Line spectrum confocal calibration method, device, equipment, system and storage medium

Abstract

The invention relates to the field of optical measurement technology, and discloses a line spectrum confocal calibration method, device, equipment, system and storage medium. The method adjusts a calibration plate to within the range of a line spectrum confocal sensor, collects a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate, extracts pixels corresponding to bright lines in the first sensor imaging image, fuses the pixels, obtains a light source fusion map, judges whether the light source fusion calibration is successful according to the light source fusion map, and if the light source fusion calibration is successful, performs image processing on the light source fusion map to obtain a light source image, eliminates environmental noise, and reduces the influence of errors on the calibration of the line spectrum confocal sensor; according to the light source image, performs line position calibration, peak calibration and spacing test on the line spectrum confocal sensor to obtain a sensor calibration result, collects data for multiple calibrations, and improves calibration accuracy.

Description

Technical Field

[0001] The present invention relates to the field of optical measurement technology, and in particular to a line spectrum confocal calibration method, device, equipment, system and storage medium. Background Art

[0002] In the field of industrial application, the key standard for measuring sensors is to be free from noise interference and ensure ultra-high stability measurement. The basis of industrial sensors is to ensure the stability and consistency of products. The calibration of various algorithm parameters of sensors and the testing of index performance are very important links in the process of sensor R&D and production.

[0003] Line spectrum confocal sensors have complex internal structures, a wide variety of optical and structural components, and many steps in the production and installation process. It is inevitable that the optical parameters and performance indicators of each sensor after production will differ from the design values. These errors must be controlled within a reasonable tolerance range, and independent systematic calibration of each sensor is necessary and critical. The current calibration of line spectrum confocal sensors is usually not accurate due to interference from environmental factors.

[0004] The above contents are only used to assist in understanding the technical solution of the present invention and do not constitute an admission that the above contents are prior art. Summary of the invention

[0005] The main purpose of the present invention is to provide a linear spectrum confocal calibration method, device, equipment, system and storage medium, aiming to solve the technical problem that the calibration accuracy of the linear spectrum confocal sensor in the prior art is low due to interference from environmental factors.

[0006] To achieve the above object, the present invention provides a line spectrum confocal calibration method, which comprises the following steps:

[0007] Adjusting the calibration plate to within the measuring range of the line spectrum confocal sensor, and collecting a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate;

[0008] Extracting pixels corresponding to bright lines in the image of the first sensor, and fusing the pixels to obtain a light source fusion image;

[0009] Judging whether the light source fusion calibration is successful according to the light source fusion graph;

[0010] If the light source fusion calibration is successful, image processing is performed on the light source fusion image to obtain a light source image;

[0011] According to the light source image, line position calibration, peak value calibration and spacing test are performed on the line spectrum confocal sensor to obtain a sensor calibration result.

[0012] Preferably, according to the light source image, the line spectrum confocal sensor is subjected to line position calibration, peak value calibration and spacing test to obtain a sensor calibration result, including:

[0013] Fusing the signal of each measurement point in the light source image to obtain a light source signal;

[0014] Calibrate the center position of the bright line according to the light source signal to obtain a line position calibration result;

[0015] Determining whether the line position calibration is successful according to the line position calibration result;

[0016] If the line position calibration is successful, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain a sensor calibration result.

[0017] Preferably, if the line position calibration is successful, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain the sensor calibration result, including:

[0018] If the line position calibration is successful, the calibration plate is controlled to move at equal intervals, and the position to which it is moved is used as a measurement point, and a second sensor imaging image formed by the line spectrum confocal sensor measuring the measurement point is collected;

[0019] Constructing a polynomial fitting relationship between each of the measuring points and each peak value of each line in the image of the second sensor imaging, and obtaining a relationship between the wavelength and the measuring point;

[0020] Outputting a peak calibration curve according to the relationship between the wavelength and the measurement point;

[0021] Judging whether the line position calibration is successful according to the peak calibration curve;

[0022] If the peak calibration is successful, perform a spacing test to obtain the sensor calibration result.

[0023] Preferably, constructing a polynomial fitting relationship between each of the measurement points and each peak value of each line in the image of the second sensor to obtain a relationship between the wavelength and the measurement point includes:

[0024] Calculating the difference between each point on each line and the actual calibration position after multiple measurements of each line in the light source spectrum direction in the image of the second sensor imaging image, and calculating the average value according to the difference;

[0025] According to the average value, a polynomial fitting relationship is constructed between each of the measurement points and each peak value of each line in the image of the second sensor imaging, so as to obtain a relationship between the wavelength and the measurement point.

