Piezoelectric stick-slip drive platform

By converting the friction force from the horizontal plane to the vertical plane and adjusting the friction force, the problem of poor stability of traditional piezoelectric stick-slip actuators is solved, achieving higher stability and output force, a thinner structure, and easier integration with grating rulers.

CN114710060BActive Publication Date: 2026-01-30SUZHOU DINA PRECISION EQUIP
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Patent Information

Application Number
CN202210377462.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-11
Publication Date
2026-01-30
Estimated Expiration
2042-04-11

AI Technical Summary

Technical Problem

Traditional piezoelectric stick-slip actuators have poor stability when the friction surface is horizontal, cannot adjust the friction force, and have a thick structure, making them unsuitable for different application scenarios.

Method used

The friction force is converted from the horizontal plane of the slider and the slide rail to the vertical plane. A piezoelectric stick-slip actuator is used to drive the slider to move on both sides of the fixed part. The friction force is adjusted by adjusting screws. Combined with cross roller bearings and open design, stability and stroke are improved.

Benefits of technology

It enhances the stability and reliability of motion, can withstand greater pressure, achieves greater output force, has a thinner structure, facilitates the integration of grating rulers, and is suitable for larger loads.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention discloses a piezoelectric stick-slip drive platform, comprising: a base; a fixed part disposed on the base; a sliding member, the horizontal sides of which are slidably engaged with the horizontal sides of the fixed part; and a piezoelectric stick-slip actuator, confined to the base, the horizontal sides of which abut against the horizontal sides of the sliding member. When the piezoelectric stick-slip actuator deforms, the friction between the horizontal sides of the piezoelectric stick-slip actuator and the horizontal sides of the sliding member causes the piezoelectric stick-slip actuator to drive the sliding member to move along the fixed part. This invention transforms the friction surface into a vertical surface, eliminating the original vertical pressure, thereby improving overall stability and greatly enhancing the stability and reliability of the motion; at the macroscopic level, the overall stroke is significantly increased; the overall thickness is reduced; and the structure can withstand greater pressure on both sides, enabling a larger load during operation.
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Description

Technical Field

[0001] This invention relates to the field of precision drive technology, and in particular to a piezoelectric stick-slip drive platform. Background Technology

[0002] Piezoelectric actuation technology with micro-nano positioning accuracy is one of the supporting technologies in fields such as precision optical systems, micro-nano manufacturing, biomedical engineering, and precision scientific instruments. Among them, piezoelectric actuators based on the stick-slip actuation principle have been widely used due to their simple structure, high precision, large stroke, and absence of electromagnetic interference.

[0003] Stick-slip actuation is a typical driving method based on friction theory. The advent of piezoelectric materials and their excellent response characteristics have enabled the application of the stick-slip principle to driving applications. The essence of the stick-slip actuation mechanism is to control the displacement of the driven object by utilizing the difference between maximum static friction and sliding friction. Stick-slip actuation based on piezoelectric ceramics utilizes the inverse piezoelectric effect of the ceramics to excite the stator to produce slow and rapid alternating motion deformation, causing the stator and mover to be in both "sticky" and "slipping" motion states. Under the action of friction, this drives the object to move, achieving a micro-displacement. It is sometimes also called inertial stick-slip actuation.

[0004] Traditional piezoelectric stick-slip actuators are manufactured by driving a slide rail, relying on the friction and inertia between the slider and the slide rail for propulsion. Because the friction surface is horizontal, the pressure generated by friction is vertical, where only the cross-roller bearing bears the force. This results in poor overall stability, high bearing requirements, and is particularly disadvantageous under heavy loads (i.e., when a large amount of friction is required). Furthermore, the friction force cannot be adjusted, making it difficult to adapt to different applications. Additionally, the slider and slide rail make contact from both the top and bottom surfaces, resulting in a thick overall structure and reducing its applicability. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a piezoelectric stick-slip drive platform.

