment of this disclosure, the cover plate is provided with a pressure plate corresponding to the positioning groove, and the pressure plate is used to press the device under test onto the positioning groove.

[0012] According to embodiments of this disclosure, the base and the cover plate are circular or rectangular structures.

[0013] According to embodiments of this disclosure, the base, the cover plate, and the limiting structure are made of antistatic plastic material. Attached Figure Description

[0014] The above and other objects, features and advantages of this disclosure will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0015] Figure 1 An exploded view of the tooling fixture provided in an embodiment of this disclosure is shown schematically.

[0016] Figure 2 A schematic diagram of the base provided in an embodiment of this disclosure is shown.

[0017] Figure 3 A schematic diagram of the cover plate provided in an embodiment of this disclosure is shown.

[0018] Figure 4 A schematic diagram of the limiting structure provided in an embodiment of this disclosure is shown. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this disclosure clearer, the following detailed description is provided in conjunction with specific embodiments and accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without inventive effort are within the scope of protection of this disclosure.

[0020] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0021] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0022] In the description of this disclosure, it should be understood that the terms "longitudinal", "length", "circumferential", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the subsystem or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0023] Throughout the accompanying drawings, identical elements are represented by the same or similar reference numerals. Conventional structures or constructions have been omitted where they may cause confusion in understanding this disclosure. Furthermore, the shapes, dimensions, and positional relationships of the components in the drawings do not reflect actual size, scale, or actual positional relationships. Additionally, any reference numerals placed between parentheses in the claims should not be construed as limiting the claims.

[0024] Similarly, to simplify this disclosure and aid in understanding one or more of the various aspects of the disclosure, in the above description of exemplary embodiments of the present disclosure, various features of the present disclosure are sometimes grouped together in a single embodiment, figure, or description thereof. The use of terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refers to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present disclosure. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] This disclosure addresses particle collision noise testing of large-size flexible CQFP packages with leadframes. Since the DUT (Device Under Test) structure placed on top of the transducer is insufficient, this invention provides a multi-style, independently fixed DUT fixture. The fixture includes a base, a cover plate, and a limiting structure. The base has a positioning groove in the center for placing the DUT. The cover plate is detachably attached to the base and engages with it to secure the DUT. The limiting structure is annular, with the base embedded within it; the base does not rotate spirally relative to the limiting structure. This fixture is suitable for carrying samples with similar packages, such as CQFP and LCC, and all samples with leadframes. It eliminates frictional collisions between the sample and the transducer, improving the accuracy of particle collision noise test results. It also eliminates frictional and electrostatic discharge damage during testing. This fixture can be applied to the mass production of microelectronic and semiconductor device packaging PINDs with internal cavities. Furthermore, this fixture is easy to operate, significantly improving testing efficiency and reducing testing costs.

[0027] The following is in conjunction with the appendix Figures 1-4 The tooling fixtures provided in the embodiments of this disclosure will be described in detail.

[0028] Figure 1 An exploded view of the tooling fixture provided in an embodiment of this disclosure is shown schematically.

[0029] like Figure 1As shown, the overall structure of this tooling fixture can be composed of three parts: a base 1, a cover plate 2, and a limiting structure 3. The base 1 has a positioning groove area 11 in the middle, which is used to place the device under test. The cover plate 2 is detachably covered on the base 1 and cooperates with the base 1 to fix the device under test. The limiting structure 3 is a ring structure, and the base 1 is embedded in the limiting structure 3. The base (1) will not rotate spirally relative to the limiting structure 3.

[0030] Based on this tooling fixture, the large-size packaged device with a flexible lead frame protection ring is transformed into a rigid connection structure. This solves the problem of deformation and shaking of the DUT under mechanical shock and high-frequency vibration in particle collision noise detection test, which causes the transducer to collect noise and affect the test results, thus improving the accuracy of the test results.

[0031] Figure 2 A schematic diagram of the base provided in an embodiment of this disclosure is shown.