[0026] Preferably, after performing line position calibration, peak value calibration and spacing test on the line spectrum confocal sensor according to the light source image and obtaining the sensor calibration result, the method further comprises:

[0027] Controlling the calibration plate to move within the range of the line spectrum confocal sensor;

[0028] Receiving signals at both ends of the measuring range of the line spectrum confocal sensor, and generating actual movement values ​​of the calibration plate according to the signals at both ends of the measuring range of the line spectrum confocal sensor;

[0029] Comparing the actual value of the movement of the calibration plate with the measured value of the movement of the calibration plate measured by a laser interferometer;

[0030] It is determined whether the line spectrum confocal working range of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0031] Preferably, after judging whether the line spectrum confocal working range of the line spectrum confocal sensor meets the requirements according to the comparison result, the method further includes:

[0032] If the line spectrum confocal working range meets the calibration requirements, the current calibration plate position coordinates are obtained;

[0033] Calculating the actual working distance of the line spectrum confocal sensor according to the current calibration plate position coordinates and the received starting end signal of the line spectrum confocal sensor;

[0034] comparing the actual working distance with the measured working distance measured by the laser interferometer;

[0035] It is determined whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0036] Preferably, after judging whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes:

[0037] If the working distance of the line spectrum confocal sensor meets the calibration requirements, measuring the number of working points of the line spectrum confocal sensor according to the peak calibration curve, and calculating the available line length according to the number of working points;

[0038] Determine whether the calibration requirements are met based on the available line length;

[0039] If the available line length meets the calibration requirements, a fitting curve between the calibration plate displacement and the wavelength is obtained;

[0040] Calculating an actual linearity error based on the fitting curve and the peak calibration curve;

[0041] comparing the actual linearity error with the measured linearity error measured by the laser interferometer;

[0042] It is determined whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0043] Preferably, after judging whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes:

[0044] If the linearity of the line spectrum confocal sensor meets the calibration requirements, a preset number of coordinate positions within the full range of the line spectrum confocal sensor are selected, continuous measurements are performed at the preset number of coordinate positions, and sensor measurement values ​​are output;

[0045] Calculating the actual repeatability of the line spectrum confocal sensor according to the sensor measurement value;

[0046] Comparing the actual repeatability with the measurement repeatability measured by a laser interferometer;

[0047] It is determined whether the repeatability of the line spectrum confocal sensor meets the calibration requirements based on the comparison result.

[0048] In addition, to achieve the above-mentioned purpose, the present invention further proposes a line spectrum confocal calibration device, the line spectrum confocal calibration device comprising:

[0049] A control module, used for controlling the displacement module to move, so as to drive the calibration plate to be adjusted to within the range of the line spectrum confocal sensor, so as to form a first sensor imaging image;

[0050] A light source fusion module, used for extracting pixels corresponding to bright lines in the image of the first sensor, and fusing the pixels to obtain a light source fusion image;

[0051] A judgment module, used for judging whether the light source fusion calibration is successful according to the light source fusion map;

[0052] An image processing module, configured to perform image processing on the light source fusion image to obtain a light source image if the light source fusion calibration is successful;

[0053] The calibration module is used to perform line position calibration, peak value calibration and spacing test on the line spectrum confocal sensor according to the light source image to obtain a sensor calibration result.

[0054] In addition, to achieve the above-mentioned purpose, the present invention also proposes a line spectrum confocal calibration device, which includes: a memory, a processor, and a line spectrum confocal calibration program stored in the memory and executable on the processor, and when the line spectrum confocal calibration program is executed by the processor, the steps of the line spectrum confocal calibration method described above are implemented.

[0055] In addition, to achieve the above objectives, the present invention also proposes a storage medium, on which a line spectrum confocal calibration program is stored, and when the line spectrum confocal calibration program is executed by a processor, the steps of the line spectrum confocal calibration method described above are implemented.

[0056] In addition, to achieve the above objectives, the present invention also proposes a line spectrum confocal calibration system, which includes: a spectral confocal sensor, a laser interferometer, a calibration plate, and the line spectrum confocal calibration device as described above.

[0057] In the present invention, by adjusting the calibration plate to within the range of the line spectrum confocal sensor, a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate is collected, pixels corresponding to bright lines in the first sensor imaging image are extracted, and the pixels are fused to obtain a light source fusion map, and whether the light source fusion calibration is successful is judged according to the light source fusion map. If the light source fusion calibration is successful, image processing is performed on the light source fusion map to obtain a light source image, eliminate environmental noise, and reduce the influence of errors on the calibration of the line spectrum confocal sensor; according to the light source image, line position calibration, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain a sensor calibration result, and data is collected for multiple calibrations to improve calibration accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 It is a structural schematic diagram of a line spectrum confocal calibration device in a hardware operating environment involved in an embodiment of the present invention;

[0059] Figure 2 It is a schematic diagram of the flow chart of the first embodiment of the line spectrum confocal calibration method of the present invention;

[0060] Figure 3 It is a light source fusion diagram in the first embodiment of the line spectrum confocal calibration method of the present invention;