[0006] To achieve the above objectives, an embodiment of the present invention provides the following technical solution:

[0007] A piezoelectric stick-slip drive platform, comprising:

[0008] Base;

[0009] A fixing part is provided on the base;

[0010] A sliding member, wherein the horizontal two sides of the sliding member are respectively slidably engaged with the horizontal two sides of the fixed part;

[0011] A piezoelectric stick-slip actuator is located on the base. The horizontal two sides of the piezoelectric stick-slip actuator abut against the horizontal two sides of the sliding member. When the piezoelectric stick-slip actuator deforms, the friction between the horizontal two sides of the piezoelectric stick-slip actuator and the horizontal two sides of the sliding member causes the piezoelectric stick-slip actuator to drive the sliding member to move along the fixed part.

[0012] As a further improvement of the present invention, the fixing part includes two fixing members arranged opposite to each other, the outer sides of the horizontal sides of the sliding member are respectively slidably engaged with the inner sides of the two fixing members, the piezoelectric stick-slip actuator is located inside the sliding member, and the outer sides of the horizontal sides of the piezoelectric stick-slip actuator abut against the inner sides of the horizontal sides of the sliding member.

[0013] As a further improvement of the present invention, the piezoelectric stick-slip actuator includes an outer frame, an inner frame, and a piezoelectric ceramic. The inner frame is disposed inside the outer frame and one end is connected to the outer frame. The middle part of the inner frame is limited to the base. The piezoelectric ceramic is disposed inside one end of the inner frame and can transmit force to the middle parts of the outer frame and the inner frame respectively. The other end of the inner frame is elastically connected to the middle part of the inner frame.

[0014] As a further improvement of the present invention, there is a gap between the other end of the inner frame and the outer frame, and a first adjusting screw is provided between the other end of the outer frame and the inner frame.

[0015] As a further improvement of the present invention, the outer frame is provided with a second adjusting screw, which is in contact with the piezoelectric ceramic.

[0016] As a further improvement of the present invention, the outer frame includes two first side plates disposed opposite to each other and two elastic arms connecting the two first side plates, wherein the elastic arms are in the shape of an outwardly convex arc.

[0017] As a further improvement of the present invention, the inner frame includes two second side plates disposed opposite to each other, a third side plate connecting the two second side plates, a support disposed between the two second side plates, and at least one elastic beam, wherein the at least one elastic beam is connected between the third side plate and the support.

[0018] As a further improvement of the present invention, a limiting block is provided on the base, and the limiting block extends into the support.

[0019] As a further improvement of the present invention, the horizontal outer sides of the sliding member are respectively fitted with cross roller bearings to the inner sides of the two fixed members.

[0020] As a further improvement of the present invention, the slider is hollow inside, with one end of the slider closed and the other end open along the direction of movement.

[0021] The beneficial effects of this invention are:

[0022] (1) The original friction force acting on the slide rail by the contact between the upper and lower surfaces is transferred to the horizontal sides of the sliding parts, so that the friction surface is changed from the original horizontal surface to the vertical surface. This eliminates the original vertical pressure, greatly reduces the pressure on the roller bearing, improves the overall stability, and greatly enhances the stability and reliability of the motion.

[0023] (2) The sliding component adopts an open design, which greatly improves the overall stroke at the macro level.

[0024] (3) The design of each part is combined to make the whole thinner, which improves its applicability and has a great advantage in integrating the grating ruler in the next step.

[0025] (4) The structure can withstand greater pressure on both sides and can achieve greater output force during operation, which means it can apply a larger load. At the same time, it can ensure the stability and reliability of the motion under a larger load. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a perspective view of a preferred embodiment of the present invention;

[0028] Figure 2 This is a top view of a preferred embodiment of the present invention;

[0029] Figure 3 This is a left view of a preferred embodiment of the present invention;

[0030] Figure 4 This is a front view of a preferred embodiment of the present invention;

[0031] Figure 5 This is a motion state diagram of a preferred embodiment of the present invention;

[0032] In the diagram: 10. Base; 101. Limiting block; 20. Fixing component; 30. Sliding component; 301. V-shaped raceway; 302. Slide rail; 303. Connecting plate; 40. Piezoelectric stick-slip actuator; 401. Outer frame; 402. Inner frame; 403. Piezoelectric ceramic; 404. Gasket; 408. First side plate; 409. Elastic arm; 411. Second side plate; 412. Third side plate; 413. Support; 414. Elastic beam; 415. First beam; 416. Second beam; 417. Third beam; 418. Fourth beam; 419. Fifth beam; 50. First adjusting screw; 60. Second adjusting screw; 70. Crossed roller bearing. Detailed Implementation