[0032] like Figure 2 As shown, the middle part M of the positioning area 11 in the middle of the base 1 can be hollowed out to expose the housing of the device under test, so as to facilitate a tight connection with the transducer of the PIND device.

[0033] The positioning groove area 11 of the base 1 has a rounded chamfer on its boundary. This rounded chamfer is used for positioning when the base is connected to the cover plate. The positioning groove area 11 includes four positioning grooves 111 formed by insulating ribs, and the four positioning grooves 111 form a rectangular structure. For example, rounded chamfers can be provided at the four corners of the rectangular groove area.

[0034] At least one second positioning pin 13 is provided on the edge of the base 1. The second positioning pin 13 is a positioning pin between the base 1 and the limiting structure 3 to ensure that the base 1 and the limiting structure 3 do not rotate spirally. For example, there are 4 second positioning pins 13, which are evenly distributed on the edge of the base 1.

[0035] The edge of the base 1 is also provided with at least one limiting adjustment bolt 14, which is used to adjust the base 1 to move up and down along the limiting structure 3 so that the maximum flat surface of the device under test can be well connected to the PIND device transducer.

[0036] The base 1 is provided with at least one first threaded hole 15, which is used to fix the relative position between the base 1 and the cover plate 2.

[0037] Figure 3 A schematic diagram of the cover plate provided in an embodiment of this disclosure is shown.

[0038] like Figure 3As shown, the cover plate 2 is provided with a first positioning pin 21 corresponding to the circular chamfer 12. The first positioning pin 21 can be perfectly embedded in the circular chamfer 12 of the base 1 and tightly connected to the edge of the DUT shell to limit the shell of the device under test, thereby minimizing the positioning error. For example, the number of first positioning pins 21 is also four.

[0039] The cover plate 2 is provided with a second threaded hole 22 corresponding to the first threaded hole 15. The first threaded hole 15 and the second threaded hole are used to fix the base 1 and the cover plate 2 with bolts. For example, the first threaded hole 15 and the second threaded hole 22 can be M3 threaded holes. After the cover plate 2 covers the base 1, an M1 high-strength bolt can be used to pass through the first threaded hole 15 and the second threaded hole 22 to fix the base 1 and the cover plate 2 together.

[0040] The cover plate 2 is also provided with a pressure plate 23 corresponding to the positioning groove 111. The pressure plate 23 is used to press the device under test onto the positioning groove 111. For example, there are four pressure plates 23, which can be perfectly pressed onto the rigid insulating rib of the CQFP tube shell. The DUT is fixed through this rigid part, so that the DUT, base 1 and cover plate 2 are tightly connected, and the DUT and the tooling components are well fixed into the same rigid integral structure.

[0041] Figure 4 A schematic diagram of the limiting structure provided in an embodiment of this disclosure is shown.

[0042] like Figure 4 As shown, the limiting structure 3 ring has a positioning groove 31 inside, which corresponds to the second positioning pin 13. The second positioning pin 13 is embedded in the positioning groove 31. The two work together to ensure that the base 1 and the limiting structure 3 will not rotate spirally, facilitating the overall movement of the tooling.

[0043] The base 1 is also provided with at least one limiting adjustment bolt 14 on its edge. The limiting structure 3 is provided with a limiting adjustment track 32 corresponding to the limiting adjustment bolt 14. By adjusting the limiting adjustment bolt 14 to move along the limiting adjustment track 32, the second positioning pin 13 is adjusted to slide along the positioning groove 31, thereby ensuring that the maximum flat surface of the device under test is properly connected to the PIND device transducer. For example, after the base 1 is installed into the limiting ring, by moving the base 1 up and down to ensure that the thinnest maximum flat surface of the device under test is properly connected to the PIND device transducer, the limiting adjustment bolt 14 can be used to fix it by passing through the limiting adjustment track 32. The limiting adjustment bolt 14 can be an M1 high-strength bolt.

[0044] In this embodiment, the base 1, cover plate 2, and limiting structure 3 can be circular or rectangular to meet the needs of existing equipment.