[0061] Figure 4 The line position calibration result in the second embodiment of the line spectrum confocal calibration method of the present invention;

[0062] Figure 5 It is a peak calibration curve in the second embodiment of the line spectrum confocal calibration method of the present invention;

[0063] Figure 6It is a line length test image in the third embodiment of the line spectrum confocal calibration method of the present invention;

[0064] Figure 7 It is a repeatability test curve of the third embodiment of the line spectrum confocal calibration method of the present invention;

[0065] Figure 8 It is a structural block diagram of the first embodiment of the line spectrum confocal calibration device of the present invention;

[0066] Fig. 9 The structure of the linear spectrum confocal calibration system in the first embodiment of the linear spectrum confocal calibration system of the present invention is shown in FIG. Figure 1 ;

[0067] Fig.10 The structure of the linear spectrum confocal calibration system in the first embodiment of the linear spectrum confocal calibration system of the present invention is shown in FIG. Figure 2 .

[0068] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0069] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0070] Reference Figure 1 , Figure 1 It is a schematic diagram of the structure of the line spectrum confocal calibration equipment in the hardware operating environment involved in the embodiment of the present invention.

[0071] like Figure 1 As shown, the line spectrum confocal calibration device may include: a processor 1001, such as a central processing unit (CPU), a communication bus 1002, a user interface 1003, a network interface 1004, and a memory 1005. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display), and the user interface 1003 may optionally include a standard wired interface and a wireless interface. The wired interface of the user interface 1003 may be a USB interface in the present invention. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a wireless fidelity (WIreless-FIdelity, WI-FI) interface). The memory 1005 may be a high-speed random access memory (Random Access Memory, RAM) memory, or a stable memory (Non-volatile Memory, NVM), such as a disk memory. The memory 1005 may optionally be a storage device independent of the aforementioned processor 1001.

[0072] Those skilled in the art will understand that Figure 1 The structure shown in the figure does not constitute a limitation on the line spectrum confocal calibration device, and may include more or less components than those shown in the figure, or a combination of certain components, or a different arrangement of components.

[0073] like Figure 1 As shown, the memory 1005 as a computer storage medium may include an operating system, a network communication module, a user interface module, and a line-spectrum confocal calibration program.

[0074] exist Figure 1 In the line spectrum confocal calibration device shown, the network interface 1004 is mainly used to connect to the background server and communicate data with the background server; the user interface 1003 is mainly used to connect to the user device; the line spectrum confocal calibration device calls the line spectrum confocal calibration program stored in the memory 1005 through the processor 1001, and executes the line spectrum confocal calibration method provided by the embodiment of the present invention.

[0075] Based on the above hardware structure, an embodiment of the line spectrum confocal calibration method of the present invention is proposed.

[0076] Reference Figure 2 , Figure 2 The figure is a flow chart of the first embodiment of the line spectrum confocal calibration method of the present invention, and the first embodiment of the line spectrum confocal calibration method of the present invention is proposed.

[0077] In a first embodiment, the line spectrum confocal calibration method comprises the following steps:

[0078] Step S10: adjusting the calibration plate to within the measuring range of the line spectrum confocal sensor, and collecting a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate.

[0079] It should be understood that the execution subject of this embodiment is the line spectrum confocal calibration device, and the line spectrum confocal calibration device can be an electronic device such as an industrial personal computer (IPC), a personal computer or a server, and this embodiment does not limit this. Usually during calibration, check the appearance of the line spectrum confocal sensor and install the line spectrum confocal sensor horizontally at the mechanical limit of the optical isolation platform. Connect the power supply, power on the entire system, and open the line spectrum confocal calibration software on the line spectrum confocal calibration device.

[0080] It should be noted that the line spectrum confocal calibration device directly controls the calibration plate to be adjusted to the range of the line spectrum confocal sensor; or controls the line spectrum confocal sensor to move so that the calibration plate is within the range of the line spectrum confocal sensor; or the line spectrum confocal calibration device controls the displacement module to drive the calibration plate to be adjusted to the range of the line spectrum confocal sensor, and the displacement module is set on the calibration plate, or other methods can be used to adjust the calibration plate to the range of the line spectrum confocal sensor, and this embodiment does not limit this. The line spectrum confocal sensor measures the calibration plate to form a first sensor imaging image, and the center position of the bright line of the first sensor imaging image can represent the brightness of the light source spectrum at this position.

[0081] Step S20: extracting pixels corresponding to bright lines in the image captured by the first sensor, and fusing the pixels to obtain a light source fusion image.

[0082] It is understandable that the distance between the line spectrum confocal sensor and the calibration plate is moved in the spectral direction so that the bright line can cover every pixel position on the first sensor imaging image of the line spectrum confocal sensor. Then the corresponding pixels on the bright line are extracted and fused to obtain the distribution diagram of the light source intensity along the spectral dispersion direction, and finally the light source fusion is obtained by extracting the distribution of the light source intensity at different wavelength positions.