[0033] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0034] Please see Figures 1-4 This application discloses a piezoelectric stick-slip drive platform, including: a base 10; a fixed part disposed on the base 10; a sliding member 30, the horizontal two sides of the sliding member 30 respectively slidingly engaging with the horizontal two sides of the fixed part, the sliding member 30 being able to move horizontally along the fixed part; and a piezoelectric stick-slip actuator 40, limited to the base 10, the horizontal two sides of the piezoelectric stick-slip actuator 40 abutting against the horizontal two sides of the sliding member 30, when the piezoelectric stick-slip actuator 40 deforms, the friction between the horizontal two sides of the piezoelectric stick-slip actuator 40 and the horizontal two sides of the sliding member 30 causes the piezoelectric stick-slip actuator 40 to drive the sliding member 30 to move along the fixed part. This invention transfers the friction force that originally acted on the slide rail through the contact between the top and bottom surfaces to the horizontal sides of the sliding member 30, changing the friction surface from the original horizontal plane to the vertical plane. This eliminates the original vertical pressure, improving overall stability and greatly enhancing the stability and reliability of the motion. The structure can withstand greater pressure on both sides, which is more advantageous when applying larger loads, allowing for greater output force during operation. At the same time, the cooperation of various component structures makes the whole structure thinner, improving its applicability and providing a significant advantage for the subsequent integration of the grating ruler.

[0035] In this embodiment, the fixing part includes two fixing members 20 arranged opposite to each other. The outer horizontal sides of the sliding member 30 are respectively slidably engaged with the inner sides of the two fixing members 20. The piezoelectric stick-slip actuator 40 is located inside the sliding member 30, and the outer horizontal sides of the piezoelectric stick-slip actuator 40 abut against the inner horizontal sides of the sliding member 30. The structure is simple and further improves the stability of the movement. Specifically, the fixing members 20 are fixed to the base 10 by fastening screws (not shown in the figure).

[0036] In this embodiment, the piezoelectric stick-slip actuator 40 includes an outer frame 401, an inner frame 402, and a piezoelectric ceramic 403. The inner frame 402 is disposed inside the outer frame 401 and one end is connected to the outer frame 401. The middle part of the inner frame 402 is limited to the base 10. The piezoelectric ceramic 403 is disposed inside one end of the inner frame 402 and can transmit force to the middle part of the inner frame 402 and the outer frame 401 respectively. The other end of the inner frame 402 is elastically connected to the middle part of the inner frame 402. When the piezoelectric ceramic 403 begins to elongate under the action of electricity, the piezoelectric ceramic 403 exerts pressure on the middle part of the inner frame 402 and the outer frame 401 respectively. However, since the middle part of the inner frame 402 is limited to the base 10, the piezoelectric ceramic 403 elongates slowly, pushing the outer frame 401. The outer frame 401 pulls the inner frame 402 to move, and there is friction between the outer frame 401 and the sliding member 30. At this time, it is static friction. Therefore, the outer frame 401 drives the sliding member 30 to move together.

[0037] Specifically, there is a gap between the other end of the inner frame 402 and the outer frame 401, and a first adjusting screw 50 is provided between the other ends of the outer frame 401 and the inner frame 402. Due to the first adjusting screw 50, when the first adjusting screw 50 is fed forward, the outermost contour of the outer frame 401 deforms and expands outward, increasing the pressure on the two inner surfaces of the sliding member 30, thereby increasing the friction. Conversely, when the first adjusting screw 50 is retracted, the outermost contour of the outer frame 401 deforms and contracts inward, reducing the pressure on the two inner surfaces of the sliding member 30, thereby reducing the friction. This achieves friction adjustment, facilitating optimal output performance and improving motion efficiency.

[0038] The outer frame 401 is provided with a second adjusting screw 60, which contacts the piezoelectric ceramic 403. By providing the second adjusting screw 60, the preload of the piezoelectric ceramic 403 can be adjusted, thereby facilitating the transmission of the deformation force of the piezoelectric ceramic 403 to the outer frame 401. The adjustment is convenient and quick, and it also facilitates the installation of the piezoelectric ceramic 403, improving work efficiency.