[0045] In this embodiment, the base 1, cover plate 2, and limiting structure 3 are made of antistatic plastic material with a surface resistance of 10 Ω·cm. 6 -10 9 Ω, with a Mohs hardness of approximately 2 to 2.5, to eliminate electrostatic discharge damage during the test.

[0046] In summary, this fixture adopts a modular, independently distributed structure, transforming large-size packaged devices with flexible lead frame protective rings into rigid connection structures. This solves the problem of DUT deformation and swaying under mechanical shock and high-frequency vibration in particle collision noise testing, which leads to transducer noise and affects the test results, thus improving the accuracy of the test results. Furthermore, the locating pins of the cover plate can be perfectly embedded in the four rounded chamfers in the middle of the base, tightly connected to the edge of the DUT shell, minimizing positioning errors and avoiding surface scratches, insulation breakage, and other abnormalities caused by DUT deformation during testing. The pressure plate can perfectly press onto the rigid insulation ribs of the DUT shell, fixing the DUT through this rigid part, ensuring a tight connection between the DUT, base, and cover plate, and effectively fixing the DUT and fixture components into a single rigid structure. The matching of the limit adjustment bolts and limit adjustment rails allows the thinnest and flattest surface of the device under test to connect well with the PIND transducer. The locking structure of the positioning pin and positioning groove between the base and the limiting structure ensures that the two parts of the structure will not rotate spirally, facilitating the overall movement of the tooling.

[0047] The specific embodiments described above further illustrate the purpose, technical solutions, and beneficial effects of this disclosure. It should be understood that the above descriptions are merely specific embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A tooling fixture for integrated circuit particle impact noise test, comprising: a base (1) having a positioning groove area (11) in the middle for placing a device under test; a cover plate (2) detachably covering the base (1) and cooperating with the base (1) to fix the device under test; a limiting structure (3) in the form of a ring, the base (1) being embedded in the limiting structure (3) so that the base (1) does not rotate relative to the limiting structure (3); wherein the positioning groove area (11) comprises four positioning grooves (111) formed by insulating ribs, the four positioning grooves (111) forming a rectangular structure; the cover plate (2) is provided with a pressing piece (23) corresponding to the positioning groove (111), the pressing piece (23) being used to press the device under test on the positioning groove (111); wherein the positioning groove area (11) is provided with a circular chamfer (12) on the boundary, the cover plate (2) is provided with a first positioning pin (21) corresponding to the circular chamfer, the first positioning pin (21) being embedded in the circular chamfer (12) to limit the shell of the device under test.

2. The tooling fixture of claim 1, wherein, The positioning groove area (11) is hollow in the middle to expose the shell of the device under test.

3. The tooling fixture of claim 1, wherein, The edge of the base (1) is provided with at least one second positioning pin (13), the inner ring of the limiting structure (3) is provided with a positioning sliding groove (31) corresponding to the second positioning pin (13), and the second positioning pin (13) is embedded in the positioning sliding groove (31).

4. The tooling fixture of claim 3, wherein, The edge of the base (1) is further provided with at least one limiting adjustment bolt (14), and the limiting structure (3) is provided with a limiting adjustment track (32) corresponding to the limiting adjustment bolt (14), the limiting adjustment bolt (14) is adjusted to move along the limiting adjustment track (32) to adjust the second positioning pin (13) to slide along the positioning sliding groove (31).

5. The tooling fixture of claim 1 wherein, The base (1) is provided with at least one first threaded hole (15), and the cover plate (2) is provided with a second threaded hole (22) corresponding to the first threaded hole (15), the first threaded hole (15) and the second threaded hole being used to fix the base (1) and the cover plate (2) by bolts.

6. The tooling fixture of claim 1 wherein, The base (1) and the cover plate (2) are in the form of a circle or a rectangle.

7. The tooling fixture of claim 1 wherein, The materials of the base (1), the cover plate (2) and the limiting structure (3) are anti-static plastic materials.

Citation Information

Patent Citations

  • Clamp used for pipe fitting impact test

    CN107101879A