[0083] Step S30: judging whether the light source fusion calibration is successful according to the light source fusion map.

[0084] In the specific implementation, Figure 3 As shown, in the direction of spectral dispersion, the light source fusion diagram has continuous distribution of bright lines, and the central area is the brightest, and the two sides gradually become darker. This is consistent with the intensity distribution of the light source in different wavelength directions. In this case, the light source fusion calibration is deemed to be successful, otherwise the light source fusion calibration is deemed to have failed. Usually, there are breakpoints, discontinuities or unevenness between the two lines of the light source fusion diagram, which means that the light source fusion calibration has failed. If the light source fusion calibration fails, adjust the light source fusion algorithm parameters of the line spectrum confocal sensor; and re-execute the light source fusion calibration step.

[0085] Step S40: If the light source fusion calibration is successful, image processing is performed on the light source fusion image to obtain a light source image.

[0086] It should be understood that if the light source fusion calibration is successful, light source optimization is performed, that is, image optimization processing is performed on the light source fusion map, specifically, the position of each measurement point of the light source fusion on the image and the echo signal are normalized. The purpose of light source optimization is to make the light source data smoother and improve the smoothness of the light source image. In this embodiment, the image processing of the light source fusion map to obtain the light source image specifically includes: normalizing the light source fusion map to obtain the light source image.

[0087] Step S50: performing line position calibration, peak value calibration and spacing test on the line spectrum confocal sensor according to the light source image to obtain a sensor calibration result.

[0088] It should be noted that line position calibration is to determine the position where the signal of each point on the light source image appears, and to separate the signal belonging to each measurement point from the image formed by multiple measurement points. Peak calibration is to change the distance between the calibration plate and the line spectrum sensor, and to collect the image formed by the line spectrum confocal sensor, and to construct a polynomial fitting relationship between different peaks at different distances and at different positions of each line through an algorithm. The peak calibration process is usually to move at equal intervals, and the calibration result can be verified by indirect testing. The output sensor calibration result is usually saved in the line spectrum confocal calibration device, and the calibration algorithm parameters are written into the line spectrum confocal sensor to start the subsequent test process.

[0089] In this embodiment, the calibration plate is adjusted to within the range of the line spectrum confocal sensor, a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate is collected, pixels corresponding to bright lines in the first sensor imaging image are extracted, and the pixels are fused to obtain a light source fusion map, and whether the light source fusion calibration is successful is judged according to the light source fusion map. If the light source fusion calibration is successful, image processing is performed on the light source fusion map to obtain a light source image, eliminate environmental noise, and reduce the influence of errors on the calibration of the line spectrum confocal sensor; according to the light source image, line position calibration, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain a sensor calibration result, and data is collected for multiple calibrations to improve the calibration accuracy.

[0090] Based on the first embodiment of the above-mentioned line spectrum confocal calibration method, continue to refer to Figure 2 , a second embodiment of the line spectrum confocal calibration method of the present invention is proposed.

[0091] In the second embodiment, the step S50 includes:

[0092] Fusing the signal of each measurement point in the light source image to obtain a light source signal;

[0093] Calibrate the center position of the bright line according to the light source signal to obtain a line position calibration result;

[0094] Determining whether the line position calibration is successful according to the line position calibration result;

[0095] If the line position calibration is successful, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain a sensor calibration result.

[0096] It should be understood that line position calibration is to determine the position of the signal of each point on the light source image, separate the signal belonging to each measurement point from the image formed by multiple measurement points, and separate the light source signal and the background signal. The purpose of line position calibration is to identify the position of each line on the light source image. The center position of the calibrated bright line. After line position calibration, the output line position calibration result is as follows Figure 5 As shown, if these lines are uniform, do not intersect, and occupy the brightest position of the pixel, the line position calibration is deemed to be successful, otherwise the line position calibration is deemed to have failed. Figure 4 The line displayed in is actually red. If the line position calibration fails, it is necessary to adjust the line position calibration software algorithm parameters and re-execute the line position calibration step. If the line position calibration is successful, the subsequent calibration steps are executed. In this embodiment, if the line position calibration fails, the line position calibration algorithm parameters of the line spectrum confocal sensor are adjusted.

[0097] In the second embodiment, the step S50 includes:

[0098] In this embodiment, if the line position calibration is successful, peak calibration and spacing test are performed on the line spectrum confocal sensor to obtain the sensor calibration result, including:

[0099] If the line position calibration is successful, the calibration plate is controlled to move at equal intervals, and the position to which it is moved is used as a measurement point, and a second sensor imaging image formed by the line spectrum confocal sensor measuring the measurement point is collected;

[0100] Constructing a polynomial fitting relationship between each of the measuring points and each peak value of each line in the image of the second sensor imaging, and obtaining a relationship between the wavelength and the measuring point;

[0101] Outputting a peak calibration curve according to the relationship between the wavelength and the measurement point;

[0102] Judging whether the line position calibration is successful according to the peak calibration curve;

[0103] If the peak calibration is successful, perform a spacing test to obtain the sensor calibration result.