[0039] To avoid damage to the piezoelectric ceramic 403, a shim 404 is preferably provided inside the inner frame 402. The shim 404 contacts the piezoelectric ceramic 403 and the second adjusting screw 60 respectively. By feeding and retracting the second adjusting screw 60, the shim 404 can be adjusted to move forward and backward, thereby adjusting the preload of the piezoelectric ceramic 403.

[0040] In this embodiment, the outer frame 401 includes two opposing first side plates 408 and two elastic arms 409 connecting the two first side plates 408. The two elastic arms 409 are arranged opposite each other and are in an outwardly convex arc shape. This allows for a more uniform stress distribution during friction adjustment, preventing stress concentration and damage to the elastic arms 409, thus improving service life, reducing costs, and increasing work efficiency. Specifically, the first side plates 408 and the elastic arms 409 are integrally formed and connected, improving the stability of the outer frame 401 and facilitating deformation of the elastic arms 409 relative to the first side plates 408.

[0041] In this embodiment, the inner frame 402 includes two opposing second side plates 411, a third side plate 412 connecting the two second side plates 411, a support 413 disposed between the two second side plates 411, and at least one elastic beam 414. The at least one elastic beam 414 is connected between the third side plate 412 and the support 413. Specifically, each of the two second side plates 411 is connected to one of the first side plates 408, and the first side plate 408, the second side plate 411, and the third side plate 412 can move together. Specifically, the piezoelectric ceramic 403 is in contact with the support 413. Since the support 413 is confined to the base 10, the support 413 is fixed. When the piezoelectric ceramic 402 is energized and extends, the piezoelectric ceramic 403 pushes one of the first side plates 408, and the first side plate 408 drives the second side plate 411 and the third side plate 412 to compress the elastic beam 414.

[0042] More specifically, the second side plate 411 is integrally formed and connected to the first side plate 408 and the third side plate 412, improving the stability of the structure. It also facilitates the rapid movement of the second side plate 411 when the first side plate 408 moves, and the second side plate 411 drives the third side plate 412 to compress the elastic beam 414, improving the smoothness of movement. More specifically, the elastic beam 414 is integrally formed and connected to the support 413 and the third side plate 412.

[0043] The preferred elastic beam 414 is a folded beam, which not only has a compact structure but also possesses a certain degree of flexibility while maintaining sufficient rigidity. It can undergo significant deformation when subjected to stress and exhibit good recovery ability when the stress is released. Specifically, the elastic beam 414 includes a first beam 415, a second beam 416, a third beam 417, a fourth beam 418, and a fifth beam 419 connected in sequence. The first beam 415 is perpendicularly connected to the third side plate 412, the third beam 417 is perpendicularly connected to the second beam 416 and the fourth beam 418, and the fifth beam 415 is perpendicularly connected to the support 413.

[0044] In this embodiment, a limiting block 101 is provided on the base 10. The limiting block 101 extends into the support 413 and limits the support 413. Specifically, the limiting block 101 extends along the direction of movement, has good shear resistance, and improves the smoothness of movement.

[0045] Preferably, the horizontal outer sides of the sliding member 30 are each fitted with a crossed roller bearing 70 to the inner side of each of the two fixed members 20. The sliding member 30, the fixed members 20, and the crossed roller bearings 70 cooperate to form a roller guide, which can withstand vertical and horizontal forces and improve the stability of movement. In this embodiment, the crossed roller bearings 70 are cylindrical rollers, but are not limited to cylindrical rollers; spherical rollers can also be used.

[0046] In this embodiment, the slider 30 is hollow inside, with one end closed and the other end open along the direction of movement. This open design significantly increases the overall stroke at a macroscopic level. Specifically, the slider 30 includes two slide rails 302 with V-shaped raceways 301 and a connecting plate 303 connecting the two slide rails 302. More specifically, the slide rails 302 and the connecting plate 303 are integrally formed and connected, improving the stability and sliding stability of the slider 30.