[0104] It is understandable that peak calibration can be achieved by directly controlling the equal-spaced movement of the calibration plate, or by controlling the equal-spaced movement of the line spectrum confocal sensor, or by controlling the equal-spaced movement of the high-precision displacement module within the spectral range, thereby changing the distance between the calibration plate and the line spectrum sensor, and collecting the second sensor imaging image formed by the line spectrum confocal sensor, and constructing a polynomial fitting relationship between different peaks at different distances and at different positions of each line through an algorithm to obtain the relationship between the wavelength and the measurement point. The peak value calculated during the peak calibration process can be used to intuitively view the peak extraction situation, such as Figure 5 As shown, the horizontal axis is the wavelength, and the vertical axis is the position of the measurement point. Each point in the figure is a peak value, and you can see the available range of each line.

[0105] Furthermore, in this embodiment, constructing a polynomial fitting relationship between each of the measurement points and each peak value of each line in the image of the second sensor to obtain a relationship between the wavelength and the measurement point includes:

[0106] Calculating the difference between each point on each line and the actual calibration position after multiple measurements of each line in the light source spectrum direction in the image of the second sensor imaging image, and calculating the average value according to the difference;

[0107] According to the average value, a polynomial fitting relationship is constructed between each of the measurement points and each peak value of each line in the image of the second sensor imaging, so as to obtain a relationship between the wavelength and the measurement point.

[0108] It should be noted that each line is averaged after multiple measurements in the direction of the light source spectrum. First, the difference between each point in each line and the actual calibration position is obtained, and the average of each difference is calculated. The average value is brought into the subsequent algorithm as a fluctuation function for polynomial fitting to obtain the relationship between the wavelength and the measurement point. If the peak calibration fails, it is necessary to adjust the peak calibration software algorithm parameters and re-execute the peak calibration step. In this embodiment, if the peak calibration fails, the peak calibration algorithm parameters of the line spectrum confocal sensor are adjusted.

[0109] In the specific implementation, the calibration process generally moves at equal intervals, so if the peak calibration curve is a slanted straight line, the spacing test is considered successful, otherwise the spacing test is considered failed. Similarly, the width of the slanted straight line represents the size of the effective range segment. The calibration result is output and saved in the line spectrum confocal calibration device, and the calibration algorithm parameters are written into the line spectrum confocal sensor to start the subsequent test process.

[0110] In this embodiment, the optical path structure, optical signal, and collected data are calibrated multiple times to improve the stability and consistency of sensor measurement.

[0111] Based on the first embodiment of the above-mentioned line spectrum confocal calibration method, refer to Figure 6 , a third embodiment of the line spectrum confocal calibration method of the present invention is proposed.

[0112] In this embodiment, after step S50, the method further includes:

[0113] Controlling the calibration plate to move within the range of the line spectrum confocal sensor;

[0114] Receiving signals at both ends of the measuring range of the line spectrum confocal sensor, and generating actual movement values ​​of the calibration plate according to the signals at both ends of the measuring range of the line spectrum confocal sensor;

[0115] Comparing the actual value of the movement of the calibration plate with the measured value of the movement of the calibration plate measured by a laser interferometer;

[0116] It is determined whether the line spectrum confocal working range of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0117] It should be understood that the line spectrum confocal calibration device can directly control the calibration plate to move within the range of the line spectrum confocal sensor; or control the movement of the line spectrum confocal sensor to make the calibration plate move within the range of the line spectrum confocal sensor; or control the displacement module to move to drive the calibration plate to move within the range of the line spectrum confocal sensor; or other methods can be used to control the calibration plate to move within the range of the line spectrum confocal sensor, which is not limited in this embodiment. The signals at both ends of the range transmitted by the line spectrum confocal sensor are received as X1 and X2, then X2-X1=ΔX, ΔX is the line spectrum confocal working range, and the actual movement value of the calibration plate is generated according to the calculated line spectrum confocal working range. The motion measurement value of the calibration plate is measured by a laser interferometer, and the actual movement value is compared with the motion measurement value. If the difference between the two is within a certain range, it is determined that the line spectrum confocal working range of the line spectrum confocal sensor meets the calibration requirements.

[0118] Furthermore, in this embodiment, after judging whether the line spectrum confocal working range of the line spectrum confocal sensor meets the requirements according to the comparison result, the method further includes:

[0119] If the line spectrum confocal working range meets the calibration requirements, the current calibration plate position coordinates are obtained;

[0120] Calculating the actual working distance of the line spectrum confocal sensor according to the current calibration plate position coordinates and the received starting end signal of the line spectrum confocal sensor;

[0121] comparing the actual working distance with the measured working distance measured by the laser interferometer;

[0122] It is determined whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0123] It is understandable that the starting end of the signal received by the line spectrum confocal calibration device from the line spectrum confocal sensor is X1, and the position coordinate of the calibration plate is X0, then the working distance of the line spectrum confocal sensor is X1-X0. The measured working distance of the line spectrum confocal sensor is measured by the laser interferometer, and the actual working distance and the measured working distance are compared and referenced. If the difference between the two is within a certain range, it is determined that the working distance of the line spectrum confocal sensor meets the calibration requirements.

[0124] Furthermore, in this embodiment, after judging whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes:

[0125] If the working distance of the line spectrum confocal sensor meets the calibration requirements, measuring the number of working points of the line spectrum confocal sensor according to the peak calibration curve, and calculating the available line length according to the number of working points;

[0126] Determine whether the calibration requirements are met based on the available line length;

[0127] If the available line length meets the calibration requirements, a fitting curve between the calibration plate displacement and the wavelength is obtained;

[0128] Calculating an actual linearity error based on the fitting curve and the peak calibration curve;

[0129] comparing the actual linearity error with the measured linearity error measured by the laser interferometer;

[0130] It is determined whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

[0131] It should be noted that the peak calibration curve collected by the line spectrum confocal calibration device measures the number of working points of the line spectrum confocal sensor, and the available line length is calculated according to the measured number of working points, such as Figure 6 As shown, Figure 6 It is a line length test image, and whether it meets the calibration requirements is determined based on the line length test image.

[0132] In a specific implementation, it is also necessary to perform a linearity test on the line spectrum confocal sensor. The linearity error is the percentage of the maximum deviation between the peak calibration curve and the fitting curve of the line spectrum confocal sensor and the full-scale interval measurement value. The fitting curve is the data generated by the displacement process of the calibration plate measured by the line spectrum confocal sensor. Through the linearity test, the calibration result of the peak calibration can be verified and the sensor measurement resolution can also be tested. The actual linearity error is calculated based on the fitting curve and the peak calibration curve, and the measured linear error of the line spectrum confocal sensor is measured by the laser interferometer. The actual linearity error is compared with the measured linear error measured by the laser interferometer. If the difference between the two is within a certain range, it is determined that the linearity of the line spectrum confocal sensor meets the calibration requirements.

[0133] Furthermore, in this embodiment, after judging whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes:

[0134] If the linearity of the line spectrum confocal sensor meets the calibration requirements, a preset number of coordinate positions within the full range of the line spectrum confocal sensor are selected, continuous measurements are performed at the preset number of coordinate positions, and sensor measurement values ​​are output;

[0135] Calculating the actual repeatability of the line spectrum confocal sensor according to the sensor measurement value;

[0136] Comparing the actual repeatability with the measurement repeatability measured by a laser interferometer;

[0137] It is determined whether the repeatability of the line spectrum confocal sensor meets the calibration requirements based on the comparison result.

[0138] It should be understood that the repeatability test discretely or randomly selects a preset number of coordinate positions within the full range, and the preset number can be an empirical value, for example, the preset number is ten, and the ten coordinate positions are continuously measured for a period of time, and the sensor measurement values ​​within a period of time are output, such as Figure 7 As shown, Figure 7 This is the repeatability test curve. The fluctuation range of the measured value during this period is the repeatability of the sensor. The displacement platform motion value is compared with the laser interferometer measurement value. Output the test results, check the test data, and back up the test data.

[0139] In this embodiment, based on its own calibration parameters, the sensor performance parameters are verified through range test, working distance test, line length test, linearity test and repeatability test to ensure stable measurement of the sensor; a high-precision laser interferometer is used for comparison and reference to ensure the accuracy of the calibration and testing process.

[0140] In addition, refer to Figure 8 The embodiment of the present invention further provides a line spectrum confocal calibration device, the line spectrum confocal calibration device comprising:

[0141] The control module 10 is used to control the displacement module to move, so as to drive the calibration plate to be adjusted to within the range of the line spectrum confocal sensor to form a first sensor imaging image;

[0142] A light source fusion module 20 is used to extract pixels corresponding to bright lines in the image of the first sensor, and fuse the pixels to obtain a light source fusion image;

[0143] A judging module 30, configured to judge whether the light source fusion calibration is successful according to the light source fusion map;

[0144] An image processing module 40 is used to perform image processing on the light source fusion image to obtain a light source image if the light source fusion calibration is successful;

[0145] The calibration module 50 is used to perform line position calibration, peak value calibration and spacing test on the line spectrum confocal sensor according to the light source image to obtain a sensor calibration result.