[0047] When the piezoelectric ceramic 403 is in use, it begins to elongate (i.e., make stepping movements) under the action of electricity. Since the support 413 in contact with one side of the piezoelectric ceramic 403 is limited on the base 10, one side of the piezoelectric ceramic 403 is blocked. The piezoelectric ceramic 403 elongates slowly and presses against the pad 404. The pad 404 then pushes one of the first side plates 408. One of the first side plates 408 pulls the third side plate 412 through the second side plate 411 to compress the elastic beam 414. The elastic beam 414 undergoes elastic deformation under force. At the same time, one of the first side plates 408 pulls the two elastic arms 409, causing the two elastic arms 409 of the piezoelectric stick-slip actuator 40 to move. Since there is friction between the two elastic arms 409 and the sliding member 30, which is static friction, the piezoelectric stick-slip actuator 40 drives the sliding member 30 to move together, thereby realizing the driving effect.

[0048] When the piezoelectric ceramic 403 undergoes rapid retraction, i.e., recovery motion, it rapidly contracts until it reaches its initial state. At this time, the elastic beam 414 is no longer subjected to external force, its elastic deformation begins to release, and it returns to its original state. Simultaneously, because the elastic beam 414 has a certain stiffness, it will move at a relatively high speed, causing the two elastic arms 409 of the piezoelectric stick-slip actuator 40 to also move rapidly. The sliding member 30 will remain in its original position due to inertia, thus sliding with the two elastic arms 409 of the piezoelectric stick-slip actuator 40. The friction mode changes from static friction to sliding friction, thereby realizing piezoelectric motion.

[0049] At this point, the piezoelectric motion has completed one step, such as... Figure 5 As shown, by applying a sawtooth wave voltage to the piezoelectric ceramic 403, macroscopic motion is obtained, which is obtained by superimposing multiple step sizes.

[0050] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0051] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A piezoelectric inchworm drive platform, characterized by, The utility model relates to a horizontal two side portions of piezoelectric stick -slip driver are abutted with horizontal two side portions of slide piece, and piezoelectric stick -slip driver includes outer frame, inner frame and piezoelectric ceramic, and the inner frame is located in the outer frame and is connected with the outer frame in one end, and the middle part of inner frame is located in the base, and the piezoelectric ceramic is located in one end of inner frame and can respectively to the outer frame, the middle part of inner frame transmission acting force, and the other end of inner frame is elastically connected with the middle part of inner frame, when piezoelectric stick -slip driver deforms, through the friction between the horizontal two side portions of piezoelectric stick -slip driver and the horizontal two side portions of slide piece, make piezoelectric stick -slip driver drive slide piece along fixed portion motion. The fixed part includes two fixed parts arranged oppositely, and the outer sides of the horizontal two sides of the slide piece are respectively slidably connected with the inner sides of the two fixed parts. The other end of the inner frame and the outer frame have a gap, and the first adjusting screw is arranged between the outer frame and the other end of the inner frame. The outer frame is provided with a second adjusting screw, and the second adjusting screw is in contact with the piezoelectric ceramic. The outer frame includes two first side plates arranged oppositely, two elastic arms connecting the two first side plates, and the elastic arms are outwardly convex and arc-shaped.

2. The piezoelectric inchworm drive platform of claim 1, wherein, The inner frame includes two second side plates arranged oppositely, a third side plate connecting the two second side plates, a support arranged between the two second side plates, and at least one elastic beam connected between the third side plate and the support.

3. The piezoelectric inchworm drive platform of claim 1, wherein, The base is provided with a limiting block, and the limiting block extends into the support.

4. The piezoelectric inchworm drive platform of claim 1 or 3, wherein, The outer sides of the horizontal two sides of the slide piece are respectively matched with the inner sides of the two fixed parts.

5. The piezoelectric inchworm drive platform of claim 4, wherein, The slide piece is hollow, one end of the slide piece is closed along the movement direction, and the other end is open.

6. The piezoelectric inchworm platform of claim 3, wherein, ​ 7. The piezoelectric inchworm drive platform of claim 6, wherein, ​ 8. The piezoelectric inchworm platform of claim 2, wherein, ​ 9. The piezoelectric inchworm drive platform of claim 1 or 2, wherein, ​

Citation Information

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  • Adjustable pre-tightening type stick-slip driving positioning platform based on flexible hinges

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