[0146] Other embodiments or specific implementations of the line spectrum confocal calibration device of the present invention can refer to the above-mentioned method embodiments and will not be described in detail here.

[0147] In addition, an embodiment of the present invention further proposes a storage medium, on which a line spectrum confocal calibration program is stored. When the line spectrum confocal calibration program is executed by a processor, the steps of the line spectrum confocal calibration method described above are implemented.

[0148] In addition, refer to Fig. 9 The embodiment of the present invention further proposes a line spectrum confocal calibration system, the line spectrum confocal calibration system 100 comprising: a spectral confocal sensor 101, a laser interferometer 102, a calibration plate 103, and the line spectrum confocal calibration device 104 as described above.

[0149] It should be understood that the resolution, measurement frequency, linearity, repeatability and other indicators of the laser interferometer 102 all cover the parameters of the spectral confocal sensor 101. The calibration reference is compared with the line spectrum confocal to calibrate the calibration accuracy. The calibration plate 103 is installed with an optical plane mirror, a line spectrum confocal sensor 101 and a target of the laser interferometer 102. The line spectrum confocal calibration device 104 sends instructions to control the calibration plate 103, receives the measurement data of the laser interferometer 102, and collects and processes the calibration test data.

[0150] In a specific implementation, the appearance of the line spectrum confocal sensor is usually checked during calibration, such as Fig.10 As shown, the line spectrum confocal sensor is horizontally installed at the mechanical limit of the optical seismic isolation platform 105. The optical seismic isolation platform 105 can adopt international seismic isolation standards, high flatness, high stability, and meet the calibration requirements of the line spectrum confocal.

[0151] Furthermore, if Fig.10 As shown, the line spectrum confocal calibration system 100 further includes: a displacement module 106; the displacement module 106 is arranged on the calibration plate 103;

[0152] The line spectrum confocal calibration device 104 is used to control the movement of the displacement module 106 to drive the calibration plate 103 to be adjusted to within the range of the line spectrum confocal sensor 101, or to drive the calibration plate 103 to move at equal intervals within the spectrum range.

[0153] It is understandable that the displacement module 106 is usually a precision displacement module, such as a 0.1 micron high displacement precision voice coil motor motion module, with low friction, fast response speed, short setting time, micron-level straightness and flatness, covering and meeting calibration requirements.

[0154] Other embodiments or specific implementations of the line spectrum confocal calibration system of the present invention can refer to the above-mentioned method embodiments, which will not be described in detail here.

[0155] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or system including the element.

[0156] The serial numbers of the embodiments of the present invention are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. In a unit claim that lists several means, several of these means may be embodied by the same hardware item. The use of the words first, second, and third, etc. does not indicate any order and these words may be interpreted as identifiers.

[0157] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a storage medium (such as a read-only memory image (ROM) / random access memory (RAM), a magnetic disk, or an optical disk), and includes a number of instructions for a terminal device (which can be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the methods described in each embodiment of the present invention.

[0158] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A line spectrum confocal calibration method, characterized in that: The line spectrum confocal calibration method comprises the following steps: Adjusting the calibration plate to within the measuring range of the line spectrum confocal sensor, and collecting a first sensor imaging image formed by the line spectrum confocal sensor measuring the calibration plate; Extracting pixels corresponding to bright lines in the image of the first sensor, and fusing the pixels to obtain a light source fusion image; Judging whether the light source fusion calibration is successful according to the light source fusion graph; If the light source fusion calibration is successful, image processing is performed on the light source fusion image to obtain a light source image; According to the light source image, the line position calibration is performed on the line spectrum confocal sensor, and when the line position calibration is successful, the peak value calibration is performed on the line spectrum confocal sensor, and when the peak value calibration is successful, the spacing test is performed on the line spectrum confocal sensor to obtain a sensor calibration result.

2. The line spectrum confocal calibration method according to claim 1, characterized in that: According to the light source image, the line position of the line spectrum confocal sensor is calibrated, including: Fusing the signal of each measurement point in the light source image to obtain a light source signal; Calibrate the center position of the bright line according to the light source signal to obtain a line position calibration result; Whether the line position calibration is successful is determined according to the line position calibration result.

3. The line spectrum confocal calibration method according to claim 2, characterized in that: When the line position calibration is successful, peak calibration is performed on the line spectrum confocal sensor, including: If the line position calibration is successful, the calibration plate is controlled to move at equal intervals, and the position to which it is moved is used as a measurement point, and a second sensor imaging image formed by the line spectrum confocal sensor measuring the measurement point is collected; Constructing a polynomial fitting relationship between each of the measuring points and each peak value of each line in the image of the second sensor imaging, and obtaining a relationship between the wavelength and the measuring point; Outputting a peak calibration curve according to the relationship between the wavelength and the measurement point; Whether the peak calibration is successful is determined according to the peak calibration curve.

4. The line spectrum confocal calibration method according to claim 3, characterized in that: The step of constructing a polynomial fitting relationship between each of the measurement points and each peak value of each line in the image of the second sensor to obtain a relationship between the wavelength and the measurement point includes: Calculating the difference between each point on each line and the actual calibration position after multiple measurements of each line in the light source spectrum direction in the image of the second sensor imaging image, and calculating the average value according to the difference; According to the average value, a polynomial fitting relationship is constructed between each of the measurement points and each peak value of each line in the image of the second sensor imaging, so as to obtain a relationship between the wavelength and the measurement point.

5. The line spectrum confocal calibration method as claimed in claim 3 or 4, characterized in that: When the peak value calibration is successful, the spacing test is performed on the line spectrum confocal sensor to obtain the sensor calibration result, and further includes: Controlling the calibration plate to move within the range of the line spectrum confocal sensor; Receiving signals at both ends of the measuring range of the line spectrum confocal sensor, and generating actual movement values ​​of the calibration plate according to the signals at both ends of the measuring range of the line spectrum confocal sensor; Comparing the actual value of the movement of the calibration plate with the measured value of the movement of the calibration plate measured by a laser interferometer; It is determined whether the line spectrum confocal working range of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

6. The line spectrum confocal calibration method according to claim 5, characterized in that: After judging whether the line spectrum confocal working range of the line spectrum confocal sensor meets the requirements according to the comparison result, the method further includes: If the line spectrum confocal working range meets the calibration requirements, the current calibration plate position coordinates are obtained; Calculating the actual working distance of the line spectrum confocal sensor according to the current calibration plate position coordinates and the received starting end signal of the line spectrum confocal sensor; comparing the actual working distance with the measured working distance measured by the laser interferometer; It is determined whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

7. The line spectrum confocal calibration method according to claim 6, characterized in that: After judging whether the working distance of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes: If the working distance of the line spectrum confocal sensor meets the calibration requirements, measuring the number of working points of the line spectrum confocal sensor according to the peak calibration curve, and calculating the available line length according to the number of working points; Determine whether the calibration requirements are met based on the available line length; If the available line length meets the calibration requirements, a fitting curve between the calibration plate displacement and the wavelength is obtained; Calculating an actual linearity error based on the fitting curve and the peak calibration curve; comparing the actual linearity error with the measured linearity error measured by the laser interferometer; It is determined whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result.

8. The line spectrum confocal calibration method according to claim 7, characterized in that: After judging whether the linearity of the line spectrum confocal sensor meets the calibration requirements according to the comparison result, the method further includes: If the linearity of the line spectrum confocal sensor meets the calibration requirements, a preset number of coordinate positions within the full range of the line spectrum confocal sensor are selected, continuous measurements are performed at the preset number of coordinate positions, and sensor measurement values ​​are output; Calculating the actual repeatability of the line spectrum confocal sensor according to the sensor measurement value; Comparing the actual repeatability with the measurement repeatability measured by a laser interferometer; It is determined whether the repeatability of the line spectrum confocal sensor meets the calibration requirements based on the comparison result.

9. A line spectrum confocal calibration device, characterized in that: The line spectrum confocal calibration device comprises: A control module, used for controlling the displacement module to move, so as to drive the calibration plate to be adjusted to within the range of the line spectrum confocal sensor, so as to form a first sensor imaging image; A light source fusion module, used for extracting pixels corresponding to bright lines in the image of the first sensor, and fusing the pixels to obtain a light source fusion image; A judgment module, used for judging whether the light source fusion calibration is successful according to the light source fusion map; An image processing module, configured to perform image processing on the light source fusion image to obtain a light source image if the light source fusion calibration is successful; The calibration module is used to perform line position calibration on the line spectrum confocal sensor according to the light source image, perform peak calibration on the line spectrum confocal sensor when the line position calibration is successful, and perform spacing test on the line spectrum confocal sensor when the peak calibration is successful to obtain a sensor calibration result.

10. A line spectrum confocal calibration device, characterized in that: The line spectrum confocal calibration device includes: a memory, a processor, and a line spectrum confocal calibration program stored in the memory and executable on the processor. When the line spectrum confocal calibration program is executed by the processor, the steps of the line spectrum confocal calibration method as described in any one of claims 1 to 8 are implemented.

11. A storage medium, characterized in that: The storage medium stores a line spectrum confocal calibration program, and when the line spectrum confocal calibration program is executed by the processor, the steps of the line spectrum confocal calibration method according to any one of claims 1 to 8 are implemented.

12. A line spectrum confocal calibration system, characterized in that: The line spectral confocal calibration system comprises: a spectral confocal sensor, a laser interferometer, a calibration plate, and the line spectral confocal calibration device as claimed in claim 10.

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